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MAPS development at IPHC for HEP and X-ray...
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MAPS development at IPHC for HEP and X-ray applications
Maciej [email protected]
IPHC & PICSEL group
MAPS for high energy physics
MAPS for low energy X-ray applications
Summary and Future
KEK, 30 Nov. 2017
mailto:[email protected]
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M.Kachel - MAPS development at IPHC for HEP and X-ray applications 2
Institut Pluridisciplinaire Hubert Curien
IN2P3INC
INEE INSB
300 employees(100 researchers) Pluri-disciplinary: subatomic physics, chemistry, ethology
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PICSEL group Complementary expertise
Physicists: 3 permanent, 1 post-doc
Micro-electronics designers: 11 permanents, 3 PhD students
5 test engineers Since 1999: 120 publications, 14
PhD defended ~50 sensors designed (MIMOSA
series)
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
Partners Academics:
CERN, USA (Berkeley, Brookhaven), DESY (Hambourg), IHEP in China, CMOS foundries:
AMS, TSMC, STM , Tower-Jazz, ESPROS, X-FAB,
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IPHC-PICSEL group: MAPS Detection of high energy particles with MAPS sensors
Pioneers in using Monolithic Active Pixel Sensors since 1998- Single particle detection position at m level
Very low signal (200 e-) Pixel noise 10 to 20 e- Pixel size 10 - 100 m Low occupancy 1%
Readout in 2 ways: Analog - external ADC Digital on-chip discrimination / ADC
Detection surface: Individual sensors: 1 to 4 cm2 Module with several sensors: .. tens of cm2 Full detector: few 100 cm2
P- substrate
N-WELLnn
P - WELLn n
collecting diodeNMOS NMOS
P - WELL
epitaxial layer ~20 m
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IPHC-PICSEL strategy
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EUDET 2006/2010Beam Telescope
Spin-off: Interdisciplinary applications, biomedical, space
ILC >2025Internatinal Linear Collider
CBM 2018Compressed Baryonic Matter
EUDET (R&D for ILC, EU project)
STAR (Heavy Ion physics)
CBM (Heavy Ion physics)
ILC (Particle physics)
HadronPhysics2 (generic R&D, EU project)
AIDA (generic R&D, EU project)
FIRST (Hadron therapy)
ALICE/LHC (Heavy Ion physics)
EIC (Hadronic physics)
Belle II (Particle physics)
CLIC (Particle physics)
ALICE 2019A Large Ion Collider at LHC
STAR 2014Solenoid Tracker At RHIC
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
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IPHC-PICSEL: STAR experiment
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MIMOSA28 (ULTIMATE)
- ~ 1M pixels- Thinned to 50 m- 10 chips per ladder- Power dissipation
~350 mW /cm2
400 MIMOSA-28 sensors 360 106 pixels Air flow cooling Top 35C s.p. 4 mmat. budget = 0.39 % X0 / layer Read-out time ~ 190 s
Operated 2014-2016
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
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PLUME Pixel Ladder with Ultra low Material Embedding
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Mimosa 26 sensors
Thickness 2 mm 8 Mpixels, Readout time 115 s, Material budget 0.4 % of X0 Weight - 10 g Power - 9 Watts (air cooled)
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
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PLUME BEAST @ KEK
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SALAT - Single Arm Large Area TelescopeMotivation -> Big surface and thin reference planes
4.2 cm
4.6 cm
4 x Chips thinned down to 50 m glued on a 50 m thick mylar layer 3.6 M-pixels over 15.3 cm2 < 200 s integration time Gap between the pixels ~ 100 m
Build with AIDA european project
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
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Molecular imaging with + emitters in moving rats MAPSSIC project:
Constraint on size and power dissipation 16 x 128 pixels pitch 30 x 50 m Pixel based on Alpide architecture (ALICE) Power consumption ~ 160 W Expected flux - few counts / s slow readout IMNC, IPHC, CPPM, CERMEP, NeuroPSi
Currently integrating prototype sensor
probe in the brain : - section ~500x500 m2
- sensitive volume (18 um) immune to
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
From previous project PIXSIC
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Current main project of PICSEL groupMIMOSIS - sensor for CBM experiment
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
