HV Prospekt 07 englisch 070205 -...

High Voltage Power Supply

VAPTEC LITEC PLASMATEC WELTEC GLOWTEC

Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]

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In the High Voltage (HV) division of J. Schneider Elektrotechnik GmbH high voltage and DC power supplies for the high voltage and vacuum process equipment are designed and manufactured. Schneider DC power supplies range in the output rating from 1kW - 30kW with output voltages from 150V up to 150kV. J. Schneider built up its reputation as a competent supplier of high voltage power supplies for ion and electron beam applications, x-ray, laser and high voltage plasma processes. The high reliability and robustness of the products in a variety of customer application environments led to this reputation. Typical applications we serve in the industrial and research markets include e-beam evaporation, e-beam welding, ion beam systems, capacitor charge systems, glow discharge and x-ray supplies.

High Voltage

Planning, developing and producing new technologies - our know-how means complete solutions.


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From a vision to the final product At Schneider, technology is backed up by an innovative development team. Our engineers and technicians re-spond to constant market observation at an early stage; client's projects for the future are identified and jointly re-alised. This high degree of engineering potential reflects our feeling for quality, so that we are open for tomorrow's ideas and tasks. New developments open new horizons In order to survive in the global market, we constantly and continually redefine our product range: together with the customer and in close cooperation with technical insti-tutes and universities, new products are developed and produced. Customized Solutions We have made our web site easy to use in order to assist you in finding the DC power supply to satisfy your re-quirement. If you are not finding a DC power supply which meets your requirements, we would be pleased to de-velop a customized solution for you. Distribution and Service Since development, production, distribution and service lay at the company of J. Schneider Elektrotechnik GmbH in one hand, a close teamwork in each stage of the lifecy-cle is granted. Further developments are made close to the market requirements, customer specified modifica-tions are realized in tight cooperation between sales de-partment and development department. Very good prod-uct acknowledgement guarantees an optimised service and maintenance.


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CAPTEC The primary switched high voltage power supplies of the series CAPTEC work according the resonance converter principle with a frequency of 100kHz. Adverse to the normally used pulse width modulation in which the regulation is realized by the variation of the power-on time, in this technique the regulation is re-alized by the variation of the pause time during fixed power-on time. The generation of the high voltage is effected in the CAPTEC series via converter cascades. The CAPTEC series is specially designed for the requirements to charge condensers. Four different charge powers with 500J/sec, 1500J/sec, 2500J/sec, 5000J/sec and nine different output voltages from 2kV up to 30kV are available.

GLOWTEC The primary switched high voltage power supplies of the series GLOWTEC work according the same technology as the CAPTEC series. The GLOWTEC series is specially adapted for high voltage plasma processes / glow processes. Options for the devices are an integrated interlock for the safe separation of the power converter from the mains, a patented ARC-current limitation which limits current peaks to five times the rated current as well as an ARC-counter. The GLOWTEC series is available in the different output ratings of 1kW, 3kW, 5kW und 10kW as single device with output voltages of 2kV, 3kV, 5kV, 8kV, 10kV, 15kV, 20kV, 25kV and 30kV. Parallel operation to increase power and current capabilities is possible for 10kW models with power outputs of 20 - 30kW.

VAPTEC The switch mode power supplies of the VAPTEC series are specially designed for electron-beam evaporation processes. This series includes the actual high voltage power supply NHRR which provides an output voltage of 8 – 10kV at an output power of 3, 5, 10kW as well as the necessary cathode-heat transformer NDRG and the XY-sweep amplifier RNTR. Furthermore we recently developed a new device technology which includes the high voltage power sup-ply as well as the cathode heat transformer in one cabinet called NHCR. The NHCR provides an output voltage of 8kV at an output power of 2kW. The integrated cathode transformer provides a heat current of 26A at an output voltage of 8V DC. Because at the most evaporation processes an ion-source is used to accelerate the electrons, the neces-sary ion supply NDOR was be developed in the VAPTEC series.

LITEC The primary switched high voltage power supplies of the series LITEC are specially developed for the re-quirement of linear ion-sources which work according the anode layer principle. The LITEC products are available with two different output voltages of 3kV or 5kV and output ratings of 6kW, 12kW and 24KW. The LITEC series is extremely compact because it is water cooled.

PLASMATEC The power supplies of the PLASMATEC series are primary switched and specially developed for plasma processes with 800 – 1000V. These power supplies are characterized by smallest output energy as well as by a sophisticated arc management. They are available as DC-devices NDCC as well as uni-polar pulsed devices NDCC pulse. By serial con-nection of the SXEG a bipolar operation is also possible.

WELTEC The power supplies of the WELTEC series are primary switched and specially developed for e-beam welding and x-ray applications. They are oil cooled / oil isolated and it is possible to integrate the neces-sary auxiliary supply such as heat or Wehnelt supply. They are available with output voltages of 60kV up to 150kV and with output ratings of 5kW, 10kW and 15KW.

