Kinetics Modular systems · 2012. 11. 27. · Kinetics Fluid Systems - Process Flow Products 18...

Kinetics Fluid Systems Kinetics Fluid Systems -- Process Flow ProductsProcess Flow Products

18 February 2002 1


18 February 2002 2

THE MODULAR SYSTEM THE MODULAR SYSTEM -- HistoryHistory•• 1995 1995 --Unit Instruments, Inc. introduced ZUnit Instruments, Inc. introduced Z-- Block Modular Block Modular

system for Semiconductor marketplacesystem for Semiconductor marketplace•• 1997 1997 -- Increasing acceptance of modular technology in Increasing acceptance of modular technology in

semiconductor due to new tool designs and wider semiconductor due to new tool designs and wider availability of modular componentsavailability of modular components

•• 1999 1999 -- Kinetics purchases Unit Instruments, Inc. and places Kinetics purchases Unit Instruments, Inc. and places in Fluid Systems Division; purchase includes IP of a new in Fluid Systems Division; purchase includes IP of a new modular system designmodular system design

•• 1999 1999 -- Kinetics Fluid Systems introduces patented K1 Kinetics Fluid Systems introduces patented K1 platform (1.5” width) for modular systems which reduces platform (1.5” width) for modular systems which reduces size, weight and cost of existing modular designs while size, weight and cost of existing modular designs while simultaneously increasing flexibility for design and simultaneously increasing flexibility for design and manufacturing.manufacturing.

•• 2001 2001 -- Expansion of K1 platform to include narrow and high Expansion of K1 platform to include narrow and high flow products.flow products.


18 February 2002 3

•• Significant space savings over conventional systemsSignificant space savings over conventional systems•• Smaller gas path reduces purging timesSmaller gas path reduces purging times•• Shorter design lead times due to Shorter design lead times due to GaswareGasware (design tool (design tool

developed by Kinetics); provides “drag and drop” developed by Kinetics); provides “drag and drop” configuration as well as automated bill of materials and configuration as well as automated bill of materials and cost informationcost information

•• Flexibility to make changes in panel configuration during Flexibility to make changes in panel configuration during design process; reduces/eliminates time and cost impactdesign process; reduces/eliminates time and cost impact

•• Shorter production lead times because most applications Shorter production lead times because most applications are made from a small number of standard components; are made from a small number of standard components; configure to order from stockconfigure to order from stock

•• Reconfiguration of gas stick in the field is possibleReconfiguration of gas stick in the field is possible•• Simple and quick replacement of components reducing Simple and quick replacement of components reducing

cost of ownershipcost of ownership


18 February 2002 4

CONVENTIONAL WELDED GAS PANEL

MODULAR GAS PANEL


18 February 2002 5

•• “…cost of ownership is also “…cost of ownership is also important. Currently, one technician important. Currently, one technician supports around 50 sample system supports around 50 sample system in the field. With new generation of in the field. With new generation of sampling systems, we can increase sampling systems, we can increase that number to 60 or 70”that number to 60 or 70”

Peter Van Peter Van VuurenVuuren; Exxon/Mobil; Exxon/MobilIntech Intech Magazine, August 2001Magazine, August 2001


18 February 2002 6

KINETICS MODULAR OFFERINGKINETICS MODULAR OFFERING

K1S 1.125” SubstrateWidth

1/4” TubingEquivalent

Elastomer or MetalSeals (4-32 rAsurface finish)

K1 1.5” SubstrateWidth



K1H 1.5” SubstrateWidth




18 February 2002 7

•• Adopted proven technology from Adopted proven technology from semiconductor industrysemiconductor industry

•• Adapted to requirements in industrial Adapted to requirements in industrial market segmentsmarket segments–– Reduction of overall cost by eliminating Reduction of overall cost by eliminating

unnecessary requirementsunnecessary requirements–– Surface finishes of 16Surface finishes of 16--32 32 rArA–– Addition ofAddition of ElastomerElastomer seals (seals (VitonViton, Buna N, , Buna N,

neoprene)neoprene)–– Helium leak integrity at 1 x 10Helium leak integrity at 1 x 10--9 9 AtmAtm--cc/secondcc/second


18 February 2002 8

•• Versa Plane Versa Plane –– A universal mounting plate upon which Kinetics A universal mounting plate upon which Kinetics modular sticks are mounted. This universal design allows easy modular sticks are mounted. This universal design allows easy reconfiguration of the gas sticks.reconfiguration of the gas sticks.

•• “C” Seal “C” Seal –– Metal seal used to seal the interface between Metal seal used to seal the interface between components and the modular substrates.components and the modular substrates.

•• ElastomerElastomer Seal Seal –– FlexibleFlexible elastomerelastomer seals used to seal the seals used to seal the interface between components and modular substrates; interface between components and modular substrates; standard offerings arestandard offerings are VitonViton, Buna N, Neoprene., Buna N, Neoprene.

•• M4 Screws M4 Screws –– The 4mm metric fasteners which hold the active The 4mm metric fasteners which hold the active components on the substrate. components on the substrate.


18 February 2002 9

•• 17 Blocks configurations cover all 17 Blocks configurations cover all design requirementsdesign requirements–– 3 Types for Component Mounting3 Types for Component Mounting–– 3 Types for routing of purge/outlet manifolds3 Types for routing of purge/outlet manifolds–– 4 Types for Gas Inlet/Outlet4 Types for Gas Inlet/Outlet–– 2 Types for Gas Connections2 Types for Gas Connections–– 5 Lengths of Manifolds5 Lengths of Manifolds

•• Allows for easy configuration from Allows for easy configuration from stock partsstock parts


18 February 2002 10


18 February 2002 11


18 February 2002 12

Gas path indicationGas path indication

Component portsComponent portsCartridge Cartridge Heater HolesHeater Holes

Component blocks Component blocks --No Seal Between BlocksNo Seal Between Blocks


18 February 2002 13


18 February 2002 14

•• Gas Stick Gas Stick –– A complete assembly of surface mounted modular A complete assembly of surface mounted modular substrates and components for ONE gas stream.substrates and components for ONE gas stream.

•• Active Components Active Components -- Any component which serves a function Any component which serves a function in the process such as valves, mass flow controllers, pressure in the process such as valves, mass flow controllers, pressure regulators, flow switches, filters, etc.regulators, flow switches, filters, etc.

•• Substrate (blocks) Substrate (blocks) –– The modular building blocks which make The modular building blocks which make up the gas delivery path for a gas stick.up the gas delivery path for a gas stick.

•• Manifold Blocks Manifold Blocks –– Modular substrates which connect Modular substrates which connect perpendicular to the gas stick flow. Allows combination of perpendicular to the gas stick flow. Allows combination of multiple gas lines and provides purge capability.multiple gas lines and provides purge capability.

•• Bridges Bridges –– Floating substrates which allow the addition of Floating substrates which allow the addition of components which are longer than a square footprint (i.e. mass components which are longer than a square footprint (i.e. mass flow controller).flow controller).


18 February 2002 15

Substrate

Mass Flow Controller

Pneumatic Valves

Filter

Manifold

Pressure Switch

Etched Flow Path

Inlet Fitting

Pressure Transducer w/display


18 February 2002 16


18 February 2002 17

Flow Path:K1S/K1 = 1/4” tubing equivalentK1H = 3/8” tubing equivalent

GAS PATH

Kinetics Modular systems · 2012. 11. 27. · Kinetics Fluid Systems - Process Flow Products 18...

Documents

Transcript of Kinetics Modular systems · 2012. 11. 27. · Kinetics Fluid Systems - Process Flow Products 18...