Hine Automation Corporate Presentation - SC - 2014-04-24
-
Upload
todd-smith -
Category
Documents
-
view
11 -
download
1
Transcript of Hine Automation Corporate Presentation - SC - 2014-04-24
Confidential
Hine AutomationCorporate Presentation06 Mar 2014
Confidential
Who is Hine Automation?
ConfidentialPage 3
Hine Automation Designs and Manufactures Vacuum Automation Systems and Robotic components
We were founded in 2009 Our Headquartered is in St. Petersburg, Florida We Specialize in Thin Film Automation
Semiconductor Compound Semiconductor Photovoltaic Flat Panel Display
Serving OEMs Worldwide
Who is Hine Automation?
Confidential
Our robotic components are based on the quality and reliability of the original Hine Design robotics
The concept for Hine Automation products Is to use State of the Art Technology Provide Improved Reliability Provide a Greater Support Structure Provide a Plug‐and‐play replacement for Hine Design robotics
This means Form, fit and function with existing products
Page 4
Why the name “Hine”?
Confidential
Why is Hine Automation Growing?
Hine has been successful with its current customers thanks to: Appropriate product mix for its target markets. Flexible products offering allowing for higher levels of customization Excellent service and repair program for Hine Design & Asyst legacy
products. Responsive customer service.
Customized Automation Solutions
Standard Automation Systems
Standard Robotic Components
•Custom substrate sizes•Unique applications•New markets and technologies
•Cluster Systems•Load Locks
•Robotic Handlers•Elevators•Aligners
Hine AutomationService &
Repairs
Page 5
Confidential
Our MissionOur goal is to design and manufacture the most cost effective automation solutions and deliver unparalleled customer service and support.
Our StrengthsDemonstrated Reliability and Cost Effective SolutionsCustom Solutions and Lightning Speed ResponseKnowledgeable and Fast Turn‐around Times Experience‐driven designs
Mission & Strengths
Page 6
Confidential7
Our Product Portfolio
Robotics Handlers
Load Locks
Load PortsAligners
ElevatorsCustom Solutions
Service
Confidential
Constellation SystemsVacuum Transport Systems
Confidential
Cassette to Cassette automation systems for vacuum processing of up to 300mm semiconductor substrates Single or Dual Cassette Load Ports Multifaceted Transport Module 200 & 300mm MESC interfaces Single communication connection allows access to
all components of the Constellation systems Solutions for all levels of throughput requirements Typical applications:
RIE, ICP Etch, PECVD, HD PECVD, ALD & PVD
Constellation HA-800
Vacuum Transport Systems
200mm
HA‐200 HA‐400 HA‐500 HA‐600 HA‐800
300mm
HA‐4300 HA‐6300
Cassette Load Port
Transport Module
Vacuum Transport Systems Overview
Page 9
Confidential
Vacuum Transport Systems 200mm Product Line
HA-400 HA-600 HA-800HA-200
CONSTELLATION SYSTEMS HA‐200 HA‐400 HA‐500 HA‐600 HA‐800
Max. Cassette Load Ports 1 1 2 2 2
Max. Process Modules 2 (3) 3 3 4 6
R&D / Pilot Production
High Volume Manufacturing
Page 10
HA-500
Page 10
ConfidentialPage 11
HA‐x00 & HA‐x300Wafer per Cassette 25 or 50Maximum Payload 4.5kgVacuum performance
Base operating pressure <5.00x10‐7 TorrLeak rate 5.00x10‐9 scc He/sec
Input Power 208 VAC 20A 1Ø Electrical Integration YesMaximum Temperature 100⁰CMCBF >1x106
MTTR <2 hours**
Materials exposed6061‐T6 Aluminum, Stainless Steel 300 and 400 Series, Viton, Borosilicate Glass
Control Interface RS‐232 / Ethernet
Vacuum Transport Systems Specifications
Confidential
HA‐800, HA‐600 & HA‐500Two Cassette Load Port
HA-x00
Transport Module (TM) Hine Vacuum Robot Compatible with opaque and
transparent substrates Two Cassette Load Ports (CLP)
