Granville-Phillips® Series 385 Convectron®

Granville-Phillips® Series 385 Convectron® ATM Vacuum Gauge Module

Instruction manual part number 385008

Revision A - August 2010

Series 385

Instruction Manual

To order products online, visit www.brooks.com

For customer service, 24 hours per day, 7 days per week, every day of the year including holidays, toll-free within the USA, phone 1-800-367-4887

For customer service within the USA, 8 AM to 5 PMweekdays excluding holidays:

• Toll-free phone: 1-800-776-6543• Phone: 1-303–652-4400• FAX: 1-303-652-2844• Email: [email protected]• Web: www.brooks.com

© 2007-2010 Brooks Automation, Inc. All rights reserved.Granville-Phillips® and Convectron® are registered trademarks of Brooks Automation Inc. All other trademarks and registered trademarks are the properties of their respective owners.


Instruction Manual

Series 385

This Instruction Manual is for use with all Granville-Phillips Series 385 Convectron ATM Vacuum Gauge Modules.A list of applicable catalog numbers is provided on the following page.

Granville-Phillips® Series 385 Convectron®

ATM Vacuum Gauge Module

Catalog numbers for Series 385 Convectron ATM ModulesPower supply and cable are not included.

Analog output - no display: 385001 - G #

RS-485 interface - no display: 385002 - G # - #

RS-485 interface - with digital display: 385003 - G # - #

DeviceNet interface - no display: 385009 - G # - # and 385010 - G # - #

DeviceNet interface - with digital display: 385007 - G # - # and 385011 - G # - #

Flange/Fitting:

1/8 NPT, 1/2 inch tubulation P1/4 inch VCR-type female Q1/2 inch VCR-type female RNW16KF DNW25KF ENW40KF K1.33 inch (NW16CF) Conflat-type F2.75 inch (NW35CF) Conflat-type G

Measurement Units:

Torr Tmbar Mpascal P

Conflat is a registered trademark of Varian AssociatesVCR ia a registered trademark of Swagelok Company

Convectron®ATM Instruction Manual - 385008 - Rev. A 5

Table of Contents

Chapter 1 Before You Begin . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91.1 About these instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . 91.2 Caution and warning statements . . . . . . . . . . . . . . . . . . . . . 91.3 Reading and following instructions . . . . . . . . . . . . . . . . . . . 101.4 Definitions of terms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 111.5 Customer service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

Chapter 2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 152.1 Module components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 152.2 Installation procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

Step 1 Install pressure relief devices . . . . . . . . . . . . . . . . 16Step 2 Locate and orient the module . . . . . . . . . . . . . . . . 16

Locate the module . . . . . . . . . . . . . . . . . . . . . . . . 16Orient the module . . . . . . . . . . . . . . . . . . . . . . . . 17

Step 3 Attach module to vacuum chamber . . . . . . . . . . . 181/8 NPT pipe thread . . . . . . . . . . . . . . . . . . . . . . . 18VCR type fitting . . . . . . . . . . . . . . . . . . . . . . . . . . 18KF flange . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18ConFlat flange . . . . . . . . . . . . . . . . . . . . . . . . . . . 18

Step 4 Assemble and connect the wiring . . . . . . . . . . . . . 19CE Mark compliance . . . . . . . . . . . . . . . . . . . . . . 19Module power supply . . . . . . . . . . . . . . . . . . . . . . 19DeviceNet wiring . . . . . . . . . . . . . . . . . . . . . . . . . 19Output and relay wiring . . . . . . . . . . . . . . . . . . . . 20Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

Step 5 Configure setpoint relays for the application . . . . . 23Step 6 Calibrate the Convectron gauge . . . . . . . . . . . . . . 24

Atmospheric pressure calibration . . . . . . . . . . . . . 24Vacuum pressure calibration . . . . . . . . . . . . . . . . 24

2.3 Eliminating radio frequency interference . . . . . . . . . . . . . . . 24

Chapter 3 Operation Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 253.1 Analog, DeviceNet, and RS-485 outputs and relays . . . . . . 253.2 Analog operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 253.3 DeviceNet operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 263.4 RS-485 operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

Chapter 4 Analog Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 294.1 Preparing to operate the analog module . . . . . . . . . . . . . . . 294.2 Module front panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 304.3 Reading the vacuum pressure analog output . . . . . . . . . . . . 32

N2 or air . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

Table of Contents

6 Convectron®ATM Instruction Manual - 385008 - Rev. A

Commonly used gases other than N2 or air . . . . . . . . . . . . . 32Other gases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

4.4 Reading the differential pressure analog output . . . . . . . . . . 404.5 Setpoint relays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41

Setpoint 1: Convectron gauge . . . . . . . . . . . . . . . . . . . . . . . 42Setpoint 2: differential pressure sensor . . . . . . . . . . . . . . . . 46

4.6 Reading relay status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 474.7 Calibrating Convectron gauge at atmospheric pressure . . . . 484.8 Calibrating Convectron gauge at vacuum pressure . . . . . . . 494.9 Modules operating below 10–3 Torr . . . . . . . . . . . . . . . . . . . 504.10 Calibrating differential pressure sensor zero . . . . . . . . . . . . 504.11 Factory settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51

Chapter 5 DeviceNet Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 535.1 Preparing to operate the DeviceNet module . . . . . . . . . . . . 535.2 Module front and back panels . . . . . . . . . . . . . . . . . . . . . . . 545.3 LED status indicator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 555.4 NET and MOD LEDs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 565.5 Performance with DeviceNet protocol . . . . . . . . . . . . . . . . 575.6 DeviceNet protocol for the Convectron ATM module . . . . . 585.7 Operational tasks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 585.8 DeviceNet switches and indicators . . . . . . . . . . . . . . . . . . . 58

Address switches . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59Rate switch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60

5.9 DeviceNet communication configuration . . . . . . . . . . . . . . 605.10 Pressure units and values . . . . . . . . . . . . . . . . . . . . . . . . . . 63

Set or get pressure unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64Data conversion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64Get vacuum pressure or differential pressure . . . . . . . . . . . . 65

5.11 Process control relays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72Get relay setpoints . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78Get enable/disable status of relays . . . . . . . . . . . . . . . . . . . 78Get activation or deactivation status of relays . . . . . . . . . . . 79Get relay hysteresis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79Get relay assignments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80

5.12 Calibrate Convectron gauge at atmospheric pressure . . . . . 805.13 Calibrate Convectron gauge at vacuum pressure . . . . . . . . . 815.14 Calibrate differential pressure sensor zero . . . . . . . . . . . . . . 825.15 Reset module to power-up state . . . . . . . . . . . . . . . . . . . . . 825.16 Get firmware version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 825.17 Factory defaults . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 835.18 DeviceNet error codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83

Using polled I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83Using explicit messages . . . . . . . . . . . . . . . . . . . . . . . . . . . 84

Table of Contents


Chapter 6 RS-485 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 876.1 Preparing to operate the RS-485 module . . . . . . . . . . . . . . . 876.2 Module front and back panels . . . . . . . . . . . . . . . . . . . . . . . 886.3 Operational tasks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 896.4 Error responses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 896.5 Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 896.6 RS-485 physical layer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 906.7 Data timing and response . . . . . . . . . . . . . . . . . . . . . . . . . . 916.8 RS-485 commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92

Command structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92Symbols used in this manual . . . . . . . . . . . . . . . . . . . . . . . . 92

6.9 RS-485 command set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93

Chapter 7 Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1117.1 Customer service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 111

Damage requiring service . . . . . . . . . . . . . . . . . . . . . . . . . . 1117.2 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 112

Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 112Symptoms, causes, and solutions . . . . . . . . . . . . . . . . . . . . 113

7.3 RS-485 error responses . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1147.4 DeviceNet error codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116

Using polled I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116Using explicit messages . . . . . . . . . . . . . . . . . . . . . . . . . . . 117

7.5 Convectron gauge test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1177.6 Convectron gauge removal and replacement . . . . . . . . . . . 118

Removing the Convectron gauge . . . . . . . . . . . . . . . . . . . . 118Replacing the Convectron gauge . . . . . . . . . . . . . . . . . . . . . 119

7.7 Returning a damaged module . . . . . . . . . . . . . . . . . . . . . . . 120

Appendix A Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121

Appendix B Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 129B.1 Piezo resistive diaphragm sensor . . . . . . . . . . . . . . . . . . . . . 129B.2 Convectron heat-loss Pirani gauge . . . . . . . . . . . . . . . . . . . 130B.3 Wheatstone bridge circuit description . . . . . . . . . . . . . . . . . 130

Appendix C Messaging Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133

Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 145

Table of Contents



Before You BeginInstallation

Operation OverviewAnalog Operation

RS-485 OperationDeviceNet Operation

Chapter 1 Before You Begin

1.1 About these instructions These instructions explain how to install, operate, and maintain the Granville-Phillips® Convectron® ATM vacuum gauge module.

• This chapter explains caution and warning statements, which must be adhered to at all times; explains your responsibility for reading and following all instructions; defines the terms that are used throughout this instruction manual; and tells you how to contact customer service.

• Chapter 2 explains how to install the module.

• Chapter 3 is an operational overview of the module.

• Chapter 4 explains how to operate the analog version of the module, which has two programmable setpoint relays.

• Chapter 5 explains how to operate the DeviceNet® version of the module, which has four programmable setpoint relays.

• Chapter 6 explains how to operate the RS-485 version of the module, which has four programmable setpoint relays.

• Chapter 7 explains troubleshooting; Convectron gauge testing, removal and replacement; and module return procedures.

• Appendix A provides specifications for the module.

• Appendix B explains terminology and explains how the Convectron convection-enhanced Pirani heat-loss gauge and Piezo resistive diaphragm sensor measure pressure.

• Appendix C summarizes DeviceNet polled I/O and explicit messages.

1.2 Caution and warning statements

This manual contains caution and warning statements with which you must comply to prevent inaccurate measurement, property damage, or personal injury.

CAUTIONCaution statements alert you to hazards or unsafe practices that could result in minor personal injury or property damage.Each caution statement explains what you must do to prevent or avoid the potential result of the specified hazard or unsafe practice.

Chapter 1


Caution and warning statements comply with American Institute of Standards Z535.1-2002 through Z535.5-2002, which set forth voluntary practices regarding the content and appearance of safety signs, symbols, and labels.

Each caution or warning statement explains:

a. The specific hazard that you must prevent or unsafe practice that you must avoid,

b. The potential result of your failure to prevent the specified hazard or avoid the unsafe practice, and

c. What you must do to prevent the specified hazardous result.

1.3 Reading and following instructions

You must comply with all instructions while you are installing, operating, or maintaining the module. Failure to comply with the instructions violates standards of design, manufacture, and intended use of the module. Brooks Automation, Inc./Granville-Phillips disclaim all liability for the customer's failure to comply with the instructions.

• Read instructions – Read all instructions before installing or operating the product.

• Retain instructions – Retain the instructions for future reference.

• Follow instructions – Follow all installation, operating and maintenance instructions.

• Heed warnings and cautions – Adhere to all warnings and caution statements on the product and in these instructions.

• Parts and accessories – Install only those replacement parts and accessories that are recommended by Brooks Automation, Inc./Granville-Phillips. Substitution of parts is hazardous.

WARNINGWarning statements alert you to hazards or unsafe practices that could result in severe personal injury or death due to electrical shock, fire, or explosion.

Each warning statement explains what you must do to prevent or avoid the potential result of the specified hazard or unsafe practice.

Before You Begin





1.4 Definitions of terms Table 1-1 lists terms used throughout this manual in reference to the Convectron ATM vacuum gauge module.

Table 1-2 lists terms describing DeviceNet protocol.

Table 1-3 lists terms describing DeviceNet data types.

Table 1-1 Terms describing Convectron ATM module and components

Term Description

Module The Convectron ATM vacuum gauge module, which contains a Convectron convection-enhanced Pirani heat-loss pressure gauge and a Piezo resistive diaphragm pressure sensor and electronics.

Electronics assembly An assembly that contains the electronic circuitry, signal processing microcircuitry, and differential pressure sensor.

Convectron gauge The Convectron convection-enhanced Pirani heat-loss gauge, which measures pressure within the vacuum chamber.

Differential pressure sensor The Piezo resistive diaphragm sensor, which measures the pressure differential between atmospheric and vacuum pressures.

Vacuum pressure The pressure of the process gas inside the vacuum chamber, measured by the Convectron gauge.

Atmospheric pressure The ambient air pressure of the atmosphere outside the module, measured by the differential pressure sensor.

Differential pressure The difference between atmospheric pressure and vacuum pressure. Differential pressure zero is the pressure value at which vacuum pressure equals atmospheric pressure.

Chapter 1


Table 1-2 Terms describing DeviceNet protocol

Term Description

Class Referred to in DeviceNet language as an “object”. The DeviceNet protocol is divided into various objects that describe behaviors, attributes, or information. For example, class 1 is the identity object that includes information about the identity of the product, such as the vendor identification, product type, product ID, serial number, and firmware revisions.

Instance Within a class there may be multiple instances. Within the Convectron ATM module there are four possible I/O instances (1–4). For example, the format for polled I/O data is instance 2 in class 5.

Attribute Data that can be read from the device or written to the DeviceNet network. Attributes exist for each instance within a class. For example, the serial number is attribute 6, instance 1 in class 1 (the identity object).

Master data The messages sent from the network to the device to set conditions or values in the device.

Device data The messages sent from the Convectron ATM module to the network to communicate values, attributes, or other information.

Data rate The rate at which data is transmitted (125, 250, or 500 kbaud, switch selectable).

Explicit messages Messages that are used for request/response communications enabling module configuration and problem diagnosis. Explicit messages provide multi-purpose, point-to-point communication paths between two modules or other devices.

Polled I/O messages Messages that are used for time-critical, control-oriented data. Polled I/O messages provide a dedicated, special-purpose communication path between a producing application (host) and one or more consuming applications (modules or other devices).

Address The address of a device on the DeviceNet network.

Before You Begin





1.5 Customer service For customer service:

• Phone 1-303-652-4400 or 1-800-776-6543 within the USA.

• Phone 1-800-367-4887 24 hours per day, 7 days per week within the USA.

• Email [email protected]

• For Global Customer Support, go to www.brooks.com, click on Contact Us, then click on Global Offices to locate the Brooks Automation office nearest you.

Table 1-3 Terms describing DeviceNet data types

Term Description

Data type The form of the data communicated from the Convectron ATM module or another node on the network. The module supports BOOL, BYTE, STRUCT, SSTRING, REAL, INT, UINT, USINT, EPATH, and WORD data types.

BOOL data A single ON/OFF bit, where 1 = ON (true), 0 = OFF (false).

BYTE data An 8-bit string, from most significant to least significant bit.

STRUCT data A string of bits, each of which can be set to ON (true) = 1 or OFF (false) = 0.

SSTRING data A character string, one byte per character, with one byte length indicator.

REAL data A 32-bit floating point value in single precision IEEE 754 format.

INT data A 2-byte (16-bit) integer value from –32767 to +32767.

UINT data A 16-bit unsigned integer value from 0 to 65535.

USINT data An 8-bit unsigned integer value from 0 to 255.

EPATH DeviceNet path segments requiring abstract syntax encoding.

WORD data A 16-bit string.





Chapter 2 Installation

2.1 Module components The Convectron ATM module contains a Convectron convection-enhanced Pirani heat-loss gauge, a Piezo resistive diaphragm sensor, and electronics.

The analog and RS-485 modules are shipped with an instrument screwdriver and a 15-pin female, high-density subminiature D connector that mates to the male connector on the module.

2.2 Installation procedure The module installation procedure includes the following steps:

1. Installing appropriate pressure relief devices in the vacuum system.

2. Locating and orienting the module.

3. Attaching the module vacuum chamber fitting to its mate on the vacuum chamber.

4. Assembling and connecting module wiring.

5. Configuring the setpoint relays to the desired voltage levels (analog version) or digital pressure values (DeviceNet and RS-485 versions).

6. Calibrating the Convectron gauge at atmospheric and vacuum pressures.

This chapter also explains what to do if radio frequency interference (RFI) disrupts operation of the RS-485 version of the module.

WARNINGUsing the module to measure the pressure of flammable or explosive gases can cause a fire or explosion resulting in severe property damage, personal injury, or death.

Do not use the module to measure the pressure of flammable or explosive gases.

WARNINGFailure to use accurate pressure conversion data for N2 or air to other gases can cause an explosion due to overpressurization.

If the module will measure any gas other than N2 or air, before putting the module into operation, adjust relays for the process gas that will be used.

Chapter 2


Step 1 Install pressure relief devices

Before you install the module, install appropriate pressure relief devices in the vacuum system.

Brooks Automation/Granville-Phillips does not supply pressure relief valves or rupture disks. Suppliers of pressure relief valves and rupture disks are listed in the Thomas Register under “Valves, Relief” and “Discs, Rupture.”

Step 2 Locate and orient the module

To locate and orient the module, refer to Figure 2-1 on page 17 and follow the instructions below.

Locate the module • For greatest accuracy and repeatability, locate the module in a stable, room-temperature environment. Ambient temperature should never exceed 40 °C (104 °F) operating, non-condensing, or 85 °C (185 °F) non-operating.

• Locate the module away from internal and external heat sources and in an area where ambient temperature remains reasonably constant.

• Do not locate the module where it requires long lengths of tubing or has constricted tubing. Length of tubing depends on the application. Longer lengths will affect vacuum pressure limit and response time.

• Do not locate the module near the pump, where gauge pressure might be lower than normal vacuum pressure.

• Do not locate the module near a gas inlet or other source of contamination, where inflow of gas or particulates causes atmospheric pressure to be higher than system atmosphere.

• Do not locate the module where it will be exposed to corrosive gases such as mercury vapor or fluorine.

• Do not locate the module where it will vibrate. Vibration causes convection cooling, resulting in inaccurate high pressure readings.

CAUTIONOperating the module above 1000 Torr (1333 mbar, 133 kPa) true pressure could cause pressure measurement error or product failure.To avoid measurement error or product failure due to overpressurization, install pressure relief valves or rupture disks in the system if pressure exceeds 1000 Torr (1333 mbar, 133 kPa).

Installation





Orient the module For proper operation of the module above 1 Torr (1.33 mbar, 133 pascal), orient the module so the axis is horizontal (see Figure 2-1). Although the Convectron gauge will read correctly below 1 Torr (1.33 mbar, 133 pascal) with the module mounted in any position, inaccurate readings will result at pressures above 1 Torr (1.33 mbar, 133 pascal) if the module axis is not horizontal.

Figure 2-1 Module orientation

Mount module axis horizontally to ensure accurate measurement above 1 Torr (1.33 mbar, 133 pascal)

Vacuum chamber

Vacuum chamber

Vacuum

chamber

Vacuum

chamber

Vacuum cham

ber

Vacuum

Vac

uum

Recommended Not recommended

Chapter 2


Step 3 Attach module to vacuum chamber

Attach the module vacuum chamber fitting to its mate on the vacuum chamber.

1/8 NPT pipe thread The 1/8 NPT pipe thread accommodates a standard 1/8 NPT female fitting.

a. Wrap the threads of the port to the vacuum chamber with Teflon® tape.

b. Without using a wrench or other tool, tighten the module just enough to achieve a seal.

VCR type fitting VCR-type fitting

a. Remove the plastic or metal bead protector cap from the fitting.

b. If a gasket is used, place the gasket into the female nut.

c. Assemble the components and tighten them to finger-tight.

d. While holding a back-up wrench stationary, tighten the female nut 1/8 turn past finger-tight on 316 stainless steel or nickel gaskets, or 1/4 turn past finger-tight on copper or aluminum gaskets.

KF flange The KF mounting system requires O-rings and centering rings between mating flanges.

a. Tighten the clamp wing nut to compress the mating flanges together.

b. Seal the O-ring.

ConFlat flange To minimize the possibility of leaks with ConFlat flanges, use high strength stainless steel bolts and a new, clean OFHC copper gasket. Avoid scratching the seal surfaces. To avoid contamination, install metal gaskets.

a. Finger tighten all bolts.

b. Use a wrench to continue tightening 1/8 turn at a time in crisscross order (1, 4, 2, 5, 3, 6) until flange faces make contact.

c. Further tighten each bolt about 1/16 turn.

Installation





Step 4 Assemble and connect the wiring

CE Mark compliance For CE mark compliance, use the following cable types (or equivalent):

Analog, RS-485, or DeviceNet module setpoint connectorInstall shielded cable with aluminum jacket.

On the module end of the cable, install a metal housing, so the shield is continuous from the cable to the gauge housing. Do not ground the shield at the receiver or output device.

Acceptable raw cable parts:

• Belden cable 9541.

• Alpha cable 6307.

Acceptable connectors:

• Tyco series ADK for standard 15-pin subminiature-D connectors.

• Norcomp type 979-015-030-121.

DeviceNet module I/O connectorFor the DeviceNet module, install cable that has aluminum foil-shielded signal and power wires.

Acceptable cable is DeviceNet shielded cable type 572 from Turck.

Module power supply On analog or RS-485 versions of the module, connect the 11.5 to 26.5 Vdc power supply to terminals 3 and 4.

• Terminal 4 (ground) is negative (–).

• Terminal 3 (input) is positive (+).

Power inputs are reverse-bias protected.

For grounding instructions, see page 22.

DeviceNet wiring The module has a DeviceNet 5-pin micro connector for interfacing through the customer supplied DeviceNet network cable. See Figure 2-2. The DeviceNet connection is a standard 5-pin DeviceNet receptacle that accepts a standard micro 5-pin female cable connection.

The module will use terminals 2 (Vdc return) and 3 (24 Vdc) on the 5-pin DeviceNet micro connector for the network power supply.

• The DeviceNet interface requires 24 Vdc (11 to 26.4) at 0.2 A maximum.

• Maximum inrush current is 0.25 A.

• Power inputs are reverse-bias protected.

Chapter 2


Figure 2-2 DeviceNet 5-pin micro connector

Output and relay wiring • Figure 2-3 illustrates the D subminiature terminals for the analog version of the module.

• Figure 2-4 illustrates the D subminiature terminals for the DeviceNet version of the module.

• Figure 2-5 illustrates the D subminiature terminals for the RS-485 version of the module.

Figure 2-3 Analog male I/O connector on module end panel

CAN_H 4

Shield 1

3 (–) Vdc return

2 (+) 24 Vdc

5 CAN_L

Vacuum pressure analog output 5

Power ground 4

11–26 V power input 3

Setpoint 2 adjust 2

Setpoint 1 adjust 1

15 Relay 1 common

14 Relay 1 normally closed


12 Relay 2 common

11 Relay 2 normally open

10Relay 1 normally open

9 No connection

8 No connection

7 Differential pressure analog output

6 Signal ground

Installation





Figure 2-4 DeviceNet male I/O connector on module end panel

Figure 2-5 RS-485 male I/O connector on module end panel

No connection 5

No connection 4

No connection 3

No connection 2

No connection 1

15 Relay 1 common

14 Relay 4 common

13 No connection

12 Relay 2 common




8 No connection

7 Relay 3 common


No connection 5

Power ground 4


RS-485 B line 2

RS-485 A line 1

15 Relay 1 common

14 Relay 4 common

13 No connection

12 Relay 2 common




8 RS-485 ground

7 Relay 3 common


Chapter 2


Grounding

Chassis groundIf the fitting allows continuous metal-to-metal contact between the housing base and the vacuum chamber, the module is properly grounded via the fitting. If the fitting requires a rubber gasket, rubber O-ring, Teflon tape, or other material that prevents metal-to-metal contact between the housing base and the vacuum chamber, refer to Figure 2-6 and follow these instructions to ground the module to the vacuum chamber:

a. Attach a metal hose clamp or other metal clamp to the gauge stem of the housing.

b. Install a 3.31 mm2 (12 AWG) or larger copper wire between the clamp and a metal ground lug, bolt, or stud on the vacuum chamber.

Figure 2-6 Ground connection to vacuum chamber

WARNINGImproper grounding could cause product failure, serious personal injury, or death.

To reduce the risk of product failure, serious personal injury, or death, follow ground network requirements for the facility.

• Maintain all exposed conductors at earth ground.

• Ground the module housing to the vacuum chamber as instructed below.

• Make sure the vacuum port to which the module is mounted is properly grounded.

Metal hose clamp or other metal clamp

3.00 mm2 (12 AWG) or larger ground wire

FittingVacuum chamber

Ground lug, bolt, or stud

Gauge stem

Installation





DeviceNet groundThe DeviceNet module contains two separate and isolated grounds: the DeviceNet ground, and the chassis ground.

• Typical isolation between DeviceNet and chassis grounds is 1 mΩ, up to 500 Vdc, if the DeviceNet drain is grounded.

• Above 500 Vdc the isolation approaches 0 Ω.

The DeviceNet wiring will be properly grounded via the DeviceNet 5-pin micro connector.

Step 5 Configure setpoint relays for the application

• To configure setpoint relays for the analog version of the module, see pages 41–45.

• To configure setpoint relays for the DeviceNet version of the module, see pages 72–77.

• To configure setpoint relays for the RS-485 version of the module, see pages 95–100.

If the module will measure the pressure of a gas other than N2 or air, you must adjust relay setpoints for the process gas. The true pressure of a gas other than N2 or air may be substantially different from the pressure that the output indicates. For example, outputs might indicate a pressure of 10 Torr (13.3 mbar, 1.33 kPa) for argon, although the true pressure of the argon is 250 Torr (333 mbar, 33.3 kPa). Such a substantial difference between indicated pressure and true pressure can cause overpressurization resulting in an explosion.


If the module will measure any gas other than N2 or air, before connecting relays to system control devices, adjust setpoints for the process gas that will be used.

Chapter 2


Step 6 Calibrate the Convectron gauge

Calibration improves the accuracy and repeatability of the Convectron gauge.

• To calibrate the Convectron gauge for the analog version of the module, see pages 48–50.

• To calibrate the Convectron gauge for the DeviceNet version of the module, see pages 80–82.

• To calibrate the Convectron gauge for the RS-485 version of the module, see pages 107–108.

Atmospheric pressure calibration

An atmospheric calibration is performed on the Convectron gauge, using N2, at the factory before the module is shipped. The factory calibration sets the atmospheric calibration point to 760 Torr (1013 mbar, 101.3 kPa) of N2.

Because performance varies depending on the process gas, you may wish to reset the atmospheric calibration point if a gas other than N2 or air is being used. Periodic resets of the atmospheric calibration point also improve the accuracy and repeatability of the Convectron gauge near atmospheric pressure, even if the process gas is N2 or air.

Vacuum pressure calibration

Periodic resets of the vacuum pressure calibration point improve the accuracy and repeatability of the Convectron gauge.

2.3 Eliminating radio frequency interference

The module has been tested and found to comply with U.S. Federal Communications Commission (FCC) limits for a Class A digital device, pursuant to Part 15 of the FCC rules. These limits provide reasonable protection against harmful interference when the module operates in a commercial environment.

The RS-485 and DeviceNet versions of the module can radiate radio frequency energy and, if not installed and used in accordance with the instructions in this manual, may cause harmful interference to radio and television communications. However, there is no guarantee that interference will not occur in a particular installation. If operating the module in a residential area causes interference, the customer will be required to eliminate the interference at the customer’s own expense. If the module causes interference to radio or television reception, which can be determined by turning the module OFF and ON, use one of the following methods to eliminate the interference:

• Reorient or relocate the receiving antenna.

• Increase the separation between the module and the receiver.

• Connect the module into an outlet on a circuit that is not the circuit to which the receiver is connected.

• Consult an experienced radio or television technician for help.





Chapter 3 Operation Overview

3.1 Analog, DeviceNet, and RS-485 outputs and relays

The module has two analog outputs, one RS-485 output, or one DeviceNet output. The module with analog outputs has two trip point relays. The module with an RS-485 output or DeviceNet output has four trip point relays.

3.2 Analog operation Table 3-1 lists tasks that may be performed using the analog outputs. One output represents vacuum pressure, and the other output represents differential pressure.

Table 3-1 Tasks and page references for analog module operation

Task Instructions

Read vacuum pressure analog output Page 32

Read differential pressure analog output Page 40

Program relay setpoints Page 41

Set relay activation direction Page 42

Read activation or deactivation status of relays Page 47

Calibrate Convectron gauge at vacuum pressure Page 48

Calibrate Convectron gauge at atmospheric pressure Page 49

Calibrate differential pressure sensor zero Page 50

Reset parameters to factory defaults Page 51

Chapter 3


3.3 DeviceNet operation • Table 3-2 lists tasks that may be performed using DeviceNet polled I/O.

• Table 3-3 lists tasks that may be performed using DeviceNet explicit messages.

• For a complete list of DeviceNet messages used by the module, see Appendix C.

Table 3-2 Tasks and page references for DeviceNet polled I/O

Task Instructions:

Read vacuum pressure Page 65

Read differential pressure Page 65

Table 3-3 Tasks and page references for DeviceNet explicit messages

Task Instructions:

Configure DeviceNet communications Page 60

Set or get pressure unit Page 64

Get vacuum pressure Page 65

Get differential pressure Page 65

Set relay setpoints Page 72

Set relay activation direction Page 72

Set relay hysteresis Page 72

Set relay assignments Page 72

Set disabled/enabled state of relays Page 72

Get relay trip points Page 78

Get disabled/enabled state of relays Page 78

Get activation or deactivation status of relays Page 79

Get relay hysteresis Page 79

Get relay assignments Page 80

Calibrate Convectron gauge at atmospheric pressure Page 80

Calibrate Convectron gauge at vacuum pressure Page 81

Calibrate differential pressure zero Page 82

Get firmware version for module Page 82

Get status alarms and warnings Page 83

Operation Overview





3.4 RS-485 operation Table 3-4 lists tasks that may be performed using the RS-485 output.

Table 3-4 Tasks and page references for RS-485 module operation

Command Task Instructions:

SB Set baud rate Page 94

SP Set parity Page 94

PC Set or relay setpoints and activation direction Page 95

PCG Set relay assignments Page 100

PCO Disable an operable relay Page 100

RPG Read relay assignments Page 101

RPCS Read activation or deactivation status of relays Page 101

SU Set pressure unit Page 101

RU Read pressure unit Page 101

RD Read vacuum pressure Page 102

RDD Read differential pressure Page 106

SD Set optional display for vacuum pressure or differential pressure page 106

TS Calibrate Convectron gauge at atmospheric pressure Page 107

TZ Calibrate Convectron gauge at vacuum pressure Page 107

TO Calibrate differential pressure sensor zero Page 108

VER Read firmware version for module Page 108

FAC Reset parameters to factory defaults Page 109





Chapter 4 Analog Operation

4.1 Preparing to operate the analog module

This chapter explains how to operate the Convectron ATM module with non-linear analog outputs.

Before putting the module into operation, you must perform the following procedures:

1. Install the module in accordance with the instructions on pages 15-24.

2. Develop a logic diagram of the process control function.

3. Use Table 4-1 to record the proposed setpoint in volts and corresponding pressure setting in Torr for each relay.

• Relay 1 activates with decreasing vacuum chamber pressure

• Relay 2 activates with increasing differential pressure.

4. Draw a circuit schematic that specifies exactly how each piece of system hardware will connect to the module relays.

5. Attach a copy of the process control circuit diagram to this manual for future reference and troubleshooting.

6. If the module will measure the pressure of a gas other than N2 or air, you must adjust the relay 1 setpoint for the process gas that will be used. See pages 41–45.

If you need application assistance, phone a Brooks Automation, Inc./ Granville-Phillips application engineer at 1-303-652-4400 or 1-800-776-6543 within the USA, or mail [email protected].

Once the module is operating, you may use the module front panel and the jumpers inside the module to perform the tasks listed in Table 3-1 on page 25.



Table 4-1 Relay setpoint voltage and corresponding pressure

Relay Setpoint (V) Pressure corresponding to setpoint (Torr)

Relay 1

Relay 2

Chapter 4


4.2 Module front panel • Figure 4-1 illustrates the analog version front panel.

• Table 4-2 lists features of the front panel.

Figure 4-1 Analog version front panel

Test pointsSetpointpotentiometers

DIAPHRAGM ATM ZEROADJUST potentiometer

CONVECTRONpotentiometers

Setpoint indicators

Power ON indicator

Analog Operation





Table 4-2 Front panel features

Feature Description Measure at: Set to:

CONVECTRON ATM ADJUST potentiometer

Enables Convectron gauge calibration at atmospheric pressure

CONVECTRON ANALOG and COMMON test points

5.534 V at760 Torr (1013 mbar, 101.3 kPa) of N2

CONVECTRON VAC ADJUST potentiometer

Enables Convectron gauge calibration at vacuum pressure

CONVECTRON ANALOG and COMMON test points

0.375 V at 1 x 10–4 Torr (1.33 x 10–4 mbar, 1.33 x 10–2 pascal) of N2

DIAPHRAGM ATM ZERO adjust potentiometer

Enables calibration of differential pressure sensor zero

DIAPHRAGM ZERO and COMMON test points

4.000 V

SP1 ADJ potentiometer Enables setting of vacuum pressure at which relay 1 activates and deactivates

SETPOINT1 and COMMON test points

Application specific

SP2 ADJ potentiometer Enables setting of differential pressure at which relay 2 activates and deactivates

SETPOINT2 and COMMON test points


Test points Enable checking of values for:• Setpoint 1 voltage• Setpoint 2 voltage• Convectron gauge calibration at

atmospheric pressure• Convectron gauge calibration at

vacuum pressure• Differential pressure sensor zero

calibration

See cells above in this column


Setpoint indicators • SETPOINT1 is green when relay 1 is activated

• SETPOINT2 is green when relay 2 is activated

Not applicable (used for monitoring relays)

Not applicable

Power ON indicator Is green when module power supply is ON

Not applicable (used for monitoring module power supply)

Not applicable

Chapter 4


4.3 Reading the vacuum pressure analog output

The module contains a convection-enhanced Pirani thermal conductivity gauge. The gauge measures the heat loss from a heated, gold-plated tungsten sensing wire that is maintained at a constant temperature.

The vacuum pressure indicated by the gauge depends on the gas type, gas density (pressure), and the module orientation. The module is factory calibrated for N2. (Air has approximately the same calibration.) For gases other than N2 or air, heat loss varies at any given pressure, and you must apply an appropriate correction factor.

N2 or air Refer to Table 4-3 on page 33 to calculate pressure in Torr (y) as a function of output voltage (x). Figure 4-2 and Figure 4-3 on pages 34–35 are graphs that represent true pressure for N2 or air (y axis) versus voltage (x axis).

• Output impedance is 100 Ω.

• The output is normalized to 0.375 Vdc at vacuum pressure and to 5.659 Vdc at 1000 Torr (1333 mbar, 133.3 kPa) for N2 or air.

Commonly used gases other than N2 or air

Refer to Table 4-4 on page 36 for pressure versus output voltage for 10 commonly used process gases other than N2 or air.

Refer to Figure 4-4, Figure 4-5, or Figure 4-6 on pages 37–39 to determine true pressure versus indicated pressure for the gas that is being used.

Other gases If the gas being used is not included in Table 4-4, or for a gas mixture, you will need to generate a calibration curve using a gas-independent transfer standard such as a capacitance manometer.

Analog Operation





Table 4-3 Equations for calculating N2 or air pressure versus analog output voltage

• To convert Torr to mbar, multiply “y” by 1.333• To convert Torr to pascal, multiply “y” by 133.3

Segment Output voltage Equation where y = pressure in Torr and x = voltage Coefficients

1 0.375 to 2.842 V a –0.02585

b 0.03767

c 0.04563

d 0.1151

e –0.04158

f 0.008737

2 2.842 to 4.945 Va 0.1031

b –0.3986

c –0.02322

d 0.07438

e 0.07229

f –0.006866

3 4.94 to 5.659 Va 100.624

b –0.37679

c –20.5623

d 0.0348656

y a bx cx2 dx3 ex4 fx5+ + + + +=

y a cx ex2+ +

1 bx dx2 fx3+ + +---------------------------------------------=

y a cx+

1 bx dx2+ +-------------------------------=

Chapter 4


Figure 4-2 Analog output voltage vs. indicated N2 or air pressure, 1 mTorr to 100 mTorr

0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.01

2

5

10

20

50

100

Analog Output - VDC

Pres

sure

in m

Torr

for N

2 or

air

Analog Operation





Figure 4-3 Analog output voltage vs. indicated N2 or air pressure, 100 mTorr to 1000 Torr

0 1.0 2.0 3.0 4.0 5.0 6.0 7.0100

200

500

1

2

5

10

20

50

100

200

500

1000

Analog Output - VDC

Pres

sure

in m

Torr

and

Tor

r for

N2 or

air

mTo

rrTo

rr

Chapter 4


Table 4-4 Voltages (VDC) for commonly used gases, 0.1 mTorr to 1000 TorrC

H4

.375

.376

6.3

780

.382

5.3

896

.403

.438

.492

.584

.796

1.05

31.

392

2.01

42.

632

3.31

3 –4.

699

5/17

25.

583

5.72

05.

860 –

6.10

3 –6.

342 – –

6.51

9 –6.

642

Ne

.375

.375

7.3

763

.378

2.3

81.3

88.4

05.4

33.4

84.6

08.7

681.

002

1.46

91.

976

2.63

13.

715

4.60

55.

406

6.15

96.

483

6.66

16.

726

6.76

76.

803

6.84

36.

890

6.92

06.

942

7.00

07.

056

D2

.375

.376

.377

.381

.386

.396

.425

.470

.549

.727

.944

1.26

51.

914

2.60

33.

508

5.05

96.

361 – – – – – – – – – – – – –

Freo

n 22

.375

.376

.378

.381

.388

.400

.432

.480

.566

.764

.990

1.29

11.

805

2.24

72.

666

3.09

03.

330

3.41

43.

509

3.66

03.

883

4.00

54.

088

4.15

14.

203

4.24

74.

271

4.28

64.

321

4.35

4

Freo

n 12

.375

.376

.378

.382

.388

.401

.437

.488

.581

.778

1.00

91.

315

1.82

62.

257

2.64

73.

029

3.20

43.

308

3.43

03.

618

3.82

73.

938

4.01

64.

076

4.12

44.

166

4.19

04.

203

4.23

74.

270

KR

.375

.375

5.3

768

.377

2.3

79.3

84.3

95.4

15.4

51.5

44.6

68.8

471.

194

1.53

61.

921

2.42

92.

734

2.96

63.

075

3.13

43.

269

3.38

43.

466

3.52

63.

573

3.61

33.

632

3.64

53.

674 –

CO

2

.375

.376

.377

.381

.385

.395

.412

.462

.536

.705

.900

1.17

91.

668

2.17

22.

695

3.31

63.

670

3.90

34.

071

4.15

44.

336

4.50

24.

621

4.70

84.

775

4.83

04.

860

4.87

74.

919

4.95

5

O2

.375

.376

.377

.380

.384

.392

.417

.453

.521

.679

.868

1.14

11.

664

2.19

52.

814

3.67

24.

225

4.62

04.

916

5.02

65.

106

5.20

05.

315

5.42

25.

515

5.59

25.

633

5.65

85.

713

5.76

2

Hel

ium

.375

.375

5.3

765

.379

.382

.389

.409

.441

.497

.637

.814

1.06

81.

589

2.16

42.

939

4.38

75.

774

7.31

4 – – – – – – – – – – – –

Arg

on

.375

.375

7.3

76.3

78.3

81.3

87.4

03.4

29.4

77.5

95.7

45.9

621.

386

1.81

82.

333

3.02

83.

480

3.80

14.

037

4.12

24.

192

4.28

34.

386

4.47

74.

550

4.61

14.

643

4.66

34.

706

4.74

5

N2

(air

)

.375

.376

.377

.379

.384

.392

.417

.455

.523

.682

.876

1.15

51.

683

2.21

72.

842

3.67

54.

206

4.57

74.

846

4.94

55.

019

5.11

15.

224

5.32

95.

419

5.49

55.

534

5.55

85.

614

5.65

9

True

pre

ssur

ein

Tor

r/m

Torr

0 .1 m

Torr

.2 m

Torr

.5 m

Torr

1 m

Torr

2 m

Torr

5 m

Torr

10 m

Torr

20 m

Torr

50 m

Torr

100

mTo

rr20

0 m

Torr

500

mTo

rr1

Torr

2 To

rr5

Torr

10 T

orr

20 T

orr

50 T

orr

100

Torr

200

Torr

300

Torr

400

Torr

500

Torr

600

Torr

700

Torr

760

Torr

800

Torr

900

Torr

1000

Tor

r

Analog Operation





Figure 4-4 True pressure versus indicated pressure for commonly used gases, 10–4 to 10–1 Torr

Indicated pressure in Torr(Nitrogen equivalent)

True

pre

ssur

e in

Tor

r

Convectron gauge axismust be horizontalPressure unit equivalents:1 µm Hg = 1 mTorr = 1 x 10–3 Torr1000 µm Hg = 1 Torr1 mbar = 100 pascal

Chapter 4


Figure 4-5 True pressure versus indicated pressure for commonly used gases, 10–1 to 1000 Torr


True

pre

ssur

e in

Tor

r


Analog Operation





Figure 4-6 True pressure versus indicated pressure for commonly used gases, 10–1 to 1000 Torr


True

pre

ssur

e in

Tor

r


Chapter 4


4.4 Reading the differential pressure analog output

The module contains a Piezo resistive diaphragm sensor. The sensor measures differential pressure using a gas-independent diaphragm.

Use the following equation or the data in Figure 4-7 to determine the analog output voltage that corresponds to differential pressure, in Torr:

Figure 4-7 Differential pressure sensor analog output voltage

PDifferentialVOutput 4.00–

0.004------------------------------------=

Analog Operation





4.5 Setpoint relays The module includes two single-pole, double throw (SPDT) relays. Each relay has a programmable setpoint. The setpoint is a voltage level that corresponds to a specified pressure at which the relay activates and deactivates. See Table 4-5.

Relay 1 activates with decreasing vacuum pressure and deactivates at a higher pressure than the activation pressure, as illustrated in Figure 4-8.

