HASTINGS MODEL 2000 THIN FILM PIRANI …sinom.com.tw/produt_pdf/HAS-2000manual.pdfPirani tube), it...

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HASTINGS MODEL 2000 THIN FILM PIRANI VACUUM SENSOR 1996, Teledyne Brown Engineering, Hastings Instruments Division All rights reserved. Hampton, Virginia, U.S.A. Document Number: 133-0896 Rev. B Contains Operating and Programming Information

Transcript of HASTINGS MODEL 2000 THIN FILM PIRANI …sinom.com.tw/produt_pdf/HAS-2000manual.pdfPirani tube), it...

Page 1: HASTINGS MODEL 2000 THIN FILM PIRANI …sinom.com.tw/produt_pdf/HAS-2000manual.pdfPirani tube), it can withstand high levels of mechanical shock. The VS 2000 is designed for fast response.The

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HASTINGS MODEL 2000

THIN FILM PIRANI

VACUUM SENSOR

1996, Teledyne Brown Engineering,Hastings Instruments Division

All rights reserved.Hampton, Virginia, U.S.A.Document Number: 133-0896 Rev. B

Contains Operating and Programming Information

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TABLE OF CONTENTS

1.0 GENERAL INFORMATION........................................................................................... 51.1 Features .......................................................................................................................................... 5

1.2 VS 2000 Sensor ................................................................................................................................ 5

1.3 VI 2000 Power Supply / Readout ....................................................................................................... 5

1.4 Specifications ................................................................................................................................... 6

1.5 Warranty .......................................................................................................................................... 7

1.6 Non-Warranty Repair ....................................................................................................................... 7

2.0 INSTALLATION ............................................................................................................. 92.1 Receiving Inspection ......................................................................................................................... 9

2.2 Quick Start ...................................................................................................................................... 9

2.3 Tube Installation ............................................................................................................................... 9

2.4 Controller Installation ....................................................................................................................... 9

Line Voltage (fuse verification) ..................................................................................................... 9

Environment .............................................................................................................................. 9

EEPROM Installation ................................................................................................................. 9

Panel Mount Instructions .......................................................................................................... 10

Sensor Cable Attachment .......................................................................................................... 10

I/O Cable Attachment ............................................................................................................... 11

2.5 Initial Operation ............................................................................................................................. 12

3.0 FRONT PANEL OPERATION ......................................................................................133.1 Overall Functional Description ........................................................................................................ 13

Scientific Notation Primer .......................................................................................................... 14

3.2 Run Mode ..................................................................................................................................... 14

Normal Operation .................................................................................................................... 14

A/D Speed Adjust ..................................................................................................................... 14

Factor Calibration Restoration ................................................................................................... 14

3.3 High and Low Set Point Modes ....................................................................................................... 14

3.4 Calibration Mode ............................................................................................................................ 15

Zero Coefficient Adjustment ...................................................................................................... 15

Midrange Adjustment ................................................................................................................ 16

Atmosphere Adjustment ............................................................................................................ 16

3.5 Gas Mode ..................................................................................................................................... 17

3.6 Units Mode ................................................................................................................................... 17

4.0 REAR PANEL DESCRIPTION ......................................................................................194.1 Remote Zero Input ......................................................................................................................... 19

4.2 Analog Output ................................................................................................................................ 19

4.3 TTL Outputs ................................................................................................................................. 20

4.4 Power Entry Module ...................................................................................................................... 20

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5.0 THEORY OF OPERATION .......................................................................................... 215.1 Sensor Construction ....................................................................................................................... 21

5.2 Power Dissipation ........................................................................................................................... 21

5.3 Signal Processing ............................................................................................................................ 22

6.0 RS-232 OPTION BOARD........................................................................................... 256.1 RS-232-E Interface Specifications .................................................................................................... 25

6.2 Interface Connector Pin Assignments ............................................................................................... 25

6.3 Operation ....................................................................................................................................... 26

6.4 Installation of the RS-232 Board ...................................................................................................... 28

7.0 RELAY INTERFACE OPTION BOARD ......................................................................... 297.1 Relay Board Specifications ............................................................................................................... 29

7.2 Terminal Strip Connections .............................................................................................................. 29

7.3 Operation ....................................................................................................................................... 29

7.4 Relay Board Installation ................................................................................................................... 29

8.0 TROUBLESHOOTING GUIDE...................................................................................... 31

9.0 DIAGRAMS and DRAWINGS .................................................................................... 33

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1.0 Features

� Wide Dynamic Range: 1x10-4 to 1000 Torr

� Compact Rugged Design

� Attitude Insensitive

� Fast Dynamic Response

� Withstands 150 PSIG positive pressure

� Linear Per Decade Output Signal

� Bakeable to 1500C

� TTL Output Process Control

1.1 Model 2000 SystemThe Model 2000 is a wide range vacuummeasuring instrument consisting of a digitalmicroprocessor-based display unit, a miniature,rugged, thin film based sensing element with itsmatched EEPROM (Electrically Erasable/Programmable Read Only Memory), and aninterconnecting cable. Together, thesecomponents provide accurate vacuummeasurement over 7 decades of vacuum from1x10-4 Torr to 1000 Torr. This instrument is a newdesign approach based on over 50 years ofexperience by Teledyne Brown EngineeringHastings Instruments with well-known and widelyused thermal conduction vacuum measurementtechniques. The resulting design is a single sensingelement that detects pressure above atmospheredown to less than 1x10-4 Torr. The Model 2000 isdesigned for quick, easy installation requiring nopre-installation calibrations or adjustments andwill provide the user with long lasting, troublefree, accurate vacuum measurement.

1.2 VS 2000 SensorThe sensing element is a Pt thin film serpentineelement deposited on a 1 mm thick Si

3N

4 mem-

brane. The membrane is peripherally supportedby a Si box shaped die and is covered by a thick Silid. This unit is encased in a corrosion resistant316 stainless steel tube shell. This sensor offersmany features which are not available with currentthermal conductivity based instruments. Thesensor�s small internal volume(< 0.6 cc) permitsrapid pneumatic response time to system pressurechanges. Further the small geometry of the sensorprevents thermal convection and allows the sensorto be mounted in any orientation without calibra-

tion shifts. The sensor is specifically designed forlow impedance to minimize signal noise due tostray capacitance pick-up of RF signals. Thedurable tube design withstands high pressure(150 psig), and high pressure surges. Since thesensor uses a Pt thin film on a Si

3N

4 membrane

(instead of the conventional long fragile wire of aPirani tube), it can withstand high levels ofmechanical shock.

The VS 2000 is designed for fast response.Themicromachined sensing element has a very smallmass and operates in a constant temperaturefeedback mode. This makes response time veryfast as compared to other commercially availablethermally conductive sensors which have tochange the temperature of a significant mass toreflect pressure changes and have a large internalvolume which must equalize in pressure beforethe sensor can reach its final value. Testing showstypical VS 2000 response times to be less than 15milliseconds.

Furthermore, the sensor is offered with severalvacuum connections in addition to a standard 1/8"NPT fitting (i.e. ConflatTM Flange, KF16, KF25,VCRTM or 1/2" O.D. Tube).

1.3 VI 2000 Power Supply/ReadoutThe VI 2000 consists of the power supply, resis-tance bridge control, signal processing and displaycircuitry to interface with the VS 2000 sensor allpackaged in a NEMA 12 rated sealed enclosure.The user interface includes a flat panel configura-tion with smooth operating tactile switches andlarge green LED digits (0.56"). The VI 2000displays the pressure in scientific format using a 3digit mantissa and a 1 digit (plus sign) exponent.The VI 2000 can display the pressure in Torr,mbar or optionally Pascal. The VI 2000 comesstandard with 2 alarm setpoints that have TTLlevel digital outputs. An optional dual relay boardcan be internally mounted to trip on the alarmsetpoints to turn on/off various equipment such aspumps, valves, heaters, bakeout ovens, and safetyequipment. The VI 2000 accepts an external TTLlevel "Autozero" input to zero the VI 2000 whenanother instrument (e.g. ion gauge) indicates thatthe pressure is less than 1x10-5 Torr . The VI 2000supplies the user with a decade linear analogoutput to nitrogen, but gas correction coefficientsfor many other gases are electronically stored andcan be selected from the front panel. This directreadout display allows for flexibility in user systemconfigurations which operate with various gases.

