IWATSU Displacement & Thickness Meter elements, crystal vibration, ... Sensor head Piezo-electric...

NON-CONTACT SENSORS

DISPLACEMENT METER/THICKNESS METER

DIGEST CATALOG

DISPLACEMENT METER/THICKNESS METER

DIGEST CATALOGDisplacement Meter ST-3571A

Displacement Meter ST-3512




Thickness Meter ST-3523

Fiber Optic Displacement Meter ST-3711

Moisture Meter ST-3808Moisture Meter ST-3808

Thickness Meter ST-3525

Anglevel Meter AL-12

Heterodyne Laser Displacement Meter ST-3761

2

NON-CONTACT DISPLACEMENT METERTHICKNESS METER

The meters are called “Non-contact displacement meter” or “Thickness meter”, and detect physical quantity, such as displacement, vibration, and

thickness, with non-contact probes, then convert to electrical quantity and measure original physical quantity accurately. The sensor that is

integrated inside the probes detects the quantity. The methods are capacitance, laser, fiber optics etc. As every method has its own characteristics,

you can choose its usage. As measurements are performed using a non-contact method, you can measure accurately without affecting the object

being tested.

Demands on the non-contact displacement meter have grown vastly in recent years, such as semiconductors, precision motors, various disks (such

as hard disks and compact disks, etc), and various films, and both meters have had to expand to meet those needs.

Application Field(1) Measurement of axial vibration, radial vibration, circularity, vibration, and acceleration:

precision motors, video cylinders, hard disks, compact disks, engines, and rollers for office appliances

(2) Measurement of board thickness, flatness, warping, roughness, scratches, edges, and size:

silicon wafers, various disks, glass, printed boards, films, and sheets

(3) Measurement of accuracy positioning and size:

semiconductor manufacturing machines, semiconductor manufacturing testers, processing machine for precision machines, machine parts

assembling, XY stage, and liquid level

(4) Measurement of vibration element oscillation, vibration times, vibration mode, and response characteristics:

piezo-electric elements, crystal vibration, ultrasonic vibration, and speakers

(5) Measurement of external dimension:

wire/pipes, tapes/sheets, copy drums, rubber rollers, precision parts, and assembly parts

Comparing Each Method

ST-3501

ST-3511

ST-3512

ST-3521

ST-3571

ST-3525

ST-3523

ST-3711

ST-3761

ST-3808

The probe and object being tested generate capacitance, and capacitance changes

according to the distance “D”. A capacitance-voltage conversion circuit measures

displacement to output voltage, which is proportional to “D”.

The principle is simple, and it measures minute displacement stability and precisely.

The measurement objects are a conductor and semiconductor.

Fix the displacement probe with the known distance “c” on both sides, and measure

“a” and “b”, and then thickness “t” can be expressed in the following formula.

t = c - (a + b)

Fix probe and ground electrode with the known distance “D”, and insert the insulation

of thickness “t” being tested in between.

As the capacitance varies, being proportional to the dielectric constant of the

insulator and thickness “t”, the thickness “t” of the object being tested is measured

when calibrated with the same insulator beforehand.

Produces probes that bundle fiber optics for transmitting and receiving. Is measured

using the principle that light quantity, which reflects to the receiving fiber from the

object being tested, is changed by the distance “D”. It is also suitable to measure

vibrators that change to “D” rapidly.

Using an optical heterodyne interferometer, displacement can be measured using the

beat signal phase difference generated by the optical path difference of the measur-

ing beam and reference beam. The reference beam is generated when the original

light overlaps the light created when the laser is reflected off the object being tested.

Using a laser allows you to measure the operating distance between tiny measuring

spots and the object being tested. Also it is possible to measure a variety of speeds,

from motionless surfaces (which was difficult with the Doppler vibrometer) to high-

speed vibrating surfaces.

This meter is a capacity-voltage transducer in principal. The transducer detects the

capacity and converts equivalently, then measures the moisture percentage of a

dielectric, such as ink. Use this machine after calibrating the known moisture

percentage.

Cap

acita

nce

Sensor method Principle and characteristic Model name

Displace-

ment meter

Thickness

meter

(Conductor)

Thickness

meter

(Insulation)

Fiber optics

Heterodyne Laser

Displacement

Meter

Moisture meter

Probe

Object being tested

D

Probe

ProbeObject being tested

t

a

bc

t = c - (a + b)

ProbeObject being tested

D

Ground electrode

t

InkProbe

Fibe

r opt

ics

Ref

lect

ed li

ght

Rec

eive

r

Tran

smitt

er

Tran

smitt

ing

Rec

eivi

ng

Workingdistance

Projection/receiving lightbeam

Sensor head

3

Measurement of radial vibration and axial vibration

Measurement of gap

Example of system application

Measurement of sheet thickness

Measurement of polygon mirror vibration

Measurement of piezo-electric element vibration

Measurement of silicon wafer thickness

Measurement of piezo-electric element displacement


Measurement Application Examples

Motor

Probe

Probe

Axial

Radial

Gap

Sheet

Thickness meter probe

Thickness meter main unit

Oscilloscope

Controller

Spindle motor

Hard disk

Personalcomputer

Probe

Silicon wafer

Probe

Piezo-electric element

Probe

Probe

Polygon mirror

Laser sensor section

Main unit

Main unit

Rotator

Displacement meter probe

Oscilloscope

Personal computer

(Capacitance) (Capacitance)

(Capacitance) (Fiber optics)

(Capacitance and laser) (Capacitance)

(Capacitance) (Heterodyne)

Sensor head

Piezo-electric element

4

Application of Displacement Meter and Thickness Meter —How to evaluate high speed and high precisionmotors (rotators)e.g. Measurement of radial vibration and axial vibration

Do you have trouble evaluating high speed and high accuracy motors even though you made them?

