Keysight Technologies B1505A Power Device Analyzer/Curve ...

Keysight Technologies B1505APower Device Analyzer/Curve Tracer

Configuration and Connection Guide

Notices© Keysight Technologies 2009-2020

No part of this manual may be reproduced in any form or by any means (including elec-tronic storage and retrieval or translation into a foreign language) without prior agreement and written consent from Keysight Technolo-gies as governed by United States and inter-national copyright laws.

Manual Part Number

B1505-90090

Edition

Edition 1, June 2009Edition 2, November 2009Edition 3, May 2010Edition 4, August 2010Edition 5, February 2011Edition 6, September 2012Edition 7, April 2013Edition 8, September 2015Edition 9, November 2015Edition 10, December 2015Edition 11, July 2019Edition 12, November 2020

Published by: Keysight Technologies Japan K.K.9-1, Takakura-cho, Hachioji-shi, Tokyo 192-8550 Japan

Warranty

The material contained in this document is provided “as is,” and is subject to being changed, without notice, in future editions. Further, to the maximum extent permitted by applicable law, Keysight disclaims all warranties, either express or implied, with regard to this manual and any information contained herein, including but not limited to the implied warranties of merchantability and fitness for a particular purpose. Keysight shall not be liable for errors or for incidental or consequential damages in connection with the furnishing, use, or performance of this document or of any information contained herein. Should Keysight and the user have a separate written agree-ment with warranty terms covering the material in this document that conflict with these terms, the warranty terms in the separate agreement shall control.

Technology Licenses

The hardware and/or software described in this document are furnished under a license and may be used or copied only in accor-dance with the terms of such license.

Restricted Rights Legend

If software is for use in the performance of a U.S. Government prime contract or subcon-tract, Software is delivered and licensed as “Commercial computer software” as defined in DFAR 252.227-7014 (June 1995), or as a “commercial item” as defined in FAR 2.101(a) or as “Restricted computer software” as defined in FAR 52.227-19 (June 1987) or any equivalent agency regulation or contract clause. Use, duplication or disclosure of Soft-ware is subject to Keysight Technologies’ standard commercial license terms, and non-DOD Departments and Agencies of the U.S. Government will receive no greater than Restricted Rights as defined in FAR 52.227-19(c)(1-2) (June 1987). U.S. Government users will receive no greater than Limited Rights as defined in FAR 52.227-14 (June 1987) or DFAR 252.227-7015 (b)(2) (Novem-ber 1995), as applicable in any technical data.

In This DocumentThis document provides the following information about Keysight B1505A Power Device Analyzer/Curve Tracer.

1. Configuration Guide

Describes how to configure the B1505A.

2. N1259A Connection Guide

Describes how to connect the B1505A, the N1259A Test Fixture, and a device under test(DUT).


Describes how to connect the B1505A, the N1265A Test Fixture, and a device under test(DUT).

4. N1272A and N1273A Connection Guide

Describes how to connect the B1505A, the N1273A Capacitance Test Fixture, and a deviceunder test (DUT).

5. Connection Guide for Wafer Prober and Your Own Test Fixture

Describes how to connect the B1505A, accessories, and a DUT interface such as wafer proberand your own test fixture.

6. Accessory Dimensions

Describes dimensions and weight of accessories.

7. Connection and Ordering Examples

Describes prober connection and ordering examples.

Contents

1. Configuration Guide

Measurement Resources . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3

B1505A Mainframe Furnished Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5

B1505A Modules and Mainframe Options. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7Module type and locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-9

N1259A Test Fixture for Power Device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-11

N1265A Ultra High Current Expander/Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-17

N1266A High Voltage Source Monitor Unit Current Expander . . . . . . . . . . . . . . . . . . . . .1-25N1266A Compatibility with Fixture and Module Selector . . . . . . . . . . . . . . . . . . . . . . .1-27

N1267A High Voltage Source Monitor Unit / High Current Source Monitor Unit Fast Switch. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-29

N1268A Ultra High Voltage Expander . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-31

N1271A Thermal Test Enclosure and Related Accessories . . . . . . . . . . . . . . . . . . . . . . . .1-35Measurement Capability on Thermal Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-39Information of inTEST Thermal Plate and Thermostream. . . . . . . . . . . . . . . . . . . . . . . .1-39

Pre-configured Power Device Analyzer/Curve Tracer (B1505A with Modules/Fixture) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-40

Accessories for Wafer Prober and Your Own Test Fixture . . . . . . . . . . . . . . . . . . . . . . . . .1-48

Other Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-57

Retrofit Products for B1505A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-61

Conversion Kit from B1500A to B1505A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-64

Upgrade Kit for N1259AU Test Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-65

Upgrade Kit for N1265AU Test Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-69

Note for 4142B Users . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-74


Input Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3To Connect Interlock Circuit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4

Output Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-8To Connect DUT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-9To Use Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-12N1259A-010 Inline Package Socket module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-19N1259A-011 Universal Socket Module. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-20N1259A-012 Blank PTFE Board. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-21N1259A-013 Curve Tracer Test Adapter Socket Module . . . . . . . . . . . . . . . . . . . . . . .2-22

Keysight B1505A Configuration and Connection Guide

Contents

N1259A-014 Gate Charge Socket Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23


Input Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4To Connect Interlock Circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-5

Output Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-9To Connect DUT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10Inline Package Socket module (N1265A-010) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17Universal Socket Module (N1265A-011) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18Curve Tracer Test Adapter Socket Module (N1265A-013) . . . . . . . . . . . . . . . . . . . . . 3-19Gate Charge Socket Module (N1265A-014) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20Blank Silicon Plate (N1265A-002) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22Universal R-Box (N1265A-035) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23Protection Adapter (N1265A-040). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-25Container (N1265A-045) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-25Prober System Cable (N1254A-524) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-25

4. N1272A and N1273A Connection Guide

Input Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-3To Connect Interlock Circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-3N1272A Device Capacitance Selector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-3

Output Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-8To Connect DUT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-83-pin Inline Package Socket Module. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-9N1273A-011 Universal Socket Module. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11N1273A-013 Curve Tracer Test Adapter Socket Module . . . . . . . . . . . . . . . . . . . . . . 4-14Accessories for Connecting a DUT. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15

5. Connection Guide for Wafer Prober and Your Own Test Fixture

Connection Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4

To Connect High Voltage R-Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-14To Use Universal R-Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-15

To Connect HCSMU Adapter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17

To Connect Dual HCSMU Adapter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-20To Connect 16493S-020 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-20To Connect 16493S-021 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-22

To Connect Protection Adapter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-23

To Connect High Voltage Bias Tee. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-25


Contents

To Connect Module Selector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-27

To Connect HVSMU/HCSMU Fast Switch. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-32

To Connect HVSMU Current Expander . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-34

To Connect Ultra High Current Expander . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-36Connecting System Cable to N1265A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-37

To Connect Ultra High Voltage Expander . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-38

To Connect Device Capacitance Selector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-40

To Connect Gate Charge Adapter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-43To Connect N1274A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-44To Connect N1275A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-45

To Install an Interlock Circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-47Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-48To Connect Interlock Circuit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-49

About Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-50To Make Connection to Reduce Leakage Current . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-51To Make Connection to Measure Low Resistance . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-52To Connect UHVU/HVSMU/HVMCU Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-53

6. Accessory Dimensions

7. Connection and Ordering Examples

Package Device Measurement Configuration Examples . . . . . . . . . . . . . . . . . . . . . . . . . . .7-33kV, 20A Configuration (B1505AP-H20 equivalent) . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-43kV, 20A with Capacitance Measurement Configuration (B1505AP-H21 equivalent) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-63 kV, 500 A or 1500 A Configuration (B1505AP-H50 or B1505AP-H70 equivalent). . .7-83 kV, 500 A or 1500 A with Capacitance Measurement Configuration (B1505AP-H51 or B1505AP-H71 equivalent) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-1010 kV, 500 A or 1500 A Configuration (B1505AP-U50 or B1505AP-U70 equivalent) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-12Add High Resolution Measurement (10 fA resolution with MPSMU or HPSMU) Capability to 3 kV, 20 A Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-143 kV, 20A, High Voltage Medium Current Configuration . . . . . . . . . . . . . . . . . . . . . . . .7-163 kV, 40 A Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-18Add High Resolution Measurement Capability (10 fA resolution with MPSMU or HPSMU) to 3 kV, 500A Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-2110 kV, 500 A, High Voltage Medium Current Configuration . . . . . . . . . . . . . . . . . . . . .7-23

Configuration Examples for Lateral Device Measurement with Wafer Prober . . . . . . . . .7-253 kV, 20 A Measurement for On-Wafer Lateral Device. . . . . . . . . . . . . . . . . . . . . . . . . .7-26


Contents

3 kV, 20 A, Capacitance Measurement for On-Wafer Lateral Device . . . . . . . . . . . . . 7-30Add High Resolution Measurement (10 fA resolution with MPSMU or HPSMU) Capability to 3 kV, 20 A, Capacitance Measurement for On-Wafer Lateral Device . . 7-333 kV, 40 A Measurement for On-Wafer Lateral Device . . . . . . . . . . . . . . . . . . . . . . . . . 7-353 kV, 500 A Measurement for On-Wafer Lateral Device. . . . . . . . . . . . . . . . . . . . . . . . 7-383 kV, 500 A, Capacitance Measurement for On-Wafer Lateral Device . . . . . . . . . . . . 7-403 kV, 500 A, High Voltage Medium Current Measurement for On-Wafer Lateral Device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4210 kV, 500 A Measurement for On-Wafer Lateral Device. . . . . . . . . . . . . . . . . . . . . . . 7-44

Configuration Examples for Vertical Device Measurement with Wafer Prober. . . . . . . . 7-463 kV, 20 A Measurement for On-Wafer Vertical Device . . . . . . . . . . . . . . . . . . . . . . . . 7-473 kV, 20 A, Capacitance Measurement for On-Wafer Vertical Device. . . . . . . . . . . . . 7-51Add High Resolution Measurement (10 fA resolution with MPSMU or HPSMU) Capability to 3 kV, 20 A, Capacitance Measurement for On-Wafer Vertical Device. . 7-543 kV, 40 A Measurement for On-Wafer Vertical Device . . . . . . . . . . . . . . . . . . . . . . . . 7-563 kV, 500 A Measurement for On-Wafer Vertical Device . . . . . . . . . . . . . . . . . . . . . . . 7-593 kV, 500 A, Capacitance Measurement for On-Wafer Vertical Device. . . . . . . . . . . . 7-603 kV, 500 A, High Voltage Medium Current Measurement for On-Wafer Vertical Device. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-6210 kV, 500 A Measurement for On-Wafer Vertical Device . . . . . . . . . . . . . . . . . . . . . . 7-64

GaN Current Collapse / Dynamic On-Resistance Measurement System using the N1267A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-66

Non-Kelvin Connection with the N1259A Test Fixture for Package Device . . . . . . . . 7-66Kelvin Connection with the N1259A Test Fixture for Package Device . . . . . . . . . . . . 7-68Non-Kelvin Connection with Prober for On-Wafer Lateral Device . . . . . . . . . . . . . . . 7-70Kelvin Connection with Prober for On-Wafer Lateral Device . . . . . . . . . . . . . . . . . . . . 7-72

Upgrading from existing B1505A. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-74Example of how to upgrade existing B1505A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-76


1 Configuration Guide

Configuration Guide

Keysight B1505A Power Device Analyzer/Curve Tracer can meet the requirements of modern power devices evaluations. You can configure a B1505A system from a wide variety of measurement resources that best meets your needs today and also permits expansion in future. Please specify the B1505A’s module configuration and accessories you desire properly.

This chapter is a guide for configuring your B1505A system, and consists of the following sections.

• "Measurement Resources"

• "B1505A Mainframe Furnished Accessories"

• "B1505A Modules and Mainframe Options"

• "N1259A Test Fixture for Power Device"

• "N1265A Ultra High Current Expander/Fixture"

• "N1266A High Voltage Source Monitor Unit Current Expander"

• "N1267A High Voltage Source Monitor Unit / High Current Source Monitor Unit Fast Switch"

• "N1268A Ultra High Voltage Expander"

• "N1271A Thermal Test Enclosure and Related Accessories"

• "Pre-configured Power Device Analyzer/Curve Tracer (B1505A with Modules/Fixture)"

• "Accessories for Wafer Prober and Your Own Test Fixture"

• "Other Accessories"

• "Retrofit Products for B1505A"

• "Conversion Kit from B1500A to B1505A"

• "Upgrade Kit for N1259AU Test Fixture"

• "Upgrade Kit for N1265AU Test Fixture"

• "Note for 4142B Users"

1-2 Keysight B1505A Configuration and Connection Guide

Configuration GuideMeasurement Resources

Measurement ResourcesKeysight B1505A can be equipped with the following measurement resources.

• “HPSMU - High Power SMU”

• “HCSMU - High Current SMU”

• “HVSMU - High Voltage SMU”

• “MPSMU - Medium Power SMU”

• “MCSMU - Medium Current SMU”

• “UHCU - Ultra High Current Unit”

• “HVMCU - High Voltage Medium Current Unit”

• “UHVU - Ultra High Voltage Unit”

• “MFCMU - Multi Frequency CMU”

Figure 1-1 B1505A Measurement Resources

Keysight B1505A Configuration and Connection Guide 1-3

Configuration GuideMeasurement Resources

Table 1-1 B1505A Measurement Resource Selection Guide

Measurement Resource Required Module/Expander Main Specification

High Power SMU B1510A HPSMU • Up to 200 V, 1A force• 10 fA current resolution

Medium Power SMU B1511B MPSMU • Up to 100 V, 100 mA force• 10 fA current resolution

High Current SMU B1512A HCSMU • 20 A/20 V (Pulsed); 1A/40 V (DC)

High Voltage SMU B1513C HVSMU • 1500 V/8 mA;3000 V/4 mA (Pulsed & DC)

Medium Current SMU B1514A MCSMU • 1 A/30 V (Pulsed); 100 mA/30 V (DC)

Ultra High Current Unit N1265A Ultra High Current Expander/Fixture and two units of B1514A MCSMU/B1512A HCSMU

• 1500 A/60 V (Pulsed), 22.5 kW peak power

• 500 A/60 V (Pulsed), 7.5 kW peak power

High Voltage Medium Current Unit

N1266A HVSMU Current Expander, B1513C HVSMU and two units of B1514A MCSMU/B1512A HCSMU

• 1500 V / 2.5 A (Pulsed), 2200 V/ 1.1 A (Pulsed)

Ultra High Voltage Unit N1268A Ultra High Voltage Expander and two units of B1514A MCSMU or a combination of a B1512A HCSMU and a B1514A MCSMU

• 10 kV/20 mA (Pulsed);10 kV/10 mA (DC)

Multi Frequency CMU B1520A MFCMU • 1 kHz to 5 MHz• 0 to ±25 V using internal DC bias• 0 to± 3000 V using HVSMU and High

Voltage Bias-Tee


Configuration GuideB1505A Mainframe Furnished Accessories

B1505A Mainframe Furnished AccessoriesThe B1505A is furnished with the accessories listed in the following tables. Table 1-2 lists the accessories for the B1505A mainframe. And Table 1-3 lists the measurement cables available for and furnished with the plug-in modules. Number of the furnished cables depends on the number of modules installed in the mainframe.

Table 1-2 Furnished Accessories

Description Qty. Description Qty.

16493J Interlock

cable1

1. Cable length 1.5 m or 3.0 m is specified by B1505A cable length option (B1505A-015 or -030).

1 16493L GNDU

cable11

16444A-001 USB keyboard

1 16444A-002 USB mouse

1

16444A-003 Stylus pen

1

Description Qty. Note

License sheet 1 License-to-use for Desktop EasyEXPERT Standard edition

Label 1 The label is used to specify the SMU number. Only for the B1505A installed with SMU.

Power cable 1


Configuration GuideB1505A Mainframe Furnished Accessories

Table 1-3 Measurement Cable Furnished with Modules

Description Quantity

16494A Triaxial cable, for MPSMU, HPSMU and MCSMU

2 ea./module

16493T HVSMU cable, for HVSMU 1 ea./module

16493S HCSMU cable, for HCSMU 1 ea./module

16493S-010 HCSMU Kelvin adapter, for HCSMU 1 ea./module

N1300A CMU cable, for MFCMU 1 ea./module


Configuration GuideB1505A Modules and Mainframe Options

B1505A Modules and Mainframe OptionsThe B1505A can contain several combinations of modules; up to four dual-slot HPSMU modules, up to ten MPSMU, up to two dual-slot HCSMU modules, up to five dual-slot HVSMU, up to six MCSMU and one single-slot MFCMU.

• Select the modules to be installed in the B1505A mainframe

See Table 1-4 for the plug-in modules supported by the B1505A.

• Specify cable length, 1.5 m or 3 m

See Table 1-5 for the options available for the B1505A.

• Select power line frequency, paper manual, rack mount kit, service options, and so on

See Table 1-5 for the options available for the B1505A.

Table 1-4 Plug-in Modules Supported by B1505A

Module type DescriptionSlots

occupied

Maximum number of modules installed in

B1505A

HPSMU 1

1. Total number of installed HPSMU and HCSMU modules cannot exceed 4.

High Power Source/Monitor Unit module 2 4

MPSMU Medium Power Source/Monitor Unit module

1 10

HCSMU 1, 2

2. Dual HCSMU (DHCSMU) configuration is available if two HCSMU modules are installed in one mainframe and connected to the 16493S-020 Dual HCSMU Kelvin adapter or the 16493S-021 Dual HCSMU adapter. This configuration expands the maximum current up to ± 40 A (pulse), ± 2 A (DC).

High Current Source/Monitor Unit module

2 2

HVSMU3

3. For B1513C only. Multiple B1513A/B1513B HVSMU modules cannot be installed in one mainframe.

High Voltage Source/Monitor Unit module

2 5

MCSMU Medium Current Source Monitor Unit module

1 6

MFCMU Multi Frequency Capacitance Measurement Unit module

1 1

GNDU 4

4. GNDU has been installed in the mainframe. You do not need to count for the number of slots occupied.

Ground Unit - -



Table 1-5 Mainframe Options

DescriptionModel/ Option

Note

Mainframe

Power Device Analyzer/Curve Tracer B1505A • See Table 1-3 on page 1-6 for furnished accessories

Select modules (optional)

High Power Source/Monitor Unit module (HPSMU), 200 V/1 A

B1510A-FG • Furnished with two triaxial cables (16494A). Cable length 1.5 m or 3.0 m is specified by 015 or 030.

• Up to four modules can be installed.• The total number of installed HPSMU and

HCSMU modules cannot exceed 4.

Medium Power Source/Monitor Unit module (MPSMU）, 100 V/100 mA

B1511B-FG • Furnished with two triaxial cables (16494A). Cable length 1.5 m or 3.0 m is specified by 015 or 030.

• Up to ten modules can be installed.

High Current Source/Monitor Unit module (HCSMU), 20 A at 20 V

B1512A-FG • Furnished with one pair of high current cables (16493S) and Kelvin adapter (16493S-010). Cable length 1.5 m or 3.0 m is specified by 015 or 030.

• Up to two modules can be installed.• The total number of installed HPSMU and

HCSMU modules cannot exceed 4.

High Voltage Source/Monitor Unit module (HVSMU), 3000 V at 4 mA

B1513C-FG • Furnished with one HVSMU cable (16493T). Cable length 1.5 m or 3.0 m is specified by option 015 or 030.

• Up to five modules can be installed.

Medium Current Source Monitor Unit module (MCSMU), 1 A at 30 V

B1514A-FG • Furnished with two triaxial cables (16494A). Cable length 1.5 m or 3.0 m is specified by 015 or 030.

• Up to six modules can be installed.

Multi Frequency Capacitance Measurement Unit module (MFCMU)

B1520A-FG • Furnished with one CMU cable (N1300A). Cable length 1.5 m or 3.0 m is specified by option 015 or 030.

• Up to one modules can be installed.

Specify the cable length (mandatory)

1.5m cable 015 • Same cable length is applied to all furnished cables.

3.0m cable 030



Module type and locationsModule locations when the B1505A is shipped from the factory are shown in Table 1-6 on page 1-10. This table shows the relative locations by the module types.

If HPSMUs are installed, the HPSMUs must be installed in the slots from the slot number 1. And if HPSMU and MPSMU and MFCMU are not installed and MCSMUs are installed, the MCSMUs must be installed in the slot number 1. Then the same type of modules must be installed in the contiguous slots.

For example, if the module configuration is one MFCMU, three MCSMUs, one HCSMU and one HVSMU, the B1505A will be shipped with the MFCMU of the slot 1, the MCSMUs of the slot 2 to 4, the HCSMU of the slot 5 to 6, the HVSMU of the slot 7 to 8, and the blank panels of the slot 9 to 10.

DescriptionModel/ Option

Note

Specify the power line frequency (mandatory)

50Hz line frequency 050

60Hz line frequency 060

Select calibration options (optional)

ANSI Z540 compliant calibration A6J

Commercial calibration certificate with test data

UK6

Specify the language of the paper manuals if you need

Paper manual set, English ABA • Printed manuals are optional. Order this option to get the paper manuals. It contains B1505A user guide, quick start guide, and self-paced training manual, EasyEXPERT user guide and self-paced training manual, and B1500 series programming guide.

Paper manual set, Japanese ABJ

Select rack mount kit (optional)

Rack mount kit 1CM



Table 1-6 Module Installation Rule in the Factory

NOTE After module installation at Keysight Service Center, the B1505A will be returned with the module configuration defined by the rule shown in the Table 1-6. If you want to change the module locations, consult the service personnel before servicing.

Slot Number and Location SMU type and port number

10:::::::1

top::::::::

B1513A/B/C High Voltage SMU (HVSMU)

B1512A High Current SMU (HCSMU)

B1514A Medium Current SMU (MCSMU)

B1520A Multi Frequency CMU (MFCMU)

B1511A/B Medium Power SMU (MPSMU)

B1510A High Power SMU (HPSMU)

0 bottom GNDU/ADC (Always installed)


Configuration GuideN1259A Test Fixture for Power Device

N1259A Test Fixture for Power DeviceThe N1259A is a test fixture used for package device measurements. It supports up to 3 kV and 40 A. The following table lists the accessories available for the N1259A test fixture. Select the required accessories. If you add options later, please refer to "Upgrade Kit for N1259AU Test Fixture" on page 1-65.

Table 1-7 N1259A Test Fixture options and accessories

Model/Option Description Additional Information

N1259A Test Fixture for Power Device • N1259A-001 is a mandatory option. Please select options that meet your needs.

N1259A-001 Test Fixture for Power Device • Mandatory option• The N1259A-001 is furnished with

Kelvin socket module for inline package device (N1259A-010), four black connection wires (N1259A-509) and six red connection wires (N1259A-508).

• The N1259A-001 has a built-in GNDU protection adapter and a built-in HPSMU protection adapter inside.




N1259A-010 Inline Package Socket Module (3 pin) • The N1259A-001 Test Fixture for Power Device is furnished with a N1259A-010 socket module.

• The N1259A-010 cannot be used with the N1265A Ultra High Current Expander / Fixture.

• Max voltage and current are 3 kV and 40 A.

N1259A-011 Universal socket module for power device • Maximum voltage is 3 kV.

N1259A-012 Blank PTFE board

N1259A-013 Curve tracer test adapter socket module • The N1259A-013 is the same as the N1265A-013 Curve Tracer Test Adapter Socket Module.

• Maximum voltage and current is 3 kV and 500 A.



N1259A-014 Gate charge socket module • The N1259A-014 is the same as the N1265A-014 Gate Charge Socket Module.

• The N1259A-014 option is furnished with the following wires:- Four red long wires (N1254A-508)- Four black long wires (N1254A-509)- Two red short wires (N1265-61751)- Two black long wires (N1265-61752)


N1259A-020 High Voltage Bias-Tee • The N1259A-020 option is furnished with two SHV-SHV cables (N1254A-512) and two SHV-banana adapters (N1254A-513).

• The N1259A-020 is a built-in factory-installed accessory of the N1259A-001.

N1259A-021 1 M R-box • R-box can be replaced with other R-box easily by N1259A users.

N1259A-022 100 k R-box

N1259A-030 1 k R-box

N1259A-035 Universal R-box

N1259A-300 Module Selector • Furnished with a 1.5 m digital I/O control cable (16493G-001), maximum 35VA

• The N1259A-300 is a built-in and factory-installed option for the N1259A-001.


Collector / Drain Emi�er / Source Base / Gate

N1259A Opt 013

Force Sense Force Sense Force Sense

Curve Tracer Test Adapter Socket

1 2

5 6

43

A

B C59



N1254A-508 Connection wire, red 1 ea. • The N1254A-508/509 Connection Wire supports 40A current, but does not support 500 A/1500 A current flow on the N1265A Ultra High Current Expander/Fixture.


• The cable length is 250 mm.

N1254A-509 Connection wire, black 1 ea.

N1254A-510 Dolphin clip adapter, black 1 ea. and red 1ea.

N1254A-511 Cable lug adapter, black 1 ea. and red 1ea.

N1254A-512 SHV to SHV cable 350 mm, 1 ea. • The N1259A-020 High Voltage Bias-tee is furnished with two N1254A-512 cables.

• The N1254A-513 adapter is required to connect the banana plug.




N1254A-513 SHV to banana adapter, 1 ea. • The N1259A-020 High Voltage Bias-tee is furnished with two N1254A-513 adapters.

• An N1254A-513 adapter is used with an N1254A-512 cable to connect a banana plug.

16493G-001 Digital I/O control cable (1.5 m) • The N1259A-300 Module Selector option is furnished with a 16493G-001 cable.

• Cable length 1.5 m or 3.0 m can be specified by option 001 or 002.

16493G-002 Digital I/O control cable (3.0 m)




NOTE The N1259A-020 high voltage bias-T and/or the N1259A-300 module selector can be installed in the N1259A-001 test fixture later. For upgrade kit, please refer to "Upgrade Kit for N1259AU Test Fixture" on page 1-65. Keysight Technologies service center is responsible for N1259AU-020 and N1259AU-300 installation.


16493S-021 Dual HCSMU combination adapter, for 40 A measurement

• Output connectors are compatible with B1512A HCSMU.

• The 16493S-021 is furnished with one 30cm Triaxial cable and one 30 cm High current coaxial cable for output connection.

• Do not connect or put any conductor on the HCSMU Low Force and Low Sense terminals, outer conductor of the coaxial connectors. Connecting or locating conductor of circuit common, chassis ground, or any potential on causes the measurement error.

N1254A-104 Triax (f) to BNC (m) adapter • This adapter is required when a B1514A MCSMU is connected to the HCSMU ports of the N1259A Fixture. This adapter is used for Force terminal.


Configuration GuideN1265A Ultra High Current Expander/Fixture

N1265A Ultra High Current Expander/FixtureThe N1265A expands the B1505A’s current capability up to 1500 A. Current expansion is made using the Ultra High Current Unit (UHCU), which is comprised of a current expander in the N1265A and two MCSMUs which are connected to I/V control ports of the N1265A. The MCSMU used for the I/V controller can be substituted by the HCSMU.The following table lists the accessories available for the N1265A Ultra High Current Expander/Fixture. Select the required accessories. If you add options later, please refer to "Upgrade Kit for N1265AU Test Fixture" on page 1-69.

Table 1-8 Options and accessories for N1265A Ultra High Current Expander/Fixture


N1265A Ultra High Current Expander/Fixture • The N1265A-001 is a mandatory option for the N1265A. Please select options that meet your needs.

• The N1265A UHC Expander/Fixture does NOT have a built-in Bias-Tee option like the N1259A Test Fixture. The N1260A High Voltage Bias-Tee is necessary for capacitance measurement.

N1265A-001 Ultra High Current Expander/Fixture • Mandatory option• A 500A current amplifier and a built-in

module selector are included mandatorily. • The N1265A-001 is furnished with a 1.5

m Digital I/O control cable (16493G-001), a Blank Silicon Plate and a power code.




N1265A-010 500 A Ultra High Current 3-pin Inline Package Socket Module

• The N1265A-010 is furnished with total six cable shown below• N1252A-522 1500A Ultra High

Current Banana to Banana Cables (Yellow, 2ea) for Collector/Drain and Emitter/Source force lines

• N1265-61751 Test Lead (Banana), 180mm (Red, 1ea) and N1265-61752 Test Lead (Banana), 180mm (Black, 1ea.) for Collector/Drain and Emitter/Source sense lines

• N1254A-508 Banana to Banana cable, 250mm (Red, 1ea), N1254A-509 Banana to Banana cable, 250mm (Black, 1ea) for Base/Gate force/sense lines


N1265A-011 Universal socket module for power device • Maximum voltage is 3 kV.

N1265A-013 Curve tracer test adapter socket module • The N1265A-013 is the same as the N1259A-013 Curve Tracer Test Adapter Socket Module.




N1265A-014 Gate charge socket module • The N1265A-014 is the same as the N1259A-014 Gate Charge Socket Module.

• The N1265A-014 option is furnished with:- Four red long wires (N1254A-508)- Four black long wires (N1254A-509)- Two red short wires (N1265-61751)- Two black long wires (N1265-61752)- Two yellow high current banana-banana

cable (N1254A-522)


N1265A-015 1500 A Current Option • 1500 A upgrade can be made later by ordering a B1505AU-015 1500 A upgrade kit.

N1265A-035 Universal R-Box • A desired register can be installed by soldering.



N1259A Opt 013



1 2

5 6

43

A

B C59



N1265A-040 10 kV Ultra High Voltage Gate Protection Adapter

• This adapter is used to protect a B1514A MCSMU module used for a Gate driver from device breakdown when making ultra high voltage measurement with the N1268A UHV Expander

• The B1514A MCSMU module has to be connected to a passthrough port of the N1265A UHC Expander/Fixture, not a module selector port.

N1265A-041 Thermocouple, Type K, 2ea • Include two Type-K thermocouples

N1265A-045 Container for Protection Adapter and Bias Tee • An N1260A High Voltage Bias-tee and N1261A Protection Adapters can be placed in this container to avoid messy cabling.

Calibration options

N1265A-A6J ANSI Z540 compliant calibration

N1265A-UK6 Commercial cal. Certificate with test data

Connection accessories inside the N1265A




N1254A-508 Connection wire, red 1 ea. • Max voltage and current are 3 kV and 40 A.

• The N1254A-508/509 Connection wire does not support 500A/1500A current flow on the N1265A Ultra High Current Expander/Fixture. Use the N1254A-522 1500A Ultra High Current Banana to Banana cable.

• Cable length is 250 mm.




N1254A-520 10 kV Ultra High Voltage Open End Cable, 1 m.

• One-side 10kV UHV/SHV and the other-side open end

N1254A-522 1500 A Ultra High Current Banana to Banana Cable, 2 ea.


• The N1265A-010 500 A Ultra High Current 3-pin Inline Package Socket Module is furnished with these cables.




N1254A-523 1500 A Ultra High Current Banana to Open End Cable, 1 m, 2 ea


16493G-001 Digital I/O control cable (1.5 m) • The N1265A-001 is furnished with a 16493G-001 cable.



For capacitance measurement

N1260A High Voltage Bias-Tee • The N1265A does not have a built-in high voltage bias-tee option like the N1259A. The N1260A is required to make capacitance measurement with the N1265A.

• The N1260A-STD is a mandatory option.• The N1260A High Voltage Bias-Tee is

not furnished with any cables.

N1254A-512 SHV to SHV cable 350mm, 1 ea. • The N1254A-513 SHV Jack to Banana Adapter is required to connect a banana plug.




N1254A-513 SHV to banana adapter, 1 ea. • The N1254A-513 adapter is used with the N1254A-512 cable to connect the banana plug.

N1254A-518 SHV Cable 1.5 m, 1 ea

Adapters

N1254A-103 Triaxial (m) to BNC (f) adapter • This adapter is needed when a B1512A HCSMU is connected to a voltage/current controller SMU port or Gate port or SMU ports of the N1265A. This adapter is used for Force terminal.

N1254A-517 Adapter, Triax Jack to Triaxial Plug • This adapter is needed when a B1512A HCSMU is connected to a voltage/current controller SMU port or Gate port or SMU ports of the N1265A. This adapter is used for Sense terminal.




NOTE The N1259A-010 Inline Package Module (3 pin) and N1259A-011 Universal Socket Module cannot be used with the N1265A Ultra High Current Expander/Fixture.


For on-wafer measurement

N1254A-524 500 A Ultra High Current Prober System Cable

• The N1254A-524 cable is furnished with one transparent shield with a slit.

• Maximum current range is about 800 A or more.

• Cable length is 1.8 m.


Configuration GuideN1266A High Voltage Source Monitor Unit Current Expander

N1266A High Voltage Source Monitor Unit Current ExpanderThe N1266A expands HVSMU current up to 2.5 A. Current expansion is made using the High Voltage Medium Current Unit (HVMCU), which is comprised of N1266A, HVSMU (B1513A, B, or C) and two MCSMUs which are connected to I/V control ports of the N1266A. The MCSMU used for the I/V controller can be substituted by the HCSMU.The following table lists the accessories available for the N1266A High Voltage Source Monitor Unit Current Expander. Select the required accessories.

Table 1-9 Accessories for N1266A Ultra High Current Expander/Fixture


N1266A High Voltage Source Monitor Unit Current Expander

• The N1266A is furnished with 1.5 m Digital I/O control cable (16493G-001) and a power code.

• The N1266A does not include a 16493T High Voltage Source Monitor Unit Cable and a 16493L GNDU Cable. Order a 16493T-001/002 and a 16493L-001/002 separately.

Calibration options






Related cables

16493G-001 Digital I/O control cable (1.5 m) • The N1266A is furnished with a 16493G-001 cable.



16493L-001 Ground Unit Cable (Triaxial, 1.5 m) • Cable length 1.5 m or 3.0 m can be specified by option 001 or 002.

16493L-002 Ground Unit Cable (Triaxial, 3.0 m)

16493T-001 High Voltage Source Monitor Unit Cable (1.5 m)

• The 16493T-001/002 supports up to 3000V.

• Cable length 1.5 m or 3.0 m can be specified by option 001 or 002.16493T-002 High Voltage Source Monitor Unit Cable (3.0

m)



N1266A Compatibility with Fixture and Module SelectorThe N1266A can be used with the N1265A Ultra High Current Test Fixture, N1259A Test Fixture for Power Device and N1258A Module Selector for B1505A. Table 1-10 shows the equipment list which is compatible with the N1266A for package device testing and on-wafer device testing environment.

Table 1-10 N1266A Compatibility with Fixture and Module Selector

Adapters

N1254A-103 Triaxial (m) to BNC (f) adapter • This adapter is needed when a B1512A HCSMU is used as a voltage/current controller of the N1266A instead of MCSMU. This adapter is used for Force terminal.

N1254A-517 Adapter, Triax Jack to Triaxial Plug • This adapter is needed to use a B1512A HCSMU as a voltage/current controller of the N1266A instead of MCSMU. This adapter is used for Sense terminal.


Test Environment Supported Fixture and Module Selector

Package device testing • N1259A Test Fixture for Power Device with or without N1259A-300 Module Selector Option

• N1265A Ultra High Current Expander/Fixture

On-wafer device testing • N1265A Ultra High Current Expander/Fixture with a N1254A-524 Ultra High Current Prober System Cable

• M1258A Module Selector



Figure 1-2 N1266A Compatibility with Fixture and Module Selector


Configuration GuideN1267A High Voltage Source Monitor Unit / High Current Source Monitor Unit Fast Switch

N1267A High Voltage Source Monitor Unit / High Current Source Monitor Unit Fast SwitchThe N1267A supports fast switching between the HVSMU and HCSMU to enable the measurement of the GaN current collapse phenomena. The N1267A switch requires one MCSMU in the B1505A mainframe for control. Please refer to Chapter 4 Connection and Ordering Examples for connection examples for GaN current collapse measurement system using the N1267A.