An optional serial interface board can be installedto provide RS232 or RS485 support.

11111GENERAL INFORMAGENERAL INFORMAGENERAL INFORMAGENERAL INFORMAGENERAL INFORMATIONTIONTIONTIONTION

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1.5 Specifications:

Measuring Range ............................................................................................................... 1 X 10-4 Torr to 10+3 Torr1.3x10-4 mbar to 1.3x10+3 mbar

Accuracy (1x10-3 to 1x10+3 Torr) ................................................................................................. + 15% of reading(After zero adjustment)

Repeatability ................................................................................................................................ + 1% of reading

Ambient Temperature .......................................................................................................................... 00C to 500COperating Range

Bakeout Temperature ................................................................................................................................... 1500C

Analog Output ........................................................................................................................................ 0-5.0 Volts(0.5 VDC Linear per decade)

Process Control ................................................................................................................................. 2 TTL Outputs(1 TTL Auto Zero Input)

Digital Readout ...................................................................................Four Green LED - Resolution is three digitmantissa (plus exponent)

Power ............................................................................ 90-130 & 180-260 VAC, 50 to 60 Hz IEC-320 receptacle.A 6 ft, 3-wire power cord is provided with each unit.

Fuse ............................................................................................................................................. 250 Volt, 1/4 Amp.

Sensor Mounting ............................................................................................ Any position without recalibration.

Sensor Internal Volume ............................................................................................... Approx. 0.6 cc (0.10 cu.in)

Wetted Material ..............................................................................................Gold, Silicon Nitride, Silicon, Glass,Platinum and 316 Stainless Steel

Stability with Voltage .................................................................................... Variation in reading undetectableas power fluctuates within power specification.

Weight (display, cable, and sensor) ................................................................................................... Net: 3.6 lbs.Shipping: 5.0 lbs.

Sensor Response Time ............................................ Typically less than 15 milliseconds for a step change from10-3 Torr to 10+3 Torr.

Positive Pressure .........................................................................................................................................150 PSIG

NEMA Rating ..................................................................................... 12 (with use of supplied mounting gasket)

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The Model 2000 fits a standard DIN 43700 insert(1/4 DIN). The case is constructed of NORYLRated UL-94-V1(Self-extinguishing plastic ).Mounting brackets are adjustable to 3/16 in. Theunit mounts into 3.62 in. (92 mm) square hole,and comes calibrated for nitrogen. Conversionfactors for other gases are selectable by the user(see section 3.5).

1.6 WarrantyHastings Instruments warrants this product, for aperiod of one year from date of shipment, to befree from defects in material and workmanship.

This warranty does not apply to defects or failuresresulting from unauthorized modification, misuseor mishandling of the product. This warranty alsodoes not apply to fuses, filters, batteries, or otherexpendable parts, nor to damage caused byleaking batteries, clogged filters, or similar occur-rences.

This warranty is in lieu of all other warranties,expressed or implied, including any impliedwarranty as to fitness for a particular use.Hastings Instruments shall not be liable for anyindirect or consequential damages.

1.71.71.71.71.7 Non-WNon-WNon-WNon-WNon-Warararararrrrrranty Ranty Ranty Ranty Ranty ReeeeepairpairpairpairpairAny vacuum product returned for non-warrantyrepair must by accompanied with a purchaseorder authorizing repair up to 1/3 the list cost of anew product or $75, whichever is greater, and aService Form, or a written description of theproblem. If the repair cost is higher, you will becontacted for authorization before we proceed. Ifyou then choose not to have the product repaired,the $75 minimum will be charged to coverprocessing and inspection. Please contact factoryfor a Repair Authorization Number beforereturning any product for repair.

TELEDYNE BROWN ENGINEERING HASTINGS INSTRUMENTS

804 NEWCOMBE AVENUE

HAMPTON, VIRGINIA 23669

ATTENTION: REPAIR DEPARTMENT

Telephone (804) 723-6531

(800) 950-2468

FAX (804) 723-3925

World Wide Web: http: //www.tbe.com

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This section is designed to assist in getting a newpressure gauge into operation as quickly and easilyas possible. Please read the following instructionsthoroughly before installing the instrument.

2.1 Receiving Inspection:Carefully unpack the Hastings Model 2000Instrument (Part # VI 2000), Sensor (part #VS 2000) and Cable (part # CB 2000). Inspect allitems for any obvious signs of damage due toshipment. Immediately advise the carrier whodelivered the shipment if any damage is suspected.

Compare each component shipped against thepacking list. Ensure that all parts are present (i.e.sensor, power supply, cables, etc.). In addition tothe components listed on the packing list, theshipment includes: AC power cord, panel mount-ing hardware, 7-pin circular DIN connector, and afront-panel gasket for users needing a NEMA 12rating. Optional equipment or accessories will belisted separately on the packing list.

2.2 Quick Start:Follow this procedure to get your newModel 2000 vacuum gauge up and running.

1. Install the VS 2000 sensing tube per Section 2.3 below.

2. Install the EEPROM into the VI 2000 if necessary per Section 2.4

3. Verify the line voltage per Section 2.4

4. Install the VI 2000 in the instrument panel if desired per Section 2.4

5. Install the sensor cable per Section 2.4

6. Connect the power cable.

7. Install I/O cable if desired per Section 4.0

2.32.32.32.32.3 TTTTTube Installaube Installaube Installaube Installaube Installation:tion:tion:tion:tion:The VS 2000 sensor tube is shipped with aprotective plastic cap which keeps dust out of thetube. This cap must be removed prior to installa-tion. The sensor tube may be installed in anyorientation. Although the sensor tube is ruggedand will perform well in many harsh environ-ments, the tube should be installed in a clean andcareful manner. The tube is configured with the

vacuum fitting as requested. If your measurementenvironment is highly contaminated or has uniquefitting requirements, a Hastings filter or specialadapter may be needed. Please contact theHastings Instruments Sales Department forassistance in your system configuration.

2.4 Controller Installation:

Line Voltage (fuse verification):

The instrument (part # VI 2000) can either beoperated by a line voltage of 110 VAC (90-130 VAC)or 220 VAC (180-260 VAC). Verify that thevoltage selector on the back panel of the controlleris set for the appropriate voltage. See Fig. 2.1.

Environment:

The instrument can be operated in temperaturesfrom 0oC to 50oC. The instrument case is inNEMA 12 compliance (i.e. a reasonable degree ofprotection against dust and dripping noncorrosiveliquids in a panel configuration) with the frontpanel gasket installed. To install this gasket, slidegasket over the back of the VI 2000 prior to panelmounting (Panel Mount Instructions on page 6).Also refer to panel mounting detail on page 33.

NOTE: Back panel is not sealed.

EEPROM Installation:

The calibration data for the VS 2000 sensor isstored on a serial EEPROM (Electrically Eras-able/Programmable Read Only Memory). This isan 8 pin DIP silicon chip. If the VI 2000 and theVS 2000 were both purchased on the samepurchase order, the instrument (Part # VI 2000)is shipped with an EEPROM already installed,which contains calibration data for the matchedtube.

IMPORTANT: A particular sensor tube(VS 2000) must operate with its matchedEEPROM or the VI 2000/VS 2000 systemmust be recalibrated before use. Bothsensor tube and EEPROM are issuedmatching numbers at calibration.

If multiple VI/VS 2000 units were purchasedsimultaneously, ensure that each VI 2000 is usedwith its matching tube.

If a sensor tube is ever replaced, then theEEPROM should also be replaced with theEEPROM that is shipped with the new tube.

22222INSTINSTINSTINSTINSTALLAALLAALLAALLAALLATIONTIONTIONTIONTION

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The following procedure describes the EEPROMreplacement:

IMPORTANT: The EEPROM is staticsensitive. Take ESD precautions, usewrist grounding straps.

1 Remove the power cord and cables from the rear of the VI 2000.

2 Remove the plastic bezel from the front of the VI 2000.

3 Remove the 4 screws at the corners of the front panel. The front panel will now hang by its connecting cables.

4 Pull out the main board (1/2 way) by first pushing on the sensor connector socket

and then grabbing the main board at the edge.