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MIMOSIS - sensor for CBM experimentCurrent main project of PICSEL group
*D. Kim, et al. Front end optimization for the monolithic active pixel sensor of the ALICE Inner Tracking System upgrade JINST, Volume 845, 11 February 2017, Pages 583-587
MIMOSIS pixel details: schematic
Vdiode
AMP
THR
Memory 1
Memory 2
MEM_SEL MEM_SEL
MEM
_RST
MEM
_FLUSH
MASKPIXEL_OUT
Sensingdiode
- Pixel design based on Alpide*- Modifications in sensing part and the memory part
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PrsentateurCommentaires de prsentationDifference with Alpide no trigger
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Current main project of PICSEL group
MIMOSIS pixel details: layout
Single pixel
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
diode
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MIMOSIS - sensor for CBM experimentCurrent main project of PICSEL group
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But there is more than 1 pixel
Full sensor Overview Matrix of pixels 504 x 1024 Pixel pitch 26.88 x 30.24 m2 Configurable by I2C Integration time 5 s Readout: 8 x e-link @ 320 Mbit/s Small prototype produced First full scale submission
- Q3 2018
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
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Monolithic Active Pixel Sensors for low energy X-ray applications
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Motivation MAPS for Imaging Devices
Monolithic Sensor(ex: MAPS)
Hybrid Pixel SensorCCD
Sensitive Volume
Detector
Readout &Processing Cell
Pixel detector
Small pixel pitch Wide energy range Low noise (cooling) No single particle
image Limited counting rate
Single particle counting High counting rate Noise impacted by
detector connection High cost
Bonding detector
Single particle counting Small pixel pitch Low noise Low cost Moderate counting rate
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PrsentateurCommentaires de prsentationparticles= photon, proton, electron, alpha..Single particle counting provides more information augmented imaging filterout energy improve resolution filter-out the noise !! Especially
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Depletion studies of MAPS Principle
Undepleted MAPS Fully depleted MAPS
p-- epitaxial layer
nwell
deep pwell
pwell
p+ n+ n+
nwell
n+ p+ p+ p+ p+
p substrate
collecting diode (~1 V)NMOS
transistorPMOS
transistor
Depletion RegionX-ray
photon
nwell
deep pwell
pwell
p+ n+ n+
nwell
n+ p+ p+ p+ p+
NMOStransistor
PMOS transistor
X-ray photon
collecting diode (~15 V)
high res p-- substrateor epitaxial layer
Charge collection by drift and diffusion Diode at ~ 1.0 V
Charge collection by drift Diode at higher voltage ~ 15-20 V
Motivation for having depleted sensors: Larger depleted volume -> Increased signal Drift -> Faster charge collection
-> Larger pixels possible (small clusters)
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
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Depletion studies of MAPS
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Pipper sensor (FSI)
Epitaxial layer 18 um Czochralski substrate
Collecting diode
bias
read
Vdiode
Column OUTPUT
Prorotype - 32x128 pixels Pixel size 22x22 m2 Analog outputs AC coupled collecting diode Produced on two substrates:
Epitaxial layer 18m High resistivity substrate
Laboratory measurements with 55Fe in function of diode bias (1-20V)
Energy resolution obtained ~ 300eV
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
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Depletion studies of MAPS (II)
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METAL layers + oxide ~10mMETAL layers + oxide ~10m
Goal: costless BSI sensor
[J. HEYMES]
Depleted zone
p+ layer
col. diode
Thinning 50 m Ion implant. Annealing
Preliminary studies on CZ wafer with 55Fe
col. diode
Post processing done in Jan 2017
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
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Counting low energy X-rays - Mimosa 22SX
Vclamp
Cc
Rf
power
_powerCollecting diode
Vdiode
Column OUTPUT
Requirements: X-Ray Energy Range [few 100 eV 5 keV] with 100% QE
Counting Dynamic [1-107] ph/pix/s
High occupancy
High Spatial Resolution (pixel pitch ~ 20 m)
First prototype specs Tower Jazz 180 nm CIS
128 x 256 pixels with 22m pixel pitch
Collecting diode AC coupled to the amplifier
Discriminator with 2 thresholds -> energy window
Binary outputs
16 mm of active area
Mimosa 22SX
