OPERATOR’S MANUAL

Model PC-8820BUV EPROM/WAFER Erasing System

AM08025-3PRINTED IN U.S.A. November 2011

WARNINGPlease read the instructions in this manual carefully before using your Spectroline® PC-8820B UV EPROM erasing cabinet. This cabinet is carefully designed to prevent accidental ultraviolet exposure and electrical shock to the operator when used properly. However, no design can guard against intentional efforts to defeat the safety mechanisms or careless use of any instrument. Failure to follow directions could result in a serious or even fatal accident.

INTRODUCTION•TheSpectrolinePC-8820BUVEPROM/wafererasingsystemisatwo-piece,modularunitspeciallydesignedtomeetthecriticalproductionrequirementsofhighdensityEPROMsandwafers.•Theuppersectionfeatureseightlow-pressuremercurygridlampassembliesthatprovidesuperiorspatialuniformityof254nmirradianceoveralargeerasingarea.•Thegridsaremadeofhighpurity,ozone-freequartztomeetOSHAsafetystandards.•ThehoodattachmentisbothanairexhaustandashieldagainstUVexposure.PowerfulinternalcoolingfanscontrolthechambertemperaturetomaintainmaximumUVintensityandprolonggridlife.•Thetemperaturegaugeshowswhentheunithasbeenacclimatizedtoitsenvironment.•Asafetyinterlockmechanismpreventsoperationunlesstheloadingdrawerisfullyclosed,thusprotectingtheuseragainstaccidentalexposuretoharmfulshortwaveultravioletradiation.•Themodulardesignoftheunitsimplifiesitsmaintenanceandservice.

UNPACKING AND INSPECTION1.Unscrewandremovethetopcover.2.Removethetrayinsertthatispackedatthetopofthecabinet.DO NOT

DISCARD.3.Removesidepackingmaterial.4.Unscrewwraparoundwhereitisattachedtotheskid.5.Liftwraparoundoverandoffsystem.Placetrayinsertinsidecabinet’sloading

drawer.6.Usetheskidtotransportthesystemtoitslocation.7.Liftthesystemofftheskidandplaceinoperatinglocation.8.Assemblethehoodattachment(fourpanels,twolarge,twosmall)with8

screwssupplied.9.Fastenthehoodtothetopoftheunitwith16screwssupplied.Inspectthe

systemthoroughlyforpossibledamagecausedinshipment.ChecktheelectricalperformanceaccordingtotheINSTALLATIONnotesandGENERAL FUNCTIONAL CHECKSoutlinedintheOPERATIONsection.Ifthereisanydamage,immediatelynotifythecarrierandsupplierbeforeattemptingtousetheunit.Savetheshippingcartonsandpackingmaterialsforfuturestoringandshippingofthecabinet.

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CABINET DESCRIPTION1.Hood AirexhaustandUVshield.2.UpperAssembly “ErasingUnit.”Housesgridlamps,lampfans,loading drawerandtemperaturegaugecontrol.3.LoadingDrawer AcceptsEPROMs,PCboards,siliconwafers, metriccards,andopen-facestockingtubes forerasure.4.LowerAssembly “PowerSupplyUnit.”Housesmainelectrical system,ballasts,systemfans,etc.5.PowerSwitch Activatesballastsandfansinthelowerunit.6.PowerIndicator Glowsredwhenpowerison.7.StartButton Activatesballasts,providingpowertolampsand thetimer.Upperunitfansautomaticallystart approximatelyoneminuteafterbutton ispressed.8.Temperature ShowswhenunithasreachedoperatingGauge temperature,100°F(37.8°C).9.FanSpeedControl Variesspeedoffaninupperunit.10.ElectronicTimer Automaticallyshutssystemoffatendoferasing cycle.Maybesetforhours,minutesorseconds.11.LightIndicators Allowvisualindicationthatcorrespondinggrid lampsareoperating.12.PowerSupplyFans Circulateairthroughlowerunit.13.LampFans Maintaintemperatureinupperunitformaximum UVoutputandoptimumerasingconditions. Oneminutedelay-startallowslampsto reachoperatingtemperatureandpeak efficiencyquickly.14.PowerUnit Six3AG1.0Afusesandone30.0A2-pole circuitbreaker.15.EPROMHandling Easilyremovableforquickloadingandunloading TrayInsert ofdevices.Heightadjustabletomaintainoptimum exposuredistance.16.Conductive Electricallyconductivefoampadreducesthe FoamPad possibilityofelectrostaticdamagetotheEPROMs.17.WaferHandling UsedinplaceofEPROMHandlingTrayInsert. TrayInsert Speciallydesignedforeasywaferloadingand unloading.Fivemodelsareseparatelyavailable.18.Calibration Defeatssafetyinterlockmechanismtoallowfor OverrideSwitch multipleUVintensityreadings(keyoperation).

