Proceedings 16 society precision engineering nanotechnology · WenjuanSun1,Anastasios...
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Proceedings of the 16 international conference of the european society for precision engineering and nanotechnology May 30th-3rd June 2016 Nottingham, UK Editors: P. Bointon R. Leach N. Southon Proceedings Compilation: D. Phillips ^•teuspen
Transcript of Proceedings 16 society precision engineering nanotechnology · WenjuanSun1,Anastasios...
Proceedings of the 16 international conference of the european society for
precision engineering and nanotechnology
May 30th-3rd June 2016
Nottingham, UK
Editors:
P. Bointon
R. Leach
N. Southon
Proceedings Compilation:
D. Phillips
^•teuspen
Keynotes Page
Kl Development and Test of a 6 Degree-of-Freedom Micro-vibration Test FacilityMr Ben Hughes
NPL, UK
K2 Multifunctional Additive ManufacturingDr Christopher Tuck
University of Nottingham, UK
K3 EUV Lithography Optics for Sub 8 Nanometre Resolution
Mr Sascha Migura
ZEISS, DE
Session 1: Metrology I: Micro- and Nanotechnology
01.1 An integrated measurement method for complex micro-scale geometries 1
Amir Rabani1, Nicola Senin1,2, Franz Helmli3, Paul Butler-Smith1/, Richard Leach11Advanced Manufacturing Technology Research Group, University of Nottingham,UK
2Department of Engineering, University of Perugia, Italy3Alicona Imaging GmbH, Dr.-Auner-Strajle, Austria
01.2 Development of cutting tool edge measurement with a point autofocus probe 3
Katsuhiro Miura1, Atsuko Nose1, Hirofumi Suzuki2, Mutsumi Okada2,1Mitaka Kohki Co., Ltd., Tokyo, Japan2Chubu University, Kasugai, Japan
01.3 Stabilized semiconductor laser source for high-resolution interferometry 5
Simon Rerucha1*,Andrew Yacoot2, Tuan M. Pham1, Martin Cizek1, Vaclav Hucl1,
Josef Lazar1, Ondrej Cip11Institute ofScientific Instruments of the Czech Academy ofSciences (ISI), CZ
2National Physical Laboratory (NPL), Teddington, UK
01.4 A fully-fibre coupled interferometer system for displacement and angle 7
metrology
Paul Kdchert1, Christoph Weichert1, Sebastian Strube1, Rainer Koning1, Jens
Fliigge1, Eberhard Manske2
1Physikalisch-Technische Bundesanstalt (PTB), Braunschweig, Germany2llmenau University of Technology, Institute of Process Measurement and Sensor
Technology, llmenau, Germany
01.5 Development of a novel high precision Large Range Small Angle Generator 9
Aitor Olarra1, Andoni Delgado1, Mikel Zubieta1, Gorka Kortaberria1, Emilio Prieto2,Maria del Mar Perez2 ,Tomas Morlanes3
3/K4 TEKNIKER
2Centro Espahol de Metrolog(a
3Fagor Aotek
P1.01 Development of multi-channel optical sensor based on dispersive interferometry 11
Byeong Kim1, Ki-Nam Joo11Department ofPhotonic Engineering, Chosun University, Republic of Korea
P1.02 Effect of the number of radiographs taken in CT for dimensional metrology 13
Herminso Villarraga-Gomez1, Darren 0. Clark4, StuartT. Smith1
1Centerfor Precision Metrology2Department ofPhysics and Optical Science
3Department ofMechanical Engineering and Engineering Science - University
ofNorth Carolina at Charlotte, NC, USA
4Carl Zeiss Industrial Metrology, LLC, USA
5Nikon Metrology, Inc, USA
P1.03 Measuring multiple nano-textured areas simultaneously with imaging 15
scatterometry
Jonas Skovlund Madsen1,2, Poul-Erik Hansen1, Brian Bilenberg3, Jesper Nygard2,Morten Hannibal Madsen11Danish Fundamental Metrology A/S, Denmark
2Centerfor Quantum Devices & Nano-Science Center, Niels Bohr Institute,
University of Copenhagen, Copenhagen, Denmark
3NIL Technology ApS, Kgs. Lyngby, Denmark
P1.04 Phase transformation mechanism from carbon materials to diamond in 17
synthesis process based on molecular dynamics analysisH. Tanaka, S. Shimada
Osaka Electro-Communication University, Japan
P1.05 Monte-Carlo simulation and experimental validation of the self-calibration of a 19
linear encoder
Niels Bosmans, Jun Qjan ,Dominiek Reynaerts
KU Leuven, Department of Mechanical Engineering, Belgium
P1.06 Implementation of line-scan dispersive interferometry for defect detection 21
Dawei Tang, Feng Gao, Xiangqian Jiang
EPSRC Centre for Innovative Manufacturing in Advanced Metrology, University of
Huddersfield, Huddersfield UK
P1.07 A rotational stitching method for measuring cylindrical surfaces 23
Mingyu Liu1, Chi Fai Cheung1, Shanshan Chen1,21Partner State Key Laboratory of Ultra-precision Machining Technology, The Hong
Kong Polytechnic University, Hong Kong, China
2School of Mechatronics Engineering, Harbin Institute of Technology, China
P1.08 Characterisation of a scintillation flat panel detector employed by an X-ray 25
computed tomography system: measurements of MTF, NPS and DQE
Wenjuan Sun1, Anastasios Konstantinidis2,1lias Billas1, Michael McCarthy1,Stephen Brown1 ,Hannah Corcoran1,31National Physical Laboratory, Teddington, UK
2Christie NHS Foundation Trust, Manchester, UK
3University College London, London, UK
P1.09 Three-dimensional measurements with a novel technique combination of 27
Confocal and Focus Variation with a simultaneous scan
R. Artigas, A. Matilla, J. Marine, J. Perez, C. Cadevall
Sensofar Tech SL
P1.10 Assessing fringe projector volumetric error sources using the NPL tetrahedral 29
artefact
Martin Dury, Sean Woodward, Stephen Brown
,Michael McCarthy
National Physical Laboratory, Teddington, UK
Pl.ll Design of high strength steel plate fatigue specimen for accelerated ultrasonic 31
fatigue test
Hyunho Yeom, Byungjoo Choi, Taeho Seol, Moongu Lee, Yongho Jeon
Department of Mechanical Engineering, Ajou University
PI.12 A self-calibration methodology for a 2D-long range motion stage 33
Marta Torralba1, Lucia Diaz-Perez2, Margarita Valenzuela3, Jose Albajez2, Jose
Yagiie-Fabra2, Juan Aguilar21Centra Universitario de la Defensa, Zaragoza, Spain
2Universidad de Zaragoza, Zaragoza, Spain3Universidad de Sonora, Departamento de Ingeniena Industrial, Mexico
PI.13 A high-accuracy, self-calibrating and traceable coordinate measurement system 35
Michael Campbell, Ben HughesNational Physical Laboratory, Hampton Road, Teddington, UK
P1.14 Form error assessment of circular-arc cams 37
Shan Lin1,2, Otto Jusko1, Frank Hartig1 and Jorg Seewig2^hysikalisch-Technische Bundesanstalt, Braunschweig, Germany
2lnstitutefor Measurement and Sensor-Technology, Technical University ofKaiserslautern, Kaiserslautern, Germany
PI.15 Dimensional correction of helically scanned cylinder data 39
Pei Liu1, Otto Jusko1 and Rainer Tutsch2
1Physikalisch-Technische Bundesanstalt, Braunschweig, Germany
2lnstitutfur Produktionsmesstechnik, Technische Universitdt Braunschweig,
Braunschweig, Germany
PI.16 In-process measurements of strain fields during grinding 41
Andreas Tausendfreund, Dirk Stobener, Gerald Strobel
University of Bremen, Bremen Institute for Metrology, Bremen, Germany
PI.17 The prediction of surface morphology with detecting the real-time vibration 43
during ultra-precision diamond cutting
Zheng Qiao, Bo Wang, Da Qu, Yangong Wu, Dongxu Wu
Centerfor Precision Engineering, Harbin Institute of Technology, PR. China
PI.18 Rotating sensor for new possibilities on Leitz Infinity Coordinate Measuring 45
Machine
C.Sanz1,2, A.Cherif1, H.Mainaud-Durand1, K.Artoos1, F.Morel1, P.Morantz2,P.Shore2, J.Schneider3, N.Steffens3
1CERN, Meyrin (Switzerland)
2Cranfield University (United Kingdom)3HEXAGON Metrology, Wetzlar (Germany)
PI.19 Simulation study of a refined approach for specular surfaces reconstruction in 47
deflectometry
Hongyu Ren1,2, Feng Gao1, Xiangqian Jiang13£PS/?C Centre, University of Huddersfield, Huddersfield, UK
2College of Mechatronic Engineering and Automation, National University of
Defense Technology, China
P1.21 Topographical profiler investigations on a sphere 49
Peter Thomsen-Schmidt, Dorothee Huser, Andre Feigner
Physikalisch-Technische Bundesanstalt Braunschweig und Berlin (PTB)
P1.22 Multi-sensor measurement of an insulin injection needle 51
Ulrich Neuschaefer-Rube1, Lorenzo Carli2, Benjamin Hopp3, Christian
Rothleitner1, Andreas Staude4 ,Sebastian Zoller3
3Physikalisch-Technische Bundesanstalt, Braunschweig, Germany2Novo Nordisk A/S, Bagsvaerd, Denmark
3Werth Messtechnik GmbH, Gieflen, Germany
4Bundesanstaltfur Materialforschung und -prufung, Berlin, Germany
P1.23 A novel method based on Bayesian regularized artificial neural networks for 53
