SMART SOLUTIONS for Thin Film Solar Cells

Smar t So lu t ions to D r i ve the Fu tu re.

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THIN FILM SOLAR

technology for thin film solar cells. With its innovative solar portfolio including new production and process concepts, the company underlines its leading position of its successful and high- efficiency solar production technologies. New systems like TENUIS GEN 2 and VITRUM GEN 2 provide a substantial cost-saving potential and can easily be integrated into already existing manufacturing lines.

With its CISARIS system, SINGULUS has also developed a new in-line selenisation furnace for thin film solar technology in close cooperation with a key customer. The first CISARIS tools will start production still in 2011. A second set of CISARIS with a 100 MWp capacity will start production next year. SINGULUS provides with the CISARIS selenization furnace new and important advantages for this challenging market segment.

SINGULUS offers leading-edge technology by its production systems for CIS/CIGS & CdTe thin film solar cells for glass and flexible substrates:

_ Chemical supply systems with automatic dosage equipment_ Systems for the deposition of cadmium-free buffer layers_ Metal free inline glass cleaning machines_ Inline etching and coating machines_ Equipment designed for spray ion layer gas reaction processes_ Selenisation systems for CIS thin film solar cells

SINGULUS TECHNOLOGIES is the world market leader in manufacturing mass production equipment for Optical Discs CD/DVD/Blu-ray. Together with its subsidiary SINGULUS STANGL SOLAR the company has established itself as a provider of state-of-the-art manufacturing equipment for the photovoltaics market.

Various new products have been developed and made marketable by SINGULUS and SINGULUS STANGL SOLAR. The company’s target is to position itself at the forefront for the introduction of new system technologies with respect to silicon and thin film solar technology.

SINGULUS STANGL SOLAR is the market leader for the wet-chemical cleaning equipment for CIS and CdTe processes and offers enhanced system

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THIN FILM SOLAR TECHNOLOGY

CISARISSelenisation

VITRUMGlass Washing

VITRUMDebris Removal

VITRUMGlass Washing

TENUISBuffer Layer

VITRUMPre-conditioning

VITRUMRinse

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Inline Wet Process Equipment, Etching, Cleaning & Single Side Coating

VITRUM GEN 2

treatment respectively. In addition it also provides NP, DAE and EDTA etching for substrate sizes up to 2,200 mm.

In comparison to dipping processes, our unique soft shower process implemented in the second generation VITRUM enables homogeneous, reliable and reproducible etching. It features further advantages in compared to a dipping bath such as a smaller process volume, and therefore faster temperature and concentration changes as well as a higher process speed of up to 5 m/min and minimized carryover.

The new design of the VITRUM GEN 2 improves the accessibility for optimized maintenance work in a large installation cabinet. Piping is similar for all liquid circuits. It offers a high cycle rate and is also easy to integrate into existing production lines. The new VITRUM GEN 2 substantially reduces the invest-ment outlay and very rapidly pays its way.

Main Features_ New, modular design_ Up to 30 % cost reduction_ Better accessibility_ Smaller footprint _ Low cost of ownership_ High throughput_ High availability (uptime > 99* %)_ Standard and customer specific substrate sizes up to 2,600 mm_ Parallel carrier transport for higher throughput_ Reproducible process results *depends on application

The VITRUM GEN 2 provides the platform for several different process steps:At a CdTe manufacturing process it performs six steps, starting with glass washing, back side cleaning CdTe, CdCl2 deposition using roller and salt removal to glass washing and developer. When producing a-Si/µc-Si and CIS/CIGS cells VITRUM features glass washing as well as TCO etching, KCN etching or NH3

The new VITRUM GEN 2 platform is a modular inline system for the processing of glass substrates. The modular design allows the easy integration of different process steps according to the require-ments of CIS, a-Si or CdTe technology (etching, single side and pencil etching, cleaning, single side coating).

As part of the product family VITRUM GEN 2 the new processing machine simultaneously cleans back-sides and edges of thin film solar cells in a single working step. In addition to the automated process control, the new single side etching tool protects the active layer by process hoods and performs pencil and rear side etching with brushes and chemicals. VITRUM GEN 2 is the only tool on the market that cleans the rear side and the edges in one single step without any harm to the active layers. It is used for cleaning after oven processes as well as for etching of undesirable coatings on rear side and edges, for example CdTe or CdS.

