Maury RF Device Characterization Systems Catalog€¦ · RF Device Characterization Systems ......

RF Device Characterization Systems

Maury Device C naracterization SystemsMaury Microwave Has the Most Complete Selection of Load Pull Solutions!We Are Your Complete Measurement & Modeling Solutions Partner!

In This Volume:RF Device Characterization MethodsAccurate de-embedded performance evaluation of the power, intermodulationdistortion, adjacent channel power, noise and network (S-parameter)characteristics of packaged or on-wafer devices under various conditions ofimpedance matching is the foundation of successful design, manufacture,and use of RF and microwave devices. Maury device characterization systemssupport the best industry-recognized test and measurement methods.

Pitfalls To Avoid When Purchasing A DeviceCharacterization SystemAn automated device characterization system can greatly simplify test andmeasurement operations and quickly provide reliable empirically-based datafor design and modeling of new products. But finding the right system is notsimple. There are mistakes to be avoided if you are to maximize return oninvestment, achieve your test and measurement goals, and get your productsto market. Here is some valuable advice from the experts at Maury.

Device Characterization Software (IVCAD, ATSv5and AMTSv2)Maury IVCAD software is the newest and most advanced measurement andmodeling software in the market. It supports multiple load pull techniques,performs noise parameter, DC-IV and pulsed-IV measurements, andincorporates sophisticated device modeling tools. Maury's ATS software(ATSv5) includes a comprehensive set of upgrades, improvements, andadditions to the classic ATS test and measurement tools.Maury's Automated Mobile Test System software (AMTSv2) is designedspecifically to automate the testing of mobile phones in transmit and receivemodes, for output power and sensitivity. It now includes support for GSM,WCDMA and CDMA2000.

Load Pull and Noise Parameter SystemsMaury offers fully integrated, automated tuner-based systems configuredto operate from 0.25 to110 GHz. These complete turnkey systems can becustomized to support Basic (power, gain and PAE) and Advanced LoadPull characterization (modulation, optimal ACPR, COP, and Harmonic LP).Maury Noise Parameter systems are available in electromechanical and solidstate versions that can be customized to perform on-wafer or in-fixture noiseparameter characterization at frequencies from 0.25 to 110 GI-Iz.

Tuners, Controllers And HubsMaury USB-controlled automated tuners and hubs are described in detail,with their respective specifications and applications.

AccessoriesMaury offers a number of accessories to support your test bench needs,including automated tuner controllers, noise receiver modules, diplexers andtriplexers, pre-matching probe mounts, manual tuners, and automated slidingshorts.

Advanced Device Characterization SystemsMaury now otters Mixed-Signal Active Load Pull systems, and the AMCADEngineering PIV/PLP family of Pulsed IV systems.

MAURY MICROWAVE CORPORATION

1 RF Device Characterization Systems

MAURY's Mixed-Signal ActiveLoad Pull Allows Wideband

Modulated Impedance Controlfor Base Station PAs

/- I

X-Parameter Modeling forFirst-Pass Advanced Amplifier

Design at over 200W1

Advanced Integration ofOn-Wafer Load Pull and Noise

Parameters to 110 GHz

Active and Hybrid Load PullUsing PNA-X SimplifiesHarmonic Tuning with

Gamma = 1

Ultra-Fast Noise ParameterMethod Gives More AccurateResults in Less Than 1/100th

the Time to 110 GHz!

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USB and TCP-1P Tuners forDo-lt-Yourself ProgramingUsing DLL or Direct ASCII

Commands

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Pulsed-Bias Pulsed-RFHarmonic Load Pull

for GaN and Wide Band-GapDevices

Stability and ConformanceTesting of Mobile Phones for

GSM, CDMA, WCDMA...

MAURYMICRO WAVEcon p, c,R AT ion,

Systiarns

You Have Load Pull Needs - Have You Covered!Maury Microwave Has the Most Complete Selection of Load Pull Solutions

The Most Accurate andRepeatable Manual Tuners forSimple Tuning Requirements

Maury Microwave - Your Complete Measurement & Modeling Solutions Partner

On the Web at MAURYMW.0011/1

2900 Inland Empire Blvd., Ontario, California 91764 • USATel: 909-987-4715 • Fax: 909-987-1112 • Email: [email protected]

Agilent Technologies

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.RF Device Characterization Systemis

ContentsMaury Device Characterization Solutions

Model Index 4-5

Introductory InformationPitfalls to Avoid When PurchasingAn Automated Tuner System 6-7General Information 8About Maury Microwave 9Maury's Strategic Alliances 10Maury Microwave's ISO 9001:2008 Documentation 11Calibration and Repair Services 12Maury Automated Tuner Systems 13RF Device Characterization Methods 14-15

Software SolutionsIVCAD Advanced Measurement & Modeling Software

• MT930 Series - IVCAD Software Suite Overview 16• MT930A - IVCAD Basic Application 17• MT930B - IVCAD Visualization Suite 17• MT930C - IVCAD Vector-Receiver Load Pull 18-19• MT930D - IVCAD Traditional Load Pull 20▪ MT930E - IVCAD IV Curves for Load Pull 20• MT930F - IVCAD Basic S-Parameters 21• MT930G - IVCAD Time-Domain Waveforms 21• MT930H - IVCAD Active Load Pull 22• MT930J - IVCAD Pulsed IV Curves 23• MT930K - IVCAD Pulsed S-Parameters 23▪ MT930L - IVCAD Scripting Language 23• MT930M1 - IVCAD Linear Model Extraction 24o tv1T930M2 - IVCAD Non-linear Model Extraction 25• MT930M3 - IVCAD Electro-thermal Model Extraction 26• MT993N - IVCAD Database Analysis 26o MT930P - IVCAD Measurement Toolbox 16

ATSv5 Automated Tuner System Software• iv11-993 Series SNPW - ATSv5 Automated Tuner System

Software Overview 27▪ MT993A - Power Characterization Application Software 28• Noise Characterization Application Software 30• MT993B01 - Ultra-Fast Noise Parameter

Measurement Option 31• MT993C - Combines MT993A and MT993B 27-28. 30• MT993D - Intermod Distortion (IMD), Adjacent Channel

Power (ACP), and Error Vector Magnitude (EVM) 32▪ MT993D03 - Enhanced Time-Domain and X-Parameters

Load Pull Application Software 33• MT993D04 - Active Load Pull 34• MT993E - Programmers Edition 36• MT993F - System Control Option 35o MT993G - DC IV Curve Option 35• MT993N - Harmonic Source/Load Pull Option (Supports

Triplexer/Diplexer and Cascaded Tuner Techniques) 35• MT993J - Fixture Characterization Option 35• MT993N06 - Tuner Characterization Option 20• MT993V01 - Tuner Interpolation DLL Option 36• MT993VO4 - Tuner Movement DLL Option 36• MT993R - Tuner Automation Environment 36• tv1T993 DLL Library 36

=Cr

AMTSv2 Automated Mobile Test System Software• MT910 Series - Automated Mobile Phone Testing 37

• MT910 - Mobile Phone Tester 38

▪ MT910A - GSM Standard 38

• MT910B - WCDMA Standard 38

• MT910C - CDMA2000 Standard 38

Automated TunersGeneral Information 39

High-Gamma Automated Tuners (HGT" •1 40High-Power Automated Tuners 427mm Automated Tuners 443.5mm Automated Tuners 462.4mm Automated Tuners 48Millimeter-Wave Automated Tuners 50Multi-Harmonic Automated Tuners 52

Accessories

Automated Sliding ShortsAutomated Sliding Shorts - MT999 Series 54

Pre-Matching Probe MountsPre-matching Probe Mounts - MT902A Series 56

Noise Receiver ModulesSeries Noise Receiver Modules - MT7553 Series 58

Triplexers & DiplexersPrecision Low Loss Coaxial Triplexers - 9677( ) Series 60

Precision Low Loss Coaxial Diplexers - 9677D Series 61

Load Pull Test FixturesMT964 Series Low-loss Test Fixtures for PowerApplications 62

Manual TunersGeneral Information 64

Coaxial Stub Tuners 65

Coaxial Slide Screw Tuners- Wide Matching Range 66

Coaxial Slide Screw Tuners- Standard Matching Range 68

Waveguide Slide Screw Tuners- Standard Matching Range 69

Advanced Device Characterization SystemsRF Device Characterization Systems Integration 70Integrated Load Pull and Noise Measurement Systems 71

Mixed-Signal Active Load Pull Systemso MT2000 Series Mixed-Signal Active Load Pull Systems . 72

Pulsed IV Systems• AMCAD Engineering's PIV/PLP Systems Family 75-79

3 RF Device Characterization SystemsMAURY MICROWAVE CORPORATION

RF Dev - Characterization Systems

Model Index

SOFTWARE PRODUCTS

MT910 AMTSv2 - Automated Mobile Phone Tester 37-38

ti1T910A AMTSv2 - GSM Standard 38

MT910B AMTSv2 - WCDMA Standard 38

MT910C AMTSv2 - CD61A2000 Standard 38

MT930 NCAD - Advanced Measurement & Modeling Software 16

MT930A NCAD - Basic Application 17

MT930B NCAD - Visualization Suite 17

MT9300 (WAD - Vector-Receiver Load Pull 18-19

MT930D IVCAD - Traditional Load Pull 20

MT930E NCAD - IV Curves for Load Pull 20

MT930F NCAD - Basic S-Parameters 21

MT930G NCAD - Time-Domain Waveforms 21

MT930t1 NCAD - Active Load Pull 22

MT930J NCAD - Pulsed R! Curves 23

MT930K IVCAX - Pulsed S-Parameters 23

MT930L NCAD - Scripting Language 23

MT930M1 NCAD - Linear Model Extraction 24

MT930M2 NCAD - Non-linear Model Extraction 24

MT930 M3 (CAD - Electro-thermal Model Extraction 26

MT930N NCAD - Database Analysis 26

MT930P NCAD - Measurement Toolbox 16

MT993 ATSv5 Automated Tuner System Software 27

MT993A ATSv5 Power Measurement Software 28-29

MT993B ATSv5 Noise Parameter Measurement Software 30

MT993B01 ATSv5 - Ultra-Fast Noise ParameterMeasurement Option 31

MT993C ATSv5 - Power & Noise Software Suite 27, 28, 30

Mt993D ATSv5 - IMD, ACP and EVM Option 32

MT993D03 ATSv5 - Entranced Time-Domain & X-ParameterLoad Pull Option 33

fAT993D04 ATSv5 - Active Load Pull 34

MT993E ATSv5 - Programmers Edition 36

MT993F ATSv5 - System Control Option 35

MT993G ATSv5 - DC IV Curve Option 35

MT993H ATSv5 - Harmonic Source/Load Pull Option 35

MT993J ATSv5 - Fixture Characterization Option 35

MT993N06 ATSv5 - Tuner Characterization Option 36

MT993R ATSv5 - Tuner Automation Environment 36

MT993401 ATSv5 - Tuner Interpolation DLL Option 36

MT993VO4 ATSv5 - Tuner Movement DLL Option 36

AUTOMATED TUNERS

ii11975A Millimeter Wave Automated Tuner (33-50 Gilt) 39, 40-41

MT977A Millimeter Wave Automated Tuner (50-75 GHz) 39, 42-43

MT978A Millimeter Wave Automated Tuner (60-90 GHz) 39, 44.45

MT979A Millimeter Wave Automated Tuner

39, 46.47

MT981AU11 High-Power Automated Tuner (0.25-2.5 Gift)

39, 42-43

ti1T981BUxx High-Power Automated Tuners

39. 42-43

MT981BU10 High-Power Automated Tuner (0.4-4.0 GHz) 39, 42-43



MT981EU10 High-Power Automated Tuner (0.8-8.0 GHz) 39, 42-43

PAT981HU13 High-Gamma v•l Automated Tuner (0.8-8.0 GHz) 39, 40-41

MT981HU23 High-Gamma TV Automated Tuner (0.8-8.0 GHz) 39, 40-41

MT981HU33 High-Gamma TV Automated Tuner (0.8-8.0 GHz) 39, 40-41

fr1T981Htlxx High-Gamma TM Automated Tuners (HGT"il) 39, 40-41

MI98151/(110 High-Power Automated Tuner (0.4-2.5 GHz) 39, 42-43

MT982AUO2 7mm Automated Tuner (1.8-18.0 GHz) 39, 44-45

MT982BUO1 7mm Automated Tuner (0.8-18.0 GHz) 39, 44.45

MT982EU 7mm Automated Tuner (0.8-8.0 GHz) 39, 44-45

PAT982EU30 7mm Automated Tuner (0.8-8.0 GHz) 39, 44-45

MT982xU 7mm Automated Tuners 39, 44-45

tilT983A01 3.5mm Automated Tuner (4-26.5 GHz) 39, 46.47

MT984AU01 2.4mm Automated Tuner (8-50 GHz) 39, 48.50

MT982M01 Multi-Harmonic Automated Tuner (600 MHz -26 GHz)

39.52-53

MANUAL TUNERS; STUB TUNERS

1719A Coaxial Double-Stub Tuner (SMA 0.4-1 GHz) 65

17196 Coaxial Double-Stub Tuner (SMA 0.8-4 GHz) 65

17190 Coaxial Double-Stub Tuner (SMA 4-18 GHz) 65

1778A Coaxial Double-Stub Tuner (Type N 0.4-1 GHz) 65

17788 Coaxial Double-Stub Tuner (Type N 0.8-4 GHz) 65

1778C Coaxial Double-Stub Tuner (Type N 2-12 GHz) 65

1778D Coaxial Double-Stub Tuner (Type N 4-18 GHz) 65

1778E Coaxial Double-Stub Tuner (Type N 2-18 GHz) 65

1778G Coaxial Double-Stub Tuner (Type N 0.2-0.5 GHz) 65

1819A Coaxial Triple-Stub Tuner (SMA 0.4-1 GHz) 65

18198 Coaxial Triple-Stub Tuner (SW 0.8-4 GHz) 65

18190 Coaxial Triple-Stub Tuner (SMA 2-18 Mit) 65

1819D Coaxial Triple-Stub Tuner (SMA 4-18 GHz) 65

1878A Coaxial Triple-Stub Tuner (Type N 0.4-1 GHz) 65

18788 Coaxial Triple-Stub Tuner (Type N 0.8-4 GHz) 65

1878C Coaxial Triple-Stub Tuner (Type N 2-12 GHz) 65

MAURY MICROWAVE CORPORATION 4 RF Device Characterization Systems

RF Device Characterization Systehiiii:

MANUAL TUNERS; STUB TUNERS (continued)

1878D Coaxial Triple-Stub Tuner (Type N 4-18 GHz) 65

1878G Coaxial Triple-Stub Tuner (Type N 0.2-0.5 GHz) 65

261281 Coaxial Triple-Stub Tuner (7mm 0.4-1 Gtiz) 65

261282 Coaxial Triple-Stub Tuner (7mm 0.8-4 GHz) 65

261283 Coaxial Triple-Stub Tuner (7mm 2-12 GHz) 65

261284 Coaxial Triple-Stub Tuner (7mm 4-18 GHz) 65

2612C1 Coaxial Double-Stub Tuner (7mm 0.4-1 GHz) 65

2612C2 Coaxial Double-Stub Tuner (7mm 0.8-4 GHz) 65

261203 Coaxial Double-Stub Tuner (7mm 2-18 Gtiz) 65

2612C4 Coaxial Double-Stub Tuner (7mm 4-18 Gtiz) 65

2612C7 Coaxial Double-Stub Tuner (7mm 0.2-0.5 GHz) 65

MANUAL TUNERS; COAXIAL SLIDE SCREW TUNERS

1643C Coaxial Slide Screw Tuner (Type N 0.9-12.4 GHz) 68

1643D Coaxial Slide Screw Tuner (Type N 1.8-18 Gtiz) 68

1643D1 Coaxial Slide Screw Tuner (Type N 1.8-18 GHz) 66

1643N Coaxial Slide Screw Tuner (Type N 0.8-8 GHz) 66

1643P Coaxial Slide Screw Tuner (Type N 0.8-18 GHz) 66

24408 Coaxial Slide Screw Tuner (14mm 0.8-8 Gtiz) 66

2440C Coaxial Slide Screw Tuner (14mm 0.4-4 GHz) 66

2640C Coaxial Slide Screw Tuner (7mm 0.9-12.4 GHz) 68

2640D Coaxial Slide Screw Tuner (7mm 1.8-18 GHz) 68

2640D1 Coaxial Slide Screw Tuner (7mm 1.8-18 Gtiz) 66

2640N Coaxial Slide Screw Tuner 7mm 0.8-8 GHz) 66

2640P Coaxial Slide Screw Tuner (7mm 0.8-18 GHz) 66

27408 Coaxial Slide Screw Tuner (7-16 0.8-8 GHz) 66

2740C Coaxial Slide Screw Tuner (7-16 0.4-4 Gtiz) 66

7941A Coaxial Slide Screw Tuner (2.4mm 12-50 GI-1z) 66

80418 Coaxial Slide Screw Tuner (3.5mm 12-26.5 GHz) 68

8041 C Coaxial Slide Screw Tuner (3.5mm 12-34 GHz) 66

8045C Coaxial Slide Screw Tuner (3.5mm 0.9-12.4 GHz) 68

8045D Coaxial Slide Screw Tuner (3.5mm 1.8-18 GHz) 68

8045D1 Coaxial Slide Screw Tuner (3.5mm 1.8-18 Gtiz) 66

8045N Coaxial Slide Screw Tuner (3.5mm 0.8-8 GHz) 66

8045P Coaxial Slide Screw Tuner (3.5mm 0.8-18 Gtiz) 66

MANUAL TUNERS; WAVEGUIDE SLIDE SCREW TUNERS

X353 Waveguide Slide Screw Tuner (ViR90 8.2-12.4 Gtiz) 69

X353 Waveguide Slide Screw Tuner (V/R62 12.5-18 GHz) 69

X353 Waveguide Slide Screw Tuner (V/R42 18-26.5 GHz) 69

X353 Waveguide Slide Screw Tuner (V/R28 26.5-40 GHz) 69

X353 Waveguide Slide Screw Tuner (V/R22 33-50 Gtiz) 69

ACCESSORIES

MT7553 Noise Receiver Module (10 MHz - 110 Gtiz) 58-59

MT7553B Noise Receiver Module (10 MHz - 50 GHz) 58-59

MT7553B01 Noise Receiver Module (10 MHz - 50 GHz) 58-59

MT7553M10 Noise Receiver Module (75-110 GHz) 58-59

MT7553M12 Noise Receiver Module (60-90 GHz) 58-59

MT7553M15 Noise Receiver Module (50-75 Gtiz) 58-59, 71

MT964A1 7mm Load Pull Test Fixture (100 MHz - 18 Gtiz) 62-63

MT964A2 3.5mm Load Pull Test Fixture (100 MHz - 18 GHz) 62-63

MT964B1 7mm Load Pull Test Fixture (800 MHz - 18 GHz) 62-63

MT964B2 3.5mm Load Pull Test Fixture (800 MHz - 18 Gtiz) 62-63

MT986A ATS Tuner Controller (GPIB) 36

t,1T986B ATS Tuner Controller (GPIB) 36

MT986C ATS Tuner Controller (GPIB) 36

MT10208 ATS Power Distribution Hub 36, 40-41, 42-43, 48-49

MT1020C ATS Power Distribution Hub 36, 46-47, 51-52, 54-55

MT1020D ATS Desktop Switching Power Supply 40-41, 42-43, 48-49

MT902A1 Basic Pre-Matching Probe Mount (DC-50 GHz)) 56-57

MT902A2 High-Freq. Pre-Matching Probe Mount (21.5-50 GHz) 56-57

MT902A3 Low-Freq. Pre-Matching Probe Mount (8-21.5 GHz) 56-57

MT902A5 Basic Pre-Matching Probe Mount (DC-50 GHz)) 56-57

MT902A6 High-Freq. Pre-Matching Probe Mount (21.5-50 GHz) 56-57

MT902A7 Low-Freq. Pre-Matching Probe Mount (8-21.5 Gtiz) 56-57

MT999A Automated Sliding Short (0.8-7.5 GHz) 54-55

MT999B Automated Sliding Short (3.0-18 GHz) 54-55

9677x Precision Low Loss Coaxial Triplexers 60

9677Dxx Precision Low Loss Coaxial Diplexers 61

RF DEVICE CHARACTERIZATION SYSTEM INTEGRATION

MT900 Probe Station Integration 70

ADVANCED RF DEVICE CHARACTERIZATION SYSTEMS

MT2000A Mixed-Signal Active Load Pull System (400 MHz - 18 GHz) . 72-74

MT2000B Mixed-Signal Active Load Pull System (400 MHz - 18 GHz) .. 72-74

MT2000C Mixed-Signal Active Load Pull System (1 - 26 GHz) 72-74

MT2000D Mixed-Signal Active Load Pull System (1 - 26 GHz) 72-74

AMCAD ENGINEERING PULSED IV SYSTEMS

PIV AMCAD Pulsed IV Systems 75-79

PLP AMCAD Pulsed IV Systems 75-79


5


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Pitfalls 'o Avoid When PurchasingAthomated Tuner System

What Really Matters in Choosinga Tuner-Based Measurement andCharacterization System?How do you choose between the various passive solid-state andpassive-mechanical systems on the market today. What aboutactive-injection systems? What really matters in choosing anautomated tuner system?

The answer depends on your application requirements andmeasurement goals. Tuner characteristics are very important,but their relative priority depends on how well specifictuner attributes meet the needs of your measurement andcharacterization applications. For example, while passive-mechanical tuner systems can be used for both noise andpower characterization, a passive solid-state system - due toits smaller module size and higher-speeds - might be a betterchoice for high speed on-water lot-tracking of low-noise CMOSprocesses. Similarly, a passive-mechanical tuner system isnecessary for very high power applications, roughly anythingover 1 ohm or so. Active-injection systems are primarily foundin mm-wave applications where cabling and wafer-probe lossesare high.

