Microscope Components 2CE-KXQH-9...4 5 +0.052 0 65 95 (19) 55 (20) (20) 48 ø24.5H9 M6 67.5 ø11.5...

Microscope Components for Reflected Light Applications

Microscope Components for Reflected Light Applications

2 3

2

2

2

C-mount Camera

CCTV Camera Adapters

Light Sources

Y-IDPDouble Port

Ergonomic DSC Port *1

*3

T-BPAPhotoAdapter

Y-TTV Tube

LV-TV Tube Adapter

Universal Epi-IlluminatorLV-UEPI-N

White LED IlluminatorLV-EPILED*This can not be used together with Y-IDP Double-port

*2 Requires separately available LV-NCNT-N Motorized Nosepiece Controller.

LED Controllor

LV-TI3Trinocular Tube ESD

LV-TT2Tilting Trinocular Tube

C-TF Trinocular Tube F

C-TT Trinocular Tube T

C-TE2 ErgonomicBinocular Tube

C-TB Binocular Tube

1212121

C-EREyelevelRiser

Eyepiece Tubes / Double Port

LV-LH50PC Precentered Lamphouse

LV-HL50W12V-50W-LLHalogen Lamp

Illuminators

Modular FocusingUnit IM-4

L-IMFixingUnit

for Equipment for CCTV Systems

2nd Objective Lens Units P.25ModularFocusingUnit IM-4

A

CFI UW 10×CFI UW 10×M

LV-10×ESDCFI 10×/CFI 10×CM/CFI 12.5×/CFI 15×

Eyepiece Lenses1 2

C-CTCenteringTelescope

Y-TV55 TV Tube 0.55x

A

TI-PS100W/A Power Supply(YM-EPI3-3pin extension cord is required)

Polarizers

Analyzers

Filters

CF&IC Objectives P.21

3CFI60-2 / CFI60 Objectives

Straight Tubes P.27

P.14-16

P.14-16

P.10-14

*3 Requires separately available adapter.

P.4

C-mount TV Adapter A C-mountTV AdapterC-mount Adapters

0.35×/0.45×/0.6×

C-0.7×DXM Relay Lens

1×Relay Lens

C-0.55×DS Relay Lens

CF IC EPI Plan DI10×A/20×A/50×A/100×

CF IC EPI Plan TI 2.5×A/5×A

CFI TU Plan FLUOR EPI 5×/10×/20×/50×/100×CFI T Plan EPI 1×/2.5×CFI L Plan EPI 2.5×A/40×CFI TU Plan EPI ELWD 20×/50×/100×CFI T Plan EPI SLWD 10×/20×/50×/100×CFI TU Plan FLUOR BD 5×/10×/20×/50×/100×CFI TU Plan BD ELWD 20×/50×/100× CFI TU Plan Apo EPI 50×/100×/150× CFI TU Plan Apo BD 50×/100×/150×CFI LU Plan Apo EPI 150× CFI LU Plan Apo BD 100×/150×CFI L Plan EPI CR 20×CR/50×CR/100×CRA/100×CRB

*1 For more information, see page 27.

P.30

P.28-29

P.27

DIC Prisms

Revolving Nosepieces P.17

P-NCenteringQuintupleNosepiece

LV-NU5AMotorized UniversalQuintuple NosepieceESD*2

LV-NU5 Universal Quintuple Nosepiece ESD

LV-NBD5 BDQuintupleNosepieceESD

C-N6 SextupleNosepieceLV-NU5AC

Motorized UniversalQuintuple Nosepiece*2

LV-NU5AIMotorized UniversalQuintuple Nosepiece*2

LV-LP Plate

LV-DICDIC SliderA/B

3

LV-NU5I Intellijent Universal Quintuple NosepieceESD

C-mount TV Relay Lens 2.5×

C-mount TV Relay Lens 4×

LV-LLLEDLamphouse

L-IM Modular Focusing Unit 4LV-IM IM Modules 6LV-FM FM Modules 7LVDIA-N DIA Base N 8LV-ARM Basic Arm 9LV-ECON E Controller 9CFI60-2 / CFI60 Objectives 10-14LV-UEPI-N Universal Epi-Illuminator 14LV-UEPI2 Universal Epi-Illuminator 2 15LV-UEPI2A Motorized Universal Epi-Illuminator 2 15TI-PS100W/A Power Supply 16LV-EPILED White LED Illuminator 16

Revolving Nosepieces 17CF&IC Objectives 18-21Compact Reflected Microscopes CM Series 22-24Objectives for Measuring microscopes 242nd Objective Lens Units 25Filters 26Eyepiece Tubes 27Double Port 27Straight Tubes 27Eyepiece Lenses 28-29CCTV Camera Adapters 30Glossary 31

Select a Nikon microscope unit for your manufacturing equipment

and other systems that require high precisionThe development, manufacture, and evaluation of products require sub-micron precision,

as symbolized by semiconductor manufacturing technology. Nikon's microscope units support such high precision and can be integrated with a variety of equipment.

This brochure presents technical data on using Nikon's microscope units.

Contents

System Diagram & Index

CFI60-2/CFI60 Optical System

(for modular focusing unit)

4 5

+0.052 0

9565(1

9)

55(2

0)(2

0)

48

ø24.5H9

M6

67.5

ø6.4ø11.5

11

4019

(18) 12

6

L-IM Modular Focusing Unit (IM-4)Accommodates an epi-illuminator and motorized nosepiece or a maximum load of 10 kg by adding a balancer.Accommodates the LV-UEPI-N or LV-EPILED universal illuminator as well as a motorized nosepiece.

• Attachment of the LV-UEPI-N Universal Epi-illuminator enables the use of brightfield, darkfield and Nomarski DIC techniques.• The built-in balancer ensures smoother vertical motion, even when the arm is heavily loaded.• The standard maximum load is 4kg, which is expandable to 10 kg by adding a balancer.• A coarse motion stroke of 5.2 mm per revolution improves the equipment's load handling capability and increases durability.• The distance from the optical axis to the mounting surface is 141 mm.Note: For adding a balancer, consult your Nikon representative.

L-IM Modular Focusing Unit MBD64010 / 2000 gStroke 30 mmCoarse focusing 5.2 mm/rotationFine focusing 0.1 mm/rotationScale 1 μm

L-IM Adapter for Modular Focusing Unit (Option)

Used to attach the L-IM Modular Focusing Unit to a ø24.5 mm post.

L-IM Adapter for Modular Focusing UnitMXA23079 / 500 g

Unit: mm

48

36

3110

050

1665

181

6535

ø58

ø62

2228

.573

.576

.7 ~

107

.2

69.5

181

86 77 85

R42.

5

215

8567.5 62.5

183.5141

42.7

17

9

4-W3/8 depth 106-M6 depth 7

Light Sources

FiberLV-HGFAHG Fiber Adapter C-HGFI HG Precenterd

Fiber Illuminator

LV-LH50PC Precentered Lamphouse

LV-HL50W12V-50W-LLHalogen Lamp

TI-PS100W/A Power Supply(YM-EPI3-3pin extension cord is required)

P.14-16

Universal Epi-Illuminator LV-UEPI-N

Motorized Universal Epi-Illuminator 2 LV-UEPI2A*4

Universal Epi-Illuminator 2LV-UEPI2

LED Controllor

Illuminators

Polarizers

Analyzers

Filters

LV-FMFM Module

*2 Requires separately available LV-NCNT-N Motorized Nosepiece Controller.

*4 The ND filter combination that is attached at the time of the blight-field observation.

LV-ECONE Controller

LV-ARM Basic Arm

LV-FMAFM Module A

LV-IMAIM ModuleA

LV-IMIM Module

LVDIA-N DIA Base N

Stages

Condensers

LV Microscope Units P.5-9

P.18

CF&IC Objectives P.21*3 Requires separately available adapter.

3

2

2

2

*1 For more information, see page 27.

