Handbook of optical constants of solids.PDF

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Handbook of Optical Constants of Solids II Edited by EDWARD D. PALIK Institute of Physical Sciences and Technology University of Maryland College Park, Maryland ACADEMIC PRESS, INC. Harcourt Brace Jovanovich, Publishers Boston San Diego New York London Sydney Tokyo Toronto

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Page 1: Handbook of optical constants of solids.PDF

Handbook of Optical Constants of Solids II

Edited by

EDWARD D. PALIK

Institute of Physical Sciences and Technology University of Maryland College Park, Maryland

ACADEMIC PRESS, INC. Harcourt Brace Jovanovich, Publishers

Boston San Diego New York London Sydney Tokyo Toronto

Page 2: Handbook of optical constants of solids.PDF

Contents

List of Contributors Preface

xv xix

Part I DETERMINATION OF OPTICAL CONSTANTS

Chapter 1 Introductory Remarks

EDWARD D. PALIK

r. II.

m. IV. V.

VI. VII.

Introduction The Chapters The Critiques The Tables The Figures of the Tables General Remarks Errata References

3 3 5 6 7 7 8

11

Chapter 2 Convention Confusions

R. T. HOLM

I. Introduction II. Units

III. Wave Equation IV. Polarization V. Fresnel's Amplitude Reflection Coefficients

VI. Nomenclature VII. Concluding Remarks

Acknowledgments References

21

21 22 22 26 37 50 51 52 52

Chapter 3 Methods for Determining Optical Parameters of Thin Films

E. PELLETIER

I. Introduction II. An Example of Comparison between the Different

Techniques of Index Determination III. Principle Methods of Index Determination IV. Sensitivity and Accuracy of the Determination Methods V. Overlapping and Tests of Validity of the Model

VI. Results and Conclusion References

57

57

58 60 64 67 71 71

v

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VI Contents

Chapter 4 The Attenuated Total Reflection Method

G. J. SPROKEL AND J. D. SWALEN

I. Introduction II. Surface-Plasmon Oscillations

III. Optical Analysis of ATR Structures IV. Guided Modes V. Applications of ATR

VI. Conclusion References

Chapter 5 Optical Properties of Superlattices P. APELLANDO. HUNDERI

I. Introduction II. The Classical Optical Response of a Multilayer System

III. Semiconductor Superlattices IV. Amorphous Superlattices V. Collective Excitations

VI. Lattice Disorder VII. The Effect of Nonlocal Dielectric Functions

VIII. Concluding Remarks References

Chapter 6 Caiculation of the Refractive Index of Compound Semiconductors below the Band Gap

B. JENSEN

75

75 77 81 84 87 94 94

97

97 98 101 109 112 118 120 122 122

125

I. II.

III. IV.

Introduction The Quantum-Density-Matrix Formulation of the Complex Dielectric Constant Comparison with Experimental Results Summary References

125

128 138 147 148

Chapter 7 Caiculation of Optical Constants, n and k, in the Interband Region

A. R. FOROUHI AND I. BLOOMER 151

I. II.

III. IV. V.

Introduction The Extinction Coefficient, k(E), and the Refractive Index, n(E) Discussion Examples Summary References

151

154 163 166 174 175

Chapter 8 Temperature Dependence of the Complex Index of Refraction 177

MICHAEL E. THOMAS

I. Introduction 177 II. Temperature Dependence of n and k 179

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VII

III. Conclusions References

199 199

Chapter 9 Measurement of n and * in the XUV by the Angle-of-Incidence Total-External-Reflectance Method

MARION L. SCOTT

203

I. II.

III. IV. V.

Chapter 10

I. iL

m. IV. V.

Chapter 11

Introduction General Considerations Aluminum Reflectance versus Angle in UHV Determination of n and k Comparison with Other Results References

Spectroscopic Ellipsometry in the 6-35 eV Region J. BARTH, R. L. JOHNSON, AND M. CARDONA

Introduction The Bessy VUV Eilipsometer Theory Results and Comparison with Reflectance Spectra Summary Acknowledgment References

Methods Based on Multiple-Slit Fourier Transform

203 204 206 207 210 212

213

213 217 226 237 244 245 245

Interferometry for Oetermining Thin-Film Optical Constants in the VUV/Soft X-Ray Range 247

ROMAN TATCHYN

I. Introduction to MSFTI 247 II. Fundamental Dimensional Constraints and Inequalities 253

III. Relationship of MSFTI to Alternative Metrological Techniques 254

IV. General Experimental Equations and Sensitivity Analysis 258 V. A Characterization of the Optical Constants of Au Using

MSFTI in the 280-640 e V Range 265 VI. Problems and Prospects in Sample Preparation 270

VII. Prospects for MSFTI in Other Spectral Regimes 272 VIII. Summary 273

Acknowledgments 274 References 274

Chapter 12 Determination of Optical Constants from Angular-Dependent, Photoelectric-Yield Measurements 279

H.-G. BIRKEN, C. BLESSING, AND C. KUNZ

I. Introduction 279 II. Theoretical Background 280

III. Experimental Details 285

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V I I I Contents

IV. Examples V. Conclusions and Future Prospects

References

Chapter 13 Determination of Optical Constants by High-Energy, Electron-Energy-Loss Spectroscopy (EELS)

