Hot Spot Management and Micro Refrigeration in...
Transcript of Hot Spot Management and Micro Refrigeration in...
Ali Shakouri Director, Thermionic Energy Conv. CenterBaskin School of EngineeringUniversity of California Santa Cruz
Hot Spot Management and Micro Refrigeration in Integrated
Circuits
Acknowledgement:National Semiconductor,
Intel, Canon, Agility, SRC-Interconnect Focus Center, Packard, NSF,
DARPA, ONR
IEEE CSS and CMPT Santa Clara Valley; San Jose, CA; 20 April 2009
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Motivation: Microprocessor Evolution
Source: IntelSource: Intel
1,000,0001,000,000
100,000100,000
10,00010,000
1,0001,000
1010
100100
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1 Billion 1 Billion TransistorsTransistors
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1,000,0001,000,000
100,000100,000
10,00010,000
1,0001,000
1010
100100
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1 Billion 1 Billion TransistorsTransistors
808680868028680286
i386i386i486i486
PentiumPentium®®
KK
PentiumPentium®® IIII
’’7575 ’’8080 ’’8585 ’’9090 ’’9595 ’’0000 ’’0505 ’’1010
PentiumPentium®® IIIIIIPentiumPentium®® 44
’’1515
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A. Shakouri 3/24/2009Non Uniform Heat Generation in VLSI Chips
Steve Kang et al. Electrothermal analysis of VLSI Systems, Kluwer 2000
Problem:Problem:
∆T=20C
Mean-time-to-failure due to electromigration increase x5
110C
108C90C80C
1 cm
On chip temperature contour
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Impact of temperature on IC performance15oC temperature increase:• Cell and interconnect delay (10-15%)• Crosstalk noise level increase (up to 25%)• Leakage power exponential increase with
temperature – 90nm →25-40% of total power– 60nm→50-70% of total power– Potential thermal runaway
• Lifetime exponential decrease with temperature (x ¼) – e.g. electromigration, oxide breakdown
• Clock gating and multithreshold CMOS increase on-chip thermal variation
Thermal integrity: a must for low-power-IC digital design, EDN 15 Sept. 2005
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• Silicon Chip 10x10x0.5 mm3, assume 100W• 400µm diameter hot spot in the center, 1KW/cm2 heat
flux (1.25W) → ∆Thot spot ~7C
∆Thot spot is approximately independent of the technique used to cool the whole chip.Example: If the heat transfer coefficient changes from 5 to 20 KW/m2K, this will change Taverage from 225 to 75C; when the average power dissipation is ~100W/cm2 but this will not change ∆Thotspot
Heat Spreader
Hot spot temperature riseHot spot temperature rise
TIM2TIM1
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Scheerer et al., Siemens AG, Elec. Lett. 35, (20, Sept. 1999)
Typical DFB Laser:∆λ/∆T= 0.1 nm/oCHeat generation kW/cm2
High Speed WDM Fiber Optics SystemsHigh Speed WDM Fiber Optics Systems
• Optoelectronic device used in high-speed, multi wavelength fiber optic communication systems generate kW/cm2 and they need temperature stabilization.
Fiber Optic Link: 3200 Gbit/s80 Lasers, 40 Gb/s per laser0.8nm channel spacing
Wavelength Division Multiplexing
0 1 0 1 1 00 1 0 1 1 0
~ 100 km~ 100 km ~ 100 km
∆λ ~ 0.4 nm∆λ ~ 0.8 nm
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Thermal Issues in ElectroabsorptionModulator (EAM) • EAM can be easily integrated into tunable lasers to offer
high bandwidth (>10Gb/s), low chirp, low drive voltage and high extinction ratio
Akulova, et. al., IEEE Journal of Selected Topics in Quantum Electronics, 8 (6), Nov/Dec 2002
Collaborators: P. Kozodoy, P. Abraham (Agility Communications)
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Thermal Imaging of Integrated Thermal Imaging of Integrated Electroabsorption ModulatorElectroabsorption Modulator
Electroabsorption modulator
Waveguide Ridge
20um
Optical Image Thermal Image
V=-2.8V
Thermal ImageV=0V
A. Shakouri, J. Christofferson, Z. Bian, and P. Kozodoy, Proceeding of Photonic Devices and System Packaging Symposium (PhoPack 2002), pp22-25, July 2002, Stanford CA.
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Temperature Profile along ElectroabsrorptionModulator
Vb=4V
Surf
ace
Tem
pera
ture
Cha
nge
(ºC
)
Vb=3V
Vb=2V
Vb=1V
Position (µm)
Input power 6mW
Input Output
4V
3V
2V
1V
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Peak Surface Temperature at High Input Power
Bias (V)
Peak
Tem
pera
ture
Cha
nge
(C)
Standard Thermal Design
Improved Thermal Design
measurement (points)
theory (line)
Input power ~ 35 mWWavelength ~1.55 µm.
There is thermal runawaywith standard device design
Z. Bian, J. Christofferson, P. Kozodoy, A. Shakouri, Applied Physics Letters 2003
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ab
a
I
Q Q
π ab = π a − π b =QIPeltier:
Peltier Effect (1834)Peltier Effect (1834)
When the current flows from material (a) into material (b) and then back to material (a), it heats the first junction and cools the second one (or vice versa). Thus, heat is transferred from one junction to the other one.
π = S ⋅ TdSdT
= γT
⎧ ⎨ ⎩ ⎪
Commercial TE Module• ∆T=72C (no heat load)• Cooling density <10W/cm2
• Efficiency 6-8% of Carnot
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A. Shakouri 3/24/2009Efficiency of TE CoolersEfficiency of TE Coolers
Fraction of
Carnot
Efficiency
0.1
0.4
0.3
0.2
ZT1 2 3 4
Commercial TE’s
Typical CFC System
Z = S2σβ
Z = (Seebeck)2 (electrical conductivity)(thermal conductivity)
Single ratio Z determines efficiency (COP) and the maximum cooling of thermoelectric coolers .
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Cooling Power DensityCooling Power Density
Vandersande, J.W., and Fleurial, J-P., Proceedings of the 15th International Conference on Thermoelectrics, pp. 252-255, 1996.
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High Cooler Power Density Micro Peltier Coolers
H. Bottner
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Nanoscale heat transport and microrefrigerators on a chip; A. Shakouri, Proceedings of IEEE, July 2006
Featured in Nature Science Update, Physics Today, AIP April 2001
1 µm
Hot Electron Cold Electron• Monolithic integration on silicon• ∆Tmax~4C at room temp. (7C at 100C)• Cooling power density > 500W/cm2
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A. Shakouri 3/24/2009Microrefrigerators on a chip
Featured in Nature Science Update, Physics Today, AIP April 2001
UCSC, UCSB, HRL Labs
Relative Temp. (C)
50µm
Nanoscale heat transport and microrefrigerators on a chip; A. Shakouri, Proceedings of IEEE, July 2006
J. Christofferson
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-1
-0.5
0
0.5
1
1.5
2
2.5
3
0 200 400 600 800 1000
SiGeC Thin Film Cooler (sample 91)
40x40 µm2, Tambient
=70C
Coo
ling
(K)
Heat Load (W/cm2)
Micro Refrigerator Integrated with Thin Film Heater
10µm
Coo
ling
(o C)
Heat Load (W/cm2)
680 W/cm2
Cooling power density >500W/cm2 even though ZT~0.1. This is due to 3D device geometry
Nanoscale heat transport and microrefrigerators on a chip; A. Shakouri, Proceedings of IEEE, July 2006
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Transient Thermal Imaging of a microcooler
100nsec, 300nm, 0.1C resolution
80x80 microns
10µs
20µs 50µs
-2
0
2
4
6
8
10
10-7 10-6 10-5 0.0001 0.001
Transient Response 50x50 Micron Device
TheoryExperiment
Surfa
ce T
empe
ratu
re C
hang
e (C
)
Time(s)
J. Christofferson et al. SemiTherm 2009
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Spot Cooling with SiGe microrefrigerators in a packaged device
Si chip inside a package with non-uniform heating Qh=10xQb –reference-
Solutions:(A) Passive cooling: Cu substrate(B) Active localized cooling: SiGe
superlattice (no contact/parasitic resistances, optimized thickness)
Cu
A
R2Ta
Si
R2
Ta
50μm
50μm
Package thermal resistanceR2=61 K/W (per unit area: 6×10-5 m2K/W)
Si
B
R2
Ta
I
1000μm
1000μm
500μm
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0
0.05
0.1
0.15
0.2
0.25
0.3
0.35
0.4
0
0.01
0.02
0.03
0.04
0.05
0 200 400 600 800 1000
optimum current
consumed powerOpt
imum
cur
rent
(A)
Qh (W/cm2)Qh (W/cm2)O
ptim
um c
urre
nt (A
)(c) Consum
ed Power (W
)
0 0.21 0.41 0.62 0.82 1.03Total heat (W)
0
0.05
0.1
0.15
0.2
0.25
0.3
0.35
0.4
0
0.01
0.02
0.03
0.04
0.05
0 200 400 600 800 1000
optimum current
consumed powerOpt
imum
cur
rent
(A)
Qh (W/cm2)Qh (W/cm2)O
ptim
um c
urre
nt (A
)(c) Consum
ed Power (W
)
Qh (W/cm2)O
ptim
um c
urre
nt (A
)(c) Consum
ed Power (W
)
0 0.21 0.41 0.62 0.82 1.03Total heat (W)
(a)
T h(K
)
Qh (W/cm2)
280
300
320
340
360
380
0 200 400 600 800 1000
Thin film microcoolerBulk Si
(a)
T h(K
)
Qh (W/cm2)
280
300
320
340
360
380
0 200 400 600 800 1000
Thin film microcoolerBulk Si
Hot spot temperature
Power Analysis
Silicon substrate
Copper substrate
SiGe superlattice microrefrigerator
Si
Fukutani and Shakouri (InterPACK06)
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What could be achieved if SiGe material properties could be improved?
240
260
280
300
320
340
360
380
0 200 400 600 800 1000
ZT=0.125ZT=0.627 (SeebZT=0.627 (ResisZT=0.627 (The
T loca
l (K)
Qh (W/cm2)
(a)T l
ocal
(K)
Qh (W/cm2)
by αby ρby k
240
260
280
300
320
340
360
380
0 200 400 600 800 1000
ZT=0.125ZT=0.627 (SeebZT=0.627 (ResisZT=0.627 (The
T loca
l (K)
Qh (W/cm2)
(a)T l
ocal
(K)
Qh (W/cm2)
by αby ρby k
Thermal conductivity of SL
reduced by 5
Seebeck coefficient of SL increased by √5SiGe micro
refrigeratorZT~0.125
Si Substrate
Fukutani and Shakouri (InterPACK2006)
Si
R2
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Thin Film Microrefrigerator Optimization
Current SiGe material
Decrease thermal conductivity
Increase Seebeck coef.
Younes Ezzahri et al. InterPACK07
• 10 microns thick, 50x50µm2 monolithic microrefrigerator with ZT~0.5 can cool a 1000W/cm2 hot spot by >15C.
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A. Shakouri 3/24/2009Silicide nanoparticles in SiGe
300K 0.8% nanoparticles
Silicon
Si0.5Ge0.5
GeNiSi2
ZT (300K) ~0.5
ZT (900K) ~1.8
Natalio Mingo et al. Nano Letters 2009
Predictions:
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RejectedEnergy 61%
Lawrence Livermore National Lab., http://eed.llnl.gov/flow
Power ~3.3TW
1.3TW
A. Shakouri 2/13/2009
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)()()( 2
2
tyconductivithermaltyconductivielectricalSeebeckZ
kSZ
=
=σ
∆V~ S ∆T
Electrical Conductor
Hot Cold
Efficiency function of thermoelectric figure-of-merit (Z)
Ι
Rload = RTE internal
TVS
∆∆
=Seebeck coefficient
(1821)
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A. Shakouri 3/24/2009Recent Advances in Thermoelectrics
• Recent advances in nanostructuredthermoelectric materials led to a sudden increase in (ZT)300K > 1
A. Majumdar, Science 303, 777 (2004)
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Power Generation Efficiencies of Different Technologies
0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0.8
400 600 800 1000 1200
ZTm=0.5ZTm=1ZTm=2ZTm=3Carnot limit
Thot
(K)
0.5
Ener
gy C
onve
rsio
n Ef
ficie
ncy
3
12
Carnot
Solar/ Rankine
Geothermal/ Organic Rankine
ZTavg=20Coal/ Rankine
Cement/ Org. Rankine
Solar/ Stirling
ZT= S2σΤ/κ
Cronin Vining
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Radioisotope Thermoelectric Generators(Voyager, Galileo, Cassini, …)
• 55 kg, 300 We, ‘only’ 7 % conversion efficiency• But > 1,000,000,000,000 device hours without a single
failure
B-doped Si0.78Ge0.22
P-doped Si0.78Ge0.22
B-doped Si0.63Ge0.36
P-doped Si0.63Ge0.36
Hot Shoe (Mo-Si)
Cold Shoe
n-type legp-type leg
SiGe unicoupleCronin Vining, ZT Services
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Best Thermoelectric MaterialsBest Thermoelectric Materials
SS2σ
σ
Free carrier concentration
Thermal Conductivity
κLattice contribution
Electronic contribution
Seebeck Electrical Conductivity
Insulator Semiconductor Metal
For almost all materials, if doping is increased, electrical conductivity increases but Seebeck coefficient is reduced. Similarly σ ↔ κ
ZT= S2σΤ/κ
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Solid-State Thermionics
Go beyond the “energy band” trade offs in bulk semiconductors.