Product overview


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Product choice table Voltage / Power If you do not find a module in the table below which meets your requirements, we are ready to develop a custom-ized solution for you. Therefore regard the below listed power supplies only as a basic device for a product, which full fills your requirements. We would be pleased if you would send us your complete specification at [email protected] or fill out the quote request form at our web-page http://www.j-schneider.de/.

device series power voltage

type

6 - 13 V

150 V

180 V

300 V

600 V

800 V

1 kV

2 kV

3 kV

5 kV

6 kV

8 kV

10 kV

15 -

30 kV

40 -

60 kV

80 -

150 kV

page

0,3 W

NRSG

6

1kW

NDRR

7

CAPTEC 500J/s

bis 5000J/s

CAPTEC

8

GLOWTEC 1kW bis

30kW

GLOWTEC

9

LITEC 6kW to

24kW

LITEC

10

VAPTEC 1kW bis

30kW

NHRR

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VAPTEC 400W NDRG

Type: ND RG -L031M01 Ue: 2 x400V A C +/ - 10% 50/60H z Ua: 6V DC Pa: 360W Ia: 60° Kom. Nr . 607994 externe Absicherung: 5A Seriennr.: 00751329

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VAPTEC RNTR

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VAPTEC 1080W/ 1000W

NDOR

15

VAPTEC 2kW NHCR

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WELTEC 5kW to

15kW

NHRG

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WELTEC 10kW

to 15kW

NHRG

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PLASMATEC 8kW NDCC

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PLASMATEC 8kW NDCC pulse

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PLASMATEC 8kW SXEG

Type: N DRG -L031M01 U e: 2 x400V AC +/ -10% 50/60H z U a: 6V DC Pa: 360W Ia: 60° Kom. Nr. 607994 externe Absicherung: 5A Seriennr .: 00751329

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NRSG 2–6kV

The NRSG power supplies are primary switched DC/DC-converters with an input voltage of 24V DC. The 24V in-put voltage is fed to a single frequency square wave gen-erator. The square wave is then transformed upward, rec-tified and filtered and provides the precise output voltage. The output is controlled by means of pulse-width modula-tion of the square wave. The output voltage is related to 0V (negative connection) of the input voltage. All versions are continuously short circuit proof and can operate in current and voltage source mode. The output voltage and current are set by using the 0 - 10V analogue interface or by an external potentiometer, by using the available ref-erence voltage. For acknowledgement of the actual volt-age and current, a 0 - 10V output is provided. A failure message is also generated if a specific current limit is ex-ceeded. This specific current limit can also be adjusted by a 0 - 10V external control voltage. To detect short over-current impulses the failure message will be extended about 5 ms.

TYPICAL APPLICATIONS

Photo-multiplier Test applications

OPTIONS

Other output voltages

SPECIFICATION

Input: 24VDC ±10%

Output: 3 models with output voltages of 2kV, 3kV and 6kV are available. Each model is available with positive or negative polarity.

• COMPACT DESIGN

• CURRENT REGULATION

• OEM CUSTOMIZATION AVAILABLE

Analogue I /O-interface:

Output voltage and current are continuously ad-justable over 0 - 10 V analogue inputs. The out-put voltage and output current is given out by a 0 - 10V analogue output.

Voltage Regulation: Load dependent: 0,05% at 100 % load step input voltage dependent: ± 0,05% within defined input voltage range

Current Regulation: Load dependent: 0,05% at nominal current at each voltage jump input voltage dependent: ± 0,05% within defined input voltage range

Residual r ipple: ≤ 0,1% pp. related to nominal voltage ≤ 0,5% pp. related to nominal current

Power connections: AC input combicon connector DC output HV connector

Dimensions (H x W x D): 130 x 159 x 300 mm

CE Mark: EN 50081 part 1/03-93 EN 55022 class B EN 50082 part 2/03-93 EN 61000 part 4 / inspection severity: 2 EN 60801-2 EN 60950

SELECTION TABLE MAXIMUME RATING MODUL NUMBER

kV DC mA W 2 0,1 0,2 NRSG 20001 3 0,1 0,3 NRSG 30001 3 1 3 NRSG 30010 6 0,1 0,6 NRSG 60001


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NDRR 150–600V / 1kW

NDRR switch mode power supplies are available in 3 models with voltage outputs ranging from 150V to 600V. The NDRR series is specially designed for extremely harsh conditions.


OPTIONS

Constant power regulation Constant voltage regulation Manual programming on front panel Digital display

SPECIFICATION

Input: 400Vac ±10%, 50 or 60Hz, three phase

Output: 3 models from 150V to 600V are available. Each model is available with positive or negative polarity.

Output Controls: Current is continuously adjustable over 0 –10 V ana-logue inputs. Optionally voltage or power regulation and control is possible over analogue input.

Voltage Regulation: Load: 0,3% of full voltage for full load change. Line: ± 0,1% of full voltage over specified input range

• COMPACT DESIGN

• CURRENT REGULATION


Current Regulation:

Load: 0,3% of full current for any voltage change. Line: : ± 0,1% of full current over specified input range.