Assuming you know which system architecture best meets yourneeds, what distinguishes one manufacturer's products fromanother's? What are the pitfalls to look out for when choosing asystem?

Pitfall #1.Avoid choosing a tuner-based system that doesn't score highon repeatability.

Because passive tuner-based systems rely on a prioricharacterization of tuner impedances, the ability to repeattuner impedance states is critically important in ensuringthe accuracy and meaningfulness of device characterizationdata. Use of inaccurate impedance data in matching networksynthesis or model verification will lead to differencesin measured or simulated performance with respect toperformance reported by the automated tuner system. A goodsystem, like the Maury passive-mechanical tuner systems inthis catalog, typically exhibit better than -60 dB and -70 dBrepeatability to 50 GHz. Since this exceeds VNA calibrationuncertainty by a wide margin, Maury's automated tuners areessentially transparent in terms of repeatability.

When considering a tuner's repeatability, don't be fooledby "creative" specifications. Maury tuner repeatability isdetermined by measuring the actual "worst case" error betweenany two measurements at the same impedance positionfor more than 13,000 impedance positions over the entirefrequency range and full matching range of the tuner. Comparethat to other manufacturers who advertise the "average"repeatability of their tuners. Any tuner's average repeatabilityerror vector can be made to look better than its worst case errorvector. Relying on the average can provide a misleading, andinaccurate picture of the tuner's performance.

Pitfall #2.Avoid choosing a tuner-based system that lacks sufficientimpedance range and distribution.

Impedance range, often called matching range or mismatchrange, refers to the impedance range a tuner can present. Thisis a critical characteristic for high-power applications, wheresub 1 ohm impedances are often encountered. Impedancedistribution refers to coverage of impedance points over theSmith chart and the distribution of those points within thatregion.

Pitfall #3.Avoid choosing a tuner-based system with slow tuning speed.

Tuning speed refers to the time it takes a tuner to move fromone impedance state to the next. This is a critical characteristicwhen making measurements, such as collecting lot-trackingdata for a low-noise process. Total measurement time, at eachimpedance, is a function of measurement equipment and thetype of measurements being made, plus the inherent tuningspeed.

Pitfall #4.Avoid choosing a tuner-based system with insufficient powercapability.

Power capability refers to both the maximum rms and peakpower that can be delivered to a tuner without any appreciablechange in tuner impedance or any damage to the tuner. A hightuner insertion loss results in heating of tuner elements, whichcan perturb the calibrated impedance seen by the device-under-test (DUT). An improperly designed tuner, along withcertain classes of RF connectors, can exhibit corona dischargeor arcing, resulting in damage to the tuner or the DUT.

Pitfall #5.Avoid choosing a tuner-based system with insufficientresolution.

Tuner resolution refers to the number of impedance points thatcan be synthesized by the tuner. Solid-state tuner systems areusually composed of two individual cascaded tuners, each witha few hundred points, resulting in over 500,000 tuning points.Passive-mechanical tuner systems typically exhibit 10,000points using one tuner. This can be expanded to millions ofpoints using cascaded tuners or interpolation.

How much resolution is enough? It depends. Consider a typicaltransistor used as a final-stage for a 3.2 V GSM PA. The loadimpedance needed for this transistor to deliver 35 dl3m is about2 ohms. Normal manufacturing targets for supply voltage changeover battery charge-time require an impedance resolution, DIG',of about 0.009. Even in the extreme case of uniform coveragein the gamma-domain, this tuning resolution requires only50,000 impedance states, which can easily be achieved usingMaury passive solid-state or passive-mechanical tuners.


• %. . •RP Device Characterization Systems

Pitfall #6.Avoid choosing a tuner-based system with insufficientbandwidth.

Tuner bandwidth usually refers both to the frequency range ofthe tuner and to its instantaneous bandwidth. Tuner frequencyrange refers to the bandwidth over which the tuner is ableto present its specified impedances. Both passive solid-stateand passive-mechanical usually exhibit at least a decadeof operating range. Instantaneous bandwidth refers to themodulation envelope within which impedance remainsconstant. This is an important parameter for widebandmodulation formats such as WCDMA.

Maury passive-mechanical tuners are based on a slabtransmission line loaded by a pair of shunt sliding-shorts, orprobes. A precision stepper motor controls the distance of theprobes from the center conductor, and another stepper motorcontrols distance of the probe assembly from the load. Oneprobe operates at the low end of the tuner's frequency range,and the other at the upper end. The paired probes provideoverlapping high and low coverage to increase the tuner'soperating bandwidth to over a decade. The physical resolutionof the probe assembly coupled with advanced interpolationalgorithms, enable users to synthesize millions of impedancepoints across the tuner's full bandwidth.

Pitfall #7.Don't overlook the importance of tuner size and case ofintegration.

Tuner size can be very important in certain applications, as isthe potential difficulty or complexity of their integration intoa test setup. These factors are more often a concern when thesetup is on a probe station and the application(s) are to bedone on-wafer and at high speed. In such an environment, in

situ calibration is normally used, and acoustic vibrations maybe a concern. Most passive-mechanical tuners require specialmounting plates, and/or probe extensions to accommodate theirphysical dimensions.

Pitfall #8.Avoid choosing a tuner-based system whose manufactureroffers insufficient after-sale support.

After-sale support is as critical in the device characterizationfield as it is anywhere. Unfortunately, not all manufacturers areas prepared, or as good, at supporting their products as theyare at selling them. Low price always seems good at the timeof purchase, but may be hiding a high cost to be paid in timelost while waiting for support. Be sure to satisfy yourself that thecompany behind your tuner-based system has the commitmentto customer support that you are entitled to.

ConclusionThe factors impacting your choice of tuner-based measurementsystems are mostly determined by the requirements of yourapplications. Once you know what system architecture bestsuits your needs, choosing the right tuner system depends agreat deal on what you know about who makes it and howthey address the issues of bandwidth, repeatability, tuner speed,impedance range and distribution, power capability, andtuner size and ease of integration. No two systems are exactlyalike, because the applications they serve are almost alwaysunique. Hopefully, the information in this article will help youin making what is always a complicated choice. When you'reready, Maury's team of system integration specialists is here tohelp you build a device characterization system that is tailoredto your needs an that will provide you with the highest level ofConfidence in Measurement.


Device CharSeterizatIon Systems

General [InformationHow To Order Maury ProductsOrders may be placed directly with the factory or in care of yournearest Maury sales representative. For orders originating outsidethe United States, we recommend placing the order through yourlocal Maury sales representative. Maury maintains an extensivenetwork of sales representatives throughout the world. To findyour local Maury sales representative use the interactive indexon our web site at maurymw.com/srx.htm.

Pricing and QuotationsPrices for Maury products are those prevailing when an order isplaced except when the price is established by formal quotation.Maury Microwave reserves the right to change prices at any timewithout notice. Price and availability of products with customor special features must be verified by a valid, formal factoryquotation. Maury quotations are valid for a maximum of 30 days.Extensions beyond 30 days can be granted only by the factory.

Terms of SaleDomestic terms are net 30 clays from the date of invoice forcustomers with established credit F.O.B. Ontario, California.Please refer to Maury Form 228 for complete terms andconditions. For International sales, please refer to Maury Form250. Sales to Canada are covered by Maury Form 251. Theseforms are available on request, or may be found on our web sitein PDF format.

ShipmentAll shipments are at the buyer's expense. Shipments are normallymade using methods and carriers specified by the customer.In the absence of specific instructions, Maury will ship at ourdiscretion by the most advantageous method. All shipments areF.O.B. the Maury factory in Ontario, California (U.S.A.) and,unless otherwise specified, will be insured at full value at thecustomer's expense. Shipments are packed to provide amplesafety margin against transit damage, and there is no charge forregular packing requirements. Additional charges apply to MIL-SPEC preservation, packaging, packing and marking.

Product and Specifications ChangesThe information, illustrations and specifications containedin this catalog were current at the time of publication. MauryMicrowave is continually striving to upgrade and improve ourproduct offering and therefore, reserves the right to changespecifications, designs and models without notice and withoutincurring any obligation to incorporate new features on productspreviously sold.

Because products are changed or improved with time,please consult your local Maury representative, or our SalesDepartment, for current pricing and product information beforeplacing orders.

Product SelectionMaury representatives and sales office personnel are wellqualified to provide assistance in product selection, and currentpricing and availability. Our factory applications engineers areready to assist you with any technical or applications questionsyou may have.

Service and SupportWarranty

Maury Microwave is highly confident that our products willperform to the high levels that our customers have come toexpect. As an expression of that confidence, our products arewarranted as noted in the abbreviated warranty statementsbelow. (For a complete statement of the hardware warranty,please see Form 228, Terms and Conditions of Sales. For acomplete statement of the software warranty, please see Form273, Maury License Agreement.)

Maury Microwave hardware products are warranted againstdefects in material and workmanship for a period of one yearafter delivery to the original purchaser. If a Maury manufacturedhardware product is returned to the factory with transportationprepaid and it is determined by Maury that the product isdefective and under warranty, Maury will service the product,including repair or replacement of any defective parts thereof.This constitutes Maury's entire obligation under this warranty.

Maury warrants that, for a period of ninety (90) days followingpurchase, software products, including firmware for usewith and properly installed on a Maury designated hardwareproduct, will operate substantially in accordance with publishedspecifications, and that the media on which the product issupplied is free from defects in material and workmanship.Maury's sole obligation under this warrant}, is to repair or replacea nonconforming product andor media, provided Maury isnotified of nonconformance during the warranty period. Maurydoes riot warrant that the operation of the product shall heuninterrupted or error-free, nor that the product will meet theneeds of your specific application.

The warranty does not apply to defects arising from unauthorizedmodifications, misuse or improper maintenance of the product.Warranty service is available at our facility in Ontario, California.

Service Returns

Repair and calibration services are available for Maury productsfor as long as replacement parts are available. On sonicinstruments, support services may be available for up to tenyears.

Quality ProfileMaury Microwave Corporation enjoys a well-earned reputationfor excellent, technically advanced products that are reliable,meet specifications, arid provide a quality appearance.Maintaining and improving this reputation requires adherenceto strict quality standards that are set forth in a formal QualityDepartment Manual. This manual is distributed to all Maurymanagers, inspectors, and technicians. The Quality Manualcan he reviewed by our customers at our facility in Ontario,California.

Our inspection and calibration systems are in accord with MIL-I-45208A and MIL-STD-45662A, respectively. Our overall qualitysystem has been approved through in-house surveys by many ofour customers including the U.S. Government. Our laboratory isANSI/NCSL Z540-1 compliant with traceability to NISI.

MAURY MICROWAVE CORPORATION IS AN

1 SO 9001:2000/AS9100:2004 REGISTERED COMPANY.


RF Device Characterization Elysterne

About Maury MicrowaveCorporate ProfileMaury and Associates was founded by Mario A. Maury, inMontclair, California on October 15, 1957. With the help ofhis sons, Mario A. Maury, Jr. and Marc A. Maury, the companyearned a solid reputation in the microwave test, measurementand calibration industry. Today, after more than 53 years weserve our customers as Maury Microwave Corporation. Weare proud of our company and the products we make, we arededicated to the pursuit of quality, and we are committed toproviding the very best in customer service.

Markets ServedMaury Microwave serves all areas of the RF and microwaveindustry, producing a comprehensive line of automated tuners,microwave components and accessories that operate from DCto 110 GHz. Our offering includes a wide range of test andmeasurement products that are used extensively by the wirelesscommunication industry for power and noise characterizationof transistors and amplifiers. Our precision calibration standardsare used for test and measurement applications and productiontesting. Maury also produces system components for groundbased and airborne applications such as communications, RV/ECM systems, and radar.

Manufacturing TechnologiesOur factory is equipped with the latest 7-axis CNC machines andcan handle high volume production as well as high precisionsmall-quantity manufacturing. We maintain a state-of-the-artmicrowave laboratory using the latest test equipment and vectornetwork analyzers to support our test and calibration operations.Our in-house manufacturing and testing capabilities allow usto provide custom products tailored to our customers' specificrequirements.

Business AlliancesAs a leader in the RI' and microwave calibration and measurementfield, Maury has long been recognized for the accuracy, repeatability,and stability of our products. Agilent Technologies acknowledgedthis in September, 2001 by inviting Maury Microwave to become aChannel Partner for device characterization solutions. The ongoingsuccess of that relationship led to Maury's current recognition as anAgilent Global Solutions Partner. We also enjoy close business tieswith Cascade Microtech of Beaverton, Oregon and Inter-ContinentalMicrowave of Chandler, Arizona.

Technical ServicesOur extensive knowledge and experience with calibration andmeasurement requirements provides the expertise necessaryfor producing high quality products. Maury Calibration andRepair Services are available for every product we make, andare performed in a temperature-controlled environment with thelatest in measurement and verification equipment.

Products & TechnologiesMaury makes RF and microwave devices that cover a range fromDC to 110 GHz, primarily addressing test and measurementapplications. Coaxial components are available to 67 GHz inmost popular line sizes and we also manufacture waveguidecomponents from WR650 to WR10.

Maury's extensive line of VNA calibration kits also supportsAgilent's PNA and ENA series, as well as Rohde and SchwarzDI series and Anritsu 37000 series network analyzers. Also, newdigital connector gage kits are now available in 3.5mm/2/92mmand 2.4mm/1.85mm combination models.

FacilitiesLocated in the City of Ontario, California, about 40 miles dueeast of Los Angeles and just north of the San Bernardino Freeway(Interstate 10), our 96,000 square foot facility is within minutesof the Ontario International Airport (ONT). Here, we make thebest microwave products in the market.

MAURY MICROWAVE CORPORATION 9


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iVilaury's Strategic AlliancesIn The Test & Measurement IndustryWorking Together To Provide The Right Solutions For Your Applications

Agilent Technolgies, Inc. AMCAD Engineering

Agilent Technologies

I— Global Solutions Partner

Agilent's electronic measurement products provide standardand customized electronic measurement instruments andsystems, monitoring, management and optimization tools forcommunications networks and services, software design toolsand related services that are used in the design, development,manufacture, installation, deployment and operation ofelectronics equipment and communications networks andservices.

Agilent RF & Microwave test equipment allow Maurv'sEngineering Experts to provide customer needs with highprecision and advanced services (pulsed IV/ RE measurements,Load-Pull characterization — CW and pulsed, two-tones, etc.),and are used to support the R&D engineers developing newcharacterization techniques.

Moreover, as Agilent's solutions partner Maury works closelywith Agilent on the development of new applications for thePNA-X which take advantage of its advanced features andextend and enhance its capabilities into high-power, high-speedand 50 ohm environments.

Anteverta Microwave

nTeverTamicrowave

Anteverta microwave provides pioneering solutions in thefields of device characterization and high performance poweramplifier design. We seek to offer the industrial and R&D worldwith system solutions addressing the most demanding needs interms of speed, accuracy and multifunctional capabilities.

Anteverta microwave was launched in March 2010 as a spin-offfrom the Delft University of Technology in The Netherlands.Anteverta microwave was born as the development of adecade of successful research in the fields of large signaldevice characterization and high efficiency/linearity PA design.In May 2010 Anteverta microwave licensed its products toMaury Microwave Corporation to merge its innovative sidewith the strengths of the most reliable provider of non-linearcharacterization systems.

AMCAD Engineering0, Advanced Modeling for Computer-Aided Design

AMCAD is a provider of new RF & Microwave solutions.Founded in 2004 with Headquarters and Lab in Limoges,France, its founders have brought together a multi-disciplinaryand high skilled team.

Core Activities:Development and provision of solutions and tools forsemiconductor professionals, with emphasis on ComponentMeasurements and Modeling, Circuit Design and SystemsBehavioural Modeling. AMCAD Products include AdvancedPulsed IV / RF systems and IVCAD data management software.

AMCAD's Pulsed IV/RF System is an advanced componentscharacterization system that is essential to semiconductortechnology development, device reliability and lifetime testing,and semiconductor device modeling. Its key features include10A-240V pulse generation, pulse widths down to 200ns, highprecision current and voltage measurement, synchronizedS2P capabilities to 40G1-iz, and self-heating and trappingphenomena characterization; all of which makes it the ideasystem for modeling a wide range of devices.

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IVIAURY MICROWAVE CORPORATION

10 RE Device Characterization Systems

Certificate No. 3867 (Revised 8/2/2010 - 2 Copies18/2/2010 through 1/15/2012

Certificate of RegistrationThis is to certify that the Quality Management System of

tAIIRMICROWAVE

CORPORATION

2900 Inland Empire Boulevard, Ontario, California 91764 USA

Has been assessed by EAGLE Registrations Inc. andconforms with the following standard:

ISO 9001:2008 with AS9100:2004 Rev BThis assessment was performed in accordance with the requirements of AS9104A.

EAGLE Registrations Inc. is accredited under the aerospace Registrar Management Program

Scope of Registration

Design Manufacturing and Servicing of Microwave. Based Measuring and TestingEquipment for the Aerospace, Defense and Wireless Telecom Industries.

Operatio s Director

EAGLE Registrations Inc.II I VICE • INTEGRITY • VALUE

40 N. Main StleeL Sul* 24101 Da ?anti OH 45423 NSAyr./ esq'avglstratord can

;RF Dev cterization Systems

Maury Microwave Corporation IISO 9001:2008AS9100:2004 Rev B Documentation

Maury is registered as an ISO 9001:2008/AS9100:2004 Rev B compliant company for Design,Manufacturing and Servicing of Microwave Based Measuring and Testing Equipment for theAerospace, Defense and Wireless Telecom Industries.



F1F Device Characterization• Systems

Calibration and Repair Services

Calibration ServicesAt Maury Microwave, our commitment to quality doesn't endwith the sale of a product. In our state-of-the-art microwavelaboratory, we offer both ANSI/NCSL Z540-1 (MIL-STD-45662A) calibration and commercial level calibration servicesfor every product we produce. Our laboratory is ANSI/NCSLZ540-1 ISO 10012-1 compliant with traceability to NIST(National Institute of Standards and Technology).

Each Maury Microwave product is shipped with a certificate ofconformance which assures that it has been tested and found tobe within operational tolerances. As these products are used,changes can occur which may result in an out of tolerancecondition. Periodic calibrations are therefore recommendedto maintain functional integrity. We are happy to perform thecalibrations you need at a reasonable cost.

Please contact our Calibration and Repair — MeasurementServices Department to obtain quotations for the specificcalibration services you require. Quoted prices will coverthe cost of all applicable measurements and include writtencalibration reports documenting the mechanical and electricaldata. If parts are out of tolerance, the cost of repair orreplacement will be quoted for your approval prior to the startof any additional work.

It is recommended that the following items he placed on a12-month re-calibration cycle:

• Calibration Kits

• Verification Kits

• Coaxial Components for Laboratory Use

• Waveguide Components for Laboratory Use

• Automated Tuner Systems

• Noise Calibration Systems (Cryogenic, Thermal andAmbient Terminations) Mechanical Products

• Torque Wrenches

• Connector Gages

Repair ServicesWe recommend annual re-calibration and refurbishment ofyour Maury products to ensure continuous measurementaccuracy. Because we are the original equipment manufacturerand users of Maury products, we understand the criticalperformance criteria of your measurement equipment.Therefore, we will always give you an honest evaluation of eachand every Maury part when repairs are required. We will alsoprovide you with options and our best recommendation foroptimum performance.

Annual re-calibration and servicing guarantees:

• Accuracy and Confidence in your Network AnalyzerMeasurements

• Precision Connector Mating

• Verification of Critical Mechanical and ElectricalSpecifications

• All Interfaces meet "As New" Mechanical Specifications toEnsure Predictable S-Parameter Performance

• Prolonged Life of Both Maury Measurement Standards andYour Network Analyzers

• Confidence That Your Maury Product Will Be As Precise AsWhen First Delivered

• Refurbishment Done Right and Done Here In Our Factory

• Guaranteed Genuine Maury Parts and Quality

• We Design It, We Build It, We Calibrate It, We Repair It.

Benefits of Maury Calibration and Repair:

• Calibration and Repairs Performed Directly By The OEM(No Middleman Delays or Mark-Ups!)

• Complete Confidence In Your Measurements

• Protects Your Costly Network Analyzer Investment

• Maintains Your ANSI/ISO Compliance and NIST Traceability



RP Device Characterization Systems

Maury Automated Tuner Systems

IntroductionThe Maury Automated Tuner System (ATS) is a fast broad-band, automated impedance control system that permitsthe introduction of a wide range of known source and loadimpedances into device measurement systems to determine avariety of device parameters under actual operating conditions.

The ATS is primarily used for accurate de-embeddedperformance evaluation of the power, intermodulationdistortion, adjacent channel power, noise and network(S-parameter) characteristics of packaged or on-wafer devicesunder variable impedance matching conditions.

The major system elements consist of automatedelectromechanical slide screw tuners or solid state tunermodules; a power source or power distribution hub; and PC-based measurement software. These components are integratedinto test bench setups that may include a variety of systemelements and components including additional tuners, VNA,PNA, ENA, or LSNA, a wafer probe station, noise figure meters,noise sources, power meters, bias tees, noise receiver modules,diplexers, triplexers and a wide range of cables, connectors,and adapters. All Maury ATS hardware is designed to integratesmoothly into any test bench setup.

ATS Complete SystemsATS complete systems are configured to meet user-specifiedapplication requirements, but generally consist of at least twotuners, ATS Automated Tuner System software, a tuner controlleror power distribution hub, a serialized hardware key (whichallows the software to run on a PC), and an instruction manual.The tuner models shown in this catalog may also be used inany automated or manual application requiring impedance

matching of a microwave circuit element or to establish specificimpedances at a terminal interface.

Maury will also work with you to configure a fully integrateddevice characterization system, built around a complete ATSsystem, which can include any VNA, PNA, ENA, probe station,bias supply, etc. that your applications require. If you prefer,we can provide your integrated systems as a turn-key package,ready for installation at your location.