5 The EEPROM is component U2 on PC-833 component layout (see page 34). Carefully remove chip without bending the pins. Store in antistatic foam. Note the socket will be empty if this is a first time installation.

6 Install new EEPROM. Note that the dot on the chip matches the notch in the socket.

7 Slide the main board all the way back into VI 2000.

8 Reattach the display board (take care not to kink the ribbon cable). Do not over tighten the four screws

9 Reattach the bezel

Panel Mount Instructions:

The controller can be panel mounted. See detailon page 33. The hole dimensions on the panel are3.62" x 3.62". Slide the neoprene gasket that wasshipped with the VI 2000 onto the case from theback. Slide the controller through the panelcutout. Hold the hardware against the controller�sside and tighten the two screws.

Sensor Cable Attachment:

Important Note: Do not attach thesensor cable while the power is on andtube is under vacuum.

The threaded connector attaches to the sensor. Afinger tight connection is adequate for properoperation. The 8-pin circular DIN connectorattaches to the back panel (See Fig. 2.1). Thesensor cable connects to the left hand connector

Fig. 2.1

7

5 3

21

4

6

8 7

5 3

2

4

6

1

I/O CONNECTORPin# Connection1 Analog Output2 Analog Common3 High Setpoint4 Low Setpoint5 Digital Common6 Remote Zero7 +5V

SENSOR CONNECTORPin# Connection1 Sensor2 Bridge (sense)3 Bridge-Power4 Reference5 Common6 Common (sense)7 N/C8 N/C

SENSOR CONNECTOR I/O CONNECTOR

VI 2000 REAR PANEL DETAIL

110 220

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when looking at the back. The sensor cablecannot connect to the I/O DIN connector but theseven pin I/O cable could be mistakenly con-nected to the eight pin sensor connector. Ensurethat the seven pin I/O cable is plugged into theproper position.

I/O Cable Attachment:

The mating male plug to the I/O connector issupplied with the VI 2000 unit. An I/O cable mustbe made up with the 7-pin circular DIN connec-tor to use the analog output, digital alarms or theremote zero functions. The connector will accept20 gauge or smaller wire. The pinout is shown inFig. 2.1 (Back Panel Figure). A detailed descrip-tion of these pins is given in Section 4.

It is recommended that the male plug be pluggedinto the female socket before attempting to solderwires to the plug as this will keep the heat fromdeforming the plug.

2.52.52.52.52.5 Initial Operation:Initial Operation:Initial Operation:Initial Operation:Initial Operation:Upon applying power to the VI 2000 a pressure

measurement will be given in Torr for nitrogen.

However, it is recommended that the user follow

the instructions for zeroing and adjusting the

output at atmospheric pressure in Section 3.4

("Cal Mode").

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VI 2000 Front Panel Fig 3.1

UP ARROW

D O W NARROW

MODE BUTTON ZERO BUTTON

ss

ss

3.13.13.13.13.1 OvOvOvOvOverererererall Functional Description:all Functional Description:all Functional Description:all Functional Description:all Functional Description:The front panel is shown in Figure 3.1. The fourcircular blue buttons are used for the selection ofdisplay readout and the input of data. The greendata field displays the data as determined bymode selection. The MODE button toggles thecontroller in a clockwise fashion among the sixmodes of operation:

Run Normal operation, pressure is displayedin scientific notation. The Analog toDigital converter speed can be adjustedand the factory calibration can also berestored in this mode. See Section 3.2 forfurther information.

High High set point is displayed in scientificnotation, above this pressure the HighTTL output will be +5V.

Low Low set point is displayed in scientificnotation, below this pressure the LowTTL output will be +5V.

Cal. Pressure is displayed and can be adjusted.

Gas Gas number is displayed and selectionmay be changed.

Units Units used to display pressure areselected.

In the Run, High, and Low modes, it is possible tosee the display indicate that the data is out-of-range. Overrange is indicated by . x10 .Underrange is indicated by 0.0 x10. A measuredpressure between 0 and 6.1 x10-5 Torr is indicatedby 0.0 x10+.

33333FRFRFRFRFRONT PONT PONT PONT PONT PANEL OPERAANEL OPERAANEL OPERAANEL OPERAANEL OPERATIONTIONTIONTIONTION

mbarTorrPa

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sure readings. If a certain speed is desired, pressthe up or down arrows six times and then pressthe other arrow to select the other speed.

Factory Calibration RestorationThere are interlocks built into the CAL mode tominimize the chance of accidental alteration of thecalibration coefficients, but if calibration alterationdoes occur, the factory calibration coefficients canbe restored in the RUN mode by holding the zerobutton down and pressing both the up and downarrows simultaneously. This will load the factorycoefficients into temporary memory. The VI 2000will return to the last coefficients if the instrumentis unplugged at this point. To permanently restorethe factory calibration, press the mode switchenough times to cycle through all of the operatingmodes and back to RUN.

This will not correct the calibration if the tube hasbecome contaminated or damaged. This factoryreset will not affect the gas selection, units orsetpoints.

3.33.33.33.33.3 High & LoHigh & LoHigh & LoHigh & LoHigh & Low Set Pw Set Pw Set Pw Set Pw Set Points Modes:oints Modes:oints Modes:oints Modes:oints Modes:The Model 2000 provides TTL outputs forprocess control. The I/O cable is attached via a 7-pin circular DIN connector to the rear panel ofthe VI 2000. The pinout is shown in Fig. 2.1.

To view the high set point, place the Model 2000in the High mode by pressing the mode switch toilluminate the High light and no other mode light,the display will show the set point selected. Thereis no hysteresis (dead band). During operation thealarm light will trigger and the TTL output (pin #3) will go high (+5 v) if the pressure exceeds theset point by the smallest margin.

Similarly, to view the low set point put the VI2000 in Low mode by pressing the mode switchuntil the Low light is lit and no other mode lightis illuminated. During operation, the Low lightwill light and the Low alarm TTL output (pin #4) will go high (+5 v) if the pressure becomes lessthan the set point.

The alarm lights cannot indicate an alarm condi-tion while in the set point modes. Therefore it isadvisable not to leave the VI 2000 in these modesfor extended periods.

Note: if the optional serial interface board ispolled for a pressure reading while in eithersetpoint mode the VI 2000 will respond withthe current displayed setpoint.

To adjust a setpoint, press the mode switch untilthe sepoint is viewed then simultaneously pressthe UP and DOWN arrow keys. The active modelight will now flash indicating that the interlockhas been bypassed and the setpoint can beadjusted. The display shows the present set point.

3.1.1 Scientific Notation

The Model 2000 measures pressure spanningmore than seven decades. In order to easilydisplay these readings, Hastings Instruments hasemployed scientific notation. In scientific nota-tion, the mantissa (in our case a three digitnumber) is multiplied by some power of 10 (givenby the exponent).

Powers of 10

103 = 1000 10-1 = 0.1

102 = 100 10-2 = 0.01

101 = 10 10-3 = 0.001

100 = 1 10-4 = 0.0001

As an example: 7.60 x 10+2 Torr

mantissa exponent

"7.60 multiplied by 100" = 760 Torr which is oneatmosphere of pressure.

3.23.23.23.23.2 R R R R RUN Mode:UN Mode:UN Mode:UN Mode:UN Mode:

Normal OperationThe VI 2000 will automatically enter RUN modeupon start up. This is the mode in which theinstrument will typically spend most of its time. Inthe run mode the VI 2000 unit will continuouslymonitor the pressure and update the alarmconditions at the speed of the A/D converter andwill update the display about four times persecond.

A/D Speed AdjustThe VI 2000 utilizes a 24 bit sigma-delta analog todigital converter. This type of converter averagesthe input over time to reject interference. Longeraveraging times result in more accurate readings.While a faster A/D speed will respond to suddenpressure changes faster.

While in the RUN mode the user can adjust theA/D speed of operation from about 10 Hz to1000 Hz. At start-up, the VI 2000 will be operat-ing with an A/D frequency of about 60 Hz. Thespeed can be adjusted two steps up or four stepsdown. Each step will increase or decrease the A/Dfrequency by a factor of two.

In RUN mode, pushing the up arrow will speedup the A/D converter one step and decrease it'sresponse time until the limit is reached (6 stepsmax). Pressing the button after the limit isreached has no effect. There will be no indicationof the operating speed other than the least signifi-cant digits of the display will tend to run at higherspeeds. This will result in a faster triggering ofalarms or relays if a sudden catastrophic failureoccurs.