Relay 2 activates with increasing differential pressure and deactivates at a lower pressure than the activation pressure, as illustrated in Figure 4-9 on page 42.

Figure 4-8 Setpoint relay 1 behavior

Table 4-5 Setpoint relay activation direction, range, and hysteresis

Relay Assignment Activation direction Range Hysteresis

Setpoint 1 Vacuum pressure Decreasing pressure 1 x 10–4 to 9.99 x 102 Torr1.33 x 10–4 13.3 x 102 mbar1.33 x 10–2 13.3 x 104 pascal

30 mV

Setpoint 2 Differential pressure Increasing pressure –750 to +125 Torr–999 to + 166.6 mbar–99.9 to + 16.6 kPa

8 Torr10.6 mbar1.06 kPa

Deactivate

Activate

Deactivated

ActivatedRelay activated

30mV hysteresis

Time

Vac

uum

pre

ssur

e

Chapter 4


Figure 4-9 Relay 2 behavior

Setpoint 1: Convectron gauge

If the module will measure the pressure of any process gas other than N2 or air, you must adjust setpoint 1 for the process gas that will be used.

The true pressure of a gas other than N2 or air may be substantially different from the pressure that the output indicates. For example, outputs might indicate a pressure of 10 Torr (13.3 mbar, 1.33 kPa) for argon, although the true pressure of the argon is 250 Torr (333 mbar, 33.3 kPa). Such a substantial difference between indicated pressure and true pressure can cause overpressurization resulting in an explosion.

Test points on the module front panel, Table 4-4 on page 36, and Figure 4-11 and Figure 4-12 on pages 44–45 enable you to determine the amount of voltage that corresponds to a specific pressure.

Activate

Deactivate

Deactivated

Activated

Relay activated

8 Torr hysteresis

Time

Diff

eren

tial p

ress

ure



Analog Operation





1. Make sure the module is properly installed, the axis is horizontal (see page 17), and the power supply is ON.

2. Figure 4-11 and Figure 4-12 are graphs that show test point voltage versus pressure for N2 or air. Table 4-4 on page 36 lists test point voltage versus pressure for 12 commonly used process gases, including N2 and air.

If you are using Figure 4-11 or Figure 4-12, find the point at which the horizontal line representing the desired trip point for N2 or air pressure intercepts the vertical line representing test point voltage. For example:

• in Figure 4-11, a test point voltage of 0.64 V represents an N2 or air pressure of 40 mTorr (0.005 mbar, 0.5 pascal).

• In Figure 4-12, a test point voltage of 4.8 V indicates an N2 or air pressure of 40 Torr 53.3 mbar, 5.33 kPa).

If the gas being used is not included in Table 4-4, or for a gas mixture, you will need to generate a calibration curve using a gas-independent transfer standard such as a capacitance manometer.

3. Use a high-precision, high-input impedance (Zin > 1 MΩ) digital voltmeter (DVM) to measure the voltage across the SETPOINT1 and COMMON or SETPOINT2 and COMMON test points on the module front panel. Figure 4-10 illustrates SETPOINT2 and COMMON test points.

4. Use a flat-head instrument screwdriver to adjust the SETPOINT1 potentiometer for the desired setpoint voltage at which relay 1 will activate and deactivate. (See Figure 4-10.)

5. A built-in 30 mV hysteresis prevents oscillation around the setpoint. Hysteresis depends on the vacuum pressure at which the setpoint has been established.

Figure 4-10 Test points and potentiometer for setpoint relay 1

COMMON test pointSETPOINT1 test pointSP1 ADJ potentiometer

Chapter 4


Figure 4-11 Example test point voltage: 0.64 V equals 40 mTorr of N2 or air

0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.01

2

5

10

20

50

100

Test Point Voltage

Pres

sure

in m

Torr

for N

2 or

air

0.64 V

40 mTorr

Analog Operation





Figure 4-12 Example test point voltage: 4.8 V equals 40 Torr of N2 or air

0 1.0 2.0 3.0 4.0 5.0 6.0 7.0100

200

500

1

2

5

10

20

50

100

200

500

1000

Test Point Voltage

Pres

sure

in m

Torr

and

Tor

r for

N2 or

air

mTo

rrTo

rr

40Torr

4.8 V

Chapter 4


Setpoint 2: differential pressure sensor

Refer to Figure 4-13 and use a a high-precision, high-input impedance (Zin > 1 MΩ) DVM to adjust relay 2.

1. Use the following equation or the data in Figure 4-13 to determine the analog output voltage that corresponds to the differential pressure, in Torr, at which relay 2 will activate and deactivate:

Figure 4-13 Setpoint relay 2 (differential pressure sensor) analog voltage

2. Use a high-precision, high-input impedance (Zin > 1 MΩ) DVM to measure the setpoint voltage across the SETPOINT2 and COMMON test points on the module front panel. Figure 4-14 illustrates SETPOINT2 and COMMON test points.

3. Use a flat-head instrument screwdriver to adjust the SETPOINT2 potentiometer for the desired setpoint voltage at which relay 2 will activate and deactivate. (See Figure 4-14.)

A built-in 8 Torr (10.6 mbar, 1.06 kPa) hysteresis prevents oscillation around the setpoint.

Output voltage 4.000 Pdifferential 0.004 V×+=

Analog Operation





Figure 4-14 Test points and potentiometer for setpoint relay 2

4.6 Reading relay status Use the setpoint indicators, illustrated in Figure 4-15, to read activation/deactivation status of relays.

• The ON indicator is green when the module power supply is ON.

• The SETPOINT1 indicator is green when relay 1 is activated.

• The SETPOINT2 indicator is green when relay 2 is activated.

Figure 4-15 Power ON and setpoint indicators

COMMON test pointSETPOINT2 test pointSP2 ADJ potentiometer

Setpoint indicatorsPower ON indicator

Chapter 4


4.7 Calibrating Convectron gauge at atmospheric pressure

An atmospheric pressure calibration is performed on the Convectron gauge, using N2, at the factory before the module is shipped. The factory calibration sets the atmospheric calibration point for N2 to 760 Torr (1013 mbar, 101.3 kPa) of N2.


Regardless of the process gas that is being used, you should always use N2 or air to calibrate the Convectron gauge at atmospheric pressure.

1. Shut off the pump and, using N2 or air, allow the vacuum pressure to increase to the value at which the atmospheric pressure point will be set.

2. Refer to Figure 4-16 and use a high-precision, high-input impedance (Zin > 1 MΩ) DVM to measure the voltage across the CONVECTRON ANALOG and COMMON test points on the module front panel.

3. Use a flat-head instrument screwdriver to adjust the CONVECTRON ADJUST ATM potentiometer to a voltage that corresponds to the atmospheric pressure at your location. Table 4-6 on page 49 lists typical atmospheric pressure at altitude/pressure/voltage relationships.

Figure 4-16 Atmospheric pressure calibration test points and potentiometers

CONVECTRON ADJUSTATM potentiometer

COMMON test point

CONVECTRON ANALOGtest point

Analog Operation





4.8 Calibrating Convectron gauge at vacuum pressure

Periodic resets of the vacuum chamber calibration point improve the accuracy and repeatability of the Convectron gauge.

Regardless of the process gas that is being used, you should always use N2 or air to calibrate the Convectron gauge at vacuum pressure.

1. Turn on the pump and, using N2 or air, allow vacuum pressure to descend to a pressure that is lower than 10–4 Torr.

2. Refer to Figure 4-17 and use a high-precision, high-input impedance (Zin > 1 MΩ) DVM to measure the voltage across the CONVECTRON ANALOG and COMMON test points on the module front panel.

3. Use a flat-head instrument screwdriver to adjust the CONVECTRON ADJUST VAC potentiometer to a reading of 0.375 Vdc.

Table 4-6 Typical atmospheric pressures at altitude/pressure/voltage relationships

Altitude (ft. above sea level)

Pressure of N2 or air

Analog output voltage (VDC)Torr mbar kPa

0 760 1013 101.3 5.534

1000 733 977 97.7 5.513

2000 707 942 94.2 5.493

3000 681 907 90.7 5.473

4000 656 875 87.5 5.454

5000 632 842 84.2 5.435

6000 609 812 81.2 5.417

7000 586 781 78.1 5.399

8000 564 752 75.2 5.382

9000 543 724 72.4 5.366

10,0000 523 697 69.7 5.350

Chapter 4


Figure 4-17 Vacuum pressure calibration test points and potentiometers

4.9 Modules operating below 10–3 Torr

During a fast pumpdown from atmospheric pressure, thermal effects temporarily prevent the module from measuring pressure accurately below 10–3 Torr. After approximately 15 minutes, pressure indications the 10–4 Torr range will be accurate and response will be rapid.

When pressure indication in the 10–4 Torr range has stabilized, a Convectron gauge calibration at vacuum pressure may be performed. The calibration may be performed at a higher pressure if readings in the 10–4 Torr range are not required. In the 10–4 Torr range, resolution is ±0.1 millitorr, if the Convectron gauge has been properly calibrated at vacuum pressure. If the module frequently operates in the 10–4 Torr range, Convectron gauge calibration at vacuum pressure should be performed frequently.

4.10 Calibrating differential pressure sensor zero

The differential pressure sensor is factory calibrated to produce a 4.000 VDC output at zero differential pressure. Any offset in this value may be adjusted in the field.

An offset error is 1 Torr per 4 mV error in the analog output. For example, if output voltage equals 4.040 V, the zero error for the differential pressure sensor is +10 Torr. (Temperature and hysteresis stability is ±0.020 V, or approximately 5 Torr.)

CONVECTRON ADJUSTVAC potentiometer

COMMON test point

CONVECTRON ANALOGtest point

Analog Operation





1. Allow atmospheric and vacuum pressures to achieve the same value. This is a pressure differential of zero, which should be represented by a 4.000 V output across the DIAPHRAGM ZERO and COMMON test points.

2. Refer to Figure 4-18 and use a high-precision, high-input impedance (Zin > 1 MΩ) DVM to measure the voltage across the DIAPHRAGM ZERO and COMMON test points on the module front panel.

3. With the Convectron gauge port exposed to ambient atmospheric pressure, use a flat-head instrument screwdriver to adjust the DIAPHRAGM ZERO ADJUST potentiometer to 4.000 V.

Figure 4-18 Differential pressure sensor zero test points and potentiometers

4.11 Factory settings Table 4-7 lists factory relay setpoint values and activation direction.

COMMON test point

DIAPHRAGM ATM ZEROADJUST potentiometer

DIAPHRAGM ZEROtest point

Table 4-7 Factory settings for relays

Relay Default setting

Relay 1 • Setpoint: Below 0.0 Torr vacuum pressure• State: Deactivated (resets relay 1 to deactivated state)• Returning pressure hysteresis: 30 mV, not programmable• Activation direction: Activates below vacuum pressure setpoint (–), not programmable

Relay 2 • Setpoint: Activates at 0.0 Torr differential between Convectron gauge and atmospheric pressures• State: Deactivated (resets relay 2 to deactivated state)• Returning pressure hysteresis: 8 Torr, not programmable• Activation direction: Activates above differential pressure setpoint (+), not programmable





Chapter 5 DeviceNet Operation

5.1 Preparing to operate the DeviceNet module

This chapter explains how to operate the Convectron ATM module with a DeviceNet digital output.


1. Install the module in accordance with the instructions on pages 15–24.


3. Use Table 5-1 to record the proposed activation and deactivation setpoints, in Torr, and assignments for each relay.

4. Develop a circuit schematic that specifies exactly how each piece of system hardware will connect to the module relays.


6. Set the module communication parameters as instructed on pages 60–63.

7. If the module will measure the pressure of a gas other than N2 or air, you must adjust relay setpoints for the process gas that will be used. See pages 72–76.



Table 5-1 Relay setpoints and assignments

Relay Activation setpoint (Torr) Deactivation setpoint (Torr) Relay assignment

Relay 1 Vacuum pressureDifferential pressure




Chapter 5


If you need application assistance, phone a Brooks Automation, Inc./ Granville-Phillips application engineer at 1-303-652-4400 or 1-800-776-6543 within the USA, or email [email protected].

5.2 Module front and back panels

• Figure 5-1 illustrates the DeviceNet version front panel. The optional LED pressure display can indicate vacuum pressure or differential pressure in ±XX±Y format.

• Figure 5-2 illustrates the DeviceNet version back panel. Use the pressure display toggle switch on the back panel to set the display for vacuum pressure or differential pressure.

• Table 5-2 lists features of the front and back panels.

Figure 5-1 DeviceNet version front panel

Figure 5-2 DeviceNet version back panel

Pressure unit indicators

Optional LEDpressure display(±XX±Y format)

Status indicator indicates module status

Use the pressure display toggle switch to set the optional LED display for or vacuum chamber or differential pressure

MSD (most significant digit) address switch (see page 59)

LSD (least significant digit) address switch (see page 59)

Rate switch (see page 60)

NET status LED indicates if networkhas power or is functioning properly

MOD status LED indicates ifmodule has power or is

functioning properly

DeviceNet Operation





5.3 LED status indicator • Figure 5-3 illustrates the LED status indicator on the front panel. The LED behavior indicates the status of the module.

• Table 5-3 lists states indicated by the LED.

Figure 5-3 LED status indicator

Table 5-2 Front and back panel features

Front panel feature Description

Optional LED pressure display • Pressure range: 1.0 x 10–4 Torr to 9.9 x 102 Torr• Can indicate vacuum pressure measured by Convectron gauge or differential

pressure measured by differential pressure sensor• Pressure value: two significant digits, 1-digit exponent, and + or – sign for the

exponent, in ±XX±Y format• If differential pressure is indicated, + or – sign to left of 2-digit window indicates

positive or negative pressure differential, and + or – sign to left of 1-digit window is for the exponent

• If vacuum pressure is indicated, + or – sign to left of 2-digit window does not illuminate, and + or – sign to left of 1-digit window is for the exponent

Pressure unit indicators Indicate pressure measurement unit (pascal, mBar, or Torr)

Status indicator Indicates status of module

Pressure display toggle switch Toggles optional display to vacuum pressure or differential pressure

Back panel feature Description

Address switches • Used for setting MSD (most significant digit) and LSD (least significant digit) in module address

• Valid addresses are 0 to 63

Rate switch Used for setting data rate (125, 250, or 500 kbaud)

MOD status LED Indicates if module has power or is functioning properly

NET status LED Indicates if network has power or is functioning properly

Status indicator

Chapter 5


5.4 NET and MOD LEDs Figure 5-4 illustrates the LEDs labeled NET and MOD.

• The MOD (module) LED indicates if the module has power or is functioning properly.

• The NET (DeviceNet network) LED indicates if the DeviceNet network has power and is functioning properly.

Table 5-4 and Table 5-5 list states for each LED and the corresponding network or module status.

Figure 5-4 Network and module status LEDs

Table 5-3 LED status indications

LED behavior Indicated condition:

OFF Module power supply is OFF

Solid green Power is ON

Blinking green Electronics may be defective; return module to factory (see page 120)

NET status LED indicates if networkhas power or is functioning properly

MOD status LED indicates ifmodule has power or is

functioning properly

Table 5-4 NET (DeviceNet network) LED status

NET LED state Network status Description

OFF Not powered • The module is not on line• The module has not completed the DUP_MAC_ID test

Blinking green/red Self test Module is in self test

Blinking green On line, not connected The module has passed the DUP_MAC_ID test and is on line, but has not established connection with master node

Solid green On line, connected • The module is allocated to a master• The device is operating normally

DeviceNet Operation





5.5 Performance with DeviceNet protocol

Table 5-6 lists performance characteristics for the Convectron ATM module using DeviceNet protocol.

Blinking red Connection time out All connections have timed out

Solid red Critical link failure The module has detected an error that has made it incapable of communicating on the network

Table 5-4 NET (DeviceNet network) LED status

NET LED state Network status Description

Table 5-5 MOD (module) LED status

MOD LED state Module status Description

OFF Power OFF No power applied to module

Blinking green/red Self test Module is in self test

Solid green Operational Module is operating normally

Solid red Unrecoverable fault Module has detected a fault

Table 5-6 Convectron ATM module performance characteristics with DeviceNet protocol

Network feature Performance

Network size Up to 64 nodes (00 to 63)

Network length End-to-end network distance varies with speed

Baud rate• 125 kbaud• 250 kbaud• 500 kbaud

Distance• 1,640 feet (500 m)• 820 feet (250 m)• 328 feet (100 m)

Bus topology • Linear (trunkline/dropline)• Power and signal on the same network cable

Bus addressing • Master/slave• Polled or change-of-state (exception-based)

System features • Module can be removed and replaced while network power supply is ON• Module can be programmed while network power supply is ON (program

changes will take effect after power has been cycled)

Chapter 5


5.6 DeviceNet protocol for the Convectron ATM module

The Convectron ATM module is based on the Open DeviceNet Vendors Association (ODVA) and S-Analog Sensor Object Class Subclass 01 (Instance Selector) standards. The Convectron ATM module command set includes public and vendor-specific classes, services, and attributes.

DeviceNet communication requires identifier fields for the data. The use of identifier fields provides the means for multiple priority levels, efficient transfer of I/O data, and multiple consumers. As a node in the network, the module produces data on the network with a unique address. All devices on the network that need the data listen for messages. When other devices on the network recognize the module’s unique address, they use the data.

For a complete list of DeviceNet messages used by the module, see Appendix C. The instructions in this chapter explain how to use the module command set to operate the module.

5.7 Operational tasks DeviceNet protocol conveys three types of messages, as defined in Table 5-7.

Once the module is operating, you may use polled I/O or explicit messages to perform the tasks listed in Table 3-2 and Table 3-3 on page 26.

5.8 DeviceNet switches and indicators

The module has address switches for setting the network address and a data rate switch for setting the baud rate.

Table 5-7 DeviceNet message types

Message type Message purpose

Polled I/O messages • Used for time critical, control oriented data• Provide a dedicated, special purpose communication path between a producing

application and one or more consuming applications

Change of state I/O messages • Used for time critical, control oriented data• Data transfer initiated by the producing application• Provide a dedicated, special purpose communication path between a producing

application and one or more consuming applications

Explicit messages • Provide multipurpose, point-to-point communication paths between two devices

• Provide typical request/response oriented network communications used for performing node configuration and problem diagnosis

DeviceNet Operation





Address switches Use the address switches to set the media access control identifier (MAC ID), which the network master uses to address the module. When the device powers up or is reset by the network, the device firmware will read the address switch settings. Figure 5-5 illustrates the address switches.

Specific address values range from 0 to 63.

• Set the switch labeled “MSD,” to a value of 0 to 6 for the most significant (first) digit.

• Set the switch labeled “LSD,” to a value of 0 to 9 for the least significant (second) digit.

If a valid address between 0 and 63 is set, and it differs from the current address stored in non-volatile RAM (NVRAM), the new address will be saved in memory. If the data rate switch is set to the PGM setting, the firmware will use the data rate that is stored in NVRAM.

Upon connection to the DeviceNet network, the module requests a duplicate address check.

• If another device on the network has the same address as the module, the module will not join the network.

• If the address is unique, the module will join the network and the net status indicator will blink green until a connection to the master node is established.

Figure 5-5 Address switches

Valid addresses: 0 to 63• Set most significant digit (MSD) to a value of 0 to 6• Set least significant digit (LSD) to a value of 0 to 9

MSD (most significant digit) address switch

LSD (least significant digit)address switch

Chapter 5


Rate switch Use the rate switch to select the rate at which data is sent and received on the network.

• You may select a data rate of 125 kbaud (setting 1), 250 kbaud (setting 2), or 500 kbaud (setting 5).

• When the device powers up or is reset by the network, the device firmware will read the rate switch setting.

If the selected data rate differs from the value stored in NVRAM, the new data rate will be saved in memory. If the rate switch is set to the P setting, the firmware will use the data rate that is stored in NVRAM.

Figure 5-6 Rate switch

5.9 DeviceNet communication configuration

1. Turn the external power supply OFF.

2. Set the address switches to the desired address (0 to 63). See page 59.

3. Set the data rate switch to the desired setting (125, 250, or 500 kbaud). See page 60.

Valid data rates:• 125 kbaud (setting 1)• 250 kbaud (setting 2)• 500 kbaud (setting 5)

Rate switch

DeviceNet Operation





4. Turn the external power supply ON.

5. Refer to Table 5-8 and Table 5-9 to allocate a connection for the module to the network master. You must set the bit to 1 (polled) or 0 (explicit messages) to perform tasks explained in this chapter.

• Set the bit contents to 1 to enable polled I/O.

• Set the bit contents to 0 to enable explicit messages.

Table 5-8 Network master connection

Service Class Instance Attribute Data type Allocation choice bits

4Bhex 3 1 None STRUCT 0 = Explicit message1 = Polled2 = Bit strobed(a)

3 = Reserved(a)

4 = Change of state(b)

5 = Cyclic(b)

6 = Acknowledge suppression(a)

7 = Connection(a)

(a) Not supported, value = 0.(b) Supported, but value should always = 0 to perform tasks explained in this chapter.