1212121

A

P.14-16

CF IC EPI Plan DI*3 10×A/20×A/50×A/100×

CF IC EPI Plan TI*3 2.5×A/5×A

White LED IlluminatorLV-EPILED*This can not be used together with Y-IDP Double-port

DIC Prisms

Revolving Nosepieces P.17

P-NCenteringQuintupleNosepiece

LV-NU5AMotorized UniversalQuintuple NosepieceESD*2

LV-NU5 Universal Quintuple Nosepiece ESD

LV-NBD5 BDQuintupleNosepieceESD

C-N6 SextupleNosepieceLV-NU5AC

Motorized UniversalQuintuple Nosepiece*2

LV-NU5AIMotorized UniversalQuintuple Nosepiece*2

LV-LP Plate

LV-DICDIC SliderA/B

3

4

433333

Y-IDPDouble Port

Ergonomic DSC Port*1

C-EREyelevelRiser

Eyepiece Tubes / Double Port P.27

CFI60-2 / CFI60 Objectives P.10-14CFI TU Plan FLUOR EPI 5×/10×/20×/50×/100×CFI T Plan EPI 1×/2.5× CFI L Plan EPI 2.5×A/40×CFI TU Plan EPI ELWD 20×/50×/100× CFI T Plan EPI SLWD 10×/20×/50×/100×CFI TU Plan FLUOR BD 5×/10×/20×/50×/100×CFI TU Plan BD ELWD 20×/50×/100× CFI TU Plan Apo EPI 50×/100×/150×CFI TU Plan Apo BD 50×/100×/150× CFI LU Plan Apo EPI 150×CFI LU Plan Apo BD 100×/150×CFI L Plan EPI CR 20×CR/50×CR/100×CRA/100×CRB

LV-NU5I Intellijent Universal Quintuple NosepieceESD

LV-TI3Trinocular Tube ESD

LV-TT2Tilting Trinocular Tube

C-TF Trinocular Tube F


C-TE2 ErgonomicBinocular Tube

C-TB Binocular Tube

C-mount Camera

CCTV Camera Adapters

T-BPAPhotoAdapter

Y-TTV Tube

LV-TV Tube Adapter

CFI UW 10×CFI UW 10×M

LV-10×ESDCFI 10×/CFI 10×CM/CFI 12.5×/CFI 15×

Eyepiece Lenses1 2

C-CTCenteringTelescope

Y-TV55 TV Tube 0.55x

A

Straight Tubes P.27

C-mount TV Adapter A C-mountTV AdapterC-mount Adapters

0.35×/0.45×/0.6×

C-0.7×DXM Relay Lens

1×Relay Lens

C-0.55×DS Relay Lens

P.30

P.28-29

C-mount TV Relay Lens 2.5×

C-mount TV Relay Lens 4×

LV-LLLED Lamphouse

System Diagram & Index

CFI60-2/CFI60Optical System

(for LV modules)

Unit: mm

4 x hexagon socket head cap screw

depth 33

6 7

A

49 (4

8~68

)25

65.5

138.

8

87

55

95

2

120±

0.1

9

11495±0.1

47170

4260

4280

±0.

1

80±0.1

10

80±

0.1

8

62±0.118

4-M6

+0.

015

0

+0.015 0

(2-R4) ø8H7

LV-IM IM ModulesThis focusing module enables the mounting of a universal illuminator (LV-UEPI-N/LV-UEPI2/LV-UEPI2A or LV-EPILED) and a motorized nosepiece.

LV-IMA IM Module A (Motorized)MBD64070 / 4000 gVertical stroke 20 mmResolution 0.05 μmMax. speed 2.5 mm/sec (Resolution 0.05 μm)

LV-IMA IM Module A (Motorized)• Selectable mounting surface (back or bottom).• 20 mm vertical stroke.• Dramatically improved rigidity enables the mounting of the LV-UEPI2A motorized universal illuminator, etc.• External control is possible via LV-ECON E Controller.• The standard maximum permissible weight is 4-7 kg, which is expandable to 10 kg by adding a balancer.

LV-IM IM Module (Manual)MBD64080 / 4000 gStroke 30 mmCoarse focusing 5.2 mm/rotationFine Focusing 0.1 mm/rotationScale 1 μm

LV-IM IM Module (Manual)• Selectable mounting surface (back or bottom).• 30 mm vertical stroke.• Dramatically improved rigidity enables the mounting of the LV-UEPI2A motorized universal illuminator, etc.• The standard maximum permissible weight is 4-7 kg, which is expandable to 10 kg by adding a balancer.

Unit: mm

2

A

65.5

25

95

55

138.

8

87

120±

0.1

9

120.7104114

95±0.1

4260 80

±0.

142

170 47

80±0.1

10

80±

0.1

62±0.118

(2-R4)

49 (4

8~78

)

8

4-M6

+0.

015

0

+0.015 0

ø8H7

Vertical stroke:19 upward, 1 downward

Eyepiece tube mounting surface

Nosepiecemounting surface

2-M4 depth 8

4-M6 depth 10

2-ø9 depth 3.4

dept

h 3.

4

depth 3.4

Screw depth from surface 9 mm or less

A




2-M4 depth 8

4-M6 depth 10

2-ø9 depth 3.4

A

Unit: mm

dept

h 3.

4

depth 3.4

Screw depth from surface 9 mm or less

2618

2831

25

114

80±

0.1

225

(224

~24

4)

113 16

3.5

80±

0.1

4-M

6

126.5±0.180±0.1

30848

95260

ø8

62±0.1 18

55

8+0

.015

0

+0.0010.041

ø8H7

+0.015

0

10

(2-R4)

A114

114

80±

0.1

126.5±0.180±0.1

A

2618

2831

2522

5 (2

24~

254)

113 16

3.5

30848

95260

55

80±

0.1

4-M

6

62±0.1 18

8

10

(2-R4)

104120.7

114

ø8H7

ø8 +0.0010.041

+0.0

15 0

+0.015

0

LV-FM FM ModulesLV-FM FM Modules enable mounting of a universal illuminator (LV-UEPI-N/LV-UEPI2/LV-UEPI2A or LV-EPILED) and a motorized nosepiece.

LV-FMA FM Module A (Motorized)MBD65040 / 5000 gVertical stroke 20 mmResolution 0.05 μmMax. speed 2.5 mm/sec (Resolution 0.05 μm)

LV-FMA FM Module A (Motorized)

• Only the bottom mounting surface is supported.• 20 mm vertical stroke.• Enables an enhanced system with motorized up/down mechanism when combined with the LVDIA-N DIA Base N.• External control is possible via the LV-ECON E Controller.• The standard maximum permissible weight is 3-6 kg, which is expandable to 9 kg by adding a balancer.

LV-FM FM Module (Manual)MBD65050 / 5000 g

Stroke 30 mmCoarse focusing 5.2 mm/rotationFine Focusing 0.1 mm/rotationScale 1 μm

LV-FM FM Module (Manual)

• Only the bottom mounting surface is supported.• 30 mm vertical stroke.• Creates a system with revolving up/down mechanism that has an ultra-long vertical stroke of 68 mm when combined with the LVDIA-N DIA Base N. Optimal for operations such as semiconductor probe inspections.• The standard maximum permissible weight is 3-6 kg, which is expandable to 9 kg by adding a balancer.

Unit: mm




4-M

4 d

epth

8

2-ø9 depth 3.4

depth 3.4

Scre

w de

pth

from

surfa

ce

9 m

m o

r les

sA

Unit: mm

Thick

ness

of fix

ing p

late

depth 3

.4




4-M

4 d

epth

8

2-ø9 depth 3.4

depth 3.4

Scre

w de

pth

from

surfa

ce

9 m

m o

r les

sA

Thick

ness

of fix

ing p

late

dept

h 3.4

8 9

LVDIA-N DIA Base NThis base unit is for the ECLIPSE LV series of modular microscopes. The attachment of an optional power source enables the incorporation of a transmission illuminator.

LVDIA-N DIA Base N MBD65015 / 5600 gUnit: mm

LV-ARM Basic ArmThis arm unit is for the ECLIPSE LV series of modular microscopes.

LV-ARM Basic Arm MBD65030 / 1400 g

Unit: mm

60˚

253

R170

8

90˚

1-ø6H7 +0.0120

6+

0.01

20

50+

0.2

+0.

1

25

28

3

114

80600.

5

3-ø7

90

11813248260

308

0.50.5

30

4525

ø72

Counterbore of dia.13, depth 19 Counterbores have same dimensionsin all six locations

Reference hole

Nosepiece mounting surfaceArm's reference plane

Eyepiecemountingsurface

LV-ECON E ControllerThis controller enables external control of various units from a PC and other devices.

• Enables external control of motorized universal reflection illuminators and various light sources, universal motorized revolvers, and motorized focusing modules from a PC or other devices.• Communication with PC possible via USB.• Max. 11˚ inclination when using tilt (unit's feet).

Unit: mm

LV-ECON E Controller MBF12200 / 2000 g14

165

210

95

109

55.8

11˚

114

251 100

362

245

95

A

388.5

55

ø60

ø62

80

112

114

251

178.

514

0.5~

180.

511

6

73.5

80(4

0)40

±0.

21-ø8H7 (

2-R4

)±0.015 0

8±

0.01

5

0

62 ±0.1

10

2-ø9

±0.

03

115

R125.5

Enlarged view A

Reference hole

10 11

Objectives (Magnifications) NA WD (mm) Focal length(mm)

Physical depthof focus (μm)

Weight(g)

Total magnifi-cation (M)

Actual fieldof view (ømm)

Depth offocus (μm)



Depth offocus (μm)

CFI T Plan EPI/CFI TU Plan Fluor EPI/CFI L Plan EPI

CFI60-2 / CFI60 objectives for brightfield use; Nomarski DIC is also possible with the TU type.

