Measurements @ Dortmund on TESLA-ON wafers

J.Kudlatyon behalf of the group of

DortmundApril 2004

Atlas Pixel Italia Apr 2004 2

Mask alignment

5371-08 0.5-2.5 Y-Y Y-Y Y-Y correct

5371-10 N.V.-2.5 Y-Y 2.0-Y Y-Y correct

5371-11 0.5-2.5 Y-Y Y-Y Y-Y correct

5371-18 N.V.-2.5 Y-Y Y-Y Y-Y correct

6257-06 Y-Y Y-Y Y-Y Y-Y correct

6260-01 Y-Y Y-Y Y-Y Y-Y correct

6260-12 Y-Y Y-Y Y-Y Y-Y correct

6260-17 Y-Y Y-Y Y-Y Y-Y correct

6260-18 Y-Y Y-Y Y-Y Y-Y correct

6260-23 Y-Y Y-Y Y-Y Y-Y correct

Mask Alignment (H-V) Wafer n-side L n-side R p-side L p-side R ID marking

very bad w

afers

cut !

see next slide

Atlas Pixel Italia Apr 2004 3

All 4 wafers from batch #5371 have got bad mask alignment.

Test structures are partially or at all unseen

?

Atlas Pixel Italia Apr 2004 4

All 5 wafers from batch #6260 have got asymmetric cut of edges

Atlas Pixel Italia Apr 2004 5

Planarity ( 40µm)

Wafer (µm)

5371-08 77.71 !

5371-10 83.64 !

5371-11 85.54 !

5371-18 59.79

6257-06 20.26

6260-01 28.91

6260-12 39.01

6260-17 35.37

6260-18 26.27

6260-23 26.77

Atlas Pixel Italia Apr 2004 6

5371-08

5371-10

5371-11

5371-18

Atlas Pixel Italia Apr 2004 7

I-V on diodes 16,17 (IVD)

Wafer Vbd (V)16-17

Iop (nA) 16-17

5371-08 500 500 11.33 2.83

5371-10 500 500 11.20 2.45

5371-11 500 280 10.82 7.70

5371-18 500 500 9.45 1.98

6257-06 500 500 12.89 4.10

6260-01 15 500 ? 4.16

6260-12 500 500 11.52 2.06

6260-17 500 500 13.41 2.15

6260-18 500 500 13.45 1.81

6260-23 405 500 13.31 2.39

Atlas Pixel Italia Apr 2004 8

C-V on diodes 16,17 (CVD)

Wafer Vdep (V) Cdep (pF) Vop (V) (cm)