Table 1-11 Accessories for the N1267A HVSMU/HCSMU Fast Switch

Table 1-12 Supported B1505A modules for the N1267A HVSMU/HCSMU Fast Switch


N1267A High Voltage Source Monitor Unit / High Current Source Monitor Unit Fast Switch

• The N1267A is NOT furnished with any cable.

Supported B1505A modules

Drain stress bias SMU at device OFF state • B1513B/C HVSMU (B1513A HVSMU is NOT supported)

Drain current measurement SMU at device ON state • B1512A HCSMU

N1267A control SMU • B1514A MCSMU

Gate control SMU • B1514A MCSMU • B1512A HCSMU• B1510A HPSMU and B1511A/B MPSMU are NOT

supported as a gate control SMU.

Substrate bias SMU • B1510A HPSMU • B1511A/B MPSMU• B1512A HCSMU • B1514A MCSMU


Configuration GuideN1267A High Voltage Source Monitor Unit / High Current Source Monitor Unit Fast Switch

Table 1-13 Supported Environment for the N1267A HVSMU/HCSMU Fast Switch

NOTE The N1267A does not support the two HCSMU 40A configuration.

Supported Environment Supported instruments

On-wafer measurement

Package device measurement • N1259A Test Fixture (N1259A-300 Module Selector option is required for Kelvin connection measurement)


Configuration GuideN1268A Ultra High Voltage Expander

N1268A Ultra High Voltage ExpanderThe N1268A expands the B1505A’s voltage capability up to 10 kV. Voltage expansion is made using the Ultra High Voltage Unit (UHVU), which is comprised of N1268A and two MCSMUs which are connected to I/V control ports of the N1268A. The MCSMU used for the V controller can be substituted by the HCSMU.The following table lists the accessories available for the N1268A Ultra High Voltage Expander. Select the required accessories.

Table 1-14 Options and accessories for N1268A Ultra High Voltage Expander


N1268A Ultra High Voltage Expander • The N1268A-STD is a mandatory option.

N1268A-STD Ultra High Voltage Expander • Mandatory option• The N1268A-STD is furnished with a

16493G-001 Digital I/O control cable (1.5m), a 16493J-001 Interlock cable (1.5m) and a power code.

• The N1268A-STD is NOT furnished with a 16493V 10kV Ultra High Voltage Cable. Order a 16493V-001/002 separately.

Calibration options





Related accessories for package device testing

N1265A-040 10 kV Ultra High Voltage Gate Protection Adapter

• The N1265A-040 adapter is used with the N1265A UHC Expander/Fixture for package device testing.

• This adapter is used to protect a B1514A MCSMU module used as a Gate driver SMU from device breakdown when making ultra high voltage measurement with the N1268A.

Related accessories for on-wafer device testing

N1269A Ultra High Voltage Connection Adapter • The N1269A adapter is used to protect measurement resources from unexpected surge when connecting the N1268A Ultra High Voltage Expander to a wafer prober.

• Protection adapter for the B1514A MCSMU is included in the N1269A adapter.

• This adapter supports the B1514A MCSMU only.





N1262A-023 Universal R-Box for Ultra High Voltage

N1254A-521 10 kV Ultra High Voltage Jack to Jack Adapter • Feed through adapter set of UHV and SHV connectors

Related cables




16493J-001 Interlock cable (1.5 m) • The N1268A is furnished with a 16493J-001 cable.


16493J-002 Interlock cable (3.0 m)



NOTE The HPSMU and MPSMU modules cannot be used with the Ultra High Voltage Unit (UHVU) even when protection adapters are used.


16493V-001 10 kV Ultra High Voltage Cable, 1.5 m • One UHV cable (Red) and one SHV cable (Black) are included in the 16493V-001/002.

• These cables are used to connect between the N1268A UHV Expander and the N1265A Ultra High Current Expander/Fixture or a prober.


16493V-002 10 kV Ultra High Voltage Cable, 3 m



• These cables are used to connect between the N1268A UHV output and a device under test (DUT) placed inside the N1265A.

Adapters

N1254A-103 Triaxial (m) to BNC (f) adapter • This adapter is needed when a B1512A HCSMU is used as a voltage controller of the N1268A. This adapter is used for Force.

N1254A-517 Adapter, Triax Jack to Triaxial Plug • This adapter is needed when a B1512A HCSMU is used as a voltage controller of the N1268A. This adapter is used for Sense.


Configuration GuideN1271A Thermal Test Enclosure and Related Accessories

N1271A Thermal Test Enclosure and Related AccessoriesThe N1271A is an accessory for the N1259A/N1265A fixture and is necessary for performing the thermal test. The N1271A has three options 001, 002, and 005.

The N1271A-001 is required for using the inTEST thermal plate and can be used with the N1259A or the N1265A.

The N1271A-002 or 005 is required for using the inTEST Thermostream and can be used with the N1265A. The N1271A-002 supports the IV measurement up to 3 kV. The N1271A-005 supports the IV measurement up to 10 kV and the CV measurement up to 3 kV.

Figure 1-3 Thermal Test

Thermostream (inTEST corp.)

Thermal Enclosure

Thermal Plate(inTEST corp.)

(a) Using Thermal Plate (b) Using Thermostream



Table 1-15 N1271A Thermal Test Enclosure Options and Related Accessories


N1271A Thermal Test Enclosure

N1271A-001 Thermal Plate Compatible Enclosure for N1259A/N1265A

• Accessory for the N1259A/N1265A test fixture for using the inTEST Thermal Plate to enable temperature dependency measurements up to +250 C.

• Contains the N1254A-557 connection kit.

• Inner dimension is 284 mm W, 340 mm H, 195 mm D.

N1271A-002 Thermostream Compatible Enclosure for N1265A (3 kV IV)

• Interface between the N1265A and the inTEST Thermostream. The enclosure supports fully automated IV measurements up to 3 kV at temperature range from -50 C to +220 C.





N1271A-005 Thermostream Compatible Enclosure for N1265A (3 kV IV, CV and 10 kV)

• Interface between the N1265A and the inTEST Thermostream. The enclosure supports CV measurements up to 3 kV and IV measurements up to 10 kV at temperature range from -50 C to +220 C.



N1254A Accessories for instruments and fixtures

N1254A-550 Test Leads and Connection Kit for Thermal Test, 20 cm

Connection kit, thermal resistance up to +250

C

This kit contains the following items.

• 200 mm high current cable, 2 ea.

• 200 mm normal cable, 8 ea.

• Banana pin adapter, 10 ea.

• Mini alligator clip, 8 ea.

• Large clip, 2 ea.




N1254A-551 Test Leads and Connection Kit for Thermal Test, 30 cm


C







N1254A-554 Thermal resistance thermocouple, 75 cm, 2 ea. Thermocouple, 2 ea., thermal resistance up to +250 C

N1254A-557 Test Leads and Connection Kit for Thermal Test with N1271A


C












Measurement Capability on Thermal Test

The B1505A measurement capabilities supported on the thermal test are summarized in Table 1-16. Qg tests are not supported on the thermal test.

Table 1-16 Measurement Capability and Requirements

Information of inTEST Thermal Plate and ThermostreamThe B1505A with the N1271A supports the Thermal Plate and the Thermostream of inTEST corporation. Supported models are listed below but contact inTEST for more information, [email protected].

Capability FixtureThermal Plate

SolutionThermostream

Solution

• IV test up to 20 A, 3 kV N1259A Yes (with N1271A-001)

No

• IV test up to 1500 A, 3 kV N1265A Yes (with N1271A-001)

Yes(with N1271A-002)

• IV test up to 1500 A, 10 kV

• CV test

N1265A Yes (with N1271A-001)

Yes(with N1271A-005)

• Qg test up to 20 A, 3 kV N1259A No No

• Qg test up to 1100 A, 3 kV N1265A No No


Configuration GuidePre-configured Power Device Analyzer/Curve Tracer (B1505A with Modules/Fixture)

Pre-configured Power Device Analyzer/Curve Tracer (B1505A with Modules/Fixture)The Keysight B1505AP Pre-configured packages include all necessary modules, cables and accessories.

Table 1-17 B1505AP Pre-configured package

Table 1-18 B1505AP-H20 3 kV / 20 A / Fixture Package

Product Number Description

B1505AP Pre-configured Power Device Analyzer/Curve Tracer (B1505A w/ modules/fixture)

Option Max V Max I C-V Note

H20 3 kV 20 A 3 kV / 20 A / Fixture Pack

H21 3 kV 20 A Yes 3 kV / 20 A / C-V / Fixture Pack





U50 10 kV 500 A 10 kV / 500 A / Fixture Pack

U70 10 kV 1500 A 10 kV / 1500 A / Fixture Pack

Description Qty Note

B1505A 1 Power Device Analyzer / Curve Tracer Mainframe• Include 16493J-001 Interlock cable (1.5 m), 16493L-001 GNDU cable (1.5

m), 16444A-001 Keyboard, 16444A-002 Mouse, 16444A-003 Stylus pen.

B1512A-FG 1 High Current Source Monitor Unit Module• Include 16493S-001 HCSMU cable (1.5 m) 1ea and 16493S-010 Kelvin

adapter.

B1513C-FG 1 High Voltage Source Monitor Unit• Include 16493T-001 HVSMU cable (1.5 m).

B1514A-FG 1 Medium Current Source Monitor Unit• Include 16494A-001 Triaxial cable (1.5 m) 2ea.

N1259A 1 Test Fixture for Power Device



Table 1-19 B1505AP-H21 3 kV / 20 A / C-V / Fixture Package

N1259A-001 1 Test Fixture including Inline Package Socket Module and Cables• Include N1259A-010 Inline package socket module (3 pin), N1254A-508

Banana to banana cable black 4ea and N1254A-509 Banana to banana cable red 6ea.

N1259A-300 1 Module Selector• Include 16493G-001 Digital I/O control cable.

N1259A-022 1 100 kohm R-box

N1259A-030 1 1 kohm R-box for gate

N1254A 1 Accessories for instruments and fixtures

N1254A-104 1 Triax (f) to BNC (m) adaptor




B1512A-FG 1 High Current Source Monitor Unit Module• Include 16493S-001 HCSMU cable (1.5 m) 1ea and 16493S-010 Kelvin

adapter.



B1520A-FG 1 Multi Frequency Capacitance Measurement Unit Module• Include N1300A-001 CMU cable (1.5 m)


N1259A-001 1 Test Fixture including Inline Package Socket Module and Cables• Include N1259A-010 Inline package socket module (3 pin), N1254A-508

Banana to banana cable black 4ea and N1254A-509 Banana to banana cable red 6ea.

N1259A-300 1 Module Selector• Include 16493G-001 Digital I/O control cable.

N1259A-020 1 High Voltage Bias-Tee• Include N1254A-512 SHV Cable 250 mm, 2ea and N1254A-513 SHV Jack

to Banana Adapter, 2ea.

N1259A-022 1 100 kohm R-box








N1254A-104 1 Triax (f) to BNC (m) adaptor






N1265A 1 Ultra High Current Expander / Fixture

N1265A-001 1 Ultra High Current Expander / Fixture• Include 16493G-001Control cable (1.5 m) and a Blanck silicon plate.

N1265A-010 1 500 A Ultra High Current 3-pin Inline Package Socket Module• Include N1254A-522 1500 A Ultra High Current Banana to Banana Cable

(yellow, 2ea), N1254A-508 Banana to Banana Cable, 250 mm (red, 1ea), N1254A-509 Banana to Banana Cable, 250 mm (black, 1ea), N1265-61751 Test Lead 180mm (red, 1ea) and N1265A-61752 Test Lead 180mm (black, 1ea).


N1254A-508 4 Banana to Banana Cable 250 mm (red, 1ea)

N1254A-509 4 Banana to Banana Cable 250 mm (black, 1ea)

N1254A-510 3 Dolphin Clip 2 ea. (red and black)











N1260A 1 High Voltage Bias-Tee

N1260A-STD 1 High Voltage Bias-Tee









N1254A-512 2 SHV Cable 250 mm

N1254A-513 2 SHV Jack to Banana Adapter

N1254A-518 2 SHV Cable 1.5 m














N1265A-015 1 1500 A Current Option





N1254A-522 1 1500 A Ultra High Current Banana to Banana Cable, 2 ea.










N1265A-001 1 Ultra High Current Expander / Fixture• Include a 16493G-001Control cable (1.5 m) and a Blanck silicon plate.








Table 1-24 B1505AP-U50 10 kV / 500 A / Fixture Package






N1254A-518 2 SHV Cable 1.5 m

N1254A-522 1 1500 A Ultra High Current Banana to Banana Cable, 2 ea.






N1265A-001 1 Ultra High Current Expander / Fixture• Include 16493G-001 Control cable (1.5 m) and a Blanck silicon plate.



N1265A-040 1 10 kV Ultra High Voltage Gate Protection Adapter

N1268A 1 Ultra High Voltage Expander

N1268A-STD 1 Ultra High Voltage Expander

• Include 16493G-001 Control cable (1.5 m), 16493J-001 Interlock cable (1.5m).

16493V-001 1 10 kV Ultra High Voltage Cable, 1.5 m• Include one UHV cable (red) and one SHV cable (black).







Table 1-25 B1505AP-U70 10 kV / 500 A / Fixture Package


N1254A-520 1 10 kV Ultra High Voltage Open End Cable, 1m (pair)

N1254A-522 1 1500 A Ultra High Current Banana to Banana Cable, 2 ea






N1265A-001 1 Ultra High Current Expander / Fixture• Include 16493G-001 Control cable (1.5 m) and a Blanck silicon plate.







• Include 16493G-001 Control cable (1.5 m), 16493J-001 Interlock cable (1.5m).

16493V-001 1 10 kV Ultra High Voltage Cable, 1.5 m• Include one UHV cable (red) and one SHV cable (black).





N1254A-520 1 10 kV Ultra High Voltage Open End Cable, 1m (pair)

N1254A-522 1 1500 A Ultra High Current Banana to Banana Cable, 2 ea




NOTE Cable length is 1.5 m only (No cable length option).

NOTE To add additional modules such as a B1511B MPSMU into the B1505AP package, the B1505AU with corresponding module option has to be ordered and users have to send their B1505A mainframe to Keysight Service Center for installing modules. So, building a B1505A configuration from scratch is recommended.

NOTE To add additional accessories of the N1259A or N1265A, please order them separately using the N1259AU or N1265AU with corresponding options.


Configuration GuideAccessories for Wafer Prober and Your Own Test Fixture

Accessories for Wafer Prober and Your Own Test FixtureTable 1-26 lists the accessories available for wafer probers or your own test fixtures. Select the required accessories.

Figure 1-4 Connection to probers

Figure 1-5 Connection between the N1265A Ultra High Current Expander / Fixture and Prober with the N1254A-524 Ultra High Current Prober System

Condition Gate Drain Source Other bias

500 AN1265A UHC Expander / Fixture

+ N1254A-524 Ultra High Current Prober System Cable

MCSMU*<=30A with Module Selector MCSMU* +

R-box

N1258A Module Selector

<=40A without Module Selector Direct Direct

Condition Gate Drain Source Other bias

10 kV** N1269A UHV direct N1269A MCSMU + N1269A

* We recommend B1514A MCSMU for a Gate SMU and other bias SMUs.** We should manually change cabling for a 10 kV measurement



Table 1-26 Accessories for Wafer Prober or Your Own Fixture


Module Selector

N1258A Module Selector for B1505A • The N1258A is furnished with 1.5 m digital I/O control cable (16493G-001). Maximum 65 VA

• The N1258A has a built-in GNDU protection adapter, a built-in HPSMU protection adapter and a built-in HCSMU Kelvin adapter.

• Do not connect or put any conductor on the HCSMU Low Force and Low Sense terminals, outer conductor of the coaxial connectors. Connecting or putting conductor of circuit common, chassis ground, or any potential on causes the measurement error.

For High Voltage Capacitance Measurement

N1260A High Voltage Bias-Tee • The N1260A-STD is a mandatory option.

• The N1260A High Voltage Bias-Tee is not furnished with any cables.



Protection Adapter

N1261A-001 Protection adapter for High Power Source Monitor Unit (Triaxial output)

• Two Triaxial inputs (Force/Sense) and two Triaxial outputs (Force/Sense).

• This adapter is used to protect not only B1510A HPSMU but also B1511A/B MPSMU.

N1261A-002 Protection Adapter Ground Unit (BNC output)

• One Triaxial input for GNDU and two BNC outputs (Force/Sense).

N1261A-003 Protection adapter for High Power Source Monitor Unit (HV-Triaxial output)

• Two Triaxial inputs (Force/Sense) and two High Voltage Triaxial outputs.

• This adapter is used to protect not only B1510A HPSMU but also B1511A/B MPSMU.

N1261A-004 Protection Adapter Ground Unit (SHV output)

• One Triaxial input for GNDU and two SHV outputs (Force/Sense).

High Voltage R-box

N1262A-001 1Mohm R-box • One High Voltage Triaxial input and one SHV output.

N1262A-002 100 kohm R-box • One High Voltage Triaxial input and one SHV output.




N1262A-010 1 kohm R-box for gate (Triaxial output) • One Triaxial input and one Triaxialoutput.

N1262A-011 1 kohm R-box for gate (SHV output) • One High Voltage Triaxial input andone SHV output.

N1262A-020 Universal R-Box, Triaxial • One Triaxial input and one Triaxialoutput.

N1262A-021 Universal R-Box, HV Triaxial to SHV • One High Voltage Triaxial input andone SHV output.

N1262A-036 50 Ohm Termination Adapter • The N1262A-036 is used to avoiddevice oscillation by inserting it to thegate cabling.





HCSMU Adapter

16493S-010 High Current Source Monitor Unit Kelvin Adapter

• One Triaxial input and one BNC input for HCSMU and four BNC outputs (High Force/Sense, Low Force/Sense)

• Do not connect or put any conductor on the HCSMU Low Force and Low Sense terminals, outer conductor of the coaxial connectors.

• Connecting or putting conductor of circuit common, chassis ground, or any potential on causes the measurement error.

16493S-011 High Current Source Monitor Unit non-Kelvin Adapter

• One Triaxial input and one BNC input for HCSMU and two BNC outputs (High Force/Low Force).



16493S O pt 010 H C S M U K e lv in A dapter

ForceS ense

From H C S M U

O utput

S igna l

C ircu itC om m on

H igh S ense H igh ForceLow S enseLow Force

A g ilent

40 V m ax


ForceS ense

From H C S M U

O utput

S igna l

C ircu itC om m on

S igna l

C ircu itC om m on


A g ilent

40 V m ax40 V m ax

16493S O pt 011 H C S M U N on-K e lv in A dapter

ForceS ense

From H C S M U

O utput

S igna l

C ircu itC om m on

H igh ForceLow Force

A g ilent

40 V m ax


ForceS ense

From H C S M U

O utput

S igna l

C ircu itC om m on

S igna l

C ircu itC om m on


A g ilent

40 V m ax40 V m ax




Dual HCSMU Adapter

16493S-020 Adapter, 40A, when connecting to wafer prober directly without N1258A selector

• Output connectors are compatible with N1258A module selector.

• This adapter has a built-in GNDU protection adapter and a built-in HCSMU Kelvin adapter.

• This adapter cannot be used with N1258A module selector and N1259A test fixture.





16493S-021 Adapter, 40A, select this if 16493S-020 is not used

• This adapter is used with the N1259A Test Fixture, N1258A Module Selector, or 16493S-010/011 HCSMU Adapter

• If a N1258A Module Selector is used with this adapter, the maximum current is limited to 30 A. If 40 A capability is needed, please connect this adapter to device directly.

• Output connectors are compatible with B1512A HCSMU.

• The 16493S-021 is furnished with one 30cm Triaxial cable and one 30 cm High current coaxial cable for output connection.



For Ultra High Current Measurement

N1254A-524 Ultra High Current Prober System Cable • The N1254A-524 cable is furnished with one transparent shield with a slit.

• Maximum current range is about 800 A or more.

• Cable length is 1.8 m.





For Ultra High Voltage Measurement

N1269A Ultra High Voltage Connection Adapter • The N1269A adapter is used to protect measurement resources from unexpected surge when connecting the N1268A Ultra High Voltage Expander to a wafer prober.

• Protection adapter for the B1514A MCSMU is included in the N1269A adapter.

• This adapter supports the B1514A MCSMU only.

N1254A-521 10 kV Ultra High Voltage Jack to Jack Adapter

• Feed through adapter set of UHV and SHV connectors

N1262A-023 Universal R-Box for Ultra High Voltage • Two Ultra High Voltage ports.



For Gate Charge Measurement

N1274A On-Wafer Gate Charge Measurement Adapter/Selector for 20 A/3 kV

• The N1274A is an adapter to enable on-wafer gate charge measurements using the HCSMU (max. 20 A) and HVSMU (max. 3 kV).

• This equips an internal selector to automatically switch signal paths of I-V measurement and gate charge measurement.

• The selector relays in the N1274A are controlled by the N1258A module selector.

• You can also mount a current control device or load resistor on the N1274 by opening a small panel on the top of this adapter.

N1275A On-Wafer Gate Charge Measurement Adapter for N1265AUltra High Voltage Connection Adapter

• The N1275A is an adapter to enable on-wafer gate charge measurements with the UHCU (max. 500 A) and HVSMU (max. 3 kV).

• The adapter output can be extended to your prober station by using the N1254A-524 prober system cable.

• You can also mount current control device or load resistor for the gate charge measurement on the top of this adapter.


!


Configuration GuideOther Accessories

Other AccessoriesThe following table lists the options and accessories available for the B1505A.

Table 1-27 Options and Accessories


Keysight EasyEXPERT software

B1540A-001 Standard edition

Keysight Desktop EasyEXPERT software

B1541A-001 Standard edition

Accessories for B1500 series

16444A-001 USB keyboard

16444A-002 USB mouse

16444A-003 Stylus pen

Cables, adapters, interlock

16493K-001 Kelvin Triaxial Cable, 1.5 m length • Cable length 1.5 m or 3.0 m can be specified by option 001 or 002.

• These cables are NOT supported by the N1265A, N1266A, N1267A and N1268A.

16493K-002 Kelvin Triaxial Cable. 3.0 m length




16493U-001 High current coaxial cable, BNC(m) to BNC(m), 1.5 m


16493U-002 High current coaxial cable, BNC(m) to BNC(m), 3 m

8120-1838 BNC cable, 30 cm (12 inch)

8120-1839 BNC cable, 60 cm (24 inch)

N1254A-500 HV jack connector, panel mount, for soldering, 1 ea.

N1254A-501 HV jack to HV jack adapter, panel mount, 1 ea.

N1254A-502 HV plug connector, panel mount, for soldering, 1 ea.

N1254A-503 HCSMU Coaxial Cable Assy 1.5 m - BNC to Open-End, 1 ea.

N1254A-505 HVSMU Triaxial Cable Assy 1.5 m - HV Plug to Open-End, 1 ea.

N1254A-506 HVSMU Coaxial Cable Assy 1.5 m - HV Plug to Open-End, 1 ea.

N1254A-507 HVSMU Coaxial Cable Assy 1.5 m, 1 ea.

N1254A-514 BNC(m) to BNC(m) adapter, 1 ea.

N1254A-515 BNC(f)-BNC(m)-BNC(f) adapter, 1 ea.



N1254A-516 BNC(f)-BNC(f)-BNC(f) adapter, 1 ea.

N1254A-517 Triax(f)-Triax(m) adapter, shield separated, 1 ea.

N1254A-518 SHV(plug)-SHV(plug) coaxial cable, 1.5 m, 1 ea.

N1254A-520 UHV(plug) to no connector cable, 1 m, 1 ea. and SHV(plug) to no connector cable, 1 m, 1 ea.

N1254A-521 UHV(jack)-UHV(jack) adapter, 1 ea. and SHV(jack)-SHV(jack) adapter, 1 ea.

N1254A-522 Connection wire, banana-to-banana, maximum 1500 A, 2 ea.

N1254A-523 Banana to no connector wire, maximum 1500 A, 1 m, 2 ea.

N1254A-524 System cable for prober, 1.8 m, 1 ea.

N1254A-525 SHV Cable Assy 1.5m - SHV Plug To Open-end, 1 ea.

N1254A-526 Ultra High Current Cable, 2m, No Connectors At Either End, 1 ea.

N1254A-527 PTFE Standoff, Jack, 4 ea.

N1254A-528 PTFE Standoff With Banana Plug, 4 ea.

N1254A-554 Thermocouple, Type K, 75 cm, 2 ea.

N1254A-556 Test Leads and Connection Kit for Capacitance Test,four 20 cm alligator clip - lug cables, four banana plugs, four nuts, and four spare clips




1250-2405 BNC-T Plug(m)-BNC(f)-BNC(f) adapter, 1ea

1251-2277 Banana to BNC adapter

1252-1419 Interlock receptacle connector



Configuration GuideRetrofit Products for B1505A

Retrofit Products for B1505AThe Keysight B1505A has 10 slots so that users can install appropriate modules into B1505A mainframe. The retrofit module product is available to add more modules into existing B1505A mainframe. These modules have to be installed in Keysight Technologies service center to meet the specifications.

The following table lists the module products and the available accessories.

Table 1-28 Module products and available accessories

Model/Option

Description Note

B1505AU Upgrade kit for B1505A

Software license to use advanced functions

B1505AU-SWS EasyEXPERT Extension support and subscription • B1505A users who have notpurchased a B1505A-SWShave to update EasyEXPERTsoftware to version 5.5 orlater.

• The B1505AU-SWS includes 15 licenses which can beused for both EasyEXPERTand Desktop EasyEXPERT.

Measurement module

B1505AU-010 High Power Source/Monitor Unit Module (B1510A) Modules are NOT furnished with any cables. Order the required cables and accessories separately.B1505AU-011 Medium Power Source/Monitor Unit Module

(B1511B)

B1505AU-012 High Current Source Monitor Unit Module (B1512A)

B1505AU-013 High Voltage Source Monitor Unit (B1513C)

B1505AU-014 Medium Current Source Monitor Unit (B1514A)

B1505AU-020 Multi Frequency Capacitance Measurement Unit Module (B1520A)

B1500AU-PC2 Mainframe upgrade (available for S/N starts with JP or less than MY53440000)

B1500AU-PC3 Mainframe upgrade (available for S/N MY53440101 or later)

Including OS (from Windows XP/7 to Windows 10), CPU, mother board, storage (from HDD to SSD), VGA output. Contact Keysight Technologies to upgrade the B1500A.

B1505A mainframe upgrade



NOTE For customers, module upgrades to existing B1505A systems must be carried out at an Keysight Technologies service center. In order to ensure system specifications the new modules need to be installed and the complete unit calibrated. Contact your nearest Keysight Technologies office to arrange the installation and calibration of new B1505A modules.

16493K-001 1.5 m length Kelvin triaxial cable

16493K-002 3 m length Kelvin triaxial cable

B1512A HCSMU cables and adapters

16493S-001 1.5 m length

16493S-002 3 m length

16493S-010 1 HCSMU Kelvin adapter

16493S-011 1 HCSMU non-Kelvin adapter

16493S-020 1 Dual HCSMU combination adapter, for 40 A measurement, when connecting to wafer prober directly without N1258A selector

16493S-021 1 Dual HCSMU combination adapter, for 40 A measurement, when being used with N1259A test fixture, N1258A module selector, or 16493S-010/011 HCSMU adapter

The 16493S-021 is furnished with one 30cm Triaxial cable and one 30 cm High current coaxial cable for output connection.

B1513A/B/C HVSMU cables

16493T-001 1.5 m length

16493T-002 3 m length

B1520A CMU cables

N1300A-001 1.5 m length

N1300A-002 3 m length

1. Do not connect or put any conductor on the HCSMU Low Force and Low Sense terminals, outer con-ductor of the coaxial connectors. Connecting or putting conductor of circuit common, chassis ground,or any potential on causes the measurement error.

Model/Option

Description Note

16494A-004 40 cm length triaxial cable

16494A-005 4 m length triaxial cable

B1510A HPSMU, B1511A/B MPSMU and B1514A MCSMU cables

16494A-001 1.5m length triaxial cable

16494A-002 3 m length triaxial cable

16494A-003 80 cm length triaxial cable



NOTE Under the total power consumption limit, there is configuration limitation. Please refer to Table 1-4 on page 1-7.

NOTE For Keysight field team, installation fee (R-51U-501 or R1286A-HU) will be automatically added to the B1505AU when making a quotation with Keysight order configuration tool.

NOTE E5288A ASU (Atto Sense and Switch Unit) is not supported by the B1505A.


Configuration GuideConversion Kit from B1500A to B1505A

Conversion Kit from B1500A to B1505AThe following table lists the requirements and the available accessories for remodelling the B1500A to the B1505A.

Table 1-29 Required and Available Accessories for Remodelling B1500A to B1505A

NOTE For customers, Keysight Technologies service center is responsible for remodelling and module installation. Contact Keysight Technologies to get a quotation.

NOTE For Keysight field team, installation fee (R-51U-501 or R1286A-HU) will be automatically added to the B1505AU when making a quotation with Keysight order configuration tool.

NOTE The instrument firmware and software will be updated to the latest version at the service center. So make a back up of data saved in the built-in SSD by yourself before sending the instrument to the service center.

NOTE The 16442A/16442B test fixture supports up to 200 V / 1A. So use the N1259A or the N1265A, which are designed for supporting the B1505A. See "N1259A Test Fixture for Power Device" or "N1265A Ultra High Current Expander/Fixture".

NOTE B1517A HRSMU (high resolution SMU), E5288A ASU (Atto Sense and Switch Unit), B1530A WGFMU (Waveform Generator / Fast Measurement Unit), and B1525A SPGU (High Voltage Semiconductor Pulse Generator Unit) are not supported by the B1505A.

Model/Option

Description Note

B1505AU-001 Conversion kit from B1500A to B1505A

The B1505AU-001 is NOT furnished with any cables. It doesn’t include any modules. Select modules or accessories separately. Please refer to "Retrofit Products for B1505A" on page 1-61.


Configuration GuideUpgrade Kit for N1259AU Test Fixture

Upgrade Kit for N1259AU Test FixtureThe following table lists upgrade kit options to expand own N1259A capability.

Table 1-30 Available options for upgrading N1259A

Model/Option

Description Note

N1259AU Upgrade Kit for N1259A Test Fixture This product is only available for N1259A owners. No furnished items in main product. Please select the following options.

N1259AU-010 Inline Package Socket Module (3 pin) • The N1259AU-010 cannot be used with the N1265A Ultra High Current Expander.

• Max voltage and current are 3 kV and 40A.

N1259AU-011 Universal Socket Module • Maximum voltage is 3 kV.

N1259AU-012 Blank PTFE Board



N1259AU-013 Curve Tracer Test Adapter Socket Module

• The N1259AU-013 is the same as the N1265AU-013 Curve Tracer Test Adapter Socket Module.


N1259AU-014 Gate Charge Socket Module • The N1259AU-014 is the same as the N1265AU-014 Gate Charge Socket Module.

• The N1259AU-014 option is furnished with the following wires:- Four red long wires (N1254A-508)- Four black long wires (N1254A-509)- Two red short wires (N1265-61751)- Two black long wires (N1265-61752)


N1259AU-020 High Voltage Bias-Tee • The N1259AU-020 High Voltage Bias-Tee is furnished with two SHV-SHV cables (N1254A-512) and two SHV-banana adapters (N1254A-513).

• Installation must be done at Keysight Service Center.

Model/Option

Description Note


N1259A Opt 013



1 2

5 6

43

A

B C59



N1259AU-021 1Mohm R-box • R-box can be replaced with other R-box easily by users.

N1259AU-022 100 kohm R-box

N1259AU-030 1 kohm R-box for gate

N1259AU-035 Universal R-Box

N1259AU-300 Module Selector • Furnished with a Digital I/O control cable (16493G-001), maximum 35VA.

• Installation must be done at Keysight Service Center.

N1254A-508 Connection wire, red 1 ea. • The N1254A-508/509 Connection Wire supports 40A current, but does not support 500 A/1500 A current flow on the N1265A Ultra High Current Expander/Fixture.

• Max voltage and current are 3 kV and 40 A.• The cable length is 250 mm.




N1254A-512 SHV Cable 250 mm, 1ea • The N1259AU-020 High Voltage Bias-tee is furnished with two N1254A-512 cables.

• The N1254A-513 adapter is required to connect a banana plug.

Model/Option

Description Note



NOTE Keysight Technologies service center is responsible for N1259AU-020 and N1259AU-300 installation.

NOTE For Keysight field team, installation fee (R-51U-501 or R1286A-HU) will be automatically added to the N1259AU when making a quotation with Keysight order configuration tool.

N1254A-513 SHV Jack to Banana Adapter, 1ea • The N1259AU-020 High Voltage Bias-tee is furnished with two N1254A-513 adapters.

• The N1254A-513 adapter is used with the N1254A-512 cable to connect a banana plug.

16493G-001 Digital I/O control cable (1.5 m) • The N1259AU-300 is furnished with a 16493G-001 cable.



Model/Option

Description Note



Upgrade Kit for N1265AU Test FixtureThe following table lists upgrade kit options to expand own N1265A capability.

Table 1-31 Available options for upgrading N1265A

Model/Option

Description Note

N1265AU Upgrade kit for N1265A This product is only available for N1265A owners. No furnished items in main product. Please select the following options.

N1265AU-002 Blank Silicon Plate

N1265AU-010 Inline Package Socket Module (3 pin) • The N1265A-010 is furnished with total six cable shown below• N1252A-522 1500A Ultra High Current

Banana to Banana Cables (Yellow, 2ea) for Collector/Drain and Emitter/Source force lines

• N1265-61751 Test Lead (Banana), 180mm (Red, 1ea) and N1265-61752 Test Lead (Banana), 180mm (Black, 1ea.) for Collector/Drain and Emitter/Source sense lines

• N1254A-508 Banana to Banana cable, 250mm (Red, 1ea), N1254A-509 Banana to Banana cable, 250mm (Black, 1ea) for Base/Gate force/sense lines




N1265AU-011 Universal Socket Module • Maximum voltage is 3 kV.

N1265AU-013 Curve Tracer Test Adapter Socket Module

• The N1265AU-013 is the same as the N1259AU-013 Curve Tracer Test Adapter Socket Module.


N1265AU-014 Gate Charge Socket Module • The N1265AU-014 is the same as the N1259AU-014 Gate Charge Socket Module.

• The N1265AU-014 option is furnished with:- Four red long wires (N1254A-508)- Four black long wires (N1254A-509)- Two red short wires (N1265-61751)- Two black long wires (N1265-61752)- Two yellow high current banana-banana

cable (N1254A-522)


N1265AU-015 1500 A Current Option • 1500 A upgrade must be done at Keysight Service Center.

Model/Option

Description Note


N1259A Opt 013



1 2

5 6

43

A

B C59



N1265AU-035 Universal R-Box • A desired register can be installed by soldering.

N1265AU-040 10 kV Ultra High Voltage Gate Protection Adapter

• This adapter is used to protect a B1514A MCSMU module used for Gate driver from device breakdown when making ultra high voltage measurement with the N1268A UHV Expander,

• The B1514A MCSMU module has to be connected to a passthrough port of the N1265A UHC Expander/Fixture, not a module selector port.

N1265AU-041 Thermocouple, Type K, 2ea • Include two Type-K thermocouples.

N1265AU-045 Container for Protection Adapter and Bias Tee

• N1260A High Voltage Bias tee and N1261A Protection Adapters can be placed in this container to avoid messy cabling.

