Nanopackaging - rd.springer.com978-0-387-47326-0/1.pdf · include those for new package types, such...

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Nanopackaging

Transcript of Nanopackaging - rd.springer.com978-0-387-47326-0/1.pdf · include those for new package types, such...

Nanopackaging

James E. MorrisEditor

Nanopackaging

Nanotechnologies and Electronics Packaging

EditorJames E. MorrisPortland State UniversityDepartment of Electrical and Computer Engineering1900 SW 4th AvenuePortland, OR 97201USA

ISBN 978-0-387-47325-3 e-ISBN 978-0-387-47326-0

Library of Congress Control Number: 2008923105

© 2008 Springer Science+Business Media, LLCAll rights reserved. This work may not be translated or copied in whole or in part without the written permission of the publisher (Springer Science+Business Media, LLC, 233 Spring Street, New York, NY 10013, USA), except for brief excerpts in connection with reviews or scholarly analysis. Use in connection with any form of information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now know or hereafter developed is forbidden. The use in this publication of trade names, trademarks, service marks and similar terms, even if they are not identified as such, is not to be taken as an expression of opinion as to whether or not they are subject to proprietary rights.

Printed on acid-free paper

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Foreword

Semiconductors entered the nanotechnology era when they went below the 100 nm technology node a few years ago. Today the industry is shipping 65 nm technology wafers in high volume, 45 nm is in production, with 32 nm working at the develop-ment stage. While the predictions that Moore’s Law has reached it practical limits have been heard for years, they have proven to be premature. And it is expected that the technology will continue to move forward unabated for some years before it comes close to the basic physical limits to CMOS scaling.

Consumers are becoming the dominant force for electronic products. The indus-try has learnt that the consumer market is driven by many factors other than CMOS scaling alone. Functional diversification, accomplished through integration of mul-tiple circuit types, and different device types, such as MEMs, optoelectronics, chemical and biological sensors and others, provides electronic product designers with different functional capabilities meeting the needs, wants, and tastes of con-sumers. This functional diversification together with cost, weight, size, fashion and appearance, and time to market, are critical differentiators in the market place. These two technology directions are often described as “More Moore” and “More than Moore”.

Packaging is the final manufacturing process transforming semiconductor devices into functional products for the end user. Packaging provides electrical connections for signal transmission, power input, and voltage control. It also pro-vides for thermal dissipation and the physical protection required for reliability. Packaging governs the size, weight, and shape of the end product and is the enabler for functional diversification through package architecture and package design. In the new landscape of advancing device technology nodes, and a dynamic consumer market place, packaging can become either the enabling or limiting factor. This market force has resulted in an unprecedented acceleration of innovation. Design concepts, packaging architecture, material, manufacturing process, equipment, and system integration technologies, are all changing rapidly.

Materials are at the heart of packaging technology. Packaging material contrib-utes significantly to the packaged device performance, reliability and workability as well as to the total cost of the package. With the driving forces from “More Moore” and “More than Moore,” the challenges for packaging materials have broadened from traditional package requirements for future generation devices to

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include those for new package types, such as the system in package (SiP) families, wafer level packaging, integrated passive device (IPD), through silicon vias (TSV), die and wafer stacking, 3D packaging, and RF, MEMs, physical, chemical and biological sensors, and optoelectronics applications. It is believed that materi-als in use today cannot meet the requirements of future packaging requirements. This is particularly true for complex SiP structures where hot spots, high currents, mechanical stresses for very thin die and ever shrinking geometries would require electrical, thermal, and mechanical properties that are beyond those of existing materials and manufacturing processes.

Nanomaterials and nanotechnologies promise to offer significant solutions towards packaging technology challenges in coming years. Carbon nanotubes (CNTs), nanowires and nanoparticles, have shown unique electrical, thermal, and mechanical properties orders of magnitude superior to current packaging materials used today. They had fired up the imaginations of engineers and scientists alike. How to design the next generation packaging materials and develop materials processing and application methodologies utilizing the nanomaterials’ unique physi-cal properties is an important question for the electronic packaging community.