Deg. Semiconductor/Metal+ Energy Filter (barriers)
A. Shakouri, “Thermoelectric, thermionic and thermophotovoltaic energy conversion”, ICT 2005
Energy
Density of States
Ef
Ebarrier
Distance
Deg
. Sem
icon
duct
or/ M
etal
Barr
ier
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0
1
2
3
4
5
6
7
8
-1
0
1
2
3
4
5
0 2 4 6 8 10 12 14
ZT
(Ebarrier -E
f ) / kB T
Fermi Energy (eV)
Conserved
Non-conserved
Optimize TE Efficiency:Optimize TE Efficiency:(Metal/Semiconductor Nanocomposites) (Metal/Semiconductor Nanocomposites)
Assume: κlattice=1W/mK, mobility ~10 cm2/Vs
Even with only modestly low lattice thermal conductivity and electron mobility of typical metals, ZT > 5 is possible with hot electron filters
Fermi energy eV (↔ free electron concentration)
Planar Barrier
Metal/Semiconductor Nanostructure
Hot and cold electrons in equilibrium
Hot electron filter
D. Vashaee and A. Shakouri, Phys. Rev. Lett. 92, 106103/1 (2004).
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BowersUC Santa BarbaraTE elements and
devices
Shakouri (PI)UC Santa Cruz
Overall organizationTE measurements
GossardUC Santa Barbara
MBEp-Er_III-V
ZideDelaware
MBE Non-Er III-V
Sands/RamdasPurdue
Sputtering /BulkZrN/HfN /Er_III-V
Thermionic Energy Conversion CenterThermionic Energy Conversion CenterAli Shakouri, DirectorAli Shakouri, Director
MATERIALSMATERIALS
CHARACTERIZATION / MODELINGCHARACTERIZATION / MODELING
DEVICES/ SYSTEMSDEVICES/ SYSTEMS
MajumdarUC Berkeley
ThermalCharact./Modeling
RamMIT
Thermal Imaging, Z-meter
BellBSST
Modules, Modeling Technology Transition
KobayashiUC Santa Cruz
MOCVDEr_III-V
BianUC Santa Cruz
Transport TheoryZT Characterization
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ErAs Semi-metal Nanoparticlesimbedded in InGaAs Semiconductor Matrix
Molecular Beam Epitaxy (MBE) provides atomic layer control
ErAs dots are lattice-matched and incorporate without any visible defects in InGaAs despite different crystal structures (Cubic vs. Zinc-blende)
• “Random” ErAs particles ~ 2-3 nm
• Size is invariant to growth conditions
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In0.53Ga0.47As matrix
0.3% ErAs/In0.53Ga0.47As (superlattice)
0.3% ErAs:In0.53Ga0.47As (random)
3.0% ErAs:In0.53Ga0.47As (random)
Beating the Alloy Limit in Thermal Conductivity Beating the Alloy Limit in Thermal Conductivity Ordered and Random ErAs:InOrdered and Random ErAs:In0.530.53GaGa0.470.47AsAs
From superlattice to “random” nanoparticle distributionFaster deposition rates enable record thick MBE grown films – up to 60µm
Phonon scattering by ErAs nanoparticles3-fold reduction in thermal conductivity beyond the alloy limit
Initial interruptedsuperlattice growth
Alloy limit of InGaAs
Accelerated“random nanodot” growth
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Two Beneficial Effects of Metal Nanoparticles on Thermoelectric Performance
Nanoparticle
ErAs
InGaAs
ErAs
e-
e-
e-
e-
e-
e-
e-
ErAs
e-
Metal nanoparticles scatter phononsreduced thermal conductivity
Metal nanoparticles donate electronsenhanced electrical conductivityincreased electron mobility in the matrix(Seebeck)2(electrical conductivity)
(thermal conductivity)Z =
(Seebeck)2(electrical conductivity)(thermal conductivity)