measurement uncertainty evaluation
Moschos Papananias1, Simon Fletcher1, Andrew Longstaff1, Azibananye Mengot21Centrefor Precision Technologies, University of Huddersfield, UK,
2Renishaw pic, UK
P1.24 Straightness measurements with sub-nanometre repeatability 55
Christoph Weichert1, Rainer Koning1, Paul Kochert1, Axel Wiegmann1, Jens
Flugge1, Rainer Tutsch21
Physikalisch-Technische Bundesanstalt (PTB), Braunschweig, Germany
2Technische Universitat Braunschweig, Institutfur Produktionsmesstechnik
(IPROM), Braunschweig, Germany
P1.25 Precision absolute distance measurement technique onto rough surface object 57
using self-beat signals of optical frequency comb
Fuminori Kimura1, Taro Onoe1, Satoru Takahashi2, Kiyoshi Takamasu1, Hirokazu
Matsumoto11Department of Precision Engineering, The University of Tokyo,Tokyo, Japan
2
Research Centerfor Advanced Science and Technology, The University of Tokyo,
Tokyo, Japan
P1.27 Comparison of two AFM probe inspection techniques for three-dimensional tip 59
characterisation
Zaynab Alraziqi, Nur Mukhtar, Emmanuel Brousseau
Cardiff School of Engineering, Cardiff University, Cardiff, UK
P1.28 Traceable In-process Measurement (TIM) - Producing dimensional transfer 61
artefacts for the assessment of workshop machine tool performanceSean Woodward
, Stephen Brown, Martin Dury, Michael McCarthyNational Physical Laboratory, Teddington, UK
P1.29 Towards uncertainty in dimensional metrology of surface features for advanced 63
manufacturing
Giuseppe Musso1,3, Nicola Senin1,2, Maurizio Galetto3, Richard Leach11Faculty of Engineering, University of Nottingham, UK
2Dipartimento di Ingegneria, Universita di Perugia, Italy
3Dipartimento di Ingegneria,Politecnico di Torino, Italy
P1.30 Calibration of a parallel kinematic machine tool utilizing a MEMS inertial 65
measurment unit
Bjorn Lunemann1, Elmar Wings1, Edward Chlebus2
faculty of Technology, Dept. Mechanical Engineering, Hochschule Emden/Leer -
University ofApplied Sciences, Emden, Germany
2Faculty of Mechanical Engineering, Wroclaw University of Technology, Wroclaw,
Poland
P1.31 Developments in automated flexible gauging and the uncertainty associated 67
with comparative coordinate measurement
A. Forbes1, M. Papananias2, A. Longstaff2, S. Fletcher2, A. Mengot3, K. Jonas31National Physical Laboratory, UK
2Centrefor Precision Technologies, University of Huddersfield, U,
3Renishaw pic, UK
P1.32 A Key Point Method for Data Registration for MultiSensor Fusion 69
Wenhan Zeng1,2, Xiangqian Jiang1, Shan Lou1, Paul Scott1
1EPSRC Centrefor Innovative Manufacturing In Advanced Metrology, University of
Huddersfield, UK
2State Key Lab of Digital Manufacture and Equipment, School of Mechanical
Science & Engineering, Huazhong University ofScience and Technology, P.R. China
P1.33 Calibration and use of an optical 5-axis micro coordinate metrology machine 71
J. Stradner, R. Danzl, F. Helmli
Alicona Imaging GmbH,Austria
P1.34 CT crown for on-machine scale calibration in Computed Tomography 73
Alessandro Stolfi, Leonardo De Chiffre
Department of Mechanical Engineering, Technical University of Denmark (DTU),
Kgs. Lyngby, Denmark
P1.35 Reference areal surface metrology by high speed metrological large range AFM 75
Gaoliang Dai, Andre Feigner, Ludger Koenders, Jens Fluegge
Physikalisch-Technische Bundesanstalt, 38116 Braunschweig, Germany
P1.36 Development of a geometrical error model for coordinate measurements made 77
by industrial X-ray computed tomographyMassimiliano Ferrucci1,2, Evelina Ametova2, Michael McCarthy1, Wim Dewulf21Engineering Measurement Division, National Physical Laboratory, Teddington,UK
2Department ofMechanical Engineering, KULeuven, Belgium
P1.37 Modeling the effect of probe force on length measurements on polymer parts 79
AN Mohammadi, Mads Rostgaard Sonne, Giuseppe Dalla Costa, Daniel Gonzalez-
Madruga, Leonardo De Chiffre and Jesper Henri Hattel
Department of Mechanical Engineering, Technical University ofDenmark (DTU),
Building 425, Produktionstorvet,DK- 2800 Kgs. Lyngby, Denmark
P1.38 Implementation of a metrological UHV-STM 81
Johannes Ostermann1, Ingo Busch1, Jens Fliigge1, Ludger Koenders1, Peter
Lemmens2, Oliver Lenck1,Radovan Popadic11Physikalisch-Technische Bundesanstalt (PTB), Braunschweig, Germany
2Technische Universitdt Braunschweig, Institute for Condensed Matter Physics,
Braunschweig, Germany
P1.39 Length determination on industrial polymer parts from measurement performed 83
under transient temperature conditions
Giuseppe Costa, Daniel Madruga, Leonardo De Chiffre, Hans Hansen
Department of Mechanical Engineering, Technical University ofDenmark (DTU),
Kgs.Lyngby, Denmark
P1.41 Contamination of U.CMM stylus tips: on-machine inspection 85
Xiaobing Feng1, Cyril Lacorne1, Gustavo Fernandes1, Simon Lawes1, Peter Kinnell2
xThe University of Nottingham
2Loughborough University
P1.42 Dynamic Length Metrology (DLM) for measurements with sub-micrometre 87
uncertainty in a production environment
Leonardo De Chiffre, Hans N0rgaard Hansen, Jesper Henri Hattel, Daniel Gonzalez-
Madruga, Giuseppe Dalla Costa, Mads Rostgaard Sonne, Ali Mohammadi
Department of Mechanical Engineering, Technical University of Denmark (DTU),
Kgs. Lyngby, Denmark
P1.43 Design, manufacturing and calibration of a large ring segment 89
Alessandro Balsamo1, Roberto Frizza2, Gian Picotto1, Davide Corona1
1lstituto Nazionale di Ricerca Metrologica (INRiM), Italy
2MG-Marposs, Italy
P1.44 Effect of void pixels on the quantification of surface topography parameters 91
F. Medeossi1, S. Carmignato2, G. Lucchetta1, E. Savio1
1Dept. of Industrial Engineering, University ofPadova, Padova, Italy2Dept. of Management and Engineering, University of Padova,Vicenza, Italy
P1.45 On characterising surface topography of metal powder bed fusion additive 93
manufactured parts
S Lou,A Townsend, X Jiang, L Blunt, W Zeng, P Scott
EPSRC Centrefor Innovative Manufacturing in Advanced Metrology, University of
Huddersfield,UK
P1.46 The influence of humidity on accuracy length measurement on polymer parts 95
D. Gonzalez-Madruga1, A. Alexiou1, G. Dalla Costa1, L. De Chiffre1, LC. Neves2
department ofMechanical Engineering, Technical University of Denmark (DTU),
Kgs. Lyngby, Denmark
2LEGO System A/S, Denmark
P1.47 Traceable characterisation of high-precision moving stages with displacement 97
resolutions down to 10 pm
Zhi Li1, Haojie Xia2, Uwe Brand1, Helmut Wolff1, Ludger Koenders1
1Physikalisch-Technische Bundesanstalt (PTB), Braunschweig, Germany
2Hefei University of Technology, Anhu, P.R. China
P1.48 Traceability of optical length measurements on sand surfaces 99
Kamran Mohaghegh, Seyed Yazdanbakhsh, Niels Tiedje, Leonardo De Chiffre
Department of Mechanical Engineering, Technical University of Denmark,
Kgs. Lyngby, Denmark
P1.49 Surface Texture Measurements of gear tooth 101
Fabrizio Pollastri and Gian Picotto
Istituto Nazionale di Ricerca Metrologica (INRIM),Torino, Italy
P1.50 Step-height measurements on sand surfaces: A comparison between optical 103
scanner and coordinate measuring machine
Kamran Mohaghegh, Seyed Alireza Yazdanbakhsh, Niels Skat Tiedje, Leonardo De
Chiffre
Department of Mechanical Engineering, Technical University of Denmark,
Kgs. Lyngby, Denmark
P1.51 Optimisation of Workpiece Manipulation for Multimaterial Measurements in 105
Industrial Computed Tomography
Andrea Buratti, Soufian Achour, Robert Schmitt
Laboratoryfor Machine Tools and Production Engineering (WZL) ofRWTH Aachen
University, Aachen, Germany
P1.52 Development of 3D form measurement of semiconductor structure~ 107
Measurement of FinFET profile using TEM and CD-SEM images ~
Yuki Iwaki1, Satoru Takahashi2, Kiyoshi Takamasu11Department of Precision Engineering, The University of Tokyo, Japan2Research Centerfor Advanced Science and Technology, The University of Tokyo,Japan
P1.53 Uncertainty estimation for the coordinate measuring machine calibration by 109
using one LaserTRACER
Po Hsu1, Huay Liou2, Kam Lui3
Center for Measurement Standards (CMS)/ Industrial Technology Research
Institute (ITRI)
PI 55 111Metrology on micro-spheres with engineered surface texture
Alain Kung1, Anais Nicolet1, Felix Meli1, Rudolf Thalmann1, Christoph Battaglia2,Michael Marxer2, Thomas Jordi3
