Leti Strategy to address key mems challenges -...
Transcript of Leti Strategy to address key mems challenges -...
Jean-Philippe POLIZZI
MEMS Program Manager
LETI STRATEGY TO ADDRESS KEY MEMS CHALLENGES
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About Leti
Founded in 1967
1,800 researchers
54 start-ups
& 365 industrial partners
2800 patents
318 M€ budget (80% contract R&D)
CEO
Dr. M-N Semeria250 PhD students + 40 post PhD
with 37% foreign students
~ 40M€ CapEx
311 generated in 2014
40% under license
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10’s
00’s
90’s
MEMS MARKETS EVOLUTION
80’s
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$0M
$5.000M
$10.000M
$15.000M
$20.000M
$25.000M
2014 2015 2016 2017 2018 2019 2020
Market share forecast by application market ($ millions)
Aeronautics Automotive Consumer Defense Industrial Medical Telecom
Source: Yole Developpement, 2015
MEMS: A BILLONS DOLLARS INDUSTRY
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Issu
es
Strong cost pressure
Miniaturization
Growing use of Combo sensors
MEMS components
Well established Accelerometer Gyroscope Magnetometer Microphone
Sensor being adopted Pressure Humidity
From IHS / 2014
Average Selling Price erosion by sensor function 2011-2017
ISSUES ON CONSUMER/ IOT /
AUTOMOBILE MARKETS
“Not Enough Money in MEMS”, Says
InvenSense CEO
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Issu
es
Strong cost pressure
Miniaturization
Growing use of Combo sensors
MEMS components
Well established Accelerometer Gyroscope Magnetometer Microphone
Sensor being adopted Pressure Humidity
9-axis MEMS IMU (Bosch BMX055 – 5 dies)
Microphone (Knowles SPA2629LR5H-B)
Pressure sensor (ST LPS25H)
Humidity sensor (Sensirion SHTC1)
No manufacturing standard1 Product = 1 Process
ISSUES ON CONSUMER / IOT /
AUTOMOBILE MARKETS
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CHALLENGES IN MEMS SENSORS
PRODUCT LINE
Reduce NRE and time to market
Ending the « one product one process » rule
Technological platforms
“MEMS platforms are way to go”
Stefan Finkbeiner, CEO of Bosch
Sensortec
From Device to System
The importance of software
“Not Enough Money in MEMS,
Own the Data”
Behrooz Abdi, CEO of InvenSense
INNOVATION
Disruptive solutions: Products/technologies
First product on market
"I want 500, 5,000 different types of sensors in
the next five years”
Sean Ding, chief scientific officer for
sensing solutions at telecom giant
Huawei Technologies
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CHALLENGES IN MEMS SENSORS
INNOVATIONDisruptive solutions: Products/technologies
First product on market
"I want 500, 5,000 different types of sensors in
the next five years”
Sean Ding, chief scientific officer for
sensing solutions at telecom giant
Huawei Technologies
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Thin Film Technology
(Vac.dep. / shadow mask)
Bulk Technology
(Litho / wet etching)
Surface Technology
(Litho / DRIE on SOI)
Nano-scale Technology(DUV litho on thin SOI)
80 90 00
year
10 20
Tran
sfe
rsK
ey d
ate
s
1984 - Comb drive accelero patent
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81
Hygrometer
Quartz accelerometer
19
87
Weight sensor
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80
Pacemaker accelerometer
Geophone
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96
Miniature pressure sensor
19
96
Accelerometer
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05
2007 - Caltech Alliance
2010 – joint lab.