RRO and NRRO measurement of high speed and high accuracy motors (rotators)To evaluate the performance of motors (rotators such as HDD, FD, MO, DVD, VTR), it is necessary to measure the vibration of the

direction of an arrow as shown below in the actual operation.

We have a large assortment of probes to measure accurately, even if the measurement objects are narrow or there are obstacles

around the measurement objects.

Exa

mpl

e 1

of a

dvan

ced

mea

sure

men

t

RRO (Repeatable Runout)

NRRO (Non-Repeatable Runout)

Probe

Work

Gap

Gap

Probe

Probe

Measuring surface

Measuring surface

Measuring surface

45°

45°45°

MIN ø0.5

MIN ø0.5Radial

Axial

MIN ø0.5

MIN ø0.5

ProbeEdgeAxial

Radial

Exa

mpl

e 2

of a

dvan

ced

mea

sure

men

t


RRO(TIR)

NRRO

This is a waveform whenobserved with an XY modeoscilloscope using 2 probes.

It is an ideal measuring way.

Construction example —the case of measurement of axial—When observing the rotator with 2 probes as shown,

the Lissajous waveform can be seen. You can also

see which way the axis vibrates, and the influence of

the machine on the parts around the rotator, etc.

Use good quality fixtures to get good performance out of the metersTo measure in high resolution, it is necessary to use high-resolution meters and good quality fixtures to enhance the meters'

performance.

Along with usability, a structure that can withstand of surrounding vibrations, or fixtures that do not resonate with rotator are

required.

Standard fixture with magnetic stand straight and 45°This standard fixture is for a probe.

It has a magnetic stand to use on the granite surface plate.

Can adjust the gap to XYZ.

1 2

3

(10kHz) (1kHz)

(100Hz)CHECK

PROBE ZERO

POWER

OFF

ON

AC

DC

OUTPUT

2020 0 4040 +

A

DISPLACEMENT METER

ST-3511

1 2

3

(10kHz) (1kHz)

(100Hz)CHECK

PROBE ZERO

POWER

OFF

ON

AC

DC

OUTPUT

2020 0 4040 +

A

DISPLACEMENT METER

ST-3511

RRO

NRRO

5

Various probesWe have a large assortment of probes, such as those with an electrode of width 0.1mm and ø0.2mm, and those with an elec-

trode shape of straight, 45° cut V, a half circle, 45° cut, and V cut. Representative probes are shown below.

Please contact us about the specifications or other details.

(The following specifications are when use with a displacement meter ST-3511.)

Motor ø0.5

27

Probe

ST-0539A probe usage example


ST-0532P probe

ST-0538B probe usage example

Serial number

Electrode dimension

27(3

)

(84)

30

82

Guard Ring

ST

-05

39

AP

RO

BE

Ø1.5

Ø16

Ø0.5

Ø0.3

0-0.1

Specification ST-0539A Probe

Measuring range 30µm ± 15µm

±3V

±2% F.S

0.2V/µm

100nm (10kHz)

ø0.3mm

Output voltage

Sensitivity

Resolution

Electrode dimension

Accuracy

Serial number

Guard ring

Ground ring

ST

-05

38

XE

PR

OB

E

Ø16 0-0.1

2238

(84)

20

AA

Measuring electrode A-A Vision S=2/1

Measuring electrode

Ø3

Ø3

Ø5

Ø7

Ø0.5

Ø15.9

0.75

Specification ST-0538XE Probe

Measuring range 75µm ± 50µm

±5V

±2% F.S

0.1V/µm

100nm (10kHz)

ø0.5mm

Output voltage

Sensitivity

Resolution

Electrode dimension

Accuracy

Guard ring

3010

(6)

45°

ø15.8

ø8

ø3

Measuring electrode

Guard ring

Measurement electrode section details S=5/1

Specification ST-0532P ProbeMeasuring range

±5V

±2% F.S

100nm (10kHz)

ø1.8mm

Output voltage

Sensitivity

Resolution

Electrode dimension

Accuracy

0.05V/µm

200µm ± 100µm

Guard Ring

Guard Ring

ø16 0-0.1

1010

Measuring electrode

Measuringelectrode

90°0.25

ø2

ø0.5

ø8

(ø15.9)

Measure 5:1

Specification STSpecification ST-0538B Probe-0538B ProbeMeasuring range 50µm ± 25µm

±5V

±2% F.S

0.2V/µm

10nm (10kHz)

ø0.5mm

Output voltage

Sensitivity

Resolution

Electrode dimension

Accuracy

Probe

Motor

45°

Specification ST-0536D Probe-0536D ProbeMeasuring range

±5V

±2% F.S

0.1V/µm

100nm (10kHz)

ø1.0mm

Output voltage

Sensitivity

Resolution

Electrode dimension

Accuracy

100µm ± 50µm

ST

-0

53

6D

PR

OB

E

Ø16 0-0.1

2510

(72)

Ø8

Ø1.0

Ø2

Serial number

Measuring electrode

6

Extra Fine Probe ø0.2 DisplacementMeter ST-3571A

The capacitive displacement meter ST-3571A measures the minute

displacement of metals etc, using a non-contact method and is a

device that outputs voltage with high precision in proportion to the

displacement. Especially, the extra fine probe is suitable for measur-

ing precise high-speed disks, precision motors, spindles, and high-

speed vibrators on high sensitive and broadband. It is also suitable

for measuring and analyzing with oscilloscopes and FFT analyzers.