1Federal Institute of Metrology METAS, Switzerland
2NTB Interstaatliche Hochschulefur Technik Buchs, Institut PWO, Switzerland
3Saphirwerk AG, Switzerland
P1.56 Development of calibration artefacts for x-ray radiographic and micro-CT 113
metrology
Jeffery Thousand1, Stuart Smith1
University of North Carolina at Charlotte2Centerfor Precision Metrology
P1.57 One step fabrication and characterisation of stainless steel superhydrophobic 115
surfaces using laser ablation
Yanling Tian1, Xianping Liu1, Susan Burrows2
1School ofEngineering, University of Warwick, Coventry, UK
2Department ofPhysics, University of Warwick, Coventry, UK
P1.58 Coordinate interferometric measurement with infrared telecom laser diode 117
Josef Lazar, Miroslava Hola, Martin Cizek, Vaclav Hud, Simon Rerucha, Ondrej Cip
Institute ofScientific Instruments of the Czech Academy ofSciences (ISI), CZ
P1.59 Calibration and correction of a 6 degree of freedom piezo driven stage 119
Alain Kiing, AnaTs Nicolet and Felix Meli
Federal Institute of Metrology (METAS), Switzerland
P1.60 Scanning strategies for long term and long distance AFM measurements 121
Nataliya Vorbringer-Dorozhovets, Eberhard Manske
Production and Precision Measurement Technology Group,Department ofMechanical Engineering, Technische Universitat llmenau, Germany
P1.61 Comparison of measurements from optical CMM and focus-variation microscope 123
of a U.PIM mechanical part
D. Quagliotti, J. Salaga, G. Tosello, H. Hansen
Technical University of Denmark, Department ofManufacturing Engineering,
Kgs. Lyngby, Denmark
P1.62 Performance verification of focus variation and confocal microscopes measuring 125
ultra-fine tilted surfaces
Danilo Quagliotti1, Federico Baruffi1,2, Guido Tosello1, Stefania Gasparin3,Massimiliano Annoni2, Paolo Parenti2, Rene Sobiecki1, Hans N. Hansen1
technical University ofDenmark, Kgs. Lyngby, Denmark
2Politecnico di Milano, Milan, Italy
3LEGO Systems A/S,Denmark
P1.63 A universal substrate sample fixture for efficient multi-instrument inspection of 127
large, flexible substrates, with absolute position registration support
Christopher Jones1, Marco Santiano2, Stephen Downes1, Roberto Bellotti2,Daniel O'Connor1, Gian Picotto21National Physical Laboratory, Hampton Road, Teddington,UK
2lnstituto Nazionale di Ricerca Metrologica, Torino, Italy
P1.64 Investigating mechanical characteristics of styli for micro-CMMs 129
Mohd Ismail1, Kuo-Yu Tseng4, James Claverley1, Dong-Yea Sheu4, Derek
Chetwynd2, Richard Leach5
1Engineering Measurement Division, National Physical Laboratory, UK
2School of Engineering, University of Warwick, UK
3Quality Engineering Section, University Kuala Lumpur, Malaysia
4Institute of Mechatronic Engineering, National Taipei Univ of Technology, Taiwan
5Manufacturing Metrology Team, University of Nottingham, UK
P1.65 Design of a laser scanner system for sub-mm 3D shape measurement using 131
commercial off-the-shelf components
Taufiq Widjanarko, John Hodgson, Peter Kinnell, Michael Jackson
EPSRC Centre for Innovative Manufacturing in Intelligent Automation, Wolfson
School ofMechanical Engineering, Loughborough University, Loughborough UK
P1.66 Tilt Sensitivity of an Eddy-Current Position Sensor for High-Precision Applications 133
Johan Vogel, Stoyan Nihtianov
Delft University of Technology, The Netherlands
P1.67 ID measurement of coordinates in space: a novel apparatus 135
A. Balsamo, A. Egidi, C. Francese, M. Pisani
INRIM - National Institute of Research in Metrology - Turin, Italy
P1.68 A method for assessing measurement precision and stability of optical probes 137
James Norman, Xavier Tonnellier, Paul Morantz
Precision Engineering Institute, Cranfield University, UK
P1.69 In-process characterization of sub-wavelength structures 139
Gabriela Alexe, Andreas Tausendfreund, Dirk Stobener, Gerald Strobel
University of Bremen, Bremen Institutefor Metrology, Bremen, Germany
P1.70 The low-dispersive optical cavity as a length sensor using radiation of an optical 141
frequency comb
Lenka Pravdova, Adam Lesundak, Vaclav Hucl, Martin Cizek, Bretislav Mikel, Jan
Hrabina, Radek Smid, Simon Refucha, Josef Lazar, Ondfej 6'pInstitute of Scientific Instruments of the CAS, Czech Republic
P1.71 Linking of multi-sensor measurement data for micropart measurements 143
R. Bergmans, G. Kok, P. Sonin
VSL, Thijsseweg 11, 2629 JA, Delft, the Netherlands
P1.72 Suitability assessment of micro-EDM in machining Nitinol for medical 145
applications
James W. Mwangi, Henning Zeidler, Ralf Kiihn, Andreas Schubert
Technische Universitat Chemnitz,Chemnitz, Germany
P1.73 Terahertz nanoscopy of spontaneous surface waves on dielectrics 147
Yusuke Kajihara, Takafumi Yokoyama, Kuan-Ting Lin, Sunmi Kim
Institute of Industrial Science, The University of Tokyo
Session 2: Mechatronics and Control
02.1 Separation strategies for a feeding system with modular coupled piezoelectric 151
vibration conveyers
Juergen Fleischer, Martin Krause
wbk Institute of Production Science, Karlsruhe Institute of Technology (KIT),
Germany
02.2 An accelerometer based-feedback technique for improving dynamic 153
performance of a machine tool
Jonathan Abir1, Paul Morantz1,2, Stefano Longo3, Paul Shore1,2/,1Precision Engineering Institute, SATM, Cranfield University, UK
2Loxham Precision Ltd, UK
3Centre for Automotive Engineering and Technology, Cranfield University, UK
4National Physical Laboratory, UK
02.3 A three device silicon based platform for micro-assembly and characterization 155
F. Cosandier1, F. Barrot1, J. Kruis1,2, L Voruz2, G. Musy1, S. Droz1, L. Giriens1,W. Glettig1 and E. Domine1
1CSEM, Centre Suisse d'Electronique et de Microtechnique SA, Switzerland
2EPFL, Ecole polytechnique Federate de Lausanne, Switzerland
02.4 Control model for an over-determined fluid dynamic planar drive 157
B. Denkena1, D. Dahlmann1, T. Schumacher1
Institute of Production Engineering and Machine Tools (IFW), Leibniz Universitdt
Hannover, Germany
02.5 High dynamics and high accuracy parallel robot for pick and place applications 159
Willson Sudarsandhari Shibani1, Ivan Garcia Herreros1, Michael Stepputat2 and
Robert Kraus2
1ETEL SA, Zone Industrielle, Switzerland
2DR. JOHANNES HEIDENHAIN GmbH, Traunreut, Germany
P2.01 Design of a novel fine stage actuated by voice coil motor 161
Jae-heon Jeong1, Myeong-hyeon Kim1, Siwoong Woo1, Hak Jun Lee1, JaehyunPark1, Dahoon Ahn2, Hyoyoung Kim3 and Daegab Gweon1
1Nano-Opto-Mechatronics Lab., Department ofMech. Eng, KAIST, South Korea
2Advanced HSR research division, HSR system research center, South Korea.
3Manufacturing System R&D Group, KITECH,South Korea
P2.02 Manufacture and experiment of a compliant parallel XY nano-positioning stage 163
for high dynamic performance
Jae-heon Jeong1, Hak Jun Lee1; Siwoong Woo1, Jaehyun Park1, Myeong-hyeon
Kim1, Dahoon Ahn2, Hyoyoung Kim3, Daegab Gweon1
1Nano-Opto-Mechatronics Lab., Department of Mech.Eng.KAIST, South Korea
2Advanced HSR research division, HSR system research center, South Korea.
3Manufacturing System R&D Group, KITECH, South Korea
P2.03 Concept design of high precision portable machines for the in-situ 165
manufacturing of the ITER vacuum vessel
Josu Eguia1, Rafael Enparantza1, Luis Uriarte1, Aitzol Lamikiz2
XIK4 - TEKNIKER, Spain
2Departamento de Ingeniena Mecanica, Spain
Validation of pre-sliding friction models for ultra-high precision applications 167
P2.04 Ervin Kamenar and Sasa Zelenika
University ofRijeka, Faculty of Engineering & Centrefor Micro and Nano Sciences
and Technologies, CROATIA
P2.05 Development of an intelligent automated polishing system 169
E. Kalt, Dr R.P. Monfared, Prof. M.R. Jackson
EPSRC Centrefor Innov. Manu'in Intelligent Automation, Loughborough University
P2.06 Study on the direct measurement of viscoelastic characteristics in the high- 171
frequency range
Shinji Koganezawa, Yuta Katsuta, Hiroshi Tani, Norio Tagawa
Department of Mechanical Engineering, Kansai University
P2-07 Improving accuracy of hydraulic-driven forceps
Tohru Sasaki1, Yasuyuki Mito2, Kyosei Yamamoto3 and Mitsuru Jindai1
1Graduate School ofScience and Eng. for Research, University of Toyama, Japan2Graduate School ofScience and Eng. for Education, University of Toyama, Japan
3Faculty of Engineering, University of Toyama, Japan.
