Outline Semiconductor equations Examples pnCCD Depleted Field Effect Transistor (DEPFET)
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Transcript of Outline Semiconductor equations Examples pnCCD Depleted Field Effect Transistor (DEPFET)
Semiconductor device simulation of silicon radiation Semiconductor device simulation of silicon radiation
detectorsdetectors
R. H. Richter for the MPI Semiconductor LabR. H. Richter for the MPI Semiconductor Lab
Outline
Semiconductor equations
ExamplespnCCD
Depleted Field Effect Transistor (DEPFET)
Pixel detectors: field distribution in heavily irradiated silicon
Summary
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
Continuity equationsContinuity equations
Simultaneous consideration of
Generation
Recombination
Drift
Diffusion
Drift due to electric field derived from Poisson Equation
Numerical simulation: simultaneous solution of diffusion and Poisson equation with boundary conditions
Equations
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
Boundary conditions and featuresBoundary conditions and features
Neumann b.c. (termination and symmetric continuation)
Direchlet b.c. (Ohmic contacts)
Gate b.c.
Schottky contacts
Simple networks with R,C,L possible
Sophisticated mobility models
Parametrization of impact ionization (avalanche)
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
Concept of PN-CCD with frame storeConcept of PN-CCD with frame store (Google-> pnCCD, XMM)(Google-> pnCCD, XMM)
backside illumination
pn-junctions instead of MOS gates
pn-junction (homogeneous)
full
y d
eple
ted
0
.5 m
m
transfer “deep” in bulk
anode +
JFET on chip
per channel
PN-CCD different from MOS-CCDs
p
n
p
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
pnCCD – simulation taskspnCCD – simulation tasks
WIAS-TeSCA2D-Simulation
charge transferbarriers to surfaceTransfer region + anode
charge transfer to anode Channel separation (perpendicular to transfer region)
Technology compatibility with on chip amplifiers (JFETs).
Challenges: large domain (50000 triangles), depletion state - electrons
How to verify?
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
MeshingMeshing
Triangulated grid (2D) often taken from the
technolgy simulator but additional programs
are also used (Gridgen, B. Heinemann)
20.000 – 40.000 points
potential
log(n)
Localized generation of e/h pairs simulate particle tracks or converted photons.
pn-CCD performancepn-CCD performance
• largest monolithic CCD
6 x 6 cm²
384 x 400 pixel
150 µm pixel
• fast, parallel readout
5 msec full frame
• low noise
4 el. rms
• high quantum efficiency
90 %
• radiation hard
400 Mp/cm²
XMM-Newton – first light (January 2000)XMM-Newton – first light (January 2000)
large Magellanic cloud
supernova remnant 1987A
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
Getting insight into a CCD - MeshGetting insight into a CCD - Mesh
Analysis of the charge collection process
Mesh experiment (Tsunemi, Yoshita, Kitamoto, Jpn J. Appl. Physics 36, 2906
N. Kimmel et al, Analysis of the charge collection process in pnCCDs , Proceedings of SPIE vol. 6276, p.
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
Mesh-results vs SimulationMesh-results vs Simulation
Charge distribution over the pixel Simulation: charge generation in steps of 5µm scanning the transfer direction
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
CTE degradation due to trapsCTE degradation due to traps
You can’t predict the real life completely. Even if you create ‘perfect’ transfer potential with a lot of headroom.
N. Krause et al, NIM A439, p228
Contamination in epitaxial layers (gas delivery, stainless steel)
Titanium contamination (ET about 0.26eV, several 1010cm-3) during epitaxy (also measured with DLTS)
Replace the epitaxial layer High energy implantation (P 20MeV)
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
pn-CCD – charge transfer efficencypn-CCD – charge transfer efficency
Replacing the epitaxial layerby a 20MeV HE P-impl.