Pushing the down arrow will slow down the A/Dconverter and increase its accuracy. This willimprove the VI 2000 ability to resolve low pres-

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Another point to be noted is the fact that afterthe adjustment, the new calibration coefficient isonly in temporary memory. If the VI 2000 wereunplugged at this point, the VI 2000 wouldrevert back to the original displayed value uponrestarting. Place the Model 2000 back in theRun mode to store all of the current calibrationcoefficients in permanent memory.

To perform a full calibration on the Model 2000system use the Zero Procedure. Follow it with theMidrange Procedure and after that perform theAtmosphere Procedure, located in section 3.4.

Zero Coefficient Adjustment

The zero coefficient corrects for a constant powererror over the entire curve. Typically this adjust-ment may need to be performed to correct for lowpressure errors. The VI 2000 will need to berezeroed often if measurements are being made inthe low 10-4 Torr range, especially if the ambienttemperature changes. The VS 2000 may have atemperature coefficient of up to 1x10-4 Torr/oC.The VI 2000 remote zero input will allow anexternal gauge such as an ion gauge to automati-cally rezero the VI 2000 whenever the pressuredrops below the desired pressure level if it has aTTL output.

NOTE: Do not attempt to zero theModel 2000 in pressures above 10-2 Torr;the microprocessor will not accept a zeroabove this pressure.

To manually adjust the zero use the followingprocedure:

1. If possible, evacuate the vacuum systempreferably into the low 10-6 Torr (1.33x10-6

mbar) range or as low as possible below10-4Torr.

2. Allow sensor to operate in this conditionfor a minimum of 15 minutes.

3. Place the Model 2000 in the CAL. mode,then simultaneously press the UP andDOWN arrow keys. The Cal light willstart to flash indicating that the calibra-tion mode has been activated.

4. Press the zero button once if below 6x10-5

Torr otherwise use the up and downarrows to adjust the display of the VI 2000to match the pressure indicated by thereference. If using the up and downarrows to adjust the display, wait 20seconds between presses to allow theadjustment to take affect.

5. The unit is now fully zeroed. Place theModel 2000 back in the RUN mode tostore the zero in permanent memory.

Enter the new set point by using the blue circularup and down arrows. Press and hold the up arrowto increase the set point and the down arrow todecrease the setpoint. Allow several seconds forthe circuitry to respond. If the button is helddown for and extended period of time the adjust-ment rate will start to increase. Release the buttonand press again to get finer control of the exacttrigger point.

At this point, the new set point is in temporarymemory. If the VI 2000 were unplugged now, TheVI 2000 would revert back to the original setpoint upon restarting. Place the Model 2000 backin the Run mode to store the set point in perma-nent memory.

Once the interlock has been bypassed in either setpoint mode it will stay active in the followingmodes until the Gas mode is entered. This willallow the user to set both setpoints and adjustthe calibration without repeating the interlockbypass.

3.43.43.43.43.4 CAL Mode:CAL Mode:CAL Mode:CAL Mode:CAL Mode:Optimal performance of the Model 2000 isachieved by performing in situ adjustments tothe calibration coefficient in the CAL mode.There are three calibration coefficients. These arethe zero coefficient, the midrange coefficient andthe atmosphere coefficient. Once a tube has beenfully calibrated the midrange coefficient shouldnever need further adjustment but it may behelpful to adjust the zero coefficient or theatmosphere coefficient under certain situations.Even though the operator inputs may be identi-cal for adjustment of all three coefficients, theVI 2000 will detect the power level of the tubeand adjust the proper coefficient for pressure levelof the adjustment.

There are a couple of fine points that should benoted before adjusting the calibration of theVI 2000. The first one occurs when attempting toadjust a calibration coefficient by using the bluecircular up and down arrows.

Press and hold the up arrow to increase thedisplayed value and the down arrow to decreasethe displayed value. When the button is firstpressed, the displayed reading may jump in theopposite direction expected. This is normal and iscaused by the temperature compensation routineresetting to the current temperature. Allowseveral seconds for the circuitry to respond. If thebutton is held down for an extended period oftime the adjustment rate will start to increase.Release the button and press again to get finercontrol of the exact reading point.

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Midrange Adjustment

The midrange coefficient corrects for errors inthe slope of the power curve. Typically this is dueto the geometry of a particular sensor and willonly need to be performed once in the lifetime ofthe sensor. This adjustment will need to beperformed if a new sensor is being installedwithout replacing the EEPROM chip or if a fullcalibration is being perform in a gas other thanair or nitrogen. The zero adjustment will need tobe performed before making this adjustment.

To adjust the midrange coefficient use thefollowing procedure:

1. Evacuate the vacuum chamber and refill withthe desired gas to a pressure of 0.9 Torr, asindicated by a reference vacuum gauge.

2. Press the mode switch repeatedly until theVI 2000 enters the CAL mode.

3. Simultaneously, press both the up and downarrow keys. The CAL light will start to flash,signalling that the calibration can now beadjusted.

4. Press, hold and release the up and down arrowkeys as necessary to adjust the display of theVI 2000 to match the pressure indicated bythe reference. Note: It may be necessary tohold the desired key down for 10-20 secondsbefore any movement is seen.

5. Press and release the mode key as necessaryto put the VI 2000 into the RUN mode andstore the coefficients to permanent memory.

Atmosphere Adjustment

The atmosphere coefficient corrects for errors inthe shape of the power curve above 10 Torr. It is agood idea to make this correction if more accuratereadings at high pressure are desired. This correc-tion will need to be performed if the midrangecoefficient has been changed or if a very largezero(> 10 mTorr) error has been corrected. Thisadjustment will be necessary if changes in gascomposition have occurred or if setting up the VI2000 for a gas other than nitrogen.

Changes in humidity of the ambient air orchanges in the composition of air and will affectthe reading at atmospheric pressure by about 1.1Torr per percent relative humidity. Since typicalambient air has a relative humidity of about 50%,this will shift the reading up by about 55 Torr ifnon-dry air is being used in the vacuum system.

Changes in ambient temperature can cause adrift in the pressure reading when the pressure isgreater than 100 Torr. The drift may be up to 20Torr/0C when the pressure is at 760 Torr innitrogen. It is advisable to adjust this point at theoperating conditions to the proper reading.

If a reference high pressure gauge is not avail-able, the ambient pressure and relative humidityacquired from the weather channel or otherweather service can be used to adjust the VI 2000to the proper reading.

To adjust the atmosphere coefficient, use thefollowing procedure:

1. Press the mode switch a sufficient number oftimes to enter the CAL mode.

2. Simultaneously, press both the up and downarrow keys. The CAL light will start to flash,signaling that the calibration can now beadjusted.

3. Press, hold and release either the up or downarrow keys as necessary to adjust the display ofthe VI 2000 to match the pressure indicated bythe reference. Note: It may be necessary tohold the desired key down for 10-20 secondsbefore any movement is seen.

4. Press and release the mode key as necessaryto put the VI 2000 into the RUN mode andstore the coefficients to permanent memory.

Note: Factory calibration is performedusing nitrogen only. Displayed pressuremeasurements using other gases arebased on established gas thermalconductivity data. However, nocompliance data as yet exists certifyingthe accuracy of the results in gases otherthan nitrogen.

TABLE 1

0.0 ..................... Nitrogen

0.1 ..................... Air

0.2 ..................... Helium

0.3 ..................... Argon

0.4 ..................... Neon

0.5 ..................... Krypton

0.6 ..................... Xenon

0.7 ..................... Hydrogen

0.8 ..................... Oxygen

0.9 ..................... Water Vapor

1.0 ..................... Nitric Oxide

1.1 ..................... Nitrous Oxide

1.2 ..................... Ammonia

1.3 ..................... Carbon Monoxide

1.4 ..................... Carbon Dioxide

1.5 ..................... Methane

1.6 ..................... Ethylene

1.7 ..................... Ethane

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3.53.53.53.53.5 GAS Mode:GAS Mode:GAS Mode:GAS Mode:GAS Mode:The Model 2000 can provide true pressuremeasurements in many gas environments. Whenthe vacuum system�s gas composition is domi-nated by a single gas species (for example,during system venting with an inert gas), theuser can enter a gas selection into the Model2000. To view the gas selection, place the Model2000 in the GAS mode and reference Table 1.The Model 2000 is factory set to display N

2

pressure readings. To select a different gas, referto Table 1 to find the number of the gas to beentered, use the blue circular up and downarrows to display the desired gas number. Placethe Model 2000 back in the Run mode.

Due to variations in the shape of the powercurve for each sensor this correction is onlyreasonably accurate for gases other than air ornitrogen below 100 Torr. Above 100 Torr, theindicated reading using only the gas factor maybe off by 50% (of reading) or more. If precisereadings are desired at high pressures readjustthe atmosphere coefficient at the maximumexpected pressure. See Section 3.4.

Air and nitrogen are sufficiently similar that theerror when switching between them is less than15% of reading.

3.63.63.63.63.6 UNITS Mode: UNITS Mode: UNITS Mode: UNITS Mode: UNITS Mode:The VI 2000 can display the measured pressurein different pressure units, Torr, mbar or optionalPascal. One Torr = 1.333 mbar. To switchbetween the units follow these instructions:

Press the MODE button until the �Units� fieldis lit. Press the blue circular down arrow or uparrow to toggle through the available units.

Another commonly used unit is mTorr which isalso known as the micron (short for micron ofHg). One Torr is equal to 1000 mTorr. The tablebelow illustrates how to interpret the VI 2000display in mTorr.

mTorr Conversions

1 mTorr = 1.00 x 10-3 Torr

10 mTorr = 1.00 x 10-2 Torr

100 mTorr = 1.00 x 10-1 Torr

Likewise one bar is equal to 1000 mbar. The SIunit for pressure is the Pascal (N/M2). One mbaris equal to 100 Pascals. See Table 2 for otherpressure conversions.

TABLE 2

Torr atm mbar Pa psi

Torr (mm Hg) 1 1.32x10-3 1.3332 133.32 1.934x10-2

mTorr (micron Hg) 10-3 1.32x10-6 0.00133 .13332 1.934x10-5

atm (atmosphere) 760 1 1013.23 1.013x10-5 14.7

mbar (millibar) 0.75 9.869x10-4 1 100 1.45x10-2

Pa 7.5x10-3 9.869x10-6 0.01 1 1.45x10-4

psi (lb/in2) 51.72 6.805x10-2 68.953 6895.3

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A schematic of the rear panel of the Model 2000is shown in Fig. 4.1( Rear Panel Figure). TheVS 2000 is connected to the VI 2000 via an 8-pinDIN connector on the rear panel. An I/O cablecan be connected via a 7-pin DIN connector onthe rear panel. The I/O cable provides an AnalogOutput signal, an AutoZero Input capability,High and Low alarm TTL Outputs, and a + 5VDC TTL signal. The I/O cable also provides ananalog ground and a digital common.

4.14.14.14.14.1 RRRRRemote Zeremote Zeremote Zeremote Zeremote Zero Inputo Inputo Inputo Inputo InputThe Model 2000 can be zeroed remotely via theI/O cable using the Remote Zero input line.Upon setting this line to TTL high level (+ 5VDC), the Model 2000 will set its current pres-sure reading to zero. A common application of thisfeature, is to utilize a process control output froma high vacuum gauge (for example an ion gaugecontroller) to automatically zero the Model 2000whenever the pressure is in the low 10-6 Torrrange. A +5 VDC TTL level is provided on pin # 7which can be used with relay contacts or switchcontacts to remotely zero the Model 2000.

4.24.24.24.24.2 Analog OutputAnalog OutputAnalog OutputAnalog OutputAnalog OutputThe Model 2000 provides an analog voltageoutput signal (0.5 VDC linear per decade) forprocess control and for pressure monitoring. A plotof the analog output signal as a function ofpressure is shown in Figure 4.2 (Analog OutFigure). Note that the output voltage is directlyproportional to the pressure over each completedecade (see detailed region in the Figure 4.2) andthat each decade has a different linear slope.Above an indicated pressure of 104 Torr, theanalog output signal will be + 5 VDC. Below theminimum displayable pressure of 6x10-5 Torr, theanalog output will be +0.5 volts. If the indicatedpressure falls below the zero level, the analogoutput signal will be + 0.0 VDC. This is anindication that the VI 2000 may need rezeroing foraccurate measurements below 10-3 Torr (seeSection 3.3). The output voltage corresponds tothe following formula where Exp is equal to theexponent of the displayed pressure and Mant isequal to the mantissa. V is equal to the analogoutput voltage.

44444REAR PREAR PREAR PREAR PREAR PANEL DESCRIPTIONANEL DESCRIPTIONANEL DESCRIPTIONANEL DESCRIPTIONANEL DESCRIPTION

Fig. 4.1

7

5 3

21

4

6

8 7

5 3

2

4

6

1

I/O CONNECTORPin# Connection1 Analog Output2 Analog Common3 High Setpoint4 Low Setpoint5 Digital Common6 Remote Zero7 +5V

SENSOR CONNECTORPin# Connection1 Sensor2 Bridge (sense)3 Bridge-Power4 Reference5 Common6 Common (sense)7 N/C8 N/C

SENSOR CONNECTOR I/O CONNECTOR

VI 2000 REAR PANEL DETAIL

110 220

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Fig. 4.2MODEL 2000 Analog Output

VDC (volts) -vs- Pressure (Torr)

V = (Exp+6)*0.5 + (Mant - 1.0)/18

If the analog output is being used in a dataacquisition system the following formulas can beused to map the analog voltage into the mea-sured pressure.

Exp = Int(2*V)-6

Mant = 18*{V-[(Exp +6)/2]}+1

Pressure = Mant*10Exp

Where Int stands for a conversion to integer bytruncation.

4.34.34.34.34.3 TTL OutputsTTL OutputsTTL OutputsTTL OutputsTTL OutputsTTL outputs are provided for process control.High and Low set points are entered on the frontpanel (see Section 3.4) and TTL signals aregenerated on the I/O cable in the followingmanner:

1) When the pressure as indicated by the Model2000 is above the High set point, the High signalline (pin #3) will be set to a TTL high level (+5VDC). When the indicated pressure is below theHigh set point, the High signal line (pin#3) will beset to a TTL low level (+0 VDC).

2) When the pressure as indicated by the Model2000 is below the Low set point, the Low signal

line (pin #4) will be set to a TTL high level (+5VDC). When the indicated pressure is above theLow set point, the Low signal line (pin #4) willbe set to a TTL low level (+0 VDC).

These TTL signal are used for a variety ofapplications. With these signals, the user has thecapability to turn off/on various equipment suchas valves, flow controllers, pumps, heaters, andsafety equipment.

4.44.44.44.44.4 PPPPPooooowwwwwer Entrer Entrer Entrer Entrer Entry Moduley Moduley Moduley Moduley ModuleThe AC power for the VI 2000 unit enters theinstrument through a power entry module thatcontains a fuse, a voltage selector switch and anIEC 320 power inlet.

The voltage selector switch can select an inputvoltage of 110(90-130) or 220(180-260) VAC.The frequency of AC input can between 50or 60 Hz. Unplug the power cord and use a screwdriver to change the operating voltage from onechoice to the other.

The fuse is rated for 250 V, 1/4 Amp. It can beaccessed by unplugging the AC cord and pryingthe fuse compartment open with the tab and slotin the power inlet chamber. There is a spare fusein the compartment within the fuse holder.

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only be balanced when the membrane resistor(Rs) is heated above ambient temperature. Thevoltage applied to the bridge circuit is controlledby a closed loop circuit in the VI 2000 whichbalances voltages on the sides of the bridge circuitin order to maintain the temperature differencebetween this heated resistor and the rest of thetube at a constant value. The VI 2000 monitorsthe current and voltage that must supplied to thisheated resistor to maintain the temperaturedifference. The power dissipated within the heatedresistor can be calculated by multiplying thecurrent and the voltage together.

5.25.25.25.25.2 PPPPPooooowwwwwer Dissipaer Dissipaer Dissipaer Dissipaer DissipationtiontiontiontionThe power dissipated by the heated resistor mustbe equal to the rate of heat transfer from theresistor. There are four methods of heat transferavailable to the resistor; gas convection, radiation,solid state conduction through the membrane,and gas conduction through the surrounding gas.