Maury tuners are also sold in GPIB-compatible and (in mostcases) USB-compatible versions. Future product developmentwill be incorporated into the USB-compatible versions, andGPIB-compatible versions will continue to be produced foras long as they are needed to supply customers requiringreplacement or additions to their Maury legacy systems.

The solid state systems in this catalog are manufacturedby Maury under license from Agilent Technologies usingtechnology originally developed by ATN Microwave. Mauryalso provides warranty support for ATN legacy systems. (Seepage 75.)

Training and InstallationMaury holds periodic, two-day training seminars at the factoryin Ontario, California. Purchasers of complete systems maysend two attendees to one of these seminars (transportation andhousing at the customers's expense). Each seminar includescomprehensive, hands-on training in ATS theory and operationfor all applications and measurement modes. After delivery,and when all support equipment is in place, a Maury engineerwill travel to the purchaser's site to install and ensure properoperation of the ATS.


13


Device Characteirizatioti Systems

FT Device Characterization Methods

Why Do We Make Automated TunerMeasurements?RF and microwave transistors are used to amplify three signalcomponents; voltage, current and power. To understand andpredict the performance of a given transistor it is necessary touse a common parameter to define (or characterize) these threesignal components. That common parameter is impedance.Automated tuner measurements enable rapid and accuratecharacterization of deembedded transistor linearity, and poweradded efficiency (PAE), with respect to impedance. Applicationof automated tuner measurements is diverse, from extractionof noise parameters to adjacent channel power ratio (ACPR)characterization optimization of power LDMOS transistors, tomismatch ruggedness characterization of handset PAs.

What is Automated Tuner-BasedCharacterization?Tuner-based characterization refers to applications whichestablish transistor performance by varying source and loadimpedance. Automated tuner-based characterization refersspecifically to introducing a known impedance into a networkin a precisely controlled fashion. Tuner-based measurementsare an integral part of the characterization and design process.By varying source and load impedance, along with frequencyand bias, automated tuner-based characterization rapidlyand accurately establishes conditions under which optimumperformance can be obtained. Automated tuner measurementsare also an integral part of linear and nonlinear modelverification and semiconductor process tracking.

Commonly used tuner-based characterization architecturescan be distinguished from each other by the fashion in whichimpedance is synthesized. Measurement and characterizationrequirements and goals will constrain which type ofarchitecture is most suitable. Impedance range, tuning speed,power handling capability, tuning resolution, tuner bandwidth,and tuner size are important considerations in choosingwhat type of tuner architecture to choose. Passive solid-state,passive-mechanical, and active-injection are the three basicarchitectures for synthesizing arbitrary impedances. Passivesolid-state and passive-mechanical are the most common, whileactive-injection is used primarily in mm-wave applicationswhere cabling and wafer-probe losses are high.

Applications in which performance can be extrapolatedover a broad range of impedances from a small number ofimpedances, (e.g., determining minimum noise figure) can bedone easily and quickly using Maury's solid-state tuners andATSv5 software.

Requirements for high-power characterization (1 Q or greater)place different demands on the tuner architecture. The abilityto synthesize impedances in the neighborhood of 1 ohm isnecessary to establish the conditions under which optimumpower, gain, PAE, and linearity can be established. Maury'spassive-mechanical tuners, with dynamic pre-matching or

distributed pre-matching networks, provide a repeatable andaccurate solution for synthesizing sub 1 Q impedances over abroad range of frequencies.

Basics of Automated Tuner-BasedMeasurementScattering Parameters, or S-parameters, describe the scatteringand reflection of traveling waves when one or more devicesare inserted into a transmission line. S-parameters are used tocharacterize high frequency networks, where simpler methodsare not applicable. S-parameters, often called ComplexScattering Parameters, are measured as a function of frequency,and, as such, they completely describe the behavior of a deviceunder linear conditions within a given microwave frequencyrange. Each parameter is typically characterized by magnitude,decibel and phase. Maury's ATSv4 software is designed tosimplify and automate the process of s-parameter measurement.

Thermal Noise, commonly referred to as noise, greatly affectsthe performance of linear microwave and RF systems. TheComplete Noise Figure of a device may be determined byperforming a set of basic noise measurements to find theminimum noise figure (Ernin), optimum complex reflectioncoefficient (Copt), and noise resistance (Rn), at a variety of user-selected source impedances.

To find Emin, Gopt, and Rn, the simple noise figure mustbe measured at a variety of source impedances. Since Goptis complex, this makes a total of four scalar parameters. Inprinciple, this means that only four measurements are required.However, in practice, it is much more effective to measuremore points, and use a "least means square's" mathematicaltechnique to extract the parameters from pre-determined data.The ATSv5 software requires a minimum of six positions, butmore may be used.

Noise Characterization also requires the parameters of thedevice-under-test (DUT) to be separated from the parametersof the measuring system to which the DUT is connected. Todo this, the system must be calibrated to learn the systemparameters. The noise contribution of the system (often calledthe second stage since it follows the DUT) will vary with itssource impedance.

Therefore, the complete noise and gain parameters ofthe system must be known to determine the system noisecontribution when a particular DUT is connected.

Maury's ATSv5 software is designed to find the complete set ofnoise parameters consisting of Emin, Gopt, and Rn. Gopt is thesource reflection coefficient which corresponds to Emin. Rn isa scale factor which shows how fast F changes with Cs. (Thesoftware actually displays rn, which is Rn normalized to 50 Q.)

Basic Power applications are used to determine the optimumload and source termination conditions for optimizing deviceperformance. These applications include power output,transducer gain, power gain, PAE, and up to other functions.



RF .

DeviceCharacterization Systems

Measurement modes include load-pull and source-pull, singleinput power measurements at selected impedances, and sweptpower measurements at selected impedances.

Load Pull consists of varying or "pulling" the load impedanceseen by a DUT while measuring the DUT's performance.Source Pull is the same as load pull except that the sourceimpedance is changed instead of the load impedance.

As a design tool, load pull/source pull is used to measure aDUT under actual operating conditions. The application isbased on measuring the performance of a transistor at varioussource and/or load impedances, and fitting contours in thegamma-domain to the resultant data. Measurements may alsobe made under various bias and frequency conditions. Severalparameters can be superimposed over each other on a Smithchart and trade-offs in performance established. From thisanalysis, optimal source and load impedances are determined.

Load-pull can be classified by the method in which sourceand load impedances are synthesized. Since the complex ratioof the reflected to incident wave on an arbitrary impedancecompletely characterizes the impedance, along with a knownreference impedance, it is convenient to classify load-pull byhow the reflected wave is generated.

Passive-mechanical systems are capable of presentingapproximately 50:1 VSWR, with respect to 50 Q, and arecapable of working in very high power environments.Repeatability is better than -60 dB. For high-power applications,e.g., > 100 W, the primary limitation of passive-mechanicalsystems is self-heating of the transmission line within the tuner,with the resultant thermally induced expansion perturbing theline impedance.

Harmonic Load Pull consists of tuning the source and/or loadimpedance at a harmonic frequency (F2 or F3) while measuringdevice performance at the fundamental (FO). Harmonic loadpull can especially affect efficiency and linearity. The effect ofharmonic tuning depends strongly on the fundamental load pulltuning as well as the device type, operating point, drive power,and other factors.

High isolation between the fundamental and harmonic tuningis critical since the purpose of harmonic tuning is to separatethe effects of tuning FO, F2, and F3. Maury has adopted thedi/triplexer method of harmonic tuning due to its superiorisolation, resulting in nonexistent fundamental impedancepulling. Isolation far exceeds the ability to even measure itusing conventional \INA methods. The accuracy expectedfrom using a high-performance calibration method, like TRL,is maintained, with the Maury di/triplexer harmonic tuningmethod.

Due to advances in harmonic tuning algorithms and theimplementation of new software features Maury's method ofcascading tuners for harmonic load pull has become a viableand recommended option that overcomes any and all issuesrelated to tuning isolation. Using this method it is possiblefor two or three tuners to be cascaded externally to achieveextremely high magnitudes of reflection (VSWR in the order of100:1-200:1, 1>0.98) as well as control multiple impedancesat multiple frequencies (wideband harmonic tuning). Due tothe use of calibrated and interpolated data for all tuners, we are

able to achieve an overall system-level accuracy of greater than40-80dB at highest F's.

The results achieved with Maury's cascaded tuning method forharmonic load pull are unmatched in the industry. Cascadingtuners gives the flexibility to upgrade existing systems, allowsgreater variety in the usage of tuners (independent single-frequency tuning on multiple workstations), and offers a morewideband harmonic solution than any other method.

Advanced Applications including Intermodulation Distortion,ACPR, Pulsed Power Measurements (i.e., GSM/EDGE/GPRS,etc.), are also supported by Maury ATS tuners and software.

The New Frontier ... Beyond 50 OhmThe trend in modem communications applications is towardshigher power drive levels and more complex modulationschemes. These large-signal conditions cause devices andcomponents to exhibit nonlinear behavior, significantlydegrading system level performance.

As designers measure, model, and design devices or systemsthat operate under large-signal conditions, many designiterations are necessary. Design verification has become a largeportion of the overall development time. Accurate and efficientmeasurements, which truly characterize nonlinear devices, areneeded to get insight in the operation of devices, componentsand subsystems. Such measurements also help to create andimprove nonlinear device models. Current tools, such as vectornetwork analyzers, spectrum analyzers, digitizing scopes,microwave transition analyzers and load-pull measurementsystems, each analyze only certain aspects of a nonlinearbehavior. They do not provide fully calibrated characterizationunder large signal conditions.

Maury and Agilent have teamed together to address theseneeds and have developed a number of breakthrough methodsthat combine the capabilities of Agilent's PNA-X test sets (withX-parameter and NVNA options) together with Maury ATSv5.01 software to apply load pull with NVNA X-parameters toproduce an enhanced time-domain measurement system with26 GI-1z of bandwidth. The enhanced X-parameter data can beimmediately and directly loaded into non-linear simulators andused as PHD component models that can be used with greatconfidence.

Another breakthrough method that combines Maury's ATSsoftware with Agilent's PNA-X NVNA to make ultra-highspeed noise parameter measurements. This method utilizesa very simple setup that takes advantage of the built-in noisereceiver and fast sweep capability of the analyzer, and typicallyspeeds up the calibration and measurement time by 200x to400x; making it practical to sweep a much larger frequencyset. The resulting much higher speed allows users to do fullin-situ calibration (thus minimizing errors) and measure largefrequency sets to obtain a better view of scatter and cyclicalerrors, which allows the use of smoothing with greaterconfidence. The higher frequency density also enhancesaccuracy by reducing shifts due to aliasing.

Further details are included in the discussion of the MauryMT993B01 and MT993D03 software options shown on pages31 and 33 in this catalog, respectively.


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Maury IVCAD Software Completes the Cycle fromPulsed-IV and S-Parameters, to Harmonic LoadPull, to Compact Transistor Models!

IntroductionIVCAD advanced measurement and modeling software, offeredby Maury Microwave and AMCAD Engineering supportsmultiple load pull techniques including traditional load pullusing external instrumentation, VNA-based load pull, activeload pull and hybrid load pull. It performs noise parametermeasurements, DC-IV and pulsed-IV measurements andincorporates device modeling tools. Its modern visualizationcapabilities give users a greater ability to view, plot and graphmeasurement data in an intuitive manner.

IVCAD Software Suite Modelso MT930A — IVCAD Basic Application

o MT930B — IVCAD Visualization Suite

o MT930C — IVCAD Vector-Receiver Load Pull

o MT930D — IVCAD Traditional Load Pull

o MT930E — IVCAD IV Curves for Load Pull

o MT930F — IVCAD Basic S-Parameters

o MT930G — IVCAD Time-Domain Waveforms

• MT930H — IVCAD Active Load Pull

o MT930J — IVCAD Pulsed IV Curves

o MT930K — IVCAD Pulsed S-Parameters

o MT930L — IVCAD Scripting Language

• MT930M1 — IVCAD Linear Model Extraction

o MT930M2 — IVCAD Non-linear Model Extraction

o MT930M3 — IVCAD Electro-thermal Model Extraction

o MT930N — IVCAD Database Analysis

o MT930P — IVCAD Measurement Toolbox


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MT930A IVCAD Basic ApplicationIVCAD Base Application is needed to operate any of thefollowing IVCAD measurement, modeling and visualization

modules.

MT930B IVCAD Visualization SuiteIVCAD offers a modern and intuitive visualization package forI\! S-Parameters and Load Pull data.

• 5-parameters can be viewed in standard and customformats

• Stability circles are optionally plotted on source and load

• Basic load pull visualization allows the plotting of powersweeps or impedance curves with capability of filteringmeasurement results.

• Extended load pull visualization plots power sweeps andimpedance contours simultaneously, where contours areredrawn as the user-defined input/output/source power ischanged. Multiple parameters, including frequency, canbe viewed on the same Smith Chart. Graphing can beperformed in 2D or 3D.

• Advanced filtering allows multiple definitions to be en-tered in order to limit the measured impedances to thosethat meet specific criteria.

Using the (lockable window functionalities, it's possible tocreate custom IVCAD environments.

Visualization is compatible with Maury Microwave and FocusMicrowaves load pull data formats.

Visualization of S-Parameters, IV Curves. Pulse Shape and 3D Load Pull Contour

Visualization of Advanced Sweep Plan Load Pull

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Key Features:

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• Model Validation

• Export Data to MDIF

Vector-Receiver Load PullSetup Editor

IVCAD offers a modern, efficient methodology for load pullmeasurements, with low-loss couplers between the tuners andDUT of the setup, instead of the traditional placement behindthe tuners. Connecting the couplers to a VNA allows real-timemeasurement of a- and b-waves at the DUT reference plane,presenting vector information not normally made available.IVCAD measures the actual impedances presented to the DUT

without assumptions of pre-characterized tuner positioningor losses. Extremely accurate transistor's input impedancederived from the a- and b-waves results in properly-definedinput power, power added efficiency and true power gainmeasurements. Output powers at each frequency, fundamentaland multiple harmonics, are made available, as are multi-tonecarrier and intermodulation powers.

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Advanced Sweep Plan — by performing power sweeps atmultiple impedances, sufficient data is gathered that targetparameters can be changed post-measurement without theneed for additional measurement iterations. The same data setcan be used to plot selected parameters at a constant input

power, parameters at a constant output power, parameters atconstant compression level. This process greatly reduces totalmeasurement time by gathering sufficient data first-pass, andshifting capabilities towards data visualization and analysis.

IVIAURY MICROWAVE CORPORATION


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Source Impedance Matching - Large signal input impedancecan be found by measuring DUT a- and b-waves at the DUTreference plane. A patent-pending technique simulates sourcematching, without varying the source impedance. Evenunder extremely mismatched conditions this "virtual sourcematching" is highly reliable, provided the DUT is sufficiently

unilateral (S21- >S12+50dB). Simulated source contours aredrawn, and trade-offs between maximum gain, efficiency andother parameters can be viewed in real-time without multiplesource-load measurement iterations. Direct computation of theinput VSWR versus source power and source impedance is alsoenabled.


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MT930D IVCAD Traditional Load PullIVCAD offers traditional load pull methodology consisting needed to measure ACPR, EVM, CCDF and other modulatedof power meters for absolute power readings de-embedded parameters.to the DUT reference plane, and spectrum analyzers for

With traditional load pull, a vector network analyzer is onlyharmonic content and multitone intermodulation parameters.

used to calibrate/characterize the system and is not used forTraditional load pull is also used for modulated signals where actual measurements.a vector signal generator and vector spectrum analyzer are

Release date: Summer 2011

MT930E IVCAD IV CurvesMT930E is an add-on module for MT930C and MT930Dwhich enables basic DC-IV curves to be generated for a list ofdrain and gate voltages.

CW IV Curves UnderLoad Pull Conditions


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MT930F IVCAD S-ParametersMT930F is an add-on module for MT930C and MT930D, which

Analyzer (VNA) and saved in SO' format.

enables CW S-Parameters to be read from a Vector Network

MT930G IVCAD Time Domain WaveformsMT930G is an add-on module for MT930C Vector-ReceiverLoad Pull which enables time-domain waveform reconstructionin conjunction with appropriate hardware. With the collecteddata, a- and b-waves, voltage and current waveforms, andload lines can be displayed for each measured impedancede-embedded to the device reference plane.

Currently supported instruments include Agilent PNA-X withNvNA opt ion , and vm SWAP.

Release date: Spring 2011.


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Considering our DUT as a two-port device shown below,F, is nothing more than a,/b2 , or the ratio between thereflected- and forward-traveling waves. A generalizedform of the formula can be written as

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A closer examination of the formula F,=a-Jb, revealsthat there is no limitation on separating the sources of a,and b,. It is obvious that b, is the wave coming from thedevice, of which we have no direct control; however a,need not be a reflected version of I), but can be a newsignal entirely!

Active Load Pull —Active injection load pull, more commonlyreferred to as active load pull, relies on external sources toinject a signal into the output of the DUT, thereby creatinga,. Because a 2 is no longer limited to a fraction of the originalreflected signal, as is the case with the traditional passivemechanical tuner, external amplifiers may be used to increasea, nearly indefinitely so that F„ can achieve unity (1,>1 istheoretically possible but has no practical consideration).

The simple active tuning chain consists of a signal source, avariable phase shifter and a variable gain stage, shown in thediagram below. Common signal generators that have built-inamplitude and phase control of the injected signal and are idealfor active load pull.

Harmonic load pull, or tuning impedances at multiplefrequencies simultaneously, becomes simple when using activeload pull techniques. A multiplexer can be used to mergemultiple active tuning paths, one per frequency, so that is

satisfied. Any loses inherent to multiplexers are easily overcomeby the amplifiers used in each active tuning chain.

Hybrid Passive-Active Load Pull — Both traditional passivemechanical tuner systems and active injection load pullsystems have their advantages and disadvantages. Whilemechanical tuners are simple, less expensive and can handlehigh power, there is no physical way to overcome the lossesinvolved with the system that limit achievable F,. While activeload pull systems are extremely quick, capable of F,=1 andeasily integrated for harmonic measurements on-wafer, high-power setups require more-expensive band-limited amplifiers.

It is possible to obtain the advantages of both systems whileminimizing the disadvantages, using a technique referred toas hybrid load pull. Hybrid load pull refers to a combinationof active and passive tuning in the same system. Traditionalpassive mechanical tuners can be used to reflect high powerat the fundamental frequency allowing a much smaller activeinjection signal, using much smaller amplifiers, to overcomelosses and achieve F,=-1. Additionally, since the powers atharmonic frequencies are often well below the power of thefundamental signal, less-expensive wideband amplifiers maybe used with active tuning to accomplish active harmonic loadpull with F,„,=1. In both cases, only a low power is requiredfor active tuning.

rLoadOpen-Loop Active Tuning Block Diagram


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MT930J IVCAD Pulsed IV CurvesMT930J is a stand-alone module for advanced Pulsed IVmeasurements using dedicated pulsing hardware (e.g.,AMCAD's AMBILT system).

Current-voltage (IV) measurements are used to describe therelationship between the input and output currents and voltagesof a device. Standard GaN Field Effect Transistors (FETs) arecharacterized by measuring the output current as a function ofoutput voltage for swept input voltages. Because GaN devicestend to self-heat and are susceptible to trapping effects, it isimportant to pulse voltages between a quiescent and hot valueand define appropriate pulse-widths. By pulsing the voltage,a lower average power will be delivered to the device therebyreducing self-heating. Such a measurement allows for near-isothermal performance.

IVCAD enables the visualization of trapping phenomena, gatelag and drain lag, on GaN transistors. It is a simple task to viewtrapping effects as a function of varying quiescent bias.

IVCAD has implemented full wafer control by interfacing withCascade Nucleus software.

Key Features:

• Easy Data Management

• Cohesion Between Pulsed IV and Corresponding PulsedS-Parameter Data (Requires MT930K)

• Automated Probe Station Control

• Import/Export Data to/from ICCAP, ADS, Microwave Office

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MT930K IVCAD Pulsed S-Parameters MT930L IVCAD Scripting LanguageMT930K is an add-on module to MT930J which enablessynchronized Pulsed S-Parameter measurement in conjunctionwith Pulsed IV.

MT930L is an add-on module to MT930C/D/J/K which enablescomplex test sequencing through a dedicated scriptinglanguage.

Release date: Fall 2011.


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Device Cho oterization Systems

MT930M1 IVCAD Linear Model ExtractionMT930M1 is an add-on module to M -19301 and MT930K forLinear Model Extraction using dedicated pulsing hardware (eg.,AMCAD's AMBILT system).

Linear Model Extraction is used to determine the extrinsicparameters (parasitic elements) of a HT. Linear modelingcompares measured data to default model data. The model

is manually tuned or automatically optimized by varying thevalues of Rg, Lg, Cpg, Rd, td, Cpd, Rs, Ls.

To verify the linear model behavior, it is essential to compareintrinsic elements through a multi-bias extraction. The resultinglinear model can be used with MT930M2 to generate a Non-Linear Model or directly exported to ADS.

Linear Model Comparing Measured And Optimized Data

Multi-Bias Extraction Comparison Between Measured And Modeled Data

IVIAURY MICROWAVE CORPORATION 24


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RE Device Chaiiacterization Systems

MT930M2 IVCAD Non-linear ModelExtractionMT930M2 is an add-on module to MT930MI for Non-LinearModel Extraction.

The extrinsic parameters measured through linear modeling(MT930M 1) are used to extract intrinsic parameters.

Capacitance Model Extraction —A capacitance curvecomparing Cgd as a function of Intrinsic Vgd is plotted showingboth measured and modeled data.

As with the linear model extraction, the model is manuallytuned or automatically optimized by varying the capacitancemodel parameters.

Cgs versus Vgs is tuned or optimized in the same manner.

Diode Parameter Extraction —An IV curve comparing Ig as afunction of Vds is plotted showing both measured and modeleddata.

The model is manually tuned or automatically optimized byvarying the diode model parameters.