Features Extra fine probes allow the measurement of compact object

displacement. (The electrode diameter of an extra fineprobe is ø0.2mm.)

Measurements are performed using a high-resolution andprecise non-contact method.

Accurate analog voltage, which is proportional to thedisplacement, is outputted.

The bandwidth is wide (DC to 10 kHz), with a fast response time. The bandwidth is converted by a switch. Each metal can be measured under the same conditions

with no influence from a magnetic field or magneticsubstance.

Performance(With Probe ST-0702A)

ST-0702A (standard)

75 ± 25µm

0.4V/µm

±2% F.S

ø0.2mm

(ø1 × 5)+(ø2.1 × 5)+

(ø8 × 10)+(ø16 × 74) mm

1.5m

Multi-prong, round shape

Approximately 100g

Probe

Measuring range

Sensitivity

Accuracy

Electrode dimension

Dimensions

Cable length

Connector

Weights

Type of measurement ......Measuring range ..............Output voltage .................Sensitivity ........................Accuracy ..........................Offset function ..................Bandwidth ........................

Output resistance ............Power source ...................Power consumption .........Operation environment ....Dimensions ......................Weights ............................Accessories .....................

Display .............................Alarm ...............................

Note) The combinations of probe and equipment are specified. Changes in the measurement range must be custom-written. We also design and make probes that are not listed in our catalogs.Probes are sold separately.

CAPACITIVE DISPLACEMENT METER ST-3571A

Probes for Displacement MetersST-0702J2(custom-made)

100 ± 50µm

0.2V/µm

±2% F.S

ø0.2mm

(ø2.1 × 10)+(ø2.1 × 5)+

(ø8 × 10)+(ø16 × 74) mm

1.5m


Approximately 100g

ST-0742A2 (custom-made)

100 ± 50µm

0.2V/µm

±2% F.S

0.1 × 0.35mm(Square)

(ø3 × 10)+(ø8 × 10)+

(ø16 × 74) mm

1.5m


Approximately 100g

ST-0702A

ST-0702J2

ST-0742A2

50 100 150

+ 1 0 V

- 1 0 V

0

Ou

tpu

t v

olt

ag

e

Interval µm)(

Capacitive75 ± 25µm+10V~-10V (F.S)0.4 V/µm±2% F.S (23 ± 5˚C, less than 80% R.H)Approximately ±10% (F.S)DC~10kHz(-3dB) (can be switched to approximately5kHz, 1kHz, 500Hz and 100Hz)Approximately 50Ω90VAC~250VAC 50/60Hz24W ± 20% (with AC100V)0~40˚C, less than 85% R.HApproximately 80W × l70H × 320L (mm)Approximately 3kgPower cord(1), Fuse(2), Coaxial cable(1),Ground lead (1), Instruction manual(1)Over rangeDC30V,1A (input resistance) Alarm will close whenon the + side of over range.

[Measurement of 1 inch motor] [Displacement and output voltage](ST-0742A2 Electrode dimension 0.1 × 0.35mm)

Measuringsurface

7

Measuring electrode

Guard ring

Shielding case(Ground)

Electric field

Ground electrode(Object)

Effective electric field

Shielding case

Measuring electrode

Guard ring

Probes for Displacement Meters

The displacement meter ST-3512 measures minute displacement of

metals etc, using non-contact method and is a device that outputs

voltage with high precision in proportion to the displacement.

ST-3512 is suitable for measuring and analyzing disks that rotate on

high sensitive and broadband, especially precision motors, spindles,

and also high speed vibrator with oscilloscopes or FFT analyzers.

CAPACITIVE DISPLACEMENT METER ST-3512

[The structure of probes and effect of the guard ring]The electric field between the two electrode plates is made even by adding the

same potential around the electrode.

Therefore, the even section of the measuring electrode can be C-V converted.

(This is called the “Guard Ring”)

Options Various probes = Wide bandwidth 100kHz

ST-0535A3 (standard)

50 ± 25µm

0.2V/µm

±1% F.S

10nm

5nm

1.5nm

0.6nm

ø1.2mm

(ø5 × 20) +

ø16 × 84mm

1.5m


Approximately 140g

Probe

Measuring range

Sensitivity

Accuracy

Resolution(40kHz)

Resolution(10kHz)

Resolution(1kHz)

Resolution(100Hz)

Electrode dimension

Dimensions

Cable length

Connector

Weights

Super-High Resolution DisplacementMeter ST-3512

ST-0535A3

Note) The combinations of probe and equipment are specified. Changes in themeasurement range must be custom-written. We also design and makeprobes that are not listed in our catalogs. Probes are sold separately.