Do CNTs have a place in future generation low-dimensional thermal interface materials (TIM), smoothing out the hot spots and taking higher levels of thermal energy away from the die? How do we utilize the CNT electrical properties for future generation high density packages? What role will nanoparticles play in the new generation passives? How would macromolecules be designed into polymer materials to provide specific electrical, thermal and mechanical properties required for the package function? With advances on the science and technology of nano-materials, one envisions that whole new classes of materials will be introduced into the packaging structure to enable high power, high density interconnects, and new package features such as embedded and integrated passives, stacked and thinned dies, wafer level process, TSVs, MEMS, sensors, and medical and bio-chip applications.

This book is a compendium of in depth reviews written by some of the leading practitioners in the field. They cover the broad aspects of the field from materials preparations, materials properties, surface modifications, engineering applications, mathematical simulations, and “More than Moore” technical issues. It is a timely and important contribution to the technical literature for practitioners and research-ers in the electronic industry field.

The editor of this book is a member of the IEEE Nanotechnology Council. Many of the contributors are from the IEEE/CPMT Society membership. They are to be congratulated for bringing this very important topic forth in the timely manner for the benefit of the electronic packaging and materials community.

Santa Clara, CA William T. Chen

vi Foreword

Preface

Moore’s Law has been remarkably effective over 40 years or so in predicting the march of CMOS technology, as device dimensions shrank to mils, to microns, to nanometers. With continued CMOS shrinkage projected to 20 nm, there is clearly continued life in the technology, despite past predictions of its demise which turn out to be, like Mark Twain’s, greatly exaggerated. However, the day will clearly come when the physical device structure cannot be supported at near atomic dimen-sions, but despite concerted research, no obvious successor technology has yet emerged as a clear winner. One of the factors in identifying that technology must be consideration of packaging techniques and design for reliability. However, package design depends on the nature of the basic device technology, and the deci-sion process goes in circles.

However, the rapid development of nanotechnologies in almost every branch of science and engineering is already yielding new approaches to packaging materials and techniques, and these should be well developed and compatible for the next generation of devices, whether they are single electron transistors, spintronics, carbon nanotube transistors, molecular electronic devices, or something not yet envisaged.

While the packaging of nanoelectronic devices has been slowed by uncertainty of which device technology will turn out to be commercially viable, nanotechnolo-gies are being developed to address current packaging problems of microelectronic systems, with details showing up in many conference presentations, e.g., at the annual IEEE Electronic Component and Technology Conference. However, many experts in nanotechnologies are unaware of the possible applications in electronics packaging, and conversely many packaging engineers are unfamiliar with the potential of nanoscale materials and devices. This book is intended to bridge that gap, with Chap. 1 introducing the scope of the field with a literature survey.

Then three chapters deal with computer modeling in nanopackaging. Bailey et al. take a high-level approach to the modeling process in Chap. 2, backed up with multiple examples of nanoscale modeling in packaging, present and future, including nanoimprinting, solder paste printing, microwave heating, underfill, and anisotropic conductive film. Chapter 3 from Fan and Yuen and Chap. 4 from van der Sluis et al. both focus on the molecular modeling technique, especially for interfacial characterization, with applications to carbon nanotube (CNT) thermal

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performance, moisture diffusion and thermal cycling, and delamination failures. The intention in each case is to understand macroscale package properties by mod-eling at nanoscale dimensions, and emphasize the need to be able to transfer model-ing results between software at different length scales.

The bulk of the book from here on splits naturally into nanoparticle and CNT applications.

Morris covers fundamental metal nanoparticle properties in Chap. 5, with intro-ductions to melting point depression, the coulomb block, interface diffusion effects, optical absorption, sintering, etc. The references in this chapter intentionally include many from the earliest days on nanotechnology research, to make the point that much work was done before the current decade’s surge of interest and funding. Nanoparticle fabrication is introduced in Chap. 6 by Hayashi et al., who concen-trate on an ecologically friendly sonochemical technique. Other fabrication meth-ods are touched on in other chapters, including Chaps. 7 and 14.

The next three chapters consider nanotechnologies for passive devices, which are moving into the substrate as embedded components. The development of nanoparticle based high-k dielectrics is covered by Lu and Wong in Chap. 7, with consideration of the effects of both metallic and ferroelectric nanoparticles on material performance. At higher metal loading levels, the cermet (ceramic–metal, or polymer–metal) material becomes resistive, and cermets have been used as resis-tors in various applications for decades. The basic principle of operation balances the nanoscale effects of activated tunneling and percolation, as explained by Wu and Morris in Chap. 8. Nanoparticle applications in passive components are rounded out by the Jha et al.’s Chap. 9 on inductors and antennas, which are essen-tial to portable wireless systems. These are generally micron-sized devices with nanoscale features, e.g., size effects, surface roughness, and nano-granular materi-als (for which classical theory does not match the properties).

