Pixel 2000, Genova , June 5-8, 2000 Wolf · Juergen Wolf High Density Interconnect & Waferlevel...
Transcript of Pixel 2000, Genova , June 5-8, 2000 Wolf · Juergen Wolf High Density Interconnect & Waferlevel...
![Page 1: Pixel 2000, Genova , June 5-8, 2000 Wolf · Juergen Wolf High Density Interconnect & Waferlevel Packaging Phone: +49-(0)30-314-72887 E-Mail: wolf@izm.fhg.de PbSn60 Solder Bumping](https://reader036.fdocuments.in/reader036/viewer/2022062605/5fc9443f69a5f65ebf77d0f9/html5/thumbnails/1.jpg)
Juergen WolfHigh Density Interconnect & Waferlevel PackagingPhone: +49-(0)30-314-72887E-Mail: [email protected]
PbSn60 Solder BumpingPbSn60 Solder Bumpingby Electroplatingby Electroplating
JuergenJuergen Wolf Wolf
Fraunhofer IZMFraunhofer IZMBerlin, GermanyBerlin, Germany
Fraunhofer Institut Zuverlässigkeit und Mikrointegration
Pixel 2000,Pixel 2000, Genova Genova, June 5-8, 2000, June 5-8, 2000
![Page 2: Pixel 2000, Genova , June 5-8, 2000 Wolf · Juergen Wolf High Density Interconnect & Waferlevel Packaging Phone: +49-(0)30-314-72887 E-Mail: wolf@izm.fhg.de PbSn60 Solder Bumping](https://reader036.fdocuments.in/reader036/viewer/2022062605/5fc9443f69a5f65ebf77d0f9/html5/thumbnails/2.jpg)
Juergen WolfHigh Density Interconnect & Waferlevel PackagingPhone: +49-(0)30-314-72887E-Mail: [email protected]
Technology:Technology:Solder BumpingSolder Bumping
Si read out chip (6“)Si3N4 passivationI/O pad size: 12 µmpitch: 50 µmAl wire bond pads notbumpedno 2nd soldering level
SubstrateSubstrateMetallizationMetallization
Si (4“); 200-250 µm thicknessSi3N4 / SiON passivation
UBM for FC on I/O Al-pads[thin film multi layer (MCM-D)]
Flip Chip BondingFlip Chip Bonding
PbSn 60; size: ø 25µmUBM: Ti:W/Cu/ep.CuElectroplating
Build up:metal: Ti:W/Cu + ep.Cudielectric: BCB (MCM-D)
![Page 3: Pixel 2000, Genova , June 5-8, 2000 Wolf · Juergen Wolf High Density Interconnect & Waferlevel Packaging Phone: +49-(0)30-314-72887 E-Mail: wolf@izm.fhg.de PbSn60 Solder Bumping](https://reader036.fdocuments.in/reader036/viewer/2022062605/5fc9443f69a5f65ebf77d0f9/html5/thumbnails/3.jpg)
Juergen WolfHigh Density Interconnect & Waferlevel PackagingPhone: +49-(0)30-314-72887E-Mail: [email protected]
PbSn Solder Bump Structure
![Page 4: Pixel 2000, Genova , June 5-8, 2000 Wolf · Juergen Wolf High Density Interconnect & Waferlevel Packaging Phone: +49-(0)30-314-72887 E-Mail: wolf@izm.fhg.de PbSn60 Solder Bumping](https://reader036.fdocuments.in/reader036/viewer/2022062605/5fc9443f69a5f65ebf77d0f9/html5/thumbnails/4.jpg)
Juergen WolfHigh Density Interconnect & Waferlevel PackagingPhone: +49-(0)30-314-72887E-Mail: [email protected]
PbSn- Bumping - Processflow
Resist Stripping and wet Etchingof the Plating Base
Sputter Etching and Sputteringof the Plating Base / UBM
Spin Coating and Printingof Photoresist
Electroplating of Cu and PbSn
Reflow
