PREZENTACIJA OPREME Institut za nuklearne nauke “Vinča” Laboratorija za atomsku fiziku Nataša...

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PREZENTACIJA OPREME Institut za nuklearne nauke “Vinča” Laboratorija za atomsku fiziku Nataša Bibić

Transcript of PREZENTACIJA OPREME Institut za nuklearne nauke “Vinča” Laboratorija za atomsku fiziku Nataša...

  • PREZENTACIJA OPREME

    Institut za nuklearne nauke Vina Laboratorija za atomsku fiziku

    Nataa Bibi

  • Skanirajui elektronski mikroskop Philips SEM 501Transmisioni elektronski mikroskop Philips EM 400Van de Graaff akcelerator Proizvodja je High Voltage Engineering Corp.Cambridge-Massachusetts. Koristi Van de Graaff-ov generator500kV Jonski implanterVisoko-naponski terminal ide od minimalnog napona 30-50 kV do maksimalnog od 500 kV.

  • TEM i SEM DonacijaKing College London Van de Graaff akcelerator500kV Jonski implanterDonacija Univerzitet Surrey, UKFebruar Oktobar2004.godSredstva MNZS

  • History:

    First record of using glass lens for magnification was by an Arabian from what is now known as Iran, Alhazen, in the 10 and 11th century.He contradicted Ptolemy's and Euclid's theory of vision that objects are seen by rays of light emanating from the eyes; according to him the rays originate in the object of vision and not in the eye. Because of his extensive research on vision, he has been considered by many as the father of modern optics.

  • 15th century on - Studies done with glass magnifiers to study objects in detail mostly as a curiosity by non-scientists - Antonie van Leeuwenhoek (linen draper)described three shapes of bacterial cells using his simple, single lens microscope (glass bead in metal holder).

  • 1935 - Max Knoll demonstrates the theory of the scanning electron microscope

    Knoll and Ruska1986 Nobel Prize winnersvon Ardenne1939 - Ruska and von Borries, working for Siemens produce the first commercially available EM1938 - First scanning electron microscope produced by von Ardenne

  • The greater the accelerating voltage the shorter the l

    Therefore, a 50,000 volt (50 kV) electron has a wavelength of 0.0055nm and a 1MeV electron has a wavelength of 0.00123nm!

    Resolution Resolution is limited to approx. 1/2 the wavelength of illuminating source.

  • Transmission Electron Microscopy

    l ( 150 / V )1/2 Angstroms

    Substituting 200 eV for V gives l a of 0.87 Angstroms

    For a beam of 100 KeV we get a wavelength of 0.0389 and a theoretical resolution of 0.0195 Angstroms!

    But in actuality most TEMs will only have an actualresolution 2.4 Angstroms at 100KeV

  • 1 MeV 200 kV 100kV

  • SEMTEM

  • SEM

  • TEM

  • Electron scattering from specimenResolution depends on spot size Typically a few nanometersTopographic scan range: order of mm X mmX rays: elemental analysis

  • Electron Microscopy is usefully because we can resolve very small things.

    SEM works with reflected electrons yielding surface information.

    TEM works with transmitted electrons yielding information inside your sample.

  • Scanning Electron Microscope

  • SEMs are patterned after Reflecting Light Microscopes and yield similar information:

    TopographyThe surface features of an object or "how it looks",its texture; detectable features limited to a few nanometers

    MorphologyThe shape, size and arrangement of the particles making up the object that are lying on the surface of the sample or have been exposed by grinding or chemical etching; detectable features limited to a few nanometers

    CompositionThe elements and compounds the sample is composed of and their relative ratios, in areas ~ 1 micrometer in diameter Crystallographic InformationThe arrangement of atoms in the specimen and theirdegree of order; only useful on single-crystal particles >20 micrometers

  • Philips SEM 501Laboratorija za atomsku fiziku

  • Transmission Electron Microscopes: Widely used in materials science and biological research Capable of magnifying over a extremely wide range (~100 to >1,000,000 x) Excellent spatial resolution (better than 1 nm) Easy to use and very reliable

  • Disadvantages of TEMs: Very expensive to own and operate. Specimen preparation can be time consuming and technically difficult. Specimen is usually chemically fixed and epoxy embedded. Specimen must be sliced into very, very thin sections. *the inside of an electron microscope is a very hostile environment. It is under high vacuum with zero humidity. Also, in the time it takes to make an average 2 sec exposure of your specimen with an 80 KeV beam, the amount of energy the specimen receives is about 5 x109 rads, which is approximately equivalent to the radiation delivered from a 10 megatonHydrogen bomb exploding 30 meters away!