Residual r ipple: ≤ 1% rms. related to nominal voltage

Power connections : AC Input connector power combicon connector DC output connector power combicon connector

Dimension (H x W x D): 3U x 19” x 310mm

CE Mark: EN50178 EN50081-2 EN50082-2

SELECTION TABLE MAXIMUM RATING MODUL NUMBER

V DC A 150 7 NDRR 150007 300 3,5 NDRR 3003k5 600 1,7 NDRR 6001k7


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CAPTEC 2 - 30kV / 500- 5000J/sec The primary switched high voltage power supplies CAPTEC are specially designed for the requirements to charge condensers. Four different charge powers with 500J/sec, 1500J/sec, 2500J/sec, 5000J/sec and nine different out-put voltages from 2kV up to 30kV are available. The charge voltage as well as the charge current can be independ-ently adjusted. The actual value is issued at the analogue interface. By enabling the charge process, the voltage mounts linear up to the desired voltage value. If the desired value of the voltage is reached, the power supply switches automatically over from current regulation to voltage regulation and you get the status message HV-OK from the digital interface. The voltage at the condenser is kept constant. For the CAPTEC series a manual programming and digital LCD displays on the front panel are available. Each model is available with positive or negative polarity.

SPECIFICATION


Output: 36 models from 2kV up to 30kV with a charge power of 500J/sec to 5000J/sec. Every model is available with positive or negative polarity.

Analogue I /O-Interface: Voltage and current are continuously adjustable over 0 – 10 V analogue inputs. Optionally power regula-tion and control is possible over an analogue input.


Current Regulation: Load: 0,1% of full current for any voltage change. Line: : ± 0,1% of full current over specified input range.


Power connections: AC input terminal connector HV output Lemo connector with 10m shielded HV cable

Dimension (H x W x D): 3HE x 19” x 580mm, 2kV - 10kV to 1500J/sec 6HE x 19” x 680mm, 15kV - 30kV to 1500J/sec 9HE x 19” x 550mm, 2kV - 10kV to 5000J/sec 9HE x 19” x 710mm, 15kV - 30kV to 5000J/sec

CE Mark: EN55011/03.91 (limit value class A) EN50082-2/03.95


kV DC mA J / sec 2 500 500 CAPTEC 002500 2 1500 1500 CAPTEC 0021k5 2 2500 2500 CAPTEC 0022k5 2 5000 5000 CAPTEC 0025k0 3 333 500 CAPTEC 003333 3 1000 1500 CAPTEC 0031k0 3 1666 2500 CAPTEC 0031k6 3 3333 5000 CAPTEC 0033k3 5 200 500 CAPTEC 005200 5 600 1500 CAPTEC 005600 5 1000 2500 CAPTEC 0051k0 5 2000 5000 CAPTEC 0052k0 8 125 500 CAPTEC 008125 8 375 1500 CAPTEC 008375 8 625 2500 CAPTEC 008625 8 1250 5000 CAPTEC 0081k2

10 100 500 CAPTEC 010100 10 300 1500 CAPTEC 010300 10 500 2500 CAPTEC 010500 10 1000 5000 CAPTEC 0101k0

15 66 500 CAPTEC 015066 15 200 1500 CAPTEC 015200 15 333 2500 CAPTEC 015333 15 666 5000 CAPTEC 015666





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GLOWTEC 2 – 30kV / 1 – 30kW The primary switched high voltage power supplies of the series GLOWTEC work according the same tech-nology as the CAPTEC series. The GLOWTEC series is specially adapted for high voltage plasma proc-esses / glow processes. Optionally the devices can be delivered with an integrated interlock for safe sepa-ration of the power converter from the mains, a patented ARC-current limitation which limits current peaks to five times of the rated current as well as an ARC-counter. The GLOWTEC series is available with different output ratings of 1kW, 3kW, 5kW and 10kW as single de-vice with output voltages of 2kV, 3kV, 5kV, 8kV, 10kV, 15kV, 20kV, 25kV and 30kV. Parallel operation to increase power and current capabilities is possible for 10kW models with power outputs of 20 - 30kW. .

SPECIFICATION


Output: 36 models from 2kV up to 30kV. Each model is available with positive or with negative polarity. Out-put voltages up to 10kV are available with reversible polarity referring to earth.

Analogue I /O-Interface: Voltage and current are continuously adjustable over 0 – 10 V analogue inputs. Optionally power regula-tion and control is possible over analogue input.




Patented Arc -Current l imitation: Limits the output current peaks to five times of the rated current.