The small geometry of the sensor preventsbuoyancy driven gas convection from occurringeven at high pressures. This prevents output errorsdue to changes in the sensor mounting angle andallows sensor mounting in any orientation.

5.15.15.15.15.1 Sensor ConstructionSensor ConstructionSensor ConstructionSensor ConstructionSensor ConstructionThermal conductivity vacuum gauges are a classof pressure measurement devices that operate bymeasuring in some way the rate of heat transferbetween a heated element and its surroundings.These gauges infer the pressure from the rate ofheat transfer. The Model 2000 operates on thesame principle by using a silicon micromachinedsensor and a different type of control circuit.

The two parts of the Model 2000 Solid StateVacuum Sensor are the VS 2000 sensor tube andthe VI 2000 instrument package. The VS 2000sensor tube contains a silicon chip that is bondedto a gold plated header. The chip has a thinmembrane over a large void in the silicon sub-strate (see Fig. 5.1). Two thin-film Pt resistors(R

s and R

c in Fig. 5.2) have been etched and

vapor deposited on the surface. One of theresistors is deposited on the membrane and theother is deposited on the main silicon substrate.A large block of silicon is place above the mem-brane leaving a gap between the two surfaces ofonly a few micrometers.

The resistors in the sensor tube are part of aWheatstone bridge (see Fig. 5.2). The bridge will

55555THEORTHEORTHEORTHEORTHEORY OF OPERAY OF OPERAY OF OPERAY OF OPERAY OF OPERATIONTIONTIONTIONTION

Fig. 5.1

SILICON NITRIDEMEMBRANE

TEMPERATURE COMPENSATIONRESISTOR

HEATED SENSORRESISTOR

SILICON SUBSTRATE

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5.3 Signal ProcessingThe Model 2000 system uses a 24 bit sigma-delta A/D converter to measure and digitize thecurrent and voltage supplied to the heatedresistor. The A/D converter is required becausetypical analog circuitry cannot resolve a signalagainst background levels that are 3000 timeshigher than the signal. The A/D converter takesa large number of readings and averages themover a time span before digitizing the averagevalues and passing them on to a microprocessor.The microprocessor is used to calculate thedissipated power from these readings.

The microprocessor must know the constantpower loss through the membrane precisely inorder to calculate the pressure. This is measuredduring the zero routine. When the tube is evacu-ated to a very low pressure, the microprocessor issignalled that the sensing tube is at "zero" pres-sure. The microprocessor will then measure theconstant heat dissipation itself and subtract itfrom all future readings.

At low pressures the heat conduction through thegas is directly proportional to the pressure for agiven gas. This is true as long as the mean molecu-lar path length is much larger than the chamberdimensions. The mean molecular path length isthe distance a molecule can be expected to travelbefore it encounters another molecule and isdirectly proportional to pressure. For nitrogen at

Energy loss due to radiation is less than 0.1% ofthe total power dissipation. This is because thetemperature difference between the heated resistorand the ambient is only 20oC. Therefore radiationlosses can be neglected.

This leaves thermal conduction through themembrane and through the gas surrounding themembrane as the only vectors of power dissipa-tion. The heat conduction through the solidmembrane is temperature and pressure indepen-dent when it is driven by a constant differentialtemperature. When this constant power loss issubtracted from the total power loss, the remain-ing power is the thermal conduction through thesurrounding gas.

The heat transfer through the gas is pressuredependent. By measuring and controlling thepower needed to maintain the temperaturedifference, a measurement of the pressure can beobtained.

When the sensor is in a very high vacuum (<1x10-6

Torr) the heat transfer through the gas approacheszero. Under these conditions the total power lossis only due to heat conduction through themembrane. This power loss is approximately 900microwatts. In comparison the heat dissipationthrough the gas when the pressure is 1x10-4 Torr isapproximately 0.3 mW. The background powerlevel is 3000 times higher than the signal at thispressure.

Fig. 5.2

BRIDGE POWERBRIDGE (SENSE)

REFERENCESENSOR

COMMON (SENSE)

COMMON

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atmospheric pressure this is approximately0.1 micrometer. Since the micromachined sensorhas a distance between the plates of only a fewmicrometers the sensor will remain in this linearregion until the pressure reaches approximately10 Torr.

In this linear region, once the zero power isknown, the microprocessor only needs to make acorrection for slope errors to convert the powerreadings to pressure. The midrange coefficient (setduring calibration) is the slope adjustment thatmust be made to match the output to the actualpressure.

Different gases have different thermal conductivi-ties and therefore different slopes for the samepressure curve. The difference in the slopesbetween any two gases is a constant in this region.The Gas mode of the VI 2000 selects which slopeto use for the gas present in the system.

The thermal conductivity of gases increases withambient temperature. The microprocessor detectschanges in the ambient temperature by monitor-ing the substrate resistance. A correction to thesensitivity curve is then calculated for the ambienttemperature.

As the pressure increases above 10 Torr thepower level is no longer directly proportional tothe pressure. However the resulting curve isstable, repeatable, and monotonically increasingup to 1000 Torr. The microprocessor maps powerreadings into pressure readings by retrievingcoefficients from the sensor's EEPROM. One ofthe coefficients reflects a measurement of thespacing between the membrane and the lid, thisspacing varies from sensor to sensor. Thiscoefficient is a curve fit parameter which accu-rately defines the curve at pressures above10 Torr.

When performing the atmosphere adjustmentduring calibration, the microprocessor is adjust-ing this curve fit parameter to match its internalcurve to power vs. pressure curve of the sensor.Since different gases will have different curves inthis region the slope multiplier conversion be-tween the different gases breaks down when thecurve becomes highly nonlinear (above 100 Torr).It is necessary to adjust the internal curve fitparameter for the new gas if precise readings aredesired above 100 Torr.

The curve fit parameters are sensor dependent.Therefore they stored on a EEPROM that isshipped with the sensor tube.

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6.16.16.16.16.1 RS-232-E InterfaceRS-232-E InterfaceRS-232-E InterfaceRS-232-E InterfaceRS-232-E InterfaceSpecificationsSpecificationsSpecificationsSpecificationsSpecifications

Format EIA standard RS-232-E, half-duplex,no handshaking, asynchronous

Data Rate 9600 baud

Character Length Eight data bits

Parity No parity

Stop bits One stop bit

6.26.26.26.26.2 Interface ConnectorInterface ConnectorInterface ConnectorInterface ConnectorInterface ConnectorPinPinPinPinPin AssignmentsAssignmentsAssignmentsAssignmentsAssignments

PIN MNEMONIC SIGNAL DESCRIPTION

2 TX Transmit Data Transmits data within RS-232-E voltage levels

3 RX Receive Data Accepts data within RS-232-E voltage levels.

7 SG Signal Ground Establishes the common ground referencepotential for all interchange circuits whencommunicating via RS-232-E.

2 D+ Signal Positive Positive transmit/receive data line,RS-485

14 D- Signal Negative Negative transmit/receive data line, RS-485

PIN 25

PIN 1

NOTES:

1. All signals are named with respect to theoriginating unit.

2. All undesignated pins are to be left open.

66666RS-232 OPTION BORS-232 OPTION BORS-232 OPTION BORS-232 OPTION BORS-232 OPTION BOARDARDARDARDARD

The RS-232/RS-485 communication interfaceboard is available as an option for the Model2000. The RS-232/RS-485 option board allowsdata to be output to a host computer. At this timetheir are no commands to allow a host computer tocontrol the VI 2000. The VI 2000 uses a 2 wirehalf-duplex serial interface with a commonground. Connection to the RS-232/RS485interface board is via a 25 pin D-subminiaturefemale connector. At this time only addresses2, 4 and 6 are supported for the RS-485 standard.

○ ○

○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○

○ ○ ○ ○ ○ ○ ○ ○ ○

○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○

○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○

figure 6.1

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6.3 Operation6.3 Operation6.3 Operation6.3 Operation6.3 OperationCommunication with the VI 2000 is via an ASCIIstring. A message to the VI 2000 in the RS-485mode consists of an attention character(*)followed by the address string (02,04 or 06), thecommand character (H,L,G,P or S) and theterminator (carriage return).