Nanoscale engineering of isotropic conductive adhesives (ICAs) in Chap. 10, by Lu et al., covers both nanoparticle additives (i.e., low temperature nanosintering, CNT additives, etc.,) and enhancements by surface treatments. Chapter 11 by Das and Egitto deals with printed wiring board (PWB) microvias, and especially nanopar-ticle loaded fillers. Completing this group of three chapters, Felba and Schäfer cover nanoparticle-based PWB interconnect developments in Chap. 12, including progress toward a printable solution, and sintering (or laser sintering) of nano-Ag.

Soldering is the core technology of circuit assembly, so it is not surprising that researchers would explore the possible benefits of nanoparticle or CNT additives. As it turns out, Co, Ni, or Pt nanoparticles have some dramatic effects in limiting intermetallic compound (IMC) growth and hence mechanical failure by brittle fracture. These effects and others are covered by Amagai in Chap. 13.

Lall et al. describe the use of ceramic nanoparticle additives to lower the coeffi-cient of thermal expansion in underfill in Chap. 14, the final chapter on nanoparti-cles. To model this effect, they also consider the problems of random distributions, viscoelasticity, etc.

The cluster of CNT chapters is introduced by two from the same research group. Various CNT fabrication techniques are reviewed in Chap. 15, by Yadav et al., and

viii Preface

then Chap. 16 follows up with a review of basic CNT properties, characterization, and applications from Kunduru et al., who provide a primer on some device research which parallels the work described in this book.

High thermal conductance CNT microchannel cooling is described by Liu and Wang in Chap. 17, where they also cover the thermal conductance of CNT bumps and a novel electro-spun thermal interface material incorporating metal nanoparticles.

High CNT conductance suggests CNT—polymer composites for light weight electromagnetic shielding, and Cheng et al. present their work on the effectiveness of this technique in Chap. 18.

Chapter 19 provides the CNT parallel to Chap. 13, with the account by Kumar et al. of the results of adding CNTs to both eutectic Sn–Pb and Pb-free solders, with the verdict that essentially every parameter of interest can be improved.

The subject moves from CNTs to nanowires in Chap. 20 by Fiedler et al. The chap-ter includes both applications and fundamental problems, with an extensive biblio-graphic review. Then Ma et al. introduce a novel stress-engineered cantilever technique to form free-standing interconnect wires (or springs) in Chap. 21. Micron-scale struc-tures are described first, before demonstrating their reduction to the nanoscale.

There is very little in the current literature about the specific packaging prob-lems of either extreme CMOS shrinkage (to 45 nm and below) or future disruptive nanoelectronics technologies. Chapter 22 by Mallik et al. is devoted to the shrink-ing CMOS issue, providing historical perspective and analysis of the nm-CMOS challenges, along with insights on the future.

Zhang rounds out the book in Chap. 23 with a broad top-down overview of future directions of the industry as microelectronics moves to nanoelectronics, with both “More Moore” and “More-than-Moore” applications beyond CMOS integration.

Most chapters include a focus on the authors’ own research in each respective field, but all end with extensive reference listings. The intentions of the book are to present an overview of each topic area, usually with the deeper treatment of one particular aspect, and especially to provide the reader with a resource for future study of those of interest. Hopefully, the book will pique such interest.

Portland, OR James E. Morris

Preface ix

Contents

1 Nanopackaging: Nanotechnologies and Electronics Packaging .......... 1James E. Morris

2 Modelling Technologies and Applications ............................................. 15C. Bailey, H. Lu, S. Stoyanov, T. Tilford, X. Xue, M. Alam, C. Yin, and M. Hughes

3 Application of Molecular Dynamics Simulation in Electronic Packaging ........................................................................... 39Haibo Fan and Matthew M.F. Yuen

4 Advances in Delamination Modeling ..................................................... 61O. van der Sluis, C.A. Yuan, W.D. van Driel, and G.Q. Zhang

5 Nanoparticle Properties .......................................................................... 93James E. Morris

6 Nanoparticle Fabrication ........................................................................ 109Y. Hayashi, M. Inoue, H. Takizawa, and K. Suganuma