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OPERATIONSAFETY PRECAUTIONSThissystemproduceshighvoltagecurrentandhighlevelsofshortwave(254nm)UVradiation.Onlypersonnelqualifiedtorecognizeelectricalshockandultravioletradiationhazardsandtrainedinthesafetyprecautionsrequiredtoavoidpossibleinjuryshouldoperateit.•Disconnectthepowercordbeforeremovingorreplacingthegridlampassemblies.•Donotattempttodefeatthelightsafetyinterlockinordertoseewhetherthegridlampsareoperating.Ifthegridlampsarefunctioning,ablueglowwillbeclearlyvisibleatalleightlightindicatorsatthefrontofthecabinet’sloadingdrawer.TheseindicatorssafelyabsorbharmfulUVradiation.

INSTALLATIONThiscabinetshouldbesetuprightonitsrubberfeetandoperatedonlyinthisposition.Placethecabinetatleastsixinches(15.2cm)fromanysurroundingwallstoallowforproperairflow.Thefrontofthelowerunitisalsofan-cooledandshouldremainunobstructedduringoperation.

POWER SOURCE REQUIREMENTSThepowersourceatthedestinationmustbe220V/60Hzor230V/50Hz,60amp6AWG,3conductorpowercable.Connectthe60ampsockettothe3conductor.Thecircuitrequiredmustbeadedicatedline,stableandfreeofvoltagesurges.Thevoltageshouldbecheckedandmaintainedtoensurethatitmeetstheunit’srequirementswithminimalfluctuation.

NOTE: Input voltage must never be intentionally set higher in an attempt to boost lamp intensity. This will shorten the lamp’s life and cause the temperature of the transformers to rise due to the increased input current, drastically shortening their life. Warranty will be voided in such cases.

TEMPERATURE GAUGE SETUPDuringtheinitialsetupthePC-8820Bmustbeacclimatizedtoitsenvironment.•Closetheloadingdrawer.•Pressthepowerswitchon.Fansinthelowerunitwillstart.•Pressthestartbutton.Gridswillenergize.Fansintheupperunitwillstartbetween30to60secondslater,dependingontheunittemperature.•Runtheunitfor30minutestoadjusttheoperatingtemperatureto100°F(37.8°C).Usetheknobonthetoprightoftheuppercabinettovarythespeedofthefan.Whentheunitisstabilizedtothepropertemperature,donotalterthefanspeedcontrol.

WARNINGTheshortwaveultravioletradiationproducedinthiscabinetishazardous. Do not expose eyes or skin to this radiation. Spectroline®UV-protectiveeyewearandfaceshieldsareavailableandrecommended.SeeREPLACEMENT PARTS AND ACCESSORIES formodelnumbers.Fullycoverhands,neckandarms.Leavenopartofthebodyexposed.Glovesandlong-sleevedshirtorlabcoatarerecommended.

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GENERAL FUNCTIONAL CHECKS•Closetheloadingdrawercontainingtheremovabletrayinsert.•Pressthepowerswitchon.Fansinthelowerunitwillstart.•Setthetimertoanonzeropositionandpressthestartbutton.Fansintheupperunitwillstartbetween30and60secondslater,dependingontheunittemperature.Ablueglowwillappearatalllightindicators.Initiallythelightsmayflicker,buttheyshouldbecomesteadyafterafewseconds.Thisisnormal,especiallyifthecabinetandgridlampsarecold.•Thecyclemaybeterminatedprematurelybyopeningthedrawer.Thiswillde-energizethegridlampsandlampfans.

SAFETY INTERLOCKWhenthedrawerisopenedduringtheerasingcycle,thegridlampsandfansintheupperunitwillturnoff.Thetimerwillcontinuetocount.Whenthedrawerisclosedthelampswillautomaticallyturnon.Thefanswillbegintooperateapproximatelyoneminutelater.NOTE:Ifyouchoosetoresetthetimerafterthedrawerisopened,pressthepowerswitchoffandthenonagaintorestart.