  • TEMs are patterned after Transmission Light Microscopes and will yield similar information. MorphologyThe size, shape and arrangement of the particles which make up the specimen as well as their relationship to each otheron the scale of atomic diameters. Crystallographic InformationThe arrangement of atoms in the specimen and their degree of order, detection of atomic-scale defects in areas a fewnanometers in diameter

    Compositional Information (if so equipped) The elements and compounds the sample is composed of and their relative ratios, in areas a few nanometers in diameter

  • 100 keV e- l=0.072 angstr.HRTEM sp. res. 0.2 nm

  • A simplified ray diagram of a TEM consists of an electron source, condenser lens with aperture, specimen, objective lens with aperture, projector lens and fluorescent screen.

  • Transmission Electron MicroscopeBasic premise of a TEM is to project a magnified image of the specimen onto a fluorescent screen where it can be viewed by the operator. The image itself is the result of beam electrons that are scattered by the specimen vs. those that are not.

  • In actuality a modern TEM consists of many more components including a dual condenser system, stigmators, deflector coils, and a combination intermediate and dual projector lens.

  • Total magnification in the TEM is a combination of the magnification from the objective lens times the magnification of the intermediate lens times the magnification of the projector lens. Each of which is capable of approximately 100X.

    Mob X Mint X Mproj = Total Mag

  • Growth of b-FeSi2 films via noble-gas ion-beam mixing of Fe/Si bilayers

  • Amorphous-iron disilicide: A promising semiconductor

  • TEM IMAGES

  • Philips EM 400Laboratorija za atomsku fiziku

  • KorisniciLokacija, ZaduenjeIskorienostLaboratorija 040 N. Bibi M.Popovi M.Novakovi S. PetroviLaboratorije 040, 020, 030,050,170Univerzitet u Novom SaduTEM i SEMPeriod od 1 godine i znaajna iskoritenost

  • SAMPLE PREPARATIONDodatna oprema za pripremu uzorakaPotrebe

  • Van de Graaff akcelerator High Voltage Engineering Corp. Cambridge-Massachusetts. Van de Graaff-ov generator500kV Jonski implanterVisoko-naponski terminal od minimalnog napona 30-50 kV do maksimalnog od 500 kV.

  • THE ATOMIC ELECTRONSand/orTHE ATOMIC NUCLEIIn its passage through matter, an ion may interact with

  • Principles of ion beam analysis

  • Blok sema jonskog implantera

  • IMPLANTACIJA

    Kontrolisano unoenje primesa u osnovni materijal

    Promena krstalne strukture na atomskoj skali pri manjim jonskim dozama.

    Naruavanje kristalne strukture i/ili amorfizacija mete na povrini pri velikim dozama.

    Sinteza jedinjenja

    Stvaranje nano-ukljuaka i formiranje nanostruktura.

    Unoenje materijala u metu u koncentracijama iznad granice rastvorljivosti.

    Formiranje metastabilnih faza zahvaljujui termodinamiki neravnotenom procesu.

    Unoenje nerastvorljivih materijala i stvaranje lokalnog naprezanja u kristalnoj reetci

    Promena morfologije povrine i promena mehanikih osobina

  • RBSIn RBS, a beam of mono-energetic (1-2 MeV) collimated light ions (H+, He+) impinges (usually at normal incidence) on a target and the number and energy of particles that are scattered backwards at a certain angle are monitored to obtain information about the composition of the target (host species and impurities) as a function of depth.

  • Kinematic factor, Mass identification

    Energy loss,Depth scale

    Scattering cross sections,Composition, (quantitative)RBS

  • KINEMATIC FACTORE can be derived from the principle of conservation of energy and momentum, and is given by (in laboratory frame of reference):The multiplication factor of Eo on the right hand side of the equation is often referred to as the kinematic factor and is denoted by k. For M/m > 1, k is a slow-varying function of , having the maximum value of 1 at = 0 and the minimum value at = 180o. For M/m = 1, the value of k is zero beyond 90o.

  • DIFFERENTIAL SCATTERING CROSS SECTIONThe theoretical differential cross section for a given scattering angle is given by: The higher order terms are usually negligible for M>m and the differential cross section can be expressed in the following form, which has the unit of mb/sr (millibarn per steradian) when MeV is used as the unit for Eo:

  • A = QNtA- ukupan broj detektovanih estica- efikasni presek rasejanja- prostorni ugaoQ- ukupan broj upadnih esticaN- kocentracija atoma mete t- debljina

  • Thickness = 200APtPtCoCoCoThickness = 1000A

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    565000

    566000

    567000

    568000

    569000

    570000

    571000

    572000

    573000

    574000

    575000

    576000

    577000

    578000

    579000

    580000

    581000

    582000

    583000

    584000

    585000

    586000

    587000

    588000

    589000

    590000

    591000

    592000

    593000

    594000

    595000

    596000

    597000

    598000

    599000

    600000

    Sheet5

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

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    0

    0

    0

    0

    0

    0

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    0

    0

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    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    Channel

