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GE Fanuc Automation

Computer Numerical Control Products

C Series Laser

Maintenance Manual

GFZ-70125EN/03 December 1999

GFL-001

Warnings, Cautions, and Notesas Used in this Publication

WarningWarning notices are used in this publication to emphasize that hazardous voltages, currents,temperatures, or other conditions that could cause personal injury exist in this equipment or maybe associated with its use.

In situations where inattention could cause either personal injury or damage to equipment, aWarning notice is used.

CautionCaution notices are used where equipment might be damaged if care is not taken.

NoteNotes merely call attention to information that is especially significant to understanding andoperating the equipment.

This document is based on information available at the time of its publication. While effortshave been made to be accurate, the information contained herein does not purport to cover alldetails or variations in hardware or software, nor to provide for every possible contingency inconnection with installation, operation, or maintenance. Features may be described herein whichare not present in all hardware and software systems. GE Fanuc Automation assumes noobligation of notice to holders of this document with respect to changes subsequently made.

GE Fanuc Automation makes no representation or warranty, expressed, implied, or statutorywith respect to, and assumes no responsibility for the accuracy, completeness, sufficiency, orusefulness of the information contained herein. No warranties of merchantability or fitness forpurpose shall apply.

©Copyright 1999 GE Fanuc Automation North America, Inc.

All Rights Reserved.

Table of ContentsB--70125EN/03

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1. OVERVIEW 1. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

1.1 ORGANIZATION OF THE MANUAL 2. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

1.2 APPLICABLE MODELS 3. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

1.3 RELATED MANUALS 4. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

1.4 TO USE THE LASER OSCILLATOR SAFETY 5. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

2. SAFETY 6. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

2.1 WARNING 7. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

2.2 CAUTION 10. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

2.3 NOTE 10. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

2.4 WARNING LABELS 11. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

2.5 OPTICAL PATHS IN THE OSCILLATOR 20. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3. INTERNAL STRUCTURE 23. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.1 GENERAL 24. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.2 COMPONENT DETAILS 32. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4. INSTALLATION 43. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.1 INSTALLATION PROCEDURE 44. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.2 PREPARATION PRIOR TO SHIPMENT 53. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.2.1 Packing for Transportation 53. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.2.2 Removing Cooling Water 54. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.3 DETAILS OF CHECKING 55. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.4 OSCILLATOR CONNECTIONS 63. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.4.1 Cooling Water 63. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.4.1.1 Specification of the cooling water 63. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.4.1.2 Water treating agent 63. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.4.1.3 Chemical cleaner 64. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.4.1.4 Anti--freezing agent 64. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.4.2 Laser Gas 65. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.4.2.1 Laser gas specification 65. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.4.2.2 Gas pipe 65. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.4.3 Electrical Connections 66. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.4.3.1 Connections between the NC and oscillator, and power cable connection 66. . . . . . . . . . . . . . . .

4.4.4 Inter--unit Connections (C3000C Only) 67. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.4.4.1 Electrical cables 67. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.4.4.2 Connection 67. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.4.4.3 Connection of cooling water pipes 67. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.4.4.4 Gas piping 68. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5. MAINTENANCE 69. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5.1 DAILY INSPECTION 70. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5.2 PERIODIC MAINTENANCE 71. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

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5.3 DETAILS OF MAINTENANCE 72. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5.3.1 Turbo Blower Oil 72. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5.3.2 Exhaust Pump Oil 73. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5.3.3 Exhaust Pump Filter 74. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5.3.4 Exhaust Pipe Filter 75. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5.4 MAINTENANCE PARTS 77. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

6. TROUBLESHOOTING 86. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

6.1 TROUBLESHOOTING PROCEDURE 87. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

6.2 ERROR MESSAGES AND COUNTERMEASURES 87. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6.3 RESPONDING TO ALARM MESSAGES ON THE SCREEN 88. . . . . . . . . . . . . . . . . . . . . . . . . . . . .

6.4 MAJOR FAULTS 109. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

6.4.1 Laser Power Supply Alarm Display 109. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

6.4.2 Power Supply cannot be Switched off Using CRT/MDI Switch. 111. . . . . . . . . . . . . . . . . . . . . . .

6.4.3 Power Supply cannot be Switched on Using CRT/MDI Switch. 111. . . . . . . . . . . . . . . . . . . . . . .6.4.4 Laser Output Just After Switch on is Low. 111. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

6.4.5 Display of Fluctuating Laser Output on CRT 112. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

6.4.6 Non--fuse Breaker for Cooling Fans, Electromagnetic Valves;and Stabilized Power Sources is Tripping. 112. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

6.4.7 Electromagnetic Contactor of Vane Pump Trips Thermally. 113. . . . . . . . . . . . . . . . . . . . . . . . . .

6.4.8 Main Breaker Trips. 113. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6.4.9 Excessive Laser Gas Consumption 114. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

6.4.10 High--frequency Inverter Alarm Display 114. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

6.5 OBSERVING VOLTAGE OF POWER LINE 117. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

6.5.1 Measurement of Voltage 117. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

6.5.2 Phase Relation 117. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6.5.3 Measurement of Voltage of DC Power Supply Unit 118. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

6.5.4 Checking the IF PCB Signals 122. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

6.5.5 Checking the Jumper Pins (FS16--L, 16i--L) 122. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

6.6 INDICATION OF STATE BY MEANS OF SELF DIAGNOSTIC FUNCTION 123. . . . . . . . . . . . . . .

6.6.1 Data Items Displayed on the Diagnosis Screen 123. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6.6.2 Laser Oscillator Status Display (FS16--L, 16i--L) 125. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

6.6.3 Laser Oscillator Status Display (FS0--L) 132. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

7. OSCILLATOR CONNECTIONS 138. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

7.1 ELECTRICAL CONNECTIONS 139. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

7.2 COOLING WATER PIPING 154. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

7.3 GAS PIPING 162. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

8. UNIT CONFIGURATION 170. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

8.1 INPUT UNIT 171. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

8.2 RELAY PCB B 190. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

8.3 PRESSURE CONTROLLER 191. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

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9. SETTING AND ADJUSTMENT 194. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

9.1 LASER POWER SUPPLY UNIT 195. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9.1.1 Checking before Adjustment, and Setting 195. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9.1.2 Base Discharge Adjustment 197. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9.1.2.1 C1500B (without a trigger electrode) (step 1) 197. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9.1.2.2 C2000B (step 1) 197. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9.1.2.3 C3000C (step 1) 198. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9.1.2.4 C2000B, C3000C (step 2) 198. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9.1.2.5 C6000B 198. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9.1.2.6 C1500B (with a trigger electrode), C2000C, C3000D 200. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9.1.2.7 C4000A 200. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9.1.3 Maximum Output Adjustment 202. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9.1.4 Fine Adjustment of VR11 and VR13 202. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9.1.5 Pulse Output Test 203. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9.1.6 Completion of Adjustment 203. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

9.2 TURBO PCB 205. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9.3 HIGH--FREQUENCY INVERTER 208. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

9.3.1 Adjusting the Inverter (A90L--0001--0382/C: Model Name: HFC--VAH2) 208. . . . . . . . . . . . . . .9.3.2 Adjusting the Inverter (A90L--0001--0465: Model Name: JH300) 211. . . . . . . . . . . . . . . . . . . . .

9.4 PRESSURE CONTROLLER 218. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9.4.1 Setting the Gas Supply Pressure Sensor 218. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9.4.2 Setting the Atmospheric Pressure Sensor 218. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

9.5 ADJUSTING THE EXHAUST CONTROLLER(ADJUSTING THE LASER GAS CONSUMPTION) 220. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

9.6 SETTING THE POWER INPUT COMPENSATION COEFFICIENT 221. . . . . . . . . . . . . . . . . . . . . .9.7 WATER FLOW SENSOR 222. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

9.7.1 Adjusting the Water Flow Sensor for C1500B, C2000B, and C3000C 222. . . . . . . . . . . . . . . . . .9.7.2 Adjusting the Flow Sensor of the C2000C, C3000D, C4000A, and C6000B 224. . . . . . . . . . . . .

9.8 DISCHARGE AGING 225. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

10. REPLACEMENT PROCEDURES 227. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

10.1 INPUT UNIT 228. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10.1.1 Replacing the Stabilized Power Supply 228. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10.1.2 Replacing the Input Unit Control PCB 228. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10.1.3 Replacing the FS0--L Interface PCB (A16B--1110--0223) on the Oscillator Side 228. . . . . . . . . .10.1.4 Replacing the FS16--L, FS16i--L Interface PCBs on the Oscillator Side 229. . . . . . . . . . . . . . . . .

10.2 REPLACING THE LASER POWER SUPPLY 231. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10.3 REPLACING THE MATCHING BOX 241. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10.4 REPLACING THE TURBO BLOWER 242. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10.5 REPLACING THE TURBO PCB 245. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10.6 REPLACING INTERMEDIATE PCB B 245. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10.7 REPLACING THE EXHAUST PUMP 246. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10.8 REPLACING THE PRESSURE CONTROL UNIT 248. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10.9 REPLACING THE EXHAUST CONTROL UNIT 249. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10.10 REPLACING A DISCHARGE TUBE 254. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10.11 REPLACING A FAN UNIT 255. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

10.11.1 Replacing a Fan Unit 255. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10.11.2 Replacing a Fan--assisted Radiator 255. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

TABLE OF CONTENTS B--70125EN/03

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10.12 REPLACING THE POWER SENSOR UNIT 256. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10.13 REPLACING THE SHUTTER SECTION 257. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

10.13.1 Replacing the Shutter Unit 257. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10.13.2 Replacing the Shutter Mirror 257. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

10.13.3 Replacing the Shutter Switch 257. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10.14 REPLACING THE BEAM ABSORBER 260. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10.15 REPLACING THE HIGH--FREQUENCY INVERTER 264. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10.16 REPLACING THE WATER DISTRIBUTION UNIT 265. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

10.17 REPLACING THE FLOW SENSOR (C1500B, C2000B, C3000C) 274. . . . . . . . . . . . . . . . . . . . . . . .10.18 REPLACING THE CONDENSATION SENSOR 276. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10.19 REPLACING THE SEMICONDUCTOR LASER 276. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10.20 REPLACING THE TRIGGER ELECTRODE 277. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

11. LASER OPTICAL SYSTEM 279. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

11.1 CLEANING OPTICAL PARTS 280. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

11.1.1 Cleaning and Replacing the Output Mirror 287. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11.1.2 Cleaning and Replacing the Rear Mirror 289. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11.1.3 Cleaning and Replacing the Folding Mirrors 291. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11.1.4 Cleaning and Replacing the Zero--shift Mirror and Circular Polarization Mirror 294. . . . . . . . . .

11.2 OPTICAL AXIS ADJUSTMENT 296. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11.2.1 Alignment of the Resonator (Maximum Power Method) 296. . . . . . . . . . . . . . . . . . . . . . . . . . . . .11.2.1.1 Method of obtaining a maximum power by adjusting all mirrors 296. . . . . . . . . . . . . . . . . . . . . .11.2.1.2 Alignment procedure during installation after transportation 298. . . . . . . . . . . . . . . . . . . . . . . . .

11.2.1.3 Alignment procedure at mirror cleaning time 299. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11.2.1.4 Obtaining a maximum power 300. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11.2.1.5 Burn pattern collection and beam mode evaluation 301. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11.2.2 Alignment of the Semiconductor Laser 309. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

11.2.2.1 Adjusting the beam center of the semiconductor laser beam superimposedon the CO2 laser beam 309. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

11.2.2.2 Adjusting the diameter of the semiconductor laser beam 309. . . . . . . . . . . . . . . . . . . . . . . . . . . .11.2.3 Alignment of the Beam Folding Unit 311. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

APPENDIX

A. EXTERNAL VIEW 317. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

B. FANUC LASER C SERIES SPECIFICATIONS 332. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

C. ERROR CODE LIST 336. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

D. PARAMETERS 338. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

D.1 PARAMETERS FOR ENABLING/DISABLING VARIOUS FUNCTIONS 339. . . . . . . . . . . . . . . . . .D.2 PARAMETERS FOR DISCHARGE TUBE SELECTION 345. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

D.3 PARAMETERS FOR CONTOURING CONDITIONS 346. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .D.4 PARAMETERS FOR EDGE MACHINING CONDITIONS 347. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

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D.5 PARAMETERS FOR PIERCING CONDITIONS 349. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .D.6 PARAMETERS FOR HIGH--SPEED PIERCING CONDITIONS 350. . . . . . . . . . . . . . . . . . . . . . . . . .

D.7 PARAMETERS FOR POWER CONTROL 352. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

D.8 PARAMETERS FOR ASSIST GAS PRESSURE AND TIME SETTING 355. . . . . . . . . . . . . . . . . . . .

D.9 PARAMETERS FOR LASER MAINTENANCE TIMING INDICATION FUNCTIONS 358. . . . . . .

D.10 PARAMETERS FOR THE OSCILLATOR 359. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .D.11 PARAMETERS FOR DISCHARGE 363. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

D.12 PARAMETERS FOR GAS CONTROL (1) 365. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

D.13 PARAMETERS FOR HIGHLY REFLECTIVE MATERIAL ALARMS 369. . . . . . . . . . . . . . . . . . . . .

D.14 PARAMETERS FOR LASER POWER/VOLTAGE DROP 370. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

D.15 PARAMETERS FOR POWER TABLE SETTING 372. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .D.16 AUTOMATIC AGING FUNCTION 374. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

D.17 PARAMETERS FOR TRACING (DETECTION) 379. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

D.18 PARAMETERS FOR TRACING (DISPLAY) 381. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

D.19 PARAMETERS FOR TRACING (INTEGRAL PROCESSING) 382. . . . . . . . . . . . . . . . . . . . . . . . . . .

D.20 PARAMETERS FOR TRACING (PHASE COMPENSATION) 383. . . . . . . . . . . . . . . . . . . . . . . . . . .D.21 PARAMETERS FOR TRACING (DISPLACEMENT) 384. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

D.22 PARAMETERS FOR TRACING (FEEDRATE COMMAND) 386. . . . . . . . . . . . . . . . . . . . . . . . . . . . .

D.23 PARAMETERS FOR TRACING (APPROACH) 387. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

D.24 PARAMETERS FOR CONSTANT OPTICAL PATH LENGTH CONTROL 388. . . . . . . . . . . . . . . . .

D.25 LASER GAS MIXER FUNCTION 390. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .D.26 PARAMETERS FOR GAS CONTROL (2) 392. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

E. CONTROL SEQUENCES IN LASER OSCILLATOR 394. . . . . . . . . . . . . . . . . . . . . . . . . . .

E.1 OUTLINE OF LASER OSCILLATION SEQUENCES 395. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .E.2 INTRA--TUBE GAS PRESSURE CONTROL SEQUENCES 397. . . . . . . . . . . . . . . . . . . . . . . . . . . . .

E.3 TUBE VOLTAGE CONTROL SEQUENCES 400. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

E.4 OSCILLATION SEQUENCES FLOW CHART 403. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

F. REFIXING AND REPLACING GAS TUBE 409. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

F.1 REFIXING TUBE 410. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

F.2 REPLACING TUBE 411. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

G. REFIXING AND REPLACING WATER TUBE 412. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

G.1 REFIXING TUBE TO BRASS FITTING 413. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

G.2 REPLACING TUBE 414. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

H. GLOSSARY 415. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

B--70125EN/03 1. OVERVIEW

1

1 OVERVIEW

This manual describes the maintenance of the FANUC LASER C series,as well as the structure, configuration, and operation of the laser oscillator.This manual is aimed at those personnel responsible for laser oscillatormaintenance.

B--70125EN/031. OVERVIEW

2

This manual is organized as described below.

1. OverviewThis chapter describes the organization of this manual, applicablemodels, related manuals, and notes on reading this manual.

2. SafetyThis chapter describes the handling of lasers, and provides warnings,cautions and notes on high voltages, high temperatures, and toxicity.All users must read this chapter carefully to ensure safety.

3. Internal StructureThis chapter describes the structure and operation of the laseroscillator.

4. InstallationThis chapter describes the installation and checking of the laseroscillator.

5. MaintenanceThis chapter provides information on when and how the consumableparts of the laser oscillator must be replaced.

6. TroubleshootingThis chapter describes the actions to be applied in the event of a faultoccurring in the laser oscillator.

7. Oscillator ConnectionsThis chapter describes the internal connections of the electricalsystem, cooling system, and gas system.

8. Unit ConfigurationThis chapter describes the internal units of the laser oscillator.

9. Setting and AdjustmentThis chapter describes how to set and adjust the controls of the laseroscillator.

10.Replacement ProceduresThis chapter describes how to replace the individual units and parts ofthe laser oscillator.

11.Laser Optical SystemThis chapter describes how to clean, replace, and align the opticalcomponents of the laser oscillator.

Appendix1. Appearance of the Laser Oscillator2. FANUC LASER C series Specifications3. Error Code List4. Parameters5. Control Sequences in Laser Oscillator6. Refixing and Replacing Gas Tube7. Refixing and Replacing Water Tube8. Glossary

1.1ORGANIZATION OFTHE MANUAL


3

This manual covers the following models :

Models Abbreviation

FANUC LASER--MODEL C1500B C1500B


FANUC LASER--MODEL C2000C C2000C

FANUC LASER--MODEL C3000C C3000C

FANUC LASER--MODEL C3000D C3000D

FANUC LASER--MODEL C4000A C4000A


1.2APPLICABLEMODELS

B--70125EN/031. OVERVIEW

4

The following manuals are available for the FANUC LASER C series :

FANUC Series 0--L DESCRIPTIONS B--61572ECONNECTION MANUAL B--61573EOPERATOR’S MANUAL B--61574EMAINTENANCE MANUALB--61575E

FANUC Series 16--LA DESCRIPTIONS B--61852ECONNECTION MANUAL B--61853EOPERATOR’S MANUAL B--61854EMAINTENANCE MANUALB--61855EPARAMETER MANUAL B--61810E

FANUC Series 16--LB DESCRIPTIONS B--62442ECONNECTION MANUAL(HARDWARE) B--62443ECONNECTION MANUAL(FUNCTION) B--62443E--1OPERATOR’S MANUAL B--62594ENMAINTENANCE MANUALB--62445EPARAMETER MANUAL B--62600EN

FANUC Series 16i--LA DESCRIPTIONS B--63192ENCONNECTION MANUAL B--63193ENOPERATOR’S MANUAL B--63194ENMAINTENANCE MANUALB--63195ENPARAMETER MANUAL B--63200EN

FANUC LASER C Series DESCRIPTIONS B--70122ENOPERATOR’S MANUAL B--70124ENMAINTENANCE MANUALB--70125EN

(This manual)

1.3RELATED MANUALS


5

In this manual, the words Warning and Caution, corresponding todifferent levels of safety requirements, are provided to ensure the user’ssafety and protect against damage to the laser oscillator.Moreover, sections entitled Note are used to provide supplementaryinformation.Before attempting to use the laser oscillator, read Section 2.1 (Warning),Section 2.2 (Caution), and Section 2.3 (Note), and also the descriptionsin the Warnings, Cautions, and Notes that appear in the text.

Warning : Warnings are provided where there is a danger of death orserious injury if the laser oscillator is handled incorrectly.

Caution : Cautions are provided where there is a danger of injury ordamage to the laser oscillator if the laser oscillator is handledincorrectly.

Note : Notes provide supplementary information other thanWarnings and Cautions.

Before starting any maintenance work, take time to become familiar withthe functions of the individual units constituting the laser oscillator, therelationships between the units, and the locations where the units areinstalled.

WARNINGNever attempt handling, adjustment, or replacement workusing a method or procedure other than those describedand specified in this manual. Otherwise, dangerous laserlight may be emitted.

The function of the laser machining system depends not only on the laseroscillator but also on other system components such as the machine,power magnetics cabinet, servo system, CNC, and operator’s panel. Thismanual covers the laser oscillator only. For information about equipmentother than the laser oscillator, refer to the appropriate manuals providedby the machine tool builder.

Take time to become familiar with the contents of this manual. Store thismanual in a safe place.

1.4TO USE THE LASEROSCILLATORSAFETY

B--70125EN/032. SAFETY

6

2 SAFETY

This chapter describes precautions to be observed to ensure the safeoperation of the laser oscillator.

Read this chapter thoroughly before attempting to use the laser oscillator.Also, read the safety precautions in the operator’s manual supplied by themachine tool builder.

The laser oscillator may present a danger not only to the operator but alsoto other people working around the oscillator, up to a considerabledistance away. The laser oscillator must, therefore, be operated only bya person who has received appropriate training.

Warning labels are attached to the dangerous portions on the laseroscillator. Pay particular attention to the labeled portions.

B--70125EN/03 2. SAFETY

7

(1) It is extremely dangerous to expose your eyes to direct, scattered, orreflected CO2 laser light. Always wear protective glasses while thelaser is operating.Exposure to laser light can cause blindness. If your eyes areaccidentally exposed, seek medical advice immediately.

(2) Do not turn on the laser oscillator while a panel is removed or a dooris open.Operating the laser with a door open or panel removed may result inthe operator being directly exposed to CO2 laser radiation. Exposureto laser light can cause blindness and/or severe burns. If your eyesare accidentally exposed to laser light, seek medical adviceimmediately.When the laser oscillator must be turned on as part of maintenancework, wear protective glasses and protective clothes to ensure safety.

(3) If the laser oscillator is operated while the panel or door of the laseroscillator is open, ultraviolet light will be emitted from thehigh--frequency discharge section. Staring at the discharge sectionfor a long time is likely to damage the user’s eyesight. Always wearprotective glasses when operating the laser oscillator. If you senseany eye irritation, seek medical advice immediately.

(4) Surround the laser machining tool with a fence made of a materialwhich absorbs laser light well (such as acrylic). Place appropriatewarning notices on the fence.The door in the safety fence shall be fitted with an interlock switchsuch that opening the door stops the laser.Failure to provide such a fence exposes persons in the vicinity of themachine tool to the danger of being exposed to CO2 laser radiationand the associated risk of blindness. If a person is accidentallyexposed to laser light, seek medical advice immediately.

(5) The laser beam shall be no higher than average eye height. Enclosethe path of the laser beam with covers. Do not leave the end of thebeam path open. Place laser-- absorbing material at the end of thebeam path to absorb the beam’s energy.A CO2 laser beam is directional and has a high energy density.Exposure to laser light can cause blindness. Flammable material mayburn or explode if exposed to the laser beam. If your eyes areaccidentally exposed to laser light, seek medical advice immediately.

(6) High voltages of 3 to 4 kVO--P exist within the laser oscillatorhousing. Do not turn on the laser oscillator while a panel is removedor a door is open.Operating the laser with a door open or panel removed subjects theoperator to the danger of electric shock.When the laser oscillator must be turned on as part of maintenancework, wear protective glasses and protective clothes to ensure safety.

2.1WARNING


8

(7) Before daily inspection or the replacement of a maintenance part,open the main circuit breaker and turn the power supply off (doublepower--off).To prevent the power from being inadvertently turned on, lock thecircuit breaker open, and affix an indication of work in progress.Failure to turn off the power during inspection or replacementexposes the operator to the danger of electric shock.When the laser oscillator must be turned on as part of maintenancework, wear protective glasses and protective clothes to ensure safety.

(8) The oscillator output mirror and focusing lens on the machining headboth have a substrate made of ZnSe (zinc selenide), a toxic substance.Therefore, do not touch the mirror or lens with your bare hands.Inhaling ZnSe dust may cause difficulty in breathing, completelystopping the breathing of the victim in the worst case.If you accidentally touch the mirror or lens with your bare hands,wash your hands well under running water.If you accidentally inhale ZnSe dust or debris, seek medical adviceimmediately.

(9) Do not look at the machining point without eye protection.Otherwise, your eyes may be exposed to reflected laser light,resulting in blindness. If your eyes are accidentally exposed to laserlight, seek medical advice immediately.

(10) Before attempting to machine any material for the first time, consultwith the manufacturer of the material.Some materials generate toxic gases when cut or drilled by a laserbeam.Should you accidentally inhale any toxic gas, seek medical adviceimmediately.

(11) If the laser oscillator must be moved, entrust the work to the machinetool builder whenever possible. If performed by inexperiencedpersonnel, the oscillator may topple or be dropped, resulting in apotentially fatal accident.When the machine tool builder is not available to move the oscillator,follow the procedure described on the hanging method label. Whilemoving the oscillator, stand well clear and never pass under theoscillator.

(12) If there is a possibility of being exposed to CO2 laser radiationexceeding the maximum permissible exposure (MPE) level for skin,wear protective clothing. Otherwise, there is a danger of being burnt.

(13) The FANUC LASER C series is fitted with a red semiconductor laserto indicate the approximate position of invisible CO2 laser beam. Donot look directly at the semiconductor laser beam. Otherwise, youreyes may be injured.

(14) The gas circulating system in the oscillator becomes very hot.Do not touch the gas pipes, turbo blower, heat exchanger, or exhaustpump, until they have cooled down sufficiently after the oscillatorhas been turned off. Otherwise, you may be burnt.

(15) The workpiece becomes very hot during machining. Never touch theworkpiece with your bare hands. Otherwise, you may be burnt.

B--70125EN/03 2. SAFETY

9

(16) During machining, extremely hot chips are likely to be generated.Unless sufficient caution is exercised, there is a danger of the operatorbeing burnt, or of a fire being started.

(17) Some materials may burn or explode when laser machined. Beforeattempting to machine any material for the first time, consult with themanufacturer of the material, to prevent the danger of fire of or thepossibility of operator injury.

(18) The oscillator contains cooling fan units. Although the fan units arefitted with a finger guard, to prevent injury, keep your hands wellaway from the fans.


10

(1)The laser oscillator is controlled according to the values set in internalparameters of the CNC. If the laser oscillator is operated using valuesother than those set in the parameters, the laser oscillator willmalfunction. In the worst case, the laser oscillator can be damaged.

(1)During installation or maintenance necessitating the opening of anoscillator door or the removal of a panel, only persons who haveundergone maintenance training should operate the laser. In such acase, extreme caution must be exercised.

(2)Warning labels are affixed to those parts of the oscillator where thereis a danger of exposure to laser radiation. Observe the precautionsgiven on the labels. (Sec. 2.4 shows the warning labels.)

(3)Laser products shall conform to the regulations laid down in the lasersafety standard, including that stipulating control using a key.The oscillator start signal (RUN) shall be controlled with a key switchsuch that the oscillator cannot be turned on without a specific key.Control using a key ensures that other than the authorized personnelcannot operate the laser oscillator. It is extremely dangerous if aperson who is unfamiliar with the equipment attempts to operate thelaser oscillator.

(4)The shutter shall be unlocked only while a beam is being output.Otherwise, keep the shutter locked to provide protection should thelaser accidentally be turned on.

(5)Do not discard a used output mirror or focusing lens together withregular waste. If the output mirror or focusing lens is replaced, returnthe original to the supplier or entrust it to a specialized disposalcompany.

(6)Do not place any flammable material (such as paper, cloth, or wood)near the workpiece table.

(7)Keep a fire extinguisher beside the unit.(8)The FANUC LASER C series is equipped with an alarm lamp. The

alarm lamp blinks while discharge is in progress or whenever laserradiation is possible. While the alarm lamp is blinking, pay carefulattention to laser radiation and high voltages.

2.2CAUTION

2.3NOTE

B--70125EN/03 2. SAFETY

11

The oscillator uses high voltages and laser beam radiation. Such hazardsare indicated with warning labels attached to the positions shown in Fig.2.4 (a) to (i).

Fig. 2.4 (a) Warning label positions (C1500B, C2000B, and C2000C front view)

Fig. 2.4 (b) Warning label positions (C1500B, C2000B, and C2000C rear view)

2.4WARNING LABELS


12

Fig. 2.4 (c) Warning label positions (C3000C: Auxiliary machine)

B--70125EN/03 2. SAFETY

13

Fig. 2.4 (d) Warning label positions (C3000C and C3000D front view)

Fig. 2.4 (e) Warning label positions (C3000C and C3000D rear view)


14

Fig. 2.4 (f) Warning label positions (C4000A front view)

Fig. 2.4 (g) Warning label positions (C4000A rear view)

B--70125EN/03 2. SAFETY

15

Fig. 2.4 (h) Warning label positions (C6000B, JAPAN/FDA)

Fig. 2.4 (i) Warning label positions (C6000B, JAPAN/FDA)


16

1. Class indication label (JPN)

C1500B 1800WC2000B 3500WC2000C 3500WC3000C 4000WC3000D 4000WC4000A 5000W

C6000B 7000W

MODEL MAXIMUMOUTPUT

2. Class indication label (FDA)

MODEL MAXIMUMOUTPUT

C1500B 1800WC2000B 3500WC2000C 3500WC3000C 4000WC3000D 4000WC4000A 5000W

C6000B 7000W

B--70125EN/03 2. SAFETY

17

3. Warning label

4. Aperture label

5. Suspension method label (C1500B, C2000B, C2000C, C3000C,C3000D, C4000A, and C6000B)


18

6. Label on the door provided with a safety protection provision

7. Label inside the door provided with a safety protection provision

8. Label on the access panel

9. Label inside the access panel

B--70125EN/03 2. SAFETY

19

10.Discharge section label

11.Certification label

12.Equipment nameplate

13.Manufacturer ’s address label


20

The figures below show the laser optical paths inside the oscillator.

(Dischargetube No. 1)

(Dischargetube No. 3) Safety cover

Short opticalpath typebeam outputdirection

Long optical pathtype beam outputdirection

(Discharge tube No. 2) (Discharge tube No. 4)

Short opti-cal pathtype beamoutputdirection

Long optical pathtype beam outputdirection

Fig. 2.5 (a) Optical paths in the C1500B, C2000B, C2000C

2.5OPTICAL PATHS INTHE OSCILLATOR

B--70125EN/03 2. SAFETY

21

SHORT OPTICALPATH TYPEBEAM OUTPUTDIRECTION

LONG OPTICALPATH B TYPEBEAM OUTPUTDIRECTION



Fig. 2.5 (b) Optical paths in the C3000C, C3000D





Fig. 2.5 (c) Optical paths in the C4000A


22

Fig. 2.5 (d) Optical paths in the C6000B

B--70125EN/03 3. INTERNAL STRUCTURE

23

3 INTERNAL STRUCTURE

B--70125EN/033. INTERNAL STRUCTURE

24

Fig. 3.1 (a) to (g) show the block diagram of the laser oscillator.The FANUC LASER C series consists of a laser resonator, laser excitationpower supply, forced gas circulating system, pressure controller, exhaustcontroller, CNC interface, and a protective housing.

(1)Laser resonatorThe laser resonator consists of several discharge tubes, connected inseries using folding mirrors, with a rear mirror and output mirrorplaced at the open ends of the discharge tubes, thus sealing the tubes.The resonator is fitted with a gas pipe connecting port through whichlaser gas is fed into the discharge tubes.A discharge from the electrodes of the discharge tube energizes CO2molecules, which emit light. This light is amplified by stimulatedemission, repeated between the rear mirror and output mirror, a laserbeam being emitted from the output mirror.

(2)Laser excitation power supplyThis is a 2--MHz high--frequency power supply, the output of whichis controlled by the CNC. This power supply is used to create adischarge in the laser gas flowing through the discharge tubes, thusenergizing CO2 molecules.

(3)Forced gas circulating systemA gas circulating system is configured by connecting the resonator andturbo blower with a circulating pipe. Laser gas is forced through thedischarge tubes at a speed of 200 m/s or higher.A water--cooled heat exchanger, used to cool the high--temperature gasfrom the discharge tubes, is provided at the inlet side of the turboblower. At the outlet side of the turbo blower, another water--cooledheat exchanger dissipates the compression heat.

(4)Pressure controllerThe laser gas pressure within the forced gas circulating system iscontrolled by commands issued from the CNC, thus ensuring stablelaser output.

(5)Exhaust controllerThe laser gas flow is controlled by commands issued from the CNC.

(6)CNC interfaceInterface used to connect a FANUC Series 0--L, 16--L, or 16i--L. CNCcommands that, control the operation of the laser oscillator, such asstart/stop and laser output, are input via this interface.

(7)Protective housingAn enclosure that houses the above components. The housing,consisting of metal panels and doors, completely encloses the laseroscillator, thus protecting the operator from exposure to laser radiationand from high voltages. All panels are screw--fixed and cannot beremoved without an appropriate tool. The doors are also designed toprevent an accident from occurring as a result of careless operation.The doors can be opened only when the main circuit breaker is open.A door interlock function is also supported.

3.1GENERAL


25

Fig.3.1 (a) Block diagram (C1500B)


26

Fig.3.1 (b) Block diagram (C2000B)


27

SIG

NA

LC

AB

LE

(TO

CN

C)

INP

UT

UN

IT

STA

BIL

IZE

DP

SU

FOLD

ING

MIR

RO

R

FOLD

ING

MIR

RO

R

EX

HA

US

TC

ON

TRO

LLE

R

HO

UR

ME

TE

RE

XH

AU

ST

PU

MP

PR

ES

SU

RE

CO

NTR

OLL

ER

LAS

ER

PS

UU

NIT

MA

TCH

ING

BO

X

LAS

ER

PS

UU

NIT

MA

TCH

ING

BO

X

DIS

CH

AR

GE

TU

BE

DIS

CH

AR

GE

TU

BE

DIS

CH

AR

GE

TU

BE

DIS

CH

AR

GE

TU

BE

EX

HA

US

TG

AS

LAS

ER

GA

S

TUR

BO

BLO

WE

R

INLE

TH

/E

OU

TLE

TH

/E TUR

BO

PC

B

HF

INV

ER

TER

DE

WS

EN

SO

R

WAT

ER

DIS

TR

IBU

TO

R

WAT

ER

FLO

WS

EN

SO

R

TO PA

RTS

FRO

MP

AR

TS

BE

AM

AB

SO

RB

ER

PO

WE

RS

EN

SO

RR

EA

RM

IRR

OR

OU

TP

UT

CO

UP

LER

GU

IDE

LAS

ER

BE

AM

FOLD

ING

UN

IT

SH

UT

TE

RU

NIT

Fig.3.1 (c) Block diagram (C2000C)


28

Fig.3.1 (d) Block diagram (C3000C)


29

SIG

NA

LC

AB

LE

(TO

CN

C)

INP

UT

UN

IT

STA

BIL

IZE

DP

SU

FOLD

ING

MIR

RO

R

FOLD

ING

MIR

RO

R

EX

HA

US

TC

ON

TRO

LLE

RH

OU

RM

ETE

R

EX

HA

US

TP

UM

PP

RE

SS

UR

EC

ON

TRO

LLE

R

LAS

ER

PS

UU

NIT

LAS

ER

PS

UU

NIT

MA

TCH

ING

BO

X

DIS

CH

AR

GE

TU

BE

DIS

CH

AR

GE

TU

BE

DIS

CH

AR

GE

TU

BE

EX

HA

US

TG

AS

LAS

ER

GA

S

TUR

BO

BLO

WE

R

INLE

TH

/E

OU

TLE

TH

/E

TUR

BO

PC

B

HF

INV

ER

TER

DE

WS

EN

SO

R

WAT

ER

DIS

TR

IBU

TO

R

WA

TE

RF

LOW

SE

NS

OR

TO PA

RTS

FRO

MP

AR

TS

BE

AM

AB

SO

RB

ER

OU

TP

UT

CO

UP

LER

GU

IDE

LAS

ER

BE

AM

FOLD

ING

UN

IT

FO

LDIN

GM

IRR

OR

SH

UT

TE

RU

NIT

DIS

CH

AR

GE

TU

BE

DIS

CH

AR

GE

TU

BE

DIS

CH

AR

GE

TU

BEMA

TCH

ING

BO

XM

ATC

HIN

GB

OX

MA

TCH

ING

BO

X

LAS

ER

PS

UU

NIT

RE

AR

MIR

RO

RP

OW

ER

SE

NS

OR

FO

LDIN

GM

IRR

OR

Fig.3.1 (e) Block diagram (C2000C)


30

SIG

NA

LC

AB

LE

(TO

CN

C)

INP

UT

UN

IT

STA

BIL

IZE

DP

SU

FO

LDIN

GM

IRR

OR

EX

HA

US

TC

ON

TRO

LLE

RH

OU

RM

ET

ER

PR

ES

SU

RE

CO

NTR

OLL

ER

LAS

ER

PS

UU

NIT

LAS

ER

PS

UU

NIT

MA

TC

HIN

GB

OX

EX

HA

US

TG

AS

LAS

ER

GA

S

TUR

BO

BLO

WE

R

TUR

BO

PC

B

HF

INV

ER

TER

DE

WS

EN

SO

R

WAT

ER

DIS

TR

IBU

TO

RW

AT

ER

FLO

WS

EN

SO

R

TO PA

RTS

FRO

MP

AR

TS

BE

AM

AB

SO

RB

ER

OU

TP

UT

CO

UP

LER

GU

IDE

LAS

ER

BE

AM

FO

LDIN

GU

NIT

RE

AR

MIR

RO

R

SH

UT

TE

RU

NIT

DIS

CH

AR

GE

TU

BE

MA

TC

HIN

GB

OX

MA

TC

HIN

GB

OX

MA

TC

HIN

GB

OX

LAS

ER

PS

UU

NIT

PO

WE

RS

EN

SO

R

LAS

ER

PS

UU

NIT

FO

LDIN

GM

IRR

OR

FO

LDIN

GM

IRR

OR

FO

LDIN

GM

IRR

OR

DIS

CH

AR

GE

TU

BE

FO

LDIN

GM

IRR

OR

FO

LDIN

GM

IRR

OR

EX

HA

US

TP

UM

P

OU

TLE

TH

/E

INLE

TH

/E

Fig.3.1 (f) Block diagram (C4000A)


31

SIG

NA

LC

AB

LE(T

OC

NC

)

INP

UT

UN

IT

STA

BIL

IZE

DP

SU

FO

LDIN

GM

IRR

OR

FO

LDIN

GM

IRR

OR

PO

WE

RS

EN

SO

R

INLE

TH

/EIN

LET

H/E

TU

RB

OP

CB

INLE

TH

/EIN

LET

H/E

GU

IDE

LAS

ER

TOP

AR

TS

FR

OM

PA

RT

S

Fig.3.1 (g) Block diagram (C6000B)


32

The following describes the details of each component of the FANUCLASER C series. Fig. 3.2 (a) to (l) show the internal structure.

(1) ResonatorThe resonator consists of an output mirror, rear mirror, foldingmirrors, discharge tubes, power sensor unit, etc. It converts electricalenergy first to laser gas, then to optical energy (10.6--�msingle--wavelength laser beam).

(2) Output mirrorA transmitting/reflecting mirror which outputs the laser beam afterit has been amplified. The output mirror consists of a ZnSe (zincselenide) substrate, coated with dielectric. ZnSe is tightly toxic. Beparticularly careful, therefore, when handling the output mirror.

(3) Rear mirrorA reflecting mirror consisting of a Ge (germanium) substrate, coatedwith dielectric. Having a high reflectance of 99.5%, the rear mirroris used to reflect the laser beam within the resonator whiletransmitting 0.5% of the laser light so that the beam can be monitoredexternally.

(4) Folding mirrorThe folding mirror, consisting of a 45° block and a gold--coated Si(silicon) substrate, is used to divert the laser beam through 90°. Italso linearly polarizes the laser beam.

(5) Discharge tubeA pair of Ag (silver) electrodes are metallized on the surface of ahollow quartz glass pipe. A high--frequency discharge between theseelectrodes injects electrical energy into the laser gas. Each electrodeis coated with ceramic, preventing it from degrading and thusimproving system reliability.

(6) Power sensorAn optical sensor which detects the intensity of the laser beam,transmitted through the rear mirror, thus enabling monitoring of thelaser output level.

(7) Gas circulating systemA gas circulating path including a turbo blower, heat exchangers, andcirculating pipes, which supplies and exhausts laser gas to and fromthe discharge tubes at high speed.

(8) Turbo blowerDuring laser oscillation, the laser gas pressure is 100 to 700 (1330 to9310 Pa) when DGN. The turbo blower circulates thisrough--vacuum gas at high speed (up to 200 m/s within the dischargetubes) without contaminating the gas.

(9) Heat exchanger (inlet)Heat exchanger used to cool the laser gas that has been heated bydischarge, before it is drawn into the turbo blower.

(10) Heat exchanger (outlet)Heat exchanger used to cool the laser gas that has been heated bycompression in the turbo blower, before being forced into thedischarge tubes.

3.2COMPONENTDETAILS


33

(11) Pressure controllerThis unit constantly monitors the gas pressure in the discharge tubesand supplies fresh laser gas to the gas circulating system, thusmaintaining a constant pressure in the discharge tubes. This unit alsomonitors the laser gas supply state and the purging state in the gascirculating system.

(12) Exhaust pump unitThis unit is used to vacuum--exhaust laser gas from the gascirculating system such that its pressure falls to that used for laseroscillation. Also, within this unit, a small amount of circulating gasis constantly being exchanged, to prevent degradation of thecirculating gas.

(13) Exhaust controllerThe exhaust controller controls the flow rate of the laser gasexhausted by the exhaust pump unit. It adjusts the gas flow rate fromthat used for gas exchange to that used for pressure control. In theevent of a power failure, the exhaust controller immediately returnsthe exhaust pump unit to atmospheric pressure, thus protecting thepump.

(14) Exhaust system filterThe exhaust system filter is used to remove oil mist from the exhaustpump to prevent contamination of the gas circulating system andoptical parts. The C1500B, C2000B, C2000C, C3000C, C3000D,and C4000A do not have this filter.

(15) Hour meterThe hour meter indicates the total number of hours that the laseroscillator has operated (how many hours the exhaust pump hasoperated), to indicate whether maintenance or inspection isnecessary.

(16) Shutter sectionThe shutter section consists of a shutter, beam absorber, shuttercooling fan, etc., and is used to prevent output of the laser beamduring laser oscillation. While the shutter is closed, the laser beamis reflected by the shutter then absorbed by the beam absorber. Forsafety, the shutter is fitted with a photoelectric limit switch whichallows the system to monitor whether the shutter is open or closed.

(17) ShutterThe shutter consists of a gold--coated reflecting mirror, mounted onthe rotating arm of a rotary solenoid. The shutter can be opened andclosed instantaneously by issuing a CNC command. For safety, theshutter is equipped with a temperature sensor which allows thesystem to monitor the temperature of the shutter.

(18) Beam absorberWhile the laser oscillator is operating with the shutter closed, thelaser beam is guided into the beam absorber. The beam absorberabsorbs nearly 100% of laser beam and is water--cooled, allowing itto safely absorb the beam for relatively long periods. For safety, thebeam absorber is equipped with a temperature sensor which allowsthe system to monitor the temperature of the beam absorber.

FS16--L/ :FS16i--L


34

(19) Water distribution unitThis unit distributes cooling water, supplied from either a chiller unitor a temperature--regulated external water supply, to each unit in thelaser oscillator. For safety, the water distribution unit is equippedwith a flow sensor which allows the system to monitor the flow rateof the

(20) Laser power supply unitThis unit rectifies and smooths the 3--phase 200/220--V AC input,then supplies DC power to the RF inverter by controlling the PWMDC--DC converter, as directed by commands received from the CNC.The RF inverter converts DC power to 3 to 4 kVPO--P high--frequency(2 MHz) power, then outputs it to the matching box.

(21) Matching boxThe matching box contains a matching circuit, consisting of coils andcapacitors, which ensures that power is effectively input to thedischarge tubes. The matching box is connected to the laser powersupply unit via either a high--voltage cable or coaxial cable.

(22) Beam folding unitThis unit reverses the direction of the laser beam in the oscillator.Two zero--shift mirrors are used to ensure that the polarization of thelight remains constant. The C3000C employs a circular polarizationmirror as upper one, such that a circularly polarized beam isproduced.

(23) Relay PCB AThis PCB transmits signals output by the pressure control unit, suchas those from the pressure sensor, pressure control valve, andpressure switch, to the interface PCB.

(24) Relay PCB BThis PCB transmits signals output by the shutter section, such asthose from the limit switch, absorber temperature sensor, powersensor, and condensation sensor, to the interface PCB.

(25) Input unitThe input unit consists of an interface PCB, stabilized power supply,and power magnetics cabinet. It transfers signals between the laseroscillator and CNC, and supply power to each unit.

(26) Interface PCBFS0--L: Transfer analog, digital input (DI), and digital output

(DO) signals to and from the CNC (parallel interface).Transfers signals to and from the CNC via the FANUCI/O LINK (serial interface). Because this is a serialinterface, optical fiber cable can be used to enablelong--distance transmission.

(27) Stabilized power supplyThis unit converts the 200/220 VAC power source to DC power forthe interface PCB and other units.

(28) Power magnetics cabinetThe power magnetics cabinet distributes power, supplied from anexternal unit, to each unit in the laser oscillator. It also protects eachunit from overcurrents.


35

(29) Control PCBThis PCB sends the contractor open/close signal to the powermagnetics cabinet, as directed by commands received from the CNC.It also notifies the CNC of the open/close status of the circuit breakerin the power magnetics cabinet.

