Simplified Process Control

Rapid Ramp-Up to HVM

Comprehensive Control

of Chemistry

Automatic Standard

Generator

Maximize Yield and Reliability

We Keep Your Chemistry Right.™

To achieve ever-greater chip densities, leading chipmakers need to address two critical parts of the device: contacts (MOL) and interconnects (BEOL). At 10nm/7nm, new topologies (such as cobalt) promise to boost the performance and reduce unwanted resistance in chips. In advanced applications, electroplated cobalt (Co) has started to replace tungsten (W) for 10nm/7nm contacts and first (local) interconnects layers.

The Co electroplating process requires a very accurate and reliable control of the key ingredients in the plating solution. ECI’s QUALI-LINE QUANTÅ is a state-of-the-art analyzer designed to monitor Co electroplating solutions with the highest degree of accuracy and reproducibility:

Newly Designed Platform• Comply with the tightest tolerances specs

necessary to assure successful deposition

• Supports wide range of Cobalt deposition concentrations

Maximizes Yield and Reliability• Sets a new norm for Accuracy / Repeatability specs

for Co chemistries• Fast analysis of all main components for

ultimate process control

Rapid Conversion to HVM• QUANTÅ analyzer configuration can be easily scaled

for HVM roll-out• Minimal consumption of reagents and parts for

reduced CoO• Predictive maintenance using new Analyzer Health

Monitor (AHM)

• The QUANTÅ is designed for reliable performance over time

• Minimal, predictable maintenance • Convenient and friendly user interface

QUALI-LINE QUANTÅ® Advanced on-Line Chemical Management for Cobalt Deposition

The Preferred Analyzer for Cobalt

Analysis Results

SPC Report

SPC Data Statistics

ECI International, Inc. Taiwan Branch6F.-1, No. 81, Shuili RoadHsinchu City, 30059, R.O.CTel: 011-886-03-5735899

ECI Technology International Corp.3F Leaders Tower, Wongomae-ro 12, Giheung-gu, Yongin-city, Gyeonggi-do 17086, South KoreaTelephone: 82-31-262-8503

ECI Japan, Inc.Meguro Building, 7F,3-22-5 Shin-Yokohama,Kohoku, Kanagawa Japan 222-0033Tel: 81-45-620-4661

Accurate, Fast, Comprehensive Analysis

Features

Component Accuracy RSDCo ±2% 2%pH 0.01 pH unit 0.01 pH unit

Acid ±2% 2%Additive A ±3% 2%Additive B ±3% 2%

*-Chemistry Dependent

For additional information and specifications, call or visit us online:email: info@ecitechnology.comwebsite: www.ecitechnology.com

Headquarters60 Gordon Drive, Totowa, NJ 07512 U.S.A.Tel: 973•890•1114 Fax: 973•890•1118

Backed by ECI Global Support

QUALI-LINE QUANTÅ

Specifications*

Support for all commercial chemistries/formulations• Automatic validation and calibration

• Seamless integration with plating tools

• Automatic Standard Generator - for supreme RSD and very low CoO

• All-new modular design

• NOWPak® reagent delivery system available

• Complies with industry safety standards: S2/S8 and CE

• Engineered to provide excellent performance over time, in demanding processes