Dimension (H x W x D): 3HE x 19” x 580mm, 2kV - 10kV to 3kW 6HE x 19” x 680mm, 15kV - 30kV to 3kw 9HE x 19” x 550mm, 2kV - 10kV to 10kW 9HE x 19” x 710mm, 15kV - 30kV to 10kW



kV DC mA kW 2 500 1 GLOWTEC 002500 2 1500 3 GLOWTEC 0021k5 2 2500 5 GLOWTEC 0022k5 2 5000 10 GLOWTEC 0025k0 3 333 1 GLOWTEC 003333 3 1000 3 GLOWTEC 0031k0 3 1666 5 GLOWTEC 0031k6 3 3333 10 GLOWTEC 0033k3 5 200 1 GLOWTEC 005200 5 600 3 GLOWTEC 005600 5 1000 5 GLOWTEC 0051k0 5 2000 10 GLOWTEC 0052k0 8 125 1 GLOWTEC 008125 8 375 3 GLOWTEC 008375 8 625 5 GLOWTEC 008625 8 1250 10 GLOWTEC 0081k2

10 100 1 GLOWTEC 010100 10 300 3 GLOWTEC 010300 10 500 5 GLOWTEC 010500 10 1000 10 GLOWTEC 0101k0

15 66 1 GLOWTEC 015066 15 200 3 GLOWTEC 015200 15 333 5 GLOWTEC 015333 15 666 10 GLOWTEC 015666





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LITEC 3 – 5kV / 6 – 24kW

The switch mode, water-cooled power supplies LITEC are available with output voltages of 3kV and 5kV. The LITEC power supply series provides 6kW or 12kW and is specially designed for applications which need extreme low arc energy and the full output power over a wide range. Parallel operation to increase power and current capabilities are available as option.


Anode layer systems Capacitor charging High-Voltage plasma

OPTIONS

RS232 Patented arc-current limitation Current regulation Manual programming on front panel

SPECIFICATION


Output: Models with output voltages of 3kV or 5kV and with two different output powers of 6 or 12kW are avail-able. To increase power capabilities parallel opera-tion for the 12kW model is available as option. Each model is available with either positive, negative, or reversible polarity referring to earth.

Analogue I /O-interface: Voltage and power are continuously adjustable over 0 –10 V analogue inputs. The actual value is issued at the analogue interface with 0 –10 V.

Digital I /O-interface: Over the digital interface the power supply can be re-leased as well as device-specific and process-specific messages are issued.

• COMPACT DESIGN

• CONSTANT VOLTAGE / POWER OPERATION WITH AUTOMATIC CROSSOVER

• WIDE OUTPUT POWER OPERATING RANGE

• EXTREM LOW ARC ENERGY


Voltage Regulation:

Load: 0,01% of full voltage for full load change. Line: ± 0,01% of full voltage over specified input range


Residual r ipple: ≤ 50% rms. related to nominal voltage smaller rip-ples are possible depending on arc-energy.

Power connections: AC Input connector 3-pin Han modular HV output connector HV power connectors with 10m shielded HV cable.


Dimension (H x W x D): 4U x 19” x 650mm, 6kV / 12kW. 8U x 19” x 650mm, 24kW.

SELECTION TABLE

MAXIMUM RATING MODUL NUMBER KV mA kW 3 2000 6 LITEC 0032k0 3 4000 12 LITEC 0034k0 3 8000 24 LITEC 0038k0 5 1200 6 LITEC 0051k2 5 2400 12 LITEC 0052k4 5 4800 24 LITEC 0034k8


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VAPTEC

The switch mode power supplies of the VAPTEC series are specially designed for electron-beam evapora-tion processes. This series contains the actual high voltage power supply NHRR which provides an output voltage of 8 – 10kV at an output power of 3, 5, 10kW as well as the necessary cathode-heat transformer NDRG and the XY-sweep amplifier RNTR. Furthermore we recently developed a new device technology which includes the high voltage power supply as well as the cathode heat transformer in one cabinet called NHCR. The NHCR provides an output volt-age of 8kV with an output power of 2kW. The integrated cathode transformer provides a heat current of 26A with an output voltage of 8V DC. Because for the most evaporation processes an ion-source is used to accelerate the electrons, the neces-sary Ion supply NDOR was developed within the VAPTEC series

E B E A M

XY coil Ionsource

filament

RNTR

NDOR

Substrat

Vapor

Type: NDRG-L031M01 Ue: 2 x400V AC +/-10% 50/60Hz Ua: 6V DC Pa: 360W Ia: 60° Kom. Nr. 607994 externe Absicherung: 5A Seriennr.: 00751329

NDRG

NHCR

NHRR


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VAPTEC

NHRR 8-10kV / 3-30kW

The switch mode power supply NHRR is available with three different output ratings with output voltages of 8kV – 10kV. The NHRR series is specially designed for electron beam evaporation processes. This power supplies con-tain an ARC-counter and a patented ARC-current limita-tion which limits the output current peaks to five times of the rated current. Parallel operation to increase power and current capabilities is possible for 10kW models with power outputs of 20 - 30kW.

OPTIONS

RS232 emission current survey per HV-output HV-ripple generator for sweeping

SPECIFICATION


Output: 3 models from -8kV up to -10kV with output ratings of 3kW, 5kW and 10kW are available.

Analogue I /O-Interface: Voltage and current are continuously adjustable over 0 – 10 V analogue inputs. Optionally power regula-tion and control is possible over analogue input.

Digital I /O-Interface: With the digital interface the power supply can be enabled and device-specific and process-specific messages are issued.

