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EXPERIMENT NO. 1

OBJECTIVE:- To Determine the electric field strength of a simple Dipole

SOFTWARE USED:- COMSOL 4.3b

THEORY:- An electric dipole is a separation of positive and negative charges. Thesimplest example of this is a pair of electric charges of equal magnitude but opposite

sign, separated by some (usually small) distance. Dipoles can be characterized by

their dipole moment, a vector quantity. For the simple electric dipole given above,

the electric dipole moment points from the negative charge towards the positive

charge, and has a magnitude equal to the strength of each charge times the

separation between the charges.

Geometry :

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Materials : AIR

Electromagnetic wave, Frequency domain :

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Mesh :

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Parameter :

Electric Field Strength Expression used-

(emw.Ex+emw.Ey)

Frequency parameter-

RESULT:-

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EXPERIMENT NO. 2

OBJECTIVE:- To determine the displacement of cantilever


THEORY :- Cantilevered beams are the most ubiquitous structures in the field

of MEMS. MEMS cantilevers are commonly fabricated from silicon (Si), silicon nitride

(Si3N4), or polymers. The principal advantage of MEMS cantilevers is their

cheapness and ease of fabrication in large arrays. The challenge for their practical

application lies in the square and cubic dependences of cantilever performance

specifications on dimensions. These superlinear dependences mean that cantilevers

are quite sensitive to variation in process parameters. Controlling residual stress can

also be difficult. A cantilever is a beam anchored at only one end. The beam carries

the load to the support where it is resisted by moment and stress. A Cantilever

structure consists of greater length as compare to its width with optimal thickness

The movement of the cantilever is effected by its length, width, thickness and various

properties of the material used to make the structure. The geometric shape, as well

as the material used to build the cantilever determines the cantilever's stiffness.

Geometry :

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RESULT:-

For Eigen Frequency = 1.080422e5

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EXPERIMENT NO. 3

OBJECTIVE :- To determine the displacement and analysis of harmonics ofCantilever beam using different Eigen frequencies.


THEORY :- Cantilevered beams are the most ubiquitous structures in the field

of MEMS. MEMS cantilevers are commonly fabricated from silicon (Si), silicon nitride

(Si3N4), or polymers. The principal advantage of MEMS cantilevers is their

cheapness and ease of fabrication in large arrays. The challenge for their practical

application lies in the square and cubic dependences of cantilever performance

specifications on dimensions. These superlinear dependences mean that cantilevers

are quite sensitive to variation in process parameters. Controlling residual stress can

also be difficult. A cantilever is a beam anchored at only one end. The beam carriesthe load to the support where it is resisted by moment and stress. A Cantilever

structure consists of greater length as compare to its width with optimal thickness

The movement of the cantilever is effected by its length, width, thickness and various

properties of the material used to make the structure. The geometric shape, as well

as the material used to build the cantilever determines the cantilever's stiffness. Geometry :

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Materials : SILICON

Free Constraint :

Fixed Constraint :

Mesh :

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RESULT:-

1)For Eigen Frequency = 1.080422e5


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EXPERIMENT NO. 4

OBJECTIVE :- Determination of Velocity and Pressure of Leminar flow of liquid

through parallel plates.


THEORY :- Consider steady, incompressible, laminar flow between two infinite

parallel horizontal plates as shown in the figure. The flow is in the x- direction, hence

there is no velocity component in either the y- or z- direction (i.e., v = 0 and w = 0).

The steady-state continuity equation becomes

Geometry :

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Materials : WATER

Inlet :

Outlet :

Mesh :

RESULT:-

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Outlet:

Inlet:

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EXPERIMENT NO. 5

OBJECTIVE:- Analyzing the Moving Boundary of geometry(Square) with respect

to time.


THEORY:-

Geometry :

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RESULT:-

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MICRO ELECTRO MECHANICAL SYSTEMS

LAB MANUAL

MASTER OF TECHNOLOGY

In

VLSI DESIGN

By:

KARNIKA SHARMA

(01311805212)

Affiliated to

GGSIPU, Delhi , CDAC

B-30, Sector 62, Noida201307

{December ,2013}

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MICRO ELECTRO MECHANICAL SYSTEMS

LAB MANUAL

MASTER OF TECHNOLOGY

In

VLSI DESIGN

By:

RAHUL BHATIA

(00311805212)

Affiliated to

GGSIPU, Delhi , CDAC

B-30, Sector 62, Noida201307

{December ,2013}

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INDEX

S. No. Experiment Date Signature

1 To Determine the electric field strength of a simple

Dipole.

2To determine the displacement of cantilever.

3To determine the displacement and analysis of

harmonics of Cantilever beam using different Eigen

frequencies.

4Determination of Velocity and Pressure of Leminar

flow of liquid through parallel plates.

5Analyzing the Moving Boundary of

geometry(Square) with respect to time

MEMS file

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