MOCVD Platform for R&D

The Agilis MOCVD Series is a flexible R&D platform with configuration options to enable state-of-the-art growth for a variety of reactor configurations. The flexibility of the platform also enables customers with more focused objectives to streamline the gas delivery and chamber configurations to minimize initial costs while maintaining future field upgrade potential should R&D interests shift.

We have experience with a range of growth chamber concepts and can share information about the virtues of each to help you choose the right capabilites for your work. We are also experienced employing both induction and resistive heating approaches and manual, semi-automatic and fully robotic loading mechanisms.

With our team's collective experience of many decades designing supplying and supporting MOCVD equipment we've seen a lot. Our depth in the field provides a wealth of knowledge from which we can offer solutions for many types of material growth applications.

AINAIGaNInGaNIII-V As/P alloysZnOMgZnOGallium Oxide - b-Ga2O3

Powerful tools enable advanced material growth

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A set of proven reactor geometries to choose from

... to enable state-of-art processes for a variety of materials

R&D MOCVD System

Materials

Graphene Transition Metal Dichalcogenides (TMD): MoS2, MoSe2, WS2, WSe2Phosphorene (black phosohorus) Can be configured for any material growth. Can be used for ALD

Quartz Tube (Vertical/Horizontal)High-Speed Rotating Disc

Lateral Laminar Injection Nozzle (LLIN)Close Injection Showerhead (CIS)

A Modular Cabinet Design Enables System Configuration to YOUR Requirements

Choose a gas cabinet module

Choose a reactor cabinet module

Put them together for a tailored solution

MOCVD as a technique spans a large range of capabilities and there is no system that can do it all. The modular cabinet design of the Agilis Equipment Series allows selection of a source configuration and chamber set to meet your program objectives. This mean you get what you need today and retain the ability to upgrade processing capabilities in the future. It makes sense to us and we think it will for you too.

Not sure what you need? No problem, let’s talk about your objectives and find the best solution.

MOCVD Support and ServicesAgilis MOCVD systems include all standard factory and field support services, including:

• Factory training• Preshipment checkout

5 MO Source Gas Cabinet

Compact reactor module for non-load locked single reactor configuration.

Dual growth chamber cabinet module for glovebox or load locked reactor configurations.

Example of cabinet configuration for different sources and chamber sets

10 MO Source Gas Cabinet (5x2)

• Documentation and remote support for facility requirements/preparation

• System startup and growth demo

• Standard system warranty

• Available ongoing parts and field services support

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Precision control and awareness of system performance are critical to advanced processing

Agnitron supplied MOCVD systems are integrated with Imperium Process Control Software and Beckhoff Automation PLC hardware. This combination represents a robust architecture with tremendous flexibility to support your process wherever your data leads

Imperium Control Packages can be seamlessly integrated with a variety of insitu metrology tools such as reflectometry and Emissivity Compensated Pyrometry (ECP) from all leading suppliers for monitoring or feedback control operation.

The Imperium Control Software and Beckholf PLC architecture offers a streamlined Windows OS based control environment and supports all industry standard analog and digital device and drive communication protocols. The Beckhoff proprietary TwinCat environment offers a software-based PLC function to ensure maximum control system stability – even if the Window’s environment “blue screens” during recipe execution the system will run unaffected and complete the run safely.

Beckhoff Automation is Agnitron´s preferred supplier for PC/PLC, touch-panel HMI and I/O module hardware. Imperium is also capable of integrating with hardware from other leading suppliers.

www.agnitron.comsales@agnitron.com

+1-952-937-7505

Combine the power of advanced metrology and Imperium for precision monitoring and control

Safety is paramount and reliability is key

Imperium Control Software Beckhoff Hardware Solutions

Agnitron Control System

MOCVD Support and Services

Agilis MOCVD systems include all standard factory and field support services, including:

• factory training

• preshipment checkout

• Documentation and remote support for facility requirements/preparation

• System startup and growth demo

• Standard system warranty

• Available ongoing parts and field services support