Mechanical Engineering

Bachelor Focus in Microsystems and Nanoscale EngineeringMikrosysteme und NanotechnologieApril 12st, 2016

Focus-Coordinator:Prof. Christofer HieroldMicro and Nanosystems

Microsystems and Nanoscale Engineering at D-MAVT

ProfessorsChiara DaraioJürg DualChristofer HieroldBrad NelsonDavid NorrisDimos PoulikakosSotiris PratsinisAndreas Stemmer

[Source: www.apple.com]

http://idw-online.de/de/image?id=64000&display_lang=de_DEhttp://www.tms.org/pubs/journals/JOM/0311/Byko-0311.html

[Source: Sensimed]

http://www.memsindustrygroup.org/files/public/April2010.htm

Microsystems and Nanoscale Engineering everywhereIncrease of functionality, performance, and application fields

Technology for Safety: Automotive Applications

Courtesy of Dr. Franz LärmerRobert Bosch GmbH

Courtesy of Dr. Franz LärmerRobert Bosch GmbH

Automotive Applications

Coriolis Force

Micromachined resonant sensors exploiting theCoriolis force are mainly used for angular rate sensing (gyroscopes)

Fs = 2m v ×

Fs: Coriolis Force: Angular rate / yaw rate of the carm:seismic massv: movement of the seismic mass

Technology for Safety: Sensors, Microsystems or MEMS

http://www.cnn.com/2009/HEALTH/12/11/bionic.eye/Eight-electrode PDMS device Artificial Retina Project (U.S. Department of Energy’s DOE’s)

Technology for Humans: Artificial Retina

Technology for Biomedical Applications: Functional Polymers in MEMS

50 m

In collaboration with the Institute of Robotics and Intelligent SystemsSuter, et.al., DOI:10.1088/0960-1317/21/2/025023, January 2011

greenTEG is an ETH spin-off company founded by the former and current PhD students of Prof. Hierold: Wulf Glatz, Lukas Durrer, Etienne Schwyter ,and Peter Stein.

The research was awarded the“swisselectric research award 2009”

Technology for Energy Conversion and Efficiency: Thermoelectric Generators

Microsystems and Nanoscale Engineering - Myths

It’s all about chemistry!?

NO, it is not.

Si + 2H2O SiO2 + 2H2

It is not mechanical engineering! YES, it is mechanical engineering!

Microsystems and Nanoscale Engineering – Myths 2

I am limited in my options for continuing Master Programs?!

NO, you are not

You are still studying BSc ME, allowing to continue with ME consecutive and specialized Master Programs and respective programs at ETH Zurich or other universities

Curriculum

Microsystems and Nanoscale Engineering – Curriculum

Projects

1 μm

electrical contacts

Particles ( beads, cells, … ) are moved or rotated by nonlinear acoustics in fluid cavities in microsystems ( see Lab on Chip Tutorial Series 2011-2012 ) e.g. for biomedical applications

Ultrasonic Manipulation ofCopolymer Beads (74m) withmicrogripperCollab. with Nelson group, ETHZ1 mm channel, 6x slower

Ultrasonic Manipulation of MCF10A Cells: Line Formation Collab. with University Hospital ZurichField of view: 0.67 0.56 mm , Real time

Ultrasonic Rotation of Particle Clumps17 m Copolymer particlesReal time, 3 mm x 3 mm square chamber

Ultrasonic Particle ManipulationJürg Dual, Center of Mechanics

We design, fabricate and test the mechanical and optical properties of micro-structured materials with ultra-low and tunable thermal expansion. These systems could be used for applications in space or energy technologies.

Potential application: Reconfigurable, large-aperture space telescopes

Schematic diagram of the microfabricationapproach for ultra-low coefficient of thermal expansion (CTE) space mirrors: top-down etching of a SOI wafer

Scanning electron microscope image of the fabricated mirror: a thin bi-metallic membrane with near zero CTE

Thermally Stable MicrostructuresChiara Daraio, Chair of Mechanics and Materials

Nanosystems, Nanomaterials, Energy HarvestersChristofer Hierold, Chair of Micro- and Nanosystems

Energy harvesting from the human body

Ultraclean CNT transistors

Tunable CNT resonators

Ultra-low power acoustic emission triggers

Pressure sensors for Ventricular Assist DevicesSingle-wall CNT gas

sensors

µTEGs based on Si NWs

www.micro.mavt.ethz.ch

Multi-scale Robotics Lab: Fabrication andmanipulation of micro and nano robotsBrad Nelson, Institute of Robotics and Intelligent Systems

Magnetic manipulation systems allow the precise 3D control of various magnetic agents for biological andbiomedical applications. Micro and nanorobots with different shapes and functionalities are fabricated toperfom targeted therapies with minimal invasiveness.

Plasmonic Solar CellsDavid Norris, Institute of Process Engineering / OMEL

Result:Structured metals for new approaches to solar energy via photovoltaics and thermophotovoltaics

HotEmitter

PhotovoltaicCell

NP

PlasmonicEmitter

AQUASARDimos Poulikakos, Institute of Energy Technology / LTNT

Goal/Vision:“green“ data center – zero emission

Stopovers/Results: installation of Aquasar-

system at ETH Zurich

reuse of heat in liquid-cooled super-computers

waste heat will beused in heating systemof ETH

< 85°C

70-75°C

50-60°C

Catalysts

Biomaterials: dental fillers

Scaleable aerosolsynthesis of novel

nanomaterials

Gas Sensors

Advanced Pigments

PhosphorsBatteries

C-LiFePO4

Non-fortified FePO4 0.5 FeSO4

Nutrition: Chocolate milk

SiO2-coatedSPION/Ag

Particle Technology LabSotiris Pratsinis, Institute Process Enineering

We synthesize, assemble, and characterize functional nanoscalematerials and components to explore their potential for next-generation electronic devices.

Molecular electronic devicesassembled from nanoparticlesand characterized by scanning probe microscopy.

Sub-5-nm channel length organic field effect transistor fabricated from a pair of gold nanorods.

Voltage dropalong a nanowire.

Assembly and Characterization ofNanoscale ElectronicsAndreas Stemmer, Nanotechnology Group

Microsystems and Nanotechnology @ D-MAVTFollows an interdisciplinary engineering approach

Mechanical Engineering

materials and surfaces

computational methods optics

electronics

process development

thermodynamics and energy conversion

mechanics material and system integration

systems control

Why is an inter-disciplinary education in micro and nanosystems for engineers of great relevance?

… was Sie als Mikrosystemtechniker für uns interessant macht ist die Fähigkeit, auf Systemebene Probleme zu lösen. Dabei müssen vielfach mechanische, elektrotechnische, materialspezifische und viele andere physikalische Effekte berücksichtigt werden.

sinngemäss nach ….Hr. Christoph Tietz, Leiter Platform Engineering, Bombardier Transportation AG, Schweiz, anlässlich eines Vorstellungsgesprächs

Mechanical Engineering

Bachelor Focus in Microsystems and Nanoscale EngineeringMikrosysteme und Nanotechnologie

Questions?

Please contact:Prof. Christofer Hierold, Micro and Nanosystemshierold@micro.mavt.ethz.ch

© ETH Zurich