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Industrial Equipment Catalog 2007 Spring

Industrial Microscopes

CNC Video Measuring Systems Measuring Microscopes Autocollimators

Stereoscopic Zoom Microscopes Digital Cameras for Microscopes

2Catalog ListCatalog Title CNC Video Measuring System NEXIV VMR Models Included NEXIV VMR-12072/Z120X/LU, VMR-10080/Z120X/LU, VMR6555/Z120X/LU, VMR-H3030/Z120X, VMR-3020/Z120X/LU, VMR-1515/Z120X/LU NEXIV VMR-3020 with Wafer Loader NWL860T NEXIV VMR-K3040ZC VMR-C4540 VMA-2520 MM-400, MM-800, E-MAX Series 6B, 6D ECLIPSE L300, L300D ECLIPSE L200, L200D ECLIPSE L200A ECLIPSE LV150/LV150A/LV100D/LV100DA LV Focusing Modules LV-IM/LV-IMA/LV-FM/LV-FMA Universal Epi-Fluorescence Illuminators EPI-U, LV-UEPI, L-EP150, IM-4/IM-3, CM-10, CM-20, CM-30 EPIPHOT TME300U, TME200 ECLIPSE MA100 NWL-860 Series, NWL-641 Series AZ100 SMZ1500 SMZ1000, SMZ800 SMZ645, SMZ660 SMZ-1 SMZ-2 SM-5 Camera: DS-Fi1, DS-5Mc, DS-2Mv, DS-2MBW, DS-2MBWc Controller: DS-L2, DS-U2 DXM1200C

Automated Wafer Measuring System CNC Video Measuring System NEXIV VMR-K3040ZC Wafer Carrier Measuring System NEXIV VMR-C4540 CNC Video Measuring System iNEXIV VMA-2520 Measuring Microscopes MM-400/800 Series Autocollimators FPD/LSI Inspection Microscopes ECLIPSE L300/L300D IC Inspection Microscopes ECLIPSE L200/L200D Automated IC Inspection Microscope ECLIPSE L200A Industrial Microscopes ECLIPSE LV150/LV150A/LV100D/LV100DA LV Focusing Modules LV-IM/LV-IMA/LV-FM/LV-FMA Universal Epi-Fluorescence Illuminators Microscope Components for Reflected Light Applications Inverted Metallurgical Microscopes EPIPHOT TME300U/TME200 Compact Inverted Microscope ECLIPSE MA100 IC Inspection Wafer Loaders NWL-860/641 Multi-purpose Zoom Microscope MULTIZOOM AZ100 Stereoscopic Zoom Microscope SMZ1500 Stereoscopic Zoom Microscope SMZ1000/SMZ800 Stereoscopic Zoom Microscopes SMZ645/SMZ660 Stereoscopic Zoom Microscope SMZ-1 Stereoscopic Zoom Microscope SMZ-2 Stereoscopic Zoom Microscope SM-5 Digital Camera System for Microscopes Digital Sight Series

High-definition Digital Camera for Microscopes DXM1200C To request a catalog, please visit our website. http://www.nikon-instruments.jp/eng/

3CNC Video Measuring SystemCNC Video Measuring System NEXIV VMR-H3030/Z120X...................4 CNC Video Measuring System NEXIV VMR-12072/Z120X/LU..............4 CNC Video Measuring System NEXIV VMR-10080/Z120X/LU..............5 CNC Video Measuring System NEXIV VMR-6555/Z120X/LU................5 CNC Video Measuring System NEXIV VMR-3020/Z120X/LU................6 CNC Video Measuring System NEXIV VMR-1515/Z120X/LU................6 Application Software for VMR Series ...................................................7 Automated Wafer Measuring SystemNEXIV VMR-3020 with Wafer Loader NWL860T............................................................................7 CNC Video Measuring System NEXIV VMR-K3040ZC ..........................8 Wafer Carrier Measuring System NEXIV VMR-C4540 ..........................8 CNC Video Measuring System iNEXIV VMA-2520................................9 Application Software for VMA-2520 .....................................................9

Profile ProjectorsProfile Projectors V-24B/V20B/V-12B Series .....................................10 Accessories for Profile Projectors ......................................................10

Measuring MicroscopesMeasuring Microscopes MM-400Basic Type .................................11 Measuring Microscopes MM-400/8003-Axis Type.........................11 Measuring Microscopes MM-400/800Motorized Type ...................12 Measuring Microscopes MM-400/800Universal Type ....................12 Accessories for Measuring Microscopes............................................13 Common Accessories for Measuring Microscopes/ Profile Projectors..........................................................................14 Data Processing Software E-Max Series ............................................15 Data Processor DP-E1........................................................................15

Autocollimators, Other Equipment and AccessoriesAutocollimators and Accessories .......................................................16 Optical Flat/Optical Parallel.................................................................17 DIGIMICRO Heads/Head Accessories.................................................18

