The VUV laser is an all metal/ceramic device and uses the most advanced design of a n y c o m m e r c i a l excimer laser.

Long gas lifetime Corona PreIonization On-Board Vacuum Pump Low Jitter switching

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157nm Fluorine Lasers

VUV

Performance benefits

The total ceramic/metal technology and corona preionization technology of GAM laser products is ideal for operation on the molecular Fluorine 157nm laser transitions. 157nm VUV lasers have always proved especially difficult devices from which to obtain long gas lifetime and long term stable operation due to the high sensitivity of the laser to contamination. The 157nm ultraviolet output is highly absorbed by many contaminants in the active laser gas. The unique super clean design of GAM laser products greatly reduces gas contamination and produces exceptional performance when the laser is operated at 157nm on the molecular Fluorine transitions; all without the use of cryogenic gas processing. The EX10F laser gives up to 1.4W of 157nm output at repetition rates up to 600Hz. The EX50F provides higher repetition rate and higher power output, up to 750Hz and 3W is available from the EX50F laser. The high power EX100F produces 10mJ and up to 5W average power. All models of the F2 laser give over 15 Days static gas lifetime and 10 million pulses to 50% energy. No more refilling your F2 laser every day. The laser chamber is an all metal/ceramic device and uses the most advanced design of any commercial excimer laser. The laser of course includes standard features such as active thermal stabilization, constant power and energy control, external triggered operation, sync out, automatic refill and automatic gas control. The laser can be completely controlled from a Windows 9x/2000/XP software package. An ActiveX is available for those who wish to write custom software for the laser, or to incorporate the laser controls into a larger software routine.

The output of the VUV laser is terminated with a mini conflat flange or Kwik connect vacuum flange to quickly connect the laser to a high vacuum system or a leak free gas purged system. Additionally the entire laser can be operated inside a Nitrogen purged system. Choice of models

Several models of Fluorine laser are available offering a number of energy/repetition rate combinations. The EX10F mini laser is available in a 300Hz and a 600Hz maximum repetition rate model. The EX50F laser is available in 250Hz, 500Hz, and 750Hz models, and the high power EX100F in 125Hz, 250Hz, 500Hz and 750Hz configurations. The optimized Fluorine lasers utilize a high efficiency discharge system to produce high laser efficiency and stable optical output. The EX SERIES of lasers provide precision optical tools for the vacuum UV. Economical Operation

The EX50F, EX10F and EX100F Fluorine lasers operate from a single cylinder of premix gas. Long gas lifetime is achieved without the use of halogen injections and the need for a separate Fluorine cylinder source. The laser chamber can be refilled in approximately 1 minute using the software controls and the on board vacuum pump. High Reliability

The EX10F, EX50F and EX100F Fluorine lasers feature high reliability and long system lifetime. Total system lifetime is in excess of 2 billion pulses. All optimized Fluorine laser models are also capable of operation at all other excimer laser wavelengths.

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F-version lasers give the longest available gas lifetime at 157nm, with up to 15 days operation on a single gas fill. F-version lasers also operate on all other excimer laser wavelengths but at lower energy than standard lasers. All F-version laser are fitted with an external optics coupling for connection to a Nitrogen or inert gas purge system. F2 Lasers operate with HELIUM buffer gas for reduced running costs compared with systems using NEON buffer.

157nm Fluorine Lasers

VUV

157nm Fluorine Lasers

VUV

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PARAMETER EX5F EX10F EX50F EX100F EX100HF

Wavelength nm 157

Energy Max. mJ 2 3.5 4.5 10 15

Average Power W

0.4W @ 250Hz

0.6W @ 300Hz

0.8W @ 250Hz

1.1W @ 125Hz

0.8W @ 60Hz

0.65W@500Hz

1.2W @ 600 Hz

1.6W @ 500Hz

2.2W @ 250Hz

1.6W @ 125Hz

1.0W @ 750Hz

1.9W @ 750Hz

2.8W @ 750Hz

4W @ 500Hz

3W @ 250Hz

Dynamic gas lifetime Pulses to 50% energy 10E7 15E6 15E6 > 15E6 8E6

Static Gas life to 50% energy 10 days 15 days 15 days 15 days 15 days

Repetition Rate 250/500/750Hz 300/600/ 750Hz

250/500/750Hz

125/250/500Hz

60/125/250 Hz

Pulse Length 8 nS

Beam Size 6 x 3 mm 7.5 x 3

mm 9 x 3 mm 11 x 6 mm

Stability + / - 2% Standard Deviation

Divergence 1 x 2 1 x 2 0.9 x 1.8 0.8 x 1.6

Cooling Air : 250/300/600 Hz Water : 500/750 Hz

10 nS

Options

♦ Wavelength control ♦ 750Hz Repetition Rate ♦ Unstable Resonator Optics ♦ Single Wavelength

Dimensions and electrical service

The package dimensions and electrical requirements of the various F2 laser models can be found in the basic data sheets on the EX SERIES lasers.

GAM LASER INC. 6901 TPC Drive #300 ORLANDO, FL 32822 Phone : 407-851-8999 Fax : 407-850-0700

Email : Sales@ gamlaser.com Web : www.gamlaser.com

MADE IN USA

Copyright © 2005 GAM Laser Inc.,

Specifications

♦ The longest lifetime commercially available 157nm Lasers

♦ Vacuum Ultraviolet in a table top package

♦ VUV Purge Connector

K e y B e n e f i t s