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Microsystems at Georgia Tech
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Electronics and classical physics
Electronic sciences and solid-state physics
microelectronics
microsystems
So, you wanna study microsystems…
• Undergraduate coursework opportunities
• Graduate coursework opportunities
• Research opportunities– UROP/special problems– MS thesis work– PhD thesis work
Undergraduate Pathway
Core Graduate Pathway
***
*
* = microsystems core
Microelectronics/Microsystems Research Areas
Microsystems and Nanosystems Faculty: Mark G. Allen, Farrokh Ayazi, Oliver Brand, Albert B. Frazier
Photovoltaics Faculty: Christiana Honsberg, Bernard Kippelen, Ajeet Rohatgi
Microelectronics Systems Packaging Faculty: Farrokh Ayazi, Gary S. May, Rao R. Tummala
Manufacturing and Gigascale Integration Faculty: John D. Cressler, Gary S. May, James D. Meindl
Compound Semiconductors Faculty: William A. Doolittle, Ian T. Ferguson
Biomedical Microsystems Faculty: Mark G. Allen, Albert B. Frazier, William D. Hunt
Microelectronics Research Center
Complete facilities list & info:www.mirc.gatech.edu
• 10,000 m2 building• 2,000 m2 annex• 700 m2 clean room space• 18 individual laboratories• 470 graduate student researchers• 230 clean room users• 76 affiliated faculty
Engineering: ECE, MSE, ME, ChESciences: Chemistry, Physics, Mathematics
7 Startup Companies utilize facilities under negotiated arrangements with Georgia Tech
Coming soon: the ‘Nanocenter’
What about Microelectronics Research?
Almost 10% of GT research !?
Some Current Microsystems Programs
Complementary Metal Oxide Semiconductor Platform (CMOS)Microelectromechanical SystemsNanofabricationPackaging Research Center (resource)University Center of Excellence in Photovoltaics
Wide Bandgap Materials: Lasers, Lighting, DevicesChemical Process ResearchComputational ElectronicsOptoelectronicsQuantum DevicesComputer Aided ManufacturingWireless RF ElectronicsUltrafast Fiber Optical Communications
Center Research Possibilities
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University Center of Excellence in Photovoltaics
Center for MEMS and Microsystem Technologies
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Packaging Research Center
Polylithic integration of optical interconnection for
fiber-to-the-chip communication
Magnetic Micromachined Materials and Devices
Upper plate
Pads
Springsinductors
relays
high energy product magnets
RF MEMS
surface micromachined inductors RF switches
LC filters
High Temperature Wireless Sensors
CompressorCombustor
Sensor placed here
Pratt and Whitney
ElectroplatedCu Coil
ElectroplatedCu electrode
ConductivePaste
3.8mmDC sputteredCu electrode
161µm
3.8mm
Biomedical Devices
flexible microelectrode arrays
microneedles