Industrial MicroscopesLSI Inspection Microscope ECLIPSE L300.........................................19 FPD Inspection Microscope ECLIPSE L300D .....................................19 Automated IC Inspection Microscope ECLIPSE L200A ......................20 IC Inspection Microscopes ECLIPSE L200/L200D .............................20 Industrial Microscope ECLIPSE LV150/LV150A .................................21 Industrial Microscope ECLIPSE LV100DA..........................................22 Industrial Microscope ECLIPSE LV100D ............................................22 Polarizing Microscope ECLIPSE LV100 POL/50i POL ........................23 Focusing Units IM-4/IM-3 ..................................................................23 Universal Illuminators/Reflected Light Illuminators............................24 Filters .................................................................................................24 Accessories for ECLIPSE/OPTIPHOT Series .......................................25 Focusing Modules LV-IMA/LV-IM/LV-FMA/LV-FM.............................26 Interferometry Equipment TI/DI .........................................................27 Compact Reflected MicroscopeCM Series......................................28 Objective Lenses ................................................................................29 Eyepiece Lenses .................................................................................30 Eyepiece/Objective-Related Accessories.............................................30 Inverted Metallurgical Microscopes EPIPHOT TME300U/TME200 ........................................................31 Compact Inverted Microscope ECLIPSE MA100 ................................31 IC Inspection Wafer Loaders NWL-860 Series ...................................32 IC Inspection Wafer Loaders NWL641 Series.....................................32 Multi-purpose Zoom Microscope MULTIZOOM AZ100 ......................33

Stereoscopic Zoom MicroscopesStereoscopic Zoom Microscope SMZ1500 ........................................34 Stereoscopic Zoom Microscope SMZ1000 ........................................34 Stereoscopic Zoom Microscope SMZ800 ..........................................35 Stereoscopic Zoom Microscopes SMZ645/SMZ660 ..........................35 Stereoscopic Zoom Microscope SMZ-1 ESD .....................................36 Stereoscopic Zoom Microscope SMZ-2 .............................................36 Stereoscopic Zoom Microscope SM-5 ...............................................37 Accessories for Stereoscopic Microscopes........................................38

Digital Cameras for Microscopes/Image-related ProductsDigital Cameras for MicroscopesDigital Sight Series .....................41 High-definition Digital Camera for MicroscopesDXM1200C...........41 Film-type Photomicrographic System H-III ........................................42 CCTV System Diagram .......................................................................43

4Ultrahigh-precision Type CNC Video Measuring System NEXIV VMR-H3030/H3030 Z120XCNC Video Measuring System

NEXIV VMR-H3030With ultrahigh precision and versatility, this model can serve as the master instrument in your laboratory. Ideal for high-precision dies and molds. Maximum measuring range: 300 x 300mmMagnification and field of view (mm)Type 1 Optical magnification Total magnification Field of view Type 2 Optical magnification Total magnification Field of view Type 3 Optical magnification Total magnification Field of view 0.5 x 20 x 9.33 x 7 1x 40 x 4.67 x 3.5 2x 80 x 2.33 x 1.75 1x 40 x 4.67 x 3.5 2x 80 x 2.33 x 1.75 2x 80 x 2.33 x 1.75 4x 7.5 x 160 x 300 x 1.165 x 0.875 0.622 x 0.467

4x 8x 15 x 160 x 320 x 600 x 1.165 x 0.875 0.582 x 0.437 0.311 x 0.233

4x 8x 16 x 30 x 160 x 320 x 640 x 1200 x 1.165 x 0.875 0.582 x 0.437 0.291 x 0.218 0.155 x 0.117

SpecificationsModel Stroke (X x Y x Z) With max. magnification module (high mag. lens) With max. magnification module (low mag. lens) Minimum readout Maximum workpiece weight Measuring accuracy U1X, U1Y U2XY Z-axis (L: Length in mm < W.D.) Camera Working distance Magnification/Field of view Auto focus Illuminator Power source Power consumption Dimensions (W x D x H) & weight Main unit only Main unit & table Controller Footprint (W x D) VMR-H3030 Z120X 300 x 300 x 150mm 250 x 300 x 150mm VMR-H3030

* Total magnifications listed above represent those on the monitor screen when a 19" TFT monitor is set to the SXGA (1280 x 1024 pixels) mode.

NEXIV VMR-H3030 Z120XWith an ultrahigh-precision stage and maximum magnification module, this model can measure fine workpieces with ultrahigh accuracy (e.g., critical dimensions on patterned masks and bump heights). Maximum measuring range: 300 x 300mmMagnification and field of view (mm)Optical magnification Total magnification Field of view Optical magnification Total magnification Field of view 1x 40 x 4.67 x 3.5 16 x 640 x 0.291 x 0.218 2x 80 x 2.33 x 1.75 32 x 1280 x 0.146 x 0.109 4x 160 x 1.165 x 0.875 64 x 2560 x 0.073 x 0.055 7.5 x 300 x 0.622 x 0.467 120 x 4800 x 0.039 x 0.029

0.01m 30kg 0.6+2L/1000m (with a workpiece max. 10kg) 0.9+3L/1000m (with a workpiece max. 10kg) 0.9+L/150m B&W 1/3 in. CCD (progressive scan), color 1/3 in. CCD (option) High mag. objective lens: 9.8mm 50mm Low mag. objective lens: 32mm See tables at left TTL laser AF and Vision AF Episcopic, diascopic (with high mag. Diascopic, episcopic,