    Yield

    Sheet1

    80000

    81000

    82000

    83000

    84000

    85000

    86000

    87000

    88000

    89000

    90000

    91000

    92000

    93000

    94000

    95000

    96000

    97000

    98000

    99000

    100000

    101000

    102000

    103000

    104000

    105000

    106000

    107000

    108000

    109000

    110000

    111000

    112000

    113000

    114000

    115000

    116000

    117000

    118000

    119000

    120000

    121000

    122000

    123000

    124000

    125000

    126000

    127000

    128000

    129000

    130000

    131000

    132000

    133000

    134000

    135000

    136000

    137000

    138000

    139000

    140000

    141000

    142000

    143000

    144000

    145000

    146000

    147000

    148000

    149000

    150000

    151000

    152000

    153000

    154000

    155000

    156000

    157000

    158000

    159000

    160000

    161000

    162000

    163000

    164000

    165000

    166000

    167000

    168000

    169000

    170000

    171000

    172000

    173000

    174000

    175000

    176000

    177000

    178000

    179000

    180000

    181000

    182000

    183000

    184000

    185000

    186000

    187000

    188000

    189000

    190000

    191000

    192000

    193000

    194000

    195000

    196000

    197000

    198000

    199000

    200000

    201000

    202000

    203000

    204000

    205000

    206000

    207000

    208000

    209000

    210000

    211000

    212000

    213000

    214000

    215000

    216000

    217000

    218000

    219000

    220000

    221000

    222000

    223000

    224000

    225000

    226000

    227000

    228000

    229000

    230000

    231000

    232000

    233000

    234000

    235000

    236000

    237000

    238000

    239000

    240000

    241000

    242000

    243000

    244000

    245000

    246000

    247000

    248000

    249000

    250000

    251000

    252000

    253000

    254000

    255000

    256000

    257000

    258000

    259000

    260000

    261000

    262000

    263000

    264000

    265000

    266000

    267000

    268000

    269000

    270000

    271000

    272000

    273000

    274000

    275000

    276000

    277000

    278000

    279000

    280000

    281000

    282000

    283000

    284000

    285000

    286000

    287000

    288000

    289000

    290000

    291000

    292000

    293000

    294000

    295000

    296000

    297000

    298000

    299000

    300000

    301000

    302000

    303000

    304000

    305000

    306000

    307000

    308000

    309000

    310000

    311000

    312000

    313000

    314000

    315000

    316000

    317000

    318000

    319000

    320000

    321000

    322000

    323000

    324000

    325000

    326000

    327000

    328000

    329000

    330000

    331000

    332000

    333000

    334000

    335000

    336000

    337000

    338000

    339000

    340000

    341000

    342000

    343000

    344000

    345000

    346000

    347000

    348000

    349000

    350000

    351000

    352000

    353000

    354000

    355000

    356000

    357000

    358000

    359000

    360000

    361000

    362000

    363000

    364000

    365000

    366000

    367000

    368000

    369000

    370000

    371000

    372000

    373000

    374000

    375000

    376000

    377000

    378000

    379000

    380000

    381000

    382000

    383000

    384000

    385000

    386000

    387000

    388000

    389000

    390000

    391000

    392000

    393000

    394000

    395000

    396000

    397000

    398000

    399000

    400000

    401000

    402000

    403000

    404000

    405000

    406000

    407000

    408000

    409000

    410000

    411000

    412000

    413000

    414000

    415000

    416000

    417000

    418000

    419000

    420000

    421000

    422000

    423000

    424000

    425000

    426000

    427000

    428000

    429000

    430000

    431000

    432000

    433000

    434000

    435000

    436000

    437000

    438000

    439000

    440000

    441000

    442000

    443000

    444000

    445000

    446000

    447000

    448000

    449000

    4500.50.50

    4513.13.10

    45212.412.40

    45339390

    454100.1100.10

    4552132130

    456380.1380.10

    457572.6572.60

    458732.6732.60

    4598008000

    460746.8746.80

    4615955950

    462402.7402.70

    4632302300

    4641101100

    46543.743.70

    46614.214.20

    4673.73.60

    4680.60.60

    469000

    470000

    471000