SETTING THE TIMER•Rotatetheblueknobsuntilthedesiredcycletimeisdisplayed.Theknobscanberotatedclockwiseorcounterclockwiseandare“pull”removableifdigit-setsecurityisrequired.•Thetimerwillbegintooperatewhenthestartbuttonispressed,displayingthecycletimeremaining.Whenthetimerreaches“0,”thegridlampsandfansintheupperunitwillshutoffautomatically.•Differenttimingdisplaymodesarepossibleonthiselectronictimer.SeeCHANGING TIMER OPERATIONsectionfordetails.

CHANGING TIMER OPERATIONToperformanyofthefollowingprocedures,thetimermustberemovedfromitshousingwithinthecabinet.Simplyloosenthetwoscrewsonthefaceofthetimerandpullthetimerforward.Decimal Point Location—Thewhiteplasticleverbehindthefrontfaceofthetimermaybemovedintothreepositionscorrespondingtothedecimallocation.Pushtheleversothatthedecimalappearsinthedesiredlocationonthetimerreadout.NOTE:Thisproceduresetsthedecimalpointelectronicallyaswellasmechanically.Time Units (Sec/Min/Hr)—Ontherightsideplateofthetimerisasmallmetalarminaslottedarc.Bydepressingthisarmslightlywithapenpoint,youcanmoveittonewposition.NOTE:Thisprocedurechangesthetimeunitsonthedisplayelectronically.Timer Display Modes—Fourdisplaymodesarepossible:(1)Down&Stop;(2)Down&Go;(3)Up&Stop;(4)Up&Go.Thetimerisfactory-settothefirstmode.

Tochangethemode,movethePVCwireconnectorontherightsideofthetimertothepincorrespondingtothemodedesired.NOTE:Thefifthpinisfortestmodeonly.

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PROPER ADJUSTMENT OF TRAY INSERTEachPC-8820Bisequippedwithatrayinsertthatisadjustabletovaryingheights.Thisallowstheoperatortomaintaintheoptimumexposuredistance.Itisrecommendedthata3/8-inch(.95cm)distancebemaintainedbetweenthegridlampsandtheEPROMs.Toraisethetrayinsertinthetray,turnthescrewslocatedatthefourcornersclockwise.Turningthescrewsinacounterclockwisedirectionlowersthetrayinsert.RaisingthetrayinsertbringstheEPROMchipsclosertothegridlamps.Thiswillincreasetheaverageultravioletintensity,althoughtheirradiancedistributionwillbecomelessuniform.

CALCULATING ERASE TIMEAgoodstartingpointcanbeobtainedbydividingtheEPROMs’nominalerasingenergyinWatt-secs/cm2by65or70(dependingonmodel)andmultiplyingby1,000.Thisgivestheestimatederasingtimeinseconds,basedonthesystem’stypicalpeakintensitywhennew.Ifanultravioletintensityradiometer(suchastheSpectrolineAccuMAX™XR-1000readoutunitwithanXS-254nmsensordetector)isused,thenamoreaccurateestimatemaybeobtainedfrom:Time(seconds)=NominalErasingEnergy(W-secs/cm2)x103

Irradiance(mW/cm2)

NOTE:IfanyshortwaveUVradiometerotherthanaSpectrolinemodelisbeingused,caremustbetakentoensurethatitismeasuringonly254nm.Somecompetitivemetershavesensitivitytovisiblelight,longwaveUVand/orinfraredradiationandmaygivemisleadingandexcessiveintensityvalues,leadingtoincompleteerasureoftheEPROMsorwafers.

PROPER OPERATING PROCEDURE1.Pressthepowerswitch.2.Loaddevicestobeprocessedintotrayinsert.3.Placetrayinsertintoloadingdrawerandadjusttheheightusingtheadjustingscrewsprovided.

4.Closethedrawer.5.Setcycletime.6.Pressthestartbutton.7.Fansandgridlampsintheupperunitwillshutoffautomaticallywhencycleiscomplete.Fansinthelowerunitwillcontinuetorununtilthepowerswitchisshutoff.NOTE:Itisnotnecessarytopressthepowerswitchifanewcycleistobestartedwithinashortperiodoftime.

8.Unloaderaseddevices.

MAINTENANCE AND TESTINGThePC-8820Bisconstructedwithhighqualitymaterialsandcomponents.Byprovidingreasonablecareandfollowingtheinstructionsinthismanual,theusercanexpectalonglifefromthecabinet. Thefollowingservicinginstructionsareintendedtobeusedbyqualifiedpersonnelforlimitedmaintenanceofthecabinet.Do not perform any servicing other than that contained in these operator instructions.ReturnthecabinettoSpectronicsCorporationforothermaintenancenotcoveredinthissection.

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CHECKING GRID LAMP INTENSITYGridlampintensityshouldbemeasuredperiodicallywithanAccuMAXSeriesXR-1000readoutunitwithanXS-254nmsensordetectorusinganXCB-100USBcable.TheultravioletgridlampsusedinthePC-8820Baredesignedforlonglifeundernormaloperatingconditions.Correctoperatingtemperatureatthegaugeshouldbe100°F.However,aswithanydischarge-typegridlamp,theoutputwillslowlydecreaseataratedependentuponthegridlamp’soperatingparameters,suchaslampcurrentandvoltage,cabinettemperature,numberofon-offcycles,gridlampoperationtime,presenceorabsenceofvibration,andotherfactors.Generally,theendoflifewillcorrespondtoaminimumusableoutputandnottotalfailure.Eventhoughagridlampmayappeartobeoperatingsatisfactorilybecauseitscorrespondinglightindicatormaintainsthebluevisibleglow,theeffective254nmoutputmaybelow.Whentherequirederasingtimebecomesunacceptablylong,itistimetoreplacethegridassembly.SeethesectionsonCLEANING THE GRID LAMPSandREPLACING THE GRID LAMP ASSEMBLY.

NOTE:Aflickeringgridlamporagridlampthatfailstolightcancauseprematurefailureofthecorrespondingballast.ItisstronglyrecommendedthataPC-8820Bcabinetwithacontinuallyflickeringorextinguishedgridlampbeimmediatelywithdrawnfromserviceuntiltheproblemisdiagnosedandcorrected.

CALIBRATION OVERRIDE

ThePC-8820Bisequippedwithacalibrationoverrideswitchthatdefeatsthesafetyinterlockmechanismdescribedearlier.TheoverrideallowstheoperatortotakemultipleintensityreadingswithouttheUVgridlampsandfansautomaticallyshuttingoffeachtimethedrawerisopened.Toactivatethecalibrationoverride,insertthekeyprovidedintothekeyholeonthefrontoftheunit.Whenthekeyisturnedone-quartertotheright,abuzzerwillsoundandtheredpowerindicatorwillflash.Thedrawermaynowbeopenedandclosedwithoutanyfunctionoftheunitshuttingoff.Whenintensityreadingsarecompleted,turnthekeytotheleftandremoveitfromthekeyhole.

CONDUCTIVE FOAM PAD REPLACEMENTVisiblywornconductivefoampadsshouldbereplacedtoprotectyourEPROMsfromharmfulelectrostaticbuildup.Toreplacethesepads,gentlypulluptheoldpadanditsadhesivebacking.Peelofftheprotectivepapercoveringthenewpad’sadhesive.Attachthepadtotheloadingtrayinthesamepositionastheformerpad.

WARNINGThe PC-8820B emits high-intensity short wave ultraviolet radiation that is extremely hazardous to the eyes and skin. When using the calibration override, it is absolutely necessary for maximum personal safety that the operator uses the Spectroline UVF-80 UV-absorbing face shield and protective clothing.

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CLEANING THE GRID LAMPSDustbuilduporimproperhandlingorcleaningmayimpairtheoutputoftheUVgridlamps.Thegridsshouldbehandledonlywithacleanclothorgloves.andcleanedperiodically.Toremovethegridlampmountingtrayforgridlampcleaning:1. Disconnect the power supply cord from its outlet.2.Removetheninescrewsfromthetopandsidesoftheuppercabinet’sback

andfrontpanels.3.Removethe14screwsfromthesidepanelsoftheloweredgeoftheupper

cabinet.4.Removethefivescrewsfromtherearloweredgeoftheuppercabinet.This

willdisengagetherearcoveroftheunit.5.Toopentheballastcompartment,removethe14screwsintherearofthe

lowercabinet.6.DisconnecttheMolexconnectorthatsuppliespowertotheupperfan

assemblycontrolboard.7.Liftoffthetopandsidesoftheuppercabinethousing.(Theywillliftoffasone

unit.Itisnotnecessarytoremovethehood.)Notetheproperpositionofthispieceofthecabinet.

8.Removethe16high-voltageconnections(twoforeachlamp)fromtheballastsocketsintheuppercabinet.Todisconnectthelampsfromtheballasts,graspeachofthewhiteplugsfirmlyandpullstraightup.