5371-08 110 105

3.29 3.54 160 155 1913 2004

5371-10 90 90 3.12 3.16

150 150 2338 2338

5371-11 90 95 0.92 3.10 150 150 2338 2215

5371-18 70 70 4.26 4.29

150 150 3007 3007

6257-06 65 70 3.09 3.10

150 150 3238 3007

6260-01 175 55 5.43 4.29 225 150 1202 3827

6260-12 55 55 4.28 4.27 150 150 3827 3827

6260-17 65 65 3.40 3.19 150 150 3238 3238

6260-18 65 65 3.17 3.19 150 150 3238 3238

6260-23 70 70 3.11 3.25 150 150 3007 3238

Atlas Pixel Italia Apr 2004 9

Wafer Vbd (V) S good tiles

5371-08 500 500 500 1.079 1.067 1.26 1-2-3

5371-10 500 380 357 1.07 1.15 1.13 1-2-3

5371-11 365 500 500 1.16 1.14 1.11 1-2-3

5371-18 470 20 225 1.13 – 1.52 1-x-3

6257-06 265 290 290 1.29 1.28 1.33 1-2-3

6260-01 45 280 500 - 1.46 1.85 x-2-3

6260-12 50 500 500 - 1.23 1.27 x-2-3

6260-17 60 500 460 - 1.11 1.13 x-2-3

6260-18 390 285 50 1.11 1.59 - 1-2-x

6260-23 50 380 85 - 1.39 2.5 x-2-x

I-V on tiles 01,02,03

Atlas Pixel Italia Apr 2004 10

I-V on SC’s 04-09 and MC’s 10-13

Wafer good/total 04-09

good/total 10-13

5371-08 6/6 4/4

5371-10 6/6 4/4

5371-11 6/6 4/4

5371-18 5/6 3/4

6257-06 6/6 4/4

6260-01 3/6 4/4

6260-12 6/6 4/4

6260-17 6/6 4/4

6260-18 6/6 3/4

6260-23 6/6 2/4

Atlas Pixel Italia Apr 2004 11

I-t on good tiles (ITS)so far has been measured 1 wafer

Wafer-tile S

5371-08-02 1.03

Atlas Pixel Italia Apr 2004 12

I-V on MOS 22,24 (BOX)

Wafer Vbd (V) 22-24

5371-08 100 100

5371-10 100 100

5371-11 100 100

5371-18 NO 100

6257-06 100 NO

6260-01 NO NO

6260-12 NO NO

6260-17 NO NO

6260-18 NO NO

6260-23 100 NO

Atlas Pixel Italia Apr 2004 13

C-V on MOS 22,24 (COX)

Wafer Cox (pF)

Cmin (pF) CFB (pF) VFB (V)

5371-08 181 183 7.17 3.84 50.64 50.77 4 6

5371-10 183 184 7.21 7.7 47.26 47.22 4 4

5371-11 185 185 11.02 6.84

48.33 48.32 5.5 8.5

5371-18 0.65 276

0.17 13.41

0.67 46.6 3.5 6

6257-06 1.12 266

0.93 0.74 1.1 46.32 4 4

6260-01 266 267 2.01 1.43 66.5 66.61 3 4

6260-12 232 279 2.55 4.9 40.79 42.21 4.5 9.5

6260-17 212 266

2.23 2.062

43.06 44.91 2 3

6260-18 274 265 3.4 2.03 45.13 44.89 5.5 2

6260-23 268 264 7.28 1.74 46.40 46.28 2.5 2

Atlas Pixel Italia Apr 2004 14

I-V on gate-controlled diode (IVG)

so far 5 wafers have been measured

Wafer Iox (nA)

5371-08 0.43

5371-10 0.63

5371-11 NO

5371-18 0.53

6257-06 0.50

Atlas Pixel Italia Apr 2004 15

I-Vg on MOSFET (MFE)

Wafer Vth (V) p-dose (x 1012 cm-

2)

5371-08 30 1.91 (low COX)

5371-10 30 1.94 (low COX)

5371-11 30 1.96 (low COX)

5371-18 24 2.33

6257-06 26 2.44

6260-01 36 3.39

6260-12 22 2.16

6260-17 26 2.44

6260-18 26 2.43

6260-23 26 2.42

Atlas Pixel Italia Apr 2004 16

Vpix-V (PUT) Wafer Vpt (V)

5371-08 1.15 !

5371-10 1.49 !

5371-11 1.45 !

5371-18 1.54 !

6257-06 2.16

6260-01 3.84

6260-12 2.35

6260-17 2.37

6260-18 2.28

6260-23 2.33

Atlas Pixel Italia Apr 2004 17

Overview Wafer mask

alignbad cut

planarity

IV on tiles

BOX p-spraydose

PUT

5371-08 NO OK NO OK OK NO NO

5371-10 NO OK NO OK OK NO NO

5371-11 NO OK NO OK OK NO NO

5371-18 NO OK NO OK OK OK NO

6257-06 OK OK OK OK OK OK OK

6260-01 OK NO OK OK NO OK OK

6260-12 OK NO OK OK NO NO OK

6260-17 OK NO OK OK NO OK OK

6260-18 OK NO OK OK NO OK OK

6260-23 OK NO OK NO OK OK OK