Features A resolution of 5nm (10kHz) allows precise non-contact

measurements. (Available to measure objects less than0.5nm (max.) with the combination of optional probes andswitching the bandwidth.)

Accurate analog voltage, which is proportional to thedisplacement, is outputted.

The bandwidth is wide (40kHz, standard), with a fastresponse time. (can be increased to 100kHz with options.)

The bandwidth (filter) is converted by a switch. Each metal can be measured under the same conditions with

no influence from a magnetic field or magnetic substance. The thin probes are available. (option)

Performance(With Probe ST-0535A3)

Type of measurement ......Measuring range ..............Output voltage .................Sensitivity ........................Accuracy ..........................Resolution ........................Bandwidth ........................

Output resistance ............Power source

Voltage ..........................Power consumption ......

Operation environment ....Dimensions ......................Weights ............................Accessories .....................

Capacitive50 ± 25 µm+5V ~ -5V (F.S)0.2V/ µm±1% F.S (23 ± 5 ˚C, 80% R.H)10 nm(40kHz), 0.6nm(100Hz)DC ~ 40kHz(-3 dB) (can be switchedapproximately 10kHz, 1kHz, 100Hz)Approximately 50Ω

AC100V ±10% 50 /60 Hz9W ± 20% (with AC100V)0 ~ 50 ˚C, less than 85% R.HApproximately 80W × l70H × 304L (mm)Approximately 2.8kg

Coaxial cable(1), Power cord(1), Instruction manual(1)

8



Wide Measuring Range CapacitiveDisplacement Meter ST-3501

The displacement meter ST-3501 measures the displacement of

conductors, such as semiconductors and metals, using a non-contact

method and is a device that outputs voltage with high precision in

proportion to the displacement. Use ST-3511 with the connecting

oscilloscope, VOAC (digital multimeter) and recorder etc.

ST-0507 (standard) ST-0505B (standard) ST-0507S3 (custom-made)

0.1 ± 0.05mm 1.0 ± 0.5mm 0.1 ± 0.05mm

0.1V/ µm 10V/mm 0.1V/µm

±2% F.S ±1% F.S ±2% F.S

0.1µm 1µm 0.2µm

ø1.8mm ø5.5mm ø1.68mm

(ø10 × 20) + ø16 × 70mm ø16 × 90mm (ø3 × 40) + ø16 × 82mm

1.5m 1.5m 1.5m

Multi-prong, round shape Multi-prong, round shape Multi-prong, round shape

Approximately 120g Approximately 120g Approximately 120g

Probe

Measuring range

Sensitivity

Accuracy

Resolution

Electrode dimension

Dimensions

Cable length

Connector

Weights

[Measurement of rotating vibration] [Displacement and output voltage]

Note) The combinations of probe and equipment are specified. Changes in the measurement range must becustom-written. Probes are sold separately.

ST-0507

ST-0505B

ST-0507S3

0.5 1.0 1.5

+ 5 V

- 5 V

0

Ou

tpu

t v

olt

ag

e

Interval (mm)

1 2

3

(10kHz) (1kHz)

(100Hz)CHECK

AC

OUTPUT

DISPLACEMENT METER

2020 0 4040 +

µ A

ST-3501

Features This meter is capacitive type. Measurements are performed using a non-contact method. Accurate analog voltage, which is proportional to the

displacement, is outputted. The bandwidth is wide, and is converted by a switch. The probe is compact, and the surroundings of the

electrode are completely sealed. Through probe selection, the measuring range can be

selected. We make the specially ordered probes as required.

Performance(With Probe ST-0505B)




Operation environment .....Dimensions ......................

Weights ............................Accessories .....................

Capacitive1 ± 0.5mm+5 V~ -5 V (F.S)10 V/mm±1% F.S (23 ± 5 ˚C, 80% R.H)1µmDC~10kHz (-3dB) (can be switched to approximately1kHz and 100Hz)Less than 50Ω

AC100V ± 10% 50/60HzApproximately 17W (with AC100V)0 ~ 50 ˚C, less than 85% R.HApproximately 62W × l70H × 304L (mm)(except the protruding part)Approximately 3kgCoaxial cable(1), Instruction manual (1),

Power cord(1)

9

ELECTRODE FITTING PROBE ST-0511CAPACITIVE DISPLACEMENT METER ST-3521

Electrode Fitting ProbeST-0511

This unit is an electrode fitting probe to be used with a displacement

meter ST-3501. Use this unit by attaching an optional type and

metallic electrode.

The stand and measuring electrode must be provided by the user.

PerformanceWhen outputting capacitance as voltage (ground type)Input capacitance ...................................

Conversion accuracy ..............................

Measurement displacement capacity .....Noise ......................................................Frequency characteristic ........................

The shield wire of the input coaxial cable is grounded (ground type).

30~100pF(at input connector)Approximately 4 V/pF(with input capacitance of 50pF)±1pFLess than 5mV(p-p)DC~10kHz

Soldering

Measuring electrode

1 2

3

(10kHz) (1kHz)

(100Hz)CHECK

AC

OUTPUT

DISPLACEMENT METER

2020 0 4040 +µ A

ST-3501

ST-3501

Stand12

3

4

This unit measures the displacement of conductors, such as semi-

conductors and metals, using a non-contact method, and is also

suitable to use when required to measure with high accuracy and

high stability (e.g. when used for a long time).