Brightfield Objectives

ø29

ø20

M25×0.75 M25×0.75 M25×0.75 M25×0.75 M25×0.75W

D=

23.5

WD

=17

.5

5(3

6.5)

6045˚

5(5

5.5)

45˚

60 60 60

ø29

ø17

ø29

ø9

ø24

ø30

ø8.5

5(4

2.5)

60˚

WD

=4.

5

WD

=1.

0

60

WD

=1.

0

5(5

9) 47.4

45˚

30˚

5(5

9) 47.4

45˚

30˚

ø24

ø30

ø8.5

Unit: mm

Code No. CFI60-2/CFI60 Objectives Widefield CFI eyepiecesCFI 10× (F.N. 22)

Ultra-Widefield CFI eyepiecesCFI UW10× (F.N. 25)

CFI TU Plan Fluor EPI 5×CFI TU Plan Fluor EPI 10×CFI TU Plan Fluor EPI 20×CFI TU Plan Fluor EPI 50×CFI TU Plan Fluor EPI 100×CFI T Plan EPI 1×CFI T Plan EPI 2.5×CFI L Plan EPI 2.5×ACFI L Plan EPI 40×

MUE12050MUE12100MUE12200MUE12500MUE12900MUE12010MUE12030MUE00031MUE00400

0.1500.3000.4500.8000.9000.0300.0750.0750.650

23.517.5

4.51.01.03.86.58.81.0

402010

42

200 8080

5

12.223.061.360.430.34

305.5648.8948.89

0.65

115.0120.0125.0150.0150.0165.0140.0167.5200.0

50×100×200×500×

1000×10×25×25×

400×

4.402.201.100.440.22

22.008.808.800.55

31.277.822.950.790.50

781.75125.08125.08

0.65

31.277.822.950.790.50

781.75125.08125.08

0.65

50×100×200×500×

1000×10×25×25×

400×

5.0002.5001.2500.5000.250

25.00010.00010.000

0.625

CFI TU Plan Fluor EPI 5×





CFI L Plan EPI 2.5×A

ø30

M25×0.75

ø24

ø4.9

60

ø29

WD

=8.

8

ø16

(51.

2)5 5

4.6

47.4

45˚

WD

=1.

0

M25×0.75

60

45˚

(59)

25˚

M25×0.75 M25×0.75

5

60W

D=

3.8

ø35 ø15.6

ø21.8

ø27

24.8

8.3

(56.

2)

525

(53.

5)

8

WD

=6.

5

60

60˚

CFI L Plan EPI 40×CFI T Plan EPI 1× CFI T Plan EPI 2.5×



Weight(g)



Depth offocus (μm)



Depth offocus (μm)

CFI TU Plan EPI ELWDDramatically extended working distances facilitate observations of samples having irregular surfaces. Working distances have been extended significantly.

Long Working Distance Objectives for Brightfield/Nomarski DIC Use

CFI TU Plan EPI ELWD 100×CFI TU Plan EPI ELWD 20× CFI TU Plan EPI ELWD 50×

Unit: mm



CFI TU Plan EPI ELWD 20×CFI TU Plan EPI ELWD 50×CFI TU Plan EPI ELWD 100×

MUE21200MUE21500MUE21900

0.4 0.60.8

19.011.04.5

1042

1.720.760.43

135130155

200×500×

1000×

1.100.440.22

3.501.240.61

3.501.240.61

200×500×

1000×

1.250.500.25

ø22.5

ø29

M25×0.75 M25×0.75 M25×0.75

5(4

1)

5(4

9)44

.52

45˚

30˚

60W

D=

19

WD

=11

60

WD

=4.

5

60

ø21.5

ø27

ø30

ø21.5

ø27

ø30

5(5

5.5) 51

2

M25×0.75

5(2

3)

ø29

ø22 ø24.5

ø30

60W

D=

37

60

WD

=30

45˚

5(3

0)

45˚

M25×0.75 M25×0.75 M25×0.75

60

WD

=22 W

D=

10

ø23

ø31

ø20

ø31

27.5

5(3

8) 34

60

5(5

0) 4545

˚

45˚

CFI T Plan EPI SLWD 10× CFI T Plan EPI SLWD 20× CFI T Plan EPI SLWD 50× CFI T Plan EPI SLWD 100×

CFI T Plan EPI SLWDUltra-long working distances.Particularly useful when observing the bottom of a depression in the sample.Working distances have been extended significantly.

Ultra-long Working Distance Objectives for Brightfield Use

Unit: mm





Weight(g)

CFI T Plan EPI SLWD 10×CFI T Plan EPI SLWD 20×CFI T Plan EPI SLWD 50×CFI T Plan EPI SLWD 100×

MUE31100MUE31200MUE31500MUE31900

0.2 0.30.40.6

37302210

2010

42

6.883.061.720.76

80115120135

100×200×500×

1000×

2.201.100.440.22

14.025.442.431.00

14.025.442.431.00

100×200×500×

1000×

2.501.250.500.25



Depth offocus (μm)



Depth offocus (μm)

LU Nosepiece Adapter M32-25Adapter for attaching an EPI Plan objective to a brightfield nosepiece or universal nosepiece.

54.

5

(9.5

)

M25×0.75

M32×0.75

ø30.8

ø35Unit: mm

LU Nosepiece Adapter M32-25MXA23017 / 25 g

12 13

45˚

60W

D=

18

ø27.6

ø36

M32×0.75

5(4

2)

M32×0.75

ø25

ø36

45˚

5(4

5)

60W

D=

15

M32×0.75

45˚

ø26.2

ø36

60W

D=

4.5

5(5

5.5)

M32×0.75

35˚

ø28.4

ø40

60W

D=

1

5(5

9)

M32×0.75

ø28.4

ø40

60W

D=

1

35˚

5(5

9)

CFI TU Plan FluorBD 5×





CFI TU Plan Fluor BDPerfect for brightfield, darkfield, and Nomarski DIC observations.

Brightfield/Darkfield/Nomarski DIC Objectives





Weight(g)

CFI TU Plan Fluor BD 5×CFI TU Plan Fluor BD 10×CFI TU Plan Fluor BD 20×CFI TU Plan Fluor BD 50×CFI TU Plan Fluor BD 100×

MUE42050MUE42100MUE42200MUE42500MUE42900

0.150.300.450.800.90

18.015.0

4.51.01.0

402010

42

12.223.061.360.430.34

150140185200200

50×100×200×500×

1000×

4.402.201.100.440.22

31.277.822.950.790.50

31.277.822.950.790.50

50×100×200×500×

1000×

5.002.501.250.500.25



Depth offocus (μm)



Depth offocus (μm)

Unit: mm



Weight(g)



Depth offocus (μm)



Depth offocus (μm)

CFI TU Plan BD ELWDExtended working distances facilitate observations of samples having irregular surfaces.

Long Working Distance Objectives for Brightfield/Darkfield/Nomarski DIC Use

CFI TU Plan EPI ELWD 100×CFI TU Plan EPI ELWD 20× CFI TU Plan EPI ELWD 50×

Unit: mm



CFI TU Plan BD ELWD 20×CFI TU Plan BD ELWD 50×CFI TU Plan BD ELWD 100×

MUE61200MUE61500MUE61900

0.4 0.60.8

19.011.04.5

1042

1.720.760.43

155180205

200×500×

1000×

1.100.440.22

3.501.240.61

3.501.240.61

200×500×

1000×

1.250.500.25

ø33

ø40

ø34

ø40

ø32

ø36

M32×0.75M32×0.75 M32×0.75

60

WD

=11

60W

D=

4.5

5(5

5.5)

30˚

45˚

5(4

9)

45˚

5(4

1)

60

WD

=19

CFI TU Plan Apo EPI/CFI TU Plan Apo BD/CFI LU Plan Apo EPI/CFI LU Plan Apo BD

Apochromat-type objectives virtually eliminate chromatic aberration and feature excellent resolution. Nomarski DIC is also possible with the TU/LU type.

High-Resolution Objectives for Brightfield or for Darkfield/Brightfield

5(5

8.58

)

WD

= 0

.51

WD

= 0

.42

45˚

45˚

20˚

60

47.5

(59.

7)5

54.5

WD

= 0

.3

60 60

53.7

(58.

49)

5

ø30

ø8

ø22

ø24

ø30

ø38

M25×0.75

M32×0.75

ø30

ø40

M25×0.75

M32×0.75 ø39

M32×0.75

ø39

M32×0.75

ø26

ø36.8

ø26

ø36.8

ø7.6

60W

D=

2

(58)

540

˚

ø30

ø38

M32×0.75

60W

D=

2

545

40˚

60W

D=

1.5

(58.

