IIT Video Lectures on VLSI Technology by Prof
4
IIT video lectures on VLSI Technology by Prof. Santiram Kal (Prof. S.Kal) Video Lecture Series from IIT Professors : VLSI Technology by Prof. Santiram Kal (Prof. S.Kal) sir Prof. Santiram Kal obtained his Ph.D. degree in Engineering Electronics and Electrical Communication Engineering from Indian Institute of Technology in 1983. He has been working as a Professor in Engineering Electronics and Electrical Communication Engineering at Indian Institute of Technology, Kharagpur. His research interests are: microelectronics & VLSI design; MEMS; VLSI process technology, ASICs; integrated silicon micro-sensors; advanced salicide technology; Si-Ge, Si-Ge-C materials & devices; process & device simulation; microwave integrated circuits. 1. Introduction to VLSI Technology 2. Design and Technology Overview of VLSI - I 3. Design and Technology Overview of VLSI - II 4. Yield and cost Estimation of VLSI Chips
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1. Introduction to VLSI Technology2. Design and Technology Overview of VLSI - I3. Design and Technology Overview of VLSI - II4. Yield and cost Estimation of VLSI Chips5. Defects, Contamination & Clean Room Requirements6. Wafer Cleaning Technology7. Oxidation of Silicon8. Reaction Kinetics of Oxide Growth in Silicon9. Oxidation Techniques, Growth Rate & Characterization10. Lithography Process11. Photoresists12. Optical Lithography Techniques13. Exposure Tools and Optical Effects in Lithography14. Advanced Lithography Techniques (X-ray,Ion-Beam,E-Beam)15. Etching16.17. Dry & Plasma Etching18.19. Impurity Diffusion in Semiconductors20. Diffusion Theory and Diffusion Systems21. Impurities in Silicon and Diffusion Profile22. Evaluation of Diffused Layers in Semiconductors23. Ion Implantation : Range Theory and Stopping Mechanism24. Ion Implantation Theory and Channeling25. Ion Implant Machine26. High Energy High Dose Implantation27. Epitaxy Techniques and Classifications28. Vapor Phase and Liquid Phase Epitaxy29. VPE Growth Kinetics and MBE30. Defects in Epitaxy Growth, Selective Epitaxy31. Chemical Vapor Deposition (CVD): APCVD, LPCVD32. CVD Techniques: PECVD, RTCVD, UHVCVD33. Metal CVD and MOCVD34. Materials for Contacts and Interconnects in VLSI35. Metallization Techniques - I : Physical Evaporation36. Metallization Techniques - II : Sputtering37. Metallization Problems and Failure Mechanisms38. Silicides and Copper Metallization39. Isolation Technology in VLsI40. Advanced Isolation Technology in VLSI41. Bipolar VLSI Process Technology42.43. MOS VLSI Process Technology44. Advanced VLSI MOS/CMOS Process45. CMOS/BiCMOS Process Technology46. VLSI Assembly & Packaging : Chip and Wire Bonding47. VLSI Packaging Technology
Transcript of IIT Video Lectures on VLSI Technology by Prof
IIT video lectures on VLSI Technology by Prof. Santiram Kal (Prof. S.Kal)
Video Lecture Series from IIT Professors :
VLSI Technology by Prof. Santiram Kal (Prof. S.Kal) sir
Prof. Santiram Kal obtained his Ph.D. degree in Engineering Electronics and Electrical Communication Engineering from Indian Institute of Technology in 1983. He has been working as a Professor in Engineering Electronics and Electrical Communication Engineering at Indian Institute of
Technology, Kharagpur. His research interests are: microelectronics & VLSI design; MEMS; VLSI process technology, ASICs; integrated silicon micro-sensors; advanced salicide technology; Si-Ge, Si-Ge-C
materials & devices; process & device simulation; microwave integrated circuits.
1. Introduction to VLSI Technology
2. Design and Technology Overview of VLSI - I
3. Design and Technology Overview of VLSI - II
4. Yield and cost Estimation of VLSI Chips
5. Defects, Contamination & Clean Room Requirements
6. Wafer Cleaning Technology
7. Oxidation of Silicon
8. Reaction Kinetics of Oxide Growth in Silicon
9. Oxidation Techniques, Growth Rate & Characterization
10. Lithography Process
11. Photoresists
12. Optical Lithography Techniques
13. Exposure Tools and Optical Effects in Lithography
14. Advanced Lithography Techniques (X-ray,Ion-Beam,E-Beam)
15. Etching
16.
17. Dry & Plasma Etching
18.
19. Impurity Diffusion in Semiconductors
20. Diffusion Theory and Diffusion Systems
21. Impurities in Silicon and Diffusion Profile
22. Evaluation of Diffused Layers in Semiconductors
23. Ion Implantation : Range Theory and Stopping Mechanism
24. Ion Implantation Theory and Channeling
25. Ion Implant Machine
26. High Energy High Dose Implantation
27. Epitaxy Techniques and Classifications
28. Vapor Phase and Liquid Phase Epitaxy
29. VPE Growth Kinetics and MBE
30. Defects in Epitaxy Growth, Selective Epitaxy
31. Chemical Vapor Deposition (CVD): APCVD, LPCVD
32. CVD Techniques: PECVD, RTCVD, UHVCVD
33. Metal CVD and MOCVD
34. Materials for Contacts and Interconnects in VLSI
35. Metallization Techniques - I : Physical Evaporation
36. Metallization Techniques - II : Sputtering
37. Metallization Problems and Failure Mechanisms
38. Silicides and Copper Metallization
39. Isolation Technology in VLsI
40. Advanced Isolation Technology in VLSI
41. Bipolar VLSI Process Technology
42.
43. MOS VLSI Process Technology
44. Advanced VLSI MOS/CMOS Process
45. CMOS/BiCMOS Process Technology
46. VLSI Assembly & Packaging : Chip and Wire Bonding
47. VLSI Packaging Technology