Hine Vacuum Elevator Sophisticated automation
features: wafer mapping, wafer cross‐slot detection, and safety interlocks
VAT valve (SMC available upon request)
HA-5.0 Vacuum Robotic Arm
HA-50V Vacuum Elevator
CONSTELLATION SYSTEMS HA‐500 HA‐600 HA‐800
Max. Cassette Load Ports 2 2 2
Max Process Modules 3 4 6
Page 12
Page 12
Confidential
HA‐400One Cassette Load Port
HA-400
Transport Module (TM) Hine Vacuum Robot Compatible with opaque and
transparent substrates Cassette Load Port (CLP)
Hine Vacuum Elevator Sophisticated automation
features: wafer mapping, wafer cross‐slot detection, and safety interlocks
VAT valve (SMC available upon request)
HA-5.0 Vacuum Robotic Arm
HA-50V Vacuum Elevator
CONSTELLATION SYSTEMS HA‐400
Max. Cassette Load Ports 1
Max Process Modules 3
Page 13
Confidential
HA‐200Entry level System
HA-200
CONSTELLATION SYSTEMS HA‐200
Max. Cassette Load Ports 1 (2)
Max Process Modules 2 (3)
Transport Module (TM) HA‐3.2 Vacuum Robot Compatible with opaque and
transparent substrates Removable Lid Optional Mechanical Aligner
Cassette Load Port (CLP) Vacuum & Atmosphere Options Hine Vacuum or Atmospheric
Elevator Options Sophisticated automation
features: wafer mapping, wafer cross‐slot detection, and safety interlocks
Optional slit valve for independent plumbing between TM and CLP
HA-3.2 Vacuum Robotic Arm
HA-50V Vacuum Elevator
Page 14
Page 14
Confidential
HA‐4300 & HA‐6300 with EFEMTwo Cassette Shuttle up to 300mm
HA-4300
Transport Module (TM) Hine Vacuum Robot Compatible with opaque and
transparent substrates Two Cassette Shuttle EFEM
Hine Atmospheric Elevator Sophisticated automation features:
wafer mapping, wafer cross‐slot detection, and safety interlocks
Two (2) position linear slide allowing cassette exchange during operation
Fan Filter Unit for Mini Environment with integrated ionization & dual LED "Lumifilter" with light bars
VAT Door
HA-5.0 Vacuum Robotic Arm
HAtm-50 Atmospheric Elevator
CONSTELLATION SYSTEMS HA‐4300
Max. Cassette Load Stations 2
Max Process Modules 3
Page 15
Page 15
Confidential
Vacuum Transport Systems Control Box and Communication Hub
Safety Interlock
Circuit Breakers
System Controller
Power Supply
Standard Features
Communication Hub
Ethernet Port for OEM Controller
Ethernet Port for Robotic Components
Well packaged electrical and communication interfaces make the Constellation HA-x00 easy to integrate with any OEM system.
Single communication interface between the OEM system and the Constellation units.
Page 16
Page 16
Confidential
Wafer Change Kit Standard Options
Standard Wafer Change Kits for SEMI‐standard wafers 75mm‐300mm Cassette cradle and Head plate assembly
Head plate: Typical SEMI H‐bar design Tilt‐out cassette cradle: Typical SEMI cassette design Cassette cradle payload: 6 lbs. (typical)
End‐effector Material: 17‐4 stainless steel; #3 brushed finish Payload: 5 lbs. (typical) Standard contact points: PERLAST Series G75H (or equivalent) High temperature contact points: 316L stainless steel pads Electrostatic discharge contact points: PERLAST Series G75H (or equivalent) Gold‐
Palladium sputter coated Optical Aligner (Optional)
Contact points (std., HT, ESD): PERLAST Series G75H (or equivalent) Pedestal: Sized for SEMI‐standard wafers
Custom WCK available upon request Page 17
Page 17
Confidential
Cassette Load Port SizesStandard Options
Vacuum & Atmospheric Load Ports are offered CLP ‐ Vacuum Cassette to Cassette Load Ports for 25 & 50 wafer cassette ALP ‐ Atmospheric Cassette to Cassette Load Ports for 25 wafer cassette MLP ‐ Vacuum Mini Load Port for Single wafer to 4 wafer Cassette
Page 18
Page 18
25 wafers 50 wafers1-4 wafers
Confidential
High Vacuum ConfigurationStandard Options