High perf. pressure sensor
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98
Inertial platform
20
11
M&NEMS platform
20
13
Above-IC GMR Technology
20
12 XXXXXX
1996 - Startup creation
2013 - Startup
2014 Startup
2011 - Startup
30+ YEARS BACKGROUND IN MEMS SENSORS
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PRESSURE SENSOR
Capacitive pressure sensor Piezoresistive pressure sensor
MAGNETIC SENSOR
3-axis CompassAbove-IC GMR sensor TMR sensor and resonator
INERTIAL SENSOR
3-axis Accelerometer 3-axis Gyroscope
ACOUSTIC SENSOR
Microphone cMUT
A LARGE PANEL OF SENSORS TECHNOLOGIES
pMUT
High Temperature P sensor
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OTHER SENSORS
GAS SENSORS
NEMS-based
µ-TOF Mass-spec
BIO/CHEMICALSENSORS
3-axis force sensor
A LARGE PANEL OF SENSORS TECHNOLOGIES
IMAGING SENSORS
NDIR CO2 sensors Photoacoustic detector
conductivityIonic sensor Multi-parameter Metabolic sensor
IR bolometer Cooled IR MCT PD X-rays VIS CMOS cameras
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CHALLENGES IN MEMS SENSORS
PRODUCT LINE
Reduce NRE and time to market
Ending the « one product one process » rule
Technological platforms
“MEMS platforms are way to go”
Stefan Finkbeiner, CEO of Bosch
Sensortec
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High-SNR Microphone
MEMS size mechanical part
+
Nano-size piezoresistive gauge
3-axis Gyroscope
3-axis Magneto
3-axis Accelero
X
ZY
Pressure sensor
M&NEMS "GENERIC" PLATFORM
Separate optimization
Miniaturized sensors
Generic platform
Not sensitive to parasitics
Well known and robustpiezoresisitive detection
Very short duty cycle and multiplexing
Simple electronicscommon for all the axis
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M&NEMS 6-AXIS COMPASS/ACCELEROMETER
6-axis mechanical footprint ≈ 1,1mm²
Low power consumption (30µW/axis in DC)
1 electronic common for each of the 6 axis
High linearity
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NEMS-BASED SENSORS PLATFORM
FOR GAS AND BIO-SENSING
Mass
loading
Mass
loading 40
2
lM
f
m
f
eff
Responsivity
3
0
2 lMm
Resolution
µbolometer
Freq
uen
cy s
tab
ility
Freq
uen
cy s
tab
ility
Cellular force sensor
Mass-spec for Bio applications
• High resolution• Very short response time• High integration
Gas detection
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LoD ≈ 100’s ppb
Typical VOC chromatogram: environment, air
quality,..
µGC
Air gas carrier
Sensitivity up to sub ppm
Families of gases
Volatile Organic Compounds BTEX; Other aromatics compounds
Permanent gases N2, CO, CO2, H2, He etc…
Light hydrocarbons C1 to C5
Heavy hydrocarbons C6 to C12 and higher
Roadmap for sulfur compounds H2S, COS, THT, CS2, mercaptans etc…
NEMS-based gas
chromatography
systems
Industry
Environment
Security
Medical
APIX : NEMS-BASED GAS SENSOR
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CHALLENGES IN MEMS SENORS
From Device to System
The importance of software
“Not Enough Money in MEMS,
Own the Data”
Behrooz Abdi, CEO of InvenSense
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FROM SENSOR FUSION….
CONTEXT AWARENESS: A REALITY TODAY
WWW …
… TO CONTEXT AWARENESS
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DEVICE
CLASSIFICATION process
LEARNING process
Annotated database
many users
many use cases
many trials
Learning stage
Object ?
Scene ?
Activity ?
Events ?
…
Physical
informationDigital
informationFeatures
Classifier
Tune
I am walking in a mall
Sensor based Processing
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Device
Other device
CLASSIFICATION process
LEARNING process
Headache ?Physical
information
Digital
informationFeatures
Classifier
Adapt
Wellness tips …
Learning stage
User Adaptive Processing
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LETI: THE LEADING R&D INSTITUTE ON
MICROSYSTEMS
• 30 years experience in MEMS
• 200 people involved in MEMS
• 8” MEMS/NEMS technologies
• 330 patents portfolio in the MEMS field
• 25 on-going industrial collaborations
• Addressing the three key challenges
identified by MEMS analysts:
• Innovation
• Technology platform
• Moving from device to microsystem maker:
adding value and functionality with software
Leti, technology research institute
Commissariat à l’énergie atomique et aux énergies alternatives
Minatec Campus | 17 rue des Martyrs | 38054 Grenoble Cedex | France
www.leti.fr
Thank you for your attention
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The innovation premium
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1 000
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3 000
4 000
5 000
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2 011 2 012 2 013 2 014 2 015 2 016 2 017
Rev
enu
es in
US
$ M
illio
ns
Sensor by function in mobiles and tablets
Gaz
Fingerprint
Microphone
Pressure
Magnetometer
Gyroscope
Accelerometer
from