Current Source Extraction — An IV curve comparing Id as afunction of Vds is plotted showing both measured and modeleddata.

The model is manually tuned or automatically optimized byvarying the current source model parameters.

Capacitance Model Extraction Showing Excellent Match Between Measured And Modeled Data


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AMCAD Model Implementation

MT930M3 IVCAD Electro-thermalModel ExtractionMT930M3 is an add-on module to MT930M2 for Electro-thermal Model Extraction.

Electro-thermal Model Extraction is used to determine thethermal behavior of a HT, taking into account ambienttemperature and self-heating effects.

MT930N IVCAD Database AnalysismT930N is an add-on module to MT9308 for advanceddatabase analysis and filtering. Data obtained from multiplemeasurement platforms (pulsed IV, pulsed S-Parameters, loadpull...) can become overwhelming and difficult for some usersto manage. Database analysis and filtering offers a solution tosort through multiple dimensions of data and select only thosethat are of interest to the user.

Release date: Fall 2011.


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RF Device Cherecterizetion Systems

All Automated Tuner

System Software

MT993 Series

IntroductionThe Maury Automated Tuner System Software (ATSv5) isthe easiest-to-use, yet most advanced, and most powerfuldevice characterization software in the world. It bringstogether a comprehensive suite of software tools that greatlysimplifies device characterization applications. The advanceddevelopment of this software has made it a must-have partof any modern test and measurement lab. For a growingcommunity of RF and Microwave engineers and designers,ATS software has truly become the brain behind their devicecharacterization operations.

What ATSv5 Software Can Do For YouMaury ATSv5 makes it possible to accurately measure power,gain, efficiency, IMD, ACPR, EVM, harmonics, noise parametersand many other characteristics of a device under test (DUT).Measured data from the ATSv5 software can be imported withease into Agilent's ADS software environment for simulationof device models or PAIL NA designs. Optionally, using ATSv5with the Maury DLL library gives users the accuracy andrepeatability of the Maury ATS hardware with the flexibility towrite their own custom test and measurement applications.

ATSv5 builds upon the legendary reliability and robustnessof ATSv4 which was the most comprehensive upgrade andimprovement to ATS since the Windows"' release in 2000. Thecentral features include an all new and significantly improved

GUI API for direct tuner control (eliminating the need forthe legacy tuner controller object) and the availability of acomprehensive DLL kit.

But perhaps the most exciting feature of ATSv5 is the additionof a powerful new method of cascaded harmonic load pull thateliminates the need for diplexers/triplexers.

In addition, this release of ATS has undergone extensive QAtesting, including comprehensive regression analysis foralgorithmic integrity evaluation, a rigorous automated analysisto identify, document and correct defects, and live hardwareevaluation in Maury's device characterization laboratory.

ATSv5 is designed to run under Microsoft® Windows"' XP, andWindows TM 7.

Support and UpgradesThe Maury ATS is continually being improved and upgraded.At least one formal software upgrade is produced each year.A software support agreement is available to ensure thatyour system remains current with the latest features andimprovements in measurement capability.

ATSv5 Software Suite Models

• MT993A Power Parameters, Power Measurement Mode,Swept Power Display, Load/Source Pull Contour Display

• MT993B — Noise Parameters, Interactive Noise MeasurementMode, Swept Noise Display, Noise Statistics Display

• MT993B01 — Ultra-Fast Noise Characterization Using PNA-X

• MT993C — Combines MT993A and MT993B

• MT993D — Intermod Distortion (IMD), Adjacent Channel Power(ACP), and Error Vector Magnitude (EVM)

• MT993D03 — PNA-X NVNA (Load Pull + NVNA + X-Parameters)

• MT993D04 — Active Load Pull

• MT993E — Programmers Edition

• MT993F — System Control Option

• MT993G — DC IV Curve Option

• MT993H — Harmonic Source/Load Pull Option(Supports Triplexer/Diplexer and Cascaded Tuner Techniques)

• MT993J — Fixture Characterization Option

• MT993N06 — Tuner Characterization Option

• MT993V01 — Tuner Interpolation dll Option

• MT993VO4 — Tuner Movement dll Option


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RF Device Ctiaratiterizatttel -stems

MT993A - Power Characterization Application SoftwareGeneralThe MT993A power characterization application software isdesigned to operate with the Maury Automated Tuner System(ATS) to determine the optimum load and source terminationconditions for improving device performance. This softwareis provided as part of an ATS system specified for powercharacterization; either separately as model MT993A, orcombined with the MT99313 noise characterization software asmodel MT993C.

Power ParametersIn large signal amplifier design, power output is a complexfunction of the input power level, terminating impedances, andDC bias conditions.

A load pull bench, operating with the Maury power applicationsoftware can provide fast accurate measurements of poweroutput, transducer gain, power gain, power-added efficiencyand measured input and output voltages and currents. Theprogram also permits display of up to 10 harmonic source andload impedances simultaneously. A unique feature of the Maurysoftware allows the user to define up to 35 user functions. Thesefunctions can be used to develop specific output parameters(e.g., simple efficiency, VSWR), or to control instruments (e.g.,to control the turn-on/ turn-off sequence of a high powersignal source). The program also has a built-in general purposeS-parameter measurement program that allows for fixed orswept bias conditions. The software provides for both data andgraphical hard copy outputs.

Power Measurement ModeThis is a single frequency display that permits the user to selectthe measured device parameters at a single input power or overa range of powers at any available source or load impedance.The frequency and impedances for load or source pull andsweep plan measurements can also be selected from thisdisplay. This is an active measurement screen which allows theoperator to move the source and/or load tuners to any availableposition, and measure all active parameters. If the S-parameteroption is exercised, stability circles S11' and S22* are alsodisplayed.

Swept Power DisplayUp to five of the measured parameters can be simultaneouslydisplayed versus available input power. A mouse or cursorkey controlled marker provides for readouts at measured orinterpolated points. Graphics scales are user-controlled. Allmeasured parameters are tabulated below the plots and areavailable for printout.

Load/Source Pull Contour DisplayThis single frequency display plots constant measuredparameter contours on the impedance plane and theimpedance(s) for maximum or minimum values. Contoursof up to three parameters can be simultaneously displayed.The number of contours displayed, as well as the incrementbetween contours, are user controlled. Output data at any tunerposition can also be user controlled. The contour data can beconverted to spreadsheet format with a single keystroke.

Typical setup for performing simultaneous load pull and source pull measurements.


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MT993k1 - Noise Characterization Application Software

GeneralThe MI99313 noise characterization application software isdesigned to operate with ATS tuners and determine the noiseparameters of a linear device, module or sub-assembly. Theprogram is provided as part of an ATS system specified for noisecharacterization separately as model MT99313, or combinedwith the power characterization software as model MT993C.

Noise ParametersGood noise performance is a critical element of most receivingsystems. Knowledge of the noise parameters which define thenoise performance of a device can be an invaluable aid to thereceiver/amplifier designer by saving hours of design time andreducing, or even eliminating "cot-and-try" iterations.

An ATS system, operating with the Maury noise applicationsoftware, can provide fast accurate measurements of minimumnoise figure, optimum source reflection coefficient, andequivalent noise resistance. The program will also providethe gain parameters of the device and has a built-in generalpurpose S-parameter measurement program. All measurementscan be de-embedded to the device input and output planes.The software provides for both data and graphical hard copyoutputs.

Interactive Measurement ModeThis is a single frequency display that permits the user to: a)measure the device noise parameters; b) measure noise figureand gain at any available source impedance; c) select the noiseparameter measurement method; and, d) select the impedancesused in the noise parameter determination or let the softwaredetermine these automatically. Constant noise figure and gaincircles can also he plotted on the source impedance Smithchart. An advanced sweep plan is available to define fully-automated, multi-frequency, multi-bias noise characterizationprojects.

Swept Noise DisplayThe measured parameters can be simultaneously displayedversus frequency and bias. A mouse or cursor key controlledmarker provides for readouts at measured or interpolatedpoints. Data smoothing (1st or 2nd order) is available, andgraphics scales are user-controlled. Noise parameters as wellas maximum gain, associated gain and stability factor (k) aretabulated and available for printout below the plots.

Noise Statistics DisplayThis is a statistics window screen which shows agreementbetween the noise parameter solution and individual points.The noise parameter solution is also displayed so the effect ofchanging options can be immediately seen. This display may betoggled between calibration and DUT measurement data so theeffect of calibration options can be seen on the measured DUTdata.

Typical setup for performing noise characterization measurements. Typical swept noise display.


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IIVIT9931301 - High Speed Noise Parameter Measurement Option

GeneralThe MT9931301 high speed noise parameter measurementoption (patent pending) operates with the MT99313 noisecharacterization application software and Agilent's PNA-Xto take advantage of the built-in noise receiver and fastsweep capability of the analyzer. This typically speeds up thecalibration and measurement time by 200X - 400X; makingit practical to sweep a much larger frequency set. Typicaltest bench setups are simplified (as shown in the photographbelow), which reduces the number of cables and connections,thus helping to stabilize the setup. This setup produces datathat is smoother and has less scatter than traditional methodsof noise measurement. The fast measurement speed eliminatestemperature drift, and using a VNA with an internal noisereceiver simplifies the setup and makes it much more stableand consistent.

Benefits and FeaturesThe N1T993B01 option includes two key features that contributeto the breakthrough speed improvement: 1) The ATS tuner ischaracterized with one set of states (physical tuner positions)that are selected to give a reasonable impedance spreadover the frequency band of interest; and 2) the noise powermeasurement is swept over the frequency range at each state,so that the tuner only moves to each position once; therebyminimizing tuner movement.

The much higher speed makes it practical to always do a fullin-situ calibration to minimize errors, and to measure morefrequencies to get a better view of scatter and cyclical errors,and to be able to use smoothing with more confidence. Thehigher frequency density also enhances accuracy by reducingshifts due to aliasing.

Measured noise parameter data using MT993B01 (no smoothing).



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Kr993D ilnternaod Distortion (HMO) and AdjacentChannel Power (ACP) Application Software

GeneralThe MT993D IMD/ACP application software requires theMT993A power characterization application software orMT993C power and noise characterization application softwareto operate with the Maury automated tuner system (ATS).

IMD/ACP ParametersWhen two signals are simultaneously present, device non-linearity can cause frequency mixing. Odd order mixing (e.g.,the fundamental of one signal mixing with the second harmonicof the other) results in a pair of mixing products which straddlethe original pair and are displaced by the separation betweenthe two tones. The magnitude of these products is a measure ofthe device non-linearity.

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An ATS, operating with the Maury power and IMD/ACPapplication software, can provide fast, accurate measurementsof the power parameters and the additional functions: 3rdthrough 7th order IMD power, carrier power, UI ratio, interceptpoint, and first and second upper and lower adjacent channelpower.

Adjacent channel power usually refers to the "spill-over" ofa signal - typically, digitally modulated - into the adjacentor next adjacent communications channel. Knowledge of themagnitude of these products and other related parameters,as well as the termination conditions for minimizing ormaximizing them, can be of significant help to the amplifierand system designer.

Typical ACP measurement data.


RF Device CharacterIZatliin .13ystems

MT993D03 - Enhanced IThrie-Domain and X-Parameters_oad D'uH Application Software

j4A—"mE!General

The MT993D03 enhanced time-domain and X-parameterapplication software is an automated application for combininga nonlinear vector network analyzer (NVNA) with load pullmeasurements to extend the measurement and extraction ofX-parameters over the entire Smith Chart. The augmentedX-parameter data include magnitude and phase as nonlinearfunctions of power, bias, and load, at each harmonic generatedby the device and measured by the NVNA. The X-parameterscan be immediately used in a nonlinear simulator for complexmicrowave circuit analysis and design. This capability extendsthe applicability of measurement-based X-parameters to highlymismatched environments, such as high-power and multi-stage amplifiers, and power transistors designed to work farfrom 50 ohnis. It provides a powerful and general technology-independent alternative, with improved accuracy and speed,to traditional large-signal device models which are slow todevelop and typically extrapolate large-signal operation fromsmall-signal and DC measurements.

Load Pull with X-ParametersCombining load pull with NVNA measurements ofX-parameters and the PI ID framework provides a simple anddirect way to develop a large signal model for analysis ofcomplex power amplifier circuits. The load pull measurementcreates an X-parameter file which can be loaded directly intoa non-linear simulator to be used as the Pt-ID component. Thedata can be used immediately for analysis of complex poweramplifier circuits. The load-dependent X-parameters enablefull waveforms to be predicted - calibrated to the deviceterminals - even under high degrees of compression, and overall impedance environments. The user selects an impedancerange of interest, possibly over the entire Smith chart, then usesthe PI-ID model as a circuit element in a non-linear analysis.Because it is based on measurement at the actual operatingconditions of the device this model can be used with greatconfidence.

The load pull X-parameter measurement can include acomplete sweep plan. Stimulus variables can includeimpedance, power drive, bias, and frequency. This can extendthe applicability of the PI-ID model over a much wider range ofvalidity - over the range of actual applications for many high-power and multi-stage PA designs.

This process is a major simplification over past practice. Itprovides the simplicity of using load pull and NVNA datadirectly for simple power amplifier design, but with the abilityto analyze complex circuits that require a large signal model.It is not limited to characterizing a single device, but appliesequally to modeling an amplifier section. The entire process isindependent of the device technology. Extracting full load-dependent X-parameters at multiple harmonics is significantlymore automated and repeatable than extracting a standard"compact" transistor model. This makes it ideal for use withnew technologies and new amplifier realizations before anydetailed physics-based compact models or accurate circuit-levelmodels are available.

System ConfigurationCompared to a typical scalar load pull system, the combinationof MT993D03 enhanced time-domain and X-parameterapplication software and a nonlinear network analyzer, like theAgilent PNA-X with NVNA and X-Parameter options, results ina simplified setup with fewer components, an easier use model,and faster measurements.

The centerpiece of the measurement setup is the PNA-X withNVNA and X-parameter options. The MT993D03 softwarecan run directly on the analyzer for maximum interoperabilityand speed, eliminating the need for a dedicated measurementcomputer, and serves as a time domain measurement systemwith 26 GI-Iz of bandwidth.

All couplers, bias tees, and RF sources are included in thePNA-X, so connecting the system is simple. The USB-controlledtuner plugs directly into the analyzer, and the DC instrumentsare controlled through the built-in GPIB interface. Since boththe NVNA firmware and MT993D03 software have built-insupport for external instrument control through GPIB, biassweeps are easy to set up and measurement synchronization isautomatically handled.

The user interface is primarily handled through Maury's ATSsoftware, with the NVNA firmware used for calibration andmade available for advanced settings (configuring internalswitches and attenuators, utilizing advanced features ofthe PNA-X such as pulse modulation or triggering, etc.).Measurement configuration through the GUI is similar tostandard load pull configuration, but uses a simpler blockdiagram with the NVNA replacing several instruments. Themeasurement parameter "X-Params" is available when theNVNA is included in the setup. When it is not selected, time-domain load pull measurements (load dependent waveforms)are taken. When "X-Params" is selected, the X-parameters ofthe DUT are also measured as a function of load and any sweptbias conditions. The resulting X-parameters are written to asingle file at the end of the measurement and are immediatelyready to be imported into ADS and used in simulation ariddesign.


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GeneralConsidering our DUT as a two-port device shown in Figure1, F, is nothing more than alb„ or the ratio between thereflected- and forward-traveling waves. A generalized form ofthe formula can be written as

Two-port Scattering Parameter Model

A closer examination of the formula Fi =a,/b, reveals that thereis no limitation on separating the sources of a, and b,. It isobvious that b, is the wave coming from the device, of whichwe have no direct control; however a, need not be a reflectedversion of b, but can be a new signal entirely!

Active Load PullActive injection load pull, more commonly referred to as activeload pull, relies on external sources to inject a signal into theoutput of the DUT, thereby creating a,. Because a, is no longerlimited to a fraction of the original reflected signal, as is thecase with the traditional passive mechanical tuner, externalamplifiers may be used to increase a, nearly indefinitely so thatF, can achieve unity (FL >1 is theoretically possible but has nopractical consideration).

The simple active tuning chain consists of a signal source,a variable phase shifter and a variable gain stage, shown inFigure 2. Common signal generators, such as the Agilent ESG,PSG or MXG, have built-in amplitude and phase control of theinjected signal and are ideal for active load pull.

Harmonic load pull, or tuning impedances at multiplefrequencies simultaneously, becomes simple when usingactive load pull techniques. A multiplexer can be used tomerge multiple active tuning paths, one per frequency, so

a ‘ „(f )

multiplexers are easily overcome by the amplifiers used in eachactive tuning chain.

Hybrid Passive-Active Load PullBoth traditional passive mechanical tuner systems andactive injection load pull systems have their advantages anddisadvantages. While mechanical tuners are simple, lessexpensive and can handle high power, there is no physicalway to overcome the losses involved with the system that limitachievable While active load pull systems are extremelyquick, capable of F r =1 and easily integrated for harmonicmeasurements on-wafer, high-power setups require more-expensive band-limited amplifiers.

It is possible to obtain the advantages of both systems whileminimizing the disadvantages, using a technique referred toas hybrid load pull. Hybrid load pull refers to a combinationof active and passive tuning in the same system. Traditionalpassive mechanical tuners can be used to reflect high powerat the fundamental frequency allowing a much smaller activeinjection signal, using much smaller amplifiers, to overcomelosses and achieve I-L =1. Additionally, since the powers atharmonic frequencies are often well below the power of thefundamental signal, less-expensive wideband amplifiers maybe used with active tuning to accomplish active harmonic loadpull with F, i=1. In both cases, only a low power is requiredfor active tuning.that r „„(f„)= h .' is satisfied. Any loses inherent to

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MAURY MICROWAVE CORPORATION 34 RE Device Characterization Systems

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Optional Software Features

System Control Option (MT993F)MT993F is an option that extends the capability of the MT993Aor MT993C power measurement application software toprovide automated switching between noise, power, IntermodDistortion (IMD), Adjacent Channel Power (ACP), DC I-Vcurves, and S-parameter measurements from a single setup. Aspecial S-parameters, noise, and power (SNP) calibration is alsopossible with this option.

A further advantage of this option is that the RF switchingreduces system cost by allowing sharing of equipment. This cansave the cost of up to two RF sources.

DC I-V Curve Option (MT993G)MT993G is an option that extends the capability of MT993A,MT99313 or MT993C power measurement application softwareto provide for automatic measurement and display of deviceDC current-voltage curves. For FET devices, the measurementdisplay is a family of output current versus output voltagecurves with input voltage as the parameter. For bipolar devices,the measured display is a family of output current versus outputvoltage curves with input current as the parameter. A maximumdissipation value can be entered which will cause each sweepto terminate when that condition is reached.

Harmonic Source/Load Pull Option(MT993H)MT993H is an option that extends the capability of the MT993Aor MT993C power measurement application software to allowload/source pull measurements to be clone independently at thefundamental, 2nd harmonic, and 3rd harmonic frequencies.Harmonic load pull is achieved by using a diplexer/triplexerto separate tuned frequencies, or by cascading tuners in-seriesand using advanced algorithms to set tuner positions. Harmonictuning will generally improve power-added efficiency (PAE) forcompressed amplifiers and lower error-vector magnitude (EVM)for modulated signals.

Fixture Characterization Option(MT993J)MT993J is a standalone option that enables the S-Parameters ofa test fixture or probe setup to be determined from two networkanalyzer calibrations. First, a 2-port calibration at the coaxialcable reference plane (or similar) is performed; second, a2-port calibration at the DUI reference plane is performed. Theresulting calibrations are mathematically compared and twoseparate S-Parameter files, each one representing a fixture half,are generated.

Typical setup for performing SNP measurements



Software Package Uses Models

Tuner Movement dll Controls Tuner Move-

ment

MT993VO4

Tuner Movement dll

with Interpolation

Interpolation Between

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embeding

MT993VO4

with VO1

Tuner

Characterization dll

(External Control)

Characterize Tuners

Through The Interface

MT993E with

MT993N06

Tuner

Characterization

SNPW GUI

Characterize Tuners

Through The SNPW GUI

MT993N06

SNPW Programmers

Edition

Tuner Automation

Environment

Depending On Key

Options, Most SNPW

Functions Are Available

Bundled Package

SNPW

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Options with

MT993E

MT993R

(MT993V01,

MT993VO4 &

MT993N06)

RF Device Ch a aCterizations stems

MT993 DLL Library - User Functions81 Custom llnstrument Drivers

GeneralA unique feature of the Maury ATS software is the availabilityof the instrument driver source code. Users can write their ownfunction for a specified measurement routine and the softwarewill carry out what is involved in that function. Similarly,when faced with the need to use a non-supported piece ofequipment, the user can open and copy the file for a similarinstrument and modify the copied version (under a different filename) for the specific non-supported instrument. ATS softwareis written with Microsoft© Visual C++, so some familiaritywith C programming is helpful, and a Microsoft© Visual C++compiler is required.

Tuner Movement dll (MT993VO4)The Tuner Movement (III, MT993VO4, can be used for tunerinitiation, setup and control with options for interpolationand de-embedding. It is also available with Interpolation asMT993V01.

The Tuner Movement Dynamic link Library (c111) can be used tocontrol:

All Maury USB Tuners

—MT986A, MT986B, & MT986C tuner controllers

—MT1020B & MT1020C Hubs

— Solid State NP, LP Mainframe Controllers

This library contains over 26 functions providing basic tunercontrol with an option for tuner impedance interpolation.The package has been designed to provide an easy way ofcontrolling Maury tuners from within another proprietarysoftware application.

This library package comes as a self-extracting, executable filethat can be installed on Windows® 98, 2000, and XP equippedPCs. Included in the install package are programming examplesfor Visual Basic, Agilent VEE and LabView, and a sampleexecutable program. All drivers are provide for the MauryControllers and National Instruments GPIB cards.

Tuner Characterization dll(MT993N06)The Tuner Characterization dll, MT993N06, provides the abilityto characterize tuners without the need for external control,through the SNPW GUI. The tuner characterization filesgenerated with this option are in the format used by the MauryTuner Movement dll and the SNPW software.