Z =
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AlN_low pIate
200 elements of p-ErAs array
Wafer scale module fabrication
AlN_upper plate
200 elements of n-ErAs array
AlN_low plate
AlN_upper plate20 µm elements
400 element generatorGehong Zeng, John Bowers (UCSB)
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A. Shakouri 3/24/2009Module Power generation results
140 µm/140 µm AlN
400 elements (10-20 microns ErAs:InGaAlAs thin films, 120x120µm2), array size 6x6 mm2
G. Zeng, J. Bowers, et al. (UCSB, UCSC) Appl. Physics Letters 2006
0
0.5
1
1.5
2
2.5
3
0 20 40 60 80 100 120 140
10 µm module20 µm module
Out
put P
ower
(W
/cm
2 )
∆T (K)Working with BSST on high power density module demonstration
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• ZrN layers alloyed with W2N– Reduction in thermal conductivity– Closer lattice match with ScN layer
HAADF/STEM image of (Zr,W)N/ScNsuperlattice Courtesy: Joel Cagnon and Susanne Stemmer, UCSB
Refractory (Zr,W)N/ScN Metal/SemiconductorSuperlattices for Higher Temperature OperationRefractory (Refractory (Zr,W)N/ScNZr,W)N/ScN Metal/SemiconductorMetal/SemiconductorSuperlattices Superlattices for for HHighigher er TTemperatureemperature OOperationperation
V. Rawat, T. Sands, J. Cagnon, S. Stemmer et al. 2008
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Monte Carlo simulation of TE energy exchange
InGaAs InGaAsP InGaAs
Heat SinkAnodeBias
Hot SourceCathode
Cathode contactlayer
Anode contact layer
Barrier (main-layer)
Mona Zebarjadi, Keivan Esfarjani, Ali Shakouri (Phys. Rev. B 2006)
Large Seebeck
Q =-∆S.Tc.I
electrons
Small Seebeck
Small Seebeck
Q =∆S.Th.I
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A. Shakouri 3/24/2009Electron-lattice energy exchange
Peltier Cooling
Peltier Heating
Energy relaxation length in cathode
Energy relaxation length in anode
M. Zebarjadi, A. Shakouri and K. Esfarjani, Phys. Rev. B, Vol 74, 195331 (2006)
Ener
gy E
xcha
nge
(10-
9W
/cm
2 )
Length (micron)
-0.1
0.1
0.25 0.5 0.75 1 1.25 1.5 1.75
-0.05
0
0.05
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Tjunction
θ_jc Package Resistance θ_jc
Tcase
IC Chip thermal modelingIC Chip thermal modelingHeatsink (HS)Resistance θ_sa
Tambient
Tsink
θ_sa
Second InterfaceResistance θ_cs θ_cs
Thermal Resistor Network Model
Real package
Yi-Kan Cheng, et al., “Temperature-Driven Cell Placemnt.” ElectrothermalAnalysis of VLSI Systems, 2000. 157-179.
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Power Map Temperature Map
~16 sec
(Pentium 4, 65MB)
ANSYS
Finite Element Analysis (power map => temperature map)
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A. Shakouri 3/24/2009The road to a fast algorithm–Analytic methods based on Green's Function
≈pyramid
stack
[1] York C. Gerstenmaier, Gerhard K.M. Wachutka, “Efficient Calculation of Transient Temperature Fields Responding to Fast Changing Heat Sources Over Long Duration in Power Electronic Systems” IEEE Trans on Components and Packaging Techn, 27 (1) March 2004
[2] YONG ZHAN and SACHIN S. SAPATNEKAR. A High Efficiency Full-Chip Thermal Simulation Algorithm. Proceedings of the 2005 IEEE/ACM International conference on Computer-aided design.