P2.08 Compensation of frictional disturbances in ultra-high precision mechatronics 175
devices
Ervin Kamenar and Sasa Zelenika
University of Rijeka, CROATIA
P2.09 Motion control parameter identification using genetic algorithms 177
Dr. Thomas Haase1, Bernhard Guddei1, Jessica Pietri2
1Physik Instrumente (PI) GmbH & Co. KG, Germany2Hochschule Karlsruhe Technik und Wirtschaft, University ofApplied Sciences
P2.10 Measuring discontinuity shape using laser displacement sensor 179
Daisuke Abe1, Takanori Yazawa2, Tatsuki Otsubo3, Reiko Yamada4
Nagasaki University (Former) DAI-ICHI HIGH FLEQUENCY CO., LTD (Now)2Professor, Graduate School of Engineering, Nagasaki University3Ph.Doctor, Mechanical and electronic Engineering, Salesian Polytechnictechnical Assistant, Graduate School ofEngineering, Nagasaki University
P2.ll High-Precision positioning system with magnetic guidance 181
Mousa Lahdo1, Tom Strohla2, Sergej Kovalev1
1Department of Informatics, University ofApplied Sciences Mittelhessen
2Department ofMechatronics - llmenau University of Technology
P2.12 High precision milling with a novel compliant machine tool 183
E. Uhlmann1,2, D. Oberschmidt1, S. Guhde2, M. Polte2
1Fraunhofer Institutefor Production Systems and Design Technology IPK, Germany
2lnstitutefor Machine Tools and Factory Management IWF, Technische Universitdt
Berlin, Germany
P2.13 Development of a high precision scratcher tester 185
Rodrigo L Stoeterau, Matheus Filipe Andriolo Ramos
University ofSao Paulo, Laboratory of Metrology and Micro Mechanics
P2.14 Modelling and identification of pre-sliding and sliding friction in ultra-high 187
precision positioning systemsSasa Zelenika and Ervin Kamenar
University of Rijeka, CROATIA
P2.15 Inherent process monitoring for piezoceramic transducer integration 189
W.-G. Drossel1,2, A. Schubert1,2, M. Putz1,2, H.-J. Koriath1, V. Wittstock2, S. Peter2
S. Hensel1, M.Nestler1, S. F.Jahn2, R. Muller1, A. Pierer1, B. Muller2, M. Schmidt2
1Fraunhofer Institutefor Machine Tools and Forming Technology, Germany
2TU Chemnitz, Germany
P2.16 Control system for an ultra-precision electromagnetic linear guide 191
B. Denkena, D. Dahlmann, R. Kriiger
Inst ofProd Eng and Machine Tools (IFW), Leibniz Universitat Hannover, Germany
P2.17 Enhancement of the Mechatronic Development Process with Software in the 193
loop Simulation
Karin Fahraeus, Jonas Walther
Mycronic AB, R&D Mechatronics, Sweden
P2.18 The characteristics of an inchworm stage using piezoelectric actuators and 195
electromagnets
Akihiro Torii, Yuta Mitsuyoshi, Suguru Mototani, Kae Doki
Aichi Institute of Technology, Japan
P2.19 Ultraprecision 4-axis positioning mechanism using flexure guide and 197
electromagnetic actuator for topography measurement system
Shigeo Fukada, Takuya Kirihara, Akihiro Kodama
Shinshu University, Japan
P2.20 Damping Control Effect of lateral vibration induced by plane motion using 199
Hybrid(MR-Pneumatic) Isolation Systems
HyungTae Kim, HyoYoung Kim, AnMok Jeong, JongWook An, and CheolHo Kim
KITECH, ChoenAn, South Korea
P2.21 Design and Analysis of Halbach VCM actuator for 6-DOF active vibration 201
isolation system
HyoYoung Kim1, Jin-ho Lee2, MyeongHyeon Kim3, Jae-heon Jeong4, Jaehyun Park4
and Kihyun Kim21Korea Institute of Industrial Technology, South Korea
2Department ofMechatronics, Korea Polytechnic University, South Korea
3Korea Research Institute ofStandards and Science, South Korea
AKAIST, South Korea
P2.22 Damping force-based cutting force monitoring in ball-screw-driven stage 203
Yuki Yamada, Yasuhiro Kakinuma
Keio University, Department ofSystem Design Engineering
P2.23 System for directly driven Hexapods for highly dynamic 6 DoF Applications 205
Christian Muellerleile1, Reinhard Kotter2, Dr. Thomas Haase1, Dr. Christian Rudolf1
1Physik Instrumente (PI) GmbH& Co.KG, Karlsruhe, Germany
2Physik Instrumente (PI) GmbH& Co.KG, Rosenheim, Germany
P2.24 Development of fast tool servo for advanced machining processes in turning 207
operation
Harkaitz Urreta, Gorka Aguirre, Xabier Aranzeta
IK4-IDEKO, Arriaga kalea 2, 20870 Elgoibar (Basque Country) Spain
P2.25 Tuning and testing force feedback control for single-axis nanopositioning stages 209
Mohamed Kara-Mohamed1, William P. Heath1, Alison Raby2xThe University ofManchester, UK.
2Elektron Technology pic, Cambridge, UK
P2.26 Description of an apparatus for testing air bearing pad performance 211
Mel Liebers, Dan Oss, Sam Arneson
Professional Instruments Company, Hopkins, Minnesota, USA
P2.28 Pitching and displacement control of water driven stage 213
Yohichi Nakao, Satoshi Shibata and Akio Hayashi
Kanagawa University
P2.29 Compensate undesired force and torque measurements using parametric 215
regression methods
Ali Al-Yacoub1, Niels Lohse1, Yee Goh1, Zahid Usman2, Mike Jackson1
1EPSRC Centre for Innov. Manuf in Intelligent Automation, Loughborough Uni
2InstituteforAdvance Manuf and Eng. Robotics and Automation, Coventry Uni
P2.30 Creation of a control system for plasma delivery to increase determinism and 217
robustness while processing using an ICP torch
Hui Zhou1, Renaud Jourdain1, Vincent Serantoni1, Jose L Endrino2, Paul Shore1,3/1Precision Engineering Institute, Cranfield University, UK
2Surface Engineering and Nanotechnology Institute, Cranfield University, UK
3Loxham Precision Ltd, UK
^Engineering Measurement Division, National Physical Laboratory, UK
P2.31 Accuracy and repeatability estimation in micromachining using an enhanced 219
artificial vision algorithm for controlling the screen LED positioning on a LCD
0. de Francisco Ortiz1, H.T. Sanchez Reinoso2, M. Estrems Amestoy3^egula Technologies, Spain2Univ. Politecnica de Cartagena, Spain3Univ. de Navarra, Spain
P2.32 Precision flexure hinges for high-performance optics 221
Henner Baitinger, Martin Latzel, Marwene Nefzi
Carl Zeiss SMT, Rudolf-Eber-Str. 2, 73447 Oberkochen, Germany
Session 3: Plasma Assisted Manufacturing
03.1 Microwaves enable activated plasma figuring for ultra-precision fabrication of 225
optics
Adam Bennett1, Renaud Jourdain1, Paul Kirby1, Peter MacKay2, Paul Shore1,3,4,John Nicholls1, Paul Morantz1,41Precision Engineering Institute, Cranfield University, UK
2Gooch & Housego, UK
3National Physical Laboratory, UK*Loxham Precision Ltd., UK
03.2 Planarization of CVD grown single crystal diamond wafer by numerically 227
controlled plasma chemical vaporization machiningHisaya Dojo1, Katsuyoshi Endo1, Hideaki Yamada2, Akiyoshi Chayahara2, Yoshiaki
Mokuno2 and Kazuya Yamamura1
1Research Center for Ultra-precision Science and Tech., Osaka University, Japan2National Institute of Advanced Industrial Science and Technology (AIST), Japan
03.3 Droplet assisted laser micromachining of tungsten carbide 229
Jose Manuel Lopez Lopez, Alan Bakrania, Jeremy Coupland ,
Sundar Marimuthu
Optical Engineering Group, Loughborough University, UK
03.4 Ion beam figuring of RSA aluminium surfaces 231
Thomas Arnold, Jens Bauer
Leibniz Institute ofSurface Modification (IOM) Leipzig / Germany
Session 4: Precision Cutting
04.1 Chemical aspects of single crystal diamond tool wear 235
Chris Evans1, Tom Childs2 and Ed Paul31
University of North Carolina at Charlotte, USA
2Leeds University, UK3Stockton University, USA
04.2 Micro-topography generation method using a rotating tool actuated by an 237
electromagnetic actuator
JongHyun Kim, Sang-Ki Park, Min-Su Kim and Sun-Kyu Lee
School of Mechatronics, Gwangju Inst ofScience and Tech., Republic of Korea
04.3 Micro machining of tungsten carbide with geometrically defined cutting edge 239
F. Bohmermann, 0. Riemer
LFM Laboratoryfor Precision Machining, University of Bremen, Bremen, Germany
04.4 Fabrication process of slicing mirror for hyperspectral imaging and its 241
performance evaluation
Shin-ya Morita1,2, Miu Tamamitsu3, Yutaro Kitagawa4, Keiichi Nakagawa3, Yutaka
Yamagata2, Ryoichi Horisaki5, Yu Oishi6, Kentaro Motohara4, Keisuke Goda31
Faculty of Engineering, Tokyo Denki University, Tokyo 120-8551, Japan2RIKEN Centerfor Advanced Photonics (RAP), RIKEN, Saitama 351-0198, Japan
3Department of Chemistry, The University of Tokyo, Tokyo 113-0033, Japan^Institute ofAstronomy, The University of Tokyo, Tokyo 181-0015, Japan50saka University, Osaka, Japan6Institute of Materials Structure Science, (KEK), Japan
04.6 Adaptations of mechanical machining processes for laser target manufacturing 243
J. Andre, J. Schunk, A. Pinay, A. Gregoire, C. Chicanne, M. Theobald
CEA/Valduc, FRANCE
P4.01 Molecular dynamics simulation investigation of hot nanometric cutting of single 245
crystal silicon
Saeed Zare Chavoshi, Xichun Luo
Centrefor Precision Manufacturing, University of Strathclyde, Glasgow, UK
P4.02 Ultra-precision grinding of ceramics with injection moulded tools 247
Carla Flosky, Oltmann Riemer, Ekkard Brinksmeier
University of Bremen, Laboratoryfor Precision Machining LFM, Bremen, Germany
P4.03 Research on precision turning technology for microwave cavity modulation 249
structure
Xicong Zou1, Xinchun Xie2, Xuesen Zhao1, Zengqiang Li1, Tao Sun11Center ofPrecision Engineering, Harbin Institute of Technology, Harbin, PR China
