Lecture 3-2 Bulk Micromachining Silicon as A …oz.nthu.edu.tw/~d9511818/10ess5850Lec 3-2.pdfLecture...
Transcript of Lecture 3-2 Bulk Micromachining Silicon as A …oz.nthu.edu.tw/~d9511818/10ess5850Lec 3-2.pdfLecture...
![Page 1: Lecture 3-2 Bulk Micromachining Silicon as A …oz.nthu.edu.tw/~d9511818/10ess5850Lec 3-2.pdfLecture 3-2 Bulk Micromachining Silicon as A Mechanical Material: Material property comparison:](https://reader030.fdocuments.in/reader030/viewer/2022040913/5e89a7806e4c6232714d6693/html5/thumbnails/1.jpg)
NTHU ESS5850 Micro System Design F. G. Tseng Fall/2009, 3-2, p1
Lecture 3-2 Bulk Micromachining
� Silicon as A Mechanical Material:
Material property comparison:
Major difference:
Silicon yields by fracturing (at room temp) while metals usually yield by deforming inelastically—chipping, cleave along crystallographic planes.
![Page 2: Lecture 3-2 Bulk Micromachining Silicon as A …oz.nthu.edu.tw/~d9511818/10ess5850Lec 3-2.pdfLecture 3-2 Bulk Micromachining Silicon as A Mechanical Material: Material property comparison:](https://reader030.fdocuments.in/reader030/viewer/2022040913/5e89a7806e4c6232714d6693/html5/thumbnails/2.jpg)
NTHU ESS5850 Micro System Design F. G. Tseng Fall/2009, 3-2, p2
� Definition of Bulk Micromachining: Based on the device shaping by etching a bulk substrate.
� Materials used for bulk micromachining: single crystal silicon, gallium arsenide, quartz, etc…
� Silicon bulk micromachining: 1. Isotropic silicon wet etching
HNA system (HNO3+HF), etching rate can be 50 μμμμm/min:
a. Holes injection +− ++→++ hOHHNOHNOOHHNO 222 2223
b. Oxide formation
224 4 HSiOOHSi +→+ −+
c. Oxide etched
OHSiFHSiOHF 2622 26 +→+
Total reaction:
)(6 222623 bubblesHOHHNOSiFHHFHNOSi +++→++Iso-Etch Curve:
![Page 3: Lecture 3-2 Bulk Micromachining Silicon as A …oz.nthu.edu.tw/~d9511818/10ess5850Lec 3-2.pdfLecture 3-2 Bulk Micromachining Silicon as A Mechanical Material: Material property comparison:](https://reader030.fdocuments.in/reader030/viewer/2022040913/5e89a7806e4c6232714d6693/html5/thumbnails/3.jpg)
NTHU ESS5850 Micro System Design F. G. Tseng Fall/2009, 3-2, p3
Effects: High HF Low HNO 3: oxidation limit, rough surface High HNO3 Low HF: etching limit, smooth surface Examples of isotropic etching:
Masking materials:
![Page 4: Lecture 3-2 Bulk Micromachining Silicon as A …oz.nthu.edu.tw/~d9511818/10ess5850Lec 3-2.pdfLecture 3-2 Bulk Micromachining Silicon as A Mechanical Material: Material property comparison:](https://reader030.fdocuments.in/reader030/viewer/2022040913/5e89a7806e4c6232714d6693/html5/thumbnails/4.jpg)
NTHU ESS5850 Micro System Design F. G. Tseng Fall/2009, 3-2, p4
2. Anisotropic silicon wet etching: A process of preferential directional etching of material using liquid source etchants (a crystal orientation-dependent etching). a. Classification of solids based on atomic order:
b. Silicon crystal structure:
![Page 5: Lecture 3-2 Bulk Micromachining Silicon as A …oz.nthu.edu.tw/~d9511818/10ess5850Lec 3-2.pdfLecture 3-2 Bulk Micromachining Silicon as A Mechanical Material: Material property comparison:](https://reader030.fdocuments.in/reader030/viewer/2022040913/5e89a7806e4c6232714d6693/html5/thumbnails/5.jpg)
NTHU ESS5850 Micro System Design F. G. Tseng Fall/2009, 3-2, p5
![Page 6: Lecture 3-2 Bulk Micromachining Silicon as A …oz.nthu.edu.tw/~d9511818/10ess5850Lec 3-2.pdfLecture 3-2 Bulk Micromachining Silicon as A Mechanical Material: Material property comparison:](https://reader030.fdocuments.in/reader030/viewer/2022040913/5e89a7806e4c6232714d6693/html5/thumbnails/6.jpg)
NTHU ESS5850 Micro System Design F. G. Tseng Fall/2009, 3-2, p6
c. Miller indices (integer form of surface direction vector): 1. Take the intercepts with three axes, say a, b, c 2. Take the reciprocal of these three integers, multiplied by smallest common denominator, get miller indices (d,e,f)
d. Silicon wafer flats and the relationship to crystal
orientation:
![Page 7: Lecture 3-2 Bulk Micromachining Silicon as A …oz.nthu.edu.tw/~d9511818/10ess5850Lec 3-2.pdfLecture 3-2 Bulk Micromachining Silicon as A Mechanical Material: Material property comparison:](https://reader030.fdocuments.in/reader030/viewer/2022040913/5e89a7806e4c6232714d6693/html5/thumbnails/7.jpg)
NTHU ESS5850 Micro System Design F. G. Tseng Fall/2009, 3-2, p7
e. Etching rate and selectivity among different crystal surface: Concentration ↑: etching rate↓ selectivity ↑ surface roughness↓ Temperature ↑: etching rate ↑ selectivity ↓ surface roughness↑
![Page 8: Lecture 3-2 Bulk Micromachining Silicon as A …oz.nthu.edu.tw/~d9511818/10ess5850Lec 3-2.pdfLecture 3-2 Bulk Micromachining Silicon as A Mechanical Material: Material property comparison:](https://reader030.fdocuments.in/reader030/viewer/2022040913/5e89a7806e4c6232714d6693/html5/thumbnails/8.jpg)
NTHU ESS5850 Micro System Design F. G. Tseng Fall/2009, 3-2, p8
f. Silicon anisotropic etching on <100> wafers Along <110> direction:
Concave and convex corner: The surface revealed in concave corner is the slowest one, however, it is the fastest one in convex cases.
