Laser Diffraction (Static Light Scattering) · 2019-04-10 · FRAUNHOFER DIFFRACTION - PARTICLE...

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© 2007 HORIBA, Ltd. All rights reserved. LIGHT SCATTERING THEORY Laser Diffraction (Static Light Scattering)

Transcript of Laser Diffraction (Static Light Scattering) · 2019-04-10 · FRAUNHOFER DIFFRACTION - PARTICLE...

Page 1: Laser Diffraction (Static Light Scattering) · 2019-04-10 · FRAUNHOFER DIFFRACTION - PARTICLE Angle of scatter from a particle is INVERSELY proportional to angle (θ) nλ=d sin

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LIGHT SCATTERING THEORY

Laser Diffraction(Static Light Scattering)

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When a Light beam Strikes a Particle

Some of the light is:DiffractedReflectedRefractedAbsorbed and Reradiated

ReflectedRefracted

Absorbed and

Reradiated

Diffracted

Small particles require knowledge of optical properties:Real Index (degree of refraction)Imaginary Index (absorption of light within particle)Light must be collected over large range of anglesIndex values less significant for large particles

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Diffraction Pattern

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Diffraction Patterns

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Young’s Experiment

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Single vs. Double Slit Patterns

Single slit diffraction pattern Double slit diffraction pattern

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Fraunhofer Diffraction: Young’s Double Slit

Distance between slits is INVERSELY proportional to angle (θ)

nλ=d sin θd =nλ / sin θ

θ

n = order of diffractionλ = wavelength of lightd = distance between slitsθ = angle of diffraction

For a given measurement

system with a fixed wavelength, the

product nλ is constant

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Fraunhofer Diffraction: PinholeThe diameter of the pinhole is INVERSELY proportional to angle (θ)

nλ=d sin θd =nλ / sin θ

θ

n = order of diffractionλ = wavelength of lightd = distance between slitsθ = angle of diffraction

For a given measurement

system with a fixed wavelength, the

product nλ is constant

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FRAUNHOFER DIFFRACTION - PARTICLEAngle of scatter from a particle is INVERSELY proportional to angle (θ)

nλ=d sin θd =nλ / sin θ

n = order of diffractionλ = wavelength of lightd = distance between slitsθ = angle of diffraction

For a given measurement

system with a fixed wavelength, the

product nλ is constant

θ

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Edge Scattering PhenomenonLight Scatter occurs whether from a

slit, a pinhole or a particle. It occurs at the edge of an object. A SLIT and

PARTICLE of the same size produce the same diffraction pattern

θ

θ

θ

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Fraunhofer Diffraction: Particles

Large particles scatter light through SMALLER angles

θ Small particles scatter light through LARGER angles

θLarge ParticleSmall Particle

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Diffraction Pattern: Large vs. Small Particles

LARGE PARTICLE:Low angle scatterLarge signal

SMALL PARTICLE:High Angle ScatterSmall Signal

Wide Pattern - Low intensity

Narrow Pattern - High intensity

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Angle of Scatter vs. Particle SizeFraunhofer Diffraction describes forward scatter technology. Scatter angles

are relatively small, less than 30°

ANGLE OF SCATTER is INVERSELY proportional to particle size. SMALL particles scatter at larger angles than large particles.

The AMOUNT OF LIGHT scattered is DIRECTLY proportional to particle size. LARGE particles scatter MORE light than small particles.

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Light Scattering

S1(Θ) and S2(Θ) are dimensionless, complex functions defined in general scattering theory, describing the change of amplitude in respectively the perpendicular and the parallel polarized light as a function of angle Θ with respect to the forward direction. Computer algorithms have been developed in order to allow computation of these functions and, thus, of I(Θ).

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Plot of Airy Function

3.24λ2A

1.22λ2A

2.23λ2A 3.24λ

2A

2.23λ2A

1.22λ2A

W

λ = Wavelength of lightA = Radius of ParticleW = Angle with respect

to optic axis

I (W)

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Comparison of Models

Fraunhofer (left) vs. Mie (right)

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Fraunhofer Approximation

dimensionless size parameter α = πx/λ;J1 is the Bessel function of the first kind of order unity.