Model/Option

Description Note



Related accessories

N1254A-508 Connection wire, red 1 ea. • The N1265AU-010 500 A Ultra High Current 3-pin Inline Package Socket Module is furnished with one N1254A-508 cable and one N1254A-509 cable.





N1254A-512 SHV Cable 250 mm, 1ea • The N1259AU-020 High Voltage Bias-tee is furnished with two N1254A-512 cables.

• The N1254A-513 adapter is required to connect a banana plug.

N1254A-513 SHV Jack to Banana Adapter, 1ea • The N1259AU-020 High Voltage Bias-tee is furnished with two N1254A-513 adapters.

• The N1254A-513 adapter is used with the N1254A-512 cable to connect a banana plug.



Model/Option

Description Note



NOTE Keysight Technologies service center is responsible for N1265AU-015 installation.

NOTE For Keysight field team, installation fee (R-51U-501 or R1286A-HU) will be automatically added to the N1265AU when making a quotation with Keysight order configuration tool.

N1254A-522 1500 A Ultra High Current Banana to Banana Cable, 2 ea.


• The N1265AU-010 500 A Ultra High Current 3-pin Inline Package Socket Module is furnished with N1254A-522 cables.

N1254A-523 1500 A Ultra High Current Banana to Open End Cable, 1 m, 2 ea





Model/Option

Description Note


Configuration GuideNote for 4142B Users

Note for 4142B UsersThe B1505A expands the maximum measurement range up to 40 A/3000 V from the range 10 A/1000 V covered by Keysight 4142B Modular DC Source/Monitor.

Because of the following reasons, the measurement setup and environments for the 4142B cannot be used with the B1505A. The test fixture and the connection path from connector plate to wafer prober must be designed, changed, or remade for the B1505A.

• Test fixture 16088A/B designed for the 4142B, cannot be used for the measurements over 10 A/1000 V.

• The connection path, connectors, cabling, and wiring will not support up to 40 A/3000 V.

• Connector types are different from the 4142B.

Table 1-32 Considering Connector Types

4142B B1505A

High current connector Dual triaxial BNC and triaxial

High voltage connector BNC and screwed-triaxial HV triaxial

Interlock connector BNC 6-pin

BNC female bulkhead-type

Triax. female bulkhead-type

Interlock receptacle: Agilent P/N:1252-1419 or Hirose, HR10A-7R-6S

HV Triax. female bulkhead-type (N1254A-500)

Keysight


2 N1259A Connection Guide

N1259A Connection Guide

This chapter describes the required information for connecting Keysight B1505A, N1259A, and a device under test (DUT).

• "Input Connection"

• "Output Connection"

The N1259A is a test fixture used for measurements of packaged devices. The fixture can be connected to GNDU, MFCMU, HP/MPSMU, HVSMU/HVMCU, and HC/MC/DHCSMU. And the fixture has built-in GNDU protection adapter and built-in HPSMU protection adapter. Also the fixture can install the module selector for switching the measurement resource connected to the DUT, the high voltage R-box for reducing the risk of device breakdown, and the high voltage bias-T for performing the high voltage capacitance measurement. General specifications of the N1259A are listed below.

• Dimensions: 420 mm (W) 272 mm (H) 410 mm (D)

• Weight: 12.0 kg

• Maximum volt-amps, only for N1259A-300 module selector: 35 VA

WARNING To avoid electrical shock and instrument damage, turn the all instruments off before connecting or disconnecting measurement cable.

WARNING There are potentially hazardous voltages of up to ± 3000 V (HVSMU), ± 2200 V (HVMCU), ± 200 V (HPSMU), or ± 100 V (MPSMU) at the Force, Guard, and Sense terminals. To prevent electrical shock, do not expose these lines.

WARNING To prevent electrical shock during use, connect the Interlock cable (see "To Connect Interlock Circuit" on page 2-4).

WARNING The B1505A is heavy and requires a two person lift.

CAUTION Do not grab the fixture cover when lifting the N1259A.

CAUTION Never connect the Guard terminal to any output, including circuit common, chassis ground, or any other guard terminal. Connecting anything may damage the module.

CAUTION Never connect the HVSMU Force and Guard terminals to any output, including circuit common, chassis ground, or any other module terminal. Connecting other module may damage the connected module.

NOTE Using Universal R-box and Universal Socket Module

The universal R-box and the universal socket module are the do-it-yourself kit for installing a resistor you want or mounting a socket you want.

You need to prepare the hexlobe (torx type) screwdriver T-10 to remove the cover.

After installing a resistor or mounting a socket, reattach the cover. Do not use the universal R-box and the universal socket module under the condition that the cover is removed.


N1259A Connection GuideInput Connection

Input ConnectionPrepare the required cables listed in the following tables and connect them between the B1505A terminals and the relative N1259A terminals. Table 2-1 shows the connections without module selector, fast switch, and HVMCU.

Table 2-2 shows the additional connections for using module selector (N1259A-300).

Table 2-3 shows the additional connections for using HVSMU/HCSMU fast switch (N1267A). For the additional information on the fast switch, see "To Connect HVSMU/HCSMU Fast Switch" on page 5-32.

Table 2-4 shows the additional connections for using HVMCU. For the additional information on the HVMCU, see "To Connect HVSMU Current Expander" on page 5-34.

Figure 2-1 N1259A Rear View

WARNING The connector cap must be connected to the unused input connectors.

NOTE For connecting HP/MPSMU, use either 16494A or 16493K.

For connecting MFCMU, use either AUX or MFCMU only for N1259A-020.

N10149

Interlock

HPSMU3±200 V Max

HVSMU2±3 kV Max

GNDU2

Module Selector Input

Force

Sense

HVSMU1±3 kV Max

GNDU1

Force

Sense

Force

Sense

Force

Sense

Force

Sense

Force

Sense

±25 V Max

HpotHcur

LpotLcur

Digital I/O

LINE100–240 V

50/60 Hz35 VA Max

MF CMU Input

Input

To avoid electrical shock and instrument damage,do not remove the short cap and cables during operation.

To avoid electrical shock and instrument damage,do not remove the short cap and cables during operation.

HPSMU1±200 V Max

HPSMU2±200 V Max

HCSMU1±40 V Max

AUX±200 V Max

HCSMU2±40 V Max

HCSMU3±40 V Max

1

2



CAUTION The GNDU can sink current of up to 4.2 A.

Use 16493L GNDU cable to connect the GNDU to an adapter, a test fixture, or a connector plate.

Do not use normal triaxial cable (16494A) because the maximum current rating of the cable is 1 A.

NOTE Do not put any conductor on the HCSMU Low Force and Low Sense terminals, outer conductor of the coaxial connectors. Putting conductor of circuit common, chassis ground, or any potential on causes the measurement error.

NOTE Dual HCSMU (DHCSMU)

DHCSMU can be configured by two HCSMU modules installed in one B1505A and connected to the 16493S-021 Dual HCSMU combination adapter. See "To Connect Dual HCSMU Adapter" on page 5-20 for connection. The adapter output connectors are compatible with HCSMU.

CAUTION If the DHCSMU is used with the built-in module selector, the maximum current must be ± 30 A to prevent the module selector from performance degradation and failure.

NOTE The B1505A needs to automatically detect and register the CMU cable type during boot process.

To Connect Interlock CircuitThe B1505A provides the Interlock connector to prevent you from receiving an electrical shock from high voltage (more than ± 42 V). If the interlock circuit is open, the B1505A cannot apply high voltage more than ± 42 V.

When using the N1259A test fixture, connect the 16493J interlock cable between the Interlock connectors of the B1505A and the N1259A.



Table 2-1 To Connect between B1505A and N1259A, without HVMCU and Module Selector

B1505A terminals Required cables N1259A terminals

Interlock 16493J Interlock cable, 3 m or 1.5 m, 1 ea. Interlock

GNDU 16493L GNDU cable, 3 m or 1.5 m, 1 ea. GNDU11

1. If the N1266A expander is used, connect the 16493L-001 cable from the N1266A Output Low.

HVSMU Force 16493T HVSMU cable, 3 m or 1.5 m, 1 ea. HVSMU12

2. If the N1266A expander is used, connect the 16493T-001 cable from the N1266A Output High.

HCSMU or

DHCSMU

Force For HCSMU, 16493S HCSMU cable, 3 m or 1.5 m, 1 ea.

For DHCSMU, 16493S HCSMU cable, 3 m or 1.5 m, 1 ea., and 16493S-021 Dual HCSMU adapter. See "To Connect 16493S-021" on page 5-22 for Dual HCSMU adapter.

HCSMU1 or

HCSMU2

Force

Sense Sense

MCSMU Force 16494A Triaxial cable, 3 m or 1.5 m, 1 ea. and N1254A-104 Triaxial(f)-BNC(m) adapter, 1 ea.

HCSMU1 or

HCSMU2

Force

Sense 16494A Triaxial cable, 3 m or 1.5 m, 1 ea. Sense

HPSMU or

MPSMU

Force 16494A Triaxial cable, 3 m or 1.5 m, 1 ea., for the non-Kelvin connection, connect it between the Force connectors.

For the Kelvin connection, prepare additional one more cable and connect it between the Sense connectors. Or use 16493K Kelvin triaxial cable instead of 16494A.

HPSMU1 or

HPSMU2

Force

Sense Sense

MFCMU Hpot/Hcur

N1300A CMU cable, 3 m or 1.5 m, 1 ea.

BNC(m)-(f)-(f) adapter, total 2 ea., 1 ea. for connecting Hpot, Hcur, and AUX1, and 1 ea. for connecting Lpot, Lcur, and AUX2.

It is not needed to connect the ground wire extended from the CMU cable.

AUX 1

Lpot/Lcur

AUX 2

MFCMU Hpot N1300A CMU cable, 3 m or 1.5 m, 1 ea.


MFCMU

Only for N1259A-

020

Hpot

Hcur Hcur

Lcur Lcur

Lpot Lpot

BNC cable, for connecting instruments other than the B1505A AUX 1 or 2



Table 2-2 To Connect between B1505A and N1259A for using Module Selector (N1259A-300)

Table 2-3 To Connect between B1505A and N1259A for using Fast Switch (N1267A)



1. If the N1266A expander is used, connect the 16493L-001 cable from the N1266A Output Low.

HVSMU Force 16493T HVSMU cable, 3 m or 1.5 m, 1 ea. HVSMU22

2. If the N1266A expander is used, connect the 16493T-001 cable from the N1266A Output High.

HCSMU or

DHCSMU

Force For HCSMU, 16493S HCSMU cable, 3 m or 1.5 m, 1 ea.

For DHCSMU, 16493S HCSMU cable, 3 m or 1.5 m, 1 ea., and 16493S-021 Dual HCSMU adapter. See "To Connect 16493S-021" on page 5-22 for Dual HCSMU adapter.

HCSMU3 Force

Sense Sense

HPSMU or

MPSMU



HPSMU3 Force

Sense Sense

Digital I/O 16493G Digital I/O connection cable, 3 m or 1.5 m, 1 ea. Digital I/O3

3. If the N1266A expander is used, connect the 16493G-001 cable from the N1266A Digital I/O Output.

Power cable, 1 ea., for connecting to power line LINE


MCSMU Force 16494A Triaxial cable, 3 m or 1.5 m, 1 ea. MCSMU Force


HCSMU Force 16493S HCSMU cable, 3 m or 1.5 m, 1 ea. for HCSMU HCSMU Force

Sense Sense

HVSMU Force 16493T HVSMU cable, 3 m or 1.5 m, 1 ea. HVSMU

GNDU 16493L GNDU cable, 3 m or 1.5 m, 1 ea. GNDU

N1267A terminals Required cables/Description N1259A terminals

High Force 16493T-001 HVSMU cable, 1.5 m, 1 ea. HVSMU1

Low Force 16493U-001 HVSMU cable, 1.5 m, 1 ea. AUX 1 or 2



Table 2-4 To Connect between B1505A and N1259A for using HVMCU (N1266A)

B1505A terminals Required cables N1266A terminals1

1. To configure HVMCU, the N1266A current expander is required.

GNDU 16493L-001 GNDU cable, 1.5 m, 1 ea. GNDU

HVSMU Force 16493T-001 HVSMU cable, 1.5 m, 1 ea. HVSMU

MCSMU2

2. HCSMU is substitutable. Then use 16493S HCSMU cable, N1254A-103 adapter for Force, and N1254A-517 adapter for Sense.

Force 16494A-001 Triaxial cable, 1.5 m, 1 ea. I Control Force

Sense 16494A-001 Triaxial cable, 1.5 m, 1 ea. Sense

MCSMU2 Force 16494A-001 Triaxial cable, 1.5 m, 1 ea. V Control Force


Digital I/O 16493G-001 Digital I/O connection cable, 1.5 m, 1 ea. Digital I/O Input

N1266A terminals Required cables N1259A terminals

Output High 16493T-001 HVSMU cable, 1.5 m, 1 ea. HVSMU1 or 2

Low 16493L-001 GNDU cable, 1.5 m, 1 ea. GNDU1 or 2

Digital I/O Output 16493G-001 Digital I/O connection cable, 1.5 m, 1 ea. Digital I/O1

1. This connection is required if the module selector (N1259A-300) is used.

LINE Power cable, 1 ea., for connecting to power line


N1259A Connection GuideOutput Connection

Output ConnectionThe following parts are available for mounting a device under test (DUT) on the test fixture. Prepare the part suitable for your DUT and attach it to the test fixture. For details, see the following sections.

• "N1259A-010 Inline Package Socket module" on page 2-19

• "N1259A-011 Universal Socket Module" on page 2-20

• "N1259A-012 Blank PTFE Board" on page 2-21

• "N1259A-013 Curve Tracer Test Adapter Socket Module" on page 2-22

Required parts for making the output connections are listed in the following table.

Table 2-5 Required Parts

Model/Option Description

N1254A-508 Connection wire, red

N1254A-509 Connection wire, black

N1254A-512 and

N1254A-513

SHV(plug)-SHV(plug) cable and SHV(jack)-banana adapter, for high voltage capacitance measurement

N1254A-510 Dolphin clip adapter, red and black, for using blank board

N1254A-511 Cable lug adapter, red and black, for using blank board



To Connect DUT

WARNING Set the instrument output off before connecting or disconnecting connection wire.

Press the B1505A front panel Stop key to set the output off. And confirm that the B1505A front panel High Voltage indicator is not lit.

WARNING Do not connect or disconnect your DUT while the B1505A is applying voltage or current. Otherwise, the DUT may be damaged.

Do not touch the DUT soon after measurement. Have enough time for discharge and radiation.

CAUTION Do not touch the terminals of the cable and wire. Oil, perspiration, and dirt prevent good electrical contact, deteriorate insulation, and degrade measurement accuracy.


NOTE HP/MP/HVSMU and HVMCU Guard terminal

Guard must be opened. You may extend it as close as possible to a DUT terminal for reducing the leakage current of the extension cable.

1. Set the instrument output off.

2. Open the fixture cover.

3. Set a socket module on the test fixture.

For using the blank PTFE board, see "N1259A-012 Blank PTFE Board" on page 2-21.

4. Connect a wire to an output terminal. And repeat this for all terminals connected to the measurement resources to be used. See Figure 2-2 for the output terminals.

5. Connect the wire to the socket module input terminal.

Confirm the DUT pin assignment and the measurement resource to be used and complete the connections of all measurement terminals without making misconnection.

For using the inline package socket module, also see "N1259A-010 Inline Package Socket module" on page 2-19.

For using the universal socket module, also see "N1259A-011 Universal Socket Module" on page 2-20.

6. Set the DUT on the socket.

7. Close the fixture cover.

To apply more than ± 42 V, close the fixture cover. Otherwise, the interlock function will stop the B1505A output over ± 42 V.

WARNING Make sure that the cover is closed properly before starting measurement. Do not perform the measurement when a wire is protruding from the fixture cover.



Figure 2-2 N1259A Output Terminals

1. HCSMU

2. HPSMU

3. HVSMU

4. GNDU

5. AUX

Signal

Signal

Force

Guard

Force

Sense

Guard

Force

Guard

SenseForce

High

Low

Sense

HCSMU1

HCSMU2 GNDU1

HVSMU1

HPSMU2

HPSMU1

Force Sense

High

Low

Force Sense±40 V Max

±40 V Max

±200 V Max ±200 V Max

±200 V Max±200 V Max

±3 kV Max

AUX2

AUX1

1

15

5

2 3

42



Figure 2-3 Kelvin Connection Example

NOTE Kelvin connection and non-Kelvin connection

If you want to simplify the connections, open the Sense terminals and use the Force terminals only. This is the non-Kelvin connection. The Force terminals can be used to apply and measure dc voltage or current. Note that the non-Kelvin connection is not available for GNDU and HCSMU.

If you perform the low resistance measurement or the high current measurement, use the Kelvin connection which can reduce the residual resistance effects of the cables and contacts by connecting the Force and Sense lines together as close as possible to the DUT terminal. The Kelvin connection can be made on the test fixture as shown in Figure 2-3.

Signal

Signal

Force

Guard

Force

Sense

Guard

Force

Guard

SenseForce

High

Low

Sense

HCSMU1

HCSMU2 GNDU1

HVSMU1

HPSMU2

HPSMU1

Force Sense

High

Low

Force Sense±40 V Max

±40 V Max

±200 V Max ±200 V Max

±200 V Max±200 V Max

±3 kV Max

AUX2

AUX1



To Use Options

The following options are available for the N1259A. See Figure 2-4.

1. N1259A-300 Module selector

For switching measurement resource connected to DUT automatically.

2. N1259A-021 Series resistor, 1 M, ± 3000 V max, for drain/collector

N1259A-022 Series resistor, 100 k, ± 3000 V max, for drain/collector

N1259A-030 Series resistor, 1 k, ± 200 V max, for gate/base

N1259A-035 Universal R-box, for installing your desired resistor

For reducing damage of DUT or preventing SMU from oscillation.

3. N1259A-020 High voltage bias-T

For capacitance or impedance measurements using DC bias of up to ± 3000 V.

4. Socket module and blank board

For mounting DUT. See the following sections.

• "N1259A-010 Inline Package Socket module" on page 2-19.

• "N1259A-011 Universal Socket Module" on page 2-20.

• "N1259A-012 Blank PTFE Board" on page 2-21.

• "N1259A-013 Curve Tracer Test Adapter Socket Module" on page 2-22.

• "N1259A-014 Gate Charge Socket Module" on page 2-23.



Figure 2-4 N1259A Available Options

2

1

2

3

4

High Voltage Bias–Tee

Guard

Module Selector Output

Force

Sense

Guard

Sense

Force

1 MΩ

21

100 kΩ

HighLow

21

±3 kV Max±40 V Max

N1259A Opt 022

±3 kV MaxMax: 6.4 W

±3 kV MaxMax: 9 W

N1259A Opt 021

N1259A Opt 010

Force

Sense

Force

Sense

Force

Sense

1

2

3

1 2 3

±3 kV MaxInline Package Socket (3 Pin)

Kelvin Connection

MF CMU

DC Bias Input±3 kV Max

High

Low

Force

±3 kV Max

±25 V Max

Guard

4

2

51

2

3

4

6

7

8

N1259A Opt 011

±3 kV MaxUniversal Socket Module

1 kΩ

21

±200 V MaxMax: 1 W

N1259A Opt 030



To Use Module Selector

The module selector is used to switch the measurement resource connected to a terminal of DUT. The measurement resource will be HP/MPSMU, HVSMU/HVMCU, or HC/DHCSMU connected to the Module Selector Input terminals (GNDU2, HPSMU3, HVSMU2, and HCSMU3 connectors, see Figure 2-1). The measurement resources must be connected to the Input terminals as shown in Table 2-2.

• Required parts:

N1254A-508 or N1254A-509 connection wire, 4 ea.

• Connection:

See Figure 2-5.

1. Connect a wire between the Low Force terminal and the low terminal of DUT.

2. Connect a wire between the Low Sense terminal and the low terminal of DUT.

3. Connect a wire between the High Force terminal and the high terminal of DUT.

4. Connect a wire between the High Sense terminal and the high terminal of DUT.

This connection is effective for all measurement performed by the modules connected to the module selector Input terminals. Connection change is not required. The module selector switching status is indicated by the Status indicator mounted on the front panel. See Figure 2-6 and Table 2-6 on page 2-15.

The Guard terminals must be opened. You may extend it as close as possible to a DUT terminal for reducing the leakage current of the extension cable.

Figure 2-5 Module Selector Connection Example

CAUTION Maximum current must be ± 30 A to prevent the module selector from performance degradation and failure.


Guard


Force

Sense

Guard

Sense

Force

1 MΩ

21

100 kΩ

HighLow

21


N1259A Opt 022


±3 kV MaxMax: 9 W

N1259A Opt 021

N1259A Opt 010

Force

Sense

Force

Sense

Force

Sense

1

2

3

1 2 3


Kelvin Connection

MF CMU


High

Low

Force

±3 kV Max

±25 V Max

Guard



Figure 2-6 Module Selector Simplified Internal Connections

NOTE Controlling module selector input-to-output path

The configuration and the default I/O path of the module selector are set by using the Module Selector tab screen of the Configuration window of the EasyEXPERT software. The connection path from the input port to the output port is controlled by each test setup. And the module selector switching status is indicated by the status indicator mounted on the front panel. See Figure 2-6 and Table 2-6 for the indication and the connection path.

Table 2-6 Module Selector Status Indicator and Input-to-Output Connection Path

Low HighS F

S: Sense

F: Force

P.AP.A

GNDU HCSMU HPSMU HVSMUS FS F

SF

F

P.A:Protection adapter

S F

GNDU force and senseare connected to Lowsense line.HVSMU force is connected to High sense line.

100 kW

Module used for the testStatus

indicator

Input-to-output connection1 of output terminals

1. In the normal state, the module selector makes the path to the output port from the input port specified by the Default field. When a measurement is performed, the module selector performs automatic switching in every test. The selector makes the path to the output port from the module used for the test.

Low Sense Low Force High Sense High Force

2

2. This condition is when all Input fields HVSMU, HCSMU, and HPSMU are blank.

Open HCSMU3 Low Sense

+ GNDU2 Force

+ GNDU2 Sense

HCSMU3 Low Force

Open Open

HPSMU or MPSMU HPSMU HPSMU3 Sense HPSMU3 Force

HCSMU or DHCSMU HCSMU HCSMU3 High Sense

HCSMU3 High Force

HVSMU or HVMCU HVSMU HVSMU2 ForceOpen

HVSMU/HVMCU and built-in series resistor

HVSMU2 Force+ Series resistor



To Use Series Resistor

The series resistor is used to reduce damage of DUT or prevent SMU from oscillation. The resistor is internally connected between the terminals 1 and 2.

NOTE To install your desired resistor in the universal R-box, see "To Use Universal R-Box".

• Required parts:

N1254A-508 or N1254A-509 connection wire, 2 ea., or 3 ea. for Kelvin connection

• Connection:

See Figure 2-7.

1. Connect a wire between a SMU Force output terminal and the 1 terminal.

2. Connect a wire between the 2 terminal and a Force terminal on the socket module.

This is the non-Kelvin connection, solid lines shown in Figure 2-7. For the Kelvin connections, add the following connection, dotted line shown in Figure 2-7.

1. Connect a wire between the SMU Sense output terminal and the 1 terminal.

The Kelvin connection is effective up to the series resistor input. So the voltage drop caused by the series resistor must be subtracted from the measurement result as following.

Vdut = Vout - Rs Imeas

where,

Vdut: Voltage after correction

Vout: Source output voltage

Rs: Resistance of the series resistor

Imeas: Measurement current

Figure 2-7 Series Resistor Connection Example


Guard


Force

Sense

Guard

Sense

Force

1 MΩ

21

100 kΩ

HighLow

21


N1259A Opt 022


±3 kV MaxMax: 9 W

N1259A Opt 021

N1259A Opt 010

Force

Sense

Force

Sense

Force

Sense

1

2

3

1 2 3


Kelvin Connection

MF CMU


High

Low

Force

±3 kV Max

±25 V Max

Guard

SenseForce



To Use Universal R-Box

The universal R-box is a blank box, kind of a do-it-yourself kit for installing your desired resistor.

To install the resistor, see the following simple instruction.

• Required parts:

your desired resistor, adequate rating

hexlobe (torx type) screwdriver T-10

label, for noting the resistance value

• Instruction:

1. Remove the cover bottom of the blank box.

2. Solder the resistor between the terminals 1 and 2.

To prevent discharge and any accident, make enough space between the resistor leads and the shield or chassis. For example, make space of about 6 mm from the leads for maximum 3000 V output.

3. Reattach the cover.

Make enough space between the resistor leads and the cover.

4. Write the resistance value in the label.

5. Affix the label to the top cover.

Figure 2-8 To Install Resistor in the N1259A-035 Universal R-Box



To Use High Voltage Bias-T

The high voltage bias-T is used to perform capacitance or impedance measurements using DC bias of up to ± 3000 V. The bias-T High terminal is internally connected to the MF CMU Hpot and Hcur input connectors. And the bias-T Low terminal is internally connected to the MF CMU Lpot and Lcur input connectors.

• Required parts:

N1254A-512 SHV(plug)-SHV(plug) cable, 2 ea.

N1254A-513 SHV(jack)-banana adapter, 2 ea.

N1254A-508 or N1254A-509 connection wire, 2 ea.

• Connection:

See Figure 2-9.

1. Attach the SHV-banana adapter to the SHV cable, and make two cables.

2. Connect a cable (solid line) between the bias-T Low terminal and the low terminal of DUT.

3. Connect a cable (solid line) between the bias-T High terminal and the high terminal of DUT.

4. Connect a wire (dotted line) between a SMU Force output terminal and the DC Bias Input High terminal. Use MPSMU for DC bias of up to ± 100 V, HPSMU for ± 200 V, or HVSMU for ± 3000 V.

5. Connect a wire (dotted line) between the SMU Guard output terminal and the DC Bias Input Guard terminal.

Figure 2-9 High Voltage Bias-T Connection Example


Guard


Force

Sense

Guard

Sense

Force

1 MΩ

21

100 kΩ

HighLow

21


N1259A Opt 022


±3 kV MaxMax: 9 W

N1259A Opt 021

N1259A Opt 010

Force

Sense

Force

Sense

Force

Sense

1

2

3

1 2 3


Kelvin Connection

MF CMU


High

Low

Force

±3 kV Max

±25 V Max

Guard

Guard

Force



N1259A-010 Inline Package Socket module

This module provides a socket used for connecting three-terminal inline packaged device and three couples of the Force and Sense terminals. Socket module internal connection is shown in Figure 2-10.

Short bar is furnished with the module. It is used for performing the short correction before the impedance measurement. Set the short bar before the short correction and remove it after the correction.

To use this module, see the following simple instruction.

• Required parts:

N1254A-508 or N1254A-509 connection wire, 1 ea. for one connection

• Instruction:

1. Attach the socket module to the test fixture.

2. Connect wires between the socket module terminals and the fixture output terminals.

For making the Kelvin connection, Force and Sense must be connected to Force and Sense of the socket module respectively.

If MCSMU, HCSMU, or DHCSMU is used, High Force and Sense must be connected to Force and Sense used for the high terminal of a device under test (DUT), respectively. Low Force and GNDU Force must be connected to Force used for the low terminal of the DUT, and Low Sense and GNDU Sense must be connected to Sense used for the low terminal of the DUT. See Figure 2-3 for example.


4. Close the fixture cover and perform measurement.

CAUTION Do not apply voltage/current over the maximum limit of the socket module.

Figure 2-10 Inline Package Socket Module

2Force

Sense

3Force

Sense

1Force

Sense

165 mm

165 mm

3.48 mm1.78 mm

14 mm

Height: 34 mm(45 mm including terminal)(58 mm including socket)

Maximum voltage: 3000 V

Maximum current: 40 A pulse, 2 A dc



N1259A-011 Universal Socket Module

This is a blank module, kind of a do-it-yourself kit for supporting variety of packaged devices. This module can be used by mounting your desired socket or packaged device and making connections same as the N1259A-010 Inline Package Socket Module.

To use this module, see the following simple instruction. For the component locations and dimensions, see Figure 2-11. Also see "N1259A-010 Inline Package Socket module" on page 2-19 to perform measurement.

• Required parts:

blank board suitable for mounting the socket or packaged device

screw M3, 4 ea., for fixing the blank board on the socket module

wire, adequate length and quantity, for making connections


socket, if you use, and packaged device under test (DUT)

• Instruction:

1. Cut the blank board in 104 mm 89 mm square.

2. Make four screw holes on the board. The holes should be 4.5 mm inside from the edge.

3. Fix the board to the blank module.

4. Remove the cover bottom of the blank module.

5. Mount the socket or DUT on the board and solder wire between its terminals and the blank module terminals 1 to 8.

Make enough space between the socket/DUT terminal and the shield/chassis, for example, about 1 mm for maximum 200 V output and 6 mm for 3000 V, to prevent discharge and any accident.


Figure 2-11 Universal Socket Module

90 mm

(Nut pitch: 95 mm)

165 mm

165 mm

129 mm

160 mm

105 mm

Height: 34 mm (45 mm including terminal)

(Nut pitch: 80 mm)

21

34

56

78



N1259A-012 Blank PTFE Board

This is an insulation board used for placing a DUT.

To use this board, see the following simple instruction.

• Required parts:


N1254A-510 dolphin clip adapter or N1254A-511 cable lug adapter, 1 ea. for one connection. Select one suitable for your DUT. See Table 2-5.

• Instruction:

1. Attach the blank PTFE board to the test fixture.

2. Connect adapters directly to the DUT and put it on the blank PTFE board.

3. Connect wires between the adapters and the fixture output terminals.

For making the Kelvin connection, Force and Sense must be connected together at the device terminal.

If MCSMU, HCSMU, or DHCSMU is used, High Force and Sense must be connected to the high terminal of a device under test (DUT). Low Force, Low Sense, GNDU Force, and GNDU Sense must be connected to the low terminal of the DUT. See Figure 2-3 for reference.

4. Make sure the DUT location. The DUT must be placed on the blank PTFE board properly.

Make enough space between the adapters, also between the adapter of high side and the shield/chassis, for example, about 1 mm for maximum 200 V output and 6 mm for 3000 V, to prevent discharge and any accident.


Figure 2-12 Blank PTFE Board



N1259A-013 Curve Tracer Test Adapter Socket Module

This module provides a socket available for connecting a test adapter designed for connecting to Tektronix 370 series curve tracers. Socket module internal connection is shown in Figure 2-13.


• Required parts:


• Instruction:


2. Connect your test adapter to the socket.

3. Connect wires between the socket module terminals and the fixture output terminals.


If MCSMU, HCSMU, or DHCSMU is used, High Force and Sense must be connected to Force and Sense used for the high terminal of a device under test (DUT), respectively. Low Force and GNDU Force must be connected to Force used for the low terminal of the DUT, and Low Sense and GNDU Sense must be connected to Sense used for the low terminal of the DUT. See Figure 2-3 for example.

4. Set the DUT on your test adapter.



Figure 2-13 Curve Tracer Test Adapter Socket Module


N1259A Opt 013



1 2

5 6

43

Internal connection1: Collector/Drain Force2: Collector/Drain Sense3: Emitter/Source Force4: Emitter/Source Sense5: Base/Gate Force6: Base/Gate Sense

A

B C

Maximum voltage: 3000 VMaximum current: A-Force: 500 A pulse, 39 A dcA-Sense: 40 A pulse, 2 A dcB-Force: 500 A pulse, 39 A dcB-Sense: 40 A pulse, 2 A dcC-Force: 40 A pulse, 2 A dcC-Sense: 40 A pulse, 2 A dc



N1259A-014 Gate Charge Socket Module

This socket adapter is designed for performing the gate charge measurement.

Note that the B1513A HVSMU cannot be used for the gate charge measurement and must be upgrade to B1513B or later version.



2. Connect wires between the socket module terminals and the fixture output terminals. You can use the following wires supplied with the socket module.

• N1254A-508: long wire (red), 4 ea.

• N1254A-509: long wire (black), 4 ea.

• N1265-61751: short wire (red), 2 ea.

• N1265-61752: short wire (black), 2 ea.


Figure 2-15 and Figure 2-16 show connection examples.

3. Set the current control device on the left socket or connect the load resistor between the studs for the resistor.

The current control device must be an extra 3-pin inline package device which is expected to have the same characteristics as DUT. If the device is not available, use a load resistor. The resistor must satisfy the following specifications.

Resistance = Vr/Ir (Vr: rated voltage, Ir: rated current)

Peak power Vr Ir 1 ms

4. Set your DUT on the right socket.



Figure 2-14 Gate Charge Socket Module


N1259A Opt 013



1 2

5 6

43

Gate DUT High: Max. 30 V / 1 A Low: Max. 10 V / 1 ASelector Out Force High: Max. 3000 V / 500 A Low: Max. 10 V / 500 ASelector Out Sense High: Max. 3000 V /20 mA Low: Max. 10 V / 20 mASMU Current Control High: Max. 30 V / 1A floating 3000 V Low: Max. 10 V / 1A floating 3000 V

A

B C59



Figure 2-15 Connection Example for High Voltage Gate Charge Measurement

Figure 2-16 Connection Example for High Current Gate Charge Measurement

NOTE For the high current gate charge measurement, connect the Selector Output Sense High terminal on the fixture to the Selector Output Force High terminal on the N1259A-014 adapter. Measurement may fail depending on the device characteristics if it is connected to the Selector Output Sense High terminal.


3 N1265A Connection Guide


This chapter describes the required information for connecting Keysight B1505A, N1265A, and a device under test (DUT).



The N1265A is a test fixture which contains the current expander to enable 500 A or 1500 A (option N1265A-015) output and measurement, and contains the selector to switch the measurement resource connected to the DUT.

The current expander is used to configure ultra high current unit (UHCU).

The selector is used to switch the measurement resource connected to the DUT. The measurement resource will be the UHCU, HVSMU/HVMCU, or HP/MPSMU. The selector output can be extended to your prober station by using the N1254A-524 ultra high current prober system cable.

The N1265A also provides the connection paths for UHVU, MFCMU via bias-tee, and HP/MP/HC/MC/DHCSMU.


• Weight: 30.0 kg

• Maximum volt-amps: 400 VA


WARNING There are potentially hazardous voltages of up to ± 10 kV (UHVU), ± 3000 V (HVSMU), ± 2200 V (HVMCU), ± 200 V (HPSMU), or ± 100 V (MPSMU) at the High, Force, Guard, and Sense terminals. To prevent electrical shock, do not expose these lines.


WARNING The B1505A, the N1265A ultra high current expander/fixture, and the N1268A ultra high voltage expander are heavy and require a two person lift.


CAUTION Never connect the Guard terminal to any output, including circuit common, chassis ground, or any other guard terminal. Connecting anything may damage the instrument.

CAUTION Never connect the UHVU High, HVMCU High, and HVSMU Force and Guard terminals to any output, including circuit common, chassis ground, or any other measurement resource such as SMU. Connecting other measurement resource may damage the connected one.

CAUTION Never connect the UHVU Low terminal to any other measurement resource except for the N1269A or N1265A-040 adapter. Connecting other measurement resource may damage the connected one.



NOTE Using Universal R-box and Universal Socket Module

The universal R-box and the universal socket module are the do-it-yourself kit for installing a resistor you want or mounting a socket you want.


After installing a resistor or mounting a socket, reattach the cover. Do not use the universal R-box and the universal socket module under the condition that the cover is removed.



Input ConnectionPrepare the required cables listed in the following tables and connect them between the B1505A terminals and the relative N1265A terminals. Table 3-2 shows the connections without HVMCU and UHVU. Table 3-3 shows the additional connections for using HVMCU. And Table 3-4 shows the additional connections for using UHVU. For the additional information on the HVMCU, see "To Connect HVSMU Current Expander" on page 5-34. For the additional information on the UHVU, see "To Connect Ultra High Voltage Expander" on page 5-38.