2Luoyang Inst.of electro-optical devices, Aviation Ind.Corp.of China {AVIC),PR China
P4.04 Investigation of edge-chipping reduction on silicon micro-milling 251
Zi Jie Choong1, Dehong Huo1, Patrick Degenaar2, Anthony O'Neill2
School of Mechanical and Systems Engineering, Newcastle University, UK
2School of Electrical and Electronic Engineering, Newcastle University, UK
P4.05 The ultra-precision cutting Titanium alloy (Ti-6AI-4V): Effects on its 253
microstructure and surface mechanical propertiesJinxuan Bai1, Qingshun Bai1, Xin He1, Zhen Tong21School ofMechanics and Electrical Engineering, Harbin Institute of Technology, China2Centerfor precision Technologies, University of Huddersfield, Huddersfield. UK
Characterization of thrust performance of micro-nozzle machined by micro-end 255
P4.06 millingYukui Cai1, Zhanqiang Liu1, Yi Wan1, Xichun Luo2
1School of Mechanical Engineering, Shandong University, China2Faculty of Engineering, University ofStrathclyde, UK
P4.07 cBN-micro-milling tools for machining hardened steel moulds 257
E. Uhlmann1,2, D. Oberschmidt1, M. Polte2, J. Polte2, J. Bornstein1
1Fraunhofer Institutefor Production Systems and Design Technology IPK, Germany2Technische Universitdt Berlin, Germany
P4.08 Effect of cooling lubricant on surface roughness for turning stainless steel with 259
binderless-cBN
E. Uhlmann1,2, D. Oberschmidt1, J. Polte2, M. Polte2, K. Huth-Herms2
1Fraunhofer Institute for Production Systems and Design Technology IPK, Germany2Technische Universitdt Berlin, Germany
P4.09 Large-scale surface texturing by vibration assisted face milling 261
Berend Denkena, Thilo Grove, Alexander Seibel
Institute ofProduction Eng. and Machine Tools, Leibniz Universitdt Hannover
Influence of the rake angle on the surface formation during micro shaping of 263
P4.10 submicron optical structures in Au-layersE. Uhlmann1,2, S. Kuhne1, M. Jagodzinski1^echnische Universitdt Berlin, Germany2Fraunhofer Institutefor Production Systems and Design Technology IPK, Germany
P4.ll Generation of thermally effective surface structures by ultrasonic vibration 265
assisted turning
Benjamin Claull1, Andreas Nestler1, Henning Zeidler1, Andreas Schubert1, Luca
Rizzi2
^echnische Universitdt Chemnitz, Chemnitz, Germany
2Automobili Lamborghini S.p.A, Italy
P4.12 Real-Time evaluation of tool wear detection system under wet machining based 267
on electrical contact resistance
Amine Gouarir1, Syuhei Kurokawa2, Takao Sajima3, Mitsuaki Murata41
Department ofMechanical Engineering, Kyushu University, Japan
2Department ofMech. Eng., Manufacturing process, Kyushu University, Japan
3Department ofMechanical Engineering, Kyushu University, Japan
4Department of Mechanical Engineering, Kyushu Sangyo University, Japan
P4.13 Study of cutting chemically strengthened glass plates by a disk and penetration 269
scoring wheel
Kung-Jeng Ma1, Ying-Tom Chen2, Yun-Yi Song2, and Choung-Lii Chao3
1College ofEngineering, Chung Hua University, Taiwan
2Depatment ofMechanical Engineering, Chung Hua University, Taiwan
3Department of Mechanical and Electro-Mechanical Engineering, Taiwan
P4.14 Microchannels quality depends on workpiece microstructure and milling 271
parametersCleiton Assis1, Italo Trindade1, Alessandro Rodrigues2, Reginaldo Coelho21Federal Institute of Sao Paulo,
2University ofSao Paulo
P4.15 A local tool path smoothening scheme for micromachining 273
Wenbin Zhong, Wenlong Chang, Luis Rubio, Xichun Luo
Department of Design, Manufacture and Eng. Mgt, University of Strathclyde
P4.17 Performance of small diameter grinding wheel with coolant supplying from its 275
inner side
Kosaku Matsubara1, Jun Tsuchimura2, Hiroyuki Sasahara2
1Meikoseiki Ltd., JAPAN
2Tokyo University ofAgriculture and Technology, JAPAN
P4.18 Deep hole drilling methodology for high yield strength Inconel 718 >1000 MPa 277
K.S. Woon1,2, A. Chaudhari2, M. Rahman2, A. Senthil Kumar2
Singapore Institute of Manufacturing Technology, (A*STAR)2Department of Mechanical Engineering, National University ofSingapore.
P4.19 Geometric deviations in the production of micro-milling tools and their 279
influence on the cutting process
E. Uhlmann1, D. Oberschmidt1, Y. Kuche2, M. Polte2
1Fraunhofer Institute for Production Systems and Design Technology IPK, Germany
2Technische Universitat Berlin, Germany
P4.21 Investigation for thinning-by-dicing of sintered and unsintered ceramics 281
M. Stompe, E. Asadi, L. Rissing, M. C. Wurz
Institute of Micro Production Technology, Garbsen, Germany
P4.22 Manufacturing of micro end mills by batch processing of silicon carbide 283
Berend Denkena1, Marc Wurz2, Thilo Grove1, Abdelhamid Bouabid1, Esmail Asadi21Institute of Production Engineering and Machine Tools, Garbsen, Germany2Institute of Micro Production Technology, Garbsen, Germany
P4.23 Development of the hybrid sequential machining: laser machining and milling 285
Anthonin Demarbaix1, Edouard Riviere-Lorphevre1, Francois Ducobu1, Enrico
Filippi1, Fabrice Petit2, Nicolas Preux2
1Univesity ofMons, Belgium2BCRC-INISMa (member ofEMRA) Research and Tech Support Dept, Belgium
P4.24 Tool deflections during micro-end milling - Observations of deflection and its 287
effect on processing accuracy-
Hiroo Shizuka, Katsuhiko Sakai, Takumi Kaneko and Mikihisa NakajimaShizuoka University, 3-5-1 Johoku Naka-ku Hamamatsu Shizuoka 432-8561 Japan
P4.25 The influence of coolant on the thermo-elastic machine tool behaviour 289
Prof. Dr.-lng. Christian Brecher, Dr.-lng. Marcel Fey, Dipl.-lng. Dipl.-Wirt. Ing.
Matthias Wennemer
Laboratory of machine tools (WZL), RWTH Aachen
P4.26 Texturing of metal surface by using vibration-assisted microcutting 291
Jun Shimizu1, Kouta Watanabe2, Takeyuki Yamamoto1, Hirotaka Ojima1, TeppeiOnuki1 and Libo Zhou11College of Engineering, Ibaraki University, Japan2Graduate School ofScience and Engineering, Ibaraki University, Japan
P4.27 Influence of micro-crack on optical micro-resonator of single-crystal calcium 293
fluoride manufactured by ultra-precision cylindrical turning
Yuta Mizumoto1, Hiroi Kangawa1, Yosuke Nakagawa2, Hiroki Itobe2, TakasumiTanabe2 and Yasuhiro Kakinuma1
1Keio University, Yokohamajapan
2Faculty ofScience and Technology, Keio University, Yokohama, Japan
P4.28 Development of a novel tool holder with six degree of freedom and the related 295
tool path generation for ultra-precision machiningW. Yuan, W.B.Lee, C.Y.Chan, L.H.Li
The Hong Kong Polytechnic University, Hong Kong
P4.29 Force and spatial roughness analysis of surface generation of single point 297
diamond turning
W. Yuan,W.B.Lee, C.Y.Chan
,L.H.Li
The Hong Kong Polytechnic University, Hong Kong
P4.30 Comparison of cutting edge characterization techniques applied to industrial 299
tools with sub micrometer edge radius
Francesco Biondani1, Giuliano Bissacco1, J0rgen Garnaes2, Hans N0rgaardHansen1
technical University of Denmark, Department of Mechanical Eng, Denmark
2Danish Fundamental Metrology, Kgs. Lyngby, Denmark
P4.31 New diamond turning strategy with 2-axis fast tool for dense dimple pattern on 301
embossing rollers
Klaus Baier
KUGLER GmbH, Heiligenberger Strajle 100, 88682 Salem, Germany
P4.32 Fabrication of sub-millimetre aspheric WC moulds for glass moulding process 303
CL. Chao1, W.H. Wang1, Z.X. Xu1, W.C. Chou1, K.J. Ma2, W.H. Fan3
^amkang University, Taiwan
2Department of Mechanical Engineering, Chung-Hua University, Hsin-Chu, Taiwan
3Department of Mechanical Engineering, University ofScience&Technology Taiwan
P4.33 Precision cutting of micro textured surface on implant of Ti alloy 305
Hirofumi SUZUKI1, Mutsumi OKADA1, Eiji KATO2, Masahiro YAMADA3, Yosuke
ITOH4, Koichi OKADA4
1Department ofMechanical Engineering, Chubu University
2Kato Clinic Implant Center
3Graduate School ofDentistry, Tohoku University
4NS Tool Co. Ltd
P4.34 Laser-material interaction using pulsed lasers on structural ceramic: Si3N4 307
Babak Soltani1, Colin Harper2, Bahman Azarhoushang11Institute for Precision Machining, Germany
2School of engineering, the University of Glasgow, Glasgow, UK
P4.35 Multiphysics based modelling and analysis of micro milling metal matrix 309
composites (MMCs) against the effects of key process variables
Zhichao Niu, Kai ChengInstitute of Materials and Manufacturing, Brunei University, UK
P4.36 Establishment of a laser assisted ultra-precision machining system 311
J. D. Han, W.B. Lee, C.Y. Chan
The Hong Kong Polytechnic University, Hong Kong SAR, PR China
P4.37 Laser texturing of tungsten carbide tools: the effects on tribological performance 313
when machining Ti-6AI-4V alloyD. Bhaduri1, A. Batal1, M. Fallqvist2, S.S. Dimov1, S.L Soo1, R. M'Saoubi31Department ofMechanical Engineering, The University of Birmingham, UK
2Seco Tools AB, Sweden
3Seco Tools (UK) Ltd., Warwickshire, UK
P4.38 A study of optimization of machining strategy for enhancing the efficiency of 315
process chain in ultra-precision machining
Zhao Chengyang1, Cheung Chi Fai1, Kong Lingbao1,2xThe Hong Kong Polytechnic University, Hong Kong.
