Raman Spectroscopy for the Analysis of Thin CuInS Films€¦ · damentals of Raman spectroscopy...
Transcript of Raman Spectroscopy for the Analysis of Thin CuInS Films€¦ · damentals of Raman spectroscopy...
Raman Spectroscopy for the
Analysis of Thin CuInS2 Films
von
Dipl.-Phys. Thomas Riedle
aus Wendlingen
Der Fakultat II (Mathematik und Naturwissenschaften)
der Technischen Universitat Berlin
zur Verleihung des akademischen Grades
D o k t o r d e r N a t u r w i s s e n s c h a f t
vorgelegte Dissertation
Berlin 2002
D 83
Arbeit eingereicht am: 14. Marz 2002
Promotionsausschuß:
Vorsitzender: Prof. Dr. Erwin Sedlmayr
Berichter: Prof. Dr. W. Richter
Prof. Dr. M. Ch. Lux-Steiner (FU-Berlin)
Prof. Dr. Ch. Thomsen
Tag der mundlichen Prufung: 14. Mai 2002
II
Kurzreferat
Dunne CuInS2 Filme werden als Absorbermaterial fur Solarzellen verwendet. Im
Rahmen dieser Arbeit wurden die Filme innerhalb weniger Minuten durch reaktives
Anlassen von Cu-In Metall-Vorlauferschichten in H2S-Gas hergestellt. Zum ersten Mal
wurde dafur ein schneller thermischer Prozess verwendet. Raman-Spektroskopie wurde
fur die Analyse der CuInS2 Filme eingesetzt.
Die phononischen Eigenschaften der CuInS2 Filme sind abhangig vom [Cu]/[In]
Verhaltnis, das fur die Reaktion angeboten wird. Fur [Cu]/[In] < 1 zeigen sich neben
den bekannten Phononen des Chalkopyrit-Gitters zusatzliche Moden bei 305 cm−1 und
60 cm−1. Diese Phononen werden auch fur Filme beobachtet, die durch reaktives An-
lassen kupferreicher Vorlauferschichten ([Cu]/[In] > 1) in H2S im Temperaturbereich
375 C - 475 C entstehen. Durch polarisationsabhangige Raman Messungen konnte
gezeigt werden, dass die Mode bei 305 cm−1 von einer symmetrischen Schwingung (A1)
stammt. Fur die zusatzlichen Moden ist eine polymorphe Struktur des Chalkopyritgit-
ters, die sogenannte CuAu-Ordnung, verantwortlich. Dies konnte anhand gruppentheo-
retischer Betrachtungen und Berechnung der Phononenfrequenzen fur das CuAu-Gitter
belegt werden.
Mittels kombinierter Raman- und Rontgenbeugungsanalysen konnte die Reaktions-
kinetik untersucht werden. Chalkopyrit- und CuAu-geordnete Strukturen entstehen
aus der Vorlauferschicht bereits in der fruhen Aufheizphase, wobei die CuAu-Ordnung
bevorzugt wird. Der Anteil an CuAu-Ordnung nimmt bei weiterer Temperatur-
erhohung ab und verschwindet schließlich. Das uberschussige Kupfer bildet Cu9S5
und CuS an der Oberflache. Diese binaren Cu-S Phasen konnen durch chemisches
Atzen restlos entfernt werden.
Solarzellen auf Basis der hergestellten CuInS2 Schichten wurden anhand von Strom-
Spannungs-Kennlinien in Abhangigkeit der Herstellungsparameter charakterisiert. Es
konnte gezeigt werden, dass Konversionsverluste in den Solarzellen mit dem Auftreten
von CuAu-geordneten Domanen verbunden sind. Durch reaktives Anlassen von se-
quentiell aufgedampften Cu-In Schichten in H2S bei 525 C fur 5 Minuten konnten
einphasige CuInS2-Chalkopyritfilme hoher kristalliner Qualitat prapariert werden. Auf
Basis dieser Filme wurden Solarzellen mit bis zu 11 % Wirkungsgrad hergestellt. Der
verwendete Aufbau fur die Raman-Messungen zusammen mit den Daten dieser Arbeit
kann fur die ex-situ Qualitatskontrolle von CuInS2-Absorber Filme genutzt werden.
Daruber hinaus sind die Grundlagen fur die Entwicklung eines Raman-Aufbaus fur die
in-situ Kontrolle des CuInS2-Wachstums gelegt.
III
Eidesstattliche Erklarung
Hiermit erklare ich an Eides Statt, daß ich bei der Anfertigung dieser Arbeit keine
anderen als die angegebenen Hilfsmittel benutzt habe. Die Dissertation ist bis auf die
gekennzeichneten Teile noch nicht veroffentlicht worden.
Ich habe weder fruher noch gleichzeitig ein Promotionsverfahren bei einem anderen
Fachbereich bew. einer anderen Hochschule beantragt.
Thomas Riedle
Berlin, den 14. Marz 2002
IV
To Iva and Kaja
V
VI
Contents
1 Material Properties 3
1.1 Structural Properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.1.1 Polymorphous Structures . . . . . . . . . . . . . . . . . . . . . . 5
1.1.2 Brillouin-Zone . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.2 Electronic Properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.2.1 Crystal field splitting . . . . . . . . . . . . . . . . . . . . . . . . 10
1.2.2 Optical Properties . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.2.3 Exciton properties . . . . . . . . . . . . . . . . . . . . . . . . . 14
1.3 Vibrational properties . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
1.4 Phase Equilibria . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
1.4.1 Cu-In System . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
1.4.2 Cu2S-In2S3 Phases . . . . . . . . . . . . . . . . . . . . . . . . . 18
2 Experimental procedures 20
2.1 Solar Cells Based on CuInS2 . . . . . . . . . . . . . . . . . . . . . . . . 21
2.1.1 Absorber Preparation . . . . . . . . . . . . . . . . . . . . . . . . 22
2.2 Raman Spectroscopy . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
2.2.1 Macroscopic Theory of Inelastic Light Scattering by Phonons . . 24
2.2.2 Raman Tensor and Selection Rules . . . . . . . . . . . . . . . . 25
2.2.3 Microscopic Theory of Raman Scattering . . . . . . . . . . . . . 26
2.2.4 Experimental Setup for Raman Scattering . . . . . . . . . . . . 27
3 Raman Spectroscopy of Thin CuInS2-Films 29
3.1 Laser Induced Defects . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
3.2 Lateral Inhomogeneities of Polycrystalline CuInS2 Films . . . . . . . . 31
3.3 Resonant Raman Scattering . . . . . . . . . . . . . . . . . . . . . . . . 33
3.3.1 Raman Scattering at Excitation Energies above the Fundamental
Gap . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
4 Non-Chalcopyrite Phonon Modes in CuInS2 37
4.1 Observation of CuAu Order and Theoretical Considerations . . . . . . 38
VII
VIII
4.1.1 Observation of Non-Chalcopyrite Phonon Modes . . . . . . . . . 38
4.1.2 Raman Selection Rules . . . . . . . . . . . . . . . . . . . . . . . 39
4.1.3 Group Theoretical Analysis . . . . . . . . . . . . . . . . . . . . 40
4.1.4 Lattice Dynamics of the CuInS2 - CuAu Structure . . . . . . . . 44
4.2 Dependence on Stoichiometry . . . . . . . . . . . . . . . . . . . . . . . 46
5 Reactive Annealing in H2S 51
5.1 Dependence on Sulfurization Temperature: Phonon Modes for the Ab-
sorber Front Side . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
5.2 Dependence on Sulfurization Temperature: Phonon Modes for the Ab-
sorber Back Side . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
5.3 Surface Segregation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
5.4 Phase Formation by H2S . . . . . . . . . . . . . . . . . . . . . . . . . . 61
5.5 Photovoltaic Performance: Dependence on Morphology and Structure . 62
6 Summary 67
A CuS Phase Diagram 68
Introduction
There is a strong demand for renewable energies due to the limited availability of fossil
and nuclear fuels and due to growing environmental problems. Photovoltaic energy
conversion has the potential to contribute significantly to the electrical energy gen-
eration in the future [1]. Currently, the cost for photovoltaic systems is one of the
main obstacles preventing production and application on a large scale. A substantial
decrease in production costs for modules, and therefore in overall system cost, is ex-
pected from the development of thin film solar cells. This is the background for the
strong research interest in materials suitable for thin film solar cells like amorphous
silicon, CdTe and Cu(In,Ga)Se2 [2].
Conversion efficiencies of solar cells based on I-III-VI2 chalcopyrite compounds have
been substantially improved over the last years. Polycrystalline solar cells with a
Cu(In,Ga)Se2 absorber reached recently up to 18.8 % [3].
CuInS2 is a Se-free compound from the chalcopyrite family suitable for solar cells due
to its high optical absorption and the direct band gap at 1.5 eV. In principle, solar cells
based on sulfur chalcopyrites like CuInS2 have the same potential for high efficiencies
as those based on selenium chalcopyrites. The development of CuInS2 is attractive,
because the problematic selenium is substituted by the non-toxic sulfur. The open cir-
cuit voltage of CuInS2 solar cells can theoretically be higher (1.2 V) than the voltage of
Cu(In,Ga)Se2 cells. At the same time photo current is lower. This is advantageous for
the serial connection of multiple cells in a module. CuInS2 films can be fabricated in
a fast and robust process granting high throughput in an industrial process. However,
the efficiency of CuInS2 solar cells is up to now limited by the open circuit voltage
which is far below the theoretical value. The best reported conversion efficiency for
polycrystalline CuInS2 cells is 12.7 % up to now [4, 5].
From a technological point of view, fast processes are desirable for high production
output. Rapid thermal processing (RTP) systems equipped with halogen lamp arrays
were successfully applied for the synthesis of CuInSe2 films [6, 7]. Annealing of Cu-
In precursors in a H2S RTP system has been established in this work. The provided
tight control of process parameters was exploited for systematic variations. Vibrational
properties of the absorber structure were studied in dependence on the process para-
meters.
1
2
A lot of research has been carried out on chalcopyrite materials since the early seven-
ties and there are numerous reports about their vibrational properties [8]. However,
information on CuInS2 is limited. Most of the authors [9, 10, 11] studied CuInS2 single
crystal prepared under thermodynamical equilibrium conditions for the determination
of fundamental vibrations. Just a few authors [12, 13] reported on polycrystalline thin
films for solar cell applications which are usually prepared under non-equilibrium con-
ditions. This work focuses on the vibrational properties of of such films.
This thesis is organized as follows: In Chapter 1, the known structural, electronic and
vibrational properties of CuInS2 were compiled from literature data.
In Chapter 2, experimental procedures are described. The design of a CuInS2 solar
cell, preparation procedures and a description of the RTP system will be given. Fun-
damentals of Raman spectroscopy necessary for the interpretation of the experimental
data will be introduced followed by a description of the used setup. Most spectra in
this work were recorded by means of the micro-Raman technique for lateral resolution
and higher laser power density.
The laser light irradiated onto the sample for Raman spectroscopy may alter chemical
or structural properties. The upper limit of the laser power density for non-destructive
measurements has been determined and will be given in Chapter 3. The consequences
of the polycrystalline character of the films on Raman shift and peak width will be
discussed on basis of a Raman map.
Enhancement in Raman scattering intensities can be observed by tuning the incident
laser to resonate with a electronic transition. This is known as resonant Raman scat-
tering. A narrow resonance curve for CuInS2 films at excitation energies close to the
band gap will be presented. It will be shown that the incident photons are in resonance
with bound excitons close to the band edge.
A report about the simultaneous observation of chalcopyrite and non-chalcopyrite
phonon modes will be given in Chapter 4. The non-chalcopyrite mode at 305 cm−1 is
A1-symmetric according to the polarisation depend Raman measurements. The non-
chalcopyrite phonon modes can be attributed to CuAu-ordered CuInS2. It will be
shown that results from group theoretical analysis and phonon frequency calculations
performed in this work are in agreement with the presented experimental results.
CuInS2 phase formation by reactive annealing of Cu-rich precursors in H2S gas is the
subject of Chapter 5. Intermediate phases and surface segregations were identified by a
combination of Raman and X-ray diffraction measurements. The dependence of solar
cell efficiencies on the morphology and the crystal structure of CuInS2 films will be
discussed. It will be demonstrated how high quality single phase CuInS2 chalcopyrite
films can be derived from evaporated Cu-rich precursor films by choosing optimized
H2S annealing conditions.
Chapter 1
Material Properties
For this thesis the structural properties of thin CuInS2 layers were analyzed by Raman
spectroscopy. In the course of the work the existence of a new phase of CuInS2 was
proven. In this chapter, an introduction to structural and electronic properties of this
material will be provided as a basis for the interpretation of the experimentell results.
CuInS2 belongs to the family of I-III-VI2 chalcopyrite compounds. The members of
this family are related to each other by their chalcopyrite crystal structure. A variety of
different electronic properties, i.e. band gaps, result from the elements which build the
compound. Throughout research history on this class of materials a lot of fundamental
insights were derived by comparative studies [14]. Comparing the band gaps of Cu-
III-VI2 chalcopyrites with other I-III-VI2 compounds gave valuable hints about the
electronic contributions of Cu 3d orbitals to the valence band of Cu-III-VI2 materials.
The structural properties of CuInS2 will be introduced in Section 1.1 by discussing the
chalcopyrite structure. This will be followed by stability studies performed by Wei et
al. [15] predicting the occurence of a CuAu ordered phase in CuInS2. Subsequently
the Brillouin-zone of the chalcopyrite lattice will be presented for the discussion of the
electronic properties.
The electronic properties of CuInS2 will be discussed in this chapter, not only in view
of its photovoltaic application. The Raman scattering process is indirect, involving
virtual or real electronic transitions. The results from resonant Raman measurements
in this work were explained by taking the related electronic transitions into account.
The relation between the structural properties of chalcopyrites and the band gap will
be considered in Section 1.2. The effect of the crystal electric field on chalcopyrites and
especially on CuInS2 will be outlined thereafter. The band structure of CuInS2 and
possible band-band transitions will be discussed on the given basis. Subsequently, the
luminescence spectrum of CuInS2 single crystals will be reviewed. Special emphasis
was given on the excitonic properties of the material as an exciton was involved in
resonant Raman scattering at energies close to the band gap.
Finally, known vibrational properties of CuInS2 were collected from the literature and
3
4 Chapter 1. Material Properties
will be provided in Section 1.3. More details will be added throughout this thesis.
1.1 Structural Properties
There are 36 known ternary AIBIIICV I2 chalcopyrite semiconductors where A=Cu,Ag,
B=Al,Ga,In,Ti and C=S,Se,Te. The chalcopyrite structure can be systematically con-
structed starting from a cubic face centered structure. By arranging two units along
a diagonal line trough the cubes and shifting them, in terms of the basis vectors by
(a/4,a/4,a/4) the diamond structure is obtained. The zinc-blende structure can be de-
rived by occupying the (001) planes in the diamond structure with two different sorts
of atoms as depicted in Figure 1.1a.
(b) Chalcopyrite
A B CE F
(a) Zinc-blende
x
y
z
ab
c
Figure 1.1: (a) Zinc-blende unit cell, space group T2d. (b) Chalcopyrite unit cell, space
group D122d.
Finally, the chalcopyrite structure can be obtained by doubling the zinc-blende
structure along the z-axis and filling the lattice sites according to the following: The
anions remain at their stites and every second (001) plane is occupied by cations as
shown in Figure 1.1b. In consequence, each C anion is coordinated by two A and two
B cations and each cation is tetrahedrally coordinated by four anions.
The observed structural features from real chalcopyrite compounds are slightly
different from those obtained theoretically from this construction rules. The unique
properties of the chalcopyrites are related to three differences with respect to the
zinc-blende structure: First, there are two cation sublattices rather than one, leading
1.1. Structural Properties 5
to the existence of two basic chemical bonds A-C and B-C, with generally unequal
bond lengths RAC 6= RBC . Second, the unit cell is tetragonally distorted with a
distortion parameter η = c/2a 6= 1. Third, the anions are displaced from the ideal
tetrahedral site u0 = 1/4 by an amount u in direction of the x-axis. The structural and
electronic properties of the chalcopyrites are governed by the added structural (η, u)
and chemical (A 6= B) degrees of freedom relative to their binary analogs [16]. Struc-
tural and optical properties of selected chalcopyrite materials are compiled in Table 1.3.
