More Precision. - Micro-Epsilon · 2020. 1. 27. · ESC30 Synchronisation cable 0.3m, cable for...
Transcript of More Precision. - Micro-Epsilon · 2020. 1. 27. · ESC30 Synchronisation cable 0.3m, cable for...
NEW: capaNCDT 6350High speed capacitive displacement sensors
More Precision.
22
- Extreme fast - 50 kHz - bandwidth
- True non contact measurement
- Unmatched temperature stability
- Any conductive target
The operating principle of non-contact capa-
citive displacement measurement used by the
capaNCDT system (capacitive Non-Contact
Displacement Transducer) is based on the ideal
parallel plate capacitor. The two plate electro-
des are formed by the sensor and the opposing
target. If an AC current with constant frequency
flows through the sensor capacitor, the amp-
litude of the AC voltage on the sensor is pro-
portional to the distance between the capacitor
electrodes; an adjustable compensating volta-
ge is simultaneously generated in the amplifier
electronics. After demodulation of both AC vol-
tages, the difference is amplified and output as
an analogue signal.
Active guard triaxial cable & three-electrode technologyThe Micro-Epsilon capacitive system uses an
unique active driven and hermetically sealed
triaxial RF cable in conjunction with an active
guarded three-electrode sensor. Therefore the
system is electron leakage proof and creates
a protected homogeneous measurement field
enabling an absolute unmatched stable, interfe-
rence free precision measurement.
Any parasitic capacitance which would compro-
mise the accuracy is eliminated!
The high linearity is in the measuring principleThe capaNCDT system evaluates the reactance
Xc of the capacitor which changes strictly in pro-
portion to the distance:
This theoretical relationship is put into practice
by constructing the sensors as guard ring ca-
pacitors.
capaNCDT 6350: High speed capacitive displacement measurement
Measuring principle
Housing
Guard ring
Capacitor
Field lines
Measuring spot
Xc =
Capacitance C = er · e0 ·
Xc = constant · distance
j · w · C1
areadistance
2 33capaNCDT 6350: Applications and system structure
Application fields:capaNCDT 6350 is designed for industrial use in production plants and for measuring and testing du-
ring in-process quality assurance. Illustrated here are just a few examples of many different potential
applications for the sensors.
1 - vibration, amplitude, clearance, run-out
2 - displacement, distance, position, elongation
3 - deflection, deformation, waviness, tilt
4 - dimensions, measuring of tolerances, sorting, part recognition
5 - stroke, deformation, axial shaft oscillation
6 - in-process quality control, dimensional inspection
System structureThe capaNCDT 6350 is a compact, single-channel system that comprises a capacitive displacement
sensor, a sensor-connecting cable and signal-conditioning electronics.
The high precision DSP (Digital Signal Processor) achieves up to 50 kHz (-3dB) bandwidth on ana-
logue output.
Measuring channel consists of:1 - a capacitive displacement sensor
2 - a sensor cable
3 - signal conditioning electronics
Block diagram
1 2 3
4 5 6
Oscillator
Signal
8-pinsocket
24 VDC
Demodulator
fosc. 250 kHz
Sensorcable
DSP
Controller: DT 6350Power supply: 24 VDCOutput: 0-10 V
2
3
Sensor
1
44
Standard distance measurementThe inherent linearity is based on the measuring principle for distance mode. The capaNCDT system
evaluates the reactance Xc of the capacitor which changes strictly proportionally with the distance:
The linear characteristic of the measurement signal is achieved without extra electronic linearisation.
When measuring against flat targets made of electrically-conductive materials (metals), changes in
the conductivity do not affect sensitivity or linearity. Any conductive or even semi-conductive targets
are measured with the same measurement performance.
Thickness measurementThe system can also measure linear the thickness of insulator material. The capaNCDT system eva-
luates the reactance Xc change based on the dielectric volume of the material inside the constant
sensor gap.
Instant sensor swap without recalibrationThe unique Micro-Epsilon capacitive technology allows changing any capaNCDT sensor within seconds!