![Page 5: Pixel 2000, Genova , June 5-8, 2000 Wolf · Juergen Wolf High Density Interconnect & Waferlevel Packaging Phone: +49-(0)30-314-72887 E-Mail: wolf@izm.fhg.de PbSn60 Solder Bumping](https://reader036.fdocuments.in/reader036/viewer/2022062605/5fc9443f69a5f65ebf77d0f9/html5/thumbnails/5.jpg)
Juergen WolfHigh Density Interconnect & Waferlevel PackagingPhone: +49-(0)30-314-72887E-Mail: [email protected]
PbSn Bumping Process Flow PbSn Bumping Process Flow in Detailin Detail
incomming opticalinspection
cleaning SRD
electroplating Cu
Technische Universität BerlinResearch Center of Microperipheric Technologies
sputtering platingbasesputtering platingbase ion etching (Ar)Ti:W (200 nm) /
Cu (300 nm)/
optical inspectionelectroplating
PbSn60
pre-conditioning(etching)
pre-conditioning(plasma O2)
photoresistphotoresist spin on / prebake/
exposure / develope/postbake
optical inspection
resist thicknesscontrol
measurement
rinse(DI water)
3 x rinse(DI water)
warp & sheetresistance control
# 2
![Page 6: Pixel 2000, Genova , June 5-8, 2000 Wolf · Juergen Wolf High Density Interconnect & Waferlevel Packaging Phone: +49-(0)30-314-72887 E-Mail: wolf@izm.fhg.de PbSn60 Solder Bumping](https://reader036.fdocuments.in/reader036/viewer/2022062605/5fc9443f69a5f65ebf77d0f9/html5/thumbnails/6.jpg)
Juergen WolfHigh Density Interconnect & Waferlevel PackagingPhone: +49-(0)30-314-72887E-Mail: [email protected]
PbSn Bumping Process Flow PbSn Bumping Process Flow in Detail (in Detail (contcont.).)
Technische Universität BerlinResearch Center of Microperipheric Technologies
photoresist stripping photoresist stripping (1)(1)((acetonaceton))
optical inspection
dicing
UBM etching Ti:W(H2O2)
optical inspection
# 2
photoresist stripping photoresist stripping (2)(2)((acetonaceton))
photoresist stripping photoresist stripping (3)(3)((acetonaceton))
UBM etching Cu(CuCl2))
photoresistphotoresist spin on / bake
reflowreflow
optical inspection
bump shape controlhigh measurement
resist strippingresist stripping3x (3x (acetonaceton))
optical inspection
(100 %)
selection & sorting
Flip Chip Bonding
![Page 7: Pixel 2000, Genova , June 5-8, 2000 Wolf · Juergen Wolf High Density Interconnect & Waferlevel Packaging Phone: +49-(0)30-314-72887 E-Mail: wolf@izm.fhg.de PbSn60 Solder Bumping](https://reader036.fdocuments.in/reader036/viewer/2022062605/5fc9443f69a5f65ebf77d0f9/html5/thumbnails/7.jpg)
Juergen WolfHigh Density Interconnect & Waferlevel PackagingPhone: +49-(0)30-314-72887E-Mail: [email protected]
Solder Bumping Pb40Sn60
PbSn60 Solder Bumps (diameter: 25 µm; pitch 50 µm)UBM: Ti:W/Cu / ep.Cu (5µm)
Technische Universität BerlinResearch Center of
Microperipheric Technologies
![Page 8: Pixel 2000, Genova , June 5-8, 2000 Wolf · Juergen Wolf High Density Interconnect & Waferlevel Packaging Phone: +49-(0)30-314-72887 E-Mail: wolf@izm.fhg.de PbSn60 Solder Bumping](https://reader036.fdocuments.in/reader036/viewer/2022062605/5fc9443f69a5f65ebf77d0f9/html5/thumbnails/8.jpg)
Juergen WolfHigh Density Interconnect & Waferlevel PackagingPhone: +49-(0)30-314-72887E-Mail: [email protected]
Solder Bumping Pb40Sn60
