NEW UNVERSITY of LISBONCENIMATV. Muat1, B. Teixeira2 E. Fortunato2 si R. C. C. Monteiro2, 1 Universitatea "Dunrea de Jos" Galati,2 New University of Lisbon

Filme Functionale si Inteligente

I.a. Filme ZnO materiale piezoelectrice

II. Filme ZnO:Li, Mg dielectrice, feroelectrice

I.b.Filme ZnOrezistor cu rezistenta variabila

Modulatoare dielectriceAmplificatoare dielectriceetc

Proprietati Conductibilitate electrica Transparenta optica in ...VIZ-NIR Reflectarea radiatiei IR Rugozitate foarte redusa A p l i c a t i i (inlocuitor de ITO)

Electrozi Transparenti(pe substrat de sticla)

III. Filme ZnO:Al, ZnO:Ga, ZnO:In (TCO)

Dispozitive electrocromicePrincipiul de functionare : baterii transparenteET: electrod transparent (TCO)

WO3: material electrocromic

EL : Electrolit (solvent + sare)

CE : contra-electrod ETETELCEStare initialaStare finala ETETELCEWO3Li+ETETWO3ELCERevenira la starea initialaWO3Reactia electrochimicaWVIO3 + x Li+ + x e- LixWVxWVIO3 transparent bleu

(002)(101)(100)T=80%10m600 nm600 nm

(101)(002)(100) = 3,8 10-3 cmN=8,44x1019cm-1H= 32 cm/Vs = 7,3 10-3 cmN=8,4x1018cm-1H= 21 cm/Vs600 nm

Chart1

77

79

65

71

68

68

72

82

75

69

77

69

59

81

77

67

72

75

70

80

77

81

71

86

71

79

86

71

83

75

74

82

99

89

87

83

96

91

79

90

78

88

81

75

80

75

65

77

84

75

63

72

79

66

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89

66

58

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64

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56

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59

60

53

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56

68

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61

72

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60

75

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83

86

75

98

108

93

131

134

131

159

166

187

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225

208

278

236

254

205

184

155

129

118

105

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91

73

90

69

63

84

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62

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49

7C

30,50077

30,54079

30,58065

30,62071

30,66068

30,70068

30,74072

30,78082

30,82075

30,86069

30,90077

30,94069

30,98059

31,02081

31,06077

31,10067

31,14072

31,18075

31,22070

31,26080

31,30077

31,34081

31,38071

31,42086

31,46071

31,50079

31,54086

31,58071

31,62083

31,66075

31,70074

31,74082

31,78099

31,82089

31,86087

31,90083

31,94096

31,98091

32,02079

32,06090

32,10078

32,14088

32,18081

32,22075

32,26080

32,30075

32,34065

32,38077

32,42084

32,46075

32,50063

32,54072

32,58079

32,62066

32,66069

32,70089

32,74066

32,78058

32,82065

32,86058

32,90058

32,94072

32,98071

33,02064

33,06064

33,10056

33,14054

33,18056

33,22056

33,26059

33,30060

33,34053

33,38065

33,42056

33,46068

33,50065

33,54058

33,58068

33,62066

33,66061

33,70072

33,74059

33,78077

33,82072

33,86060

33,90075

33,94070

33,98083

34,02086

34,06075

34,10098

34,140108

34,18093

34,220131

34,260134

34,300131

34,340159

34,380166

34,420187

34,460181

34,500225

34,540208

34,580278

34,620236

34,660254

34,700205

34,740184

34,780155

34,820129

34,860118

34,900105

34,940109

34,98091

35,02073

35,06090

35,10069

35,14063

35,18084

35,22073

35,26061

35,30073

35,34065

35,38054

35,42067

35,46066

35,50065

35,54060

35,58059

35,62062

35,66061

35,70077

35,74072

35,78060

35,82060

35,86055

35,90054

35,94069

35,98063

36,02065

36,06087

36,10079

36,14064

36,18056

36,22082

36,26075

36,30091

36,34089

36,38089

36,42088

36,46098

36,50069

36,54077

36,58075

36,62073

36,66080

36,70075

36,74072

36,78057

36,82066

36,86062

36,90058

36,94049

ProbaElectrical properties (cm)N (cm-3)H (cm2/Vs) D3.2x 10-32.76x 101927.0E3.9x 10-34.67x 101934.1F2.9x 10-33.80x 101929.3

= 3,3 10-1 cmN=8,44x1017cm-1H= 19 cm/Vs

Prin metoda sol-gel s-au obtinut filme Al:ZnO si In:ZnO (1-2%) transparente si cu proprietati electrice care variaza de la rezistiv la conductor, functie de porozitate si de tratamentul termic de stabilizare si cristalizare a filmelor.

S-a urmarit obtinerea unor filme transparente si conductoare performante pentru a fi folosite ca electrozi transparenti.

Cele mai bune filme Al:ZnO si ln:ZnO au prezentat o rezistivitate de 2.9x 10-3 si respectiv 3,8 10-3 cm, si o foarte buna tranparenta (80-95%) in domeniul VIZ-NIR; sunt filme cu grosime ~ 250 nm, dense, uniforme, cu dimensiune medie a grauntilor de ~60 nm si cu o puternica orientare preferentiala a planelor cristalografice perpendicular pe suprafata substratului. Diferentele dintre proprietatile filmelor Al:ZnO si ln:ZnO nu au fost semnificative.

Filme Al:ZnO/SiFilme ln:ZnO/Corning galssSpin coatingDip coating