Features This meter is capacitive type. Measurements are performed using a non-contact method. Accurate analog voltage, which is proportional to the

displacement, is outputted. The probe is compact, and very stable. Through probe selection, the measuring range can be

selected.

(With Probe ST-0525)




Operation environment ....Dimensions ......................


Capacitive1 ± 0.5mm+5V ~ -5V (F.S)10 V/mm±0.2% F.S (23 ± 5 °C, 80% R.H)0.5µmDC~2kHz(-3dB) (can be switched to approximately1kHz and 100Hz)Less than 50Ω

AC100V ± 10% 50/60HzApproximately 17W (with AC100V)0~50°C, less than 85% R.HApproximately 62W × l70H × 304L (mm) (exceptthe protruding part)Approximately 3kgCoaxial cable(1), Instruction manual (1),Power cord (1)

Probe

Measuring range

Sensitivity

Accuracy

Resolution

Electrode dimension

Dimensions

Cable length

Connector

Weights

ST-0527 (standard) ST-0525 (standard)

0.1 ± 0.05mm 1.0 ± 0.5mm

0.1V/µm 10V/mm

±0.4% F.S ±0.2% F.S

0.05µm 0.5µm

ø1.8mm ø5.5mm

ø10 × 9 + ø13 × 36mm ø13 × 45mm

3m 3m

TRIAXIAL (MIL) TRIAXIAL (MIL)

Approximately 120g Approximately 120g

High Accuracy and High StabilityMeter ST-3521

Performance

ST-0527 ST-0525Note) Probes are sold separately.

ConnectionWhen reading the displacement directly:

Displacement capacity : 0.5~1.5PF(at the center of the displacement)

Displacement range : Center of the displacement (D) ± 1/2(D)Output voltage : ±5VNoise : Less than 30mV(P-P)Frequency characteristic : DC~10kHz (can be switched to

approximately 1kHz and 100Hz)Other specifications are the same as the ST-3501

1. ST-0511 probe

2. Input coaxial cable (RG-62/u1m)

3. Output cable (Multi-prong 1.5m)

4. BNC-R connector

Capacitive displacement meter ST-3501 is sold separately.

OptionsST-0511 Electrode Fitting Probe (Guard type)In the electrode section, it is possible to use the guard ring to attach

around the measuring electrode and not only the measuring electrode.

10

1 2

3

(10kHz) (1kHz)

(100Hz)CHECK

PROBE ZERO

POWER

OFF

ON

AC

DC

OUTPUT

2020 0 4040 +

A

DISPLACEMENT METER

ST-3511

Probes for displacement meters


High Resolution Displacement MeterST-3511

[Measurement of rotating vibration] [Displacement and output voltage]

ST-0532A (standard) ST-0535A (standard) ST-0536A (standard)

100 ± 50µm 50 ± 25µm 30 ± 10µm

0.1V/µm 0.2V/µm 0.5V/µm

±1% F.S ±1% F.S ±2% F.S

10nm 10nm 5nm

Approximately 5nm Approximately 2nm Approximately 1nm

Approximately 2nm Approximately 1nm Approximately 0.5nm

ø1.8mm ø1.2mm ø1.0mm

(ø6 × 20)+ ø16 × 70mm (ø5 × 20)+ ø16 × 82mm (ø5 × 20) +ø16 × 82mm

1.5m 1.5m 1.5m

Multi-prong, round shape Multi-prong, round shape Multi-prong, round shape

Approximately 120g Approximately 120g Approximately 120g

Probe

Measuring range

Sensitivity

Accuracy

Resolution(10kHz)

Resolution(1kHz)

Resolution(100Hz)

Electrode dimension

Dimensions

Cable length

Connector

Weights

Options Various probes= Wide bandwidth 100kHz

The displacement meter ST-3511 measures the displacement of

conductors, such as semiconductors and metals, using a non-contact

method and is a device that outputs voltage with high precision in

proportion to the displacement. Use ST-3511 with the connecting

oscilloscope, VOAC (digital multimeter) and recorder etc.

ST-0532A

ST-0535A

ST-0536A

Note) The combinations of probe and equipment are specified. Changes in the measurement range must be custom-written. We also design and make probes that are not

listed in our catalogs. Probes are sold separately.

25 50 75

+ 5 V

- 5 V

0

Ou

tpu

t v

olt

ag

e

Interval µm)(

Performance

Features High resolution (max.1nm) allows precise measurements. This meter is capacitive type. Measurements are performed using a non-contact method. Accurate analog voltage, which is proportional to the

displacement, is outputted. The bandwidth is wide, and is converted by a switch. Through probe selection, the measuring range can be

selected. We make the specially ordered probes as required.

(With Probe ST-0535A)

Type of measurement ...........Measuring range ...................Output voltage .......................Sensitivity ..............................Accuracy ...............................Resolution .............................Bandwidth .............................

Output resistance ..................Power source

Voltage ..............................Power consumption ..........

Operation environment ..........Dimensions ...........................Weights .................................Accessories ...........................

