Laser Processing &Micro Machining

Polaris Motion Control System Hardware Setup

Galvoscanner, Machine Vision & Laser Height Sensing

20 Micron Etching on Aluminum withInfrared Nanosecond Laser

Polaris Motion is dedicated to delivering advanced motion control solutions provid-ing accuracy, quality, throughput and ease of use.

Many areas are served including: laser mate-rial processing; optics, semiconductor, flat panel, and mobile device manufacturing; automotive, aerospace, military, medical devices and sustainable energy.

A Polaris motion system synchronizes multi-axis mo-

tion with pulse laser firing to tolerances of nanosec-

onds and nanometers. An integrated Polaris system

for laser applications controls stage motion and Galvo

motion synchronously. The drives are optimized for

both long stroke BLDC motors and for high bandwidth

Galvo motors. Manufacturing is made easy with stan-

dard G-code part programs.

A Polaris motion system includes a powerful Intel/

Linux based controller for path generation and pro-

cess execution, a wide variety of drives for different

high performance actuators and powerful easy to use

software.

Polaris capabilities for laser manufacturing include:

F-theta lens calibration; stage, Galvoscanner and laser

synchronization with ease of use made possible with

Polaris CNC operator interface and machine setup

software.

Galvoscanners are very fast devices, deflecting and

focusing a laser source for cutting, marking, drilling, re-

surfacing or ablation of a material. However, their field

of view (FOV) is limited to less than 100mm most of

the time and often to less than 50mm. In many appli-

cations the work piece is larger than the Galvoscanner

FOV. A solution is to move the Galvoscanner assembly

with a stage to a number of stationary locations until

the entire part is machined. However, this is slow and

each processed area must be "stitched" together,

©Polaris Motion, Tel. 250-382-7249, Toll Free 866-548-5639, sales@pmdi.com, www.pmdi.com

Polaris System Architecture for Laser CNC Applications

ControllerPolaris CNC Operator Interface

Laser

Gx, Gy

Z

YX1, X2

3Ø PWMDrives forBLDC Motors

1Ø LinearDrives for GalvoMotors

PWM Drivefor BLDC Motor &Linear Drive forVoice Coil

leading to "stitching errors" where the borders from

one area to another are misaligned. A Polaris system

employs advanced algorithms to move a Galvoscanner

continuously and smoothly with a stage. The stage and

Galvoscanner motions are accurately synchronized,

thus greatly reducing stitching errors. Furthermore

throughput increases because stop-start motion se-

quences are eliminated.

Precise on/off control of a laser source coordinated

with motion trajectories is a must for the creation of

accurate laser micro machined parts. Polaris solves this

with detailed timing designs executed in high speed

digital logic with timing control into the nanoseconds.

Many different triggering and timing schemes are of-

fered to handle a wide range of lasers.

The optical path from laser source to the work piece is

invariably distorted. Polaris provides software to com-

pensate for these distortions. The Galvoscanner creates

a grid of fiducial marks which are measured with a ma-

chine vision system. The experimental data is passed to

an algorithm that generates the correction matrix.

The combination of stage, Galvo and laser synchroni-

zation combined with optical calibration and easy to

use software gives what is needed in a control system

to create a high precision laser material processing

platform. Many applications are supported using ma-

terials such as glass, metals, polymers and crystals.

Polaris provides a comprehensive list of technologies

to help deliver desired laser manufacturing outcomes.

©Polaris Motion, Tel. 250-382-7249, Toll Free 866-548-5639, sales@pmdi.com, www.pmdi.com

Polaris Laser CNC Research Platform

• X,Y, Z air bearings• Gx, Gy Galvoscanner• Optional theta axis

• Granite & ceramic construction

• High grade sin/cos analog scale encoders• Digital Galvoscanner position sensors• The platform is calibrated for sub-micron accuracy

• Laser source / beam delivery

• Machine vision system

• Polaris Control System CNC operator interface Easy to use Gcode part programming Synchronized stage and Galvoscanner motion Synchronized laser triggering Wide variety of laser trigger schemes Limited jerk setpoint generation Infinite field of view (IFOV) Machine axes calibration F-theta lens calibration