9.Disconnectthethermometersensorfromthelamptrayassemblyintheuppercabinet.

10.RemovethegridlampassemblymountingtraybylooseningthetwoscrewsoneachsideoftheEPROMdrawerslidemountingbracket.Theseholdthetraytothebracket.Onceloosened,carefullyliftupthetray.Placeitonalevelsurface,lampsfacingup.

NOTE: The grid lamps and their connecting wires are extremely fragile and easily broken. Please use extra care in handling. It may be necessary for two people to perform this procedure.

11.Thegridlampsarenowexposedforcleaning.NOTE:Handlethemwithacleanclothorgloves.Improperhandlingcanleadtoone’sfingerprintsbeingetchedintothegrid,reducingtheoutput.Wipethegridswithaclothandpuresolvent(e.g.,methanol)ormilddetergent.

REPLACING THE GRID LAMP ASSEMBLYTheG985NO-Bgridlampsaredesignedforlonglifeundernormaloperatingconditions.AsstatedbeforeinCHECKING GRID INTENSITY,discharge-typelampseventuallyloseintensityandmustbereplaced.NOTE: READ ENTIRE PROCEDURE BEFORE REPLACING GRID LAMP ASSEMBLY. The grid lamp used in this assembly is manufactured from thin-wall blown quartz tubing and is extremely fragile. Please use extra care in handling. 1.Disconnect the power supply cord from its outlet.2.Followsteps2through10underCLEANING THE GRID LAMPS.3.Unpackthenewgridassembly.NOTE:Thenewgridassemblyalreadycontainsthehigh-voltageplugsrequiredfortheballast’ssockets.Inspecttheassemblyforpossibledamage.Ifanydamageisnoted,immediatelynotifythe

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carrierandsupplieranddonotattempttousethegridassembly.4.Mountthenewgridassemblytothegridassemblytrayusingthefourscrewsremovedinstep10underCLEANING.

5.InvertthelamptrayandplaceitbackintoitsoriginalpositionintheEPROMdrawerslidemountingbracket.Securethetraytothebracketusingthescrewsremovedinstep10underCLEANING.

6.Reversetheproceduredescribedinstep8underCLEANING.IMPORTANT:Ensuregoodelectricalcontactbetweentheplugsandsocketsbyfirmlypressingtheplugsintotheappropriatesockets.

7.Toreassemblethecabinet,reverseproceduresofsteps2-9underCLEANING.8.Plugthecabinet’spowercordintoaproperlygroundedoutletandtesttheoperationofthecabinet.

CHECKING BALLAST OUTPUTDuetothedangerousnatureofhighvoltagetestingprocedures,werecommendasimplecomparisontestforcheckingballastoutput.Aballastsuspectedofsubstandardoutputmaybetestedbywiringittoagridlampofknownintensityoutput.IfthegridlampdoesnotcontinuetoproducesimilarUVintensity,thentheballastshouldbereplaced.

TROUBLESHOOTINGIfatanytimethecabinetdoesnotyieldsatisfactoryresults,repeatthepreviouslyoutlinedinspection,installationandgeneralfunctionalchecks,includingcheckingthat:•Theloadingdrawerisfullyclosedandthesafetyinterlockmechanismhasbeenactivated.•Thetimerisatanonzeroposition.•Thesystemispluggedintoaproperlyoperatingelectricaloutlet.•Thefusesareoperatingproperly.

1.Pressthepowerswitchon,closetheloadingdoorandpressthestartbutton.2.Checktheoutputofeachgridlampbycomparingcorrespondinglight

indicatorsandbymeasuringeachofthegridlampswiththeAccuMAX™XR-1000readoutunitwithanXS-254nmsensordetectorusinganXCB-100USBcable.

3.Shut down and unplug the system.4.FollowtheinstructionsunderCLEANING THE GRID LAMPS(steps2-9)to

gainaccesstothegridlamps.5.Inspectthemalfunctioninggridlamp.Ifthelampiscrackeditmustbe

replaced.Ifnodamageisvisible,eitheraballastoralampsealisfaulty.6.Lowerthegridassemblyhousingtoitsoriginalposition.Takecarenotto

stressanywires.Reassembletheunit.

WARNING—HIGH VOLTAGEIfthegridlampmalfunctionsortheerasetimeseemstoolong,referthefollowingteststoqualifiedservicepersonneltodistinguishthecauseoftheproblem.