All Constellation systems offer high vacuum configurations Vacuum configuration can be customized to meet your needs
TRANSPORT MODULE HA-200 HA-400 HA-600 HA-800
PLUMBING 100mm ISO 100mm ISO 160mm ISO 200mm ISOISOLATION VALVE None None None NoneFORELINE PLUMBING NW-40 NW-40 NW-40 NW-40VACUUM GAUGE MKS 901P MKS 901P MKS 901P MKS 901P
CASSETTE LOAD PORT HA-200 HA-400 HA-600 HA-800
ISOLATION VALVE N/A 100mm ISO 100mm ISO 100mm ISOVACUUM GAUGE N/A MKS 901P MKS 901P MKS 901P
Page 19
Page 19
Confidential
Vacuum Transport SystemsOptional Level 3 Controller Overview
Robotic Level Commands: Teach position for each robotic and discreet component in the system, teach sequence for
system level tasks coordinated by OEM System Controller
SW Integration of System Level
Communication with discreet components
OEM Controller OEM Controller
Hine RobotHine Robot
Hine ElevatorHine Elevator
Hine AlignerHine Aligner
ValvesValves
Robotic and Component
Level Commands & IO
coordinated controlled by HA
System Controller
System Level Communication with discreet
components and Teach position for each process
module
SW Integration of the
Constellation HA‐200 system
OEM Controller OEM Controller HA System ControllerHA System Controller
Hine RobotHine Robot
Hine ElevatorHine Elevator
Hine AlignerHine Aligner
ValvesValves
Software Control System provided by OEM
Integrated Software Control System simplifies management of material
handling
Page 20
Confidential
Vacuum Transport Systems Customization Options
We can customize our product to meet your needs
Wafer Change Kits for non SEMI standard substrate Custom Load Ports & Transfer Modules Heated Chambers and Pre‐Heat Stations Horizontal & Vertical Reach Heavy Payload Complete Control Systems Vacuum configuration and plumbing
Slit valves: SMC / VAT High vacuum configuration available Customer specified valves
Page 21
Page 21
Confidential
Vacuum Transport Systems Installed Base 2014
America: Constellation Systems HA‐x00 – 7 units Europe: Constellation Systems HA‐x00 – 4 units Asia: Constellation Systems HA‐x00 – 12 units
HA-400 x5HA-500 x1HA-4300 x1
HA-200 x1HA-400 x3HA-600 x7HA-4300 x1
HA-400 x3HA-800 x1
Page 22
Page 22
Confidential
Satellite SystemsRobotic Components
Confidential
The Hine Automation HA‐5.0 & HA‐3.2 wafer transfer robots are designed for: Production environments requiring minimum
vibration Minimum particle contamination High throughput with high reliability
performance Ultra high vacuum environment.
Additionally the HA‐5.0 & HA‐3.2 Robot are: Compact, cylindrical, ergonomically designed
robots Utilizing a servo mounted drive assembly ARM based processor control electronics Designed for applications with multiple reach
requirements using standard and customer specific arm lengths.
24
Vacuum Robotic Arms Overview
Confidential
Vacuum Robotic Arms Overview
A (Selective Compliance Assembly Robot Arm) SCARA robotic arm is designed for vacuum handling applications SEMI‐standard substrate sizes up to 300mm Custom substrates, round as well as square Custom payloads
Designed as the central handler for Hine Constellation systems, the HA‐5.0 can be integrated with any vacuum handler system as its central handler.
Typical applications: RIE, ICP Etch, PECVD, HD PECVD, ALD & PVD
Vacuum Robotic Arms
HA‐5.0
Single End or Dual End Effector
3‐axis of motion (R, θ, Z)
HA‐3.2
Single End or Dual End Effector
2‐axis of motion (R, θ)
Page 25
VACUUM ROBOTIC ARM
Confidential
Vacuum Robotic ArmsStandard Features
HA‐5.0 (3‐axis) & HA‐3.2 (2‐axis) Magnetic liquid seals provide no
maintenance and extremely low leakage in a very wide range of applications including ultra‐high vacuum (below 10−8 mbar), tens of thousands of RPM, and multiple‐atmosphere pressures.
