nHT series Diffusion Pumps Product Brochure€¦ · Edwards is a world leader in the design,...
Transcript of nHT series Diffusion Pumps Product Brochure€¦ · Edwards is a world leader in the design,...
nHT SERIES HIGH-THROUGHPUT DIFFUSION PUMPS
edwardsvacuum.com
THE PARTNER OF CHOICEEdwards is a world leader in the design, technology and manufacture of vacuum pumps for industrial applications with over 100 years’ history.
We believe in delivering results that bring value to our customers by using our breadth of industry experience to identify and apply solutions. Using the most innovative and up-to-date modelling techniques, we can optimise the pumping configuration for customers to provide a system design giving the maximum performance in the most reliable and cost-effective way.
EDWARDS nHT Diffusion pumps
nHT SERIES NEXT-GENERATION HIGH-THROUGHPUT DIFFUSION PUMPSThe Edwards nHT series diffusion pumps provide stable high-throughput vacuum performance. Designed for optimum energy efficiency, flexibility and low maintenance, the nHT series is the ideal solution for a variety of demanding industrial applications.
ENERGY EFFICIENCYThe nHT series diffusion pumps have been designed for optimum heat transfer to the oil, resulting in faster heat-up times and a significant reduction in energy consumption. In addition, the use of the Energy Efficiency Controller (EEC) provides further reduction in power consumption – up to 30% without the loss of pumping performance.
Cut energy consumption by up to 30%
• 100% power during the warm-up phase
• 70% power on reaching the required oil temperature
• Further energy reduction with the use of standby mode
• USB interface and Ethernet connectivity
• Ease of operation and control
Energy Efficiency Controller
EDWARDS nHT Diffusion pumps
Optimised pumping speed and high throughput with good stability between 10-2 and 10-3 mbar – critical for many applications.
Performance and stability
Smart temperature control and on-board sensors as standard ensure minimum load with a longer lifetime for heaters and oil. Increased productivity through long maintenance intervals with non-wearing components and easy-to-change heater cartridges.
Reliability
Significant energy savings through innovative heating design providing faster warm-up time. When used with the Energy Efficiency Controller a further energy saving can be achieved – up to 30%.
Economy
Available in both ANSI and ISO flange options with voltage variants to cover global requirements. A broad range of accessories is available.
Flexibility
The Energy Efficiency Controller enables ease of use and operating convenience along with effective monitoring with USB and Ethernet interface.
Control
BENEFITS
ADVANTAGES• High-throughput pumping performance
• Energy efficiency
• Fast warm-up time
• High system uptime
• Easy to operate
• Low and simple maintenance
• Control capability via Energy Efficiency Controller (optional accessory)
EDWARDS nHT Diffusion pumps
APPLICATIONS
Metallurgy• Sintering, precision investment casting (PIC)
Heat treatment• Quenching, tempering, annealing
Welding• E-beam welding, plasma welding
Coating• Glass coating• Surface coating (plasma, spray, surface activation,
hard coating, reflective, decorative, plasma deposition)
• Roll/web coating, optical/ophthalmic coating, display coating
Vacuum drying
Research & development
EDWARDS nHT Diffusion pumps