1.1.1 Polymorphous Structures
Many solids with the same composition can appear in different crystal structures un-
der different thermodynamical conditions. This phenomenon is referred to as poly-
morphism [17]. A set of polytypes of the chalcopyrite structure was theoretically
constructed such that the electron counting rule is obeyed. Formation energies and
band structure of CuInSe2 and CuInS2 polytypes were determined by first-principles
calculations by Wei et al. [18, 15]. It was shown that the CuAu-like ordered structure
is the most possible to occur. It is referred to as the CuAu-like structure in analogy to
the structure of CuAu mixed crystals [17]. An illustration is given in Figure 1.2.
The anion sublattice is conserved in the CuAu structure and the cation order is
A B C
Chalcopyrite CuAu
ab
c
Figure 1.2: The chalcopyrite unit cell and the polymorphous CuAu-structure [15].
changed such that the A2B2 coordination is conserved. The unit cell of the CuAu-
6 Chapter 1. Material Properties
ordered structure is given in Figure 1.3. The lattice type is primitiv tetragonal and
Figure 1.3: Unit cell of the CuAu-like chalcopyrite polytype.
the corresponding space group is P 4m2 [19]. The Wyckoff positions are given in Table
1.1. There is one type A-atom, one type B-atom and two type C-atoms in the unit
cell. The corresponding sites are c,a and g.
Table 1.1: Multiplicity, Wyckoff letter, site symmetry and positions of the atoms in
the CuAu-like structure [20].
Multiplicity Wyckoff Symmetry Coordinates
letter
2 g 2mm 0, 12, 1
412, 0,−1
4
1 c 4m2 12, 1
2, 1
2
1 a 4m2 0,0,0
An exceeding small formation energy difference ∆Eform = −1.95 meV/atom was
found between chalcopyrite and CuAu like phases of CuInS2. Similar results were
found for CuInSe2 where ∆Eform = −2.05 meV/atom. The coexistence of CuAu-like
phases in nominally chalcopyrite CuInS2 and CuInSe2 was predicted. In contrast, for
CuGaSe2 ∆Eform = −9.05 meV/atom was found. The CuAu-like phase is therefore
less likely for CuGaSe2.
Band gap energies are affected by the transition from chalcopyrite (CH) to poly-
morphous structures. Calculations resulted in EG(CH) − EG(CuAu) = 30 meV for
CuInS2 and in EG(CH) − EG(CuAu) = 46 meV for CuInSe2 [15]. The small dif-
ferences suggest that formation of polytypes in this compounds has little effect on
1.1. Structural Properties 7
their electrical and optical properties. The situation is different for CuGaSe2 were
EG(CH) − EG(CuAu) = 232 meV was found. A larger effect was expected for this
compound.
1.1.2 Brillouin-Zone
The electronic band structure of semiconductors is given in k-space. The Brillouin
zone of chalcopyrites is presented here for the later discussion of the band structure.
The Brillouin zone and its relationship to that of the zinc-blende is given in Figure 1.4.
The corresponding primitive cell contains eight atoms (2·I-III-VI2) instead two found
in zinc blende. Consequently the Brillouin zone reduces its volume by a factor 4. Sets
of four different wavevectors of the original zinc-blende Brillouin zone fold into a single
point of the four times smaller chalcopyrite Brillouin zone. The three main symmetry
points and their origins in zinc-blende are summerized in Table 1.2.
TD
G
TD
kZ
GX
NL
TX
kX
GW
NS
TX kY
GW
Figure 1.4: Brillouin zone of chalcopyrite (CH) and its relationship to that of zinc-
blende (ZB). The dotted polyhedra show the ZB reciprocal-space regions that
fold into the CH Brillouin zone. Symmetry points are labeled AB, where A
and B refer to the CH and ZB symmetries, respectively [21].
8 Chapter 1. Material Properties
Table 1.2: Symmetry points of the chalcopyrite (CH) Brillouin zone and their origins
in the zinc-blende (ZB) zone [21].
CH-symmetry point Related symmetry point in zinc-blende
Γ(000) Γ(000) X(002) W(201) W(021)
T(001) ∆(001) ∆(001) X(200) X(020)
N(110) L(111) L(111)∑
(110)∑
(110)
1.2 Electronic Properties
The band-gap of I-III-VI2 chalcopyrites is controlled by two factors. First, there is a
pure structural factor due to the existence of a displacement from the ideal tetrahedral
site u0 = 1/4. This parameter controls the band gap in the system. Even a small
increase in u from its ideal zinc-blende value leads to a substantial ionic polarization of
the bonds and consequently to a dramatic increase in the band gap [22]. This can be
verified by inspection of Table 1.3 where u is listed together with the band gap energies
of some Cu-III-VI2 compounds.
Table 1.3: Values of the cubic lattice constants a and c, the tetragonal distortion
parameter η=c/2a, the anion displacement parameter u and the observed
lowest band gaps at T = 300 K [16], [22].
Ternary a=b c η u EG
(A) (A) (eV)
CuAlS2 5.334 10.444 0.979 0.275 3.49
CuGaS2 5.356 10.433 0.974 0.275 2.43
CuInS2 5.523 11.118 1.0065 0.214 1.53
CuAlSe2 5.602 10.946 0.977 0.269 2.71
CuGaSe2 5.614 11.032 0.9825 0.250 1.68
CuInSe2 5.784 11.614 1.004 0.224 1.04
The second factor is a electronic one. For the Cu-III-VI2 compounds a great influ-
ence of the novel atom 3d states on the valence band was found. These states hybridize
with the p states of the group VI elements. As the d states are found in the upper half
of the valence band they are partly responsible for the reduction of the band gap.
A schematic band structure of CuInS2 and the contributions of the atomic orbitals is
given in Figure 1.5.
1.2. Electronic Properties 9
~17 eV
~12 eV
~7 eV
~5 eV
0 eV
-1,5 eV
-EB.v
1
2
3
Conduction Band
Optical Gap
Upper Valence Band
In 4d
S 4s
In 4p
S 3p
Cu 3d
S 3p
S 3p
In 5s
T NG
Figure 1.5: Schematic band structure of CuInS2. The contributions of the atomic en-
ergy levels are indicated on the right. Shades areas denote the major sub-
bands, and boxed numbers mark the three internal gaps [16].
The valence band is separated in two parts. There is the upper valence band
reaching 5 eV and a lower part at 7 eV. Cu 3d and S 3p orbitals from the Cu-S bond
contribute to the upper valence band whereas S 3p and In 4p from the In-S bond form
the lower valence band. At around 12 eV a band is built from the S 4s states and
a small band is set up by the In 4d orbits. S 3p and In 5s orbits contribute to the
conduction band [16]. A more detailed band structure will be discussed in Section
1.2.2.
10 Chapter 1. Material Properties
1.2.1 Crystal field splitting
The symmetry of an atom in free space will be reduced when it is placed in a crystalline
environment. The potential of the crystal causes a lifting of the degeneracies of the
atomic energy levels which become split by the crystal electric field. The crystal field
acts on the orbits of the electrons and will split the degeneracy of the free atom.
The influence of the tetrahedral field on the valence band energies of I-III-VI2 com-
pounds can be explained in a simple model given in Figure 1.6. The degenerate energy
Free
atoms
Spin-
orbit
Tetrahedral
field
cE
Ev
1
+
s6
8
7
7
8
8
15
15
12
p
d
G
G
G
G
G
GG
G
G
G
Figure 1.6: Scheme of the expected energy levels of valence band states in a tetrahedral
field [23].
eigen-values of the orbital states are drawn on the left hand side. The model does
not take into account the intermixing of p and d states in the valence band. Thus the
effect of the crystal field given in this scheme is legal only for the separated orbital
wave functions. However, the principles can be discussed within this sketch. The up-
permost p-levels of the valence band are depicted. In a tetrahedral field and due to
the spin-orbit coupling the p-levels will split in two levels (Γ8, Γ7) and the d-levels into
three levels (Γ7, Γ8, Γ8). The intermixing of p and d orbits causes two effects. First,
the uppermost Γ15 levels will be raised to higher energies. In consequence the band-
gap will be reduced. Second, the spin-orbit splitting of the uppermost valence bands
will be reduced, because the negative spin-orbit parameter (Γ8 − Γ7 splitting) of the
d-levels partially cancels the positive spin-orbit parameter of p-levels. The correlation
of the effects was used to estimate the degree of p-d hybridization from the spin-orbit
splitting of the uppermost valence bands. For CuInS2 and CuGaS2 a contribution of
45 % and 36 % respectively, of d-like states was found [24].
From all members of the the I-III-S2 family, spin-orbit splitting was solely reported for
CuInS2. The splitting was -20 meV. Furthermore it is the only I-III-VI2 chalcopyrite
which was not subject to crystal field splitting.
1.2. Electronic Properties 11
1.2.2 Optical Properties
The optical properties of a semiconductor are closely linked to its electronic band
structure. Therefore the band structure of I-III-VI2 chalcopyrites will be discussed.
It was calculated for Cu-based ternary semiconductors within the density-functional
formalism [16] taking into account the p-d hybrids of the valence band and the struc-
tural peculiarities discussed in Section 1.1. A generic band structure for Cu-III-VI2chalcopyrites is given in Figure 1.7.
T G N
G3
G2
G1
G5
G5
T + T3 4
T5
T5
T + T1 2
E(X )G
G4
E( X)G
E'( X)G N1
N1
N1
Energ
y(e
V)
VB
CB
-2
0
2
4
Figure 1.7: Band structure of CuInS2. Dashed and solid arrows represent optical tran-
sitions allowed in E ‖ c and E ⊥ c, respectively [21].
Critical point parameters of optical transitions can be derived by analysis of the
dielectric function ε(ω). In general, the electronic and optical properties of semiconduc-
tors are not isotropic. Therefore the dielectric function is given as complex second-rank
tensor and its components must be determined for different polarizations of the incident
light [25]. The features observed in ε(ω) are usually correlated to interband transitions
at high symmetry points in the band structure. Such measurements and analysis were
performed by Alonso et al. [21]. The measured real and imaginary parts of ε(ω) are
reproduced in Figure 1.8.
12 Chapter 1. Material Properties
3
4
5
6
7
8
9
<ε 2>
E c E || c
<ε 1>
Energy (eV)
1 2 3 4 5
1
2
3
4
5
6
7
Γ
∆Γ
E2
E( X)
E(X )
E1(A)
E( X)
E0
E c E || c
104
105
106
E c
E || c
Pe
ne
tra
tio
n d
ep
th L
(n
m)
Energy (eV)
Ab
so
rpti
on
a (
1/c
m)
1 2 3 4 5 610
100
E c
E || c
Figure 1.8: On the left: Real and imaginary parts of the complex dielectric function
of CuInS2 for normal and perpendicular laser light incidence [21]. On the
right: Absorption coefficients and penetration depth calculated from ε2.
1.2. Electronic Properties 13
The identified optical transitions, their energies and polarizations are compiled in
Table 1.4. The letters A and B in brackets denote the different energies being found
Table 1.4: Main optical transitions energies (in eV) and their polarizations above the
fundamental edge in CuInS2.aRef. [26] (77 K). b Ref. [21] (300 K).
Label E‖c E⊥c
E0(A) 1.530b 1.530b
E0(B) - 1.530b
E(ΓX) 2.75(8)b
3.099a 3.087a
E1(A) 3.27(1)b 3.27(5)b
3.427a 3.246a
E(XΓ) 3.6(1)b 3.5(1)b
3.655a 3.669a
E(∆X)
E1(B) 3.94(5)b 3.9(1)b
4.053a 4.091a
E’(ΓX) 4.4(1)b 4.4(2)b
E2(A) 4.8(1)b 4.7(1)b
5.038a
E2(B) 5.09(3)b 5.05(3)b
5.033a
due to crystal field splitting. The expected difference between E0(A) and E0(B) of
20 meV was not observed, but this was attributed to the limited resolving power of
the spectrograph. Two letters in brackets indicate the high symmetry point in the
Brillouin zone and its origin in the Brillouin zone of zinc-blende (compare with Figure
1.4). From symmetry considerations it is known that that the transition E0(B) is
forbidden in E ‖ c polarization, but allowed in E ⊥ c.
Information about the absorption coefficient α and the penetration depth L of light
in the material can be derived from the dielectric function. First, the refractive index
n and the extinction coefficient κ were calculated from the relation
n(ω) = n + iκ =√
ε1(ω) + iε2(ω) (1.1)
where n is the complex refractive index. The absorption coefficient is given by
α =4πκ
λ0
(1.2)
14 Chapter 1. Material Properties
and the intensity of the light in a given depth x was calculated using the law of Lambert-
Beer [25]:
I(x) = I(0)e−αx. (1.3)
The depth in which 1/e of the initial light intensity I(0) remains is called the penetration
depth L and is given by 1/α. The penetration depth is plotted as a function of the
photon energy in Figure 1.8. The value is 100 nm for the green laser line (2.43 eV).
The absorption coefficient in the visible spectrum of the light is about 105 cm−1.
1.2.3 Exciton properties
Resonant Raman scattering from CuInS2 was performed in this work and the results
will be presented in Chapter 1. A narrow resonance curve for the A1-phonon mode
was found for energies close to the fundamental band gap. For the explanation of the
resonance behaviour the involvement of excitons was discussed. Luminescence spectra
of CuInS2 and the occurence of excitons therein were reviewed for this purpose.
Free excitons are electron-hole pairs which are weakly bound by the attractive Coulomb
interaction. They can be described in the hydrogen model [27]:
Eexz(n) =µ e4
8 ε2h2
1
n2(n = 1, 2, 3...) (1.4)
1
µ=
1
me
+1
mh
where me and mh are the reduced electron and hole mass, respectively.
The discrete energy states Eexz(n) for CuInS2 were calculated from literature values
[28, 29, 24], using me = 0.16 m0, mh = 1.3 m0, ε = 11ε0:
Eexz(n) = 19.51
n2meV (1.5)
In contrast, bound excitons are localized to charged centers and their binding energy
is higher than the binding energy of the free excitons [27].
The low-temperature photoluminescence spectrum of a CuInS2 single crystals is shown
in Figure 1.9.
1.3. Vibrational properties 15
~~~~
Re
lati
ve
Em
iss
ion
Inte
ns
ity
CuInS2
1.40 1.45 1.50 1.52 1.53 1.54
Photon Energy (eV)
Wavelength (nm)
900 880 860 840 820 810 540 520 500 500 495
2.30 2.40 2.48 2.50 2.52
~~~~
Re
lati
ve
Em
iss
ion
Inte
ns
ity
Photon Energy (eV)
Wavelength (nm)
CuGaS2
2 K 2 K
E=
1.5
35
eV
ex
z
E=
2.5
03
eV
ex
z
Figure 1.9: Photoluminescence spectrum of a CuInS2 single crystals recorded at 2 K
[30].
The sharp line at 1.535 eV was attributed to the decay of free excitons with
the hole belonging to the uppermost valence band. The band gap of CuInS2 at
2K was 1.555 eV. Thus the binding energy of the free exciton was Eexz = 20 meV.
This is in accordance with the value calculated from the hydrogen model in (1.5).
The other sharp lines in the spectra are excitons bound to impurities or defects.
A broad luminescence band was observed at the low energy side of the spectra. It
was attributed to donar-acceptor transitions as the peaks shift systematically with
increasing excitation intensities [31].
1.3 Vibrational properties
There are only a small number of publications on the vibrational properties of CuInS2.
The first report on some of the high frequency modes was given by Koschel [9] in 1975.
The same author performed further measurements and added low frequency data in
the same year [10]. All modes predicted by group theory (refer to Section 4.1.3) were
observed by Koschel, besides the three B1 modes. Until today there are no reports
about this three modes. This might be attributed to a weak electron-phonon coupling
expressed in small off-diagonal elements d in the Raman tensor for the B1-mode (refer
to Table 2.2.2). Data, consistent with those from Koschel, were provided by Bacewicz
[11]. An elaborated review of the literature data for the vibrational frequencies of 14
16 Chapter 1. Material Properties
chalcogenides was recently published by Ohrendorf und Hausler [8].
Mode assignments performed in this work will thus refer to the frequencies compiled
in Table 1.5. As the bondings in CuInS2 are highly ionic LO-TO splitting due to the
Frohlich interaction [25] was observed for the B2 and E modes.
Table 1.5: Symmetry and vibrational frequencies of CuInS2 phonon modes [10].
Asterisks indicate modes which are measured at T = 78 K.