In the RS-232 mode the attention character andaddress are not required and will be ignored , butthe terminating carriage return must be used.({c}[↵]) A line feed character is not required andcould cause transmission conflicts. Any stringsreceived that do not meet this format will beignored. The command character is not casesensitive, the VI 2000 will respond to upper orlower case characters. Since no handshaking is

Command Syntax

In the following syntax codes the characters in square brackets [ ] must be sent exactly as written. Allcharacters in brackets must follow each other in the string with no spaces or other characters. The charactersin the wavy brackets { } contain choices for the appropriate command. When the �/� character is present itindicates the two choices that are available in this position. When a lower case character is present it indicatesan option choice as follows:

Character Options Description

a 2, 4 or 6 RS-485 address

m 1 - 9 Most significant digit of mantissa

d 0 - 9 Decimal digit

e 0 - 5 Exponent

u T, m or P Unit of Pressure

c G, H, L, S, or P Command character (may be lower case also)

b 0 or 1 Binary data in ASCII format

↵ ASCII 13 Carriage Return

P or p: Display pressure reading

RS-485 Syntax: [*0]{a}{p/P}[↵]

RS-232 Syntax: {p/P}[↵]

Response Length: 9 characters.

Response Syntax: {m}[.]{dd}[E]{+/-}{e}{u}[↵]

Sample Command: *02P↵ or P↵

Sample Response: 1.45E-4T↵

Description: When this command received the VI 2000 will return the current displayed pressure reading asan ASCII string representing the pressure. If the VI 2000 is in the High or Low set mode it will respond withthe currently displayed setpoint.

being employed the communications bus must bekept free until the VI 2000 responds to avoidtransmission conflicts. Allow 800 ms to guaranteethat the VI 2000 will respond.

The VI 2000 will respond to all proper commandstrings with an ASCII string that is terminatedwith a carriage return. When the VI 2000responds with a numerical pressure value theresponse string will be sent in scientific formatfollowed by a character representing the unit ofmeasure (T, m or P) and terminated with acarriage return. T corresponds to Torr, m is usedfor millibar and P is used for Pascals.

No error messages will be generated under faultconditions at this time.

○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○

○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○

○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○

○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○

○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○

○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○

○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○

○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○

○ ○ ○ ○ ○

○ ○ ○ ○ ○

○ ○ ○ ○ ○

○ ○ ○ ○ ○

○ ○ ○ ○ ○

○ ○ ○ ○ ○

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H or h: Display High Alarm Setpoint

RS-485 Syntax: [*0]{a}{h/H}[↵]

RS-232 Syntax: {h/H}[↵]

Response Length: 9 character ASCII string representing the setpoint.

Response Syntax: {m}[.]{dd}[E]{+/-}{e}{u}[↵]

Sample Command: *02H↵ or H↵

Sample Response: 1.45E-4T↵

Description: When this command received the VI 2000 will return the current High alarm setpoint as anASCII string representing the trip point pressure.

L or l: Display Low Alarm Setpoint

RS-485 Syntax: [*0]{a}{l/L}[↵]

RS-232 Syntax: {l/L}[↵]

Response Length: 9 character ASCII string representing the setpoint.

Response Syntax: {m}[.]{dd}[E]{+/-}{e}{u}[↵]

Sample Command: *02L↵ or l↵

Sample Response: 1.45E-4T↵

Description: When this command received the VI 2000 will return the current Low alarm setpoint as anASCII string representing the trip point pressure.

S or s: Display Alarm status

RS-485 Syntax: [*0]{a}{s/S}[↵]

RS-232 Syntax: {s/S}[↵]

Response Length: 4 characters.

Response Syntax: {b}[,]{b}[↵]

Sample Command: *02S↵ or S↵

Sample Response: 1,0↵Description: When this command received the VI 2000 will return the current status of the High and Lowalarms. The first character is the indicator for the status of the High alarm. If the High alarm is triggered thecharacter will be a �1� (ASCII 49). If the current pressure has not exceeded the setpoint the first characterwill be a �0�(ASCII 48).

The second digit (3rd character) is the status of the Low alarm setpoint indicated in the same fashion.

G or g: Display gas number

RS-485 Syntax: [*0]{a}{g/G}[↵]

RS-232 Syntax: {g/G}[↵]

Response Length: 3 characters.

Response Syntax: {dd}[↵]

Sample Command: *02G↵ or G↵

Sample Response: 04↵

Description: When this command received the VI 2000 will return the current gas ID number as an ASCIIstring.

Page 28: HASTINGS MODEL 2000 THIN FILM PIRANI …sinom.com.tw/produt_pdf/HAS-2000manual.pdfPirani tube), it can withstand high levels of mechanical shock. The VS 2000 is designed for fast response.The

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6.4 Installation of RS-232 Board

Materials needed for option board installation:

� RS-232 option board

� Connector panel for RS-232 option card

� Screws (4)

� Jackscrews (2)

Installation instructions:

Tools needed for option board installation:

� Phillips screw driver

� 3/16 wrench (nut driver)

Important: Components are static sensitive.Take ESD precautions - use a wristgrounding strap.

1. Disconnect all cables from the VI 2000.

2. For the installation of an option board youmust have access to both the front and rear ofthe VI 2000. Remove the instrument from itsmounting panel if necessary.

3. Remove the option blanking panel from abovethe power inlet module on the rear panel.Replace it with the RS-232 board connectorpanel supplied in your upgrade kit. Install thepanel so that the wider edge is to the bottom ofthe instrument.

4. Un-snap the bezel from the front of the case.Remove the four screws from the front panel,then carefully remove the front panel.

5. Insert the RS-232 option board (componentside down) into the top slot of the VI 2000case and attach the board to the back panelusing the supplied jack screws.

6. Connect the ribbon cable of the option boardto the I/O port (P1) on the main PC board.The brown wire of the cable denotes pin oneand should be installed toward the front of thecase.

7. Reattach the front panel (take care not to kinkthe ribbon cable). Snap the bezel onto thefront of the case.

Note: Upon examining the RS-232 optionboard you will find several jumper settings.These jumpers allow the board to beconfigured for either RS-232 or RS-485communications. These jumpers are preset atthe factory as per customer order. To changethese settings please consult the factory.

figure 6.2

Page 29: HASTINGS MODEL 2000 THIN FILM PIRANI …sinom.com.tw/produt_pdf/HAS-2000manual.pdfPirani tube), it can withstand high levels of mechanical shock. The VS 2000 is designed for fast response.The

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77777RELARELARELARELARELAY INTERFY INTERFY INTERFY INTERFY INTERFAAAAACE OPTION BOCE OPTION BOCE OPTION BOCE OPTION BOCE OPTION BOARDARDARDARDARD

The relay interface board is available as anoption for the Model 2000. The Relay boardallows the TTL logic setpoints (High, Low) todirectly control two SPDT relays. Whenever thesetpoint indicator light in the front panel is lit,the corresponding relay is energized. The relaycontacts are rated for a maximum switchingcurrent of 250VA (resistive load). Connection tothe relay contacts is made via a terminal stripmounted through the rear panel of the VI 2000.

7.1 Relay Board SpecificationsEach relay board consists of 2 Form C (SPDT)relays with the contacts wired in parallel.

Max. switching power 120W, 250VA

(2A @ 125VAC, 1A @ 250VAC)

Max. switching voltage 220VDC, 250VAC

Max. switching current 4A DC, AC

Max . carrying current 6A DC, AC

UL/CSA rating 1.2A @ 125VAC

1.2A @ 110VDC

4.0A @ 30VDC

Terminal strip is designed for wire from 22 AWGthrough 12 AWG.

7.2 Terminal Strip Connections

Pin Connection

1 Common (High)

2 NC (High)

3 NO (High)

4 Common (Low)

5 NC (Low)

6 NO (Low)

The Terminal strip is numbered one through sixas shown in figure 7-1.

figure 7-1

7.3 OperationThe Relay option board in the VI 2000 operatesoff of the setpoints defined by the user andprogramed into the VI 2000 microprocessor. Formore information about configuring thesesetpoints refer to Section 3 of this manual.

7.4 Relay Board Installation

IMPORTANT: Components are staticsensitive. Take ESD precautions - use a wristgrounding strap

Materials needed for option board installation:

· Relay option board

· Connector panel for Relay option board

· Screws (4)

· 4-40 x 1/4" screws (2)

A phillips head screw driver is needed to installthe relay option board.

