Refurbishment Program - MKS · Refurbishment Program RF Power Generators ... All refurbished...
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Refurbishment Program RF Power Generators Safeguard your investment in MKS RF Power Generators with our certified Refurbishment Program. MKS factory-certified technicians complete a comprehensive refurbishment and test process developed by the original product design engineers to ensure that your RF Power Generators are operating at peak performance and will continue to do so for years to come. All refurbished generators are backed by a full one-year warranty to ensure you have the best ownership experience. Trust the original manufacturer with the care and maintenance of your MKS RF Power Generators. Trust MKS. Our Commitment MKS highly skilled engineers and technicians who understand your process and requirements keep your equipment up and running—ensuring your success. • Only MKS original parts used for all repairs • Trained technicians use current, proven methods and techniques • All repairs qualified on an MKS-designed test stand • 1-year warranty • Returned unit is screened thoroughly by our repair technicians for both operational and physical condition. • Unit serial number is checked against the MKS manufacturing database to determine which relevant service bulletins and software/hardware reliability improvements are applicable. • Customer-specific settings cleared and factory default parameters loaded. Customer-specific parameters or programs are captured and stored for upload at the completion of the refurbishment. • Proactive replacement of high risk of failure parts based on our repair database. Any additional faulty parts are also replaced. • Chassis and cover cleaned, touched up, or repainted as needed. • A comprehensive set of diagnostic, functional, and quality checks, as well as an extended burn-in are performed to ensure that the generator is operating like new. • Comprehensive test report. Scope of Work
Transcript of Refurbishment Program - MKS · Refurbishment Program RF Power Generators ... All refurbished...
Refurbishment ProgramRF Power Generators
Safeguard your investment in MKS RF Power Generators with our certified Refurbishment Program. MKS factory-certified technicians complete a comprehensive refurbishment and test process developed by the original product design engineers to ensure that your RF Power Generators are operating at peak performance and will continue to do so for years to come.
All refurbished generators are backed by a full one-year warranty to ensure you have the best ownership experience. Trust the original manufacturer with the care and maintenance of your MKS RF Power Generators. Trust MKS.
Our Commitment MKS highly skilled engineers and technicians who understand your process and requirements keep your equipment up and running—ensuring your success.
• Only MKS original parts used for all repairs
• Trained technicians use current, proven methods and techniques
• All repairs qualified on an MKS-designed test stand
• 1-year warranty
• Returned unit is screened thoroughly by our repair technicians for both operational and physical condition.
• Unit serial number is checked against the MKS manufacturing database to determine which relevant service bulletins and software/hardware reliability improvements are applicable.
• Customer-specific settings cleared and factory default parameters loaded. Customer-specific parameters or programs are captured and stored for upload at the completion of the refurbishment.
• Proactive replacement of high risk of failure parts based on our repair database. Any additional faulty parts are also replaced.
• Chassis and cover cleaned, touched up, or repainted as needed.
• A comprehensive set of diagnostic, functional, and quality checks, as well as an extended burn-in are performed to ensure that the generator is operating like new.
• Comprehensive test report.
Scope of Work
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RF Power Generators Refurbish _06/19 ©2019 MKS Instruments, Inc.
MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.
Specifications are subject to change without notice. mksinst™ is a trademark and NOVA®, Optima®, and Spectrum® are registered trademarks
of MKS Instruments, Inc., Andover, MA.
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Qualifying Products
MKS offers comprehensive refurbishment services to improve the reliability and longevity of the following RF Generator models:
• ACG RF Power Generator
• GHW RF Plasma Generator
• MWD Impedance Matching Network
• NOVA® RF Plasma Generator
• OEM RF Power Generator
• Spectrum® RF Plasma Generator
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