Symmetry Frequency Symmetry Frequency
(cm−1) (cm−1)
A1 294∗ E1TO 321
B11 n.o. E2
TO 295
B21 n.o. E3
TO 244
B31 n.o. E4
TO 140∗
B12 TO 323 E5
TO 88∗
B22 TO 234 E6
TO 67∗
B32 TO 79∗ E1
LO 339
B12 LO 352 E2
LO 314
B22 LO 266 E3
LO 260
B32 LO 79∗ E4
LO 140∗
E5LO 88∗
E6LO 67∗
1.4. Phase Equilibria 17
1.4 Phase Equilibria
Thin polycrystalline CuInS2 layers can be prepared by a variety of methods. The most
important are the physical coevaporation of the elements in a vacuum system [37] and
the two stage sequential process. In the latter, copper and indium are sequentially
deposited by sputtering or evaporation. In a second stage the metal stack is sulfurized
by conventional thermal processing (CTP) either in elemental sulfur [38] or in H2S [39].
In this work a new method of sulfurization was established, the reactive annealing by
rapid thermal processing (RTP) in H2S. The CuInS2 phase formation during the H2S-
RTP process will be discussed in Chapter 5.4 with respect to the experimentell results
of this work. For this purpose the ternary (Cu-In-S)-phase diagram will be considered
here. Thereafter, the Cu-In and Cu2S-In2S3 tie lines will be reviewed.
A schematic ternary (Cu-In-S)-phase diagram is given in Figure 1.10a. For the sake of
clarity only binary phases on the Cu2S-In2S3 and CuS-InS intersections are depicted.
Besides CuInS2 only one more ternary phase CuIn5S8 in spinel structure was observed
in the (Cu-In-S)-system [40].
Cu
S
Cu S2
CuS InS
In S2 3
CuInS2
CuIn S5 8
In
Figure 1.10: a) Phase diagram of the (Cu-In-S)-system. In the schematic representa-
tion only solid state phases on the Cu2S-In2S3 and CuS-InS intersection
are depicted.
1.4.1 Cu-In System
The Cu-In phase diagram is given in Figure 1.11. The stable phases at room
temperature are Cu, Cu7In3 (δ phase), Cu16In9 (η phase), CuIn2 and In. CuIn2 was
not drawn into the phase diagram, because of uncertainties about the stability range
of the alloy. But it is known that CuIn2 forms below room temperature and is stable
up to 148 C [41]. The melting point of In is 156 C while Cu11In9 is stable up to 307C. Cu16In9 (η phase) undergoes a phase transition to the η’ phase between 307 C
18 Chapter 1. Material Properties
and 389 C.
Figure 1.11: Cu-In binary phase diagram [42].
The given phase diagram is valid for bulk materials prepared under thermal equi-
librium conditions. The Cu-In phase formation in thin films was studied by several
authors, but no additional phases were reported for this films [43, 44, 45].
At room temperature the alloy formation is governed by Cu diffusion into In, whereas
grain boundary diffusion of In into the Cu-layer is the dominant transport mechanism
above T = 150 C [46].
1.4.2 Cu2S-In2S3 Phases
The phase diagram of the binary system Cu2S-In2S3 is given in Figure 1.12. All com-
pounds occurring in this system are summarized in Table 1.6.
Two semiconducting phases CuInS2 and CuIn5S8 appear in the diagram. CuInS2
exists in three modifications, up to 980 C in the chalcopyrite structure, between 980C and 1045 C in the zincblende structure and above 1045 C up to the melting
point at 1090 C in a still unknown structure, possibly wurtzite [40]. The second
semiconductor, CuIn5S8 has the spinel structure over the whole temperature range of
20 C to the melting point at 1085 C.
1.4. Phase Equilibria 19
Figure 1.12: Phase diagram of the (Cu-In-S)-system along the Cu2S-In2S3 tie line
[40]. The single phase regions are indicated by their respective symbol.
The two phase regions, which lie in between the single phase regions are
not indicated.
Table 1.6: Compounds occurring in the system Cu2S-In2S3 with their different modifi-
cations and transition temperatures [40].
Compound Modification Transition
temperature (C)
Cu2S α1 tetragonal 104
α2 hexagonal 450
α cubic 1125 (m.p)
CuInS2 γ chalcopyrite 980
δ zincblende 1045
ξ wurtzite 1090 (m.p.)
CuIn5S8 ε spinel 1085 (m.p.)
In2S3 η1 defect-spinel superstructure 420
η2 defect-spinel-structure 755
η layered structure 1090 (m.p.)
Chapter 2
Experimental procedures
The experimental work performed for this thesis focused on preparation as well as on
structural analysis. Rapid thermal processing in H2S gas was established as a novel
method for sulfurization of Cu-In metal stacks in order to obtain high quality CuInS2
absorber films for efficient solar cells. The unique feature of this process is the well
controlled film growth. Exploiting this feature, vibrational properties of CuInS2 films
were analyzed by Raman spectroscopy in dependence on the H2S sulfurization param-
eters.
In this chapter the preparation techniques will be described. The structure of a het-
erojunction solar cell based on a thin CuInS2 absorber film will be presented, followed
by a brief summary of process steps used for cell fabrication. The preparation of the
absorber will be explained more detailed. The one step simultaneous evaporation pro-
cedure and the two step sequential process will be presented. The sequential process
requires an sulfurization step to transform the metallic precursors in CuInS2. An out-
line of the RTP system for reactive annealing in H2S and its features will be given.
Raman spectroscopy will be the subject of the second part of this chapter. Fundamen-
tals of inelastic light scattering will be considered from the macroscopic and microscopic
view. The experimental setup will be presented and its features will be discussed.
20
2.1. Solar Cells Based on CuInS2 21
2.1 Solar Cells Based on CuInS2
Thin film solar cells can be prepared by the use of the high absorbing CuInS2 chal-
copyrite. The typical device structure is shown in Figure 2.1.
Light
(Ni : Al) 1 m
(ZnO : Al) 500 nm
CdS 30 - 80 nm
2CuInS 3 m
Molybdenum 1 m
Soda lime 2 mmglass
p-type
n-type
Figure 2.1: Structure of a thin film
CuInS2 solar cell.
Conventional soda lime glass serves as device substrate. The molybdenum film
is used as back contact. The light is absorbed by the p-type CuInS2. Due to the
high absorption coefficient of CuInS2 sun light is completely absorbed within the three
microns. The heterojunction is completed by a thin n-type CdS buffer layer and a
n/n+-type ZnO bilayer. The band gaps of CdS and ZnO are 2.4 eV [47] and 3.2 eV
[48], respectively. The combination of both is referred to as the ”window” because it
is almost transparent for the sun light. A Ni/Al front grid is used as front contact for
laboratory small scale devices. An overview on processing steps for the preparation of
the above introduced CuInS2 solar cells is given here:
The substrate glass is chemically cleaned and dried in a hot air stream in order to re-
move contaminations from the surface [49]. The molybdenum back contact is deposited
by e-gun evaporation onto heated substrates (approx. 400 C) or by DC-sputtering onto
a heated substrate.
There are two important physical methods for the preparation of absorber films, simul-
taneos thermal evaporation of the elements (coevaporation) and sequential evaporation
followed by a sulfurization step. Whenever a metal ratio [Cu]/[In]>1 is offered for the
reaction with sulfur species, binary copper sulfides segregate at the surface of the ab-
sorber films. Highly selective KCN etching solution is used to remove the segregation.
For the deposition of the CBD-CdS buffer layer, CuInS2 films are immersed into an
aqueous solution from NH3, Cd(CH2COO)2 and NH2-CS-NH2 at 60 C for 7 min fol-
lowed by rinsing with deionized water [50]. Finally, the ZnO window layer is grown by
22 Chapter 2. Experimental procedures
RF sputtering. First, a 100 nm thick undoped i-ZnO is deposited followed by a 400 nm
Al doped n+-ZnO layer. The Ni/Al front grids are deposited by e-gun evaporation.
2.1.1 Absorber Preparation
There are a variety of chemical [51] and physical methods [37, 38] for the preparation
of thin CuInS2 films. Device grade materials were up to now exclusively obtained from
the two physical methods: Simultaneous evaporation of the elements and sequential
evaporation of the metals followed by a sulfurization step. A schematic representation
of a vacuum system for simultaneous evaporation is given in Figure 2.2 on the left.
The elements are evaporated from Knudsen cells at 1280 C for Cu, 920 C for In and
S
Cu InSub-strate
Cu InS
Substrate heating
Substrate
Knudsen-cells
a)
b)
Substrate
holder
Substrates
X-tal
balance
Cu-source In-source
Figure 2.2: (Left:) Schematic representation of a vacuum system for the preparation
of thin CuInS2 films by simultaneous evaportation of the elements. (a) Side
view (b) top view. Absorber layers with varying cation ratio can be prepared
in such a system by taking advantage of the displaced evaporation cells.
(Right:) Sketch of a vacuum system used for the sequential evaporation of
the metals. The substrates were rotated for homogeneous deposition.
220 C for S. The substrate temperature is 550 C - 600 C. The spatial configuration
of the evaporation cells opens up the possibility to prepare absorber layers with lateral
varying stoichiometry. Such layers were used in this work to study the effects of varying
stoichiometry on CuInS2 phonon modes.
The sequential preparation process requires an additional sulfurization step in another
vacuum system. For precursor preparation a layer of Cu is deposited on the Glass/Mo
2.1. Solar Cells Based on CuInS2 23
substrate. Subsequently a In layer was added. A sketch of the used vacuum system
is given in Figure 2.2 on the right. The metals are evaporated from electrical heated
tungsten boats. Mass flow is controlled by X-tal balances in a servo loop. Shutter were
used for defined start and stop of the deposition (not drawn). The substrates were
rotated for homogeneous deposition.
The chemical reaction of thin Cu-In films with H2S occurs on a time scale of seconds
[52]. In order to gain more control over reaction kinetics, it is necessary to apply
fast sulfurization processes. From a technological point of view, fast processes are
desirable for high throughput. Laser annealing of elemental precursors was applied
for the synthesis of thin CuInSe2 films [53], but later works concentrated on rapid
thermal processes [7, 6]. Those systems were equipped with halogen lamp arrays. In
the system used for this work, samples can be heated up to 550 C within 0.5 min
by the heat radiation due to their low thermal mass whereas the reactor walls remain
cool. A schematic view is given in Figure 2.3. The temperature at the sample holder
5 % H S in Ar2
Bus
Pyrometer
MFC1 MFC2
N2
Lamp arraySamples
Thermo couple
Sample transfer
Figure 2.3: Schematic view of the used rapid thermal procesing (RTP) system with
mass flow controllers (MFC).
is measured by a pyrometer and by a thermo couple below 200 C. Temperature is
adjusted by a closed servo loop. Contamination of the reactor is avoided by several N2
purge and evacuation cycles prior to sulfurization. Gas flows were kept constant using
mass flow and pressure controllers. CuInS2 films for this work were grown maintaining
a constant gas flow of typically 500 sccm of 5 vol% H2S in Ar during sulfurization
reaction. The total pressure within the reaction chamber was kept at 500 mbar. When
24 Chapter 2. Experimental procedures
the desired pressure and gas flows were reached, the precursors were heated up to the
preset sulfurization temperature. Heat ramp ∆ T/∆ t can be set as high as 18 C /
sec. Sulfurization time tsulf = 0 refers to the moment when the preset temperature
Tsulf is attained.
2.2 Raman Spectroscopy
In this section fundamentals of inelastic light scattering will be provided. The intention
is to give in brief important concepts of the theory necessary for the interpretation of
the experimental data rather than a comprehensive presentation of Raman scattering.
For the latter a series of textbooks and articles are available [54], [55]. At the end of
the chapter a description of the Raman setup used for this work is provided.
2.2.1 Macroscopic Theory of Inelastic Light Scattering by
Phonons
The interaction of light from the visible spectrum with the solid is intermediate by
the polarizability of the valence electrons. When a electromagnetic field E is present
in the medium, the polarization P will be induced:
P = ε0 χ∼ E. (2.1)
The periodic variation in P is responsible for the emission of a wave which is the
inelastic scattered wave. Within the framework of classical electrodynamics the
scattered light can be described as the oscillation of an ensemble of dipoles. The
Raman scattering intensity can thus be expressed by the dipole radiation intensity
using the transition susceptibility χ∼ :
Is = Iiω4
sV
(4πεε0)2c4|es χ
∼ ei|2 (2.2)
where Ii,s and ei,s denote intensity and polarization unit vector of incident and scattered
light, and V is the scattering volume. The modulation of the susceptibility in general
is caused by collective excitations, i.e. fluctuations in electron density or deflection
of atom cores from their idle states. Phonons can be described as periodic lattice
deformations:
Q = Q0 cos[Ω(q)t]. (2.3)
Expanding χ∼ in a Taylor series and writing the first two terms results in :
χ∼ = χ
∼0 + (∂ χ
∼ /∂Q)Q + ... (2.4)
2.2. Raman Spectroscopy 25
Describing the incident light wave as
E = E0 cos ωit. (2.5)
the polarization (2.1) can be rewritten with (2.4) and (2.5):
P = ε0 χ∼
0E0 cos ωit + ε0
∂ χ∼
∂QQ0 E0 cos [Ω(q)t] cos ωit
= ε0 χ∼
0E0 cos ωit +1
2ε0
∂ χ∼
∂QQ0 E0 cos[ωi + Ω(q)] t + cos[ωi − Ω(q)] t.(2.6)
The first term in (2.6) corresponds to the elastic scattered part of the stray light.
The side bands with frequencies ωi ± Ω expressed in the second term correspond to
the inelastic scattered part. The processes are referred to as Rayleigh- and Raman-
scattering, respectively. The side band with lower frequency is known as Stokes-line
and the one with higher frequency as Anti-Stokes-line.
2.2.2 Raman Tensor and Selection Rules
The first term in (2.4) corresponds to elastic Rayleigh scattering, the second one de-
scribes one-phonon scattering processes. Higher terms in the expansion originate from
one or more phonon amplitudes. The partial derivatives in (2.4) constitute the Raman
polarisability, often termed as Raman tensor R∼ . For a first order one-phonon Raman
process, R∼ is given by the complex second rank tensor
R∼ =
∂ χ∼
∂QQ(ω0) (2.7)
where Q(ω0) is the unit vector of the displacement Q of a given atom. The Raman
scattering intensity
Is ∼| ei · R∼ · es |2 . (2.8)
depends on the polarization of the incident and scattered radiation. By measuring the
dependence of the scattering intensity on the incident and scattered polarization one
can deduce the symmetry of the corresponding Raman active phonon. Symmetries of
the medium and of the vibrations involved in the scattering impose requirements on
the Raman tensor. The result of these symmetry requirements is that the scattered
radiation vanishes for certain choices of the polarisation ei and es and scattering ge-
ometries. This are the so-called Raman selection rules.
The scattering geometry is specified by four vectors ki,ks, ei and es. These four vectors
define the scattering configuration usually represented as ki(ei, es)ks which is known
as the Porto notation.
26 Chapter 2. Experimental procedures
A compilation of Raman tensors for the 32 crystallographic point groups are presented
in [58]. The Raman tensors for the chalcopyrite lattice are given in Table 2.1.
Table 2.1: Raman tensors and their symmetries for the point group D2d [58].
A1 B1 B2 E, x E, ya 0 0
0 a 0
0 0 b
d 0 0
0 −d 0
0 0 0
0 e 0
e 0 0
0 0 0
0 0 f
0 0 0
g 0 0
0 0 0
0 0 f
0 g 0
2.2.3 Microscopic Theory of Raman Scattering
Light scattering can also be described within quantum mechanical theory. The Raman
process can be virtually decomposed into three electronic transitions [54]:
• the electronic transition from the ground state |0〉 to an excited state |a〉: creation
of an electron-hole pair due to the absorption of a photon with the energy hωi.
• the electron-lattice interaction, i.e. the electronic transition from |a〉 to |a′〉 under
creation or annihilation of a phonon with hωs.
• the transitition from |a′〉 to the ground state |0〉: recombination of the electron-
hole pair under emission of a photon hωs.
For the combination of these processes the third-order pertubation theory yields as the
dominant term for the Raman scattering probability for a given phonon mode
Pph(ωi) ≈ (2π
h)
∣∣∣∣∣〈0|p(ωs)|a′〉〈a′|He−ph|a〉〈a|p(ωi)|0〉(Ea′ − hωs)(Ea − hωi)
+ c
∣∣∣∣∣2
(2.9)
where p(ωi) and p(ωs) are vector components of the dipole operators of the scattered
and incident light, He−ph is the electron-phonon interaction Hamiltonian and c a con-
stant. Ea is the energy of the intermediate state i.e. of an exciton.
Resonant Raman Scattering
If the energy of the incident photons come close to the energy of excited electronic
states in the medium the generation or annihilation of electron-hole pairs increases
dramatically. In consequence an enhanced Raman scattering intensity is observed.
2.2. Raman Spectroscopy 27
This expressed by the denominator in (2.9). The difference between hωi and hωs is
equal to the phonon energy and is usually small compared with electronic energies.