SNPW Programmers Edition(MT993E)Over 250 functions are available to be called by third partysoftware, enabling users to do step-and-repeat measurements.Most other measurements available through the main softwareGUI are available to be called. Interactive mode allow users to

write specialized tests without the need to develop all of thecode necessary for calibration and setup. Users need only tostart the interactive mode, setup the system through the SNPWGUI and then call the desired functions through the executivesoftware.

Tuner Automation Environment dll(MT993R)This package bundles together the Tuner Movement dlliMT993VO4) with the Interpolation dll (MT993V011and TunerCharacterization GUI (MT993N06).

Table of Products, Features & Options.

IVIAURY MICROWAVE CORPORATION 36 RF Device Characterization Systems

RF Device Characterization Systeme,

AMTSv2 Automated MobileTest SystemSoftware

MT910 Series

Now with Support

for GSM, WCDMA & CDMA2000

IntroductionMobile phones must guarantee proper functioning in non-idealreal-world environments, such as a lost or damaged antenna,usage in a tunnel or locker, being held close to the body or ina pocket surrounded by coins, etc. Each of these scenarioscan be regarded as non-ideal from an RF standpoint, meaningnon-5052. We are able to use a single tuner to vary the VSWRmagnitude and phase seen by the antenna port of the phoneand test its performance in transmit and receive mode.

The Maury Automated Mobile Test System Software (AMTSv2)is a standalone application designed specifically to automatethe testing of mobile phones in transmit and receive modes,for output power and sensitivity respectively, as a function of\ISM magnitude and phase.

What AMTSv2 Can Do For YouAMTSv2 offers a simple, fast and cost-effective solution tailoredfor mobile phone testing outside of the 50Q environment. Thissolution automates mobile phone testing in TX/RX modes overa multitude of channels/frequencies, battery voltages and powerlevels. It works by combining:

• Maury's MT910 Series Automated Mobile Testing Systemsoftware to

- control the system;

- de-embed VSWR and power levels to DUT reference;

- control variable DC supply to mimic battery

voltages; and

- automate measurements;

• a Maury MT98x Automated Tuner, which sets non-50Qimpedance; and

• Agilent's or Rohde Schwarz's Wireless CommunicationsTest Set, which (acting as a base station) sets active channeland power levels, and measures power and bit-error-rate.

By analyzing the test results obtained using this solution youcan learn:

• What level of antenna mismatch is acceptable, based onreal-life testing against your VSWR requirements

• If your mobile phone meets the minimum performancerequirements under pre-defined VSWR and voltageconditions

• If your phone's performance degrades after a large VSWRsweep plan

• If thermal stability issues exist

• If your phone's design is acceptable as is, or if somecomponents need to be redesigned

• If specific performance problems result from batchmanufacturing

These are just a few of the ways you can use Maury MT910AMTS software and ATS tuners to extend your mobile phonetesting capability beyond the 5052 environment.

Available Models

Model Description (See details on page 2 of 2)

MT910' Mobile Phone Tester

MT910A GSM Standard

MT910B WCDMA Standard

MT910C CDMA2000 Standard

' MT910 requires at least one standard (MT910A, MT910B, or MT910C).


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MT910: Mobile Phone TesterTransmit Load Pull — The goal of load pull in the phone'stransmit mode is to measure the output power as a function ofVSWR magnitude and phase. A Wireless Communication TestSet is used in signaling mode to establish a call with a mobilephone, specify a channel/frequency (e.g., ARFCN 128 is 824MHz uplink and 869 MHz downlink for GSA 850), set thepower control level (e.g., PCL 5 is 33 dBm at GSM850) andmeasure the power delivered from the phone at given VSWKmagnitude and phase.

Receive Load Pull — The goal of load pull in RX mode is thesensitivity-measurement of the phone; at what power level willa user-specified bit-error rate (BER) be achieved, as a functionof VSWR magnitude and phase. A Wireless CommunicationTest Set is used in signaling mode to establish a call with amobile phone, specify a channel/frequency, and send a low-power burst (in the order of -105 to -110 dBm) to the phoneand measure the resulting BER. Maury MT910 series softwarewill vary the burst-power until the required BER is achieved.

Manual Testing — Simple manual testing is achieved byentering single values of channel/frequency, battery voltage,VSWR magnitude and phase.

Test Automation — The measurement routine is automatedthanks to the use of an advanced graphic test sequencer whichallows the user to enter a list of channels/frequencies, batteryvoltages, VSWR magnitudes and phases.

Compatible Instruments — Agilent 8960, R&S CMU200, R&SCMW500 (under development).

MT910A: GSM StandardAdds GSM Standard to MT910 Mobile Phone Tester

Supported Technology: GSM 850,900,1800,1900.

Measurements Supported:• TX power - Transmit Power• Modulation - Frequency Error & Phase Error (RMS & PEAK)• Spectrum - due to Modulation 12:3 frequencies)

- due to Switching 19 frequencies]• Sensitivity (search algorithm \v/adjustable start level)

- 2.439% RBER

MT910B: WCDMA StandardAdds WCDMA Standard to MT910 Mobile Phone Tester

Supported Technology: WCDMA Bands I, II, V VI, VIII

Measurements Supported:

• TX power - Transmit Power• Modulation - Freq Error, MAG Error, Phase Error, EVM (Avg)• Spectrum - ACI.R at 5 and 10 MHz I + and -• Sensitivity (search algorithm w/adjustable start level)

- 0.1% BER

MT910C: CDMA2000 StandardAdds CDMA2000 Standard to MT910 Mobile Phone Tester

Supported Technology: CDMA2000 BCO, BC1

Measurements Supported:

• TX power -Transmit Power• Modulation - Carrier Frequency Error, Waveform Quality• Spectrum - ACP at 870, 885, 900 & 1,980 MKz I + and -• Sensitivity (search algorithm \v/adjustable start level)

- 0.5% FER with Confidence Level >95%

Maury MT910 series Automated Mobile Testing System Software



RF ,.Device Characterization Systems

Automated TunersGeneral Information

Applications and BenefitsThe MT97x and MT98x series automated tuners are precisioninstruments that are optimized for a broad class of in-fixture andon-wafer applications, and may be used in any automated ormanual application requiring the ability to match the impedanceof a microwave circuit element or to establish specificimpedances at a terminal interface. The tuner design is based onthe slide screw concept using the inherently broadband slab-linetransmission structure. Each unit has two non-contacting probesdeliver high VSWR with superb accuracy and reliability overa wide frequency range. These probes can be fully retractedleaving a low-loss, well-matched transmission line, which is asignificant benefit in power related applications where two-porttuners capable of handling large amounts of power are required.As integral components of Maury Device CharacterizationSolutions, these PC-based tuners are controlled using Maury'sfamily of Device Characterization Software tools, including theATS Version 5 (or later) interactive environment and the DLL-based measurement automation environment.

High-Gamma Tuners TM (MT981HU seriesMaury USB controlled High-Gamma Tuner models deliver ultra-high VSWR with superb accuracy and reliability. See page 40.

High-Power Tuners (MT981AU/I3U/EU/WUseries)These are USB controlled tuner models that are optimized forhigh power in-fixture and on-wafer applications. See page 42.

7mm Tuners (MT982AU/I3U/EU series)These US13 controlled 7mm Tuner models provide broadfrequency coverage and ease of use for in-fixture and on-waferapplications. See page 44.

3.5mm Tuners (MT983A01 series)These GP1B interfaced 3.5mm Tuner models are optimizedfor C-Rand, X-Band, Ku-Band, and K-Band noise and powerapplications. See page 46.

2.4mm (50 GHz) Tuners (MT984AU01 series)These USB controlled 2.4mm (50 GHz) tuners are ideal formicrowave and mm-Wave noise and power applications from 8to 50 Ghz. See page 48.

Millimeter Wave Tuners (MT975A/7A/8A/9Aseries)These US13 controlled mm-wave tuner models offer highmatching range and ultra-low vibration and are ideal for WR22to WR10 noise and power applications. See page 50.

Automated Sliding Loads (MT999 series)These automated sliding loads are optimized for use withMaury MT981/MT982 series tuners in applications whereharmonic load-pull or tuning measurements with a highmismatch is required. See page 54.

Multi-Harmonic Automated Tuners (MT98x series)The 101-9821\101 series two-carriage automated tunersare optimized for a broad class of in-fixture and on-waferapplications requiring simultaneous high-gamma and multiple-frequency tuning. See page 52.


F Device Ch

High-Gamma Automated Tuner TM (HGTM)

800 MHz TO 8 GHz

Features

o Specified Frequency Range is0.8 to 6.5 GHz; Operational from0.8 to 8.0 GHz

Sub 1S2 In-Fixture and On-WaferLoad-Pull for GSM/EDGE,WCDMA, WiFi, and WiMax

0 Ultra-High Matching Range forGaN, GaAs, LDMOS, and DeepSubmicron CMOS Characterization

O Simultaneous Ultra-High Matchingand Low Vibration for On-WaferApplications

O USB Interface for Simple, Fast,Reliable Control

0 DLL Environment for AutomatedApplications

Applications and Benefits OverviewThe HGT" series automated tuners are optimized for highpower in-fixture and on-water applications requiring sub 1 Qimpedance and low vibration simultaneously. Based on Maury'sFIGT"' technology (US and international patents pending),these high-performance tuners evolve beyond obsolete andoutdated multi-probe pre-matching technology to deliver ultra-high VSWR with superb accuracy and reliability. An integralcomponent of Maury Device Characterization Solutions, thesePC-based USB-interface automated tuners are controlled usingeither Maury's Device Characterization Software suite WSVersion 5 or later) or Maury's DLL environment. ATS softwareis an integrated device characterization suite providing front-end and back-end device characterization tools for powerand noise characterization. The Da environment enablesdirect interface with common programming tools such asAgilent VEE 1 ", NI Labview"', MS Visual Basic & C/C++, andMathworks MATLAB I ". With a tuning resolution in excess of amillion impedance points and accuracy better than -40 dB over

MT981 13

7nini High-Gamma Tuner."

I U.S. Patent No. 7,589,601 B2 I

0 Industry's Highest Accuracy Means YourDesigns Work Right the First Time

0 Industry's Best Calibration Frees YourTime for Design

the entire Smith Chart, Maury automated tuners give you thedevice characterization answers you need with the accuracynecessary to make engineering decisions with confidence.Typical applications include load-pull using CW, GSWEDGE,CDMA, WCDMA, WiMax, and Will stimulus for mobile andinfrastructure terminal design, RADAR design, and Sat-Corndesign, arid source-pull for deep sub-micron CMOS lownoise characterization. Custom Semillex cable and Cascade-Microtech probe kits are available for optimized low loss on-wafer applications.

ControllerFor optimum performance, the MTIO208 ATS PowerDistribution Hub can be used to control up to four (4)MT981 HU series tuners. Additionally, the MTIO20DDesktop Switching Power Supply can be used to providepower to a single MT9811-1U series tuner.

H gh-Gamma Tunerw and HGT") are trademarks of Maury Microwave Corp. All other trademarks are the property of their respective owners.

3 See Maury Data Sheet 4T-070A.

0


10.00 [254.0]

4.8 121.92.9 73.0

7.61 [193.4] 7.14 [181.3]

14.82 [376.4]

0.58 [14.7]7-16 Connectors

10.25 [260.4]

14mm (GR900) Connectors

15.86 [402.8] IMatino Surtaces1

DUT Port

9.37 [237.9]

0

141 47 2.4.52]

7mm Connectors2.00 [50.8]

12.14 308.3]Max

IT

RF Device Cher Bystemeir

Specifications Recommended AccessoriesFrequency Range See Available Models Table 2698C2 7mm (3/4-in. hex) torque wrench

VSWR Matching Range ..See Available Models Table 2498T1 14mm 11-in. hex) torque wrench

Step Size (Probes) 62.5 microinches1 2698K1 7-16 (1-1/16-in. hex) torque wrench

Step Size (Carriage) 786 microinches1 80225 3.5mm (0 to 7min ultra-low-loss adapter

Connectors 7mm2, 1 4mrn 3 or 7-1 64 8022T 3.5mm (m) to 7mm ultra-low-loss adapter

Accessories Provided

A028D 7mrn connector gage kit

One MT' 020D controller, one USB cable and one operating A024 14mm connector gage kit

manual. A041A 7-16 connector gage kit

Available Models

Model

Frequency

Range

(GHz)

Matchit g Range Power

Capability 6

Vector

Repeatability

(Minimum)

AGt (Typical). 7VSWR

(Maximum)

,Insertion Loss'

(Maximum)

Dimensions

12.0" (30.5cm) x

10.0" (25.4cm) xMinimum,

Typical'

0.8 - 6.5 100:1 200:1MT981HU13

6.5 - 8.0 - 60:117.4' (44.3cm)

MT981HU230.8 - 6.5 100:1 200:1 250 W CW

-40 dB8 +0.3 dB 1.05:18 0.3 de 15.9' (40.3cm)6.5 - 8.0 - 60:1 2.5 kW PEP0.8 - 6.5 100:1 200:1

MT981HU336.5 - 8.0 - 60:1

17.0' (43.2cm)

Dimensions - Inches (mm)Model MT981HUxx

ATS High Gamma Automated Tuner

Dimensions are shown

in inches and ((I'm]

I Based on 1/2 stepping the drive motors. 5 Defined as the minimum VSWR 20% of the peak VSWR.2 Precision 7mm per Maury data sheet 5E-060. 6 Power at maximum VSWR.3 Precision 14mm (GR900 equivalent). 7 With probes fully retracted.4 Precision 7-16 per Maury data sheet 5E-066. 8 0.8 to 6.5 GI-Iz only.


evicts -terization

High-Power AutomatedTuners0.25 TO 8.0 GHz

Features

0 Optimized for GSM/EDGE,WCDMA, WiFi and WiMaxIn-Fixture and On-WaferApplications

0 High matching Range forGaN, GaAs, LDMOS, and SiCharacterization

uriV064V??.iikpfA /TO"Vic

MT981 BU1 0High-Power Automated Tuner

0 Simultaneous High Matchingand Low Vibration for On-

Wafer Applications

USB Interface for Simple, Fast, andReliable Control


Applications and Benefits OverviewThe MT98 1 series automated tuners are optimized for highpower in-fixture and on-wafer applications requiring lowimpedance and low vibration simultaneously. Based onMaury's proven non-contacting probe technology, thesehigh-performance tuners evolve beyond outdated contactingprobe technology to deliver high VSWR with superb accuracyand reliability. An integral component of Maury's DeviceCharacterization Solutions, these PC-based USB-interfaceautomated tuners are controlled using Maury's family ofDevice Characterization Software tools including the ATSVersion 5 (or later) interactive environment and the DLL-based measurement automation environment. The ATSinteractive environment is an integrated device characterizationenvironment providing comprehensive calibration and devicecharacterization tools for power and noise optimization.The Da environment enables direct interface with commonprogramming tools such as Agilent VEE'", NI Labview 1 ", MS


0 Industry's Best Calibration Frees YourTime for Design

Visual Basic & C/C++, and Mathworks MATLAB I". With atuning resolution in excess of a million impedance points andaccuracy better than -50 dB over the entire Smith Chart, Mauryautomated tuners give you the device characterization answersyou need with the accuracy necessary to make engineeringdecisions with confidence. Typical applications include load-pull using CW, GSM/EDGE, CDMA, WCDMA, WiMax, andWiFi stimulus for mobile and infrastructure terminal design,RADAR design, and Sat-Com design.

ControllerFor optimum performance, the MT102013 ATS PowerDistribution Flub can be used to control up to four (4)MT981 xl1 series tuners. Additionally, the MT 1 020D DesktopSwitching Power Supply can be used to provide power to asingle MT98 lx1J series tuner.

See Maury Data Sheet 4T-071A.

MAURY MICROWAVE CORPORATION 42 PP Device Characterization Systems

- 10.0 See Available Models Table

10.31

to

12.02

3.02

to

4.73

r--_

•RF Device Characterization Systems

Accessories ProvidedOne MT1020D controller, one USI3 cable and one operatingmanual.

SpecificationsFrequency Range See Available Models Table

VSWR Matching Range See Available Models Table

Step Size (Probes) 62.5 microinches1

Step Size (Carriage) 786 microinchesi

Connectors* Precision 7mm2

Available Models

Recommended Accessories2698C2 7mm (3/4-in. hex) torque wrench

A028D 7mm connector gage kit

8022S 7mm to 3.5mm (1) precision adapter

8022T 7mm to 3.5mm (m) precision adapter

Model

FrequencyRange

(GHz)

Matching RangePower

4Capability

Vector

Repeatability

(Minimum)

AGt

(Typical)5

VSWR

(Maximum)

Insertion

Loss5

(Maximum)

Dimensions

12.0" (30.5cm) x

10.0" (25.4cm) xMinimum Typical3

MT981AU11 0.25 - 2.5 15:1 40:1 36.9" (93.6cni)

MT981BU10 0.40 - 4.0 15:1 50:1 23.0" (58.6cm)

MT981BU15 0.40 - 2.5 30:1 60:1 23.0" (58.6cm)

0.40 - 0.5 30:1 60:1250 W CW -50 dB ±0.1 dB 1.05:1 0.3 dB

MT981BU16 0.50 - 2.2 40:1 60:1 2.5 kW PEP 23.0" (58.6cm)

2.20 - 2.5 30:1 60:1

MT981EU10 0.80 - 8.0 15:1 50:1 15.9" (40.3cm)

MT981WU10 0.60 - 6.0 15:1 40:1 23.0" (58.6cm)

MT981 Dimensions

1 Based on 1/2 stepping the drive motors. 4 Power rated at maximum VSWR.

2 Precision 7mm per Maury data sheet 5E-060. 5 With probes fully retracted.

3 Defined as the maximum VSWR within 20% of the peak VSWR.

* Also available in 14mm and/or 7-16 upon request.


7mrn AuWmated Tuners0.8 To 18 GHz

Features

0 Optimized for GSM,WCDMA, WiFi, WiMax,X-Band, Ku-Band, andCW/Pulsed MicrowaveApplications

0 High matching Rangefor GaN, InP, InGaP,GaAs, LDMOS, Si,and CMOS DeviceCharacterization

0 Simultaneous High Matchingand Low Vibration for On-WaferApplications

USB Interface for Simple, Fast, andReliable Control


MT982EU307mm Automated Tuner


• Industry's Best Calibration Frees YourTime for Design

Applications and Benefits OverviewThe MT982 series automated tuners are optimized for abroad class of in-fixture and on-wafer applications requiringflexibility, broad frequency coverage and ease of use. Basedon Maury's proven non-contacting probe technology, thesehigh-performance toilers evolve beyond outdated contactingprobe technology to deliver high VSWR with superb accuracyand reliability. An integral component of Maury's DeviceCharacterization Solutions, these PC-based USB-interfaceautomated tuners are controlled using Maury's family ofDevice Characterization Software tools including the ATSVersion 5 (or later) interactive environment and the DLL-based measurement automation environment. The ATSinteractive environment is an integrated device characterizationenvironment providing comprehensive calibration and devicecharacterization tools for power and noise optimization.The Dl.t. environment enables direct interface with commonprogramming tools such as Agilent VEE Tm , NI Labview im , MS

Trademarks shown above are the property of their respective owners.

See Maury Data Sheet 4T-072.

Visual Basic & C/C++, and N4athworks MATI.A13 1 ". With atuning resolution in excess of a million impedance points andaccuracy better than -40 dB over the entire Smith Chart, Mauryautomated tuners give you the device characterization answersyou need with the accuracy necessary to make engineeringdecisions with confidence. Typical applications include load-pull using CW, GSWEDGE, CDN1A, WCDNIA, \ViMax, WiBro,and WiFi stimulus for mobile and infrastructure terminal design,X-band and Ku-band design, Sat-Con y design, and source-pullfor CMOS and GaAs low noise characterization.

ControllerFor optimum performance, the MT102013ATS Power DistributionFlub can be used to control up to four (4) MT982 series tuners.Additionally, the MT1020D Desktop Switching Power Supplycan be used to provide power to a single MT982 series tuner.


6.92 [175.7)

RF iiiaricacterization



Step Size (Probes) 62.5 microinches1

Step Size (Carriage) 355 microinches1

Connectors Precision 7mm2

Accessories ProvidedOne MT1020D controller, one USB cable and one operatingmanual.