Figure 3-1 N1265A Input Connectors on Rear Panel

SMU 1 ([1], [2]), 2 ([3], [4]), and 3 ([5], [6]) connectors are used for connecting the MPSMU, HPSMU, or MCSMU. Also SMU 3 ([5], [6]) connectors can be used for connecting HCSMU or DHCSMU. See Table 3-1 for the SMU signal assigned to the SMU input connector by the type of the connected SMU.

The connectors [1], [3], and [5] are for connecting Force, and the connectors [2], [4], and [6] are for connecting Sense of the measurement resource connected to the connectors [1], [3], and [5] respectively.

For connecting HP/MPSMU, the connectors [2], [4], and [6] can be also used to connect Force of other SMU for non-Kelvin connection.

NOTE For connecting MFCMU, use N1300A-001 CMU cable, N1260A high voltage bias-tee, and N1254A-518 SHV(plug)-SHV(plug) cable.

UHV Bias Tee SMU SMU1 2 3

±10 kV Max ±3 kV Max ±200 V Max 1 A±200 V Max

2 A dc 40 A Pulse

To avoid electrical shock and instrument damage,do not remove the cables during operation.

High

Low Low

High

To Use HPSMU/MPSMUConnect the N1261A-001 protection adapter between the SMUconnectors and HPSMU/MPSMU to prevent damage to the SMU.

CAUTION

KCC-REM-ATi-1H-ParaINSTR

Output Input

HVSMU V Control I ControlMCSMU/HCSMU MCSMU/HCSMU

SMU

GNDU

Force

Sense

Force

Sense

Force

Sense

Force

Sense

N10149

LINE100-240 V

50/60 Hz400 VA Max

UHC Input

Interlock

GateDigital I/O

Selector Input

±3 kV Max ±200 V Max ±40 V Max ±40 V Max







NOTE Dual HCSMU (DHCSMU)

DHCSMU can be configured by two HCSMU modules installed in one B1505A and connected to the 16493S-021 Dual HCSMU combination adapter. See "To Connect Dual HCSMU Adapter" on page 5-20 for connection. The adapter output connectors are compatible with HCSMU.


Table 3-1 SMU Input Connectors and Signals by SMU Type

To Connect Interlock Circuit

The B1505A provides the Interlock connector to prevent you from receiving an electrical shock from high voltage (more than ± 42 V). If the interlock circuit is open, the B1505A cannot apply high voltage more than ± 42 V.

When using the N1265A test fixture, connect the 16493J interlock cable between the Interlock connectors of the B1505A and the N1265A. If the N1268A expander is used, connect the cables between the B1505A and the N1268A, and between the N1268A and the N1265A.

Connected SMU

Connection method

1 2 3

[1] [2] [3] [4] [5] [6]

MPSMU Kelvin Force Sense Force Sense Force Sense

non-Kelvin Force Force Force Force Force Force

HPSMU Kelvin Force Sense Force Sense Force Sense

non-Kelvin Force Force Force Force Force Force

MCSMU Kelvin Force Sense Force Sense Force Sense

HCSMU Kelvin NA NA Force Sense

DHCSMU Kelvin NA NA Force Sense



Table 3-2 To Connect between B1505A and N1265A, without HVMCU and UHVU


Interlock 16493J Interlock cable, 3 m or 1.5 m, 1 ea. Interlock1


HVSMU Force 16493T HVSMU cable, 3 m or 1.5 m, 1 ea. Selector Input

HVSMU3

HPSMU or

MPSMU


For the Kelvin connection, prepare additional one more cable and connect it between the Sense connectors.

Selector Input SMU

Force

Sense Sense

MCSMU4 Force 16494A Triaxial cable, 3 m or 1.5 m, 1 ea. UHC Input

V Control

Force


MCSMU4 Force 16494A Triaxial cable, 3 m or 1.5 m, 1 ea. UHC Input

I Control

Force


MCSMU4 Force 16494A Triaxial cable, 3 m or 1.5 m, 1 ea. Gate Force


MCSMU or

HPSMU or

MPSMU

Force To connect MCSMU, use two 16494A cables, 3 m or 1.5 m.

To connect HP/MPSMU, use N1261A-001 protection adapter and four 16494A triaxial cables for Kelvin connection or two 16494A cables for non-Kelvin connection. Recommended cable length is 1.5 m. See "To Connect Protection Adapter" on page 5-23 for protection adapter.

SMU 1/2/3

See Table 3-1.

[1]/[3]/[5]

Sense [2]/[4]/[6]

HCSMU or

DHCSMU

Force For HCSMU, 16493S HCSMU cable, 3 m or 1.5 m, 1 ea., N1254A-103 adapter for Force, and N1254A-517 adapter for Sense

For DHCSMU, 16493S HCSMU cable, 3 m or 1.5 m, 1 ea., 16493S-021 Dual HCSMU adapter, N1254A-103 adapter for Force, and N1254A-517 adapter for Sense. See "To Connect 16493S-021" on page 5-22 for Dual HCSMU adapter.

SMU 3 [5]

Sense [6]

MFCMU Hpot N1300A-001 CMU cable 1 ea., N1260A high voltage bias-tee 1 ea., and N1254A-518 SHV(plug)-SHV(plug) cable 2 ea. See "To Connect High Voltage Bias Tee" on page 5-25 for bias-tee.


Bias Tee High

Hcur

Lcur Low

Lpot



WARNING Connect a wire from an electrical ground (safety ground) to the earth terminal.

Table 3-3 To Connect between B1505A and N1265A for using HVMCU (N1266A)

Digital I/O 16493G Digital I/O connection cable, 3 m or 1.5 m, 1 ea. Digital I/O Input


Wire, 1 ea., for earthing (earth)

1. If the N1268A expander is used, connect the 16493J-001 cable from the N1268A Interlock Output.2. If the N1266A expander is used, connect the 16493L-001 cable from the N1266A Output Low.3. If the N1266A expander is used, connect the 16493T-001 cable from the N1266A Output High.4. HCSMU is substitutable. Then use 16493S HCSMU cable, N1254A-103 adapter for Force, and

N1254A-517 adapter for Sense.



1. To configure HVMCU, the N1266A current expander is required.



MCSMU2







Output High 16493T-001 HVSMU cable, 1.5 m, 1 ea. Selector Input HVSMU

Low 16493L-001 GNDU cable, 1.5 m, 1 ea. GNDU

Digital I/O Input 16493G-001 Digital I/O connection cable, 1.5 m, 1 ea. Digital I/O Output




Table 3-4 To Connect between B1505A and N1265A for using UHVU (N1268A)

WARNING Connect a wire from an electrical ground (safety ground) to the earth terminal.


1. To configure UHVU, the N1268A ultra high voltage expander is required.

Interlock 16493J-001 Interlock cable, 1.5 m, 1 ea. Interlock Input

MCSMU Force 16494A-001 Triaxial cable, 1.5 m, 1 ea. I Control Force


MCSMU2


Force 16494A-001 Triaxial cable, 1.5 m, 1 ea. V Control Force



Interlock Output 16493J-001 Interlock cable, 1.5 m, 1 ea. Interlock

Output High UHV(plug)-UHV(plug) cable, 1.5 m, 1 ea. (part of 16493V-001) UHV High

Low SHV(plug)-SHV(plug) cable, 1.5 m, 1 ea. (part of 16493V-001) Low

Digital I/O1

1. If the N1266A expander is used, connect the 16493G-001 cable from the N1266A Digital I/O Output.

16493G-001 Digital I/O connection cable, 1.5 m, 1 ea. Digital I/O Output


(earth) Wire, 1 ea., for earthing




• "Inline Package Socket module (N1265A-010)" on page 3-17

• "Universal Socket Module (N1265A-011)" on page 3-18

• "Curve Tracer Test Adapter Socket Module (N1265A-013)" on page 3-19

• "Blank Silicon Plate (N1265A-002)" on page 3-22

Required parts for making the output connections are listed in the following table.

Table 3-5 Required Parts

Model/Option Description

N1254A-508 Connection wire, red, do not use with UHCU/UHVU

N1254A-509 Connection wire, black, do not use with UHCU/UHVU

N1254A-522 Connection wire, 2 ea., for using UHCU

N1254A-512 and

N1254A-513

SHV(plug)-SHV(plug) cable and SHV(jack)-banana adapter, for high voltage capacitance measurement

N1254A-510 Dolphin clip adapter, red and black, for using blank plate

N1254A-511 Cable lug adapter, red and black, for using blank plate

N1254A-520 UHV(plug)/SHV(plug) to no connector cables, 1 m, for using UHVU and blank plate

N1254A-523 Banana to no connector wire, 1 m, 2 ea., for using UHCU and blank plate



To Connect DUT


Press the B1505A front panel Stop key to set the module output off. And confirm that the B1505A front panel High Voltage indicator is not lit.

If the N1268A is used, press the High Voltage Enable switch to disable the high voltage output. And confirm that this red switch is not lit.

CAUTION Do not connect or disconnect your DUT while the B1505A is applying voltage or current. Otherwise, your DUT may be damaged.


CAUTION Never connect the Selector Output High Force, High Sense, and Guard terminals, Bias Tee High connector, and UHV High connector to any output, including circuit common, chassis ground, or any other measurement resource such as SMU. Connecting other measurement resource may damage the connected one.

NOTE SMU Guard terminals and Selector Output Guard terminal

Guard must be opened. You may extend it as close as possible to a DUT terminal for reducing the leakage current of the extension cable.




For using the blank silicon plate, see "Blank Silicon Plate (N1265A-002)" on page 3-22.

4. Connect a wire to an output terminal. And repeat this for all terminals connected to the measurement resources to be used. See Figure 3-2 for the output terminals.

5. Connect the wire to the socket module input terminal.

Confirm the DUT pin assignment and the measurement resource to be used and complete the connections of all measurement terminals without making misconnection.

For using the inline package socket module, also see "Inline Package Socket module (N1265A-010)" on page 3-17.

For using the universal socket module, also see "Universal Socket Module (N1265A-011)" on page 3-18.








SMU Terminals

Output terminals internally connected to the SMU input connectors on the rear panel. Force, Sense, and Guard terminals for HP/MPSMU. High Force, Low Force, High Sense, and Low Sense for HC/MC/DHCSMU. See Table 3-6.

For using HP/MPSMU, Force must be connected to a terminal of a DUT. And Guard must be opened. You may extend it as close as possible to the DUT terminal for reducing the leakage current of the extension cable. Also, Force and Sense should be connected together at the device end for making the Kelvin connection effective for low resistance and high current measurements.

For using HC/MC/DHCSMU, High Force and High Sense must be connected together at the high terminal of a DUT. And Low Force and Low Sense must be connected together at the low terminal of the DUT. Also, Selector Output Low Force and Sense must be connected to the low terminal for connecting GNDU.

Use a MCSMU for the gate or base terminal of active device measurement using UHVU. Then attach the N1265A-040 protection adapter on the SMU terminals used for the MCSMU. This adapter is designed for protecting the MCSMU from ultra high voltage. Also see "Protection Adapter (N1265A-040)" on page 3-25.


If you want to simplify the connections, open the Sense terminals and use the Force terminals only. This is the non-Kelvin connection. The Force terminals can be used to apply and measure dc voltage or current. Note that the non-Kelvin connection is not available for GNDU and MCSMU/HCSMU/DHCSMU.

If you perform the low resistance measurement or the high current measurement, use the Kelvin connection which can reduce the residual resistance effects of the cables and contacts by connecting the Force and Sense lines together as close as possible to the DUT terminal. The Kelvin connection can be made on the test fixture as shown in Figure 3-3.

Force

Guard

Force

Guard

Force

Guard

Force

Guard

Force

Guard

Force

Guard

SenseForce SenseForce SenseForce

±200 V Max 1 ASMU SMU

±200 V Max 2 Adc 40 A Pulse

Force

High

Low

High

Low

High

Low

High

Low

±40 V Max 1 A PulseGuardSense

±3 kV Max ±3 kV MaxSelector Output

LowHigh

1 2

K Thermocouple±3 V Max

Bias Tee

High

Low

±10 kV MaxUHV

1 2 3

Gate



Table 3-6 SMU Terminals and Signals by SMU Type

Figure 3-3 Kelvin Connection Example

Connected SMU

1 2 3Designation

on panel[1] [2] [3] [4] [5] [6]

HP/MPSMU (non-Kelvin)

Force Force Force Force Force Force Blue letters

Guard Guard Guard Guard Guard Guard

HP/MPSMU (Kelvin)

Force Sense Force Sense Force Sense Letters in white square

Guard Guard Guard Guard Guard Guard

MCSMU High Force

High Sense

High Force

High Sense

High Force

High Sense

Black letters

Low Force

Low Sense

Low Force

Low Sense

Low Force

Low Sense

HCSMU or DHCSMU

NA NA High Force

High Sense

Low Force

Low Sense

Force

Guard

Force

Guard

Force

Guard

Force

Guard

Force

Guard

Force

Guard


± 200 V Max 1 ASM U SM U

±200 V Max 2 A dc 40 A Pulse

Force

High

Low

High

Low

High

Low

High

Low


±3 k V Max ±3 k V MaxSelector Output

LowHigh

1 2


Bias Tee

High

Low

±10 k V MaxUHV

1 2 3

Gate

Base: SMU1 (HPSMU)

Collector: SMU3 (HCSMU High)

Emitter: SMU3 (HCSMU Low)and Selector Low (GNDU)

Use N1254A-508/509 wire.



Gate Terminals

Output terminals internally connected to the Gate input connectors on the rear panel. High and Low terminals used for the gate drive.

Gate terminals are designed for using with the Selector Output terminals. See Figure 3-5. High should be connected to the gate or base terminal of a DUT. Low should be connected to the source or emitter terminal of the DUT. See Figure 3-4 for connection example.

CAUTION Open the Gate terminals for the ultra high voltage measurement using UHVU.

Figure 3-4 Gate and Selector Output Connection Example

Selector Output Terminals

Selector is used to switch the measurement resource connected to the DUT. See Figure 3-5 and Table 3-7 for the connection path. Also see Figure 3-4 for connection example.

CAUTION Open the terminals for the ultra high voltage measurement using UHVU.

1. Low Force and Low Sense output terminals

Force and Sense must be connected together at the low terminal of a DUT. Use the banana-banana wire (N1254A-522) to connect the Low Force terminal for performing the ultra high current measurement using UHCU.

2. High Force and High Sense output terminals

Force and Sense must be connected together at the high terminal of a DUT. Use the banana-banana wire (N1254A-522) to connect the High Force terminal for performing the ultra high current measurement using UHCU.

3. Guard terminal

Guard (high level) must be opened. You may extend it as close as possible to a DUT terminal for reducing the leakage current of the extension cable.

4. Chassis common terminal

Use for grounding or shielding.

Force

Guard

Force

Guard

Force

Guard

Force

Guard

Force

Guard

Force

Guard




Force

High

Low

High

Low

High

Low

High

Low



LowHigh

1 2


Bias Tee

High

Low

±10 k V MaxUHV

1 2 3

Gate

Base: Gate High (MCSMU)

Collector: Selector Output High Force and Sense

Emitter: Selector Output Low Force and Sense

and Gate Low (MCSMU)

Use N1254A-508/509 wire.

Use N1254A-522 wire for High/Low Force.



NOTE Controlling selector input-to-output path

The configuration and the default I/O path of the selector are set by using the UHC Expander/Fixture tab screen of the Configuration window of the EasyEXPERT software. The connection path from the input port to the output port is controlled by each test setup. And the selector switching status is indicated by the status indicator mounted on the front panel. See Figure 3-5 and Table 3-7 for the indication and the connection path.

Figure 3-5 Built-in Selector Simplified Internal Connections

Table 3-7 Built-in Selector Status Indicator and Input-to-Output Connection Path

NOTE Selector may emit a noise sound during operation. However it is not abnormal status.

Measurement resource used for the test

Status indicator


1. In the normal state, the selector makes the path to the output port from the input port specified by the Default field. When a measurement is performed, the selector performs automatic switching in every test. The selector makes the path to the output port from the measurement resource used for the test.


2

2. This condition is when the Default field is blank.

(off) Open Open Open Open

GNDU GNDU Sense GNDU Force Open Open

HPSMU or MPSMU SMU GNDU Sense GNDU Force SMU Sense SMU Force

UHCU UHC UHCU Low Sense

UHCU Low Force

UHCU High Sense

UHCU High Force

HVSMU or HVMCUHVSMU

GNDU Sense GNDU Force HVSMU Force Open


GNDU Sense GNDU Force HVSMU Force+ Series resistor

Open

Low HighSense Force

S: Sense

F: Force

P.A

GNDU

UHCU

SMU HVSMUS F

S FS F

F

P.A: Protection adapter

Sense Force

HVSMU force is connected to High sense line.

MCSMU MCSMUI-controlV-control

MCSMUFS

Low HighGate

100 kΩ

0 Ω10 Ω

100 Ωor 1 kΩ



Bias Tee Terminals

Output terminals internally connected to the Bias Tee High and Low input connectors on the rear panel. The terminals should be connected to a DUT for performing the high voltage C-V measurement.

High and Low must be connected to the high and low terminals of a DUT respectively.

Use SHV(plug)-SHV(plug) cable (N1254A-512), 2 ea. and SHV(jack)-banana adapter (N1254A-513), 2 ea. for connection.

CAUTION Open the Bias Tee terminals for the ultra high voltage measurement using UHVU.

K Thermocouple Terminals

For connecting the thermocouple to monitor temperature around a DUT.The N1265A-041 thermocouple supports maximum of +180 C. The N1254A-554 thermocouple supports maximum of +250 C.



UHV Terminals

Output terminals internally connected to the UHV High and Low input connectors on the rear panel.

High and Low must be connected to the high and low terminals of a DUT respectively. Use the blank silicon plate and the UHV/SHV to no connector cables (N1254A-520) for connection. Figure 3-6 shows a connection example.

The ending of cables must be converted for connecting a DUT terminal. You may attach any adapter or solder a DUT terminal directly. See "Blank Silicon Plate (N1265A-002)" on page 3-22 and Figure 3-13 on page 23 for more information.

For the gate or base terminal of active device measurement using UHVU, use a MCSMU. Then attach the N1265A-040 protection adapter on the SMU terminals used for the MCSMU. This adapter is designed for protecting the MCSMU from ultra high voltage. Also see "Protection Adapter (N1265A-040)" on page 3-25 for the protection adapter.

Figure 3-6 UHV Connection Example

CAUTION Open the Gate terminals, the Selector Output terminals, and the Bias Tee terminals for the ultra high voltage measurement using the UHVU.

CAUTION Never connect the UHVU High terminal to any output, including circuit common, chassis ground, or any other measurement resource such as SMU. Connecting other measurement resource may damage the connected one.

Force

Guard

Force

Guard

Force

Guard

Force

Guard

Force

Guard

Force

Guard




Force

High

Low

High

Low

High

Low

High

Low



LowHigh

1 2


Bias Tee

High

Low

±10 k V MaxUHV

1 2 3

Gate

High

Low

Force

High

Low

High

Low


±3 k V MaxSelector OutputGate Selector OutputGate

Attach N1265A-040 Protection Adapter. Do not use the terminals.

SMU1 High

SMU1 Low UHVU High

UHVU Low

N1265A-002 Blank silicon plate

N1254A-520 SHV cableN1254A-508/509 wire

N1254A-520 UHV cable

N1254A-510/511 adapter

Bi T±3 k V Max

LowHigh

Bias Tee



Inline Package Socket module (N1265A-010)

This module provides a socket used for connecting three-terminal inline packaged device and three couples of the Force and Sense terminals. Socket module internal connection is shown in Figure 3-7.

Short bar is furnished with the module. It is used for performing the short correction before the impedance measurement. Set the short bar before the short correction and remove it after the correction.


Figure 3-7 Inline Package Socket Module



2. Connect wires between the socket module terminals and the fixture output terminals. Then use the following wire (furnished with the N1265A-010).

• 180 mm length wire (yellow) for Selector Output High/Low Force

• 180 mm length wire for Selector Output High/Low Sense

• 250 mm length wire for Gate, SMU, or chassis


For the high voltage capacitance measurement, use SHV(plug)-SHV(plug) cable (N1254A-512) and SHV(jack)-banana adapter (N1254A-513) for connection.

Selector Output and Gate should be connected as follows.

• Selector Output High to DUT high (ex. Collector/Drain)

• Selector Output Low to DUT low (ex. Emitter/Source)

• Gate High to DUT drive (ex. Base/Gate Force)

• Gate Low to DUT low (ex. Emitter/Source Force)


N1265A Opt 010

Inline Package Socket (3 Pin)

1 2

5 6

43

3

F: ForceS: Sense

1

F S

2

FS

165 mm

165 mm

3.48 mm

1.78 mm

14 mmHeight: 34 mm(45 mm including terminal)(58 mm including socket)

F S

1 32

Maximum current:

1-F: 500 A pulse, 39 A dc

1-S: 40 A pulse, 2 A dc





Maximum voltage: 3000 V



HC/MC/DHCSMU via SMU 3 terminals should be connected as follows.

• SMU 3 High Force and Sense to DUT high

• SMU 3 Low Force and Sense to DUT low

• GNDU Force and Sense to DUT low

The GNDU signals will appear at the Selector Output Low terminals as shown in Table 3-7.



Universal Socket Module (N1265A-011)

This is a blank module, kind of a do-it-yourself kit for supporting variety of packaged devices. This module can be used by mounting your desired socket or packaged device and making connections same as the N1265A-010 Inline Package Socket Module.

To use this module, see the following simple instruction. For the component locations and dimensions, see Figure 3-8. Also see "Inline Package Socket module (N1265A-010)" on page 3-17 to perform measurement.


1. Prepare the following parts.

• blank board suitable for mounting the socket or packaged device

• screw M3, 4 ea., for fixing the blank board on the socket module

• wire, adequate length and quantity, for making connections

• hexlobe (torx type) screwdriver T-10

• socket, if you use, and packaged device under test (DUT)

2. Cut the blank board in 90 mm 81 mm square.

3. Make four screw holes on the board. The holes should be 6 mm inside from the edge.

4. Fix the board to the blank module.

5. Remove the cover bottom of the blank module.

165 mm

165 mm

129 mm

160 mm

21

34

56

78


N1265A Opt 011


Universal Socket Module

1 2

5 6

43

91 mm (Nut pitch: 78 mm)

(Nut pitch: 69 mm)82 mm



6. Mount the socket or DUT on the board and solder wire between its terminals and the blank module terminals.

Make enough space between the socket/DUT terminal and the shield/chassis, for example, about 1 mm for maximum 200 V output and 6 mm for 3000 V, to prevent discharge and any accident.


Curve Tracer Test Adapter Socket Module (N1265A-013)This module provides a socket available for connecting a test adapter designed for connecting to Tektronix 370B/371B curve tracers. Socket module internal connection is shown in Figure 3-9.





2. Connect your test adapter to the socket.

3. Connect wires between the socket module terminals and the fixture output terminals. Then use the following wire.

• N1254A-522 wire (yellow) for Selector Output High/Low Force

• N1254A-508 or 509 wire for Selector Output High/Low Sense, Gate, SMU, or chassis


For the high voltage capacitance measurement, use SHV(plug)-SHV(plug) cable (N1254A-512) and SHV(jack)-banana adapter (N1254A-513) for connection.





N1265A Opt 013



1 2

5 6

43

Internal connection1: Collector/Drain Force2: Collector/Drain Sense3: Emitter/Source Force4: Emitter/Source Sense5: Base/Gate Force6: Base/Gate Sense

Maximum voltage: 3000 VMaximum current: A-Force: 500 A pulse, 39 A dcA-Sense: 40 A pulse, 2 A dcB-Force: 500 A pulse, 39 A dcB-Sense: 40 A pulse, 2 A dcC-Force: 40 A pulse, 2 A dcC-Sense: 40 A pulse, 2 A dc

A

B C












Gate Charge Socket Module (N1265A-014)

This socket adapter is designed for performing the gate charge measurement.

The B1513A HVSMU cannot be used for the gate charge measurement and must be upgrade to the B1513B or later version.



2. Connect wires between the socket module terminals and the fixture output terminals. You can use the following wires supplied with the socket module.

• N1254A-522: high current wire (yellow), 2 ea.

• N1254A-508: long wire (red), 2 ea.

• N1254A-509: long wire (black), 2 ea.

• N1265-61751: short wire (red), 2 ea.

• N1265-61752: short wire (black), 2 ea.


Figure 3-11 and Figure 3-12 show connection examples.

3. Set the current control device on the left socket or connect the load resistor between the studs for the resistor.

The current control device must be an extra 3-pin inline package device which is expected to have the same characteristics as DUT. If the device is not available, use a load resistor. The resistor must satisfy the following specifications.

Resistance = Vr/Ir (Vr: rated voltage, Ir: rated current)

Peak power Vr Ir 1 ms

4. Set your DUT on the right socket.





Figure 3-10 Gate Charge Socket Module

Figure 3-11 Connection Example for High Current Gate Charge Measurement

Figure 3-12 Connection Example for High Voltage Gate Charge Measurement


N1259A Opt 013



1 2

5 6

43

Gate DUT High: Max. 30 V / 1 A Low: Max. 10 V / 1 ASelector Out Force High: Max. 3000 V / 500 A Low: Max. 10 V / 500 ASelector Out Sense High: Max. 3000 V /20 mA Low: Max. 10 V / 20 mASMU Current Control High: Max. 30 V / 1A floating 3000 V Low: Max. 10 V / 1A floating 3000 V

A

B C



Blank Silicon Plate (N1265A-002)

This is an insulation board used for placing a DUT. To use this board, see the following simple instruction.

1. Prepare a DUT and cable or wire, adequate length and quantity, for making connections. The following accessories are available.

• N1254A-520 UHV/SHV to no connector cables for UHV High/Low, see Figure 3-13 for connection. The cables need adapters or soldering to connect DUT.

• N1254A-522 banana-banana wire (yellow) or N1254A-523 banana to no connector wire (yellow) for Selector Output High/Low Force

• N1254A-508 or 509 connection wire for Selector Output High/Low Sense, Gate, SMU, and chassis

• N1254A-512 SHV cable and N1254A-513 adapter for capacitance measurement (Bias Tee terminals)

• N1254A-510 dolphin clip adapter or N1254A-511 cable lug adapter

2. Attach the blank silicon plate to the test fixture.

3. Connect cable/wire between the DUT and the fixture output terminals.












4. Make sure the DUT location. The DUT must be placed on the blank silicon plate properly.

Make enough space between the cable ends, also between the high side cable end and the shield/chassis, for example, about 1 mm for maximum 200 V output, 6 mm for 3000 V, and 32 mm for 10 kV, to prevent discharge and any accident. Also the creepage distance must be more than 100 mm for 10 kV.

5. Close the fixture cover before starting measurement.



Figure 3-13 Space around Cable End

Universal R-Box (N1265A-035)This is a blank box, kind of a do-it-yourself kit for installing a resistor you want. Generally, inserting a resister between SMU and DUT is effective for preventing SMU from oscillation. You can insert your desired resistor by using this box. This box is designed for using the MCSMU. See Figure 3-14 for connection example.

NOTE To install your desired resistor in the universal R-box, see "To Use Universal R-Box".

The Kelvin connection is effective up to the R-box input. So the voltage drop caused by the series resistor must be subtracted from the measurement result as following.


where,

Vdut: Voltage after correction

Vout: Source output voltage

Rs: Resistance of the series resistor

Imeas: Measurement current

Figure 3-14 Series Resistor Connection Example

To Use Universal R-Box

To install your desired resistor, see the following simple instruction.

• Required parts:

To UHVU High To UHVU Low

DUT

Shield

Signal line

InsulatorSHV CableUHV Cable

Insulator

¡32 mm for 10 kV¡100 mm for 10 kV

Force

Guard

Force

Guard

Force

Guard

Force

Guard

Force

Guard

Force

Guard


±200 V Max 1 ASMU SMU

±200 V Max 2 Adc 40 A Pulse

Force

High

Low

High

Low

High

Low

High

Low


±3 kV Max ±3 kV MaxSelector Output

LowHigh

1 2


Bias Tee

High

Low

±10 kV MaxUHV

1 2 3

Gate

Attach N1265A-035 R-box.

Use N1254A-508/509 wire.

Use N1254A-522 wire for High/Low Force.

High

Low

Base: SMU1 High (MCSMU)

Collector: Selector Output High Force and Sense

Emitter: Selector Output Low Force and Sense

and SMU1 Low (MCSMU)



wire, adequate rating, length, and quantity



label, for noting resistance value

• Instruction:

1. Remove the cover of the universal R-box.

2. Solder the resistor and wire as shown below.

To prevent discharge and any accident, make enough space between the resistor leads and the shield or chassis. For example, make space of about 1 mm from the leads for maximum 200 V output.

Case 1: installing a series resistor on High, see Figure 3-15 on page 25.

• Connect a wire between Low Force and Low.

• Connect the resistor between High Force and High.

Case 2: installing a parallel resistor between High and Low


• Connect a wire between High Force and High.

• Connect the resistor between High Force and Low Force.

Case 3: installing a series resistor on High and a parallel resistor between High and Low


• Connect the parallel resistor between High and Low.

• Connect the series resistor between High Force and High.

Case 4: installing a series resistor on High and a parallel resistor between High Force and Low Force


• Connect the parallel resistor between High Force and Low Force.

• Connect the series resistor between High Force and High.







Figure 3-15 To Install Resistor in the N1265A-035 Universal R-Box, Connection for Case 1

Protection Adapter (N1265A-040)

This is the adapter for protecting SMU from ultra high voltage.

If a SMU is used for the gate drive when performing the ultra high voltage measurement using UHVU, this adapter must be connected to the SMU terminals for preventing SMU from damage. See Figure 3-6 for connection example.

This adapter is designed for using the MCSMU.

Container (N1265A-045)This container can accommodate protection adapters and bias-tee which are used with the N1265A to make the measurement environment clean and safe.

Maximum superimposed load is 50 kg. The N1265A and the N1266A can be put on the top of the container.

Prober System Cable (N1254A-524)This is the cable for extending the N1265A’s Selector Output and Gate terminals to a prober station. See "To Connect Ultra High Current Expander" on page 5-36 for more information.

CAUTION Do not apply voltage/current over the maximum limit of the cable. See Table 5-28.

High ForceLow Force

High SenseLow SenseHigh

Low


4 N1272A and N1273A Connection Guide

N1272A and N1273A Connection Guide

This chapter describes the required information for connecting Keysight B1505A, N1272A, N1273A, and a device under test (DUT).



The N1273A capacitance test fixture is a test fixture used for capacitance measurements of packaged devices. The fixture can be connected to GNDU, MFCMU, HVSMU, and MPSMU via the N1272A device capacitance selector.

The N1272A selector is connected between the mainframe and the test fixture. And it is used for switching the IV measurement and the CV measurement, and has a built-in GNDU protection adapter and a built-in MFCMU protection adapter.

General specifications of the N1272A/N1273A are listed below.

N1272A selector:


• Weight: 9.4 kg

N1273A fixture:


• Weight: 4.9 kg


WARNING There are potentially hazardous voltages of up to ± 3000 V (HVSMU) or ± 100 V (MPSMU) at the Force, Guard, and Sense terminals. To prevent electrical shock, do not expose these lines.


WARNING The B1505A is heavy and requires a two person lift.


CAUTION Never connect the Guard terminal to any output, including circuit common, chassis ground, or any other guard terminal. Connecting anything may damage the module.



N1272A and N1273A Connection GuideInput Connection

Input ConnectionPrepare the required cables listed in Table 4-1 and connect them between the B1505A terminals and the relative N1273A terminals through the N1272A selector.


To Connect Interlock CircuitThe B1505A provides the Interlock connector to prevent you from receiving an electrical shock from high voltage (over ± 42 V). If the interlock circuit is open, the B1505A cannot apply high voltage over ± 42 V. When using the N1273A test fixture, connect the 16493J interlock cable between the Interlock connectors of the B1505A and the N1272A selector, and the composite cable between the N1272A and the N1273A. The composite cable is furnished with the N1273A.

N1272A Device Capacitance SelectorThe N1272A is used to switch the measurement resource connected to the device under test (DUT), for capacitance testing (input/output capacitance, feedback capacitance, and gate resistance). The measurement resource will be HVSMU, MPSMU and MFCMU.

NOTE Controlling selector input-to-output path

The configuration and the default I/O path of the selector are set by using the Device Capacitance Selector tab screen of the Configuration window of the EasyEXPERT software. The connection path from the input port to the output port is controlled by each test setup. And the selector switching status is indicated by the status indicator mounted on the front panel.

!

!

! Interlock



Figure 4-2 Selector Simplified Internal Connections


1. Digital I/O connectors

2. Input

a. MFCMU input connectors Hcur, Hpot, Lpot, and Lcur

b. SMU input connectors

c. GNDU input connector

d. HVSMU input connector

e. Interlock input connector

3. Output

a. Collector/Drain output connector

b. Base/Gate output connector

c. Emitter/Source output connector

d. AC/DC Guard output connector

e. HVSMU output connector

f. Interlock output connector

g. Frame ground terminal

4. LINE input receptacle and power switch

Force

Guard

CircuitCommon

HVSMU

To avoid electrical shock and instrument damage,do not connect/disconnect the cables during operation.

Output Input

±3 k V Max

Lcur Hcur

Lpot Hpot

Force

Sense

±3 k V Max±3 k Max ±3 k V Max

±100 V Max

±100 V Max

±3 k V Max ±25 V Max ±100 V Max

~ LINE100-240 V ~

50/60 Hz70 VA Max

Input Output

Digital I/O

HVSMU

Base/GateMFCMU SMU

GNDU

Collector/Drain

AC/DC GuardEmitter/Source

Interlock Interlock

MSIP-REM-ATI-1H-B1507A

T2 T1

T3 T4

N1272 -61001

2ba c d1e

3a b

c d

ef

g

4



Table 4-1 To Connect between B1505A and N1273A via N1272A


B1505A terminals Required cables N1272A input

terminals

Interlock 16493J Interlock cable, 3 m or 1.5 m, 1 ea. Interlock



MPSMU Force 16494A Triaxial cable, 3 m or 1.5 m, 1 ea., for the non-Kelvin connection, connect it between the Force connectors.

For the Kelvin connection, prepare additional one more cable and connect it between the Sense connectors.

SMU Force

Sense Sense

MFCMU Hpot N1300A CMU cable, 1.5 m, 1 ea.


MFCMU Hpot

Hcur Hcur

Lcur Lcur

Lpot Lpot

Digital I/O B1506-61780 Digital I/O connection cable, 1 ea.This cable is supplied with the N1272A.

Digital I/O Input


N1272A output terminals

Required cables N1273A terminals

Interlock Composite cable assembly, 0.4 m, 1 ea.

This cable is supplied with the N1273A.

Interlock

Collector/Drain Collector/Drain

Base/Gate Base/Gate

Emitter/Source Emitter/Source

AC/DC Guard AC/DC Guard

Chassis Common Chassis Common

HVSMU 16493T HVSMU cable, 3 m or 1.5 m, 1 ea.1

1. If the N1258A module selector, N1259A test fixture, or N1265A expander/fixture is used, connect to the HVSMU Input of the equipment.

Digital I/O Output 16493G-001 Digital I/O connection cable, 1.5 m, 1 ea.2

2. If the N1258A module selector, N1259A test fixture, or N1265A expander/fixture is used, connect to the Digital I/O Input of the equipment.






The following figures show two connection examples with using the N1272A selector and the N1273A fixture. For the color-codes of cables and connectors in the figures, see Figure 7-1 on page 2.