5)

53

5

(58)

5

40˚

30˚

30˚

ø13

ø30

ø11

ø30

ø10ø25

ø31

60W

D=

2

60W

D=

1.5

60W

D=

2

M25×0.75 M25×0.75

20˚

51(5

8)5

47.4

(58.

5)5

45˚



Weight(g)



Depth offocus (μm)



Depth offocus (μm)

Unit: mm



CFI TU Plan Apo EPI 50×CFI TU Plan Apo EPI 100×CFI TU Plan Apo EPI 150×CFI TU Plan Apo BD 50×CFI TU Plan Apo BD 100×CFI TU Plan Apo BD 150×CFI LU Plan Apo EPI 150×ACFI LU Plan Apo BD 100×CFI LU Plan Apo BD 150×A

MUC11500MUC11900MUC11150MUC41500MUC41900MUC41150MUC10151MUC40900*MUC50151*

0.800.900.900.800.900.900.950.900.90

2.002.001.502.002.001.500.300.510.42

4.002.001.334.002.001.331.332.001.33

0.430.340.340.430.340.340.300.340.34

150.0175.0160.0190.0220.0220.0217.5325.0305.0

500×1000×1500×

500×1000×1500×1500×1000×1500×

0.440.220.150.440.220.150.150.220.15

0.790.500.450.790.500.450.400.500.45

0.790.500.450.790.500.450.400.500.45

500×1000×1500×

500×1000×1500×1500×1000×1500×

0.500.250.170.500.250.170.170.250.17

CFI TU Plan Apo EPI 50×



CFI TU Plan Apo BD 50×



CFI LU Plan Apo EPI 150×A

CFI LU Plan Apo BD 100×*

CFI LU Plan Apo BD 150×A*

* This product have been discontinued, and only available from stock.

14 15

Universal Epi-Illuminator LV-UEPI-NThis universal illuminator supports the CFI60-2 / CFI60 optical system.

Unit: mmUniversal Epi-Illuminator LV-UEPI-N/MBE60201Field diaphragmAperture diaphragmIlluminationFilter

Weight

Centerable and synchronized with B/D changeoverSynchronized with B/D changeover12V-50W high-intensity halogen lamp illuminator4x ø25 mm filters (NCB11, ND4, ND16), a polarizer/analyzer, ESD supported1,750 g

ItemsCode No. Weight (g)LV-LL LED LamphouseLV-LH50PC Precentered LamphouseYM-NCB ø25 mm Filter Slider NCB11YM-ND ø25 mm Filter Slider ND4/ND16LV-HL50W 12V50W Halogen LampLV-PO PolarizerL-AN AnaryzerL-DIC DIC SliderYM-GIF ø25 mm GIF FilterYM-EPI 3-3PIN Extension Cable

600800

3136

76014

12025

100

MBE65700MBE65275MBN66750MBN66760MXA23045MBN66923MBN66922MBP60170MBN66730MXA29002

• Enables brightfield, darkfield, simple polarizing, and DIC observation.• When observation is switched from brightfield to darkfield, the field and aperture diaphragms automatically open.• When observation is switched back from darkfield to brightfield, the field and aperture diaphragms return to their original positions.

CFI L Plan EPI CRThe CFI L Plan EPI CR series employs a correction system to cope with the thinner coverglass for FDP and the increased integration and mounting density of devices.

Objectives for LCD Inspection

CFI L Plan EPI 20×CR

1.8

6.4

2213

14.3

2.5

6.2

2213

14.3

(0.7

)

3.1

36.

515

.513

14.5

(0.5

)

21.1

511

.710

. 8(0

.5)

(0.7

)(1

6)°

(16)

°

(7)°11°

45°

26°

25°30

°

ø35.5ø34

ø29.5ø28.5

ø14.5ø19.8ø24.8ø27

ø32.5

ø11.5ø19.8ø24.8ø27

ø32.5

ø13ø18.8ø23.3ø26

ø31.5

ø20

ø31.5

60.3

558

.2W

D=

1.2

558

.7W

D=

1.1

556

.1W

D=

3.5

549

.1W

D=

10.5

0.9

(CG

)

60.1

0.3

(CG

)

60.2

0.6

(CG

)60.2

0.6

(CG

)

6.5

45°45

°

(45)

°

6.5

M25×0.75

ø33.5ø32ø29ø27

M25×0.75

ø35.5

ø34

ø29.5

M25×0.75

ø35

ø33.5

ø29.5

M25×0.75

CFI L Plan EPI 50×CR CFI L Plan EPI 100×CRA CFI L Plan EPI 100×CRB





Weight(g)

CFI L Plan EPI 20×CRCFI L Plan EPI 50×CRCFI L Plan EPI 100×CRACFI L Plan EPI 100×CRB

MUE35200MUE35500MUE35900MUE35910

0.450.700.850.85

10.9~10.03.9~3.0

1.2~0.851.3~0.95

10.004.002.002.00

1.360.560.380.38

240240260260

200×500×

1000×1000×

1.100.440.220.22

2.950.970.550.55

2.950.970.550.55

200×500×

1000×1000×

1.250.500.250.25



Depth offocus (μm)



Depth offocus (μm)

Unit: mm

Centerable and synchronized with B/D changeover

12V-50W high-intensity halogen lamp illuminator

4x ø25 mm filters (NCB11, ND4, ND16), 2x Fluorescence filter cubes, polarizer/analyzer, λ plate, excitation light balancer, ESD supported

Universal Epi-Illuminator LV-UEPI2/LV-UEPI2AThis universal illuminator supports the CFI60-2 / CFI60 optical system.

LV-UEPI2

LV-UEPI2A

ItemsCode No. Weight (g)LV-LH50PC Precentered LamphouseYM-NCB ø25 mm Filter Slider NCB11YM-ND ø25 mm Filter Slider ND4/ND16LV-HL50W 12V-50W Halogen LampLV-PO PolarizerLV-FLAN FL AnalyzerLV-LP λ PlateC-FL UV-2A

8003136

760201540

MBE65275MBN66750MBN66760MXA23045MBN66923MBN66925MBN66924MBE41201

ItemsCode No. Weight (g)LV-LL LED LamphouseC-FL V-2A Filter CubeC-FL BV-2A Filter CubeC-FL B-2A Filter CubeC-FL G-2A Filter CubeLV-PAB Polarizer/Analyzer CubeYM-GIF ø25 mm GIF FilterYM-EPI 3-3PIN Extension CableL-DIC DIC Slider

600404040404525

100120

MBE65700MBE42101MBE43101MBE44501MBE45501MBE64100MBN66730MXA29002MBP60170

Universal Epi-Illuminator LV-UEPI2/MBE60300 Motorized Universal Epi-Illuminator LV-UEPI2A/MBE60310

Field diaphragmAperture diaphragm

Illumination

FiltersWeight

LV-UEPI2 LV-UEPI2A

Centerable and synchronized with B/D changeover

2,400 g

Centerable and synchronized with motorized brightfield/darkfield changeover (Automatic optimization according to objective lens)

Motorized operation/control possible for 12V-50W high-intensity halogen lamp illuminator and illumination changeover turret

2,570 g

6125

105

130

95

336435

295

2606013

Configured with LV-LH50PC Precentered Lamphouse

Cable length: 220 mm

Configured with LV-LL LED Lamphouse

��

��

��

��

��

��


*Cable length: measured from lamphouse to power connector

45˚

370 25.5510

110

95

ø21

ø51

1665

579

.581

.3

105

ø54

40

113.332

400

ø40

370 25.5

3254

23

45˚

510

110

79.5

68

100 400

95

16

ø21

ø51

105

655

Unit: mm

Unit: mmConfigured with LV-LH50PC Precentered Lamphouse

Configured with LV-LH50PC Precentered LamphouseConfigured with LV-LL LED Lamphouse

��

��

��

��

��

��

��

��

��

��

��

��

��

��

��

��

��

��

��

��

��

��

��

��

��

��

Configured with LV-LL LED Lamphouse





*Cable length: measured from lamphouse to power connector

• Equipped with advanced optics suitable for a wide variety of observation methods, ranging from brightfield, darkfield, simple polarizing, sharp polarizing, and DIC, to epi-Fluorescence.• Automatically maintains optimal illumination conditions for the field/aperture diaphragms, shutter, and UV cut filters.

• Accurate reproduction of illumination conditions enabled by the motorization of the changeover turret/aperture diaphragm and the control of the voltage.• Aperture diaphragm is automatically optimized with the objective lens and illumination technique. Can be changed manually depending on sample and purpose.• External control also possible from a PC when combined with the LV-ECON E Controller.

16 17

TI-PS100W/A Power SupplyThis transformer is for the LV-UEPI-N, LV-UEPI2, and LV-UEPI2A universal reflection illuminators.