PbSn60 Solder Bumps (diameter: 25 µm; pitch 50 µm)UBM: Ti:W/Cu / ep.Cu (5µm)
after Reflowafter electroplating
Technische Universität BerlinResearch Center of
Microperipheric Technologies
![Page 9: Pixel 2000, Genova , June 5-8, 2000 Wolf · Juergen Wolf High Density Interconnect & Waferlevel Packaging Phone: +49-(0)30-314-72887 E-Mail: wolf@izm.fhg.de PbSn60 Solder Bumping](https://reader036.fdocuments.in/reader036/viewer/2022062605/5fc9443f69a5f65ebf77d0f9/html5/thumbnails/9.jpg)
Solder Bumping Pb40Sn60
Read out BiCMOS Si-chip (Uni Bonn) with Solder Bumps
(diameter: 25 µm; pitch 50 µm) after ReflowUBM: Ti:W/Cu / ep.Cu (5µm)
Technische Universität BerlinResearch Center of Microperipheric Technologies
Juergen WolfHigh Density Interconnect & Waferlevel PackagingPhone: +49-(0)30-314-72887E-Mail: [email protected]
![Page 10: Pixel 2000, Genova , June 5-8, 2000 Wolf · Juergen Wolf High Density Interconnect & Waferlevel Packaging Phone: +49-(0)30-314-72887 E-Mail: wolf@izm.fhg.de PbSn60 Solder Bumping](https://reader036.fdocuments.in/reader036/viewer/2022062605/5fc9443f69a5f65ebf77d0f9/html5/thumbnails/10.jpg)
Juergen WolfHigh Density Interconnect & Waferlevel PackagingPhone: +49-(0)30-314-72887E-Mail: [email protected]
Solder Bump Reflow
Oxidelayers must be removed to allow solderball formationUse of aggressive fluxes must be avoided
Melting point: Tm = 314°C (95/5 wt% Pb/Sn), Tm = 183°C (37/63 wt% Pb/Sn
Reflow methods:Heating under active atmosphereUsing Flux (RMA)
Some fluxless reflow methods:Heating under reducing atmosphere
- 100 % H2- 95 % N2 / 5 % H2 ( not sufficant )
( Reflow in vaccum )( Reflow after Sputteretching or RIE)
Process: Pb40Sn60 (PbSn5)Heating in a organic medium up to 240 (350) °Cfollowed by cleaning procedure
![Page 11: Pixel 2000, Genova , June 5-8, 2000 Wolf · Juergen Wolf High Density Interconnect & Waferlevel Packaging Phone: +49-(0)30-314-72887 E-Mail: wolf@izm.fhg.de PbSn60 Solder Bumping](https://reader036.fdocuments.in/reader036/viewer/2022062605/5fc9443f69a5f65ebf77d0f9/html5/thumbnails/11.jpg)
Juergen WolfHigh Density Interconnect & Waferlevel PackagingPhone: +49-(0)30-314-72887E-Mail: [email protected]
Solder Bump Reflow
Process: Pb40Sn60 (PbSn5)Heating in a organic medium up to 240 (350)°Cfollowed by cleaning procedure
![Page 12: Pixel 2000, Genova , June 5-8, 2000 Wolf · Juergen Wolf High Density Interconnect & Waferlevel Packaging Phone: +49-(0)30-314-72887 E-Mail: wolf@izm.fhg.de PbSn60 Solder Bumping](https://reader036.fdocuments.in/reader036/viewer/2022062605/5fc9443f69a5f65ebf77d0f9/html5/thumbnails/12.jpg)
Juergen WolfHigh Density Interconnect & Waferlevel PackagingPhone: +49-(0)30-314-72887E-Mail: [email protected]
Flip Chip AssemblyProcess FlowProcess Flow
Solder BumpingRead out chip
Wettable MetallizationDetector Substrate
Inspection DicingCleaning &Inspection
Inspection
Loading Substrate Loading Chip Alignment4 µm x/y accuracy
Placement
Unload Module /Single Tile
Reflow Soldering240° C peak