Brushless DC servo actuators provide zero backlash & high positional accuracy
High strength undercarriage R and θ axis of motion
HA‐5.0 HA‐3.2Maximum Payload 4.5kg 4.5kgAxes of Motion R, θ, Z R, θWeight 35kg* 30kg*Vacuum performanceBase operating pressure 1.00x10‐7 Torr 1.00x10‐7 Torr
Leak Rate 1.00x10‐9 scc He/sec 1.00x10‐9 scc He/sec
Input Power 24V DC at 5.0 Amps 24V DC at 3.0 AmpsMaximum Temperature 100⁰CExposed Materials 6061‐T6 Aluminum, Stainless Steel 300 and
400 Series, VitonControl Interface RS‐232 / EthernetMCBF >1x106 >1x106
Repeatability‡R 0.05mm 0.05mmθ 0.01⁰ 0.01⁰Z 0.05mm NA
Vertical Stroke 35mm NA
VACUUM ROBOTIC ARM
All arms offer Single wafer or Dual wafer end effectors
Page 26
Page 26
Confidential
ELEVATOR
Hine Automation Elevators are the next generation of Random Access Elevators with onboard controller. The Elevators provides accurate wafer indexing for application where material handling is performed by a robot with a limited vertical reach.
HA‐50V/51V & Hatm‐50/51 elevators are designed to: Integrate into any cassette load port or process module
requiring vertical motion. Provide precise substrate indexing capabilities within
an high vacuum or atmospheric environment. Handle heavy payloads due to the High strength
undercarriage and precision guides. Additionally the HA‐50V features identical command sets
and form factor as the vacuum elevator manufactured previously by Hine Design® and can be used as a replacement for the 48V model.
27
Vacuum and Atmospheric ElevatorOverview
Confidential
Vacuum and Atmospheric Elevator Standard Features
Designed for wafer indexing 25 or 50 wafer cassettes Stainless steel bellows assures compatibility with all vacuum environments Brushless DC motor provides higher counter resolution and improved
repeatability Integrated “fail safe” brake prevents movement when power is removed and
can be configured through the control interface.
Page 28
Page 28
HA 50V HA 51V HAtm 50 HAtm 51Payload 34kgWeight 18kgVacuum performance
Leak Rate 1.00E‐09 NABase operating pressure 5.00E‐09 NAInput Power 24 VDC at 2.5 AmpsMaximum Temperature 100⁰CExposed Materials Stainless Steel 300 and 400 SeriesControl Interface RS‐232 / EthernetMCBF >3.00E+06CE yesSEMI S2 CompliantRepeatability
Z 0.05mmClass 1 yes
Vertical Stroke 185mm 305mm 185mm 305mm
ELEVATOR
Confidential
Hine Automation Optical Aligners are designed to automatically recognize notches, flats and double flats on opaque and translucent wafers.
The Aligner will orient the flat or notch of a wafer to a user defined rotational location and provide a correction vector to a robotic handler for alignment of the center of the wafer to the center of the handler.
A laser CCD array and servo motor profile the wafer edge determining the wafer center and flat or notch position.
Standard features include aligning thin and warped wafers, high precision wafer alignment and wafer‐on‐wafer alignments.
The HA‐71A & HA‐75A can be configured to align different wafer sizes and shapes.
Optical Aligner Overview
Optical Aligners Page 29
ALIGNERS
Confidential
Optical AlignerStandard Feature
Optical Aligners Page 30
Features Designed for ultra high vacuum environments due to
its magnetic liquid feed through seal Unlimited rotational travel Programmable notch & flat orientation Ethernet or RS‐232 control interface Multi‐wafer size configurability made through
adjustment of hardware and software settings. Options
Wafer chucks available for all wafer sizes and most end effector
Configurable for opaque or transparent materials Integrated optical aligner available on the HA‐400
thru HA‐6300 platforms Facet mounted optical aligner available for all
Constellation Systems
Confidential
Star SystemsLoad Locks
Page 31
Confidential
Star SystemsOverview
Page 32
Automated Load Locks
200mm
Star SL‐200
Std. Z‐ lift
300mm
Star SL‐300
Std. Z‐ lift
450mm
Star SL‐450
Std. Z‐lift
STANDARD FEATURES Base Chamber
Wafer & Transfer Chamber, Lid & Hinges, View & Vacuum Ports
Safety Interlock & Wafer Sensor
Linear Motion Mechanism Linear Track Assembly Programmable Motor via RS‐232,
Ethernet or DeviceNet
OPTIONAL FEATURES Vacuum Package – Level 2 Control Package – Level 3 Vertical Motion Mechanism – Z lift SEMI Standard and Custom End Effectors Heated Chamber & Wafer PreHeat
Star SL-200
Confidential
Star Systems Standard Feature and Benefits
Page 33
Z LIFT
LEVEL 2 VACUUM & VENT CONNECTIONS
Features BenefitsLEVEL 1: Aluminum chambers and linear motion mechanism powered by a programmable stepper motor.