• COMPACT DESIGN

• CONSTANT VOLTAGE / CONSTANT CURRENT OPERATION WITH AUTOMATIC CROSSOVER

• ARC DETECTION, PATENTED ARC-CURRENT LIMITATION AND ARC COUNTER

• UP TO THREE HV-OUTPUTS POSSIBLE

Voltage Regulation:


Current Regulation: Load: 0,1% of full current for any voltage change. Line: : ± 0,1% of full current over specified input range


Patented Arc -Current l imitation: Limits the output current peaks to five times of rated current.

ARC-Counter: With the ARC-Counter a flash-over can be de-tected and counted.


Dimension (H x W x D): 3HE x 19” x 580mm, 3kW 9HE x 19” x 550mm, 5kW to 10kW


SELECTION TABLE

MAXIMUM RATING MODUL NUMBER kV mA KW 8 375 3 NHRR 008375

10 500 5 NHRR 010500 10 1000 10 NHRR 0100k1 10 2000 20 NHRR 0102k0 10 3000 30 NHRR 0103k0


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VAPTEC

NDRG 6-13V / 5-60A (Filament supply)

Type: NDRG-L031M01 Ue: 2 x400V AC +/-10% 50/60Hz Ua: 6V DC Pa: 360W Ia: 60° Kom. Nr. 607994 externe Absicherung: 5A Seriennr.: 00751329

NDRG switch mode power supplies are used to heat a cathode or a filament in applications such as evaporation or x-ray. In principle the power supply is a current source. It has two control circuits. One regulates the current through the cathode (heating current control system) and the other regulates the emission current of the tube (emission current control system). The emission current control system can be switched on via an external signal and overrides the heating current control. Both control systems are controlled by using an external set value. OPTIONS

Up to 15 different control path linearisations are pro-grammable. Under voltage detection for emission current stop

SPECIFICATION

Input: 400Vac ±10%, 50 or 60Hz, two phase

Output: 4 models are available. 6V/60A, 8V/30A, 8V/50A and 13V/5A.

Output Controls: Heat current and emission current are continuously adjustable over 0 –10 V analogue inputs. For the emission current, there are two measuring ranges (1A or 500mA). They can be switched over via an external signal.

Emission Current Regulation: Load: 0,1% of full current for any voltage change. Line: ± 0,1% of full current over specified input range.

• COMPACT DESIGN

• SELECTION BETWEEN HEAT-CURRENT OR EMISSION CURRENT REGULATION

• ADJUSTABLE HEAT-CURRENT LIMITATION

• CONTROL PATH LINEARISATION FOR YOUR E-BEAM SOURCE


Heat Current Regulation: Load: 1% of full current for any voltage change. Line: ± 0,1% of full current over specified input range.


Power connections: AC Input connector circular plug-in connector HV input connector HV power connector HV output connector HV power connectors

Dimension (H x W x D): 190mm x 238mm x 370mm

Protection System: IP 54

CE Mark: PrEN50178


V DC A 6 60 NDRG 0660 8 30 NDRG 0830 8 50 NDRR 0850 13 5 NDRG 1305


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VAPTEC

RNTR 2403 (XY Sweep amplifier)

RNTR 2403 XY sweep amplifier consolidates the sweep patterns to drive the X and Y coils of electron beam deposition sources. The sweep patterns must be gener-ate by the higher level control system. Coils of up to 8 ohms @ 2,8 Amps can be driven. SPECIFICATION

Power Input: 24VDC ±10%

Max. Output voltage: Uo = Ui – 2,5V

Output current: 0 – 3A

Output control: Output current is continuously adjustable over 0 –10V analogue input. 0 – 10V DC = 0 - 3A

Frequency range: DC .... 1kHz (3dB)

Reinforcement deviation: 0,2% to final value ± 100 ppm/K

Power connections: DC Input connector combicon power connectors Output connector combicon power connectors

Dimension (H x W x D): 3HU x 21TE x 300mm


CE Mark: EN50178

• COMPACT DESIGN

• LOW COST

• OVER CURRENT PROTECTION


SELECTION TABLE MAXIMUM RATING MODUL NUMBER V A 24 3 RNTR 2403

POWER INPUT

X0 SIGNAL +24V +24VDC GND GND PE EARTH

ANALOG INPUT

X1 SIGNAL

1 SET VALUE SWEEP COIL X+ 2 SET VALUE SWEEP COIL X- 3 SET VALUE SWEEP COIL Y+ 4 SET VALUE SWEEP COIL Y- 5 EARTH

DIGITAL INPUT/ OUTPUT

X2 SIGNAL E+ RELEASE + E- RELEASE - NO GENERAL ERROR

COM GENERAL ERROR NC GENERAL ERROR

OUTPUT

X3 SIGNAL X3A/1 OUTPUT SWEEP COIL X+ X3A/2 OUTPUT SWEEP COIL X- X3B/1 OUTPUT SWEEP COIL Y+ X3B/2 OUTPUT SWEEP COIL Y-


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VAPTEC

NDOR 180006 (Ion Supply)

The power supply NDOR 180006 is a switch mode power supply which is specially designed for ion sources. It in-cludes the anode power supply, the filament power supply and measurements for the neutralisation current. The anode power supply is frequency controlled. Contrary to the normally used pulse width modulation this principle provides a short circuit proof, a better efficiency and a lower charge of the electronic switches.