Table 5-9 Network master connections allocation choice bits

Assembly number STRUCT data: One byte format

1 Bit 7Connection

Bit 6Acknowledge suppression

Bit 5Cyclic

Bit 4Change of state

Bit 3Reserved

Bit 2Bit strobed

Bit 1Polled

Bit 0Explicit message

Chapter 5


6. Refer to Table 5-10 to configure the expected packet rate for messages. The expected packet rate is the rate at which the module expects to send data to and receive a packet of data from the network.

• The default expected packet rate for explicit messaging is 2500 msec (2.5 sec.).

• For polled I/O, set the expected packet rate to 0 (none).

• If data will be requested at a rate slower than every 2500 msec, you must change or disable the expected packet rate to prevent the connection from timing out.

7. If the connection allocation bit 1 (polled) is cleared at Step 5 on page 61, refer to Table 5-11 to configure the polled data input format and status byte.

• You may configure the module to send data to the network in unsigned integer (UINT) or floating point data (REAL) formats with or without a status byte and setpoint status byte.

• The default configuration sends pressure in floating point data format with one byte of status data.

Table 5-10 Expected packet rate

Expected packet rate for explicit messaging

Service Class Instance Attribute Master data Data type Description

10hex 5 1 9 data such as09 C4hex (default)

UINT Rate at which module sends data to and receives data from network• Default is 2500 msec (2.5 sec.)• Valid time is ≤ 2500 msec (2.5 sec.)

Expected packet rate for polled I/O


10hex 5 2 9 00 00 UINT Disable expected packet rate

DeviceNet Operation





5.10 Pressure units and values You may use explicit messages to set the pressure unit.

You may use explicit messages or input polled I/O to read values that represent measured pressure. You must calculate measured pressure from the values represented by the explicit message or input polled I/O.

If you get pressure using input polled I/O or from the assembly object using explicit messaging, values are available with or without warning and alarm status or setpoint status.

Table 5-11 Configuring polled input I/O data format

Format Service Class Instance Attribute UINT data

2 bytes UINT vacuum pressure 10hex 4 0 65hex 01

1 BYTE exception status2 bytes UINT vacuum pressure

10hex 4 0 65hex 02

1 BYTE exception status1 BYTE setpoint status2 bytes UINT vacuum pressure

10hex 4 0 65hex 03

4 bytes REAL vacuum pressure 10hex 4 0 65hex 04

Default configuration:1 BYTE exception status4 bytes REAL vacuum pressure

10hex 4 0 65hex 05

2 bytes UINT vacuum pressure2 bytes INT differential pressure

10hex 4 0 65hex 0F

1 BYTE exception status2 bytes UINT vacuum pressure2 bytes INT differential pressure

10hex 4 0 65hex 10

1 BYTE exception status1 BYTE setpoint status2 bytes UINT vacuum pressure2 bytes INT differential pressure

10hex 4 0 65hex 11

4 bytes REAL vacuum pressure4 bytes REAL differential pressure

10hex 4 0 65hex 12

1 BYTE exception status4 bytes REAL vacuum pressure4 bytes REAL differential pressure

10hex 4 0 65hex 13

1 BYTE exception status1 BYTE setpoint status4 bytes REAL vacuum pressure4 bytes REAL differential pressure

10hex 4 0 65hex 14

Chapter 5


Set or get pressure unit Use the explicit messages listed in Table 5-12 to set or get the unit of pressure.

Data conversion Refer to Table 5-13 to convert explicit message or input polled I/O data to meaningful values representing exception status, setpoint status, vacuum pressure, or differential pressure.

Table 5-12 Pressure measurement units

Service Class Instance AttributeTypicaldevice data Data type Description

0Ehex 31hex 1 4 01 03 UINT Get pressure unit for Convectron gauge

10hex 31hex 1 4 01 03 UINT Set pressure unit for Convectron gauge• 769 = Torr• 776 = mbar• 777 = pascal

0Ehex 31hex 2 4 01 03 UINT Get pressure unit for differential pressure

10hex 31hex 2 4 01 03 UINT Set pressure unit for differential pressure• 769 = Torr• 776 = mbar• 777 = pascal

Table 5-13 Converting BYTE, UINT, INT, or REAL data to exception status, setpoint status, or pressure values

Represented value Data type Converting data to exception status, setpoint status, or pressure value

Exception status BYTE 8-bit string, from most significant to least significant bit:• Bit 1 = Alarm• Bit 5 = Warning

Setpoint status BYTE 8-bit string, from most significant to least significant bit:• Bit 0 = Relay 1 is activated• Bit 1 = Relay 2 is activated

Vacuum pressure UINT 16-bit unsigned integer value from 0 to 65535, from integer count:

Differential pressure INT 2-byte (16-bit) integer value from –32767 to +32767, from integer count:

Vacuum pressure or differential pressure

REAL 32-bit floating point value in single precision IEEE 754 format, in pressure unit defined by the user (Torr, mbar, or pascal).

Vacuum pressure 10 Integer counts 2000⁄( ) 12.6249–=

Differential pressure Integer counts10

------------------------------------=

DeviceNet Operation





Get vacuum pressure or differential pressure

The graphs on pages 66–68 enable you to determine the indicated N2 or air pressure that corresponds to a specific true pressure of 10 other commonly used process gases.

Refer to Table 5-14 to find the appropriate graph:

Find the point at which the horizontal line representing true pressure intercepts the vertical line representing indicated N2 (nitrogen equivalent) pressure. For example:

• in Figure 5-7, an indicated N2 or air pressure of 10–2 Torr corresponds to a true He pressure of 1.5 x 10–2 Torr.

• In Figure 5-8, an indicated N2 or air pressure of 20 Torr corresponds to a true Ar pressure of 700 Torr.

• In Figure 5-9, an indicated N2 or air pressure of 6 Torr corresponds to a true Freon 22 pressure of 200 Torr.

If the gas being used is not included among those listed on pages 66–68, or for a gas mixture, you will need to generate a calibration curve using a gas-independent transfer standard such as a capacitance manometer.

Table 5-14 Appropriate graphs and tables for reading pressure

Figure or table number, page Pressure range in Torr Gases

Figure 5-7, page 66 1 mTorr to 100 mTorr All 12 process gases

Figure 5-8, page 67 100 mTorr to 1000 Torr Ar, CO2, CH4, freon 12, He, N2 or air

Figure 5-9, page 68 0.1 mTorr to 1000 Torr D2, freon 22, Kr, Ne, O2, N2 or air

Chapter 5


Figure 5-7 Reading true pressure values, 10–4 to 10–1 Torr

Indicated pressure in Torr (Nitrogen equivalent)

True

pre

ssur

e in

Tor

r

Convectron gauge axismust be horizontalPressure unit equivalents:1 µm Hg = 1 mTorr = 1 x 10–3 Torr1000 µm Hg = 1 Torr1 mbar = 100 Pa

10–2 Torr

1.5 x 10–2 Torr

DeviceNet Operation





Figure 5-8 Reading true pressure values, 10–1 to 1000 TorrTr

ue p

ress

ure

in T

orr


20 Torr


700 Torr

Chapter 5



ue p

ress

ure

in T

orr



6 Torr

200 Torr

DeviceNet Operation





You may use explicit messages or input polled I/O to read values that represent measured pressure. You must calculate measured pressure from the values represented by the explicit message or input polled I/O.

If you get pressure using input polled I/O or from the assembly object using explicit messaging, values are available with or without warning and alarm status or setpoint status.

Using DeviceNet explicit messages:You may read measured pressure in the assembly object, analog sensor object (instance 0), analog sensor object Convectron gauge (instance 1), or analog sensor object differential pressure (instance 3).

• The explicit messages for each object are listed in Table 5-15.

• You must refer to Table 5-13 to convert the BYTE, UINT, STRUCT, or REAL data to meaningful values representing exception status, setpoint status, vacuum pressure, or differential pressure.

Chapter 5


Table 5-15 Explicit messages for measured pressure values

Pressure values are transmitted in low byte to high byte order.Service Class Instance Attribute Typical device data Data type Description

0Ehex 31hex 0 5Ehex 00 00 3E 44hex REAL Get REAL vacuum pressure (760 Torr)

0Ehex 31hex 1 6 00 00 3E 44hex REAL Get REAL vacuum pressure from Convectron gauge (760 Torr)

0Ehex 31hex 2 6 00 00 23 79hex REAL Get REAL differential pressure(–1 Torr)

0Ehex 4 1 3 23 79hex UINT Get UINT vacuum pressure (760 Torr)

0Ehex 4 2 3 0023 79hex

STRUCT Get BYTE exception statusGet UINT vacuum pressure

0Ehex 4 3 3 000023 79hex

STRUCT Get BYTE exception statusGet BYTE setpoint statusGet UINT vacuum pressure

0Ehex 4 4 3 00 00 3E 44hex REAL Get REAL vacuum pressure (760 Torr)

0Ehex 4 5 3 0000 00 3E 44hex

STRUCT Get BYTE exception statusGet REAL vacuum pressure

0Ehex 4 15 3 2379hexF6 FFhex00 00 00 00

UINTINT

Get UINT vacuum pressure (760 Torr)Get INT differential pressure (–1 Torr)Placeholders

0Ehex 4 16 3 002379hexF6 FFhex00 00 00 00

BYTE UINTINT

Get BYTE exception statusGet INT vacuum pressureGet INT differential pressurePlaceholders

0Ehex 4 17 3 00002379hexF6 FFhex00 00 00 00

BYTEBYTEUINTINT

Get BYTE exception statusGet BYTE setpoint statusGet UINT vacuum pressureGet INT differential pressurePlaceholders

0Ehex 4 18 3 00 00 3E 44hex00 00 80 BFhex00 00 00 00 00 00 00 00

REALREAL

Get REAL vacuum pressureGet REAL differential pressurePlaceholders

0Ehex 4 19 3 0000 00 3E 44hex00 00 80 BFhex00 00 00 00 00 00 00 00

BYTEREALREAL

Get BYTE exception statusGet REAL vacuum pressureGet REAL differential pressurePlaceholders

0Ehex 4 20 3 000000 00 3E 44hex00 00 80 BFhex00 00 00 00 00 00 00 00

BYTE BYTE REALREAL

Get BYTE exception statusGet BYTE setpoint statusGet REAL vacuum pressureGet REAL differential pressurePlaceholders

DeviceNet Operation





Using input polled I/O:When a master polls the module for measured pressure, the format of the returned pressure value depends on the data type. See Table 5-16.

• To configure the data format for input polled I/O, see Step 7 on page 62.

• You must refer to Table 5-13 to convert the BYTE, UINT, INT, STRUCT, or REAL data to meaningful values representing exception status, setpoint status, vacuum pressure, or differential pressure.

Table 5-16 Input polled I/O for pressure values

Pressure values are transmitted in low byte to high byte order.Instance Typical device data Data type Description

1 23 79hex UINT UINT vacuum pressure (760 Torr)

2 0023 79hex

STRUCT BYTE exception statusUINT vacuum pressure

3 000023 79hex

STRUCT BYTE exception statusBYTE setpoint statusUINT vacuum pressure

4 00 00 3E 44hex REAL REAL vacuum pressure

5 (default) 0000 00 3E 44hex

STRUCT BYTE exception statusREAL vacuum pressure (760 Torr)

15 2379hexF6 FFhex00 00 00 00

UINTINT

UINT vacuum pressure (760 Torr)INT differential pressure (–1 Torr)Placeholders

16 002379hexF6 FFhex00 00 00 00

BYTEUINTINT

BYTE exception statusUINT vacuum pressureINT differential pressurePlaceholders

17 00002379hexF6 FFhex00 00 00 00

BYTEBYTEUINTINT

BYTE exception statusBYTE setpoint statusUINT vacuum pressureINT differential pressurePlaceholders

18 00 00 3E 44hex00 00 80 BFhex00 00 00 00 00 00 00 00

REALREAL

REAL vacuum pressureREAL differential pressurePlaceholders

19 0000 00 3E 44hex00 00 80 BFhex00 00 00 00 00 00 00 00

BYTEREALREAL

BYTE exception statusREAL vacuum pressureREAL differential pressurePlaceholders

20 000000 00 3E 44hex00 00 80 BFhex00 00 00 00 00 00 00 00

BYTEBYTEREALREAL

BYTE exception statusBYTE setpoint statusREAL vacuum pressureREAL differential pressurePlaceholders

Chapter 5


5.11 Process control relays You may use explicit messages to perform the following tasks:

• Setting or getting relay setpoints

• Setting or getting relay activation direction (polarity)

• Setting or getting relay hysteresis

• Setting or getting relay assignments

• Setting or getting disabled/enabled state of relays

The module includes four single-pole, single throw (SPST) relays. Each relay has programmable activation and deactivation setpoints. The setpoint is a programmable value representing an N2 or air pressure at which the relay activates or deactivates.

• When the module is shipped from the factory, relay setpoints are out of range, disabled, and will not operate.

• You must configure relays to make them operable.

If the module will measure the pressure of any process gas other than N2 or air, you must adjust setpoints for the process gas that will be used.

If the module will measure the pressure of a gas other than N2 or air, you must adjust setpoints for the process gas. The true pressure of a gas other than N2 or air may be substantially different from the pressure that the output indicates. For example, outputs might indicate a pressure of 10 Torr for argon, although the true pressure of the argon is 250 Torr. Such a substantial difference between indicated pressure and true pressure can cause overpressurization resulting in an explosion.



DeviceNet Operation





1. Make sure the module is properly installed and the axis is horizontal. (See page 17.)

2. Figure 5-7, Figure 5-8, and Figure 5-9 on pages 66–68 are graphs that show true pressure versus indicated pressure for 12 commonly used process gases, including N2 and air. Refer to Table 5-17 to find the appropriate graph:

In default mode, relays 1 and 3 are assigned to the Convectron gauge and are set to activate with decreasing vacuum pressure and deactivate at a higher pressure than the activation pressure, as illustrated in Figure 5-10.

In default mode, relays 2 and 4 are assigned to the differential pressure sensor and are set to activate with increasing differential pressure and deactivate at a lower pressure than the activation pressure, as illustrated in Figure 5-11.

Table 5-17 Appropriate true pressure versus indicated pressure graphs

Figure number, page Pressure range in Torr Gases

Figure 5-7, page 66 1 x 10–4 to 1 x 10–1 Torr All 12 common gases

Figure 5-8, page 67 1 x 10–1 to 1 x 1000 Torr Ar, CO2, CH4, Freon 12, He

Figure 5-9, page 68 1 x 10–1 to 1 x 1000 Torr D2, Freon 22, Kr, Ne, O2

Table 5-18 Relay default activation, range, and hysteresis

Relays Assignment Activation direction Range Hysteresis

Setpoints 1 and 3

Vacuum pressure Decreasing pressure • Operating range: 1.0 x 10–4 to 9.99 x 102 Torr

• Default setting is out of range, relay inoperable

Dependent on activation and deactivation pressures

Setpoints 2 and 4

Differential pressure Increasing pressure • Operating range:–750 to +125 Torr



Chapter 5


Figure 5-10 Relay 1 and 3 default behavior


Deactivate

Activate

Deactivated

Activated

Software-defined hysteresis

Time

Vac

uum

pre

ssur

e

Relay activated

Activate

Deactivate

Deactivated

Activated

Relay activated

Time

Diff

eren

tial p

ress

ure


DeviceNet Operation





Table 5-19 lists minimum hysteresis for relays based on the relay assignment.

• If the you assign a relay to vacuum pressure, you may change the deactivation pressure by entering REAL data that represents hysteresis as a percentage of the activation pressure.

• If you assign a relay to differential pressure, you may change deactivation pressure by entering REAL data that represents hysteresis as a differential pressure value.

Use the explicit messages listed in Table 5-20 to configure relays.

Table 5-19 Relay assignments and minimum hysteresis

Relay assignment Hysteresis

Vacuum pressure 5%

Differential pressure 5 Torr6.66 mbar666.6 pascal

Chapter 5


Table 5-20 Relay configuration commands

Relay 1

Service Class Instance Attribute Typical master data Data type Description

10hex 35hex 1 5 BD 37 86 35hex(1 x 10–6)

REAL Set pressure at which relay 1 activates

10hex 35hex 1 6 0 BOOL 1 = Enable relay 10 = Disable relay 1

10hex 35hex 1 8 0 BOOL 0 = Activate with decreasing pressure1 = Activate with increasing pressure

10hex 35hex 1 0Ahex 00 00 70 41hex (15%)

REAL Set hysteresis• Percentage of activation pressure if

relay 1 represents vacuum pressure• Pressure value if relay 1 represents

differential pressure

Service Class Instance Attribute Typical device data Data type Description

10hex 35hex 1 0Ehex 24 01 EPATH Set relay 1 assignment• 24 01= Vacuum pressure• 24 02= Differential pressure

Relay 2


10hex 35hex 2 5 BD 37 86 35hex(1 x 10–6)




10hex 35hex 2 0Ahex 00 00 70 41hex (15%)






DeviceNet Operation





Table 5-20 Relay configuration commands (continued)

Relay 3


10hex 35hex 3 5 BD 37 86 35hex(1 x 10–6)




10hex 35hex 3 0Ahex 00 00 70 41hex (15%)






Relay 4


10hex 35hex 4 5 BD 37 86 35hex(1 x 10–6)




10hex 35hex 4 0Ahex 00 00 70 41hex (15%)






Chapter 5


Get relay setpoints Use the explicit messages listed in Table 5-21 to get the pressure value at which a relay activates.

Get enable/disable status of relays

Use the explicit messages listed in Table 5-22 to get the enabled or disabled status of a relay.

After relays have been made operable, you may use explicit messages to disable any specified relay. If you disable a relay, you must re-enable it to make it operable. You must reconfigure the relay to re-enable it. See pages 72–77.

Table 5-21 Relay setpoints


0Ehex 35hex 1 5 BD 37 86 35hex(1 x 10–6)

REAL Get pressure at which relay 1 activates

0Ehex 35hex 2 5 BD 37 86 35hex(1 x 10–6)


0Ehex 35hex 3 5 BD 37 86 35hex(1 x 10–6)


0Ehex 35hex 4 5 BD 37 86 35hex(1 x 10–6)


Table 5-22 Relay enabled/disabled status


0Ehex 35hex 1 6 0 BOOL 0 = Relay 1 is disabled1 = Relay 1 is enabled




DeviceNet Operation





Get activation or deactivation status of relays

Use the explicit messages listed in Table 5-23 to get the activation or deactivation state of a relay.

Get relay hysteresis Use the explicit messages listed in Table 5-24 to get the hysteresis for a relay.

• The returned value is a percentage of activation pressure if the relay represents vacuum pressure.

• The returned value is a pressure value if the relay represents differential pressure.

Table 5-23 Relay activation/deactivation status


0Ehex 35hex 1 7 0 BOOL 0 = Relay 1 is deactivated1 = Relay 1 is activated




Table 5-24 Relay hysteresis


0Ehex 35hex 1 0Ahex 00 00 70 41hex (15%)

REAL • Percentage of activation pressure if relay 1 represents vacuum pressure

• Pressure value if relay 1 represents differential pressure

0Ehex 35hex 2 0Ahex 00 00 70 41hex (15%)



0Ehex 35hex 3 0Ahex 00 00 70 41hex (15%)



0Ehex 35hex 4 0Ahex 00 00 70 41hex (15%)



Chapter 5


Get relay assignments Use the explicit messages listed in Table 5-25 to get the assignment for a relay.

5.12 Calibrate Convectron gauge at atmospheric pressure

An atmospheric pressure calibration is performed on the Convectron gauge, using N2, at the factory before the module is shipped.


• Regardless of the process gas that is being used, you should always use N2 or air to calibrate the Convectron gauge at atmospheric pressure.

• You must send the command in the pressure unit that has been programmed for the module. See page 64.

1. Shut off the pump and, using N2 or air, allow the vacuum pressure to increase to the atmospheric pressure. Atmospheric pressure must be higher than 400 Torr (5.332 mbar, 533.2 pascal).

2. Use the explicit message listed in Table 5-26 to perform the atmospheric pressure calibration. Set the command bit to 1.

Table 5-25 Relay assignments


0Ehex 35hex 1 0Fhex 00 00 24 00 REAL Get input data from analog sensor object• 24 01 = Relay 1 is assigned to

vacuum pressure• 24 02 = Relay 1 is assigned to











DeviceNet Operation





5.13 Calibrate Convectron gauge at vacuum pressure



Periodic resets of the vacuum chamber calibration point also improve the accuracy and repeatability of the Convectron gauge.

• Regardless of the process gas that is being used, you should always use N2 or air to calibrate the Convectron gauge at vacuum pressure.


• The highest allowable calibration pressure is 1 x 10–1 Torr (1.33 x 10–1 mbar, 133.3 x 10–1 pascal).

1. Turn on the pump and allow the vacuum chamber to decrease to the pressure at which the vacuum pressure point will be set. Pressure must be lower than 1 x 10–1 Torr (1.33 x 10–1 mbar, 133.3 x 10–1 pascal).