Vertical motion powered by a programmable stepper motor.
Safety Switch & Wafer Present Sensor
LEVEL 1: OEM Vacuum interface design and inventory management to reduce costs
OEM performs 100% Software integration
LEVEL 2: Vacuum plumbing, Vent/Purge system and Pneumatic manifold are included with the SL‐x00
LEVEL 2: Minimizes components OEM needs to supply
OEM performs 100% Software integration
LEVEL 3: Software includes high level commands: Load/Unload, Evacuate/Vent
LEVEL 3:• Minimal coordination between OEM and Hine Automation for software integration
• Typically used with Level 2 Option but can be configured to Customer supplied Vacuum components.
Confidential
Star Systems Programmable Z‐lift Option
Page 34
Configurable option adds motor actuated Z‐lift Multiple positions & sequences using
programmable stepper motor Rubber dampers create a smooth deceleration
and keep lead screw from binding in the event of an impact
Adjustable hard stops allow for greater flexibility and ease of setup.
Belleville disc springs are used to preload the linkage assembly, virtually eliminating side‐to‐side play
Z LIFT
Confidential
Star SystemsSpecifications
Page 35
Page 35
† SEMI Standard sizes. Custom end effectors available upon request.‡ Measured as three standard deviation (3σ)* Pay Load depends on End effector** Max Reach measured from the edge of the slit valve*** Vertical stroke is optional
Star SL‐200 Star SL‐300 Star SL‐450Wafer Sizes ≤200mm† ≤300mm† ≤450mm†Pay Load* 1.5kg 1.5kg 5.0kgMounting facet 200mm MESC 300mm MESC 450 MESCAxes of Motion R, Z R, Z R, ZVacuum performance
Leak Rate 1x10‐9 scc He/sec 1x10‐9 scc He/sec 1x10‐9 scc He/secBase operating pressure <5x10‐7 Torr <5x10‐7 Torr <5x10‐7 Torr
Input Power 24 VDC 2.0 Amps 24 VDC 2.0 Amps 24 VDC 2.0 AmpsMaximum Temperature 100⁰C
Exposed Materials 6061‐T6 Aluminum, Stainless Steel 300 and 400 Series, Viton, Borosilicate Glass, Crytox, Delrin, PEEK
Control Interface RS‐232 / EthernetMCBF >3x105
CE compliantRepeatability‡
R 0.15mmZ 0.10mm
Max. Reach** 305mm 355mm 635mmVertical Stroke*** 0.5° 0.5° 0.5°
Confidential
Star SystemsLevel 3 Controller Overview
Component Level Commands & IO
coordinated by OEM System Controller
SW Integration of System Level
Communication with discreet components
OEM Controller OEM Controller
Slider MechanismSlider Mechanism
Z‐lift MechanismZ‐lift Mechanism
Safety Lid SwitchSafety Lid Switch
Wafer Present Sensor
Wafer Present Sensor
Vacuum ComponentsVacuum
Components
Component Level Commands & IO coordinated by HA System Controller
System Level Communication with discreet components of the Star System
SW Integration of High Level
Communication with Star System
Controller (Load/Unload, Evacuate/Vent)
OEM Controller OEM Controller HA System ControllerHA System Controller
Slider MechanismSlider Mechanism
Z‐Lift MechanismZ‐Lift Mechanism
Safety Lid SwitchSafety Lid Switch
Wafer Present SensorWafer Present Sensor
Vacuum ComponentsVacuum Components
Software Control System provided by OEM
Integrated Software Control System simplifies management
of material handling
Page 36
Page 36
Confidential
Star SystemsCustomization Options
We can customize our product to meet your needs Vertical Travel Horizontal Reach Substrate Size Payload Control System Heated Chamber & Wafer Preheat Vacuum configuration and vacuum
plumbing Slit valves: SMC / VAT High vacuum configuration
available
Page 37
Page 37
Confidential
Service
Confidential
Comprehensive Rebuild 1‐year Warranty Complementary diagnosis Installation of non‐marking belts to improve particle
reduction of the robots Replacement of worn and out‐of‐specification
mechanical components Replacement of O‐rings Resurfacing damaged mounting plates
Targeted Repair 90‐day Warranty Complementary diagnosis
Repair Services
Page 39
Services
Comprehensive Rebuild Targeted Repair
Hine AutomationService