(30) Condensation sensor unitFor the C1500B, C2000B, or C3000C, the condensation sensor unitis mounted at the water port inlet; for the C2000C, C3000D,C4000A, or C6000B, the unit is mounted on the output mirror holder.If the sensor detects that the amount of condensation has exceededthe maximum allowable level, an alarm (abnormal watertemperature) is issued and laser output is stopped, thus preventing afault from occurring.

(31) High--frequency inverterThis inverter drives the turbo blower. It is responsible foracceleration/deceleration control during start and stop of the blower.

(32) Light source for superimposing visible beam (semiconductor laserunit)A CO2 laser beam is invisible to the naked eyes. The semiconductorlight source, therefore, is provided to enable checking of the laserbeam optical axis by superimposing a visible semiconductor laserbeam on the same optical axis. The operation of this light source islinked to the mechanical shutter. The semiconductor laser beam isoutput only while the shutter is closed. Using this beam, the opticalaxis of the external optical system can be adjusted roughly and areference position for the machining point determined.

(33) Turbo PCBThis PCB relays signals between the turbo blower andhigh--frequency inverter, interface PCB.

(34) Trigger electrodeWith preparatory discharge outside the laser oscillation area, maindischarge can be started easily, and the laser output becomescompletely zero at beam--off time.A trigger electrode is installed in the C1500B, C2000C, C3000D,and C4000A.


36

Fig. 3.2 (a) C1500B internal structure (front)

Fig. 3.2 (b) C1500B internal structure (rear)


37

Fig. 3.2 (c) C2000B internal structure (front)

Fig. 3.2 (d) C2000B internal structure (rear)


38

Fig. 3.2 (e) C2000C internal structure

Fig. 3.2 (f) C3000C internal structure (oscillator section, front)


39

Fig. 3.2 (g) C3000C internal structure (auxiliary machine section, front)

Fig. 3.2 (h) C3000C internal structure


40

Fig. 3.2 (i) C4000A internal structure

Fig. 3.2 (j) C6000B internal structure (oscillator section, front)


41

Fig. 3.2 (k) C6000B internal structure (oscillator section, rear)


42

5

5

34

34

Fig. 3.2 (l) Discharge tube and trigger electrode

B--70125EN/03 4. INSTALLATION

43

4 INSTALLATION

B--70125EN/034. INSTALLATION

44

Use the following procedure to make adjustments and checks duringinstallation.

(1) Check the environment at the installation location.D Environmental conditions

1) Ambient temperature : +5°C to +30°C2) Temperature variation : 1.1°C/minute maximum3) Humidity : 75% or below (relative humidity)4) Vibration : Acceleration not to exceed 0.05G.

Vibration amplitude not to exceed5µm.

5) Atmosphere : Dust must be minimized. There mustbe no organic volatile components.

6) Laser gas : CompositionCO2 : 5� 0.25%He : 40� 2.0%N2 : 55� 2.75%H2O : 5 ppm maximumCmHn : 1 ppm maximum

Purity : 99.99% or more(2) Remove all clamps.

The clamps are used only in transit. In particular, loosen theresonator clamp before it is stored. If the resonator is left for a longtime with the clamp tightened, the resonator is likely to be deformed.The clamp locations are shown in Fig. 4.1 (a) through Fig. 4.1 (d).

4.1INSTALLATIONPROCEDURE


45

DETAIL OF RESONATOR CLAMP PART A

DETAIL OF SHUTTER CLAMP PART

DETAIL OF RESONATOR CLAMP

RESONATOR CLAMP A RESONATOR CLAMP SHUTTER CLAMP

Fig. 4.1 (a) Clamp layout (C1500B, C2000B, C2000C, C3000C, C3000D)


46

DETAIL OF SHUTTER CLAMP PART

DETAIL OF RESONATOR CLAMP PART A DETAIL OF RESONATOR CLAMP

RESONATOR CLAMP A RESONATOR CLAMP SHUTTER CLAMP

Fig. 4.1 (b) Clamp layout (C4000A)


47

RESONATORCLAMP A

RESONATORCLAMP C

SHUTTERCLAMP

RESONATORCLAMP B

Fig 4.1 (c) Clamp layout (C6000B)


48

RESONATORCLAMP C

RESONATORCLAMP C

RESONATOR CLAMP B

RESONATOR CLAMP A

Fig 4.1 (d) Clamp layout (C6000B)


49

(3) Check the units installed in the main unit cabinet.D Check items

1) Check whether any printed circuit boards are loose or removed.2) Check whether any cables are damaged (such as damaged

sheathing).3) Check whether any connectors are loose or detached.4) Check that the discharge tubes are neither cracked nor damaged.5) Check that the turbo blowers, exhaust pump, and other units are

neither loose nor missing.6) Check that the power supply units and matching boxes are

neither loose nor missing.7) Check that the input unit is neither loose nor missing.8) Check that the connection to the electrode (copper plate) of each

discharge tube is not loose.9) Check that the water and gas pipes are not loose.

(4) Check all screw terminals in the units.D Check items

1) Terminal block of the input unit2) Power supply units and matching boxes

(5) Check the oil level in the turbo blowers and exhaust pump, and checkfor oil contamination.For details of how to supply and replace the oil, see Section 5.3.

(6) Connect the power and signal lines to the oscillator.See Section 4.4.3 for details.D Check items

1) Cable between the NC and oscillatorTo connect this cable, apply the procedure described in the“FANUC Series 0--L/16--L/16i--L Connection Manual.”

2) Oscillator power cable3) Grounding cable (class--1)4) Inter--unit connection between the oscillator and supplement

unit (C3000C)(7) Check all printed circuit board settings.D Check items

1) Setting pins on the oscillator IF PCBSee Section 6.5.5 for an explanation of the setting pins on theIF PCB.

(8) Laser gas and cooling water pipes.See Section 4.4.1 and Section 4.4.2 for details.D Check items

1) Laser gas pipe type

Recommended gas pipeNylon tube AS1, manufactured by Junko Co. Ltd.Polyprotube, manufactured by Imperial Co. Ltd.

2) Gas leakage from external piping


50

3) Laser gas composition and purity (See Section 4.4.4.2.)4) Quality of cooling water (See Section 4.4.4.1.)5) Flow of cooling water (IN, OUT)

(9) Check the input power supply voltage, frequency and phasesequence.D Check items

1) 200/220 VAC +10%, --15%, 50/60 Hz � 1 Hz, 3--phase. Note,however, that the combination of 220 V and 50 Hz is notsupported.

2) Input power supply rating3) Direction of phase rotation

(10) Turn on the power, then check the operation of the fan motors in thehousing.The fan motors installed in the housing of the oscillator start as soonas the power to the NC is turned on. Check the operation of each fanmotor. Note, however, that the fan motor installed in the laser powersupply does not start until the oscillator sequence reaches the turboblower ON operation.

(11) Check the parameters and setting data.Check the parameters against the data sheets attached to theoscillator. If a value other than those given on the data sheets is set,correct the setting. Note, however, that parameter No. 15270 [199]and parameter No. 15204 [241] are set automatically, so that theseparameters need not be modified.

CAUTIONEach oscillator has unique parameters. Check the settingdata according to the attached data sheets. Be particularlycareful to store these data sheets safely.

(12) Check that cooling water is supplied normally, and that there is nowater leakage inside the oscillator or at any external connectionpoints.D Check items

1) Turn off the main circuit breaker of the oscillator and powersupply.

2) Check that the water inlet (IN) and outlet (OUT) of the oscillatorare connected correctly. If the connections are reversed, theflow sensor installed at the outlet will not function. When avalve is attached to the distributor unit (C3000D or C4000A:see Fig. 10.16 (e) or (f)), check that the valve is open.

3) Fully open the valves on the exhaust side so that the flow ofwater is not impeded. By manually operating the chiller unit,pass cooling water through the system at a flow rate of about10�/minute. Then, check that there is no water leakage at thefollowing locations:

1. The water inlet (IN) and outlet (OUT) of the oscillator2. The water piping (including all tubes and joints) in the

oscillator


51

4) Provided no water leakage is observed in step 3) above, allowcooling water to flow through the oscillator at the specified flowrate. Set the output pressure of the cooling water circulatingunit to 0.5 MPa. Then, check that there is no water leakage atthe following locations:

1. The water inlet (IN) and outlet (OUT) of the oscillator2. The water piping (including tubes and joints) in the

oscillator

5) Stop the chiller unit, then switch the operation mode frommanual (local) mode to automatic (remote) mode.

6) Provided no water leakage is observed, start the oscillator, thenset the RUN key to ON. Check that the cooling watercirculating unit can be operated according to commands issuedfrom the NC. At this time, check whether the cooling water isflowing at the specified flow rate through each pipe in theoscillator. If the flow rate is less than the specified value, alarmNo. 4072 [672] (low cooling water flow rate) is issued soonafter the chiller unit is started. If this alarm is issued, proceedas indicated in the guidance corresponding to this alarm.

7) Check that the temperature of the cooling water is set to roomtemperature plus 1°C. (The temperature of the cooling watermay be set to about 27°C throughout the year.) The highesttemperature that may be set is 30°C.

(13) Conduct an oscillator vacuum leakage test.

1) Check the oscillator for any internal leakage.The procedure for performing a leakage check is given inSection 4.3 (6).

2) When first starting the oscillator, check that gas is output fromthe gas outlet of the oscillator. Depending on the parametersettings, it may take as long as one minute before gas is output.If no gas is output, the exhaust pump rotation may be reversed.If this situation is left uncorrected, the exhaust pump mayultimately start to make an abnormal sound, and the thermalswitch may trip. In the worst case, the gas circulating systemmay be contaminated with exhaust pump oil.

(14) Check that the laser gas pressure is controlled normally.

1) Set all bits of parameter No. 15025 [201] through parameter No.15028 [203] to 0 because only the pressure control operation isto be checked, without causing discharge. Set parameter No.15240 [235] to the standard value 10, then check the pressurecontrol status of the laser oscillator. Turn on RUN (pressurecontrol signal), then check the pressure control status againstthe following parameters, while referring to DGN 905 [860]:

1. Parameter No. 15241 [237] for discharge start state2. Parameter No. 15242 [236] for base discharge state

If the pressure control status is abnormal, alarm No. 4073 [673],No. 4081 [681], or No. 4078 [678] is issued. Proceed asindicated in the guidance corresponding to this alarm. Checkalso that the laser gas flow rate in the base discharge statesatisfies the specified value.


52

2) If the laser gas flow rate is abnormal, perform adjustment asdescribed in Section 9.5.

3) Reset the values of the bits of parameter No. 15025 [201]through parameter No. 15028 [203] to their original values.This completes the check.

(15) Perform laser oscillation to achieve discharge aging. If the oscillatoris left unused for one week or more, discharge aging is required. SeeSection 9.8 for details of discharge aging.

(16) Check the oscillation characteristics and output. See Section 4.3 (1)for details of the check method.D Check items

1) Oscillation characteristic check :S Check that the correction coefficient is 1100 or less.S Check that the discharge voltage is within the factory--set

value plus 200 V.If the correction coefficient or discharge voltage exceeds themaximum, repeat discharge aging.

2) Discharge margin check S Check that a margin is provided.3) Voltage margin check S Check that no alarm is issued.

(17) Check the laser beam mode. For details of the check method, seeSection 4.3 (4).D Check items

1) Check that there is no significant difference from the modespecified in the data sheets attached to the oscillator.

2) Check that the mode shape is perfectly circular.The beam mode (resonator alignment) may be displaced due totransportation and storage. In such a case, make an adjustmentaccording to Section 11.2.1.

(18) Set the hour meter.Set 50 Hz for those localities where the power supply frequency is50 Hz. Set 60 Hz for those localities where the power supplyfrequency is 60 Hz.

(19) Optical axis adjustmentTo perform optical axis adjustment as part of the installation, adjustthe base table of the oscillator. Never place a heavy object on thebeam outlet plate. Moreover, never make a direct mechanicalconnection between this plate and a part on the mechanical side.


53

Prior to shipment and transportation, the packing and checking operationsdescribed below must be performed.

(1)Disconnect all NC connecting cables.(2)Disconnect the power cable and ground cable of the input unit in the

main unit cabinet.(3)Remove the laser gas pipes, and attach blanking plugs to the pipes to

prevent dust from entering.(4)Remove all cooling water from the oscillator by using compressed air.

For details of how to remove the cooling water, see Section 4.2.2. Anyresidual cooling water may result in corrosion or clogging;furthermore, if any residual cooling water freezes, a pipe or theoscillator itself may be damaged.

(5) Install all clamps and fit a blanking cap onto the beam outlet.(6)Check the security of all connectors and printed circuit boards. Install

protective covers.(7)Check that all removed mounting screws are reinstalled.(8) Install the cabinet mounting panel and door panel.

For transportation, the packing requirements described below must beobserved.

FANUC LASER C series

(1)External dimensions: See the external views.(2)Weights: 700 kg (C1500B, C2000C), 800 kg (C2000B, C3000D),

1300 kg (C3000B), 900 kg (C3000C: Oscillator section, C4000A),150 kg (C3000C: Auxiliary machine section), 1800 kg (C6000B)

(3)Maximum allowable impact: 2 GNote that the maximum allowable impact in transit depends greatly onthe means of transport employed, as indicated in Table 1.

Table 4.2.1 Maximum allowable impacts according tomeans of transport (Units: G)

Means of transport

Airplane Ship Railroad Truck

DirectionForwards/backwards

6 15 12 5

Left/right 2.5 12 5 4

Up/down 2.5 12 5 4

(4)Notes on transportationWhen transporting a unit, always observe the notes provided on thesticker attached to the unit. To lift a unit, run wires or slings throughthe four eyebolts, then use a crane to lift the unit.

4.2PREPARATIONPRIOR TO SHIPMENT

4.2.1Packing forTransportation


54

Remove cooling water according to the procedure below.

(1)Open the cooling water inlet (IN) and outlet (OUT), and leave bothopen. Cooling water will stop draining from the unit after about 10minutes.

(2)Once the cooling water has stopped draining, connect a compressedair hose to the cooling water inlet (IN). Check that the cooling wateroutlet is open. Gradually supply compressed air, allowing the pressureto build up to 1 to 2 kgf/cm2. Never apply full pressure suddenly.

(3)Continue to supply compressed air at this pressure for about 5 minutes.Increase the compressed air pressure to 3 to 4 kgf/cm2, and supply airuntil water inside the white water piping of the oscillator is completelyremoved.

(4)When water is no longer output, set the compressed air pressure to 0.When a drain valve is attached to the distributor unit (C4000A: SeeFig. 10.16 (f).), open the valve, and supply air according to the sameprocedure as (2) and (3). When water is no longer output, set thecompressed air pressure to 0, then close the valve.

(5)Next, connect the compressed air hose to the cooling water outlet(OUT). At this time, ensure that cooling water inlet is open. Removewater in the same procedure as (2), (3), and (4).

(6)Once all cooling water has been removed, disconnect the compressedair tube. Then, seal the cooling water inlet (IN) and outlet (OUT) byattaching the blanking plugs provided with the oscillator to the PTplugs.

(7)When a valve is attached to the distributor unit (C3000D or C4000A),check that the valve is open. Leave the valve open (for operation,storage, or transport of the oscillator) except when water is removed.

CAUTIONAlso, the cooling water should be removed from theoscillator whenever the oscillator is to be stored over thewinter, when there is a danger of the cooling water freezing.If the cooling water freezes, it may destroy the cooling waterpipes or other cooling system components.

4.2.2Removing CoolingWater


55

(1)Oscillation characteristics

1) Check that bit 4 of parameter No. 15000 (16--L or 16i--L) or bit 4of parameter No. 200 (0--L) is set to 1.

2) Start the oscillator. When a discharge start switch is provided, donot set the switch to ON until after LRDY has been set.

3) The oscillator enters correction mode for three minutes after startof discharge, and the rated output is automatically specified. Atthis time, record the peak output.

4) Record the output, discharge voltage, and current values twominutes after making the specification. Discharge voltages (RFV)and currents (RFI) are indicated in DGN 909 through 924 for 16--Lor 16i--L, and in DGN 861 through 876 for 0--L, in order from RFNo.1 to RF No. 8. When one power supply unit is used to drive twodischarge tubes, however, the RFV and RFI values for No. 1through 4 are the same as those for No. 5 through 8.

5) Record the output values immediately before the elapse of threeminutes after the specification.

6) Upon the termination of three--minute correction mode, record thecorrection coefficient (parameter No. 15024 (16--L or 16i--L) orparameter No. 241 (0--L)).

7) Three minutes after the termination of three--minute correctionmode, record the base discharge output, discharge voltage (RFV),and current (RFI) values.

Compare the measured values of 4) and 7), above, with thedischarge voltage and current characteristics given in the datasheets. A discharge voltage (RFV) is abnormal if it exceeds thedata sheet value by 200 V or more. In such a case, check theexternal laser gas piping and laser gas composition, or performaging.

(2)Discharge margin check

1) Modify the parameters listed below.

Bit 4 of parameter No. 15000 (16--L or 16i--L),bit 4 of parameter No. 200 (0--L);

1 � 0 (Three--minute correction is not performed.)Parameter No. 15208 (16--L or 16i--L), parameter No. 233 (0--L):

Setting � 0 (Output feedback is turned off.)Parameter No. 15209 (16--L or 16i--L), parameter No. 234 (0--L):

Setting � 0 (Output feedback is turned off.)Parameter No. 15242 (16--L or 16i--L, 50 Hz),parameter No. 15243 (16--L or 16i--L, 60 Hz),Parameter No. 236 (0--L):

Setting � Setting + 30(The gas pressure is increased by 3 Torr.)

2) When parameter No. 15242, 15243, or 236 is changed,POWER--OFF ALARM is output. In this case, turn off the powerto the NC, wait 4 or 5 seconds, then turn on the power again or pressthe RESET key.

3) Remove the maintenance panel from the oscillator so that thedischarge tubes can be checked. Set the door interlock to OFF.

4.3DETAILS OFCHECKING


56

4) Start the oscillator. When a discharge start switch is provided, donot set this switch to ON until after LRDY has been set.

5) Check that the discharge tubes do not stop discharging for 30minutes after the start of discharge.

6) Upon the completion of the check, restore the parameters modifiedin step 1) to their original values.

If discharge stops in step 5) , it indicates a discharge margin error.Check the external laser gas piping and laser gas composition, orperform aging.

(3)Power supply margin check (pulse check)

1) Modify the parameters listed below.Bit 2 of parameter No. 15000 (16--L or 16i--L),bit 2 of parameter No. 200 (0--L):

0 � 1 (Use of assist gas is disabled at beam--on.)Bit 3 of parameter No. 15000 (16--L or 16i--L),bit 3 of parameter No. 200 (0--L):

0 � 1 (Internal discharge is enabled in manual mode.)Bit 0 of parameter No. 15002 (16--L or 16i--L),bit 5 of parameter No. 3979 (0--L):

0 � 1 (Internal discharge is enabled in automaticoperation mode.)

Bit 4 of parameter No. 15000 (16--L or 16i--L),bit 4 of parameter No. 200 (0--L):

1 � 0 (Three--minute correction is not performed.)Parameter No. 15208 (16--L or 16i--L), parameter No. 233 (0--L):

� 0 (Output feedback is turned off.)Parameter No. 15209 (16--L or 16i--L), parameter No. 234 (0--L):

Setting � 0 (Output feedback is turned off.)Parameter No. 15210 (16--L or 16i--L), parameter No. 238 (0--L):

1500 � 1650 (C1500B)2000 � 3300 (C2000B)2000 � 2700 (C2000C)3000 � 3300 (C3000C)3000 � 3600 (C3000D)4000 � 4400 (C4000A)6000 � 8000 (C6000B)

2) Start the oscillator. When a discharge start (HV ON) switch isprovided, do not set this switch to ON until after LRDY has beenset.

3) Set the following values on the laser setting screen:Pc = 1650 W Du = 5% Fr = 5 Hz (C1500B)

3300 W Du = 5% Fr = 5 Hz (C2000B)2700 W Du = 5% Fr = 5 Hz (C2000C)3300 W Du = 5% Fr = 5 Hz (C3000C)3600 W Du = 5% Fr = 5 Hz (C3000D)4400 W Du = 5% Fr = 5 Hz (C4000A)8000 W Du = 5% Fr = 5 Hz (C6000B)

4) Perform internal discharge in manual mode.

5) Check that no abnormality occurs for 30 minutes after beam--on.


57

6) Upon the completion of the check, restore the parameters modifiedin step 1) to their original values.An alarm, if issued in step 5), indicates an error. Check the externallaser gas piping and laser gas composition, or perform aging.

(4)Beam mode check1) Remove the guide pipe connecting the laser light outlet of the

oscillator to the machine.2) Start the oscillator.3) First, check the beam position. Laser light, if allowed to penetrate

the acrylic material because of incorrect operation, is verydangerous. The paint of the machine is also likely to be damaged.So, attach as feel plate, then an acrylic plate, about 30 cm × 30 cmin size. Then, output laser light for 0.1 seconds, with Pc = ratedoutput and Du = 100% set by programming. At this time, providea flow of air with a drier. If a guide laser is used, confirm that CO2gas laser light is directed to the same spot as the guide laser.

4) Next, attach an acrylic block to the position indicated by the whiteacrylic mark. Ensure that the surface of the acrylic block isperpendicular to the direction of CO2 gas laser light. If a guide laseris used, the perpendicularity of the acrylic block surface can bechecked by adjusting the block such that the guide laser is reflectedfrom the acrylic block surface and returns to the beam outlet.

5) Set the program as follows:Output 1500 W Duty 100% Duration 4.0 seconds (C1500B)Output 2000 W Duty 100% Duration 4.0 seconds

(C2000B, C2000C)Output 3000 W Duty 100% Duration 3.0 seconds

(C3000C, C3000D)Output 4000 W Duty 100% Duration 2.5 seconds (C4000A)Output 6000 W Duty 100% Duration 2.5 seconds (C6000B)

6) Direct the drier so that it blows air at 45° to the acrylic block, thenoutput the beam. If air is not provided correctly, the acrylic vaporwill catch fire.

7) Observe the burn pattern, and record the directions (X direction, Ydirection) and output conditions.1. Compare the recorded burn pattern with the burn pattern data

attached to the oscillator. Check that there is no significantdifference. Note, however, that the shape may vary, dependingon the distance.

2. Check that the shape is perfectly circular.3. Check that no interference fringes can be observed nearby.If a problem is detected, align the resonator of the oscillator.


58

(5)External gas piping leakage check (clamp test)1) Using an approved gas pipe, connect the gas inlet of the oscillator

to the cluster piping, or to the secondary side of the regulatormounted on the gas cylinder.

CAUTIONRubber hoses were once commonly used for laser gaspiping, but these hoses allowed helium in the laser gas toleak. The composition of the laser gas thus deteriorated,reducing the output level and preventing continuousdischarge, such that the oscillator malfunctioned.Moreover, when a brazed copper pipe was used,contaminants in the brazing bled into the laser gas, thuspreventing continuous discharge. It is essential, therefore,that the specified gas pipes and SUS pipes be used.

2) Open the valve of the regulator, then open the main valve of the gascylinder. Next, set the secondary pressure of the regulator to0.175� 0.025 MPa.

3) Upon the completion of setting, close the main valve of the gascylinder.1. If the primary pressure of the regulator is abruptly reduced to 0,

gas will leak from the gas piping. Open the main valve of thegas cylinder and locate the leaks using a liquid leakage checker.Then, correct the leaks.

2. If the pressure is reduced gradually, gas will leak from the gaspiping. Recheck the joints. Very occasionally, gas may leakfrom the primary pressure side to the secondary pressure side ofthe regulator. In such a case, the primary pressure decreases,while the secondary pressure is increases.

3. A primary pressure reduction of within 10% to 15% over 8hours is normal.

CAUTIONIf the amount of gas leakage from the gas piping is verysmall, the gas composition will change more rapidly whenthe pipe is longer, when the pipe diameter is larger, or whena smaller amount of gas is consumed. In such cases, theoutput will be reduced, and discharge will tend to turn offmore easily.

4) Upon the completion of this check, close the main valve of the gascylinder.


59

(6)Check for leakage within the oscillatorD Negative pressure method

1) On the setting screen, enable parameter rewriting.2) On the parameter screen, change the setting of parameter No.

15240 (16--L, 16i--L) or parameter No. 235 (0--L) to 0.3) Set the oscillator start switch to ON. The gas pressure inside the

oscillator can be checked with DGN 905 (16--L, 16i--L) or DGN860 (0--L).

4) Alarm No. 4082 (16--L, 16i--L) or No. 682 (0--L) is issuedseveral minutes after the oscillator is started.

5) Set the main circuit breaker of the oscillator to OFF. Then, turnoff the power to the NC.

6) Set the NC start switch (RUN ON KEY) to OFF, then turn onthe power to the NC.

7) Check the gas pressure on the diagnosis screen to determinewhether there is any increase in pressure over 15 minutes. Anincrease in pressure of within 10 (133Pa) is normal.

8) Upon the completion of this check, set the start switch to ON,then immediately return the switch to OFF. The oscillator willperform a purge operation after 75 seconds.

9) Finally, restore the parameter settings to their original values.

CAUTIONA large increase in pressure indicates that, gas is leakingfrom the oscillator. The cause of the leak may be:1. O--ring deterioration or failureS Discharge tube sectionS Mirror sectionS Gas circulating piping

2. Failure to close the turbo oil inlet and outlet3. Failure to lose the values after filter replacement4. Water leakage from the heat exchanger5. Water leakage from a location other than the above6. Output mirror cracking7. Discharge tube cracking8. Cracking in a weld of the gas circulating system


60

D Pressurization

CAUTIONThe turbo blower is not designed to withstandpressurization. So, whenever possible, do not perform aleakage check by pressurizing the turbo blower. Even wheninternal pressurization is inevitable, never apply a pressurein excess of 0.08 MPa. Otherwise, components such asconnectors or the oil gauge may be damaged. To minimizethe risk of connector damage, connect all cables to the turboblower when applying pressure.

1) Turn on the power to the oscillator, then open the valve of thegas cylinder.

2) Set the secondary pressure of the gas cylinder regulator to 0.05MPa.

3) To increase the internal pressure of the oscillator to a levelexceeding atmospheric pressure, turn the trimmer of theatmospheric pressure sensor (installed in the pressure sensorsection) clockwise by half a division.

4) Set the RUN key on the oscillator to ON, then immediatelyreturn the RUN key to OFF.

5) Apply leakage check liquid to possible leak points. Bubbleswill be seen if there is a leak. Thus, any leak points can beidentified.

6) Upon the completion of the above processing, return thetrimmer rotated in step 3) to its original setting.

(7)Parameter checkLaser oscillator parameter data is attached to each oscillator. Machinetool builders may prepare a parameter table including the laseroscillator parameter data. If the attached parameter data sheets aremissing, contact your machine tool builder.1) On the NC setting screen, enable parameter rewriting.2) Check the parameters, and enter the same values as those given in

the parameter table.3) On the NC setting screen, disable parameter rewriting, then press

the reset key.


61

CAUTION1 If the oscillator is started with an incorrect parameter value

specified, there is a risk of the oscillator being damaged ordestroyed. Be particularly careful when entering andchecking parameter values.

2 Some parameters may require modification to, for example,suit the operating state of the oscillator or enablemaintenance. When modifying the parameters, the usershould record all changes (including dates, parametersbefore modification, parameters after modification, andreasons for modification) so that old parameters and invalidparameters are not used.

(8)Discharge agingIf the oscillator is left unused for a long time (three days or more), orif the laser gas circulating system has been opened to the atmosphere(for example, to clean the mirrors or replace gas system components),aging is required. This involves warming up the discharge tubes andcirculating gas by performing internal discharge to output absorbentcontaminants as gas. If the laser gas circulating system has beenopened to the atmosphere, perform a leakage check before attemptingaging. The aging procedure is described below.1) Modify the parameters listed below.

(Be sure to record the settings. The settings may be different fromthe data sheet values.)Bit 3 of parameter No. 15000 (16--L, 16i--L),bit 3 of parameter No. 200 (0--L):

0 � 1 (Internal discharge is enabled in manual mode.)Bit 4 of parameter No. 15000 (16--L, 16i--L),bit 4 of parameter No. 200 (0--L):

1 � 0 (Three--minute correction is not performed.)Bit 0 of parameter No. 15002 (16--L, 16i--L),bit 5 of parameter No. 3979 (0--L):

0 � 1 (Internal discharge is enabled in automaticoperation mode.)

Bit 2 of parameter No. 15003 (16--L, 16i--L),bit 2 of parameter No. 3979 (0--L):

1 � 0 (Evacuation is not performed after the RUNOFF.)

Parameter No. 15201 (16--L, 16i--L), parameter No. 232 (0--L)Setting � 0

Parameter No. 15208 (16--L, 16i--L), parameter No. 233 (0--L):Setting � 0 (Output feedback is turned off.)

Parameter No. 15209 (16--L, 16i--L), parameter No. 234 (0--L):Setting � 0 (Output feedback is turned off.)

Parameter No. 15242, No. 15243 (16--L, 16i--L),parameter No. 236 (0--L):

Setting � � 100


62

2) Set the RUN key to ON to start the oscillator.

3) Perform discharge by setting the HV ON switch to ON. Check thatdischarge is performed continuously.

4) Then, perform internal discharge using the settings indicatedbelow. Two methods of internal discharge are supported. One isautomatic operation based on programming, while the other ismanual operation using switches.

1000 W Duty 30% (C1500B: 15 minutes)1500 W Duty 50% (C2000B, C2000C: 15 minutes)2000 W Duty 50% (C3000C, C3000D: 15 minutes)2500 W Duty 50% (C4000A)4000 W Duty 30% (C6000B: 15 to 30 minutes)

The frequency is 100 Hz for all of the above.

D Automatic operation

1. Create the following program (when C1500B):G32 P1 Q1;G24 S1000 Q50 R900.; S specifies an output (W), QG32 P0; specifies a duty cycle (%),

and R specifies a time(seconds).

2. Lock the shutter, then start the program.

D Manual

This method can be used when the machine operator’s panel hasa switch enabling manual internal discharge.

1) On the setting screen, enter the output power and dutyratio.

2) Press the internal discharge switch to perform internaldischarge.

5) When a time determined above has elapsed, turn off the RUN ONkey to stop the oscillator. (With the new software, discharge canbe stopped with HV OFF.)

6) Return the discharge gas pressure to the normal setting, andperform internal discharge with the settings below, then performpurging.

Parameter No. 15242, No. 15243 (16--L, 16i--L) parameter No. 236(0--L)Setting--100 � Setting

1500 W Duty 50% (C1500B: 15 minutes)2000 W Duty 50% (C2000B, C2000C: 15 minutes)3000 W Duty 50% (C3000C, C3000D: 15 minutes)4000 W Duty 30% (C4000A: 15 minutes)4000 W Duty 30% (C6000B: 15 minutes)


7) Repeat step 6) until the output power reaches the specified valueminus 2% or more, and the discharge voltage becomes thefactory--set value plus up to 200 V.

8) Upon the completion of aging, restore the parameter settings totheir original values.


63

The oscillator has connections for cooling water piping, laser gas piping,and power and signal cables. For details of the electrical connections forthe NC and machine, refer to the corresponding connection manuals.

FANUC Series 0--L CONNECTION MANUAL B--61573EFANUC Series 16--LA CONNECTION MANUAL B--61853EFANUC Series 16--LB

CONNECTION MANUAL B--62443E, B--62443E--1FANUC Series 16i--LA CONNECTION MANUAL B--63193EN

The quality of cooling water is specified in the table below. If tap wateris used, it should be treated in an ion exchanger.

Refrigerator/air--conditioner cooling water quality standard(JRA--9001--1980)

pH (25°C) 6.0 to 8.0

Conductivity (25°C)(� s/cm) 0.02 S/m or less

Standard itemChlorine ion Cl� (ppm) 50 or less

Standard itemSulfate ion SO4

2� (ppm) 50 or less

M alkalinity CaCO3 (ppm) 50 or less

Total hardness CaCO3 (ppm) 50 or less

Iron Fe (ppm) 0.3 or less

Reference itemSulfur ion S2� (ppm) Not to be detected

Reference itemAmmonia ion NH4

+ (ppm) 0.2 or less

Ionic silica SiO2 (ppm) 30 or less

To avoid cooling water trouble and minimize the frequency of coolingwater exchange, the following anticorrosive should be added to thecooling water. Consult the chiller manufacturer for use of theanticorrosive.

Product name: CONTLIME K--6000Manufacturer: MITSUBISHI GAS CHEMICAL. Inc.Use: Add the anticorrosive to the cooling water to obtain a

concentration of 1000 ppm (100 m� per 100 �). Everymonth, check the concentration of the anticorrosiveusing concentration test paper designed specificallyfor the anticorrosive. Add anticorrosive, as required,to maintain the concentration at about 1000 ppm.

Concentration test paper: A concentration test paper set (including50 sheets of paper and a dropper) isavailable together with the CONTLIMEK--6000, manufactured by MITSUBISHIGAS CHEMICAL, Inc.

4.4OSCILLATORCONNECTIONS

4.4.1Cooling Water

4.4.1.1Specification of thecooling water

4.4.1.2Water treating agent


64

Even when the concentration of the anticorrosive is controlled asexplained above, the cooling water must, nevertheless, be replaced everyyear.

To remove contaminants adhering to the inside surfaces of the coolingwater system, clean the system using the cleaning agent indicated below.Consult with the chiller manufacturer prior to using the cleaning agent.

Product name: DESLIMEManufacturer: MITSUBISHI GAS CHEMICAL. Inc.Use: Replace up to 10% of the cooling water with this agent,

then circulate the cooling water for one hour. Next,drain the cooling water and thoroughly flush thecooling system. Note that DESLIME is highly toxicin its undiluted form. Never touch DESLIME. If youget any DESLIME on your skin, wash it with copiousamounts of water. Never dispose of any waste liquiduntil the hydrogen peroxide, which is a majorcomponent, has decomposed such that itsconcentration is reduced.

If the chiller is used in a cold district, it should be provided with anantifreezing function. When it is extremely cold, the chiller should bekept running. If it is necessary to use an antifreezing solution for lack ofan alternative, the following antifreezing solution should be used. Itsconcentration should be 30% (usually) or 40% (in an extremely colddistrict). Use of an antifreezing solution should be restricted within fourmonths in winter. Do not use antifreezing solution together with ananticorrosive. The following antifreezing solution is already added withan anticorrosive.

Product name: AURORA BRINEManufacturer: TOKYO FINE CHEMICAL Co.Use: Refer to the description indicated on the product.

4.4.1.3Chemical cleaner

4.4.1.4Anti--freezing agent


65

Supply the laser oscillator with a mixture of gases that satisfy theconditions listed below.

(1)Composition ratio and accuracyCO2 : 5 � 0.25%He : 40 � 2.00%N2 : 55 � 2.75% (N2 balance)

(2)Water (H2O): 5 ppm or less(3)Hydrocarbon (CnHm): 1 ppm or less(4)Gas purity: 99.99% or higher

Observe the following cautions for piping between the laser gas cylinderand laser oscillator.

D Use nylon tube having an inside diameter of 8 mm or larger (JunlonAS1 manufactured by Junkousha, or polyprotube manufactured byImperial Co.). Do not use a rubber or urethane tube.

D Use a swage--lock vacuum joint (Fujikin’s product or equivalent). Donot use a one--touch coupler, quick coupler, or hose--band joint.

D Minimize the length of tubing. It should be kept within 5 m. Neverexceed 15 m. For a length of 15 m or greater, use stainless pipe.

D If it is necessary to use metal pipe for lack of an alternative, usestainless bright annealed pipe. Minimize the number of joints used.Connect pipes, if necessary, using a swage--lock vacuum joint or byTIG welding. Do NOT use silver soldering or copper piping. Pipingshould be installed by a vacuum piping specialist. Do not extend metalpiping over 30 m.

D Always keep the piping materials clean. Do not allow foreign matterto get in the pipe.

D Use a pressure reducer that is free from gas leakage.D After installing the pipe, check it for gas leakage, using a liquid leak

checker (Gyupoflex: A98L--0001--0856, detecting bubbles caused byleaking gas) or a clamp test1).

NOTEOpen the valve of the gas cylinder to pressurize the insideof the pipe, then close the valve. Check to see if thepressure in the pipe becomes low with time. Monitor theprimary pressure of the gas reducer for over 8 hours. If thegas pressure becomes lower by 10% within 8 hours, gas islikely to be leaking. Take an appropriate measure.

4.4.2Laser Gas

4.4.2.1Laser gas specification

4.4.2.2Gas pipe


66

Connect the cables to the laser oscillator as described below.

(1)Power cableU (R)V (S)W (T)

Power supply: 200 VAC +10%/--15%, 50/60 Hz � 1 Hz, 3�or 220 VAC +10%/--15%, 60 Hz � 1 Hz, 3�

(2)Ground cableConnect the ground cable to the ground connection section (class--1).

(3) I/O signal cablesFor 16--L, FS16i--L (One cable is used.)

When a metallic cable (shorter than 10 m) is used:Connect the cable to IF JD1B.(Connect jumper pins SP5 and SP6 of IF to the 1--2 side.)

When an optical fiber cable (10 m or longer) is used:Connect the cable to IF COP1B.(Connect jumper pins SP5 and SP6 of IF to the 2--3 side.)

For 0--L (Two cables are used.)Connect metallic cables to IF CN1 and CN2.

(4)Signal lines[16--L, 16i--L]1) Emergency stop input signals (ESP1, ESP2)2) OFF prohibit signals (OFI1, OFI2) -- (EOF, COM) CNC side

A contact3) Laser power supply ON/OFF signal (ON, OFF) -- (EXR, EXS)

CNC sideThis signal is required to enable the use of the door interlockfunction.

4) Door interlock contact signals (DIL1, DIL2)B contact (When this contact is open, the 200 VAC supply to theoscillator and CNC is cut.)

[0--L]1) Fuse alarm signals (FAL1, FAL2)2) OFF prohibit signals (OFS1, OFS2)3) Laser power supply ON/OFF signal (ON, OFF)

This signal is required to enable the use of the door interlockfunction.

4) Door interlock contact signals (NDI1, NDI2)B contact (When this contact is open, the 200 VAC supply to theoscillator and CNC is cut.)

4.4.3Electrical Connections

4.4.3.1Connections betweenthe NC and oscillator,and power cableconnection


67

The C6000A has an oscillator section and power supply section, while theC3000C has an oscillator section and auxiliary machine section.Interconnection is made according to the procedure described below.

(1)Power cable (CP200)This cable feeds 200 VAC to the high--frequency inverter and exhaustpump.

(2)Turbo blower No. 1 power cable (CP201)Connect this cable between the high--frequency inverter and turboblower No. 1.

(3)Turbo blower No. 2 power cable (CP202)Connect this cable between the high--frequency inverter and turboblower No. 2.

(4)Power cable for cooling fans, etc. (CN203)This cable feeds 200 VAC to the cooling fans and other devices.

(5)Signal cable (CN204)This cable carries those signals that are used to start thehigh--frequency inverter and exhaust pump.

Connect the cables to the CP200, CP201, CP202, CN203, and CN204connectors.

(1)Connect a water pipe between cooling water OUT of the oscillatorsection and cooling water IN of the auxiliary machine section.

(2)Connect a water pipe between cooling water IN of the oscillatorsection and cooling water OUT of the auxiliary machine section.Route the pipes such that their lengths are minimized. (The maximumallowable length is 3 m.)

Water pipe specificationNylon pipe having a diameter of at least �10 mm (internaldiameter of at least � 7.5 mm) and a related pressure of0.8 MPa

4.4.4Inter--unit Connections(C3000C Only)

4.4.4.1Electrical cables

4.4.4.2Connection

4.4.4.3Connection of coolingwater pipes


68

(1)Connect gas OUT of the oscillator section to gas IN of the auxiliarymachine section, using the gas pipe provided with the oscillator.

(2)Supply laser gas through gas IN of the oscillator section. Exhaust gasfrom the exhaust pump is output through gas OUT of the auxiliarymachine section.Route the pipes such that their lengths are minimized. (The maximumallowable length is 3 m.)

Gas tube specificationTeflon tube having a diameter of at least �1/2″ (internaldiameter of at least � 3/8″) and a related pressure of0.5 MPa

4.4.4.4Gas piping

B--70125EN/03 5. MAINTENANCE

69

5 MAINTENANCE

In FANUC LASER C series, periodic inspection items have beenreduced, and adjustments have been made easy. To keep the oscillator ina satisfactory operating condition over a long period, however, it isnecessary to carry out periodic maintenance (including dailymaintenance) described in this chapter. The oscillator is designed tomaintain the same performance and reliability as it has when it is installed,provided that maintenance is carried out as prescribed.

B--70125EN/035. MAINTENANCE

70

Table 5.1 lists daily inspection items. Inspect the FANUC LASER Cseries according to this table. When parts (including oil) have been usedfor a prescribed period, replace them quickly.

Table 5.1 Daily inspection items for FANUC LASER C series

Item Period Content and instruction

1 Residual laser gas Daily Check to see if the primary pressure is 1MPa or less as mea-sured at the regulator on the laser gas cylinder. If the primarypressure is 1MPa or lower, replace the gas cylinder. See Sec-tion 4.6 for the gas specifications.

2 Exhaust pump oil Weekly Make sure that the oil level is between L (minimum) and H(maximum). Usually, oil is supplied until the oil level is in themiddle between L and H. If the oil level is below L, supply oilaccording to Section 5.3.2. Be sure to replace the oil periodi-cally, every 6 months of use or every 1500 hours of operation,whichever is earlier.

3 Exhaust pump oil leak Weekly Make sure that no oil is leaking from the vane pump mainbody, drain cock and their periphery. If oil is leaking, immedi-ately replace the exhaust filter according to Section 5.3.3, be-cause it is likely to have been clogged. Be sure to replace theexhaust filter periodically, every one year of use or every 3000hours of operation, whichever is earlier.

4 Turbo blower oil Daily Make sure that the oil level is between L (minimum) and H(maximum) according to Fig. 5.3.1. Usually , oil is suppleduntil the oil level is at 3/4 above L. If the oil level is below L,supply oil according to Section 5.3.1. Be sure to replace theoil periodically, every 4 months of use or 1000 hours of opera-tion, whichever is earlier.

5 Turbo blower oil leak Weekly Make sure that no oil is leaking from the turbo blower mainbody, oil inlet, cock, and their periphery. If oil is leaking, locatethe leak. If oil leaks for any reason other than a cock beingopen, call FANUC.

6 Laser output Weekly 1. Check to see if the laser output measured at the outlet ofthe short optical path oscillator is 5% or more lower thanthe specified output. If this is the case, clean or replacethe optical components in the external reflection unit.

2. If the laser output decreases within the oscillator, warningmessage No. 4085 [G85] is issued. If this message ap-pears, clean or replace the mirror in the oscillator quickly.

7 Cooling water Daily Make sure that the chiller discharge output is 0.5MPa or less.

Weekly Check the quality of cooling water circulating in the chiller. Ifthe water is colored badly, replace it completely. Be sure toreplace the cooling water every two months. Adding an anti-corrosive to cooling water can decrease the replacement fre-quency. See Section 4.4.1 for descriptions about the anticor-rosive.

5.1DAILY INSPECTION


71

The FANUC LASER C series contains consumables that must bereplaced periodically. Table 5.2 (a), (b) lists such consumables and therelated periodic maintenance work. Perform periodic maintenance aswell as daily inspection described in Section 5.1 by using the listedperiods as guidelines. Also use the reading of the hour meter, whichroughly indicates how long the laser has been running. Note, however,that the replacement and maintenance intervals are not guaranteed valuesbut standard values based on field records.

Table 5.2 (a) Periodic maintenance items and periods

Item Period of maintenance (operation hour)

1 O--shift mirror cleaning Every month, or when the machining power has degraded

2 Output mirror change Every 3000 to 4000 hours, or when the quality has degraded

3 Rear mirror change Every 3000 to 4000 hours, or when the quality has degraded

4 Folding mirror change Every 3000 to 4000 hours, or when the quality has degraded

5 O--shift mirror change Every 3000 hours, or when the machining power has degraded

6 Exhaust pump oil change 1500 hours, or when the exhaust power has degraded

7 Exhaust pump filter change 3000 hours, or when the exhaust power has degraded

8 Exhaust pump overhaul 10000 hours, or when the exhaust power has degraded

9 Turbo blower oil change 1000 hours, or when oil properties have changed

10 Turbo blower overhaul 12000 hours, or when the power has degraded

11 Exhaust pipe filter replacement 1500 hours, or when oil mist occurs

12 Press. contr. filter change Every 12000 hours, or when a pressure failure occurs

13 Discharge tube O--ring change Every 6000 hours, or internal leakage occurs.

14 Gas pipe O--ring replacement Every 6000 hours, or internal leakage occurs.

15 Cooling water Every 1500 hours, or when cooling water properties have changed

16 Water tubing cleaning Every 3000 hours, or when the water pipe has clogged

17 Alarm lamp replacement Every 3000 hours, or the lamp fails to light.

Table 5.2 (b) Mirror cleaning periods

C1500B C2000BC2000C

C3000C, C3000DC4000A, C6000B

Cleaning of output andrear mirrors only None Every 1500 to 2000

hoursEvery 800 to 1200

hours

Cleaning of all internalmirrors Every 3000 to 4000 hours

5.2PERIODICMAINTENANCE


72

When opening the panels and doors during maintenance, keep the powerturned off.Before replacing oil, be sure to check that purging is completed.