2. Use the explicit message listed in Table 5-26 to perform the vacuum pressure calibration. Set the command bit to 0.

Table 5-26 Vacuum pressure or atmospheric pressure calibration command


4Bhex 31hex 1 None None None Calibrate module at vacuum pressure

4Chex 31hex 1 None 00003E44hex Real Calibrate module at atmospheric pressure

Chapter 5


5.14 Calibrate differential pressure sensor zero

Setting the differential pressure sensor zero decreases measurement error of the sensor. Differential pressure sensor zero is the pressure offset error for the sensor when atmospheric and vacuum pressures are equal (the pressure differential is zero).

1. Allow atmospheric and vacuum pressures to achieve the same value. This is a pressure differential of zero.

2. Use the explicit message listed in Table 5-26 to set the differential pressure zero. Set the command bit to 0.

5.15 Reset module to power-up state

Use the explicit message listed in Table 5-28 to reset the module to power-up status.

Resetting the module to power-up status has the same effect as cycling power to the module. Communication is re-enabled two seconds after you’ve sent the explicit message.

5.16 Get firmware version Use the explicit messages listed in Table 5-29 to get the firmware version for the module.

Table 5-27 Differential pressure zero command


4Bhex 31hex 2 None None None Set differential pressure zero

Table 5-28 Reset to power-up state command


05hex 1 1 None 00 USINT Reset module to power-up state

Table 5-29 Firmware version command

Service Class Instance Attribute Device data Data type Description

0Ehex 1 1 4 01 01 None Get firmware version

DeviceNet Operation





5.17 Factory defaults Convectron ATM modules are shipped with the default settings listed in Table 5-30. If options in your application require settings different from the factory defaults listed in Table 5-30, you may change the settings.

• Some settings can be changed only through the DeviceNet interface.

• You may reconfigure options before or after completing the basic setup procedures described in this chapter.

5.18 DeviceNet error codes You may use DeviceNet explicit messages or polled I/O to find out if an alarm or warning has been reported. To select polled I/O or explicit messages, see page 60.

Using polled I/O An alarm or warning is indicated by the status byte in the input assembly, instance 2 or instance 5. An alarm is bit weight 1, and a warning is bit weight 5, as listed in Table 5-31.

Table 5-30 Factory default settings

Parameter Default setting

Digital communication Baud rate: 500 kbaud

Vacuum calibration pressure 1 x 10–4 Torr (1.33 x 10–4 mbar, 1.33 x 10–2 pascal)

Atmospheric calibration pressure 760 Torr (1013 mbar, 1.01 x 105 pascal)

Differential pressure zero 760 Torr (1013 mbar, 1.01 x 105 pascal)

Relay 1 setpoint pressure 0 Torr (0 mbar, 0 pascal)




Relay polarity • 10% hysteresis• Polarity default set for decreasing pressure

Unit of measure As specified by the catalog number:• T = Torr• M = mbar• P = pascal

Table 5-31 Module alarm and warning status for polled I/O

Instance BYTE data: One byte format

2 or 5 Bit 70

Bit 60

Bit 5Warning

Bit 40

Bit 30

Bit 20

Bit 1Alarm

Bit 00

Chapter 5


Using explicit messages Alarms, warnings, and status messages are available from the objects listed in Table 5-32.

For detailed information about alarms, warnings, and status messages, see pages 84–86.

Table 5-32 DeviceNet explicit messages indicating alarms, warning, or status

Object Service Class Instance Attribute

Identity object 0Ehex 1 1 5

Device supervisor object 0Ehex 30hex 1 0Chex

Analog sensor object, instance 1, Convectron gauge 0Ehex 31hex 1 5


Analog sensor object, instance 2, differential pressure 0Ehex 31hex 2 5


Table 5-33 Status and fault information from identity object


0Ehex 1 1 5 00 00 WORD Status and fault information

Troubleshooting status and fault information

Instance Attribute Bit Cause Solution

1 5 0 An object is allocated. No solution necessary.

1 5 2 Device is configured. No solution necessary.

1 5 8 • Convectron gauge cannot be calibrated at atmospheric pressure.

• Convectron gauge cannot be calibrated at vacuum pressure.

• If Convectron gauge cannot be calibrated at atmospheric pressure, make sure vacuum pressure = atmospheric pressure, then recalibrate (see page 80).

• If Convectron gauge cannot be calibrated at vacuum pressure, make sure vacuum pressure ≤ 1 x 10–4 Torr (1.33 x 10–4 mbar, 1.33 x 10–2 pascal), then recalibrate (see page 81).

1 5 11 Convectron gauge or differential pressure sensor is inoperable.

Replace gauge assembly (see page 118).

DeviceNet Operation





Table 5-34 Exception status from device supervisor object


0Ehex 30hex 1 0Chex 0 BYTE Get exception status

Troubleshooting exception status


1 0Chex 1 Convectron gauge or differential pressure sensor is inoperable.

Replace gauge assembly (see page 118).

1 0Chex 5 • Convectron gauge cannot be calibrated at atmospheric pressure.

• Convectron gauge cannot be calibrated at vacuum pressure.

• If Convectron gauge cannot be calibrated at atmospheric pressure, make sure atmospheric pressure > 400 Torr (5.332 mbar, 533.2 pascal), then recalibrate (see page 80).

• If Convectron gauge cannot be calibrated at vacuum pressure, make sure vacuum pressure > 1 x 10–1 Torr (1.33 x 10–1 mbar, 133.3 x 10–1 pascal), then recalibrate (see page 81).

Table 5-35 Reading valid, status, alarm, and warning information from analog sensor object, instance 1, Convectron gauge


0Ehex 31hex 1 5 1 BOOL Get reading valid, 0 or 1

0Ehex 31hex 1 7 0 BYTE Get status, alarm or warning

Troubleshooting reading valid, status, alarm, and warning information


1 5 0 Reading is valid, Convectron gauge is operating normally.

0 = Get status from instance 1, attribute 7.1 = No solution necessary.

1 7 0 Convectron gauge is inoperable. Replace gauge assembly (see page 118).

1 7 1 Convectron gauge is operating normally.

No solution necessary.

1 7 2 Convectron gauge cannot be calibrated at atmospheric pressure.

Make sure atmospheric pressure > 400 Torr (5.332 mbar, 533.2 pascal), then recalibrate (see page 80).

1 7 3 Convectron gauge cannot be calibrated at vacuum pressure.

Make sure vacuum pressure > 1 x 10–1 Torr (1.33 x 10–1 mbar, 133.3 x 10–1 pascal), then recalibrate (see page 81).

Chapter 5


Table 5-36 Reading valid, status, alarm, and warning information from analog sensor object, instance 2, differential pressure


0Ehex 31hex 2 5 1 BOOL Get reading valid, 0 or 1

0Ehex 31hex 2 7 0 BYTE Get status, alarm or warning

Troubleshooting reading valid, status, alarm, and warning information


2 5 0 Reading is valid, differential pressure sensors are operating normally.

No solution necessary.

2 7 0 Differential pressure sensor failure. 0 = No solution necessary.1 = Replace gauge assembly (see page 118).

2 7 2 Convectron gauge cannot be calibrated at atmospheric pressure.

0 = No solution necessary.1 = Make sure vacuum pressure =

atmospheric pressure, then recalibrate (see page 80).

2 7 3 Convectron gauge cannot be calibrated at vacuum pressure.

Make sure vacuum pressure ≤ 1 x 10–4 Torr (1.33 x 10–4 mbar, 1.33 x 10–2 pascal), then recalibrate (see page 81).





Chapter 6 RS-485 Operation

6.1 Preparing to operate the RS-485 module

This chapter explains how to operate the Convectron ATM module with an RS-485 digital output.


1. Install the module in accordance with the instructions on pages 15–24.


3. Use Table 6-1 to record the proposed activation and deactivation setpoints, in Torr, and assignments for each relay.

4. Develop a circuit schematic that specifies exactly how each piece of system hardware will connect to the module relays.


6. Set the module address, baud rate, and parity as instructed on pages 89–94.

7. If the module will measure the pressure of a gas other than N2 or air, you must adjust relay setpoints for the process gas that will be used. See pages 95–99.



Table 6-1 Relay setpoints and assignments

Relay Activation setpoint (Torr) Deactivation setpoint (Torr) Relay assignment





Chapter 6


If you need application assistance, phone a Brooks Automation, Inc. / Granville-Phillips application engineer at 1-303-652-4400 or 1-800-776-6543 within the USA, or mail [email protected].

6.2 Module front and back panels

• Figure 6-1 illustrates the RS-485 version front panel. The optional LED pressure display can indicate vacuum pressure or differential pressure in ±XX±Y format.

• Figure 6-2 illustrates RS-485 version back panel. Use the pressure display toggle switch on the back panel to set the display for vacuum pressure or differential pressure.

• Table 6-2 lists features of the front and back panels.

Figure 6-1 RS-485 version front panel

Figure 6-2 RS-485 version back panel

Pressure unit indicators

Optional LEDpressure display(±XX±Y format)

Setpoint activation indicators

MSD (most significant digit) address switch (see page 90).

LSD (least significant digit) address switch (see page 90).

Use the pressure display toggle switch toset the optional LED display for or

vacuum chamber or differential pressure.

RS-485 Operation





6.3 Operational tasks Once the module is operating, you may use RS-485 commands to perform the tasks listed in Table 3-4 on page 27.

6.4 Error responses If a command cannot be processed, the module returns one of the error responses listed in Section 7.3.

6.5 Address You must assign an address to enable the module to communicate with the host.

Use the rotary switches, located on the module back panel, to set a hexadecimal value of 0 to 255 for the address. Figure 6-3 on page 90 illustrates the switches. The switch includes rotary settings for the most significant digit (MSD) and the least significant digit (LSD).

1. Set the MSD switch to the hexadecimal value that is the most significant digit in the module address.

2. Set the LSD switch to the hexadecimal value that is the least significant digit in the module address.

Set a switch on a mark for the values 1, 3, 5, 7, 9, B, D, or F. Set a switch between marks for the values 0, 2, 4, 6, 8, A, C, or E.

Table 6-2 Front and back panel features

Front panel feature Description

Optional LED pressure display • Pressure range: 1.0 x 10–4 Torr to 9.9 x 102 Torr• Can indicate vacuum pressure measured by Convectron gauge or differential

pressure measured by differential pressure sensor• Pressure value: two significant digits, 1-digit exponent, and + or – sign for the

exponent, in ±XX±Y format• If differential pressure is indicated, + or – sign to left of 2-digit window indicates

positive or negative pressure differential, and + or – sign to left of 1-digit window is for the exponent

• If vacuum pressure is indicated, + or – sign to left of 2-digit window does not illuminate, and + or – sign to left of 1-digit window is for the exponent

Pressure unit indicators Indicate pressure measurement unit (pascal, mBar, or Torr)

Setpoint activation indicators • Setpoint indicators are ON (green) when relays are activated• Activation state for relays is determined by relay configuration

Back panel feature Description

Pressure display toggle switch Toggles optional display to vacuum pressure or differential pressure.

Address switches • Used for setting MSD (most significant digit) and LSD (least significant digit) in module address.

• Valid addresses are 0 to 255.

Chapter 6


Figure 6-3 Address switches on RS-485 module back panel

6.6 RS-485 physical layer Table 6-3 lists specifications for the RS-485 physical layer.

1. Set MSD switch to value for most significant digit.

2. Set LSD switch to value for least significant digit.

Table 6-3 RS-485 physical layer specifications

Function Description

Arrangement 2-wire half duplex

Address range 0 to FF

Default address 01

Method for setting module address Use address switches (see page 90)

Maximum cable length • 4000 feet (1610 meters)• A common ground wire should connect all network

devices for long cable runs

Maximum number of devices in network 256 devices

Default baud rate 19200 baud (19.2 kbaud)

Data bits 8 data bits

Stop bits and parity 1 stop bit, no parity

RS-485 Operation





6.7 Data timing and response The module communicates using half-duplex mode. Neither the module nor the host can send and receive signals at the same time. The host issues a command then waits for a response from the module.

Figure 6-4 illustrates the request and response data timing sequence, including:

• The request sent by the host, response sent by the module.

• Minimum and maximum time duration from the end of the receipt of the request to the start of the response (TD).

• Time required for the module to process and respond with the data (TR).

• Time for the module to switch between transmit and receive modes (D).

Table 6-4 lists data timing and response delay limits. The time required for the module to process and send the response depends on the baud rate, as listed in Table 6-9.

The minimum response time of the module to a request is 2 msec. The host must switch from transmit to receive mode in 0.5 msec or less to ensure proper receipt of response data packets from the module. The host must wait a minimum of 200 µsec after receiving the response before sending a new request command.

Figure 6-4 Data timing and response delays

Table 6-4 Data timing and response delay limits

Timing segment Time limit

Time TD (time for host to switch from transmit to receive) 2.0 msec minimum12.0 msec maximum

Time TR (data processing and response time)

Time D (time for module to switch from transmit to receive) 200 µsec

Total response time

1Baud------------- 130×

Time TD1

Baud------------- 130×⎝ ⎠⎛ ⎞ Time D+ +

Chapter 6


6.8 RS-485 commands RS-485 commands require entry of integer values, hex code values (such as “0F”), values in engineering notation (such as “2.00E+02”), and alphanumeric character strings.

Command structure Table 6-6 explains the RS-485 command structure. The command should not include a line feed with the carriage return. Including a line feed adds an extra character and may cause a garbled response from the module.

Each response includes 13 characters, beginning with the asterisk (*) and ending with carriage return.

Symbols used in this manual

The ↵ symbol at the end of the command represents the carriage return (CR), which is entered as hex code 0D or, if you’re using a terminal, by simultaneously pressing the “Control” and “M” keys.

Table 6-5 Baud rate and data response time

Baud rate Data response time (TR)

1200 baud 108 msec

2400 baud 54 msec

4800 baud 27 msec

9600 baud 13.5 msec

19200 baud (default) 6.75 msec

38400 baud 3.3 msec

Table 6-6 RS-485 command structure

Address field Command field Data field Carriage return

#XX Character string for command from host

Character string data required to execute command

↵

“XX” is 2-digit address First character is:• PC = process control• S = set• T = calibrate• R = read

Data may include:• Hex code• Pressure value in engineering

notation• Alphanumeric character string

• Enter hex code “0D”• Simultaneously press

“Control” and “M” keys

RS-485 Operation





6.9 RS-485 command set Table 6-7 lists RS-485 commands that provide pressure values or other information without affecting module operation.

Table 6-8 lists RS-485 commands that may affect module operation and have default values.

The instructions on pages 94–108 explain how to use the RS-485 command set to configure and operate the module.

Table 6-7 RS-485 command set for values not affecting module operation

Command Set by command Non-volatile Change after reset Data returned Can be locked

RD No No No Vacuum pressure No

RDD No No No Differential pressure No

RU No No No Pressure unit No

RPCS No No No Relay state No

VER No Yes No Software version No

Table 6-8 RS-485 command set for commands affecting module operation

CommandSet by command Non-volatile Default Change after reset Data returned

Can be locked

SB Yes Yes 19200 baud Yes Confirm Yes

SU Yes Yes Torr No Confirm Yes

SD Yes Yes Vacuum pressure No Confirm No

PC Yes Yes Out of range No Confirm or state No

PCG Yes Yes Disabled No Confirm or state No

PCE Yes Yes Disabled No Confirm or state No

TS Yes Yes 760 Torr1013 mbar1.01 x 105 pascal

No Confirm No

TZ Yes Yes 1 x 10–4 Torr1.33 x 10–4 mbar1.33 x 10–2 pascal

No Confirm No

RST Yes No Values at last power-up Yes None No

FAC Yes Yes Factory defaults Yes Confirm Yes

Chapter 6


SB Set baud rate The example set baud rate (SB) command sequence sets the baud rate to 2400 baud:

Example SB command from host: #01SB2400↵Response from module: *01 PROGM OK↵

Allowable SB values are 1200, 2400, 4800, 9600, 19200 (default), or 38400 baud.

The response time from the module depends on the baud rate and the task that the host commands the module to perform.

Table 6-9 lists baud rates and corresponding response times.

The module driver automatically shuts OFF 80 µsec after returning its response to the host.

SP Set parity The example set parity (SP) command sequence sets parity at seven data bits, odd parity:

Example SP command from host: #01SPO↵Response from module: *01 PROGM OK↵

• An SPO command sets parity at seven data bits, odd parity.

• An SPE command sets parity at seven data bits, even parity.

• An SPN command sets parity at eight data bits, no parity. This is the default parity.

Table 6-9 Baud rate and data response time

Baud rate Data response time (TR)

1200 baud 108 msec

2400 baud 54 msec

4800 baud 27 msec

9600 baud 13.5 msec

19200 baud (default) 6.75 msec

38400 baud 3.3 msec

RS-485 Operation





PC Process control relays The module includes four single-pole, single throw (SPST) relays. Each relay has programmable activation and deactivation setpoints. The setpoint is a programmable value representing an N2 or air pressure at which the relay activates or deactivates.

• When the module is shipped from the factory, relays setpoints are out of any acceptable operating range, and relays will not operate.

• You must configure relays to make them operable.

• After a relay has been made operable, you may send an PCO command to disable the relay (see page 100). The PCO command disables the relay by setting relay setpoints to values that are outside the acceptable operating range.

If the module will measure the pressure of any process gas other than N2 or air, you must adjust setpoints for the process gas that will be used.

If the module will measure the pressure of a gas other than N2 or air, you must adjust setpoints for the process gas. The true pressure of a gas other than N2 or air may be substantially different from the pressure that the output indicates. For example, outputs might indicate a pressure of 10 Torr for argon, although the true pressure of the argon is 250 Torr. Such a substantial difference between indicated pressure and true pressure can cause overpressurization resulting in an explosion.



Chapter 6


1. Make sure the module is properly installed and the axis is horizontal. (See page 17.)

2. Figure 6-7, Figure 6-8, and Figure 6-9 on pages 103–105 are graphs that show true pressure versus indicated pressure for 12 commonly used process gases, including N2 and air. Refer to Table 6-10 to find the appropriate graph:

3. Refer to the following example process control (PC) command sequence to program indicated pressures at which the relay will activate and deactivate:

The example PC command sequence causes relay 1 to deactivate when indicated vacuum pressure increases to 2.00 x 10–1 Torr and to activate when indicated vacuum pressure decreases to 1.01 x 10–1 Torr.

Example PC command from host: #01PC1A+1.01E–01↵Response from module: *01 PROGM OK↵

Example PC command from host: #01PC1D+2.00E–01↵Response from module: *01 PROGM OK↵

The “PC1” value identifies process control relay 1.

The “A” (activation) and “D” (deactivation) pressure values determine activation and deactivation pressures at which the relay switches states.

• If the “D” value is greater than the “A” value, the relay will always activate with decreasing pressure and deactivate with increasing pressure. See Figure 6-5 on page 97.

• If the “A” value is greater than the “D” value, the relay will always activate with increasing pressure and deactivate with decreasing pressure. See Figure 6-6 on page 98.

• If you enter equal “A” and “D” values, the module software will increase the “D” value by the minimum software defined hysteresis.

Table 6-10 Appropriate true pressure versus indicated pressure graphs

Figure number, page Pressure range in Torr Gases

Figure 6-7, page 103 1 x 10–4 to 1 x 10–1 Torr All 12 common gases

Figure 6-8, page 104 1 x 10–1 to 1 x 1000 Torr Ar, CO2, CH4, Freon 12, He

Figure 6-9, page 105 1 x 10–1 to 1 x 1000 Torr D2, Freon 22, Kr, Ne, O2

RS-485 Operation





In default mode, relays 1 and 3 are assigned to the Convectron gauge and are set to activate with decreasing vacuum pressure and deactivate at a higher pressure than the activation pressure, as illustrated in Figure 6-5.

In default mode, relays 2 and 4 are assigned to the differential pressure sensor and are set to activate with increasing differential pressure and deactivate at a lower pressure than the activation pressure, as illustrated in Figure 6-6.


Table 6-11 Relay default activation, range, and hysteresis

Relays Assignment Activation direction Range Hysteresis

Setpoints 1 and 3

Vacuum pressure Decreasing pressure • Operating range: 1.0 x 10–4 to 9.99 x 102 Torr



Setpoints 2 and 4

Differential pressure Increasing pressure • Operating range:–750 to +125 Torr



Deactivate

Activate

Deactivated

Activated


Time

Vac

uum

pre

ssur

e

Relay activated

Chapter 6



The plus (+) or minus (–) sign that precedes the pressure value is meaningful only if the relay will indicate differential pressure.

If the relay is assigned to vacuum pressure, you should not enter a + or – sign preceding the “A” and “D” pressure values.

• If you enter a + sign, the sign will be disregarded.

• If you enter a – sign, the module will return a RANGE ER response.

If the relay is assigned to differential pressure, enter a + sign or a – sign preceding the “A” and/or “D” pressure values.

• The + sign will cause the relay to switch states when differential pressure is positive (when vacuum pressure is greater than atmospheric pressure).

• The – sign will cause the relay to switch states when differential pressure is negative (when atmospheric pressure is greater than vacuum pressure).

The + or – that follows the pressure value is the exponent. For example:

• A pressure value of “2.00E–2” equals 2 x 10–2 Torr, or 0.020 Torr.