Replacing sensors with different measuring ranges and any capaNCDT controller is possible without
recalibration. A sensor swap with capaNCDT needs no more than 5 seconds, while other capacitive
systems are not designed for replacing components without the need of individual calibration and
linearization via DIP switch settings.
Non-contact target groundingTarget grounding sometimes can be very difficult or even impossible. Unlike conventional systems,
due to the unique synchronisation of two capaNCDT systems, the target does not require any elec-
trical grounding.
The principle on the right shows two synchronised capaNCDT sensors measuring roller run-out. The
target does not need to be grounded because of the unique synchronised-non-contact-grounding
technology.
Two DT6350 controllers can be synchronised with the ESC30 synchronisation cable.
Linearisation and CalibrationcapaNCDT 6350 systems are calibrated for metallic targets Micro-Epsilon prior to shipment (output
0-10 V). It is possible to measure on difficult targets with the DSP calibration.
capaNCDT 6350: Characteristics and features
Electrical conductor
Controller
Instant sensor swap within 5 seconds!Replace any capaNCDT controller and any capaNCDT sensor within seconds without recalibration!
sync.ControllerSensor
Sensor
Controller
No target grounding requiredwith two capaNCDT sensors!
10 V
1/1 Measuring range
2/1 Measuring range
1/2 Measuring range
Outp
ut
1/2 measuring range (0...10V)increase of resolution
1/1 measuring range ( 0...10V) standard
2/1 (0...10V) decrease of resolution measuring range
Sens
or
Targ
et
Targ
et
Targ
et
0
>1/2 Measuring range≤1/2 Measuring range
Electrical conductorIsolator
4 55capaNCDT 6350: Technical specifications
Model CS02 CS05 CS1 CS1HP CS2 CS3 CS5 CS10
Measuring range el. cond. (metal) mm 0.2 0.5 1 1 2 3 5 10
Extended range1 el. cond. (metal) mm 0.4 1 2 2 4 6 10 20
Linearity2 ≤0.3% FSO µm 0.6 1.5 3 3 6 9 15 30
Resolution
20Hz µm 0.01 0.03 0.06 0.06 0.1 0.2 0.3 0.6
5000Hz µm 0.05 0.1 0.2 0.2 0.5 0.7 1.2 2.4
20000Hz µm 0.1 0.2 0.5 0.5 1 1.5 2.4 4.9
50000Hz µm 0.2 0.5 1 1 2 2.9 4.9 9.8
Sensor outer diameter mm 6 8 10 10 20 30 40 60
Sensor weight g 2 3.5 7.1 7.1 61 95 120 230
Active measuring area (diameter) ø mm 2.3 3.9 5.5 5.5 7.9 9.8 12.6 17.8
Guard ring width mm 1 1.4 1.5 1.5 4 8.1 11.8 18.1
Min. diameter of target
el. cond. (metal) mm 5 7 9 9 17 27 37 57
insulator mm 7 10 12 12 24 36 48 72
Temperature stability (sensor)
zero µm/°C 0.06 0.06 0.17 0.06 0.17 0.17 0.17 0.17
sensitivity ppm/°C 11 11 30 11 30 30 30 30
Temperature stability (electronics) ≤0.01% FSO/°C
Long term stability3 ≤0.02% FSO/month
Sensitivity V/mm 50 20 10 10 5 3.33 2 1
Output voltage 0 - 10VDC (max. 10mA short circuit proof)
Power supply 24VDC (9…30V) / 5.5W
Bandwidth 20Hz / 5kHz / 20kHz / 50kHz (-3dB) selectable via button
Temperature range
sensors -50 to +200°C
sensor cable -50 to +150°C
electronics +10 to +50°C
Air humidity sensors 5 to 95% (non condensing)
Electromagnetic compatibility (EMC)DIN EN 55011 Spurious emission
DIN EN 61000-6-2 Immunity to interference
Protection class electronics & sensors IP 54
FSO = Full Scale Output1) field programmalbe2) at factory calibration 100 % measuring range, 1 m cable3) long term stability at 20 °C steady state
66 capaNCDT 6350: Sensor cables
Sensor cablesThe sensors are designed as three-electrode guard ring capacitors and are connected to the con-
troller with a triaxial cable. The sensor cables are equipped with high quality triaxial RF connectors.