Assumptions:a) all particles are much larger than the light wavelength (only scattering at the contour of the particle is considered; this also means that the same scattering pattern is obtained as for thin two-dimensional circular disks)b) only scattering in the near-forward direction is considered (Q is small).

Limitation: (diameter at least about 40 times the wavelength of the light, or a >>1)*If λ=680nm (.68 μm), then 40 x .68 = 27 μmIf the particle size is larger than about 50 μm, then the Fraunhofer approximation gives good results.

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Fraunhofer Approximation

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Mie Theory

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Mie vs. Fraunhofer

1.E-04

1.E-03

1.E-02

1.E-01

1.E+00

1.E+01

1.E+02

1.E+03

1.E+04

1.E+05

0.01 0.1 1 10 100

Angle in degrees

Rel

ativ

e In

tens

ity

3.0 µm by Mie3.0 µm by Fraunhofer100.0 µm by Mie100.0 µm by Fraunhofer

100 μm

3 μm

Figure A.3 -- Comparison of scattering patterns of non-absorbing particles according to Fraunhofer and Mie calculations (Np = 1,59 – 0,0; nwater = 1,33;

wavelength = 633 nm)

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Extinction Efficiencies

0

0.5

1

1.5

2

2.5

3

3.5

4

0.1 1 10 100Particle Size μm

Extin

ctio

n Ef

ficie

ncy

1.46 - 0.0011.46 - 0.021.46 - 0.051.46 - 0.11.46 - 0.2

Legend shows Particle

refractive index

0

0.5

1

1.5

2

2.5

3

3.5

4

4.5

5

0.1 1 10 100

Particle Size μm

Extin

ctio

n Ef

ficie

ncy

1.39 - 0.0 1.59 - 0.0 1.79 - 0.0 1.99 - 0.0 2.19 - 0.0

Legend shows Particle

Refractive Index

Figure A.2 -- Extinction efficiencies in relation to particle size and refractive index (Mie

prediction). (np and kp as indicated; nwater = 1,33; wavelength = 633 nm) (Fraunhofer assumes an extinction efficiency of 2 for all particle sizes)

Good agreement for transparent particles >50 μm“ “ “ opaque particles > 2 μm

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Scattering intensity pattern for single particles in relation to size

1.0E-041.0E-031.0E-021.0E-011.0E+001.0E+011.0E+021.0E+031.0E+041.0E+051.0E+061.0E+071.0E+081.0E+091.0E+101.0E+11

0.1 1 10 100 1000

Angle degrees

Rela

tive

Inte

nsity

0.10.52510100

Legend Particle Size μm

Mie calculation; wavelength 633 nm; Np = 1,59 – 0,0 i; nm = 1,33

For singleparticles range from0.1 to 100 μmis 1013

Reduce byweighting tovolume

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Light intensity scattering patterns for equal particle volumes in relation to size

1.E-03

1.E-02

1.E-01

1.E+00

1.E+01

1.E+02

1.E+03

1.E+04

1.E+05

0.1 1 10 100 1000

Angle in degrees

Rel

ativ

e In

tens

ity

0.10.52510100

Legend ParticleSize μm

Mie calculation; wavelength 633 nm; Np = 1,59 – 0,0 ; nm = 1,33

Weightingto thirdpower ofsize

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Influence of particle size on angular light intensity scattering patterns

Width = 1% (COV)

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Influence of imaginary parts of RI (absorbancies)

Width = 1% (COV)

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Influence of distribution width on angular light intensity scattering patterns

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Result Calculation

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Iterations

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IterationsHow many times to calculate new (better) results before reporting final result?For LA-930 standard = 30, sharp = 150For LA-950 standard = 15, sharp = 1000Fewer iterations = broader peakMore iterations = narrow peakToo many iterations = fit to noise, over-resolved

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Viewing Raw Data

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LA-950 Optics

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Why 2 Wavelengths?

30, 40, 50, 70 nm latex standards

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Practical Application of Theory:Mie vs. Fraunhofer for Glass Beads

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Practical Application of Theory: Mie vs. Fraunhofer for CMP Slurry

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Conclusions

It helps to know some of the theory to best use a laser diffraction particle size analyzer

Small particles – wide anglesLarge particles – low angles

Look at Intensity curves, R parameter & Chi square calculationsUse Mie theory at all times (default whenever choosing an RI kernel other than Fraunhofer)