Capacitive50 ± 25µm+5V ~ -5V (F.S)0.2 V/µm±1% F.S (23 ± 5 ˚C, 80% R.H)10nm (Max.1nm)DC ~10kHz(-3dB) (can be switched to approximately1kHz and 100Hz.)Approximately 100Ω

AC100V ± 10% 50/60HzApproximately 17W (With AC100V)0~ 50 ˚C, less than 85% R.HApproximately 80W × l70H × 304L (mm)Approximately 3kgCoaxial cable(1), Instruction manual(1),Power cord (1)

11

Thickness MeterST-3523

The thickness meter ST-3523 measures dielectrics, such as nonmet-

als, using a non-contact method with the probe.

Outputted voltage is proportional to the thickness. As ST-3523

displays the thickness digitally, the display allows direct reading. Also,

the built-in comparator decides between GO and NO GO.

Probe

Measuring range

Resolution

Distance between probes

Electrode dimension

Dimensions

Weights

Cable

ST-0555 (standard)

0~1mm F.S

1µm

3mm

ø10mm

ø40 × 63mm

200g

3m

CAPACITIVE THICKNESS METER ST-3523MOISTURE METER ST-3808

Type of measurement ......Measuring range ..............Sensitivity ........................Accuracy ..........................

Resolution ........................Display .............................Output ..............................Power source ...................Power consumption .........Operation environment ......Dimensions ......................


Moisture MeterST-3808

Features Measurement is performed only to set the probe in the ink

fountain. The measured value is displayed in digital, and it is read

directly. It is easy to carry because it is compact and light. Most inks are available. (Must be calibrated.) The analog output allows recording and monitoring. A carrying bag is included.

Performance

ST-3808 detects the change in moisture content of the ink as

capacity change, and then measures the moisture percentage by

converting this to the voltage. The value is displayed in digital.

Capacitive0 ~ Approximately 40%0.1 V/%±2% F.S (23±5˚C, 80% R.H)It is necessary to calibrate with a known sample.1%Digital 2digits Display (max.) 99 F.SAnalog Voltage 0~ Approximately 4VAC100V ± 10% 50/60HzApproximately 17W10~40°C, less than 85% R.HMain unit : Approximately 222W × 74H × 235L (mm)Probe : Approximately ø16 × 70 + ø25 × 120 (mm)Probe cable : Approximately 3mApproximately 1.5kgPower cord(1), Carrying bag(1),ST-0504 probe(1), Instruction manual(1)

Note) Probes are sold separately.

Features This meter is capacitive type. Measurements are performed using a non-destructive

method. The thickness is read directly. Probe (options) exchange allows wide range measurement

(1µm~10mm) The digital (B.C.D) output allows connection of other digital

equipments or computers, etc. The thickness measurements are performed during the

manufacturing process.

Options Various probes It is necessary to calibrate with known sample.

Type of measurement .....Objects being tested ......Measuring range ............

Measuring range ............

Accuracy (main unit) ......

Display ...........................

Output ............................

Operation environment .......Power source

Voltage ........................Power consumption ....

Dimensions ....................Weights ..........................Accessories ...................

CapacitiveDielectric (specific dielectric constant ε =1.0~10.0)0~10mm (this value is changed by the combination ofeach probe)(can be measured more than 10mm with usingspecially ordered probes)10mm, 1mm, 0.1mm (this value depends thecombination of each probe)±2% (F.S) (The accuracy of the combination with theprobes changes the probe setting and environmentconditions.)(23 ˚C ± 5 ˚C, 80% R.H)Digital 4 digitsDisplay (max.) 9999Unit: mm or µmDigital (BCD) parallel (TTL level positive logic)Analog voltage output 10V,Electric current 1mA (MAX)0~50 ˚C, less than 85% R.H

AC100V ± 10% 50/60HzApproximately 20W (with AC100V)Approximately 111W × l72H × 304L (mm)Approximately 4kgPower cord(1), Instruction manual(1)

Performance

12

Thickness MeterST3525

The capacitive thickness meter ST-3525 measures silicon,

semi-conductor wafers, or other metal disks etc. using a non-contact

method, and the measured value is displayed in digital. Also, the

measured value is outputted in analog or digital. The high precision

measurement can be performed on the table, and measured with

various processes.

CAPACITIVE THICKNESS METER ST-3525THICKNESS METER ACCESSORIES

Features This meter is capacitive type. Measurements are performed using non-contact and

non-destructive methods. The thickness is read directly. High resolution is 0.1µm. Various processes can be combined.

Type of measurement ........Objects being tested ..........

Measuring range ................

Accuracy range ..................Distance between probes ......

Accuracy ............................

Resolution ..........................Thickness formula .............Display ...............................Display cycle ......................

Output ................................

Other functions ..................

Operation environment ......

Power source .....................Power consumption ...........Dimensions/Weights ..........

Accessories .......................