(1)Check method

Check the amount of oil in the turbo blower while referring to thefigure below. The oil level should be between graduations H and L.This check should be made when the oscillator is at a rest. When theturbo blower is running, it is impossible to check the amount of oilcorrectly.

(2)Replenishment method1) Remove the hexagonal--head screw from the oil inlet with a 17 mm

wrench. Be careful not to lose the O--ring on the screw.Before supplying turbo oil, stop the oscillator according to thecorrect procedure and turn off the power. If the oscillator is notstopped by the correct procedure, the pressure in the turbo blowerbecomes negative. Opening the oil inlet under such a condition letsa large amount of air get in the turbo blower. An air flow causedthis way can bring oil mist into the oscillator, possibly resulting inthe optical mirror getting dirty.

2) Take a bottle of oil from the oil kit (A04B--0800--K326). Unscrewthe nozzle from the bottle, remove the inner cap, then replace thenozzle. Insert the nozzle into the oil inlet and supply oil. Be carefulnot to allow dust to enter through the inlet. This task is made easierby attaching the tube (included in the oil kit) onto the nozzle.Supply oil until the oil reaches the 3/4 level relative to the Lindication when viewed through the oil window. Note that both toolittle and too much oil can result in mechanical failure.

3) Clean the oil inlet, hexagonal--head screw of the oil inlet, andO--ring by wiping with a clean cloth or paper. Ensure that theseparts are completely free of dust. If the oil is contaminated withdust, the turbo blower may fail. Set the O--ring in the groovearound the hexagonal--head screw of the oil inlet, then tighten thehexagonal--head screw. Note that if the O--ring is not set correctly,or if the hexagonal--head screw is not tightened fully, the turboblower may not be air--tight.

4) If oil has spilled over, wipe it up. Otherwise, the peripheralequipment may be affected adversely.

5) If there is oil left over, put the inner lid back on the bottle, and keepthe bottle in a dark, cool place.

(3)Replacement method1) Get a container for oil drain on hand, and put the tip of the drain tube

into the container.2) Turn the oil drain cock through 90° clockwise, and the oil will start

draining.3) After all the oil has been drained, close the oil drain cock by setting

it back in the initial place.4) Supply oil by following the same procedure as for replenishment.

5.3DETAILS OFMAINTENANCE

5.3.1Turbo Blower Oil


73

NOTEExecute discharge ageing after changing turbo blower oil.

Fig. 5.3.1 Turbo blower oil check points

(1)Check method

Watch the oil gauge, and check that the oil level is between graduationsL and H. Also check whether the oil is dark.If the oil level is below L, add oil to the turbo blower or replace the oilin it. If the oil level is above H, drain until the oil level becomes belowH.The exhaust of the turbo blower contains oil mist. The exhaust pumpwill capture oil mist, and the amount of exhaust pump oil increaseswith time. When the oil has increased too much, the filter getsimmersed in the oil, possibly causing white mist to come out from thepump, or oil to leak. Furthermore, the exhaust capacity may getlowered, or the pump may be damaged.

(2)Replacement method1) Stop the oscillator, and turn off the power.2) Remove the maintenance panel.3) Remove the oil inlet plug. There is an O--ring on it. Be careful not

to damage it. A missing or damaged O--ring can lower the exhaustcapacity of the pump.

4) Insert the drain tube into a drain oil pot.5) Fully open the drain cock.6) After the oil has been drained up, close the cock.

5.3.2Exhaust Pump Oil


74

7) Supply 1.8 liters of new oil through the oil inlet, while watchingthe oil gauge.

8) Attach the oil inlet plug.9) Put the maintenance panel back in place, and turn on the power.

(1)Replacement methodReplace the filter every 3000 hours, or when the exhaust power hasdegraded. If the filter gets clogged, the pump output becomes low.Fig. 5.3.3 shows where the filter of a vane pump is located.1) Stop the oscillator, and turn off the power.2) Remove the maintenance panel.3) Remove the black screw button from the pump.4) Remove the filter cover and O--ring.5) Remove the spring and washer.6) Pull out the exhaust filter element.7) Orient a new exhaust filter element correctly, and reverse the

procedure from step 6 to step 3. (An upward arrow is indicated onthe front surface of the filter element.)

NOTEThe exhaust filter element should be installed securely. Ifit is installed incorrectly, or the O--ring is not insertedaccurately, oil mist (white) will come out from the exhaustoutlet.

8) Put the maintenance panel back in place, and turn on the power.

SCREW KNOB

FILTER COVER

O--RING

SPRING

WASHER

EXHAUST FILTER ELEMENT

OIL INLET PLUG

Fig. 5.3.3 Exchange of exhaust pump filter

5.3.3Exhaust Pump Filter


75

Replace the filter every 1500 hours, or when oil mist occurs. Fig. 5.3.4shows the exhaust pipe filter. None of the C1500B, C2000B, C2000C,C3000C, C3000D, and C4000A is equipped with this filter.

(1)Replacement method

Clamp

Housing head

Housing

O--ring(G90 or G85, depending on model; indicated on the housing surface)Fastening nut

Cartridge filter(manufactured by AdvanTech Toyo; TCG--045--SIFS)Plate gasket

Fig. 5.3.4 Exhaust pipe filter

1) Stop the oscillator, and turn off the power.2) Remove the maintenance panel.3) Wipe the dust off the periphery of the housing and the clamp.4) Wash your hands and wear clean vinyl gloves.5) Loosen the clamp, and remove the housing head from the

housing.6) Loosen the fastening nut on the cartridge filter, and take out the

filter.7) Remove the O--ring, and clean it with lint--free paper dipped with

alcohol.8) Clean the inner surface of the housing head and the O--ring groove

with lint--free paper dipped in alcohol, then let them dry.9) Put the O--ring back in place. If the O--ring is deformed or

deteriorated, replace it with a spare, whose rating is indicated onthe periphery of the housing.

5.3.4Exhaust Pipe Filter


76

10) Take out a new cartridge filter (A97L--0201--0211, AdvanTechToyo TCG--045--SIFS) from its bag, and put a plate gasket(supplied together with the cartridge filter) on both ends of thefilter.

11) Insert the cartridge filter into the housing head, and fasten it withthe fastening nut.

12) Fasten the housing to the housing head. Before tightening theclamp, make sure that the O--ring touches the entire surface of theseal uniformly.If the O--ring is not installed accurately, gas may leak.

13) Put the maintenance panel back in place, and turn on the power.


77

The maintenance parts are listed below. Refer to the following tables formaintenance unit and part specification information. The partspecifications for oscillators compatible with CE marking are not listedbelow.

Nonrepairable parts

Name SpecificationModel (Q’ty)

Name SpecificationC1500B C2000B C2000C C3000C C3000D C4000A C6000B

OUTPUT MIRROR A98L--0001--0981 1 0 0 0 0 0 0

A98L--0001--0981/B 1 0 0 0 0 0 0

A98L--0001--0960 0 1 1 0 0 0 0

A98L--0003--0015/B 0 0 0 0 1 0 0

A98L--0003--0015/D 0 0 0 1 (1) 0 0

A98L--0003--0027 0 0 0 0 0 0 1

A98L--0003--0036 0 0 0 0 0 1 0

REAR MIRROR A98L--0001--0750 1 0 0 0 0 0 0

A98L--0001--0961 0 1 1 0 0 0 0

A98L--0001--0757/B 0 0 0 0 0 0 1

A98L--0003--0016/B 0 0 0 0 1 0 0

A98L--0003--0016/C 0 0 0 1 (1) 0 0

A98L--0003--0037 0 0 0 1 0 1 0

FOLDING MIRROR A98L--0001--0615/B 3 3 3 4 4 6 0

A98L--0001--0866/B 0 0 0 0 0 0 4

A98L--0003--0019 (1) (1) (1) (1) (1) (1) 0

0 SHIFT MIRROR #1 A98L--0001--0616/C (2) (2) (2) (1) (1) (1) 0

CIRCULERPOLARIZER MIRROR

#1

A98L--0001--0617/C 0 0 0 (1) (1) (1) 0

OUTPUT REARMIRROR O RING

A98L--0001--0619/1025 2 0 0 0 0 0 0MIRROR O RING

JB--OR4D--P28 2 0 0 0 0 0 0

A98L--0001--0619/2030 0 2 2 2 2 2 0

A98L--0001--0619/2031 0 0 0 0 0 0 2

JB--OR4D--P38 0 2 2 2 2 2 2

FOLDING MIRROR ORING

JB--OR4D--G55 3 3 3 4 4 6 0RING

JB--OR4D--G65 0 0 0 0 0 0 4

#1 Short optical path type and C3000C long optical path type only

5.4MAINTENANCEPARTS


78

NameModel (Q’ty)

SpecificationNameC6000BC4000AC3000DC3000CC2000CC2000BC1500B

Specification

O RING for DischargeTube

A98L--0003--0004/P22.4S 8 0 0 0 0 0 0Tube

A98L--0003--0004/P26S 0 8 8 12 12 16 0

A98L--0003--0004/P30.6S 0 0 0 0 0 0 24

PIPING O RING A98L--0003--0004/P58 8 8 0 0 0 0 0

DISCHARGE TUBE A290--4516--T001 4No.1--4

0 0 0 0 0 0

A290--4522--T001 0 4No.1--4

4No.1--4

6No.1--6

6No.1--6

0 0

A290--4561--T001 0 0 0 0 0 0 6

A290--4561--T002 0 0 0 0 0 0 6

A290--4533--T001 0 0 0 0 0 8No.1--8

6

EXHAUST PUMPFILTER

A98L--0001--0911 1 1 1 1 1 1 1

EXHAUST PUMP OIL A98L--0040--0093/1.0L6 3.6� 3.6� 3.6� 3.6� 3.6� 3.6� 3.6�

TURBO BLOWER OIL A04B--0800--K326 1/3 1/3 1/3 2/3 1/3 1/3 4/3

TURBO BLOWER OILINLET O RING

JB--OR4D--P10A 1 1 1 2 1 1 4

CONDENSATIONSENSOR

A04B--0801--D012 1 1 1 1 1 1 1

TEMPERATURESWITCH forINTRA--LOCKER

A57L--0001--0079/060 1 1 1 1 1 1 2

TEMPERATURESWITCH for

A57L--0001--0095/B050 0 1 1 0 0 0 0SWITCH forABSORBER A57L--0001--0095/B080 1 0 0 1 1 1 1

TEMPERATURESWITCH (for

A57L--0001--0057/080 1 1 1 1 1 0 0SWITCH (forSHUTTER MIRROR) A57L--0001--0057/090 0 0 0 0 0 1 1

PHOTOELECTRICSWITCH (for

A57L--0001--0091 2 2 2 2 2 2 2SWITCH (forSHUTTER UNIT) A04B--0810--D010 1 1 1 1 1 1 1

TEMPERATURESENSOR UNIT

A04B--0808--D012 0 0 0 0 0 1 1SENSOR UNIT(SHUTTER UNIT) A04B--0810--D011 1 1 1 1 1 0 0

FLOW SENSOR UNIT A04B--0808--D003 1 1 0 1 0 0 0

A91L--0001--0151/B 0 0 1 0 1 0 2

A91L--0001--0214/180 0 0 0 0 0 1 0

MICRO SWITCH (forFOLDING UNIT)

A55L--0001--0225/01CBS 2 2 2 2 2 2 0


79

NameModel (Q’ty)


Specification

SEMICONDUCTORLASER

A04B--0805--C414 (1) (1) (1) (1) (1) (1) (1)LASER

A04B--0811--D401 1 1 1 1 1 1 1

FAN (for SHUTTER) A90L--0001--0349 1 1 1 1 1 0 0

A90L--0001--0396 0 0 0 0 0 0 0

A90L--0001--0335/B 0 0 0 0 0 1 0

COOLING FAN A90L--0001--0396 16 22 16 25 24 37 46

HOUR METER A91L--0001--0086/TH142 1 1 1 1 1 1 1

CIRCUIT BRAKERJPN

TRIPPING 100VAC

A60L--0001--0308/L100JC2

1CB1

0 0 0 0 0 0

CIRCUIT BRAKERJPN

TRIPPING 24VDC

A60L--0001--0308/L100JH2

1CB1

0 0 0 0 0 0

CIRCUIT BRAKER ULTRIPPING 100VAC

A60L--0001--0238/100A 1CB1

0 0 0 0 0 0

CIRCUIT BRAKER ULTRIPPING 24VDC

A60L--0001--0238/100B 1CB1

0 0 0 0 0 0

CIRCUIT BRAKERJPN

TRIPPING 100VAC

A60L--0001--0308/N150JC2

0 1CB1

0 1CB1

0 0 0

CIRCUIT BRAKERJPN

TRIPPING 24VDC

A60L--0001--0308/N150JH2

0 1CB1

1CB1

1CB1

1CB1

0 0

CIRCUIT BRAKERUL

TRIPPING 100VAC

A60L--0001--0326/150A 0 1CB1

0 1CB1

0 0 0

CIRCUIT BRAKERUL

TRIPPING 24VDC

A60L--0001--0326/150B 0 1CB1

1CB1

1CB1

1CB1

0 0

CIRCUIT BRAKERJPN

TRIPPING 24VDC

A60L--0001--0367/A300BF2H

0 0 0 0 0 0 1QF1

CIRCUIT BRAKERUL

TRIPPING 24VDC

A60L--0001--0392/300BB 0 0 0 0 0 0 1QF1

CIRCUIT BRAKERJPN

TRIPPING 24VDC

A60L--0001--0308/N200JH2

0 0 0 0 0 1QF1

0

CIRCUIT BRAKERUL

TRIPPING 24VDC

A60L--0001--0402/200B 0 0 0 0 0 1QF1

0


80

NameModel (Q’ty)


Specification

CIRCUIT BRAKERJPN, UL

A60L--0001--0308/F050 0 0 0 1CB7

0 0 0

A60L--0001--0391/V050 0 0 2QF2, 3

0 3QF2--4

4QF2--5

10QF2--58--13

A60L--0001--0308/B030 3CB2--4

5CB2--6

0 4CB2--5

0 0 0

A60L--0001--0391/V040 0 0 0 0 1QF5

1QF6

0

A60L--0001--0391/V030 0 0 1QF4

0 0 0 0

A60L--0001--0308/H060 0 0 0 1CB6

0 0 0

A60L--0001--0308/B010 1CB5

1CB7

0 1CB8

0 0 0

A60L--0001--0308/X010 0 0 2QF5, 6

0 1QF6

1QF7

2QF6, 7

A60L--0001--0308/V005 0 0 0 0 1CB8

1QF9

0

MOTOR STARTERJPN, UL

A60L--0001--0389/J 0 0 1QF7

0 0 0 1QF14

CIRCUITPROTECTOR

JPN, UL

A60L--0001--0262/5W 1NBK1

0 0 0 0 0 0

JPN, ULA60L--0001--0262/10W 0 1

NBK10 1

NBK11

QF71

QF80

MINIATURE CIRCUITBREAKER IEC

A60L--0001--0314/GFCA 1NBK1

0 0 0 0 0 0

ELECTROMAGNETICCONDUCTOR

JNP, UL

A58L--0001--0243 3MS1--3

5MS1--5

3KM1--3

4MS1--4

4KM1--4

5KM1--5

8KM1--4

KM7--10

A58L--0001--0313/A2A3P13

1MS4

1MS6

1KM5

1MS6

1KM5

1KM6

1KM6

A58L--0001--0297/3B 0 0 0 1MS5

0 0 0

A58L--0001--0330/A2A 0 0 1KM4

0 0 0 1KM5

A58L--0001--0297/2B 0 0 0 0 0 0 2KM11, 12


81

NameModel (Q’ty)


Specification

SURGE ABSORBER A74L--0001--0008/10D50D

4 6 5 6 5 6 11

A74L--0001--0100 0 0 0 0 1 1 1

A74L--0001--0091/B 0 0 0 0 1 1 1

NOISE FILTER A70L--0001--0064/10 0 0 0 0 0 0 1

A70L--0001--0054 0 0 0 0 0 1 1

TRIGGERELECTRODEASSEMBLY

A290--4516--V020 4 0 4 0 6 0 0

TRIGGERELECTRODE UNIT

A04B--0815--D410 0 0 0 0 0 8 0

TRIGGERELECTRODE O--RING

JB--OR4D--P10 4 0 4 0 6 8 0

GAS FILTER A97L--0200--0649/2--2--S 1 1 1 1 1 1 1

A97L--0200--0649/2--0.5--S

1 1 1 1 1 1 1

CARTRIDGE FILTER A97L--0201--0211 0 0 0 0 0 0 1

NYLON FERRULE 1/4″ A98L--0004--0348/2--N 16 16 16 20 18 18 30



SHUTTER MIRROR(for GUIDE LASER)

A98L--0001--0708 1 1 1 1 1 1 1

SHUTTER MIRROR A290--4516--X204 1 1 1 1 1 1 1

HEAT EXCHANGER(IN)

A97L--0201--0008/B, /C 1 0 0 2 0 0 4

HEAT EXCHANGER(OUT)

A97L--0201--0556/B 1 0 1 0 0 0 0

HEAT EXCHANGER(IN)

A97L--0201--0439/B 0 1 0 0 1 1 0

HEAT EXCHANGER(OUT)

A97L--0201--0557/B 0 1 0 0 1 0 0

HEAT EXCHANGER(IN)

A97L--0201--0828 0 0 1 0 0 0 0

HEAT EXCHANGER(OUT)

A97L--0201--0691/B 0 0 0 1 0 1 2

HEAT EXCHANGER(for use within the

A97L--0200--0849 2 2 2 2 2 4 4(for use within thecabinet) A97L--0201--0588 2 4 2 5 4 4 8


82

NameModel (Q’ty)


Specification

BEAM ABSORBER A97L--0200--0937/B 1 0 0 0 0 0 0

A97L--0200--0872/C 0 0 0 (1) 0 0 0

A97L--0200--0872/D 0 0 0 1 1 0 0

A97L--0200--0873 0 0 0 (1) 0 0 0

A97L--0201--0972 0 0 0 0 0 1 0

BEAM ABSORBERASSEMBLY

A290--4560--V200 0 0 0 0 0 0 1ASSEMBLY

A290--4522--V200 0 1 1 0 0 0 0

WARNING LAMP A290--4512--V400 1 1 1 1 1 0 1

A04B--0815--C324 0 0 0 0 0 1 0

Repairable parts

Name SpecificationModel (Q’ty)

Name SpecificationC1500B C2000B C2000C C3000C C3000D C4000A C6000B

LASER POWERSUPPLY UNIT

A14B--0082--B201 (2) 0 0 (2) *1 0 0 0SUPPLY UNIT

A14B--0082--B202 0 (4) 0 (2) *2 0 0 0

A14B--0082--B205 0 0 0 0 0 0 (4) *1

A14B--0082--B206 0 0 0 0 0 0 (4) *2

A14B--0082--B207 (2) 0 (2) (2) *1 (3) 0 0

A14B--0082--B208 0 (4) 0 (2) *2 0 0 4

A14B--0082--B209 0 4 0 2 0 4 4

A14B--0082--B210 0 4 0 2 *2 0 0 4 *1

MATCHING BOX A14B--0082--B303 2 0 0 0 0 0 0

A14B--0082--B304 0 4 0 2 0 0 0

A14B--0082--B307 0 0 0 2 0 0 0

A14B--0082--B309 0 0 0 0 0 0 4

A14B--0082--B311 0 0 2 0 0 0 0

A14B--0082--B312 2 0 0 0 0 0 0

A14B--0082--B313 0 0 0 0 2 0 0

A14B--0082--B314 0 0 0 0 2 0 0

A14B--0082--B315 0 0 0 0 0 4 0

The items marked *1 and *2 are a set that provides compatibility.


83

NameModel (Q’ty)


Specification

RF FET MODULE PCB A20B--1006--0050 (16) (32) 0 (32) 0 0 (32)

A20B--1007--0140 2 4 2 4 3 4 8

A20B--1007--0150 2 4 2 4 3 4 8

STEP--UPTRANSFORMER PCB

A20B--1006--0070 (2) 0 0 2 0 0 0TRANSFORMER PCB

A20B--1006--0071 0 4 0 2 0 0 4

A20B--1007--0130 0 0 0 0 0 0 4

A20B--1007--0131 2 0 2 2 3 0 0

A20B--1007--0132 2 0 2 2 3 4 0

RF INVERTER PCB A20B--1006--0060 (2) (4) 0 (4) 0 0 (4)

DIODE A50L--2001--0257/F 12 24 12 24 18 0 48

A50L--2001--0257/R 12 24 12 24 18 0 48

A50L--2001--0439 0 0 0 0 0 24 0

DIODE HEAT SINK A A50L--6001--0569 (8) (16) 0 (16) 0 0 (16)

DIODE HEAT SINK B A50L--6001--0570 (8) (16) 0 (16) 0 0 (16)

DIODE SUPPORT A A250--0803--X008 (8) (16) 0 (16) 0 0 (16)

DIODE SUPPORT B A250--0803--X009 (8) (16) 0 (16) 0 0 (16)

DIODE PLATE A A250--0803--X006 (2) (4) 0 (4) 0 0 (4)

DIODE PLATE F A250--0803--X011 (2) (4) 0 (4) 0 0 (4)

DIODE PLATE G A250--0803--X012 (2) (4) 0 (4) 0 0 (4)

INSULATING SHEET A50L--8001--0193 (4) 0 0 (4) 0 0 0

IF PCB 0L A16B--1110--0223 1 1 1 1 0 0 0

IF PCB 16L A02B--0128--C202 (1) (1) 0 (1) 0 0 0

A16B--2100--0140 0 0 (1) 0 0 0 0

A16B--2100--0141 1 1 1 1 1 1 1

Additional PCB A16B--1600--0780 0 0 0 0 0 0 1

RELAY PCB B A16B--1600--0361 1 1 1 1 1 1 1

INPUT UNIT CONTROLPCB

A16B--1600--0660 1 0 1 0 0 0 0PCB

A16B--1600--0661 0 1 0 1 1 1 0

A16B--1600--0663 0 0 0 0 0 0 1

Turbo PCB A16B--1600--0670 1 1 1 1 1 1 0

A16B--1600--0770 0 0 0 0 0 0 1


84

NameModel (Q’ty)


Specification

NC SIDE IF PCB for 0L A16B--1212--0270 1 1 1 1 0 0 0

NC SIDE IF PCB for 15,R--G

A16B--1212--0420 1 1 1 1 0 0 0

STABILIZED POWERSUPPLY

A20B--1005--0120 (1) (1) (1) (1) (1) (1) (1)SUPPLY

A20B--1005--0124 1 1 1 1 1 1 1

POWER SENSORUNIT

A04B--0803--D001 1 0 0 0 0 0 0UNIT

A04B--0807--D001 0 1 1 1 1 1 (1)

A04B--0809--D001 0 0 0 0 0 0 1

Turbo blower #2 A04B--0800--C005 (1) 0 0 0 0 0 0

A04B--0800--C007 0 (1) 0 0 0 0 0

A04B--0800--C009 1 0 0 0 0 0 0

A04B--0800--C011 0 1 1 2 1 0 4

A04B--0800--C015 0 0 0 0 0 1 0

Exhaust Pump A90L--0001--0425 1 1 1 1 1 1 1

SHUTTER UNIT A04B--0810--C410 1 1 1 1 1 0 0

A04B--0812--C410 0 0 0 0 0 0 1

A04B--0815--C410 0 0 0 0 0 1 0

EXHAUSTCONTROLLER #2

A04B--0810--C401 (1) 0 0 0 0 0 0CONTROLLER #2

A04B--0810--C404 1 0 0 0 0 0 0

A04B--0807--C401 0 (1) 0 0 0 0 0

A04B--0807--C404 0 1 1 0 1 1 0

A04B--0811--C404 0 0 0 1 0 0 0

A04B--0812--C404 0 0 0 0 0 0 1

PRESSURECONTROLLER

A04B--0805--C402 (1) (1) 0 0 0 0 0CONTROLLER

A04B--0811--C400 1 1 1 1 1 1 1

PRESSURE SENSOR A91L--0001--0102 (1) (1) 0 (1) 0 0 0

A91L--0001--0201 1 1 1 1 1 1 1

CONTROL VALVE A97L--0200--0797/B 1 1 1 1 1 1 1

#2 Turbo blower and exhaust controller should be used as each pair of As and Bs. When the specification is changed,specify the pair.


85

NameModel (Q’ty)


Specification

WATER DISTRIBUTERUNIT

A04B--0810--C420 1 0 0 0 0 0 0UNIT

A04B--0807--C420 0 1 0 0 0 0 0

A04B--0813--C420 0 0 1 0 0 0 0

A04B--0811--C420 0 0 0 1 0 0 0

A04B--0814--C420 0 0 0 0 1 0 0

A04B--0815--C420 0 0 0 0 0 1 0

A A04B--0812--C420 0 0 0 0 0 0 1

B A04B--0812--C421 0 0 0 0 0 0 1

HIGH--FREQUENCYINVERTER

A90L--0001--0382/C 1 1 0 0 0 0 0INVERTER

A90L--0001--0464 1 1 1 0 1 1 0

A90L--0001--0465 0 0 0 1 0 0 2

BEAM FOLDING UNIT A04B--0810--C450 1 1 1 0 0 0 0

A04B--0811--C450 0 0 0 1 0 0 0

A04B--0811--C451 0 0 0 0 1 1 0

A04B--0811--C452 0 0 0 1 0 0 0

B--70125EN/036. TROUBLESHOOTING

86

6 TROUBLESHOOTING

B--70125EN/03 6. TROUBLESHOOTING

87

The troubleshooting procedure to be applied depends on the failureoccurrence status as indicated below. Perform checking according to theitems listed below.

(1)Action in response to alarm screen display (See Sections 6.2 and 6.3.)(2)Major faults

1) Laser power supply unit alarm display (See Section 6.4.1.)2) The power cannot be turned off with the CRT/MDI power switch.

(See Section 6.4.2.)3) The power cannot be turned on with the CRT/MDI power switch.

(See Section 6.4.2.)4) The laser output level is low immediately after the power is turned

on. (See Section 6.4.2.)5) The laser output displayed on the CRT screen is unstable. (See

Section 6.4.2.)6) A cooling fan circuit breaker trips. (See Section 6.4.2.)7) The magnetic contactor for a vane pump causes thermal trip. (See

Section 6.4.2.)8) The main circuit breaker trips. (See Section 6.4.2.)9) Excessive laser gas consumption. (See Section 6.4.2.)10) A high--frequency inverter related alarm is displayed. (See

Section 6.4.2.)

After identifying the following items, call the FANUC service center. Insome cases, a symptom is not actually a fault in the oscillator, althoughit looks like a fault. So, check it with the following sections.

(1)Symptoms1) State of operation

(machining in progress, oscillator being started, etc.)2) Timing of a fault (alarm)3) Alarm number4) How often the fault occurs5) Oscillator serial number

(2)Other information1) Software system and edition indicated on the CRT screen when

power is turned on2) Parameter settings;check the current parameter settings with the corresponding valuesindicated on the unit, and report your finding to the FANUC servicecenter.

See the conceptual diagram of alarm processing and the list of error codein the appendix.

6.1TROUBLESHOOTINGPROCEDURE

CHECKING ON FAULTS

6.2ERROR MESSAGESANDCOUNTERMEASURES


88

The alarm number, DGN, and parameter number (PRM NO.) vary withthe CNC model. So, the FS16--L or FS16i--L number comes first, and theFS0--L number is enclosed in parentheses.

Anomaly of AD converter 1 (Refer to DGN = 981 [844, 845/bit 7])FS0--L: AD converter 1 on Printed Circuit Board A16B--1212--0270

(CNC side) is not normal.FS16--L, FS16i--L:

AD converter 1 on Printed Circuit Board A16B--1110--0260or A16B--2100--0140, --0141 (oscillator side)

No. Cause of trouble Solution

1 Anomaly of ADconverter 1

For FS0--L: Replace AD converter 1 installed atG9 on A16B--1212--0270 (CNC side).

For FS16--L, FS16i--L:Replace AD converter 1 installed atC11 on A16B--1110--0260 (oscillatorside).Replace AD converter 1 installed atB8 on A16B--2100--0140, --0141(oscillator side).

2 Anomaly of printedcircuit board

If this alarm is still issued after replacing AD con-verter 1, replace the following printed circuit board:For FS0--L: A16B--1212--0270For FS16--L, FS16i--L:

A16B--1110--0260 orA16B--2100--0140, --0141

Anomaly of AD converter 2 (Refer to DGN = 982 [846, 847/bit 7] )FS0--L: AD converter 2 on Printed Circuit Board A16B--1212--0270

(CNC side) is not normal.FS16--L, FS16i--L:

AD converter 2 on Printed Circuit Board A16B--1110--0260or A16B--2100--0140, --0141 (oscillator side) is not normal.


1 Anomaly of ADconverter 2

For FS0--L: Replace AD converter 2 installed atJ9 on A16B--1212--0270 (CNC side).

For FS16--L, FS16i--L:Replace AD converter 2 installed atR11 on A16B--1110--0260 (oscillatorside).Replace AD converter 2 installed atD7 on A16B--2100--0140, --0141(oscillator side).

2 Anomaly of printedcircuit board

If this alarm is still issued after replacing AD con-verter 2, replace the following printed circuit board:For FS0--L: A16B--1212--0270For FS16--L, FS16i--L:

A16B--1110--0260 orA16B--2100--0140, --0141

6.3RESPONDING TOALARM MESSAGESON THE SCREEN

Alarm No. 4061 [661]

Alarm No. 4062 [662]


89

Anomaly of laser power supply unit(Refer to DGN 966, 967, 974, 975 [842, 854].)

This alarm is issued, if a fault occurs in the laser power supply unit.The cause of the fault and the required action are described below.The laser power supply unit issues this alarm and stops operation toprotect itself, even if a fault occurs outside the power supply. In manycases, this alarm is issued when the laser power supply is normal. So,sufficient investigation is necessary. If the power supply is turned onwithout removing the cause of the alarm, the alarm will be issuedagain.

(1)Preliminary inquiry


1 Checking parame-ters

Confirm that all the parameters described in theattached parameter sheets are correctly set.In case there exists any error, correct it.

2 Checking the dis-charge tubes

1 Check whether the mounting bracket and cool-ing fin of a discharge tube are loose or missing.Correct any abnormalities.

2 Check whether the metallized electrode hasseparated.

3 Check whether the inside and outside of a dis-charge tube is dirty. Replace a discharge tubeif it is dirty.

4 Check whether a discharge tube suffers anydamage such as a crack.

3 Checking coolingwater temperature

Confirm that the cooling water temperature is in therange of 15°C to 30°C. In case it is not so, adjustit.

4 Checking cableconnectors

Check the cables and connectors for any loose-ness. If a cable or connector is loose, remake theconnection.

5 Insufficient dis-charge aging

Perform another aging operation according to Sec-tion 4.3 (8).

(2)Confirming operation and investigating the cause of a faultSwitch on the failing power unit, observe the condition and clarity thecause retering to the following tables.

No. Phenomenon Presumption cause

1 An alarm is issued when the LED of a laserpower supply unit is not turned on.

The IF PCB of the CNC isfaulty.

2 An alarm occurs before discharge begins. The laser power supply isdefective.

3 The RF discharge current is small in com-parison with other units. The base dis-charge is narrow and tends to disappear.

The laser power supply ismaladjusted.

4 The RF discharge current is large in com-parison with other units. The alarm is DCValarm.

Alarm No. 4063 [663]


90

No. Presumption causePhenomenon

5 The RF voltage of all the units is high dur-ing discharge and the laser power is low.The base discharge is narrow and tends todisappear. When the purge is repeatedlyperformed, the RF voltage gradually de-creases and the laser power recovers.This phenomenon often appears after thelaser was not used for a long period.

The external laser gaspipe is abnormal.

6 The RF voltage of all the units is high dur-ing discharge and the laser power is low.The base discharge is narrow and tends todisappear. Even though the purge is re-peatedly performed, the situation does notrecover.

Internal leakage

7 The RF voltage of all the units is high dur-ing discharge but the laser power is normal.The base discharge is narrow and tends todisappear. In the high laser power region, itis lower than the normal value.

The intra--tube pressureof the laser gas is high(pressure sensor anoma-ly) or the gas compositionis not normal (excessiveamount of N2).

8 The RF voltage of all the units is low duringdischarge and the laser power is low. Thebase discharge is widely spread. In thehigh laser power region, the power is lowbut in the low power region, it is higher thanthe normal value. The alarm is DCV alarm.

The intra--tube pressureof the laser gas is low(pressure sensor anoma-ly) or the gas compositionis not normal (excessiveamount of He).

9 An alarm is generated notwithstanding theabsence of anomaly either in the diagnosticdata, discharge state or laser power char-acteristics.

Anomaly of the Laserpower--supply unit itself(anomaly of alarm circuit).

(3)Solution


1 PCB abnormal Replace the faulty PCB.

2 Laser power supply ab-normal

Locate the faulty component, then replaceit.

3 Laser power supply mal-adjusted

Adjust the laser power supply as explainedin Chapter 9.

4 External laser gas pipeabnormal

Identify the faulty location, then repair theexternal pipe as explained in Chapter 4.

5 Gas composition ratio ab-normal

Replace the laser gas with laser gas satisfy-ing the specification.

6 Pressure sensor abnor-mal

Replace the pressure sensor.


91

Shutter anomaly (Related DGNs are shown below.)The table below lists the valid combinations of shutter open and closecommands and open and close position detection signals. The shutterposition is detected three seconds after opening or closing of theshutter is specified. This alarm is issued for any state other than thosestates that are markedf in the combination table below. Refer to thefollowing table when applying countermeasures for this alarm.

Command

State

Open commandDGN973, bit0=1

[DGN856, bit2=1]

Close commandDGN973, bit0=0

[DGN856, bit2=0]

Open detector state signalDGN961, bit4

[DGN841, bit5]1 1 0 0 1 1 0 0

Close detector state signalDGN961, bit5

[DGN841, bit6]0 1 0 1 0 1 0 1

Valid (f)/Invalid (×) f × × × × × × f

The table below lists the causes of faults and the correspondingcountermeasures.


1 Shutter clamp not removed. Remove the shutter clamp.

2 Anomalous detecting position Correct the position of theposition detector.

3 Anomaly of position detecter Replace the position detec-tor.

4 Shutter cam loosened. Secure the position detectorin the correct position.

5 Shutter balancer loosened. Secure the position detectorin the correct position.

6 Shutter arm section caught Replace the shutter unit.

7 Intermediate PCB B (A16B--1600--0361)is faulty.For FS0--L:Oscillator IF PCB (A16B--1110--0223) isfaulty.NC IF PCB (A16B--1212--0270) is faulty.For FS16--L, FS16i--L:IF PCB (A16B--2100--0080,A16B--1110--0260, or A02B--0128--C202(unit specification)) is faulty.A16B--2100--0140 or A16B--2100--0141is faulty.

Replace the faulty PCB.

8 Anomaly of cables connecting each PCB. Check the connection ofeach cable.

Alarm No. 4065 [665]


92

Discharge anomaly (Refer to DGN = 909 to 914 [861 to 868]Pressing the HVON (start discharge) button causes the unit to startdischarging. This alarm is issued, if at least one discharge tube failsto operate.


1 Anomaly of parametersetting

Make a setting using the values of PRM.No. 15220 [0247], 15221 [0248], 15241[0237], 15222 [0249], 15223 [0250] listed inthe parameter table attached to the ma-chine.

2 Anomaly of laser gascomposition

Specified laser gas: CO2/N2/He = 5/55/40%(volume ratio)

Composition accuracy:Replace the laser gas with lasergas having an accuracy of within� 5% for each gas component.

3 Discharge tube electrodemounting bracket loos-ened

Check the electrode contacts, and secureany loose mounting brackets.

4 Gas circulating systemleakage of gas or water

Tighten or replace the component(s) at anyleak point.

5 The gas flow control valveis closed

Adjust the gas flow control valve to obtainthe specified gas flow rate.

6 Matching box monitor ab-normal

Replace the matching box.

7 Crack or hole (whichoften obscures a crack) inthe discharge tube

Replace the discharge tube.

Alarm No. 4066 [666]


93

Overheat of laser cabinet (Refer to DGN = 961/bit 1 [841/bit7])The temperature of the input side of the electrode cooling fan ismonitored and sends alarm when it exceeds 60 degree. When thetemperature decreases, the alarm state is solved automatically. Beforethat it cannot be reset.


1 Excessive environmental temperature Reduce the ambient tem-perature (to 5°C to 30°C).

2 Excessive cooling water temperature Change the temperaturesetting of cooling water to anormal temperature (15°C to30°C).

3 Anomaly of cooling fan motor Replace the cooling fan mo-tor.

4 Anomaly of temperature sensor Check the continuity of thetemperature sensor. If anydisconnection is found, re-place the temperature sen-sor.

5 For FS0--L:Oscillator IF PCB (A16B--1110--0223) orCNC IF PCB (A16B--1212--0270) is faulty.For FS16--L, FS16i--L:A16B--2100--0080, A16B--1110--0260,A02B--0128--C202 (unit specification), orA16B--2100--0140 or A16B--2100--0141is faulty.


6 Anomaly of connecting cables betweenthe PCBs.

Check the connection ofeach cable.

Alarm No. 4067 [667]


94

Too much incident laser beam back to the resonator.(Refer to DGN = 906 [878])

This alarm is issued, if a workpiece reflects laser beam more than therating to the laser oscillator. This can happen when the laser beam isused to drill, cut, or weld materials (such as copper, brass, andaluminum) having a high reflectivity to the laser beam (10.6 �m).


1 Excessive returningbeam back into the res-onator

Lower the output specified in the command,or take an action to reduce the reflected laserbeam.

2 Anomaly of parameterfor alarm detection

Check the settings of parameter Nos. 15265[3982] and 15266 [3983] with the correspond-ing values in the parameter table attached tothe unit.

3 Anomaly of parameterfor output power table

Check the settings of parameter Nos. 15280to 15308 [265 to 294] with the correspondingvalues in the parameter table attached to theunit.

4 Anomaly of parameterfor input calibration coef-ficient

Set the parameter PRM. No. 15215 [259] tobe the values as shown in the attached table.If rear mirror or power sensor was replaced,change the parameter.

Anomaly of power supply unit voltage of IF PCB(Refer to DGN = 960/bit 0 [841/bit 0])

This alarm appears when there occurs the anomaly in the stabilizedpower unit voltage +5, � 15, +24V of IF PCB for NC interface.


1 Fuse blowing Correct the cause of the blown fuse, then re-place the fuse.

2 Anomaly of stabilizedpower source unit

Check the output voltage (24 V � 5%) of thestabilized power source unit. If the allowablevoltage range is exceeded, replace the unit.

3 Anomaly of power unitof IF PCB

See Section 6.5 for details of the normal sup-ply voltage. If the allowable voltage range isexceeded, replace the IF PCB.

4 Laser oscillator main cir-cuit breaker abnormal

Check whether the main circuit breaker isconducting (ON).

Anomaly of chiller unit (Refer to DGN = G221/bit 6 [145/bit6]Setting the RUN (start pressure control) to ON causes the NC to outputa chiller unit start signal to the machine, which will respond with achiller unit ready signal. The NC monitors this signal. If the chillerready signal stops, the NC issues this alarm. Check the operation ofthe chiller.

Alarm No. 4068 [668]

Alarm No. 4069 [669]

Alarm No. 4070 [670]


95

Anomaly of assist gas (Refer to DGN = G221/bit 7 [145/bit7]When starting machining, the NC monitors for a ready signal from theassist gas supply unit in the machine. If this signal is not sent normally,the NC issues this alarm.Check the DGN data and the signal from the assist gas supply unit.If the signal is abnormal, check the assist gas supply unit.This alarm is issued if an α value other than 0 to 3 or a β value otherthan 1 to 7 is selected for G32PαQβ during program execution.

Shortage of cooling water (Refer to DGN = 961/bit 1 [840/bit 1])This alarm appears when the water shortage takes place.If the 4070 chiller abnormality alarm also appears, the chiller isdefective. Check the chiller unit.


1 Shortage of cooling water 1 The capacity of the chiller unit is insuffi-cient, or the water flow rate is reduceddue to a clogged pipe. Use a chiller unithaving sufficient capacity, or clean thepiping.

2 Check whether the cooling water is dis-tributed normally throughout betweenthe external optical system and the laseroscillator. Ensure that cooling water issupplied to the laser oscillator at thespecified flow rate. This alarm is issuedif cooling water is supplied at a flow rateeven slightly below the specified value.

2 Anomaly of connectingcables

Check the connection of each cable.

3 Anomaly of water flowrate sensor

If this alarm is issued even when the speci-fied flow rate is satisfied, clean or replacethe water flow rate sensor. When the rate islower than rated flow, this alarm occurs.

Alarm No. 4071 [671]

Alarm No. 4072 [672]


96

Decrease of laser gas pressure (Refer to DGN = 960/bit 5 [840/bit 4])The pressure of the laser gas supplied to the laser oscillator ismonitored. This alarm is issued, if this pressure becomes lower thanthe permissible level (1 kgf/cm2).


1 Tool low supply pressureof laser gas

Adjust the secondary pressure at the regu-lator on the gas cylinder so that the pres-sure of laser gas supplied to the laser oscil-lator is 0.1 to 0.2 MPa (rating) as measuredat the entry of the oscillator. If the distancebetween the gas cylinder and the oscillatoris larger than 5 m, it is necessary to set thepressure slightly higher.

2 No laser gas. Check whether the gas cylinder is empty orwhether the connection valve is closed. Ifempty, replace the gas cylinder.

3 Leakage from the gastube leading to the oscil-lator

Check that the gas pipe joint is secure.Also check whether the tube or pipe is bro-ken. If so, replace it.

4 Gas supply pressure sen-sor or cable abnormal

Check whether the gas supply pressuresensor is set correctly. If not, set the sensoras explained in Chapter 9. If the sensorcannot be reset, replace the sensor.

Roots blower overheat (Refer to DGN = 960/bit 6 [840/bit 6]This alarm is issued if the maximum allowable temperature of themotor sequence section of the Roots blower is exceeded. When anoscillator having turbo blowers is used, this alarm is not issued.


1 Excessively high coolingwater temperature

Reduce the temperature of cooling water.

2 Insufficient cooling water The amount of cooling water being suppliedto the Roots blower may be insufficient.Check whether the cooling water tube be-tween the water branch unit and Rootsblower is twisted or clogged. If the tube istwisted or clogged, replace the tube.

3 Anomaly in temperaturesensor cable connection

Check whether the cable is securely con-nected to the temperature sensor. If not,reattach the cable.

4 Anomaly in temperaturesensor

The temperature sensor is designed to beactuated by temperatures of 60°C or above.If the temperature sensor is actuated at low-er temperatures, replace the sensor.

Alarm No. 4073 [673]

Alarm No. 4074 [674]


97

Condensation (Refer to DGN = 961/bit 2 [840/bit 6])There is a condensation sensor at the inlet of the water branch unit inthe oscillator. This alarm is issued, when condensation is detected.


1 Tool low cooling watertemperature

Set the water temperature near the roomtemperature (plus 1°C).

2 Connecting anomaly ofcondensation sensorcable

Check whether the cable is securely con-nected to the condensation sensor. If not,reattach the cable.

3 Anomaly of condensationsensor

If the condensation sensor is actuated whenthe water branch unit exhibits no condensa-tion, the sensor is faulty. Replace the sen-sor.

If this alarm is issued, the alarm state cannot be reset until thecondensation has been removed.Check DGN 961/bit 2 [840/bit 6] and dry the inside of the cabinet.

CAUTIONIt is strictly forbidden to blow hot air higher than 60 degreeto the sensor.

Laser output decrease (Refer to DGN = 906 [878])This alarm is issued, if the monitored laser output is much lower thanthe specified laser output, that is the monitored laser output is lowerthan the specified output by a value specified in parameter No. 15271[242].


1 Lack of output from laserpower sensor unit

The thermocouple inside the power sensorunit may be damaged, or there may be apoor terminal connection. Measure the di-rect current resistance between the termi-nals of the power sensor unit, and checkthat the measured value falls within 100ohms to 500 ohms. If the measured valuefalls outside this range, replace the powersensor unit.

2 Connecting anomaly ofthe cable of laser powersensor unit.

Check whether the cable is securely con-nected to the power sensor unit. If not, reat-tach the cable.

3 Anomaly of intermediatePCB BA16B--1600--0361

If the above checks do not reveal any ab-normality, and there is no output from inter-mediate PCB B, replace the PCB.

