div class=trans-pagebutton class=gotoPage data-page=1Page 1button div class=trans-imageimg data-url=documentmemsseasupenn-fully-integrated-a-fully-integrated-magnetically-actuatedhtmlpage=1 data-page=1 class=trans-thumb lazyload alt=Page 1: memsseasupennedumemsseasupennedupublications1996A Fully Integrated · A Fully Integrated Magnetically Actuated Micromachined Relay William P Taylor and Mark G Allen loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mM8Uw8AAh0BTZud3BwAAAAASUVORK5CYII= data-src=https:reader033fdocumentsinreader033viewer20220527125b8455c27f8b9aec488c05efhtml5thumbnails1jpg width=140 height=200 divdivdiv class=trans-pagebutton class=gotoPage data-page=2Page 2button div class=trans-imageimg data-url=documentmemsseasupenn-fully-integrated-a-fully-integrated-magnetically-actuatedhtmlpage=2 data-page=2 class=trans-thumb lazyload alt=Page 2: memsseasupennedumemsseasupennedupublications1996A Fully Integrated · A Fully Integrated Magnetically Actuated Micromachined Relay William P Taylor and Mark G Allen loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mM8Uw8AAh0BTZud3BwAAAAASUVORK5CYII= data-src=https:reader033fdocumentsinreader033viewer20220527125b8455c27f8b9aec488c05efhtml5thumbnails2jpg width=140 height=200 divdivdiv class=trans-pagebutton class=gotoPage data-page=3Page 3button div class=trans-imageimg data-url=documentmemsseasupenn-fully-integrated-a-fully-integrated-magnetically-actuatedhtmlpage=3 data-page=3 class=trans-thumb lazyload alt=Page 3: memsseasupennedumemsseasupennedupublications1996A Fully Integrated · A Fully Integrated Magnetically Actuated Micromachined Relay William P Taylor and Mark G Allen loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mM8Uw8AAh0BTZud3BwAAAAASUVORK5CYII= data-src=https:reader033fdocumentsinreader033viewer20220527125b8455c27f8b9aec488c05efhtml5thumbnails3jpg width=140 height=200...