High-precision jet assembly ensures high stability and consistent jet performance
Terminal box/Energy Efficiency Controller interface provides connectivity options for both the OEM and end-user
Converging backing coneincreases the critical backing pressure, enabling effective cross-over from the backing pump
Oil sight glass combined with a drain and fill port allows easy viewing and maintains oil level and quality
Innovative cartridge heating systemprovides optimum heat transfer into the oil resulting in faster heat-up times, reducing energy consumption
Ejector stageensures high-pressure pumping speed and greater resistance to pressure surges from the backing pump
Integrated cold capprevents fluid back migration to ensure a clean vacuum system
FEATURES
EDWARDS nHT Diffusion pumps
* Measures as per DIN 28 427
nHT10 nHT16 nHT20 nHT32 nHT35
ANSI ISO ANSI ISO ANSI ISO ANSI ISO ANSI ISO
Inlet connection 10˝ ANSI 320 ISO-K 16˝ ANSI 500 ISO-K 20˝ ANSI 630 ISO-K 32” ANSI 800 ISO-F 35˝ ANSI 1000 ISO-F
Backing connection 2˝ ANSI 63 ISO-K 3” ANSI 100 ISO-K 4˝ ANSI 160 ISO-K 6” ANSI 200 ISO-K 6” ANSI 200 ISO-K
Pumping speed* Nitrogen <10-4 mbar l/s 3,000 6,800 10,000 21,000 30,000
Pumping speedArgon <10-4 mbar l/s 2,750 6,350 9,000 18,000 26,000
Pumping speedHelium <10-4 mbar l/s 4,500 9,500 17,000 30,000 42,000
Gas throughput mbar l/s 8 11 17 36 36
Operating range mbar < 10-1 to 10-7 < 10-1 to 10-7 < 10-1 to 10-7 <10-2 to 10-7 < 10-2 to 10-7
Ultimate pressure (Edwards 704) mbar < 5 x 10-7 < 5 x 10-7 < 5 x 10-7 < 10-6 < 10-6
Critical backing pressure (Edwards 704) mbar 5 x 10-1 5 x 10-1 5 x 10-1 5 x 10-1 5 x 10-1
Heating power kW 3.6 7.2 10.8 21.6 21.6
Heating cartridges qty 3 6 9 18 18
Warm-up period min < 15 < 15 < 25 < 25 < 25
Weight kg 105 185 210 570 720
Recommended oil Edwards 704
Oil l 3.0–4.0 3.5–4.5 5.5–7.0 9.0–11.0 9.0–11.0
Recommended holding pump E2M40 E2M40 E2M40 E2M80 E2M80
Recommended backing pump nES200, E2M80, EDS200, EH1200
nES200, E2M175, EDS200, EH1200
nES300, E2M175, EDS300, EH1200
nES630, E2M275, GXS450, EH2600
nES630, E2M275, GXS450, EH2600
nHT series diffusion pumps
Voltage variantnHT10 nHT16 nHT20 nHT32 nHT35
ANSI ISO ANSI ISO ANSI ISO ANSI ISO ANSI ISO
380–415V, 230V (50 Hz/60 Hz) B31130400 B31132400 B31230400 B31232400 B31430400 B31432400 B31630400 B31632400 B31530400 B31532400
440–480V (50/60 Hz) B31130460 B31132460 B31230460 B31232460 B31430460 B31432460 B31630460 B31632460 B31530460 B31532460
nHT Series Accessories
Inlet valve B61130100 B61132100 B61230100 B61232100 B61430100 B61432100 B61630100 B61632100 B61530100 B61532100
Extended cold cap - B61233100 B61433100 B61633100 B61533100
Inlet baffle - B61234100 B61434100 B61634100 B61534100
Energy Efficiency Controller (EEC)
B61001100 (accessory cables not included)
Cooling fail switch 12284
Water flow monitor 500006623
TECHNICAL DATA
ORDERING INFORMATION
EDWARDS nHT Diffusion pumps
10-2 102 100 101 10-1
ls-1
100
1,000
10010-5 mbar10-4 10-3 10-2
0
0.01
0.1
1
10
100
10-1
mba
r ls-1
10,000
N2ArHe
N2ArHe
nHT101.
1. Pumping speed 2. Throughput
2.
10-2 102 100 101 10-1
ls-1
100
1,000
10010-5 mbar10-4 10-3 10-2
0
0.01
0.1
1
10
100
10-1
mba
r ls-1
10,000
N2ArHe
N2ArHe
nHT161. 2.
1. Pumping speed 2. Throughput
PERFORMANCE CURVES
nHT10 nHT16
10-2 102 100 101 10-1
ls-1
100
1,000
10010-5 mbar10-4 10-3 10-2
0
0.01
0.1
1
10
100
10-1
mba
r ls-1
10,000
100,000
N2ArHe
N2ArHe
nHT201. 2.