2Fudan University, Shanghai, P.R. China
P4.39 Ultrasonic vibration cutting of freeform steel insert 317
\luha Vayrynena, 1Kari Monkkonen, 2Pertti Paakkonenb
1Karelia University ofApplied Sciences, Joensuu, Finland
2Institute of Photonics, University of Eastern Finland, Joensuu Finland
P4.40 Effects of machine compliance in micro-grinding 319
Henry Arneson1, Eric Marsh1, Kyun Hee Koh2
1Penn State University, University Park, PA, USA
2nanoPrecision Products, El Segundo, CA, USA
P4.41 Size-adjusted workpiece clamping systems for micro production 321
K. Droder1, H.-W. Hoffmeister1, T. Tounsi1
Technische Universitat Braunschweig, Germany
P4.43 Tool wear presentation in ultra-precision raster fly cutting using workpiece 323
modal frequencies
Suet To1,2, Guoqing Zhang2Shenzhen Research Institute of The Hong Kong Polytechnic University, PR China
2The Hong Kong Polytechnic University, Kowloon, Hong Kong, PR China
P4.44 Experiments on micro-milling of KDP crystal with micro ball-end mills 325
Ni Chen1,2, Mingjun Chen2, Jun Qian1, Dominiek Reynaerts11Department of Mechanical Engineering, KU Leuven, Belgium2Centerfor Precision Engineering, Harbin Institute of Technology, Harbin, China
Session 5: Precision Engineering in Biomedical Sciences
05.1 Precision Printing of Living Biologic Cells 329
Marcus Ardron1, Mihails Bogomolnijs1, Alan Faulkner-Jones2, Godfrey Smith3,Victor Zamora Rodriguez3,Wenmiao Shu2
1Renishaw PLC, Research Avenue North, Edinburgh UK2Heriot-Watt University, Edinburgh UK
3Clyde Biosciences Ltd, BioCity Scotland UK
05.2 Finishing of laser-machined coronary stents by plasma electrolytic polishing 331
Henning Zeidler1,2, Klaus Nestler2, Falko Bottger-Hiller2, Andreas Schubert1,Barbara Previtali3, Ali Gokhan Demir3
technische Universitat Chemnitz, Chemnitz, Germany
2Beckmann-lnstitut fur Technologieentwicklung, Germany
3Politecnico di Milano, Dipartimento di Meccanica, SITEC, Milano, Italy
05.3 Flexure-based multi-degrees-of-freedom in-vivo force sensors for medical 333
instruments
Sebastian Fifanski1, Jose Rivera1, Marine Clogenson1, Charles Baur1, Axel
Bertholds2, Pere Llosas2, Simon Henein1
^NSTANT-LAB - IMT-STI (EPFL), Lausanne, Switzerland
2SENSOPTICSA, Losone, Switzerland
05.4 Manufacturing, replication and assessment of microfluidics for blood plasma 335
separationE. Uhlmann\C. Hein2,M. Polte1, J. Polte1, A. Spielvogel2, K. Herms1, D.Oberschmidt2
1Fraunhofer Institutefor Production Systems and Design Technology IPK, Germany2Technische Universitat Berlin, Germany
P5.01 A new image guided surgical robot for precision bone sculpturing 337
J. Bos1, M. Steinbuch1, H.P.M. Kunst2
1Eindhoven University of Technology, Control Systems Technology Group2Radboudumc Nijmegen, ENT department
P5.02 Mechanical testing of orthodontic archwires 339
Visnja Katie1, Sasa Zelenika2 Ervin Kamenar2 Kristina Markovic2 Marko Percic2and
Stjepan Spalj11University ofRijeka, School of Medicine, CROATIA
2
University ofRijeka, Faculty of Eng.& Centre for Micro and Nano Sciences and
Technologies, CROATIA
P5.03 Product-process analysis to assess the influence of micromould engineering in 341
the overall efficiency of replication processes
Emanuel Lourenco, Marta Oliveira, Silvia Esteves, Antonio Batista, Joao Paulo
Pereira
INEGI - PORTUGAL
P5.04 A machining strategy to fulfil geometrical quality requirements in cryogenic 343
turning of acetabular cups made of additive manufactured Ti6AI4V
F.Medeossi, A.Bordin, S.Bruschi, A.Ghiotti, E.Savio
Dept. of Industrial Engineering, University of Padova, Padova, Italy
P5.05 New microfluidic functionalities by nano- and micro-patterned moulds 345
Jan Edelmann1, Udo Eckert1, Stefan GroR1, Bernd Grundig2, Heiko Wedig2,Victor Usov3, Neal O'Hara3 ,Declan Scanlan3, Graham Cross3
1Fraunhofer Inst for Machine Tools and Forming Tech. IWU, Chemnitz, Germany
2Senslab Gesellschaft zur Entwicklung und Herstellung bioelektrochemischer
Sensoren mbH, Leipzig, Germany
3Adama Innovations Ltd., Galway, Ireland
Session 6: Precision Machining, Replication and Additive Processes
06.1 Investigation of catalytic metals for a catalyst referred etching in pure water 349
Ai Isohashi, Tatsuaki Inada, Daisetsu Ton, Yuta Nakahira, Takahito Sugiura,
Naotaka Kidani, Koji Inagaki, Yasihisa Sano, Satoshi Matsuyama, Kazuto Yamauchi
Department of Precision Science and Technology, Osaka University, Japan
06.2 Investigation of digital light processing using fibre-reinforced polymers 351
Thomas Hofstaetter, David B. Pedersen, Jakob S. Nielsen, Michael Mischkot, Hans
N. Hansen
Technical University of Denmark, Department of Mechanical Engineering
06.3 On machine polishing of ultraprecision diamond ground aspherical surfaces on 353
multispectral CVD ZnS lens
Zhimin Rao, Qingliang Zhao, Bing Guo
Centerfor Precision Engineering, Harbin Institute of Technology, Harbin, China
06.4 Interface analysis of injection molded direct joining using surface nano- 355
structures
Fuminobu Kimura1, Shotaro Kadoya1, Yukinaga Arai2, Akitsu Shigetou2 andYusuke Kajihara11lnstitute of Industrial Science, The University of Tokyo2National Institutefor Materials Science
06.5 Design of a multi-metal printer for jetting droplets directly from the melt 357
Ralph Pohl, Bas Lemmen, Peter van den Oever
Demcon Advanced Mechatronics, The Netherlands
P6.01 Mirror-polishing of rough surface glass by soothing of abrasive layer 359
Yasuyuki Kamimura and Kensuke Tsuchiya
Institute of Industrial Science, University of Tokyo, Japan
P6.02 High precision direct fabrication by laser of micromoulds in PDMS for micro- 361
replicationN. Otero1, G. Goh1, S.M. Vidal1, D. Sanmartin2, C. Meggs2, T.W. Button2, P.Romero1
1AIMEN, Laser Applications Centre., Porriho (Spain)2AFM (Applied Functional Materials), Birmingham UK Kingdom)
P6.03 Decision methodology of micro end-milling condition using tool catalog data- 363
mining system
Hiroyuki Kodama, Koichi Okuda, Takuya Tsujimoto
University ofHyogo, Graduate School ofEngineering, Japan
P6.04 Surface reproduction accuracy of holographic design features for machine 365
components fabricated by a combination of TiN-physical vapour deposition and
a specific subsequent galvanic process
E. Uhlmann1,2, D. Oberschmidt1, S. Frenzel2, J. Polte2, J. Matthiesen3, M. Boge4
1Fraunhofer Institutefor Production Systems and Design Technology IPK, Germany
2IWF, Technische Universitat Berlin, Germany
3HoloDimensions GmbH, Germany
4Gebr. Boge Metallveredelungs GmbH, Germany
P6.05 Shaping of lens array mold surfaces by electrical discharge machining with a 367
multiple-ball electrode
Hideo Takino, Takahiro Hosaka, and Yuki Nobe
Chiba Institute of Technology, Japan
P6.06 Experimental investigation of material removal mechanisms of sintered 369
ceramics by scratch tests
Georg Schnurbusch1,2, Oltmann Riemer1 and Ekkard Brinksmeier11
Laboratoryfor Precision Machining (LFM) University of Bremen,Bremen, Germany
2Carl Zeiss SMT GmbH, Oberkochen, Germany
P6.07 Design and applicability of the testing equipment for manufacturing micro parts 371
from amorphous metal powder by using the hybrid contact laser sintering
(HCLS) process
Tobias Montag, Jens Wulfsberg
Helmut-Schmidt-University, Uni of the Federal Armed Forces Hamburg, Germany
P6.08 A linear and lifting stage on basis of compliant mechanisms for the realisation of 373
a correction mechanism in a machine tool to perform micro deep hole drills in a
round stock
Adam Sanders, Jens WulfsbergHelmut-Schmidt University, Uni of the Federal Armed Forces Hamburg, Germany
P6.09 High-efficiency and high-quality grinding of high-speed steel using ultrafine- 375
crystalline cBN abrasive grit
Yoshio Ichida
CBN & Diamond nanomachining institute
P6.10 Development of magnetic polishing method with 5-axis machining center for 377
aspherical shape
Tatsuya Furuki1, Toshiki Hirogaki1, Eiichi Aoyama1 and Keiji Ogawa21Doshisha University
2Ryukoku University
P6.ll Antireflection coating of microstructures by anodizing and influence on the 379
dimensional accuracy of structures
E. Uhlmann1,2, S. Kiihne1, M. Malcher1, M. Jagodzinski11IWF, Technische Universitat Berlin, Germany
2Fraunhofer Institutefor Production Systems and Design Technology IPK, Germany
P6.13 Metal-polymer direct joining: effect of polymer injection speed on joint strength 381
Shotaro Kadoya, Fuminobu Kimura, Yusuke Kajihara
Institute of Industrial Science, The University of Tokyo, Japan
P6.15 Influence of the mechanical behaviour of cantilevers on the topography of 383
nanoscale grooves during AFM tip-based machiningRaheem S.J. Al-Musawi1,2, Emmanuel Brousseau11CardiffSchool of Engineering, Cardiff University, Cardiff, United Kingdom
2Department of Mechanical Engineering, Kufa University, Iraq
P6.16 Ultra-precision diamond grinding of large sized infrared aspherical lens 385
Qingliang Zhao, Bing Chen
Centerfor Precision Engineering, Harbin Institute of Technology, China
P6.17 Laser polishing - enhancing surface quality of additively manufactured cobalt 387
chrome and titanium components
Wojciech S. Gora1, Yingtao Tian2, Aldara Pan Cabo1, Marcus Ardron3, Robert R.J.