Recommended Accessories2698C2 7mm (3/4-in. hex) torque wrench

A028D 7mm connector gage kit

8022S 7mm to 3.5min (1) precision adapter

8022T 7mm to 3.5mm (m) precision adapter

Available Models

Model

FrequencyRange

(GHz)

Matching RangePower 4

Capability

Vector

Repeatability

(Minimum)

AGt

(Typical)

5VSWR

(Maximum)

Insertion

Loss5

(Maximum)

Dimensions

9.0" (22.9cm) x

7.7" (19.6cm) xMinimum Typical 3

MT982EU 0.8 - 8.0 15:1 40:1 0.4 dB13.7' (34.8cm)

MT982BUO1 0.8 - 18.0 10:1 30:1 0.5 dB

50 W CW -MT982AUO2 1.8 - 18.0 15:1 40:1 0.5 kW PEP -40 dB -±0.3 dB 1.05:1 9.3' (23.6cm)

0.8 - 2.0 30:1 60:1 0.4 dB

MT982EU30 13.7' (34.8cm)2.0 - 8.0 15:1 40:1

Dimensions (Inches)5.53 [140.5) -I.- - .58 [14.7) 5.38 [136.5) o-

7.69 [195.2)

7mm Connectors

13.70 (348.0) -(Mating Surfaces)

Side ViewFront View

1 Based on 1/2 stepping the drive motors.

2 Precision 7mm per Maury data sheet 5E-060.


4 Power rated at maximum VSWR.

5 With probes fully retracted.


Features

• Optimized for C-Band, X-Band,Ku-Band, K-Band Noise andPower Applications

O Simultaneous High-Matching andUltra-Low Vibration for On-WaferApplications

O Ideal for Broad-Band Noiseparameter Extraction and Noiseand Large-Signal NonlinearModel Verification

o DLL Environment for AutomatedApplications

- evice.,Char. c erizatio . S st

3.5mm Automated Tuners4.0 TO 26.5 GHz

MT983A013.5mm Automated Tuner

Applications and Benefits OverviewThe MT9813A0 I automated tuners are optimized for a broadclass of in-fixture and on-waver applications requiringflexibility, broad frequency coverage and ease of use. Basedon Maury's proven non-contacting probe technology, thesehigh-performance tuners evolve beyond outdated contactingprobe technology to deliver high VSWR with superb accuracyand reliability. An integral component of Maury's DeviceCharacterization Solutions, these PC-based automated tunersare controlled using Maury's family of Device CharacterizationSoftware tools including the Maury ATS version 5 (or later)interactive environment and the DLL-based measurementautomation environment. The ATS interactive environment isand integrated device characterization environment providingcomprehensive calibration and device characterization tools forpower and noise optimization. The DLL environment enablesdirect interface with common programming tools such as

Agilent VEE i '•', NI Labviewl ", MS Visual Basic & C/C++, andMathworks N4ATLAB im . With a tuning resolution in excess of amillion impedance points and accuracy better than -40 dB overthe entire Smith Chart, maury automated tuners give you thedevice characterization answers you need with the accuracynecessary to make engineering decisions with confidence.Typical applications include load-pull for C1 .11 and pulsed ormodulated C-band, X-band, Ku-band, K-band design.

ControllerFor optimum performance, the MT1020C ATS Controller isdesigned to provide a USB interface to non-USB tuners andcan be used to control up to two (2) tuners simultaneously.Alternatively, the legacy MT986 GPIB-programmable ATScontroller may also be used.




5.38 [136.5]

7.69 [195.2]

8.97 [227.9] Max

6.56 [166.7]

3.251.55

7.83 [198.8]

(Mating Surfaces)

RF Devide Characterization Systems• •

SpecificationsFrequency Range

VSWR Matching Range

See Available Models Table

See Available Models Table

Accessories ProvidedOne (1) each MT9£32C12 tuner control cable and one (1)operating manual.

Recommended AccessoriesStep Size (Probes) 62.5 microinches1

MT 1020C USB controller power huhStep Size (Carriage) 355 microinchest 2698F1 3/4-in. hex torque wrench

Connectors NMD3.5mm male2 A050A 3.5mm connector gage kit

MT900 Probe station integration

Available Models

Model

Frequency

Range

(GHz)

Matching Range Power

Capability4

Vector

Repeatability

(Minimum)

AGt

(Typical)

VSViR5

(Maximum)

Insertion

Loss

5

(Maximum)Minimum3

Typical

AT983A01 4.0 — 26.5 10:1 15:1 lOWCW100 W PEP

–40 dB ±0.2 dB 1.10:1 0.6 dB7.

(19

Dimensions

7 ' x 7.8' x 9.0'5cm x 19.9cm x

22.8cm)

Dimensions - Inches and (mm)

Based on 1/2 stepping the drive motors. 4 Power rated at maximum VSWR.

2 NMD3.5mm male per Maury data sheet 5E-084. 5 With probes fully retracted.


r-717=717.1...C.


2.4rnm /Automated Tuners8 To 50 GHz

Features

O Optimized for X-Band,Ku-Band, K-Band, Ka-Band,Microwave and mm-WaveNoise and Power Applications

o High matching Range forGaN, InP, InGaP, GaAs,LDMOS, Si, and CMOS DeviceCharacterization

O Simultaneous High Matchingand Ultra-Low Vibration forOn-Wafer Applications

• USB Interface for Simple, Fast, andReliable Control

OOptimized for mm-Wave Power andNoise Applications

OIdeal for Broad-Band Noise ParameterExtraction and Noise and large-SignalNonlinear Model Verification

Applications and Benefits OverviewThe MT984AU01 automated tuners are optimized for abroad class of microwave and millimeter-wave applicationsrequiring flexibility, broad frequency coverage and easeof use. Based on Maury's proven non-contacting probetechnology, these high-performance tuners evolve beyondoutdated contacting probe technology to deliver high VSWRwith superb accuracy and reliability. An integral componentof Maury's Device Characterization Solutions, these PC-basedUSB-interface automated tuners are controlled using Maury'sfamily of Device Characterization Software tools includingthe ATS Version 5 (or later) interactive environment and theDLL-based measurement automation environment. The ATSinteractive environment is an integrated device characterizationenvironment providing comprehensive calibration and devicecharacterization tools for power and noise optimization.The DLL environment enables direct interface with commonprogramming tools such as Agilent VEE R', NI Labview im , MSVisual Basic & C/C++, and Mathworks MATLAB T ". With a

MT984AU012.4mm 50 GHz Automated Tuner


tuning resolution in excess of a million impedance points andaccuracy better than -40 dB over the entire Smith Chart, Mauryautomated tuners give you the device characterization answersyou need with the accuracy necessary to make engineeringdecisions with confidence. Typical applications includeload-pull for CW and pulsed or modulated X-band, Ku-band,Ka-band design and Sat-Cone design, and source pull for CMOSand GaAs low noise characterization to 50 GI-Iz. Available in2. ,1111111 connector.

ControllerFor optimum performance, the MT1020B ATS PowerDistribution Flub can be used to control up to four (4) MT984series tuners. Additionally, the MT1020D Desktop SwitchingPower Supply can be used to provide power to a single MT984series tuner.




4.60 [116.8] 6.931176.01

4.851 23.21

.87 [22.21

3.15 80.1L_ n _J L_ n ._J 1.55 39.3

RF DeviCa Characterization E3yeterna,



Step Size (Probes) 31 microinches1

Step Size (Carriage) 50 microinches1

Connectors Precision 2.4mm (female and male)2

Accessories ProvidedOne MT1020D controller, one USB cable and one operatingmanual.

Recommended Accessories8799A1 2.4mm (5/16-in. hex) torque wrench

A048A 2.4mm/1.85mm digital connector gage kit


Available Models

ModelFrequency

Range

(GHz)

Matching RangePower

Capability4

Vector

Repeatability

(Minimum)

L\Gt(Typical)

'VSWR

(Maximum)

Insertion

Loss5

(Maximum)

Dimensions

Minimum Typical3

MT984AU01 8.0 — 50.0 10:1 20:1 10 W CW100 W PEP –

40 dB ±0.2 dB 1.15:1 0.65 dB

7.1' x 9.8' x 5.2'(19.0cm x 24.9cm x

13.2cm)

Dimensions (Inches)

7.13 ( 81.11Max

Side View

5.20 (132.1) (Mating Surfaces)

2.4mm Connectors


2 Precision 2.4mm per Maury data sheet 5E•064.


4 Power rated at maximum VSWR.

5 With probes fully retracted.


MT979AWR10 Automated Tuner

with Cover Removed

RF Device Characterization. S sterns

Millimeter-Wave Automated Tuners33 TO 110 GHz

Features FU.S. Patent No. 5,910,754 1

0 Optimized for WR22 to WR10Millimeter-Wave Noise and PowerApplications

OHigh matching Range for GaN,InP, InGaP, GaAs, LDMOS, Si,and CMOS and BiCOMOS DeviceCharacterization

o Simultaneous High Matching and Ultra-Low Vibration for High-Power On-WaferApplications

o Ideal for mm Wave Noise ParameterExtraction and Noise and Large-SignalNonlinear Model Verification

o DLL Environment for AutomatedApplications

Applications and Benefits OverviewThe MT97x series of automated tuners are optimized for abroad class of microwave and mm-wave applications requiringflexibility, broad frequency coverage and ease of use. Basedon Maury's patented ultra-high matching range technology,these waveguide high-performance tuners deliver high VS\'VRwith superb accuracy and reliability. An integral componentof Maury's Device Characterization Solutions, these PC-basedautomated tuners are controlled using Maury's family of DeviceCharacterization Software tools including the ATS Version 4 (orlater) interactive environment and the DLL-based measurementautomation environment. The ATS interactive environment isan integrated device characterization environment providingcomprehensive calibration and device characterization tools forpower and noise optimization. The DU environment enablesdirect interface with common programming tools such asAgilent VEE".', NI Labview''', MS Visual Basic & C/C++, andMathworks MATLAB'". With a tuning resolution in excess of amillion impedance points and accuracy better than -50 dB overthe entire Smith Chart, Maury automated tuners give you thedevice characterization answers you need with the accuracynecessary to make engineering decisions with confidence.Typical applications include load-pull for CVV, and pulsed ormodulated WR22 to WR10 mm-wave applications such as on-wafer load-pull for Collision Avoidance RADAR, high-capacityWLANAVPANAVMAN networks, military applications, lownoise characterization and mm-wave noise and power modelverification.


MT979AWR10 Automated Tuner


I 1.585

0.125

A

2.215

1.388

POWER CONNECTOR

8-320C-28THOS. 8 PLCS.

L0.250

1.585

2.2151

1.188L°.POKER CONNECTOR

e•

8-32UNC-28THOS. 8 P,CS.

o

o•

sr)i

4.95

S

A

•

5. 3

0.675

1

Dimensions (Inches) for MT975A Tuners

0.800 i--— 1.600

1.120-1

-- 3.320 ---,

RF Device 'Characterization Systems,



Step Size (Probes) 0.5 Illicronsi

Step Size (Carriage) 0.5 microns2

Flanges MPF10, N1PF12, MPF15, or MPF222

Accessories ProvidedOne (1) each MT982C12 tuner control cable and one (1)operating manual.

Recommended AccessoriesMT1020C USB controller power hub


Available Models

ModelFrequency

Range

(GHz)

Matchin Rangeg Power,,

c apability-

Vector

Repeatability

(Minimum)

AGt

(Typical)

VSWR5

(Maximum)

Insertion

Loss5

(Maximum)

Dissipative

Loss5

(Maximum)Minimum Typical 3

MT975A 33.0 — 50.0 30:1 40:1

20 W CW200 W PEP

—50 dB ±0.1 dB

1.04:1 0.45 dB

7dBMT977A 50.0 — 75.0

20:1 35:1 1.06:1 0.65 dBMT978A 60.0 — 90.0

MT979A 75.0 — 110.0

Dimensions (Inches) for MT977A, MT978A & MT979A Tuners

Based on 1/2 stepping the drive motors. 4 Power rated at maximum VSWR.

2 Maury Precision Flanges (MPF) equiv. to IEEE WR10, WR12, WR15. 5 With probes fully retracted.WR19 or WR22 sizes. 6 At maximum VSWR.



Features• Optimized for Two-Frequency Harmonic

Load Pull

• Simultaneous High-Gamma and HarmonicTuning

• Designed for Harmonic-Sensitive ApplicationsIncluding GaAs and GaN

• Industry's Highest Accuracy Means YourDesigns Work Right the First Time

• Industry's Best Calibration Frees Your Timefor Design

_ - • Device Characterization Systeirs

Multi-Clarmonic Automated Tuners600 MHz to 26 GHz

Applications and Benefits OverviewThe MT98xM series two-carriage automated tuners areoptimized for a broad class of in-fixture and on-waferapplications requiring simultaneous high-gamma and multiple-frequency tuning. Based on Maury's proven non-contactingprobe technology, these high-performance tuners evolvebeyond outdated contacting probe technology to deliverhigh VSWR with superb accuracy and reliability. An integralcomponent of Maury's Device Characterization Solutions,these PC-based automated tuners are controlled using Maury'sfamily of Device Characterization Software tools includingthe ATS Version 5 (or later) interactive environment and theDLL-based measurement automation environment. The ATSinteractive environment is an integrated device characterizationenvironment providing comprehensive calibration and devicecharacterization tools for power and noise optimization.

With a tuning resolution in excess of a million impedancepoints and accuracy better than -40 dB over the entireSmith Chart, Maury automated tuners give you the devicecharacterization answers you need with the accuracy necessaryto make engineering decisions with confidence.

Typical applications include load-pull using CW and pulsedharmonic load pull for GaAs and GaN characterization,2G/3G/4G base stations and mobile handsets, wirelessconnectivity (WiMax, WiBro, WLAN), Sat-Cone, and otherUS/C/X/Ku/K-bands applications.




6.69 [169.8]

7_ 5.38 (136.5)

3.25 [82.5i1.55 39.4

7.69 (195.2)

11.61 [294.9]

7.69 195.2]

13.70 [348.0] (Mating Surfaces)


Available Models

Model

FrequencyRange(GHz) 1

Matching Range

PowerCapability 2

VectorRepeatability

(min)

InsertionLoss 3(Max)

Connectors 1 DimensionsSingle Frequency Tuning

(Minimum)

Two FrequencyTur ing

Fmin Fmax Fmin Frnax

MT982M01 1.8 - 18.0 100:1 40:1 10:1 - 100:1 10:1 - 100:150 W CW

0.5 kW PEP-40 dB 0.4 dB 7mm

9.0' (22.9cm) x

7.T (19.6cm) x

13.7' (34.8cm)

1 Including fundamental and harmonic frequencies. 3 With probes fully retracted.

2 Power at maximum VSWR. Precision 7mm per Maury data sheet 5E-060.

Dimensions - Inches [Cm]

10.61 [269.5]


53


- F Device C ,System s

Features

O Optimized for Low-CostHarmonic Load-PullMeasurement

o 50:1 Minimum MatchingRange

MT999AAutomated Sliding Short

Automated Sliding Shorts0.4 TO 18.0 GHz

o DLL Environment forAutomated Applications

Applications and Benefits OverviewThe MT999 series automated sliding shorts are optimized foruse with Maury MT981/MT982 series tuners in applicationswhere harmonic load-pull or tuning measurements with ahigh mismatch is required. When used with the appropriatetriplexer or diplexer, the MT999A/B/D sliding shorts providethe capability to make the most accurate and reliable harmonicmeasurements possible. These easy-to-use high-performancetuners deliver a very high mismatch with superb accuracy andreliability over a broad frequency range. The MT999 seriesautomated sliding shorts are designed for use with Maury'sfamily of Device Characterization Software tools includingthe Maury ATS version 5 (or later) interactive environmentand the DLL-based measurement automation environment.The ATS interactive environment is and integrated devicecharacterization environment providing comprehensivecalibration and device characterization tools for powerand noise optimization. The DLL environment enablesdirect interface with common programming tools such asAgilent VEE R', NI Labview l ", MS Visual Basic & C/C++, andMathworks MATLABR'.

MT999BAutomated Sliding Short

ControllerFor optimum performance, the MT1020C ATS Controlleris designed to provide a USB interface to non-USB slidingshorts and can be used to control up to two (2) sliding shortssimultaneously. Alternatively, the legacy MT986 ( -MB-programmable ATS controller may also be used.

See Maury Data Sheet 4T-076


4.362.65 3.28

1.58

7." vice Ct eriaaVe-,Itati gin System:E

Specifications Accessories ProvidedFrequency Range See Available Models Table One (1) each MT982C1 2 tuner control cable and one (1)

operating manual.VSWR Matching Range See Available Models Table

MT999A Step Size (Carriage) 625 microinches1Recommended AccessoriesMT 1 020C USE3 controller power hub

MT999B Step Size (Carriage) 208.75 microinches12698C2 3/4-in. hex torque wrench

Connectors Precision 7mm 2A028D 7mm connector gage kit

Available Models

Model

Frequency

Range

(GHz)

Matching Range Power

Capability

Vector

Repeatability

(Minimum)

Dimensions

Minimum Typical

MT999A 0.8 — 7.56.75' x 4.36' x 16.35'

(17.1cm x 11.1cm x 41.5cm)

–40 dB

MT999B 3.0 — 18.0 50:1 90.110WCW

100W PEP 6.75' x 4.36' x 10.49'

(17.1cm x 11.1cm x 26.6cm)

MT999D 0.4 — 4.0 –35 dB6.75' x 4.36' x 23.85'

(17.1cm x 11.1cm x 60.58cm)

Dimensions for MT999A/B/D - Inches

5.7516.35 (MT999A)10.49 (MT99913)23.85 (MT999D)


2 Precision 7mm male per Maury data sheet 5E•060.

7,4CM=OMMICEMEIE,- -


RF. Device CharaCiteilzation Systems

Pre-Matching Probe MountsIVIT902A Series

Features

• On-Wafer Broadband Pre-Matching

© Low Loss Wafer Probe Mount

O 8.0 to 50.0 GHz

O Ultra High Stability Design

GeneralThe MT902A series of pre-matching probe mounts are highlystable, low loss water probe mounts used in on-wafer devicecharacterization applications. By extending a water probeaway from the tuner body, these mounts create additionalclearance for proper probe alignment. The ultra-high stabilityinherent in their design eliminates the possibility of undesiredmovement during operation.

SpecificationsFrequency Range 8.0 to 50.0 GFIz

VSWR Range 10.1 minimum

Insertion Loss 0.36d B1/0.45(1132

Power Handling 10W CW, 0.5 kW peak

Connectors 2.4mm

Weight 2.7 oz.

MT902A2 Pre-Matching Probe Mount on a MT989AU01 50 GHzAutomated Tuner. This launch configuration is also used on MT902A1

and MT902A3.

MT902A5 Basic Probe Mount on a MT984A01 50 GHz AutomatedTuner. This launch configuration is also used on MT902A6 and

MT902A7.Available Models

Model DescriptionFrequency Range

(GHz)

Matching

Range

Recommended For Use

With Probe Stations

MT902A1 Basic probe mount DC 50.0 NA Cascade Summit 9000

MT902A2 High frequency pre-matching probe mount 21.5 50.0 10:1 Cascade M150

MT902A3 Low frequency pre-matching probe mount 8.0 21.5 10:1 Cascade RF1

MT902A5 Basic probe mount DC 50.0 NA Cascade 11K

MT902A6 High frequency pre-matching probe mount 21.5 50.0 10:1 Cascade 12K

MT902A7 Low frequency pre-matching probe mount 8.0 21.5 10:1 Cascade S300

1 MT902A1/2/3 at 50

2 MT902A5/6/7 at 50

See Maury Data

GHz with probe retracted.

GHz with probe retracted.

Sheet 2G-035D.



Recommended Launch Configuration forCascade Summit 9000, M150 & RF1 ProbeStations

IV1T902A1, MT902A2 & MT902A3

1.19

8 0 8

2.00

2.15 0

1rit.

2.4mm(FEMALE)

SUPPORTBRACKET

2.615

0

1.19

2.4mm(FEMALE)

SUPPORTBRACKET

2.640 2.00

:evice Characterization Byeiterna

Dimensions (Inches)

MT902A5, MT902A6 & MT902A7

Recommended Launch Configuration forCascade 11K, 12K & S300 Probe Stations

76-



MT7553M with Controller

Ovice Character!zation eitetris

Noise Receiver iVoduies R/17553 Series10 MHz to 110 GHz

Features*

o Instantaneous Ultra-WidebandMeasurements from 10 MHz to50 GHz

0 Banded Measurements from50-75 GHz, 60-90 GHz, and75-110 GHz

O Automates Noise ParameterMeasurement Systems

O Replaces External BandedComponents

© Integrated Downconverter, BiasTees, Low-Noise Amplifier, andSwitches

o Low Noise Figure

Expanding the Capabilities of NoiseFigure Analyzers for Ultra-WidebandNoise Parameter Measurements

IntroductionNoise Parameter measurements are typically performed usinga Vector Network Analyzer (VNA) to measure the S-Parametersof an amplifier, and a Noise Figure Analyzer (NFA) to measurethe noise figure or noise power of an amplifier. Whiletraditional NFAs are commonly available 01) to 26.5 G1-1z,many amplifier designers wish to test their amplifiers past thisfrequency limit. The MT7553 series of Noise Receiver Modulesenable engineers to take ultra-wideband noise parametermeasurements by extending the frequency limit of the NFA to50, 75, 90 or 110 GHz.

MT7553B 50 GHz Noise ReceiverModuleThe MT7553B is much more than a simple downconverter,it is the backbone of 50 GHz noise parameter measurementsystem. A downconverter accepts an input signal (commonlyreferred to as RF signal) at Ft and mixes it with local oscillatorsignal F2, resulting in an intermediate frequency (IF) of Fl-F2, a frequency able to he directly measured by a NFA. TheNoise Receiver Module consists of a downconverter includingintegrated mixer and local oscillator, as well as integratedbias networks to power the device under test, integrated RF

* See Available Models tab'e en page 47.

switches to switch between VNA and NFA paths, and integratedlow-noise amplifier (WA) to improve receiver noise figure.In essence, the MT7553 replaces the entire output block, orreceiver module, of our noise parameter measurement systemand is designed for easy on-wafer integration. Simply connectthe VNA, NFA and bias supplies to the proper module ports,and begin taking measurements. For the first time ever, fullyautomated frequency-swept noise parameters can be measuredbetween 10 MHz and 50 GHz on-water without disconnectingor changing a single component or cable, with extremely fastand accurate results.

MT7553B01 50 GHz PNA-X NoiseReceiver ModuleThe MI75531301 has been tailored for Agilent Technologies'new "one-box" solution, the PNA-X. Because the NoiseParameter and S-Parameter ports on the PNA-X are one andthe same, the MT7553B01 uses a transfer switch to internallycombine both pathways into one external port, easilyconnected to the PNA-X. See Maury Microwave article reprint5A-042 for the speed and accuracy benefits of using the PNA-Xover traditional methods.




RF Device Characterization: yateme

MT7553M Millimeter Wave NoiseReceiver ModuleThe MT7553M is designed for full millimeter-wave noiseparameter measurements within the TE10 waveguide band ofoperation. The MT7553M downconverts noise power densitiesfrom the frequency of interest to the NFA bandwidth using

a double-side band swept LO technique. The MT7553M isavailable between 50-75 GI-1z MR15), 60-90 GHz (WR12) and75-110 GI-1z (WR10).