    472000

    473000

    474000

    475000

    476000

    477000

    478000

    479000

    480000

    481000

    482000

    483000

    484000

    485000

    486000

    487000

    488000

    489000

    490000

    491000

    492000

    493000

    494000

    495000

    496000

    497000

    498000

    499000

    500000

    501000

    502000

    503000

    504000

    505000

    506000

    507000

    508000

    509000

    510000

    511000

    512000

    513000

    514000

    515000

    516000

    517000

    518000

    519000

    520000

    521000

    522000

    523000

    524000

    525000

    526000

    527000

    528000

    529000

    530000

    531000

    532000

    533000

    534000

    535000

    536000

    537000

    538000

    539000

    540000

    541000

    542000

    543000

    544000

    5451.701.7

    54615.1015.1

    54765.6065.6

    548219.50219.5

    549600.50600.5

    5501359.701359.7

    5512578.902578.9

    5524128.404128.4

    5535617.605617.6

    5546535.706535.7

    5556523.206523.2

    5565584.405584.4

    5574085.604085.6

    5582538.802538.8

    5591330.501330.5

    560583.60583.6

    561211.70211.7

    56262.7062.7

    56314.2014.2

    5641.501.5

    565000

    566000

    567000

    568000

    569000

    570000

    571000

    572000

    573000

    574000

    575000

    576000

    577000

    578000

    579000

    580000

    581000

    582000

    583000

    584000

    585000

    586000

    587000

    588000

    589000

    590000

    591000

    592000

    593000

    594000

    595000

    596000

    597000

    598000

    599000

    600000

    Sheet1

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    Channel

    Yield

    Sheet2

    1000.400.3

    1010.400.3

    1020.400.3

    1030.400.3

    1040.400.3

    1050.400.3

    1060.400.3

    1070.400.3

    1080.400.3

    1090.400.3

    1100.400.3

    1110.400.3

    1120.400.3

    1130.400.3

    1140.400.3

    1150.400.3

    1160.400.3

    1170.400.3

    1180.400.3

    1190.400.3

    1200.400.3

    1210.400.3

    1220.400.3

    1230.400.3

    1240.400.3

    1250.400.3

    1260.400.3

    1270.400.3

    1280.400.3

    1290.400.3

    1300.400.3

    1310.400.3

    1320.400.3

    1330.400.3

    1340.400.3

    1350.400.3

    1360.400.3

    1370.400.3

    1380.400.3

    1390.400.3

    1400.400.3

    1410.400.3

    1420.400.3

    1430.400.3

    1440.400.3

    1450.400.3

    1460.400.3

    1470.400.3

    1480.400.3

    1490.400.3

    1500.400.3

    1510.400.3

    1520.400.3

    1530.400.3

    1540.400.3

    1550.400.3

    1560.400.3

    1570.400.3

    1580.400.3

    1590.400.3

    1600.400.3

    1610.400.3

    1620.400.3

    1630.400.3

    1640.400.3

    1650.400.3

    1660.400.3

    1670.400.3

    1680.400.3

    1690.400.3

    1700.400.3

    1710.400.3

    1720.400.3

    1730.400.3

    1740.400.3

    1750.400.3

    1760.400.3

    1770.400.3

    1780.400.3

    1790.400.3

    1800.400.3

    1810.400.3

    1820.400.3

    1830.400.3

    1840.400.3

    1850.400.3

    1860.400.3

    1870.400.3

    1880.400.3

    1890.400.3

    1900.400.3

    1910.400.3

    1920.400.3

    1930.400.3

    1940.400.3

    1950.400.3

    1960.400.3

    1970.400.3

    1980.400.3

    1990.400.3

    2000.400.3

    2010.400.3

    2020.400.3

    2030.400.3

    2040.400.3

    2050.400.3

    2060.400.3

    2070.400.3

    2080.400.3

    2090.400.3

    2100.400.3

    2110.400.3

    2120.400.3

    2130.400.3

    2140.400.3

    2150.400.3

    2160.400.3

    2170.400.3

    2180.400.3

    2190.400.3

    2200.400.3

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    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0.6

    3.6

    14

    43.2

    109.6

    231.9

    414

    634

    849.2

    1018.2

    1120.1

    1153.1

    1119.6

    1017.8

    849.6

    635.2

    415.6

    233.3

    110.6

    43.7

    14.2

    3.7

    0.6

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    4.1

    25.3

    100.1

    313.3

    805.8

    1728.7

    3132.8

    4867.8

    6609

    8021

    8926.6

    9318.5

    9239.9

    8677.9

    7588

    6025.2

    4235.7

    2580

    1338.7

    584

    211.8

    62.7

    14.3

    1.5

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    0

    Channel

    Yield

    Sheet5

    100000

    101000

    102000

    103000

    104000

    105000

    106000

    107000

    108000

    109000

    110000

    111000

    112000

    113000

    114000

    115000

    116000

    117000

    118000

    119000

    120000

    121000

    122000

    123000

    124000

    125000