Maier1, Philip Prangnell2,Nicholas J. Weston3, Duncan P. Hand1
xlnst of Photonics and Quantum Sciences, Heriot-Watt University, Edinburgh, UK2School of Materials, The University of Manchester, Manchester, UK
3Renishaw pic, Research Park, Edinburgh, UK
P6.18 Diamond machining of AM metal parts with high-build eNiP-layers on complex 389
free form shapesL. Autschbach, D. Ewert, M. Schiile, C. Niederle
Carl Zeiss Jena GmbH, Germany
P6.19 Investigation of a novel low pressure lapping technology on aluminium moulds 391
N.H.Yu, W.B.Lee, C.Y.Chan and LH.Li
The Hong Kong Polytechnic University, Hong Kong
P6.20 Development of an intelligent chuck system for the improved manufacturing of 393
thin walled parts
Christoph Lerez, Wolfgang Konig, Tanja Hebecker, Hans-Christian Mohring
Universitatsplatz Magdeburg, Germany
P6.21 Multiscale post-processing of metal additive manufactured parts by electro- 395
polishing technology
Lucas Abia Hof, Md. Masiar Rahman, Rolf Wuthrich
Concordia University, Montreal, Canada
P6.22 Micromachining glass with in situ fabricated micro-tools 397
Lucas Abia Hof1, Rolf Wuthrich1,2Concordia University, Montreal, Canada
2Posalux S.A., Bienne, Switzerland
P6.23 Experimental investigations on the accuracy of X-ray computed tomography for 399
porosity measurements of additive manufactured parts
Petr Hermanek1, Filippo Zanini1, Simone Carmignato1, Enrico Savio21
Department ofManagement and Engineering, University ofPadova, Italy
department ofindustrial Engineering, University of Padova, Padova, Italy
P6.24 Monitoring and closed loop feedback control of ultrafast glass welding 401
Karen X.Z. Yu1, Martin R Sparkes1, Krste Pangovski1, and William O'Neill1
Centrefor Industrial Photonics, University of Cambridge
P6.25 Comparison of conventional injection mould Inserts to Additively Manufactured 403
inserts using life cycle assessment
Thomas Hofstatter1, Niki Bey2, Michael Mischkot1, Andreas Lunzer1, David Bue
Pedersen1, Hans N0rgaard Hansen11Department of Mechanical Eng. Technical University of Denmark, Denmark
2Department of Management Eng, Technical University of Denmark, Denmark
P6.26 The influence of cellular structures on flow stress of high strength components 405
manufactured using SLM
Rasoul Mahshid1, Hans N0rgaard Hansen1, Klaus Loft H0jbjerre2^Technical University of Denmark, Department of Mechanical Eng, Denmark
2Formerly at Danish Tech.lnst,Denmark, currently 3D-Opt ApS, Denmark
P6.27 Experimental study of micro-dimple surface roughness by applying ultrasonic 407
elliptical surface texturing
Rendi Kurniawan, Sung Jae Won and Tae Jo Ko
Yeungnam University, South Korea
P6.28 Surface generation in ultrasonic assisted face grinding 409
Hao Tang1,2 Jun Qian1, Dominiek Reynaerts1XKU Leuven, Belgium2College ofMechanical and Vehicle Engineering, Hunan University, China
P6.29 Towards in process control of polymer injection moulded micro components 411
Matteo Calaon1, Guido Tosello1, Hans N. Hansen1, Manfred Prantl2, StephaneDessors3, Tobias Mueller4 Steffen G. Scholz4, Nathan Miller5
technical University of Denmark, Department ofMechanical Eng, Denmark
2Alicona Imaging GmbH, Austria.
3French Technical Centrefor Plastic and Composites, Bellignat, France
4Karlsruhe Institute of Technology, Karlsruhe, Germany5Flann Microwave Limited, Cornwall, UK
P6.30 Production of electronics and photovoltaics using a reel-to-eel process 413
Andrew Graham, Paul Morantz, Paul Comley
Cranfield University, Befordshire, UK
P6.31 CFD analysis of an enhanced nozzle designed for plasma figuring of large optical 415
surfaces
Nan Yu1, Renaud Jourdain1, Mustapha Gourma2, Paul Shore \3,41Precision Engineering Institute, Cranfield University, UK
2Oil and Gas Engineering Centre, Cranfield University, UK
3Loxham Precision Ltd, UK
^Engineering Measurement Division, National Physical Laboratory, UK
P6.32 Spark Assisted Chemical Engraving (SACE) - an innovative technology with high 417
potential for industry
Lucas Abia Hof1, Patrick Thibaut2, Rolf Wuthrich1,21Concordia University, Montreal, Canada
2Posalux S.A., Bienne, Switzerland
P6.33 Development of ultra-precision abrasive machining of functional structured 419
surfaces
Christian Young, Liam Blunt, Zavid Mohamed, Zhen Tong
EPSRC Center, University of Huddersfield, Huddersfield, UK
P6.34 Research on shape generation of tungsten carbide alloy by electrolyte jet with 421
bipolar pulseWataru Natsu, Tomonori Ota
Tokyo University ofAgriculture and Technology
P6.35 Heat transfer strategies for temperature sensitive components in vacuum 423
environments
Dr. Stacy Figueredo
Carl Zeiss SMTGmbH
P6.36 Investigation of pre & post plating surface roughness of electroless nickel 425
phosphorus coated substrate for diamond turning applicationPeter Xia1, Heather Almond1, Sue Impey21Precision Engineering Institute, Cranfield University, UK
2Surface Engineering and Nanotechnology Institute, Cranfield University, UK
Session 7: Advances in Precision Engineering and Nanotechnologies
07.1 Removal of nanoscale damage induced by FIB nanofabrication on single-crystal 429
diamond using femtosecond laser treatment
Zongwei Xu1, Fengzhou Fang1, Wei Wu1, Wanli Li1, Shutong He2, Minglie Hu21Centre of MicroNano Manufacturing Technology, Tianjin University, China
2Ultrafast Laser Laboratory, Tianjin University, Tianjin, China
07.2 Ultrasonic injection moulding: a study of thermal behaviour and nanofeature 431
replicationB. Whiteside, M. Babenko, C. Tuinea-Bobe, E. Brown, P. Coates
RKT Centrefor Polymer MNT, University of Bradford, UK
07.3 A novel vibration- and magnetic field-assisted polishing (VMAP) method for 433
microstructured surface finishing
Jiang GUO, Chun Wai KUM, Ka Hing AU, Zhi'En Eddie TAN, Hu WU, Kui LIU
Singapore Institute of Manufacturing Technology, Singapore
07.4 Towards suitable multilayer pellicle architecture for application in high power 435
EUV systems
Maria Peter, Pieter Jan van Zwol, Pirn Voorthuijzen, David Vies, Wim van der
Zande, J. Vermeulen
ASML Netherlands B. V., Veldhoven, The Netherlands
07.5 Atomistic investigation of the wear of nanoscale diamond cutting tools shaped 437
by focused ion beam
Zhen Tong1, Xiangqian Jiang1, Qingshun Bai2, Liam Blunt1, Xichun Luo31Centrefor precision technologies, University ofHuddersfield, UK2Centerfor Precision Engineering, Harbin Institute of Technology, China
3University ofStrathclyde, Glasgow, UK
P7.01 Automatic tool setting errors compensation in ultraprecision machining 439
Keiichi Nakamoto1, Shinnosuke Baba1, Yoshimi Takeuchi2
Vo/cyo University ofAgriculture and Technology, Japan
2Chubu University, Japan
P7.02 Industrial tool holding for ultra-precision machining 441
Dr. Ralf Dupont, Mike Tanniru
Levicron GmbH, Kaiserslautern, Germany
AMETEK Precitech Inc., USA
P7.03 Compact hydrodynamic spindle module for micromachining applications 443
Martin Bohley, Ingo G. Reichenbach, Christopher Muller, Benjamin Kirsch, Jan C.
Aurich
University ofKaiserslautern; Instfor Manufacturing Technology and Prod. Systems
P7.04 Nanometer precision fabrication for optical surfaces 445
Xiaoqiang Peng1,2, Yifan Dai1,2, Shengyi Li1,2, Feng Shi1,2, Lin Zhou1,2, Ci Song1,2, CanYang1,21National University of Defense Technology,China
2Hu'nan Key Laboratory of Ultra-precision Machining Technology, China
P7.06 Self-healing of cracks during ductile regime machining of silicon: Insights from 447
molecular dynamics simulation
Saurav Goel1, Alexander Stukowski2, Andrii Kovalchenko3, Graham Cross41School ofMechanical andAerospace Eng, Queen's University, Belfast, UK2Institute ofMaterials Science, Darmstadt University of Technology, Germany3Inst for Problems of Materials Science, National Academy ofSciences, Ukraine
4CRANN Nanoscience Institute, School of Physics, Trinity College, Ireland UK
P7.07 A new process chain for ultra-precision machining potassium dihydrogen 449
phosphate (KDP) crystal parts
Chaoliang, Guan1; Hao, Hu1; Guipeng, Tie1; Xichun, Luo21National University of Defense Technology, Changsha,China
2Centrefor Precision Manufacturing, Dept of Design, University of Strathclyde, UK
P7.08 Force controlled dilatometer 451
Fabian Wohlfahrt1, Rene Theska2
1R&D Department, Netzsch Analyzing & Testing, 95100 Selb,
2Technische Universitdt llmenau, Faculty ofMechanical Engineering
P7.09 Modular magnetic Levitation planar motors for long-stroke motion and full 453
rotation
Feng Liu, Yu Zhu, Ming Zhang, Ding Yuan
Department of Mechanical Engineering, Tsinghua University, Beijing
P7.10 Proposal of partially conductive diamond abrasives for an electroplated 455
diamond wire
Yu Zhang1, Yasuhiro Tani1, Okiharu Kirino2
1Ritsumeikan University,
2Crystal Optics Inc.