All standard sensors can be used within any capaNCDT series electronic without recalibration (max.
0.5% deviation). Micro-Epsilon offers and designs customized probes for your specific application.
Sensor connecting cable
The sensor and controller are connected by a special triaxial active guarded sensor cable.
Various cable length (0,5m, 1m, 2m) are selectable via DIP switch settings.
17.5 13.7
27 8.6
Ø5.4
Ø3.2
Ø7 Ø9.5
Ø6
x = cable length (standard 1m)
37
16
13.1
8
16.9 Ø6
Ø5.4
Ø4
20.5
30.5
25
Ø7
Ø10
SW12
34
9
2
Ø8.8
Ø14
M10x0.75
max. 17
Ø7
Ø9.5
37
27Ø3.2
x = cable length (standard 1m)
Sensor cable CCxC Sensor cable CCxC/90
x = cable length
x = cable length
Sensor cable CCxB/90
Vacuum feed through SWH
Sensor cable CCxB
Model for sensors Cable length2 straight
connectors1x straight +
1x 90°
CC0.5C
CS02CS05
0.5 m x
CC1C 1 m x
CC2C 2 m x
CC0.5C/90 0.5 m x
CC1C/90 1 m x
CC2C/90 2 m x
CC0.5BCS1
CS1HPCS2CS3CS5
CS10
0.5 m x
CC1B 1 m x
CC2B 2 m x
CC0.5B/90 0.5 m x
CC1B/90 1 m x
CC2B/90 2 m x (Dimensions in mm, not to scale)
IMPORTANT!
All Micro-Epsilon sensors are short circuit
proof. Unlike other systems the preampli-
fier will not get damaged, if the front face
of the sensor gets shorted by touching the
conductive target
6 77capaNCDT 6350: Dimensions
Sensor dimensions (Dimensions in mm, not to scale)
x = cable length
CS2
24
Ø20
h7ø4
0h7
ø20h
7
16.5
24
CS5
CS05
Ø8f
7
12
CS02
Ø6f
7
12
CS1
ø10f
7
-0.221
ø10f
7
-0.220
CS1HP
CS3ø3
0h7
ø20h
7
16.5
24
CS10
ø60h
7
ø20h
7
16.524
connector
Dimension Fit tolerance (µm)
6f7 -10 - 22
8f7 - 13 - 28
10f7 - 13 - 28
20h7 0 - 21
30h7 0 - 21
40h7 0 - 25
60h7 0 - 30
110
97
Controller dimensions
¯ 4.6
17544.7
155
Sync
IN
Sync
OUT
Pow
er /
Sign
al
(Dimensions in mm, not to scale)
88 capaNCDT 6350: Accessories
Accessories
PC3/8
Power- and output cable, 3m, 8-pin
ESC30
Synchronisation cable 0.3m, cable for
multi-channel operation
PS 2010
Power supply for DIN rail mounting
Input 230VAC (115VAC)
Output 24VDC / 2.5A
L/W/H 120 x 120 x 40mm
MC2.5
Micrometer for sensor calibration
Range 0 - 2.5mm
Resolution 0.1µm
For sensors CS02 through to CS2
MC25D
Micrometer for sensor calibration
with digital display
Range 0 - 25mm
Adjustable offset (zero), for all sensors
CSP 301
Digital signal processing unit with
display for synchronous processing
of two channels
High performance sensors made by Micro-Epsilon
Sensors and systems for displacement,
position and dimension
Eddy current sensors
Optical and laser sensors
Capacitive sensors
Inductive sensors
Draw-wire sensors
Optical micrometers
2D/3D profile sensors
Image processing
Sensors and measurement devices
for non-contact temperature sensors
Online instruments
Handheld devices
Measuring systems for quality control
for plastic and film
for tire and rubber
for web material
for automotive components
for glass
Mod
ifica
tions
rese
rved
/ Y9
7611
99-A
0200
58JK
R
[email protected] www.micro-epsilon.co.uk