ItemsCode No. Weight (g)Power Cord BJYM-EPI 3-3PIN Extension CableTI-100WRC 100W Remote Cable

160100100

MBF11250MXA29002MEF51001

TI-PS100W/A Power Supply MEF52251 / 2000 g

LV-EPILED White LED Illuminator MBE60500 / 1500 g

300

142

70

317

ItemsCode No. Weight (g)Power Cord BJ3-AC AC AdapterTI-100WRC 100W Remote Cable

160200100

MBF11250MQF52056MEF51001

LV-EPILED White LED IlluminatorThis LED illuminator supports the CFI60-2 / CFI60 optical system.

• Light-weight, compact white LED illuminator developed specially for brightfield observation.• Operated via an attached power source controller.• Can also be externally controlled via the LV-ECON E controller.• Includes ND4 and ND16 filters.• Standard cable length : 2.8 m 266.7

207 25 6.358

ø8.8

5 8665

.5

9450

5

22.5

ø86

ø51.2 Unit: mm

Unit: mm

Revolving Nosepieces Eight types of nosepieces – either manual or motorized – are available to choose from.

15

(182)69

ø127ø43.5

15˚

149

93.755.7

(89)

4888

15

(182)69

ø127ø43.5

15˚

149

93.755.7

(89)

4888

ø127

15 27140

149.3

93.755.7

15˚

8950

.6 48

30.9

24.8

1281.3

74.9

105.8

ø106

3253 51

.1

48

23˚

ø12715 27

140

149.3

93.755.7

15˚

8950

.6

48

15

(182)69

ø127ø43.5

15˚

149

93.755.7

(89)

4888

ø112

53.6 48

20˚ (103)2616

8441125

ø43.5

88

15˚

(89)

(182)

53

ø127

70.5

147.1

91.755.7

110

28

10˚48

111

C-N6 ESD Sextuple Nosepiece MBP71316 / 450 g

LV-NBD5 BD Quintuple Nosepiece ESDMBP60125 / 580 g

LV-NU5 Universal Quintuple Nosepiece ESDMBP60115 / 580 g

Cable length:160mm from fixed portion

Cable length:160mm from fixed portion

LV-NU5A Motorized Universal Quintuple Nosepiece ESDMBP60105 / 800 g

LV-NU5AC Motorized Universal Quintuple NosepieceMBP60106 / 800 g

LV-NU5AI Motorized Universal Quintuple NosepieceMBP60107 / 890 g

LV-NU5I Intellijent Universal Quintuple Nosepiece ESD MBP60108 / 600 g

LV-NCNT-N Motorized Nosepiece ControllerMBF65331 / 400 g(Standard cable length : 1.5 m)

Unit: mmItems Weight (g)

Power Cord BJ 3-AC AC Adapter

160200

P-N Centering Quintuple Nosepiece MDP44205 / 600 g

116.8

100.5 36

100

ø16

Controller

Code No.MBF11250MQF52056

18 19

C0.5

ø28

ø25

45

57

825

2.5

2 1.4

45˚

ø13

ø18.8

ø27

WD

=0.

54

ø21.5

ø8.5

30̊

60˚

45˚

ø26

ø24

ø26

ø24

45

57

816

.74.

5

ø16

ø25 WD

=8.

8

45

57

411

.5

ø25W

D=

22.5

ø25

ø22

1.5

13.5

87

5.3

C0.5

45˚ 45

33.8

45˚

ø15

ø22

ø25

57

816

.560

˚

10.4

46.8

45

WD

=3.

1

57

825

60˚

45˚

20˚

45

2.5

ø14

ø5.4

ø18.8

ø27

ø21.5

ø16.8

2.2

49.7

C0.5

WD

=16

.5W

D=

0.3

ø26

ø24

ø26

ø24

ø28

ø25



Weight(g)



Depth offocus (μm)



Depth offocus (μm)

CF IC EPI PlanCF&IC objectives for brightfield use.

Brightfield Objectives

Code No. CF IC Objectives Widefield CF eyepiecesCFWN 10× (F.N. 20)


CF IC EPI Plan 2.5×ACF IC EPI Plan 5×ACF IC EPI Plan 10×ACF IC EPI Plan 20×ACF IC EPI Plan 50×ACF IC EPI Plan 100×A

MUL00031MUL00051MUL00101MUL00201MUL00501MUL00901

0.0750.1300.3000.4600.8000.950

8.8022.5016.50

3.100.540.30

80.0040.0020.0010.00

4.002.00

48.8916.27

3.061.300.430.30

1086590

120145140

25×50×

100×200×500×

1000×

8.004.002.001.000.400.20

125.0838.25

7.822.850.790.46

125.0838.25

7.822.850.790.46

25×50×

100×200×500×

1000×

10.005.002.501.250.500.25

Unit: mm

CF IC EPI Plan 2.5×A CF IC EPI Plan 5×A CF IC EPI Plan 10×A

CF IC EPI Plan 20×A CF IC EPI Plan 50×A CF IC EPI Plan 100×A

CF&IC Optical SystemCF IC EPI Plan ELWDExtended working distances facilitate observations of samples with irregular surfaces.

Long Working Distance Objectives for Brightfield Use



Weight(g)



Depth offocus (μm)



Depth offocus (μm)



CF IC EPI Plan ELWD 20×ACF IC EPI Plan ELWD 50×ACF IC EPI Plan ELWD 100×A

MUL03201MUL03501MUL03901

0.400.550.80

11.08.72.0

1042

1.720.910.43

95105120

200×500×

1000×

1.00.40.2

3.501.430.61

3.501.430.61

200×500×

1000×

1.250.500.25

Unit: mm

1.3

45

57

815

ø25

WD

=11

ø17

4

57

818

2

45

WD

=8.

7

ø25

ø22

ø17

57

823

.52.

52

45

WD

=2.

0

ø25

ø19

ø14

12

30˚

45˚

ø26

ø24

ø26

ø24

ø26

ø24

45˚

CF IC EPI Plan ELWD 20×A CF IC EPI Plan ELWD 50×A CF IC EPI Plan ELWD 100×A

CF IC EPI Plan SLWDUltra-long working distances.Particularly useful when observing the bottom of a depression in the sample.

Ultra-long Working Distance Objectives for Brightfield Use



Weight(g)



Depth offocus (μm)



Depth offocus (μm)



CF IC EPI Plan SLWD 10×ACF IC EPI Plan SLWD 20×ACF IC EPI Plan SLWD 50×ACF IC EPI Plan SLWD 100×A

MUL04101MUL04201MUL04501MUL04901

0.210.350.450.73

20.320.513.8

4.7

2010

42

6.242.241.360.52

8580

110135

100×200×500×

1000×

2.01.00.40.2

13.044.291.990.71

13.044.291.990.71

100×200×500×

1000×

2.501.250.500.25

Unit: mm

ø26ø24

45

5.3

78

223.

3

ø24ø27

WD

=4.

7

ø14.2

24˚

57

413

.730

˚

ø21ø25

WD

=20

.3

45

57

412

1.3

ø22.6ø24ø27

45˚

C0.5

WD

=20

.5

45

C0.5

ø22.6ø24

ø25.6ø27

57

814

.71.

3

C0.7C0.7

WD

=13

.8

45

C0.5

ø28ø25

ø28ø25

ø28ø25

CF IC EPI Plan SLWD 10×A CF IC EPI Plan SLWD 20×A CF IC EPI Plan SLWD 50×A CF IC EPI Plan SLWD 100×A

ø20.32,1inchP=36

ø20.32,1inchP=36

ø20.32,1inchP=36

ø20.32,1inchP=36

ø20.32,1inchP=36

ø20.32,1inchP=36

ø20.32,1inchP=36

ø20.32,1inchP=36

ø20.32,1inchP=36

ø20.32,1inchP=36

ø20.32,1inchP=36

ø20.32,1inchP=36

ø20.32,1inchP=36

20 21

CF IC EPI Plan ApoApochromat-type objectives for brightfield use virtually eliminate chromatic aberration and feature excellent resolution.

High-Resolution Brightfield Objectives



Weight(g)



Depth offocus (μm)



Depth offocus (μm)



CF IC EPI Plan Apo 50×ACF IC EPI Plan Apo 100×ACF IC EPI Plan Apo 150×B

MUT10051MUT10101MUT10153

0.950.950.95

0.350.320.20

4.002.001.33

0.30.30.3

170170160

500×1000×1500×

0.400.200.13

0.610.460.40

0.610.460.40

500×1000×1500×

0.500.250.17

Unit: mm

45

ø25ø30

ø16

ø20.8ø29

49.6

57

825

2.5

2.15

WD

=0.

35

ø25ø26.7ø29

45

ø13

ø18.8ø28

C1.5

57

825

4.8

1.7

60˚

16˚

WD

=0.