temperature, activatedatmosphere
Unload Module /Single Tile
Technische Universität BerlinResearch Center of Microperipheric Technologies
![Page 13: Pixel 2000, Genova , June 5-8, 2000 Wolf · Juergen Wolf High Density Interconnect & Waferlevel Packaging Phone: +49-(0)30-314-72887 E-Mail: wolf@izm.fhg.de PbSn60 Solder Bumping](https://reader036.fdocuments.in/reader036/viewer/2022062605/5fc9443f69a5f65ebf77d0f9/html5/thumbnails/13.jpg)
Juergen WolfHigh Density Interconnect & Waferlevel PackagingPhone: +49-(0)30-314-72887E-Mail: [email protected]
Equipment @ IZMSolder Bumping (6“-8“)
Electroplating
Technische Universität BerlinResearch Center of Microperipheric Technologies
Sputtering LLS 802 (Balzers)
Lithography ACS 200 (Karl Suss)MA 200 (Karl Suss)
EQUINOX (Semitool)
Optical Inspection
RIE System Ten 1107(Matrix)
NSX 90 (August)
Dicing DAD 341(Disco)
Reflow LRP 200 (RENA)
July 2000
![Page 14: Pixel 2000, Genova , June 5-8, 2000 Wolf · Juergen Wolf High Density Interconnect & Waferlevel Packaging Phone: +49-(0)30-314-72887 E-Mail: wolf@izm.fhg.de PbSn60 Solder Bumping](https://reader036.fdocuments.in/reader036/viewer/2022062605/5fc9443f69a5f65ebf77d0f9/html5/thumbnails/14.jpg)
Juergen WolfHigh Density Interconnect & Waferlevel PackagingPhone: +49-(0)30-314-72887E-Mail: [email protected]
Equipment @ IZM
Flip Chip Bonding
Technische Universität BerlinResearch Center of Microperipheric Technologies
Flip Chip Bonder FC 950 (Karl Suss)
X-ray Inspection X-ray (Feinfocus)
FC 250 (Karl Suss)
![Page 15: Pixel 2000, Genova , June 5-8, 2000 Wolf · Juergen Wolf High Density Interconnect & Waferlevel Packaging Phone: +49-(0)30-314-72887 E-Mail: wolf@izm.fhg.de PbSn60 Solder Bumping](https://reader036.fdocuments.in/reader036/viewer/2022062605/5fc9443f69a5f65ebf77d0f9/html5/thumbnails/15.jpg)
Juergen WolfHigh Density Interconnect & Waferlevel PackagingPhone: +49-(0)30-314-72887E-Mail: [email protected]
Inspection / Yield / IssuesInspection / Yield / Issues
![Page 16: Pixel 2000, Genova , June 5-8, 2000 Wolf · Juergen Wolf High Density Interconnect & Waferlevel Packaging Phone: +49-(0)30-314-72887 E-Mail: wolf@izm.fhg.de PbSn60 Solder Bumping](https://reader036.fdocuments.in/reader036/viewer/2022062605/5fc9443f69a5f65ebf77d0f9/html5/thumbnails/16.jpg)
Juergen WolfHigh Density Interconnect & Waferlevel PackagingPhone: +49-(0)30-314-72887E-Mail: [email protected]
Optical Bump InspectionAutomated Defect Inspection System NSX-90 August Technology
Inspection time:
≈ 120 min / wafer all bumps
(ATLAS FE-B/D [6“])
![Page 17: Pixel 2000, Genova , June 5-8, 2000 Wolf · Juergen Wolf High Density Interconnect & Waferlevel Packaging Phone: +49-(0)30-314-72887 E-Mail: wolf@izm.fhg.de PbSn60 Solder Bumping](https://reader036.fdocuments.in/reader036/viewer/2022062605/5fc9443f69a5f65ebf77d0f9/html5/thumbnails/17.jpg)
Juergen WolfHigh Density Interconnect & Waferlevel PackagingPhone: +49-(0)30-314-72887E-Mail: [email protected]
Inspection Sites