SPECIFICATION


Output Anode Power Supply: 180V / 6A

Output Fi lament Power Supply: 40V / 25A

Output Controls: Anode voltage and filament current are continuously adjustable over 0 –10 V analogue inputs. For the neutralisation current, a measuring range (+250mA up to –750mA) exists.

Anode Voltage Regulation: Load: 1% of full current for any voltage change. Line: ± 1% of full current over specified input range.

Filament Current Regulation: Load: 1% of full current for any voltage change. Line: ± 1% of full current over specified input range.

Accuracy of neutralisation current: ± 0,2% related to final value

• COMPACT DESIGN

• INTEGRATED ANODE AND FILAMENT SUPPLY

• INTEGRATED MEASUREMENT OF NEUTRALISATION CURRENT


Power connections:

AC Input connector combicon power connectors Output connector combicon power connectors

Dimension (H x W x D): 3HU x 19” x 396mm


CE Mark: EN50178 / EN61558

SELECTION TABLE

MAXIMUM RATING MODUL NUMBER Anode Filament

180V / 6A 40V / 25A NDOR 180006


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VAPTEC

NHCR 8kV-2kW / 8V-26A

The switch mode power supply consists of two independ-ent power elements. One of them generates the high voltage, the other the filament current. Both have a com-mon control-regulation-unit. The output current of the high voltage is limited in case of an ARC to the maximum of five times of the rated current by the patented Arc-current limitation. For the operation and adjustment of the unit an analogue / digital interface is available. In addition the unit includes a RS232-interface for the service.

SPECIFICATION

Input: Power: 400Vac ±10%, 50 or 60Hz, three phase Regulation: 24VDC ±20%, max. 2A

Output: High voltage: -8kV / 250mA/ 2kW Filament:: 8Vdc / 27,5Adc / 220W

Analogue I /O-Interface: Voltage and current are continuously adjustable over 0 – 10V analogue inputs. The actual value is issued at the analogue interface with 0 – 10V.

Digital I /O-Interface: Over the digital interface the power supply can be re-leased as well as device-specific and process spe-cific messages are issued.


• COMPACT DESIGN

• INTEGRATED FILAMENT SUPPLY

• ARC DETECTION PATENTED ARC LIMITATION


Current Regulation: Load: 0,1% of full current for any voltage change Line: ± 0,1% of full current over specified input range.

Residual r ipple: ≤ 1% eff. related to nominal voltage

Patented Arc -Current l imitation: Limits the output current peaks to five times of the rated current.

Arc-Counter: With the arc-counter a flash-over can be detected and counted.

Power connections: AC input terminal connector DC input terminal connector HV output Special HV-female

Dimension (H x B x T): 3HE x 19” x 580mm

CE Mark: EN50178, EN60950 EN55011/03.91 (limit value class A) EN50082-2/03.95 IEC801-3/02.88, IEC85A-77B IEC801 part 2 u. part 4

AUSWAHLTABELLE

MAXIMUM RATING MODUL NUMBER kV mA KW 8 250 3 NHCR 008250


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WELTEC

NHRG 40-60kV / 10kW

NHRG 10kW switch mode power supplies are oil insu-lated and available for different applications. For each application the necessary power supplies (grid, filament, bias) is included optionally 4 models with voltage outputs ranging from 40kV to 60kV. The NHRG series is specially designed for extremely harsh conditions.


Electron beam systems X-ray Ion implantation Capacitor charging

OPTIONS

Integrated grid and filament supply Integrated bias supply for x-ray applications Constant power regulation RS232 Manual programming on front panel Adjustable soft start ramp Adjustable delay time after arc Digital display

SPECIFICATION


Output: 4 models from 40kV to 60kV. Each model is avail-able with positive and negative polarity.

Output Controls: Voltage and current are continuously adjustable over 0 –10 V analogue inputs. Optionally power regulation and control is possible over analogue input.

• COMPACT DESIGN


• ARC DETECTION AND ARC COUNTER


Voltage Regulation:




Power connections: AC Input connector terminal connector HV output connector HV power connectors one end manufactured with 5m shielded HV cable.

Dimension (H x W x D): 510 x 550 x 1270 mm



KV DC mA 40 250 NHRG 040250 50 200 NHRG 050200 60 166 NHRG 060166 60 40kV/250mA

60kV/166mA NHRG 060250


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WELTEC

NHRG 80-170kV / 15kW

NHRG 15kW switch mode power supplies are oil insu-lated and are available for different applications. For each application the necessary power supplies (grid, filament, bias) are included optionally. 5 models with voltage outputs from 80kV to 170kV. The NHRG series is specially designed for extremely harsh conditions.


Electron beam systems Ion implantation Capacitor charging

OPTIONS

Integrated grid and filament supply Constant power regulation RS232 Manual programming on front panel Adjustable soft start ramp Adjustable delay time after arc Digital display

SPECIFICATION


Output: 5 models from 80kV to 170kV. Each model is avail-able with positive and negative polarity.