Whenever (Ea − hωi) is small (Ea′ − hωs) will also be small. Thus in (2.9) there are
two resonant denominators. The case Ea = hωi is referred to as an incoming resonance
while Ea′ = hωs is an outgoing resonance.
The intermediate state |a〉 has a finite lifetime τa due to radiative and nonradiative
decay processes. To take account of this fact Ea was expressed by a complex energy
Ea− iΓa, where Γa is the damping constant related to τa by Γa = h/τa. If the resonant
state Ea is a discrete state i.e. an exciton and is well separated from other intermediate
states, the Raman scattering probability can be rewritten as:
Pph(ωi) ≈ (2π
h)
∣∣∣∣∣ 〈0|p(ωs)|a′〉〈a′|He−ph|a〉〈a|p(ωi)|0〉(Ea′ − hωs − iΓa′)(Ea − hωi − iΓa)
∣∣∣∣∣2
. (2.10)
2.2.4 Experimental Setup for Raman Scattering
In Figure 2.4 an outline of the Raman scattering setup used in this work is given. An
Ar+-ion and a Kr+-ion laser were available. For the filtering of the non lasing plasma
emission lines a laser line filter was used for the green 514.5 nm line of the Ar+-ion
laser. The filtering for other wavelengths was achieved by a prism. It was adjusted
such that only the laser line could pass a diaphragm whereas other wavelengths were
refracted out of the optical path. The polarisation of the light was varied with a Fresnel
rhombus. The laser beam was focused onto the sample by the lens of a microscope.
Using a short focal distance lens for so called micro-Raman measurements offers certain
advantages: Scattered light is collected from a large solid angle. This results in an
enhanced sensitivity of the setup. As the light is focused on a spot only 1-2 µm in
diameter spatially resolved measurements can be performed. On the other hand, the
high power density can result in damages of the chemical or structural properties of
the sample.
A single lens is used for focusing the laser onto the sample and collecting the scat-
tered light. This geometry is called backscattering configuration. Other configurations
are possible as well [54]. The light is focused by a lens system onto the entrance slit of
the monochromator. A polarisation analyser was used to define the entrance plane.
Usually the scattered light is 4-6 orders of magnitude weaker than the elastically scat-
tered light. At the same time the difference in frequency between the Raman signal
and the laser light is only about 1 % of the laser frequency [25]. In order to detect this
small sidebands a good spectral resolving power and an excellent stray light rejection
ratio is required.
The Dilor xy-800 Raman spectrometer used for this work was equiped with a double
monochromator for high efficient stray light reduction. In the first monochromator
(M1) the incident light was dispersed. The exit slit was set such that the spectral
28 Chapter 2. Experimental procedures
Figure 2.4: Raman scattering setup with light source und triple monochromator con-
sisting of a subtractive double monochromator (M1, M2) for effective stray
light reduction and a third monochromator (M3) for the spectral dispersion
[54].
components containing the laser frequency was cut of by the edge of the slit. This
configuration is called the subtractive mode. The spectral separation was reversed by
the second stage (M2) and focused on the entrance slit of the third monochromator
(M3). All of them were equipped with a holographic gratings of 1800 lines/mm. The
spectrum was focused on a CCD camera cooled by liquid nitrogen to reduce the ther-
mal noise. Resolution of the setup depends on the laser frequency. Using the green line
(514.5 nm) of the Ar+-ion laser, an interval of 550 cm−1 was reproduced on 733 diodes
of the camera. This corresponds to 0.75 cm−1 per detector element. The FWHM of
a spectral plasma line was determined to 1.6 cm−1 when the slit was set to 100 µm.
This is the resolution of the setup for the given parameters.
Chapter 3
Raman Spectroscopy of Thin
CuInS2-Films
It will be shown in this work that Raman spectroscopy is a powerful tool for the
analysis of thin CuInS2 films. Choosing appropriate measuring conditions, it is a
destruction-free method, thus the analyzed layers are subsequently available for further
characterization and/or the preparation of solar cells. In order to avoid any damage to
the chemical or structural properties, the power density of the laser must not exceed a
certain threshold. This threshold was determined for CuInS2 layers in Section 3.1.
Due to the polycrystalline character of the absorber films vibrational properties may
vary laterally. This was studied with the micro-Raman technique and a Raman map
will be presented in Section 3.2. It will be shown that the morphology of the absorber
is reflected in the Raman map.
Resonant Raman scattering at fundamental band gap energies was performed using a
tunable laser. The scattering cross section contains information about the electron-
phonon interaction involved in the process. The resonance curves of CuInS2-films were
determined and will be presented in Section 3.3. The occurrence and the width of the
resonance curves were highly dependent on the crystal quality of the layers. Narrow
resonance curves were observed from high quality layers. The involvement of a free
exciton responsible for the increase in scattering intensity will be discussed. It will be
concluded that resonant Raman spectroscopy of is a sensible tool for the determination
of CuInS2 crystal quality.
Dependency of the Raman cross section on photon energies above the fundamental
band gap will be discussed in the last section of this chapter.
29
30 Chapter 3. Raman Spectroscopy of Thin CuInS2-Films
3.1 Laser Induced Defects
Most Raman measurements performed in this work were carried out on a micro-Raman
setup. This technique offers a number of advantages over a macro setup (see Section
2.2.4). The incident laser light is focused within a spot of 2 µm in diameter on the
sample by a short focal distance lens. In this manner a high power density is achieved.
Moreover, the scattered light is collected from a large solid angle. In summary an
enhanced sensitivity of the setup is realized. On the other hand the high power density
can damage the chemical or structural properties of the material. This is especially
crucial for CuInS2 as the absorption coefficient of the material is very high (see Section
1.2.2) and local heating by the laser light is expected. Non-destructive heating of the
layer causes a shift in phonon frequencies and broadening of line widths. Both changes
are functions of the temperature and the changes are reversible. Lattice or chemical
damages may be indicated by the same changes in the spectral features, but they are
not reversible. This difference can be exploited to determine whether the laser induced
a non-destructive thermal effect or damaged the layer.
In order to find the critical power density, from which on damages will be observed, a
series of measurements with increasing laser power was performed. First, the CuInS2
film was irradiated by the laser for 10 minutes with the power density in question.
Down cooling of the irradiated spot was made possible during a break of 15 minutes.
Then, all spectra were recorded at a moderate power density Plaser = 4 kW/cm2.
Each measurement was performed on a different, previously non-irradiated spot on the
sample. The A1-phonon mode of two spectra of the series is given on the left panel in
Figure 3.1.
3.2. Lateral Inhomogeneities of Polycrystalline CuInS2 Films 31
270 280 290 300 310
1
0
After laser irradiation with
Plaser
= 4 kW/cm2
Plaser
= 40 kW/cm2
Nor
mal
ized
Int
ensi
ty
Raman Shift (cm-1)
0 10 20 30 40289,0
289,5
290,0
290,5
291,0
291,5
292,0
292,5
293,0
Intensity
Ram
an I
nten
sity
(ct
s /
mW
⋅min
)
FWHM
FW
HM
(cm
-1)
Ram
an S
hift
(cm
-1)
Power Density (kW/cm2)
6,0
6,5
7,0
7,5
8,0
8,5Threshold
RamanShift
16
20
24
28
32
36
40
44
Figure 3.1: Study of laser induced structural defects. A polycrystalline CuInS2 film was
irradiated with varying laser power densities (4 -40 kW/cm2, λ=514.5 nm).
After a cooling down break Raman spectra were recorded with moderate laser
power density. (Left:) A1 phonon mode recorded after laser irradiation with
Plaser=4 and 40 kW/cm2, respectively. (Right:) Development of the shift in
phonon frequency, FWHM and scattering intensity over the power density
of the laser treatment.
After laser irradiation with Plaser=40 kW/cm2, an increase in peak position at
2.3 cm−1 and a difference in the full width at half maximum (FWHM) of 2.7 cm−1
was observed. This was clearly indicating a damage to the layer. This values were
evaluated for every A1-mode from all the spectra. They are shown on the right panel
in Figure 3.1 in dependency on the laser irradiation. No changes were observed up to
16 kW/cm2. Then scattering intensity started to decrease, line widths was broadening
and the phonon mode started to shift towards lower frequencies. In view of this results
all the measurements presented in this work were recorded with laser intensities around
8 kW/cm2 (λ = 514.5 nm) or less.
3.2 Lateral Inhomogeneities of Polycrystalline
CuInS2 Films
The information derived from micro-Raman measurements are local information as the
laser spot is about 2 µm in diameter. This corresponds to the size of the crystallites
which are about 2-3 µm. Lateral inhomogeneities and local defects may be reflected in
micro-Raman spectra taken from different spots on the sample. Therefore comparison
of a single spectrum with another one from the same or another sample is only valid
32 Chapter 3. Raman Spectroscopy of Thin CuInS2-Films
within certain limits. Lateral variations in Raman data will be the discussed in this
Section.
The grains of the absorber layer may contain dislocations which divide the grain into
small undistorted domains. Such domains increase the Raman mode frequencies and
give rise to broadening of the Raman lines accompanied by a decrease in scattering
intensity [59]. A decrease in the scattering intensity can also be caused by the surface
roughness of the sample. Parts of the incident light can be back scattered from tilt
planes within the laser spot area. This parts may be not collected resulting in sub-
stantial changes in the scattering intensity. However, only scattering intensities are
affected whereas the spectral position of the lines and the FWHM are conserved.
A single phase CuInS2 film was mounted on a manually driven xy-stage which is part
of the microscope used for focusing the laser and collecting the scattered light (see
Section 2.2.4). As the microscope was equipped with a crosshair, it was possible to
control the manipulation of the stage position in the micron range. A central spot was
chosen on the surface and spectra were recorded from matrix points within a 10x10 µm
square. As the A1-mode of CuInS2 is the most intense mode it was analyzed for each
spot. Scattering intensity and full width at half maximum (FWHM) were encoded in
a color scheme ranging from black to white. The matrix is depicted in Figure 3.2.
Figure 3.2: (Right:) Raman frequency mapping of the A1-phonon mode, (middle:)
scattering intensity and (left:) full width at half maximum. The sample
was a single phase polycrystalline CuInS2 absorber layer.
Different scattering intensities and FWHM-values were obtained from adjacent
spots. By comparing the two matrices a correlation of the FWHM-values and the
scattering intensities can be recognized even the correlation is not perfect. This might
3.3. Resonant Raman Scattering 33
be due to additional variations in the scattering intensity caused by the surface rough-
ness as explained above.
It can be concluded that local variations in measures taken from the Raman spectra
are governed by the polycrystalline character of the layer. The maximum variations
from a single randomly chosen spot in comparison with another spot on the same sam-
ple was ± 0.5 cm−1 and ± 2.5 cm−1 for the Raman shift and FWHM, repectively.
When calculating the mean value and the standard deviation for data from 5 spots the
standard deviation was 0.2 cm−1 for the Raman Shift and 0.9 cm−1 for the FWHM.
Measurements for this work were therefore taken from at least three up to five different
spots on the sample and mean values were calculated.
3.3 Resonant Raman Scattering
Raman scattering intensity is a function of the excitation energy as was shown in Sec-
tion 2.2.3. An increase in intensity can be observed at energies close to the band gap
where the joint density of states is high. The resonance behaviour of polycrystalline
CuInS2 samples was studied and will be the subject of this section.
Absorber layers used for the resonant Raman experiments were prepared by the se-
quential process. The metal atom ratios of the precursors were [Cu]/[In]=1.2 and
[Cu]/[In]=0.8. The stacks were etched after sulfurization (Tsulf=525 C, tsulf=10 min).
It will be shown later that this procedure results in stoichiometric CuInS2 layers in case
of Cu-rich precursors. Defect rich absorbers are expected in the case of Cu-poor pre-
cursors. For the resonant Raman measurements another setup than the one presented
in Chapter 2.4 was used. The second setup was equipped with a tunable Ti:sapphir
laser pumped by the 514.5 nm line of an Ar+ ion laser. A convex lens was used to
focus the laser light onto an area of 100 µm in diameter onto the sample. Considering
the size of the light spot, the setup must be termed as a macro-setup. Overall laser
power on the sample was 20 mW, resulting in 255 W/cm2 power density in the laser
focus.
Raman spectra and the intensity of the A1-phonon mode versus excitation energy of
a Cu-rich prepared sample are shown in Figure 3.3. Maximum enhancement was ob-
served at 1.506 eV. The ratio of the lowest A1-phonon mode intensity at Eex=1.580
eV to the maximum mode intensity at Eex=1.506 eV was 3.6. No other features were
observed in the spectra besides the A1 mode. In contrast, for the Cu-poor sample no
resonance behaviour was observed. Only a weak structure at the position of the A1-
mode was present. The count rate of the signal was just little above the background
noise and disappeared completely below 1.5 eV.
The sharp resonance curve of CuInS2 can be explained by the involvement of bound
exciton states at the band edge (refer to Section 1.2.3). The band gap at 300 K is 1.535
eV [14]. The free exciton was found 20 meV below the band gap at 1.515 eV and a
34 Chapter 3. Raman Spectroscopy of Thin CuInS2-Films
240 260 280 300 320 340
200
291 cm-1
A1
Eex = 1.501 eVEex = 1.494 eVEex = 1.490 eVEex = 1.473 eV
Inte
nsity
(ct
s / m
W*m
in)
Raman Shift (cm-1)
780 790 800 810 820 830 840 850
2
4
6
8
10
Excitation Energy (eV)
Inte
ns
ity
(C
ts /
mW
*min
)Excitation W avelength (nm)
1.58 1.56 1.54 1.52 1.50 1.48 1.46
2
4
6
8
10
Figure 3.3: (Right:) Raman spectra of a Cu-rich prepared CuInS2 sample at different
excitation energies recorded at room temperature and (Left:) Intensity of
the A1-mode of over excitation energy. The dashed line is a fit to the data
points using equation (3.1).
bound excitons at 1.500 eV (Section 1.2.3). A single resonance peak was found thus
the dependence of the Raman cross section σi on excitation energy due to an incoming
resonance can be described by using equation (2.9)
σi∼=
α
(Ea − hωi)2 + Γ2a
(3.1)
where Ea and Γa are energy and damping constant of an intermediate state, respec-
tively, and α is a constant. The term hωi is the energy of the incident photons. Data
points in Figure 3.3 were fitted using equation (3.1). The damping constant corre-
sponds to the half width at full maximum (HWFM) and was determined from the fit
to be Γa = 22 meV.
Wakita et al. observed a strong enhancement of the Raman modes from a CuInS2
single crystal [60]. The FWHM of the resonance curve there was 3 meV at 9 K. The
resonance was attributed to a bound exciton at 1.525 eV. The energy shift of the
bound exciton was assumed to be in the order of the shift in band gap energy when
temperature is increasing from 9 K to room temperature. The band gap energy shift is
∆EG= -20 meV [14]. Additionally, the binding energy of the excitons can vary slightly,
depending on the typ of defect they are bound to. Taking this facts into account, the
results are quit in accordance. The broader resonance curve found for the polycrys-
talline samples can be attributed to the higher level of defects of this material. In
consequence the resonance curve is broadening. This interpretation is supported by
3.3. Resonant Raman Scattering 35
the fact that no resonance behaviour was found for the Cu-poor sample were the defect
density is much higher than in Cu-rich samples [31]. Alvarez et al. [61] observed a
similar behaviour from polycrystalline CuInS2 samples prepared by coevaporation. He
found an enhancement of the A1-mode by a factor 4 and the maximum of the resonance
curve was at 1.47±0.02 eV which is in agreement with the results presented here for
the samples prepared by the sequential process. Alvarez found no resonance behaviour
from Cu-poor samples, too, and attributed this finding to the poor crystal quality of
the those samples.
Summarizing the own results and the reports from the literature, it can be established
that the resonance effect is changing dramatically with the crystal quality of the layer.
They range of the effect spans the absence of any resonance in the case of Cu-poor
polycrystalline CuInS2 films up to extremely narrow resonance curves observed for sin-
gle crystals. Therefore the resonance behaviour is a sensitive indicator for the crystal
quality of of CuInS2 films.
3.3.1 Raman Scattering at Excitation Energies above the Fun-
damental Gap
Raman scattering intensities above the fundamental band gap depend mainly on the
electronic density of states for interband transitions. The measured scattering intensi-
ties depend additionally on the sensitivity of the Raman setup in use for a given wave-
length and polarization. Scattering intensities were measured for the three strongest
available frequencies of the Ar+-ion laser. The blue line (2.708 eV), the green line
(2.410 eV) and the red line (1.916 eV) of the Ar+-ion laser were used. The polarization
of the laser light was parallel to the entrance slit. A polycrystalline single phase CuInS2
sample was used for the measurements. The spectra are given in Figure 3.4.
