Micormachine: #2 (Oct. 9) 1. Various applications of micromachines - Information input -...
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![Page 1: Micormachine: #2 (Oct. 9) 1. Various applications of micromachines - Information input - Information output - Telecommunications - Medicine - Biotechnology.](https://reader036.fdocuments.in/reader036/viewer/2022062518/56649e895503460f94b8dca6/html5/thumbnails/1.jpg)
Micormachine: #2 (Oct. 9)
1. Various applications of micromachines- Information input- Information output- Telecommunications- Medicine- Biotechnology- Precise measurement- Power generation- Others
2. Health information system using wearable sensors
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Invention of Integrated Circuits by Jack Kilby
http://www.ti.com/corp/docs/kilbyctr/jackstclair.shtml
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The First IC
In 1958, at Dallas R&D Center if Texas Instruments7/16 x 1/7 (inch)2 On a germanium substrate
http://www.ti.com/corp/docs/kilbyctr/jackstclair.shtml
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Micromotor
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Microphone
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Fingerprint Sensor
Shigematsu et al, NTT Labs.
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Fingerprint Sensor
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Thermal Machining
Schematic Structure SEM
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Miniature Display Using Micromirrors
Fast mirror -- 550 m minor axisDriven at resonance (6.2 kHz)
Slow mirror -- driven at videorefresh rate of 20 Hz
R.A. Conant, et al., "A Full-Motion Video Display Using Micromachined Scanning Micromirrors," proc. Transducers '99, Sendai, Japan, June 1999, pp. 376-379.
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Micro Display for Virtual Reality
R.A. Conant, et al., "A Full-Motion Video Display Using Micromachined Scanning Micromirrors," proc. Transducers '99, Sendai, Japan, June 1999, pp. 376-379.
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Telecommunication : Optical Switch
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Structure of Optical Switch
M. Makihara, et al., J. Lightwave Tech. Vol. 17. No. 1, pp. 14-18, 1999.
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Medicine : Micro Syringe
OKa, et al., Kagawa University
Silicon wafer
Optical fiber
Needle made of SiO2
800 m
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Micro Gas Flow Sensor
Response time : 2 msResolution : 1 mm/secSmall size : 1.7 mm2
Sensing range : 0 ~ 10 , 0 ~ 30 m/secLow power consumption : Battery operated
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Micrograph of Micro Gas Flow Sensor
Sensor Heater Sensor
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SEM of Micro Gas Flow Sensor
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Micro Gas Sensor
H. Baltes, et al., IEEE Spectrum, September, pp. 35-38, 1998.
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DMD Pixel Structure
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Projection Display Using DMD
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Surface-Conduction Emitter Display
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Watch: Typical Wearable Instrument
- Usually people are not aware of wearing- Attached on human skin- Works continuously- Linked to time information
- Other wearable things: ring, glasses
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→Air pressure, altitude, water depth
Pressure Sensor
Silicon Silicon
Vacuum Vacuum
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Wearable Pulse Oximeter
Non-invasive and real-time measurement of oxygen concentration in blood
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C. H. Mastrangelo, M. A. Burns and D. T. Burke, IEEE Proceedings, Vol. 86, No. 8, pp. 1769-1787.
Liquid Injection Device
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C. H. Mastrangelo, M. A. Burns and D. T. Burke, IEEE Proceedings, Vol. 86, No. 8, pp. 1769-1787.
Microfluid Device Using Si and Plastic
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Source: Ministry of Public Management, Home Affairs, Posts and Telecommunications
AgricultureEnvironment
Medicine, Health Security Disaster Prevention
Others
Images of Sensor Network Applications
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Sensing
Analog and digitalsignal processing
RF transceiver
Sensing
Analog/digitalsignal processing
RF transceiver
Sensing
Analog/digitalsignal processing
RF transceiver
Sensing
Analog/digitalsignal processing
RF transceiver
Sensing
Analog/digitalsignal processing
RF transceiver
Sensing
Analog/digitalsignal processing
RF transceiver
Network module
(Sensor module)
(Sensor module)
(Sensor module)(Sensor module)
(Sensor module)
InternetWirelesslink
PC
N-interfacer(Sensor module)
Ubiquitous Sensor Network Concept
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SRAM
Powerregulator
RFtransceiver
chipset
Oscillator
RFcontroller
ADC
Base boardRS232C
Powerregulator
USB
Ether
PC
Sensor
MPU
Battery
Base board
RF board
Battery
Optional
303.825 MHz
(a) (b)
Block Diagrams
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Sensor module (Ni3)
Network module
Sensor Network Using Ni3
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腕時計のケースに入れた Ni3
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Eyeball movement sensor
Rheometer
Cardiograph
Acceleration sensor
Vibration
Pulseoxymeter
Vital data, Warning
Skin thermometry sensorSkin conductivity sensorBody-movement- accelerometerMicro vibration accelerometer
Wearable PC (with a built-in PHS )
Electroencephalograph
Send information by radio
( admission, secure communication )
Feet pressure sensor
Server for wearable PC
Internet
Information browserfor cliants
Health care system
Medical institutions
Fire stations
Vital data management systemMuscle-sound sensor
・ Dispersion to different kinds of instruments・ Security・ General purpose search engine・ accumulation and management of vital data
・ correlation analysis of actions, living bodies, and environmental information・ management of attributed data about actions and health
Healthcare System Using Wearable Sensors
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Current Status of Wearable Sensors