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
p+
p+ n+
rear contact
drain bulksource
p
sym
met
ry a
xis
n+
ninternal gate
top gate clear
n -
n+p+
DEPFET-Principle of OperationDEPFET-Principle of Operation
FET-Transistor integrated in every pixel (first amplification)
Electrons are collected in „internal gate“ and modulate the transistor-current
Signal charge removed via clear contact
-
-
+
+
++
-
MIP
internal Gate
Potential distribution:
Drain
Source
Backcontact
[TeSCA-Simulation]
~1µm
50
µm
--- ---
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
p+
p+ n+
rear contact
drain bulksource
p
sym
met
ry a
xis
n+
ninternal gate
top gate clear
n -
n+p+
DEPFET-Principle of OperationDEPFET-Principle of Operation
FET-Transistor integrated in every pixel (first amplification)
Electrons are collected in „internal gate“ and modulate the transistor-current
Signal charge removed via clear contact
internal Gate
Potential distribution:
Drain
Source
Backcontact
[TeSCA-Simulation]
~1µm
50
µm
--- ---
0V
+15V
0V
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
DEPMOS Technology on high ohmic 6” waferDEPMOS Technology on high ohmic 6” wafer
(DIOS-ISETCAD-Simulation)(DIOS-ISETCAD-Simulation)
DEPMOS pixel array cuts through one cell
Along the channel Perpendicular to the channel
Metal 2
Metal 1
Oxyd Poly 2
Metal 2
Metal 1
Poly 2
Clear Gclear Channnel
pDeep n
n+Deep p
Poly 1
Double poly / double aluminum process on high ohmic n- substrate
Low leakage current level: < 200pA/cm² (fully depleted – 450µm)
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
Potential of the Potential of the emptyempty Internal Gate Internal Gate
L = 4 (3) µm
L= 5 (4) µm
L = 6 (5) µm
L = 7 (6) µm
L = 10 (9) µm ToSCA – 2D device simulation
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
Comparison with simulation – Comparison with simulation – internal amplification vs channel lengthinternal amplification vs channel length
Simulation @ 50µA drain current
Assuming an under-etching of 1.2µm
Measured by S. Rummel
measured at 100µA
measured at 50µA
nice illustration of the DEPFET scaling potential
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
DEPFET 3D-SimulationDEPFET 3D-Simulation
ILC layoutK. Gärtner, R.R., DEPFET sensor design using an experimental 3d device simulator, accepted for publication in NIM
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
Simulated signal responseSimulated signal response
Charge reaches the interface -> slow diffusionIn reality: charge loss due to trapping and smallpotential barriers
Introduction of:buried channel implantationlateral drift fields by inclined deep p implantations
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
Auslese-knoten #1 Transfer-
gate
Clear #1 Auslese-knoten #2
Clear #2
Bias
Gate #1 Gate #2
RNDR principleRNDR principle(repetitive non destructive readout )(repetitive non destructive readout )
By measuring the charge multiple (n) time the noise can be reduced by 1/ sqrt(n) Because the collected charge is stored during readout in the DEPFET-RNDR, the very same charge can be measured multiple times.
Auslese-knoten #1 Transfer-
gate
Clear #1 Auslese-knoten #2
Clear #2
Bias
Gate #1 Gate #2
Auslese-knoten #1 Transfer-
gate
Clear #1 Auslese-knoten #2
Clear #2
Bias
Gate #1 Gate #2
Auslese-knoten #1 Transfer-
gate
Clear #1 Auslese-knoten #2
Clear #2
Bias
Gate #1 Gate #2
Auslese-knoten #1 Transfer-
gate
Clear #1 Auslese-knoten #2
Clear #2
Bias
Gate #1 Gate #2
Auslese-knoten #1 Transfer-
gate
Clear #1 Auslese-knoten #2
Clear #2
Bias
Gate #1 Gate #2
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
Investigated Structure: 4x4 MinimatrixInvestigated Structure: 4x4 Minimatrix(G. Lutz)(G. Lutz)
ILC-Type RNDR
Realised as a four by four Minimatrix
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
Laser spectra Laser spectra (S. Wölfel)(S. Wölfel)
Measurement:
Charge injection with laser during integration time
180 Loops for the readout (duration: 9.18 ms) -45 °C
Measured leakage current:
ca. 0,4 e- in 180 loops
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
Double trap model for heavily irradiated siliconDouble trap model for heavily irradiated silicon
V. Chiocia et al (accepted for Proceedings of Wildbad Kreuth (NIM A))
see also Eremin, Verbitskaja, Li, NIM A476, p.556
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
Charge collection profile by grazing angle techniqueCharge collection profile by grazing angle techniqueon a CMS pixel detector (testbeam measurement)on a CMS pixel detector (testbeam measurement)
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
Simulated and measured chargeSimulated and measured charge
0.5 x 1014 neq
2 x 1014 neq
10V 20V15V
25V 150V50V 100V
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
Electric fieldsElectric fields0.5 x 1014 neq unirradiated2 x 1014 neq
R. H. Richter, 6th Hiroshima Symposium - STD6, Carmel, September 12th 2006
SummarySummary
Developing state of the art detectors there is no way around a thorough
numerical simulation.
Primary task: Prediction of the device behavior and finding optimal operation states and process parameters
Provides insight into the potential and limits of a device concept.
For a full understanding of complicated pixel detectors 3D-simulation is a must!
Investigation of radiation induced defects by the ‘grazing angle technique’ together with simulations is a promising way.