The A1-mode is the dominant feature in the spectra. Three more peaks were observed
and assigned to known phonon modes. They were a magnitude lower in intensity than
the A1-mode and barely above the noise.
The measured scattering intensities for the A1-mode was slightly lower for the green
laser light and over a magnitude lower for the red light in comparison to the blue light.
This was due to spectral and spatial sensitivity of the Raman setup (refer to Section
2.2.4). Measured scattering intensities are compiled in Table 3.1 together with the
sensitivity of the setup. Intensities were in the same order of magnitude after nor-
malization to 100 % sensitivity. The remaining differences can be explained by the
influence of the varying density of electronic states in the spectral regions.
The green laser line of the available Ar+-ion line was by far the most intense. In view
of the satisfying sensitivity of the Raman setup in this spectral region, the green laser
line (514.5 nm) was chosen for comprehensive analysis of CuInS2 layers prepared in
this work.
36 Chapter 3. Raman Spectroscopy of Thin CuInS2-Films
150 200 250 300 350 400
35
03
40
32
6
2932
66
24
4
500
Eex
= 2.708 eVE
ex = 2.410 eV
Eex
= 1.916 eV
Inte
nsity
(ct
s /
mW
⋅ min
)
Raman Shift (cm-1)
Observed Lit.[10] Symmetry
(cm−1) (cm−1)
244 244 E3TO
266 260 E3LO
293 294∗ A1
326 323 B12 TO
340 339 E1LO
350 352 B12 LO
Figure 3.4: Raman spectra of a standard CuInS2 sample at different excitation ener-
gies above the band gap. In the table: Observed phonon frequencies and
literature data for comparison (in cm−1). Asterisks indicate modes which
are measured at T = 78 K.
Table 3.1: Measured Raman intensities for the CuInS2 chalcopyrite A1-phonon mode
for different excitation energies. Intensities were corrected for instrumental
throughput in the last column.
Excitation Raman Corrected
energy intensity intensity
(eV) (cts/mW·min) (cts/mW·min)
2.708 1400 1600
2.410 1300 7000
1.916 80 4000
Chapter 4
Non-Chalcopyrite Phonon Modes in
CuInS2
Thin CuInS2 layers were prepared by sequential physical vapor deposition of the metals
and subsequent sulfurization in H2S. The dependence of the structural properties on
sulfurization parameters and composition was analyzed by Raman spectroscopy. Those
studies revealed modes at 305 cm−1 and 60 cm−1 in the spectrum of the sulfurized layers
that could not be assigned to known phonon modes from compounds appearing in the
(Cu-In-S)-system. In this thesis it will be shown for the first time that those modes
can be attributed to the CuInS2 CuAu ordered phase.
Raman spectra showing the non-chalcopyrite modes will be presented in the first section
and the spectral features will be discussed. The CuInS2 CuAu ordered structure as an
origin for those modes will be formulated as a working hypothesis. Raman selection
rules for the CuAu phonon mode at 305 cm−1 were determined by own measurements.
It will be shown in Section 4.1.2 that this mode was totally symmetric. The number of
phonon modes, their symmetry and optical activity for given crystal structures can be
determined by group theory. Only the number of elements, the sites of the elements in
the unit cell and the symmetry of the crystal structure are inputs to these calculation.
Thus group theory is a powerful tool to predict phonon properties for a given structure.
This tool was applied for the CuAu structure and the results are given in Section 4.1.3.
It was found, that a single totally symmetric phonon mode should be observed from the
CuAu structure. This result supported the assumption of CuAu ordered domains in
the measured films and encouraged the performance of phonon frequency calculations
from first principles.
Phonon frequencies for the CuInS2 CuAu structure were calculated for the first time
in this work. The calculated frequencies matched the observed phonon frequencies.
Thus the calculations confirmed the assumption of CuAu ordered domains present
in the analyzed absorber layers. The appearance of the CuAu ordered domains was
studied in dependence on the preparation conditions. It will be shown in Section 4.2
37
38 Chapter 4. Non-Chalcopyrite Phonon Modes in CuInS2
that CuAu ordered domains can be related to CuInS2 layers prepared under Cu-poor
conditions and to layers sulfurized in H2S in a low temperature regime. The preparation
conditions that lead to the formation of layers with CuAu ordered domains coincide
with those that lead to solar cells with poor conversion efficiency. This relation will
be discussed and a tentative explanation will be provided. The presence or absence of
phonon modes from CuAu ordered domains can be taken as a quality indicator for the
prepared absorber layers. This opens up the possibility to use Raman spectroscopy as
a tool for ex- and in-situ growth monitoring of absorber layers.
4.1 Observation of CuAu Order and Theoretical
Considerations
4.1.1 Observation of Non-Chalcopyrite Phonon Modes
Non-chalcopyrite phonon modes were observed from a variety of thin CuInS2 films
prepared by different techniques and parameters. They were found in films prepared by
the sequential process, by co-evaporation and by MOCVD growth when the cation ratio
of the film was [Cu]/[In]<1. Furthermore those phonon modes were found when Cu-In
stacks were sulfurized in H2S at low temperatures (375 - 475 C). Details from own
measurements will be provided later. A typical spectrum recorded from Cu-deficient
absorber layer is shown in Figure 4.1.
100 200 300 400 5000
100
200
300
400
500
600
700
800
259
242
294
305
340
60
Raman Shift (cm-1)
Inte
nsi
ty (
cts/
mW
⋅min
)
Comp. Obs. Lit. Symm. Ref.
CuInS2: 242 244 E3TO [10]
Chalcopyrite 259 260 E3LO [10]
294 294∗ A1 [10]
340 339 E1LO [10]
CuAu ?? 60 n.o. ?
305 309 ? [62]
Figure 4.1: (Left:) Raman spectrum of a thin CuInS2 layer. The composition of the
film was [Cu]/[In]=0.8. The modes at 60 cm−1 and 305 cm−1 do not belong
to the CuInS2 phonon spectrum. It will be shown in this work that those
modes can be attributed to the CuInS2 CuAu-ordered structure. (Right:)
Assignment of the observed phonon modes and literature data. (*) at 80 K.
4.1. Observation of CuAu Order and Theoretical Considerations 39
Due to the elastic scattered light of the laser, an continued increase in Raman in-
tensity was measured at frequencies lower than 50 cm−1. The laser was focused by a
lens of short focal length in the micro-Raman setup. Thus, there was a high power
density in a small air volume close to the sample surface. On a first glance, the spec-
trum in Figure 4.1 seems to be noisy below 150 cm−1. The noise can be identified as
contributions from close spaced, narrow peaks, low in intensity. They originate from
rotational vibrations of nitrogen molecules [58]. However, in most cases, the mode at
60 cm−1 did appear together with the mode at 305 cm−1 for CuInS2 layers and was
therefore not attributed to nitrogen vibrations.
The observed phonon modes were assigned to known CuInS2 chalcopyrite phonon
modes by comparison with literature data, except the two modes at 305 cm−1 and
60 cm−1. In literature, a phonon mode at 309 cm−1 from a Cu-poor polycrystalline
CuInS2 film was first reported by Morell [62]. Hunger et al. [63] reported a mode at
309 cm−1 from epitaxial CuInS2 layers grown on Si(111). The films were Cu-poor and
the mode at 309 cm−1 was the most intense. The chalcopyrite A1-mode was present at
the same time but a magnitude lower in intensity. Both authors suggested the presence
of spinel-structured β-In2S3 in the layers. The hint for this compound was a mode at
306 cm−1 observed by Kampas et al. [64] in the Raman spectra of β-In2S3 crystals.
He reported fifteen Raman active modes from β-In2S3 crystals. Modes at 70 cm−1 and
244 cm−1 were more intense that the one at 306 cm−1. The absence of strong phonon
contributions from Cu-poor CuInS2 layers made the proposed presence of β-In2S3 less
likely. Kondo et. al [12] related the phonon mode at 307 cm−1 to polycrystalline sam-
ples exhibiting a poor crystalline quality. He suggested a localized mode with a smaller
mean atomic weight of the cations. Alvarez et. al [13] pointed out that changes in the
arrangement of Cu and In atoms in the cation sublattice could be responsible for the
observation of the phonon mode at 307 cm−1. The involvement of sphalerite, a phase
of CuInS2 and the CuAu structure were discussed. The presence of sphalerite was later
ruled out due to the negative results of XRD measurements .
In this work the phonon mode at 305 cm−1 will be attributed to the co-existence of
CuAu ordered CuInS2 domains along chalcopyrite domains in those films.
4.1.2 Raman Selection Rules
In order to learn more about the nature of the phonon mode at 305 cm−1, Raman se-
lection rules were determined. For this purpose epitaxial CuInS2 layers on Si(111) were
analyzed. The samples were Cu-poor, the cation ratio was nominally [Cu]/[In]= 0.85.
Measurements were performed in the experimental geometric configurations 〈z|xx|z〉,〈z|xy|z〉, 〈z|yx|z〉 and 〈z|yy|z〉 where x, y and z correspond to the crystallographic
directions [112], [110] and [111] of the silicon substrate. Raman spectra are given in
Figure 4.2. The chalcopyrite phonon mode at 294 cm−1 behaves as expected from a
40 Chapter 4. Non-Chalcopyrite Phonon Modes in CuInS2
100 150 200 250 300 350 400 450
294
<z|xy|z>10
0
307
<z|xx|z>Inte
nsity
(ct
s /
mW
⋅ min
)
Raman Shift (cm-1)
Figure 4.2: Raman spectra from a epitaxial CuInS2 layer measured in two different
polarization configurations (300 K). Wavelength of the incident laser light
was λ=514.5 nm. This work.
mode with A1 symmetry: It is observed in parallel configurations 〈z|xx|z〉, 〈z|yy|z〉 and
a dramatic decrease in intensity was found in the Raman forbidden 〈z|xy|z〉, 〈z|xy|z〉configurations. The mode at 305 cm−1 behaves the same way: It was observed together
with the A1-chalcopyrite mode in parallel configurations and decreased in the same ra-
tio as the A1-chalcopyrite mode. From this finding it can be concluded that the mode
at 305 cm−1 has the same symmetry: A1.
4.1.3 Group Theoretical Analysis
The analyzed absorber layers exhibited two totally symmetric phonon modes. The
CuInS2 chalcopyrite structure contributes one of them thus the second one could be
contributed from the CuAu-ordered structure. The number of Raman active phonon
modes and their symmetry can be calculated with group theoretical methods. Only
the symmetry of the structure has to be provided as an input. Group theoretical anal-
ysis for the CuAu-like structure was not found in the literature, therefore the analysis
was performed in this work and will be presented here. The fundamentals of group
theory and crystallography will not be discussed in this work. Fundamental concepts
of crystal symmetries are given in [17] and [65]. A good introduction to abstract group
theory can be found in [66] and examples for the application of group theory to solid
state problems are given in [67] and [68]. To calculate the number of normal modes
and their symmetry the method after Porto [69] was applied. The calculation was per-
formed for the CuInS2 chalcopyrite structure to demonstrate the procedure and then
for the CuAu structure. The following four steps were performed:
4.1. Observation of CuAu Order and Theoretical Considerations 41
First step: The Wyckoff positions for the three elements in the unit cell must be deter-
mined for the given space groups. D122d and D5
2d are the space groups for chalcopyrites
and the CuAu-like structure, respectively.
Table 4.1: Chalcopyrite belongs to the space group D122d and the CuAu ordered structure
to the space group D52d. All sites for the two space groups are given [69].
Space Group Sites
D52d(P 4m2) ∞[lC1(8)] +∞[(k + j)CS(4)] +∞[(i + h)C2(4)]
+∞(g + f + e)C2v(2)] + (d + c + b + a)D2d(1)
D122d(I 42d) ∞[eC1(16)] +∞[dC2(8)] + (b + a)S4
In the chalcopyrite structure four AI , four BIII and eight CV I ions can be accom-
modated. All possible sites for the two space groups are given in Table Table 4.1. By
inspection it can be recognized that AI and BIII ions occupy the a+b sites and CV I
ions must be at the d site since this is the only one which can generate eight equivalent
positions.
Second step: The irreducible representation for all possible lattice vibrations must
be determined. The contribution of each possible site in the space group is given in
Table 4.2.
The representation for all chalcopyrite modes is given by the direct sum of the
representations of the contributing sites:
Γtot = (A1
⊕2A2
⊕B1
⊕2B2
⊕3E)
⊕2(B1
⊕B2
⊕2E)
= A1
⊕2A2
⊕3B1
⊕4B2
⊕7E . (4.1)
Third step: The number of normal modes must be determined. In each mode of
normal vibration all the atoms in the structure vibrate with the same frequency and
all atoms pass through their equilibrium positions simultaneously. This corresponds
to k = 0. For the determination of normal modes the acoustic phonons must be
subtracted since they are propagating waves. Acoustic phonons can be described using
translation vectors. The representations of the translations Tx, Ty, Tz can be obtained
by inspection of the character Table 4.3.
Tx and Ty correspond to the double degenerate mode E and Tz to the B2 symmetry.
Thus the representation for the acoustic modes can be written as:
42 Chapter 4. Non-Chalcopyrite Phonon Modes in CuInS2
Table 4.2: Irreducible representations that result from occupying each of the sites within
the space groups Dx2h [69].
Site Representations
C1 3A1⊕
3A2⊕
3B1⊕
3B2⊕
6E
Cz2 (Cz
2 ) A1⊕
A2⊕
B1⊕
B2⊕
4E
C2(C2) A1⊕
2A2⊕
B1⊕
2B2⊕
3E
CS 2A1⊕
A2⊕
B1⊕
2B2⊕
3E
D2 A2⊕
B2⊕
2E
C2v A1⊕
B2⊕
2E
S4 B1⊕
B2⊕
2E
D2d B2⊕
E
Γac = B2
⊕E . (4.2)
In summary the normal modes of the chalcopyrite lattice are given by:
Γnormal = Γtot − Γac = A1
⊕2A2
⊕3B1
⊕3B2
⊕6E . (4.3)
Fourth step: The modes in equation (4.3) can be divided into Raman active, infrared
active and silent modes. A mode will be Raman active if the normal mode belongs
to the same representations as quadratic terms of Cartesian coordinates (x2, y2, z2),
their sums and differences (i.e. x2-y2, etc.) or products of Cartesian coordinates (i.e.
xy, yz, etc.). A mode will be infrared active if the normal mode belongs to the same
representation as the translations Tx, Ty, Tz. If there are no coordinates belonging to a
representation, the related mode is silent. The representations for translations are B2
and E as can be taken from column three of Table 4.3. The corresponding modes are
infrared active. Quadratic functions of the coordinates and Cartesian products can be
found in the fourth column. All of the modes are therefore Raman active, apart from
the A2-mode which is a silent mode. In result 13 optical active modes can be observed:
4.1. Observation of CuAu Order and Theoretical Considerations 43
Table 4.3: Character table for the point group D2d [69].
D2d E 2S4 C2 2C′2 2σd
A1 1 1 1 1 1 x2 + y2; z2
A2 1 1 1 -1 -1 Rz
B1 1 -1 1 1 -1 x2 − y2
B2 1 -1 1 -1 1 Tz xy
E 2 0 -2 0 0 (Tx, Ty); (Rx, Ry) (xz,yz)
Γopt = A1(R)⊕
3B1(R)⊕
3B2(IR; R)⊕
6E(IR; R) . (4.4)
The same procedure will now be applied for the CuAu structure. The Wyckoff
positions were provided in Table 1.1. The lattice of the unit cell (Fig. 1.3) is occupied
by two CV I ions at the site g and by one AI and BIII ions at the sites a and c,
respectively. The direct sum of the representations from contributing sites are denoted
by:
Γtot = (A1
⊕B2
⊕2E)
⊕2(B2
⊕E)
= A1
⊕3B2
⊕4E . (4.5)
After substraction of the acoustical modes (4.2) the normal vibrations were
obtained:
Γnormal = Γtot − Γac = A1
⊕2B2
⊕3E . (4.6)
By inspection of the characters in Table 4.3 it was found that all of them are Raman
active. Furthermore B2 and E modes are infrared active. Hence in the CuAu structure
6 optical active modes can be observed:
Γopt = A1(R)⊕
2B2(IR; R)⊕
3E(IR; R) . (4.7)
From this results it is expected that CuInS2 layers consisting of domains in chal-
copyrite and CuAu order exhibit two modes with A1 symmetry in Raman spectra.