Non contact and capacitiveSilicon wafers, semiconductor wafers, metal plates,and hard disks250µm ~ 750µm (changeable)

Less than ±100µm to a standard sampleA, B 1mm (with thickness ~500µm, standardsample)Less than ± 1µm (Less than 23 ± 2 ˚C, less than 55± 10% R.H) When there is not much dust andvibration, and when using a wafer measurementstand.0.1µmThickness t =C-(A+B)4 digits, unit µm, Max. 999.9Internal triggering : Approximately 2.5 times/second, available external triggeringAnalog : 10mV/µmDigital : BCD parallel (positive logic TTL level)Comparator : GO, HI, LO (relay contact)Comparator, the calibration of measuring value,peak to peak value measurementTemperature : 0~50 ˚CRelative humidity : Less than 85% R.HAC100 ± 10V, 50/60HzApproximately 25WMain unit : Approximately 220W × 160H ×

305L (mm)/ Approximately 6kg

Probe : ø16 × 90(mm)

(Electrode dimension ø5.5mm)ST-0505 probe(2), Power cord(1),Instruction manual(1)

It can be changed to 999.9µm (max.). However, themeasuring range is fixed (500µ m).

Performance

UsageBefore using, calibrate it with master that has same condition as

samples.

The probe must be fixed to eliminate mechanical variation.

Size of the metal stand must be large enough for the wafer, and its

surface must be flat.

Silicon wafer

Probe A

Metal stand

Probe B

Thickness t=C-(A+B)

A

B

Ct

13

Out

put v

olta

ge

DisplacementPeak

R

0

10V

H

Fron

t slo

pe

Back slope

FIBER OPTIC DISPLACEMENT METER ST-3711

Displacement MeterST-3711

The ST-3711 measures displacement with the conversion of light

volume by irradiating the light from the flashing fiber in the thin probe

and detecting the reflected light by receiving fiber in the probe.

The fiber can resist the high temperature, magnetic field and oil proof

environment. The probe can process finely, and respond rapidly.

Each filter is prepared, and is suitable to measure high-speed

vibrators and rotator. Also, it is used to adjust the light volume

matching the reflected surface, irrespective of the material of the

measuring object.

Use this meter after calibration.

Note) The combinations of probes and equipment are specified.The R random arrangement, other H half, and C coaxial etc. can be made (option). The figures above show the average value during calibration.There is the possibility of an approximate 20% difference due to the specifications of each probe. Custom-made probes are sold separately.


Name

Dimensions Front slope Back slope

Peak

µm

External

diameter

ømm

Fiber

ømm

Sensitivity

mV/µm

Measuring

range µmSensitivity

mV/µm

Measuring

range mm

3.2 2.3 100 10 65 90 ± 30 1.2 3.2 ± 1.75 600

3.2 2.3 100 10 3.8 1000 ± 500 1.1 6.5 ± 1.5 3800

1.61 1.25 70 20 65 90 ± 30 2.3 2.0 ± 1.0 500

1.06 0.7 50 50 50 110 ± 40 4.1 1.14 ± 0.34 450

0.8 0.54 50 50 60 85 ± 40 5.5 0.73 ± 0.22 350

Noise

mVppBandwidth

kHz

0700R (standard)

0700H (custom-made)

0702R (custom-made)

0703R (custom-made)

0704R (custom-made)

[Basic characteristics (during calibration)]

Features This meter is fiber optic type. Rapid response (100kHz) is available. Measurements are performed in a high temperature,

magnetic field and oil proof environment.

Performance

Options Wide bandwidth Approximately 500kHz, 1MHz (Only probe 0700R)

Various probes

(With Probe 0700R)Type of measurement ......Light source .....................Measuring range ..............Sensitivity ........................

Resolution 100kHz ........10kHz ..........1kHz ............

Bandwidth ........................Filter .................................Output ..............................Power source ...................Operation environment .....

Dimensions ......................


Fiber opticLED (infrared light)90 ± 30µm (Front slope) 3.2 ± 1.75mm(Back slope)Approximately 65mV/µm (Front slope)Approximately 1.2mV/µm (Back slope)Approximately 0.2µm (10mV)Approximately 0.1µm (5mV)Approximately 0.02µm (1mV)DC~ Approximately 100kHz(-3dB)LPF Approximately 10kHz, 1kHz, HPF 1kHz0~10V (±5V) (the DC-AC couplings can be converted.)AC100V ± 10%, 50/60 Hz, Approximately 17WMain unit: +5~+50 ˚C, less than 85% R.HProbe: -20~150 ˚C (Tip section)Main unit: Approximately 80W × 170H × 304L (mm)

Probe: Approximately ø3.2 × 50mm (Tip)

ø10mm (Holding section)Approximately 1.2m (Length)

Approximately 3kgPower cord(1), Instruction manual(1)

Frontslope

14

ST-3761 is FM modulation optical heterodyne interference type

non-contact laser displacement meter using semiconductive laser as

a light source.

ST-3671 is suitable for measuring piezo-electric elements and

rotators, and for displacement measurement of a transfer mechanism

such as STM or AFM.

Application Field Vibration analysis of piezo-electric elements and nonmetal surfaces

Overwhelming strength on displacement measurement

applications which have stepwise transformation from state of rest.

Rotational-dynamic characteristic evaluation of HDD and optical

disks

Measurement of dynamic characteristic evaluation for optical

pickups and HDD sliders

Analysis of micro-displacement measuring movement for

micro-machines

HETERODYNE LASER DISPLACEMENT METER ST-3761

Features Displace measurement from state of rest can be performed

It is developed without additional circuit. Working distance is 30mm

The measurement can be performed with allowance. High resolution and wide frequency range are achieved by

optical heterodyneInnovative response of measuring nanometer-level high resolution

at frequency of 1MHz or higher.

Type of measurement ........