![Page 9: Lecture 3-2 Bulk Micromachining Silicon as A …oz.nthu.edu.tw/~d9511818/10ess5850Lec 3-2.pdfLecture 3-2 Bulk Micromachining Silicon as A Mechanical Material: Material property comparison:](https://reader030.fdocuments.in/reader030/viewer/2022040913/5e89a7806e4c6232714d6693/html5/thumbnails/9.jpg)
NTHU ESS5850 Micro System Design F. G. Tseng Fall/2009, 3-2, p9
Examples:
Conner compensation:
![Page 10: Lecture 3-2 Bulk Micromachining Silicon as A …oz.nthu.edu.tw/~d9511818/10ess5850Lec 3-2.pdfLecture 3-2 Bulk Micromachining Silicon as A Mechanical Material: Material property comparison:](https://reader030.fdocuments.in/reader030/viewer/2022040913/5e89a7806e4c6232714d6693/html5/thumbnails/10.jpg)
NTHU ESS5850 Micro System Design F. G. Tseng Fall/2009, 3-2, p10
Along <100> direction:
![Page 11: Lecture 3-2 Bulk Micromachining Silicon as A …oz.nthu.edu.tw/~d9511818/10ess5850Lec 3-2.pdfLecture 3-2 Bulk Micromachining Silicon as A Mechanical Material: Material property comparison:](https://reader030.fdocuments.in/reader030/viewer/2022040913/5e89a7806e4c6232714d6693/html5/thumbnails/11.jpg)
NTHU ESS5850 Micro System Design F. G. Tseng Fall/2009, 3-2, p11
g. Silicon anisotropic etching on <110> wafers
(110
)
<111>
![Page 12: Lecture 3-2 Bulk Micromachining Silicon as A …oz.nthu.edu.tw/~d9511818/10ess5850Lec 3-2.pdfLecture 3-2 Bulk Micromachining Silicon as A Mechanical Material: Material property comparison:](https://reader030.fdocuments.in/reader030/viewer/2022040913/5e89a7806e4c6232714d6693/html5/thumbnails/12.jpg)
NTHU ESS5850 Micro System Design F. G. Tseng Fall/2009, 3-2, p12
![Page 13: Lecture 3-2 Bulk Micromachining Silicon as A …oz.nthu.edu.tw/~d9511818/10ess5850Lec 3-2.pdfLecture 3-2 Bulk Micromachining Silicon as A Mechanical Material: Material property comparison:](https://reader030.fdocuments.in/reader030/viewer/2022040913/5e89a7806e4c6232714d6693/html5/thumbnails/13.jpg)
NTHU ESS5850 Micro System Design F. G. Tseng Fall/2009, 3-2, p13
h. Silicon anisotropic etching on <111> wafers
![Page 14: Lecture 3-2 Bulk Micromachining Silicon as A …oz.nthu.edu.tw/~d9511818/10ess5850Lec 3-2.pdfLecture 3-2 Bulk Micromachining Silicon as A Mechanical Material: Material property comparison:](https://reader030.fdocuments.in/reader030/viewer/2022040913/5e89a7806e4c6232714d6693/html5/thumbnails/14.jpg)
NTHU ESS5850 Micro System Design F. G. Tseng Fall/2009, 3-2, p14
Summary of possible shape by bulk etching <100> or <110> wafers:
![Page 15: Lecture 3-2 Bulk Micromachining Silicon as A …oz.nthu.edu.tw/~d9511818/10ess5850Lec 3-2.pdfLecture 3-2 Bulk Micromachining Silicon as A Mechanical Material: Material property comparison:](https://reader030.fdocuments.in/reader030/viewer/2022040913/5e89a7806e4c6232714d6693/html5/thumbnails/15.jpg)
NTHU ESS5850 Micro System Design F. G. Tseng Fall/2009, 3-2, p15
i. Etch stop: High Boron Concentration:
Electrochemical etch stop
![Page 16: Lecture 3-2 Bulk Micromachining Silicon as A …oz.nthu.edu.tw/~d9511818/10ess5850Lec 3-2.pdfLecture 3-2 Bulk Micromachining Silicon as A Mechanical Material: Material property comparison:](https://reader030.fdocuments.in/reader030/viewer/2022040913/5e89a7806e4c6232714d6693/html5/thumbnails/16.jpg)
NTHU ESS5850 Micro System Design F. G. Tseng Fall/2009, 3-2, p16
2. Silicon dry etching:
Deep silicon RIE: