MEMS.pptx

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Design and Development of

PPR Platform for Micro Fabriand Positioning

B.TECPRO!ECT

Under the Guidance

Dr. M. "ant#a$%mar

Presented

by

RamavatarMeenaRoll No. - 1000316B.Tech 4thyear (M!

""T "ndore

#ayaMohRoll NB.Tec""T "n

%&16&16 Mechanical n'ineerin'

andi) *atidarRoll No. - 10003%%B.Tech 4thyear (M!""T "ndore

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&c$no'ledgement

We would like to express our special thanks of graour guide Dr. M. Santhakumarwho gave us thopportunity to do this wonderful project on Design and Development of 3-DOF PPR PlatMicro Farication and Positioning !pplicatioalso helped us in doing a lot of Research and we

know about so many new things. We are really ththem. Secondly we would also like to thank my pafriends who helped us a lot in nali!ing this projethe limited time frame.


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PRO!ECT O(ER()E*

%&16&16 Mechanical n'ineerin'%&16&16 3%&16&16 3

+once)t de,i'n

election oactuator, and

,en,or,

Mathematical modelin'

imulation

+ontrol ,y,tem de,i'n

/arication

*erormance analy,i,

PRO!EC

TO(E

R()E*

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)+TROD,CT)O+


Voltage

Maximum Load

Current at maximum pay load

Stroke length

"F inear &ct%ator "pec

"F inear &ct%ator

M)CRO"OFT C&M-"T,D)O

P0 ) &

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P0 ) &

MODE


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P0")C& PROPERT)E" OF

PROPO"ED "0"TEM


Mass of "lider 1 21g



in$s Masses 516 4 738 49:g

Platform 1g

*idt# of Platform 14mm

Mass moment of )nertia 42:g;mm

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CO+CEPT,& &+D FR&M

D)&=R&M


ctive)ri,matic

7oint 3

ctive)ri,matic

7oint %

ctive)ri,matic

7oint 1

*a,,ive7oint

*a,,ive7oint

*a,,ive7oint

Guide 8ay, or)ri,matic

7oint,

ende9ector rame

2ortale

"nertialrame

Rotary

7oint,

+%mber of lin$s +%mber of ?oints Degrees of freedom18 A 4 5@8 > 3

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FOR*&RD &+D )+(ER"E )+E

"O,T)O+


/or8ard inematic model '#ere;

r#$ r% and r3are

?oint displacemparameters8

ais t#e 'idt# otriang%lar Plateector8

&and 'are t#eendeector 5'tool8 positions

(is t#e a' an

endeector froinertial frame

"nver,e inematic

model

2

)!in"

2

)!in"

)!in"

#

2

1

z

z

z

ayr

ayr

hxr

=

+=

+=

a

rr

rry

rra

h

rx

z

))!in

2

)"

#2

#2

#21

=

+=

=

*OR"P&CE

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*OR"P&CE

&RE&


Fig: 3 Workspace area of proposed mechanism

( l it & l i 5! b

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(elocit &nalsis 5!acob

Matri8


#oint ,)ace velocitie, to ta, ,)ace velocitie,

2here are ta, ,)ace velocitie, and are7oint ,)ace velocitie,.

z

y

x

#

2

1

r

r

r

U,e thi, relation or derivin' inetic ener'y o therootic )latorm. Thereore; total inetic ener'y i, interm, o 7oint ,)ace variale,.

=

#

2

1

))$o!"%1))$o!"%10

2%12%10

1

r

r

r

aa

a

h

a

h

y

x

zzz

( l it & l i t

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(elocit &nalsis cont


=

z

y

x

r

r

r

J

1

#

2

1

" #=0; The matri> i, non-,in'ular; then 8e can invert it to calculate7oint rate, rom 'iven +arte,ian velocitie,.

in'ular +ondition #?0;

Ma>imum allo8ale ya8 an'le i,-60 to 60

&0&0

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D0+&M)C&+&0")"


"t i, an ener'y a,ed a))roach. ince; it i, )lanar )latorm )otential ener'y o the rootic

)latorm con,idered to e Aero.Total inetic ener'y ($! o the rootic )latorm i, ,um o

individual )ri,matic (,lider! 7oint inematic ener'ie,; ininematic ener'ie, and 8or tale inetic ener'y

+

+

+

+++=

(

(

(

(

(

(

(

#

(

#

#

#

(

#

(

#

(

2

(

2

2

2

(

2

(

2(

1

(

1

1

1

(

1

(

1

(2

##

(2

22

(2

11

00

00

00

"2

1

0

0"

2

1

0

0"

2

1

0

0"

2

1"

2

1"

2

1"

2

1

y

x

I

m

m

y

x

y

x

m

m

y

x

y

x

m

m

y

x

y

x

m

m

y

xrmrmrmKE

zzp

p

p

T

l

l

T

l

l

T

l

l

T

sss

"liders ineticEnergies

in$s inetic Energies

Platform ineticEnerg

inetic energ of Platform

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D0+&M)C &+&0")"CO+T)+,EDGG


#oint orce, can e derived rom the ollo8in' relation a, 'ivenelo8C

i

ii

fr

KE

r

KE

dt

d=

By cominin' all in)ut variale, and ormulatin' thee@uation, o motion o the )latorm in ,tate ,)ace orm a,ollo8,C ( ) ( ) disCM +=+

2herei, inertia matri>( )M

( ) C ", the +orioli, and centri)etalmatri>

[ ] [ ]

[ ]

( ) edisidisdis

T

TT

fff

rrrrrr

+=

=

==

*e$tore+i!tur,an$

#21

#21#21

( )

=

###2#1

2#2221

1#1211

mmm

mmm

mmm

M ( )

=

#

2

1

n

n

n

C

idis "nternal i,tu(*roce,, andmea,urement

edis

>ternali,turance()ayload variavirationD..!