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VITRUM GEN 2

VITRUM – Clean_ Inline cleaning equipment (2200/1400/600) _ Pre-rinse and single side brush off (acid/caustic) _ Inline final rinse (cascade cleaner), metal free _ Inline standard cleaning, polishing and brushing machine (glass corrosion)_ Ultrasonic and megasonic support

VITRUM – Etch_ Inline etching equipment

(2200/1400/600) _ Inline TCO (0.3-3 % HCl) etcher _ Inline KCN etcher _ Inline NP etcher _ Inline CuCl2 etcher _ Inline H2O2 developer _ Inline CdCl2 salt removal

VITRUM – Backside & Pencil Etch_ Inline etching equipment_ Removal of wrap around coating on edges and rear side_ Active layer protection (no liquid or vapor affects active layer)

Facility Management SINGULUS STANGL SOLAR also suplies the following facility management systems:_ Chemical supply systems_ Chemical mixing systems_ Waste water treatment_ Exhaust scrubber_ DI-water make up

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Process System for the Application of Buffer Layer

TENUIS GEN 2

SINGULUS offers wet processing systems from R & D over pilot use to full production range 60, 120, 180 and more MW. Due to new and unique concepts in terms of dosing and temperature control, the developers at the subsidiary SINGULUS STANGL SOLAR were successful in reducing the process time by up to 20 %, which has a positive effect and a considerably higher output in production.

The new TENUIS generation offers substantial cost advantages in the pro-duction of high performance CIS/CIGS thin film solar cells. Furthermore, the costs are significantly reduced by temperature profiles adjusted to the process and by very efficient use of process chemicals, so that the new system consistently exploits the savings potential in the manufacturing of thin film solar cells.

Compared with its predecessor the TENUIS GEN 2 version not only reduces the production time but also the required floor space by 30 % and saves footprint and maintenance costs accordingly. Due to the space-saving design the new system is easily integrated into existing production lines. For a higher throughput several production machines can be combined to a large production complex.

Advantages _ Standard proven process: low risk_ High solar cell efficiencies_ More than 150 process modules in production (world leader)_ Lowest possible chemical consumption_ Completely automated inline system_ Single side deposition incl. protection against backside contamination_ Modular system (easy upgrade for higher throughput)_ Reproducible process results_ Automatic dosage and mixing system_ In-situ cleaning of the absorber surface during deposition process

SINGULUS TECHNOLOGIES presents a new development on the way to the efficient wet-chemical coating of thin film solar modules made of copper-indium-gallium-diselenide (CIGS) on glass: the second generation of the TENUIS production line has a modular cluster build basis and enables both significant savings in terms of required floor space and the simultaneous one-side coating of two substrates.

The TENUIS GEN 2 also provides advantages upon commissioning and in the ramp-up stage. Because of the new cluster design the commissioning can commence modularly after a short installation time and the first substrates can be coated. The following cluster can be assembled simultaneously or consecutively. Correspondingly, the TENUIS GEN 2 meets the ever increasing demands of the market with respect to the reduction of the commissioning and ramp-up times.

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TENUIS GEN 2

1. Manual experimental setup for process evaluation and R&D:_ Substrate size for foil and glass:_ 300 x 300 mm² up to 500 x 400 mm²_ Manual loading_ Automatic heating (fluid heating)_ Automatic wobbling (movement)_ Manual dosing_ Process transfer to production line 1:1 possible _ Option for Fumehood and automatic dosing modus possible

2. Semi-automated experimental setup for process evaluation:_ Substrate size for foil and glass: 600 x 900 mm² up to 1400 x 1100 mm²_ Manual loading_ Automatic heating_ Automatic wobbling (movement)_ Automatic dosage

3. Fully-automated experimental setup for a semi commercial line_ Substrate size for foil and glass: 600 x 900 mm² up to 1400 x 1100 mm²_ Automatic loading_ Automatic heating_ Automatic wobbling (movement)_ Automatic dosage_ Automatic buffer system_ Automatic dosage

4. Modular production system for capacities up to 60, 120, 220 and 720 MW_ Modular system _ Reduced footprint of up to 30 % _ Reduced maintenance costs _ New processes of alternative buffer (ZnS) _ Aggressive uniform temperature ramps (even shorter process time) _ New software surface and applications for more flexibility

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10 MW

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720 MW

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Selenisation Furnace for an Optimized CIGS Absorber Formation

CISARIS

process, lead to a production capacity of over 25 MWp per year.

Main Features_ Second generation inline selenisation furnace with optimized cycle time_ Rapid heating (up to ∼ 4 °C/s) of large glass substrates with metal precursor coating (CIG)_ Homogeneous gas distribution and low gas consumption through optimized inlet system

The CISARIS oven is an inline rapid thermal processing equipment, designed for the CIGSSe absorber formation on large area glass substrates. CISARIS consists of a handling station, a vacuum tight process section and a return conveyor and is optimized for the mass production of CIS solar modules.

The main features of the CISARIS include a high uptime and mechanical yield, as well as a fast cycle time, which, in combination with the robust selenisation

_ Introduction of H2S (H2Se) gas at various stages of the process possible _ Uniform heating of large substrates up to 550 °C by using optimized IR radiators for achieving the required crystal quality _ Uniform cooling of the substrate to avoid glass warpage _ Excellent temperature control (mean variation < 5 °C) at all process stages _ Process at atmospheric pressure _ Oxygen and water vapor free process

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CISARIS

atmosphere guaranteed through pump/ purge cycles _ Excellent maintenance concept with maximum accessibility of all machine components_ Proven safety system based on a solid risk management and safety engineering

CISARIS is a proven innovative and reliable equipment, which has been newly developed at SINGULUS based on the previous generation of selenisation ovens.