Alarm No. 4075 [675]

Alarm No. 4076 [676]


98

Overheat of beam absorber (Refer to DGN = 961/bit 7 [841/bit 3])Laser beam is introduced into the beam absorber, when the oscillationtakes place with shutter closed. This absorber is water--cooled andsends alarm when the temperature exceeds a critical one. In the usualoperation, the irradiation of the absorber takes place only during thecalibration lasting 3 minutes just after the RUN start.


1 Insufficient cooling water The amount of cooling water being suppliedto the beam absorber may be insufficient.Check whether the cooling water tube be-tween the water branch unit and beam ab-sorber is clogged. If the tube is clogged,replace the tube.

2 Temperature sensor wiredincorrectly

Check if the cable is securely connected tothe temperature sensor. If not, reattach thecable.

3 Temperature sensor ab-normal

The temperature sensor is designed to beactuated by temperatures of 80°C or higher.If the temperature sensor is actuated at low-er temperatures, replace the sensor.

Alarm No. 4077 [677]


99

Gas pressure anomaly in discharge tube (Refer to DGN = 905 [860])The gas pressure is monitored after the discharge start ready condition(LRDY) is established. This alarm is issued, if the monitored gaspressure deviates by � 100 (=� 1330 Pa) from the set gas pressure.


1 Anomaly of parametersetting of gas pressurecontrol

Check whether the values of PRM Nos.15000/bit 1 [200/bit 1], 15244 [0264], 15245[0207], and 15246 [0246] are set as indi-cated in the attached data sheets. If a dif-ferent value is set, set the value specified inthe data sheets.

2 Gas leakage from piping 1) Check whether any joints in the gas cir-culating system are loose. If a loosejoint is found, tighten the joint firmly.

2) Check whether any components of thegas circulating system are cracked. If acracked component is found, replacethat component.

3) Check whether there is a hole in a dis-charge tube. If a hole is found in a dis-charge tube, replace the discharge tube.

3 Abnormal supply lasergas pressure setting


4 Anomaly of pressure sen-sor


5 The gas flow control valveis closed.

Adjust the gas flow control valve to supplygas at the specified flow rate.

6 Anomaly of pressure con-trol unit

If the above checks do not reveal any ab-normality, replace the pressure control unit.

The emergency stop button was pressed.If the emergency stop button is pressed after the discharge start readycondition (LRDY) is set up, the shutter is closed, discharge stops, andthe LRDY condition is resumed, then this alarm is displayed. To resetthe alarm, remove the cause of trouble, release the emergency stopbutton, and press the reset key on the operator’s panel.

Alarm No. 4078 [678]

Alarm No. 4079 [679]


100

Leakage of gas tube/anomaly of exhaust pump(Refer to DGN = 905 [860])

When the RUN (pressure control start) button is pressed, the exhaustpump starts operating and expels gas from the gas circulating systemto cause a low--pressure condition. This alarm is displayed, if thepressure is not reduced to the level specified in parameter No. 15240[0235] within 10 minutes from the start of discharging.


1 Incorrect gas pressurecontrol parameter setting

Check if the value of PRM No. 15240 [0235]is set as indicated in the attached datasheets. If a different value is set, set thevalue specified in the data sheets.

2 Anomaly of IF PCBFor FS0--L:

A16B--1110--0223For FS16--L, 16i--L:

A16B--2100--0080A16B--1110--0260Unit specification:

A02B--0128--C202A16B--2100--0140A16B--2100--0141

If the gas pressure of the gas circulatingsystem does not decrease at all, the IF PCBmay be faulty. Check whether the CP89connector on the PCB is loose. Also checkthe signals of the IF PCB. If an abnormalsignal is detected, replace the IF PCB.

3 Gas leakage from piping 1) Check whether any component joints inthe gas circulating system are loose. Ifa loose joint is found, tighten the jointfirmly.

2) Check whether any components in thegas circulating system are cracked. If acracked component is found, replacethat component.

3) Check whether the O--ring of each dis-charge tube is worn. Replace any O--rings that exhibit excessive wear. If aTeflon O--ring is ever removed, it mustbe replaced with a new one.

4) Check whether there is a hole or crackin a discharge tube. If a hole is found ina discharge tube, replace the dischargetube.

4 Anomaly of exhaustpump

If the above checks do not reveal any ab-normality, the performance of the exhaustpump has deteriorated. Check the followingitems.1) The oil level is too low.

Supply oil as explained in Chapter 5.2) Other than the approved type of oil is

being used.Supply the approved type of oil as ex-plained in Chapter 5.

3) The exhaust filter is clogged.Replace the exhaust filter as explainedin Chapter 5.

4) The exhaust pump outlet is locked orclogged to disable exhaust operation.Remove the cause of the locking orclogging.

5) If the steps above do not clear the fault,replace the exhaust pump.

Alarm No. 4080 [680]


101

Anomaly of gas pressure control (Refer to DGN = 905 [860]Pressing the RUN (pressure control start) button starts expelling airfrom the laser gas tube. When a specified degree of vacuum is attained,laser gas is supplied into the laser gas tube, and gas pressure controlbegins. Forty--five seconds after the turbo blower is started, a checkis made to see whether the vacuum in the laser gas tube has reachedto the level specified in parameter No. 15241 [0237] � 20(=� 266 Pa). If the specified level has not been reached, this alarm isissued. When there is no abnormal condition, the turbo blower isstarted and frequency matched signal appears then a discharge startready condition (LRDY) is set up.


1 Anomaly of parametersetting of gas pressurecontrol

Check whether the values of PRM Nos.15000/bit 1 [200/bit 1], 15244 [0264], 15245[0207], and 15246 [0246] are set as indi-cated in the attached data sheets. If a dif-ferent value is set, set the value specified inthe data sheets.

2 Gas leakage from piping 1) Check whether any component joints ofthe gas circulating system are loose. Ifa loose joint is found, tighten the jointfirmly.

2) Check whether any components of thegas circulating system are cracked. If acracked component is found, replacethat component.

3) Check whether there is any hole in adischarge tube. If a hole is found in adischarge tube, replace the dischargetube.

3 Anomaly of supply lasergas pressure


4 Anomaly of IF PCBFor FS0--L:

A16B--1110--0223For FS16--L, 16i--L:

A16B--2100--0080A16B--1110--0260Unit specification:

A02B--0128--C202A02B--0128--C202A16B--2100--0140A16B--2100--0141

Measure the pressure monitor voltage (1V =Pressure value 100 (=1330 Pa) at the LTPtest terminal) and command voltage (about5 V to 10 V at the GPC test terminal) beingoutput by the IF PCB. If a measured volt-age is abnormal, replace the IF PCB.


If the pressure indication (DGN 905 [0860])varies significantly at irregular intervals, thepressure sensor is faulty. Replace the sen-sor.

6 Anomaly of pressure con-trol valve

If the above checks do not reveal any ab-normality, replace the pressure controlvalve.

Alarm No. 4081 [681]


102

Anomaly of pressure sensor (Refer to DGN = 905 [860]This alarm appears when the signal of the pressure sensor used forpressure control detector vanishes.


1 Disconnected cable be-tween pressure sensorand IF PCB

Check the cable connection. If the connec-tion is abnormal, remake the connection.

2 Disconnected cable be-tween oscillator IF PCBand CNC IF PCB

Check the cable connection. If the connec-tion is abnormal, remake the connection.

3 Anomaly of IF PCB If a signal is received from the pressuresensor, but there is no output from the IFPCB, the IF PCB is faulty. Replace the IFPCB.

4 Anomaly of CNC IF PCBA16B--1212--0270

If a signal is detected at the input terminal(cable side) of the CNC IF PCB, but theCNC monitor detects no signal, the CNC IFPCB is faulty. Replace the CNC IF PCB.


If the power supply (� 15 V) for the pressuresensor is normal, but there is no output, thepressure sensor is faulty. Replace the pres-sure sensor.

Oscillator IF PCB specification:For FS0--L: A16B--1110--0223For FS16--L, 16i--L: A16B--2100--0080, A16B--1110--0260

(Unit specification: A02B--0128--C202)A16B--2100--0140, A16B--2100--0141

Shutter failure to openThis alarm occurs when the shutter does not reach the correct positionat a certain time (pre--flow time of assist gas) after the shutter opencommand.This alarm takes place in the following cases.


1 The pre--flow time of as-sist gas is too short forthe shutter to open.

Adjust the pre--flow time on setting screen.It should be longer than 0.6 sec.

2 Movable part caught Replace the shutter unit.

3 When beam output wasspecified, an alarm wasissued.

Check the cause of the alarm, then take ap-propriate action.

Alarm No. 4082 [682]

Alarm No. 4083 [683]


103

Anomalous selection of the number of discharge tubes.Anomalous selection of the number of discharge tubes. (Only FS0--L)


1 The case of FS0--L.The number of dischargetubes is selected tubeother than 2 or4.

The number of discharge tubes should beselected to be one of 2or 4. The selectioncan be done in the laser setting screen andthe result is indicated as PRM. No. [0226]unselected.

Decrease of laser output power (Refer to DGN = 906 [878])This alarm appears when the laser output power decreases and takesan abnormally higher calibration coefficient.


1 An optical part in the laserresonator is out of posi-tion.

Align the laser resonator.

2 An optical part in the laserresonator is dirty.

Clean or replace the optical part.

3 The supplied laser gas isnot the one specified.

Replace the laser gas with the specifiedone, that is CO2:N2:He = 5:55:40% (volumeratio) with a composition ratio accuracy of� 5%.

4 Cooling water tempera-ture out of specified range

Check whether the temperature of coolingwater falls within the range of 15°C to 30°C.

5 Laser oscillator ambienttemperature out of speci-fied range

Check whether the ambient temperaturefalls within the range of 5°C to 30°C.

Alarm No. -- -- -- [684]

Alarm No. 4085 [685]


104

Shutter temperature abnormal (Refer to bit 6 of DGN 961 [bit 2 of 841].)This alarm is issued when the temperature of the shutter mirrorexceeds a preset maximum. The table below lists the causes of faultsand the corresponding countermeasures.


1 Contamination of shutter mirror Clean or replace the shuttermirror.

2 Anomaly of temperature sensor Replace the temperaturesensor.

3 Temperature sensor cable broken Replace the cable.

4 Intermediate PCB B (A16B--1600--0361)is faulty.For FS0--L:Oscillator IF PCB (A16B--1110--0223) isfaulty.CNC IF PCB (A16B--1212--0270) is faulty.For FS16--L, 16i--L:A16B--2100--0080, A16B--1110--0260,A02B--0128--C202 (Unit specification), orA16B--2100--0140 or A16B--2100--0141is faulty.


5 Anomaly of PCB connection cables Check the connection ofeach cable.

Discharge tube voltage drop (Refer to DGN 909 [861].)This alarm is issued, if the voltage applied to the discharge tube dropslargely. More specific, the discharge tube voltage for referencedischarge is set up automatically to parameter No. 15270 [199] eachtime the RUN button is pressed. This alarm is issued, if theautomatically set discharge tube voltage is lower than the dischargevoltage specified at the previous RUN time, by at least the amountspecified in parameter No. 15272 [243].


1 The laser gas composi-tion is not as specified.

Replace the laser gas with the specifiedone, that is CO2:N2:He = 5:55:40% (volumeratio) with a composition ratio accuracy of� 5%.

2 Anomaly of dischargetube voltage detectionsystem

If discharge is performed, but the monitoreddischarge tube voltage is extremely low, re-place the matching box.

3 Degradation of turboblower gas circulatingperformance

Check whether the turbo blower and high--frequency inverter are normal. Replace theturbo blower or high--frequency inverter iffound to be faulty.

Assist gas not output(Refer to bits 0 to 2 of DGN F222 [bits 0 to 2 of 173].)

This alarm is issued, if an attempt is made to radiate a laser beam, whenno assist gas is selected, or an assist gas condition is not set up.

Alarm No. 4087 [687]

Alarm No. 4088 [688]

Alarm No. 4089 [689]


105

Laser beam not generated (Refer to bit 6 of DGN F221 [bit 6 of 172].)This alarm is issued, if an attempt is made to radiate a laser beam, whenthe laser oscillator is not in the LSTR state (discharging state).

Vacuum pump operation abnormal (Refer to bit 3 of DGN.)The thermal magnetic contactor for the vacuum pump has tripped.


1 Anomaly of exhaustpump

Replace the exhaust pump.

2 Anomaly of IF PCB If no thermal switch has tripped, replace theIF PCB.

3 Signal cable broken Replace the cable.

Gas pressure not reached (Refer to DGN 905 [860].)This alarm is issued, if the discharge tube gas pressure does not reach[specified discharge tube gas pressure during oscillation -- tolerance]after HV is set to ON.


1 Invalid parameter set-ting

Check whether the values of PRM Nos.15001/bit 3 [3981/bit 6], 15247 [4398], and15248 [4399] are set as indicated in the at-tached data sheets. If a different value is set,set the value specified in the data sheets.

2 Gas leakage from in-ternal piping

1) Check whether any component joints of thegas circulating system are loose. If a loosejoint is found, tighten the joint firmly.

2) Check whether any components of the gascirculating system have cracked. If acracked component is found, replace thatcomponent.

3) Check whether there is a hole in a dis-charge tube. If a hole is found in a dis-charge tube, replace the discharge tube.

3 Pressure sensor ab-normal


Alarm No. 4090 [690]

Alarm No. 4094 [-- -- --]

Alarm No. 4099 [695]


106

Inverter abnormalIf the inverter used to power the turbo blower is abnormal, this alarmis issued. When this alarm is issued, check that the alarm LED on theLED indicator section of the inverter is lit. At this time, do not turnoff the power to the inverter because the alarm will be reset if the poweris turned off.For an explanation of faults and corresponding countermeasures, seethe next alarm item. If the turbo blower faults listed in the followingtable are not observed, replace the inverter.


1 Excessive intake pres-sure

Check whether the values of PRM Nos. 15240[235], 15241 [237], and 15242 [236] are setaccording to the attached data sheets.

2 Turbo blower rotorlocked

Replace the turbo blower. The rotor may havelocked as a result of one or more of the follow-ing causes:1) Foreign matter in the circulating system2) Failed bearingSo, check for foreign matter.

3 Failed bearing in turboblower

Replace the turbo blower. The bearing mayhave failed as a result of one or more of thefollowing causes:1) Deteriorated oil2) Foreign matter in the bearingSo, always replace the oil at the recommendedintervals.

4 Invalid inverter setting Check if the inverter is set as indicated in theattached data sheets.

5 Defective pressuresensor


Invertor frequency reached signal abnormalThis alarm is issued, if a frequency reached signal (bit 1 of DGN 962,963, and 964) is not received within 120 seconds after the turbo bloweris started.


1 Cable connection abnormal Check whether the cable is securely con-nected to the inverter. If not, reattach thecable.

2 Invertor abnormal See the next item explaining inverteralarms indication.

3 Invalid invertor setting Set the inverter correctly as explained inChapter 9.

4 Turbo blower abnormal The rotor lock or bearing may be de-stroyed. Replace the turbo blower.

Alarm No. 4100 [691]

Alarm No.4101, 4111 [691]


107

Turbo blower not stoppedThis alarm is issued if a turbo blower is not stopped within 120 secondsafter RUN OFF. The power can be turned off even if the purgecomplete signal is not turned on.


1 Cable connection abnormal Check the cable connection.

2 Invalid inverter setting Set the inverter correctly as explained inChapter 9.

Turbo blower temperature abnormalThis alarm is issued, if the temperature of the turbo blower motorwinding becomes higher than the permissible level.


1 Cooling water tempera-ture high

Reduce the temperature of the cooling wa-ter.

2 Insufficient cooling water The amount of cooling water supplied to theturbo blower may be insufficient. Checkwhether the cooling water tube between thewater branch unit and blower is twisted orclogged. If the tube is twisted or clogged,replace the tube.

3 Anomaly of temperaturesensor or temperaturesensor cable connection

Check whether the cable is securely con-nected to the temperature sensor. If not,reattach the cable.

Low turbo blower oilThis alarm is issued if the signal from the turbo blower oil sensorindicates that the oil level has fallen below the setting.


1 The oil level is lower thanspecified.

Replenish the turbo blower with oil until theoil level on the oil gauge is between H andL. Replace the oil every 4 months of use orevery 1000 hours of operation, whichever isearlier.

2 Invalid sensor setting Set the sensor correctly as explained inSection 10.2.

3 Sensor abnormal Replace the turbo blower.

4 Insufficient turbo blowercooling

Check whether cooling water is flowingthrough the turbo blower. When the temper-ature of the turbo blower motor section ishigh, check whether the cooling water pathis clogged. If the cooling water path isclogged, wash or replace the turbo blower.

Alarm No.4103, 4113 [691]

Alarm No.4105, 4115 [-- --]

Alarm No. 4106 [620]


108

External reflecting mirror not installedThis alarm is issued, if the beam reflecting unit is not attached with amirror or mirror holder.


1 Mirror not mounted Mount a 0--degree shift mirror.

2 Sensor abnormal Replace the switch.

3 Cable abnormal Replace the cable.

Parameter changedThis alarm is issued if the gas pressure (parameter No. 15241 [237],15242, or 15243 [236]) or the base bias command value (parameterNo. 15223 [250]) has been modified.

Action: Press the RESET key to release the alarm.

Alarm No. 4107 [621]

Alarm No. 4132 [622]


109

(1) If an alarm is issued to indicate the occurrence of a power supply fault,check the diagnosis screen to determine which power supply unitissued that alarm signal. The bit corresponding to the power supplyunit that issued the alarm signal is set to 1.Unlike conventional power supply units, the power supply unit does nothave a circuit protector. Therefore, a check using the circuit protectorcannot be made.

Diagnosisscreen 7 6 5 4 3 2 1 0 bit

0--L DGN.854 No.8 7 6 5 4 3 2 1

16--L, DGN.974 No.8 7 6 5 4 3 2 116i--L

975 No.16 15 14 13 12 11 10 9

(2)Check the LEDs of the power supply unit that issued the alarm signal.Fig. 6.4.1 (a) shows the location of the LEDs.

The LED display is extinguished when the power to theoscillator is turned off after an alarm is issued.

VR VR13 11 LED1

LED2

Controls for powersupply adjustment

LEDs for laser powersupply alarm display

Fig. 6.4.1 (a) Location of LEDs for laser power supply alarm display

(3)Fig. 6.4.1 (b) shows the types of alarms displayed by the LEDs.

LED1

LED2

DCVVcOHPFVPFIVi

321

DCI

DCI 1 : DC momentary overcur-rent alarm

DCI 2 : DC peak current alarm(DC power alarm)

DCI 3 : DC steady current alarmDCV : DC overvoltage alarmVc : DC control power supply

alarmOH : Power supply overheat

(In case of C6000B, powersupply or matching boxoverheat)

RFV : RF overvoltage alarmRFI : RF overcurrent alarmVi : Inverter overvoltage alarm

Fig. 6.4.1 (b) Types of power supply alarms and corresponding LEDpositions

6.4MAJOR FAULTS

6.4.1Laser Power SupplyAlarm Display


110

(4)Table 6.4.1 explains each type of alarm.

Table 6.4.1 Causes of power supply alarms

Type of alarm Source Major causes

DCI 1DCI 2DCI 3

This alarm is issued if the DCcurrent of the power supply unitis high when the oscillator is op-erating in CW/pulse mode.

Load short--circuit

Discharge tube dielectricbreakdown

DCV This alarm is issued if the DCvoltage of the power supply unitis high when the oscillator is op-erating in CW/pulse mode.

Vc This alarm is issued if an over-current or overvoltage occurs inthe control power supply of thepower supply unit.

OH This alarm is issued if water isnot flowing through the coolingwater heat sink of the powersupply unit.In case of C6000B, it is oc-curred when the fan of powersupply (or matching box) is bro-ken.

RFV This alarm is issued if a highvoltage is applied to the dis-charge tube when the oscillatoris operating in CW/pulse mode.

Infinite loadDischarge tube separationFailure to install a feeder

RFI This alarm is issued if a high RFcurrent flows through the dis-charge tube when the oscillatoris operating in CW/pulse mode.

Vi This alarm is issued if a high in-verter voltage is detected in thepower supply unit when the os-cillator is operating in CW/pulsemode.


111

(5) If an alarm is issued at restart or at the start of discharge (HV ON), thepower supply unit has been damaged.1) When only the DCI alarm is issued

The high--speed diode or FET module may be damaged. Locate theproblem and replace any faulty component or module.

2) When an overheat alarm is issuedCheck whether cooling water is flowing through the power supplyunit.

3) When other alarms are issuedIn addition to the causes displayed on the alarm screen, consider thefollowing:Failure of a circuit internal to the power supply unitFailure of a coaxial cableLoose screw in a matching boxFailure of a discharge tube (dielectric breakdown, occurrence of pinholes)

The power supply cannot always be switched.It can be switched only before the switching on of RUN (pressure controlstart) or after the completion of purge with RUN off and the PURGE lamplit.If the laser gas supply is suspended during operation, discharge halts withthe occurrence of laser gas decrease alarm (alarm 4073/673). Thenbecause of the lack of laser gas supply, purge cannot be done even withRUN switch on and PURGE lamp are not lit. In this case the powersupply cannot be switched off.It is necessary here either to resume the laser gas supply or break powersupply externally (using the breaker of the machine or the external one).If the oscillator is left with a vacuum established, foreign matter may enterthe oscillator. Perform purge processing immediately.

1) Non--fuse breaker(NBK1) for cooling fans, electromagnetic valves,and stabilized power sources is tripping.

2) Electromagnetic contactor(MS3) for vane pump is tripping thermally.In the above cases the power supply is automatically switched off andcannot be switched on.Remove first the causes of trip , reset the thermal relay and then switchon the power supply.

1) The cooling water temperature is not normal, although the chiller unitis operating.This is the case when the room temperature is high and can be solvedin 5 to 10 minutes automatically.

2) Slight leakage exists in the tube between laser and gas cylinder.This is the case in which the laser output in the first run after a longhalt is low and becomes normal after the second run. Check forleakage, loose fixing or crack. Correct the tube and fitting if anyanomaly exists.

6.4.2Power Supply cannotbe Switched off UsingCRT/MDI Switch.

6.4.3Power Supply cannotbe Switched on UsingCRT/MDI Switch.

6.4.4Laser Output Just AfterSwitch on is Low.


112

First check if PRM No. 15216 [262] is taking the value of 60, which isa standard. In case the fluctuation continues with this value used, read thelaser output monitor value indicated in DGN=906 [878]. Its range offluctuation is smaller than 50. If it exceeds this value, check thefollowings.

1) Is the coaxial cable between the laser power sensor mounted on the rearmirror holder and the relay PCB B or the cable between the relay PCBB and the IF PCB (A16B--1110--0223: FS0--L, A16B--0128-- C202:FS16--L, 16i--L) inside the laser oscillator fixed tightly?

2) Is there anomaly in the laser power sensor output? Is the DC resistorbetween the terminals of the power sensor unit in the range100--500� ?

3) Is the ratio of input(LPWI--0V)/output(LPWT--0V) of the relay PCBB (A16B--1600--0361) amplified by the factor of 120 in DC level?

If there exists any anomaly in the results of the above investigations,replace the anomalous component.

When there occurs short circuit in either cooling fan, electromagneticvalve, or stabilized power unit, non--fuse breaker (NBK1) trips.Replace the anomalous component and check the state of cables. If anyanomaly exists there, correct it.

6.4.5Display of FluctuatingLaser Output on CRT

6.4.6Non--fuse Breaker forCooling Fans,ElectromagneticValves; and StabilizedPower Sources isTripping.


113


1 Anomalous settingof thermal relay

Ascertain if the setting of the contacter is done at5.5 A. If not so, correct it.

2 Too high viscosityof oil

(1) Check if the room temperature is lower than 5degree. If so, raise it.

(2) Check the deterioration of oil which causes theviscosity increase. If so, change it. Recom-mended exchange period is 1500 H depend-ing on the surroundings.

3 Reverse rotationdirection of pump

The normal direction is anticlockwise when seenfrom the side of motor fan. If not so, correct it atthe terminal.

4 Excessive oil Check the oil level through sight glass. The levelshould be 1/3 to 2/3 from the bottom.

5 Undesignated oil isused.

Use the designated oil, NEOVAC SA--H syntheticoil manufactured by Matsumura Oil Co. Japan,available through FANUC.

6 Exhaust filterchoked.

Replace it. Recommended replacement period is3000 hours depending on the surroundings.

7 Loosened terminalof connecting cable

Fix it tightly.

8 Presence of par-ticles inside vanepump or its vanedamaged

Replace the vane pump.


1 Electric leakage in-side lockerIn this case a yel-low buttonmounted in NFBgets raised.

(1) Check the state of cables, such as fixing, pres-ence of damage or electrical contact with thelocker. If so, correct it.

(2) Check the grounding of RF/DC units and if notcomplete correct it.

2 Excessive current Check the state of input unit of the oscillator.

6.4.7ElectromagneticContactor of VanePump Trips Thermally.

6.4.8Main Breaker Trips.


114


1 Gas leakage be-tween gas cylinderand oscillator

Ascertain the following.(1) Anomalous mounting of regulator.(2) Anomalous connection between tube and reg-

ulator.(3) Anomalous connection of gas inlet fitting of

oscillator.

2 Anomalous adjust-ment of exhaustcontroller

Adjust in accordance with the description of Chap-ter 9.

3 Gas leakage insidegas controller

Check the presence of leakage of tube to the gasflow rate controlling valve.

If a fault is detected in the inverter, an alarm indicator lamp on the inverterwill light.(1) Inverter (A90L--0001--0382/C: Model HFC--VAH2)

Fig. 6.4.10(a) shows the locations of the alarm indicator lamps.

Indicator lamps

Indicator lamp layout

f UV : Power supply voltage drop,momentary loss

f OC : Load short--circuit,momentary overcurrent

f OV : Overvoltage

f OV : Fin overheated

Fig. 6.4.10 Inverter alarm indicator lamps

UV : Power supply voltage drop


1 Drop in supply voltage.(The supply voltage failed momen-tarily.)

Check the supply voltage.Turn off the power to the oscillator,then perform a reset.

2 Chattering occurred in a contactorconnected to the inverter.

Check the magnetic contactor.Replace the magnetic contactor iffaulty.

6.4.9Excessive Laser GasConsumption

6.4.10High--frequencyInverter Alarm Display


115

OC : Momentary overcurrent


1 Turbo blower or cable short--cir-cuited

Replace the short--circuited unit orcable.

2 Turbo blower or cable short--cir-cuited with ground

Replace the short--circuited unit orcable.

3 Invalid setting of inverter accelera-tion/deceleration

Check the setting of the inverter,and correct any invalid setting ac-cording to the appropriate proce-dure.

OV : Overvoltage


1 Invalid setting of inverter accelera-tion/deceleration

Check the setting of the inverter,and correct any invalid setting asexplained in Chapter 9.

OH: Overheat protection


1 Inverter cooling fan stopped Replace the inverter.

2 Increase in internal oscillator tem-perature

Check the temperature switch inthe oscillator housing, and the tem-perature of the cooling water.

3 Inverter fan temperature sensorabnormal

Replace the inverter.

Fault other than the above: Blower fails to start


1 The cable is not connected to theinverter, or the cable is connectedincorrectly.

Check the connection.

2 Inverter faulty Replace the inverter.

3 Turbo PCB faulty Replace the turbo PCB.


116

(2) Inverter (A90L--0001--0465: Model JH300)When an alarm is issued, the digital panel displays a messageindicating the type of alarm. The table below lists the messages,descriptions, and causes.

Message Description Cause

E01 Overcurrent during turbo blowerconstant--speed operation

Turbo blower rotorlockedMotor short--circuited or

E02 Overcurrent during turbo blower decel-eration

Motor short--circuited orground--fault

E03 Overcurrent during turbo blower accel-eration

E04 Overcurrent when turbo blower is notoperating

Inverter CT faulty

E05 Inverter overload (overload operation)

E06 Regenerative braking operation timeexceeding the setting

Invalid inverter settingTurbo blower faulty

E07 Direct current smoothing circuit overcur-rent

Inverter faulty

E08 EEPROM error

E09 Abnormal power supply (voltage drop) Supply voltage drop

E10 CT error Inverter faulty

E11 CPU error

E12 Alarm related to external trip function

E13 Alarm related to function for preventingrestart by repower operation

E14 Inverter output side ground--fault Turbo blower or wiringground--fault

E15 High received voltage (supply voltageincrease)

Increased supply volt-age

E16 Abnormal power supply (momentaryloss)

Momentary loss of sup-ply voltage

E17 Option board 1 connection abnormal Inverter faulty

E18 Option board 2 connection abnormal

E19 Option board 1 abnormal

E20 Option board 2 abnormal

E31 Abnormal temperature during turboblower constant--speed operation

E32 Abnormal temperature during turboblower deceleration

E33 Abnormal temperature during turboblower acceleration

E34 Abnormal temperature when turboblower is not operating


117

Ascertain the followings,

1) line voltage: 200/220 VAC, +10%, --15%2) frequency: 50/60 Hz -- 1 Hz3) 3 phasesHere the combination of 220 V and 50 Hz is prohibited.

Using a phase rotation sensor, R, S and T phases of which are connectedto U, V and W phases of the input terminal respectively as shown in thefigure, select the phase of the power line in such a way that the rotationdirection becomes clockwise.In the absence of a phase relation indicator, complete the connection ofthe main breaker so that the exhaust gas is emitted from the laser gasexhaust outlet.

S

Input terminal

Phase rotation sensor

T

VU GW

R

1st does grounding

6.5OBSERVINGVOLTAGE OF POWERLINE

6.5.1Measurement ofVoltage

6.5.2Phase Relation


118

Ascertain if the voltage of each DC power unit is within rated range. Hererefer to Fig. 6.5.3 (a), (b), (c) for the external view of the IF PCB in theoscillator. Refer to Fig. 6.5.3 (d) for the external view of the stabilizedpower supply unit.

IF PCBFS0--LA16B--1110--0223FS16--L, 16i--LA02B--0128--C202 (A16B--1110--0260 and A16B--2100--0080)A16B--2100--0140 or A16B--2100--0141

(1)Rated output voltage

Terminalname

Rated voltage Voltage errorallowance

Application

5V +5V � 5% logic circuit

+24V +24V � 10% input, output signal

+15V +15V � 5% analog circuit

--15V --15V � 5% analog circuit

0V 0V — Take this 0 V as the basein measuring voltage.

(2)Direct current adjustment locationsIn general, the user need not adjust the reference voltage (+10 V).However, a power alarm may be issued if the voltage deviates from thespecified value for some reason. For adjustment, measure the voltagebetween check pin A10 and the 0--V level, then adjust variable resistorVR1 to set +10.00 V. (Use a digital voltmeter for adjustment.)

(3) IF PCBFuse used on the PCB(a) When IF PCB (A16B--2100--0140, --0141) for FS16--L, 16i--L

FU3: A60L--0001--0175#3.2 +5V (3.2A)(b)When IF PCB (A02B--0128--C202 (A16B--1110--0260 and

A16B--2100--0080)) for FS16--L, 16i--LFU1: A60L--0001--0175#3.2 +5V (3.2A)FU2: A60L--0001--0175#0.5 +15V (0.5A)FU3: A60L--0001--0175#0.5 --15V (0.5A)FU4: A60L--0001--0175#0.3 +24V (0.3A)

(c) FS0--LFU1: A60L--0001--0175#0.5 +15V (0.5A)FU2: A60L--0001--0175#3.2 +5V (3.2A)FU3: A60L--0001--0175#0.5 --15V (0.5A)

The layout of the terminals used for checking power supply unitvoltage is shown in Fig. 6.5.3 (a), (b), (c).

6.5.3Measurement ofVoltage of DC PowerSupply Unit


119

(4)Stabilized power supply unitFig. 6.5.3 (d) shows the external appearance of +24V stabilized powerunit.Fuse of the stabilized power supply unit

Designation of power supply unitA20B--1005--0120

Designation of fuse FU : A60L--0001--0175#5.0 (5.0A)FU : A60L--0001--0175#5.0 (5.0A)

orDesignation of power supply unit

A20B--1005--0124Designation of fuse FU : A60L--0001--0175#3.2 (3.2A)

FU : A60L--0001--0175#3.2 (3.2A)

Fig. 6.5.3 (a) IF PCB (A16B--2100--0140, --0141)


120

FU4

* LB6 SHUTTER RELAY (A58L--0001--0265#24P)

* This printed circuit board is below A16B--1110--0260.

CN23

CN CN CN CN CN CN CN CN CN CN11 12 13 14 15 16 17 18 24 25

LPW

LB6COR

MOUT

GPC

MAI MPI

CN34

SPI

PTM LTP

+24 0 --15

5

15

A16

B--1

110-

-026

0

SP2

SP3

SP4

MBI

SP5

SP6

CP87

RII

CII

1 2 3

1 2 3

1 2 3

1 2 3

RELAYG6B

1 2 3

1 2 3

JD1A JD1B

COPIA

CO

PIB

A16B--2100--0080

MBI

MA1 MA2

CP89CP80

CP88

CN30

CP87

LV3RELAY

G6BPATLITERELAY

(A58L--0001--0265#24P)

+24+5

+15--15

0A15A10

FU

3

FU

2

FU

1

VRI

A/DCONVERTOR1 A/D

CONVERTOR2

Fig. 6.5.3 (b) External appearance of IF PCB (FS--16L)


121

CN23

CN CN CN CN11 12 13 14

CNX

PATLITERELAY

(A58L--0001--0265#24P)

CN CN24 25

CN2

CN1

F1

F2

F3A10 0

LF16

SHUTTERRELAY(A58L--0001--0265#24P)

CORGPC

MOUTLPWLTP

0+5

--15+15+24

0LA4

A16

B--1

110-

-022

Fig. 6.5.3 (c) External appearance of IF PCB (FS--0L)

FU FU

TPII

Fig. 6.5.3 (d) Layout of fuse for stabilized power supply unit


122

By using the IF PCB pins, check that each signal of the IF PCB is normal.Fig. 6.5.3 (a) and Fig. 6.5.3 (b) show the pin locations.

FS0--L FS16--LFS16i--L Signal function

COR COR Voltage to operate the laser power supply 0 V to 5V

GPC GPC Specification of pressure inside the laser tube 0 V to13 V

MOUT — Sampling output of monitored laser power supply cur-rents and voltages and monitored pressures inside thelaser tube.Data is output in the order: pressure, voltage (No. 1);pressure, current (No. 1); pressure, voltage (No. 2);and so on.

— MOUT Sampling output of monitored laser power supply cur-rents and voltages.Data is output in the order: voltage (No. 1), current(No. 1), voltage (No. 2), current (No. 2), and so on.

LPW LPW Monitoring of laser output power 0 V to 10 V

LTP LTP Monitoring of pressure inside the laser tube 0 V to 9 V1V/Pressure value 100 (=1330 Pa)Monitored values are clamped to 9 V.

— PTM Sampling output of monitored laser output power val-ues and pressure values inside the laser tube.These two types of data are output alternately.

Pin Setting Description

SP1 1--2 Disables the safety interlock function.

2--3 Enables the safety interlock function. (The power to theIF PCB can be turned on only when pin 1 of CN34 isconnected with pin 2 of CN34.)

SP2SP3

1--2 Enables door interlock operation with the oscillatoronly. (Note, however, that when the door is opened, anNMI communication error occurs because communica-tion with the CNC is disabled.)

2--3 Enables door interlock operation interactively with theCNC. (When DIL1 and DIL2 are connected with thedoor interlock terminal of the CNC, door interlock op-eration is performed interactively with the CNC. Whenno connection is made, this mode of door interlock op-eration is disabled.)

SP4 2--3 Be sure to use this setting at all times.

SP5SP6

1--2 Enables communication with the CNC via a metalcable (when JD1B is used).

2--3 Enables communication with the CNC via an opticalcable (when COP1B is used).

6.5.4Checking the IF PCBSignals

6.5.5Checking the JumperPins (FS16--L, 16i--L)


123

When the machine breaks down, it is necessary to know if the trouble isin the CNC, PMC, machine or laser.Even when there does not exist machine failure, the machine mighthang--up for waiting of external signals. Then the check of inside stateof CNC, interface between CNC and PMC, one between laser and CNCneeds to be done.Here the description is given on the indication of troubles taking place inlaser using the self--diagnostic function of CNC.The indication of troubles in CNC, PMC as well as machine is describedin the maintenance manual.

FANUC Series 0--L : B--61575EFANUC Series 16--LA : B--61855EFANUC Series 16--LB : B--62595ENFANUC Series 16i--LA : B--63195EN

When the diagnosis function is used, the data indicated below can bedisplayed. *** : Series 16--L, 16i--L

[***] : Series 0--L

[CNC--PMC status display]

#7G220[G140]

#6 #5 #4*DU16

#3*DU8

#2*DU4

#1*DU2

#0*DU1

*DU1 -- *DU16 Duty override signal (input)

#7AGRDYG221

[G145]

#6CLRDY

#5 #4 #3 #2 #1 #0

AGRDY Assist gas prepared signal (input)

CLRDY Chiller prepared signal (input)

#7HVONG222

[G146]

#6RUN

#5AGST

#4BEMON

#3SHTON

#2SCLON

#1*BEMLC

#0*SHTLC

HVON Discharge start signal (input)

RUN Gas pressure control start signal (input)

AGST Assist gas start signal (input)

BEMON Beam on signal (input)

SHTON Shutter open signal (input)

SCLON Guide light on signal (input)

*BEMLC Beam lock signal (input)

*SHTLC Shutter lock signal (input)

6.6INDICATION OFSTATE BY MEANS OFSELF DIAGNOSTICFUNCTION

6.6.1Data Items Displayedon the DiagnosisScreen


124

#7POV7G223

[G147]

#6POV6

#5POV5

#4POV4

#3POV3

#2POV2

#1POV1

#0POV0

POV7 -- POV6 Power override signal (input)

#7F220[F171]

#6MWRM

#5 #4SHTONL

#3SHTOFL

#2 #1 #0

MWRM Laser power alarm signal (output)

SHTONL Shutter on state signal (output)

SHTOFL Shutter off state signal (output)

#7BEAMF221

[F172]

#6LSTR

#5RFHV

#4CLON

#3WAIT

#2PURGE

#1LRDY

#0LARM

BEAM Beam on signal (input)

LSTR In--oscillating signal (output)

RFHV Base in--discharging signal (output)

CLON Chiller start request signal (output)

WAIT Gas pressure in--controlling signal (output)

PURGE Purge completed signal (output)

LRDY Discharge start prepared signal (output)

LARM Laser alarm signal (output)

#7F222[F173]

#6CW

#5PULSE

#4 #3 #2AG3

#1AG2

#0AG1

CW Continuous wave mode state output signal (output)

PULSE Pulse mode state output signal (output)

AG1 -- AG3 Assist gas select signal (output)


125

900DOIML0A

LASER POWER COMMAND

Displays a value specified in a laser output power command and sent tothe DA converter.

901DOIML08

LASER BIAS COMMAND

Displays a value specified in a preparatory discharge command and sent tothe DA converter.

902R@LSPON

PULSE ON TIME

Displays the ON time period of an output power command pulse signal.

903R@LSPOF

PULSE OFF TIME

Displays the OFF time period of an output power command pulse signal.

904DOIML06

GAS PRES. CONTROL

Displays a value specified in a pressure command for the pressurecontroller that controls pressure inside the discharge tube, and sent to theDA converter.

905R@LSPRS

LASER TUBE PRES.

Displays the pressure inside the discharge tube.

[Display range] 0 to 900

[Unit] ×13 Pa

906R@POWER

LASER POWER

Displays monitored laser output power values.

[Unit] W (watt)

907R@EIN

TRACE DATA

908R@LSEFCY

LASER SEQUENCE

6.6.2Laser Oscillator StatusDisplay (FS16--L, 16i--L)


126

909 RF VOLTAGE 1

910 RF CURRENT 1

911 RF VOLTAGE 2

912 RF CURRENT 2

913 RF VOLTAGE 3

914 RF CURRENT 3

915 RF VOLTAGE 4

916 RF CURRENT 4

917 RF VOLTAGE 1

918 RF CURRENT 1

919 RF VOLTAGE 2

920 RF CURRENT 2

921 RF VOLTAGE 3

922 RF CURRENT 3

923 RF VOLTAGE 4

924 RF CURRENT 4

Unit of voltage applied to discharge tubes No. 1 through No. 4: VUnit of current applied to discharge tubes No. 1 through No. 4: mA(milliampere)

#7*SFI960

DIIML00

#6*RBT

#5*MGP

#4*AP

#3 #2FRQ

#1*ESAL

#0*ENB

*ENB Intra--IF enable signal0 : Disabled1 : Enabled

*ESAL Emergency stop signal0 : Emergency stop1 : Normal processing


127

FRQ Power frequency detection0 : 50 Hz1 : 60 Hz

*AP Air pressure sensor0 : Lower than air pressure1 : Same as air pressure

*MGP Laser gas pressure0 : Low1 : Normal

*RBT Blower temperature0 : Abnormal1 : Normal

*SFI Safety interlock0 : Interlocked1 : Normal

#7*ABT961

DIIML01

#6*SHT

#5*SHOF

#4SHON

#3*RPAL

#2*WT1

#1*CAT

#0*MVW

*MVW Water amount sensor0 : Abnormal1 : Normal

*CAT Chamber temperature sensor0 : Abnormal1 : Normal

*WT1 Condensation sensor0 : Abnormal1 : Normal

*RPAL Vacuum pump alarm0 : Abnormal1 : Normal

SHON Open shutter sensorThe shutter is open when this bit is set to 1.

SHOF Closed shutter sensorThe shutter is closed when this bit is set to 1.

*SHT Shutter temperature sensor0 : Abnormal1 : Normal

*ABT Absorber temperature sensor0 : Abnormal1 : Normal


128

#7962

DIIML02

#6 #5*OH1

#4*TCA1

#3*M--R

#2*L--V

#1*AR1

#0*IAL1

*IAL1 Inverter alarm 10 : Abnormal1 : Normal

*AR1 Frequency signal 10 : Mismatch1 : Match

*L--V Turbo blower oil0 : Oil level too low1 : Normal

*M--R External folding mirror0 : Mirror not mounted1 : Normal

*TCA1 Turbo current sensor 10 : Abnormal1 : Normal

*OH1 Abnormal turbo temperature 10 : Abnormal1 : Normal

#7963

DIIML03

#6 #5*OH2

#4*TCA2

#3*REV2

#2*VIB2

#1*AR2

#0*IAL2

*IAL2 Inverter alarm 20: Abnormal1: Normal

*AR2 Frequency signal 20: Mismatch1: Match

*VIB2 Vibration sensor 20: Abnormal1: Normal

*REV2 Rotation sensor 20: Less than 8000 rpm1: 8000 rpm or more

*TCA2 Turbo current sensor 20: Abnormal1: Normal

*OH2 Abnormal turbo temperature 20: Abnormal1: Normal


129

#7964

DIIML04

#6 #5*OH3

#4*TCA3

#3*REV3

#2*VIB3

#1*AR3

#0*IAL3

*IAL3 Inverter alarm 30 : Abnormal1 : Normal

*AR3 Frequency signal 30 : Mismatch1 : Match

*VIB3 Vibration sensor 30 : Abnormal1 : Normal

*REV3 Rotation sensor 30 : Less than 8000 rpm1 : 8000 rpm or more

*TCA3 Turbo current sensor 30 : Abnormal1 : Normal

*OH3 Abnormal turbo temperature 30 : Abnormal1 : Normal

#7*PSA08966

DIIML06

#6*PSA07

#5*PSA06

#4*PSA05

#3*PSA04

#2*PSA03

#1*PSA02

#0*PSA01

Displays the operating states of power supply units No. 1 through No. 8.

#7968

DOIML00

#6ACSI

#5PLS

#4SEL1.4

#3SEL1.3

#2SEL1.2

#1SEL1.1

#0SEL1.0

SEL1.0 to SEL1.4 Select signals for discharge tube monitor data

PLS Pulse command signal0 : Filter provided1 : No filter provided

ACSI Access notice signal0 : OFF1 : ON

#7969

DOIML01

#6 #5 #4 #3 #2HSCST

#1SEP2

#0SEP1

SEP1 Pressure/power select signal

SEP2 Pressure/power select signal

HSCST High--speed A/D conversion start


130

#7PS08970

DOIML02

#6PS07

#5PS06

#4PS05

#3PS04

#2PS03

#1PS02

#0PS01

PS01 -- PS08 Power select signals 1 to 80 : Not selected1 : Selected

#7TWV972

DOIML04

#6BPV

#5PTL

#4GRDY

#3VEN

#2RPA

#1RBA

#0PUG

PUG Purge valve0: Closed1: Open

RBA Turbo blower activation0: Stopped1: Activated

RPA Vacuum pump activation0: Stopped1: Started

VEN Air release valve0: Closed1: Open

GRDY Laser gas supply valve0: Closed1: Open

PTL Flashing light0: Off1: On

BPV Bypass valve0: Closed1: Open

TWV Three--way valve0: Air release1: Open

#7LSCST973

DOIML05

#6 #5PCS

#4FW

#3IB

#2*PCL

#1OFS

#0SHOP

SHOP Shutter open command0: Closed1: Open

OFS Off sequence0: OFF1: ON

*PCL DC power alarm clear0: Clear1: Normal


131

IB Semiconductor laser--on command0: OFF1: ON

FW Inverter start signal0: Stopped1: Started

PCS Gas pressure PWM command

LSCST Low speed A/D conversion start0: OFF1: ON

#7PSAR8974

R@LSDIC2

#6PSAR7

#5PSAR6

#4PSAR5

#3PSAR4

#2PSAR3

#1PSAR2

#0PSAR1

Power unit alarms 1 to 8

0: Normal1: Abnormal

980R@SNSAL

GAS PRES. SENSOR ALM

981R@ADALM1

A/D CONV--1 ALM

982R@ADALM2

A/D CONV--2 ALM

983R@ALVLT

VOLTAGE DOWN

984R@ALPWR

POWER DOWN

985R@RFPWR

BEAM REFLECTION

986 LASER EFFICIENCY

987 Cylinder replacement

111 : Cylinder replacement request0 : Cylinder replaced

988 Mixing

111 : Abnormal mixing0 : Normal mixing


132

#7 #6 #5 #4 #3 #2 #1 #0DGN No88 Output command value + Bias command

89

(CNC internal DO)

Displays a value specified in a laser output power command and sent tothe DA converter.