Output Controls: Voltage and current are continuously adjustable over 0 –10 V analogue inputs. Optionally power regulation and control is possible over analogue input.

• COMPACT DESIGN


• ARC DETECTION AND ARC COUNTER


Voltage Regulation:




Power connections: AC Input connector terminal connector HV output connector HV power connectors one end manufactured with 5m shielded HV cable.

Dimension (H x W x D): up to 150kV = 360 x 910 x 1185 mm



kV DC MA 80 187 NHRG 080187

100 150 NHRG 100150 120 125 NHRG 120125 150 100 NHRG 150100 170 90 NHRG 170090


19

PLASMATEC

NDCC (Plasma Power supply)

NDCC switch mode power supplies are available in 2 models with 400 to 800VDC or 600 to 1000VDC. The NDCC series is specially designed for extremely harsh conditions.

OPTIONS

19” Rack

SPECIFICATION

Input: Input voltage 400Vac ±10% 50 or 60Hz, three phase Input current 18A

Output: Output power 10kW Output voltage 50 to 800VDC 400 to 800 VDC at rated power Output current 25A max. Ignition capability 1130VDC up to 1300VDC Passive Arc Energy < 15mJ

• COMPACT DESIGN

• WIDE OUTPUT VOLTAGE RANGE

• LOW STORED ENGERGY AND RAPID ARC RECOVERY

• ANALOG / DIGITAL INTERFACE

• SERVICE INTERFACE RS232

• WATER COOLING


Output Controls:

Regulation voltage, current and power over 0 –10V analogue inputs Arc detection < 1,5µs Arc trip level 0V to 250V Arc feeding time 10µs to 2,5msec adjustable Arc pause time 10µsec to 2,5msec

Cooling system: Water cooling yes Temperature 5°C min., 35°C max. non condensing Water flow 4 l/min., > 3.5bar < 6bar Water connector quick connector for tube 10x1mm

Power connections: AC input connector 3-pin Han modular (Harting) Output connector 2-pin Han modular (Harting)

Dimension (H x W x D): 128 x 216 x 680mm 5” x 8.5” x 26.8” Note: Connectors not included

CE Mark: EN50178 EN50081-2 EN50082-2

SELECTION TABLE

MAXIMUM RATING MAXIMUM POWER

MODUL NUMBER

VDC A kW 400-800 25 - 12,5 10 NDCC0212E01002

600-800 800-1000

16,6 - 12,5 12,5 - 8,0

10 8 NDCC0420E01001

25,0A

12,5A

I[A]

U[V]800V 400V 1000V 600V

16,6A

8,0A


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PLASMATEC

NDCC pulse (DC pulsed Plasma Supply)

NDCC pulse switch mode power supplies with a pulsed output voltage from 100 to 800V with a output frequency of 76kHz. The duty factor of pulses can be selected over the serial service interface RS232 in four steps, which can be specified by the customer. In combination with the SXEG it is possible to generate bipolar pulses.

OPTIONS

19” Rack

SPECIFICATION

Input: Input voltage 400Vac ±10% 50 or 60Hz, three phase Input current 18A

Output: Output power 8kW Output voltage 100 to 400V at 15,2A average 400 to 800V at rated power Output current 7,6A average at 800V 15,2A average at 400V

• COMPACT DESIGN

• WIDE OUTPUT VOLTAGE RANGE

• LOW STORED ENGERGY AND RAPID ARC RECOVERY

• PROGRAMMABLE ANALOG/DIGITAL INTERFACE

• SERVICE INTERFACE RS232

• WATER COOLING


Output:

Ignition capability 1130VDC up to 1300VDC Passive Arc Energy < 15mJ

Output Controls: Regulation power, voltage or current over 0 –10 V inputs Arc detection < 1,5µs Arc trip level 0V to 800V Arc feeding time 0µsec to 175µsec Arc pause time 0µsec to 310µsec

Cooling system: Water cooling yes Temperature 5°C min., 35°C max. non condensing Water flow 4 l/min., > 3.5bar < 6bar Water connector quick connector for tube 10x1mm

Power connections: AC Input connector 3-pin Han modular (Harting) Output connector 2-pin Han modular (Harting)

Dimension (H x W x D): 128 x 216 x 680mm = 5” x 8.5” x 26.8” Note: Connectors not included

CE Mark: EN50178 EN50081-2 EN50082-2

SELECTION TABLE

MAXIMUM RATING MODUL NUMBER V A kW

400-800 15,2 - 7,6 8 NDCC0426E02001

NEW

Arc-detection = off

Arc- feeding time

current votage U Ignition

under load

80 µs 80 µs

Arc-detection = off

Arc -pause


21

PLASMATEC

SXEG (Bipolarpulser)

The SXEG is used in combination with the plasma power supply NDCC0426E02001 as a bi-polar pulser. The SXEG generates out of the positive pulses of the plasma power supply NDCC0426E02001 positive and negative pulses with the same output voltage level. The number of positive and negative pulses can be selected over internal DIP-switches.