7 Nanoparticle-Based High-k Dielectric Composites: Opportunities and Challenges ................................................................ 121Jiongxin Lu and C.P. Wong

8 Nanostructured Resistor Materials ........................................................ 139Fan Wu and James E. Morris

9 Nanogranular Magnetic Core Inductors: Design, Fabrication, and Packaging .......................................................................................... 163Gopal C. Jha , Swapan K. Bhattacharya, and Rao R. Tummala

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10 Nanoconductive Adhesives .................................................................... 189Daoqiang Daniel Lu , Yi Grace Li, and C.-P. Wong

11 Nanoparticles in Microvias ................................................................... 209Rabindra N. Das and Frank D. Egitto

12 Materials and Technology for Conductive Microstructures .............. 239Jan Felba and Helmut Schaefer

13 A Study of Nanoparticles in SnAg-Based Lead-Free Solders ............ 265Masazumi Amagai

14 Nano-Underfills for Fine-Pitch Electronics ......................................... 287Pradeep Lall, Saiful Islam, Guoyun Tian, Jeff Suhling, and Darshan Shinde

15 Carbon Nanotubes: Synthesis and Characterization ......................... 325Yamini Yadav, Vindhya Kunduru, and Shalini Prasad

16 Characteristics of Carbon Nanotubes for Nanoelectronic Device Applications ............................................... 345Vindhya Kunduru, Yamini Yadav, and Shalini Prasad

17 Carbon Nanotubes for Thermal Management of Microsystems ....... 377Johan Liu and Teng Wang

18 Electromagnetic Shielding of Transceiver Packaging Using Multiwall Carbon Nanotubes ..................................................... 395Wood-Hi Cheng, Chia-Ming Chang, and Jin-Chen Chiu

19 Properties of 63Sn-37Pb and Sn-3.8Ag-0.7Cu Solders Reinforced With Single-Wall Carbon Nanotubes ............................... 415K. Mohan Kumar, V. Kripesh, and Andrew A.O. Tay

20 Nanowires in Electronics Packaging .................................................... 441Stefan Fielder, Michael Zwanzig, Ralf Schmidt, and Wolfgang Scheel

21 Design and Development of Stress-Engineered Compliant Interconnect for Microelectronic Packaging ................... 465Lunyu Ma, Suresh K. Sitaraman, Qi Zhu, Kevin Klein, and David Fork

xii Contents

22 Flip Chip Packaging for Nanoscale Silicon Logic Devices: Challenges and Opportunities .................................... 491Debendra Mallik, Ravi Mahajan, and Vijay Wakharkar

23 Nanoelectronics Landscape: Application, Technology, and Economy ..................................................................... 517G.Q. Zhang

Contents xiii

Index. ...............................................................................................................

Errat E1a.. ............................................................................................................

537

Contributors

Mohammad AlamSchool of Computing and Mathematical Sciences, University of Greenwich, Old Royal Naval College, Greenwich, London SE10 9LS, UK [email protected]

Masazumi AmagaiTsukuba Technology Center, Texas Instruments, 17 Miyukigaoka, Tsukuba-shi, Ibaragi-ken 305-0841 [email protected]

Chris BaileySchool of Computing and Mathematical Sciences, University of Greenwich, Old Royal Naval College, Greenwich, London SE10 9LS, UK [email protected]

Swapan K. BhattacharyaSchool of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA 30332, [email protected]

Chia-Ming ChangInstitute of Electro-Optical Engineering, National Sun Yat-sen University, Kaohsiung 80424, Taiwan, [email protected]

Wood-Hi ChengInstitute of Electro-Optical Engineering, National Sun Yat-sen University, Kaohsiung 80424, Taiwan, ROC [email protected]

Jin-Chen ChiuInstitute of Electro-Optical Engineering, National Sun Yat-sen University, Kaohsiung 80424, Taiwan, ROC [email protected]

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Rabindra N. DasEndicott Interconnect Technologies, Inc., 1093 Clark Street, Endicott, New York, NY 13760, [email protected]

Frank D. EgittoEndicott Interconnect Technologies, Inc., 1093 Clark Street, Endicott, New York, NY 13760, USA [email protected]

Haibo FanDepartment of Mechanical Engineering, Hong Kong University of Science and Technology, Clearwater Bay, N.T., Hong Kong [email protected]