Available Models

ModelInput Frequency

(System)

Output Frequency

(NFA)LO Mixer LNA

BiasTee

RF

Switch

VNA/NFA

Ports

Noise FigureConnector

Typ Max

MT7553B 0.01 — 50.0 GHz 0.01 — 26.5 GHz Internal Internal Internal Internal Internal Separate 15 20 2.4mm

MT7553B01 0.01 — 50.0 GHz 0.01 — 26.5 GHz Internal Internal Internal Internal Internal Combined 15 20 2.4mm

MT7553M15 50.0 — 75.0 GHz 0.01 — 26.5 GHz Internal Internal Internal External External Separate 12 12 WR15



MT7553B in a typical on-wafer setup for making noise parameter measurements.



9677APrecision Low Loss

Coaxial Triplexer

2nd HarmonicAutomated

Tuner

FundamentalAutomated Tuner

3rd HarmonicAutomated

Tuner

Typical Harmonic Load Pull Block Diagram

P. Ji,c3I

9677( ) Triplexer

BiasTee

2.00

4.00 1---

2.00

PJA CCO.TP,

Note:Actual size varies permodel, depending onconnector types andfrequencies used.

-4 - 2.50

3.50

1.00

// 1.510.75 - 2.26

araete •ization ►stems

Precision Low Loss Coaxial Triplexers9677 Series

DescriptionThe Maury Microwave 9677 series is a family of precisionlow loss triplexers designed to serve as networks forseparating harmonically related signals in automated devicecharacterization applications such as harmonic load pullmeasurement.

The 9677( ) triplexer is composed of one low pass filter and twobandpass filters with a common input port and three separateoutput ports (Fo, 2Fo and 3Fo). These bands arc harmonicallyrelated. A direct current path exists between the COMMONand Fo ports, which allows DC bias for the DUT.

Frequency specifications for the filters in the 9677 standardmodels are detailed in the Available Models below. Triplexerswith filters for other frequencies (tailored to user specifications)can be provided as custom ordered models. Please contact ourSales Department for more information.

Typical Dimensions (Inches)

Available Models

ModelSeries

Center Frequency (MHz)' Bandiiir dth for Insert. Loss (MHz) Minimum Re;ection (dB)2 In-BandVSWR3

(Max)

Insertion Loss4Max/Goal

(dB)

Average

Power(Min)

Connectors

Fo 2Fo 3Fo Fo 2Fo 3Fo Fo 2Fo 3FoFo

InputFo

Output2Fo

Output3Fo

Output

9677A() 900 1800 2700 200 400 600 40 40 40 1.5:1 0.4 / 0.2 100 W 7mm 7mm 7mm 7mm96778() 2140 4280 6420 200 400 600 40 40 40 1.5:1 04 / 0.2 100 W 7mm 7mm 7mm 7mm

9677C() 1960 3920 5880 200 400 600 40 40 40 1.5:1 0.4 /0.2 100W 7mm 7mm 7mm 7mm9677E() 1900 3800 5700 200 400 600 40 40 40 1.5:1 0.4 / 0.2 100 W 7mm 7mm 7mm 7mm9677F( 2100 4200 6300 200 400 600 40 40 40 1.5:1 0.4 /0.2 100W 7mm 7mm 7mm 7mm967701 2000 4000 6000 200 400 600 40 40 40 1.5:1 0.4 /0.2 100W 7mm 7mm 7mm 7mm9677H( 455 910 1365 200 400 600 40 40 40 1.5:1 0.4 / 0.2 100 W 3.5mm 3.5mm 3.5mm 3.5mm9677J() 1800 3600 5400 200 400 600 40 40 40 1.5:1 0.4 10.2 100W 7mm 7mm 7mm 7mm9677KO 2300 4600 6900 200 400 600 40 40 40 1.5:1 0.4 /0.2 100W 7mm 7mm 7mm 7mm9677L() 2500 5000 7500 200 400 600 40 40 40 1.5:1 0.4/0.2 100W 7mm 7mm 7mm 7mm9677M() 2700 5400 8100 200 400 600 40 40 40 1.5:1 0.4 / 02 100W 7mm 7mm 7mm 7mm9677N() 2900 5800 8700 200 400 600 40 40 40 1.5:1 0.4 /0.2 100W 7mm 7mm 7mm 7mm96770)) 2450 4900 7350 200 400 600 40 40 40 1.5:1 0.4 / 0.2 100W 7mm 7mm 7mm 7mm9677R( 5250 10500 15750 200 400 600 40 40 40 1.5:1 0.4 / 0.2 100 W 7mm 7mm 7mm 7mm967711 5800 11600 17400 200 400 600 40 40 40 1.5:1 0.4 / 0.2 100W 7mm 3.5mm 3.5mm 3.5mm9677104 1500 3000 4500 200 400 600 40 40 40 1.5:1 0.4 /0.2 100W 7mm 7mm 7mm 7mm9677T05 400 800 1200 100 200 300 30 30 30 1.5:1 0.4/0.2 100W 3.5mm 3.5mm 3.5mm 3.5mm9677T06 1845 3690 5535 270 540 810 40 40 40 1.5:1 0.45/0.2 100W 7mm 7mm 7mm 7mm9677107 1885 3770 5655 200 400 600 40 40 40 1.5:1 0.4 /0.2 100W 7mm 7mm 7mm 7mm

1 For insertion loss. 3 DC through the bandwidth for insertion loss. For 9677T06 only, the maximum dB is 0.4 at

2 Fo at harmonic bands; 2Fo at Fo and 3Fo: 3Fo at 2Fo. 4 Within the bandwidth for insertion loss. Fo and 2Fo, but is 0.45 at 3Fo.


R F Device Characterization Systems

3.50 - •-

DUT

1.00 1.750 .-

1.2559677D( ) Diplexer

BiasTee

FundamentalAutomated Tuner

2nd HarmonicAutomated

Tuner


Precision Low Loss Coaxial Diplexers9677 Series

DescriptionThe 9677D( ) diplexer is composed of one lowpass filter andone bandpass or highpass filter with a common input port(COMMON) with two separate output ports, Fo and 2Fo. Thesefilters are harmonically related. A direct current path existsbetween the COMMON and Fo ports. This path allows DC biasfor the DUT.

Frequency specifications for the filters in the 9677D( ) standardmodels are detailed in the Available Models below. Diplexerswith filters for other frequencies (tailored to user specifications)can be provided as custom ordered models. Please contact ourSales Department for more information.

9677D21Precision Low Loss

Coaxial DiiplexerTypical Dimensions (Inches)

Note:Actual size varies per model, depending on connector types and frequencies used.

Available Models

Typical Harmonic Load Pull Block Diagram

ModelSeries

Center Frequency (MHz) ) Bandwidth for Insert. Loss (MHz) Unimum Re;ection (d B)2 In•Band

VSV/R3

(Max)

Insertion Loss4),(ax / Goal

(dB)

Average

PUNer

(Min)

Connectors

Fo 2Fo Fo 2Fo Fo 2FoFo

InputFo

Output2Fo

Output

967701 10100 20200 200 400 40 40 1.5:1 0.4 / 0.2 100 W 3.5mm 7mm 7mm

967702 2100 4200 200 400 40 40 1.5:1 0.4 / 0.2 100 W 7mm 7mm 7mm

967703 910 1820 200 400 40 40 1.5:1 0.4 / 0.2 100 W 7mm 7mm 7mm

967704 1800 3600 200 400 40 40 1.5:1 0.4 / 0.2 100 W 7mm 7mm 7mm

967705 943 1885 200 400 40 40 1.5:1 0.4 / 0 2 100 W 7mm 7mm 7mm

967706 1960 3920 200 400 40 40 1.5:1 0.4 / 0.2 100 W 7mm 7mm 7mm

967707 910 1820 200 400 40 40 1.5:1 0.4 / 0.2 100 V/ 3.5mm 3.5mm 3.5mm

967708 1900 3800 200 400 40 40 1.5:1 0.4 / 0.2 100 W 3.5mm 3.5mm 3.5mm

967709 943 1885 200 400 40 40 1.5:1 0.4 / 0.2 100 W 3.5mm 3.5mm 3.5mm

9677010 1960 3920 200 400 40 40 1.5:1 0.4 / 0.2 100 W 3.5mm 3.5mm 3.5mm

9677011 2100 4200 200 400 40 40 1.5:1 0.4 / 0.2 100 W 3.5mm 3.5mm 3.5mm

9677012 838.5 1673 25 50 40 40 1.5:1 0.4 / 0 2 100 W 7mm 7mm 7mm

9677013 900 1800 200 400 40 40 1.5:1 0.4 / 0.2 100 W 7mm 7mm 7mm

9677014 1900 3800 200 400 40 40 1.5:1 0.4 / 0 2 100 W 7mm 7mm 7mm

9677015 2000 4000 200 400 40 40 1.5:1 0.4 / 0.2 100 W 7mm 7mm 7mm

9677016 8450 16900 200 400 40 40 1.5:1 0.4 / 0.2 100 W 7mm 7mm 3.5mm

9677D17 10000 20000 200 400 40 40 1.5:1 0.4 / 0.2 100W 3.5mm 3.5mm 3.5mm

9677D18 2400 4800 200 400 40 40 1.5:1 0.4 / 0 2 100 W 7mm 7mm 7mm

9677019 2000 4000 200 400 40 40 1.5:1 0.4 / 0.2 100 W 3.5mm 7mm 3.5mm

9677D20 10000 20000 200 400 40 40 1.5:1 0.4 / 0.2 100 W 3.5mm 7mm 3.5mm

9677024 1257.5 2515.0 200 400 40 40 1.5:1 0.4 / 0.2 100 W 3.5mm 7mm 3.5mm

1 For insertion loss.2 Fo at harmonic bands; 2Fo at Fo bands.

3 DC through the bandwidth for insertion loss.4 Within the bandwidth for insertion loss.

-3,17 :•6•11


61


MT964A17mm Load Pull Test Fixture MT964B1

7mm Load Pull Test Fixture

Features

Low Insertion Loss for High VSWR Tuning

0 Multiple Connector Configurations

0 50 ,S2 and Transformers Available

Heatsinks and Fans Available

0 Water Cooling Available

Accessories Provided

TRL Calibration Kit

0 One Device Insert

Optional Accessories

0 Water Cooling

°Additional Device Inserts

auk: ion Byer:Oirsi

AfilT964 Load Pull Test Fixtures

Low-loss Test Fixtures For Load Pull and Other Power Applications

Available ModelsModel Frequency Range Impedance Connector Power Handlingl

M1964A1 0.1 - 18.0 GHz 50 12 7mm 250 W CW

MT984A2 0.1 - 18.0 GHz 50 SI 3.5mm 250 W CW

MT964B1 0.8 - 18.0 GHz 10 - 12 S2 7mm 250 W CW

M196482 0.8 - 18.0 GHz 10 - 12 S2 3.5mm 250 W CV/

1 Proper heat dissipation of DUT is required.


00

-o 05

•0 1

-0,15

-02

-02$

-03

035

-04

c.1 -045

-0 5

055

-0.6

-065

-01

.075

-0 8

-065

-0 9

-095

Magnitude (dB) / Frequency

-0- Frequency (6Hz), Magnitude (dB) (S), Undefined, Undefined

,11,CB:DEBRB93nzz-,

8.0. Y: -0394

-.LtX1*151-1.1

..?? 'I_ 14 9, 1 n1 .0551

IBEO:ozczoatfzurro%

x 1.0, Y: -00331

1/!..1•Ir!

[0678,176 461969.4 tea ar.s

-F10616,-177 9211 1,6$3 - 0,6F/4 orrms

(ir:Orr:

-;'.• (0724.-155 4218 323 • 10 159i cird

• • .

RF Device Characterization systenr4

Typical S21 Performance of MT964A 1

P 141 q 1? 1./ 00 0)110 P 1)0)1)01)01.1 0)1)0170q q 00 0C)0q 1,1o o Cl C) CI VI • 0 In IrD N. to 0 0 Cl CI Cl C) V' V 0 0 0 ID C. N. CI OD

Frequency (Gilz)

Typical S11 Performance of MT964B2

mcn


4:110is-V(6e Characterization Systems .

Manual Tuners

General InformationManual tuners are used both in the laboratory and as systemcomponents to either establish or transform impedances for anumber of applications. They can be used to establish optimumsource or load terminations for device characterization, normalizea source or load for precision laboratory measurements or

Coaxial Stub Tuners — Maury stub tuners are basic laboratorytools used for matching load impedances to provide formaximum power transfer between a generator and a load,and for introducing a mismatch into an otherwise matchedsystem. Typical applications include power and attenuationmeasurements, tuned reflectometer systems and providing a DCreturn for single-ended mixers and detectors. Maury stub tunersare available in double- and triple-stub configurations withfrequency ranges extending from 0.2 to 18.0 Gliz.

Coaxial Slide Screw Tuners — Maury coaxial slide screwtuners are particularly well suited for use in establishingimpedances for device characterization, or for any otherapplication requiring a precisely repeatable mismatchcondition. Calibrated position indicators on these tunersmake it possible to repeat a specific matching condition witha high degree of accuracy. Their design allows the reflectionmagnitude and phase to be set independently. Slide screwtuners are also easy to use due to the almost independentelectrical results of the mechanical motions.

These tuners employ a slab-line transmission structure whichdefines their frequency range, with dual probes for enhancedmatching characteristics. The probes are micrometer driven andwork with a vernier readout of carriage position (except for the3.5mm and 2.4mm units which have micrometer driven carriages).

calibrations (noise, power, etc.), and can act as a matchingtransformer between a mismatched source and a mismatchedload. Maury produces several types of coaxial manual tuners intwo categories; slide screw tuners and stub tuners. Waveguideslide screw tuners are available in standard matching ranges only.

Position locks are provided on both the probe micrometers and thecarriage mechanism. Units with sexed connectors have a femaleconnector on one end and a male on the other.

The inter-stub spacing determines the range of impedancesthat can be matched and the ease of tuning. Triple-stub tunersare more convenient to use since tuning sensitivity is relativelyindependent of stub spacing.

Waveguide Slide Screw Tuners — Maury also offersmanual tuners designed with slotted waveguide sections aridmovable carriages supporting micrometer driven probes thatextend down into the waveguide. They are valuable tools foroptimizing a mismatched load and/or source for maximumpower transfer, or for establishing a specific source or loadtermination condition for device characterization.

They differ from coaxial slide screw tuners in that reflectionphase is set by the position of a single probe along thewaveguide, instead of the dual probes and slab line/centerconductor assembly of coaxial models. Magnitude is still set bythe probe penetration depth, which can be controlled to 0.001-inch resolution and can be locked down to prevent movementafter adjustment. The carriage is held in constant tension toprovide smooth movement and to eliminate the need for aposition lock.

Key Literature: Maury data sheet 2G-008, 2G-030, 20-035. 2G-035A, 2G-035B. 2G-035C and 3A-353.


0.2

0.4

0.8

2.0

2.0

4.0

0.5

1.0

4.0

12.0

18.0

18.0

0.2

0.4

0.8

2.0

4.0

0.5

1.0

4.0

18.0

18.0

1878G

1878A

1878B

1878C

1878 D

2612C7

2612C1

2612C2

2612C3

2612C4

FrequencyRange (GHz)

Model (By Connector Type)

Type N 7mm

1778G 261287

1778A 2612B1

1778B 261262

1778C 2612B3

1778E

1778D 261284

StubConfiguration

Double-Stub

Triple-Stub

SMA Inches (CM) Inches (CM)

- 30.00 (76.2) 4.60 (11.7)

1719A 15.00 (38.1) 4.60 (11.7)

1719B 7.50 (19.1) 2.00 ( 5 1)

1719C 3.00 ( 7.6) 0.75 ( 1.9)

3.00 ( 7.6) 0.50 ( 1.3)

1719D 1.75 ( 4.4) 0.50 ( 1.3)

30.00 (76.2) 4.60 (11.7) 2.00 ( 5.1)

1819A 15.00 (38.1) 4.60 (11.7) 2.00 ( 5.1)

1819B 7.50 (19.1) 1.00 ( 2.5) 0.75 ( 1.9)

1819C 3.00 ( 7.6) 0.75 ( 1.9) 0.50 ( 1.3)

1819D 1.75 ( 4.4) 0.75 ( 1.9) / 0.50 ( 1.3)

Stub Travel Stub Spacing


Coaxial Stub Tuners

Description

Maury stub tuners are basic laboratory tools used formatching load impedances to provide for maximum powertransfer between a generator and a load, and for introducinga mismatch into an otherwise matched system. Typicalapplications include power and attenuation measurements,tuned refiectometer systems and providing a DC return forsingle-ended mixers and detectors. Maury stub tuners areavailable in double- and triple-stub configurations withfrequency ranges extending from 0.2 to 18.0

Stub tuners work as impedance transformers to introducea variable shunt susceptance into a coaxial transmissionline. They consist of one or more short-circuited, variable

length lines (stubs) connected at right angles to the primarytransmission line. To provide all possible shunt susceptances,each stub must be movable over 1/2 wavelength at the lowestfrequency of operation; therefore, the lower frequency limit ofa tuner is determined by the frequency at which the maximumstub travel equals 1/2 wavelength. The upper frequency limit fora stub tuner is established by its connectors.

The inter-stub spacing of multiple-stub tuners determines therange of impedances that can be matched and the ease oftuning. Triple-stub tuners are more convenient to use sincetuning sensitivity is relatively independent of stub spacing.

Available Models


HO Device okereCiiiiiiettaii?Efi•iii4iiiie

Coaxial Slide Screw Tuners - Wide Matching RangeFeatures

8045N

► Slab-line Transmission Structure

► Dual Probes for Improved Matching

► LCD Readout for CarriagePosition

2740B

2740C

DescriptionMaury wide matching range slide screw tuners feature aslab-line transmission structure with dual micrometer-drivenprobes that provide precise control of the mismatch magnitude.Models operating up to 18 GHz are equipped with a digitalI.CD readout to indicate carriage position (phase). Higherfrequency models are equipped with a micrometer drivencarriage mechanism which is also employed in the standardmatching range models (see page 52).

The positional repeatability and high matching range ofthese tuners make them ideally suited for use in device

Available Models

7941A

characterization applications where there is a critical need toestablish impedances near the outer edge of the Smith chartand to reproduce electrical characteristics as a function ofmechanical position. They are designed to serve as a matchingnetwork for reducing reflections caused by mismatches presentin a transmission line, or to introduce a controlled mismatchinto an otherwise matched transmission line.

The models listed below are optimized for operation over widermatching ranges than the standard matching range models.

Model

Frequency

Range

(GHz)

Connector

Type

VSWR

Matching

Range

Maximum Loss

(Probes

Retracted)

Probe

Crossover

Frequency

1Power Handling

(Ave/Peak Watts)

Dimension Dimension

Inches (CM) Inches (CM)

7941A 12.0 - 50.0 2.4mm 2 10:1 1.0 dB 21.5 GHz 15/150 0.417 (1.059) 4.62 (11.735)

8041C 12.0 - 34.0 3.5mm 10:1 0.7 dB 16.0 GHz 15/150 0.417 (1.059) 4.95 (12.573)

8045D1 3.5mm 25/250 3.4 (8.636) 8.94 (22.708)

2640D1 1.8 - 18.0 7mm 4

12:1 0.4 dB 5.5 GHz 50/500 3.4 (8.636) 8.88 (22.555)

1643D1 Type N 5 50/500 3.4 (8.636) 8.92 (22.657)

8045P 3.5mm 25/250 7.8 (19.812) 13.34 (33.884)

2640P 0.8 - 18.0 7mm 4

10:1 0.6 dB 4.6 GHz 50/500 7.8 (19.812) 13.28 (33.731)

1643P Type N 5 50/500 7.8 (19.812) 13.32 (33.833)

1643N0.8 - 2.5

Type N 5 25:1

0.5 dB 2.8 GHz 50/500 7.8 (19.812) 13.32 (33.833)2.5 - 8.0 18:1

0.8 - 2.5 4 25:12640N 7mm 0.5 dB 2.8 GHz 50/500 7.8 (19.812) 13.28 (33.731)

2.5 - 8.0 18:1

0.8 - 2.5 3 25:18045N 3.5mm 0.5 dB 2.8 GHz 25/250 7.8 (19.812) 13.28 (33.731)

2.5 - 8.0 18:1

2740B 7-16 6

7.88 (20.015) 14.48 (36.779)0.8 - 8.0 7 35:1 0.1 dB 2.8 GHz 200/2000

2440B 14mm 7.88 (20.015) 13.07 (33.198)

2740C 7-16 6 14.95 (37.973) 22.76 (57.810)0.4 - 4.0 7 25:1 0.1 dB 1.4 GHz 200/2000

2440C 14mm 14.95 (37.973) 21.35 (54.229)

1 WithinWiin rated matching range.

2 Precision 2.4mm per Maury data sheet 5E-064.3

Precision 3.5mm per Maury data sheet 5E-062.4

Precision 7mm per Maury data sheet 5E-060.

=

Precision type N per Maury data sheet 5E-049.6

Precision 7-16 per Maury data sheet 5E-066.

Precision 14mm (GR900) per Maury data sheet 5E-068.


Typical Low Frequency-- Probe Response

Typical High Frequency-Probe Response

cc

cn

0

50

40

.?330

000 20

10

0LowerFrequencyLimit

CrossoverFrequency

UpperFrequencyLimit

OO

Coaxial Slide Screw Tuners - Wide fiVilatching RangeFunctional DescriptionThe dual probe structure in Maury coaxial slide screw tunersis designed so that one probe (the low frequency probe) coversthe range from the lowest frequency to the crossover frequencylisted in the Available Models table on page 50. The secondprobe (the high frequency probe) covers the range from thecrossover frequency to the tuner's maximum rated frequency.The optimum crossover frequency varies from tuner to tuner.