This result strongly supports the assumption of the coexistence of both structures and
was the motivation to perform phonon frequency calculations for the CuAu structure.
44 Chapter 4. Non-Chalcopyrite Phonon Modes in CuInS2
4.1.4 Lattice Dynamics of the CuInS2 - CuAu Structure
Phonon frequencies of the CuInS2 CuAu structure were calculated ab-initio from first
principles. The calculations were performed by Dr. J. Fritsch, Technical University
Regensburg in the framework of this thesis. In order to evaluate the results, the
frequencies of the CuInS2 chalcopyrite structure were calculated for comparison. The
calculations were done to verify the coexistence of both structures in samples which
exhibit the phonon mode at 305 cm−1. A detailed presentation of the theoretical
models implied for those calculations is given in [71]. In the next paragraph a short
outline of the theoretical concepts is given. This is followed by the presentation of the
numerical results and their discussion.
The lattice dynamics of a periodic crystal structure can be described in a harmonic
approximation model [72]. In this model a central potential is assumed and only
quadratic dependencies on the displacements of nuclei are allowed as contributions
to the total energy of the crystal. The second derivative of the potential after the
coordinates of the interacting nuclei correspond to the force constants of the harmonic
oscillator. The displacement of nuclei in the periodic crystal lattice can be described
by a plane wave defined exclusively at the positions of the lattice atoms. The dynamic
equations of the crystal result in a eigen-value problem of the form
Du(q) = Ω2(q)u(q) (4.8)
where D is the dynamical matrix, Ω(q) the frequency of the phonons with wave vector
q and u(q) the amplitude of the plane wave. The dynamical matrix D contains the
force constants which must be calculated in order to solve equation (4.8). This requires
the knowledge of the total energy of the system in a given state. For the calculation
of the total energy it is necessary to solve the quantum mechanical many body prob-
lem including all electrons and nuclei. Computing the general many body problem is
impossible due to the giant amount of parameters involved. But the complexity of the
problem can be reduced with some simplifications and approximations such that it can
be calculated with numerical methods [71]:
1. The mass of the electron is much smaller than the mass of the nuclei. It can be
assumed that the electrons follow the motion of the nuclei instantaneously. Thus
it is adequate to calculate only the electronic ground state for a given configu-
ration of the atoms. This is referred to as the adiabatic or Born-Oppenheimer
approximation.
2. The electronic system can be divided into valence electrons involved in chemical
bonds and core electrons. Pseudo potentials can be constructed such that en-
ergy eigen-values and wave functions match the real eigen-states of the isolated
4.1. Observation of CuAu Order and Theoretical Considerations 45
atom. A well constructed pseudo potential reproduces all important electronic
properties of the solid.
3. In density functional theory the electron density n(r) is used instead of the wave
functions of the electrons for the calculation of their energy. The electron density
is mapped on the ground state wave functions. The ground state energy is ex-
pressed by a functional E[n[r]] which is minimal when the electron density n(r)
corresponds to the ground state density. The Kohn-Sham representation [73] of
the E[n[r]] functional can be efficiently used for computations.
The dynamical matrix D was calculated with the ”frozen-phonon” method. Each
atom was displaced by a small amount from its idle state. Energy differences and
forces were calculated within the density functional formalism. For the calculation of
phonon frequencies the dynamical matrix D was diagonalized in order to solve the
eigen-value problem (4.8). Macroscopic polarizations leading to LO-TO splitting of
phonon frequencies due to Frohlich interaction were not taken into account. Thus the
calculated values were the frequencies of the degenerate TO phonon modes. Frequencies
were systematically to low due to the implemented approximations. They were scaled
by a factor 1.05 to correct this deviation. The results are summarized in Table 4.4.
The calculated frequencies for the chalcopyrite phonon modes and their symmetries
are given on the left together with the experimental values. In a first approach the
calculated phonon frequencies match the experimental values. Thus the theoretical
model was able to describe the chalcopyrite phonon modes. Reasonable results are
expected from the calculation of the CuAu phonon spectrum due to the close relation
of chalcopyrite and CuAu structure. The calculated phonon frequency for the A1 CuAu-
mode matches the observed value well and the frequency match of the weaker E3-mode
is satisfying. This findings once more support the assumption of CuAu coexistence in
CuInS2 chalcopyrite films.
46 Chapter 4. Non-Chalcopyrite Phonon Modes in CuInS2
Table 4.4: First columns: Symmetry of the phonon modes. Second columns: Calcu-
lated phonon frequencies for CuInS2 chalcopyrite and CuAu-like structure in
cm−1 [70]. Third columns: Experimental values for CuInS2 [10]. Asterisks
indicate values measured at 80 K. Values for the CuAu-like structure are
from this work. All values were calculated for TO phonons only.
Symm. Calc. Exp. Diff.
A1 285 294∗ -9
B11 318 n.o. -
B21 161 n.o. -
B31 96 n.o. -
B12 316 323 -7
B22 241 234 7
B32 81 79∗ 2
E1 307 321 -14
E2 293 295 -2
E3 250 244 -6
E4 146 140∗ -6
E5 89 88 -1
E6 76 67∗ -9
CuInS2: Chalcopyrite structure
Symm. Calc. Exp. Diff.
A1 305 305 0
B12 287 n.o. -
B22 145 n.o. -
E1 299 n.o. -
E2 236 n.o. -
E3 69 60 9
CuInS2: CuAu-like structure
4.2 Dependence on Stoichiometry
The structural and electronic properties of thin CuInS2 layers depend strongly on the
preparation conditions. The amounts of elements offered for the chemical reaction i.e.
govern the resulting stoichiometry. To study the dependence of structural properties
on the stoichiometry, a sample with a lateral variation in composition was analyzed
with micro-Raman spectroscopy. The CuInS2 films was prepared by multisource phys-
ical vacuum evaporation (coevaporation). Sample holder rotation was turned off to
achieve an inhomogeneous distribution of the elements. The element concentrations
were quantified in dependence on sample position using energy dispersive X-ray (EDX).
The result of the EDX analysis is given in Figure 4.3. The sample was Cu-rich at x=0
mm and was changing to In-rich at x=40 mm. An area close to stoichiometry was
present approximately between x=17 mm and x=21 mm.
Raman spectra were recorded every 2 mm along the layer. The spectra are given in
Figure 4.4. For better clarity a selection of six spectra was chosen. When a CuInS2 ab-
sorber layer is prepared with [Cu]/[In]>1 the excess copper forms a binary CuxS layer
at the top of the absorber. The CuxS layer can be completely removed using a KCN
4.2. Dependence on Stoichiometry 47
0 5 10 15 20 25 30 35 4020
21
22
23
24
25
26
27
28
29 EDX: Cu In S/2
Ele
men
t co
ncen
trat
ion
(at.
%)
x-Position (mm)
Figure 4.3: Lateral variation of element concentrations measured with energy dispersive
X-ray. The CuInS2 film was prepared on purpose with varying cation ratio.
The sulfur concentration was plotted using factor 0.5. The solid lines give
the trend of the data.
etch procedure (see Section 5.3). This is a well known fact, thus it is not surprising to
detect vibrational modes of a CuxS compound in the above spectra. The modes were
assigned to CuS according to the report provided in [74]. The subject of CuxS will be
discussed in detail in Section 5.3.
The phonon mode at 294 cm−1 was assigned to the A1-mode of CuInS2 chalcopyrite
and the modes at 60 cm−1 and 305 cm−1 to CuAu according to the already discussed
results in this chapter. In the upper right panel of Figure 4.4 the intensity development
of the 305 cm−1 mode relative to the A1 mode is depicted. There are no CuAu modes
in the spectra from the region where the layer was Cu-rich. Excess copper formed
CuxS segregations at the surface and the absorber itself was stoichiometric in compo-
sition. Leaving the stoichiometric area towards the Cu-deficient region, the 305 cm−1
mode appeared and was steadily increasing in intensity relative to the mode at 294
cm−1. It can be concluded that the appearance of the mode at 305 cm−1 is related to
Cu-deficient CuInS2 layers.
48 Chapter 4. Non-Chalcopyrite Phonon Modes in CuInS2
100 200 300 400 500
[Cu]
/[In]
60
267142
Cu-
poor
Cu-
rich
0.81
0.82
0.88
0.87
1.00
1.41
50
0
47430529463
Inte
nsi
ty (
cts/
mW
⋅ min
)
Raman Shift (cm-1)
0.8 0.9 1.0 1.1 1.2 1.3 1.4
0.0
0.5
1.0
1.5
[Cu]/[In] Cu-richCu-poor
Inte
ns
ity
ra
tio
: I(
30
5)/
I(2
92
)
Comp. Observ. Lit. Ref.
CuxS 63 62 [74]
” 142 142
” 267 267
” 474 475
CuInS2: 294 ∗294 [9]
Ch
CuInS2: 60 60 This
CuAu 305 307 work
Figure 4.4: (Left:) Raman spectra of a thin CuInS2 layer with varying cation ratio
(refer to Fig. 4.3). The wavelength of the incident laser light was λ=514.5
nm and the spectra were recorded at 300 K. (Upper right:) Intensity ratio
of the modes at 294 cm−1 and 305 −1. The solid line is a guide to the
eye. (Lower right:) Assignment of the observed phonon modes. Vibrational
frequencies are given in cm−1. Literature data were measured at 300 K and
80 K (asterisk), respectively. For the origin of the mode at 305 cm−1 see
the text.
Analyzing peak positions and peak widths gave additional insight to the structure
of the layer. The data are presented in Figure 4.5.
A least square fit was applied to the Raman frequencies of the A1 phonon mode.
The fit function was a second order polynomial with a small square contribution. Thus
the dependence can be conceived as ’almost’ linear. The full width at half maximum
showed the same dependency: Peaks were narrow at the Cu-rich edge and linearly
broadening towards the Cu-poor edge.
It is known that absorber layers for effective solar cell devices must be grown under
4.2. Dependence on Stoichiometry 49
0.8 0.9 1.0 1.1 1.2 1.3 1.4292.0
292.5
293.0
293.5
294.0
294.5
295.0
295.5
Ra
ma
n S
hif
t (c
m-1
)
Cu-poor Cu-rich[Cu]/[In]
0.8 0.9 1.0 1.1 1.2 1.3 1.42
4
6
8
10
12
14
16
18
20
22
[Cu]/[In] Cu-richCu-poor
FW
HM
(c
m-1
)
Figure 4.5: (Left:) Frequency of the A1-phonon mode at 294 cm−1 of CuInS2 over the
composition the sample. A selection of the related spectra were given in
Figure 4.4. (Right:) Full width at half maximum of the A1-phonon mode.
Cu-excess conditions in the sequential process. Best results were obtained in the range
[Cu]/[In]=1.2 to 1.8 [75] where excess copper formed binary CuxS phases at the surface
of the films. The presence of the secondary copper sulfide was found to be crucial
for the crystal quality of the layers. Similar findings were reported for CuInS2 layers
prepared by coevaporation [76]. Klenk et. al [77] suggested a growth model for CuInSe2
prepared by coevaporation. Thereafter, a liquid layer of CuSe is present on top of the
growing CuInSe2. The vapor species condense at the surface of CuSe. They are then
transported to the binary/ternary interface where the crystallite is growing. The result
of this transport assistance are larger crystals with a better structural quality.
The Raman results can be explained in the framework of crystal and domain size. A
transmission electron microscope image from a CuInS2 layer prepared by coevaporation
is given in Figure 4.6.
Figure 4.6: TEM cross-section images of CuInS2 samples deposited from multisources
at 520 C (a) Cu rich and (b) Cu poor. Taken from [13].
The difference in crystal size can be easily recognized. Crystals from the Cu-rich
layer were up to 1 µm in size, whereas crystals from the Cu-poor layer are hardly
50 Chapter 4. Non-Chalcopyrite Phonon Modes in CuInS2
100 nm in diameter. Crystals size is defined by the grain boundaries. A crystal may be
subdivided in smaller units by stacking faults or twins. Those units without any lattice
distortions will be referred to as domains. They give rise to shifts towards lower Raman
frequencies and broadening of phonon modes when domains are smaller than 30 nm
[78]. The observed Raman shift of the A1-chalcopyrite mode was therefore attributed
to smaller domains in Cu-poor films.
The development of the A1-CuAu phonon frequency and the related FWHM over the
composition is given in Figure 4.7. There is a pronounced maximum and minimum
0.80 0.85 0.90 0.95 1.00 1.05303.0
303.5
304.0
304.5
305.0
305.5
306.0
306.5
307.0
307.5
308.0
308.5
309.0
Ram
an
Shift(cm
-1
)
Cu-richCu-poor [Cu]/[In]
0.80 0.85 0.90 0.95 1.00 1.05
10
12
14
16
18
20
[Cu]/[In] Cu-richCu-poor
FW
HM
(c
m-1
)
Figure 4.7: (Left:) Frequency of the A1-phonon mode of the CuAu-structure at 305
cm−1 over the composition of the sample. The spectra were given in Figure
4.4. (Right:) Full width at half maximum of the A1-phonon mode.
around [Cu]/[In]=0.93 in peak position and width, respectively. This findings were
interpreted as followed: The size of CuAu domains was maximal in the slightly copper
deficient region. This was expressed by the minimum in FWHM. The CuAu domains in
the stoichiometric region got smaller because the cations favor the chalcopyrite order.
When the composition was [Cu]/[In]<0.93 CuAu domains again got smaller because
not enough copper was available to build the structure.
Chapter 5
Reactive Annealing in H2S
A novel method for the preparation of thin CuInS2 films was introduced by this work.
It has been demonstrated that rapid thermal processing (RTP) can be employed for
the fabrication of high quality CuInS2 films by sulfurization of Cu-In precursors in
H2S. RTP systems offer precise control over process parameters such as temperature,
temperature ramp and pressure. CuInS2 film properties were studied and optimized in
dependence on those parameters.
Vibrational properties of absorber films depending on sulfurization temperature will
be presented first. It has been shown earlier that the existence of the CuAu-phase is
related to Cu-deficient films. Now, it will be demonstrated that the CuAu phase exists
also in CuInS2 films prepared from Cu-rich precursors at sulfurization temperatures
between 375 C and 500 C.
In order to analyze the region close to the Mo back contact by Raman spectroscopy
absorber layers were peeled off the substrate. It will be shown that the entire Cu-In
stack was sulfurized within a few seconds.
When CuInS2 films are prepared from Cu rich precursors the excess copper forms a
binary CuxS (0<x≤2) segregation at the surface. This segregation was analyzed in de-
pendence on sulfurization temperature by Raman spectroscopy and X-ray diffraction
measurements.
Thereafter the gathered information about the phase formation processes will be sum-
marized, including XRD precursor studies. The phase formation of CuInS2 in the
H2S-RTP process will be discussed on this basis.
The correlation of precursor morphology, sulfurization parameters and electronic prop-
erties of solar cell devices was studied. The presence of CuAu phase and its relation
to poor device performance will be discussed and an optimized sulfurization parameter
set will be presented. A further subject will be the influence of precursor morphol-
ogy on solar cell properties. It was found that the morphology of evaporated Cu-In
precursors is suitable for the preparation of homogeneous absorber films and efficient
devices. In contrast, the morphology of sputtered precursors lead to inhomogeneous
51
52 Chapter 5. Reactive Annealing in H2S
CuInS2 distribution and therefore to less efficient solar cells. It will be shown how this
difficulty can be overcome using the fast heat ramps of the RTP system.
5.1 Dependence on Sulfurization Temperature:
Phonon Modes for the Absorber Front Side
Phase formation of CuInS2 was studied by Raman spectroscopy. For the analysis a
series of samples was prepared from evaporated Cu-In stacks. The intention was the
conservation of the phases formed during heat up. Precursors were sulfurized in H2S
using the RTP system. The preset temperature was 550 C. The process was inter-
rupted during the heating up phase and the samples were quenched in a stream of
nitrogen. The temperature profiles are given in Figure 5.1. The temperature after
interruption is indicated by the dashed lines for three selected runs.
100
200
300
400
500
600
0
Processing time (min)
0 2 4 6 8 10 12 14
H S2
Tsulf
0 2 4 6 8 10
Sulfurization time (min)
Figure 5.1: Measured temperature profiles for a H2S sulfurization run(solid line) an
from interrupted runs (dashed lines). The interrupted runs were used to
quench the samples.
The Raman spectra for the samples are given in Figure 5.2. There is no Raman signal
for the sample quenched from 350 C. A double structure of peaks at 292 cm−1 and
308 cm−1 is present for samples annealed at temperatures between 375 C and 425 C.