Jan FelbaFaculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, ul. Janiszewskiego 11/17, 50-372 Wroclaw, Poland [email protected]

Stefan FiedlerDept. Module Integration and Board Interconnection Technologies, Fraunhofer Institut Zuverlässigkeit und Mikrointegration (IZM), 13355 Berlin, Gustav-Meyer-Allee 25, [email protected]

David K. ForkPalo Alto Research Center, 3333 Coyote Hill Rd., Palo Alto, CA 94304, USA

Yamato HayashiDepartment of Applied Chemistry, Tohoku University, 6-6-07 Aoba Aramaki, Aoba-ku, Sendai 980-8579, Japan [email protected]

Michael HughesSchool of Computing and Mathematical Sciences, University of Greenwich, Old Royal Naval College, Greenwich, London SE10 9LS, UK [email protected]

Masahiro InoueNanoscience and Nanotechnology Center, The Institute of Scientific and Industrial Research (ISIR), Osaka University, Mihogaoka 8-1, Ibaraki, Osaka 567-0047, Japan [email protected]

Saiful IslamIntel Corporation, 5000 W. Chandler Blvd., Chandler, AZ 85226, [email protected]

xvi Contributors

Gopal C. JhaPackaging Research Center, Georgia Institute of Technology, Atlanta, GA 30332, [email protected]

Kevin KleinComputer-Aided Simulation of Packaging Reliability (CASPaR) Lab, The George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 813 Ferst Drive, Atlanta, GA 30332-0405, USA

Vaidyanathan KripeshInstitute of Microelectronics, 11 Science Park Road, Science Park II, Singapore, Singapore [email protected]

Katta Mohan KumarNano/Microsystems Integration Laboratory, Department of Mechanical Engineering, National University of Singapore, 9 Engineering Drive 1, Singapore, Singapore 117576 [email protected]

Vindhya KunduruDepartment of Electrical & Computer Engineering, Portland State University, FAB Suite 160, 1900 SW 4th Avenue, Portland, OR 97207-0751, [email protected]

Pradeep LallDepartment of Mechanical Engineering, Auburn University, 270 Ross Hall, Auburn, AL 36849, [email protected]

Grace LiSchool of Materials Science and Engineering, Georgia Institute of Technology, 771 Ferst Dr. NW, Atlanta, GA 30332, [email protected]

Johan LiuBionano Systems Laboratory, Department of Microtechnology and Nanoscience, Chalmers University of Technology, Kemivägen 9 Room A517, Se 412 96 Gothenburg, Sweden [email protected]

Daniel D. LuHenkel Loctite (China) Co., Ltd, 90 Zhujiang Road, Yantai, ETDZ, Shandong, China 264006 [email protected]

Hua LuSchool of Computing and Mathematical Sciences, University of Greenwich, Old Royal Naval College, Greenwich, London SE10 9LS, [email protected]

Contributors xvii

Jiongxin LuGeorgia Institute of Technology, Atlanta, GA, USA

Lunyu MaComputer-Aided Simulation of Packaging Reliability (CASPaR) Lab, The George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 813 Ferst Drive, Atlanta, GA 30332-0405, USA

Ravi MahajanIntel Corp, M/S CH5-157, 5000 W. Chandler Blvd., Chandler, AZ 85226, USA [email protected]

Debendra MallikIntel Corp, M/S CH5-157, 5000 W. Chandler Blvd., Chandler, AZ 85226, USA [email protected]

James E. MorrisDepartment of Electrical & Computer Engineering, Portland State University, P.O. Box 751, Portland, OR 97201, USA [email protected]

Shalini PrasadDepartment of Electrical & Computer Engineering, Portland State University, FAB Suite 160, 1900 SW 4th Avenue, Portland, OR 97207-0751, [email protected]

Helmut SchaeferFraunhofer Institut Fertigungstechnik Materialforschung (IFAM), Wiener Strasse 12, 28359 Bremen, [email protected]

Wolfgang ScheelDepartment of Module Integration and Board Interconnection Technologies, Fraunhofer Institut Zuverlässigkeit und Mikrointegration (IZM), 13355 Berlin, Gustav-Meyer-Allee 25, Germany [email protected]

Ralf SchmidtDepartment of Module Integration and Board Interconnection Technologies, Fraunhofer Institut Zuverlässigkeit und Mikrointegration (IZM), 13355 Berlin, Gustav-Meyer-Allee 25, [email protected]