Figure 4-4 shows the connection example effective for minimizing the connection changes between the I-V measurement using the N1259A fixture and the capacitance measurement using the N1273A fixture.

Figure 4-5 shows the connection example effective for minimizing the connection changes between the I-V measurement using the N1265A fixture and the capacitance measurement using the N1273A fixture.

WARNING If the N1273A is used with the N1259A/N1265A fixture, you need to change the connection of the interlock and GNDU cables each time you change the fixture.

Figure 4-4 Connection Example using N1272A, N1259A, and N1273A

HV SMU

GNDU

HCSMU 1

HCSMU 2

Digital I/O

SMU 1

Interlock

N1259A-300

For Capacitance Measurement

For I-V Measurement

B1507-61720 (Included in the N1273A)

HVSMU

MPSMUMFCMU

HCSMU

GNDU

FS

FS

B1505A16493T (Included in the HVSMU)

16494A (Included in the MPSMU)

16493L (Included in the B1505A)

16493G Digital I/O cable (Included in the N1259A-300)

16493J (Included in the B1505A)

N1272A

GNDU

HVSMU

FS MPSMU

16493S (Included in the HCSMU)

MFCMUHcurHpotLpotLcur

HVSMU

Base/GateEmi�er/Source

Collector/Drain

AC/DC Guard Chassis GND

InterlockInterlock

Connect for I-V Measurement

16493T (Included in the N1272A)Digital I/O

Input Output

B1506-61780 Digital I/O cable (Included in the N1272A)

N1300A-001

16494A (Included in the MPSMU)MPSMU F

S

MCSMU FS


Collector/Drain

AC/DC GuardChassis GND

Interlock N1273A

16494A (Included in the MCSMU)

N1254A-104 TRX(J)-BNC(P) adapter



Figure 4-5 Connection Example using N1272A, N1265A, and N1273A

HV SMU

GNDU

UHC Input

Interlock

N1265A

V Control

I Control

Gate FGate SAUX FAUX S

Digital I/OInput Output

For Capacitance Measurement

For I-V Measurement

B1507-61720 (Included in the N1273A)

HVSMU

MPSMUMFCMU

MCSMU

GNDU

FS

FS




16493G Digital I/O cable (Included in the N1265A)


N1272A

GNDU

HVSMU

FS MPSMU

HcurHpotLpotLcur

MFCMU

HVSMU


Collector/Drain

AC/DC Guard Chassis GND

InterlockInterlock


16493T (Included in the N1272A)Digital I/O

Input Output


N1300A-001


MCSMU FS

MCSMU FS


Collector/Drain

AC/DC GuardChassis GND

Interlock N1273A

MCSMU FS


N1272A and N1273A Connection GuideOutput Connection


• "3-pin Inline Package Socket Module" on page 4-9

• "N1273A-011 Universal Socket Module" on page 4-11

• "N1273A-013 Curve Tracer Test Adapter Socket Module" on page 4-14

To Connect DUT


Press the B1505A front panel Stop key to set the output off. And confirm that the B1505A front panel High Voltage indicator is not lit.

WARNING Do not connect or disconnect your DUT while the B1505A is applying voltage or current. Otherwise, the DUT may be damaged.

Do not touch the DUT soon after measurement. Have enough time for discharge and radiation.






For using the 3-pin inline package socket module, also see "3-pin Inline Package Socket Module" on page 4-9.

For using the universal socket module, also see "N1273A-011 Universal Socket Module" on page 4-11.

For using the curve tracer test adapter socket module, also see "N1273A-013 Curve Tracer Test Adapter Socket Module" on page 4-14.







1. Emitter/Source

2. Collector/Drain

3. Base/Gate

4. AC/DC Guard

5. Chassis Common

3-pin Inline Package Socket ModuleThis module is furnished with the N1273A and provides a socket used for connecting three-terminal inline packaged device.


• Requirements:

• 3-pin inline package socket module

• DUT

• Instruction:

1. If the earthing wire is not connected to the socket module, connect it.

2. Attach the socket module directly to the Base/Gate, Collector/Drain, and Emitter/Source terminals of the test fixture.

3. Connect the earthing wire of the socket module to the chassis common terminal.

4. Set your DUT on the socket.

4 3 2 1 5

!




WARNING Hazardous voltage, instrument maximum output voltage may appear at the measurement terminals if the fixture cover is closed.

WARNING Open the Guard terminal of the test fixture. Do not connect anything to it.

NOTE A short plate is furnished with the socket module. It is used for performing the short correction before the capacitance measurement. Set it on the socket before the short correction and remove it after the correction is completed.

Socket module

Test fixture

DUT

Chassiscommon



N1273A-011 Universal Socket Module

This is a blank module, kind of a do-it-yourself kit for supporting variety of packaged devices. This module can be used by mounting your desired socket or packaged device.


To use this module, see the following simple instruction. For the dimensions and screw holes of a blank board, see Figure 4-8. You can use their handmade socket modules with the same manner as the 3-pin Inline Package Socket Module. See "3-pin Inline Package Socket Module" on page 4-9.

• Requirements:

• Blank board suitable for mounting the socket or packaged device

• Screws for fixing the blank board, supplied with the socket module

• Wire (2 m, 1 ea.) supplied with the socket module

• Lug terminals (14 ea.) supplied with the socket module

• Socket, if you use, and packaged device under test (DUT)

• T-10 and T-15 Torx screwdrivers

• 9 mm wrench

• Caulking tool for lug terminals, 2.0sq

Prepare a socket for your test devices, a blank board, tools for mounting the socket, screws and nut for socket terminals, and so on separately.

Dummy board or Blank board

Lug terminals

Wire

Universal socket module (blank module)



Figure 4-8 Dimensions and Screw Holes of Blank Board

• Instruction:

1. Remove the dummy board from the blank module using a T15 Torx screwdriver.

2. Make a socket board by processing a blank board or the dummy board and mount your device socket onto the board.

WARNING Make enough space between the socket terminal and the shield/chassis, for example, about 1 mm for maximum 200 V output and 6 mm for 3000 V, to prevent discharge and any accident.

3. Fix the socket board to the blank module using the screws and tooth washers.

4. Remove the bottom cover of the blank module using a T10 Torx screwdriver.

5. Assemble cables using the wire and lug terminals.

Cut the appropriate length of the wire, tear off the coating of wire ends, and then secure the lug terminals to the wire ends using a caulking tool.

6. Connect one end of all cables to the upside terminals on the blank module.

Remove screws and tooth washers from the terminals, and fix the lug terminal of the cable end in order of a washer, a lug terminal, a tooth washer, and a screw. When fixing the lug terminal, secure a screw by a T15 Torx screwdriver with fixing the bottom nut by a 9 mm wrench. And, pass the cables through the opening of the blank module.



The following shows the positions of the upside terminals in the blank module.

7. Connect the other end of the cables to the terminals on the back side of the socket board.

If a socket terminal does not have a screw or nut for securing a lug terminal of the cable, prepare it. Ensure the terminal position of the blank module and the socket board, and connect the cables correctly.

8. Fix the bottom cover to the blank module using a T10 Torx screwdriver.

CAUTION Do not apply voltage/current over the maximum limit of the socket module.Terminal rated voltage: 3000 Vd cTerminal rated current: 120 mA

Collector/Drain

Base/Gate Emitter/Source

AC/DC Guard

Blank Module(Wiring side view)



N1273A-013 Curve Tracer Test Adapter Socket Module

This module provides a socket available for connecting a test adapter designed for connecting to Tektronix 370B/371B curve tracers. The socket module internal connection is shown in Figure 4-9.


• Instruction:


2. Connect your test adapter to the socket.Socket terminal: 4mm pin receptacle



CAUTION Do not apply voltage/current over the maximum limit of the socket module.Maximum voltage: 3000 VMaximum current: 100 mA


1 2

3 4

5 6

Base / Gate

Collector / DrainEmitter / SourceAC/DC Guard

Internal connectionsSocket Terminal N1273A Output 1: Collector/Drain Force Collector/Drain2: Collector/Drain Sense No Connection3: Emitter/Source Force Emitter/Source4: Emitter/Source Sense No Connection5: Base/Gate Force Base/Gate6: Base/Gate Sense No Connection



Accessories for Connecting a DUT

Use the test lead kit furnished with the N1273A to connect a device that cannot be connected to any socket module.

See the following simple instruction.

• Requirements:

• Test Leads and Connection Kit for Capacitance Test (N1254A-556), four 20 cm alligator clip - lug cables, four banana plugs, four nuts, and four spare clips

• DUT

• Instruction:

1. Put your DUT on the blank silicon plate.

2. Connect your DUT to the measurement terminals of the test fixture by using the test leads.


WARNING Hazardous voltage, instrument maximum output voltage may appear at the measurement terminals if the fixture cover is closed.

WARNING Open the AC/DC Guard terminal to avoid electrical shock, instrument damage, or DUT damage. Do not connect anything to this terminal which may have the same potential as the Collector/Drain terminal.



5 Connection Guide for Wafer Prober and Your Own Test Fixture

Connection Guide for Wafer Prober and Your Own Test Fixture

This chapter describes how to make the measurement environment without using Keysight N1259A or N1265A test fixture.

For extending the measurement terminals to a device under test (DUT), you need to prepare connection cables, accessories, and your DUT interface such as wafer prober and your own test fixture. Also you need to install the interlock circuit and make the openings for the accessories on the shielding box of your DUT interface.

• "Connection Overview"

• "To Connect High Voltage R-Box"

• "To Connect HCSMU Adapter"

• "To Connect Dual HCSMU Adapter"

• "To Connect Protection Adapter"

• "To Connect High Voltage Bias Tee"

• "To Connect Module Selector"

• "To Connect HVSMU/HCSMU Fast Switch"

• "To Connect HVSMU Current Expander"

• "To Connect Ultra High Current Expander"

• "To Connect Ultra High Voltage Expander"

• "To Connect Device Capacitance Selector"

• "To Connect Gate Charge Adapter"

• "To Install an Interlock Circuit"

• "About Cable Connections"

For the dimensions of accessories, see Chapter 6,"Accessory Dimensions".


WARNING There are potentially hazardous voltages of up to ± 10 kV (UHVU), ± 3000 V (HVSMU), ± 2200 V (HVMCU), ± 200 V (HPSMU), or ± 100 V (MPSMU) at the High, Force, Guard, and Sense terminals. To prevent electrical shock, do not expose these lines.

WARNING To prevent electrical shock during use, install an interlock circuit (see p. 5-47) and connect the Interlock cable (see p. 5-49).

WARNING The B1505A, the N1265A ultra high current expander/fixture, and the N1268A ultra high voltage expander are heavy and require a two person lift.

CAUTION Never connect the Guard terminal to any output, including circuit common, chassis ground, or any other guard terminal. Connecting anything may damage the instrument.


Connection Guide for Wafer Prober and Your Own Test Fixture

NOTE To install the accessories, see Chapter 6,"Accessory Dimensions" and prepare the appropriate space in the shielding box of your DUT interface or make the openings for the accessories.

NOTE Connecting the 16493G Digital I/O Connection Cable

If multiple accessories are used, the accessories must be connected together by using the Digital I/O cable. Then the cables must be connected from the B1505A to the accessories in the following sequence.

N1265A Ultra High Current Expander / Fixture, if used

N1266A HVSMU Current Expander, if used

N1268A Ultra High Current Expander, N1258A Module Selector, or N1259A test fixture

NOTE Using Universal R-box

The universal R-box is a blank box, kind of a do-it-yourself kit for installing a resistor you want.


After installing a resistor, reattach the cover. Do not use the universal R-box under the condition that the cover is removed.

NOTE Connecting or disconnecting the N1254A-524 Prober System Cable

The prober system cable is used to extend the UHCU (ultra high current unit) output to a probe station.

You need to prepare the box wrench (M5 hex) to connect or disconnect the system cable.

If the system cable is used, the 16493J interlock cable from the B1505A or the N1268A must be connected to the interlock circuit installed in the shielding box of the probe station. Do not connect the interlock cable to the N1265A.


Connection Guide for Wafer Prober and Your Own Test FixtureConnection Overview

Connection OverviewConnection image and requirements are shown in Table 5-1. Find and prepare required accessories and cables, and install and connect them to make the measurement environment. All available accessories are listed in Table 5-7.

CAUTION The GNDU can sink current of up to 4.2 A. Use 16493L GNDU cable to connect the GNDU to the N1261A-002/004.



NOTE Using Dual HCSMU (DHCSMU)

DHCSMU can be configured by two HCSMU modules installed in one B1505A and connected to the 16493S-020 Dual HCSMU Kelvin combination adapter or the 16493S-021 Dual HCSMU combination adapter. See "To Connect Dual HCSMU Adapter" for connection.


NOTE The N1258A module selector has built-in GNDU protection adapter, built-in HPSMU protection adapter, and built-in HCSMU Kelvin adapter. If you use the selector, you do not need the N1261A and 16493S-010/011 for the modules connected to it. See Table 5-3.

CAUTION Never connect the UHVU High, HVMCU High, and HVSMU Force and Guard terminals to any output, including circuit common, chassis ground, or any other measurement resource such as SMU. Connecting other measurement resource may damage the connected one.




Table 5-1 Connection Image and Requirements

B1505A terminals

Required accessories and cablesConnection inside of

the shielding box

Interlock 16493J Interlock cable, 3 m or 1.5 m, 1 ea.

1252-1419 Interlock connector, 1 ea.

Interlock circuit

HVSMU

Also see Table 5-2 for HVMCU.

16493T HVSMU cable, 3 m or 1.5 m, 1 ea.

N1254A-501 HV(jack)-HV(jack) adapter, 1 ea.

N1262A-001/002 R-box and 16493T cable, optional

HV(plug) cable, 1 ea.

or SHV(plug) cable, 1 ea. for N1262A-001/002

MFCMU Hpot N1260A High voltage bias-T, 1ea.

N1300A CMU cable, 3 m or 1.5 m, 1 ea.

16493T HVSMU cable, 3 m or 1.5 m, 1 ea.

SHV(plug) cable, 3 ea.

High

Hcur Low

Lcur AC Guard

Lpot

HVSMU Force

HPSMU or

MPSMU

Force N1261A-001/003 HPSMU protection adapter, 1 ea.

16494A Triaxial cable, 3 m or 1.5 m, 2 ea. or 16493K Kelvin triaxial cable, 3 m or 1.5 m, 1 ea.

N1262A-010/011 R-box and 16494A/16493T cable, optional for non-Kelvin connection

Triaxial(m) cable, 2 ea. for N1261A-001 or

HV(plug) cable, 2 ea. for N1261A-003 or

Triaxial(m) cable, 1 ea. for N1262A-010 or

SHV(plug) cable, 1 ea. for N1262A-011

Sense

GNDU

Also see Table 5-2 for HVMCU.

N1261A-002/004 GNDU protection adapter, 1 ea.

16493L GNDU cable, 3 m or 1.5 m, 1 ea.

BNC(m) cable, 2 ea. for N1261A-002 or


HCSMU Force 16493S-010 HCSMU Kelvin adapter, 1 ea. or 16493S-011 HCSMU non-Kelvin adapter, 1 ea.

16493S HCSMU cable, 3 m or 1.5 m, 1 ea.

BNC(m) cable, 4 ea. for 16493S-010 or

BNC(m) cable, 2 ea. for 16493S-011

Sense

Shielding box

N1262A-010/011

DUT interface

N1260A

N1261A-002/004

N1261A-001/003

16493S-010/011

Interlock circuit

N1254A, 16493U, or other cable

N1262A-001/002

16493S

16493L

16494A/16493K

N1300A, 16493TN1258A/N1267A

*3

*216493J

16493T

N1266A

*1

*1: 16494A, 4 ea., 16493L, 16493T, and 16493G to configure HVMCU*2: 1252-1419*3: N1254A-501

B1505A



Also see the following tables.

• Table 5-2, "To Configure HVMCU by Using N1266A."

• Table 5-3, "To Connect N1258A Module Selector."

• Table 5-4, "To Connect N1267A Fast Switch."

• Table 5-5, "To Make UHC Measurement Path."

• Table 5-6, "To Make UHV Measurement Path."

Table 5-2 To Configure HVMCU by Using N1266A


MCSMU1








Digital I/O 16493G-001 Digital I/O connection cable, 1.5 m, 1 ea. Digital I/O Input

N1266A terminals Required accessories and cables Connection inside of

the shielding box

Output High 16493T HVSMU cable, 3 m or 1.5 m, 1 ea.

N1254A-501 HV(jack)-HV(jack) adapter, 1 ea.

N1262A-001/002 R-box and 16493T cable, optional

HV(plug) cable, 1 ea.

or SHV(plug) cable, 1 ea. for N1262A-001/002

Low N1261A-002/004 GNDU protection adapter, 1 ea.

16493L GNDU cable, 3 m or 1.5 m, 1 ea.

BNC(m) cable, 2 ea. for N1261A-002 or





Table 5-3 To Connect N1258A Module Selector


HPSMU or

MPSMU



Use 16493K cable if the High output terminals are connected to the prober chuck.

HPSMU Force

Sense Sense

HCSMU or

DHCSMU

Force 16493S HCSMU cable, 3 m or 1.5 m, 1 ea. for HCSMU

16493S HCSMU cable, 3 m or 1.5 m, 2 ea. and 16493S-021 Dual HCSMU adapter, 1 ea. for DHCSMU

HCSMU Force

Sense Sense

HVSMU Force 16493T HVSMU cable, 3 m or 1.5 m, 1 ea. HVMCU can be used instead of HVSMU. See Table 5-2.

HVSMU

GNDU 16493L GNDU cable, 3 m or 1.5 m, 1 ea. Also see Table 5-2. GNDU

Digital I/O 16493G Digital I/O connection cable, 3 m or 1.5 m, 1 ea. Digital I/O

N1258A terminals Required cables/Description Connect to

Low Force Coaxial cable with BNC(m) connector. N1254A-503 can be used. DUT low terminal

(ex: source)1

1. Non-Kelvin connection is not allowed. GNDU Force and Sense are internally connected to Low Sense. See Table 5-22 on page 5-31.

Sense Coaxial cable with BNC(m) connector. N1254A-503 can be used.

High Force Coaxial cable with HV(plug) connector. N1254A-506 can be used. Use coaxial cable to minimize affect of inductance.

DUT high terminal

(ex: drain)1

Sense Triaxial cable with HV(plug) connector. N1254A-505 can be used.

LINE Power cable, 1 ea., for connecting to power line site AC power

Shielding boxB 1505A

DUT interface

N1258A

Interlock circuit

16493S16493T

SenseForce

Low

High

Sense

Force *2*1

*4

*1: 1252-1419*2: N1254A-506 or other cable, 1 ea.*3: N1254A-505 or other cable, 1 ea.*4: N1254A-503 or other cable, 2 ea.

16493G

16494A/16493K

16493L

*3

16493J

N1266A

*5

*5: 16494A, 4 ea., 16493L, 16493T, and 16493G to configure HVMCU.



Table 5-4 To Connect N1267A Fast Switch


MCSMU Force 16494A Triaxial cable, 3 m or 1.5 m, 1 ea. MCSMU Force


HCSMU Force 16493S HCSMU cable, 3 m or 1.5 m, 1 ea. for HCSMU HCSMU Force

Sense Sense




Low Force Coaxial cable with BNC(m) connector. N1254A-503 can be used. DUT low terminal (ex: source)


DUT high terminal (ex: drain)


DUT interface N1267A

Interlock circuit

16493T16493L

Low Force

High Force *2

*1

*3

*1: 1252-1419*2: N1254A-506 or other cable, 1 ea.*3: N1254A-503 or other cable, 2 ea.

16493S16494A

16493J

N1266A

*5




Table 5-5 To Make UHC Measurement Path


MCSMU1


Force 16494A Triaxial cable, 1.5 m, 1 ea. UHC Input

I Control

Force

Sense 16494A Triaxial cable, 1.5 m, 1 ea. Sense

MCSMU1 Force 16494A Triaxial cable, 1.5 m, 1 ea. UHC Input

V Control

Force


MCSMU1 Force 16494A Triaxial cable, 1.5 m, 1 ea. Gate Force


GNDU 16493L GNDU cable, 1.5 m, 1 ea. Also see Table 5-2. GNDU

Digital I/O 16493G Digital I/O cable, 1.5 m, 1 ea. Also see Table 5-2. Digital I/O Input

Terminals Required cables/Description Connect to

Low Force Cable with banana connector. N1254A-523 can be used. DUT low terminal

(ex: source)2

2. Non-Kelvin connection is not allowed. GNDU Sense is internally connected to Low Sense.

Low Sense Coaxial cable with BNC(m) connector. N1254A-503 can be used.

High Force Cable with banana connector. N1254A-523 can be used. DUT high terminal

(ex: drain)2High Sense Triaxial cable with HV(plug) connector. N1254A-505 can be used.

Gate Coaxial cable with BNC(m) connector. N1254A-503 can be used. DUT gate or base


Earth Wire, 1 ea., for earthing site ground

B1505A Interlock 16493J Interlock cable, 3 m or 1.5 m, 1 ea., and 1252-1419 Interlock connector, 1 ea.

Interlock circuit

Shielding box

DUT interface

N1254A-524

Interlock circuit

SenseForceLow

HighSense

Force *2

*1

*2

*3

16493J

N1265A

*1: 1252-1419*2: N1254A-523*3: N1254A-506*4: N1254A-503*5: 16494A, 6 ea., 16493L, and 16493G(needs more cables for using HVSMU/HVMCU or HP/MPSMU through selector of N1265A .)

*5B1505A

*4

Gate *4

N1266A*6




Table 5-6 To Make UHV Measurement Path

B1505A terminals Required cablesN1268A/N1269A

terminals

Interlock 16493J Interlock cable, 1.5 m, 1 ea. Interlock Input

MCSMU Force 16494A Triaxial cable, 1.5 m, 1 ea. I Control Force


MCSMU1


Force 16494A Triaxial cable, 1.5 m, 1 ea. V Control Force


Digital I/O 16493G Digital I/O connection cable, 1.5 m, 1 ea. Digital I/O

MCSMU Force 16494A Triaxial cable, 1.5 m, 1 ea. N1269A Gate

Force


MCSMU Force 16494A Triaxial cable, 1.5 m, 1 ea. N1269A Chuck

Force


Terminals Required cables/Description Connect to

Interlock Output 16493J Interlock cable, 3 m or 1.5 m, 1 ea., and 1252-1419 Interlock connector, 1 ea.

Interlock circuit

Output Low SHV cable of 16494V, 3 m or 1.5 m, 1 ea. N1269A UHV Low

Output High UHV cable of 16494V, 3 m or 1.5 m, 1 ea., UHV adapter of N1254A-521, 1 ea., and UHV cable of N1254A-520



Earth Wire, 1 ea., for earthing site ground

N1269A Source SHV cable of N1254A-520 DUT low terminal (ex: source)

N1269A Gate Coaxial cable with SHV connector or SHV cable of N1254A-520 DUT gate or base

N1269A Chuck Coaxial cable with SHV connector or SHV cable of N1254A-520 DUT chuck

Shielding box

DUT interface

N1269A

Interlock circuit

16494A

Source/Emitter

Chuck

Gate/Base

*2

*1

*4

*1: 1252-1419*2: UHV adapter of N1254A-521*3: UHV cable of N1254A-520*4: SHV cable of N1254A-520*5: 16494A, 4 ea., 16493J, and 16493G

*3

16493J*5

16493V (UHV)Drain/Collector

B1505A

N1268A

*4

*4

16493V (SHV)



Table 5-7 Available Accessories

Model/Option Description Remarks

16493S-010 HCSMU Kelvin adapter For converting HCSMU connectors to BNC(f) connectors.

16493S-011 HCSMU non-Kelvin adapter

16493S-020 Dual HCSMU Kelvin combination adapter For configuring DHCSMU.

16493S-021 Dual HCSMU combination adapter with cable

N1258A Module selector For switching HVSMU, HCSMU, and HP/MPSMU connected to DUT automatically.

N1260A High voltage bias-T For performing capacitance or impedance measurements using DC bias of up to ± 3000 V.

N1261A-001 HPSMU protection adapter, Triaxial(f)-Triaxial(f) For protecting HP/MPSMU from high voltage.

N1261A-003 HPSMU protection adapter, Triaxial(f)-HV(jack)

N1261A-002 GNDU protection adapter, Triaxial(f)-BNC(f) For protecting GNDU from high voltage.

N1261A-004 GNDU protection adapter, Triaxial(f)-SHV(jack)

N1262A-001 1 M (± 3000 V) R-box, HV(jack)-SHV(jack) For reducing damage of DUT or preventing SMU from oscillation.

N1262A-002 100 k (± 3000 V) R-box, HV(jack)-SHV(jack)

N1262A-010 1 k (± 200 V) R-box, Triaxial(f)-Triaxial(f)

N1262A-011 1 k (± 3000 V) R-box, HV(jack)-SHV(jack)

N1262A-020 Universal R-box, Triaxial(f)-Triaxial(f)

N1262A-021 Universal R-box, HV(jack)-SHV(jack)

N1262A-023 Universal R-box, UHV(jack)-UHV(jack), with UHV(plug)-UHV(plug) cable, 1.5 m

N1262A-036 50 termination adapter

N1265A Ultra high current expander/fixture For supporting 500 A

N1265A-015 Built-in 1500 A ultra high current expander For supporting 1500 A

N1266A HVSMU current expander For expanding HVSMU current to 2.5 A

N1267A HVSMU/HCSMU fast switch For switching HVSMU and HCSMU

N1268A Ultra high voltage expander For supporting 10 kV

N1269A Ultra high voltage connection adapter For connecting UHVU Low

N1272A Device capacitance selector For switching the I-V measurement path and capacitance measurement path automatically.



N1274A On-wafer gate charge measurement adapter/selector for 20 A/3 kV

For on-wafer gate charge measurements using the HCSMU (max. 20 A) and HVSMU (max. 3 kV).

N1275A On-Wafer gate charge measurement adapter for N1265A

For on-wafer gate charge measurements with the UHCU (max. 500 A) and HVSMU (max. 3 kV).

N1254A-103 BNC(f)-Triaxial(m) adapter, triaxial shield open For using HCSMU instead of MCSMU

N1254A-517 Triax(f)-Triax(m) adapter, shield separated

N1254A-104 BNC(m)-Triaxial(f) adapter, triaxial shield open For using MCSMU instead of HCSMU

N1254A-106 BNC(f)-Triaxial(m) adapter, triaxial guard open For changing N1262A-010 triax to BNC

N1254A-402 Interlock micro switch For making interlock circuit. See "To Install an Interlock Circuit" on page 5-47.1252-1419 Interlock connector (6 pin, female)

1450-0641 LED (VF 2.1 V @ IF = 10 mA)

N1254A-500 HV(jack) connector, panel mount, for soldering For connecting HVSMU or accessory to your DUT interface.

N1254A-501 HV(jack)-HV(jack) adapter, panel mount

N1254A-502 HV(plug) connector, panel mount, for soldering

N1254A-503 BNC(m) to no connector coaxial cable, 1.5 m For connecting accessory to your DUT interface.

N1254A-504 HV(jack) to no connector coaxial cable, 1.5 m

N1254A-505 HV(plug) to no connector triaxial cable, 1.5 m

N1254A-506 HV(plug) to no connector coaxial cable, 1.5 m

N1254A-507 HV(plug)-HV(plug) coaxial cable, 1.5 m

N1254A-516 BNC(f)-(f)-(f) adapter

N1254A-518 SHV(plug)-SHV(plug) coaxial cable, 1.5 m For connecting N1260A to N1265A.

N1254A-520 UHV(plug) to no connector cable, 1 m and SHV(plug) to no connector cable, 1 m

For connecting UHVU to your DUT interface.

N1254A-521 UHV(jack)-UHV(jack) adapter and SHV(jack)-SHV(jack) adapter

N1254A-523 Banana to no connector wire, 1 m, 2 ea. For connecting UHCU to probe station.

N1254A-524 System cable for prober, 1.8 m




N1254A-525 SHV Cable Assy 1.5m - SHV Plug To Open-end, 1 ea.

For connecting accessory to your DUT interface.

N1254A-526 Ultra High Current Cable, 2m, No Connectors At Either End, 1 ea.

N1254A-527 PTFE Standoff, Jack, 4 ea.

N1254A-528 PTFE Standoff With Banana Plug, 4 ea.

N1254A-554 Thermocouple, Type K, 75 cm, 2 ea. For measuring temperature with N1265A.

N1254A-558 SHV cable, 3 m, 1 ea. For connecting accessory to your DUT interface.

16493U-001 BNC(m)-BNC(m) coaxial cable, 1.5 m

16493U-002 BNC(m)-BNC(m) coaxial cable, 3 m

1250-2405 BNC(m)-(f)-(f) adapter For connecting HCSMU adapter output and GNDU protection adapter output.

8120-1838 or 8120-1839

BNC(m)-BNC(m) coaxial cable, 12 inch or 24 inch



Connection Guide for Wafer Prober and Your Own Test FixtureTo Connect High Voltage R-Box

To Connect High Voltage R-BoxKeysight N1262A resistor box is used to reduce the risk of device breakdown or prevent SMU from oscillation. The N1262A should be installed in your DUT interface as shown in Table 5-1 on page 5-5.

N1262A-001: 1 M (± 3000 Vdc) resistor, HV(jack)-SHV(jack)

N1262A-002: 100 k (± 3000 Vdc) resistor, HV(jack)-SHV(jack)

N1262A-010: 1 k (± 200 Vdc) resistor, Triaxial(f)-Triaxial(f)

N1262A-011: 1 k (± 3000 Vdc) resistor, HV(jack)-SHV(jack)

N1262A-020: Universal R-box, Triaxial(f)-Triaxial(f)

N1262A-021: Universal R-box, HV(jack)-SHV(jack)

N1262A-023: Universal R-box, UHV(jack)-UHV(jack)

N1262A-036: 50 termination adapter

Universal R-box is kind of a do-it-yourself kit for installing a resistor you want. To install the resistor, see "To Use Universal R-Box" on page 5-15.

N1262A-036 termination adapter is a BNC(f)-BNC(m) adapter which contains 50 resistor between signal line and shield. If a SMU is used as the gate drive for the measurement using HVMCU, UHVU, or UHCU, the SMU may cause oscillation. Then this adapter should be connected between the gate drive output and a DUT terminal. This will be effective for preventing oscillation.

Table 5-8 To Connect N1262A Input

Connect from Required cables N1262A terminals

HVSMU Force 16493T-001 HVSMU cable, 1.5 m From HVSMU

N1261A-001 Force 16494A-001 Triaxial cable, 1.5 m, for N1262A-010 or N1262A-020

From SMU Force

N1261A-003 Force 16493T-001 HVSMU cable, 1.5 m

UHVU High UHV cable of 16493V-001 UHVU cable, 1.5 m From UHV

N 1262A O pt 001 H igh V o ltage S eries R 1M

From H VS M U S igna l

C ircu itC om m on

3kV M ax

O utput

!!3kV M ax

A g ilen t

!!M ax : 9W

N 1262A O pt 001 H igh V o ltage S eries R 1M

From H VS M U S igna l

C ircu itC om m on

S igna l

C ircu itC om m on

3kV M ax3kV M ax

O utput

!!3kV M ax

!!!3kV M ax3kV M ax

A g ilen t

!!!!!M ax : 9W



Table 5-9 To Connect N1262A Output

Voltage drop caused by the R-box must be subtracted from the measurement result as following.


where, Vdut: Voltage after correction, Vout: Source output voltage, Rs: Resistance of the series resistor, and Imeas: Measurement current

To Use Universal R-BoxTo install your desired resistor, see the following simple instruction.

•tRequired parts:

wire, adequate rating, length, and quantity



label, for noting resistance value

• Instruction:

1. Remove the cover of the universal R-box.

2. Solder the resistor and wire as shown below.

To prevent discharge and any accident, make enough space between the resistor leads and the shield or chassis. For example, make space of about 1 mm from the leads for maximum 200 V output, 6 mm for 3000 V, and 32 mm for 10 kV.

Case 1: N1262A-020/021, see Figure 5-1.

• Connect a wire between a terminal and the center conductor of its near connector.

• Connect a wire between the other terminal and the center conductor of the other connector.

• Connect the resistor between the terminals.

Options Required cables/Description Connect to

N1262A-001 Coaxial cable with SHV(plug) connector. DUT terminal (ex: drain)

N1262A-002 Coaxial cable with SHV(plug) connector.

N1262A-010 Triaxial cable with Triaxial(m) connector. DUT terminal (ex: gate)


N1262A-020 Triaxial cable with Triaxial(m) connector.


N1262A-023 Coaxial cable with UHV(plug) connector.



Case 2: N1262A-023, see Figure 5-2.

• Connect the resistor between the terminals.








Connection Guide for Wafer Prober and Your Own Test FixtureTo Connect HCSMU Adapter

To Connect HCSMU AdapterKeysight 16493S-010/011 HCSMU adapter is used to convert HCSMU connectors to BNC(f) connectors. The 16493S-010/011 should be installed near your DUT interface as shown in Table 5-1 on page 5-5.

16493S-010: Adapter for making the Kelvin connection of HCSMU path

16493S-011: Adapter for making the non-Kelvin connection of HCSMU path, available for the low current path such as the MOSFET gate terminal

Connection examples for using one HCSMU module are shown in Figure 5-3 for the Kelvin connection and in Figure 5-6 for the non-Kelvin connection. Also a connection example for using two HCSMU modules is shown in Figure 5-7.

NOTE Do not connect or put any conductor on the HCSMU Low Force and Low Sense terminals, outer conductor of the coaxial connectors. Connecting or putting conductor of circuit common, chassis ground, or any potential on causes the measurement error.

Table 5-10 To Connect 16493S-010/011 Input

Table 5-11 To Connect 16493S-010/011 Output

B1505A terminals Required cables Input terminals

HCSMU Force 16493S HCSMU cable, 3 m or 1.5 m From HCSMU

Force

Sense Sense

Output terminals Required cables/Description Connect to

Low Force Coaxial cable with BNC(m) connector. 16493U-001/002 or N1254A-503 can be used.

Low terminals must be grounded by using the GNDU. If you want to simplify the connection, connect the HCSMU adapter and the GNDU adapter as shown in Figure 5-4. It can remove the path from the GNDU adapter to the DUT interface.

DUT low terminal (ex: source)

Low Sense

High Force DUT high terminal (ex: drain)

High Sense


ForceS ense

From H C S M U

O utput

S igna l

C ircu itC om m on


A g ilent

40 V m ax


ForceS ense

From H C S M U

O utput

S igna l

C ircu itC om m on

S igna l

C ircu itC om m on


A g ilent

40 V m ax40 V m ax


ForceS ense

From H C S M U

O utput

S igna l

C ircu itC om m on


A g ilent

40 V m ax


ForceS ense

From H C S M U

O utput

S igna l

C ircu itC om m on

S igna l

C ircu itC om m on


A g ilent

40 V m ax40 V m ax



The following connection example uses one HCSMU module and the 16493S-010 adapter for making the Kelvin connection. In this example, the GNDU path is prepared as a separate path. This GNDU connection is also effective for the connection using the 16493S-011 non-Kelvin adapter.

To simplify the GNDU connection, change the connection as shown in Figure 5-4. This connection can save one manipulator.

Figure 5-3 Typical Connection to Use One HCSMU, Kelvin connection

Figure 5-4 To Simplify GNDU Connection, Kelvin connection

Figure 5-5 To Simplify GNDU Connection, non-Kelvin connection


DUT interface

GNDU adapter (N1261A-002)

16493S-010

Interlock circuit

16493S

16493LSense

Force

Low

High

Sense

Force

*2

*1

*2

*1: 1252-1419*2: N1254A-503 or other cable, 5 ea.*3: N1254A-516, 1 ea. and 16493U-001, 2 ea.