• A pressure value of “2.00E+2” equals 2 x 102 Torr, or 200 Torr.

Activate

Deactivate

Deactivated

Activated

Relay activated

Time

Diff

eren

tial p

ress

ure


RS-485 Operation





Table 6-12 explains the PC command structure.

RPC Read setpoints The example read process control (RPC) command sequence causes the module to return values indicating that relay 1 activates at 1.01 x 10–1 Torr and deactivates at 2.00 x 10–1 Torr:

Example RPC command from host: #01RPC1A↵Example response from module: *01 1.01E–01↵

Example RPC command from host: #01RPC1D↵Response from module: *01 2.00E–01↵

The “RPC1” value identifies relay 1.

The “A” or “D” value in the PC command designates the setpoint that is being read:

• The “A” (activation) value is the indicated pressure at which relay 1 activates.

• A “D” (deactivation) value is the indicated pressure at which relay 1 deactivates.

The same command structure applies to all four process control relays (RPC1, RPC2, RPC3, and RPC4).

Table 6-12 Command structure for relay settings

Address field Command field

Activation pressuredeactivation pressure, or OFF

Increasing/decreasingdifferential pressure Pressure value

#XX PC1 orPC2 or PC3 orPC4

A or D or O + or – sign X.XXE+Y or X.XXE–Y

“XX” is 2-digit address

• PC1: relay 1• PC2: relay 2• PC3: relay 3• PC4: relay 4

Enter “A” value in one command and “D” value in another command or enter “O” for OFF:• A: activation pressure• D: deactivation pressure• O: relay OFF (disabled)

Include + or – sign if relay is assigned to differential pressure• + for positive differential

pressure• – for negative differential

pressure

• 2 significant digits• “E” constant• Signed exponent

(+ or –)• 1-digit exponent

Chapter 6


PCG Set relay assignments In default mode, relays 1 and 3 are assigned to the Convectron gauge, and relays 2 and 4 are assigned to the differential pressure sensor. RS-485 commands enable you to assign any relay to the Convectron gauge or to the differential pressure sensor.

The example process control gauge (PCG) command sequence assigns relays 1 and 2 to the Convectron gauge and relays 3 and 4 to the differential pressure sensor:

Example PCG command from host: #01PCGCCDD↵Response from module: *01 PROGM OK↵

The 4-digit value following “PCG” assigns relays in ascending numerical order. In this example, “CC” is the assignment for relays 1 and 2, and “DD” is the assignment for relays 3 and 4.

• A “C” value assigns the specified relay to the Convectron gauge.

• A “D” value assigns the specified relay to the differential pressure sensor.

PCO Disable an operable relay If relays have been made operable, you may send an O command to disable any specified relay. The example command disables relay 1 by resetting the setpoint to a value that is outside the acceptable operating range.

Example PC command from host: #01PC1O↵Response from module: *01 PROGM OK↵

The command includes the alpha characters “P,” “C”, and “O” and the numeric value (1, 2, 3, or 4) representing the relay that will be disabled.

If you disable a relay, you must reconfigure it to make it operable.

WARNINGFailure to adjust relays for the gas that is being used can cause an explosion due to overpressurization.

If relays are re−assigned, do not use the module to measure the pressure of gases other than N2 or air without adjusting relay setpoints for the process gas that will be used.

RS-485 Operation





RPG Read relay assignments The example read process gauge (RPG) command causes the module to return a value indicating that relays 1 and 2 are assigned to the Convectron gauge (vacuum pressure) and relays 3 and 4 are assigned to the differential pressure sensor:

RPG command from host: #01RPG↵Example response from module: *01 CCDD ↵

The returned value indicates relay assignments in ascending numerical order. In this example, “CC” is the assignment for relays 1 and 2, and “DD” is the assignment for relays 3 and 4.

• A “C” value means the relay is assigned to the Convectron gauge.

• A “D” value means the relay is assigned to the differential pressure sensor.

RPCS Read relay activation/deactivation status

The read process control relay status (RPCS) command causes the module to return a character string that represents the status of all four relays.

The example RPCS command causes the module to return a character string indicating that relays 1 and 3 or activated and relays 2 and 4 are deactivated.

RPCS command from host: #01RPCS↵Example response from module: *01 0101 ↵

• A value of 1 means the specified relay (1, 2, 3, or 4) is activated.

• A value of 0 means the specified relay (1, 2, 3, or 4) is deactivated.

SU Set pressure unit The example set unit (SU) command sets the pressure unit to Torr:

Example SU command from host: #01SUT↵Response from module: *01 PROGM OK↵

• An SUT command sets the pressure unit to Torr.

• An SUM command sets the pressure unit to mBar.

• An SUP command sets the pressure unit to pascal.

RU Read pressure unit The example read unit (RU) command causes the module to return the character string “TORR”, which designates Torr as the pressure unit for outputs and the optional display:

Example RU command from host: #01RU↵Example response from module: *01 TORR ↵

• A “TORR ” response designates Torr as the pressure unit.

• An “MBAR ” response designates mbar as the pressure unit.

• A “PASCAL” response designates pascal as the pressure unit.

Chapter 6


RD Read vacuum pressure The graphs on pages 103–105 enable you to determine the indicated N2 or air pressure that corresponds to a specific true pressure of 10 other commonly used process gases.

Refer to Table 6-13 to find the appropriate graph:

Find the point at which the horizontal line representing true pressure intercepts the vertical line representing indicated N2 (nitrogen equivalent) pressure. For example:

• in Figure 6-7, an indicated N2 or air pressure of 10–2 Torr corresponds to a true He pressure of 1.5 x 10–2 Torr.

• In Figure 6-8, an indicated N2 or air pressure of 20 Torr corresponds to a true Ar pressure of 700 Torr.

• In Figure 6-9, an indicated N2 or air pressure of 6 Torr corresponds to a true Freon 22 pressure of 200 Torr.

If the gas being used is not included among those listed on pages 103–105, or for a gas mixture, you will need to generate a calibration curve using a gas-independent transfer standard such as a capacitance manometer.

Table 6-13 Appropriate graphs and tables for reading pressure

Figure or table number, page Pressure range in Torr Gases

Figure 6-7, page 103 1 mTorr to 100 mTorr All 12 process gases

Figure 6-8, page 104 100 mTorr to 1000 Torr Ar, CO2, CH4, freon 12, He, N2 or air

Figure 6-9, page 105 0.1 mTorr to 1000 Torr D2, freon 22, Kr, Ne, O2, N2 or air

RS-485 Operation





Figure 6-7 Reading true pressure values, 10–4 to 10–1 Torr


True

pre

ssur

e in

Tor

r


10–2 Torr

1.5 x 10–2 Torr

Chapter 6



ue p

ress

ure

in T

orr


20 Torr


700 Torr

RS-485 Operation






ue p

ress

ure

in T

orr



6 Torr

200 Torr

Chapter 6


The example read pressure (RD) command causes the module to return a value that indicates vacuum pressure is 1.50 x 10–2:

Example RD command from host: #01RD↵Example response from module: *01 1.50E–02↵

The returned value is in the pressure unit that you’ve set for the module.

If the returned value is not a valid representation of pressure, see page 109.

RDD Read differential pressure

The example read differential pressure (RDD) command causes the module to return a value indicating a negative differential of 7.34 x 102 between vacuum and atmospheric pressures:

Example RD command from host: #01RDD↵Example response from module: *01–7.34E+02↵

The returned value is in the pressure unit that you’ve set for the module. See page 101.

In the response, the + or – sign that precedes the pressure value indicates whether the pressure differential is positive or negative.

• A + sign indicates a positive pressure differential (vacuum pressure is greater than atmospheric pressure).

• A – sign indicates a negative pressure differential (vacuum pressure is less than atmospheric pressure).

The + or – that follows the “E” character is the sign of the exponent. For example, a pressure value of “2.00E–2” equals 2 x 10–2 pressure units, and a pressure value of “2.00E+2” equals 2 x 102 pressure units.

If the returned value is not a valid representation of pressure, see page 109.

SD Set optional display The example set display (SD) command causes the optional display to indicate vacuum pressure:

Example SD command from host: #01SDC↵Response from module: *01 PROGM OK↵

• An SDC command sets the optional display to indicate Convectron gauge pressure.

• An SDD command sets the optional display to indicate the differential between atmospheric and vacuum pressures.

RS-485 Operation





TS Calibrate module at atmospheric pressure

An atmospheric pressure calibration is performed on the Convectron gauge, using N2, at the factory before the module is shipped.


• Regardless of the process gas that is being used, you should always use N2 or air to calibrate the Convectron gauge at atmospheric pressure.


1. Shut off the pump and, using N2 or air, allow the vacuum pressure to increase to the atmospheric pressure. Atmospheric pressure must be higher than 400 Torr (5.332 mbar, 533.2 pascal).

2. Send a calibration at system (TS) command such as the command in the example command sequence, which sets the atmospheric calibration point to 760 Torr:

Example TS command from host: #01TS7.60E+02↵Example response from module: *01 PROGM OK↵

If the module returns a message other than “*01 PROGM OK↵” in response to the TS command, the atmospheric calibration has failed. See page 109 to troubleshoot the problem.

TZ Calibrate module at vacuum pressure



Chapter 6


Periodic resets of the vacuum chamber calibration point also improve the accuracy and repeatability of the Convectron gauge.

• Regardless of the process gas that is being used, you should always use N2 or air to calibrate the Convectron gauge at vacuum pressure.


• The highest allowable calibration pressure is 1 x 10–1 Torr (1.33 x 10–1 mbar, 133.3 x 10–1 pascal).

1. Turn on the pump and allow the vacuum chamber to decrease to the pressure at which the vacuum pressure point will be set. Pressure must be lower than 1 x 10–1 Torr (1.33 x 10–1 mbar, 133.3 x 10–1 pascal).

2. Send a calibration at vacuum pressure (TZ) command:

Example TZ command from host: #01TZ1.00E–4↵Example response from module: *01 PROGM OK↵

If the module returns a message other than “*01 PROGM OK↵” in response to the TZ command, the vacuum pressure calibration has failed. See page 109 to troubleshoot the problem.

TO Calibrate differential pressure sensor zero

Setting the differential pressure sensor zero decreases measurement error of the sensor. Differential pressure sensor zero is the pressure offset error for the sensor when atmospheric and vacuum pressures are equal (the pressure differential is zero).

1. Allow atmospheric and vacuum pressures to achieve the same value. This is a pressure differential of zero.

2. Send a calibration at zero (TO) command:

TO command from host: #01TO↵Example response from module: *01 PROGM OK↵

The last character in the TO command is the capital letter “O”, not a zero.

If the module returns a message other than “*01 PROGM OK↵” in response to the TO command, the differential pressure sensor zero calibration has failed. See page 109 to troubleshoot the problem.

VER Read firmware version The example read firmware version (VER) command causes the module to return a value that represents the Brooks Automation, Inc. internal part number 016400 and firmware revision 01 for the module:

Example VER command from host: #01VER↵Example response from module: *01 16400–01↵

• The first five digits (preceding the dash) are the internal part number.

• The last two digits (following the dash) are the firmware version.

RS-485 Operation





FAC Reset values to factory defaults

Table 6-14 lists default settings for the RS-485 version of the module. After you’ve reconfigured the module, you may restore all parameters to their default values by cycling power to the module or by sending a factory reset (FAC) command.

FAC command from host: #01FAC↵Response from module: *01 PROGM OK↵

Reset command from host: #01RST↵Response from module: None

Table 6-14 Factory default settings for RS485 module

Parameter Default setting

Digital communication • Parity: 8 data bits, no parity, 1 stop bit• Baud rate: 19.2 kBaud• Module address: 01

Relays 1, 2, 3, and 4 State: Deactivated

Optional display • Pressure value: vacuum pressure• Pressure unit: Torr

Chapter 6



Maintenance

InstallationOperation Overview

Analog OperationRS-485 Operation

DeviceNet Operation

Chapter 7 Maintenance

7.1 Customer service For customer service:





Damage requiring service Shut off power to the module and refer servicing to qualified service personnel under the following conditions:

a. If any liquid has been spilled onto, or objects have fallen into, the module.

b. If a circuit board is faulty.

c. If the Convectron gauge sensing wire is open or the gauge is contaminated.

d. If the module has been exposed to moisture.

e. If the module does not operate normally even if you follow the operating instructions. Adjust only those controls that are explained in this instruction manual. Improper adjustment of other controls may result in damage and will often require extensive work by a qualified technician to restore the module to its normal operation.

f. If the module has been dropped or the enclosure has been damaged.

g. If the module exhibits a distinct change in performance.

If the module requires repair:

• See pages 112–115,

• Phone 1-303-652-4400 or 1-800-776-6543 within the USA, or



Chapter 7


7.2 Troubleshooting If any of the conditions described on page 111 have occurred, troubleshooting is required to determine the repairs that are necessary.

Precautions Because the Convectron gauge contains static-sensitive electronic parts, follow these precautions while troubleshooting:

• Use a grounded, conductive work surface. Wear a high impedance ground strap for personal protection.

• Do not operate the module with static sensitive devices or other components removed from the product.

• Do not handle static sensitive devices more than absolutely necessary, and only when wearing a ground strap.

• Rely on voltage measurements for troubleshooting module circuitry. Do not use an ohmmeter.

• Use a grounded, electrostatic discharge safe soldering iron.

WARNINGSubstitution or modifying parts can result in serious product damage or personal injury due to electrical shock or fire.

• Install only those replacement parts that are specified by Brooks Automation, Inc. / Granville−Phillips.

• Do not install substitute parts or perform any unauthorized modification to the module.

• Do not use the module if unauthorized modifications have been made.

WARNINGFailure to perform a safety check after the module has been repaired can result in serious property damage or personal injury due to electrical shock or fire.

If the module has been repaired, before putting it back into operation, make sure qualified service personnel perform a safety check.

Maintenance


Maintenance



DeviceNet Operation

Symptoms, causes, and solutions

Table 7-1 on page 113 lists failure symptoms, causes, and solutions indicated by something other than an RS-485 error message from the module.

Table 7-2 on page 115 lists failure symptoms, causes, and solutions indicated by an RS-485 error message from the module.

Table 7-1 Failure symptoms, causes, and solutions

Symptom Possible causes Solution

Output voltage = 0 V 11.5 to 26.5 V power supply cable is improperly connected or faulty.

Repair or replace power supply cable (page 19).

Pressure reading is too high. • Conductance in connection to vacuum chamber is inadequate.

• Plumbing to module leaks or is contaminated.

• Chamber pressure is too high due to leak, contamination, or pump failure.

• Power supply or output cable is improperly connected or faulty.

• If conductance is inadequate, reconnect Convectron gauge port to vacuum chamber (page 18).

• If plumbing leaks or is contaminated, clean, repair or replace plumbing.

• If pump failed, repair or replace it.• If cable is improperly connected or

faulty, repair or replace cable (page 19).

Pressure reading is inaccurate. • Module is not calibrated for the process gas that is being used.

• Module is not mounted horizontally.• Convectron gauge or differential

pressure sensor is damaged (for example, by reactive gas) or contaminated.

• Temperature or mechanical vibration is extreme.

• If Convectron gauge is out of calibration, recalibrate it for the process gas that is being used (page 48, page 80, or page 107).

• If module is not mounted horizontally, re-mount it (page 17).

• If Convectron gauge is damaged, replace it (page 118).

• If Convectron gauge is contaminated, return it to factory (page 48, page 80, or page 107).

• If temperature or vibration is extreme, relocate module or eliminate source of heat or vibration.

Indicated pressure is different than pressure indications from other measurement devices.

• Process gas is a not the gas that the user anticipated using in the system.

• Convectron gauge is defective.

• If the process gas is not what was anticipated, calibrate Convectron gauge for gas that is being used (see page 48, page 80, or page 107).

• If Convectron gauge is defective, return it to factory (page 120).

Relay LED indicator is ON, but relay is not functioning.

Relay contacts are defective. Make sure relay load is within specified rating and is non-inductive (page 122).

• Relay will not activate.• Output voltage is < 0.10 V.

• A circuit board is faulty.• Convectron gauge sensing wire is

open.

Return module to factory (page 120).

Chapter 7


7.3 RS-485 error responses Table 7-2 on page 115 lists failure symptoms, causes, and solutions that are indicated by any of the following responses from the module:

• A defective or contaminated Convectron gauge.

• Excessive system pressure.

• Failure to install the module according to the instructions on pages 15-24.

• Unacceptable vacuum pressure or atmospheric pressure while a pressure calibration is being performed.

Table 7-3 on page 116 lists error messages that the module returns if you enter a command improperly or if the module non-volatile memory (NOVRAM) cannot process a command.

Maintenance


Maintenance



DeviceNet Operation

Table 7-2 Troubleshooting RS-485 error messages

Message from module Possible causes Solution

DEF SNSR • Convectron gauge is defective.• Differential pressure sensor is defective.• Pressure is > 1000 Torr.• Process gas is a not the gas that the user

anticipated using in the system.

• If Convectron gauge or differential pressure sensor is defective, return module to factory (see page 120).

• If pressure is higher than 1000 Torr, decrease pressure.• If process gas is not the gas that the user anticipated,

adjust relays indicating vacuum pressure for gas that is being used (see page 95).

HI ATM V • Atmospheric pressure is > pressure represented in TS command.

• TO command was sent while atmospheric pressure < 400 Torr (5.332 mbar, 533.2 Pa)

• Convectron gauge is contaminated.• Module is too near a gas inlet.

• If atmospheric pressure is too high, decrease pressure, then re-send TS command (see page 107).

• If atmospheric pressure is < 400 Torr (5.332 mbar, 533.2 pascal), increase pressure, then re-send TO command (see page 108).

• If Convectron gauge is contaminated, return it to factory (see page 120).

• If module is too close to a gas inlet, relocate module farther away from inlet (see page 16).

LO ATM V • Atmospheric pressure is < pressure represented in TS command.

• TO command was sent while atmospheric pressure was > high limit of measurement range.

• Module is too near the pump.

• If atmospheric pressure is too low, increase atmospheric pressure, then re-send TS command (see page 107).

• If atmospheric pressure was too low, increase pressure, then re-send TO command (see page 108).

• If module is too near pump, relocate module farther away from pump (see page 16).

GAIN LIM TS command was sent while atmospheric pressure was > high limit of measurement range.

Decrease atmospheric pressure, then re-send TS command (see page 107).

HI VAC V Vacuum pressure is > pressure represented in TZ command.

Decrease vacuum pressure, then re-send TZ command (see page 107).

LO VAC V Vacuum pressure is < pressure represented in TZ command.

Increase vacuum pressure, then re-send TZ command (see page 107).

OFST LIM • TZ command was sent while vacuum pressure was < low limit of measurement range.

• TO command was sent while differential pressure was outside measurement range.

• If vacuum pressure < low limit of measurement range, increase vacuum pressure, then re-send TZ command (see page 107).

• If differential pressure was outside measurement range, increase pressure, then re-send TO command (see page 108).

MIN HYS Relay activation and deactivation pressures do not meet minimum hysteresis requirements.

Send PC command to reprogram activation and deactivation pressures (see page 95).

Chapter 7


7.4 DeviceNet error codes You may use DeviceNet explicit messages or polled I/O to find out if an alarm or warning has been reported. To select polled I/O or explicit messages, see page 60.

Using polled I/O An alarm or warning is indicated by the status byte in the input assembly, instance 2 or instance 5. An alarm is bit weight 1, and a warning is bit weight 5, as listed in Table 7-4.

Table 7-3 RS-485 error responses related to data entry or inability to process a command

Response Possible causes Solution

RANGE ER Pressure value in TS or TZ calibration command is outside valid limits.

• Make sure atmospheric pressure > 400 Torr (5.332 mbar, 533.2 pascal), then re-send TS command (see page 107).

• Make sure vacuum pressure 1 x 10–1 Torr (1.33 x 10–1 mbar, 133.3 x 10–1 pascal), then re-send TZ command (see page 107).

SYNTX ER • Command was improperly entered.• Module does not recognize command

syntax.

Re-enter command using proper character string (see page 92).

9.99E+09 Module cannot indicate a valid pressure value.

• Send RS command to determine module status (see page 109).

• If necessary, replace gauge assembly (see page 118).

INVALID Convectron gauge is defective. Replace gauge assembly (see page 118).

COMM ER • Baud rate is improperly configured.• Parity is improperly configured.

• Make sure baud rate matches baud rate for host controller (see page 94).

• Make sure parity matches parity for host controller (see page 94).

NVRAM ER Non-volatile memory is defective. Return module to factory (see page 120).

Table 7-4 Module alarm and warning status for polled I/O

Instance BYTE data: One byte format

2 or 5 Bit 70

Bit 60

Bit 5Warning

Bit 40

Bit 30

Bit 20

Bit 1Alarm

Bit 00

Maintenance


Maintenance



DeviceNet Operation

Using explicit messages Alarms, warnings, and status messages are available from the objects listed in Table 7-5.

For detailed information about alarms, warnings, and status messages, see page 83.

7.5 Convectron gauge test

Even a small amount of voltage can damage the small diameter sensing wire inside the Convectron gauge.