J. PFLÜGER AND J. FINK

I. Introduction II. Description of an EELS Experiment

III. Scattering Cross-Section IV. Exact Determination of the Loss Function V. Kramers-Kronig Analysis

VI. Brief Summary of the Evaluation Procedure VII. Comparison with Reflectivity Measurements

VIII. Optical Properties of TiC, VC, TiN, and VN References

Chapter 14 Optical Parameters for the Materials in HOC I and HOCH

EDWARD D. PALIK

I. Introduction II. The Parameters

References

286 289 292

293

293 295 297 298 299 300 300 303 310

313

313 313 334

Part II CRITIQUES

Subpart 1 Metals

An Introduction to the Data for Several Metals

DAVID W. LYNCH AND W. R. HUNTER

I. Introduction References

II. Alkali Metals References

III. Lithium (Li) References

IV. Sodium (Na) References

V. Potassium (K) References

VI. Chromium (Cr) References

VII. Iron (Fe) References

VIII. Niobium (Nb) References

IX. Tantalum (Ta) References

341

341 341 342 344 345 347 354 357 364 367 374 376 385 387 396 397 408 409

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Contents IX

Beryllium (Be)

E. T . A R A K A W A , T. A. CALLCOTT, A N D Y U N - C H I N G C H A N G 421

References 425

Cobalt (Co) 435

L. W A R D

References 440

Graphite (C) 449

A. BORGHESI A N D G. GUIZZETTI

References 453

Liquid Mercury (Hg) 461

E. T. A R A K A W A A N D T. INAGAKI

References 465

Palladium (Pd) 469

A. BORGHESI A N D A. PIAGGI

References 472

Vanadium (V) 477

G. GUIZZETTI A N D A. PIAGGI

References 480

Subpart 2 Semiconductors

Aluminum Arsenide (AlAs) 489

E D W A R D D. PALIK, O. J . GLEMBOCKI , A N D KENICHI TAKARABE

Acknowledgments 492 References 492

Aluminum Antimonide (AlSb) 501

DAVID F. E D W A R D S A N D RICHARD H. W H I T E

References 505

Aluminum Gallium Arsenide (AüSa, ^As) 513

O. J . GLEMBOCKI A N D K. TAKARABE

Acknowledgments References

515 515

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Contents

Cadmium Selenide (CdSe) 559

H. PILLER

References 563

Cadmium Sulphide (CdS) 579

L. WARD

References 586

Gallium Antimonide (GaSb) 597

DAVID F. EDWARDS AND RICHARD H. WHITE

References 601

Silicon-Germanium Alloys (SUGe,-*) 607

J. HUMLICEK, F. LUKES, AND E. SCHMIDT

References 611

Lead Tin Telluride (PbSnTe) 637

H. PILLER

References 639

Mercury Cadmium Telluride (Hg,_,CdJe) 655

P. M. AMIRTHARAJ

Acknowledgments 666 References 667

Selenium (Se) 691

EDWARD D. PALIK

Acknowledgments 693 References 694

Cubic Silicon Carbide (ß-SiC) 705

SAMUEL A. ALTEROVITZ AND JOHN A. WOOLLAM

References 706

Tellurium (Te) 709

EDWARD D. PALIK

Acknowledgments 713 References 713

Tin Telluride (SnTe) 725

H. PILLER

References 727

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Contents

Zinc Selenide (ZnSe) Zinc Telluride (ZnTe) 737

L. WARD

References 747

Subpart 3 Insulators

Aluminum Oxide (Al203) 761 FRANQOIS GERVAIS

References 764

Aluminum Oxynitride (ALON) Spinel 777

WILLIAM J. TROPF AND MICHAEL E. THOMAS

References 780 Notes Added in Proof 781

Barium Titanate (BaTi03) 789

CHUEN WONG, YE YUNG TENG, J. ASHOK, AND P. L. H. VARAPRASAD

Acknowledgments 793 References 793

Beryllium Oxide (BeO) sos

DAVID F. EDWARDS AND RICHARD H. WHITE

References 807

Calcium Fluoride (CaF2) 815

D. F. BEZUIDENHOUT

References 825

Amorphous Hydrogenated "Diamondlike" Carbon Films and Arc-Evaporated Carbon Films 837

SAMUEL A. ALTEROVITZ, N. SAVVIDES, F. W. SMITH, AND JOHN A. WOOLLAM

References 840

Cesium lodide (Csl) 853

JOHN E. ELDRIDGE

References 857

Copper Oxides (CiijO, CuO) 875

CARL G. RIBBING AND ARNE ROOS

References 878

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XII Contents

Magnesium Aluminium Spinel (MgAljOJ 883

WILLIAM J . TROPF AND MICHAEL E. THOMAS

References 887

Magnesium Fluoride (MgF2) 899

THOMAS M. COTTER, MICHAEL E. THOMAS, AND WILLIAM J . TROPF

References 903

Magnesium Oxide (MgO) 919

DAVID M. ROESSLER AND DONALD R. HUFFMAN

Acknowledgments 939 References 939

Polyethylene [CJUX 957

J. ASHOK, P. L H. VARAPRASAD, AND J . R. BIRCH

References 968

Potassium Bromide (KBr) 989

EDWARD D. PALIK

References 992

Potassium Dihydrogen Phosphate (KH2P0„ KDP) and Three of Its Isomorphs IOOS

DAVID F. EDWARDS AND RICHARD H. WHITE

References 1008

Sodium Fluoride (NaF) 1021

I. OHÜDAL AND K. NAVRÄTIL

References 1024

Strontium Titanate (SrTi03) 1035

FRANCOIS GERVAIS

References 1037

Thorium Fluoride (ThF,) 1049

I. OHLiDAL AND K. NAVRÄTIL

References 1054

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Contents xiii

Water (H20) 1059

MARTIN R. QUERRY, DAVID M. WIELICZKA, AND DAVID J . SEGELSTEIN

References 1063

Yttrium Oxide (Y203) 1079

WILLIAM J . TROPF AND MICHAEL E. THOMAS

References 1084 Notes Added in Proof 1086

X