Darshan ShindeDepartment of Mechanical Engineering, Auburn University, 270 Ross Hall, Auburn, AL 36849, USA [email protected]

xviii Contributors

Suresh K. SitaramanComputer-Aided Simulation of Packaging Reliability (CASPaR) Lab, The George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 813 Ferst Drive, Atlanta, GA 30332-0405, USA [email protected]

Stoyan StoyanovSchool of Computing and Mathematical Sciences, University of Greenwich, Old Royal Naval College, Greenwich, London SE10 9LS, [email protected]

Katsuaki SuganumaNanoscience and Nanotechnology Center, The Institute of Scientific and Industrial Research (ISIR), Osaka University, Mihogaoka 8-1, Ibaraki, Osaka 567-0047, [email protected]

Jeff SuhlingDepartment of Mechanical Engineering, Auburn University, 270 Ross Hall, Auburn, AL 36849, USA [email protected]

Hirotsugu TakizawaDepartment of Applied Chemistry Tohoku University, 6-6-07 Aoba Aramaki, Aoba-ku, Sendai, 980-8579, [email protected]

Andrew A.O. TayNano/Microsystems Integration Laboratory, Department of Mechanical Engineering, National University of Singapore, 9 Engineering Drive 1, [email protected]

Guoyun TianDepartment of Mechanical Engineering, Auburn University, 270 Ross Hall, Auburn, AL 36849, USA [email protected]

Tim TilfordSchool of Computing and Mathematical Sciences, University of Greenwich, Old Royal Naval College, Greenwich, London SE10 9LS, [email protected]

Rao R. TummalaPackaging Research Center, Georgia Institute of Technology, Atlanta, GA 30332, [email protected]

Contributors xix

O. (Olaf) van der SluisDepartment of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2 2628 CD Delft, The [email protected] Applied Technologies, High Tech Campus 7 5656 AE Eindhoven, The [email protected]

W.D. (Willem) van DrielNXP Semiconductors, Gerstweg 2 6534 AE Nijmegen, The NetherlandsDepartment of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2 2628 CD Delft, The [email protected]

Vijay WakharkarIntel Corp, M/S- CH5-157, 5000 W. Chandler Blvd., Chandler, AZ 85226, [email protected]

Teng WangBionano Systems Laboratory, Department of Microtechnology and Nanoscience, Chalmers University of Technology, Kemivägen 9 Room A517, Se 412 96 Gothenburg, Sweden [email protected]

C.-P. WongSchool of Materials Science and Engineering, Georgia Institute of Technology, 771 Ferst Dr. NW, Atlanta, GA 30332, [email protected]

Fan WuZounds, Inc., 1910 S. Stapley Drive, Suite 202, Mesa, AZ 85204, [email protected]

Xiangdiong XueSchool of Computing and Mathematical Sciences, University of Greenwich, Old Royal Naval College, Greenwich, London SE10 9LS, UK [email protected]

Yamini YadavDepartment of Electrical & Computer Engineering, Portland State University, FAB Suite 160, 1900 SW 4th Avenue, Portland, OR 97207-0751, [email protected]

Chunyan YinSchool of Computing and Mathematical Sciences, University of Greenwich, Old Royal Naval College, Greenwich, London SE10 9LS, [email protected]

xx Contributors

C.A. (Cadmus) YuanDepartment of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The [email protected]

andNXP Semiconductors, Gerstweg 2, 6534 AE Nijmegen, The Netherlands Matthew [email protected]

M.F. YuenDepartment of Mechanical Engineering, Hong Kong University of Science and Technology, Clearwater Bay, N.T., Hong Kong [email protected]

G.Q. (Kouchi) ZhangDepartment of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The [email protected] andNXP Semiconductors, High Tech Campus 60, Room 203, 5656 AG Eindhoven, The [email protected]

Qi ZhuComputer-Aided Simulation of Packaging Reliability (CASPaR) Lab, The George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 813 Ferst Drive, Atlanta, GA 30332-0405, USA

Michael ZwanzigDepartment of Module Integration and Board Interconnection Technologies, Fraunhofer Institut Zuverlässigkeit und Mikrointegration (IZM), 13355 Berlin, Gustav-Meyer-Allee 25, [email protected]

Contributors xxi