Strategy for counting: Small pixels amplification only Rolling shutter readout Column Discriminator Serialization and readout
Counting outside of the pixels
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Mimosa 22SX energy window
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NIR laser emulates a space-correlated continuous energy spectrum Short laser pulses (100ns) sent at the beginning of every recorded
frame Unfocused laser spot > center ~6000 eV, outer ring ~ 500 eV
NIR laser
Equivalent Stable number of pulses detected throughout range of thresholds=> suggest constant detection efficiency from 800 to 6000 eV
Reconstructed laser spot profile
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M22SX results with X-rays
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Piece of a flex PCB - aluminum strips Image obtained with Mimosa 22SX
1. Front Side Illumination vs Back Side Illumination: Higher diode voltage => deeper depletion Higher number of counts BSI => full depletion of 40m probable Quantitative interpretation needs to account for charge sharing
Need low X-ray energy tests to verify that full depletionis achieved and entrance window is operational
2. X-ray Image (single photon counting)
Obtained with 55Fe very low flux Thickness of the aluminum strips calculated => 15 m for the thin (150m), and 50m for the thick strips
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
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M22SX results Soleil 1.5keV
Post process M22SX Vdiode = 40V
We can see 1.5 keV photons!
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A spin-off application for M22SX
Dose Monitoring at CYRC Cyclotron at IPHC: 24 MeV protons Milimeter beam size
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First tests with Mimosa 22SX Linear behaviour in the measured fluence range At least 1000 protons/pix/s possible
Motivation:Monitor dose for small beam size (problematic with current detector)
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
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Depleted MAPS good for HEP!
Tests performed with irradiated Pipper2 chip at the University of Frankfurt
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1013 neq/cmT=-60C
5x1014 neq/cmT=-60C
1V3V
10V 20V
1V3V
10V20V
1013 neq/cm2 performance restored after cooling 1015 neq/cm2 degraded, but we still see the energy peak
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Summary future Plans
PICSEL group capabilities: Design of sensors for HEP experiments / low X-ray applications Readout systems Sensor integration into modules / detectors
Future plans : Sensor following MIMOSIS architecture (towards ILC)
- Integration time < 1s- Power pulsing-
Large(r) scale depleted imager with analog readout- Active area ~1cm2 - Applications : X-ray spectroscopy, Hadron therapy, - SOI technology would be an ideal candidate (depletion wise..)
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Thank you for your attention
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Short-term fellowship at KEK
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Plan for the Short-term fellowship at KEK
Hands-on the SOI technologyDesing of the analog part of MIMOSIS pixel usedfor CBM experiment Schematic + layout + simulations How much we benefit from the SOI vs TJ 0.18m :
- Pixel size- Power- Speed
Future collaboration
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MAPS development at IPHC for HEP and X-ray applicationsDiapositive numro 2PICSEL groupIPHC-PICSEL group: MAPSIPHC-PICSEL strategyIPHC-PICSEL: STAR experimentPLUME Pixel Ladder with Ultra low Material Embedding PLUME BEAST @ KEKDiapositive numro 9Molecular imaging with + emitters in moving ratsCurrent main project of PICSEL groupMIMOSIS - sensor for CBM experimentMIMOSIS - sensor for CBM experimentCurrent main project of PICSEL groupCurrent main project of PICSEL groupMIMOSIS - sensor for CBM experimentCurrent main project of PICSEL groupMonolithic Active Pixel Sensors for low energy X-ray applicationsMotivation MAPS for Imaging DevicesDiapositive numro 17Depletion studies of MAPSDepletion studies of MAPS (II)Counting low energy X-rays - Mimosa 22SXMimosa 22SX energy windowM22SX results with X-raysM22SX results Soleil 1.5keVA spin-off application for M22SXDepleted MAPS good for HEP!Summary future PlansDiapositive numro 27Diapositive numro 28Diapositive numro 29Short-term fellowship at KEKPlan for the Short-term fellowship at KEK