CISARIS can safely handle the thermal processing of large glass substrates of over 1 sqm at temperatures up to 550 °C under a toxic and corrosive gas atmosphere. High heating and cooling rates, combined with an excellent temperature homogeneity during all process stages are the key factors, which allow the formation of an optimal CIGSSe absorber, required for the production of high efficiency solar modules.

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IMPEDIO

Roll-to-Roll Wet Process Equipment for Flexible Materials

Main Features_ Low cost of ownership_ Low process temperatures_ High availability (uptime > 98 %)_ Lowest possible chemical consumption_ Single-side coating of CdS or alternative buffer layers_ Both side etching with spray or dipping processes_ Both side cleaning with spray process_ Reproducible process results_ Automatic dosage and mixing systems_ Lowest possible DI water consumption_ Uniform spot-free foil drying (dry-in/ dry-out)_ Waste and exhaust management system_ Networked communication supported

Roll-to-Roll – IMPEDIO product portfolio for thin film technology on foils (metal/plastic):_ Roll-to-Roll Chemical Bath Deposition (CBD) of CdS/alternative buffer layers for CIS, CIGS, CIGSSe technologies_ Roll-to-Roll inline cleaning (DI-Water, tensides)_ Roll-to-Roll inline etching (KCN, HCl, H3PO4)

SINGULUS STANGL SOLAR also supplies the following facility manage-ment systems for example chemical supply systems, chemical mixing systems and waste water treatment.

Thin film solar cells on flexible materials are gaining ground due to their potential applications regarding low weight, high flexibility and low cost of manufacturing compared to silicon based solar cells.

SINGULUS STANGL SOLAR offers roll-to-roll production systems of the type IMPEDIO for the wet-chemical coating of solar cells based on CIS/CIGS technology.

1 Input Web2 Process Module3 Rinsing and Drying Module4 Output Web 1 2 3 4

IMPEDIO

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CIGS R&D PLATFORM

The new CIGS R&D Platform is a development tool for the production and thermal treatment of semiconductor layers based on copper, indium and gallium for photovoltaic applications. With the CIGS R&D Platform economic research of new manufacturing processes for CIS-CIGS semiconductor films can be realized. In this way, the highest level of efficiency of thin-film solar modules compared to existing concepts can be achieved. With the process results on the basis of the findings from the demonstration plant, industrial manufacturing processes can be developed and optimized, enabling higher cell performances as well as a significant reduction of manufacturing costs for thin-film photovoltaic modules per watt peak.

The CIGS R&D Platform contains a central transportation station and several process stations. In the process stations the thermal treatment of the secluded precursor layers is conducted.

The system is designed in the following configurations for glass substrates up to 300 mm x 300 mm:

Central Transportation:The Central Transportation describes the basic equipped CIGS R&D Platform , which is expandable for further process options.

Basic Platform_ Loading / Unloading Station _ Central Handling Platform_ Selenium Evaporator

Further Extensions_ Se and S Diffusor_ Sputtering Unit_ TENUIS Buffer Layer Module_ Alternative Buffer Module

For R&D of CIS/CIGS Solar Cells

Affiliated Companies

ChinaSINGULUS MANUFACTURINGGUANGZHOU LTD.Tel. +86-20-34885010frank@singulus.com.cn

FranceSINGULUS TECHNOLOGIESFRANCE S.A.R.L.Tel. +33 3 893111-29singulus@club-internet.fr

Germany SINGULUS STANGL SOLAR GMBHTel. +49 8141 3600-0stangl@singulus.de

Great Britain SINGULUS TECHNOLOGIES UK LTD.Tel. +44 1793 7842-00brian.walsh@singulusuk.com

ItalySINGULUS TECHNOLOGIES ITALIA S.R.L.Tel. +39 071 79303-12info@singulus.it

Latin AmericaSINGULUS TECHNOLOGIESLATIN AMERICA LTDA.Tel. +55 1121 6524-10rodolfo.mignone@singulus.com.br

NetherlandsSINGULUS TECHNOLOGIES AGBranch Office SINGULUS MASTERINGTel. +31 40 7501-400mastering@singulus.de

SingaporeSINGULUS TECHNOLOGIESASIA PACIFIC PTE LTD.Tel. +65 674 119-12sales@singulus.com.sg

SpainSINGULUS TECHNOLOGIES IBERICA S.L.Tel. +34 936 7500-25singulus@singulusib.com

TaiwanSINGULUS TECHNOLOGIES TAIWAN LTD.Tel. +886 2 2748-3366sales@singulus.com.tw

United States and CanadaSINGULUS TECHNOLOGIES INC. Tel. +1 860 68380-00sales@singulus.com

HeadquartersSINGULUS TECHNOLOGIES AGHanauer Landstrasse 103D - 63796 Kahl, GermanyTel. +49 6188 440-0Fax +49 6188 440-110sales@singulus.dewww.singulus.de

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