![Page 18: Pixel 2000, Genova , June 5-8, 2000 Wolf · Juergen Wolf High Density Interconnect & Waferlevel Packaging Phone: +49-(0)30-314-72887 E-Mail: wolf@izm.fhg.de PbSn60 Solder Bumping](https://reader036.fdocuments.in/reader036/viewer/2022062605/5fc9443f69a5f65ebf77d0f9/html5/thumbnails/18.jpg)
Juergen WolfHigh Density Interconnect & Waferlevel PackagingPhone: +49-(0)30-314-72887E-Mail: [email protected]
Defect Classes
![Page 19: Pixel 2000, Genova , June 5-8, 2000 Wolf · Juergen Wolf High Density Interconnect & Waferlevel Packaging Phone: +49-(0)30-314-72887 E-Mail: wolf@izm.fhg.de PbSn60 Solder Bumping](https://reader036.fdocuments.in/reader036/viewer/2022062605/5fc9443f69a5f65ebf77d0f9/html5/thumbnails/19.jpg)
Juergen WolfHigh Density Interconnect & Waferlevel PackagingPhone: +49-(0)30-314-72887E-Mail: [email protected]
Defect Classes
ParticleParticle
BumpPosition
MissingBump
Small Bump Large Bump
![Page 20: Pixel 2000, Genova , June 5-8, 2000 Wolf · Juergen Wolf High Density Interconnect & Waferlevel Packaging Phone: +49-(0)30-314-72887 E-Mail: wolf@izm.fhg.de PbSn60 Solder Bumping](https://reader036.fdocuments.in/reader036/viewer/2022062605/5fc9443f69a5f65ebf77d0f9/html5/thumbnails/20.jpg)
Juergen WolfHigh Density Interconnect & Waferlevel PackagingPhone: +49-(0)30-314-72887E-Mail: [email protected]
Bump-Profile for Atlas Bump Inspection
Bump Size / Position: Defect Code:
Minimum Size: 0.027 mm →→→→ Small Bump
Maximum Size: 0.032 mm →→→→ Large Bump
Tolerance +/-: 0.005 mm →→→→ Bump position
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Juergen WolfHigh Density Interconnect & Waferlevel PackagingPhone: +49-(0)30-314-72887E-Mail: [email protected]
1 reflow 2 reflow 3 reflow 4 reflow0
5
10
15
20
bump size 25µm
wafer 17 center
wafer 17 edge
wafer 10 center
wafer 10 edge
bum
p sh
ear
forc
e (g
)
reflow numbers
Bump shear variation as multiple reflowsBump shear variation as multiple reflows(25(25µµµµµµµµm size bumps)m size bumps)
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Juergen WolfHigh Density Interconnect & Waferlevel PackagingPhone: +49-(0)30-314-72887E-Mail: [email protected]
Cross-sectional images as multiple reflowsCross-sectional images as multiple reflows
reflow 1 reflow 2
Cu: 4.0µµµµm Cu: 3.8µµµµm
reflow 3
Cu: 3.6 µµµµm
![Page 23: Pixel 2000, Genova , June 5-8, 2000 Wolf · Juergen Wolf High Density Interconnect & Waferlevel Packaging Phone: +49-(0)30-314-72887 E-Mail: wolf@izm.fhg.de PbSn60 Solder Bumping](https://reader036.fdocuments.in/reader036/viewer/2022062605/5fc9443f69a5f65ebf77d0f9/html5/thumbnails/23.jpg)
Juergen WolfHigh Density Interconnect & Waferlevel PackagingPhone: +49-(0)30-314-72887E-Mail: [email protected]
High Density Flip Chip Detector Modulepixel detector module for proton proton interactions at the Large Hadron Colliderat the European Laboratory for Particle Physics CernTopics: 16 ICs; 46080 PbSn Solder Bumps; pitch: 50 µm
Technische Universität BerlinResearch Center of Microperipheric Technologies