#7 #6 #5 #4 #3 #2 #1 #0DGN No90 Bias command

91

(CNC internal DO)

Value written in the DA converter at pre discharge.

#7 #6 #5 #4 #3 #2 #1 #0DGN No92 Laser gas pressure command

93

(CNC internal DO)

Pressure command value written in the DA converter which is sent to thepressure controller for the discharge tubesAssist gas pressure command value written in the DA converter

#7 #6 #5 #4 #3 #2 #1 #0DGN No94 Assist gas pressure command

(CNC internal DO)

Pressure command value written in the DA converter which is sent to thepressure controller for the discharge tubesAssist gas pressure command value written in the DA converter

#7 #6 #5 #4 #3 #2 #1 #0DGN No840 WT1 RBT MGP MVW AP

(CNC internal DI)

WT1 Condensation sensor0 : Abnormal1 : Normal

RBT Turbo blower temperature0 : Abnormal1 : Normal

MGP Laser gas pressure0 : Abnormal1 : Normal

6.6.3Laser Oscillator StatusDisplay (FS0--L)


133

MVW Quantity of cooling water0 : Abnormal1 : Normal

AP Atmospheric pressure sensor0 : Less than standard value1 : Greater than standard value

#7 #6 #5 #4 #3 #2 #1 #0DGN NoCAT841 SHOF SHON DL1 ABT SHT IAL ENB

(CNC internal DI)

CAT Cabinet temperature0 : Abnormal1 : Normal

SHOF Shutter close detecting signal1 : Shutter close position

SHON Shutter open detecting signal1 : Shutter open position

DL1 Door interlock1 : Open

ABT Beam absorber temperature0 : Abnormal1 : Normal

SHT Shutter temperature0 : Abnormal1 : Normal

IAL Inverter status signal0 : Abnormal1 : Normal

ENB Power supply of IF PCB0 : Abnormal1 : Normal

#7 #6 #5 #4 #3 #2 #1 #0DGN NoPSA8842 PSA7 PSA6 PSA5 PSA4 PSA3 PSA2 PSA1

(CNC internal DI)

*PSA8 -- *PSA1 The power supply unit status signal0 : Abnormal1 : Normal

#7 #6 #5 #4 #3 #2 #1 #0DGN No844 ADDT1

EOC1845

(CNC internal DI)

ADDT1 Data read from the AD converter 1

EOC1 Conversion completion signal of the AD converter 10 : Under conversion1 : Completion


134

#7 #6 #5 #4 #3 #2 #1 #0DGN No846 ADDT2

EOC2847

(CNC internal DI)

ADDT2 Data read from the AD converter 2

EOC2 Conversion completion signal of the AD converter 20: Under conversion1: Completion

#7 #6 #5 #4 #3 #2 #1 #0DGN No848 PCBID

(CNC internal DI)

PCBID PCB A16B--1212--0270 is mounted.

#7 #6 #5 #4 #3 #2 #1 #0DGN No850

851

(CNC internal DI)

Output command pulse ON period.

#7 #6 #5 #4 #3 #2 #1 #0DGN No852

853

(CNC internal DI)

Output pulse OFF period.

#7 #6 #5 #4 #3 #2 #1 #0DGN NoPSAR8854 PSAR7 PSAR6 PSAR5 PSAR4 PSAR3 PSAR2 PSAR1

(CNC internal DI)

PSAR8 -- PSAR1 Latch signal of the power supply unit alarmThe power supply unit abnormal signal in DGN No. 842 is the statussignal latching the alarm signal.

#7 #6 #5 #4 #3 #2 #1 #0DGN NoRPA855 RBA PUG SEL4 SEL3 SEL2 SEL1 SEL0

(CNC internal DO)

RPA Vane pump start signal0 : Stop1 : Pump is operating

RBA Turbo blower start signal0 : Stop1 : Blower is operating

PUG Purge valve open/close signal0 : Close1 : Open


135

SEL4 -- SEL0 AD converter 2 switching signal

SEL4 SEL3 SEL2 SEL1 SEL0

Pressure in side tube 0 0 0 0 0

Output voltage of RF power supply unit (1) 0 0 0 0 1

Output current of RF power supply unit (1) 0 0 0 1 0















#7 #6 #5 #4 #3 #2 #1 #0DGN NoPLS856 BPV PCL OFI PTL STO GRDY VEN

(CNC internal DO)

PLS Pulse waveform control signal0 : OFF1 : ON

BPV Bypass valve open/close signal0 : Exhaust valve close1 : Exhaust valve open

PCL DC power unit alarm clear signal0 : OFF1 : ON

OFI Power off masking signal0 : Enables power off1 : Unavailable power off

PTL Patrol light signal0 : Patrol off1 : Patrol on

STO Shutter open/close signal0 : Shutter close1 : Shutter open


136

GRDY Laser gas supply valve open/close signal0 : Laser gas supply valve close1 : Laser gas supply valve open

VEN Exhaust valve open/close signal0 : Exhaust valve close1 : Exhaust valve open

#7 #6 #5 #4 #3 #2 #1 #0DGN NoPSS8857 PSS7 PSS6 PSS5 PSS4 PSS3 PSS2 PSS1

(CNC internal DO)

PSS8 -- PSS1 Power source switching signal0 : Not selected1 : Selected

DGN No860 LSPRS

(CNC internal DI)

LSPRS Pressure value inside the discharge tape (Unit : ×13 Pa)

DGN No861 LSVLT1

862 LSCRT1

863 LSVLT2

864 LSCRT2

865 LSVLT3

866 LSCRT3

867 LSVLT4

868 LSCRT4

869 LSVLT5 (1)

870 LSCRT5 (1)

871 LSVLT6 (2)

872 LSCRT6 (2)

873 LSVLT7 (3)

874 LSCRT7 (3)

875 LSVLT8 (4)

876 LSCRT8 (4)

(CNC internal DO)

LSVLT 1~8 Discharge tube voltate (Unit V)

LSCRT 1~8 Discharge tube current (Unit mA)


137

DGN No877 EIN

(CNC internal DI)

EIN Input from tracing sensor.(Value which is not multiplied by the correction factor)

+10V 2047. . . . . .0V 0. . . . . .

--10V --2047. . . . . .

DGN No878 LSADC

(CNC internal DI)

LSADC Power sensor output. (Unit W)(Value which is not multiplied by the power--input correction factor)

DGN No890 LSEFCY

(CNC internal DO)

LSEFCY Laser efficiency

DGN No892 Cylinder replacement for gas mixer

111 : Cylinder replacement request0 : Cylinder replaced

DGN No893 Mixing by gas mixer

111 : Abnormal mixing0 : Normal mixing

B--70125EN/037. OSCILLATOR CONNECTIONS

138

7 OSCILLATOR CONNECTIONS

B--70125EN/03 7. OSCILLATOR CONNECTIONS

139

FLOW SENSOR (distributor unit)

IF UNIT BFOR i0L : A04B--0810--H010FOR i16L: A04B--0810--H011FOR 16iL: A04B--0810--H014

MB FAN

RF RADIATOR UNIT

RE FAN UNIT

RE RADIATOR UNIT

SHUTTER FAN UNIT

HOUR METER

PURGE, GAS SUPPLY, GAS EXHAUST VALVE

EXHAUST VALVE

3 WAY VALVE

BYPASS VALVE

WARNING LIGHT

EXHAUST CONTROLLER

SHUTTER UNIT

SHUTTER SW UNIT

SHUTTER TEMP SENSOR

ABSORBER TEMP SENSOR

ROTARY SOLENOID

POWER SENSOR

DEW SENSOR

CABINET TEMP SENSOR

DIODE LASER UNIT

PRESSURE SENSOR PRESSURE CONTROLLER

CONTROL VALVE

PRES. SW B

PRES. SW A

(PRESSURE CONTROLLER)

: 2 UNITS

DOWNSIDE

UPSIDE

EXHAUST PUMPUB, VB

RELAY PCB B :

RELAY PCB A

IB1, 2(CASE OFOL, TL20)

TO

STA

BIP

SU

2 UNITS

(Square)

I.FP

CB

0L:A

16B--1110--0223

16L:A

02B--0128--C

202(A

16B--1110--0260,A

16B--2100--0080)

orA16B

--2100--0141

Fig. 7.1 (a) Electrical connection diagram 1 (C1500B)

7.1ELECTRICALCONNECTIONS


140

INPUT UNITA04B--0810--C311 (JPN)A04B--0810--C312 (USA)

TURBO PCB

MIRROR SW

LASER PSU MB UNIT

TUBE ASS’Y

FRAMEGROUND

TURBO BLOWER

HF INVERTER

OUTPUT OFTHERMALCLOSE WHENALARM

TO HOUR METER

STABILIZED PSU(BREAKERRELAYPANEL)

EXHAUST PUMP UNIT

INPUT UNIT

CLASS 1 GROUND (FRAME GROUND)

FRAME GROUND

TERMINAL

(CONECT TO MACHINE SHUTTER LOCK)

2 UNITS

A14B--0082--B201or B201

A14B--0082--B303or B303

I.FP

CB

0L:A

16B--1110--0223

16L:A

02B--0128--C

202(A

16B--1110--0260,A

16B--2100--0080)

orA16B

--2100--0141

Fig. 7.1 (b) Electrical connection diagram 2 (C1500B)


141

FLOW SENSOR (distributor unit)

IF UNIT BFOR i 0L : A04B--0810--H010FOR i16L: A04B--0810--H011FOR 16iL: A04B--0810--H014

MB FAN

RF RADIATOR UNIT

RE FAN UNIT

RE RADIATOR UNIT

SHUTTER FAN UNIT

HOUR METER


EXHAUST VALVE

3 WAY VALVE

BYPASS VALVE

WARNING LIGHT

EXHAUST CONTROLLER

SHUTTER UNIT

EXHAUST PUMPUB, VB

DOWNSIDE

UPSIDE

4 UNITS

2 UNIT

(PRESSURE CONTROLLER)

SHUTTER SW UNIT

SJUTTER TEMP SENSOR


ROTARY SOLENOID

POWER SENSOR

DEW SENOSR

CABINET TEMP SENSOR

DIODE LASER UNIT

PRESSURE SENSOR

CONTROL VALVE

PRES. SW B

PRES. SW A

PRESSURE CONTROLLER

RELAY PCB A

RELAY PCB B :


TO

STA

BIP

SU

(Square)

I.FP

CB

0L:A

16B--1110--0223

16L:A

02B--0128--C

202(A

16B--1110--0260,A

16B--2100--0080)

orA16B

--2100--0141

Fig. 7.1 (c) Electrical connection diagram 1 (C2000B)


142

TURBO PCB

MIRROR SW

LASER PSUMB UNIT

TUBE ASS’Y

FRAME

STABILIZED PSU

TURBO BLOWER

HF INVERTEROUTPUT OFTHERMAL WHENALARM CLOSE

TO HOUR METER EXHAUST PUMP

(BREAKERRELAYPANEL)

TERMINAL

(TO MACHINE SIDE INTERLOCK)

INPUT UNIT

CLASS 1 GROUND (FRAME)

FRAME

INPUT UNITA04B--0807--C311 (JIS)A04B--0807--C312 (USA)

2 UNIT

TO

A14B--0082--B209or --B208or --B202

NO1~NO4

I.FP

CB

0L:A

16B--1110--0223

16L:A

02B--0128--C

202(A

16B--1110--0260,A

16B--2100--0080)

orA16B

--2100--0141

Fig. 7.1 (d) Electrical connection diagram 2 (C2000B)


143

(Square)

IF UNIT Bi0L: A04B--0813--H010

i16L: A04B--0813--H01116iL: A04B--0813--H014

RE FAN UNIT

RE RADIATOR FAN UNIT

RF RADIATOR FAN UNIT

SHUTTER FAN UNIT

PURGE, GAS SUPPLY, GAS EXHAUST VALVE (PRESSURE CONTROLLER)

EXHAUST VALVE

3 WAY VALVE

BYPASS VALVE

WARNING LIGHT

EXHAUST CONTROLLER

SHUTTER UNIT

RELAY PCB BSHUTTER SW UNIT

SHUTTER TEMP SENSOR


ROTARY SOLENOID

POWER SENSOR

WATER FLOW SENSOR (disributor unit)

DEW SENSOR

CABINET TEMP SENSOR

DIODE LASER UNIT

RELAY PCB A

PRESSURE SENSOR

CONTROL VALVE

PRES. SW B

PRES. SW A

PRESSURE CONTROLLER

TO

STA

BILIZ

ED

PS

U

Fig. 7.1 (e) Electrical connection diagram 1 (C2000C)


144

CLASS 1 GROUND

TURBO PCB

INPUT UNITA04B--0813--C310 (JIS, USA)

MIRROR SW

LASER PSU MB UNIT

TUBE ASS’Y

LOCKERFRAME

TURBO BLOWER

STABILIZED PSU

NOIZE FILTER

EXHAUST PUMP

TERMINAL XT20

(TO MACHINE SIDE SHUTTER LOCK)


(BREAKERRELAYPANEL)

TO HOUR METER

FRAME

(MAIN LOCKER FRAME)

INPUTUNIT

POWER SUPPLY UNIT200/220VAC50/60HZ

2 UNIT

TO

CN

57

Fig. 7.1 (f) Electrical connection diagram 2 (C2000C)


145

WATER FLOW SENSOR (distributor unit)

IF UNIT Bi0L: A04B--0811--H010

i16L: A04B--0811--H01116iL: A04B--0811--H014

MB FAN

RE FAN UNIT

RE RADIATOR UNIT

RF RADIATOR UNIT

SHUTTER FAN UNIT

PURGE, GAS, SUPPLY, GAS EXHAUST VALVE (PRESSURE CONTROLLER)

EXHAUST VALVE

3 WAY VALVE

BYPASS VALVE

WARNING LIGHT

EXHAUST CONTROLLER

SHUTTER UNIT

RELAY PCB B :SHUTTER SW UNIT

SHUTTER TEMP SENSOR


ROTARY SOLENOID

POWER SENSOR

DEW SENSOR

CABINET TEMP SENSOR

DIODE LASER UNIT


RELAY PCB A

PRESSURE CONTROLLER

CONTROL VALVE

PRES. SW B

PRES. SW A

TO

STA

BILIZ

ED

PS

U

PRESSURE SENSOR

(Square)

I.FP

CB

0L:A

16B--1110--0223

16L:A

02B--0128--C

202(A

16B--1110--0260,A

16B--2100--0080)

orA16B

--2100--0141

Fig. 7.1 (g) Electrical connection diagram 1 (C3000C)


146

INPUT UNITA04B--0811--C315

TURBO PCB

MIRROR SW

TURBO BLOWERFAN UNIT

HF INVERTER

LASER PSU

MB UNIT

LOCKERFRAME

TUBE ASS’YEXHAUST PUMP

STABILIIZED PSU

HOUR METER

OUTPUT OFTHERMAL WHENALARM COLSE

(BREAKERRELAYPANEL)

INPUT UNIT

CLASS 1 GROUND (MAIN LOCKER FRAME)

FRAME

TERMINAL

(TO MACHINE SIDEINTERLOCK)

AUXILIARY INPUT UNIT

2 UNIT

MAIN LOCKER

NO1, NO4: A14B--0082--B209or B207or B201

NO2, NO3: A14B--0082--B209or B208or B202

NO1, NO4:A14B--0082--B307

NO2, NO3:A14B--0082--B304

I.FP

CB

0L:A

16B--1110--0223

16L:A

02B--0128--C

202(A

16B--1110--0260,A

16B--2100--0080)

orA16B

--2100--0141

Fig. 7.1 (h) Electrical connection diagram 2 (C3000C)


147

(Square)

IF UNITi16L : A04B--0813--H01116iL : A04B--0813--H014

MB FAN

RE FAN UNIT


SHUTTER FAN UNIT

INVERTER FAN UNIT


EXHAUST VALVE

3 WAY VALVE

BYPASS VALVE

WARNING LIGHT

EXHAUST CONTROLLER

SHUTTER UNIT


SHUTTER TEMP SENSOR


ROTARY SOLENOID

POWER SENSOR


DEW SENSOR

CABINET TEMP SENSOR

DIODE LASER UNIT

RELAY PCB A

PRESSURE SENSOR

CONTROL VALVE

PRES. SW B

PRES. SW A

PRESSURE CONTROLLER

TO

STA

BILIZ

ED

PS

U


Fig. 7.1 (i) Electrical connection diagram 1 (C3000D)


148

CLASS 1 GROUND

TURBO PCB

INPUT UNITA04B--0814--C310 (JAPANESE)A04B--0814--C311 (USA)

MIRROR SW

LASER PSUMB UNIT

TUBE ASS’Y

LOCKERFRAME

TURBO BLOWER

STABILIZED PSU

NOIZE FILTER

EXHAUST PUMP

TERMINAL XT20



(BREAKERRELAYPANEL)

TO HOUR METER

FRAME

(MAIN LOCKER FRAME)

INPUTUNIT


2 UNIT

TO

CN

57

Fig. 7.1 (j) Electrical connection diagram 2 (C3000D)


149

(Square)

IF UNIT Bi16L : A04B--0815--H01116iL : A04B--0815--H014

MB FAN

RE FAN UNIT

RF RADIATORN FAN UNIT


SHUTTER FAN UNIT

INVERTER FAN UNIT


EXHAUST VALVE

3 WAY VALVE

BYPASS VALVE

WARNING LIGHT

EXHAUST CONTROLLER

SHUTTER UNIT


SHUTTER TEMP SENSOR


ROTARY SOLENOID

POWER SENSOR


DEW SENSOR

CABINET TEMP SENSOR

DIODE LASER UNIT

RELAY PCB A

PRESSURE SENSOR

CONTROL VALVE

PRES. SW B

PRES. SW A

PRESSURE CONTROLLER

TO

STA

BILIZ

ED

PS

U

Fig. 7.1 (k) Electrical connection diagram 1 (C4000A)


150

CLASS 1 GROUND

TURBO PCB

INPUT UNITA04B--0815--C310 (JAPANESE)A04B--0815--C311 (USA)

MIRROR SW

LASER PSU MB UNIT

TUBE ASS’Y

LOCKERFRAME

TURBO BLOWER

STABILIZED PSU

NOIZE FILTER

EXHAUST PUMP

TERMINAL XT20



(BREAKERRELAYPANEL)

TO HOUR METER

FRAME

(MAIN LOCKER FRAME)

INPUTUNIT


2 UNIT

TO

CN

57

Fig. 7.1 (l) Electrical connection diagram 2 (C4000A)


151

WARNING LIGHT

EXHAUST CONTROLLER

EXHAUST VALVE

3 WAY VALVE

BYPASS VALVE

PRESSURE CONTROLLER


PRESSURE SENSOR

CONTROL VALVE

PRES. SW B

PRES. SW A

RELAY PCB--A

RELAY PCB--B

SHUTTER UNIT

SHUTTER SW UNIT

SHUTTER TEMP SENSOR


ROTARY SOLENOID

POWER SENSOR

FLOW SENSOR (Distributor unit)

DEW SENSOR

CABINET TEMP SENSOR

DIODE LASER UNIT

TO STABI PSU

(Black)

(Square)

Fig. 7.1 (m) Electrical connection diagram 1 (C6000B)


152

TUBE ASS’Y

(Square)

(Black)

TURBO PCB

TURBO BLOWER

INVERTER

TO NOISE FILTERLASER PSU

MATCHING BOX

INPUT UNIT

TO INPUT UNIT

INPUT A PCB

STABILIZED PSU

TO RELAY PCB--B (CN57)

TO INPUT UNIT

TO INPUT UNIT

(TO MACHINE SIDE INTERLOCK)

TO INPUT UNIT (QF1)

MAIN LOCKER FRAME

Fig. 7.1 (n) Electrical connection diagram 2 (C6000B)


153

INPUT UNIT

JPN

UL

TO LASER PCU (NO1 TO NO8)

TO INVERTER (NO1, NO2)

NOISE FILTER

MB FAN

RF RADIATOR UNIT

RE FAN UNIT

RE RADIATOR UNIT

SHUTTER FAN UNIT

HOUR METER

EXHAUST PUMP

(EACH 2 pcs)

(FRAME)

CLASS 1GROUND

(FRAME)

(Square)

(Black)

Fig. 7.1 (o) Electrical connection diagram 3 (C6000B)


154

Fig. 7.2 (a) Water flow diagram (C1500B)

7.2COOLING WATERPIPING


155

Fig. 7.2 (b) Water flow diagram (C2000B)


156

DIS

TR

IB--

UT

OR

OU

T

DIS

TR

IB--

UT

OR

IN

LAS

ER

PS

U

LAS

ER

PS

U

NO

ZZ

LE OU

TP

UT

MIR

RO

R

BE

AM

AB

SO

RB

ER

FO

LDIN

GM

IRR

OR

HO

LDE

RN

o.2

OU

TLE

TH

EA

TE

XC

HA

NG

ER

VAN

EP

UM

P

DR

AIN

CO

OLI

NG

PLA

TE

(LO

WE

RS

IDE

)

CO

OLI

NG

PLA

TE

(UP

PE

RS

IDE

)

FO

LDIN

GM

IRR

OR

HO

LDE

RN

o.3

FO

LDIN

GM

IRR

OR

HO

LDIN

GN

o.1

RE

AR

MIR

RO

R

RF

RA

DIA

TO

RU

NIT

B

UN

ITB

RF

RA

DIA

TO

R

FLOW SENSOR

RF

RA

DIA

TO

RU

NIT

A

RE

RA

DIA

TO

RU

NIT

A

INLE

TH

EA

TE

XC

HA

NG

ER

TUR

BO

BLO

WE

R

NO

ZZ

LEB

NO

.1N

OZ

ZLE

BN

O.3

NO

ZZ

LEB

NO

.4

NO

.1

NO

.2

BN

O.2

Fig. 7.2 (c) Water flow diagram (C2000C)


157

Fig. 7.2 (d) Water flow diagram (C3000C)


158

DIS

TR

IB--

UT

OR

IN

DIS

TR

IB--

UT

OR

OU

T FLOW SENSOR

NO

ZZ

LEB

NO

.3

FO

LDIN

GM

IRR

OR

FO

LDE

RN

O.4

FO

LDIN

GM

IRR

OR

FO

LDE

RN

O.1

RE

RA

DIA

TO

RU

NIT

B

FO

LDIN

GM

IRR

OR

FO

LDE

RN

O.3

FO

LDIN

GM

IRR

OR

FO

LDE

RN

O.2

LAS

ER

PS

UN

O.1

LAS

ER

PS

UN

O.2

LAS

ER

PS

UN

O.3

CO

OLI

NG

PLA

TE

(UP

PE

RS

IDE

)

NO

ZZ

LEB

NO

.1

NO

ZZ

LEB

NO

ZZ

LEB

NO

.5N

OZ

ZLE

BN

O.4

OU

TP

UT

MIR

RO

RF

OLD

ER

RE

AR

MIR

RO

RF

OLD

ER

INLE

TH

EA

TE

XC

HA

NG

ER

RE

RA

DIA

TO

RU

NIT

A

RF

RA

DIA

TO

RU

NIT

B

RF

RA

DIA

TO

RU

NIT

A

OU

TLE

TH

EA

TE

XC

HA

NG

ER

BE

AM

AB

SO

RB

ER

VAN

EP

UM

P

TU

RB

OB

LOW

ER

DR

AIN

CO

OLI

NG

PLA

TE

(LO

WE

RS

IDE

)

NO

.6

NO

ZZ

LEB

NO

.2

Fig. 7.2 (e) Water flow diagram (C3000D)


159

FLOW SENSOR FLOW SENSOR

NO

ZZ

LEB

NO

.5

CO

OLI

NG

PLA

TE

(LO

WE

RS

IDE

)N

OZ

ZLE

B

NO

ZZ

LEB

NO

.7

NO

.8

CO

OLI

NG

PLA

TE

(UP

PE

RS

IDE

)

NO

ZZ

LEB

NO

.6

FO

LDIN

GM

IRR

OR

FO

LDE

RN

O.1

FO

LDIN

GM

IRR

OR

FO

LDE

RN

O.6

NO

ZZ

LEB

NO

.1

NO

ZZ

LEB

NO

.4

NO

ZZ

LEB

NO

.3

NO

ZZ

LEB

NO

.2

FO

LDIN

GM

IRR

OR

FO

LDE

RN

O.2

FO

LDIN

GM

IRR

OR

FO

LDE

RN

O.5

TU

RB

OB

LOW

ER

OU

TLE

TH

EAT

EX

CH

AN

GE

R

INLE

TH

EAT

EX

CH

AN

GE

R

LAS

ER

PS

UN

O.1

LAS

ER

PS

UN

O.2

RE

RA

DIA

TO

RU

NIT

B

OU

TP

UT

MIR

RO

RF

OLD

ER

CO

OLI

NG

PLA

TE

(DIS

TR

IBU

TO

RS

IDE

)

BE

AM

AB

SO

RB

ER

LAS

ER

PS

UN

O.3

LAS

ER

PS

UN

O.4

FO

LDIN

GM

IRR

OR

FO

LDE

RN

O.3

VA

NE

PU

MP

RE

RA

DIA

TO

RU

NIT

A

DR

AIN

DR

AIN

VALV

E

RF

RA

DIA

TO

RU

NIT

AN

O.1

RF

RA

DIA

TO

RU

NIT

AN

O.2

RE

AR

MIR

RO

RF

OLD

ER

FO

LDIN

GM

IRR

OR

FO

LDE

RN

O.4

CO

OLI

NG

PLA

TE

(PO

WE

RM

AG

NE

TIC

SC

AB

INE

TS

IDE

)

Fig. 7.2 (f) Water flow diagram (C4000A)


160

FLOW SENSOR

DIS

TR

IB--

UT

OR

OU

T

DR

AIN

VALV

E

FO

LDIN

GM

IRR

OR

HO

LDE

RN

O.1

FO

LDIN

GM

IRR

OR

HO

LDE

RN

O.2

RE

AR

MIR

RO

RH

OLD

ER

RF

RA

DIA

TO

RU

NIT

A(R

)

RF

RA

DIA

TO

RU

NIT

C(R

)

RF

RA

DIA

TO

RU

NIT

B(R

)

RF

RA

DIA

TO

RU

NIT

A(O

)

RF

RA

DIA

TO

RU

NIT

C(O

)

RF

RA

DIA

TO

RU

NIT

B(O

)

TU

RB

OB

LOW

ER

NO

.1

TU

RB

OB

LOW

ER

NO

.3

TU

RB

OB

LOW

ER

NO

.2

TU

RB

OB

LOW

ER

NO

.4

BE

AM

AB

SO

RB

ER

OU

TLE

TH

EA

TE

XC

HA

NG

ER

NO

.1

INLE

TH

EA

TE

XC

HA

NG

ER

NO

.1

INLE

TH

EA

TE

XC

HA

NG

ER

NO

.2

DIS

TR

IB--

UT

OR

IN

Fig. 7.2 (g) Water flow diagram (C6000B, distribution A)


161

FLOW SENSOR DR

AIN

BA

LVE

RE

RA

DIA

TO

RU

NIT

C

RE

RA

DIA

TO

RU

NIT

D

LAS

ER

PS

UN

O.1

LAS

ER

PS

UN

O.3

LAS

ER

PS

UN

O.5

LAS

ER

PS

UN

O.7

LAS

ER

PS

UN

O.2

LAS

ER

PS

UN

O.4

LAS

ER

PS

UN

O.6

LAS

ER

PS

UN

O.8

RE

RA

DIA

TO

RU

NIT

A1

RE

RA

DIA

TO

RU

NIT

B1

F.M

.F

OLD

ER

NO

.3

F.M

.F

OLD

ER

NO

.4

RE

RA

DIA

TO

RU

NIT

A2

RE

RA

DIA

TO

RU

NIT

B2

OU

TLE

TH

/EN

O.2

INLE

TH

/EN

O.3

INLE

TH

/EN

O.4

EX

HA

US

TP

UM

P

O.M

.F

OLD

ER

NO

ZZ

LEB

NO

.4

NO

ZZ

LEB

NO

.9

NO

ZZ

LEB

NO

.5

NO

ZZ

LEB

NO

.8

NO

ZZ

LEB

NO

.6

NO

ZZ

LEB

NO

.7

NO

ZZ

LEB

NO

.1

NO

ZZ

LEB

NO

.12

NO

ZZ

LEB

NO

.2

NO

ZZ

LEB

NO

.11

NO

ZZ

LEB

NO

.3

NO

ZZ

LEB

NO

.10

DIS

TRIB

--U

TOR

OU

T

DIS

TRIB

--U

TOR

IN

Fig. 7.2 (h) Water flow diagram (C6000B, distribution B)


162

Fig. 7.3 (a) shows the flow of supply gas and exhaust gas in the laseroscillator. Figs. 7.3 (b) to (h) are system diagrams showing the piping inthe laser oscillator.

Pressure value100 (=1330Pa)or more

Pressure value300 to 700(=4000 to9300Pa)

Pressure value700 (=9300Pa)or more

Fig. 7.3 (a) Schematic diagram of laser gas flow

7.3GAS PIPING


163

LAS

ER

MO

DE

LC

1500

BLA

SE

RO

SC

ILLA

TOR

A04

B--0

810-

-B30

1

EX

HA

US

TC

ON

TR

OLL

ER

AIR

DIS

TR

IBU

TE

R

(PFA

)

EX

HA

US

TP

UM

PU

NIT E

XH

AU

ST

PU

MP

(BU

)(Y

)

GA

SO

UT

GA

SIN

2--F

--PT

3/8″

OU

TLE

TH

/E

INLE

TH

/E

TU

RB

OB

LOW

ER

MO

TOR

(Y)

GA

SO

UT

(BU

)(O

)

BA

SE

(PFA

) (PFA

)

O.M

.

F.M

.

(Y)

(Y)

PR

ES

SU

RE

CO

NT

RO

LLE

R

R.M

.

DIS

TRIB

--U

TOR

LAS

ER

GA

SS

ET

TIN

GP

RE

SS

UR

E0.

15M

Pa

Fig. 7.3 (b) Laser gas flow diagram (C1500B)


164

2--F

--PT

3/8″

GA

SO

UT

(BU

)(O

)

BA

SE

(PFA

) (PFA

)

R.M

.O

.M.

F.M

.

(Y)

(Y)

PR

ES

SU

RE

CO

NT

RO

LLE

R

DIS

TRIB

--U

TOR

EX

HA

US

TP

UM

P

INLE

TH

/E

TU

RB

OB

LOW

ER

MO

TOR

(Y)

OU

TLE

TH

/E

(Y)

(BU

)

GA

SIN

GA

SO

UT

EX

HA

US

TP

UM

PU

NIT

(PFA

)

AIR

DIS

TR

IBU

TE

R

EX

HA

US

TC

ON

TR

OLL

ER

LAS

ER

MO

DE

LC

2000

BLA

SE

RO

SC

ILLA

TOR

A04

B--0

807-

-B30

1

LAS

ER

GA

SS

ET

TIN

GP

RE

SS

UR

E0.

15M

Pa

Fig. 7.3 (c) Laser gas flow diagram (C2000B)


165

LAS

ER

MO

DE

LC

2000

CLA

SE

RO

SC

ILLA

TOR

A04

B--0

813-

-B30

1

EX

HA

US

TC

ON

TR

OLL

ER

(PFA

)

EX

HA

US

TP

UM

PU

NIT E

XH

AU

ST

PU

MP

OU

TLE

TH

/E

2--F

--PT

3/8″

GA

SO

UT

R.M

.

O.M

.

PR

ES

SU

RE

CO

NT

RO

LLE

R

DIS

TRIB

--U

TOR

INLE

TH

/E

TU

RB

OB

LOW

ER

MO

TOR

GA

SIN

GA

SO

UT

AIR

DIS

TR

IBU

TE

R

LAS

ER

GA

SS

ET

TIN

GP

RE

SS

UR

E0.

15M

Pa

BA

SE

(PFA

)

(Y)

(Y)

(O)

F.M

.

(BU

)

(Y)

(BU

)

(PFA

)

(Y)

Fig. 7.3 (d) Laser gas flow diagram (C2000C)


166

″G

AS

OU

T

(BU

)(O

)

BA

SE

(PFA

)

(PFA

)

R.M

.

O.M

.

F.M

.

(Y)

(Y) P

RE

SS

UR

EC

ON

TR

OLL

ER

DIS

TRIB

--U

TOR

INLE

TH

/E

MOTOR

(Y)

OU

TLE

TH

/E

(Y)

(BU

)

GA

SIN

GA

SO

UT

EX

HA

US

TP

UM

PU

NIT

(PFA

)A

IR

DIS

TR

IBU

TE

R

EX

HA

US

TC

ON

TR

OLL

ER

(Y)

(Y)

RE

SO

NA

TOR

F.M

.

F--P

T3/

8″

F--P

T3/

8

(PFA

)

INLE

TH

/E

MOTOR

(PFA

)

AU

X

LAS

ER

MO

DE

LC

3000

CLA

SE

RO

SC

ILLA

TOR

A04

B--0

811-

-B30

1

LAS

ER

GA

SS

ET

TIN

GP

RE

SS

UR

E0.

15M

Pa

EX

HA

US

TP

UM

P

Fig. 7.3 (e) Laser gas flow diagram (C3000C)


167

LAS

ER

MO

DE

LC

3000

DLA

SE

RO

SC

ILLA

TOR

A04

B--0

814-

-B30

1

EX

HA

US

TC

ON

TR

OLL

ER

(PFA

)

EX

HA

US

TP

UM

PU

NIT

OU

TLE

TH

/E

2--F

--PT

3/8″

GA

SO

UT

R.M

.

O.M

.

PR

ES

SU

RE

CO

NT

RO

LLE

R

DIS

TRIB

--U

TOR

INLE

TH

/E

TU

RB

OB

LOW

ER

GA

SIN

GA

SO

UT

AIR

DIS

TRIB

UTE

R

LAS

ER

GA

SS

ET

TIN

GP

RE

SS

UR

E0.

15M

Pa

BA

SE

(PFA

)

(Y)

(Y)

F.M

.

(BU

)

(BU

)

(PFA

)

(Y)

(Y)

RE

SO

NA

TOR

(Y)

F.M

.

(O)

(Y)

MOTOR

EX

HA

US

TP

UM

P

Fig. 7.3 (f) Laser gas flow diagram (C3000D)


168

LAS

ER

MO

DE

LC

4000

ALA

SE

RO

SC

ILLA

TOR

A04

B--0

815-

-B30

1

EX

HA

US

TC

ON

TR

OLL

ER

(PFA

)

EX

HA

US

TP

UM

PU

NIT

OU

TLE

TH

/E

2--F

--PT

3/8″

GA

SO

UT

R.M

.

O.M

.

PR

ES

SU

RE

CO

NT

RO

LLE

R

DIS

TRIB

--U

TOR

INLE

TH

/E

TU

RB

OB

LOW

ER

GA

SIN

GA

SO

UT

AIR

DIS

TR

IBU

TE

R

LAS

ER

GA

SS

ET

TIN

GP

RE

SS

UR

E0.

15M

Pa

BA

SE

(PFA

)

(Y)

(Y)

F.M

.

(BU

)

(BU

)

(PFA

)

MOTOR

(Y)

(Y)

(O)

(Y)

(Y)

(Y)

EX

HA

US

TP

UM

P

Fig. 7.3 (g) Laser gas flow diagram (C4000A)


169

2--F

--PT

3/8″

(BU

)

(O)

BA

SE

(PFA

)

(PFA

)

R.M

.

O.M

.F.

M.

(Y)

(Y)

PR

ES

SU

RE

CO

NT

RO

LLE

R

EX

HA

US

TP

UM

P

INLE

TH

/E

TU

RB

OB

LOW

ER

(Y)

OU

TLE

TH

/E

(Y)

(BU

)

EX

HA

US

TP

UM

PU

NIT

(PFA

)

AIR

EX

HA

US

TC

ON

TR

OLL

ER

(Y)

(Y)

F.M

.

RE

SO

NA

TOR

(PFA

)

(PFA

)(P

FA)

(PFA

)

(PFA

)(P

FA)

INLE

TH

/EIN

LET

H/E

INLE

TH

/E

TU

RB

OB

LOW

ER

OU

TLE

TH

/E

FIL

TE

R(A

97L-

-020

1--0

210)

FAN

UC

LAS

ER

--MO

DE

LC

6000

BLA

SE

RO

SC

ILLA

TOR

A04

B--0

812-

-B30

1

LAS

ER

GA

SS

ET

TIN

GP

RE

SS

UR

E0.

15M

Pa

Fig. 7.3 (h) Laser gas flow diagram (C6000B)

B--70125EN/038. UNIT CONFIGURATION

170

8 UNIT CONFIGURATION

B--70125EN/03 8. UNIT CONFIGURATION

171

The input unit consists of a power magnetics cabinet, interface PCB, andstabilized power supply. The power magnetics cabinet is configured asdescribed below:

(1)C1500B (Japanese market, UL versions)

CB1 CB2 MS1 To laser power supply No.1

CB3 MS2 To laser power supply No.2

CB3 MS3 To high--frequency inverter

CB4 MS4 To exhaust pump

NBK1 To fan, control power supply






NBK1

CB6 MS5

CB7 MS6

To high--frequency inverter

To exhaust pump

To fan, control power supply

(3)C2000C (Japanese market, UL versions)

QF2 KM1To laser powersupply No.1

QF3 KM2To laser powersupply No.2

QF4 KM3To high--frequencyinverter

QF5 KM4 To fan unit

QF6 To exhaust pumpand IF PCB

QF7 XT45 To serge absorberZ110, Z111

KM5

QF1

8.1INPUT UNIT


172

(4)C3000C (Japanese market, UL versions)





NBK1 To fan, control power supply

CB6 To auxiliary section

Auxiliarysection

CB7 MS5 To high--frequency inverter

CB8 MS6 To exhaust pump

From oscillatorsection

(5)C3000D (Japanese market, UL versions)

QF1 QF2 KM1 To laser power supplyNo.1

QF3 KM2 To laser power supplyNo.2


QF5 KM4 To high--frequencyinverter

QF7

QF6 KM5

To IF PCB

To exhaust pump andIF PCB (fan motor)



173

(6)C4000A (Japanese market, UL version)

QF1 QF2 KM1 To laser power supplyNo.1



QF6 KM5 To high--frequencyinverter

QF8

QF7 KM6

To IF PCB

To exhaust pump andIF PCB (fan motor)




To laser power supply No.1




To FAN

To exhaust pump





To high--frequency inverter No.1

To high--frequency inverter No.2

To IF unit

To surge absorber Z110, Z111XT45


174

Fig. 8.1 (a) Input unit (C1500B, the interior)


175

Fig. 8.1 (b) Input unit (C1500B, UL)


176

Fig. 8.1 (c) Input unit (C2000B, the interior)


177

Fig. 8.1 (d) Input unit (C2000B, UL)


178

Fig. 8.1 (e) Input unit (C2000C, Japan)


179

Fig. 8.1 (f) Input unit (C2000C, UL)


180

Fig. 8.1 (g) Input unit (C3000C, oscillator, the interior, UL)


181

Fig. 8.1 (h) Input unit (C3000C, auxiliary sections, the interior, UL)


182

Fig. 8.1 (i) Input unit (C3000D, Japanese)


183

Fig. 8.1 (j) Input unit (C3000D, UL)


184

Fig. 8.1 (k) Input unit (C4000A, Japanese)


185

Fig. 8.1 (l) Input unit (C4000A, UL)


186

Fig. 8.1 (m) Input unit--1 (C6000B, Japan, UL)


187

STABILIZED PSOINPUT UNITCONTROL PCB

Fig. 8.1 (n) Input unit--2 (C6000B, JAPAN)


188

STABILIZED PSUINPUT UNITCONTROL PCB

Fig. 8.1 (o) Input unit--2 (C6000B, UL)


189

IF UNIT

Fig. 8.1 (p) Input unit--3 (C6000B, JAPAN, UL)


190

Relay PCB B is used to group signals sent from the shutter section andto output the grouped signals to the interface PCB. CN59 is an outputterminal for connecting a measuring instrument used in alignment.Fig. 8.2 shows the layout of relay PCB B.

CN50B

CN52B CN53B CN54B CN55B

TEST INPUT

CN59 CN56

Output terminal for the instruments usedin alignment procedure.

Fig. 8.2 Relay PCB B

8.2RELAY PCB B


191

Fig. 8.3 (a) shows installation, and Fig. 8.3 (b) shows piping of thepressure controller respectively. The functions of each of the componentsshown in the figures are outlined below:

(1)Pressure control valveThis valve is provided to maintain a specified laser gas pressure in theoscillator. The valve is consistently and precisely opened or closedaccording to commands issued from the CNC, controlling the flowrate of the fresh laser gas supply.

(2)Gas supply valveThis magnetic contactor opens to supply fresh laser gas to theoscillator while the machine is operating. While the machine isstopped, the valve closes to prevent air from entering the oscillator.

(3)Purge valveWhen the machine stops, this magnetic contactor opens to supply lasergas to the oscillator. Gas is supplied until the pressure in the oscillatormatches atmospheric pressure. When the atmospheric pressure sensor5 detects that the pressure in the oscillator has reached atmosphericpressure, the valve closes.

(4)Gas pressure sensorThis sensor continuously monitors the pressure of the laser gassupplied from an external source (such as a gas cylinder). When theremaining amount of laser gas drops to a preset level or when thesupply pressure falls to 0.1 MPa or less, the sensor outputs an alarmsignal.

(5)Atmospheric pressure sensorThis sensor monitors whether the pressure in the oscillator has reachedatmospheric pressure.

(6)Pressure sensorThis sensor continuously monitors the pressure in the oscillator, fromthe heat exchanger on the inlet side of the Roots blower. The sensoroutputs a signal to the CNC. The sensor is of the capacitancemanometer type, which is notable for drifting little with changes intemperature and for exhibiting very little deterioration with time.

(7)FilterThe filter prevents impurities from entering the oscillator.

(8)Gas distributorThe distributor distributes the laser gas, supplied from an externalsource (such as a gas cylinder), to the output mirror, rear mirror, andfolding mirror.

(9)External pipe exhaust valveThis valve allows laser gas to escape from the laser gas pipe betweenthe oscillator and gas cylinder. If any leakage is detected, or if theoscillator has not been operated for a long time, the valve can preventgas whose composition has changed, or gas containing impurities,from entering the oscillator.

8.3PRESSURECONTROLLER


192

Fig. 8.3 (a) Pressure controller layout


193

Fig. 8.3 (b) Block diagram of gas pressure controller

B--70125EN/039. SETTING AND ADJUSTMENT

194

9 SETTING AND ADJUSTMENT

B--70125EN/03 9. SETTING AND ADJUSTMENT

195

This unit is precisely adjusted at the factory and should not require anyfurther adjustment. If the power supply unit, matching box, or dischargetube is replaced, however, the unit should be set and adjusted as describedbelow.When an FET module or diode in the laser power supply is replaced, noadjustment is necessary.

(1)Check the cable, water fitting, and discharge unit connections.(2)Check that the discharge tube electrode is not damaged.(3)Rewrite the settings of the parameters below to the values after the

column (:).

NOTEThe parameters parenthesized below are used for the 0--L.