32

3

ø25ø28

45

ø13ø18.8ø27

C1.5

57

825

4.8

1.8

60˚

16˚

WD

=0.

2

3

1.1 ø5.4

CF IC EPI Plan Apo 50×A CF IC EPI Plan Apo 100×A CF IC EPI Plan Apo 150×B

C-OA 15 mm AdapterAn adapter for attaching CF & IC objectives to the C-N Sextuple Nosepiece (page 17) that supports the CFI optical system.

Unit: mm

14.7

CO.5

ø23 D20.32 1/P=36

ø30

M25×0.754.

50.

3

60˚

C-OA 15mm AdapterMXA20750 / 45 g

ø20.32,1inchP=36

ø20.32,1inchP=36

ø20.32,1inchP=36

0.5

ø10

ø17.5

ø22ø26

ø25ø28

50˚

5.1

45˚

22.5

46

5.3

WD

=7.

4

45

ø25

ø28

ø26

ø21.6

ø10

45W

D=

4.7

45.3

57

523

5.3

40˚

(47.

9)

45

ø13.5

ø15.5

ø27.8ø31

0.4

3.5

(17.

4)11

.55

55.

5

ø27

ø33

ø35

20°

60˚

WD

=2.

0

WD

=3.

445

(16.

4)5.

155

(46.

6)

515

35˚

45˚45˚

ø14

ø27

ø30

ø26

ø28

ø34

CF IC EPI Plan DIDouble beam interference objectives that have large numerical aperture, long working distance and high optical performance.

Double Beam Interference Objectives



Weight(g)



Depth offocus (μm)



Depth offocus (μm)



CF IC EPI Plan DI 10×ACF IC EPI Plan DI 20×ACF IC EPI Plan DI 50×ACF IC EPI Plan DI 100×

MUL40101MUL40201MUL40501MUL40900

0.300.400.550.70

7.44.73.42.2

19.789.974.002.00

3.061.720.900.56

125130200200

100×200×500×

1000×

2.001.000.400.20

3.041.710.900.56

3.041.710.900.56

100×200×500×

1000×

2.501.250.500.25

Unit: mm

CF IC EPI Plan DI 10×A CF IC EPI Plan DI 20×A CF IC EPI Plan DI 50×A CF IC EPI Plan DI 100×

CF IC EPI Plan TI Interference Objectives



Weight(g)



Depth offocus (μm)



Depth offocus (μm)



CF IC EPI Plan TI 2.5×A*CF IC EPI Plan TI 5×A

MUL42031MUL42051

0.0750.13

10.39.3

8040

48.516.2

440280

25×50×

8.004.00

48.616.2 16.250× 5.00

Unit: mm

* 2.5×A supported up to a field number of ø22.

5.8

WD

=10

.3

ø44

ø31

87

3839

.620

10.2

1931

.1

145.

8

6.9

0.6

85˚

ø19

18.4

16 49.9

13.5

3.5

ø45

ø38

51.1

87

20.8

2115

26.6

6.8

6.9

5.8

ø44

60˚

ø39

0.8

4

45˚

ø31

M27×0.75

80.1

22.62013

4935

.4

11

5

24.5

8.5

25.1

ø29

WD

=9.

3

CF IC EPI Plan TI 2.5×A CF IC EPI Plan TI 5×A

(Standard with roundness)

Shutter closed(brightfield observation)

ø20.32,1inchP=36

ø20.32,1inchP=36

ø20.32,1inchP=36

ø20.32,1inchP=36

ø20.32,1inchP=36

CM-70L

CM-30A2CM-30L2

CM-10ACM-10L

CM-5A

CM-20ACM-20L(0.5×)

(1×)

(1×)

(0.4×/1×)

22 23

17.5

26

17.5

26

305

2-M3 2-M3

6540

305

7040

ø37

ø40

220.

5

1-M3

42.3

ø23

ø7

ø8

22C

M-1

0A:4

5C

M-1

0L:6

0

ø27 ø7

2-M3

1-M3

2-M3

1-M3

2-M3

306

1-M3

5330 4016

5330

17.5

2610

3.3

42.3

ø23

22

CM

-10A

:45

CM

-10L

:60

ø27

ø40

72

ø31

305

1540

5

2040

ø37

ø38

121.

5

42.3

ø23

22

CM

-10A

:45

CM

-10L

:60

ø27

305

4020

ø40

ø37

ø38

0.4× 1×

73

60

74

42.3

2210

2.2

ø7

ø23

ø27

ø54

156.

117

.526

4015

305

3-M3

ø38

ø40ø30

2-M3

1-M3

ø21

ø826.3

CM-Series Compact Reflected MicroscopesUltra-compact reflected microscopes designed for integration into production lines to provide on-monitor observations.

• Ultra-compact and lightweight.• C-mount video cameras having 1/4 to 1-inch CCDs are attachable as standard.• The Koehler Illumination Optical System offers a uniformly bright viewfield. • Tread holes ideally located on the surface of the microscope facilitate attachment of virious auxiliary equipment.

*1 Use a objective for measuring microscopes on the CM-5A and a CF IC EPI Plan lens on other A series units. In addition, use an EPI Plan lens from the CFI60-2 / CFI60 series on L series units.

TV monitor

C-mount

Objectives for measuring

microscopes*1CF IC EPI Plan*1 CFI60-2 / CFI60

EPI Plan*1

• Basic model with a tube lens focal length of f/200 mm (1×)

CM-10A/CM-10L

• Compact model based on the CM-10 that features a short tube length.

CM-30A2/CM-30L2

Camera mountTube lens focal lengthTube lens magnificationMagnification on CCD surfaceCompatible objectives*Illumination optical systemAttachment surfacesDimensions (W×D×H); Weight (Approx.)

CM-10A/CM-10L

* On the above-mentioned A series and L series, use CF IC EPI Plan and CFI60-2 / CFI60 series EPI Plan Objectives, respectively.

• Features a tube shorter than the CM-10, by setting the tube lens focal length at f/100 mm (0.5×)

CM-20A/CM-20L

• Enables simultaneous observation at different imaging magnifications (1×/0.4×). For CFI60-2 / CFI60 EPI Plan.

CM-70L

C-mountfixingscrew

C-mount

(installation screw)

4-M4depth 5

8-M4 depth 5(installation screw)(same position on the opposite side)

Image formation plane

C-mount port

(Light guide adapter fixing screw)

(Light guide fixing screw)

(Light guide installation hole)

Objective port

(exchange type)

ø8 Light guideadapter

Sample side

C-mountfixing screw

C-mount


4-M4depth 5



C-mount port




Objective port

(exchange type)


Sample side

C-mountfixing screw

C-mount

4-M4depth 5


C-mount port




Objective port

(exchange type)


Sample side

C-mountfixing screw

4-M4depth 5


C-mount port




Objective port

ø8 light guide adapter (exchange type)

Sample side

(installation screw)(same position on the opposite side)

(installation screw)(same position on the opposite side)


4-M4depth 5

Manufactured by: Nikon Engineering Co.,Ltd.

CM-20A/CM-20L CM-30A2/CM-30L2 CM-70L

3

200 mm1×

Same as objective magnification

40 × 40 × 224.5 mm: 440 g

100 mm0.5×

Objective magnification × 0.5

40 × 40 × 125.5 mm: 290 g

200 mm1×

Same as objective magnification

440 × 40 × 107.3 mm: 400 g

80/200 mm0.4×/1×

Same as objective magnification and 0.4×

340 × 117 × 156.1 mm: 690 g

C-mount

A series: CF IC EPI Plan objectives / L series: CFI60-2 / CFI60 EPI Plan objectivesKoehler illumination (high-quality telecentric illumination)

Unit: mm

Image formation planeC-mount

(Light guide installation hole)ø8 Light guide

Adapter

24 25

C-mount

Measuring microscope objectivesKoehler illumination (high-quality telecentric illumination)

340 × 40 × 186.5 mm ; 410 g

ø34 ø34

ø43

ø47

ø38

ø47 ø47

ø43 ø43 ø43

7984

.6

126

M26×0.75

M26×0.75 M26×0.75 M26×0.75

M26×0.75 M26×0.75 M26×0.75

6483

.7

126

48.0

99.6

126

75.5

81

126

20.3

113.

2

126

15. 1

118.

4

126

4.1

129.

4

126

ø34

ø35.5

ø38

ø38

Objectives for Measuring Microscopes

Focal length (mm)NAWD (mm)Depth of focus (μm)Parfocal distance (mm)Weight (g)

1×158.20.0379

322

120

3×A66.20.0975.536

150

5×A42.30.136417

150

10×A20.20.2487

126200

20×A10.98

0.420.31.8

650

50×A4.3

0.5515.1

1

600

100×2.150.754.10.5

550

1× 3×A 5×A 10×A

20×A 50×A 100×

Camera mountTube lens focal lengthCompatible objectivesIllumination optical systemAttachment surfacesDimensions (W×D×H); Weight (Approx.)