20 Micron Etching on Aluminumwith Infrared Nanosecond Laser

Technologies for LaserManufacturing

•Synchronizedlasertriggeroutput•Fixedpitchtriggering•Infinitefieldofview(IFOV)•ServoandGalvosynchronization•Machinegeometry&opticscalibration•SupportdigitalGalvos

Machine Control Technologies

•Standardandcustomizablefeedbackfilters•Cascadedbi-quadfilters•Digitalservoratesupto200kHz•Forwardandinversekinematics•XYZ,ABC,UVWG-Code•Simulationmode•CNCoperatorinterface•Realtimedatacollection•Integratingmotionandgauging•Systemwide64bitdoublefloatcomputations•GHzmotioncontrolnetwork

Fixed pitch laser triggering

©Polaris Motion, Tel. 250-382-7249, Toll Free 866-548-5639, sales@pmdi.com, www.pmdi.com

Command DescriptionG00 Rapid Traverse Positioning modeG01 Linear Interpolation modeG02 Arc Clockwise (2D) modeG03 Arc Counter-Clockwise (2D) modeG04 Dwell mode. Time in milliseconds specified in P or F register.G05 Position Velocity Time (PVT) interpolation mode. Time in seconds

specified in F register.G17 XY Plane SelectionG18 ZX Plane SelectionG19 YZ Plane SelectionG20 Inch programming modeG21 Metric programming modeG28 Return to preset position #1, through intermediate (safety) point.G30 Return to preset position #2, through intermediate (safety) point.G40 Turn off cutter radius compensationG41 Turn on cutter radius compensation to the left of the partG42 Turn on cutter radius compensation to the right of the partG49 Clear tool offsetG53 Reset Work Coordinate System (WCS) to machine zero

G54-G59G59.1-G59.3

Select up to 9 different Work Coordinate Systems

G70 Set GCode program position units to inchesG71 Set GCode program position units to millimetersG90 Set GCode program dimension mode to absolute.G91 Set GCode program dimension mode to relative.G92 Preset position. Set or clear a GCode offset based on current position.

G108 Enable path mergingG109 Disable path merging

Command DescriptionM00 Pause until user resumesM02 End of Program. Reset internal state of GCode interpreterM03 Primary spindle on (clockwise rotation).M04 Primary spindle on (counter clockwise rotation).M05 Primary spindle stop.M07 Coolant on (mist).M08 Coolant on (flood).M09 Coolant off.M20 Channel 0 laser trigger onM21 Channel 0 laser trigger offM22 Channel 1 laser trigger onM23 Channel 1 laser trigger offM24 Advanced laser trigger onM25 Advanced laser trigger offM30 End of Data. Reset internal state of GCode interpreterM33 Secondary spindle on (clockwise rotation).M34 Secondary spindle on (counter clockwise rotation).M35 Secondary spindle stop.M60 Enables fixed pitch triggering

M60.01 Sets the pulse width for fixed pitch triggeringM60.02 Sets the minimum valid count for fixed pitch triggeringM60.03 Sets the pitch for fixed pitch triggering.

M61 Disables fixed pitch triggeringM62 Output signal on channel 0M63 Output signal on channel 1M66 Enable toggle modeM67 Pause triggeringM68 Un-pausetriggering

M954-M959 Set current position to offsets for WCS 1 - 6

400200

Lens Distortion in X Direction

0

Y-200

-400400200

X

0-200

-10

10

5

0

-5

-400

Dist

orti

on i

n X

G-CodePartProgrammingforEaseofUse&Manufacturing

F-Theta Lens Correction Surfaces

Application Areas

•Flatpaneldisplaypatterning•Solarcellscribing•Micro-optics•Inkjetnozzledrilling•Fuelinjectionnozzledrilling•Microlasersintering•Pulsedlaserablationdirectwrite•PCBmarking•Surfacetexturing•Ceramicanddiamondcutting•2Dand3Dhermeticwelding•Lasermicromachining•Semiconductortrimmingandrepair

©Polaris Motion, Tel. 250-382-7249, Toll Free 866-548-5639, sales@pmdi.com, www.pmdi.com