1) C1500B (without a trigger electrode)Output compensation disable

Bit 4 of parameter No. 15000, parameter No. 15201 (bit 4 ofparameter No. 200, parameter No. 231, No. 232): 0

Laser power feedback disableParameter No. 15208 (parameter No. 233): 0

Intra--tube pressure setting at oscillation timeParameter No.15242, No. 15243 (parameter No. 236): +30

Maximum output command settingParameter No. 15207, No. 15210, No. 15212: Value ofparameter No. 15307

2) C1500B (with a trigger electrode)Output compensation disable



Maximum output command settingParameter No. 15207, No. 15210, No. 15212: Value ofparameter No. 15306(Parameter No. 3986, No. 238): Value of parameter No. 292

Bias command valueParameter No. 15223 (parameter No. 250): 2850

3) C2000BOutput compensation disable


Laser power feedback disableParameter No. 15208 (parameter No. 233): 0Intra--tube pressure setting at oscillation timeParameter No.15242, No. 15243 (parameter No. 236): +30


9.1LASER POWERSUPPLY UNIT

9.1.1Checking beforeAdjustment, andSetting


196

Enhanced pulse setting disableParameter No. 15213: 32000

4) C2000COutput compensation disable






5) C3000COutput compensation disable



Intra--tube pressure setting at oscillation timeParameter No.15242, No. 15243: +30


6) C3000D, C4000AOutput compensation disable







197

7) C6000BOutput compensation disable




(4)For power supplies 2, 3, 6, and 7 on the C6000B (A14B--0082--B205or B208), change the setting of the setting pin S2 from B202 to B201,and rotate VR11 one turn counterclockwise. (See Note 5.)

(1)Start the oscillator, and wait until the gas pressure is stabilized in thebase discharge state. (Wait about 3 minutes. See DGN 905 [16--L] orDGN 860 [0--L].) Then, check that all discharge tubes arecontinuously discharging. If a discharge tube stops discharge, turnVR11 of the power supply corresponding to the discharge tubeclockwise until the discharge tube discharges. Adjust VR11 so that alldischarge tubes are continuously discharging in the state immediatelybefore blinking starts.

(2)Record the value of RFI or the values of RFI and DCV. (See Note 1.)(a). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

(3)Turn VR11 of power supply 1 gradually counterclockwise to decreasethe value of RFI by 4 mA or the value of DCV by 0.7 V. Perform thisoperation until the discharge tube stops discharge. When the dischargetube stops discharge, turn VR11 of power supply 1 graduallyclockwise to increase the value of RFI by 4 mA or the value of DCVby 0.7 V. Adjust VR11 of power supply 2 in the same way as for powersupply 1.

(1)Start the oscillator, and wait until the gas pressure is stabilized in thebase discharge state. (Wait about 3 minutes. See DGN 905 [16--L,16i--L] or DGN 860 [0--L].) Check that all discharge tubes arecontinuously discharging. If a discharge tube stops discharge, turnVR11 of the power supply corresponding to the discharge tubeclockwise until the discharge tube discharges.

(2)Adjust VR11 of power supply 1 so that the discharge tube iscontinuously discharging in the state immediately before blinkingstarts. Adjust VR11 of each of power supplies 2, 3, and 4 so that eachdischarge tube blinks.


9.1.2Base DischargeAdjustment

9.1.2.1C1500B (without atrigger electrode)(step 1)

9.1.2.2C2000B (step 1)


198

(1)Start the oscillator, and wait 10 minutes in the LRDY state. Then setHV ON and wait until the gas pressure is stabilized in the basedischarge state. (Wait about 3 minutes. See DGN 905 [16--L, 16i--L]or DGN 860 [0--L].) Check that all discharge tubes are continuouslydischarging. If a discharge tube stops discharge, turn VR11 of thepower supply corresponding to the discharge tube clockwise until thedischarge tube discharges.

(2)Turn VR11 of power supply 1 counterclockwise so that the dischargetube is discharging in the state immediately before stopping discharge.Adjust power supply 2 for discharge tube 3, adjust power supply 3 fordischarge tube 4, adjust power supply 4 for discharge tubes 5 and 6 inthe same way as for power supply 1.


(1)Check that discharge continues for 30 minutes after adjustment. If adischarge tube stops discharge (C2000B, C3000C) or blinks (C1500B(without a trigger electrode)), turn VR11 of the power supplygradually clockwise to increase the value of RFI by 4 mA or the valueof DCV by 0.7 V. Set HV OFF then set HV ON to check that dischargecontinues 30 minutes. Repeat this until checking that dischargecontinues 30 minutes.

(2)Set HV OFF, return the value of parameter No. 15242 and No. 15243[16--L, 16i--L] or parameter No. 236 [0--L] (intra--tube pressure settingat oscillation time) to the original value (Note 2), and wait until the gaspressure is stabilized in the base discharge state.

(3)Adjust VR11 to increase the value of Iplus RFI or the value of VplusDCV. (See Note 4.)

(4)Record the value of RFI or the values of RFI and DCV. (See Note 1.)(A). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

(1)Start the oscillator, and wait 10 minutes in the LRDY state. Then setHV ON and wait until the gas pressure is stabilized in the basedischarge state. (Wait about 3 minutes. See DGN 905 [16--L, 16i--L]or DGN 860 [0--L].)

(2)Adjust VR11 of power supply 1 so that discharge tubes 1 and 2discharge up to the point indicated by the arrow shown below. Adjustpower supply 2 for discharge tube 3, power supply 3 for discharge tube4, power supply 4 for discharge tubes 5 and 6, power supply 5 fordischarge tubes 7 and 8, power supply 6 for discharge tube 9, powersupply 7 for discharge tube 10, and power supply 8 for discharge tubes11 and 12 in the same way as for power supply 1.

9.1.2.3C3000C (step 1)

9.1.2.4C2000B, C3000C (step 2)

9.1.2.5C6000B


199

Power supplies 1, 2, 3,7, 8, and 9

Power supplies 4, 5, 6,10, 11, and 12

Fig. 9.1.2.5 Base discharge adjustment points (indicated by arrows)

(3)Check that the laser output Pa becomes 100 W or less after 3 minutes.If the laser output exceeds 100 W, make the adjustment below.(a) Check that the discharge areas of all discharge tubes are the same.(b)Set HV OFF, and decrease the setting of parameter No. 15233 (bias

command value) by 5. (See Note 2.)(c) Repeat (a) and (b) until Pa becomes 100 W or less 3 minutes after

the base discharge state is set.(4)Record the value of RFI or the values of RFI and DCV. (See Note 1.)

(A). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .(5)Set HV OFF, increase parameter No. 15242 and No. 15243 [16--L,

16i--L] or parameter No. 236 [0--L] or parameter No. 236 [0--L](intra--tube pressure setting at oscillation time) by 30 (Note 2), andwait until the gas pressure is stabilized in the base discharge state.

(6)Check that discharge continues 30 minutes. If a discharge tube stopsdischarge, turn VR11 of the power supply gradually clockwise toincrease the value of RFI by 4 mA or the value of DCV by 0.7 V. SetHV OFF then set HV ON to check that discharge continues 30minutes. Repeat this until checking that discharge continues 30minutes.

(7)Set HV OFF, return parameter No. 15242 and No. 15243 [16--L,16i--L] or parameter No. 236 [0--L] (intra--tube pressure setting atoscillation time) to the original value (Note 2), and wait until the gaspressure is stabilized in the base discharge state.

(8)Record the value of RFI or the values of RFI and DCV. (See Note 1.)(A). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .


200

(1)Start the oscillator, and wait until the gas pressure is stabilized in thebase discharge state. (Wait about 3 minutes. See DGN 905 [16--L,16i--L] or DGN 860 [0--L].) Then, check that all discharge tubes arecontinuously discharging. If a discharge tube stops discharge, turnVR11 of the power supply corresponding to the discharge tubeclockwise until the discharge tube discharges. Adjust VR11 so that alldischarge tubes are continuously discharging in the state immediatelybefore blinking starts.

(2)Record the value of RFI. (a). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

(3)Decrease the value of RFI by 250 mA by turning VR11counterclockwise. Set HV OFF, set parameter No. 15223 [16--L,16i--L] or parameter No. 250 [0--L] (bias command value) to 2790(Note 2), and check that trigger electrode discharge continues for 5minutes in the base discharge state. If a discharge tube stops discharge,turn VR11 of the power supply gradually clockwise to increase thevalue of RFI by 4 mA or the value of DCV by 0.7 V. Set HV OFF thenset HV ON to check that discharge continues 5 minutes. Repeat thisuntil checking that discharge continues 5 minutes.

(4)Set HV OFF, set parameter No. 15223 [16--L, 16i--L] or parameter No.250 [0--L] (bias command value) to 2850 (Note 2), and wait until thegas pressure is stabilized in the base discharge state.

(5)Record the value of RFI. (A). . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

(1)Start the oscillator, and wait until the gas pressure is stabilized in thebase discharge state. (Wait about 3 minutes. See DGN 905 [16--L,16i--L] or DGN 860 [0--L].) Then, check that all discharge tubes arecontinuously discharging. If a discharge tube stops discharge, turnVR11 of the power supply corresponding to the discharge tubeclockwise until the discharge tube discharges. Adjust VR11 so that alldischarge tubes are continuously discharging in the state immediatelybefore blinking starts.

(2)Record the value of RFI. (a). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

(3)Only for power supply 1, increase RFI by +70 mA from the valuerecorded in (2). Set HV OFF, set parameter No. 15223 [16--L, 16i--L]or parameter No. 250 [0--L] (bias command value) to 2790 (Note 2),and check that the trigger electrode continues discharge for 5 minutesin the base discharge state. If a discharge tube stops discharge, turnVR11 of the power supply corresponding to the discharge tubegradually clockwise to increase the value of RFI by 4 mA or the valueof DCV by 0.7 V. Set HV OFF then set HV ON to check that dischargecontinues 5 minutes. Repeat this until checking that dischargecontinues 5 minutes.

(4)Set HV OFF, set parameter No. 15223 [16--L, 16i--L] or parameter No.250 [0--L] (bias command value) to 2850 (Note 2), and wait until thegas pressure is stabilized in the base discharge state.

(5)Record the value of RFI. (A). . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

9.1.2.6C1500B (with a triggerelectrode), C2000C,C3000D

9.1.2.7C4000A


201

Fig. 9.1.2.7 (a) Laser power supply unit layout (6 kW PSU)

Fig. 9.1.2.7 (b) Adjust trimmer position (6 kW PSU)


202

Fig. 9.1.2.7 (c) Adjust trimmer position (9 kW PSU)

(1)Specify the output of a half of the rated output value, and turn on thebeam. While checking that the power supply output (Note 4) does notexceed the maximum power supply output (Note 4) and that the valueof DCV (Note 4) does not exceed 220 V with A14B--0082--B201,B202, B204, and B205, and 230 V with A14B--0082--B206, B207,B208, B209, and B210, increase the output gradually to the maximumcommand value (Note 4). If the maximum value is about to beexceeded, turn VR13 counterclockwise to prevent the maximum valuefrom being exceeded.

(2)After output of the maximum command value, wait 3 minutes. Then,adjust VR13 to set the power supply output to the maximum powersupply output (Note 4).

(3)Record the value of RFI or the values of RFI and DCV (See Note 1.)(B). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

(1)Three minutes after the beam is turned off, adjust RFI or DCV to thevalue of (A) with VR11.

(2)Three minutes after the maximum command value is output, adjustRFI or DCV to the value of (B) with VR13.

(3)Repeat (1) and (2) until no adjustment is required.(4)Turn off the beam, and wait 3 minutes. Then, check that the laser

output Pa does not exceed the maximum base output (Note 4), and thatheat--sensitive paper does not react in the test of Note 3. If a problemis observed, make another power supply adjustment.

(5)After output of the maximum command value, wait 3 minutes. Then,check that the value of RFV does not exceed the maximum RFV (Note4).

9.1.3Maximum OutputAdjustment

9.1.4Fine Adjustment ofVR11 and VR13


203

(1)With the C2000B and C2000C, specify a pulse test command in thetable of parameter No. 15207 and No. 15210.

(2)Output the pulse test command specified in the table by 5 Hz and 5%for a pulse test time, and check that no alarm is issued. If a problemis observed, make another power supply adjustment.

Return the modified parameter values to the original values.

NOTE1 RFI and DCV value recording and adjustment

The laser power supply involves feedback at RFI. So, if the laser power feedback function isdisabled, RFI is stable when the continuous output command is used. Basically, measure RFIfor power supply adjustment.If the NC monitor is away from the oscillator, and you have no assistant, make an adjustmentby using the value of DCV instead of RFI. However, use the value of RFI for final confirmation.

RFI= (Voltage between RFI--N and RFI--O of CN18)/2 [A]RFV= (Voltage between RFV--N and RFV--P of CN18)×1000 [V]DCI= (Voltage between DCI--N and DCI--P of CN17)×5 [A]DCV= (Voltage between DCV--N and DCV--P of CN17)×30 [V]Power supply output=DCI×DCV [W]

2 Alarm processing after modification of intra--tube pressure at oscillation time and biascommand settingAfter modification of parameter No. 15242 and No. 15243 [16--L, 16i--L] or parameter No. 236[0--L] (intra--tube pressure at oscillation time) and parameter No. 15223 [16--L, 16i--L] orparameter No. 250 [0--L] (bias command), take the actions below.(a) If an alarm indicating a parameter value modification is displayed, reset the alarm, and set

HV ON.(b) If an alarm requesting that the NC power be turned off is displayed, and purge operation

is started, turn off the power to the NC upon completion of purge operation, and restart.3 Checking of electric shutter operation

(a) Insert heat--sensitive paper into the laser optical path after passing through the shuttermirror, and output the continuous rated command value for 3 minutes. Then, execute thefollowing program (specifying OW for 60 seconds):

G32 P1 Q1;G24 S0 P500 Q0 R60.0G32 P0;M02;%

(b) Check that the heat--sensitive paper has not reacted.

9.1.5Pulse Output Test

9.1.6Completion ofAdjustment


204

NOTE4 Settings for each oscillator

5 Setting pins

C1500B C2000B C3000C C3000C C6000B C6000Bwithout a trigger (No.1, 4 PSU) (No.2, 3 PSU) (No. 1, 4, 5, 8 No. 2, 3, 6, 7

electrode PSU) PSU)

S2 setting B201 B202 B201 B202 B201 B203

S5 setting SHORT SHORT SHORT SHORT USUAL SHORT

Iplus +12mA +10mA +20mA

Vplus +2.0V +0.7V +3.5V +1.5V

Maximum command PRM15307 PRM15304 PRM15307 PRM15307 PRM15307 PRM15307value

Maximum power 6200� 50W 4400� 50W 6600� 50W 4400� 50W 8000� 50W 4000� 50Wsupply outputDCI×DCV=

Maximum base =0W =0W Note 3 Note 3 <100W <100Woutput

Maximum RFV <4600V <4800V <4600V <4600V <4600V <4600V

Pulse test command Maximum PRM15305 Maximum Maximum Maximum Maximumcommand value command value command value command value command value

Pulse test time >10 min >10 min >30 min >30 min >30 min >30 min

C1500B C2000C C3000D C4000Awith a trigger

electrode

S2 setting B201 B201 B201 B201

S5 setting USUAL USUAL USUAL USUAL

Electric shutter 250mA 180mA 250mAadjustment

Maximum command PRM15306 PRM15306 PRM15307 PRM15307value

Maximum power 5400� 50W 7800� 50W 8000� 50W 8300� 50Wsupply outputDCI×DCV=

Maximum RFV <4600V <4800V <4600V <4600V

Pulse test command Maximum Maximum Maximum Maximumcommand value command value command value command value

Pulse test time >30 min >30 min >30 min >30 min

VR13 VR11 LED1LED2

Usual

Short

S2

CP73 CP51CN18

CN17

B201

B202

S5

Setting pin

Power supply alarm LED

Location of setting pin S2 Details of S5 Details of S2

Locations of setting pins S5 and S2, and monitor connectors CN17 and CN18


205

These PCBs are precisely adjusted at the factory and should not requireany further adjustment. If the turbo blower or turbo PCB is replaced,however, VR1 to VR4 should be adjusted and set oil level censor asdescribed below.Turbo PCB: A16B--1600--0670:C1500B, C2000B, C2000C, C3000C,

C3000D, C4000AA16B--1600--0770:C6000B

(1)Prior to activating the oscillator, check the level of the turbo bloweroil through the oil window. If the level is higher than the specifiedlevel, drain the excess oil. If the level is lower, add oil.Specified level: 3/4 level, between Hi and Lo marks (See the figure.)

Specified levelHi

3/4

Low

Oil window

(2)Turn trimmers VR1 to VR4 fully counterclockwise.(3)Start the oscillator. Execute internal discharge at the rated output for

15 minutes. Then, set the unit to the base discharge state.(4)Measure voltage VSO across VL1 and 0V (GND). This voltage

corresponds to the oil level sensor output.(5)While monitoring voltage VC across VA1 and 0V (GND), turn

trimmer VR1 clockwise (VC increases). This voltage corresponds tothe alarm setting voltage.

(6)Check that the following alarm occurs when VC exceeds VSOmeasured in step (4) above.

Alarm No.4106 (FANUC Series 16--LA, 16i--LA),620 (FANUC Series 0--L)

Message: BLOWER OIL SHORTAGE(7) In the alarm state, adjust trimmer VR1 so that VC (voltage across VA1

and 0V) matches the following value:VC = VSO × 0.778

(8)Press the reset key of the NC. Check that the alarm is reset.(9)Adjust VR2 to VR4 in the same way, regarding VL1 and VA1 in the

above description as VL2 to VL4 and VA2 to VA4, respectively.

NOTEVR1 and VR4 are three--turn trimmers.

9.2TURBO PCB


206

Adjustment position C1500B : VR1 onlyC2000B : VR1 onlyC2000C : VR1 onlyC3000C : VR1 VR2 onlyC3000D : VR1 onlyC4000A : VR1 onlyC6000B : VR1 to VR4

Fig. 9.2 (a) Detail of turbo PCB (A16B--1600--0670)


207

VL4 TerminalVL3 Terminal

VL2 Terminal

VL1 Terminal

VA4 Terminal

VA3 Terminal

Upper

Base mountingface

VA1 Terminal

VA2 Terminal

VR1

VR2

VR3

VR4

0V (GND)

Fig. 9.2 (b) Turbo PCB (A16B--1600--0770) details


208

The inverter is precisely adjusted at the factory and should not require anyfurther adjustment. If it is replaced, however, the high--frequency invertershould be set and adjusted as described below.

The type of the high--frequency inverter varies with the oscillator model.The C1500B, C2000B, C2000C, C3000D, and C4000A all use theA90L--0001--0382/C or A90L--0001--0464 inverter while the C3000Cand C6000B use the A90L--0001--0465. The following subsectionsdescribe how to adjust the three types:

The FMD and L terminals of the inverter output pulse signals having thesame frequency as the output frequency. So, the output frequency can bemeasured by connecting a frequency counter to these terminals.

(1)Remove the cable connector of the turbo blower. Then, remove thefront panel of the inverter.

(2)Set test mode.Switch the rightmost switch of DIP switch DS2 from the DR (drive)position to the TE (test) position. This enables test operation of theinverter.

(3)Set the maximum frequency.Adjust the following four positions to set the maximum frequency to1000 Hz.

F. CN : A (1)F. RNG : 4F6 of DS1 : ONFH of DS1 : ON

(4)Set the acceleration/deceleration period.Set the leftmost switch of DS1 to the T10 (OFF) position.

(5)Set the torque boost.The torque boost is not used. Turn the T.BST trimmer fullycounterclockwise.

(6)Perform fine adjustment of the maximum frequency.1) Connect a frequency counter to the FMD and L terminals of the

inverter.2) Apply the three--phase 200--V power to the inverter. Check that the

POWER LED lights.3) Connect the SP1 jumper on the turbo PCB to RUN. This enables

operation of the turbo blower alone.4) Press SW1 (RUN switch) of the turbo PCB to start the turbo

blower. Once the frequency reading stabilizes, turn the 0.REFtrimmer so that the frequency reading is between 998 and 1002 Hz(� 2 Hz).

9.3HIGH--FREQUENCYINVERTER

9.3.1Adjusting the Inverter(A90L--0001--0382/C:Model Name:HFC--VAH2)


209

(7)Adjust the acceleration/deceleration period.Adjust the period from when the turbo blower starts rotating until therotation stabilizes, and the period from when deceleration starts untilthe turbo blower stops.1) While the inverter output frequency is 0 Hz, press SW1 (RUN

switch) on the turbo PCB. At the same time, start measuring thetime.

2) Turn the ACCEL trimmer so that the frequency set in step (6) canbe obtained 70 to 75 seconds later.Turning the trimmer clockwise increases the period while turningthe trimmer counterclockwise reduces the period.

1) While the inverter output frequency is stable, release SW1 (RUNswitch) on the turbo PCB. At the same time, start measuring thetime.

2) Turn the DECEL trimmer so that the inverter output frequency isreduced to 0 Hz 70 to 75 seconds later. Turning the trimmerclockwise increases the period while turning the trimmercounterclockwise reduces the period.

(8)Cancel test mode.1) Return the SP1 jumper on the turbo PCB from RUN to RESET.2) Switch the rightmost switch of DIP switch DS2 on the inverter

from TE to DR. This cancels inverter test mode.Once the adjustment has been completed, turn the power off, removethe frequency counter, and replace the front cover of the inverter.

Setting the accelerationperiod

Setting the decelerationperiod


210

Selection of T1 or T10 of the DS1 switch determines the factor ofthe acceleration or deceleration time. When T10 is selected, thetime is multiplied by 10. TX1: 3 to 15 sec TX10: 15 to 150 sec.

Set the regulators correctlywith reference to the rele-vant items.

F6 and FH of the DS1 switch and the F.CN andF.RNG switches are selector switches for selectingvarious maximum frequencies. Set the switchescorrectly with reference to Table 6.

Printed circuit board

DS2

DS1

F.CN

F.RNG

ABCDEF

F.OS F60 F.FIN

ACCEL DECEL T.BST F.STP D.BRK

STB1 STB2 V.GAIN V.LMT

ON

OFF

T10

O.REF

R S T E W P P1 NU V

8

ON DB

DR

OF

F

Fig. 9.3.1 High--frequency inverter adjustment unit (HFC--VAH2)


211

(1)ConnectionThe following cables are connected to the inverter:

R. S. T: Three--phase power supplyU. V. W: Turbo blower power supplyH, O, L: Frequency command1: Reset signal2: Parameter soft lock signal8: Inversion signal11: Frequency reach signalAL0, AL1: Alarm contact (ON: Normal)PLC--P24: JumperCM1, CM2: Common

(2)Setting and Checking the parametersAnother H type remote operator (HOP--OJ) and Copy unit (HRW--OJ)are required to set and to check the parameters.Operate the inverter while the oscillator is turned on. While a cableis connected to inverter terminal 2, parameters and other invertersettings cannot be changed. To change a parameter, therefore, firstdisconnect the cable from terminal block 2.Be sure to connect the cable of terminal block 2 after changing theparameter.

Be sure to turn the power supply off when connecting the connector.

Digital operator

High performance remote operator (HOP)High performance copy unit (HRW)

Remote operator (DOP)Copy unit (DRW)

(1) Insert the connector straight into the remote operator and inverter unitprinted--circuit board.

(2)Turn on the power supply.(3)Make sure that the liquid crystal display of the remote operator is lit.

When the power supply of the inverter is turned on, FS000.0� � � � � �

of the monitoring mode will be displayed. If, however, any of thefollowing is displayed when the inverter is turned off, they will bedisplayed when power is turned on again.

9.3.2Adjusting the Inverter(A90L--0001--0465:Model Name: JH300)

Remote operator

D Connecting the remoteoperator


212

D Frequency setting, multi--speed setting or other frequencydisplays, motor rotational speed display, frequency conversiondisplay, or output current display.

NOTEWhen conflicting data is set, a warning WARN.... will bedisplayed. For 6 seconds thereafter, do not perform the keyoperation, reset operation, running operation, power--OFFoperation. (Otherwise, a communication error may occur inthe operator.)

[LCD Screen]S Used to display monitor/

function mode messages in theformat of 16 characters × 1line or 17 characters × 4 lines.

[STOR (Store) key]S Used to store data in the

inverter memory.

[FWRUN (Forward Run),REVRUN (Reverse Run), andSTOP/RESET keys]S Used to send operation

commands to the inverter.

[MON (Monitor) and FCTN(Function) keys]S Used to select the monitor/

function mode screen.

[Read Lock Selection key (MON(Monitor) + FCTN (Function))]S Used to select READ VALID/

INVALID.

[Ten--Key]S Used to change parameters.

[Confirmation key (1 + 2 + 3)]S Used to reference to the

function screen while theinverter is operating. This keycannot be used to update setvalues.

[READ and COPY keys](valid only for HRW).READS Used to read data from the

inverter.NOTE : If a set value of the

inverter is updated afterthe data is read from theinverter, the set value isonly updated in theinverter. To copy theupdated data to anotherinverter, press theREAD key again, thenpress the COPY key.

COPYS Used to transfer data read from

the inverter by pressing theREAD key to another inverter.

[[Y] and [B] keys]S Used to move the cursor.

NOTE : These keys are used tomove the cursor andscroll screens. Toupdate set values, usethe ten--key.

[RETN (RETURN) key]S Used to return to the before

setting screen.

[SEL (SELECT) key]S Used to go to the next screen of

the setting item on which thecursor exists. If the next screendoes not exists, this key entry isignored.

High performanceremote operator

D Kyes and LCD Screen


213

The operator has two modes; MONITOR mode and FUNCTION mode.In the MONITOR mode, the monitor screen to display operation statusappears. In the function mode, the function screen appears. The functionscreen has a hierarchical structure used to change operation status.

" 1 Command "

2 Initial "

3 Function "

4 Option "

Function 4 OR FR

¡ © ¢ £ ¤

} Fixed field

¡ Operation status/screen hierarchyUsed to display the operation status in the monitor mode and the screenhierarchy in the function mode.

Operationmode Status Display

Monitorscreen

Operationstatus

ST TR FR RR AJ RT UV

At trippingtime

At stoptime

At forwardrun

At reverserun

fAlignment

0Start

Undervoltage

StopDB

During standby after immediate return

Functionscreen

Screenhierarchy

1st layer 2nd layer 3rd layer 4th layer

© Display titleDisplays the current mode name or hierarchical layer name.

¢ Total itemsDisplays the current mode name or the total number of items in theselected hierarchical layer.

£ Operation commandDisplays the current operation command status.

Operation mode Display

Monitor/function mode

Remote operator

OR

Terminal

OT

Optional PCB 1

O1

Optional PCB 2

O2

D MONITOR/FUNCTIONmode

D Fixed field (Top row onscreen)


214

¤ Frequency commandDisplays the current frequency command status.

Operation mode Display

Monitor/function mode

Remote operator

FR

Terminal

FT

Optional PCB 1

F1

Optional PCB 2

F2

" FS 0.00 Hz

0.00Hz

AC1 30.00s

OC1 30.00s

Monitor 29 OR FR

¡

©

ST

“MONITOR” key

Screen scrolling range

¡ Item selection cursorUsed to update set values including the frequency. Move the cursorto the target item using the [Y] and [B] keys, then update the set value

using the ten--key. Finally, press the key.

© Set value changeable markThis mark indicates a set value that can be updated, which isunderlined within the scrolling range. No other values can be updated.

D Monitor screen display


215

" 1 Command "

2 Initial "

3 Function "

4 Option "

Monitor 29 OR FR

¡

ST

“FUNCTION” key

Function mode menuscreen(Function mode 1st layer)

¡ Next layer markThis mark indicates that there is one more layer to display. To go tothe next layer, move the cursor to the item with this mark using the [Y]

and [B] keys, then press the key. To return to the befor layer,

just press the key.

The “Initial” go to the next layer.

1 Command "

" 2 Initial "

3 Function "

4 Option "

Function 4 OR FR

" 1 TCNT 0:CNT

[0--1]

2 DEBG

Initial 4 OR FR

D Function screen display

Examples


216

(3)Parameter settings

The following table lists the parameters for which the values have beenchanged from the initial values. If the inverter has been shipped alonefrom FANUC, the user must change the parameters as listed below.To change the parameters, an H--type remote operator (HOP--0J) orcopy unit (HPW--0J) is required.

JH300--8LF2 (A90L--0001--0464): C1500B, C2000B, C2000C,C3000D, C4000A

JH300--16LF2 (A90L--0001--0465): C3000C, C6000B

Mode Name Hierarchy Display Beforechange

Afterchange Remarks

Monitor Frequency setting FS 0.00 1000

Monitor Acceleration time AC1 60.0 70.0

Monitor Deceleration time DC1 60.0 70.0

Monitor Number of motor poles RPM 1:4P 0:2P

Function Operation command method 1-- 2:F/R 1:REM 0:TRM

Function Rotational direction setting 2-- 3:DOPE 0:FWD 1:REV

Function Output voltage gain adjustment 3--1--1-- 8:V--Gain 100% 95%

Function Motor rating selection 3--1--2-- 1:K 5:3.7 KW 6:5.5 KW For JH300--8LF2

8:11 KW For JH300--16LF2

Function Selection of number of motorpoles 3--1--2-- 2:P 1.4P 0:2P

Function Setting of wait time for repower--on 3--5--4-- 2:WAIT 1.0S 0.0S Only for

JH300--8LF2

Function Selection of restart from momen-tary interruption 3:POWR 0:ALM 2:RST

Function Soft lock selection 3--5--5-- 2:SLOCK 1:MD1 0:MD0

Function STOP key selection during TMoperation 3--5--5-- 3:STOP 1:ON 0:OFF

Function Operation direction selection 3--5--5-- 4:F/R 2:FRE 1:REV

Function Input terminal setting 1 3--6--3-- 1:I--1 18:RS (18:RS) Reset

Function Input terminal setting 2 3--6--3-- 2:I--2 11:FRS 15:SFT Soft lock

Function Input terminal setting 3 3--6--3-- 3:I--3 6:DB (6:DB)

Function Input terminal setting 4 3--6--3-- 4:I--4 9:CH1 11:FRS

Function Input terminal setting 5 3--6--3-- 5:I--5 3:CF3 9:CH1

Function Input terminal setting 6 3--6--3-- 6:I--6 2:CF2 (2:CF2)

Function Input terminal setting 7 3--6--3-- 7:I--7 1:CF1 (1:CF1)

Function Input terminal setting 8 3--6--3-- 8:I--8 0:REV (0:REV) Reverse operation

Function R0--T0 option selection 4--2-- 1:R0--T0 0:OFF 1:ON Only forJH300--8LF2


217

220 � 1

25041

51

�

440

Monitor (LED display)This display shows frequen-cy, motor current, motor revo-lution speed, and trip history

POWER LampPower lamp ofcontrol circuit

Up key, Down keyThese keys are usedto change data andincrease or decreasethe frequency.

STOP/RESET keyThis key is used for stopping themotor or resetting errors.(When either operator or terminalis selected, this key works. If theextension function is used, thisfunction is void.)

RUN keyThis key is used forstarting.(When terminal runis selected, this keydoes not work.)

FUNC (Function) keyThis key is used forchanging commands.When pressing key af-ter setting data and pa-rameter, they are auto-matically memorized.

Fig. 9.3.2 High--frequency inverter adjustment unit (JH300)


218

This unit is precisely adjusted at the factory and should not require anyfurther adjustment. If the pressure controller is replaced or requiresre--adjustment, however, it should be set and adjusted as described below:

(1)Turn the CNC on. Never turn on the gas pressure control start signal(RUN) at this stage.

(2)Set the secondary pressure of the regulator of the external laser gassupply (gas cylinder, for example) to 0.1 MPa.

(3)The gas supply pressure sensor is indicated as PSW1 on the pressurecontroller. This sensor can be adjusted by a trimmer. Turn theadjustment trimmer with a cross--headed precision screwdriver untilthe red LED next to the trimmer lights. Then, turn the trimmer througha further 30 degrees.

(4)To check the setting, reduce the secondary pressure of the regulator onthe laser gas supply unit (gas cylinder, for example) to 0.05 MPa. Thered LED of the gas supply pressure sensor (PSW1) should go off.

(5)This completes the setting.

While setting the sensor, the pressure controller is open to the atmosphere.To prevent dust from entering the controller, pay particular attention to theimmediate surroundings.

(1)Turn off the CNC. Then, turn off the power supply and open maincircuit breaker on the back panel of the laser oscillator.

(2)Remove the orange gas tube by loosening the hexagon cap nutssecuring the tube. This causes the atmospheric pressure sensor todetect the atmospheric pressure.

(3)Close the main circuit breaker and turn on the power supply, then turnon the CNC. A voltage of 24 V is supplied to the sensor. Never turnon the gas pressure control start signal (RUN).

(4)The atmospheric pressure sensor is indicated as PSW2 on the front ofthe pressure controller. Turn the adjustment trimmer with across--headed precision screwdriver until the red LED next to thetrimmer just lights.

(5)Replace the gas tube and secure the nuts.(6)Turn on the gas pressure control start signal (RUN). Check that the

red LED next to the sensor goes off after the exhaust pump starts.(7)This completes the setting.

9.4PRESSURECONTROLLER

9.4.1Setting the Gas SupplyPressure Sensor

9.4.2Setting theAtmospheric PressureSensor


219

PRESSURESENSOR

ATMOSPHERICPRESSURE SWITCH

LASER GAS PRESSURESWITCH

Fig. 9.4.2 Pressure controller sensor layout


220

This unit is precisely adjusted at the factory and should not require anyfurther adjustment. If the exhaust adjustment valve is accidentallytouched or if the exhaust controller is replaced, however, the gas flowshould be checked and the exhaust flow adjustment valve adjusted asdescribed below.

Note that indiscriminate adjustment may increase the laser gasconsumption or may adversely affect the gas pressure control.

(1)Set parameters 15025 to 15028 [201 to 203] to 0. Then, start theoscillator.

(2)Set the laser oscillator to the base discharge state (LSTR). Nodischarge occurs in the discharge tube with the above parametersettings.

(3)The gas flow to the laser oscillator is factory--adjusted in this state.Check the flow rate with a laser gas flowmeter, mounted between theexternal laser gas supply (gas cylinder, for example) and oscillator.

(4)While observing the flow rate on the gas flowmeter, adjust the exhaustflow adjustment valve to obtain a predetermined flow rate.

(5)Stop the oscillator.(6)Return parameters 15025 to 15028 [201 to 203] to their original

values.(7)This completes the adjustment.D Predetermined flow rate

Oscillator model Flow rate

C1500B, C2000B, C2000C,C3000D, C4000A

10 �/h

C3000C 20 �/h

C6000B 40 �/h

9.5ADJUSTING THEEXHAUSTCONTROLLER(ADJUSTING THELASER GASCONSUMPTION)


221

This coefficient is precisely adjusted at the factory and should not requireany further adjustment. If the rear mirror of the laser oscillator or thepower sensor unit is replaced, however, the power input compensationcoefficient should be checked and set as described below.

The coefficient is set by measuring the laser beam. Always apply thesafety precautions related to laser beams, as explained in Chapter 2.

(1)Change the following parameter settings:Parameter 15208 (16--L, 16i--L) or 233 (0--L) �

Predetermined value (Enable output feedback)Parameter 15209 (16--L, 16i--L) or 234 (0--L) �

Predetermined value (Enable output feedback)(2)Set the laser oscillator to the base discharge state (LSTR). Check

whether the oscillator alignment is optimized, by following theprocedure described in Chapter 11. If not, repeat the adjustment.

(3)Execute an internal discharge at the rated output for one minute orlonger. Run the following program in automatic mode. Measure laseroutput value Pr with a laser power meter (Model P2000Cmanufactured by Optical Engineer, Ltd., for example). It isrecommended that measurement be performed just behind the beampanel. While measuring Pr, record laser output value Pa, detected bythe internal sensor and displayed on the laser setting screen.

G32 P1 Q1 ;G24 S1500 Q100 R20000 ;G32 P0 ; (Radiation of 20 seconds duration)M30

Specify S2000 for the C2000B/C2000C or S3000 for theC3000C/C3000D.

To change the duration of the radiation applied to the power probe,calculate the duration based on the probe display output.

(4) If power input compensation coefficient K in parameter 15215 [259]is correct, Pa should match Pr. If there is a difference between Pa andPr and if the difference is � 5% of Pr or greater, set the value obtainedfrom the following expression as power input compensationcoefficient K [Parameter 15215 (16--L) or 259 (0--L)].

K (new value) =Pr’ (calculated from probe output)/Pa × K (old value)

(5)Repeat step (2) above. Check that Pa equals Pr.(6)This completes the setting.

9.6SETTING THEPOWER INPUTCOMPENSATIONCOEFFICIENT


222

This sensor is precisely adjusted at the factory and should not require anyfurther adjustment. If the water distribution unit or water flow sensor isreplaced, however, this sensor should be set and adjusted as describedbelow:

(1)Loosen the four bolts securing the flow switch (brown or greencomponent) so that it can be moved freely. Note, however, that if thebolts are loosened excessively, the bakelite plate will float, causing anerror when the bolts are subsequently retightened.

(2) Mount a jig using the sensor cover fixing bolts.

CAUTIONWhen mounting the jig, fit an adjustment screw into the flowswitch lower groove (without a reed switch). Note that if thescrew is fitted into the upper groove, the reed switch willbreak.

(3) Disconnect the flow switch cable from the connector. Connect amultimeter to the cable (Faston terminal).

(4) Adjust the flow rate the cooling water entering the oscillator to apredetermined alarm flow rate. To perform this adjustment, use aflowmeter having an appropriate capacity and accuracy.

Model Predetermined alarm flow rate Rated flow rate

C1500B 35 �/min 50 �/min

C2000B 52 �/min 75 �/min

C3000C 85 �/min 120 �/min

(5) Turn the jig adjustment screw while observing the multimeterreading. Lower the flow switch until it trips on.

(6) While observing the multimeter reading, raise the flow switch fromthe position obtained in step (5). Check the position at which theswitch trips off.

(7) Return the switch to the on position, then again move the switch backtowards the point where it trips off. With the switch positioned to apoint immediately before it trips off, gradually turn the jigadjustment screw (fine adjustment) to find the precise position atwhich the switch trips off.

(8) After adjusting the switch to the point where it trips off, temporarilyfasten the flow switch.

(9) While observing the multimeter reading, increase the flow rate of thewater supply until the flow switch trips on.

9.7WATER FLOWSENSOR

9.7.1Adjusting the WaterFlow Sensor forC1500B, C2000B, andC3000C


223

(10) Gradually reduce the flow rate of the water supply. Check the rateat which the switch trips off. Then, gradually increase the flow rate.If the alarm flow rate is within the following range, the sensor isnormal.If the alarm range is exceeded, repeat step (8) and subsequent steps.

Model Alarm range

C1500B 33 to 37 �/min

C2000B 49 to 55 �/min

C3000BC3000C

81 to 89 �/min

(11) Reduce the flow rate to turn off the flow switch. Gradually open thevalve, checking the flow rate at which the switch trips on. If the flowrate is within the following range, the sensor is normal.If the range is exceeded, the system flow rate may fluctuate. Repeatthe check.

Model Sensor ON range

C1500B 37 to 46 �/min

C2000B 55 to 69 �/min

C3000BC3000C

89 to 110 �/min

C6000A A 89 to 115 �/min

B 45 to 55 �/min

C 45 to 55 �/min

C6000B A 98 to 102 �/min

B 98 to 102 �/min

(12) Fully tighten the flow switch. Test its operation again.(13) Remove the jig and replace the sensor cover. Be careful not to

damage the cable with the edge of the cover. Connect the cable to theconnector.


224

(1)Adjust the flow rate of cooling water flowing into the oscillator to analarm setting flow rate. Use a flowmeter with a proper and accuraterated flow rate.

Model Alarm setting flow rate Rated flow rate

C2000C 50 �/min 75 �/min

C3000D 79 �/min 120 �/min

C4000A 120 �/min 160 �/min

C6000B 95 �/min 120 �/min

(2)Check that the LED (green) of the flow sensor is turned on.(3)Adjust the knob of the flow sensor to a minimum level where the LED

(red) is turned on.(4)Open the valve gradually for adjustment to an alarm--off setting flow

rate, and check that the LED (red) is turned on.

Model Alarm setting flow rate

C2000C 55 �/min

C3000D 55 �/min

C4000A 125 �/min

C6000B 100 �/min

(5)Close the valve for adjustment to an alarm setting flow rate, and checkthat the LED (red) of the flow sensor is turned on.

9.7.2Adjusting the FlowSensor of the C2000C,C3000D, C4000A, andC6000B


225

If the laser oscillator is not used for a long time (one week or more) or ifthe laser gas circulation system is opened to the atmosphere (when amirror is cleaned or when a component of the gas system is replaced, forexample), aging must be performed before the start of operation.Specifically, the discharge tube and circulating gas should be warmed byinternal discharge, and adsorbent impurities should be expelled byevaporating them. When the laser gas circulating system has been openedto the atmosphere, perform a leak check before starting aging. The agingprocedure is described below:

(1)Change the following parameter settings:(Be sure to record the settings. The settings may be different from thedata sheet values.)Parameter 15000, bit 3 (16--L, 16i--L) or parameter 200, bit 3 (0--L):

0 � 1 (Enable internal discharge in manual mode)Parameter 15000, bit 4 (16--L, 16i--L) or parameter 200, bit 4 (0--L):

1 � 0 (Disable three--minute compensation)Parameter 15002, bit 0 (16--L, 16i--L) or parameter 3979, bit 5 (0--L):

0 � 1(Enable internal discharge during automatic operation)

Parameter 15003, bit 2 (16--L, 16i--L) or parameter 3979, bit 2 (0--L):1 � 0 (A vacuum is not created after run off)

Parameter 15201 (16--L, 16i--L) or parameter 232 (0--L):Predetermined value � 0

Parameter 15208 (16--L, 16i--L) or parameter 233 (0--L):Predetermined value � 0 (Stop output feedback)

Parameter 15209 (16--L, 16i--L) or parameter 234 (0--L):Predetermined value � 0 (Stop output feedback)

Parameters 15242 and 15243 (16--L, 16i--L) or parameter 236 (0--L):Predetermined value � (Predetermined value) -- 100

(2)Turn on the RUN ON key to start the oscillator.

(3)Turn on the HV ON switch to start discharge.

(4)Ensure the discharge has not stopped, then execute internal dischargeunder the following conditions. The internal discharge can be startedby a program (automatic operation) or by pressing a switch (manualoperation).

1000 W Duty 30% (C1500B: 15 minutes)1500 W Duty 50% (C2000B, C2000C: 15 minutes)2000 W Duty 50% (C3000C, C3000D: 15 minutes)2500 W Duty 50% (C4000A)4000 W Duty 30% (C6000B: 15 to 30 minutes)


D Automatic operation

1) Create this program (when C1500B):G32 P1 Q1 ;G24 S1000 Q100 R900. ; S specifies an output (W), QG32 P0 ; specifies a duty cycle (%),

and R specifies a time(seconds).

2) Lock the shutter. Then, run the program.

9.8DISCHARGE AGING


226

D Manual operationThis method can be used if the machine operator’s panel has aswitch for starting internal discharge manually.1) Enter the desired output and duty cycle on the setting screen.2) Press the internal discharge switch to start internal discharge.

(5)When a time determined above has elapsed, turn off the RUN ON keyto stop the oscillator. (With the new software, discharge can bestopped with HV OFF.)

(6)Return the discharge gas pressure to the normal setting, and performinternal discharge with the setting below, then perform purging.

Parameter No. 15242, No. 15243 (16--L, 16i--L), parameter No.236 (0--L)Setting--100 � Setting1500 W Duty 50% (C1500B: 15 minutes)2000 W Duty 50% (C2000B, C2000C: 15 minutes)3000 W Duty 50% (C3000C, C3000D: 15 minutes)4000 W Duty 30% (C4000A: 15 minutes)4000 W Duty 30% (C6000B: 15 minutes)

The frequency is 100 Hz for all of the above.(7)Repeat step (5) until the output is � 2% or more than the specified

value and the discharge voltage is up to 200 V plus thefactory--adjusted data.

(8)After the completion of aging, restore the parameters to their originalsettings.

B--70125EN/03 10. REPLACEMENT PROCEDURES

227

10 REPLACEMENT PROCEDURES

B--70125EN/0310. REPLACEMENT PROCEDURES

228

Replace the stabilized power supply as follows:

(1)Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the main circuit breaker for the laseroscillator.

(2)Disconnect all cables from the stabilized power supply.(3)Remove the four screws or edge supports, then remove the stabilized

power supply.(4)Mount a new stabilized power supply by reversing steps (2) and (3).

Connect the cables, noting the alignment marks. Ensure that noterminals are loose.


(2)Disconnect all cables from the control PCB.(3)Remove the four screws, then remove the input unit control PCB.(4)Mount a new PCB by reversing steps (2) and (3). Connect the cables,

noting the alignment marks. Ensure that no terminals are loose.

Replace the FS0--L interface PCB on the oscillator side as follows:


(2)Disconnect all cables from the interface PCB.(3)Remove the four screws or edge supports, then remove the interface

PCB.(4)Mount a new PCB by reversing steps (2) and (3). Connect the cables,

noting the alignment marks. Ensure that no terminals are loose.

10.1INPUT UNIT

10.1.1Replacing theStabilized PowerSupply

10.1.2Replacing the InputUnit Control PCB

10.1.3Replacing the FS0--LInterface PCB(A16B--1110--0223) onthe Oscillator Side


229

Replace the FS16--L interface PCBs on the oscillator side as follows:

When IF PCB (A02B--0128--C202)(1)Replacing the upper PCB (A16B--1110--0260)

1) Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the main circuit breaker for the laseroscillator.