CM-5A

Manufactured by: Nikon Engineering Co.,Ltd.

CM-5A

305

2-M3

6640

305

7140

ø37

ø38

ø28

ø34

89.2

ø23

182.

550

126

WD

1-M3

17.5

26

2-M3

ø7(ø8)

ø40

C-mount

C-mountfixingscrew


4-M4depth 5

8-M4 depth 5(installation screw)(same positionon the opposite side)


C-mount port




Objective port

(exchange type)

Light guideadapter

Sample side

Measuring microscope objectives

Unit: mm

Unit: mm

2nd Objective Lens UnitsUsed to focus parallel light beams coming through CFI60-2 / CFI60 objectives and CF&IC objectives onto the image plane.

Built-in Type 2nd Objective Lens UnitMXA20696 / 70 g

Unit: mm

• Compatible with CFI60-2, CFI60 and CF&IC infinity objectives.• Focal length: f/200 mm.• To obtain the optimal objective performance, keep the distance between the lens unit and the objective's shoulder within 100-200 mm as shown in the diagram at right.

Built-in Type 2nd Objective Lens Unit

• Image plane magnification: 0.5×; Focal length: f/100 mm.• Image plane magnification: 1×; Focal length: f/200 mm.• With a field number of 11 mm, this lens unit can be used with CCD cameras smaller than 2/3-inch types.• Distance between the lens unit and the objective's shoulder: 60-160 mm (110 mm optimum).• Compatible with Universal Epi-Illuminators (LV-UEPI-N, LV-UEPI2, LV-UEPI2A, and LV-EPILED).

TV-Use 2nd Objective Lens Unit 0.5×MXA20714 / 100 g

TV Relay Unit 1×MXK60147 / 500 g

Unit: mm

100

~ 2

0021

.85

151.

2

ø36 f7

29

-0.025-0.050

C0.5

M38×0.5

Image plane

Objective point

ø38

71

86.5 10

0

ø53

ø68

ø38

ø53

ø68

175.

716

2.2

146.

75

Image plane Image planeMQD42000C-mountTV Adapter A(optional)

MQD42000C-mountTV Adapter A(optional)

TV-Use 2nd Objective Lens Unit 0.5×/TV Relay Unit 1×

26 27

FiltersA color balance compensation filter and neutral density filter are available.

Unit: mm

ItemsCode No. Weight (g)YM-NCB ø25 mm Filter Slider NCB11YM-ND ø25mm Filter Slider ND4/ND16YM-GIF ø25 mm GIF Filter

313625

MBN66750MBN66760MBN66730

3.5

16020 20

200

88

32

ø25 mm Filter Slider

GIF FilterAllows only a green spectrum near the 546 nm wavelength to pass through.Effective for increasing the contrast of monochrome photographs and black-and-white TV images.

NCB11 FilterThis compensation filter maximizes the color reproduction of daylight-type color film, when the halogen lamp voltage of the brightfield light source is set to 9 V.

0.0

100.0%

400.0 500.0 600.0 700.0 nm0.0

100.0%

400.0 500.0 600.0 700.0 nm

ND FiltersThis filter is for adjusting brightness during observation and photography by lowering the quantity of light without changing conditions, such as illumination light and spectral properties (color balance).

192.7 65.5

20˚

96.8

EP

137.3

ø60

ø50

ø5160 67

118

103

92.5

8254

.55

59

20˚

138.3

ø51202.5

73.7

EP

264.6 66 31

ø52

104

98.5

75

74

198

EP

79

25˚

EP

25˚8310

0

204

ø59

68

131

6746

.5

91

ø30

ø43

204

74

247

ø59

100

83

EP

30˚

25˚

10˚

190.5 (174.5~231.4) 42.8

82.8

10 (0~40)

169.6 (159.6~199.6)10 mm0 mm

40 mm

EP

25˚(10˚~30˚)

157.

3 (9

2.6~

192.

3)

Eyepiece Tubes/Double Port/Straight TubesThese lens tubes can be combined with illuminators such as the LV-UEPI, LV-UEPI2, LV-UEPI2A and LV-EPILED. The trinocular eyepiece tube supports both ultrawide and wide fields of view with a change of the eyepiece lens.

Sleeve diameterø (mm)

Unit: mmEP: Eyepoint

ItemsCode No. Weight (g)LV-TI3 Trinocular Tube ESDLV-TT2 Tilting Trinocular TubeC-TF Trinocular Tube FC-TT Trinocular Tube TC-TE2 Ergonomic Binocular TubeC-TB Binocular Tube

18002580185022602100

950

MBB63425MBB61000MBB93106MBB93115MBB93800MBB92106

Interpupillary distanceTypeSiedentopfSiedentopfSiedentopfSiedentopfSiedentopfSiedentopf

Image typeErectErect

InvertedInvertedInvertedInverted

Field number22/2522/2522/2522/25

2222

Tube's tilt angle Beam split ratio (observation:photo)

20˚

10˚~ 30˚

25˚

25˚

10˚~ 30˚

25˚

100:0/0:100100:0/20:80100:0/0:100

100:0/20:80/0:100

50~75 mm50~75 mm50~75 mm50~75 mm50~75 mm50~75 mm

C-TEP2 DSC Port For ErgonomicY-IDP Double PortY-IDP Double Port 0/100

35013001300

MBB96800MBB74100MBB74105

Specially for C-TE Binocular Ergonomic Tube, Equipment magnification: 0.7×, Beamsplit ratio (binocular: port) 50:50/100:0Equipment magnification: 1×, Beamsplit ratio (observation: photo) 55:45/100:0Equipment magnification: 1×, Beamsplit ratio (observation: photo) 100:0/0:100

Focal distance of tube in the infinity corrected optics: 200 mm, Equipment magnification:1×, Diameter of the circular dovetail mount to the body: 51 mm.

* For attaching TV/video equipment to eyepiece tubes or Double Port, refer to the system diagram on page 3.* CFI UW 10× and CFI UW 10×M are not suitable for use.

Straight Tubes

Y-T TV TubeMBB73525 / 250g

Used to change the format of the straight tube of a trinocular tube.

T-BPA Photo AdapterMED53130 / 190g

LV-TV Tube AdapterMBB63435 / 100g

Y-TV55 TV Tube 0.55xMBB73550 / 300g

48.

5

ø51

ø38ø59

76.5

ø50

ø38ø52

70.7

96.7

26

55

ø59ø50

ø38

42.5

ø40

1330

ø52

ø50

Double PortInstalled between the epi-illuminator and the trinocular tube, the double port enables simultaneous attachment of CCTV and 35 mm cameras. 25

5

ø52

ø51

45

57.522

50.5 175

285.5

100

13.5

Illuminators

LV-TI3 Trinocular Tube ESD LV-TT2 Tilting Trinocular Tube C-TF Trinocular Tube

C-mount


C-TE2 Ergonomic Binocular Tube

C-TB Binocular Tube

C-TEP2 DSC Port For Ergonomic

28 29

EyepiecesThese eyepieces have a 30 mm sleeve diameter and maximize the performance of objective lenses.



Items (field number)Code No. Weight (g)LV-10×ESD (22)CFI 10× (22)CFI 10×CM (22) with crosshair reticle

707577

MBJ62105MAK10100MAK12105

Items (field number)Code No. Weight (g)CFI 12.5× (16)CFI 15× (14.5)CFI UW10× (25)

6348

100

MAK10120MAK10150MAK30105

CFWN 10× (20)CFWN 15× (14)CFWN 10×M (20) with Photomask

EyepiecesThese eyepieces have a 23.2 mm sleeve diameter and maximize the performance of objective lenses.



Items (field number)Code No. Weight (g)505050

MBJ20105MBJ20150MBJ21100

Items (field number)Code No. Weight (g)CFWN 10×CM (20) with crosshair reticleAdapter for CFN Filar Micrometer

5040

MBJ22100MXA23010

ø341730

22.5

ø30

ø39

EP

ø402031

22

ø30

ø39

EP

ø341732

22.5

ø30

ø39

EP

ø341731

22.5

ø30

ø39

EP

15.1

22.5

22.5

ø35

EP

ø30

ø38.8

15.3

17.5

22.5

ø35

EP

ø30

ø38.8

LV-10×ESD

CFI 10×CM

CFI UW10×

CFI 10×

CFI 12.5×

CFI 15×

CFI 10×CM eyepiece reticle

10 mm (in 100 um increment)

(sta

ndar

d)

(sta

ndar

d)

ø32ø23.2

ø35

22.5

31.2

17

EP

EP

EP EP

ø32ø23.2

ø35

22.5

18.1

14.5

ø32ø23.2

ø35

22.5

31.5

17

ø32ø23.2

ø35

22.5

31.5

17

CFWN 10×

CFWN 10×M

CFWN 15×

CFWN 10×CM

(sta

ndar

d)

(sta

ndar

d)

(sta

ndar

d)

(sta

ndar

d)

30 31

17.5

2611

.47

ø47ø42

48

27.3

61.3

64.3

3

ø42ø63

27.3

64.5

ø46ø42

91.8

95.8

4

17.5

26

ø25.4

ø31

ø23.2

115

44

75

31

ø23.1ø42ø53

30.7

27.3 10

0.1

417

.526

ø23.1ø42ø53

30.7

2711

6.8

417

.526

ø23.1ø42

84.8

30.8

17.5

264

17

ø32

ø50

ø25.4

41

25.5

ø38

75

ø34

4431

115

ø30

ø48

ø38

25.5

31.0

8

4 1.58

17.5

26

ø25.4

ø50

ø40

413

.813

30.8

ø60

59

1312

.5

ø40 ø40

ø50

ø60

73.3

119.

8

13

CCTV Camera AdaptersC-mount, ENG-mount, and F mount camera adapters are available.

ENG-mount TV AdapterMQD12013 / 200 g

C-mount TV AdapterMQD12012 / 200 g

1X Relay Lens MQD12011 / 100 g

Relay Lens 1×lMQD12014 / 100 g

C-mount TV Adapter AMQD42005/180g

C-0.7×DXM Relay LensMQD42075 / 155 g

C-0.55×DS Relay LensMQD42056 / 300 g

ENG-mount TV Adapter and C-Mount TV Adapter are used in conjunction with 1x Relay Lens. 1x Relay Lens is not necessary.

For DS-Fi3 series.

Image plane

Image plane

Image planeImage plane

Image planeImage plane

U1-2AC-mount thread

Image plane

Unit: mm

C-mount adapters feature a built-in reduction relay lens, enabling areas equivalent to those seen through the eyepiece to be viewed on the monitor.Adapters for 1/3-inch (0.35×), 1/2-inch (0.45×), and 2/3-inch (0.6×) CCD cameras are available.

C-mount Adapter 0.45×MQD42045 / 620 g

C-mount Adapter 0.6×MQD42066 / 650g

C-mount Adapter 0.35×　MQD51045 / 300 g

Image plane

Image plane

Numerical aperture is generally indicated by the equation below.

Numerical aperture is the most important factor in judging the objective's resolving power, brightness, and depth of focus.

Glossary

Working Distance (WD) and Parfocal DistanceWorking distance is the distance between the top lens of the objective and the surface of the sample (or the cover glass) when in focus. The distance between the objective's shoulder and the sample (or the cover glass) when in focus is referred to as parfocal distance. Nikon's CF infinity objectives have a parfocal distance of 45 mm, while the CFI60-2 / CFI60 objectives feature a parfocal distance of 60 mm.

WorkingDistance

(WD)

Parfocal Distance

Sample

Objective Lens

n=1(air)

Numerical aperture (NA)

Where, NA = n × sin θ n = Refractivity of the substance existing between the sample and the objective. (n=1 for air)sinθ = Angle that is formed by the optical axis and the light ray that passes to the extreme periphery of the objective lens.

The closest proximity of two objects that can be seen as two distinct regions of the image. Resolving power is generally indicated by the equation below, where the larger the NA the greater the resolving power.

Resolving Power

Resolving Power =

The range in front of and behind the target plane of the sample, within which the observed structure can be sharply focused. The accommodation power of the human eye varies from person to person, so does depth of focus. Depth of focus is indicated by the equation below.

Depth of Focus (When observing with eyepieces)

λ NA

Where,λ = Light source's wavelength (generally 0.55 μm)NA = Numerical aperture of objective

Depth of focus =n × λ

2 × (NA)2

λ = Light source's wavelength (generally 0.55 μm)NA = Numerical aperture of objectiveM = Total magnificationn = Refractivity of the substance existing between the sample and the objective. (n=1 for air)

+ n 7 × NA× M × 1000

The pupil diameter of the objective lens is expressed by the following equation:

Pupil Diameter

Pupil diameter = 2 × f × NA f = Focal distance of objective lensNA = Numerical aperture of objective

Refer to this brochure for the values of f and NA for each objective lens. In addition.

When viewed through eyepiecesTotal Magnification

When viewed on monitorsEyepiece observation magnification (M) = objective's magnification × eyepieces magnification

Monitor observation magnification = objective's magnification × TV adapter magnification × monitor magnificationMonitor magnification varies depending on the imaging device size of the TV camera used and the monitor size. For information, see the table below.

Imaging device size Monitor magnificationType

1/3-inch1/2-inch2/3-inch

Diagonal length6.0 mm8.0 mm11.0 mm

Longer side4.8 mm6.4 mm8.8 mm

Shorter side3.6 mm4.8 mm6.6 mm

Imaging device size1/3-inch1/2-inch2/3-inch

9-inch38.1×28.6×20.8×

Monitor Size14-inch59.2×44.4×32.3×

20-inch84.6×63.5×46.2×

Sample

0.61 ×

*limited stock

DS-F2.5 F-mount AdapterMQD43020 / 165 g

DS-F F-mount AdapterMQD43000 / 165 g

*limited stock

Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. December 2019 ©2006-2019 NIKON CORPORATIONN.B. Export of the products* in this brochure is controlled under the Japanese Foreign Exchange and Foreign Trade Law. Appropriate export procedures shall be required in case of export from Japan.*Products: Hardware and its technical information (including software)

Printed in Japan (1912-1.0) Am/M Code No. 2CE-KXQH-9

NIKON CORPORATIONShinagawa Intercity Tower C, 2-15-3, Konan, Minato-ku, Tokyo 108-6290, Japanphone: +81-3-6433-3701 fax: +81-3-6433-3784https://www.nikon.com/products/industrial-metrology/

NIKON METROLOGY EUROPE NVGeldenaaksebaan 329, 3001 Leuven, Belgiumphone: +32-16-74-01-00 fax: +32-16-74-01-03 E-mail: [email protected]://www.nikonmetrology.com/en-gb

NIKON METROLOGY UK LTD.UNITED KINGDOM phone: +44-1332-811-349 fax: +44-1332-639-881E-mail: [email protected]

NIKON METROLOGY SARLFRANCE phone: +33-1-60-86-09-76 fax: +33-1-60-86-57-35E-mail: [email protected]

NIKON METROLOGY GMBHGERMANY phone: +49-6023-91733-0 fax: +49-6023-91733-229E-mail: [email protected]

NIKON INSTRUMENTS S.p.A.ITALY phone: +39-055-300-96-01 fax: +39-055-30-09-93

NIKON METROLOGY, INC.12701 Grand River Avenue, Brighton, MI 48116 U.S.A.phone: +1-810-220-4360 fax: +1-810-220-4300E-mail: [email protected]://www.nikonmetrology.com/en-us

NIKON CANADA INC.CANADA phone: +1-905-602-9676 fax: +1-905-602-9953

NIKON MEXICO- Metrology ShowroomMEXICO phone: +52 (442) 688 50673E-mail: [email protected]

NIKON INSTRUMENTS (SHANGHAI) CO., LTD.CHINA (Shanghai branch) phone: +86-21-6841-2050 fax: +86-21-6841-2060(Beijing branch) phone: +86-10-5831-2028 fax: +86-10-5831-2026(Guangzhou branch) phone: +86-20-3882-0551 fax: +86-20-3882-0580

NIKON INSTRUMENTS KOREA CO., LTD.KOREA phone: +82-2-2186-8400 fax: +82-2-555-4415

NIKON SINGAPORE PTE LTD.SINGAPORE phone: +65-6559-3651 fax: +65-6559-3668E-mail: [email protected]

NIKON MALAYSIA SDN BHDMALAYSIA phone: +60-3-7809-3688 fax: +60-3-7809-3633

PT. NIKON INDONESIAINDONESIA phone: +62-267-864-3949 fax: +62-267-864-3950E-mail: [email protected]

NIKON SALES (THAILAND) CO., LTD.THAILAND phone: +66-2633-5100 fax: 66-2633-5191

NIKON INDIA PRIVATE LIMITEDINDIA phone: +91-124-4688500 fax: +91-124-4688527

ISO 14001 Certifiedfor NIKON CORPORATION

ISO 9001 Certifiedfor NIKON CORPORATIONIndustrial Metrology Business Unit

Microscope Components 2CE-KXQH-9...4 5 +0.052 0 65 95 (19) 55 (20) (20) 48 ø24.5H9 M6 67.5 ø11.5...

Documents

Transcript of Microscope Components 2CE-KXQH-9...4 5 +0.052 0 65 95 (19) 55 (20) (20) 48 ø24.5H9 M6 67.5 ø11.5...