As each micrometer-driven probe is introduced into theslabline transmission structure it induces a mismatch in itsfrequency range. The magnitude of this impedance mismatch is

determined by the probe position (depth); the closer the probeapproaches the center conductor, the greater the magnitude.The phase of the impedance mismatch is determined by thecarriage position. The probes operate independently of eachother with little or no interaction. Each probe will meet itsspecifications over its rated frequency range, and typically hasconsiderably higher matching capability in the middle of itsband. Figure 1 shows responses that are typical of those seen ina low frequency /high frequency pair of probes.

FREQUENCY (GHz)

Figure 1. Typical responses seen in low frequency and high frequencyprobes as they are used in Maury coaxial slide screw tuners.

Typical Dimensions

°A' Travel —

H

'B'

Models with LCD readouts for carriage position Models with micrometer-driven carriage blocks

Figure 2. Typical dimensions for Maury coaxial slide screw tuners. See the Available Models tableon page 138 for model-specific dimensions at the -A- and -B" references.


Typical

zH. 1.0

Performance

20 <(/) >

w_1

ILILw

9

4.48Extended

cc

0z0 0.5

6

4

3

0JO

m

0w

0.96 LLw

2Fri

2 FL

F0FH

FREQUENCY RANGE

Typical Dimensions

tpo

0.42

221

•B•

RF Device Characterization Systems •

Coaxia0 Slide Screw Tuners - Standard Ma ching Range

DescriptionMaury slide screw tuners are particularly well suited for use inestablishing impedances for device characterization, or for anyother application requiring a precisely repeatable mismatchcondition The calibrated position indicators on these tunersmake it possible to repeat a specific matching condition with ahigh degree of accuracy. These tuners are also designed to allowthe reflection magnitude and phase to be set independently.Slide screw tuners are also easy to use due to the almostindependent electrical results of the mechanical motions.

Maury produces two categories of coaxial slide screw tuners;standard matching range (minimum 6:1 equivalent VSWR) andwide matching range (up to 25:1 nominal VSWR). Both typesemploy a slab-line transmission structure which defines theirfrequency range, with probes designed to be very close to 1/4Xin the linear dimension at the mid-band of each range. Eachtuner has two probes for enhanced matching characteristics.Units with sexed connectors have a female connector on oneend and a male on the other.

Maury standard matching range tuners are provided withmicrometer driven probes and vernier readout of carriageposition (except for the 3.5mm units which have micrometerdriven carriages). Position locks are provided on both the probemicrometers and the carriage mechanism.

Available Models

ModelFrequency

Range

(GHz)

Connector

Type

VSWR

Matching

Range

Maximum Loss

(Probes

Retracted)

Probe

Crossover

Frequency

Power Handling

(Ave/Peak Watts)

Dimension

"A"

Dimension

"B"

Inches (CM) Inches (CM)

80418 12.0 - 26.5 3.5mm 2

> 10:1 0.7 dB 16.0 GHz 25/250 0.52 (1.321)

(8.636)

2.90

7.50

, (7.400)

(19.100)

8045D

2640D

1643D

1.8 - 18.0

3.5mm 2

7mm3

Type N 4

? 6:1 0.4 dB 5.5 GHz

251250

50/500

50/500

3.40

8045C

2640C

1643C

0.9 - 12.4

3.5mm 2

7mm 3

Type N 4

> 6:1 0.6 dB 4.6 GHz

25!250

50/500

50/500

7.80 (19.812) 10.50 (26.700)

1 Within rated matching range.

3 Precision 7mm per Maury data sheet 5E-060.2

Precision 3.5mm per Maury data sheet 5E-062. 4

Precision type N per Maury data sheet 5E-049.


68


Features

• Slotted Waveguide TransmissionStructure

O Single Micrometer-Driven Probe

O Can Be Locked Down To PreventMovement After Adjustment

)

Matching Range

(Correctable to <1,02)Model

EIA WR

Number

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Ind

12.4 VSWR 20:1 X353 90 UG39/U 6.(

18.0 VSWR 5 20:1 P353 62 UG419/U 6.(

26.5 VSWR 5 20:1 K353 42 UG5951U 4.;

40.0 VSWR 5 20:1 U353 28 UG599/U 4.;

50.0 VSWR 5 20:1 J353A 22 UG383/U 4. n

Frequency

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12.5

18.0

26.5

33.0

all Body Length

es

(CM)

0 (15.2)

0 (15.2)

8 (11.1)

8 (11.1)

5 (12.1)

RF Device CharecterAZiiiiiini

Waveguide Slide Screw Tuners - Standard Matching Range

Description

Maury offers manual tuners that feature slotted waveguidesections and movable carriages supporting micrometer drivenprobes that extend down into the waveguide. They are valuabletools for optimizing a mismatched load and/or source formaximum power transfer, or for establishing a specific source orlad termination condition for device characterization.

As is the case with the coaxial slide screw tuners, in thesewaveguide models magnitude is set by the probe penetrationdepth, which is controllable to 0.001-inch resolution andcan be locked down to prevent movement after adjustment.The carriage is held in constant tension to provide smoothmovement and to eliminate the need for a position lock.

They differ from coaxial slide screw tuners in that thereflection phase is set by the position of a single probe alongthe waveguide, instead of dual probes and slabline/centerconductor assembly of coaxial models.

Available Models

Key Literature: Maury data sheet and 3A-353.




RF Device Characterization System!IntegrationFully Integrated Coaxial and Millimeter-WaveDevice Characterization Systems,250 MHz to 110 GHz

Features

• Power and noise parameter measurements

O Packaged and On-Wafer measurements

O Modulated, pulsed and CW signals

O Automated in-situ calibration

O Fewer connections

O Reliable and fast RF switching

O Saves time and money

O Turnkey systems available - Works "out ofthe box"

DescriptionMaury's mission is to meet its customers' device characterizationneeds regardless of the level of complexity. Maury has andcontinues to provide solutions covering the entire measurementspectrum; from the simplest stand-alone tuner to fully integratedturnkey systems.

Integrated systems are offered between 250 MI-1z and 110GHz, in-fixture and on-wafer, and are capable of measuring thefollowing:

• S-Pa ra meters

• X-Parameters

• DC-IV and Pulsed-IV measurements

• Power Measurements: Pout, Pin-delivered, Gain,Compression, Efficiency, Harmonic Powers...

• Multi-Tone Measurements: IMD, T01...

▪ Modulated Measurements: ACPR, EVM, CCDF...

• Noise Parameters: Nhnin, opt, Rn, Noise and Gain contours

• Time-domain Analysis: A-B waves, I-V waves, load lines...

• Thermal Microscopic load pull

Maury will integrate these features into an easily assembledand calibrated system that is straightforward to use, saving timeas well as money. Furthermore, the results will display greateraccuracy and repeatability. Less time and less money means amore profitable design cycle.

MT900N Series Fully Integrated 2.4mm 50 GHz LSNAMeasurement System.

In-situ CalibrationThe power of a Maury integrated system begins with itsproprietary in-situ calibration method, which allows for acomplete system-level calibration without disconnecting anyof the core system components. The majority of calibration andmeasurement errors occur for the following reasons; multipleVNA calibrations with improper reference-plane shifting,probes that are connected/disconnected multiple times ormeasured on their own, and multiple small measurement errorsthat cascade into very large errors. Unlike the above situations,in-situ calibration requires only one single connection,makes use of highly-repeatable and reliable RF switches andautomates the calibration procedure through the use of agraphic wizard. Overall system level verification proceduresbuilt into the ATS software result in average deltaGT values ofless than 0.2dB at all magnitudes and phases, when performingan in-situ calibration.

Turnkey Measurement SystemsMaury works very closely with instrument and componentmanufacturers to offer complete turnkey noise parameters aswell as large-signal test systems for both on-wafer and packageddevice measurements. Recognized as the global leader inmicrowave and millimeter-wave tuners and DC systems, Mauryhas partnered with numerous multinational companies whoare also leaders in their respective fields. Examples includeAgilent Technologies for RF Instruments (Network Analyzers,Spectrum Analyzers, Power meters, Power supplies), CascadeMicrotech (on-wafer probe stations, probes and positioners),Intercontinental Microwave (test fixtures and jigs), QuantumFocus Instruments (Thermal IR cameras), Auriga MeasurementSystems (Pulsed IV), as well as component and cablingmanufacturers. Turnkey measurement systems are available forsign-off and acceptance at Maury's corporate office.


FiF4 oillOs'Obarkii100WittjOri

MT900N15 Fully Integrated Millimeter-wave Noise Param-eter, Power and Intermod Measurement System.

MT900N15 Integrated Load Pulland Noise Measurement SystemThe MT900N15 system (pictured above) offers an excellentexample of Maury's integration efforts. MT900N15 is a 60-90GHz turnkey Device Characterization System fully integratedfor on-wafer s-parameter, noise parameter, and large-signalpower measurements, mounted on a Cascade Microtech S300automated probe station. It is fully automated through GPII3 andLAN communication, and includes a millimeter-wave AgilentPNA network analyzer, spectrum analyzer, power meter, andnoise figure analyzer in conjunction with a Maury MicrowaveMT7553M15 noise receiver module, two Maury MT978A 60-90 G1-1z automated tuners and MT993 ATS software.

Specific customer needs and specifications can be addressedthrough customization. Further information is available fromour Sales Department.

3 Key Literature: Application Note 5A•039.

MT900N Series Fully Integrated Real-Time IR Load Pull System.


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Mixed-Signal Active Load Pull System

Key Features (Typical Performance)• Broadband system concept (e.g. 0.4-18.0 GHz)

O Reconfigurable hardware; single-ended, differential and number of controlled harmonics

• High speed and dynamic range

O Embedded measurement of (Pulsed/Isothermal) DC parameters

Single tone• "Real-time" measurement speed >1,000 power and load states per minute

O Multi-dimensional parameter sweeps

• (Pulsed/Isothermal) High Power testing

• Measurement of calibrated Voltage and Current waveforms

• Device protection included

O Waveform reconstruction

Modulated signals• Wideband modulated signals (e.g. multi-carrier WCDMA) up to 120 MHz (240 MHz Available)

O Modulated Signal Library Included

• Losses and delay of cables, probes etc. are eliminated

• Upload the s-parameters of any "virtual matching networks" and get a one-to-oneagreement with your board design (also for linearity)

o Device testing with digital predistortion

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RF 'Device Characterization aysterns

General DescriptionThis novel mixed-signal load pull system is designed to handle realistic wideband complex modulated signals with a high dynamicrange and provide user defined reflection coefficients vs. frequency at the DUT reference planes.

The system concept is based on:

• IQ signal generation, synthesized with fully synchronized arbitrary waveform generators (AWG)

• Wideband ND converters to measure the wideband reflection coefficient

Figure 1 Principle of the Mixed-Signal Load Pull setup as a Signal-Flow diagram

Wideband Generation/DetectionThe maximum modulation bandwidth is set by the bandwidth of the AWG and IQ modulators.

• Currently more than 120 MHz of controlled bandwidth

• Total number of measurement points in every controlled band is >40,000 points

A

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2125 213 2155 214 2145 215 2155 425 425 427 42a 422 43 431

Figure 2. Output spectrum of the DUT at f o and 210 tested with multi-carrier WCDMA (with and without delaycompensation).

"Real-Time" Load PullSynchronization between signal generation and detection facilitates ultra-fast measurements.

• Independently fully controlled multidimensional Load Pull parameters sweep

• 5,760 measurement points in less than 5 minutes: 90 fundamental load states, swept load and source harmonic termination, 16power levels.

Figure 3. Injection signals as used in the 'real-time" multi-dimensional parameter sweeps.


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Model

System RF

Bandwidth

(GHz)

Active Load

Band No. 1

(GHz)

Active Load

Band No. 2

(GHz)

Modulation

Bandwidth

(MHz)*

Typical Detection

Dynamic Range

(dB)

Typical Active Load

Dynamic Range

(dB)

Minin

Pulse I

(nS1

MT2000A 0.4 - 18.0 0.4 - 6.0 0.4 - 6.0

120 80 60 10MT2000B 0.4 - 18.0 0.4 - 18.0 0.4 - 18.0

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MT2000D 1.0 - 26.0 2.0 - 26.0 2.0 - 26.0

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High Power/On-Wafer ConfigurationThe active loops are fully re-configurable (e.g., the same hardware would also support source-pull at 10 and load-pull at 1 0, 21, and31, or true differential source and load pull at fd. See 111 in the diagram below.

The proprietary algorithm (patent pending) results in low requirements on the loop amplifiers, so linearity is no longer a problemin this regard, while their P,it should be just slightly larger than the power generated by the device under test (DUT). See 121 in thediagram below.

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Specifications Suggested ReadingSystem RI: Bandwidth See Available Models Table • 5A-044 - Active Harmonic Load Pull with Realistic

Active Load Band No. 1 See Available Models TableWideband Communications Signals.

Typical Detection Dynamic Range 80 dB• 5A-047 - Base-Band Impedance Control and Calibration for

Active Load Dynamic Range 60 dB On-Wafer Linearity Measurements.Minimum Pulse Width 100 nSec • 5A-048 - A Mixed-Signal Load Pull System for Base-Station

Applications.

Available Models

• 5A-045 - Active Harmonic Load-Pull for On-1,Wer Out-of-Active Load Band No. 2 See Available Models Table Band Device Linearity Optimization.Modulation Bandwidth 120 MHz * • 5A-046 - A Mixed-Signal Approach for High-Speed Fully

Controlled Multidimensional Load Pull Rirameters Sweep.

* 240 MHz Option Available



RF Device Characterization Systems,

Pulsed N SystemsAMCAD Engineering's PIV/PLP Family of Pulsed IV Systems

AMCAD Engineering has created professional, industry-proven pulsing technology for both standalone IV-testing aswell as pulsed-bias load pull applications. Systems come fullyequipped with a common 19" rack mountable mainframecontroller that includes five integrated power supplies, output(drain/collector) and input (gate/base) remote pulser heads.Pulser heads are interchangeable and available in a range ofmodels designed to fulfil PIV and Load Pull requirements. Theseinclude 120V/30A and 250V/10A models. Each pulser head hasits own embedded and integrated measurement unit.

nuillimmilliliquilinthinillillipminnui/MACAU EnguneeringAdvanced Modeling for Computer-Aided Design

Key Features

0 250V/10A or 120V/30A pulse generation

0 Pulse width down to 200ns

0 Embedded measurement unit providing widebandwidth & highly accurate simultaneouscurrent and voltage measurements:

- Equivalent to 50Msample/s & 10 MHzbandwidth scope for pulse shapemonitoring

- Fast averaging function providing 16 bitresolution & 0.1% typical measurementaccuracy

- Very Fast Acquisition of a Complete PowerSweep to Speed Load Pull Test Benches

o Synchronized pulsed S-parametermeasurements

o Embedded fast short-circuit current breakerprotects both pulser heads (drain and gate)in the event of a DUT breakdown

oAutomatic pulser head calibration procedure

OPulse and measurement clocks are availablein both stand-alone or external-triggeredmode

ORemote control: GPIB or LAN

OResistive network set provides for new devicesafe characterization

These systems are specific Bilt systems dedicated to pulse operations, jointly developedby AMCAD Engineering and iTest Corporation.


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LOAD PULLDrain Voltage Switching between Vds High and Vds Low. Switching between Vds High and Ground.

Fastest settling time for power pulse down to 200ns.

Small dimensions, easy to connect.

Accurate level monitoring and pulse shapemonitoring.

Smallest voltage drop for power pulse > 100ps.

Large storage capacitors inside the probe.

External synchronization available for fast andcomplete power sweep plot.

TimingPulser Head Size

Measurement

AMC/MD Engineering5, Advanced Modeling for Computer-Aided Design


Gate Pulsed Head Opening Area

100 V 250 V

AM231 Load Pull 10A

10A

Pif,se Area5A

1A

\— DC

50V 120V

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50 V 00 V

AM232 Load Pull 30A

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Gate ProbeTopology: Fast linear regulator.

PARAMETER CONDITIONS MINIMUM MAXIMUM

Switched Voltage No Load —15V +15V

Voltage Accuracy Typical 0.05%

Switched Current Source or Sink —200mA +200mA

Output Impedance 10 R

Duty Cycle Including DC 0% 100%

Rise & Fall Time At 95% 6Ons 8Ons

Pulse Width — 200ns —

Current Breaker Response Time — — 12Ons

Drain Probe- • •lopology: ‘‘ , Itcning rower JUpply.

AM221 PIV 10A AM222 PIV 30A AM231 LP 10A AM232 LP 30A

PARAMETER CONDITIONS MIN MAX MIN MAX MIN MAX MIN MAX

High Level Switched Voltage No Current No Current

0.OV 0.OV

250V120V

0.OV0.OV

120V120V

0.OV0.0V

120V120V

0.0V0.OV

120V120VLow Level Switched Voltage

Voltage Accuracy Typical— —

0.05%10A —

0.05%30A

0.05%— 10A —

0.05%30ASwitched Current

RMS Current DC or Pulsed — 3A — 4A — 4A — 4A

Output Impedance — 0.552 0.1552 0.08(2 0.0552Voltage Stability Pulse Width Leading to a 1V Drop at 10A

———

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60ps3kWPulsed Power

Avera I e Pulsed Power — — 50W — 50W — 50W — 50WDuty Cycle — 0% 100% 0% 100% 0% 100% 0% 100%Rise Time 95% at Maximum Current 4Ons 7Ons 9Ons 13Ons 70ns 110ns 13Ons 170nsPulse Width At Maximum Current 200ns — 400ns — 500ns — 500ns —

Current Breaker Response Time — — 7Ons — 4Ons — 4Ons — 4Ons

AM222 PIV 30AA I AM221 PIV 10A

30A10A

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1A

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4A

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FiF Device Charecterizitstion Systems

Pulse TimingThe switching working point is defined according to fourprogrammable signals: Gate Switch, Drain Switch, RF Switchand Sample Clock.

Time Ref.

Pulse Period

Gate Switch

Drain Switch

RF Switch

Sample Clock(When Enabled)

Acquisition & Memorizatiqn Time 2Ops

MonitoredSignal

Sampling Period

-N.

PARAMETER CONDITIONS SPECIFICATION MINIMUM MAXIMUM

Time Resolution Any Outputs, Sampler, Duration and Delays 2Ons — —

Time Jitter Using Exterenal Synchronization Inputs — — ±2ns

Pulse Frequency According to Power and Analog Limits — 50Hz 500kHz

Pulse Width According to Power and Analog Limits — 200ns 1 ms

Sample Frequency — — — 50kHz

Additional Specifications• Time reference is available using both internal master clock

and external signal.

• Measurement sampler clock is available using internalsequencer or external signal.

• The complemented level is available independently foreach output.

Continuous Signals CapabilityAlthough the system is primarily designed for pulsed testing, itis able to operate in continuous mode:

• Larger pulses are available using on/off continuous modewith a time resolution of 1ms.

• Pulsed or continuous operation modes are availableindependently for each output.

AIMICAD EngineeringAdvanced Modeling for Computer-Aided Design

78MAURY MICROWAVE CORPORATION RE Device Characterization Systems

10 MHz 0.2%50 MHz1.0% During a Transition

0.1% Within a Pulse250 Samples

TYPICAL ABSOLUTE

ACCURACY

MINIMUM SETTLING TIME

WITHIN THE PULSERESOLUTION RIPPLE

Step Time : 100ms

200ns—w,

Dra n Current

Sampler Crock

Measurement Window200ns

„._evioe CharacterizatiOn Systemb'

Sampling MeasurementSampler PerformancesThanks to a programmable measurement sampler, severalacquisition modes are available, providing different levels ofaccuracy and speed:

Pulse Shape Monitoring: Embedded Scope Onto Each Probe

TYPICAL ABSOLUTE ACCURACY BANDWIDTH

MAXIMUM SAMPLING RATE

RIPPLE

MEASUREMENT WINDOW

Accurate Working Point Measurement Within a Pulse Using Fast Averaging Function

16 Bits

0.1%

200ns

0.003%

Power Sweep Monitoring: Accurate Working Point Measurement for Each Step of the Sweep

RESOLUTIONTYPICAL ABSOLUTE

ACCURACY

MINIMUM SETTLING TIME

WITHIN THE PULSERIPPLE

TOTAL STEP TIME INCLUDING SETTLING

& MEASUREMENT

16 Bits 0.1% 200ns 0.2% 100ms

Sweep MonitoringSiamese Sweep, One Sample Per Step

Pulse Shape Monitoring

In any case, the tour inputs (Vg, Ig, Vd, Id) are sampled at thesame time, and the data buffers can be read at once.

Guaranteed Absolute AccuracyVersus Ranges:The gate probe uses bipolar ranges, while the two drain probesuse only positive ranges. For the purpose of increasing smallamplitude accuracy, a one-tenth range is available at any time,without switching the outputs.

GATE PULSER HEAD DRAIN 10A PIV PULSER HEAD DRAIN 30A PIV PULSER HEAD

VOLTAGE CURRENT VOLTAGE CURRENT VOLTAGE CURRENT

RANGE ±15V -±20mA ±0.2A 25V 250V 1A 10A 12V 120V 3A 30A

ACCURACY 30mV 40pA 400pA 50mV 500mV 2mA 20mA 25mV 250mV 6mA 120mA

?lb\ AIMICAD EngineeringAdvanced Modeling for Computer-Aided Design


79

RE Device Characterization Systems

RF Device = ems

Some Tuners Just Work Better Than OthersMaury Tuners Work Better Because They Are Built Better!

Maury TechnologyMakes TheDifference:

1. Optical LimitSwitches at BothEnds of EachMovement forOptimum Accuracyand Repeatability

2. Non-ContactingMismatch Probesnever Touch theCenter Conductor forIncreased Reliabilityand Longevity

3. Precision Machined Connectorsand a Wide Range of Precision LowLoss Adapters Makes Setup Easy

4. Precision Machined Slablines(Developed by Maury's MaterialScience Division) ensureRepeatability and IncreaseAccuracy

5. High Peak Power BreakdownProtection Provides IncreasedReliability and Stability

6. High DC Current Rating

7. USB Interface For Control


80


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