2) Disconnect the cables from connectors CN11 to CN18, CN23 toCN25, JD1B (or COP1B), CN34, MA1, MB1, MP1, and CP87, aswell as those connected to the terminal block.

3) Remove the PCB from the ten PCB holders, by tilting the holderclaws outwards.

4) Mount a new PCB by reversing steps 2) and 3). Connect the cables,noting the alignment marks. Ensure that no terminals are loose.

(2)Replacing the lower PCB (A16B--2100--0080)1) Turn off the power to the CNC, then turn off the power to the laser

oscillator. In addition, open the main circuit breaker for the laseroscillator.

2) Disconnect the cables from the interface PCB, with the exceptionof those connected to MA1, MB1, MP1, and CP87.

3) Remove the screws then remove the entire PCB unit (two PCBs:A16B--1110--0260 and A16B--2100--0080).

4) Remove the upper PCB (A16B--1110--0260) from the ten PCBholders, by tilting the holder claws outwards. (Also disconnect thecables from MA1, MB1, MP1, and CP87.)

5) Mount the upper PCB (A16B--1110--0260), removed in theprevious step, on a new lower PCB (A16B--2100--0080). Then,connect the cables to MA1, MB1, MP1, and CP87.

6) Mount the PCB unit by reversing steps 2) and 3). Connect thecables, noting their alignment marks. Ensure that no terminals areloose.

When IF PCB (A16B--2100--0140, A16B--2100--0141)For replacement, use the same procedure as described in Section 10.1.3.

10.1.4Replacing the FS16--L,FS16i--L InterfacePCBs on the OscillatorSide


230

Fig. 10.1.4 (a) Removing the IF PCB unit (FS16--L: A02B--0128--C202)

Fig. 10.1.4 (b) Removing the PCB from the PCB holder


231

Figs. 10.2 (a) to (l) show the laser power supply. Replace the laser powersupply as described below.

(1)Replacing the power supply

1) Turn off the power to the laser oscillator, then drain the coolingwater.

2) Remove the following water joints, power cables, and signalcables:See Fig. 10.2 (a). S Water joint A

S Water joint BS TL17 or XT21S TL18 or XT22S CP51S CP73S Ground cable

3) Remove the bolts securing the power supply, then remove thepower supply. If it proves difficult to pull out the power supply,slightly shift it to the right or left, then retry.

4) Once the power supply has been replaced, tighten the bolts, thenconnect the water joints, power cables, and signal cables correctly.Mount the cover for TL18 or XT22. The new power supply mustbe adjusted before it can be used.

(2)Checking for and replacing a damaged high--speed diode or FETmodule PCB

1) Preparation

1. Turn off the power to the CNC, then turn off the power to thelaser oscillator. In addition, open the main circuit breaker forthe laser oscillator.

2. Remove the top cover of the laser power supply from inside theoscillator. (See Fig. 10.2 (b) and (h). To remove the top cover,remove the screw indicated by A.)

3. Once the top cover has been removed in case of 6 kW powersupply, eight FET module PCBs (A in the figure 10.2 (c), (d))and two diode units (B and C) appear. In case of 9 kW powersupply, two FET module PCBs (in the figure 10.2 (i), (j)) andtwo diode units appear.

2) Checking for and replacing a damaged high--speed diode (See Fig.10.2 (e), (f), (i) and (k).)

1. To check whether a diode is damaged, measure the resistancebetween the anode and cathode of each of the twelve diodes inthe diode unit, by using a multimeter. A resistance of less than10� indicates that the diode is damaged. (a normal diode willhave a resistance of about 3 M� to 10 M� .)

CAUTIONWhen measuring the diode resistance, apply the positiveprobe of the multimeter to the cathode of the diode, andapply the negative probe to the anode.

10.2REPLACING THELASER POWERSUPPLY


232

2. Remove the damaged diode by removing the screws and nutsat the both ends.In case of 9 kW power supply at first replace the cooling heatsink and diode plate 1 and 2, then replace the diode block A andB to remove diode.

CAUTIONWhen removing a diode, if it proves necessary to removethe heat sink to which the diode is fixed, be careful not todamage the insulating sheet under the heat sink.

3. Mount a new diode, then fix the diode using the screws and nuts.In case of 9 kW power supply mount the diode block withtemporarilly fastening of replaced diode and fix after decidingthe direction of mounting diode.

CAUTIONTwo types of diodes, UES806 and UES806R (alternativemodel: UES805R) are used (see Fig. 10.2 (e), (f) and (j)).When replacing a diode, it must be replaced with one of thesame type.

3) Checking for and replacing a damaged FET module PCB (See Fig.10.2 (g) (i).)1. To check whether an FET module PCB is damaged, measure the

resistance between check pins D and S or screws A and B (6 kWpower supply) shown in the figure. When the 9--kW powersupply is being used, measure the resistance at both of thesepoints for each of FET (1) and FET (2). These are separatecircuits. A resistance of less than 10 k� indicates that the FETmodule PCB is damaged. (A normal FET module PCB willhave a resistance of about 30 k� to 10 M� .)

2. Remove the damaged FET module PCB as follows: Removethe six screws shown in the figure (A, B, and C), disconnect thegreen cables from connectors CN72 and CN73, then lift thePCB upwards.When the 9--kW power supply is being used, disconnect thecables and remove the screws, then remove the step--uptransformer PCB, before removing the damaged FET PCB.

CAUTIONDo not disconnect the green cables from the lower PCB(A20B--1006--0060).


233

3. Mount a new FET module PCB, fix it using the six screws, thenconnect the cables.When the 9--kW power supply is being used, connect the CN51or CN52 cable to the new FET PCB securely, then temporarilytighten all the screws so that the FET PCB is free to move. Asshown in Fig. 10.2 (m), first tighten screw a. Then, graduallytighten screws b and c, in turn, taking two or three steps totighten each screw. Connect the CN71 cable securely, mountthe step--up transformer PCB, then reconnect all the othercables.

CAUTION1 The new PCB should be oriented such that its printed

pattern is aligned with those of the other PCBs (no problemwill result, however, if the orientation is inverted.)

2 Ensure that the green cables are connected as before.

4) Checking1. Recheck that all removed screws and disconnected cables are

securely tightened or connected.2. Mount the top cover of the power supply.

CAUTIONIf any screws are loose, or if any cable is disconnected,turning on the power may damage the power supply.

3. Turn on the oscillator, then adjust the power supply as describedin Section 9.1.


234

Fig. 10.2 (a) Laser power supply unit layout (front side)

Fig. 10.2 (b) Laser power supply unit layout (upside)


235

Fig. 10.2 (c) Laser power unit layout (inner side)

Fig. 10.2 (d) Laser power unit layout (inner part details)


236

Fig. 10.2 (e) Diode unit layout (Fig. 10.2 (d) B part details)

Fig. 10.2 (f) Diode unit layout (Fig. 10.2 (d) C part details)


237

Fig. 10.2 (g) FET module PCB layout (Fig. 10.2 (d) A part details)

Cover mountingscrew Cover for XT22

Fig. 10.2 (h) Layser PSU layout (9 kW)


238

Diod unit 2

Diod unit 1

Step up transformer PCB

Fig. 10.2 (i) Laser PSU internal details (9 kW)


239

F type

R type

Cathod

Cathod

Anode

Anode

Fig. 10.2 (j) Mounting position of diod (9 kW)


240

Diod plate 1

Cooling heat sink

Diod plate 2

Diod block A

Diod block B

Diod block face of A

Diod block face of B

Fiber reinforced plastic

Fiber reinforced plastic

Fig. 10.2 (k) Replacing diod (9 kW)

Fig. 10.2 (l) FET PCB heat sink fixing (9 kW)


241

Replace the matching box as follows:


(2)Disconnect the power and signal cables from the matching box.(3)Remove the resonator fan unit, then remove the discharge tube feeder.(4)Remove the two rods (a long one and a short one) from the matching

box, using an 8--mm spanner.(5)Remove the two securing screws, then remove the matching box by

slightly pulling it toward you. If it proves difficult to remove thematching box, slightly shift it to the right or left, then retry.

(6)Mount a new matching box by reversing steps (5) to (2).

CAUTIONThe screws used to fix the power cables are made of brass.These screws may be damaged if tightened excessively.Steel screws cannot be used because they generate heat.

10.3REPLACING THEMATCHING BOX


242

When the turbo blower is replaced, the gas circulating system is open tothe atmosphere for a long time. Pay particular attention to the immediatesurroundings to ensure that dust and other contaminants do not enter thegas circulating system.Clean the flanges of the turbo blower and the pipe flanges before replacingthe turbo blower.

CAUTIONDo not incline the turbo blower while transporting andinstalling it. Doing so will cause lubricating oil to enter thepump, contaminating the laser gas circulating system andoptical mirrors. Usually, all oil is drained from a turbo blowerprior to shipping. Even so, however, the turbo blower mustnot be inclined because trace amounts of oil will inevitablyremain inside the unit.If a turbo blower is inclined, it can no longer be used.

(1)Replacement procedure

Be careful not to damage the O--rings or their mating surfaceson the pipes. A damaged O--ring or mating surface will resultin gas leakage.

1) Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the main circuit breaker for the laseroscillator.

2) Disconnect the cooling water tubes and power cables from theturbo blower, then drain the oil from the turbo blower.

3) Disconnect the two pipes from the turbo blower outlet and one pipefrom turbo blower inlet. Cover the removed gas pipes and turboblower to prevent dust from entering.

4) Remove the hexagon headed bolt which secures the dampingrubber and blower base, then remove the turbo blower by slidingit horizontally. Note that the turbo blower weighs about 30 kg.

5) Remove the two metal brackets, used to secure the turbo blower,from the removed turbo blower, then mount them on the new turboblower.

6) Mount the new turbo blower on the oscillator, then fix the gaspipes. Be careful not to damage the O--rings and ensure that noO--ring is missing.

10.4REPLACING THETURBO BLOWER


243

7) Tighten the nut of the damping rubber. Carefully follow theprocedure below to prevent the damping rubber from being twistedand damaged.

Tightening procedure (C1500B, C2000B, C2000C, C3000C,C6000B)1. Position the antivibration rubber such that its parting line is

clearly visible (to enable any twisting to be observed).2. Temporarily tighten the bolt.3. Tighten the nut to a torque of 12 N�m.4. Loosen the bolt, and eliminate the twist caused in step 3.5. Hold the lower part of the rubber using water pliers, to

prevent the rubber from twisting, then tighten the bolt to atorque of 12 N�m.

6. Check whether the rubber is twisted, by observing theparting line (the displacement between the top and bottomof the line must not exceed 2 mm).

8) Connect the cooling water tubes and the power and ground cables.9) Supply a prescribed amount of turbo oil to the turbo--blower.

10) Check that there are no cooling water leaks, turn on the oscillator,then check for gas leakage.

11) Set an oil level alarm for the turbo--blower as described in Section9.2, “Setting the Turbo PCB.”


244

Fig. 10.4 Turbo blower layout


245

Replace the turbo PCB as follows:


(2)Disconnect all cables from the turbo PCB.(3)Remove the four screws or four edge supports, then remove the PCB.(4)Mount a new PCB by reversing steps (2) and (3). Connect the cables,

noting the alignment marks.(5)Once the turbo PCB has been replaced, the turbo blower oil level alarm

must be set. Set the alarm as explained in Section 9.2.

Replace intermediate PCB B as follows:


(2)Disconnect all cables from intermediate PCB B.(3)Remove the four screws or four edge supports, then remove the PCB.(4)Mount a new PCB by reversing steps (2) and (3). Connect the cables,

noting the alignment marks.

10.5REPLACING THETURBO PCB

10.6REPLACINGINTERMEDIATE PCBB


246

When the exhaust pump is replaced, the gas circulating system is open tothe atmosphere for a long time. Pay particular attention to the immediatesurroundings to ensure that dust and other contaminants do not enter thegas circulating system.

Replace the exhaust pump as follows (refer to the accompanying figure).


(2)Drain the cooling water from the oscillator, then disconnect the twowater tubes.

(3)Disconnect the tubes from the pump outlet and inlet. Then, disconnectthe heavy--duty power cables from the terminal block on the side of thepump.

(4)Remove the bolts securing the exhaust pump unit, then remove thepump unit. Remove the bolts securing the pump to the mounting plate,then remove the pump.

(5)Position the new exhaust pump on the mounting plate, then secure thepump unit by reversing steps (2) to (4). The new pump may not befitted with gas and water joints. In such a case, remove the joints fromthe old pump, wind sealing tape around each joint, then fit them to thenew pump.Ensure that the terminal block is wired correctly. Incorrect wiring maycause the pump rotation to be reversed, causing the pump oil flow tobe reversed. Connect the cables, noting the alignment marks.

(6)Pumps are shipped without lubricating oil. Fill the pump withMatsumura Oil SA--H. Operating the pump without lubricating oilwill cause the thermal switch to trip, and will ultimately damage thepump.

(7)Close the main circuit breaker, turn on the power to the oscillator, thenturn on the power to the CNC. Then, perform a laser oscillator leakagetest and check the operation of the exhaust pump.When the power is first turned on, check that gas is output from the gasoutlet of the oscillator. The pump starts after gas has been dischargedfrom the external pipes for a few seconds. Gas being drawn into theoscillator, or abnormal noise, indicates that the pump rotation isreversed. In such a case, check the wiring of the terminal block.

10.7REPLACING THEEXHAUST PUMP


247

Fig. 10.7 Exhaust pump unit layout


248

When the pressure control unit is replaced, the gas circulating system isopen to the atmosphere for a long time. Pay particular attention to theimmediate surroundings to ensure that dust and other contaminants do notenter the gas circulating system.Replace the pressure control unit as follows:


(2)Close the valve of the external laser gas supply (for example, a gascylinder).

(3)Disconnect all removable tubes and cables. Pressurized laser gas mayremain in the control unit. Discharge this gas by loosening the nut onthe joint.

(4)Remove the unit securing screws, then remove the unit.(5)Mount a new unit by reversing steps (3) and (4).(6)The new pressure control unit must be adjusted. Adjust the unit as

explained in Chapter 9.(7)Turn on the oscillator, then perform a gas leakage check.

Fig. 10.8 Pressure controller layout

10.8REPLACING THEPRESSURECONTROL UNIT


249

When the exhaust control unit is replaced, the gas circulating system isopen to the atmosphere for a long time. Pay particular attention to theimmediate surroundings to ensure that dust and other contaminants do notenter the gas circulating system.Replace the exhaust control unit as follows:


(2)Disconnect the tubes and cables from the control unit.(3)Remove the unit securing screws, then remove the unit.(4)Mount a new unit by reversing steps (2) and (3). Ensure that all tubes

are connected and tightened, and that the cables are connectedcorrectly.

(5)Perform all settings as described in Section 9.5, then check theoperation. If a laser gas flowmeter is not provided, adjust the exhaustvalve of the new exhaust control unit such that the amount by whichit opens (the angle and number of turns by which the valve is openrelative to the fully closed state) is the same as that of the exhaust valveof the removed control unit.

10.9REPLACING THEEXHAUST CONTROLUNIT


250

Fig. 10.9 (a) Exhaust controller layout (C1500B)


251

Fig. 10.9 (b) Exhaust controller layout (C3000C)


252

Fig. 10.9 (c) Exhaust controller layout(C2000B, C2000C, C3000D, C4000A)


253

Fig. 10.9 (d) Exhaust controller layout (C6000B)


254

When a discharge tube is replaced, the gas circulating system is open tothe atmosphere for a long time. Pay particular attention to the immediatesurroundings to ensure that dust and other contaminants do not enter thegas circulating system.

(1) Turn off the power to the CNC, then turn off the power to the laseroscillator. In addition, open the main circuit breaker for the laseroscillator.

(2) Remove the panel from the maintenance side and top panel of theoscillator.

(3) Remove the resonator fan unit.(4) Remove the copper plate (feeder) which connects the two matching

box rods to the discharge tube, by loosening the wing screw.(5) Remove all the screws from the flange which secures the discharge

tube (six screws are used for each discharge tube).(6) Move the discharge tube toward the output, rear, and folding mirrors,

while rotating it. If the O--ring is too tight to allow the discharge tubeto be moved, lubricate the O--ring with alcohol. Before attemptingto move the discharge tube, however, move the flange to the centerof the tube. Then, hold the supported end of the discharge tube,leaving a gap of 5 mm, then push the discharge tube while rotatingit. At this time, be careful not to damage the end of the discharge tube.If the discharge tube is damaged, glass chips may enter the gascirculating system.

(7) Move the O--ring to the center of the discharge tube, then remove thedischarge tube. If the O--ring is at the end of the discharge tube, theend of discharge tube may be damaged while it is being removed.

(8) Remove the copper plate (feeder) from the removed discharge tube,then mount it on a new discharge tube.

(9) Mount the flange on the new discharge tube, then mount the O--ring.Before mounting the O--ring, wipe it with alcohol. A Teflon O--ringis hard, and must be expanded slightly (by hand) before beingmounted.The surface of the O--ring may exhibit cracks or some white deposits,indicating deterioration. Such an O--ring may cause gas leakage orgenerate dust. Replace it with a new one.

(10) Insert the new discharge tube into the discharge tube holder byreversing step (6), then perform assembly by reversing steps (4) and(5).

(11) Mount the resonator fan unit, then connect the fan cables to theterminal block.

(12) Turn on the oscillator, then perform a gas leakage check.(13) If no gas leakage is detected, perform discharge aging. If the

discharge area of the new discharge tube greatly differs from thoseof the other discharge tubes, adjust the power supply.

10.10REPLACING ADISCHARGE TUBE


255

The laser oscillator contains many fan units, which are classified into thefollowing two types:(1)Fan unit

Consists of several fans and a terminal block.(2)Fan--assisted radiator

Consists of a water--cooled radiator, several fans, and a terminal block.The replacement of each type of fan unit is described below.

Replace a fan unit as follows:(1)Turn off the power to the CNC, then turn off the power to the laser


(2)Remove the panel from the oscillator.(3)Disconnect the Faston terminal and ground cable from the terminal

block.(4)Remove the fan unit from the oscillator.(5)Mount a new fan unit, then secure it by tightening the screws. Before

tightening the screws, however, check that the damping rubber isfitted. Otherwise, the screws cannot be tightened.

(6)Connect the Faston terminal and ground cable.(7)Close the main circuit breaker, turn on the power to the oscillator, then

turn on the power to the CNC. Then, check that the fans rotate.

Replace a fan--assisted radiator as follows:(1) Turn off the power to the CNC, then turn off the power to the laser


(2) Cooling water is passed through the radiator of the fan unit. Drainthe water from the radiator, then disconnect the water pipes. To drainthe cooling water, open the drain valve of the water distribution unit.

(3) Remove the panel from the oscillator.(4) Disconnect the Faston terminal and ground cable from the terminal

block.(5) Remove the fan unit from the oscillator. At this time, the radiator

may still contain water. Therefore, plug the radiator joints with ragto prevent water being spilled on the other units.

(6) Mount a new fan unit, then secure it by tightening the screws. Beforetightening the screws, however, check that the damping rubber ismounted. Otherwise, the screws cannot be tightened.

(7) Connect the water tubes.(8) Connect the Faston terminal and ground cable.(9) Operate the chiller unit manually to circulate the cooling water.

Check that no water leaks from the joints that were disconnectedduring the replacement. After checking, restore the original chillersetting.

(10) Close the main circuit breaker, turn on the power to the oscillator,then turn on the power to the CNC. Then, check that the fans rotate.

10.11REPLACING A FANUNIT

10.11.1Replacing a Fan Unit

10.11.2Replacing aFan--assisted Radiator


256

The power sensor is a very delicate component. Be careful not to touchor apply force to the black, light--sensitive surface. Also, ensure that nodust enters the sensor.

When removing the power sensor unit from the rear mirror or mountingthe unit on the rear mirror, be careful not to touch the alignmentmicrometer on the rear mirror.Replace the power sensor unit as follows:


(2)Disconnect the coaxial cable from the power sensor unit.(3)Remove the three securing bolts, then remove the power sensor unit

from the mirror holder.(4)Mount a new unit by reversing steps (2) and (3).(5)Close the main circuit breaker, turn on the power to the oscillator, then

turn on the power to the CNC.(6)Turn on the laser, then check that the laser output indication appears.(7)The power input compensation coefficient must be changed. Change

the coefficient as explained in Section 9.6.

10.12REPLACING THEPOWER SENSORUNIT


257

Replace the shutter section as follows:


(2)The C1500B, C2000B, C2000C, C3000C, C3000D, and C4000A alsorequire that the cables be disconnected from intermediate PCB B.

(3)Remove the bolts which secure the unit, then remove the unit.(4)Mount a new unit by reversing steps (2) and (3).(5)The shutter unit is fitted with a semiconductor laser unit. Superimpose

the semiconductor laser beam on the CO2 gas laser beam, as explainedin Section 11.2.2.

Replace the shutter mirror as follows. Be careful not to leave fingerprintson the shutter mirror.

(1)Remove the four bolts, then remove the shutter arm.(2)Remove the temperature switch, then disconnect its cables.(3)Remove the three bolts, then remove the shutter mirror together with

the heat sink.(4)Apply a minute amount of thermal compound (Ryosan 910--50) to the

rear of a new shutter mirror, then mount the new shutter mirror byreversing steps (1) to (3).

Replace the shutter switch as follows:

(1)Remove connector CN52B from intermediate PCB B, then disconnectits cable.

(2)Remove the photoelectric switch together with the metal bracket.(3)Mount a new photoelectric switch and cable on the metal bracket.

Reverse steps (1) and (2) by mating the wire mark with the label on theshutter section.

10.13REPLACING THESHUTTER SECTION

10.13.1Replacing the ShutterUnit

10.13.2Replacing the ShutterMirror

10.13.3Replacing the ShutterSwitch


258

Fig. 10.13.3 (a) C1500B, C2000B, C2000C, C3000C, C3000D, and C4000Ashutter unit layout


259

Rel

ay

Fig. 10.13.3 (b) Shutter unit layout


260

Replace the beam absorber as follows:


(2)The beam absorber is water--cooled. Drain the water from the beamabsorber, then disconnect the water pipes. To drain the cooling water,open the drain valve of the water distribution unit.

(3)Disconnect the temperature sensor Faston terminal.(4)Remove the bolts, then remove the absorber. Before removing the

absorber, mark the position of the absorber or mounting metal bracket.If the position of the absorber is shifted as a result of the replacement,the laser beam is not directed to the center of the absorber. In such acase, the absorber must be adjusted.

(5)Mount a new absorber, aligning it with the marked position.(6)Connect the water tubes and temperature sensor cable.(7)Operate the chiller unit manually to circulate the cooling water. Check

that no water leaks from the joints that were disconnected during thereplacement. After checking, restore the original chiller setting.

(8)Close the main circuit breaker, turn on the power to the oscillator, thenturn on the power to the CNC. Check the position of the absorber, asdescribed below.

D Adjusting the absorber position

1) Draw a cross on an acrylic plate, then fix the plate such thatthe center of the cross is aligned with the center of theabsorber aperture.

2) Provide a flow of cooling air to the acrylic plate, using a drier,for example.

3) Turn on the oscillator, then press the high voltage switch.Monitor the output display screen. Once the output reaches300 to 500 W, immediately turn off the high voltage switch.During this period, a laser beam is output, leaving a circularmark on the acrylic plate.

4) Adjust the absorber such that the mark on the acrylic plateis aligned with the center of the absorber.

5) Repeat step 3), then check the position of the absorber. Ifthe mark is still not aligned with the center of the absorber,adjust the absorber again.

6) In step 3), soot from the burnt acrylic plate may adhere tothe shutter mirror. Check whether the shutter mirror hasbeen contaminated with soot or other particles, and cleanthe mirror if necessary.

10.14REPLACING THEBEAM ABSORBER


261

Fig. 10.14 (a) Beam absorber layout (C1500B, C2000B, C2000C)

3

Fig. 10.14 (b) Beam absorber layout (C3000C, C3000D)


262

PO

SIT

ION

AD

JUS

TM

EN

TS

CR

EW

TH

ER

MA

LS

W

Fig. 10.14 (c) Beam absorber layout (C4000A)


263

Fig. 10.14 (d) Beam absorber layout (C6000B)


264

Replace the high--frequency inverter as follows:


(2)Disconnect the cables from the high--frequency inverter.(3)Remove the four screws, then remove the inverter.(4)Mount a new inverter, then secure it by tightening the screws.(5)Connect the cables correctly. If the inverter output wiring is incorrect,

the turbo blower rotation may be reversed, thus contaminating theoscillator.

(6)Set the high--frequency inverter as explained in Section 9.3.

10.15REPLACING THEHIGH--FREQUENCYINVERTER


265

Replace the water distribution unit as follows:


(2)Drain all cooling water from the oscillator, using compressed air, forexample. Compressed air must be supplied only from the coolingwater inlet. Supplying compressed air from the cooling water outletmay tangle the flow sensor balancer, such that it cannot operate. Insuch a case, remove the flow sensor, as described in Section 10.17,then mount it again.

(3)Remove the panel on the cooling water inlet/outlet side of theoscillator.

(4)Mark the water pipes connected to the distribution unit, thendisconnect the pipes.

(5)Remove the bolts securing the distribution unit, then remove the unit.(6)Mount a new distribution unit by reversing steps (4) and (5). Connect

the water pipes correctly, noting the alignment marks.(7)Operate the chiller unit manually to circulate the cooling water. Check

that no water leaks from the joints that were disconnected during thereplacement. After checking, restore the original chiller setting.Check the amount of water in the chiller unit, and add water ifnecessary.

(8)Adjust the flow sensor as described in Section 9.7. If the sensor of thenew unit cannot be adjusted for some reason, remove the flow sensorfrom the old distribution unit, as described in Section 10.17, thenmount it on the new distribution unit.

10.16REPLACING THEWATERDISTRIBUTION UNIT


266

Fig. 10.16 (a) Detail of water destributer unit (C1500B)

Refer to water flow diagram (Fig. 7.2 (a)).


267

Fig. 10.16 (b) Detail of water destributer unit (C2000B)

Refer to water flow diagram (Fig. 7.2 (b)).


268

Fig. 10.16 (c) Detail of water destributer unit (C2000C)

Refer to water flow diagram (Fig. 7.2 (c)).


269

Fig. 10.16 (d) Detail of water destributer unit (C3000C)

Refer to water flow diagram (Fig. 7.2 (d)).


270

Val

ve(c

lose

d)P

ositi

onw

hen

wat

eris

rem

oved

Val

ve(o

pen)

Nor

mal

posi

tion

Fig. 10.16 (e) Detail of water destributer unit (C3000D)

Refer to water flow diagram (Fig. 7.2 (e)).


271

Val

ve(c

lose

d)P

ositi

onw

hen

wat

eris

rem

oved

Val

ve(o

pen)

Nor

mal

posi

tion

Fig. 10.16 (f) Detail of water destributer unit (C4000A)

Refer to water flow diagram (Fig. 7.2 (f)).


272

Fig. 10.16 (g) Detail of distribution unit A (C6000B)

Refer to water flow diagram.


273

Fig. 10.16 (h) Detail of distribution unit B (C6000B)

Refer to water flow diagram.


274

Replace the flow sensor as follows:


(2)Drain all cooling water from the oscillator, using compressed air, forexample. Compressed air must be supplied only from the coolingwater inlet.

(3)Disconnect the sensor Faston terminal from the terminal block.(4)Remove the four bolts, then remove the sensor. Be careful not to

damage the float.(5)The flow sensor consists of a float and read switch section. When

replacing the float, shift and remove the float core from the shaft holeon the sensor flange, then mount a new float core. When replacing theread switch section, replace the Bakelite plate.

(6)Mount the float section on the sensor flange. (Be careful not to deformthe wire ring. To prevent this, hold the plate of the float sectionbetween your fingers.) Then, insert the sensor into the block of thedistribution unit, ensuring that the O--ring is fitted correctly. At thistime, the wire ring of the float must be hanging downwards. Also, becareful not to disconnect the float. Secure the sensor by tightening thefour bolts.

(7)Operate the chiller unit manually to circulate cooling water. Checkthat no water leaks from the joints that were disconnected during thereplacement. After checking, restore the original chiller setting.Check the amount of water in the chiller unit, and add water ifnecessary.

(8)Adjust the flow sensor as described in Section 9.7.

REMOVE SCREWS

(4POS.)

REED SWITCH

MAGNET

BALANCER

Fig. 10.17 (a) Detail of water flow rate sensor (C1500B, C2000B, C3000C)

10.17REPLACING THEFLOW SENSOR(C1500B, C2000B,C3000C)


275

Fig. 10.17 (b) Detail of flow sensor (C2000C, C3000D, C4000A, C6000B)


276

Replace the condensation sensor as follows:


(2)Disconnect the condensation sensor Faston terminal from the terminalblock.

(3)Remove the screws securing the condensation sensor, then replace thesensor with a new one.

(4)Connect the Faston terminal to the terminal block.

Replace the semiconductor laser as follows:


(2)Remove connector CN59 from intermediate PCB B, then disconnectthe cable.

(3)The semiconductor laser unit consists of the semiconductor laser andadjustment stage. In the case of this model, the semiconductor lasermust be replaced together with the adjustment stage.

(4)Remove the three screws securing the laser unit, then replace the laserunit with a new one.

(5) Insert the cable of the semiconductor laser into the connector onintermediate PCB B, then secure the cable.

(6)Replacing the semiconductor laser causes the direction of the laseroutput to shift. To adjust the direction, superimpose thesemiconductor laser beam on the CO2 laser beam, as explained inSection 11.2.

10.18REPLACING THECONDENSATIONSENSOR

10.19REPLACING THESEMICONDUCTORLASER


277

Use the procedure below for trigger electrode replacement.

(1)Turn off the power to the CNC, then turn off the main circuit breakerand power supply.

(2)Remove bolt£ and screw¢, then remove the trigger electrode.(3)Check that O--ring¤ is set in the nozzle A¥, and install a new trigger

electrode.(4)Set the parameters below.

Bit 4 of parameter No.15000 (16--L, 16i--L), bit 4 ofparameter No. 200 (0--L): Setting � 0

Parameter No. 15220, No, 15221 (16--L, 16i--L),parameter No. 231, No. 232 (0--L): Setting � 0

Parameter No. 15223 (16--L, 16i--L),parameter No. 250 (0--L): Setting � Setting -- 60

Parameter No. 15240 (16--L, 16i--L),parameter No. 235 (0--L): Setting � 0

(5)Make a leakage check. See Section 4.3.(6)Draw a vacuum twice. Then, return the setting of parameter No. 15240

(16--L, 16i--L) or parameter No. 235 (0--L) to the original value.(7)Restart the laser oscillator, and check that trigger electrode discharge

continues for 5 minutes. If trigger electrode discharge stops, make apower supply adjustment according to Section 9.1.

(8)Return the values of the parameters modified in step (4) to the originalvalues.

(9)Perform aging according to Section 9.8.

10.20REPLACING THETRIGGERELECTRODE


278

¡

©

¢ £

¤

¥

¡ Trigger electrode© Feeder¢ Feeder mounting screw£ Trigger electrode mounting screw¤ O--ring (P10)¥ Discharge tube nozzle A

Fig. 10.20 Trigger electrode replacement

B--70125EN/03 11. LASER OPTICAL SYSTEM

279

11 LASER OPTICAL SYSTEM

Table 11 lists the optical parts and their features. Use this table todetermine the feature of each optical part. When mounting these parts,be careful to orient them correctly and ensure that they are being mountedon compatible units. If a part is not mounted correctly, beam modedistortion, reduced output, a deterioration in the machiningcharacteristics, or damage to the power sensor unit may occur.

Table 11 Optical parts and their features

Name Specification Substratematerial

Color (front/rear)

Dimensions(in.) ApplicationName Specification

materialColor (front/rear)

MarkingApplication

1 Output mirror A98L--0001--0981 ZnSe Transparent: Amber 1.1 � C1500B

2 Output mirror A98L--0001--0981/B ZnSe Transparent: Amber 1.1 � C1500B

3 Output mirror A98L--0001--0960 ZnSe Transparent: Amber 1.1 � C2000BC2000C

4 Output mirror A98L--0003--0015/B ZnSe Transparent: Amber 1.5 � C3000D

5 Output mirror A98L--0003--0015/D ZnSe Transparent: Amber 1.5 � C3000C

6 Output mirror A98L--0003--0027 ZnSe Transparent: Amber 1.5 � C6000B

7 Output mirror A98L--0003--0036 ZnSe Transparent: Amber 1.5 � C4000A

8 Rear mirror A98L--0001--0750 Ge Opaque: Silver/silver 1.1 � C1500B

9 Rear mirror A98L--0001--0961 Ge Opaque: Silver/silver 1.1 � C2000BC2000C

10 Rear mirror A98L--0003--0016/B Ge Opaque: Silver/silver 1.5 � C3000D

11 Rear mirror A98L--0003--0016/C Ge Opaque: Silver/silver 1.5 � C3000C

12 Rear mirror A98L--0001--0757/B Ge Opaque: Silver/silver 1.5 � C6000B

13 Rear mirror A98L--0003--0037 Ge Opaque: Silver/silver 1.5 � C4000A

14 Folding mirror A98L--0001--0615/B Si Opaque: Gold/(harsh) gray 2.0 � C1500B, C2000BC2000C, C3000C

HP orDEMMR

C3000D, C4000A

15 Folding mirror A98L--0001--0866/B Si Opaque: Gold/(harsh) gray 2.5 � C6000B

HP orDEMMR

16 Zero--shiftmirror

A98L--0001--0616/C Si Opaque: Gold/(harsh) gray 2.0 � Laser oscillators withshort optical pathC3000C

mirror�/0 --45°

short optical pathC3000C(long optical path)

17 Circular polar-ization mirror

A98L--0001--0617/C Si Opaque: Gold/(harsh) gray 2.0 � Laser oscillators withshort optical pathC3000C

ization mirror�/4 --45°

short optical pathC3000C(long optical path)

B--70125EN/0311. LASER OPTICAL SYSTEM

280

The optical parts in the laser oscillator, including the output mirror, rearmirror, folding mirrors, and circular polarization mirror, must be cleanedor replaced periodically. Similarly, if the laser output or beam modepattern becomes abnormal, the optical parts must be cleaned or replaced.

When the output mirror, rear mirror, and folding mirrors are cleaned orreplaced, the discharge tubes are open to the atmosphere for a long time.Therefore, pay particular attention to the immediate surroundings toensure that dust does not enter the discharge tubes.

When cleaning and replacing the output and rear mirrors, deal with onemirror at a time. If both mirrors are removed at the same time, it mayprove impossible to attain the specified output level after they arereinstalled. As a result, the alignment work required after mirrorreplacement will become more difficult. Before removing the foldingmirrors, adjust the mode; it will subsequently be easier to performcorrection even if the folding mirrors are displaced.

To remove the folding mirrors, remove two or three mirrors at a time.Reduced output or the inability to attain a good mode pattern aftercleaning or replacement indicates that the folding mirrors are displaced.Perform adjustment using the micrometers of the folding mirrors.

Follow the cleaning procedure given below.

Clean the output mirror

Clean the rear mirror

Clean two folding mirrors

Clean two folding mirrors

C3000C, C3000D, C6000B

Clean the output mirror

Clean the rear mirror

Clean three folding mirrors

C1500B, C2000B, C2000C

1)

2)

3)

4)

When cleaning the zero--shift mirror and circular polarization mirror inthe beam folding unit, clean the two mirrors at the same time.

11.1CLEANING OPTICALPARTS


281

Fig. 11.1 (a) Structure of diagram output mirror (C1500B, C2000B, C2000C)


282

Fig. 11.1 (b) Structure of diagram rear mirror (C1500B, C2000B, C2000C)


283

Fig. 11.1 (c) Structure of diagram output mirror (C3000C, C3000D, C4000A, C6000B)


284

Fig. 11.1 (d) Structure of diagram rear mirror (C3000C, C3000D, C4000A, C6000B)


285

Fig. 11.1 (e) Cleaning mirror 1

Fig. 11.1 (f) Cleaning mirror 2

Fig. 11.1 (g) Cleaning mirror 3


286

Fig. 11.1 (h) Schematic diagram of mounting of output coupler/rear mirror to the holder


287

To clean the output mirror, follow the procedure given below. Since it isnecessary to touch the optical parts and vacuum parts while cleaning theoutput mirror, wear clean gloves or finger cots. Do not touch these partswith your bare hands.The output mirror is fabricated using a toxic material. Be careful not totouch the mirror with your bare hands. If you should touch it, wash yourhands thoroughly under clean running water.Before starting cleaning, wipe away any foreign matter from around theparts to be removed. If a removed part is inadvertently soiled, wipe itclean with ethyl alcohol.

[Procedure]

(1) Turn off the power to the CNC, then open the main circuit breaker orturn off the power supply of the laser oscillator.

(2) Remove the three beam cover mounting screws (M4 hexagon sockethead bolts), then remove the beam cover.

(3) When the pressure of the vacuum system of the oscillator is lowerthan the atmospheric pressure, it may prove impossible to remove theoutput mirror. Confirm that the oscillator is in the purge state andloosen the yellow and orange tube joints to allow the internal pressureof the vacuum system to equalize with the atmospheric pressure.If a negative pressure exists in the vacuum system, the atmosphericpressure sensor must be adjusted. (See Section 9.4.2.)

(4)Slightly loosen the mirror holder screw. Loosen the mirror holdermounting screw (M4 hexagon socket head bolt), and remove themirror holder from the alignment unit.

If the O--ring is so tight that the mirror holder cannot beremoved easily, insert the three M4 hexagon socket head boltsinto the beam cover mounting screw holes, and tighten themevenly. Then, it should be possible to remove the mirror holder.Note that unevenly tightening the three screws may damagethe O--ring.

(5) Remove the output mirror and O--ring from the mirror holder, andplace them on lens cleaning paper. To simply replace the outputmirror at this point, go to step (12).

(6) Place the mirror with its reflecting side (the side facing the dischargetubes) facing up. Gently blow clean air (using, for example, a camerablower) across the mirror surface to remove dust and dirt. Drop ethylalcohol or lens cleaner onto the mirror surface, moisten a cotton swabwith the fluid, and gently wipe any dirty areas.

(7) Place lens cleaning paper over the mirror, then spray ethyl alcohol orlens cleaner over the paper and mirror.

11.1.1Cleaning andReplacing the OutputMirror


288

(8) Move the lens cleaning paper horizontally to and fro across themirror.

Since the lens cleaner has a high surface tension, it may bedifficult to move the cleaning paper. As the paper is slowlymoved to and fro across the mirror, however, the ethyl alcoholwill gradually evaporate.

(9) Blow clean air (using, for example, a camera blower) across themirror surface to completely evaporate the ethyl alcohol or lenscleaner.

(10) Repeat steps (7) to (9) until all dirt on the mirror surface has beenremoved. Finally, clean the mirror surface with ethyl alcohol.

(11) Check the transmitting side of the mirror. If its surface is dirty,perform steps (6) to (9) for the transmitting side also. Note that if anexcessive amount of ethyl alcohol or lens cleaner is applied, it mayflow around the back of the mirror, leading to contamination.

(12) Wipe the mirror holder and O--ring with ethyl alcohol.

(13) Reinstall the output mirror in the mirror holder, then insert theO--ring. When installing the output mirror, pay particular attentionto the mirror orientation. The reflecting plane (the plane indicatedby the arrow on the side of the mirror) must face the discharge tubes.The arrow is both scribed and marked with ink such that, even if theink is entirely removed, it will still be possible to find the scribedarrow. Align the arrow on the side of the output mirror with themirror holder position.

(14) Mount the mirror by reversing steps (2) to (4). Install the mirrorholder in the alignment unit so that the mark on the mirror holderfaces down.Tighten the mirror holder screw manually, then further tighten thescrew through approximately 30 degrees using a jig. If anappropriate jig is not available, use the key for the cabinet of theoscillator instead.

(15) Close the main circuit breaker or turn on the power supply of the laseroscillator, then turn on the power to the CNC.

(16) Perform a leak check. If the Setting value of the DGN905 (FS16--L,16i--L) or DGN860 (0--L) is 100 or less, tighten the mirror holderscrew again. In this case, loosen the mirror holder screw first, tightenthe screw manually, then tighten the screw through approximately 30degrees, using the jig.

(17) This completes cleaning and replacement.

(18) Perform discharge aging.

(19) Then, perform alignment.

NOTENever attempt to adjust any part other than the outputmirror.


289

To clean the rear mirror, follow the procedure given below. Since it isnecessary to touch optical parts and vacuum parts while cleaning the rearmirror, wear clean gloves or finger cots. Do not touch these parts directlywith your bare hands.Before starting cleaning, wipe away any foreign matter from around theparts to be removed. If a removed part is inadvertently soiled, wipe itclean with ethyl alcohol.

[Procedure]


(2) Remove the power sensor mounting screw, then remove the powersensor.

(3) When the pressure of the vacuum system of the oscillator is lowerthan the atmospheric pressure, it may prove impossible to remove therear mirror. Confirm that the oscillator is in the purge state and loosenthe yellow and orange tube joints to allow the internal pressure of thevacuum system to equalize with the atmospheric pressure.If a negative pressure exists in the vacuum system, the atmosphericpressure sensor must be adjusted. (See Section 9.4.2.)

(4) Slightly loosen the mirror holder screw. Loosen the mirror holdermounting screw (M4 hexagon socket head bolt), and remove themirror holder from the alignment unit.

If the O--ring is so tight that the mirror holder cannot beremoved easily, insert the three M4 bolts into the beam covermounting screw holes, and tighten them evenly. Then, itshould be possible to remove the mirror holder. Note thatunevenly tightening the three screws may damage the O--ring.

(5) Remove the rear mirror and O--ring from the mirror holder, and placethem on lens cleaning paper. To simply replace the rear mirror at thispoint, go to step (12).

(6) Place the mirror with its reflecting side (the side facing the dischargetubes) facing up. Gently blow clean air (using, for example, a camerablower) across the mirror surface to remove dust and dirt. Drop ethylalcohol or lens cleaner onto the mirror surface, moisten a cotton swabwith the fluid, and gently wipe any dirty areas.




11.1.2Cleaning andReplacing the RearMirror


290


(10) Repeat steps (7) to (9) until all dirt on the mirror surface has beenremoved. Finally, clean the mirror surface with ethyl alcohol.

(11) Check the transmitting side of the mirror. If its surface is dirty,perform steps (6) to (9) for the transmitting side also. Note that if anexcessive amount of ethyl alcohol or lens cleaner is applied, it mayflow around the back of the mirror, leading to contamination.

(12) Wipe the mirror holder and O--ring with ethyl alcohol.(13) Reinstall the rear mirror in the mirror holder, then insert the O--ring.

When installing the rear mirror, pay particular attention to the mirrororientation. The reflecting plane (the plane pointed to by the arrowmarked on the side of the mirror) must face the discharge tubes. Thearrow is both scribed and marked with ink such that, even if the inkis entirely removed it will still be possible to find the scribed arrow.Align the arrow on the side of the rear mirror with the mirror holderposition.

(14) Mount the mirror holder by reversing steps (2) to (4). Install themirror holder in the alignment unit so that the mark on the mirrorholder faces down.Tighten the mirror holder screw manually, then further tighten thescrew through approximately 30 degrees using a jig. If anappropriate jig is not available, use the key for the cabinet of theoscillator instead.


(16) Perform a leak check. If the Setting value of the DGN905 (FS16--L,16i--L) or DGN860 (0--L) is 100 or less, tighten the mirror holderscrew again. In this case, loosen the mirror holder screw first, tightenthe screw manually, then tighten the screw through approximately 30degrees, using the jig.

(17) This completes cleaning and replacement.(18) Perform discharge aging.(19) Then, perform alignment.

NOTENever attempt to adjust any part other than the rear mirror.

(20) After the rear mirror has been replaced, it must be calibrated. See thesection covering the setting of the power input compensationcoefficients.


291

To clean the folding mirrors, follow the procedure given below. Since itis necessary to touch the optical parts and vacuum parts while cleaningthe folding mirrors, wear clean gloves or finger cots. Do not touch theseparts with your bare hands.Before starting cleaning, wipe away any foreign matter from around theparts to be removed. If a removed part is inadvertently soiled, wipe itclean with ethyl alcohol.

[Procedure]


(2) Loosen the mirror holder mounting screw, and remove the mirrorholder from the folding mirror unit. To simply replace the foldingmirror at this point, go to step (11).

(3) The folding mirror is attached to its holder using vacuum grease. Itis, therefore, very difficult to remove the mirror from its holder.Therefore, clean the folding mirror without removing it from itsholder.

(4) Place the mirror with its reflecting side facing up. Gently blow cleanair (using, for example, a camera blower) across the mirror surfaceto remove dust and dirt. Drop ethyl alcohol or lens cleaner onto themirror surface, moisten a cotton swab with the fluid, and gently wipeany dirty areas.





(8) Repeat steps (4) to (7) until all dirt on the mirror surface has beenremoved.