To determine if the Convectron gauge sensing wire has been damaged, follow these instructions:

1. Remove the Convectron gauge as instructed on pages 118–119.

2. Use a low-voltage (maximum 0.1 V) ohmmeter to check resistance values across the pins on the base of the gauge. Pin numbers are embossed on the base. Figure 7-1 illustrates the base of the gauge.

The resistance across the pins should be within the ranges listed in Table 7-6. If resistance across pins 1 and 2 is not approximately 20 to 30 Ω or if other listed resistance values are greater than the listed values, the gauge is defective. Install a replacement Convectron gauge as instructed on page 119.

Table 7-5 DeviceNet explicit messages indicating alarms, warning, or status

Object Service Class Instance Attribute

Identity object 0Ehex 1 1 5

Device supervisor object 0Ehex 30hex 1 0Chex





CAUTIONPerforming a Convectron gauge test with instruments that apply more than 0.1 V with the gauge at vacuum pressure can result in property damage.Do not perform a Convectron gauge test with an instrument that applies more than 0.1 V of electromotive force.

Chapter 7


Figure 7-1 Convectron gauge base

7.6 Convectron gauge removal and replacement

Removing the Convectron gauge

To avoid contaminating the Convectron gauge, wear sterile gloves during the removal procedure. Refer to Figure 7-2 and follow these instructions:

1. Vent the vacuum chamber to atmospheric pressure and shut off power to the module.

2. Use the fitting to detach the module from the vacuum chamber.

3. Remove the four Phillips-head screws from both module end plates, but do not remove the hex nuts that hold the 15-pin connector in place.

4. Remove the end plate that does not have a connector, then remove both sides of the blue housing.

2

4 1

5

3

Table 7-6 Convectron gauge resistance values

Pins Normal resistance (Ω)

Pins 1 to 2 15 to 25 Ω

Pins 2 to 3 50 to 60 Ω

Pins 1 to 5 175 to 190 Ω

WARNINGRemoving or replacing the Convectron gauge in a high−voltage environment can cause an electrical discharge through a gas or plasma, resulting in serious property damage or personal injury due to electrical shock or fire.

Vent the vacuum chamber to atmospheric pressure and shut off power to the module before you remove or replace the Convectron gauge.

Maintenance


Maintenance



DeviceNet Operation

5. Carefully unplug the Convectron gauge from the vertical PC board by pulling the gauge housing away from the board.

6. Allow the differential pressure sensor tube to slide out of the port on the Convectron gauge housing.

Figure 7-2 Removing the Convectron gauge

Replacing the Convectron gauge

To avoid contaminating the Convectron gauge, wear sterile gloves during the replacement procedure. Refer to Figure 7-3 and follow these instructions:

1. Shut off power to the module.

2. Remove the differential pressure sensor port cover from the top of the Convectron gauge.

3. Carefully reconnect the replacement Convectron gauge to the differential pressure sensor by inserting the differential pressure tube into the port on the top of the gauge.

4. Align the gauge pins so they mate with connections on the vertical PC board. Carefully insert the Convectron gauge pins into the mating connections on the vertical PC board.

5. Position the end plates and put both blue parts of the housing into place, making sure the gauge grounding springs and cradles are in line with the gauge envelope.

6. Re-install the Phillips-head screws into the end plates.

7. Use the fitting to re-attach the module to the vacuum chamber.

4. Remove four Phillips-head screws from both module end plates, but do not remove hex nuts that hold 15-pin connector in place.

5. Carefully unplug gauge housing from vertical PC board.

6. Allow sensor tube to slide out of port on gauge housing.

1. Vent vacuum chamber to atmosphere and shut off power to the module.

2. Detach module from vacuum chamber.

3. Remove this end plate, then remove blue module housing.

Chapter 7


Figure 7-3 Installing the replacement Convectron gauge

7.7 Returning a damaged module

If the module must be returned for service, request a Return Authorization (RA) from Brooks Automation, Inc. / Granville-Phillips. Do not return products without first obtaining an RA. In some cases a hazardous materials document may be required. The Brooks Automation / Granville-Phillips Customer Service Representative will advise you if the hazardous materials document is required.

When returning equipment to Brooks Automation Inc. / Granville-Phillips, be sure to package the products to prevent shipping damage. Circuit boards and modules separated from the controller chassis must be handled using proper anti-static protection methods and must be packaged in anti-static packaging. Brooks Automation, Inc. / Granville-Phillips will supply return packaging materials at no charge upon request. Shipping damage on returned products as a result of inadequate packaging is the Buyer's responsibility.Before you return the module, obtain an RA number by contacting Granville-Phillips customer service:




For Global Customer Support, go to www.brooks.com, click on Contact Us, then click on Global Offices to locate the Brooks Automation office nearest you.

3. Carefully insert tube from sensor into port on gauge.

4. Carefully insert gauge pins into the mating connectors on vertical PC board.

5. Put both parts of blue housing into place around end plates.

1. Shut off power to the module.

2. Remove differential pressure sensor port cover from Convectron gauge.

6. Re-install Phillips-head screws into end plates.

7. Re-attach module to vacuum chamber.


Appendix A Specifications

Specifications for analog, DeviceNet, and RS-485 versions

Vacuum pressure measurement

Measurement range for air or N2

Torr 1 x 10–4 to 1000mBar 1.33 x 10–4 to 1333pascal 1.33 x 10–2 pascal to 133 kPa

Resolution Resolution is a function of range and is 1 x 10–4 Torr (1 x 10–4 mbar, 1 x 10–2 pascal) or better than 0.35% of reading, whichever is greater

Setpoint range 1 x 10–3 to 1000 Torr

Measurements will change with different gases and mixtures. Do not use the module with flammable or explosive gases.The module is factory calibrated for use on N2. It also measures the pressure of air correctly within the accuracy specification for the instrument. If the module will measure the pressure of a gas other than N2 or air, you must adjust relays for the process gas.

Differential pressure measurement

Measurement range 750 Torr below atmospheric pressure to 250 Torr above atmospheric pressure

Accuracy ±(2.5 Torr + 2.5% of reading)

Setpoint range 750 Torr below atmospheric pressure to 125 Torr above atmospheric pressure

Temperature

Operating temperature +0 to +40 °C (+32 to +104 °F) ambient, non-condensing

Non-operating temperature –40 to +85 °C (–40 to +185 °F)

CE compliance

EMC directive 204/108/EEC; EN 55011, EN 61000-6-1, EN 61000-6-2, EN 61000-6-3, EN 61000-6-4, EN 61326-1

Low-voltage directive 73/23/EEC; EN 61010-1

To obtain a declaration of conformity, phone 1-303-652-4400 or 1-800-776–-6543 within the USA, or email [email protected].

Appendix A


I/O connector 15-pin male, high-density subminiature D

Setpoint relays

Relay type Analog version relays are single-pole, double-throw (SPDT), Form A

DeviceNet and RS-485 version relays are single-pole, single-throw (SPST), Form C

Contact rating 1 A, 30 VDC resistive, 30 VAC non-inductive

Power requirements 11.5 to 26.5 VDC

Analog version 1.6 W maximum at 12 Vdc

RS-485 version 3.3 W maximum

DeviceNet interface 24 VDC (11 to 26.4) at 0.2 A maximum

Mounting position Horizontal axis (see page 17)

Convectron sensing wire filament Gold-plated tungsten

Convectron gauge internal volume 40 cm3 (2.5 in.3)

Specifications


Physical characteristics

Case material Powder-coated extruded aluminum

Materials exposed to vacuum

304 stainless steel, gold, borosilicate glass, kovar, alumina, NiFe alloy, polyimide, Pyrex® glass, ceramic, silicon, epoxy, RTV, nickel

Weight 340 g (12 oz.) with 1/8 NPT fitting

Dimensions Dimensions are in cm (in.)

11(4.3)

4.1(1.6)

6.4(2.5)

5.5(2.2)

Dim. H

Dim. H

Vacuum connections cm in.

cm in.

1/8 NPT pipe thread, ½-inch inside diameter 2.2 0.9

½-inch 4 VCR® type fitting, female 3.0 1.2

½-inch 8 VCR type fitting, female 3.9 1.5

NW16KF flange 3.1 1.2



1.33-inch (NW16CF) ConFlat® flange 3.8 1.5

2.75-inch (NW35CF) ConFlat flange 3.8 1.5

Appendix A


Specifications for analog output version

Analog output 0.375 to 5.659 Vdc for 0 to 1000 Torr, non-linear, absolute of N2

Setpoint relays Two single-pole, double-throw (SPDT) relays. Use potentiometers and test points on the module front panel and jumpers inside the module to configure relays.

Relay 1 • Relay 1 is assigned to the Convectron gauge, which indicates vacuum pressure

• Relay 1 activates with decreasing and deactivates with increasing vacuum pressure

• Hysteresis: 30 mV

• Range: 1 x 10–3 to 1000 Torr

Relay 2 • Relay 2 is assigned to the differential pressure sensor, which indicates pressure differential between atmospheric and vacuum pressures

• In default mode, relay 2 activates with increasing and deactivates with decreasing differential between atmospheric and vacuum pressures

• Hysteresis: 8 Torr

• Range: –750 to +125 Torr

Analog I/O male connector on module end panel

Vacuum pressure analog output 5

Power ground 4


Setpoint 2 adjust 2

Setpoint 1 adjust 1

15 Relay 1 common



12 Relay 2 common



9 No connection

8 No connection

7 Differential pressure analog output

6 Signal ground

Specifications


Specifications for DeviceNet version

Digital format Open DeviceNet Vendors Association (ODVA) and S-Analog Sensor Object Class Subclass 01 (Instance Selector) standards

Wiring Standard 5-pin DeviceNet receptacle that accepts a standard micro 5-pin female cable connection

Data rate 125, 250, or 500 (default) kbaud

Setpoint relays Four single-pole, single-throw (SPST) relays. Use explicit messages to configure relays. Each relay can be assigned to the Convectron gauge or the differential pressure sensor.

Relays 1 and 3 • In default mode, relays 1 and 3 are assigned to the Convectron gauge, which indicates vacuum pressure

• Range: 10–3 to 1000 Torr

Relays 2 and 4 • In default mode, relays 2 and 4 are assigned to the differential pressure sensor, which indicates pressure differential between atmospheric and vacuum pressures


DeviceNet male I/O connector on module end panel

No connection 5

No connection 4

No connection 3

No connection 2

No connection 1

15 Relay 1 common

14 Relay 4 common

13 No connection

12 Relay 2 common




8 No connection

7 Relay 3 common


Appendix A


Specifications for RS-485 version

Digital format American Standard Code for Information Interchange (ASCII)

Protocol RS-485, 2-wire

Parity • 8 data bits, no parity, 1 stop bit (default)

• 7 data bits, odd parity, 1 stop bit

• 7 data bits, even parity, 1 stop bit

Baud rate 1200, 2400, 4800, 9600, 19200 (default), or 38400 baud

Setpoint relays Four single-pole, single-throw (SPST) relays. Use RS-485 commands to configure relays. Each relay can be assigned to the Convectron gauge or the differential pressure sensor.

Relays 1 and 3 • In default mode, relays 1 and 3 are assigned to the Convectron gauge, which indicates vacuum pressure

• Range: 10–3 to 1000 Torr

Relays 2 and 4 • In default mode, relays 2 and 4 are assigned to the differential pressure sensor, which indicates pressure differential between atmospheric and vacuum pressures


RS-485 male I/O connector on module end panel

No connection 5

Power ground 4


RS-485 B line 2

RS-485 A line 1

15 Relay 1 common

14 Relay 4 common

13 No connection

12 Relay 2 common




8 RS-485 ground

7 Relay 3 common


Specifications


Specifications for optional display

The DeviceNet and RS-485 versions of the module are available with an optional 3-digit green LED display

• Can indicate vacuum pressure measured by Convectron gauge or differential pressure measured by differential pressure sensor

• Display value: two significant digits, 1-digit exponent, and + or – sign for the exponent, in ±XX±Y format

• Pressure range: 1.0 x 10-4 Torr to 999 Torr

• If differential pressure is indicated, + or – sign to left of 2-digit window indicates positive or negative pressure differential, and + or – sign to left of 1-digit window is for the exponent

• If absolute pressure is indicated, + or – sign to left of 2-digit window does not illuminate, and + or – sign to left of 1-digit window is for the exponent

• Also indicates of the pressure unit (Torr, mbar, or Pa)


Appendix B Theory of Operation

The module measures gas pressures from 1 x 10–4 Torr to 1000 Torr. Vacuum pressure is measured by a Convectron convection-enhanced Pirani heat-loss gauge. The differential between atmospheric and vacuum pressures is measured by a Piezo resistive diaphragm sensor. Figure B-1 illustrates the Convectron gauge and diaphragm sensor.

Figure B-1 Convectron heat-loss gauge and Piezo resistive diaphragm sensor

B.1 Piezo resistive diaphragm sensor

The Piezo resistive diaphragm sensor measures the differential between atmospheric and vacuum pressures. Changes in the differential between atmospheric and vacuum pressures cause the diaphragm to move.

The differential pressure sensor connects to the vacuum chamber through a port on the Convectron gauge. A second port, extending from the sensor, is open to atmosphere and provides the pressure comparison that enables differential pressure measurement.

The differential pressure sensor provides a direct, accurate, electromechanical measurement of differential pressure regardless of the gas composition. Changes in pressure on the diaphragm cause activation and deactivation of relays at programmable setpoints that correspond to increasing and decreasing differential pressures.

Piezo resistive diaphragm sensorMeasures differential between atmospheric and vacuum pressures

Convectron heat-loss Pirani gaugeMeasures vacuum pressure as a function of heat loss through sensing wire

Ribbon cableConnects differential pressure

sensor board to main PC board

Appendix B


B.2 Convectron heat-loss Pirani gauge

The Convectron gauge is a convection-enhanced Pirani gauge. It operates like a standard Pirani gauge, which employs the principle of a Wheatstone bridge to convert pressure to voltage, but uses convection cooling to enable accurate pressure measurement, when properly calibrated, from 10–4 to 1000 Torr.

The sensing wire is an ultra-fine strand of gold-plated tungsten, which is corrosion resistant and has exceptionally stable heat transfer characteristics. The heated sensing wire loses more heat as the ambient gas pressure increases. The more molecules contact the sensing wire, the more power is required to keep the sensing wire at a constant temperature. So, as pressure increases, the voltage across the Wheatstone bridge also increases.

The large interior volume of the Convectron gauge enables convection currents to develop, enabling greater measurement resolution at higher pressures. The Convectron gauge has a temperature compensator, which causes bridge voltage to remain unaffected by changes in ambient temperature.

B.3 Wheatstone bridge circuit description

Figure B-2 is a block diagram of the module controller. The Convectron gauge sensing wire is designated R1 in the Wheatstone bridge circuit. The temperature compensator is designated R2. At bridge null, the following equation applies:

R1R2 R3+

R4-------------------=

Theory of Operation


Bridge voltage is a non-linear function of pressure. This relationship is illustrated in Figure B-2. If the ambient temperature does not change, R1 remains constant.

Figure B-2 Wheatstone bridge block diagram

As vacuum pressure decreases, the number of molecules in the vacuum chamber and the resulting heat loss from the sensing wire also decrease. Temperature and R1 resistance therefore increase.

The increased resistance through R1 causes the bridge to become unbalanced and a voltage to develop across the null terminals. The bridge controller senses the null voltage and decreases the voltage across the bridge until the null voltage again equals zero. When the bridge voltage decreases, the power dissipation in the sensing wire decreases, causing R1 resistance to decrease to its previous value.

A pressure increase causes an opposing series of occurrences, during which the bridge controller increases the bridge voltage to maintain a zero null voltage.

Vacuum and ATM

adjust

Processcontrol

Vacuumoutput

Amplifier Buffer

Bridge Control

R1 R3

R4R2


Appendix C Messaging Summary

C.1 Polled I/O messaging summaryInput I/O (to master)

Instance Master data Device data Data type Description Type

1hex None 00 00 UINT UINT vacuum pressure Open

2hex None 0000 00

STRUCT BYTE exception statusUINT vacuum pressure

Open

3hex None 000000 00

STRUCT BYTE exception statusBYTE setpoint statusUINT vacuum pressure

Open

4hex None 00 00 00 00 REAL REAL vacuum pressure Open

5hex None 0000 00 00 00

STRUCT BYTE exception statusREAL vacuum pressure

0Fhex None 00 0000 0000 00 00 00

UINTINT

UINT vacuum pressureINT differential pressurePlaceholders

Open

10hex None 0000 0000 0000 00 00 00

BYTEUINTINT

BYTE exception statusUINT vacuum pressureINT differential pressurePlaceholders

Open

11hex None 000000 0000 0000 00 00 00

BYTEBYTEUINTINT

BYTE exception statusBYTE setpoint statusUINT vacuum pressureINT differential pressurePlaceholders

Open

12hex None 00 00 00 0000 00 00 0000 00 00 00 00 00 00 00

REALREAL

REAL vacuum pressureREAL differential pressurePlaceholders

Open

13hex None 0000 00 00 0000 00 00 0000 00 00 00 00 00 00 00

BYTEREALREAL

BYTE exception statusREAL vacuum pressureREAL differential pressurePlaceholders

Open

14hex None 000000 00 00 0000 00 00 0000 00 00 00 00 00 00 00

BYTEBYTEREALREAL

BYTE exception statusBYTE setpoint statusREAL vacuum pressureREAL differential pressurePlaceholders

Open

Appendix C


C.2 Explicit message summaryIdentity object

Service Class Instance Attribute Master data Device data Data type Description Type

0Ehex 1 1 1 None 00 5Chex UINT Vendor identification Open

0Ehex 1 1 2 None 00 1Chex UINT Product type Open

0Ehex 1 1 3 None 00 07 UINT 385007 & 385011 product ID Open

0Ehex 1 1 4 None 01 01 STRUCT Firmware revision Open

0Ehex 1 1 5 None 00 00 WORD Status and fault information Open

0Ehex 1 1 6 None 00 00 00 00 UDINT Serial number Open

0Ehex 1 1 7 None “GP385” S_STRING Identification Open

05hex 1 1 None 00 None USINT Reset module to power-up state Open

DeviceNet object


0Ehex 3 0 1 None 00 02 UINT Object revision Open

0Ehex 3 1 1 None 0 USINT Get node address, range 0–63 Open

10hex 3 1 1 0 Success Set node address if switch set to “PGM” Open

0Ehex 3 1 2 None 0 USINT Get baud rate, range 0–2 Open

10hex 3 1 2 0 Success Set baud rate if switch set to “PGM” Open

0Ehex 3 1 3 None 0 BOOL Get bus-off interrupt, range 0–1 Open

0Ehex 3 1 4 None 0 USINT Get bus-off counter, range 0–255 Open

10hex 3 1 4 0 Success Set bus-off counter Open

0Ehex 3 1 5 None 00 00 STRUCT Get allocation choice, range 0–3Get master ID, range 0–63

Open

4Bhex 3 1 None 03 00 Success STRUCT Set allocation choice, range 0–3Set master ID, range 0–63

Open

4Chex 3 1 None 3 Success BYTE Release allocation, range 0–3 Open

Messaging Summary


Assembly object

Service Class Instance AttributeMaster data Device data Data type Description Type

0Ehex 4 0 65hex None 5 USINT Get I/O produced instance selection, range 1–5 or 15–20

Vendor

10hex 4 0 65hex 5 Success USINT Set I/O produced instance selection, range 1–5 or 15–20

Vendor

0Ehex 4 1 3 None 00 00 UINT Get UINT vacuum pressure Open

0Ehex 4 2 3 None 0000 00

STRUCT Get BYTE exception statusGet UINT vacuum pressure

Open

0Ehex 4 3 3 None 000000 00

STRUCT Get BYTE exception statusGet BYTE setpoint statusGet UINT vacuum pressure

Open

0Ehex 4 4 3 None 00 00 00 00 REAL Get REAL pressure Open

0Ehex 4 5 3 None 0000 00 00 00

STRUCT Get BYTE exception statusGet REAL vacuum pressure

Open

0Ehex 4 0F 3 None 00 0000 0000 00 00 00

UINTINT

Get UINT vacuum pressureGet INT differential pressurePlaceholders

Open

0Ehex 4 10 3 None 0000 0000 0000 00 00 00

BYTE UINTINT

Get BYTE exception statusGet UINT vacuum pressureGet INT differential pressurePlaceholders

Open

0Ehex 4 11 3 None 000000 0000 0000 00 00 00

BYTEBYTEUINTINT

Get BYTE exception statusGet BYTE setpoint statusGet UINT vacuum pressureGet INT differential pressurePlaceholders

Open

0Ehex 4 12 3 None 00 00 00 0000 00 00 0000 00 00 00 00 00 00 00

REALREAL

Get REAL vacuum pressureGet REAL differential pressurePlaceholders

Open

0Ehex 4 13 3 None 0000 00 00 0000 00 00 0000 00 00 00 00 00 00 00

BYTEREALREAL

Get BYTE exception statusGet REAL vacuum pressureGet REAL differential pressurePlaceholders