*3

*2

16493J

LowHigh

16493S-010Low Force

Low Sense

*2

*1

*1: N1254A-503 or other cable, 2 ea.*2: 1250-2405, 2 ea. and 8120-1838 or 1839, 2 ea.Force

Sense


To DUT interface

16493S-011Low Force

*2

*1

*1: N1254A-503 or other cable, 1 ea.*2: 1250-2405, 2 ea. and 8120-1838 or 1839, 2 ea.Force

Sense


To DUT interface



The following connection example uses one HCSMU module and the 16493S-011 adapter for making the non-Kelvin connection. In this example, the HCSMU Low is connected to the GNDU Sense to simplify the connection. For more simplified non-Kelvin connection of the GNDU, see Figure 5-5. This connection can save one manipulator. Also the GNDU connection can be replaced with the connection shown in Figure 5-3 if an extra manipulator is available.

Figure 5-6 Typical Connection to Use One HCSMU, non-Kelvin connection

The following connection example uses two HCSMU modules. One is connected to the MOSFET Drain by the Kelvin connection. And another one is connected to the Gate by the non-Kelvin connection through the 1 k R-box. The non-Kelvin connection is effective for not-so-high current path such as the Gate. For the bipolar devices, the Kelvin connection should be used for all terminals. For the measurements using both Kelvin and non-Kelvin connections, the HCSMU Low Sense must be connected together. So the 16493S-011 Low is connected to the 16493S-010 Low Sense in this example.

The simplified GNDU connection shown in Figure 5-4 is also effective.

Figure 5-7 Connection Example to Use Two HCSMU Modules


DUT interface

16493S-011

Interlock circuit

16493L

*2: N1254A-503 or other cable, 3 ea.

Force

Low

High

Force

*3: N1254A-516, 1 ea. and 16493U-001, 2 ea.

*1: 1252-1419

*2

*1

*2

SenseGNDU adapter (N1261A-002)

*3

16493J

16493S

Shielding box

B 1505A

DUT interface

16493S-010

16493S

16493L

Interlock circuit

Sense

Force

Low

High

Sense

Force

*2

*1

*2

*1: 1252-1419*2: N1254A-503 or other cable, 5 ea.*3: N1254A-516, 2 ea. and 16493U-001, 4 ea.*4: N1254A-106, 1 ea. and 16493U-001, 1 ea.*5: Triaxial cable with Triaxial(m) connector

*3

*2

16493S-011

High

Low

*3

*5*4 N1262A-010

1 kohm R-box

GateDrain

Source


16493S

16493J


Connection Guide for Wafer Prober and Your Own Test FixtureTo Connect Dual HCSMU Adapter

To Connect Dual HCSMU AdapterKeysight 16493S-020/021 Dual HCSMU adapter is used to configure the DHCSMU channel by connecting two HCSMU modules installed in one B1505A. Using two modules can expand the B1505A maximum current up to ± 40 A (pulse), ± 2 A (DC).

16493S-020: Dual HCSMU Kelvin combination adapter, for connecting a DUT interface such as your own test fixture and wafer prober, not the N1259A test fixture

16493S-021: Dual HCSMU combination adapter, for connecting the N1259A/N1265A test fixture, the N1258A module selector, or the 16493S-010/011 HCSMU adapter


To Connect 16493S-020The 16493S-020 adapter is used to connect a DUT interface such as your own test fixture and wafer prober. This adapter cannot be used with the N1258A module selector.

The adapter should be installed near your DUT interface and connected between the B1505A and your DUT interface as shown in Figure 5-8. This adapter has built-in GNDU protection adapter and built-in HCSMU Kelvin adapter. So the 16493S-010/011 and N1261A-002/004 adapters are not required.

Figure 5-8 Typical Connection of Dual HCSMU Kelvin Combination Adapter


DUT interface

16493S-020

Interlock circuit

16493S, 2 ea.

16493L

Sense

ForceLow

HighSense

Force*2*1

*4

*1: 1252-1419*2: N1254A-506 or other cable, 1 ea.*3: N1254A-505 or other cable, 1 ea.*4: N1254A-503 or other cable, 2 ea.

*3

16493J

LowHigh



Table 5-12 To Connect 16493S-020 Input

Table 5-13 To Connect 16493S-020 Output


HCSMU used for primary

Force 16493S HCSMU cable, 3 m or 1.5 m HCSMU Primary

Force

Sense Sense

HCSMU used for Secondary

Force 16493S HCSMU cable, 3 m or 1.5 m HCSMU Secondary

Force

Sense Sense

GNDU 16493L GNDU cable, 3 m or 1.5 m GNDU

Output terminals1

1. This is the DHCSMU channel. The connectors are compatible with the N1258A module selector outputconnectors.

Required cables/Description Connect to


(ex: source)2

2. Non-Kelvin connection is not allowed. GNDU Force and Sense are internally connected to Low Sense.



DUT high terminal

(ex: drain)2


Forc

eSe

nse

Forc

eSe

nse

Sens

e/Fo

rce

Circ

uit

Com

mon

Sens

e/Fo

rce

Circ

uit

Com

mon

Hig

hLo

w

(±40

V

Max

)Ou

tput

1649

3S O

pt 0

20Du

al H

CSM

U Ke

lvin

Com

bina

tion

Adap

ter

ForceSense

ForceSense

Primary

Secondary

HCSM

UGN

DUInput



To Connect 16493S-021

The 16493S-021 adapter is used with an accessory, 16493S-010/011 HCSMU adapter, N1258A module selector, or N1259A/N1265A test fixture. The adapter should be installed near the accessory.

Table 5-14 To Connect 16493S-021 Input

Table 5-15 To Connect 16493S-021 Output

CAUTION If DHCSMU is used with the N1258A or N1259A-300 module selector, the maximum current must be ± 30 A to prevent the module selector from performance degradation and failure.


HCSMU used for primary

Force 16493S HCSMU cable, 3 m or 1.5 m Primary Force

Sense Sense

HCSMU used for secondary

Force 16493S HCSMU cable, 3 m or 1.5 m Secondary Force

Sense Sense

Output terminals1

1. This is the DHCSMU channel. The connectors are compatible with HCSMU.


Output Force dedicated cable, 300 mm, furnished with 16493S-021

To connect N1265A, adapters N1254A-103 for Force and N1254A-517 for Sense are required.

HCSMU input connectors of

16493S-010/011, N1258A, N1259A,

or N1265A

Sense

1649

3S O

pt 0

21Du

al H

CSM

U Co

mbi

natio

n Ad

apte

r

Forc

eSe

nse

High

Sens

eLo

wSe

nse

HCSM

UCi

rcui

tCo

mm

on

High

Forc

eLo

wFo

rce

±40

V

Max

Outp

utSense

Force

SenseForce

Primary

Secondary

From H

CSMU


Connection Guide for Wafer Prober and Your Own Test FixtureTo Connect Protection Adapter

To Connect Protection AdapterKeysight N1261A protection adapter is used to protect GNDU or HP/MPSMU module from high voltage. The N1261A should be installed near your DUT interface as shown in Table 5-1 on page 5-5.

The N1261A-001 is also used for the measurement using the N1265A test fixture. It must be connected between the HP/MPSMU and the N1265A SMU input. Then use four 16494A triaxial cables for Kelvin connection or two 16494A cables for non-Kelvin connection. Recommended cable length is 1.5 m. Ignore Table 5-17.

N1261A-001: HPSMU protection adapter, Triaxial(f)-Triaxial(f)

N1261A-002: GNDU protection adapter, Triaxial(f)-BNC(f)

N1261A-003: HPSMU protection adapter, Triaxial(f)-HV(jack)

N1261A-004: GNDU protection adapter, Triaxial(f)-SHV(jack)


NOTE For connecting HP/MPSMU, use either 16494A or 16493K. But the 16493K cannot be used for connecting the N1265A.


HPSMU or

MPSMU



From HPSMU

Force

Sense Sense

GNDU 16493L GNDU cable, 3 m or 1.5 m From GNDU

N 1261A O pt 001 H P S M U P ro tec tion A dapter

Force

S ense

F romH P S M U O utput

Guard

S ense/Force

C ircu itC om m on

!

Force200V m a x

S ense200V m a x

A g ilent

Inp utPeak 3kV=m ax


Force

S ense


Guard

S ense/Force

C ircu itC om m on

!

Guard

S ense/Force

C ircu itC om m on

!!

Force200V m a x

Force200V m a x200V m a x

S ense200V m a x

S ense200V m a x200V m a x

A g ilent

Inp utPeak 3kV=m ax

N 1261A O pt 002 G N D U P ro tec tion A dapter

F rom G N D U O utput

Force

S ense

A g ilent

Force

S ense

C ircu itC om m on

S ense/Force

C ircu itC om m on

40 V m axInp utPeak 3kV=m a x



Force

S ense

A g ilent

Force

S ense

C ircu itC om m on

Force

S ense

C ircu itC om m on

S ense/Force

C ircu itC om m on

S ense/Force

C ircu itC om m on

40 V m ax40 V m axInp utPeak 3kV=m a x


Connection Guide for Wafer Prober and Your Own Test FixtureTo Connect Protection Adapter


Options Required cables/Description Connect to

N1261A-001 Force Triaxial cable with Triaxial(m) connector. DUT terminal (ex: gate)

or

Prober chuck

Sense Triaxial cable with Triaxial(m) connector.

N1261A-003 Force Triaxial cable with HV(plug) connector. N1254A-505 can be used. Also 16493T-001 and N1254A-500 can be used.

Sense Triaxial cable with HV(plug) connector. N1254A-505 can be used. Also 16493T-001 and N1254A-500 can be used.

N1261A-0021

1. For connecting HCSMU adapter, see "To Connect HCSMU Adapter" on page 5-17.

Force Coaxial cable with BNC(m) connector. N1254A-503 can be used. DUT terminal (ex: source)

Non-Kelvin connection is not allowed.


N1261A-004 Force Coaxial cable with SHV(plug) connector.

Sense Coaxial cable with SHV(plug) connector.


Force

S ense


Guard

S ense/Force

C ircu itC om m on

!

Force200V m a x

S ense200V m a x

A g ilent

Inp utPeak 3kV=m ax


Force

S ense


Guard

S ense/Force

C ircu itC om m on

!

Guard

S ense/Force

C ircu itC om m on

!!

Force200V m a x

Force200V m a x200V m a x

S ense200V m a x

S ense200V m a x200V m a x

A g ilent

Inp utPeak 3kV=m ax



Force

S ense

A g ilent

Force

S ense

C ircu itC om m on

S ense/Force

C ircu itC om m on

40 V m axInp utPeak 3kV=m a x



Force

S ense

A g ilent

Force

S ense

C ircu itC om m on

Force

S ense

C ircu itC om m on

S ense/Force

C ircu itC om m on

S ense/Force

C ircu itC om m on

40 V m ax40 V m axInp utPeak 3kV=m a x


Connection Guide for Wafer Prober and Your Own Test FixtureTo Connect High Voltage Bias Tee

To Connect High Voltage Bias TeeKeysight N1260A high voltage bias-tee is used to perform the high voltage C-V measurement. The C-V measurement of up to 3000 Vdc can be realized by using the bias-tee, MFCMU, and HVSMU. The N1260A should be installed near your DUT interface as shown in Table 5-1 on page 5-5. Also see Figure 5-9 for connection example.

The N1260A is also used for the high voltage C-V measurement using the N1265A test fixture. It must be connected between the MFCMU and the N1265A. Then use two N1254A-518 SHV cables to connect the N1260A output to the N1265A Bias Tee input. The N1260A input connection is same as Table 5-18. Ignore Table 5-19.


NOTE Turn the B1505A off before connecting the CMU cable.

Connect HVSMU to obtain DC bias input. Because the bias-tee cannot pass the MFCMU internal DC bias.


HVSMU Force 16493T HVSMU cable, 3 m or 1.5 m From HVSMU

MFCMU Hcur N1300A CMU cable, 3 m or 1.5 m


From MFCMU

Hcur

Hpot Hpot

Lpot Lpot

Lcur Lcur

From HVSMU

Hcur Hpot Lpot Lcur

From MFCMU

3kV M ax3kV M ax

!!


Connection Guide for Wafer Prober and Your Own Test FixtureTo Connect High Voltage Bias Tee


Figure 5-9 To Connect N1260A High Voltage Bias-Tee


Output Low Coaxial cable with SHV(plug) connector. DUT low terminal (ex: source)

High Coaxial cable with SHV(plug) connector. DUT high terminal (ex: drain)

AC Guard Coaxial cable with SHV(plug) connector.

This terminal provides the AC guard (circuit common) signal of MFCMU. For the 3-terminal device measurement, the AC Guard must be extended to the device terminal which is not connected to Low or High.

DUT terminal (ex: gate)

AC Guard HighLow

Signal

AC Guard/Return

!!!

Output

3kV M ax

AC Guard HighLow

Signal

AC Guard/Return

!!!

Output

3kV M ax3kV M ax

B 1505A

Hcur

MFCMU

N1260A High Voltage Bias-T

HVSMU

Force

N1300A

Hpot

Lpot

Lcur

HVSMU16493T

High

Low DUT

AC Guard


Connection Guide for Wafer Prober and Your Own Test FixtureTo Connect Module Selector

To Connect Module SelectorKeysight N1258A module selector is used to switch the measurement resource connected to the device under test (DUT) automatically. The measurement resource will be HP/MPSMU, HVSMU/HVMCU, or HC/DHCSMU. One selector provides one switching channel. Also the selector has built-in GNDU protection adapter, built-in HPSMU protection adapter, and built-in HCSMU Kelvin adapter.

The N1258A should be installed near your DUT interface as shown in Table 5-3 on page 5-7. Also see figures 5-11 and 5-12.

The output cable connection is effective for all measurement performed by the modules connected to the Input terminals. Connection change is not required. The module selector switching status is indicated by the Status indicator mounted on the front panel. See Table 5-22 on page 5-31.

Figure 5-10 Module Selector Circuit Diagram and Connections

CAUTION The GNDU can sink current of up to 4.2 A. Use 16493L GNDU cable to connect the GNDU to the N1258A.


CAUTION Maximum current must be ± 30 A to prevent the module selector from performance degradation and failure.

NOTE Using Dual HCSMU (DHCSMU)

DHCSMU can be configured by two HCSMU modules installed in one B1505A and connected to the 16493S-021 Dual HCSMU combination adapter. See "To Connect Dual HCSMU Adapter" for connection. The output connectors are compatible with HCSMU.

Front view

DUT high terminal

DUT highHPSMU

DUT low

Module Selector

Open

High

HVSMU

HCSMU

GNDU

Low AC power

B1505A Digital I/OHCSMU Force+SenseHPSMU Force+SenseGNDU Force+SenseHVSMU Force

Rear view

DUT low terminal

Open

100 kW



Figure 5-11 To Connect N1258A Module Selector

Figure 5-12 To Connect N1258A Module Selector, with N1261A-002 GNDU Adapter

NOTE Using GNDU Adapter

Generally, the connection of Figure 5-11 is used for the measurement using the module selector. And the connection of Figure 5-12 is effective for the accurate measurement over 10 mA using the HP/MPSMU or HVSMU.

CAUTION Never connect the HVSMU Force and Guard terminals and the HVMCU High terminal to any output, including circuit common, chassis ground, or any other measurement resource such as SMU. Connecting other measurement resource may damage the connected one.


HCSMU Force


HVSMU Force

16493L

HCSMU Sense

HPSMU Force

HPSMU Sense

16493T

High Force

DUT

GNDU

16493S

16493K 1 ea.or 16494A 2 ea.

High Sense

Low Force

Low Sense

B 1505A

HCSMU

ForceHVSMU

GNDU

HPSMU

Force

Sense

Force

Sense

B 1505A

HCSMU Force

HCSMU


HVSMU Force

Force

16493L

HCSMU Sense

HPSMU Force

HPSMU Sense

HVSMU16493T

High Force

DUT

GNDU

HPSMUGNDU

Force

Sense

Force

Sense

16493S

16493K 1 ea.or 16494A 2 ea.

High Sense

Low Force

Low Sense

Force

Sense

N1261A-002GNDU Protection Adapter*1 : N1254A-516, 1 ea. and 16493U-001, 2 ea.

*2 : N1254A-503, or a coaxial cable with BNC(m) connector

*1

*2




WARNING The connector cap must be connected to the unused input connectors.

If the Circuit Common terminal is not connected to the frame ground terminal (for floating measurement), a potential shock hazard may present. Do not touch any of measurement circuit at any time while a floating measurement is in progress.

CAUTION For floating measurement, do not apply voltage more than ± 42 V to the Circuit Common terminal. Failure to heed this caution may result in damage to the N1258A.


Digital I/O 16493G Digital I/O connection cable, 3 m or 1.5 m Digital I/O

HCSMU or

DHCSMU

Force 16493S HCSMU cable, 3 m or 1.5 m, 1 ea. for HCSMU

16493S HCSMU cable, 3 m or 1.5 m, 2 ea. and 16493S-021 Dual HCSMU adapter, 1 ea. for DHCSMU

HCSMU Force

Sense Sense

HPSMU or

MPSMU



Use 16493K cable if the High output terminals are connected to the prober chuck.

HPSMU Force

Sense Sense

HVSMU Force 16493T HVSMU cable, 3 m or 1.5 m HVSMU

HVMCU1

1. HVMCU is configured by using the N1266A, HVSMU, GNDU, and two MCSMU. See "To Connect HVSMU Current Expander" on page 5-34.

High

Low 16493L GNDU cable, 3 m or 1.5 m GNDU

GNDU

Power cable, for connecting to power line LINE, 65 VA Max.

GNDU

HPSMU±200 V Max

HCSMU±40 V Max

Digital I/OSenseForce SenseForce

N10149

HVSMU

LINE100–240 V 50/60 Hz65 VA Max

CircuitCommon

For floating measurements disconnect shorting bar. Do not apply more than ±42 V to Circuit Common.

Input

±3 kV Max




Figure 5-13 External Relay Control Output Connector

N1258A

terminals1

1. The connectors are compatible with the 16493S-020 adapter output connectors.



(ex: source)2

2. Non-Kelvin connection is not allowed. GNDU Force and Sense are internally connected to Low Sense. See Table 5-22 on page 5-31.



DUT high terminal

(ex: drain)2


External Relay Control Output

Cable with D-sub 15 pin connector.

See Figure 5-13 for pin assignment. Relay control 1 to 6 are used to control an external relay and controlled by using the Keysight FLEX command. See Programming Guide for the FLEX command.

Relay control signal level: 0 V or 12 V, normally 0 V (circuit common)

Input connector of your own switch

box like a module selector

N1258AModule Selector

Force External RelayControl Output

Sense

ForceSense

Output

±3 kV MaxSense/Force

GuardCircuit

Common

Power HPSMUOpen HCSMU HVSMU

Status

8 1

15 9Sense/Force

±42V Max

HighLow

HCSMUCircuit

Common

12 V

Circut common (0 V)Circut common (0 V)

Circut common (0 V) Relay control16 5 4 3 2



NOTE Controlling N1258A input-to-output path

The configuration and the default I/O path of the N1258A are set by using the Module Selector tab screen of the Configuration window of the EasyEXPERT software. The connection path from the input port to the output port is controlled by each test setup. And the N1258A switching status is indicated by the Status indicator mounted on the front panel. See Figure 5-14 and Table 5-22 for the indication and the connection path.

Figure 5-14 Module Selector Simplified Internal Connections

Table 5-22 Module Selector Status Indicator and Input-to-Output Connection Path


Status indicator


1. In the normal state, the N1258A makes the path to the output port from the input port specified by the Default field. When a measurement is performed, the N1258A performs automatic switching in every test. The N1258A makes the path to the output port from the measurement resource used for the test.


2

2. This condition is when all Input fields HVSMU, HCSMU, and HPSMU are blank.

Open HCSMU Low Sense

+ GNDU Force+ GNDU Sense

HCSMU Low Force

Open Open

HPSMU or MPSMU HPSMU HPSMU Sense

HPSMU Force

HCSMU or DHCSMU HCSMU HCSMU High Sense

HCSMU High Force

HVSMU or HVMCU HVSMU HVSMU Force Open


HVSMU Force

+ Series resistor

Low HighS F

S: Sense

F: Force

P.AP.A

GNDU HCSMU HPSMU HVSMUS FS F

SF

F


S F

GNDU force and senseare connected to Lowsense line.HVSMU force is connected to High sense line.

100 kW


Connection Guide for Wafer Prober and Your Own Test FixtureTo Connect HVSMU/HCSMU Fast Switch

To Connect HVSMU/HCSMU Fast SwitchKeysight N1267A HVSMU/HCSMU fast switch is used to switch quickly and automatically the measurement resource, HVSMU or HCSMU, connected to the device under test (DUT). This is effective for the current collapse measurement of GaN power devices.

The N1267A can be used with the N1259A test fixture, but not with the N1265A test fixture. See Table 2-3 for the input output cable connections.

If you use your DUT interface, see Table 5-4 and Figure 5-15 for the connection image.

The output cable connection is effective for all measurement performed by the measurement resources connected to the Input terminals. Connection change is not required. See Figure 5-16 for the internal connection.

Figure 5-15 To Connect HVSMU/HCSMU Fast Switch

Figure 5-16 N1267A Simplified Internal Connections

HCSMU Force

N1267A Fast Switch

HVSMU Force

16493L

HCSMU Sense

MCSMU Force

MCSMU Sense

16493T

High Force

DUT

GNDU

16493S

16494A 2 ea.

Low Force

B 1505A

HCSMU

ForceHVSMU

GNDU

MCSMU

Force

Sense

Force

Sense

Low HighF

F: Force

P.A

GNDU HCSMU HVSMUS F

SF

F


F

When the HCSMU is used, N1267A steps down the High output voltage to the HCSMU high output voltage.

MCSMUS, F

SW control

S: Sense


Connection Guide for Wafer Prober and Your Own Test FixtureTo Connect HVSMU/HCSMU Fast Switch





CAUTION Never connect the HVSMU Force and Guard terminals to any output, including circuit common, chassis ground, or any other measurement resource such as SMU. Connecting other measurement resource may damage the connected one.



HCSMU Force 16493S HCSMU cable, 3 m or 1.5 m, 1 ea. HCSMU Force

Sense Sense

HVSMU Force 16493T HVSMU cable, 3 m or 1.5 m HVSMU

GNDU 16493L GNDU cable, 3 m or 1.5 m GNDU

MCSMU Force 16494A Triaxial cable, 3 m or 1.5 m MCSMU Force

Sense 16494A Triaxial cable, 3 m or 1.5 m Sense

N1267A terminals


Low Force Coaxial cable with BNC(m) connector. N1254A-503 can be used. DUT low terminal (ex: source)




Connection Guide for Wafer Prober and Your Own Test FixtureTo Connect HVSMU Current Expander

To Connect HVSMU Current ExpanderThe N1266A HVSMU current expander is used to configure the high voltage medium current unit (HVMCU) by using the HVSMU module and the MCSMU modules as shown in Figure 5-17. The N1266A should be installed near the B1505A.

The N1266A output can be selected from the HVSMU or HVMCU. The switching status is indicated by the Status indicator mounted on the front panel. See Table 5-25 for the internal connection.

NOTE To switch measurement resource

The configuration of the HVMCU is set by using the HVSMU Current Expander tab screen of the Configuration window of the EasyEXPERT software. The measurement resource HVMCU or HVSMU is controlled by each test setup. And the switching status is indicated by the Status indicator mounted on the front panel. See Table 5-25 for the indication and the connection path.

Figure 5-17 To Configure HVMCU

Table 5-25 N1266A Status Indicator and Input-to-Output Connection Path


Status indicator


1. When a measurement is performed, the N1266A performs automatic switching in every test. The N1266A makes the path to the output port from the measure-ment resource used for the test.

Low High

GNDU only (off) GNDU Force + Sense

Open

HVMCU HVMC HVMCU High

HVSMU HVSMU HVSMU Force

HVSMU and built-in series resistor

HVSMU Force + Series resistor

N1266A HVSMU current expander

HVSMU

GNDU

V-controlI-control

Digital I/O Digital I/O

MC/HCSMUMC/HCSMU

B1505A

HVSMU

GNDULow

DUT Drain

Source

HighHVMCU

*1: N1261A-002/004 protection adapter is required for connecting prober.

N1261A-002or 004(*1)

Open


Connection Guide for Wafer Prober and Your Own Test FixtureTo Connect HVSMU Current Expander





CAUTION Never connect the HVSMU Force and Guard terminals and the HVMCU High terminal to any output, including circuit common, chassis ground, or any other measurement resource such as SMU. Connecting other measurement resource may damage the connected one.


HVSMU Force 16493T-001 HVSMU cable, 1.5 m HVSMU

GNDU 16493L-001 GNDU cable, 1.5 m GNDU

MCSMU1


Force 16494A-001 Triaxial cable, 1.5 m I Control Force

Sense 16494A-001 Triaxial cable, 1.5 m Sense

MCSMU1 Force 16494A-001 Triaxial cable, 1.5 m V Control Force


Digital I/O 16493G-001 Digital I/O connection cable, 1.5 m Digital I/O Input

Power cable, for connecting to power line LINE

N1266A terminals


Low 16493L GNDU cable, N1261A-002 protection adapter and two BNC(m) coaxial cables (N1254A-503 can be used), or N1261A-004 protection adapter and two SHV(plug) coaxial cables

Protection adapter is not required to connect to the N1258A, N1259A, N1259A-300, or N1265A.


High HV(plug) triaxial cable (N1254A-505 can be used). DUT high terminal (ex: drain)


Connection Guide for Wafer Prober and Your Own Test FixtureTo Connect Ultra High Current Expander

To Connect Ultra High Current ExpanderThe ultra high current expander is built into the N1265A test fixture, and is used to configure the ultra high current unit (UHCU) with the MCSMU modules. The UHCU output can be applied from the Selector Output terminals of the N1265A, and extended by using the N1254A-524 Prober System Cable, 1.8 m. See "Selector Output Terminals" on page 3-13 for the selector itself and the output terminals.

The N1254A-524 system cable is used to extend the Selector Output and Gate terminals of the N1265A, and can be connected to these terminals directly. See "Connecting System Cable to N1265A" on page 5-37.

The other side, prober side, of the system cable is a connector box which provides the five connectors for connecting cables from manipulators. The connector box should be installed near your DUT interface. See Figure 5-18 for the connection image.

The prober side connector type, maximum voltage, and maximum current of the N1254A-524 are shown in Table 5-28. See Table 5-29 for the output connection cables.


Do not apply voltage/current over the maximum limit of the cable. See Table 5-28.

Figure 5-18 To Extend Selector Output by using N1254A-524 Prober System Cable

Table 5-28 Prober Side Connectors and Maximum Voltage/Current of N1254A-524

Connector label

Connector type

N1265A output terminals to extend

Maximum voltage

Maximum current

High Force Banana(jack) Selector Output High Force 3000 V 39 A dc,

500 A pulse 1

1. Pulse of 1 ms pulse width and 0.4 % duty cycle

Low Force Banana(jack) Selector Output Low Force 200 V

High Sense HV(jack) Selector Output High Sense 3000 V 1 A dc, 20 A pulseLow Sense BNC(f) Selector Output Low Sense 200 V

Gate Low

Gate BNC(f) Gate High 200 V

N1254A-524 Prober System Cable

High Force

Guard

N1265A Test Fixture

Gate

Drain

Source

Sele

ctor

Out

put

Chassis

Low Force

High SenseLow Sense

Gate HighGate Low High Force

Low Force

High Sense

Low Sense

Gate

Gate

DUT


Connection Guide for Wafer Prober and Your Own Test FixtureTo Connect Ultra High Current Expander

Table 5-29 Cables for connecting Prober Side of N1254A-524 System Cable

CAUTION Never connect the High Force and High Sense terminals to any output, including circuit common, chassis ground, or any other measurement resource such as SMU. Connecting other measurement resource may damage the connected one.

Connecting System Cable to N1265A

Requirements • Box wrench, M5 hex

• Clear plastic plate, 2 ea. (furnished with the N1254A-524 system cable)

Procedure 1. Turn the all instruments off.

2. Remove power cable from the all instruments.

3. Open the fixture cover of the N1265A.

4. Remove connection wire from the Selector Output and Gate terminals if the wire is connected.

5. Remove the clear plastic plate from the fixture cover. This makes opening for passing the cable through. Use the box wrench and unscrew six hex nuts to remove the plate.

Treasure the removed plate. It must be replaced in the normal use conditions without the N1254A-524 system cable.

6. Connect two connector boxes of the system cable to the Selector Output and Gate terminals properly. See Figure 5-18.

7. Pull out the prober side connector box and some long of extension cable (approximately 1.5 m) from the opening.

8. Set and fix two clear plastic plates to the fixture cover by using the hex nuts removed in the step 5. The plates close the excess opening and make the opening enough to pass the cable through.


10. Connect the 16493J interlock cable from the B1505A or the N1268A to the interlock circuit installed in the probe station.

WARNING For using the prober system cable safely

Never connect the interlock cable to the N1265A.

Never remove the clear plastic plates from the fixture cover.

N1254A-524 connectors


Low Force Ultra high current cable with banana(plug). N1254A-523 can be used. DUT low terminal (ex: source)Low Sense Coaxial cable with BNC(m) connector. N1254A-503 can be used.

High Force Ultra high current cable with banana(plug). N1254A-523 can be used. DUT high terminal (ex: drain)High Sense Triaxial cable with HV(plug) connector. N1254A-505 can be used.

Gate Coaxial cable with BNC(m) connector. N1254A-503 can be used. DUT drive terminal (ex: gate)


Connection Guide for Wafer Prober and Your Own Test FixtureTo Connect Ultra High Voltage Expander

To Connect Ultra High Voltage ExpanderThe N1268A ultra high voltage expander is used to configure the ultra high voltage unit (UHVU) with the MCSMU modules. And the UHVU can be connected to prober as shown in Figure 5-19, by using the N1269A connection adapter. The N1268A should be installed near the B1505A. And the N1269A should be installed near prober as shown in "Connection Overview".

Figure 5-19 To Configure UHVU

WARNING Connect a wire from an electrical ground (safety ground) to the earth terminal of the N1268A.

Table 5-30 To Connect N1268A/N1269A Input

B1505A terminals Required cables N1268A input

MCSMU Force 16494A-001 Triaxial cable, 1.5 m I Control Force


MCSMU1


Force 16494A-001 Triaxial cable, 1.5 m V Control Force


Interlock 16493J-001 Interlock cable, 1.5 m Interlock Input

Digital I/O 16493G-001 Digital I/O connection cable, 1.5 m Digital I/O Input


Wire, 1 ea., for earthing (earth)

N1268A UHV expander

MCSMUMC/HCSMU V-control

I-control

Interlock

Digital I/O

Interlock Input

Digital I/O

Gate

UHV Low

Chuck

Gate

ChuckSourceMCSMU

MCSMU

N1269A UHV connection adapter

B1505A

LowDUT Drain

ChuckGate

Source

High

Interlock Output Interlock circuit


Connection Guide for Wafer Prober and Your Own Test FixtureTo Connect Ultra High Voltage Expander

Table 5-31 To Connect N1268A/N1269A Output

CAUTION Never connect the High terminal to any output, including circuit common, chassis ground, or any other measurement resource such as SMU. Connecting other measurement resource may damage the connected one.


B1505A/N1268A terminals

Required cables/Description N1269A input

MCSMU Force 16494A Triaxial cable, 1.5 m or 3 m Gate Force

Sense 16494A Triaxial cable, 1.5 m or 3 m Sense

MCSMU Force 16494A Triaxial cable, 1.5 m or 3 m Chuck Force

Sense 16494A Triaxial cable, 1.5 m or 3 m Sense

N1268A Output Low

SHV(jack)-SHV(jack) cable, 1.5 m or 3 m, of 16493V Low

N1268A output Required cables/Description Connect to

Interlock Output 16493J Interlock cable, 1.5 m or 3 m Interlock circuit

High Ultra high voltage coaxial cable with UHV(plug) connector. UHV cable of N1254A-520 can be used.


N1269A output Required cables/Description Connect to

Gate Coaxial cable with SHV(plug) connector. SHV cable of N1254A-520 can be used.

DUT drive terminal (ex: gate)

Source Coaxial cable with SHV(plug) connector. SHV cable of N1254A-520 can be used.


Chuck Coaxial cable with SHV(plug) connector. SHV cable of N1254A-520 can be used.

DUT chuck terminal


Connection Guide for Wafer Prober and Your Own Test FixtureTo Connect Device Capacitance Selector

To Connect Device Capacitance SelectorKeysight N1272A device capacitance selector is used to switch the measurement resource connected to the device under test (DUT), for capacitance testing (input/output capacitance, feedback capacitance, and gate resistance). The measurement resource will be HVSMU, MPSMU and MFCMU.

The N1272A should be installed near your DUT interface. Connection examples are shown below. For the color-codes of cables and connectors in the figures, see Figure 7-1 on page 7-2.

Figure 5-20 shows the connection example for the ultra high current configuration using the N1265A.

Figure 5-21 shows the connection example for the high current configuration using the HCSMU and the N1258A module selector.



HVSMU 16493T-001 HVSMU cable, 1.5 m, 1 ea. HVSMU

MPSMU Force 16494A Triaxial cable, 1.5 m, 1 ea. SMU Force


MFCMU Hcur N1300A-001 CMU cable, 1.5 m, 1 ea.


MFCMU Hcur

Hpot Hpot

Lpot Lpot

Lcur Lcur

GNDU 16493L-001 GNDU cable, 1.5 m GNDU

Interlock 16493J-001 Interlock cable, 1.5 m Interlock Input

Digital I/O 16493G-001 Digital I/O connection cable, 1.5 m

If the N1272A selector is used with other fixture or selector, you can also connect the output from it to this input connector.

Digital I/O Input


Force

Guard

CircuitCommon

HVSMU

To avoid electrical shock and instrument damage,do not connect/disconnect the cables during operation.

Output Input

±3 k V Max

Lcur Hcur

Lpot Hpot

Force

Sense

±3 k V Max±3 k Max ±3 k V Max

±100 V Max

±100 V Max

±3 k V Max ±25 V Max ±100 V Max

~ LINE100-240 V ~

50/60 Hz70 VA Max

Input Output

Digital I/O

HVSMU

Base/GateMFCMU SMU

GNDU

Collector/Drain

AC/DC GuardEmitter/Source

Interlock Interlock

MSIP-REM-ATI-1H-B1507A

T2 T1

T3 T4

N1272 -61001




Figure 5-20 Typical Connection of N1272A Device Capacitance Selector with N1265A


Collector/Drain N1254A-558 or 518 SHV(plug)-SHV(plug) coaxial cable DUT high terminal (ex: drain)

Base/Gate N1254A-558 or 518 SHV(plug)-SHV(plug) coaxial cable DUT terminal (ex: gate)

Emitter/Source N1254A-558 or 518 SHV(plug)-SHV(plug) coaxial cable DUT low terminal (ex: source)

DC/AC Guard N1254A-558 or 518 SHV(plug)-SHV(plug) coaxial cable

HVSMU 16493T-001 HVSMU cable, 1.5 m (furnished in the N1272A) N1258A or N1265A HVSMU

input terminal

Interlock output 16493J-001 Interlock cable, 1.5 m Interlock circuit

Digital I/O Output 16493G-001 Digital I/O connection cable, 1.5 m

If the N1272A selector is used with the N1258A or N1265A, you can connect this terminal to the input of it.

