Mechanical Material2

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Mechanical Material SILICON? Stiff => Thinning is required for appreciable strain

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Mechanical Material2

Transcript of Mechanical Material2

Page 1: Mechanical Material2

Mechanical Material

SILICON?

Stiff => Thinning is required for appreciable strain

Page 2: Mechanical Material2

Micromachining of

SILICON?

MICROMACHINING of SILICON => (a) BULK (substrate)(b) SURFACE (films)

Additive Processes: Chemical and Physical Deposition(Thin Layers only) (Single/Poly)

Removal Processes:Chemical and Physical Etching(Wet/Dry/Plasma/Inert/Reactive)

(Bulk/Film) (Anisotropic/Isotropic)

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BULK MICROMACHINING(Etchants: Isotropic/Anisotropic)

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BULK MICROMACHINED(Silicon Capillary for Insulin Infuser)

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BULK MICROMACHINED(Silicon Capillary for Insulin Infuser)

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BULK MICROMACHINED(Silicon Capillary for Insulin Infuser)

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BULK MICROMACHINED(Silicon Mask for Cylindrical Micromotion Sensor)

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BULK MICROMACHINED(Series Connected Photovoltaic Converter Battery)

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BULK MICROMACHINED(Series Connected Photovoltaic Converter Battery)

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BULK MICROMACHINED(Series Connected Photovoltaic Converter Battery)

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MECHANICAL ROOM DEMOLITION MECHANICAL PLAN MECHANICAL …

MECHANICAL ROOM DEMOLITION MECHANICAL PLAN MECHANICAL …

S.e material2 DESIGN ENGINEERING

S.e material2 DESIGN ENGINEERING

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