Light source .......................

Working distance ...............

Measuring range ................Laser spot diameter ...........

Displacement output ..........

Measurable vibrationfrequency amplitudeproduct ...............................Power source .....................

Dimensions ........................

Operation environment ......

Frequency - amplitudemeasurement range

FM modulation optical heterodyne interference type(Modified Mach Zehnder interferometer)Semiconductor laserWavelength: Approximately 670nmMaximum output: 0.95mW or less (Laser safetyclass 2)Approximately 30mm (Between laser output surfaceof the sensor head and object to be measured.)±50µm50µm or less (Full width half maximum at focusedpoint)Output connection: BNC typeOutput signal: Below 1 or 2 is switched by

MODE switch.1. DISPLACEMENT: Displayswhole displacement waveform.2. VERNIER: Outputdisplacement signal that iswrapped into half wavelength.

Measurement range: 0.1, 0.2, 0.5, 1, 2, 5, 10, 20, 50µm/VLow pass filter: OFF, 2 kHz, 20 kHz

250 kHz • µm or lessAC100V ±10V, 50/60Hz, 110VA or less(at AC100V 50Hz)Sensor head: Approximately 72W × 128L ×

37H (mm) (Excluding connector)Main unit: Approximately 250W × 350L ×

150H (mm) (Excluding connectorpart)

Sensor cable: Approximately 1.5mPerformance guarantee temperature range:+18˚C~+28˚COperation temperature and humidity:+13˚C~+33˚C, less than 80%R.H (No condensation)Preheat time: 30 minutes after power-on

Performance

Displacement MeterST-3761

CautionLaser used on ST-3761 is class 2 laser meets JIS C 6802 (safety of

laser products).

Amplitude

Frequency

15

Gap Adjuster GA-202 Standard Fixture

Fixture for Capacitive Displacement Meter

ANGLEVEL METER AL-12

Anglevel MeterAL-12

The AL-12 is a level gauge measuring verticalness, horizontal

levelness, and angle of inclination.

Application Efficient for work inspection and adjustment in architectural work. Efficient for various type of civil engineering works. Most suitable

for levee construction, drain ditch construction, and piping work. The height of buildings or utility poles can be found from the

attached numerical table using measured elevation angle anddistance.

Suitable for setting equipments and shortwave antennas, andfacility maintenance equipment.

The meter can be set in any location on airplanes, marine vessels,or yachts as an inclination indicator. The meter can indicate limitangle of the resilience of ships.

Vehicles have safety angle of gradient. Setting the meter on thevehicle ensures safety of the vehicle.

Useful for angular measurement of sheet metal processing orvarious experiments at laboratories and schools.

When the meter is attached to a building on the cliff top, whetherthere is an increase on inclination of the building over the years ornot can be measured. Inclination of buildings around constructionsite and bridge beam can be monitored similarly.

By measuring elevation angle of building and cliffs, shaded area inwinter is estimated.

Useful for measuring inclination of buildings and utility poles atsome distance.

Suitable for do-it-yourself hobbies.

Examples of application

Features Easy to read vibration-free gauge pointer The angle can be read by setting the meter on the

measuring surface Measurement can be conducted when the meter is tilted

back and forth Due to non-weight design for the pointer, the meter has

easy to read long gauge pointer and high scale resolution Measurement is not influenced by normal temperature,

humidity, or wind The meter is inexpensive, compact, lightweight, easy to

carry, and durable for long time use Measurement can be conducted by just one person, or

even under the water The meter is made of acrylic resin and can be used for an

accessory at home

PerformanceMeasuring range ..............Accuracy ..........................Dimensions ......................Weight ..............................Temperature range ..........Minimum scale value .......

0~90˚, 50˚~0~50˚1% (Full scale)83W × 17L × 83H (mm)130 g-30˚C~+50˚C0.5˚

The gap adjuster fixes probes and measuring electrodes, and

finely-adjusts gap from the object using the microhead. It has a

magnetic stand.

Minimum scale value 0.002mm

Standard fixture for probes. (Example on use on page 4.)

It has a magnetic stand to use on the granite surface plate.

Can adjust the gap to XYZ.

Measuring heightA mirror is required.

Distance

Inclination of utility pole at some distance

Plumbing (inclination)

Measuring limit of shade area in winterA mirror is required.

IWATSU TEST INSTRUMENTS CORPORATION has been awarded the above International Standard ISO9001 and ISO 14001 certificates for quality control and environmental management.Certificate No. 961550:772520

This product is subject to the cargo (or technology)controls according to the Foreign Exchange and ForeignTrade Control Law. Export permission from the JapaneseGovernment is necessary to export this product.

The contents of this catalog may be altered without prior notice to improve products.

If you have any questions about IWATSU products, contact our sales department.

The contents of this catalog is correct as of January 1, 2006.

Distributor

8511-3091-2C.S(D)0601-827-2-00

SALES DEPT. : 7-41, 1-CHOME KUGAYAMA,SUGINAMI-KU, TOKYO, 168-8511 JAPANTEL : +81-3-5370-5483, FAX: +81-3-5370-5492Homepage : http://www.itl.iwatsu.co.jpE-mail Address : [email protected]

IWATSU Displacement & Thickness Meter elements, crystal vibration, ... Sensor head Piezo-electric...

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