Digital I/O Input of N1258A or

N1265A

G

S

HV SMU

GNDU

UHC InputV Cont ro l

I Cont ro l

HF

LF

HS

LS

Gate

N 12 65 A

Gate

Selec torHighLow

N12 54A -52 4

D

Ga te FGa te S

HVSMU

MPSMUMFCMU

MCSMU

GNDU

FS

FS




16493G-001 Digital I/O cable (Included in the N1265A)


MCSMU FS

MCSMU FS

N1272A

GNDU

HVSMU

FS MPSMU


HcurHpotLpotLcur

MFCMU

HVSMU


Collector/Drain

AC/DC Guard

InterlockInterlock


16493T (Included in the N1272A)

G

S

D

N1254A-558 or N1254A-518



16493J

Connec�on for Capacitance Measurement

Connec�on for I-V Measurement

Shielding Box



Figure 5-21 Typical Connection of N1272A Device Capacitance Selector with N1258A

G

S

DHV SMU

GNDU

HCSMU FN 12 58 A

Low F

High FS

HCSMU S

Digital I/O

S

R-Bo

x1k

Ohm

N126

2A-0

10

HF

LF

N1254A-104 TRX(J) to BNC(P) adapter

HCSMU Non-Kelvin

adapter16493S-011 16493U-001

16494A-003

1649

3U-0

01

N1254A-516 Connec�on for Capacitance Measurement

Connec�on for I-V Measurement

HVSMU

MPSMUMFCMU

HCSMU

GNDU

FS

FS






MCSMU FS

N1272A

GNDU

HVSMU

FS MPSMU


HcurHpotLpotLcur

MFCMU

HVSMU


Collector/Drain

AC/DC Guard

InterlockInterlock


16493T (Included in the N1272A)

G

S

D

N1254A-558 or N1254A-518




16493J

Shielding Box


Connection Guide for Wafer Prober and Your Own Test FixtureTo Connect Gate Charge Adapter

To Connect Gate Charge AdapterKeysight B1505A supports the following two adapters for on-wafer gate charge measurement.

• N1274A On-Wafer Gate Charge Measurement Adapter/Selector for 20 A/3 kV

• N1275A On-Wafer Gate Charge Measurement Adapter for N1265A


N1258A terminals Required cables Input terminals

High Force N1274-61721 HV coaxial cable, 35 cm (furnished in the N1274A)

High Force

Sense N1274-61720 HV triaxial cable, 35 cm (furnished in the N1274A)

Sense

Low Force B1512-61741 BNC cable, 30 cm (furnished in the N1274A) Low Force

Sense B1512-61741 BNC cable, 30 cm (furnished in the N1274A) Sense

External Relay

Control Output

N1274-61722 D-sub 15 pin cable (furnished in the N1274A) Relay Control Input


MCSMU Force 16494A Triaxial cable, 1.5 m, 1 ea. Current Control

Force


MCSMU or HC SMU

Force 16494A Triaxial cable, 1.5 m, 1 ea. DUT Gate Control

Force


High Sense Low Sense Gate Sense Force Sense

High

Input From N1258A

Low

Force

Relay Control Input

Low ForceHigh Force

Signal

Guard

CircuitCommon

Output±3 k V Max

±3 k V Max±10 V Max

SignalCircuitCommon

N1274A On-Wafer Gate Charge Measurement Adapter / Selector

Sense Force

MCSMUSense Force

MCSMU/HCSMUCurrent Control DUT Gate Control

±30 V Max

Input From B1505A




To Connect N1274AThe N1274A is used to enable on-wafer gate charge measurements using the HCSMU (max. 20 A) and the B1513B/C HVSMU (max. 3 kV). This equips an internal selector to automatically switch signal paths of I-V measurement and gate charge measurement. The N1274A is used with the N1258A module selector. (Note that the B1513A cannot be used for gate charge measurement.)

You can also mount a current control device or load resistor on the N1274 by opening a small panel on the top of this adapter.

The N1274A should be installed in the shielding box with your DUT interface. Connection example is shown in Figure 5-22. For the color-codes of cables and connectors in this figure, see Figure 7-1 on page 7-2.

Figure 5-22 Typical Connection of N1274A Gate Charge Measurement Adapter


High Force Ultra high current cable with banana(plug). N1254A-523 can be used.



Low Force Ultra high current cable with banana(plug). N1254A-523 can be used.



Gate Coaxial cable with BNC(m) connector. N1254A-503 can be used. DUT terminal (ex: gate)

G

S

HV SMU

GNDU

HCSMU F

N 12 58 ALow F

High FS

D

HCSMU S

Digital I/O

S F Low

F HighS

S

High F

Low F

S

S

GateF Current

ControlSDUT Gate Control

FS

Relay Control Input

HVSMU

HCSMU

MCSMU

GNDU

FS

FS






HP/MPSMUFS

MCSMU FS

N1274A


N1261A-003

Output F S

FS HPSMU


N1274-61721*

N1274-61720*B1512-61741*

B1512-61741*

*: Included in the N1274A

N1274-61722*

Interlock

Shielding Box

Ext. Relay Control

Output



To Connect N1275A

The N1275A is used to enable on-wafer gate charge measurements with the UHCU (max. 500 A) and the B1513B/C HVSMU (max. 3 kV). You need to switch signal paths of IV measurement and gate charge measurement manually. And also, you need manual switching between high voltage and high current gate charge measurements. The adapter output can be extended to your probe station by using the N1254A-524 prober system cable. (Note that the B1513A cannot be used for the gate charge measurement.)

You can also mount current control device or load resistor for the gate charge measurement on the top of this adapter.

The N1275A should be installed in the shielding box with your DUT interface. Connection example is shown in Figure 5-23. For the color-codes of cables and connectors in this figure, see Figure 7-1 on page 7-2.



N1254A terminals Required cables Input terminals

High Force N1275-61701 Ultra high current banana cable, 30 cm (furnished in the N1275A)

High Force

From N1254A

Low Sense B1512-61741 BNC cable, 30 cm (furnished in the N1275A)

Low Sense

From N1254A


MCSMU Force 16494A Triaxial cable, 1.5 m, 1 ea. Current Control MCSMU

Force



High Force To DUT

Ultra high current cable with banana(plug). N1254A-523 can be used.


Low Sense To DUT

Coaxial cable with BNC(m) connector. N1254A-503 can be used.


To DUTTo DUTFrom

N1254A Opt 524From

N1254A Opt 524

SignalCircuitCommon

Low Sense

±10 V Max

High Force

±60 V Max

SenseForce

From B1505A

±30 V Max

Current ControlMCSMU



Figure 5-23 Typical Connection of N1275A Gate Charge Measurement Adapter

G

S

HV SMU

GN DU

UHC InputV Cont ro l

I Cont ro l

For Gat e

For N12 65 A

For N1 265 A

For DrainHFLFHSLS

Gate

N 12 65 A

Gate

Selec torHighLow

N12 54A -52 4

D

Ga te FGa te S

B1512-61741(Included in the N1275A)

N1275-61701 (Included in the N1275A)

Interlock

Shielding Box

Shielding Box

HVSMU

HC/MCSMUHC/MCSMUMCSMU

GNDU

FSFSFS


16494A (for MCSMU, included in the MCSMU)




HP/MPSMU FS

MCSMU FS

N1275A

HF From N1254A To DUTLS From N1254A To DUT

FS MCSMU


N1261A-003

Output F S

FS HPSMU


Connec�on for High Current gate charge measurement

G

S

HFLFHSLS

Gate

A

N12 54A -52 4

D

B1512-61741(Included in the N1275A)

N1275A

HF From N1254A To DUTLS From N1254A To DUT

FS MCSMU

Connec�on for High Voltage gate charge measurement


Connection Guide for Wafer Prober and Your Own Test FixtureTo Install an Interlock Circuit

To Install an Interlock Circuit The interlock circuit is designed to prevent electrical shock when a user touches the measurement terminals.

You must install an interlock circuit on a shielding box to prevent hazardous voltages when the door of the shielding box is open.

Figure 5-24 shows the pin assignments of the interlock connector that should be mounted on your DUT interface. And Table 5-38 lists the required parts to make the interlock circuit.

WARNING Potentially hazardous voltages may be present at the Force, Guard, and Sense terminals when the interlock terminals are shorted.

Figure 5-24 Interlock Connector Pin Assignments

Table 5-38 Recommended Parts

Keysight Part No.

Description Quantity

N1254A-402 Interlock micro switch 2

1252-1419 Interlock connector (6 pin, female) 1

1450-0641 LED (VF 2.1 V @ IF = 10 mA) 1

Wire 24AWG, 600 V, 150 degree C or equivalent

1

2

34

5

6

Connector side

Interlock switch

Wiring side

LED

1

2

3 4

5

6



Procedure

Prepare the required parts listed in Table 5-38. And install the interlock circuit as shown below.

1. Make mounting hole for the interlock connector. See Figure 5-26 for dimensions.

2. Mount two mechanical switches on your shielding box, so that the switches close when the door of the shielding box is closed, and open when the door is opened. For the dimensions of the switch, see Figure 5-27 below.

3. Mount an LED on your shielding box. For the dimensions of the LED, see Figure 5-25.

4. Use wire to connect the two switches in series between pin number 1 and 2 (or 3) of the interlock connector. See Figure 5-24.

5. Use wire to connect the LED between pin number 4 and 5 (or 6) of the interlock connector. See Figure 5-24.

6. Attach the interlock connector to the mounting hole.

If Keysight B1505A Interlock connector is connected to the interlock circuit, Keysight B1505A SMU cannot force more than ± 42 V when the door is open. When the door is closed, it can force more than ± 42 V.

When more than ± 42 V is forced from an SMU, the LED lights to indicate high voltage output.

Figure 5-25 Dimensions of the LED (Keysight part number 1450-0641)

Figure 5-26 Dimensions of Mounting Hole for the Interlock Connector

6

10

115

5.6

5

Units : mm

Anode (+)

Cathode (-)

1.88.2

5.1



Figure 5-27 Dimensions of the Interlock Switch (Keysight N1254A-402)

To Connect Interlock CircuitThe B1505A provides the Interlock connector to prevent you from receiving an electrical shock from high voltage (more than ± 42 V). If the interlock circuit is open, the B1505A cannot apply high voltage more than ± 42 V.

Before performing measurement, connect the 16493J interlock cable between the B1505A Interlock connector and the interlock connector which is a part of the interlock circuit installed in your DUT interface as described in "Procedure" on page 5-48.

3.1

35.6

8.1

14

NC

NO

C OM

6.4

22.2

27.8

2.8

6.3 15.9 18.8

4.7510.3 4.3

2.8

2.8

3.2

10.3

2.8

3.1

Switch off

Units: mm

15.3


Connection Guide for Wafer Prober and Your Own Test FixtureAbout Cable Connections

About Cable ConnectionsPrepare the open end cable assemblies listed in Table 5-39 which contain the connector suitable for connecting the accessory, and connect it to your DUT interface.

• "To Make Connection to Reduce Leakage Current"

• "To Make Connection to Measure Low Resistance"

• "To Connect UHVU/HVSMU/HVMCU Output"

Table 5-39 Open End Cable Assemblies for Connecting Your DUT Interface

Cable assemblies Connect to Remarks

Coaxial cable with one BNC(m) N1258A Low Force/Sense N1254A-503

N1261A-002 Output Force/Sense

N1267A Low Force

N1254A-524 Low Sense and Gate

Triaxial cable with one HV(plug) N1261A-003 Output Force/Sense N1254A-505

N1258A High Sense

N1266A High

N1268A High Sense

N1254A-524 High Sense

Coaxial cable with one HV(plug) N1258A High Force N1254A-506

N1267A High Force

Triaxial cable with one Triaxial(m) N1261A-001 Output Force/Sense

N1262A-010/020 Output

Coaxial cable with one SHV(plug) N1260A Output Low/High/AC Guard N1254A-520

N1261A-004 Output Force/Sense

N1262A-001/002/011/021 Output

N1268A Low

N1269A Output Gate/Source/Chuck

Ultra high voltage cable with one UHV(plug) N1268A High N1254A-520

Ultra high current cable with one banana N1254A-524 High Force and Low Force N1254A-523



To Make Connection to Reduce Leakage Current

To reduce the leakage current caused by connection cables, the guard technique is effective. Connect the probing needles to the coaxial cables as shown below:

1. Cut and trim end of the coaxial cable such as N1254A-503 and N1254A-506, so that the center conductor does not touch the outer conductor (connected to the guard terminal).

2. Connect the center conductor to tail of the probing needle. Never connect the outer conductor to the probing needle. However the outer conductor should be extended as close as possible to the probing needle.

3. Connect the outer conductor to the outer conductor of the probing needle if it is a coaxial probing needle.

Example The following example connection can be used to reduce the leakage current. Extend the outer conductor as close as possible to the probing needle. This also reduces the induced noise.

WARNING Do not touch the guard terminal with bare hands because you may be shocked by high voltage. The potential of the guard terminal is equal to the output voltage.

CAUTION Never connect the guard terminal to any other output, including circuit common, frame ground, or the terminals of any other unit.

Guarding Guarding reduces the leakage current between the measurement points and instrument. This is important when you measure low current.

The following figure shows the theory of guarding. The buffer amplifier (1) keeps the potential of the guard conductor at the same potential as the force conductor, so current does not flow between the force and guard conductors. Therefore, the current measured by SMU is same as current at measurement point because no current is leaked.

Probing needle

Contact pad

Outer conductorCenter conductor

Coaxial cable

ABuffer

Guard Force DUT



To Make Connection to Measure Low Resistance

When you measure a low resistance, high current flows through the DUT. This high current increases the measurement error caused by the residual resistance of cables. To cancel the effect of this resistance, you can use Kelvin connections (4-wire), which means the Force and Sense lines are extended separately to the DUT.

Connect the probing needles to the coaxial cables as shown below:

1. Cut and trim end of the coaxial cable such as N1254A-503 and N1254A-506, so that the center conductor does not touch the outer conductor (connected to the guard terminal).

2. Connect the center conductor to tail of the probing needle. Never connect the outer conductor to the probing needle. However the outer conductor should be extended as close as possible to the probing needle.

3. Connect the outer conductor to the outer conductor of the probing needle if it is a coaxial probing needle.

4. Perform 1 to 3 for both Force and Sense lines.

5. Contact the probing needles for the Force and Sense lines as close as possible to the DUT.

Example The following example connection can be used to measure low resistance. The Sense line is extended to the probing pad, and contacts the Force line through the pad, so the voltage drop due to the residual resistance caused by cables and wires is canceled.

Kelvin Connection Kelvin connections give good measurement results when you force high-current. The following figure shows the equivalent circuits for Kelvin and non-Kelvin connections.

Probing needleOuter conductorCenter conductor

Coaxial cable

Contact pad

Contact pad

(a) non-Kelvin connection (b) Kelvin connection

rF1 rF2

RDUT

rS2rS1

V V V

rF1rF2

RDUT



• For the non-Kelvin connection, the voltmeter measures the voltage drop of resistances rF1, RDUT, and rF2.

• For the Kelvin connection, the voltmeter measures the voltage drop of resistance RDUT only. The impedance of the voltmeter is very high, so the voltage drop of resistances rS1 and rS2 can be ignored.

The Kelvin connection is effective even when forcing voltage. The voltage drop due to the residual resistance of the Force line wiring is fed back to the voltage source via a comparator in the Sense line. The input impedance of comparator is high, and current flow into the Sense line is very low. So output error is not significant if the Sense line wiring has a residual resistance of 10 or less. Therefore, the specified voltage appears at the sense point (point where Sense line contacts Force line)


To make the Kelvin connection, use both Force and Sense terminals. Connecting the Force and Sense lines together at the terminal of the DUT (device under test) minimizes the measurement error caused by the residual resistance of the connection cables. The Kelvin connection is effective for the low resistance measurement and the high current measurement.

If you want to simplify the cable connections, open the Sense terminals and use the Force terminals only. This is the non-Kelvin connection. The Force terminals can be used to force and measure dc voltage or current.

To Connect UHVU/HVSMU/HVMCU OutputTo prevent discharge and any accident, make enough space between the cable ends, also between the high side cable end and the shield or chassis. For example, make space of about 32 mm from the high side cable end for maximum 10 kV output. Also the creepage distance must be more than 100 mm for 10 kV.

Figure 5-28 Space around Cable End

To UHVU High To UHVU Low

DUT

Shield

Signal line

InsulatorSHV CableUHV Cable

Insulator

¡32 mm for 10 kV¡100 mm for 10 kV


6 Accessory Dimensions

Accessory Dimensions

This chapter describes the dimensions of accessories.

Dimensions and weight of accessories are listed in Table 6-1. Also you can find the dimensions of mounting hole and screw hole needed to fix the accessories in the following figures.

• "16493S-010 HCSMU Kelvin Adapter, in mm"

• "16493S-011 HCSMU non-Kelvin Adapter, in mm"

• "16493S-020 Dual HCSMU Kelvin Combination Adapter, in mm"

• "16493S-021 Dual HCSMU Combination Adapter, in mm"

• "N1254A-500/502 HV Connector for Soldering, mounting hole, in mm"

• "N1254A-501 HV jack - HV jack Adapter, mounting hole, in mm"

• "N1254A-521 UHV jack Adapter and SHV jack Adapter, mounting hole, in mm"

• "N1254A-524 Prober System Cable, Prober side, in mm"

• "N1258A Module Selector, in mm"

• "N1260A High Voltage Bias-T, in mm"

• "N1261A-001 HPSMU Protection Adapter, in mm"

• "N1261A-002 GNDU Protection Adapter, in mm"

• "N1261A-003 HPSMU Protection Adapter, HV Output, in mm"

• "N1261A-004 GNDU Protection Adapter, SHV Output, in mm"

• "N1262A-001/002/011/021 R-Box, HV-SHV, in mm"

• "N1262A-010/020 R-Box, Triaxial-Triax, in mm"

• "N1262A-023 R-Box, UHV-UHV, in mm"

• "N1267A HVSMU/HCSMU Fast Switch, in mm"

• "N1269A Ultra High Voltage Connection Adapter, in mm"

• "N1272A Device Capacitance Selector, in mm"

• "N1274A On-Wafer Gate Charge Measurement Adapter/Selector for 20 A/3 kV, in mm"

• "N1275A On-Wafer Gate Charge Measurement Adapter for N1265A, in mm"



Table 6-1 Dimensions and Weight of Accessories

Model/Option Description Dimensions1 in mm

1. Body size. Excluding connectors.

Weight in kg

16493S-010 HCSMU Kelvin adapter 104 (W) 38 (H) 60 (D) 0.3

16493S-011 HCSMU non-Kelvin adapter 104 (W) 38 (H) 60 (D) 0.3

16493S-020 Dual HCSMU Kelvin combination adapter 164 (W) 50 (H) 125 (D) 0.3

16493S-021 Dual HCSMU combination adapter 104 (W) 53 (H) 60 (D) 0.3

N1258A Module selector 330 (W) 102 (H) 372 (D) 5.0

N1260A High voltage bias-T 164 (W) 50 (H) 125 (D) 0.6

N1261A-001 HPSMU protection adapter, Triaxial(f) 80 (W) 40 (H) 120 (D) 0.3

N1261A-002 GNDU protection adapter, BNC(f) 80 (W) 40 (H) 120 (D) 0.3

N1261A-003 HPSMU protection adapter, HV(jack) 80 (W) 40 (H) 150 (D) 0.3

N1261A-004 GNDU protection adapter, SHV(jack) 80 (W) 40 (H) 125 (D) 0.3

N1262A-001 High voltage R-box, 1 M, SHV(jack) 50 (W) 40 (H) 125 (D) 0.3

N1262A-002 High voltage R-box, 100 k, SHV(jack) 50 (W) 40 (H) 125 (D) 0.3

N1262A-010 R-box, 1 k, Triaxial(f) 50 (W) 40 (H) 125 (D) 0.3

N1262A-011 High voltage R-box, 1 k, SHV(jack) 50 (W) 40 (H) 125 (D) 0.3

N1262A-020 Universal R-box, Triaxial(f) 50 (W) 40 (H) 125 (D) 0.3

N1262A-021 Universal R-box, SHV(jack) 50 (W) 40 (H) 125 (D) 0.3

N1262A-023 Universal R-box, UHV(jack) 214 (W) 103 (H) 125 (D) 0.3

N1265A Ultra high current expander/test fixture 420 (W) 285 (H) 575 (D) 30

N1266A HVSMU current expander 420 (W) 75 (H) 575 (D) 10

N1267A HVSMU/HCSMU fast switch 202 (W) 56 (H) 175 (D) 0.8

N1268A Ultra high voltage expander 420 (W) 222 (H) 482 (D) 18

N1269A Ultra high voltage connection adapter 134 (W) 56 (H) 150 (D) 0.4

N1272A Device capacitance selector 420 (W) 75 (H) 575 (D) 9.4

N1274A On-wafer gate charge measurement adapter/selector for 20 A/3 kV

330 (W) 90 (H) 410 (D) 3.2

N1275A On-wafer gate charge measurement adapter for N1265A

116 (W) 78 (H) 125 (D) 0.4



Figure 6-1 16493S-010 HCSMU Kelvin Adapter, in mm

22

90

40

80

24 12

22226

90

104

12 24 38

22

M3 4 ea, < 10 mm



Figure 6-2 16493S-011 HCSMU non-Kelvin Adapter, in mm

Figure 6-3 16493S-020 Dual HCSMU Kelvin Combination Adapter, in mm

90

40

80

24 12

66

6

90

104

12 24 38

22

M3 4 ea, < 10 mm

M3 4 ea, < 10 mm152

24.7

126

55.8 50

39.7

9.7

97

12

3860

10482

127164

112.5

12.5

125

3767

15212 M3 4 ea, < 10 mm

24.7

39.7

9.7

132

32



Figure 6-4 16493S-021 Dual HCSMU Combination Adapter, in mm

Figure 6-5 N1254A-500/502 HV Connector for Soldering, mounting hole, in mm

Figure 6-6 N1254A-501 HV jack - HV jack Adapter, mounting hole, in mm

Figure 6-7 N1254A-521 UHV jack Adapter and SHV jack Adapter, mounting hole, in mm

M3 4 ea, < 10 mm

9718

.2

10

59 53.2

45.2

6.2

7

41

63104

50

60

92

12

M3 4 ea, < 10 mm

97

18.2

40.245

.26.

2

7

4163

13.7

16.0

18.218.2

4 - 3.218.2

13.816.0

4 - 3.216.0

11.412.7

4 - 3.012.7UHV SHV



Figure 6-8 N1254A-524 Prober System Cable, Prober side, in mm

120

80

80

20

100

10

5.8 56.2



Figure 6-9 N1258A Module Selector, in mm

6

108.

2

20

(17.

8)

15

87.2

186.

2

(17.

8)

357.

4

(408

)

M3

5

ea, <

10

mm

330.

2

372.

4



Figure 6-10 N1261A-001 HPSMU Protection Adapter, in mm

Figure 6-11 N1261A-002 GNDU Protection Adapter, in mm

120

126

52

4020

22

50

50

24

22

80

M3 4 ea, < 10 mm

110

126

52

4020

50

50

24

22 80

M3 4 ea, < 10 mm



Figure 6-12 N1261A-003 HPSMU Protection Adapter, HV Output, in mm

Figure 6-13 N1261A-004 GNDU Protection Adapter, SHV Output, in mm

150

12

6

52

40

20

22

50

100

24

30

80

125

126

52

4020

50

50

24

2280

M3 4 ea, < 10 mm



Figure 6-14 N1260A High Voltage Bias-T, in mm

Figure 6-15 N1262A-001/002/011/021 R-Box, HV-SHV, in mm

12512

6140

100

50

164

100

M3 4 ea, < 10 mm

30

9.95

19.9

110

90

19.9

50

6

34

30



Figure 6-16 N1262A-010/020 R-Box, Triaxial-Triax, in mm

Figure 6-17 N1262A-023 R-Box, UHV-UHV, in mm

19.9

110

90

19.9

50

6

34

30

160 27

50 82

214 97

29.7

5.8

115

3060



Figure 6-18 N1267A HVSMU/HCSMU Fast Switch, in mm

Figure 6-19 N1269A Ultra High Voltage Connection Adapter, in mm

178

4 - M330

178

4 - M3 30

202

9.7

150

138

175 9.7

5.8

50

100

134

17

15050

125 12.5

5.8



Figure 6-20 N1272A Device Capacitance Selector, in mm

98.3 79

.6

420

15

50 14.8

M5

39.9

34.9

19.4

27.4

25

3463

93148

198223

253279

301.7

2525

25

565



Figure 6-21 N1274A On-Wafer Gate Charge Measurement Adapter/Selector for 20 A/3 kV, in mm28

2.7

203.

7 156.

7

106.3

106.

3

81.3

22

22

22

34

34.3

31.8

90 7515

373

171.2171.215.3

M4

250

30036.5

330.

2

40.1

56

55.4

31.8

283.

918

0.1

128.

122

22



Figure 6-22 N1275A On-Wafer Gate Charge Measurement Adapter for N1265A, in mm

47.2

22116.

4

44

100

33.75

24

155.

8

52 46.2

20.7

70.2

22

2224

.2

8010

18.2

80


7 Connection and Ordering Examples

Connection and Ordering Examples

This chapter describes prober connection and ordering examples of Keysight B1505A Power Device Analyzer/Curve Tracer, and consists of the following sections.

• "Package Device Measurement Configuration Examples"

• "Configuration Examples for Lateral Device Measurement with Wafer Prober"

• "Configuration Examples for Vertical Device Measurement with Wafer Prober"

• "GaN Current Collapse / Dynamic On-Resistance Measurement System using the N1267A"

• "Upgrading from existing B1505A"

NOTE Please view connection diagrams included in this Chapter in color because cables and connectors are color-coded according to their types.

Figure 7-1 Legend

Prober vender provides items surrounded by the do ed yellow line.

gMark Descrip on

UHV connector

HVTRX connecter

TRX connecter

BNC connecter

SHV connecter

Banana connector

UHV cable

HVTRX cable

TRX cable

BNC cable

SHV cable

Banana cable

1500 A UHC Banana cable

Digital I/O cable

Interlock cable

Mark Descrip on

CMU Cable

To change connec on manually

N1254A-524 500 A Ultra High Current Prober System Cable


Connection and Ordering ExamplesPackage Device Measurement Configuration Examples

Package Device Measurement Configuration ExamplesThis section introduces typical configuration examples shown in Table 7-1.

Table 7-1 Configuration examples

Device Max V Max I HVMC C-VAdd

MPSMUNote

Discrete 3 terminal devices

3 kV 20 A "3kV, 20A Configuration (B1505AP-H20 equivalent)" on page 7-4

3 kV 20 A YES "3kV, 20A with Capacitance Measurement Configuration (B1505AP-H21 equivalent)" on page 7-6

3 kV 500 A or 1500 A

"3 kV, 500 A or 1500 A Configuration (B1505AP-H50 or B1505AP-H70 equivalent)" on page 7-8

3 kV 500 A or 1500 A

YES "3 kV, 500 A or 1500 A with Capacitance Measurement Configuration (B1505AP-H51 or B1505AP-H71 equivalent)" on page 7-10

10 kV 500 A or 1500 A

"10 kV, 500 A or 1500 A Configuration (B1505AP-U50 or B1505AP-U70 equivalent)" on page 7-12

3 kV 20 A YES "Add High Resolution Measurement (10 fA resolution with MPSMU or HPSMU) Capability to 3 kV, 20 A Configuration" on page 7-14

3 kV 20 A YES "3 kV, 20A, High Voltage Medium Current Configuration" on page 7-16

3 kV 40 A "3 kV, 40 A Configuration" on page 7-18

10 kV 500 A YES "10 kV, 500 A, High Voltage Medium Current Configuration" on page 7-23

Discrete 4 terminal device

3 kV 500 A YES "Add High Resolution Measurement Capability (10 fA resolution with MPSMU or HPSMU) to 3 kV, 500A Configuration" on page 7-21



3kV, 20A Configuration (B1505AP-H20 equivalent)

• Device Type: Discrete MOSFET (3 terminals)

• Key Specification

• Max voltage/current: 3 kV/20 A

• Module Selector for multi-parameter automated measurement function

Figure 7-2 Connection example

Table 7-2 Ordering example

Model/Option Quantity Description

B1505A 1 Power Device Analyzer/Curve Tracer mainframe

B1505A-015 1 1.5 m cable

B1512A-FG 1 High Current Source Monitor Unit, 20 A/20 V(Pulsed); 1 A/40 V(DC)

B1513C-FG 1 High Voltage Source Monitor Unit, 3000 V/4 mA (Pulsed & DC)

B1514A-FG 1 Medium Current Source Monitor Unit, 1 A/30 V(Pulsed), 100 mA/30 V(DC)


N1254A-104 1 Triax (f) to BNC (m) adapter


N1259A-001 1 Test Fixture including Inline Package Socket Module and Cables


N1259A-030 1 1 kohm R-box

N1259A-300 1 Module Selector

HVSMU

HCSMU

GNDU

MCSMU

B1505A

16493G-001 Digital I/O cable (Included in N1259A-300)

HVSMU2

HCSMU3 F

HCSMU3 S

HCSMU2 F

HCSMU2 S


16493J-001 Interlock cable (included in B1505A)

GNDU2

FS

FS

N1259A

For Gate

For Drain

For Drain

16493T-001 (Included in the HVSMU)

16493S-001 (Included in the HCSMU)

16494A-001 (Included in the MCSMU)

16493L-001 (Included in B1505A)

ModuleSelector



NOTE This configuration is equivalent to the B1505AP-H20 3 kV / 20 A / Fixture Pack configuration.

N1262A 1 R-box for B1505A

N1262A-036 1 50 Ohm Termination Adapter

1251-2277 1 Banana to BNC Adapter




3kV, 20A with Capacitance Measurement Configuration (B1505AP-H21 equivalent)




• Capacitance measurement with up to 3 kV DC bias






B1505A-015 1 1.5 m cable




B1520A-FG 1 Multi Frequency Capacitance Measurement Unit Module





N1259A-020 1 High Voltage Bias-Tee



N1254A-508N1254A-509(Included in N1259A)

FS

FS

16494A-001 (included in the MCSMU)

GNDU

B1505A

MFCMU

HCSMU3 FHCSMU3 S

HCSMU2 F

HCSMU2 S


GNDU2

FS

FS

HcurHpotLcurLpot


16493L-001 (included in B1505A)


N1259A

For Gate

For Drain

For Drain

MFCMUHighLow

DC Bias InputForce

Guard

HVSMUForce

GuardHVSMU HVSMU2

HCSMU

MCSMU

N1300A-001 (Included in the MFCMU)

N1254A-513(Included in N1259A-020)



16493T-001 (Included in the HVSMU)Module Selector



NOTE This configuration is equivalent to the B1505AP-H21 3 kV / 20 A / C-V / Fixture Pack configuration.








3 kV, 500 A or 1500 A Configuration (B1505AP-H50 or B1505AP-H70 equivalent)



• Max voltage/current: 3 kV/500 A or 1500 A






B1505A-015 1 1.5 m cable




N1265A-001 1 Ultra High Current Expander / Fixture

N1265A-010 1 500 A Ultra High Current 3-pin Inline Package Socket Module

N1265A-015 1 1500 A Current Option(This option needs to be ordered only when 1500 A capability is required)





HVSMU

GNDU

MCSMUMCSMUMCSMU

B1505A

FS

FSFS

For Gate

For N1265A

For N1265A

For Drain

UHC Input V Control

I Control

N1265A (Selector built-in)

GNDU

HVSMU

Gate FGate S

Gate HGate L

Force HForce LSense HSense L


N1254A-508(Included in N12 65A-010) N1254A-509

(Included in N1265 A-010)

N1265-61751 &N1265A-612752

(Include d in N1265 A-010)

SelectorOutput

SelectorInput

16493J-001 Interlock cable (Included in B1505A)

16493G-001 Digital I/O cable (Included in N1265A)






NOTE This configuration is equivalent to the B1505AP-H50 3 kV / 500 A / Fixture Pack or B1505AP-H70 3 kV / 1500 A / Fixture Pack configuration.







3 kV, 500 A or 1500 A with Capacitance Measurement Configuration (B1505AP-H51 or B1505AP-H71 equivalent)




• Capacitance measurement up to 3 kV DC bias


Figure 7-5 Connection example for CV measurement

NOTE For IV measurement connection diagram, please refer to Figure 7-4.




B1505A-015 1 1.5 m cable









HVSMU

GNDU

MCSMU


MCSMUMCSMU


B1505A


FS

FSFS

For Gate

For UHC

For UHC

For Drain

UHC InputV Control

I Control

N1265A

Gate FGate S

GNDU

HVSMU

To change connec onmanually

Bias T HBias T L

Bias T HBias T L

N1260ABias-T

AC-HAC-L

AC-Guard

HcHpLcLp

HV-F

MFCMUN1300A-001 (Included in the MFCMU)

N1254A-513

N1254A-512

N1254A-518



SelectorInput



NOTE This configuration is equivalent to the B1505AP-H51 3 kV / 500 A / C-V / Fixture Pack or B1505AP-H71 3 kV / 1500 A / C-V / Fixture Pack configuration.





N1254A-510 3 Dolphin Clip 2ea (red and black)



N1254A-518 2 SHV Cable 1.5 m







10 kV, 500 A or 1500 A Configuration (B1505AP-U50 or B1505AP-U70 equivalent)



• Max voltage/current:10 kV/500 A or 1500 A


NOTE When using a N1268A, Gate input ports of the N1265A Ultra High Current Expander/Fixture cannot be used due to potential damage to these terminals. Instead, device gate terminal should be connected to SMU 1, 2 ports of the N1265A through the N1265A-040 10 kV Ultra High Voltage Gate Protection Adapter.




B1505A-015 1 1.5 m cable








N1268-STD 1 Ultra High Voltage Expander

GND

MCSMU

B1505A

MCSMUMCSMU

FS

FS

FS

GNDU


UHC Input V ControlI Control

N1268A UHV Exp

B1505A

MCSMUMCSMU

16493J-001 Interlock cable (Included in N1268A)

FS

UHV HighUHV Low

For Gate

For N1268A

For N1268A


N1265A (Selector built-in)N1265AN1265A

N1265A-040

PA

N1254A-520UHV HUHV L

HighLow

SMU 1SMU 1

Gate HGate L

Gate FGate S

16493V-001



FS

For N1265A

For N1265A


16493G-001 Digital I/O cable (Included in B1505A)

SelectorOutput

SelectorInput



NOTE This configuration is equivalent to the B1505AP-U50 10 kV / 500 A / Fixture Pack or B1505AP-U70 10kV / 1500 A / Fixture Pack configuration.