1. Disconnect all cables from the VI 2000.

2. For the installation of an option board youmust have access to both the front and rear ofthe VI 2000. Remove the instrument from itsmounting panel if necessary.

3. Remove the option blanking panel from abovethe power inlet module on the rear panel.Replace it with the relay board connectorpanel supplied in your upgrade kit. Install thepanel so that the text on the panel is orientedto the top and bottom of the unit.

4. Un-snap the bezel from the front of the case.Remove the four screws from the front panel,then carefully remove the front panel.

5. Insert the relay option board (screw heads onthe terminal strip should be closest to the topof the VI 2000 case) into the back panelusing the supplied 4-40 x 1/4" screws.

6. Connect the ribbon cable of the option boardto the I/O port (P1) on the main PC board.The brown wire of the cable denotes pin oneand should be installed toward the front of thecase.

7. Reattach the front panel (take care not to kinkthe ribbon cable). Snap the bezel onto thefront of the case.

1 2 3 4 5 6

Page 30: HASTINGS MODEL 2000 THIN FILM PIRANI …sinom.com.tw/produt_pdf/HAS-2000manual.pdfPirani tube), it can withstand high levels of mechanical shock. The VS 2000 is designed for fast response.The

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figure 7.2

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Symptom: Rapidly running, random digits ondisplay

Action: 1. Verify that the sensor cable is properly plugged into both the sensor and the power supply, and that it has not been severed.

2. Consult the factory.

Symptom: Display shows decimal point andminus sign only

Action: 1. Check microprocessor.

a) Remove the front panel.

b) Verify that U3 is properly seated in the chip carrier.

2. Consult the factory.

Symptom: Fixed display, regardless of pressure

Action: 1. Check sensor.

a) Remove front panel and slide PCB out of case enough to expose TP 2, 3 & 4.

b) With the sensor at atmosphere, measure the voltage between TP 2 - 3, and the voltage between TP 2 - 4.

c) Calculate the power: [(TP 2 - 3) x (TP 2 - 4)]/200 ≈ 40±10 mW.

2. Consult the factory.

Symptom: Control buttons not functional

Action: 1. Check membrane/PCB connection

a) Remove the front panel.

b) Verify that the 5 pin ribbon connector is firmly seated over all 5 pins of P2. The grey side of the ribbon cable should be toward the outside of the case.

2. Consult the factory.

Symptom: Calibration changes when instrumentis turned off.

Action: 1. Check eeprom

a) Remove the front panel.

b) Verify that all 8 pins of U2 are firmly seated in the socket.

2. Consult the factory.

Symptom: Power on - No display activity

Action: 1.Check for proper AC voltage at the outlet.

2.Ensure that the AC power cord connectors are firmly seated in their sockets. (at the outlet, and at the instrument.)

3.Check the fuse.

a) Remove the power cord from the IEC-320 socket on the back of the instrument.

b) Pry the fuse holder out of the socket assembly by using a screw driver in the small slot inside the IEC-320 socket.

c) Check the fuse that is in the fuse clamp. If it is found to be defective, remove it from the clamp. Press the spare fuse case out of the fuse holder body and insert the spare fuse into the fuse clamp.

d) Reassemble the power inlet assembly by reversing the above directions.

e) Check the power supply for proper operation

4.Check the AC/PCB connection.

a) Remove the front panel by removing the bezel and four phillips head screws. (Disconnect AC power prior to removal of the front panel.)

b) Slide the display board and the main PCB out of the case.

c) Verify that the white AC connector is firmly seated over all five pins of P4. The wire colors, from front to back should be: Green, Black, Red, Yellow, White.

5. Check the display board connection.

a)Verify that the 13 pin SIP connector is firmly seated over all 13 pins of P3.

b) Verify that the 5 pin ribbon connector is firmly seated over all 5 pins of P2.

6. Consult the factory.

88888TRTRTRTRTROUBLESHOOOUBLESHOOOUBLESHOOOUBLESHOOOUBLESHOOTING GUIDETING GUIDETING GUIDETING GUIDETING GUIDE

Page 32: HASTINGS MODEL 2000 THIN FILM PIRANI …sinom.com.tw/produt_pdf/HAS-2000manual.pdfPirani tube), it can withstand high levels of mechanical shock. The VS 2000 is designed for fast response.The

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Symptom: Alarm lights indicate an alarmcondition, but installed relay doesn'tchange position.

Action: 1. Verify that the relay ribbon cable is properly installed as per Section 7.4.

2. Consult the factory.

Symptom: No response from the installedRS-232 board.

Action: 1. Verify that the RS-232 ribbon cable is properly installed as per Section 6.4.

2. Verify the baud rate, start bits and stop bits as per Section 6.1.

3. Verify that the command string is carrige return terminated and meets the syntax requirements listed in Section 6.3. Do not use "Hardware" flow control in a Windows type collection routing.

4. If using a DOS based routine for data collection, it may require "handshaking" which is not supported by this interface. A dummy handshake signal can be generated if pins 4, 5, 6 and 8 are tied together.

5. Consult factory.

Symptom: Display indicates pressure when below1 Torr properly but reads a few Torrwhen at atmosphere.

Action: 1. Consult factory.

This section contains outline drawings of thevarious Tube configurations, the VI 2000, Panelmounting criteria, main board assembly diagram,microprocessor/bridge schematic, power supplyschematic, and display schematic.

Page 33: HASTINGS MODEL 2000 THIN FILM PIRANI …sinom.com.tw/produt_pdf/HAS-2000manual.pdfPirani tube), it can withstand high levels of mechanical shock. The VS 2000 is designed for fast response.The

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99999DIADIADIADIADIAGRAMS and DRAGRAMS and DRAGRAMS and DRAGRAMS and DRAGRAMS and DRAWINGSWINGSWINGSWINGSWINGS

Page 34: HASTINGS MODEL 2000 THIN FILM PIRANI …sinom.com.tw/produt_pdf/HAS-2000manual.pdfPirani tube), it can withstand high levels of mechanical shock. The VS 2000 is designed for fast response.The

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2.63"

1.33"

Mini Conflat (VS 2000-01-03)

KF-16 (VS 2000-01-05)

2.75"

1.18"

1.57"

2.75"

KF-25 (VS 2000-01-06)

Tube Outline Drawings (all dimensions shown are approximate)

tm

Page 35: HASTINGS MODEL 2000 THIN FILM PIRANI …sinom.com.tw/produt_pdf/HAS-2000manual.pdfPirani tube), it can withstand high levels of mechanical shock. The VS 2000 is designed for fast response.The

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3.00"

.56"

2.63"

.56"

3.50"

3.00"

2.75"

1/8" NPT (VS 2000-01-01)

1/2" O.D. Smooth Tube (VS 2000-01-07)

1/4" VCR (VS 2000-01-02)

2-3/4" Conflat (VS 2000-01-04)

Tube Outline Drawings (all dimensions shown are approximate)

tm

1/4" VCR

Page 36: HASTINGS MODEL 2000 THIN FILM PIRANI …sinom.com.tw/produt_pdf/HAS-2000manual.pdfPirani tube), it can withstand high levels of mechanical shock. The VS 2000 is designed for fast response.The

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3.62"

3.62"

Panel Cut-Out Dimensions

VI 2000 Outline Dimensions

3.62"

3.62"

3.62"3.54"

3.54"

6.75"

VI 2000 Outline Drawings (all dimensions shown are approximate)

Page 37: HASTINGS MODEL 2000 THIN FILM PIRANI …sinom.com.tw/produt_pdf/HAS-2000manual.pdfPirani tube), it can withstand high levels of mechanical shock. The VS 2000 is designed for fast response.The

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NEOPRENE GASKET

Panel Mounting

Mounting Clip Attachment

Deep Mounting Location Shallow Mounting Location

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PC-833 Component Layout

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PC-833 Component listing

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PC-833 Schematic

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PC-833 Power Supply Schematic

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VI 2000 Display Schematic (non Pascal version)

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VI 2000 Display Schematic (Pascal version)

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VI 2000 Optional RS-232/485 board

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VI 2000 Optional RS-232/485 board schematic

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VI 2000 Optional Relay board

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VI 2000 Optional Relay board schematic