Open

0Ehex 4 14 3 None 000000 00 00 0000 00 00 0000 00 00 00 00 00 00 00

BYTE BYTE REALREAL

Get BYTE exception statusGet BYTE setpoint statusGet REAL vacuum pressureGet REAL differential pressurePlaceholders

Open

Appendix C


Connection object, explicit message connection


0Ehex 5 1 1 None 3 USINT Get state of the object, range 0–5 Open

0Ehex 5 1 2 None 0 USINT Get instance type, explicit Open

0Ehex 5 1 3 None 83hex BYTE Get transport class trigger Open

0Ehex 5 1 4 None FB 05 UINT Get produced connection ID Open

0Ehex 5 1 5 None FC 05 UINT Get consumed connection ID Open

0Ehex 5 1 6 None 21hex BYTE Get initial communication characteristics Open

0Ehex 5 1 7 None 18 00 UINT Get produced connection size Open

0Ehex 5 1 8 None 18 00 UINT Get consumed connection size Open

0Ehex 5 1 9 None C4hex 09 UINT Get expected packet rate, range 0–65535 Open

10hex 5 1 9 00 00 Success UINT Set expected packet rate Open

0Ehex 5 1 0Chex None 1 USINT Get watchdog timeout action, 1 or 3 Open

10hex 5 1 0Chex 0 Success UINT Set watchdog timeout action Open

0Ehex 5 1 0Dhex None 00 00 UINT Get produced connection path length Open

0Ehex 5 1 0Ehex None 4 EPATH Get produced connection path Open

0Ehex 5 1 0Fhex None 00 00 UINT Get consumed connection path length Open

0Ehex 5 1 10hex None 4 EPATH Get consumed connection path Open

0Ehex 5 1 11hex None 00 00 UINT Get production inhibit time Open

05hex 5 1 None None Success None Reset inactivity/watchdog timer Open

Connection object, I/O connection


0Ehex 5 2 1 None 3 USINT Get state of the object, range 0–5 Open

0Ehex 5 2 2 None 1 USINT Get instance type, I/O Open

0Ehex 5 2 3 None 82hex BYTE Get transport class trigger Open

0Ehex 5 2 4 None FF 03 UINT Get produced connection ID Open

0Ehex 5 2 5 None FD 05 UINT Get consumed connection ID Open




0Ehex 5 2 9 None 00 00 UINT Get expected packet rate, range 0–65535 Open

10hex 5 2 9 00 00 Success UINT Set expected packet rate Open

0Ehex 5 2 0Chex None 0 USINT Get watchdog timeout action Open


0Ehex 5 2 0Ehex None 5 EPATH Set produced connection path length,1–5 or 15–20

Open


0Ehex 5 2 10hex None 1 EPATH Get consumed connection path length, 0 Open



Messaging Summary


Connection object, COS/cyclic connection


0Ehex 5 4 1 None 3 USINT Get state of the Object, range 0–5 Open

0Ehex 5 4 2 None 1 USINT Get instance type, I/O Open

0Ehex 5 4 3 None 0hex12 BYTE Get transport class trigger Open

0Ehex 5 4 4 None 7F 03 UINT Get produced connection ID Open

0Ehex 5 4 5 None FA 05 UINT Get consumed connection ID Open




0Ehex 5 4 9 None 00 00 UINT Get expected packet rate, range 0–65535 Open

10hex 5 4 00 00 Success Set expected packet rate Open

0Ehex 5 4 0Chex None 0 USINT Get watchdog timeout action Open


0Ehex 5 4 0Ehex None 5 EPATH Set produced connection path,1 or 2 or 4 or 5

Open


0Ehex 5 4 10hex None 1 EPATH Set consumed connection path, 0 or 1 Open


10hex 5 2 11hex 00 00 Success UINT Set production inhibit time Open


Acknowledge handler object


0Ehex 2Bhex 1 1 None 16 00 UINT Get acknowledge timer Open

10hex 2Bhex 1 1 16 00 Success + data

UINT Set acknowledge timer Open

0Ehex 2Bhex 1 2 None 1 USINT Get acknowledge retry limit Open

10hex 2Bhex 1 2 1 Success USINT Set acknowledge retry limit Open

0Ehex 2Bhex 1 3 None 1 UINT Get producing connection instance Open

Appendix C


Device supervisor object


0Ehex 30hex 1 3 None “CG” SSTRING Get device type, combination gauge Open

0Ehex 30hex 1 4 None “E54-0997” SSTRING Get revision level, SEMI S/A standard Open

0Ehex 30hex 1 5 None “” SSTRING Get manufacturer’s name, “GRANVILLE-PHILLIPS”

Open

0Ehex 30hex 1 6 None “385601” SSTRING Get manufacturer’s model number Open

0Ehex 30hex 1 7 None “1.01” SSTRING Get software revision level Open

0Ehex 30hex 1 8 None “1.01” SSTRING Get hardware revision level Open

0Ehex 30hex 1 0Bhex None 4 USINT Get device status Open

0Ehex 30hex 1 0Chex None 0 BYTE Get exception status Open

0Ehex 30hex 1 0Fhex None 0 BOOL Get alarm enable Open

10hex 30hex 1 0Fhex 0 Success Set alarm enable

0Ehex 30hex 1 10hex None 0 BOOL Get warning enable Open

10hex 30hex 1 10hex 0 Success Set warning enable

05hex 30hex 1 None None Success None Reset object service Open

06hex 30hex 1 None None Success None Start device execution(No effect on device)

Open

4Bhex 30hex 1 None None Success None Abort device activity (No effect on device) Open

4Chex 30hex 1 None None Success None Recover from abort state(No effect on device)

Open

4Dhex 30hex 1 None None Success None Perform diagnostics (No effect on device) Open

Analog sensor object, instance 0


0Ehex 31hex 0 5Ehex None 00 00 00 00 REAL Active value, vacuum pressure Open

0Ehex 31hex 0 5Fhex None 01 00 UINT Active instance number, 1 or 2 Open

0Ehex 31hex 0 60hex None 3 USINT Number of gauges, 2 or 3 Open

0Ehex 31hex 0 63hex None 1 UINT Instance selector, 1 for combination gauge Open

Messaging Summary


Analog sensor object, instance 1, Convectron gauge


0Ehex 31hex 1 3 None CAhex USINT Get data type Open

0Ehex 31hex 1 4 None 01 03 UINT Get pressure unit, 769 = Torr Open

10hex 31hex 1 4 None 01 03 UINT Set pressure unit, 769 or 776 or 777769 = Torr776 = mbar777 = pascal

Open

0Ehex 31hex 1 5 None 1 BOOL Get reading valid, 0 or 1 Open

0Ehex 31hex 1 6 None 00 00 00 00 REAL Get pressure reading Open

0Ehex 31hex 1 7 None 0 BYTE Get status, alarm or warning Open

0Ehex 31hex 1 22hex None C8 00 UINT Get produce_trigger_delta Open

10hex 31hex 1 22hex C8 00 Success UINT Set produce_trigger_delta, 0 to 50000 Open

0Ehex 31hex 1 24hex None 1 USINT Get produce trigger delta data type Open

0Ehex 31hex 1 63hex None 02 00 UINT Get subclass number Open

0Ehex 31hex 1 67hex None 25 00 UINT Get maximum internal temperature Vendor

0Ehex 31hex 1 68hex None 25 00 UINT Get current internal temperature Vendor

4Bhex 31hex 1 None None None None Calibrate module at vacuum pressure Open

4Chex 31hex 1 None None None None Calibrate module at atmospheric pressure Open

Appendix C


Analog sensor object, instance 2, differential pressure


0Ehex 31hex 2 3 None CAhex USINT Get data type Open

0Ehex 31hex 2 4 None 01 03 UINT Get pressure unit, 769 = Torr Open

10hex 31hex 2 4 None 01 03 UINT Set pressure unit, 769 or 776 or 777769 = Torr776 = mbar777 = pascal

Open

0Ehex 31hex 2 5 None 1 BOOL Get reading valid, 0 or 1 Open

0Ehex 31hex 2 6 None 00 00 00 00 REAL Get pressure reading Open

0Ehex 31hex 2 7 None 0 BYTE Get status, alarm or warning Open

0Ehex 31hex 2 22hex None C8 00 UINT Get produce_trigger_delta Open

10hex 31hex 2 22hex C8 00 Success UINT Set produce_trigger_delta Open

0Ehex 31hex 2 24hex None 01 USINT Get produce trigger delta data type, percent

Open

0Ehex 31hex 2 63hex None 03 00 UINT Get subclass number Open

0Ehex 31hex 2 67hex None 25 00 UINT Get maximum internal temperature Vendor

0Ehex 31hex 2 68hex None 25 00 UINT Get current internal temperature Vendor

4Bhex 31hex 2 None None None None Set differential pressure zero Open

4Chex 31hex 2 None None None None Set differential pressure gain adjust Open

Messaging Summary


Trip point object, instance 1, relay 1


0Ehex 35hex 1 5 None 00 00 00 00 REAL Get pressure at which relay 1 activates Open

10hex 35hex 1 5 00 00 00 00 Success REAL Set pressure at which relay 1 activates Open

0Ehex 35hex 1 6 None 0 BOOL Get relay 1 enabled/disabled status0 = Relay 1 is disabled1 = Relay 1 is enabled

Open

10hex 35hex 1 6 0 Success BOOL Set relay 1 enabled/disabled status Open

0Ehex 35hex 1 7 None 0 BOOL Get relay 1 activation/deactivation status0 = Relay 1 is deactivated1 = Relay 1 is activated

Open

0Ehex 35hex 1 8 None 0 BOOL Get relay 1 polarity0 = Activate with decreasing pressure1 = Activate with increasing pressure

Open

10hex 35hex 1 8 0 Success BOOL Set relay 1 polarity

0Ehex 35hex 1 9 None 0 USINT Get override status0 = Normal2 = Force false

Open

0Ehex 35hex 1 0Ahex None 00 00 00 00 REAL Get relay 1 hysteresis as a percentage of pressure if source path from analog object = 24 00 or as a pressure value if source path from analog object = 24 03

Open

10hex 35hex 1 0Ahex 0 Success REAL Set relay 1 hysteresis Open

0Ehex 35hex 1 0Chex None 24 01 EPATH Get destination path, 01 Open

0Ehex 35hex 1 0Dhex None 0 BOOL Get output to output object Open

0Ehex 35hex 1 0Ehex None 24 00 EPATH Get source path from analog object Open

10hex 35hex 1 0Ehex None 24 01 EPATH Set relay 1 assignment24 01 for vacuum pressure24 02 for differential pressure

Open

0Ehex 35hex 1 0Fhex None 00 00 24 00 REAL Get input data from analog sensor object Open

0Ehex 35hex 1 11hex None CAhex USINT Get data type, CAhex Open

Appendix C





10hex 35hex 2 5 00 00 00 00 Success REAL Set pressure at which relay 2 activates Open


Open

10hex 35hex 2 6 0 Success BOOL Set relay2 enabled/disabled status Open


Open


Open

10hex 35hex 2 8 0 Success BOOL Set relay 2 polarity Open


Open


Open

10hex 2 0Ahex 0 Success REAL Set relay 2 hysteresis Open





Open



Messaging Summary





10hex 35hex 3 5 00 00 00 00 Success Set pressure at which relay 3 activates Open


Open



Open


Open



Open


Open






Open



Appendix C





10hex 35hex 4 5 00 00 00 00 Success Set pressure at which relay 4 activates Open


Open



Open


Open



Open


Open






Open



Discrete output point object


0Ehex 09hex 1 3 None 0 BOOL Get output point value controlling relay 1 Open





Index

AAddress for RS-485 module 89Address switches 54, 59, 88, 90Alarms and warnings

status using explicit messages 84, 117status using polled I/O 83, 116

AppendixesDeviceNet Messaging Summary 133Specifications 121Theory of Operation 129

CCalibration

atmospheric pressure 48, 80, 107Convectron gauge 24differential pressure zero 50, 82, 108vacuum pressure 49, 81, 107

Caution and warning statements 9CE Mark compliance 19, 121Chapters

Analog Operation 29Before You Begin 9DeviceNet Operation 53Installation 15Maintenance 111Operation Overview 25RS-485 Operation 87

Connections to vacuum chamber 123Convectron gauge

base 118internal volume 122removal 118replacement 119sensing wire filament 122test 117theory of operation 129

Customer service 13, 111

DDamage requiring service 111Data conversion 64Data rate 60Data types

BOOL 13

BYTE 13EPATH 13INT 13REAL 13SSTRING 13STRUCT 13UINT 13USINT 13WORD 13

Defaultsatmospheric pressure calibration 83differential pressure zero 83digital communication 83, 109factory 83, 109relay polarity 83, 109relay setpoint pressure 83, 109RS-485 commands 93vacuum pressure calibration 83

Definitionsaddress 12attribute 12BOOL data 13BYTE data 13class 12data rate 12data type 13device data 12DeviceNet data types 13DeviceNet protocol 12EPATH data 13explicit messages 12instance 12INT data 13master data 12polled I/O messages 12REAL data 13SSTRING data 13STRUCT data 13UINT data 13USINT data 13WORD data 13

DeviceNet messaging summaryExplicit messages 134Polled I/O 133

DeviceNet operation

Index


address switches 59calibration at atmospheric pressure 80calibration at vacuum pressure 81communication configuration 60data conversion for pressure values 64error codes 83get firmware version 82get relay activation/deactivation status 79get relay assignments 80get relay enable/disable status 78get relay hysteresis 79get relay trip points 78get vacuum pressure 65module performance with 57pressure measurement unit measurement unit 64protocol for module 58rate switch 60reset to power-up state 82setpoint relays 72status LEDs 56switches and indicators 58

DeviceNet protocoladdress switches 59communication configuration 60explicit messages summary 134explicit messages, alarm and warning 84, 117module performance with 57NET (network) status LED 56polled I/O messaging summary 133polled I/O, alarm and warning 83, 116rate switch 60switches and indicators 58

Differential pressure measurement 121Differential pressure sensor

analog setpoint relay 2 46theory of operation 129

Digital formatDeviceNet module 125RS-485 module 126

Digital protocolDeviceNet module 125RS-485 module 126

EError codes 83, 116

Error messages, troubleshooting 115Error responses 89Explicit messages

alarm and warning status 84, 117messaging summary 134

FFactory settings for analog module 51Firmware version 82, 108Fittings

1/8 NPT pipe thread 18ConFlat flange fitting 18KF flange 18VCR type 18

Front panelfeatures of analog 31features of DeviceNet 55features of RS-485 89

GGround

connection to vacuum chamber 22wiring 22

HHysteresis

analog setpoint relays 41DeviceNet setpoint relays 73RS-485 setpoint relays 97

II/O connector 122

analog module 20, 124DeviceNet module 21, 125RS-485 module 21, 126

Indicatorsanalog setpoint and power on 47analog setpoints 31power on 31

Installation 15attaching module to vacuum chamber 18calibrating Convectron gauge 24CE Mark compliance 19configuring relays for application 23DeviceNet wiring terminals 19

Index


eliminating radio frequency interference (RFI) 24locating and orienting module 16module components 15module power supply wiring 19mounting position 122pressure relief devices 16replacement Convectron gauge 120wiring 19

Instructionsabout 9analog module operation 29DeviceNet module operation 53installation 15maintenance 111reading and following 10RS-485 module operation 87

LLED status indicator 55Light emitting diode (LED)

MOD (module) 57NET (network) 56

MMaintenance 111

Convectron gauge base 118Convectron gauge removal 118Convectron gauge replacement 119Convectron gauge test 117customer service 111damage requiring service 111DeviceNet error codes 116failure symptoms, causes, and solutions 113returning a damaged module 120RS-485 error messages 114troubleshooting 112troubleshooting precautions 112

Moduleanalog front panel 30analog output specifications 124attaching to vacuum chamber 18DeviceNet front and back panels 54dimensions 123location 16operation below 10-3 Torr 50, 81, 107

orientation 17physical characteristics 123power supply 122preparing analog module 29preparing DeviceNet module 53preparing RS-485 module 87returning if damaged 120RS-485 front and back panels 88RS-485 optional display 106

OOpen DeviceNet Vendors Association (ODVA) 58,

125Operation

analog front panel 30analog module 29analog setpoint relay 1 behavior 41analog setpoint relay 2 behavior 42below 10-3 Torr 50, 81, 107DeviceNet front and back panels 54DeviceNet module 53DeviceNet setpoint relay 1 and 3 behavior 74DeviceNet setpoint relay 2 and 4 behavior 74LED status indicator 55overview 25preparing analog module 29preparing DeviceNet module 53preparing RS-485 module 87RS-485 command structure 92RS-485 commands 92RS-485 front and back panels 88RS-485 module 87RS-485 module parity 94RS-485 optional display 106RS-485 setpoint relay 1 and 3 behavior 97RS-485 setpoint relay 2 and 4 behavior 98tasks and page references for analog 25tasks and page references for DeviceNet 58tasks and page references for RS-485 27

Outputsanalog specifications 124commonly used gases, analog 32N2 or air, analog 32other gases, analog 32

Index


PParity for RS-485 module 94Piezo resistive diaphragm sensor 129Polled I/O

alarm and warning status 83, 116messaging summary 133

PotentiometersConvectron ATM adjust 31, 48Convectron VAC adjust 31, 50Diaphragm ATM zero adjust 31, 51setpoint 1 adjust 31, 43setpoint 2 adjust 31, 47

Power supply 122Precautions for troubleshooting 112Pressure

measurement unit 64, 101reading true values 66, 103relief devices 16true versus indicated 37, 66, 103versus analog output voltage 33

Pressure toggle switch for RS-485 display 88Protocol for DeviceNet module 125Protocol for RS-485 module 126

RRadio frequency interference (RFI) 24Relief devices 16Returning a damaged module 120RS-485 command set 93RS-485 command structure 92RS-485 command symbols 92RS-485 commands

address 89FAC 109PC 95PCG 100RD 102RPCS 101RPG 101RU 101SB 94SU 101TO 82, 108TS 107TZ 107

VER 108RS-485 error responses 114RS-485 physical layer specifications 90

SSetpoint relays

activation direction 41, 73, 97analog and power on indicators 47analog module 41analog relay 1 behavior 41analog relay 2 behavior 42analog test point for relay 1 43analog test point for relay 2 47assignments 75, 100configuring for application 23contact rating 122DeviceNet module 72DeviceNet relay 1 and 3 behavior 74DeviceNet relay 2 and 4 behavior 74disabled/enabled state 78, 100hysteresis 41, 73, 97range 41, 73, 97RS-485 module 99RS-485 relay 1 and 3 behavior 97RS-485 relay 2 and 4 behavior 98specifications for analog 124specifications for DeviceNet 125specifications for RS-485 126status 79, 101test point voltage versus pressure 44–45type 122

Specifications 121analog module 124analog output 124analog setpoint relays 124CE Mark compliance 121Convectron gauge internal volume 122Convectron gauge sensing wire 122DeviceNet module 125DeviceNet setpoint relays 125differential pressure measurement 121I/O connector 122module dimensions 123mounting position 122physical characteristics 123

Index


power supply 122RS-485 module 126RS-485 optional display 127RS-485 physical layer 90RS-485 setpoint relays 126setpoint relays 122temperature 121vacuum chamber pressure measurement 121vacuum connections 123

Status LED 56Switches for DeviceNet address 54Switches for RS-485 address 88, 90Symbols in RS-485 commands 92

TTemperature

non-operating 121operating 121

Test pointsanalog atmospheric pressure calibration 31, 48analog setpoint relay 1 31, 43analog setpoint relay 2 31, 47analog vacuum chamber pressure calibration 31,

50common 31, 43, 47, 48, 50, 51diaphragm zero calibration 31, 51

Testing Convectron gauge 117Theory of operation 129

Convectron gauge 129Convectron heat-loss Pirani gauge 130differential pressure sensor 129Piezo resistive diaphragm sensor 129Wheatstone bridge 130

Troubleshootingfailure symptoms, causes, and solutions 113RS-485 error messages 115

VVacuum chamber

1/8 NPT pipe thread fitting 18attaching module to 18ConFlat flange 18connections 123ground connection to 22KF flange fitting 18

pressure measurement 121VCR type fitting 18

Voltageanalog differential pressure 40, 46example test point 44–45

WWheatstone bridge 130Wiring

ground connection to vacuum chamber 22grounding 22I/O connector for analog module 20, 124I/O connector for DeviceNet module 21, 125I/O connector for RS-485 module 21, 126I/O connector specifications 122installation 19module power supply 19power supply 122Wheatstone bridge 130

Index


6450 Dry Creek ParkwayLongmont, CO 80503 USAPhone: 1-303-652-4400

15 Elizabeth DriveChelmsford, MA 01824 USAPhone: 1-978-262-2400

Worldwide Customer Service/Support - 24/7Phone: 1-800-367-4887

To obtain a copy of this instruction manual online,visit our website at www.brooks.com(Adobe® Reader® version 5.0 or higher required)

© 2007-2010 Brooks Automation, Inc.


Instruction manual part number 385008

Revision A - August 2010

Instruction Manual

Series 385

Granville-Phillips® Series 385 Convectron®

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Transcript of Granville-Phillips® Series 385 Convectron®