S URFACE ENGINEERING 3
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SURFACE ENGINEERING 3 Atomic Layer Deposition (ALD) Technology: Innovative Layer-by-Layer Design of New Materials, State-of-the-Art Surface Engineering & Nanostructuring
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S URFACE ENGINEERING 3. Atomic Layer Deposition (ALD) Technology: Innovative Layer-by-Layer Design of New Materials, State-of-the-Art Surface Engineering & Nanostructuring. Comparison of the coating processes. Pri n cipal sc h em e of ALD. Advantages of ALD (1). Advantages of ALD ( 2 ). - PowerPoint PPT Presentation
Transcript of S URFACE ENGINEERING 3
SURFACE ENGINEERING 3
Atomic Layer Deposition (ALD) Technology:Innovative Layer-by-Layer Design of New Materials,
State-of-the-Art Surface Engineering & Nanostructuring
Comparison of the coating processes
Principal scheme of ALD
Advantages of ALD (1)
Advantages of ALD (2)
Schematic representation of ALD reactor
Typical films
MLD (Molecular Layer Deposition)