V. Martin et al. Semitherm 2007
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Limitation of simplified geometry
(analytical solution)
≠
≈pyramid
stack
101C 109C
79C 90C
V. Martin et al. Semitherm 2007
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∫∫∫'
')',','()',(V
dvzyxqrrG rr∑∑ ++=
s ttysxftswyxg ),(),(),(
Use of Image Blurring for full chip temperature calculation
w(-1,-1) w(-1,0) w(-1,1)
w(0,0)w(0,-1) w(0,1)
w(1,0)w(1,-1) w(1,1)
TRAVIS KEMPER, YAN ZHANG, ZHIXI BIAN and ALI SHAKOURI. Ultrafast Temperature Profile Calculation in IC chips. THERMINIC 2006
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Convolution by Images
Images (electrostatics):
“A complicated problem can be solved by finding a simpler problem, as long as it is described by the same differential equation and the boundary conditions are equivalent”
Adiabatic Boundary Conditions
Go back to the stack geometry...
∂T/∂n = 0≈
V. Martin et al. Semitherm 2007
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Transient Temperature Change in IC
Input Pattern
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0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 0.535
40
45
50
55
60
65
70
Time (sec)
Tem
pera
ture
(deg
ree
C)
Power BlurringANSYS
Computation Time
ANSYS:10056 (sec)
PB: 100 (sec)
Reduction Factor: 101
Virginia Martin Heriz, A. Shakouri et al. THERMINIC 2007
Transient temperature at the chip center
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A. Shakouri 3/24/2009Inverse problem (temperature -> power)
Measured temperature profile (include noise)
IMAGE DEBLURRINGREGULARIZATION:Tikhonov Regularization (does notpreserve edges)Bilateral Total Variation (Maximum a Postiori Cost function) Farsiu, et
al. IEEE Trans on Image Processing, 13 (10), p. 1327 October, 2004.
(Semitherm 2007 -Xi Wang et al.)
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A. Shakouri 3/24/2009Inverse problem (temperature -> power)
Measured temperature profile (include noise)
(Semitherm 2007 -Xi Wang et al.)
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• Metal / semiconductor nanocomposites can improve thermoelectric energy conversion– Mid/long wavelength phonon scattering– Hot electron energy filtering
• Micro Refrigerators on a Chip• Localized cooling (10 –150µm, 4-7C), based on SiGe, InP, > 500 W/cm2
• Potential to reach 20C cooling, 1kW/cm2
• Fast transient thermal imaging using thermoreflectance– Resolution: ~250nm, 0.01C, 100ns
• Fast transient thermal calculation– Using image blurring/ de-blurring, ~100x faster than FEA
• Thermal issues in electro-absorption modulators
Summary
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Acknowledgement
Mona Zebarjadi (UCSC) - Material Research Society Gold Graduate Student Award, Boston, MA 2007
Yan Zhang, James Christofferson, et al. (UCSC/UCSB) – IEEE Transactions on Components and Packaging Best Paper Award 2006
Je-Hyoung Park, Xi Wang, Yan Zhang (UCSC) - Student Award, Advanced Thermal Workshop International Microelect. Packaging Society, 2005-2009
Daryoosh Vashaee (UCSC), Joshua Zide (UCSB), Xiaofeng Fan (UCSB) -Goldsmid Award (Best Graduate Student Research), International Conference on Thermoelectrics, 2001, 2004, 2007
Alumni: Daryoosh Vashaee (Prof. Oklahoma State), Yan Zhang (Tessera) , Rajeev Singh (Sun Power), Zhixi Bian (Adj. Prof. UCSC),James Christofferson (Res. Scientist UCSC), Kazuhiko Fukutani(Canon), Javad Shabani (PhD student, Princeton), Tammy Humphrey, Virginia Martin, Travis Kemper
Postdocs/Graduate Students: Younes Ezzahri, Helene Michel, Mona Zebarjadi, Xi Wang, Kerry Maize, Hiro Onishi, Tela Favaloro, Paul Abumov, Phil Jackson, Je-Hyoung Park, Oxana Pantchenko