SPECIFICATION

Mains: Input voltage 400Vac ±10% 50 or 60Hz, two phase Input current 100mA

Input: Input voltage 200 - 800Vac ±10% max. frequency 80kHz Input current 100mA

Output: Output power 8kW Output voltage ±200 - ±800V pulse Output current max. 15,2A

Output control: Setting range of pulses: Positive pulses 2 – 30 in double steps Negative pulses 0 – 7 in single step

• COMPACT DESIGN

• PROGRAMMABLE OVER DIP-SWITCH


Power connections : Mains circular plug-in connector 5 pin. Input 2pin-shielded cable 2m with connector HAN C 2-pol. Output 2 HV-female Output cable 2 x RG213/U, max. length 10m per cable

Dimension (H x W x D): 185 x 245 x 390mm


CE Mark: DIN VDE 0160 / EN50178

SELECTION TABLE

MAXIMALE RATING MODUL NUMBER V A kW

400-800 15,2 – 7,6 8 SXEG0528E01001

NEW

current voltage

t

Ignition


22

Patented ARC-current limitation The patented arc current limiter works like a non-linear resistance. Until a specific current level is reached, it has low Ohm resistance. Once that level is exceeded, the resistance changes, so that current remains constant, what-ever voltage applies. A graph showing the idealized voltage/current relationship across the resistance is given be-low. The arc current limiter is switched into the high voltage circuit like a resistance. If there is an arc, it is absolutely sure, that current stays limited at the threshold level.

Without arc current limiting, current peaks up to 1000 times the rated current can occur. Our patented arc current limiter keeps current peaks down to 4 times of the rated current, at the very most. Advantages: • Prolonged life of filament in electronic beam guns • Processes, such as coating, run more smoothly as arcs are suppressed, instantly • Almost complete elimination of the contamination of deposited film which normally arises from the extremely

high currents associated with arcs • higher stoichiometry • Enhanced equipment reliability • Due to the very small current fluctuations (di/dt), there are fewer breakdowns. This leads to cost savings on

such items as cables, filters and surge-voltage protection devices. The Arc current limiter can be configured to meet your specific requirements. Versions for continuous current levels of 10A and voltages of 100kV can be provided.

threshold

volta

ge

current

ARC current limitation

short circuit

current propagation with and with-out patented arc-limitation

Once the current threshold is reached, current remains constant despite increasing voltage. Resistance pro-gressively increases in this area.

voltage in case of short circuit current without arc-limitation current with arc-limitation

t

U, I


23

High voltage cable The high voltage cables, shown in the table below, as well as the plugs and sockets are suitable for voltages until 10kVDC. If you need cables or plugs for a higher voltage we would be pleased to offer them. article no. from <====> to end 1

convert with Cable length end 2

convert with Cable type

One end converted 3059.2 NHRR to universal HV-right angle plug 10m - RG213 3059.5 NHRR to universal HV-right angle plug 20m - RG213 Both ends converted NHR40505E01001 NHRR to NDRG HV-right angle plug 1,5m ODU- female 4mm RG213 NHR40505E02001 NHRR to NDRG HV-right angle plug 2,0m ODU- female 4mm RG213 NHR40505E04001 NHRR to NDRG HV-right angle plug 4,0m ODU- female 4mm RG213 NHR40505E06001 NHRR to NDRG HV-right angle plug 6,0m ODU- female 4mm RG213 NHR40505E08001 NHRR to NDRG HV-right angle plug 8,0m ODU- female 4mm RG213 NHR40505E10001 NHRR to NDRG HV-right angle plug 10,0m ODU- female 4mm RG213 NHR40505E01002 NHRR to ground HV-right angle plug 1,5m cable lug M8 RG213 NHR40505E02002 NHRR to ground HV-right angle plug 2,0m cable lug M8 RG213 NHR40505E04002 NHRR to ground HV-right angle plug 4,0m cable lug M8 RG213 NHR40505E06002 NHRR to ground HV-right angle plug 6,0m cable lug M8 RG213 NHR40505E08002 NHRR to ground HV-right angle plug 8,0m cable lug M8 RG213 NHR40505E10002 NHRR to ground HV-right angle plug 10,0m cable lug M8 RG213

HV-right angle plug ODU-female reference

dimensions [mm]

dimensions [mm] electrical data

module series A A1 H L M S1 S2 ∅d ∅D L s g Q INom Imax FLA 4S 28 28 56 49 31 20 19 4 8 15 22,5 12,5 6 55A 80A

filter pad for replacement article no. type usable for protection

class dimensions [mm] pieces / VE

1740005.18 RFF 120

NDRR CAPTEC

GLOWTEC NHRR NDOR SXEG

IP20 120 x 120 10

1740005.35 FP80T NHCR IP20 80 x 80 10 1740005.26 AFF 01 NDRG IP54 118 x 118 10

HV_Prospekt_07_englisch_070205

J. Schneider Elektrotechnik GmbH Helmholtzstrasse 13 D-77652 Offenburg Deutschland Tel. : +49 / (0) 781 / 206-0 Fax : +49 / (0) 781 / 25318 www.j-schneider.de [email protected]

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