1. Pumping speed 2. Throughput
nHT20
10-2 102 100 101 10-1
10010-5 mbar10-4 10-3 10-2 10-1
N2ArHe
N2ArHe
nHT321. 2.
ls-1
100
1,000
0
0.01
0.1
1
10
100
mba
r ls-1
10,000
100,000
1. Pumping speed 2. Throughput
nHT32
10-2 102 100 101 10-1
10010-5 mbar10-4 10-3 10-2 10-1
N2ArHe
N2ArHe
nHT351. 2.
ls-1
100
1,000
0
0.01
0.1
1
10
100
mba
r ls-1
10,000
100,000
1. Pumping speed 2. Throughput
nHT35
EDWARDS nHT Diffusion pumps
480
200
300
172
407
788
152
nHT10 ISO nHT10 ANSI
ANSI 10“
788
172
300
200
480
3706885295
359
95
320 ISO-K
63 ISO-KANSI 2”
6885295
359
7074
471
341.5
300
42.5 o
20o
25o
2.5o
471
341.5
300
42.5 o
20o
25o
2.5o
70
4x 19
120.5 PCD
362 PCD 12x 24
552
200
300
265
597
1092
191
nHT16 ISO nHT16 ANSI
ANSI 16“
1092
265
300
200
480
550
88116
610
652
130
500 ISO-K
100 ISO-KANSI 3”
98116
610
652
60o
610
420
300
68
102
33.5 o
15o
15o
60o
610
420
30068
102
33.5 o
15o
15o
152.5 PCD
4x 19
nHT10
nHT16
DIMENSIONS
EDWARDS nHT Diffusion pumps
1292
458
300
200
636
68
30° 33°462
635
300
15° 15°15°
6907397111
584
651
180
152,6
636
200
300
457
700
1292
230
30068
33°30°
15° 15°15°
3°20x 18=360
32
462
635
19
nHT20 ISO nHT20 ANSI
ANSI 20“630 ISO-K
160 ISO-K ANSI 4”
4897111
584
8 x Ø 19
nHT20
nHT32
nHT32 ISO nHT32 ANSI
ANSI 32“800 ISO-F
200 ISO-K ANSI 6”
Ø920
1740
674
500
56102
116
901
738
Ø1000
Ø965
738
901 67
450
020
4
1740
Ø1000
15 1515
1031
598
30068
33
30
56102
116
204
816
15 1515
1031
598
30068
33
30
8x 45
Ø18
816
8 x Ø 19
241
EDWARDS nHT Diffusion pumps
SERVICE AND SUPPORTThe nHT series diffusion pumps are designed with a number of features that enable routine maintenance to be conducted, ensuring optimum performance and safe operation. Scheduled routine maintenance shall include activities deemed beneficial to the continued performance and longevity of the product. All work must be completed by suitably trained personnel. Before any maintenance operations are carried out, the pump must be isolated from the electrical supply and vacuum system.
Our field service teams carry out essential maintenance, repair and commissioning service at your site. We can also assist site staff in performing routine maintenance.
We offer original spares kits for the nHT series diffusion pumps. This enables your maintenance team to start work with all the materials they need to complete the job successfully, saving time, reducing cost and extending the life of your product.
nHT35 ISO nHT35 ANSI
ANSI 35“1000 ISO-F
200 ISO-K ANSI 6”
Ø1120
1832
801
500
56102
116
908
808
1515
15
68
30
33
1073
640
1,932x 11,25
Ø14
300
Ø213
Ø1000
Ø1060
808
908 80
150
020
4
1832
Ø1000
2,128x 12,9
Ø23
15 1515
1073
640
30068
33
305610
211
6
204
8 x Ø 19
241
nHT35
EDWARDS nHT Diffusion pumps
edwardsvacuum.com
Part of the Atlas Copco Group
Publication Number: 3602 402 0 01 © Edwards Limited 2020. All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited.
Whilst we make every effort to ensure that we accurately describe our products and services, we give no guarantee as to the accuracy or completeness of any information provided in this brochure.
Edwards Ltd, registered in England and Wales No. 6124750, registered office: Innovation Drive, Burgess Hill, West Sussex, RH15 9TW, UK.
GLOBAL CONTACTS
EMEAUK +44 1444 253 000 (local rate) 08459 212223Belgium +44 1293 60 3350France +33 1 4121 1256Germany 0800 000 1456Italy + 39 02 48 4471Israel + 972 8 681 0633Russia +7 495 933 55 50 Ext. 1800/1803 +8 800 775 80 99
ASIA PACIFICChina +86 400 111 9618India +91 20 4075 2222Japan +81 47 458 8836Korea +82 31 716 7070Singapore +65 6546 8408Taiwan +886 3758 1000
AMERICASUSA +1 800 848 9800 Brazil +55 11 3952 5000