Nippon pulse presentation what is nanopositioning
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Transcript of Nippon pulse presentation what is nanopositioning
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What is Nanopositioning ?
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Positioning ActivityRequired Precision
(Micrometers)
Approximate Comparative Dimension
Automobile Chassis Assembly 1000 Thickness of a dime
Electronic PCB Assembly 100 Thickness of paper
Typical Machining Tolerances 10 Diameter of small cell
Read/write heads in disk drives 1 Wavelength of light
Scanning Interferometers 0.100 (100 nm) Critical dimension of newest computer chips
Biological Cell micromanipulation Adaptive optics
Optical fiber alignment 0.100 (100 nm) Critical dimension of newest
computer chips
Microlithography Hubble Space Telescope
0.010 (10 nm) A Few Widths of a Molecule
Integrated Circuits Inspection 0.001 (1 nm) A Few Diameters Of Atoms
Thin-Film Surface Coating 0.0001 (100 pm) A Single Atomic Layer
Source: newscaletech.com
Precision In Applications
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Exactly what is a Nanometer?• One billionth of a meter - 1,000,000,000• Water molecule > 1 nanometer• Typical germ ~ 1000 nanometers• Human hair ~ 100,000 nanometer• Carbon Nanotube = 1 nanometer wide
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Nanopositioning RequirementsWhat is the Client’s understanding of
their Nanopositioning application?
1. Accuracy2. Precision3. Resolution4. Smoothness5. Constant Velocity Scanning6. Repeatability ELECTROMATE
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Nanopositioning RequirementsMotion Control Applications must be:1. Predictable2. Verifiable 3. Controllable
Design Considerations:• Accuracy
– Stiffness– Environment
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Design Considerations
•Accuracy
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Accuracy Accuracy vs. Precision
• Accuracy doesn’t mean Precision
• Accuracy represents the ability to get closest to a defined point.
• Precision is the ability to execute a move and return to the same point (regardless of accuracy). ELECTROMATE
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Accuracy Accuracy vs. Precision
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Accuracy ResolutionWhile Resolution is not Accuracy…
It is part of what makes up Accuracy
Two parts of Resolution1. Electrical Resolution2. Mechanical Resolution ELECTROMATE
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Design Considerations
•Accuracy– Stiffness
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What Exactly is Stiffness?
SERVO
STIFFNESSMOTOR
MECHANICALELECTROMATE
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Stiffness
SERVO
STIFFNESSMOTOR
MECHANICALELECTROMATE
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Stiffness Six Degrees of Error FreedomEncoder Resolution doesn’t define the
Accuracy of a Complete Machine1. Pitch2. Roll3. Yaw4. Flatness5. Straightness 6. Scale
The combined interacting effects of all contributing factors must be analyzed before total system precision can be determined. ELECTROMATE
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Stiffness Six Degrees of Error Freedom
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Stiffness Six Degrees of Error Freedom
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Stiffness Six Degrees of Error Freedom
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Stiffness Mounting / Drive location
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Stiffness Mounting / Drive location
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Stiffness
SERVO
STIFFNESSMOTOR
MECHANICALELECTROMATE
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Stiffness Servo
• Servo Stiffness– Bandwidth
• Servo sampling rate for current & position loops
– Encoder resolution
– Mechanical Stiffness
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Stiffness
SERVO
STIFFNESSMOTOR
MECHANICALELECTROMATE
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Stiffness Motor
• Motor Stiffness– Mechanical stiffness
– Ability to respond to commanded motion
– Flux pattern (Magnetic Servo)
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Design Considerations
•Accuracy–Stiffness–Environment
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Environment Other Error Causing Factors
• Thermal expansion errors • Abbé offsets• Feedback Position• Cosine errors• Lost motion• Orthogonality• External forces• Viberation ELECTROMATE
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Environment Thermal Expansion Errors
Thermal expansion coefficients of motion elements must be considered when selection high-precision platforms.
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Environment Abbé OffsetsAbbé errors result from a positioning measuring
device (typically a linear encoder) being offset from the point of work (end-effector)
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Environment Position Feedback Control Schemes
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Environment Position Feedback Control Schemes
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Environment Position Feedback Control Schemes
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Environment Position Feedback Control Schemes
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Environment Position Feedback Control Schemes
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Environment Cosine Errors
Cosine errors occur when a positioning feedback scale is not in perfect parallel alignment with the motion of the moving carriage.
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Environment Lost Motion (hysteresis)
• Any system that reacts and recovers differently when varying directional forces are applied will exhibit lost motion. – Ballscrew backlash
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Environment Orthogonality
Orthogonality – The degree to which stages are aligned with their motion at right angles to one another.
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Environment External forces
• Side Loading
• Motor resistance
• System harmonicsELECTROMATE
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Vibration – Nearby Conditions
• Other machinery
• Road traffic
• Building swayELECTROMATE
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