High speed laser machining using polygon scanner technology...Laser patterning Surface texturing...
Transcript of High speed laser machining using polygon scanner technology...Laser patterning Surface texturing...
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High speed laser machining using polygon scanner technology
Ronny De LoorCEO, Next Scan Technology
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Overview
Company introduction
Polygon scanner system
Applications
Future developments
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Mission statement
Next Scan Technology delivers novel scanning solutions
to enable highest processing speed
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Value proposition
Introduced fast (polygon) scanner technology to laser processing market
Today this solution delivers 10-50 times more throughput in dedicated applications
Technology is similar to desktop laser printers
but tailored for: � Very high laser pulse power handling
� Very high resolution and accuracy
� High quality spot size
� Sophisticated laser/scanner synchronisation
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Team knowhow NST
Gemini PCB resist writer
High throughput OEM systems
Drum scanners offset print, flexo, PCB
Scan area : up to 1600 x 2400 mmResolution : 2.500-25.000 DPI Multi-beam : 12-72
Flatbed laser printers offset print, PCB
Scan area : up to 1350 x 2000 mm Repetition acc. : < 3 µmSpeed @ 10µm : > 200 m/s Pixel speed : up to 150 Mpxl/sec
Installed base > 1.000 units
UV, 355 nm, 457 x 610 mm
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Company Fact Sheet
Next Scan Technology B.V.The Netherlands
Founded 2010 byLars Penning & Ronny De Loor
Next Scan Technology bvba Belgium, Ghent (2013)*
Activities (8 FTE, Belgium):� R&D� Production� Demo & test services
* New build facilities 700m² 1 hour drive to IMEC, 1.5 hour Eindhoven
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Technology
� Custom patent pending 2 mirror diffraction limited design
– Scan line always perpendicular on the substrate
– Spot is round and constant along scanned path
– Line straightness within ± 5 um*– Handling both IR and GR in one
design
� Proprietary modulation and laser/scanner synchronization for high repeatibility
� Multiplier in throughput by:– polygon (speed)– scan optics (size)–
* Line distortion mirror optics
First product LSE170 delivers a
full telecentric scan line of 170 mm
Concept launch at PW2014Two additional scan formats: LSE050 & LSE300
GateMaster™ ModulationTrueRaster™ Positioning
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Technology trade-off
Vacuum
chuck
d
Y-
stageSlow Y movement
by stage or web
Laser beam
Speed : max 10-15 m/s Speed : 10 - 100 m/s (constant) >>100 m/s possible Scan field* : limited up to 100 mm Scan field : up to 300 mm without stitching Spot size : down to 7 um (355 nm)
Fast X movement
by polygon
* Full telecentric processing f-Theta lens > 100 mm deliver less scan efficiency and limit small spot size processing
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Next Scan Technology controller synchronises laser, scanner, stage and pattern data transfer.
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How to operate
� A rectangular region (bitmap) is formedby equally spaced parallel lines (line spacing)
Higher rep rate or less scan speed gives:
� spot overlap (lines) or� spot spacing (holes)
(multi pass) line scanning enables high speed processing for applications like:
� Laser patterning� Surface texturing� High density Hole Drilling � Grooving & Dicing � 2.5D Micromachining
HOWEVER ...
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Timing jitter & SuperSync™
SuperSync™ is a electronic solution to reduce timing jitter of pulsed lasers*
SuperSync™ enables < 3 µm spot positioning error or repetition accuracy
* certified laser interface needed
No SuperSync™Multi-pass operation at
100 m/s
SuperSync™Multi-pass operation at
100 m/s
Bitmap pattern
1 Mhz Pulse Repetition Rate at 100 m/s gives a spot positioning error of 100 um
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SuperSync™ Interface
� Proprietary synchronization method for pulsed lasers
� Required for 'synchronised skywriting'
� Specific daughterboard
� Available for– Time Bandwidth PicoBlade– TRUMPF TruMicro– AMPHOS– Amplitude Systemes– Lumera HyperRapid – IPG
In validation Ekspla, OneFive, EdgeWave, Eolite Spectra Physics, Coherent, Menlo SystemsPolarOnyx, Attodyne
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Processing quality
Courtesy Bern University Applied Sciences: Research by B. Neuenschwander/B. Jäggi/M. Zimmerman
Uncontrolled processing quality at
ramp up/down
Improved quality at constant speed
with existingtiming jitter
Highest quality at constant speed through eliminated
timing jitter
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Applications
Customers are system integrators and high tech production companies in:
� Display: patterning, texturing
� Semicon: microdrilling, grooving & dicing
� Security: perforation, micromachining
� Automotive: patterning, micromachining
� Medical: microdrilling, micromachining
Technology validation in all domains
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Demo & Application Lab
� Next Scan Technology (B)
Lumera HyperRapid 50W 2 MHz PRR External Multi MHz in development
� Time Bandwidth (CH)
Time Bandwidth PicoBlade 50W~ 4 MHz PRR (8 MHz)
� Bern University (CH)
Time Bandwidth Fuego 50W~ 4 MHz PRR (8 MHz)
Amplitude Satsuma 20W 3 MHz PRR
� USA & ASIA
Work in Progress
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On site testing
Process Development Kit
� Compact lab-ready set up
� Easy commissioning
� Installation & operator training
� Bitmap raster scan training course
� Evaluation and suggestions for future improvements on performance
� Rental and buy solution
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Surface processing
Apply any texture
� 100 meters/sec is 400 lines/sec
� Linear speed stage is 1 cm/s at 25 um
� Surface speed is 17 cm²/sec at 4 MHz
� Multi-pass for 'deeper' structures
Applications
� Thin film patterning
� High throughput marking
� Volume ablation (holes/slots)
� Additive printing (LIFT, STL)
� Annealing, LLO
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Wafer processing
Scribing, grooving and dicing
� Speed set by PRR and spot spacing
� Linear stage in stepping mode or moves at constant speed with TrueRaster™ Technology*
� Application example
- 2 MHz PRR - 25 um spot spacing- 50 meters/sec (200 lines/sec)- 40 passes/kerf- 3 kerfs/second
* Release Q3 2014
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High Density Hole Drilling
Low PRR with high pulse energy
� Percussion drilling by SuperSync™
� Scan speed to separate the holes
� Stage in stepping mode
� Application example
- 400 Khz PRR
- 250 um spot spacing through 100 meters/sec is 400 lines/sec
- 100 passes per hole is 4 lines/sec
- 6 inch board is 600 holes per line at 4 lines/sec is > 2.000 holes per second
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2.5 D Micromachining
•Each layer is processed by different bitmap
� Spot overlap and PRR set the scan speed
� Stage in constant speed mode
� Application example
- dimensions 108 x 65 mm- 4.1 MHz PRR* - scan speed 59,45 m/s- 14.5 um spot spacing (1.750 dpi)- 24 seconds per layer- 2233 different layers- Maximum depth about 100 um
* TimeBandwidth FUEGO 50 W
This work was supported by the FP7 project APPOLO and executed by B. Neuenschwander/B. Jäggi/M. Zimmerman
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Outlook 2014
� LSE050 and LSE300
� UV mirror optics
� Higher NA for smaller spot sizes
� GateMaster™ Modulation for CW and ns pulsed fiber lasers
� TrueRaster™ Positioning for absolute accuracy*
� Multi-beam scanning technology for unparalleled precision and highest throughput
* Line straightness ± 1 um No more pyramidical error