The peaks correspond to the A1-phonon modes of the chalcopyrite and CuAu-ordered
lattice, respectively. There is no CuAu-phonon mode above 425 C. A phonon mode at
474 cm−1 for the secondary CuS-phase appears at 450 C. An increase in intensity of
the mode with increasing temperatures is obvious. The mode at 550 C is four times
5.1. Dependence on Sulfurization Temperature: Phonon Modes forthe Absorber Front Side 53
100 200 300 400 500
142
350 °C50
0
474308292
24162
550°C
525°C
500°C
475°C
450°C
425°C
400°C
375°C
In
tens
ity (
Cts
/mW
⋅ min
)
Raman Shift (cm-1)
Compound Obs. Lit. Ref.
(cm−1) (cm−1)
CuInS2-Ch 292 292+x This
work
241 244 [10]
CuInS2-CuAu 308 305+x This
work
CuS 474 475 [74]
142 142 [74]
62 62 [74]
Figure 5.2: Raman spectra for Cu-In metal stacks after sulfurization in H2S at various
temperatures. Temperature was ramped up to the values given above the
spectra and than the samples were cooled down in a nitrogen stream. The
spectra were recorded using the 514.5 nm line of an Ar+-laser. The phonon
modes and their assignments are compiled in the table.
more intense than the one for the sample at 450 C. Additionally, at 525 C and 550C it is accompanied by the less intense CuS modes at 62 cm−1 and 142 cm−1. The
increase in scattering intensity indicates a surface segregation of increasing thickness.
This could be caused by the higher temperatures themselves or the fact that it took
somewhat longer to reach higher temperatures (Figure 5.1) and thus annealing time
was increased. As reaction kinetic depend on both parameters CuS formation is prob-
ably promoted by both of them.
Peak positions and full widths at half maximum (FWHM) of the modes at 292 cm−1 and
305 cm−1 were evaluated and are depicted in Figure 5.3. The chalcopyrite A1-phonon
mode shifts towards lower Raman frequencies with increasing sulfurization tempera-
tures (Fig. 5.3a) and the related FWHM is decreasing (Fig. 5.3b). Above 450 C the
values remained almost constant at 292 cm−1 and 6.5 cm−1, respectively. The CuAu
A1-mode will be considered next. A narrow peak was found just after the appearance of
54 Chapter 5. Reactive Annealing in H2S
350 400 450 500 550291
292
293
294
295
296
297
Ch:CuInS2 - A
1 mode
(a)
Ram
an S
hift
(cm
-1)
Sulfurization Temperature (°C)
350 400 450 500 5505
6
7
8
9
10
11
12
13
14
15
16
17
Ch:CuInS2 - A
1 mode
(b)
FW
HM
(cm
-1)
Sulfurization Temperature (°C)
350 400 450 500 550302
304
306
308
310
312
CuAu:CuInS2 - A
1 mode
(c)
Ram
an S
hift
(cm
-1)
Sulfurization Temperature (°C)
350 400 450 5007
8
9
10
11
12
13
14
15
16
17
CuAu:CuInS2 - A
1 mode
(d)
FW
HM
(cm
-1)
Sulfurization Temperature (°C)
Figure 5.3: (a) Raman shift and full width at half maximum (FWHM) (b) of the CuInS2
chalcopyrite A1-phonon mode. All values are plotted versus the sulfurization
temperature at which the sulfurization process was stopped. (c)Raman shift
and FWHM (d) of the CuInS2 CuAu-like ordered A1-phonon mode. The
lines are only a guide to the eye.
the mode at 375 C (Fig. 5.3d) and was broadening with higher temperatures. Raman
frequency of the CuAu A1-mode decreases with increasing temperatures (Fig. 5.3c)
and finally disappeared above 475 C.
Phonon modes from chalcopyrite and CuAu appear simultaneously at 375 C. Narrow
CuAu peaks indicate extended CuAu ordered domains. In comparison, chalcopyrite
ordered domains are smaller according to the broad A1-phonon mode.
Towards higher temperatures, the cations tend to the chalcopyrite order on expense of
the CuAu-order. This is expressed in the development of the peak width (FWHM) of
both phases: The shift of the chalcopyrite A1-phonon mode to lower Raman frequencies
is consistent with more extended domains.
5.2. Dependence on Sulfurization Temperature: Phonon Modes forthe Absorber Back Side 55
5.2 Dependence on Sulfurization Temperature:
Phonon Modes for the Absorber Back Side
Heat radiation reaches the precursor stack from the front side and H2S gas is
exclusively available at the surface during RTP-sulfurization. Therefore, the reaction
can not occur simultaneously throughout the film. There rather must be a growth
front. In order to find out about possible structural variations in comparison to the
front side, absorber films were removed from the Mo/Glas substrate and analyzed by
Raman spectroscopy. A metal sheet was glued onto the front side of the films and and
removed by a fast jerk. The remaining shiny Mo proved the complete release of the
films. Samples from the quenching series (Section 5.1) were used for the experiments.
The recorded spectra are shown in Figure 5.4.
100 200 300 400 500
550 °C
500 °C
425 °C
375 °C
474
410
386
352
325
305
294
265
245
350
Inte
nsity
(C
ts/m
W⋅m
in)
Raman Shift (cm-1)
Compound Obs. Lit. Ref.(cm−1) (cm−1)
CuInS2-Ch 245 244 [10]265 266 [10]241 244 [10]294 294 This
work325 321 [10]352 352 [10]
CuInS2-CuAu 308 305 Thiswork
CuS 474 475 [74]MoS2 386 382 [79]
410 407 [79]
Figure 5.4: (Left:) Raman spectra from the back side of CuInS2 films close to the Mo
contact. The back side was made accessible by peeling off the films from the
substrate. Samples were taken from the H2S temperature series described in
Section 5.4. Sulfurization temperature was ramped up to the given values.
Thereafter the samples were cooled down in a nitrogen stream. The spectra
were recorded using the 514.5 nm line of an Ar+-laser. The penetration
depth for this wavelength is about 100 nm. (Right:) Assignment of the
observed phonon modes.
56 Chapter 5. Reactive Annealing in H2S
The spectra for films sulfurized at temperatures between 375 C and 500 C, show
exclusively CuInS2 chalcopyrite and CuAu phonon modes. The spectra for the film
sulfurized at 550 C showed additionally MoS2 phonon modes at 386 cm−1, 410 cm−1
and a CuS mode at 474 cm−1. As carried out throughout this work, spectra were
recorded for five different spots on the same sample (refer to Section 3.2). MoS2
phonon modes were observed for all the measured spots on the sample. In contrast,
CuS modes were just found for one spot. Apparently, MoS2 was present in extended
areas, whereas CuS was present in form of isolated islands.
CuxS (0<x≤2) segregation at the front surface was removed by KCN etching for the
preparation of solar cells. It is assumed that after etching no CuxS remains neither
on the surface nor in the bulk. This assumption is justified by the negative results
of XRD and reasonable solar cell performance. CuS is a highly conductive material
and would give rise to shunt paths if present. Therefore it is surprising to detect
CuS at the absorber back side. On the other hand side, it will be shown later that
sulfurization temperatures above 525 C cause decrease in conversion efficiency for
solar cells. Thus it can be assumed that such an decrease in efficiency is related to the
presence of CuS at the absorber back side.
Next, the chalcopyrite and CuAu A1-phonon mode will be considered. Raman
frequencies and FWHM of the modes are given in Figure 5.5. Phonon mode for
CuInS2 structures were observed for Tsulf ≥ 375 C. This temperature is also the
critical temperature for the existence of CuInS2 phonon modes at the front side of the
film (compare with Figure 5.2). The exposition of the precursors to the maximum
temperature lasted just a few seconds. Therefore it was concluded, that the initial
formation of chalcopyrite/CuAu occurred within this period.
Raman shift and FWHM of the chalcopyrite A1-mode versus the temperature show
the same trends as those for the front side. Thus chalcopyrite domains seem to grow
almost simultaneously at the front and back side. Phonon frequency and peak width
of the CuAu A1-phonon show also the same trend as for the front side but there is a
difference in the dependence on the sulfurization temperature. Frequency and FWHM
for the back side in Figure 5.5c+d decrease and increase, respectively, more steep at
lower sulfurization temperatures than at the front side. This indicates that extended
CuAu domains were conserved up to higher temperatures at the front side than at the
back side.
The formation of CuAu ordered domains has been associated with films prepared
from Cu-poor precursors earlier in this work. Here, CuAu domains formed also from
Cu-rich precursors annealed in H2S. In both cases, CuAu domains form simultaneously
with chalcopyrite domains. It is obvious that the presence of CuAu domains prevents
the formation of single phase chalcopyrite grains necessary for efficient solar cell
devices. Two preparation rules can be deduced from this findings: First, the metal
ratio for the precursor stack should be at least [Cu]/[In] ≥ 1.1. This is in agreement
5.2. Dependence on Sulfurization Temperature: Phonon Modes forthe Absorber Back Side 57
350 400 450 500 550293
294
295
296
297
298
(a)
Ram
an S
hift
(cm
-1)
Ch:CuInS2 - A
1 mode
Sulfurization Temperature (cm-1)
350 400 450 500 5504
5
6
7
8
9
10
11
(b)
FW
HM
(cm
-1)
Ch:CuInS2 - A
1 mode
Sulfurization Temperature (cm-1)
350 400 450 500 550304
305
306
307
308
309
310
311
312
(c)
Ram
an S
hift
(cm
-1)
CuAu:CuInS2 - A
1 mode
Sulfurization Temperature (cm-1)
350 400 450 500 55010
11
12
13
14
15
16
17
(d)
FW
HM
(cm
-1)
CuAu:CuInS2 - A
1 mode
Sulfurization Temperature (cm-1)
Figure 5.5: (a) Raman shift and full width at half maximum (FWHM) (b) of the CuInS2
chalcopyrite A1-phonon mode. All values are plotted over the sulfurization
temperature where the sulfurization process was stopped. (c)Raman shift
and FWHM (d) of the CuInS2 CuAu-like ordered A1-phonon mode. The
solid lines are only a guide to the eye.
with reports from other authors. Scheer et. al [37] prepared device grade absorber
films by coevaporation with [Cu]/[In] = 1.0 - 1.8. Gossla et al. [80] obtained quality
films by H2S sulfurization of Cu-In stacks with [Cu]/[In] = 1.3. Second, the optimal
sulfurization temperature for Cu-rich precursors is Tsulf = 525 C. This temperature
is just high enough to obtain single phase chalcopyrite films and it is low enough to
prevent CuS remainder at the back side.
58 Chapter 5. Reactive Annealing in H2S
5.3 Surface Segregation
After sulfurization of Cu-rich precursors in elemental sulfur CuS (covellite) is present
at the surface of the CuInS2 films [38, 75]. The CuS segregation can be easily identified
by optical inspection due to its typical indigo-blue color. In contrast, the surfaces of
CuInS2 films prepared by H2S sulfurization of Cu-In precursors with a high Cu-excess
([Cu]/[In] = 1.2) were always light grey and did not show the indigo-blue color of
CuS. In this section it will be shown that a surface segregation exists also on absorber
films prepared by H2S sulfurization. Furthermore it will be shown that the segregation
consists mainly of Cu9S5 digenite and small amounts of CuS.
Scanning electron microscopy (SEM) images of absorber layers before and after etching
are shown in Figure 5.6. Sharp grain edges and pronounced distinctions in height can
Figure 5.6: SEM images (Left:) from an as grown absorber layer prepared by H2S
sulfurization at 525 C for 5 min. The blurred structure was attributed to
a CuxS surface coating which could be removed by etching. (Right:) After
the KCN etching procedure. The coating disappeared.
be recognized on the image from the etched sample. In contrast, a coating on the
as grown sample surface is indicated by the blurred structures. The coating can be
attributed to the CuxS surface segregation.
The segregation was analyzed with Raman spectroscopy and X-ray diffraction. Raman
spectra from samples prepared from Cu-rich precursors ([Cu]/[In] = 1.2) and sulfurized
under standard conditions (Tsulf = 525 C, tsulf = 5 min) are given in Figure 5.7. The
spectra for the ”as grown” samples show strong Raman lines at 62 cm−1 and 474
cm−1 besides the chalcopyrite phonon modes. After etching the samples in KCN those
lines disappeared completely (lower spectrum). A CuS single crystal was measured for
reference. Its phonon modes matches the modes quite well. In conclusion, CuS has
5.3. Surface Segregation 59
100 200 300 400 500
10
00
CuInS2 film
KCN etched
CuInS2 film
as grown
CuSsingle crystal
62
142 267
474
Inte
nsity
(ct
s /
mW
⋅ min
)
Raman Shift (cm-1)
Figure 5.7: Raman spectra prior and
after KCN etching of an
CuInS2 film. For compar-
ison the spectrum of a CuS
single crystal is given.
been proven to occur at the surface of the absorber film. Furthermore its complete
removal by KCN etching has been demonstrated.
X-ray diffraction in grazing incidence was performed to determine the presence of
possible CuxS phases on the surface of absorber layers. But no peaks besides the CuInS2
reflections were observed. There is still the possibility that reflections from CuxS phases
coincide with those from the chalcopyrite structure. To check out this possibility CuxS
binaries were synthesized: Thin layers of Cu were deposited and sulfurized in H2S at
varying temperatures. The sulfurization time was 5 minutes. XRD-GI spectra for the
sulfurized Cu films are shown in Figure 5.8 (on the left).
The spectra for the Cu film sulfurized at 475 C matches the data for Cu31S16
djurleite [81], a phase next to Cu2S in the phase diagram (Appendix A). Reflections
for Cu films sulfurized at 550 C, 525 C and 500 C were assigned to Cu9S5 digenite.
Comparison of the digenite spectra with the chalcopyrite reflections shown in Figure 5.8
reveals that digenite reflections coincide with those for chalcopyrite. Reviewing all the
entries for Cu-S binaries in the JCPDS database [81] yields that digenite reflections
are the only ones completely coinciding with chalcopyrite reflections. This strongly
supports the assumption that Cu9S5 is present on the absorber surface.
CuS was not detected by XRD-GI even though the Cu films sulfurized at 525 C and
550 C were slightly blue, indicating the presence of CuS. In contrast, the Cu films
sulfurized at 475 C and 500 C were grey. In order to verify the possible presence of
CuS Raman spectra were recorded. The spectra are shown in Figure 5.9.
No Raman signal is present for Cu films sulfurized at 475 C and 500 C. This
suggests that djurleite and digenite are not Raman active with respect to the excitation
wavelength (514.5 nm). However, Raman measurements for the Cu-S systems are only
reported for CuS [74] and Cu2S [82] and no literature data are available for CuxS
60 Chapter 5. Reactive Annealing in H2S
20 25 30 35 40 45 50 55 60
2 Theta
(28
2)
(84
2)
(84
0)
(01
5)
(35
0)
(02
3)
(72
1)
(52
3)
(37
3)
(10
1)
(00
15)
(10
7)
(10
10)
Mo
(11
0)
(11
0)
(11
15)
100
XR
DIn
tensity
(cts
/sec)
475 °C
500 °C
525 °C
550 °C
Cu
S:
Dju
rleite
31
16
Cu
S:D
jurleite
95
2
(10
7)
20 25 30 35 40 45 50 55 60
Theta
(00
15)
(10
10)
Mo
(11
0)
(11
0)
(11
15)
(11
2)
(10
3) (2
04)
(31
2)
XR
DIn
tensity
(cts
/sec)
20
0
CuIn
S:
Chalc
opyrite
2C
uS
:D
igenid
e9
5
Figure 5.8: XRD-GI spectra (glance angle 2.5) (Left:) for Cu films sulfurized in H2S
at varying temperatures (tsulf = 5 min). (Right:) Spectrum for the 525 C
sample together with the spectrum for a CuInS2 film sulfurized at Tsulf =
525 C, tsulf = 5 min.
(1<x<2) phases for comparison.
Phonon modes from CuS were observed for films sulfurized in H2S at 525 C and 550C. Raman measurements are more surface sensitive than XRD measurements. The
negative result from the XRD measurements suggests therefore a comparable small
contribution of CuS to the digenite surface segregation.
There is no direct of proof for Cu9S5 digenite to occur at the CuInS2 surface. But in
view of the presented results it is concluded that digenite yields the main contribution
to the surface segregation. Additionally small amounts of CuS are formed.
5.4. Phase Formation by H2S 61
100 200 300 400 500
475 °C
142
550 °C
525 °C
500 °C250
62
267
474
Inte
nsity
(ct
s /
mW
⋅ min
)
Raman Shift (cm-1)
Figure 5.9: Raman spectra for thin
Cu films sulfurized at vary-
ing temperatures for 5 min.
Excitation wavelength was
λ = 514.5 nm.