16493V 1 10 kV Ultra High Voltage Cable

16493V-001 1 10 kV Ultra High Voltage Cable (1.5 m)





N1254A-520 1 10 kV Ultra High Voltage Open End Cable, 1 m (pair)







Add High Resolution Measurement (10 fA resolution with MPSMU or HPSMU) Capability to 3 kV, 20 A Configuration



• Max Drain voltage/current: 3 kV/20 A

• Minimum current measurement resolution for Drain and Gate terminals: 10 fA






B1505A-015 1 1.5 m cable

B1510A-FG or B1511B-FG

2 High Power Source/Monitor Unit module (200 V/ 1A) orMedium Power Source/Monitor Unit module (100 V/ 100 mA)









HVSMU

HCSMU

GNDU

MPSMU

B1505A


HVSMU2

HCSMU3 F

HCSMU3 S

HPSMU1 FHPSMU1 S


GNDU2

FS

FS

N1259A

For Gate

For Drain

For Drain



16494A-001 (Included in the MPSMU)


ModuleSelector

MPSMU S16494A-001 (Included in the MPSMU)

HPSMU3 FHPSMU3 S

FFor Drain



3 kV, 20A, High Voltage Medium Current Configuration



• Max voltage/current: 3 kV/20A

• High Voltage Medium Current capability: 2200 V/1.1 A, 1500 V/2.5 A









16493L 1 Ground Unit Cable (Triaxial)

16493L-001 or 002

1 Ground Unit Cable (Triaxial, 1.5m or 3.0m)

16493T 1 High Voltage Source Monitor Unit Cable

16493T-001 or 002

1 High Voltage Source Monitor Unit Cable (1.5m or 3.0m)



HVSMU

HCSMU

GNDU

MCSMUMCSMUMCSMU

N1266A

B1505A

For Gate

For N1266A

For Drain

For Drain

FS

FS



FSFS

GNDU

Vcontrol F

Input Output

Vcontrol SIcontrol FIcontrol S

Input HVSMU

Output High

Output Low

HVSMU2

HCSMU3 F

HCSMU3 S

HCSMU2 F

HCSMU2 S

GNDU2

N1259A


16493T (Included in the HVSMU) 16493T

16493S(Included in the HCSMU)


16493L (Included in B1505A) 16493L

For N1266A

ModuleSelecto









N1266A 1 High Voltage Source Monitor Unit Current Expander







3 kV, 40 A Configuration



• Max voltage/current: 3 kV/40 A without N1259A-300 Module Selector, 3 kV/30 A with N1259A-300 Module Selector


Figure 7-9 Connection example for 3 kV, 30A automated measurement with Module Selector

HCSMU

Dual HCSMU Combina on

adapter16493S-021

HVSMU

HCSMU

GNDU

MCSMU

B1505A


HVSMU2

HCSMU2 F

HCSMU2 S


16493J Interlock cable (included in B1505A)

GNDU2

FS

FS

N1259A

FS

For Gate

For Drain

For Drain

For Drain

HCSMU3 F

HCSMU3 S

16493T (Included in the HVSMU)



16493L (Included in B1505A)

30cm HCSMU cable(Included in 16493S-021)


ModuleSelector



Figure 7-10 Connection example for 3kV, 40A measurement without Module Selector

NOTE N1259A-300 Module selector is available up to 30 A. If 40 A capability is required, please connect HCSMU 1 or HCSMU 2 ports of the N1259A instead of HCSMU 3 ports (Module Selector ports). Please see the connection in Figure 7-10.







16493S 1 High Current Source Monitor Unit Cable

16493S-021 1 Dual HCSMU Combination Adapter





N1259A-022 1 100 k R-box

N1259A-030 1 1 k R-box for gate


HCSMU


adapter16493S-021

HVSMU

HCSMU

GNDU

MCSMU

B1505A


HVSMU2

HCSMU2 F

HCSMU2 S



GNDU2

FS

FS

N1259A

FS

For Gate

For Drain

For Drain

For Drain

HCSMU3 F

HCSMU3 S





30cm HCSMU cable(Included in 16493S-021)


ModuleSelector

HCSMU1 F

HCSMU1S



Add High Resolution Measurement Capability (10 fA resolution with MPSMU or HPSMU) to 3 kV, 500A Configuration




• Minimum current measurement resolution for Drain and Gate terminals: 10 fA






B1505A-015 1 1.5 m cable

B1510A-FG or B1511B-FG

2 High Power Source/Monitor Unit module (200 V/ 1A) or Medium Power Source/Monitor Unit module (100 V/ 100 mA)



N1265A 1 Ultra High Current Expander/Fixture

N1265A-001 1 Ultra High Current Expander/Fixture




HVSMU

GNDU

MCSMUMCSMUMCSMU


B1505A


FS

FSFS

For Gate

For N1265A

For N1265A

For Drain

UHC Input V Control

I Control


GNDU

HVSMU

Gate FGate S




Gate HGate L

Force HForce LSense HSense L


N1254A-508 & 509(Included in N1265A-01 0)

N1265-61751 &N1265A-612752


MPSMU FSFor Drain

SelectorOutput

SelectorInput

16494A-001 (Included in the MPSMU)SMU HSMU L

MCSMU FS

For Substrate SMU 1SMU 1 LSMU 1 H

N1254A-508 N1254A-509



10 kV, 500 A, High Voltage Medium Current Configuration







NOTE When using a N1268A, Gate input ports of the N1265A Ultra High Current Expander/Fixture cannot be used due to potential damage to these terminals. Instead, device gate terminal should be connected to SMU 1, 2 ports of the N1265A through the N1265A-040 10 kV Ultra High Voltage Gate Protection Adapter.




B1505A-015 1 1.5 m cable




16493T-001 1 High Voltage Source Monitor Unit Cable (1.5 m)

16493L 1 Ground Unit Cable

N1266A

HVSMU

GNDU

MCSMUMCSMU

MCSMU

B1505A

MCSMUMCSMU

GNDU

Input Output

Input HVSMU

Output High

Output Low

FS

FSFS

Vcontrol FVcontrol SIcontrol FIcontrol S

FS

FS


N1268A UHV Exp

B1505A

MCSMUFor N1268A

16493J-001 Interlock cable (Included in N1268A-STD)

FS

16493G-001 Digital I/O cable(Included in N1266A)

For Drain

For N1266A

For N1266A

For Gate

For N1265A

N1265A

UHV H

GNDU

UHV LSelectorHVSMU

N1265A

N1265A-040

PA

N1254A-520UHV HUHV L

UHC Input V Control

I Control

SelectorHighLow

SMU 1 SMU 1

For N1265A / N1268A

Gate HGate L

Gate FGate S

16493V-001

16493L-001

16493T-001(Included in the HVSMU)

16494A-001(Included in the MCSMU)


16493T-001


16493J Interlock cable (Included in B1505A)

16493G-001 Digital I/O cable(Included in N1268A-STD)




16493L-001 1 Ground Unit Cable (Triaxial, 1.5 m)









N1268-STD 1 Ultra High Voltage Expander




N1254A-510 3 Dolphin clip adapter, black 1 ea. and red 1 ea.

N1254A-520 1 10 kV Ultra High Voltage Open End Cable, 1 m






Connection and Ordering ExamplesConfiguration Examples for Lateral Device Measurement with Wafer Prober

Configuration Examples for Lateral Device Measurement with Wafer Prober This section introduces typical configuration examples for lateral device measurement with wafer prober shown in Table 7-12.



MPSMUNote

Lateral 4 terminal on-wafer device

3 kV 20 A "3 kV, 20 A Measurement for On-Wafer Lateral Device" on page 7-26

3 kV 20 A YES "3 kV, 20 A, Capacitance Measurement for On-Wafer Lateral Device" on page 7-30

3 kV 20 A YES "Add High Resolution Measurement (10 fA resolution with MPSMU or HPSMU) Capability to 3 kV, 20 A, Capacitance Measurement for On-Wafer Lateral Device" on page 7-33



3 kV 500 A YES "3 kV, 500 A, Capacitance Measurement for On-Wafer Lateral Device" on page 7-40

3 kV 500 A YES "3 kV, 500 A, High Voltage Medium Current Measurement for On-Wafer Lateral Device" on page 7-42




3 kV, 20 A Measurement for On-Wafer Lateral Device

• Device Type: Lateral MOSFET (4 terminals)



Figure 7-13 Connection example for 3 kV/20A measurement without N1258A Module Selector

NOTE Prober vendor is responsible for cabling inside the shielding box.

Table 7-13 Required equipment, accessories, and cables



B1511B-FG 1 Medium Power Source/Monitor Unit module (100 V/ 100 mA)





16493T-001 or 002

2 High Voltage Source Monitor Unit Cable (1.5 m)

16493U 1 High Current BNC Coaxial Cable

16493U-001 2 High Current BNC Coaxial Cable (1.5 m)

16494A 1 Triaxial Cable

HVSMU

HCSMU

GNDU

MCSMU

B1505A

DG

S

HCSMU Non-Kelvin adapter

16493S-011

Dual HCSMU Kelvin

Combina on adapter

16493S-020

Chuck

HF

HS

LS

LF

MPSMU

Protec on Adapter

N1261A-003

For Gate


FS

FSFS

16493J Interlock cable (Included in the B1505A)

For Chuck

For Drain

For Drain

16493L(Included in B1505A)



16494A-00316494A(Included in the MPSMU)

16493T

16494A(Included in the MCSMU)

R-Box1kO

N1262 A-010

R-Box100kO

N1262A-002

16493U-001

16493U-0011250-2405



16494A-003 1 Triaxial Cable (80 cm)

1250-2405 1 BNC-T Plug (m)-BNC (f)-BNC (f) adapter, 1ea


16493S-011 1 High Current Source Monitor Unit non-Kelvin Adapter


N1261A 1 Protection Adapter

N1261A-003 1 Protection Adapter for High Power Source Monitor Unit (HV-Triaxial output)


N1262A-002 1 100 kohm R-box

N1262A-010 1 1 kohm R-box for gate (Triaxial output)











Figure 7-14 Connection example for 3 kV/20 A automated measurement with N1258A Module Selector










16493T-001 or 002




HVSMU

HCSMU

GNDU

MCSMU

B1505A

N1258A

MPSMU

Protec on Adapter

N1261A-003

ChuckD

G

S


16493S-011

HF

LF

For Gate



FS

FSFS

High F

High S

Low S

Low F

Digital I/O

HVSMU

HCSMU FHCSMU S

GNDU


For Chuck

For Drain

For Drain





16493U-001

1250-2405


16494T

R-Box1kO

N1262 A-010






N1258A 1 Module Selector for B1505A













3 kV, 20 A, Capacitance Measurement for On-Wafer Lateral Device



• Max Voltage/Current: 3 kV/30 A with Module Selector, 3 kV/40 A without Module Selector



Figure 7-15 Connection example for IV measurement

HVSMU

HCSMU

GNDU

MCSMU

B1505A


N1258A

MPSMU

Protec on Adapter

N1261A-003

ChuckD

G

S


16493S-011

HF

LF

R-Box1kohm

N1262 A-010

For Gate

For Drain

For Drain



FS

FSFS

HVSMU

HCSMU F

GNDU


For Chuck

N1260A Bias-T

AC-HAC-L

AC-Guard

HcHpLcLp


MFCMUN1300A (Included in the MFCMU)





16493T

16493U-001

1250-2405

HCSMU S

16494A-003

Low F

High F

High S

Low S




NOTE The connection diagram in Figure 7-16 shows Cds measurement.











16493T-001 or 002









HVSMU

HCSMU

GNDU

MCSMU

B1505A


N1258A

MPSMU

Protec on Adapter

N1261A-003

ChuckD

G

S


16493S-011

HF

LF

R-Box1kohm

N1262 A-010

For Gate

For Drain

For Drain



FS

FSFS

HVSMU

HCSMU F

GNDU


For Chuck

N1260A Bias-T

AC-HAC-L

AC-Guard

HcHpLcLp


MFCMUN1300A (Included in the MFCMU)

N1254A-518





16493T

16493U-001

1250-2405

HCSMU S

16494A-003













N1256A-518 3 SHV Cable 1.5 m




Add High Resolution Measurement (10 fA resolution with MPSMU or HPSMU) Capability to 3 kV, 20 A, Capacitance Measurement for On-Wafer Lateral Device




• Drain leakage current down to 10 fA










B1514A-FG 1 Medium Current Source Monitor Unit, 1 A/30 V(Pulsed); 100 mA/30 V(DC)


HVSMU

HCSMU

GNDU

MCSMU

B1505A

N1258A

MPSMU

Protec on Adapter

N1261A-003

ChuckD

G

S


16493S-011

HF

LF

For Gate



FS

FSFS

High F

High S

Low S

Low F

Digital I/O

HVSMU

HCSMU FHCSMU S

GNDU


For Chuck

For Drain

For Drain





16493U-001

1250-2405


16494T

R-Box1kO

N1262 A-010

MPSMUFor Drain HPSMU FHPSMU S

16494A (Included in the MPSMU)FS



16493T-001 or 002























• Max Voltage/Current: 3 kV/30 A with Module Selector, 3 kV/40 A without Module Selector


Figure 7-18 Connection example for 3kV, 30A measurement with N1258A Module Selector

HCSMU


adapter16493S-021

HVSMU

HCSMU

GNDU

MCSMU

B1505A

N1258A

MPSMU

Protec on Adapter

N1261A-003

DG

S


16493S-011

HF

LF

R-Box1kohm

N1262A-010

For Gate



FS

FSFS

High F

High S

Low S

Low F

Digital I/O

HVSMU

HCSMU FHCSMU S

GNDU

FS


For Chuck

Chuck

For Drain

For Drain

For Drain





16494A-003


30 cm HCSMU cable(Included in 16493S-021)

16493T

16493U-0011250-2405

16494A(Included in the MPSMU)



Figure 7-19 Connection example for 3kV, 40A measurement without N1258A Module Selector

NOTE Module selector is available up to 30 A. If 40 A capability is required, please connect 16493S-020 Dual HCSMU Kelvin Connection Adapter without a N1258A Module Selector (See Figure 7-19).










16493S-020 1 Dual HCSMU Combination Adapter (This adapter is used when a N1258A Module Selector is not used)

16493S-021 1 Dual HCSMU Combination Adapter (This adapter is used with a N1258A Module Selector)



16493T-001 or 002



HCSMU


adapter16493S-021

Dual HCSMU Kelvin

Combina on adapter

16493S-020

HVSMU

HCSMU

GND

MCSMU

B1505A

DG

S


16493S-011

HF

HS

LS

LF

R-Box1kO

N1262 A-010

R-Box100kO

N1262A-002

MPSMU

Protec on Adapter

N1261A-003

For Gate


FS

FSFS


For Chuck

Chuck

For Drain

For Drain

For Drain






16494A-003

16493T

16493U-001

16493U-001

1250-2405

FS













N1262A-002 1 100 kohm R-box

























1250-2405 1 BNC-T plug (m)-BNC (f)-BNC (f) adapter, 1ea

D

G

S

HVSMU

GNDU

MCSMU

B1505A

MCSMUMCSMU


FS

FS

FS

HVSMU

GNDU


For Gate

For N1265A

For N1265A

For Drain

HF

LF

HS

LS

Gate

N1265A

Gate

SelectorHighLow

MCSMUFS

N1254A-524


Chuck

For Chuck

Gate FGate S






16493S-011


16493U-001

16493U-001

16493U-001

1250-2405




N1254A-524 1 Ultra High Current Prober System Cable







3 kV, 500 A, Capacitance Measurement for On-Wafer Lateral Device







NOTE The connection diagram in Figure 7-16 shows Cds measurement.

NOTE For IV measurement connection diagram, please refer to Figure 7-20.








63

16494J Interlock (Included in B1505A)


D

G

S

HVSMU

GNDU

MCSMU

B1505A

MCSMUMCSMU

FS

FS

FS

HVSMU

GNDU

Gate FGate S


For Gate

For UHC

For UHC

For Drain

N1265A

MCSMUFS

Chuck

For Chuck

N1260A Bias-T


HcHpLcLp

HV-F AC-HAC-L

AC-GuardMFCMU

N1300A (Included in the MFCMU)

N1254A-518


16494T (Included in the HVSMU)16493L (Included in B1505A)



16493S-011


16493U-001

16493U-001















N1254A-518 3 SHV Cable 1.5 m






3 kV, 500 A, High Voltage Medium Current Measurement for On-Wafer Lateral Device














16493T-001 or 002

1 High Voltage Source Monitor Unit Cable (1.5 m or 3.0 m)


D

G

S

N1266A

HVSMU

GNDU

MCSMUMCSMU

MCSMU

B1505A

MCSMUMCSMU


GNDU

Input Output

Input HVSMU

Output High

Output Low

FS

FSFS

Vcontrol FVcontrol SIcontrol FIcontrol S

FS

FS

16493G-001Digital I/O cable (Included in N1266A)

HVSMU

GNDU


For Gate

For N1265A

For N1265A

For Drain

For N1266A

For N1266A HF

LF

HS

LS

Gate

N1265A

Gate

SelectorHighLow

MCSMUFS

N1254A-524


Chuck

For Chuck

Gate FGate S

16493L





16493T



16493S-011


16493U-001

16493U-001

16493U-001

1250-2405



16493L-001 or 002

1 Ground Unit Cable (Triaxial, 1.5 m or 3.0 m)






















NOTE When using the N1268A, P1 to P4 terminals need to be connected to Gate, Source, Chuck and Drain respectively, instead of the connection shown in Figure 7-23.











D

G

S

GNDU

MCSMU

B1505A

MCMC


FS

FS

GNDU

UHC Input V Control

I Control

For Gate

HF

LF

HS

LS

Gate

N1265A

Gate

SelectorOutput

HighLow

N1254A-524


MCSMUMCSMU

N1268A UHV Exp

N1269A

P1

P2

P3

Gate

Source

ChuckChuck MCSMU FChuck MCSMU S

Gate MCSMU FGate MCSMU S

P3To Chuck

P2

To S

P1

To G

MCMC

FS

FSMCSMU

MCSMU

FSFor N1268A

UHV Low

ChuckFor N1265A

For N1265A / Chuck

Gate FGate S

16493V-002 (3m cable)

16493G-001 Digital I/O control cable (Included in N1265A)





N1254A-521

For N1268A FSFSFSFS

To D

P4




N1269A 1 Ultra High Voltage Connection Adapter


N1254A-521 1 10 kV Ultra High Voltage Jack to Jack Adapter






Connection and Ordering ExamplesConfiguration Examples for Vertical Device Measurement with Wafer Prober

Configuration Examples for Vertical Device Measurement with Wafer ProberThis section introduces typical configuration examples for vertical device measurement with wafer prober shown in Table 7-22



MPSMUNote

Vertical 3terminal on-wafer device

3 kV 20 A "3 kV, 20 A Measurement for On-Wafer Vertical Device" on page 7-47

3 kV 20 A YES "3 kV, 20 A, Capacitance Measurement for On-Wafer Vertical Device" on page 7-51

3 kV 20 A YES "Add High Resolution Measurement (10 fA resolution with MPSMU or HPSMU) Capability to 3 kV, 20 A, Capacitance Measurement for On-Wafer Vertical Device" on page 7-54



3 kV 500 A YES "3 kV, 500 A, Capacitance Measurement for On-Wafer Vertical Device" on page 7-60

3 kV 500 A YES "3 kV, 500 A, High Voltage Medium Current Measurement for On-Wafer Vertical Device" on page 7-62




3 kV, 20 A Measurement for On-Wafer Vertical Device

• Device Type: Vertical MOSFET (3 terminals)


• Max Voltage/Current: 3 kV/20 A

Figure 7-24 Connection example for 3 kV/20A measurement without N1258A Module Selector















HVSMU

HCSMU

GNDU

MCSMU

B1505A

G

S


16493S-011

Dual HCSMU Kelvin

Combina on adapter

16493S-020

HF

HS

LS

LF

For Gate


FS

FS

16493J-001 Interlock cable

D(Chuck)For Drain

For Drain





16494A-003

R-Box1kO

N1262 A-010

1250-2405

16493U-001

R-Box100kO

N1262A-002




N1262A-002 1 100 kohm R-box








Figure 7-25 Connection example for 3 kV/20 A automated measurement with N1258A Module Selector


















HVSMU

HCSMU

GNDU

MCSMU

B1505A

N1258A

G

S


16493S-011

For Gate



FS

FS

High F

High S

Low S

Low F

Digital I/O

HVSMU

HCSMU FHCSMU S

GNDU


D(Chuck)For Drain

For Drain





16493U-001

1250-2405

16494A-003

R-Box1kO

N1262 A-010



3 kV, 20 A, Capacitance Measurement for On-Wafer Vertical Device






Figure 7-26 Connection example for IV measurement

HVSMU

HCSMU

GNDU

MCSMU

B1505A


N1258A

D (Chuck)G

S


16493S-011

HF

LF

For Gate

For Drain

For Drain



FS

FS

HVSMU

HCSMU F

GNDU


N1260A Bias-T

AC-HAC-L

AC-Guard

HcHpLcLp

MFCMU

HCSMU S

N1300A (Included in MFCMU)


16494A-003

16493U-001

1250-2405

16493T (Included in the HVSMU. Please change connec on manually)


R-Box1kohm

N1262 A-010

High F

High S

Low S

Low F




NOTE The connection diagram n Figure 7-27shows Cds measurement.


NOTE In the connection diagram in Figure 7-27, a High Voltage Triaxial jack connector is used to connect the wafer chuck. Then you need a adapter to connect the High Voltage Triaxial plug connector to the SHV connector. Assemble it by using the N1262A-021 or consult your prober vendor.














HVSMU

HCSMU

GNDU

MCSMU

B1505A


N1258A

D (Chuck)G

S


16493S-011

HF

LF

For Gate

For Drain

For Drain



FS

FS

HCSMU F

GNDU


N1260A Bias-T

AC-HAC-L

AC-Guard

HcHpLcLp

MFCMU

N1262A-021 can be used for custom adapter (SHV jack to HVTRX jack)

HCSMU S

N1300A (Included in MFCMU)

N1254A-518


16494A-003

16493U-001

1250-2405

16493T (Included in the HVSMU. Please change connec on manually)


R-Box1kohm

N1262 A-010

UniversalR-Box

N1262A-021









N1262A-021 1 Universal R-Box, HV Triaxial to SHV




N1254A-518 3 SHV Cable 1.5 m




Add High Resolution Measurement (10 fA resolution with MPSMU or HPSMU) Capability to 3 kV, 20 A, Capacitance Measurement for On-Wafer Vertical Device




• Drain leakage current down to 10 fA




HVSMU

HCSMU

GNDU

MCSMU

B1505A

N1258A

G

S


16493S-011

For Gate



FS

FS

High F

High S

Low S

Low F

Digital I/O

HVSMU

HCSMU FHCSMU S

GNDU


D(Chuck)For Drain

For Drain





16493U-001

1250-2405

16494A-003

R-Box1kO

N1262 A-010

MPSMUFor Drain HPSMU FHPSMU S

16494A (Included in the MPSMU)FS






• Max voltage/current: 3 kV/30 A with Module Selector, 3 kV/40 A without Module Selector


Figure 7-29 Connection example for 3kV, 30A measurement with a N1258A Module Selector

HCSMU


adapter16493S-021

HVSMU

HCSMU

GNDU

MCSMU

B1505A

N1258A

G

S


16493S-011

HF

LF

R-Box1kohm

N1262 A-010

For Gate

For Drain

For Drain



FS

FS

High F

High S

Low S

Low F

Digital I/O

HVSMU

HCSMU FHCSMU S

GNDU

FSFor Drain


D(Chuck)






16494A-003

30 cm HCSMU cable(Included in 16493S-021)

16493U-0011250-2405



Figure 7-30 Connection example for 3kV, 40A measurement without a N1258A Module Selector

NOTE Module selector is available up to 30 A. If 40 A capability is required, please connect 16493S-020 Dual HCSMU Kelvin Connection Adapter without using a N1258A Module Selector (See Figure 7-30).









16493S-020 1 Dual HCSMU Combination Adapter (This adapter is used when a N1258A Module Selector is not used).

16493S-021 1 Dual HCSMU Combination Adapter (This adapter is used with a N1258A Module Selector)






HCSMU


adapter16493S-021

Dual HCSMU Kelvin

Combina on adapter

16493S-020

HVSMU

HCSMU

GNDU

MCSMU

B1505A

G

S


16493S-011

HF

HS

LS

LF

R-Box100kO

N1262A-002

For Gate

For Drain

For Drain


FS

FS

For DrainFS


D(Chuck)






16494A-003

R-Box1kohm

N1262 A-010

16493U-0011250-2405

16493U-001







N1262A-002 1 100 kohm R-box

























G

S

H V SM U

G N D U

M C SM U

B15 0 5A

M C SM UM C SM U

16493J Inte r loc k c able (Inc lude d in B1505A)

FS

FS

FS

HV SMU

GN DU

UHC Input V Cont ro lI Cont ro l

For Gat e

For N12 65 A

For N1 265 A

For Drain

HFLFHSLS

Gate

N 12 65 A

Gate

Selec torHighLow

N12 54A -52 4

1649 3G -001 D igi ta l I/ O cable (In clu ded in N1 265A)

D (Chuc k)

Ga te FGa te S

164 93T ( In clud ed in the H VS M U)

164 93L ( In clud ed in B 1505A)

164 94A (In clud ed in the M CSM U)



3 kV, 500 A, Capacitance Measurement for On-Wafer Vertical Device

• Device Type: Vertical Device (3 terminals)







NOTE Please refer to Figure 7-31 for IV measurement connection example.

NOTE In this configuration example, a High Voltage Triaxial jack connector is used to connect the wafer chuck. Then you need a adapter to connect the High Voltage Triaxial plug connector to the SHV connector. Assemble it by using the N1262A-021 connector or consult your prober vendor.



G

S

HVSMU

GNDU

MCSMU

B1505A

MCSMUMCSMU

FS

FS

FS

HVSMU

GNDU

Gate FGate S


For Gate

For UHC

For UHC

For Drain

N1265A

N1260A Bias-T


HcHpLcLp

HV-F AC-HAC-L

AC-GuardMFCMU

D (Chuck)

N1254A-518

N1300A (Included in the MFCMU)




N1262A-021 can be used for custom adapter (SHV jack to HVTRX jack)

UniversalR-Box

N1262A-021














N1254A-518 3 SHV Cable 1.5 m



N1262A-021 1 Universal R-Box, HV Triaxial to SHV




3 kV, 500 A, High Voltage Medium Current Measurement for On-Wafer Vertical Device






Figure 7-33 3 kV, 500 A, High Voltage Medium Current Measurement for On-wafer Vertical Device








16493T-001 or 002

1 High Voltage Source Monitor Unit Cable (1.5 m or 3.0 m)


S

N 1266A

H V SM U

G N D U

M C SM UM C SM U

M C SM U

B15 0 5A

M C SM UM C SM U

16493J Inte r loc k c able (Inc lude d in B1505A)

GNDU

Input Output

Input HV SM U

Output High

Output L ow

FS

FSFS

V cont ro l FVc ontro l SIcont ro l FIc ontro l S

FS

FS

1649 3G -001 D igi ta l I/ O cable (Inclu ded in N 1266A)

HV SMU

GN DU

UHC Input V Cont ro lI Cont ro l

For Ga te

For N 126 5A

For N 126 5A

For Drain

For N 126 6A

For N 126 6A HFLFHSLS

Gate

N 12 65 A

Gate

Selec torHighLow

N12 54A -52 4

16 493G -001 D ig ital I/ O cab le (Inclu ded in N1265A)

G

D (Chuc k)

Ga te FGa te S

16493T (Inclu ded in th e H VSM U) 1 6493T

16493 L (Included in B150 5A)

1649 4A ( In clud ed in the M C SM U)

1 6493L

164 94A ( In clud ed in the M C SM U)



16493L-001 or 002

1 Ground Unit Cable (Triaxial, 1.5 m or 3.0 m)
















NOTE When using the N1268A, P1, P2 and P4 terminals need to be connected to Gate, Source and Drain respectively, instead of the connection shown in Figure 7-34.











G

S

GNDU

MCSMU

B1505A

MCMC

FS

FS

GNDU


For Gate

HF

LF

HS

LS

Gate

N1265A

Gate

SelectorHighLow

N1254A-524


MCSMUMCSMU

N1268A UHV Exp16493J Interlock(Included in B1505A)

N1269A

P1

P2

For N1265A

Gate

SourceChuckChuck MCSMU F

Chuck MCSMU S

Gate MCSMU FGate MCSMU S

To S

P1

To G

To D

MCMC

FS

FSMCSMU

MCSMU

FSFor N1268A

D(Chuck)UHV Low

P4

Gate FGate S




16493V-002 (3m cable)

16493G-001 Digital I/O cable (Included in N1268A)N1254A-521

P2


FSFSFSFS

For N1268A

For N1265A




N1269A 1 Ultra High Voltage Connection Adapter


N1254A-521 1 10 kV Ultra High Voltage Jack to Jack Adapter






Connection and Ordering ExamplesGaN Current Collapse / Dynamic On-Resistance Measurement System using the N1267A

GaN Current Collapse / Dynamic On-Resistance Measurement System using the N1267A

Non-Kelvin Connection with the N1259A Test Fixture for Package Device











N1267A 1 High Voltage Source Monitor Unit / High Current Source Monitor Unit Fast Switch



N1259A-022 1 100 kohm R-box


N1259A-035 1 Universal R-Box

N1267A

GNDU

B1514AMCSMU

B1512AHCSMU

B1513CHVSMU

B1514AMCSMU

HVSMU

F

S

F

S

GNDU

High

Low

HVSMU1

AUX 1

F

S

High FHigh S

Low FLow S

HV Force

AUXSignal

HCSMU

MCSMU

B1505A N1259A16493T(Included in the HVSMU)

16493U-001

N1254A-507





N1254A-104TRX(J) to BNC(P) adapter

HCSMU2

HCSMU2





N1254A-507 1 HVSMU Coaxial Cable Assy 1.5 m

N1254A-104 1 Triax (m) to BNC (f) adapter





1251-2277 1 Adapter-BNA BNC Jack Black




Kelvin Connection with the N1259A Test Fixture for Package Device





NOTE The N1259A-300 Module Selector option for the N1259A Test Fixture is required for making Kelvin connection.










N1259A-022 1 100 kohm R-box


N1259A-035 1 Universal R-Box


N1267A

GNDU

B1514AMCSMU

B1512AHCSMU

B1513CHVSMU

B1514AMCSMU

F

S

F

S

GNDU

High

Low

HVSMU1

AUX 1

F HCSMU2

S

High FHigh SLow FLow S

HV Force

Banana Cable

AUXSignal

HVSMU2

Module Selector

HighSense

GNDU1F

S

B1505A 16493T(Included in the HCSMU)

HVSMU

HCSMU

MCSMU



N1254A-104TRX(J) to BNC(P) adapter

16493U-001

N1259A





N1254A-507




N1254A-507 1 HVSMU Coaxial Cable Assy 1.5 m

N1254A-104 1 Triax (m) to BNC (f) adapter









Non-Kelvin Connection with Prober for On-Wafer Lateral Device















8120-1838 3 BNC Cable, 30 cm



HVSMU

HCSMU

GNDU

MCSMUMCSMU

B1505A

N1267A

For Gate

Chuck

DG

SN1267A

For Drain

For Drain


16493S-011

High

Low


16493S-011


8120-1838BNC Cable, 30 cm

MCSMUFor Chuck







1250-2405Plug-BNC (f)-BNC (f)

1250-2405Plug-BNC (f)-BNC (f)N1262A-036 50 Ohm

Termina on Adapter

HVSMU

FS

HCSMU

FS

MCSMU

GNDU



Kelvin Connection with Prober for On-Wafer Lateral Device















8120-1838 5 BNC Cable, 30 cm




HVSMU

HCSMU

GNDU

MCSMUMCSMU

B1505A

N1267A

For Gate

Chuck

DG

SN1267A

For Drain

For Drain


16493S-011

High

Low


16493S-011



MCSMUFor Chuck








GNDU Protec on

AdapterN1261A-002



N1262A-036 50 Ohm Termina on Adapter

HVSMU

FS

HCSMU

FS

MCSMU

GNDU






N1261A-002 1 Protection Adapter Ground Unit (BNC output)



Connection and Ordering ExamplesUpgrading from existing B1505A

Upgrading from existing B1505AB1505A owners can upgrade their own B1505A to expand voltage and current range or add capacitance measurement capability.

Please refer to the following step by step instructions on how to upgrade your existing B1505A.

• Step 1: Create a full configuration based on your measurement requirement

• Step 2: Check if existing modules are re-usable in the new configuration

• B1510A HPSMU

• B1510A HPSMU used for module selector input can be re-used for the same purpose.

• B1510A HPSMU used for a Gate SMU should be replaced with a B1514A MCSMU

• B1512A HCSMU

• B1512A HCSMU can be re-used as a controller SMU for a N1265A Ultra High Current Expander/Fixture, N1266A HVSMU Current Expander and N1268A Ultra High Voltage Expander (V control SMU only). In this case, one N1254A-103 Triaxial (m) to BNC (f) adapter and N1254A-517 Triaxial (f) to Triaxial (m)adpter are required.

• B1513A/B HVSMU

• B1513A HVSMU cannot be used with N1267A HVSMU/HCSMU Fast Switch unit. It must be replaced to the B1513Bor later

• B1513A HVSMU cannot be used for gate charge measurement. (N1259A/N1265A-014, N1274A orN1275A). It must be replaced to the B1513B or later.

• B1513A HVSMU needs to be replaced with a B1513B/C HVSMU when you make GaN current collapse measurement using a N1267A HVSMU/HCSMU Fast Switch

• B1513A/B HVSMU needs to be replaced with a B1513C HVSMU when you install more than one HVSMU. (Only B1513C supports multiple HVSMU configuration)

• Step 3: Check total number of consumed slots. If the total number of consumed slots exceeds 10, replace dual-slot modules with single-slot modules.

• B1510A HPSMU

• B1510A HPSMU may be replaced with a B1511B MPSMU

• B1512A HCSMU

• B1512A HCSMU may be replaced with a B1514A MCSMU

• Step 4: Check if existing cables are re-usable or not and add cables if necessary



• Cables are re-usable in the case listed below

• B1513A HVSMU to B1513C HVSMU

• B1510A HPSMU to B1511B MPSMU

• B1510A HPSMU to B1514A MCSMU

• Step 4: Add a N1260A High Voltage Bias-Tee for capacitance measurement up to 3 kV if necessary

• The N1265A Ultra High Current Expander/Fixture does not have a Bias-Tee option like the N1259A. The N1260A High Voltage Bias-Tee is necessary when making capacitance measurement up to 3 kV using a N1265A.



Example of how to upgrade existing B1505A

• Existing B1505A system configuration

• B1505A with one unit of B1512A HCSMU, one unit of B1513A HVSMU, two units of B1510A HPSMU and one unit of B1520A MFCMU

• N1259A Test Fixture with N1259A-010 3-line inline socket module option, N1259A-020 High Voltage Bias-Tee option and N1259A-300 Module Selector option.

• Conditions and required specification

• Device Type: Three terminal discrete MOSFET



• Drain leakage current measurement down to 10 fA

Figure 7-39 Connection example of upgraded B1505A

NOTE The N1259A-010 Inline Package Socket Module (3 pin) cannot be used with the N1265A Ultra High Current Expander/Fixture due to its current limitation (maximum current is 40 A).

NOTE The N1259A-020 High Voltage Bias-Tee option cannot be re-used.



B1505AU 1 Power Device Analyzer/Curve Tracer mainframe

B1505AU-014 2 Medium Current Source Monitor Unit (B1514A)


Exis ng B1505A

HVSMU

GNDU

MFCMU

HPSMUF

SFor Drain

For Drain

For Drain

For Gate HPSMUF

S

HCSMUF

S

New B1505A

For Drain

For Drain

For Gate

FS

FS

N1265AN1265A

Replaced with2 MCSMUs

Reused

Reused

Reused as a GateSMU

Reused

UHC InputV Control

I Control


GNDU

HVSMU

Gate FGate S

Gate HGate L

Force HForce L

Sense HSense L


N1254A-508(Included in N12 65A-010) N1254A-509

(Included in N1265 A-010)

N1265-61751 &N1265A-612752


SelectorOutput

SelectorInput

16493J-001 Interlock cable (Included in exi ng B1505A)


16493T


16494A

HVSMU

GNDU

MFCMU

HPSMU

HCSMU

MCSMUMCSMU

FS

FS

SMU HSMU L

16494A

N1260ABias-Tee

FSFS

N1300A

16493S



16494A-001 or 002

2 Triaxial Cable (1.5 m or 3.0 m)(Two Triaxial cables which existing B1510A is furnished with can be re-used)










N1254A-518 2 SHV Cable 1.5 m






This information is subject to change without notice. © Keysight Technologies 2009-2020

Edition 12, November 2020

*B1505-90090*B1505-90090

www.keysight.com

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