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CO+T)+,EDGG


( ) ( )

( ) ( )

( ) ( )

( ) ( )zszzz

p

zszzz

p

lpah

zszzz

p

zszzzp

lpah

lpah

lpah

lsp

ah

ahM

a

IMahm

a

h

a

hM

a

IM

a

hm

MMm

a

h

a

hM

a

IM

a

hm

a

h

a

hM

a

IM

a

hm

MMm

MMm

MMm

MMMm

+

+++

+

+=

+

++

=

+=

+

++

=

+

+++++

+=

+=

+=

+=

++=

22

#2

2

2

##

22

22

2

2

#2

#1

22

22

2

2

2#

2

2

222

2

22

21

1#

12

111

ta"tan21

45!e$""

41

"2tan2

1

4

1!e$""

4

1

)"2

"2tan2

1

4

1!e$""

4

1

ta"tan2

1

4

5!e$""

4

1

)"2

)"2

)"2

"#

( )

( )

+

+

=

+

+

+

+

=

=

(

2

#

(

(

2

2

#

2

2

(

#

(

(

2

#

2#

2

##

(

2

#

(

(

2

2

#

2

2

(

#

(

(

2

#

2#

2

#2

1

!e$"!e$

2

tan2

1"#

!e$"!e$

2

tan2

1"#

0

rr

a

hmrr

a

hm

am

a

hm

a

In

rr

a

hmrr

a

hm

am

a

hm

a

In

n

zlzlzll

zz

zlzlzll

zz

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")M,&T)O+


Dynamic Simulation with 1 N

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DE")=+


imulation+a,e,*" +ontroller

*ro)o,ed +ontroller (lidin' Mode+ontroller!

e,iredTra7ectoryTa, 1- tE?15F ?0.1F

Ta,-% tE?15H31.4

)"1(0$o!"2(0#(0

)"1(0!in"2(04(0

=

+=

Y

X

Ta,-3tE?15H31.4H15

#

)1(0"4 =

XY

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P)DCO+TROER


( )( ) ( ) disIPDd CKKKM ----...- ++++= T#e robotic control of P)D controlleris given b

RE",T &+D D)"C,"")O+ OF

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RE",T &+D D)"C,"")O+ OFCO+TROER


Desired Tra?ector (s &ct%al Tra?ector5"MC8 Trac$ing

P)D controller Error

RE",T &+D D)"C,"")O+ OF

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!oint Position (s time

!oint (elocit (stime


RE",T &+D D)"C,"")O+ OF

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s$ Position (s time


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PROPO"ED CO+TROER 5"MC *)TD)"T,RB&+CE OB"ER(ER8

2hy i,turance I,erver

Un-modelled ynamic,

Unno8n i,turance

ac o en,or,

ODE CO+TRO *)T D)"T,RB&+CE OB"ER

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ODE CO+TRO *)T D)"T,RB&+CE OB"ER

RE",T &+D D)"C,"")O+ OF "MC CO+

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RE",T &+D D)"C,"")O+ OF "MC CO+e,ired Tra7ectory J, ctual Tra7ectory (M+!

Tracin'

M+ controller rror

RE",T &+D D)"C,"")O+ OF "MC CO

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%&16&16 Mechanical n'ineerin'%&16&16

!oint Position (s time

!oint velocit (s time



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Mechanical n'ineerin'%&16&16


%&16&16

!oint velocit (stime

TR&C)+= RE",T B* DE")RED P)

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Mechanical n'ineerin'%&16&16%&16&16

TR&C)+= RE",T B* DE")RED P)

ERROR COMP&R)")O+ P)D

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ERROR COMP&R)")O+ P)D&+D "MC

DE")=+

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PC 'it#

M&T&B"im%lin$

&ct%

Feedbac$

&rd%n

and MoDrive

Trac$ing

,singCamera

DE")=+(&)D&T)O+

DE")=+ (&)D&T)O+

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DE")=+ (&)D&T)O+CO+T.....to point open and closed loop Control

TR&C)+= ,")+= C&MER&

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TR&C)+= ,")+= C&MER&

RE",T ",MM&R0

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RE",T ",MM&R0

$inematic e,i'n o mechani,m JeriKed

ynamic Model o 3**R veriKed

+ontroller U,ed *" and M+- Better re,ult are otained on u

eLcient control ,cheme

+lo,ed controller e,tali,hed u,in' ,en,or eedac

/inal )o,ition o end e9ector traced u,in' camera

)(E DEMO

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Jideo 1 *oint to *oint tra7ectory 8ith/eedac

)(E DEMO

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Jideo % @uare; "nclined Ba,e tra7ec

)(E DEMO

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Jideo 3C @uare (*arallel Ba,e!

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T#an$

0o%

MEMS.pptx

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