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7.Tracethewiringfromthemalfunctioninggridlamptoitsplugandsocketconnection.Pullaparttheplugandsocket.

8.Connectthisplugtothesocketofanadjacent,properlyfunctioninggridlamp,thenconnecttheplugofthisadjacentlamptotheemptysocket.Becertaintoreconnecttheplugsandsocketssecurely.

9.Reassemblethecabinet.Plugthesysteminandswitchiton.10.Checktheoperationofthegridlamps.Ifthesamegridlampisstill

malfunctioning,thegridlampisfaulty.Ifthemalfunctionmovestothelampcorrespondingtothesubstitutedconnector,thetransformer/ballastassociatedwiththisconnectorisfaulty.

11.Replaceallpartstotheiroriginalpositions,beingcarefulnottostressanywires.

TECHNICAL SPECIFICATIONSUV Light Source 8Low-pressureMercuryGrid LampAssembliesAverage Initial UV Intensity of65mW/cm2atacabinettemperatureof at 230V/50Hz 100ºF(37.8ºC)Average Initial UV Intensity of70mW/cm2atacabinettemperatureof at 220V/60Hz 100ºF(37.8ºC)Erasing Time Required 2.5minutes(basedon6W-sec/cm²EPROMs)Capacities 3.0in(75mm)Wafers—60 100mm(4.0in)Wafers—40 125mm(5.0in)Wafers—24 150mm(6.0in)Wafers—15 200mm(8.0in)Wafers—8Dimensions, L x W x HUpper Housing 36x33.25x9.0in(91.4x84.5x22.9cm)Lower Housing 36x33.25x9.0in(91.4x84.5x22.9cm)Hood 10.5x21.25x15in(27.6x79.4x38.1cm)Lighted Area, L x W 22x32in(55.9x81.3cm)Erasing Area, L x W 20x32in(50.8x81.3cm) Net Weight 275lb(124.7kg)

ELECTRICAL SPECIFICATIONSModel Wavelength Volts Hz Amps*

PC-8820B UV-C 220 60 30PC-8820B/F UV-C 230 50 30Thefuses(6required)are3AG1.0Aandone30.0A2-polecircuitbreaker.*Nominal

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ENVIRONMENTAL SPECIFICATIONSTheSpectrolinePC-8820BUVEPROMerasingcabinetsaredesignedtobesafeunderthefollowingconditions:•Indooruse;•Altitudeupto2,000m(6,562ft.);•Temperature18.3°Cto29.4°C(65°Fto85°F);•RelativeHumidity:40%to70%;•Mainssupplyvoltagemustbekeptatstatedvoltagewithaminimalfluctuation;•InstallationCategoryII;•PollutionDegree2.

WARRANTYThewarrantypolicyforthePC-8820BisprovidedontheCertificateofLimitedWarrantyenclosedseparatelywitheachunit.Forassistanceofanykind,contacttheCustomerServiceDepartmentatSpectronicsCorporation.IntheU.S.andCanada,calltoll-free1-800-274-8888.Givefulldetailsofthedifficultyandincludethemodelandserialnumbersoftheunitandthedateofpurchase.Ifreturnofthecabinettothefactoryisnecessary,shippinginstructionswillbeprovided.Ifanestimateofchargesfornonwarrantyworkorotherserviceworkisrequired,aquotewillbefurnisheduponevaluationoftheunit.Serviceworkwillnotbeperformedwithoutcustomerapproval.

SHIPPINGPackthesysteminitsoriginalshippingcontainerandpackingmaterials.Insurethesystemforfullvalueandshipitprepaidtothefactory.

REPLACEMENT PARTS AND ACCESSORIESDescription Part No.GRIDASSEMBLY,COLDCATHODE G985NO-BDIGITALTIMER(220Volts) EC-0235TRAYINSERTWITHCONDUCTIVEFOAMPAD I-8820TRAYINSERTFOR6.0in(150mm)WAFERS I-8820-6XTRAYINSERTFOR8.0in(200mm)WAFERS I-8820-8XTRAYINSERTWITHWAFERFIXTURES I-8820-6X/WFFOR6.0in(150mm)WAFERSTRAYINSERTWITHWAFERFIXTURES I-8820-8X/WFFOR8.0in(200mm)WAFERSTRAYINSERTFOR12.0in(300mm)WAFERS I-8820-12XFACESHIELD,UV-ABSORBING UVF-80

LAMP CONTAINS MERCURYManage in Accord withDisposal LawsSee: www.lamprecycle.org

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