thinking your optics

DIOPTIC GmbH · www.dioptic.de · info@dioptic.de · +49 6201 6504000 · Bergstraße 92A · D-69469 Weinheim

Quality inspection of optical surfaces

thinking your optics

Measurement System Analysis (MSA 1)

reference defects on glass created by focused ion beam milling

Accuracy and Precision

Calibration

Typical Imperfections

small dig long scratch concentration edge chip

smallest ISO specification 5/ 1x0.016; C1x0.04; L1x0.01; E 0.04 evaluates down to 16% of specified dig size

and 25% of specified scratch size

repeatability > 98% for 5/ 1x0.16 assessment to same grade number

> 95% for 5/ 1x0.04

visibility < 1 µm visible defects smaller than 2.5 µm are

evaluated as grade number 0.0025 due

to optical resolutionrepeatability

precision < 1 µm standard deviation for 30 reinsertions

of the same reference sample

trueness < 2 µm (dig) proximity of inspection results to the true

< 1 µm (scratch) value

thinking your optics

mounting examples

fast inspection of the whole surface

full documentationacc. to ISO 10110-7

increased yield and quality

Basics test and documentation• lenses• flats• mirrors

defect types• digs• scratches• edge chips• coating holes

user-friendly• universal sample holder• ergonomic user interface• tablet touch screen option

Options• dust removal „Flow“• autofocus• multi layer evaluation• EDOF (extended depth of field)• volume scan• multi sample evaluation• XY-scan for big flats• pick and place automation

Specificationsurface material glass, metal, semiconductor,

plastics, crystals

smallest defect grade 5/1x0.004

maximum sample diameter 45 mm

inspection time 20 s

image size 256 million pixel

image resolution 0.0028 mm / pixel

lens sagittal depth using EDOF option, max. 10 mm

sample size using XY-scan option, max. 150x150 mm

Test Report

C PdB 00316 D

DIOPTIC GmbH · www.dioptic.de · info@dioptic.de · +49 6201 6504000 · Bergstraße 92A · D-69469 Weinheim©DIOPTIC PdB 02118 E

< 10 % for grade 0.04

IMD