5.4 Phase Formation by H2S
Results from the previous sections concerning the phase formation of CuInS2 are sum-
marized in Figure 5.10. Furthermore, new information from XRD measurements were
added. They refer to the Cu-In precursors sulfurized in the quenching series (Section
5.1).
CuIn2 and free Cu were found a day after the precursors ([Cu]/[In]=1.2) were deposited
at room temperature. XRD reflections for the In-rich CuIn2 was detected up to 300C. At higher temperatures the alloy changed to the Cu-rich Cu16In9 phase which was
found up to 425 C.
CuIn2 forms below room temperature and is stable up to 148 C according to the
report of Keppner et al. [41]. The absence of In reflections in the XRD spectra taken
from the metal stack a day after evaporation indicated the complete alloying of the
metals. In the quenching experiments CuIn2 was observed up to 300 C which was
attributed to the fast heating up in the RTP system. Cu16In9 is the only binary phase
which was formed during the sulfurization process. It was detected up to 425 C.
Phonon modes from chalcopyrite and CuAu structures were detected in a early stage
of the sulfurization, Tsulf = 375 C. From the binary compounds solely Cu16In9 was
detected at this temperature. Thus it can be concluded that CuInS2 forms directly
from the Cu16In9 alloy. In Section 5.1 it was shown that CuAu order is preferred
over the chalcopyrite order at this temperature. The cations rearrange with higher
temperatures in favor of the chalcopyrite order. CuAu domains disappear above 475C and CuInS2 material remains as the only ternary compound. At the same stage
CuS appears. CuS is not stable at temperatures above 507 C according to the phase
diagram. In Section 5.3 it was shown that Cu9S5 can be found above 500 C. So it is
likely that CuS turns into Cu9S5 above 500 C. Raman measurements revealed that
62 Chapter 5. Reactive Annealing in H2S
Cu
CuS
Cu S9 5
CuInS : CuAu2
CuInS : Ch2
Cu In16 9
CuIn2
0 15 30 60 75 90 105 120 135 150 165 180 450
~~~~
30
0°C
40
0°C
42
5°C
45
0°C
47
5°C
50
0°C
20
°C
55
0°C
435
Processing period (sec)
Sulfurization temperature
from XRD
from Raman
from Raman and XRD
52
5°C
55
0°C
~~~~
~~
Figure 5.10: Phase formation sequence of CuInS2 absorber films from Cu-In stacks
([Cu]/[In] = 1.2) sulfurized in H2S. Heat ramp: ∆T/∆t = 3C / sec.
CuS is present even after 5 minutes of sulfurization at Tsulf = 550 C. Thus the phase
transition was not completed and CuS partly remains.
5.5 Photovoltaic Performance: Dependence on
Morphology and Structure
Cu-In precursor films can be deposited by sequential sputter and evaporation tech-
niques. The resulting precursor morphology and homogeneity will be discussed with
respect to the photovoltaic performance of CuInS2 solar cells. The influence of H2S
sulfurization parameters on the absorber layers was studied by analysis of the electronic
properties of the related solar cell devices.
Cu-In precursors were prepared by sequential sputtering and evaporation for a metal
ratio [Cu]/[In] = 1.2. Scanning electron microscopy (SEM) images for a sputtered and
an evaporated precursor are shown in Figure 5.11(a) and (c), respectively.
In case of the sputtered precursors an almost closed top layer can be observed.
After sulfurization in H2S (Tsulf = 525 C, ∆T/∆t = 3 C/sec , tsulf = 5 min)
protuberant aggregations of crystals were observed on the surface by SEM. One of
them is shown in Figure 5.11(b). CuInS2 is the only phase proven by XRD, therefore
the crystal aggregations are CuInS2 as well. They are isolated from each other and
103 of them were found per cm2. Their formation can be avoided by setting the heat
ramp to ∆T/∆t ≥ 9 C/sec.
In contrast, the sequential evaporation of Cu-In leads to the formation of distinct
5.5. Photovoltaic Performance: Dependence on Morphology andStructure 63
(a) 4µm 10µm(b)
CuInS2 1µm(d)4µm(c)
Figure 5.11: SEM image of a sequentially sputtered Cu/In precursor (a). Stoichiomet-
ric CuInS2 segregation formed on a Cu-rich CuxS/CuInS2 absorber layer
(b). Evaporated Cu/In precursor (c). Cross section of a CuInS2 layer
prepared from an evaporated Cu/In precursor by H2S sulfurization (d).
islands as shown in Figure 5.11(c). No protuberant aggregations are observed after
sulfurization of this precursors. A cross section is shown in Figure 5.11(d). No
significant differences in average grain size can be found for sulfurization temperatures
in the range from 475 C to 550 C. The structure of sequentially evaporated and
sputtered precursors right after deposition are sketched in Figure 5.12(1) and (I),
respectively. It is known that copper and indium form CuIn2 at room temperature.
It was shown in Section 5.4 that a day after deposition the entire In of such Cu-In
bilayers reacts to CuIn2 and only free Cu remains. Therefore the structures observed
in Figure 5.11(c) can be attributed to CuIn2 on copper as the images were taken the
day after preparation. It is assumed that the morphology of the initial metal layers
was conserved while alloying (Figure 5.12(2)).
It seems that In of sequentially sputtered precursors was more homogeneous dis-
tributed after deposition (Figure 5.12(II)) than In of evaporated films which tends to
form isolated islands.
64 Chapter 5. Reactive Annealing in H2S
CuIn
Cu
CuIn2
Mo
MoMo
Mo
Cu
CuIn2
Mo
CuInS2
Cu S + CuS9 5
5 % H S in Ar2
Cu Sx
CuIn
Mo
CuCuIn
2
Mo
CuCuIn
2
Mo
5 % H S in Ar2
CuIn2
Mo
CuInS2
Cu S + CuS9 5
CuInS2
0 h after deposition:
10 h after deposition:
Annealing in H S:At T(10 sec) ~ 100 °C
2
~
After sulfurization:Resulting structure
Evaporated: Sputtered:
(1) (I)
(2) (II)
(3) (III)
(4) (IV)
Figure 5.12: Formation of CuInS2 films from sequentially evaporated and sputtered
precursors ([Cu]/[In] = 1.2), respectively. (1:) Dewetting of the In film
after deposition. (2,II:) Precursor alloying, conservation of the morphol-
ogy. (3,III:) Snap-shot of the sulfurization process. (4,IV:) Film structure
after sulfurization.
5.5. Photovoltaic Performance: Dependence on Morphology andStructure 65
For the explanation of the observed protuberant aggregations it is assumed that
CuIn2 pellets are formed on the surface (Figure 5.12(III)) during heating up in the RTP
system. Due to the local accumulation of the alloy crystal aggregations are formed. In
contrast, no aggregations were observed after sulfurization of evaporated precursors.
Obviously, the island structure hinders the accumulation of CuIn2. A homogeneous
CuInS2 layer was obtained. The copper film, accessible through the gaps between the
CuInS2 islands, forms probably a CuxS phase at the surface in the initial stage of H2S
sulfurization (Figure 5.12(3)). The presence of this CuxS phase is may be responsible
for the suppression of the dewetting effect. In result a more homogeneous CuInS2 film
is obtained.
Absorber morphology and homogeneity is reflected in the performance of the solar cell
devices. Photovoltaic parameters of CuInS2 based devices from sputtered precursors
versus heat ramp ∆T/∆t are shown in Figure 5.13. The sulfurization temperature was
525 C.
2 4 6 8 10 12 14 16 18 20 22450
500
550
600
650
700
750
Tsulf
= 525 °C t
sulf = 5 min
VOC
Cur
rent
den
sity
(m
A/c
m2 )
Heat ramp: ∆T/∆ t (°C/sec)
Ope
n ci
rcui
t vo
ltage
(m
V)
6
8
10
12
14
16
18
20
ISC
0
2
4
6
8
10
Agg.
Agg
rega
tion
dens
ity (
x103 c
m-2)
2 4 6 8 10 12 14 16 18 20 22
50
52
54
56
58
60
62
64
66
68
70
Tsulf
= 525 °C t
sulf = 5 min
ff
Con
vers
ion
effi
cien
cy (
%)
Heat ramp: ∆T/∆ t (°C/sec)
Fill
fac
tor
(%)
2
4
6
8
10
η
0
2
4
6
8
10
Agg.
Ag
gre
ga
tion
de
nsi
ty (
x103 c
m-2)
Figure 5.13: Photovoltaic parameters of CuInS2 solar cells prepared by H2S sulfuriza-
tion of sputtered precursors using different heat ramps. For comparison,
density of aggregations like in Figure 5.11(b) have been added. The lines
are only a guide to the eye.
For comparison, the density of the surface aggregations were added. Conversion
efficiencies η > 8 % can only be obtained when the temperature is ramped up at
∆T/∆t ≥ 9 C/s. Below this threshold a drastic decrease in efficiency is observed.
The simultaneous decrease of all parameters indicate shunt paths which are most likely
caused by the inhomogeneous lateral CuInS2 distribution.
In the case of evaporated Cu-In layers no dependence on the heat ramp was observed.
Heat ramp could therefore be set as low as ∆T/∆t = 3 C/s in order to avoid possible
thermal stress to the glass substrate. Photovoltaic parameters were determined in
dependence on H2S sulfurization temperature and are shown in Figure 5.14.
66 Chapter 5. Reactive Annealing in H2S
400 425 450 475 500 525 550
0
100
200
300
400
500
600
700
800
Cur
rent
den
sity
(m
A/c
m2 )
Sulfurization temperature (°C)
Ope
n ci
rcui
t vo
ltage
(m
V)
0
4
8
12
16
20
24
6
8
10
12
14
CuAu: FWHM
Ch: FWHM
ISC
VOC
FW
HM
(cm
-1)
400 425 450 475 500 525 550
0
10
20
30
40
50
60
70
Con
vers
ion
effi
cien
y (%
)
Sulfurization temperature (°C)F
ill f
acto
r (%
)
0
2
4
6
8
10
12
6
8
10
12
14
CuAu: FWHM
Ch: FWHM
η
ff
FW
HM
(cm
-1)
Figure 5.14: Photovoltaic parameters of CuInS2 solar cells prepared from evaporated
Cu-In precursors. The H2S sulfurization temperature was varied. Heat
ramp was ∆T/∆t = 3 C/s and tsulf = 5 min. FWHM data for the chal-
copyrite and CuAu A1 phonon modes were added for comparison. The
lines are only a guide to the eye.
The highest conversion efficiency is 11 % at Tsulf = 525 C. Above 525 C there is
a significant decrease in efficiency due to a loss in current and fill factor. Earlier it was
shown that CuS is present close to the back contact for Tsulf = 550 C. It is possible
that the loss is caused by CuS due to its high conductivity. Between 525 C and 475C efficiencies > 8 % were achieved. Thus there exists a broad temperature window for
the H2S sulfurization process. For Tsulf < 475 C a strong decrease in all parameters
is observed and at 425 C there is no energy conversion. Although CuInS2 is formed
already at 375 C, the electronic film character is metallic due to Cu-In alloys present
up to 425 C (refer to Figure 5.10).
FWHM data for the chalcopyrite and CuAu A1 phonon modes were added for compar-
ison to Figure 5.14. The increase in efficiency between 425 C and 475 C correlates
with the disappearance of CuAu domains in the absorber films. High efficiencies were
only obtained when phonon modes for the CuAu structure completely disappeared.
It can be summarized that the suitability of the described H2S-RTP process for the
preparation of efficient CuInS2 solar cells depends on the structure of the used pre-
cursors. The inhomogeneous distribution of CuInS2 crystals in case of the sputtered
precursors can only be avoided by using heat ramps ∆T/∆t ≥ 9 C/s. This problem
does not occur for evaporated precursors. For this reason investigations in this work
focused on absorber films prepared from sequentially evaporated precursors.
The photovoltaic device performance is correlated to the size of CuAu present in the
absorber films. CuAu domains must be avoided in order to obtain efficient solar cells.
Chapter 6
Summary
Thin CuInS2 films are used as absorber material for solar cells. In the framework of
this thesis films were prepared by reactive annealing of Cu-In precursors in H2S gas.
A rapid thermal process was employed for it the first time. Raman spectroscopy was
used for the analysis of the CuInS2 films.
The vibrational properties of CuInS2 films depend on the [Cu]/[In] ratio offered for the
chemical reaction. Apart from the known phonon modes of the chalcopyrite lattice,
additional phonon modes appeared for [Cu]/[In] < 1 at 305 cm−1 and 60 cm−1. This
phonon modes can also be observed for films prepared by reactive annealing of Cu-rich
precursors in the temperature range 375 C - 475 C. The phonon mode at 305 cm−1 is
A1-symmetric as demonstrated by polarization depend Raman measurements. A poly-
morphous structure of the chalcopyrite lattice, the so called CuAu order, is responsible
for the additional phonon modes. This was proven by group theoretical analysis and
phonon frequency calculations.
Reaction kinetics was investigated by means of combined Raman and X-ray diffraction
measurements. Chalcopyrite and CuAu ordered structures form in the early stage of
heating up from the precursor. CuAu order is preferred in this stage. The fraction of
CuAu ordered domains decreases with increasing temperature and is finally vanishing.
The excess copper forms Cu9S5 and CuS on the surface. The Cu-S binaries can be
completely removed by chemical etching.
CuInS2 solar cells based on the prepared CuInS2 films were characterized in depen-
dence on the preparation parameters. It was shown that loss in conversion efficiency
is related to the appearance of CuAu-ordered domains. Single phase CuInS2 films of
high crystalline quality could be prepared by reactive annealing of evaporated Cu-In
films in H2S for 5 minutes at 525 C. Solar cells with efficiencies up to 11 % could be
procuced on basis of this films. The used Raman setup together with the data from
this work can be utilized for ex-situ quality control of CuInS2 absorber films. Moreover,
the fundamentals for the development of a Raman setup for in-situ growth control are
provided.
67
Appendix A
CuS Phase Diagram
Figure A.1: Cu-In phase diagram [86].
68
69
Table A.1: Phases of the Cu-S system [86].
Composition Pearson Space ProtoPhase at.% S(Cu/S) symbol group type(Cu) 0 cF4 Fm3m Cuα chalcocite (αCu2S) 33.33 mP144(?) P21/cβ chalcocite (βCu2S) 33.3 hP6 P63/mmc InNi2Djurleite(Cu 1.96S) 33.7 to 34.1(a) oP380(?) Pmnm
P21nm(?)Pmn21
Digenite (Cu2−δS) 35.5 to 36.2(b) cF12 Fm3m CaF2
Anilite (Cu1.75S) 36.36±0.04 oP44(?) PnmaCovellite (CuS) 50 hP12 P63/mmc CuS(S) 100 oF128 Fddd αS
mP48 P21/α βShR6 R3 εS
Metastable phasesProtodjurleite 33.7 (1.97)(c)
33.8 (1.96)(d)Tetragonal 33.8 (1.96) P43212 Ge III(HP)Hexagonal-tetragonal CuxS 34.1 to 36.4 (1.93 to 1.75)Low digenite (αDg) 35.84 to 36.15 (1.790 to 1.766)(e) R3mBlaubleibender covellite I 41.7±1.7 (1.4±0.1)Blaubleibender covellite II 47.7±2.3 (1.1±0.1)CuS2 66.67 (0.5) Pa3(?)
(a) At 72 C. (b) At 80 C. (c) At 75 C. (d) At 93 C. (e) At 25 C.
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Publications
Parts of this work have already been published:
Conference Proceedings
• Th. Riedle, Th. W. Matthes, A. Neisser, R. Klenk, C. Hinrichs, N. Esser, W.
Richter, M. CH. Lux-Steiner. Preparation of CuInS2 absorber layers by rapid
thermal sulfurization using H2S and DTBS. Proceedings of 16th EPVSEC, Glas-
gow, 713-716, 2000.
77
Curriculum Vitae
Thomas Riedle
Date and place of birth 01.02.1967, Plochingen
since January 1999 PhD student at the Technical University Berlin
and at the Hahn-Meitner-Institut Berlin
December 1998 university graduation: Diplom-Physiker
final thesis: Investigation of hydrogen in chalcopyrite
materials for solar cells
1991-1998 student of physics at the Technical University Berlin
1988-1990 civilian service with ”Action Reconciliation/
Services for Peace” in Tel Aviv / Israel
educational work for disadvantaged children
1986-1988 poly-technical school Stuttgart (Technische Oberschule),
high school graduation (Abitur)
1983-1986 vocational training in electronic-technician at
Gebr. Heller Werkzeugmaschinenfabrik
1973-1983 primary and secondary school, Wendlingen
78