P7.ll Electrochemical mechanical polishing of difficult-to-machine mold materials 457
Kazuya Yamamura, Yusuke Imanishi, Katsuyoshi Endo
Research Centerfor Ultra-precision Science and Tech., Osaka University, Japan
P7.12 Highly-efficient slurryless finishing of GaN by plasma-assisted polishing using a 459
resin bonded grinding stone
Chika Kageyama, Hui Deng, Katsuyoshi Endo, Kazuya Yamamura
Research Centerfor Ultra-precision Science and Tech., Osaka University, Japan
P7.13 A closed loop quality control system for laser chemical machining 461
Peiran Zhang, Axel von FreybergBIMAQ-Bremen Institute for Metrology, University ofBremen, Germany
P7.14 Micro-machining and optical characterization of randomly distributed micro-lens 463
array
Eun-chae Jeon1,2, SeungHwan Moon1, Je-Ryung Lee1,3, Ji Young Jeong1,2, Dae-Hee
Choi1,2, Tae-Jin Je1,21Dept. of NanoManufTech., Korea Institute of Machinery and Materials, Korea
2Dept. ofNanomechatronics, University ofScience and Technology, Korea
3School of Electronics and Information Engineering, Korea University, Korea
P7.15 Modelling opposite effects of the damping chamber and gas chamber on the 465
stability of aerostatic thrust bearings
Bo Wang, Yangong Wu, Zheng Qiao, Jiadai Xue
Centerfor Precision Engineering, Harbin Institute of Technology, PR. China
P7.16 Multi material ultrasonic joining using microstructured joining partners 467
Rene Schulze1, Stephan Jahn1, Henning Zeidler1, Thomas Lindner2, Andreas
Schubert1,32Technische Universitdt Chemnitz, Instfor Machine Tools and Production Processes
2Technische Universitdt Chemnitz, Inst of Material Science and Engineering
3Fraunhofer Institutefor Machine Tools and Forming Tech (Fraunhofer IWU)
P7.17 Methods to extend surface error map in dwell time algorithm 469
Lin Zhou^Yifan Dai,1,2 Xuhui Xie,1,2 Xiaoqiang Peng,12 Feng Shi/,2 Shengyi Li1,21National University ofDefense Technology, P. R. China
2Hunan Key Laboratory of Ultra-precision Machining Technology, P. R. China
P7.18 Droplet assisted laser cleaning of metals and alloys
Jose Manuel Lopez Lopez, Jeremy Coupland, Sundar Marimuthu
Optical Engineering Group, Loughborough University, UK
471
P7.19 High speed mask-less laser controlled precision deposition of metals 473
Jyi Sheuan Ten, Martin Sparkes, William O'Neill
Centre for Industrial Photonics,Dept of Engineering, University of Cambridge, UK
P7.20 Study on high efferent micro-deburring by large-area EB irradiation 475
Togo Shinonaga ,Yasuaki Kimura
,Akira Okada, Tomoaki Miyoshi
Graduate School of NaturalScience & Tech. Okayama University, Japan
P7.21 Finite element analysis and fabrication of an ultrasonic system for microchip 477
cooling
Hyunse Kim, Euisu Lim
Korea Institute of Machinery and Materials, Republic of Korea
P7.22 Design and fabrication of an ultrasonic waveguide for nano-scale surface 479
reformation
Hyunse Kim, Euisu Lim, Jong-Kweon Park
Korea Institute ofMachinery and Materials, Republic ofKorea
P7.23 Forming technology of random patterns in large areas by roll to plate 481
indentation process using micro abrasive grain tool
Tae-Jin Je1,2, Ji Young Jeong1,2, Seung Hwan Moon1, Je-Ryung Lee1, Dae-Hee
Choi1,2, Eun-chae Jeon1,21
Korea Institute of Machinery and Materials, Korea2Dept. ofNano-Mechatronics, University ofScience & Technology(UST), Korea
P7.24 A novel camera calibration method for deflectometry system 483
Feng Gao1, Yongjia Xu1, Hongyu Ren1, Zonghua Zhang2, and Xiangqian Jiang1*EPSRCCenter, University of Huddersfield, Huddersfield, UK
2School of Mechanical Engineering, Hebei University of Technology, China
P7.25 Fabrication of micro-/nano-pore arrays with metal-assisted chemical etching and 485
surface modification aiming at liquid retaining function
Nobuyuki Moronuki, Nguyen Phan
Tokyo Metropolitan University
P7.26 Increasing the stroke of an ultra-precise compliant mechanism with optimised 487
flexure hinge contours
Philipp Graser1, Sebastian Linfs2, Lena Zentner2, Rene Theska1Technische Universitat llmenau, Department of Mechanical Engineering1
Institute ofDesign and Precision Engineering, Precision Engineering Group2Mechanism Technology Group
P7.27 Design and experimental validation of a slit-type gas journal bearing 489
Marius Nabuurs, Dominiek Reynaerts, Farid Al-Bender
University ofLeuven, Department of Mechanical Engineering, Belgium
P7.28 Water-cooled heat load chopper for synchrotron experiments 491
Dave Arneson, Byron Knapp, Dan Oss
Professional Instruments Company, Hopkins, Minnesota, USA
P7.29 Equi-force contour analysis in electronic papers using charged particles 493
Seungtaek Kim, Hyungtae Kim, and Jongseok Kim
Korea Institute of Industrial Technology
P7.30 Proposal of coarse grain PCD with fine particles of boron-doped diamond mixed 495
in
Manabu Iwai1, William Chen2, Peter Chen2, Bear Lin2, Kiyoshi Suzuki3
1Toyama Prefectural University2Fine Abrasives Taiwan Co., Ltd.,3K.Suzuki New R&D Officer
P7.31 Study on protection performance of grinding wheel safety guard made of 497
stainless steel
A. Yui, M. Sato, H. Yamada, T. Kitajima, N.Ogasawara
National Defence Academy, Japan
P7.32 High-precision table positioning device 499
Gheorghe Olea, Norman Huber, Wolfgang Schiilein
HUBER Diffraction & Positioning GmbH & Co. KG
P7.33 A study of defects induced by femtosecond laser on monolayer graphene 501
Tianqi Dong, Martin Sparkes, William O'Neill
Institute for Manufacturing, Dept of Engineering, University of Cambridge, UK
P7.34 Evaluation of an Invar shaft for a high speed spindle 503
Byron Knapp, Dave Arneson, Dan Oss
Professional Instruments Company, Hopkins, Minnesota, USA
Session 8: Metrology II: Manufacturing Metrology
08.1 Self-calibration using advanced algorithms on a multi-probe system 507
J.L.G. Janssen, J. Dekkers, M.J.M. Renkens
Philips Innovation Services, High Tech Campus 7, The Netherlands
08.2 The new INRIM rotating encoder angle comparator: REAC 509
Marco Pisani and Milena Astrua
Istituto Nazionale di Ricerca Metrologica (INRIM,) Torino, Italy
08.3 The evaluation of a multi-sensor robotic visual inspection system 511
Istvan Biro, Sara Sharifzadeh, Mitul Tailor, Peter Kinnell, Mike Jackson
EPSRC Centre for Innov Manufin Intelligent Automation, Loughborough Uni, UK
08.4 Investigation on scan parameters for accurate dimensional measurements by CT 513
helical scanning
Valentina Aloisi1, Simone Carmignato1, Joseph Schlecht2, Eric Ferley2, Enrico Savio31Department of Management and Engineering, University ofPadova, Italy
2North Star Imaging, Inc., Rogers, MN, USA3
Department of Industrial Engineering, University ofPadova, Italy
P8.01 An autostereoscopy-based three-dimensional metrology system for precision 515
measurement of V-groove microstructured surfaces
Cheung CF., Li D.
The Hong Kong Polytechnic University, Hung Horn, Hong Kong
Session 9: Precision Engineering for Aerospace
P9.01 Effect of saw wire surface texture on slicing performance of rock in vacuum 519
Katsushi Furutani1, Kazuki Nomura1, Tatsuaki Okada2,Kazuto Saiki3, Hiroyuki Ohue4
Toyota Technological Institute
2lnstitute ofSpace and Aeronautical Science, Japan Aeronautical Exploration Agy
3Graduate School ofScience, Osaka University*Tokusen Kogyo, Ltd.
P9.02 A noise-tolerant method for section parameter extraction in cast blade 521
inspection
He Xie, Wen-long Li, Zhou-ping Yin
Huazhong University ofScience and Technology, Wuhan, P. R. China
P9.03 A novel electrodynamic suspension reaction sphere (EDSRS) for satellite attitude 523
control
Yu Zhu, Anlin Chen, Ming Zhang, Kaiming Yang, Chuxiong Hu
Department of Mechanical Engineering, Tsinghua University
P9.04 Manufacturing of high precision filter arrays for the Sentinel 2 Satellite 525
Matthias Mohaupt, Ronald Schmidt, Steffen Gramens, Andre Ackermann
Fraunhofer Institute for Applied Optics and Precision Engineering