(9) By using a cotton swab moistened with ethyl alcohol, clean that partof the alignment unit which touches the mirror. This is because flakesof coating may remain in this area. If the flakes of coating are notremoved, they may cause the mirror to become misaligned.

(10) Install the mirror holder by reversing steps (2) to (3). Insert the holderperpendicular to the alignment unit, so that the mirrors touch thealignment unit evenly. When tightening the fixing screws, tightenthem evenly in a crisscross sequence.

11.1.3Cleaning andReplacing the FoldingMirrors


292

(11) When replacing a mirror, remove the mirror from its holder. Sincevacuum grease is applied to the rear of the mirror, insert a tool suchas a standard screwdriver into the slot on the side plane of the mirrormounting section, and pry out the mirror. Be careful not to applyexcessive force to the mirror holder.

(12) Apply a thin coat of vacuum grease to the rear of the new mirror. Inthose cases where the reflecting side of the mirror faces down, themirror will fall unless grease is applied.

(13) Place the mirror in its holder and, using a dryer, blow warm air ontothe holder to warm it. This will soften the vacuum grease and bondthe mirror onto the holder. Mount the mirror holder as explained instep (10).

(14) Turn on the main circuit breaker of the laser oscillator, then turn onthe power to the CNC.

(15) Perform a leak check.(16) This completes cleaning and replacement.(17) Perform discharge aging.(18) Then, perform alignment.

NOTENever adjust any part other than the cleaned or replacedfolding mirrors.


293

O--RING (G55)

FOLDING MIRROR UNIT

FOLDING MIRROR

MIRROR HOLDER

MIRROR HOLDER ATTACHMENT SCREW

Fig. 11.1.3 (a) Structure diagram of folding mirror unit


294

FOLDING MIRROR UNIT

FOLDING MIRROR

O--RING (G65)

MIRROR HOLDER

MIRROR HOLDER ATTACHMENT SCREW

Fig. 11.1.3 (b) Structure diagram of folding mirror unit: C6000B

The zero--shift mirror and circular polarization mirror are used in theoptical path length unit, installed in those oscillators of short optical pathtype, and in the C3000C of long optical path type.

C1500B, C2000B, C2000C : Two zero--shift mirrorsC3000C, C3000D, C4000A : One zero--shift mirror and one circularpolarization mirror

The C3000C can output a circularly--polarized beam even when thezero--shift mirror is installed in place of the circular polarization mirror,and vice versa. However, the circular polarization mirror should be setin the first mirror position which is less susceptible to the buildup of dustand dirt.

To clean the zero--shift and circular polarization mirrors, follow theprocedure given below. Since it is necessary to touch the optical partswhile cleaning the mirrors, wear clean gloves or finger cots. Do not touchthese parts with your bare hands.

Before starting cleaning, wipe away any foreign matter from around theparts to be removed. If a removed part is inadvertently soiled, wipe itclean with ethyl alcohol.

11.1.4Cleaning andReplacing theZero--shift Mirror andCircular PolarizationMirror


295

[Procedure]


(2) Remove the mirror holder from the block (alignment unit) byloosening the mirror holder mounting screw.

(3) Remove the mirror from its holder, and place the mirror on lenscleaning paper. Be careful not to drop the mirror; although grease isapplied to the rear of the mirror, it is not physically attached to theholder.

(4) Place the mirror with its reflecting side facing up. Blow clean air(using, for example, a camera blower) across the mirror surface toremove dust and dirt. Drop ethyl alcohol or lens cleaner onto themirror surface, moisten a cotton swab with the fluid, and gently wipethe cotton swab over the mirror surface. Wipe the mirror dry withlens cleaning paper. Do not try to remove dust by rubbingvigorously; doing so is likely to damage the mirror.



(7) Blow clean dry air across the mirror surface to completely evaporatethe ethyl alcohol or lens cleaner.

(8) Repeat steps (4) to (7) until all dirt on the mirror surface has beenremoved.

(9) Using a cotton swab moistened with ethyl alcohol, clean that part ofthe alignment unit which touches the mirror. This is because flakesof coating may remain in this area.

(10) After the completion of cleaning, reinstall the zero--shift mirror in itsholder, then install the mirror and holder. Slide the mirror into itsholder, bonding the mirror to the holder with vacuum grease.

(11) To replace a mirror with a new one, apply a thin coat of vacuumgrease to the rear of the new mirror, and install it in the holder.


(13) Start the laser oscillator. Check the position of the output beam. Thischeck completes cleaning and replacement.


296

The internal surfaces of the output mirror and rear mirror are concave. Forlaser oscillation, the curvature centers and mirror surfaces of the twomirrors must lie on the same axis. When this axis matches the tube axisof the discharge tubes, in other words, when the laser beam reflected bythese mirrors passes through the center of the discharge tubes, the outputlevel is maximized, and symmetric beam mode and a round section areobtained.

The theory of alignment is such that while monitoring the output powerlevel with a tester, you adjust the angle of each mirror to obtain amaximum output power. Once this adjustment is made, all mirrors are setfor maximum output. So, if a mirror is misaligned, the original state ororiginal beam mode can be restored by adjusting the misaligned mirroronly to maximize the output power. Thus, with this method, modeadjustment is simple, and can be performed with a good reproducibility.

Section 11.2.1.1 describes the procedure for adjusting all mirrors of anoscillator not adjusted with this method, to obtain the maximum outputstate. This procedure takes a rather longer time. However, once thisadjustment is made, adjustment work required at the time of mirrorcleaning can be remarkably reduced.

Section 11.2.1.2 describes the maximum output state adjustmentprocedure required to correct an optical path shift caused by a resonatordistortion during transmission or installation.

Section 11.2.1.3 describes the adjustment procedure at the time of mirrorcleaning for an oscillator adjusted to the maximum output state accordingto Section 11.2.1.1 or Section 11.2.1.2.

Section 11.2.1.4 describes the method of obtaining a maximum power.

Section 11.2.1.5 describes burn pattern collection and beam modeevaluation.

(1)Record the adjustment screw readings of the output mirror (O.C.), rearmirror (R.M.), and folding mirrors (F.M.).

(2)Collect a burn pattern, and use it as the start state for mode adjustment.Near (3 m): Hot mode and cold modeFar: Hot mode and cold mode

(3)C3000C, C3000D, C6000B1) Obtain a maximum power based on the output mirror (O.C.) by

using the rear mirror (R.M.) as the reference.2) Obtain a maximum power based on the folding mirror (FM1) by

using the output mirror (O.C.) as the reference.3) Obtain a maximum power based on the folding mirror (FM4) by

using the rear mirror (R.M.) as the reference.

11.2OPTICAL AXISADJUSTMENT

11.2.1Alignment of theResonator (MaximumPower Method)

11.2.1.1Method of obtaining amaximum power byadjusting all mirrors


297

4) Obtain a maximum power based on the folding mirror (FM1) byusing the folding mirror (FM4) as the reference.

5) Collect a burn pattern. If the mode is good, end this procedure. Ifnot, start all over again from step 1). At this time, collect a burnpattern in each step. If the mode is finally good, end this procedure.

O.C.

FM3

FM4 R.M.

FM2

FM1Beam

Fig. 11.2.1.1 (a) Mirror locations of C3000C, C3000D, and C6000B

(4)C1500B, C2000B, and C2000C1) Obtain a maximum power based on O.C. by using the R.M. as the

reference.2) Obtain a maximum power based on FM1 by using the O.C. as the

reference.3) Obtain a maximum power based on FM1 by using the R.M. as the

reference.4) Collect a burn pattern. If the mode is good, end this procedure. If

not, start all over again from step 1). At this time, collect a burnpattern in each step. If the mode is finally good, end this procedure.

O.C.

R.M. FM3

FM2

FM1Beam

Fig. 11.2.1.1 (b) Mirror locations of C1500B, C2000B, and C2000C

(5)C4000A1) Obtain a maximum power based on O.C. by using the R.M. as the

reference.2) Obtain a maximum power based on O.C. and R.M. by using FM4

as the reference.3) Obtain a maximum power based on FM2 by using the O.C. as the

reference.4) Obtain a maximum power based on FM6 by using the R.M. as the

reference.


298

5) Collect a burn pattern. If the mode is good, end this procedure. Ifnot, start all over again from step 1). At this time, collect a burnpattern in each step. If the mode is finally good, end this procedure.

FM5

FM6

R.M.

FM4

FM2

O.C.

FM3

FM1

Beam

Fig. 11.2.1.1 (c) Mirror locations of C4000A


(2)Collect a burn pattern, and use it as the start state for mode adjustment.If the mode is good, end the adjustment.Near (3 m): Hot mode and cold modeFar: Hot mode and cold mode

(3)C3000C, C3000D, C6000B1) Obtain a maximum power based on FM1.2) Obtain a maximum power based on FM4.3) Obtain a maximum power based on FM1 by using FM4 as the

reference.4) Obtain a maximum power based on FM1 by using O.C. as the

reference.5) Obtain a maximum power based on FM4 by using R.M. as the


not, proceed to step 7).7) Obtain a maximum power based on O.C. by using R.M. as the

reference. Then, repeat this procedure starting with step 3). At thistime, collect a burn pattern in each step. If the mode is finally good,end this procedure.

(4)C1500B, C2000B, C2000C1) Obtain a maximum power based on FM1.2) Obtain a maximum power based on FM1 by using O.C. as the



not, proceed to step 5).

11.2.1.2Alignment procedureduring installation aftertransportation


299

5) Obtain a maximum power based on O.C. by using R.M. as thereference. Then, repeat this procedure starting with step 2). At thistime, collect a burn pattern in each step. If the mode is finally good,end this procedure.

(5)C4000A1) Obtain a maximum power based on FM4.2) Obtain a maximum power based on O.C. and R.M. by using FM4

as the reference.3) Obtain a maximum power based on FM2 by using O.C. as the



not, proceed to step 6).6) Obtain a maximum power based on O.C. by using R.M. as the

reference. Then, repeat this procedure starting with step 2). At thistime, collect a burn pattern in each step. If the mode is finally good,end this procedure.


(2)Collect a burn pattern. This is used for checking mirror dirt. If themode is good, end the adjustment.Near (3 m): Hot mode and cold modeFar: Hot mode and cold mode

(3)C3000C, C3000D, C6000B1) Clean the O.C. and R.M. mirrors.2) Obtain a maximum power based on O.C. by using R.M. as the

reference.3) Clean the FM1 and FM2 mirrors.4) Obtain a maximum power based on FM1.5) Clean the FM3 and FM4 mirrors.6) Obtain a maximum power based on FM4.

(4)C1500B, C2000B, C2000C1) Clean the O.C. and R.M. mirrors.2) Obtain a maximum power based on O.C. by using R.M. as the

reference.3) Clean the FM1, FM2 and FM3 mirrors.4) Obtain a maximum power based on FM1.

(5)C4000A1) Clean the O.C. and R.M. mirrors.2) Obtain a maximum power based on O.C. by using R.M. as the

reference.3) Clean the FM3 and FM4 mirrors.4) Obtain a maximum power based on FM4.5) Clean the FM1, FM2, FM5, and FM6 mirrors.6) Obtain a maximum power based on FM2 and FM6.

11.2.1.3Alignment procedure atmirror cleaning time


300

(1)Minimize the output power of internal discharge. If a large output isused, the mode present when a maximum power is obtained is notalways the best mode due to thermal distortion of each mirror.However, a capability of detecting an output variation due to baseoutput fluctuation, tester resolution, chiller temperature, and so forthis required, so that an output power of about 1,000 W is adequate.

(2)Use a discharge area of 100% in the discharge tube. If the area isnarrow, the output variation dependent on a shift of the internal opticalaxis becomes small. So, with the C3000C and C3000D, use the baseconditions Pc = 3,000 W, Duty cycle = 30%, and Frequency = 100 Hz,and adjust the duty cycle to determine the actual conditions for internaldischarge. With the C6000B, the conditions will be Pc = 6,000 W andDuty cycle = about 15%.

(3)Start discharge, and obtain a maximum power when the output isstabilized after 5 minutes.

(4)Using mirrors A and B, and obtaining a maximum power based onmirror B by using mirror A as the referenceWhile turning mirror A in one direction in steps of an interval of theadjustment screw, for example, 0.5 division (5 µm) or 1 division (10µm), adjust mirror B for each division, and obtain a maximum powerat each point of mirror A. From data obtained at each point of mirrorA, determine a mirror A position representing a maximum power.Then, by aligning mirror A at such a position, adjust mirror B to obtaina maximum power. Two adjustment screws are provided for eachmirror. So, be sure to obtain a maximum power with one axis, thenobtain a maximum power with the other axis. Never move the X andY axes at the same time. The method of adjusting a folding mirrordepends on the model. See the description below.(a) C1500B, C2000B, C2000C

For each of the X and Y axes of the folding mirror (FM), anindependent adjustment screw is not provided. So, to makeadjustments in the X and Y directions, obtain a maximum powerby using two adjustment screws M and N.

(b) C3000C, C3000D, C6000BFor each of the X and Y axes of the folding mirror (FM), anindependent adjustment screw is provided. So, obtain a maximumpower by using an adjustment screw available for each axis. Forexample, when obtaining a maximum power with an output mirrorand folding mirror, make an X--axis adjustment by using (M) of thefolding mirror and (m) of the output mirror, then make a Y--axisadjustment by using (B) and (b).

(5)Method of output power measurementAn output power can be viewed by connecting a tester to the relayPCB. A voltage signal proportional to a power is output. See Section8.2.

11.2.1.4Obtaining a maximumpower


301

(1)For information about burn pattern collection, see Section 4.3(1).

(2) In the automatic operation mode, execute the program below to emita laser beam to an acrylic block.[Example of program: For the C1500B]

G32 P1 Q1;G24 S1500 Q100 R4.0;G32 P0;M30;

In the program above, S represents an output (W), R represents a time(seconds). Depending on the oscillator, rewrite the program. Be sureto enter a decimal point when specifying R.

(3)For determination of whether a beam mode is good, see Section 4.3(1).

A=7.580 A=7.570 A=7.590

A=7.580 A=7.610 A=7.620 A=7.630 A=7.640

A=7.590

Power

5 15

10

5

Initial setting of A = 7.590

Clockwise B is adjusted to obtain a maximum power.

Power B is adjusted to obtain a maximum power.

Same state as 1

Counterclockwise

12

3

4 5

1

67

98

10

A maximum power is obtained based on B.

A maximum power is obtained based on B.

NOTEIn 3, the power is decreased, indicating that the direction is wrong. So, in 5, the adjustmentscrew is returned to the original position.

11.2.1.5Burn pattern collectionand beam modeevaluation


302

Do not determine the maximum power position of A at the actualmaximum power point (peak point). Instead, find the first position 1’with the same power after a peak, and set a position halfway between1 and 1’. Adjust B to obtain a maximum power at that position.

Maximum power position of A= (7.590+7.638)/2= 7.614

A=7.650A=7.590A=7.638A=7.614

Power

1

67

98

10

1’


303

ADJUSTMENT SCREW OFALIGNMENT (N: Y AXIS)

REAR MIRROR SIDE (R.M.)

BEAM PATH (SHORT PATH TIME)

ADJUSTMENT SCREW OF

ALIGNMENT (N: Y AXIS)

OUTPUT COUPLER SIDE (O.C.)

ADJUSTMENT SCREW OF

ALIGNMENT (M: X AXIS)

ADJUSTMENT SCREW OFALIGNMENT (M: X AXIS)

FOLDING MIRROR SIDE (FM1) FOLDING MIRROR SIDE (FM3)

ADJUSTMENT SCREW

OF ALIGNMENT (M)

ADJUSTMENT SCREW

OF ALIGNMENT (N)

FOLDING MIRROR SIDE (FM2)

Fig. 11.2.1.5 (a) Adjustment place of alignment (C1500B, C2000B)


304




ADJUSTMENT SCREW OF

ALIGNMENT (N: Y AXIS)


ADJUSTMENT SCREW OF

ALIGNMENT (M: X AXIS)


FOLDING MIRROR SIDE (FM1) FOLDING MIRROR SIDE (FM3)ADJUSTMENT SCREW

OF ALIGNMENT (M)

ADJUSTMENT SCREW

OF ALIGNMENT (N)


Fig. 11.2.1.5 (b) Adjustment place of alignment (C2000C)


305










ADJUSTMENT SCREW OFALIGNMENT (m: X AXIS)

ADJUSTMENT SCREW OFALIGNMENT (n: Y AXIS)





Fig. 11.2.1.5 (c) Adjustment place of alignment (C3000C)


306
















Fig. 11.2.1.5 (d) Adjustment place of alignment (C3000D)


307


REAR MIRRORSIDE (R.M.)


OUTPUT COUPLERSIDE (O.C.)


FOLDING MIRROR SIDE (FM1)FOLDING MIRRORSIDE (FM2)



ADJUSTMENT SCREW OF

ALIGNMENT (m: X AXIS)




FOLDING MIRRORSIDE (FM5)






Fig. 11.2.1.5 (e) Adjustment place of alignment (C4000A)


308


OUTPUT COUPLERSIDE (O.C.)


ADJUSTMENT SCREW OF





ADJUSTMENT SCREW OF








Fig. 11.2.1.5 (f) Adjustment place of alignment (C6000B)


309

(1)Attach an acrylic plate approximately 3 to 10 m from the outlet of thelaser oscillator, and obtain a burn pattern for the CO2 laser beam (oneshot, rated output, CW 100%, 0.1--second duration). Do not attemptto touch the plate immediately after the pattern has been obtained.

(2)By turning the X-- and Y--axis adjustment screws, align thesemiconductor laser beam with the center of the burn pattern obtainedin step (1).When using the A04B--0811--D401 (semiconductor laser unit), turnthe adjustment screws using a 2--mm hexagon wrench.

(3)After completing the adjustment, tighten the X-- and Y--axis clamps.(4)Compare the optical axis of the semiconductor laser beam with the

burn pattern of the CO2 laser beam, obtained approximately 1 m fromthe laser oscillator outlet. If the difference between the two beamcenters is within � 2 mm, the optical axis adjustment can be regardedas being successful.

(5) If an optical axis mismatch is detected in step (4), adjust the opticalaxis of the semiconductor laser beam by moving the plate and stageof the semiconductor laser unit. Then, repeat the adjustmentprocedure from step (2).

The diameter of the semiconductor laser beam can be adjusted by turningthe knurl of the semiconductor laser head. Thus, the pattern size, focallength, and so forth can be changed.

The semiconductor laser beam is factory set so that its pattern is circularhaving a diameter of 8.5 +1.0 --0 mm (at a distance of 2.6 m from the laseroscillator outlet), and is parallel (angle of beam divergence: 1.0 mrad) (forthe A50L--2001--0286 only).Normally no adjustment is required. If adjustment becomes necessary forsome reason, however, follow the procedure given below.

(1)Loosen the hexagonal setscrew or lock nut securing the knurl of thesemiconductor laser head.

(2)While checking the laser beam pattern, slowly turn the knurl or lenssection to obtain a required beam diameter.

(3)Secure the hexagonal setscrew or lock nut of the knurl.(4)After completing the adjustment, check that the semiconductor laser

beam has no focus at some point on the beam propagation path to themachining point, that is, that the laser beam does not narrow or widen.

11.2.2Alignment of theSemiconductor Laser

11.2.2.1Adjusting the beamcenter of thesemiconductor laserbeam superimposed onthe CO2 laser beam

11.2.2.2Adjusting the diameterof the semiconductorlaser beam


310

Fig. 11.2.2.2 Semiconductor laser unit (A04B--0811--D401)


311

The oscillators of the short optical path types and the C3000C of longoptical path type contain a beam folding unit to divert the laser beamwithin the oscillator. If the beam output direction changes as a result ofaligning the resonator, the beam folding unit must be adjusted.

The first mirror to reflect the laser beam from the output mirror is fixedand not movable. The second mirror is movable.

The movable mirror holder has adjustment screws for inclining the mirrorhorizontally and vertically, or adjustment screws for inclining the mirrorto the right and to the left. Never touch the fulcrum screw. This fulcrumis used to adjust the space between the holder and support to 3 mm.

First, adjust the beam so that it does not interfere with the resonatorfolding block and duct. This adjustment allows the beam to be outputfrom almost the center of the oscillator outlet.

Perform adjustment by following the procedure given below.

(1) Insert a target in the hole of the resonator folding block or circulatingpipe. If a target is not available, attach wires to indicate the center ofthe hole.

(2)Place an acrylic plate at the oscillator outlet, and blow air across it,using a dryer, for example.

(3)Start the oscillator to ready it for laser output.(4)Execute a program to output a laser beam of the rated output, CW

100%, and 0.1 second duration. Then, a mark like that of the target(crisscross) will appear on the acrylic plate.[Sample program]G32 P1 Q1 ;G24 S*** Q100 R0.1 ;G32 P0 ;

(5)While referencing the mark, turn the adjustment screws on the holderso that the beam center is aligned with the intersection of the crisscrossmark.

(6)Repeat steps (4) and (5) until the beam center is aligned with thecrisscross mark.Next, adjust the oscillator or bend mirror of the machine tool bymoving it so that the beam strikes the center of the bend mirror. Whenthis adjustment has been performed at installation, it subsequentlyneed not be performed.

11.2.3Alignment of the BeamFolding Unit


312

Fig. 11.2.3 (a) Corner reflectors unit (C1500B, C2000B, C2000C)


313

Fig. 11.2.3 (b) Corner reflectors unit (C3000C, C3000D, C4000A, Short optical path length type)


314

Fig. 11.2.3 (c) Corner reflectors unit (C3000C, Long optical path length type)

B--70125EN/03 A. EXTERNAL VIEWAPPENDIX

317

A EXTERNAL VIEW

APPENDIX B--70125EN/03A. EXTERNAL VIEW

318

Fig. A (a) C1500B (short optical path length type)


319

Fig. A (b) C1500B (long optical path length type)


320

Fig. A (c) C2000B (short optical path length type)


321

Fig. A (d) C2000B (long optical path length type)


322

Fig. A (e) C2000C (short optical path length type)


323

Fig. A (f) C2000C (long optical path length type)


324

Fig. A (g) C3000C (short optical path length type, resonator section)


325

Fig. A (h) C3000C (long optical path length type, resonator section)


326

Fig. A (i) C3000C (auxiliary equipment section)


327

Fig. A (j) C3000D (short optical path length type)


328

Fig. A (k) C3000D (long optical path B type)


329

Fig. A (l) C4000A (short optical path length type)


330

Fig. A (m) C4000A (long optical path B type)


331

Fig. A (n) C6000B

APPENDIX B--70125EN/03B. FANUC LASER C SERIES

SPECIFICATIONS

332

B FANUC LASER C SERIES SPECIFICATIONS

B--70125EN/03B. FANUC LASER C SERIES

SPECIFICATIONSAPPENDIX

333

ItemC1500B

(shortoptical path)

C1500B(long

optical path)

C2000B(short

optical path)

C2000B(long

optical path)

C2000C(short

optical path)

C2000C(long

optical path)

Type C1500B C2000B C2000C

Method High--speed axial carbon dioxide gas laser using high--frequency discharge excitation

Structure Combination resonator/power supply type

Rated laser output 1500W 2000W

Maximum laser output 1500W2000W (continuouslyvariable output rangeof 50 W or greater)

2000W (continuouslyvariable output rangeof 100 W or greater)

Pulse peak value —3300W (for 500 Hzor less and a duty

cycle of 50% or less)

2700W (for 500 Hzor less and a duty

cycle of 50% or less)

Output stability � 1% (for 8--hour rated output under output feedback control)

Laser wavelength 10.6 � m

Beam mode Low--order mode

Beam diameter(at oscillator outlet)

Approxi-mately24 mm

Approxi-mately20 mm

Approxi-mately27 mm

Approxi-mately23 mm

Approxi-mately27 mm

Approxi-mately23 mm

Polarization 45° linear polarization Circular polarization

Angle of beam divergence(full angle) 2 mrad

Pulse output commandfrequency 5 to 2000 Hz

Pulse output command dutycycle 0 to 100%

Laser gas

Composition CO2:He:N2 = 5:40:55(volume ratio with N2 balance) with a composition ratio accuracy of � 5%

Laser gas Gas pressure 0.175MPa (0.15 to 0.20MPa) measured with a gauge

Consumption 10 � /h

Flow rate 50 � /min 75 � /min

Cooling

Temperaturestability � 1 °C (for laser output stability of � 1%)

Coolingwater Circulating

water pressure 0.5MPa or less measured with a gauge

Recommendedcooling capacity 15.7kW or higher 22.1kW or higher

Power requirements 200 VAC +10%/--15%, 50/60 Hz � 1 Hz or 220 VAC +10%/--15%, 60 Hz � 1 Hz

Required input power 23KVA 33KVA

Interlock No

Hour meter Total number of hours exhaust pump has been operating

Electric shutter Provided

Mass Approximately 700 kg Approximately 800 kg Approximately 700 kg

APPENDIX B--70125EN/03B. FANUC LASER C SERIES

SPECIFICATIONS

334

Item C3000C(short optical path)

C3000C(long optical path)

C3000D(short optical path)

C3000D(long optical path)

Type C3000C C3000D


Structure Oscillator and auxiliary sectionsseparated from each other Combination resonator/power supply type

Rated laser output 3000W

Maximum laser output 3000W (continuously variable output range of 100 W or greater)

Pulse peak value 3300W 3800W (for 500 Hz or less and aduty cycle of 50% or less)





Approximately27 mm

Approximately24 mm

Approximately27 mm

Approximately24 mm

Polarization Circular polarization




Laser gas



Consumption 20 � /h 10 � /h

Flow rate 120 � /min

Cooling

Temperaturestability � 2 °C (for laser output stability of � 2%)

Coolingwater Circulating


Recommendedcooling capacity 33.7kW or higher


Required input power 44KVA

Interlock No



MassApproximately 900 kg (oscillator section)

Approximately 150 kg(auxiliary equipment section)

Approximately 800 kg

B--70125EN/03B. FANUC LASER C SERIES

SPECIFICATIONSAPPENDIX

335

Item C4000A(short optical path)

C4000A(long optical path) C6000B

Type C4000A C6000B


Structure Combination resonator/power supply type

Rated laser output 4000W 6000W

Maximum laser output 4000W 6000W

Pulse peak value 5000W (for a pulse width of 0.3 ms or more)





Approximately27 mm or less

Approximately24 mm or less Approximately 28 mm

Polarization Circular polarization 90° linear polarization 90° linear polarization




Laser gas



Consumption 10 � /h 40 � /h

Flow rate 160 � /min 250 � /min

Cooling

Temperaturestability 20 °C to 30°C/� 1°C (for laser output stability of � 2%) � 2 °C (for laser output

stability of � 2%)Coolingwater Circulating


Recommendedcooling capacity 41.9kW or higher 67.4kW or higher


Required input power 55KVA 90KVA

Interlock No



Mass Approximately 900 kg Approximately 1800 kg

APPENDIX B--70125EN/03C. ERROR CODE LIST

336

C ERROR CODE LIST

No.Contents Alarm level

16L 0LContents Alarm level

4061 661 Anomaly in AD converter 1 ALARM 1

4062 662 Anomaly in AD converter 2 ALARM 1

4063 663 Anomaly in RF/DC power unit ALARM 2

4065 665 Anomaly in shutter action ALARM 2

4066 666 There exists discharge tube withoutdischarge

ALARM 2

4067 667 Overheat in laser oscillator ALARM 1

4068 668 Reflected laser beam back into oscilla-tor

Shutter : closeBeam : offin LSTR

4069 669 Anomaly in power unit voltage of IFPCB

ALARM 1

4070 670 Anomaly in chiller unit ALARM 1

4071 671 Anomaly in assist gas unit Shutter : closeBeam : offin LSTR

4072 672 Shortage of cooling water ALARM 1

4073 673 Decrease of laser gas supply pressure ALARM 1

4074 674 Overheat in Roots blower ALARM 1

4075 675 Condensation ALARM 1

4076 676 Decrease of laser output ALARM 1

4077 677 Overheat in beam absorber ALARM 1

4078 678 Anomaly in discharge tube gas pres-sure control unit

ALARM 1

4079 679 Emergency button pressed ALARM 2

4080 680 Anomaly in exhaust pump/Leakage ingas flow system

ALARM 1

4081 681 Anomaly in gas pressure control ALARM 1

4082 682 Anomaly in pressure sensor ALARM 1

4083 683 Shutter not open (in beam on state) Shutter : closeBeam : offin LSTR

— 684 Anomalous selection of discharge tube ALARM 2

B--70125EN/03 C. ERROR CODE LISTAPPENDIX

337

No.Alarm levelContents

16LAlarm levelContents

0L

4085 685 Decrease of laser output ALARM 1

4087 687 Overheat in shutter mirror ALARM 2

4088 688 Decrease of discharge tube voltage ALARM 1

4089 689 Selection signal of assist gas not com-manded (in beam on state)

Shutter : closeBeam : offin LSTR

4090 690 Not in the state of oscillation (in beamon state)

in LSTR

4091 691 Anomaly in inverter ALARM 1

4094 — Vacuum pump operation abnormal ALARM 1

4099 695 Insufficient gas pressure ALARM 1

4100 — Inverter abnormal 1 ALARM 1

4101 — Inverter frequency reached signal ab-normal 1

ALARM 1

4103 — Turbo blower not at stop 1 ALARM 1

4105 — Turbo blower abnormal temperature 1 ALARM 1

4106 620 Turbo blower oil low ALARM 1

4107 621 External folding mirror not installed ALARM 2

4132 622 Parameter is changed ALARM 2

ALARM 2

PURGE : Completion state

MONITOR/TREAT

ALARM 1

MONITOR/TREAT

alarm?Yes

No

RESET

RUN ONSTART

LRDY : Discharge ready state

alarm?Yes

No

RESET

HV. ON

LSTR : Discharge ready state

START

Alarm treatment of FANUC LASER C series

APPENDIX B--70125EN/03D. PARAMETERS

338

D PARAMETERS

This appendix describes the parameters related to sequence control insidethe laser oscillator and laser cutting conditions for FS16--L, FS16i--L, andFS0--L.Many parameters are specific to one type of laser oscillator and onemachine. So, the user should always refer to the parameter data sheetdelivered with the machine when checking or modifying settings.A number from 15000 to 15999 indicates that the parameter is for Series16--L, and a number from 0200 to 0299 and from 3900 to 3999 indicatesthat the parameter is for Series 0--L.

Item PRM No.(Series 16--L)

[Oscillator] [machinig] Enabling/Disabling VariousFunctions

[Oscillator] Discharge Tube Selection

[machinig] Contouring Conditions

[machinig] Edge Machining Conditions

[machinig] Piercing Conditions

[machinig] High--Speed PiercingConditions

[machinig] Power Control

[machinig] Assist Gas Pressure AndTime Setting

[Oscillator] Laser Maintenance TimingIndication Functions

[Oscillator] Oscillator Control

[Oscillator] Discharge

[Oscillator] Gas Pressure Control (1)

[Oscillator] [machinig] Highly Reflective MaterialAlarm

[Oscillator] Laser Power/Voltage Drop

[Oscillator] Power Table Setting

[Oscillator] Automatic Aging Function

[machinig] Tracing (Detection)

[machinig] Constant Optical PathLength Control

[Oscillator] Laser Gas Mixing Function

[Oscillator] Gas Pressure Control

15000 or later

15025 or later

15040 or later

15050 or later

15070 or later

15080 or later

15092 or later

15100 or later

15150 or later

15200 or later

15220 or later

15240 or later

15265 or later

15270 or later

15280 or later

15320 or later

15500 or later

15700 or later

15710 or later

15800 or later

NOTE16--L, 16i--L

(15000 to 15999)

0--L (0200 to 0299,3900 to 3999)

Parameter description

B--70125EN/03 D. PARAMETERSAPPENDIX

339

Parameter numbers starting from 15000 are used for the FS16--L orFS16i--L. Those starting from 0200 or 3900 are used for the FS0--L.

No. Parameter description

#715000

#6 #5FLT

FLT

#4CLB

CLB

#3BMO

BMO

#2AGA

AGA

#1LGC

LGC

#0LPC

LPC0200

FLT 1 : filter in power control valid (standard)0 : InvalidThis function is enabled when the power control function (bit 0 of PRMNo. 15000 [200]) is enabled. A specified feedrate is used as a feedrate forpower control, but the actual feedrate of the machine inacceleration/deceleration is generally lower than the specified value.With larger machines, the difference between the specified feedrate andactual feedrate is larger, so power control using a specified feedrate maybe degraded. This function is provided to bring the specified feedratecloser to the actual feedrate by approximating the transfer function of themachine to the primary system. When this bit is set to 1, the primary delayfilter is activated.

CLB 1 : Power compensation enabled (standard)0 : Power compensation disabledWhen this bit is set to 1, power compensation, which measures thevariation of oscillator power characteristics, is performed for the time (3minutes usually) set in PRM No. 15205 [3991] after turning on HV. Theactual power immediately before the termination of power compensationis compared with the specified power value, then the requiredcompensation is automatically set in PRM No. 15204 [241]. When thisbit is set to 0, power compensation is not performed. In this case, 1024 isautomatically set in PRM No. 15204 [241].

BMO 1 : Beam on only with beam off in manual mode valid (for maintenance)0 : Invalid (usually)When output is commanded usually, beam comes out with shutteropened. When this bit is set as 1, beam is obtained internally with shutterclosed in manual mode

AGA 1 : Assist gas preparation check with beam on invalid (for maintenance)0 : Valid (usually)When assist gas is not prepared, commanding beam output leads to alarmNo. 683 usually. However, if this bit is set as 1, beam output can beobtained without preparation of assist gas.

D.1PARAMETERS FORENABLING/DISABLING VARIOUSFUNCTIONS


340

LGC 1 : Two stage gain selection of intra--tubePressure control valid (usually)

0 : Invalid(When this bit is 1, PRM No. 15245 [207] becomes valid.)

When this bit is 1, different control gains are used in the pressure controlin discharge start preparation completion state (LRDY) and in oscillate orpreparation completion state (LSTR) in controlling pressure of gas flowsystem

LPC 1 : Power control valid0 : InvalidThis is the function by which laser output is controlled by changing dutyin accordance with the acceleration and deceleration of work table/nozzle.Set according to the instruction of machine builder.

#715001

#6LHC

LHC

#5 #4PC8

PC8

#3NGC

#2PES

PES

#1GOB

#0EXA

EXA3978

#73981

#6NGC

#5 #4 #3 #2 #1 #0

EXA 1 : Selects up to 7 types of assist gas.0 : Selects up to 3 types of assist gas (standard).This parameter allows the user to select up to seven types of assist gas orup to three types of assist gas. When this bit is set to 0, the assist gas selectsignals (AG1, AG2, and AG3) correspond to the commands on aone--to--one basis. When this bit is set to 1, the assist gas select signals arecoded before output.

GOB 1 : Outputs a beam when G00 is specified.0 : Does not output when G00 is specified.

PES 1 : Ignores piercing time in MLK or DRN.0 : Does not ignore piercing time in MLK or DRN (standard).When a program is checked in the machine lock or dry run mode, piercingtime (G24) can be ignored.

NGC 1 : Presets an integral gas pressure control value.0 : Does not preset an integral gas pressure control value.

PC8 1 : Enables step--like power calibration: C6000A0 : Disables step--like power calibration. (as usual)

LHC 1 : Controls the oscillator with external signals.0 : Does not control the oscillator with external signals (standard).In the automatic operation mode, external signals can be used to turn onand off the shutter and beam output.


341

#715002

#6PSH

C10M

#5

BMA

#4 #3 #2PCG

GVW

#1ADC

#0BMA

3979

BMA 1 : Enables beam output with the shutter closed in the automaticoperation mode (for maintenance).

0 : Disables beam output with the shutter closed in the automaticoperation mode (standard).

PCG 1 : Performs high--speed piercing even when H is not specified in a G24block.

0 : Does not perform high--speed piercing when H is not specified in aG24 block.

PSH 1 : Uses four of the six discharge tubes.0 : Uses all discharge tubes.

GVW 1 : Enables evacuation when RUN is turned off (standard).0 : Disables evacuation when RUN is turned off (for maintenance).

C10M 1 : C1500B or C2000B0 : Other than above

ADC 1 : Identifies AD conversion--2 data with a DI signal.0 : Identifies AD conversion--2 data with a select signal.

#7C6015003

#6TR1

#5TON

#4 #3IVT

BPV

#2GVW

#1HPT

PCST

#0TIV

IVT3980

TIV 1 : Inverts the sign (+/--) of the amount of tracing displacement.0 : Does not invert the sign (+/--) of the amount of tracing displacement.

HPT 1 : Does not rewrite parameter settings for extending or shorteningpiercing.

0 : Rewrites parameter settings for extending or shortening piercing.GVW 1 : Enables evacuation when RUN is turned off (standard).

0 : Disables evacuation when RUN is turned off (for maintenance).IVT 1 : Oscillator with an inverter.

0 : Oscillator without an inverter.TON 1 : Oscillator with a turbo blower.

0 : Oscillator without a turbo blower.TR1 1 : Uses one turbo blower.

0 : Uses two turbo blowers.C60 1 : Up to sixteen discharge tubes are used.

0 : Up to eight discharge tubes are used (standard).PCST 1 : Uses the power control function.

0 : Does not use the power control function.When this bit is set to 1, the setting of bit 0 of PRM No. 15000 [200] isvalid.

BPV 1 : Opens the bypass valve during power calibration: C1500B, C2000B,C2000C, C3000C, C3000D, C4000A

0 : Closes the bypass valve during power calibration.


342

#7CWY15004

#6ECH

#5 #4EDG

#3BMC

#2SPB

#1STC

#0AGC

AGC 1 : Controls machining pressure for the set time.0 : Uses a flow pattern.

STC 1 : Controls the shutter with an external signal.0 : Controls the shutter with a G code.

SPB 1 : Outputs no beam in skip operation.0 : Outputs a beam in skip operation.

EDG 1 : Does not turn the beam off when switching the assist gas during edgemachining.

0 : Turns the beam off when switching the assist gas during edgemachining.

ECH 1 : Clears the active E number upon reset.0 : Does not clear the active E number upon reset.

CWY 1 : A CW--YAG laser oscillator is used.0 : A CO2 laser oscillator is used.

BMC 1 : Enables gas flow rate reduction.0 : Disables gas flow rate reduction.

#7DLY15005

#6ITR

NGC

#5

NCS

#4

TTD

#3BPV

#2TTD

#1NCS

#0INB

3981

INB 1 : Stops beam output upon completion of pulse distribution.0 : Stops beam output upon completion of in--position check.

NCS 1 : Oscillator sequence is compatible with a turbo blower.0 : Oscillator sequence is compatible with a Roots blower.This parameter is valid when PRM No. 15003 bit 5 [3980 bit 5], used tospecify whether a turbo blower is used, is set to 1.

TTD 1 : Each laser power supply drives two discharge tubes.0 : Each laser power supply drives only one discharge tube.

BPV 1 : Closes the bypass valve during power calibration.0 : Opens the bypass valve during power calibration: C1500B, C2000B,

C2000C, C3000C, 3000D, C4000AITR 1 : Enables the tracing control interlock signal (G227#6 *TRIL).

0 : Disables the tracing control interlock signal (G227#6 *TRIL).NGC 1 : Presets an integral gas pressure control value.

0 : Does not preset an integral gas pressure control value.DLY 1 : Enables the beam output condition delay function.

0 : Disables the beam output condition delay function.


343

#715006

#6 #5 #4PCL

#3 #2PIN

#1TRM

#0

TRM 1 : Disables the start--point and end--point soft keys for the trace settingscreen.

0 : Enables the start--point and end--point soft keys for the trace settingscreen.

PIN 1 : Specifies a G13 address using inch input.0 : Specifies a G13 address using metric input.

PCL 1 : On--screen pressure display in MPa.0 : On--screen pressure display in kgf/cm2.

#7RMP15008

#6EGE

#5 #4 #3SOC

#2TAL

#1GPC

#0MST

MST When tracing is specified:1 : If a reference displacement amount is specified with a plus sign, a

movement is made away from the workpiece, and if a referencedisplacement amount is specified with a minus sign, a movement ismade toward the workpiece.

0 : If a reference displacement value is specified with a plus sign, amovement is made toward the workpiece, and if a referencedisplacement value is specified with a minus sign, a movement ismade away from the workpiece.

GPC 1 : Tracing control is exercised using a gap amount (distance from thenozzle to the workpiece).

0 : Tracing control is exercised using a reference displacement amount.TAL When TRCKM (G225#2) = 1:

1 : Both the tracing out--of--range alarm and the tracingexcessive--displacement alarm are masked.

0 : The tracing out--of--range alarm only is masked.SOC When the machining condition setting function is used:

1 : A reference displacement amount for tracing control is used as areference displacement amount for piercing only during piercing.

0 : A reference displacement amount for tracing control is used as areference displacement amount for piercing during operation otherthan machining.

EGE 1 : Enables the automatic aging function.0 : Disables the automatic aging function.

RMP 1 : With the ramping function, a travel distance measurement is madeconsidering an up/down step distance and specified feedrate value.

0 : With the ramping function, a travel distance measurement is madeconsidering an up/down step distance.


344

#7TEM15009

#6BCG

#5BEM

#4AFZ

#3BS2

#2BS1

#1AS2

#0AS1

This parameter is used for the laser gas mixing function to record andmonitor the operating state of the mixer. This parameter is automaticallyset, so this parameter need not be set manually.

AS2,AS1 The state of tank A is indicated.AS2 AS1 :0 0 Tank A is being filled with gas.0 1 Gas is being mixed in tank A.1 0 Gas is being supplied from tank A.1 1 A preparation is being made to fill tank A with gas.

BS2,BS1 The state of tank B is indicated.BS2 BS1 :0 0 Tank B is being filled with gas.0 1 Gas is being mixed in tank B.1 0 Gas is being supplied from tank B.1 1 A preparation is being made to fill tank B with gas.

AFZ 1 : Does not include the Z--axis in calculation for actual feedrate display.0 : Includes the Z--axis in calculation for actual feedrate display.

BEM 1 : Gas cylinder supply pressure is normal.0 : Gas cylinder supply pressure has dropped.

BCG 1 : The gas cylinder is not replaced.0 : The gas cylinder is replaced.

TEM 1 : The tank supply pressure is normal.0 : The tank supply pressure has dropped.

#715011

#6 #5 #4 #3 #2 #1 #0EDS

EDS 0 : During return distance execution in edge machining or start--upmachining, the conventional cutting condition is used.

1 : During return distance execution in edge machining or start--upmachining, the laser power, assist gas type, and assist gas pressure ofthe piercing condition for edge machining are used.


345

#7PS815025

#6PS7

#5PS6

#4PS5

#3PS4

#2PS3

#1PS2

#0PS1

#7PS1615026

#6PS15

#5PS14

#4PS13

#3PS12

#2PS11

#1PS10

#0PS9

PS1 -- 16 Discharge tube selection when half of the discharge tubes are used

[How to set] Select desired discharge tubes when half of the discharge tubes integratedin the oscillator are used. Set the bit for each discharge tube to be usedto 1, and set the other bits to 0.

[Standard setting] Refer to the parameter data sheet delivered with the machine. Set PS9 toPS16 to 0.

#7PS815027

#6PS7

#5PS6

#4PS5

#3PS4

#2PS3

#1PS2

#0PS1

#7PS1615028

#6PS15

#5PS14

#4PS13

#3PS12

#2PS11

#1PS10

#0PS9

PS1 -- 8 Discharge tube selection when all discharge tubes are used

[How to set] Select desired discharge tubes when all discharge tubes integrated in theoscillator are used. Set the bits for discharge tubes to be used to 1 inascending order of bit numbers, and set the other bits to 0.

[Standard setting] Refer to the parameter data sheet delivered with the machine. Set PS9 toPS16 to 0.

#7PS80202

#6PS7

#5PS6

#4PS5

#3PS4

#2PS3

#1PS2

#0PS1

PS1 -- 8 Discharge tube selection when four discharge tubes are used

PS1 -- 8 :Discharge tube selection when the number is 4.

[How to set] Among 4 and 8 tubes four tubes can be selected.

Set the bits for the tubes to use as 1, and others as 0.

[Standard setting] Refer to the parameter data sheet delivered with the machine.

#7PS80203

#6PS7

#5PS6

#4PS5

#3PS4

#2PS3

#1PS2

#0PS1

PS1 -- 8 Discharge tube selection when six discharge tubes are used

PS1 -- 8 :Discharge tube selection when the number is 8.

[How to set] All the tubes of 8 ones are to be used. Set all the bits as 1.


D.2PARAMETERS FORDISCHARGE TUBESELECTION


346

15040 LPWR

LPWR0204

LPWR Power output setting for contour processing (cutting/welding)(Setting data)

[Setting range] 0 to 7000

[Unit] WATT

[How to set] This parameter can be set in laser setting screen and processing program.

15041 LHZ

LHZ0205

LHZ Pulse frequency setting for contour processing (cutting/welding)(Setting data)


[Unit] Hz


15042 LDTY

LDTY0206

LDTY Pulse duty ratio setting for contour processing (cutting/welding)(Setting data)


[Unit] %


D.3PARAMETERS FORCONTOURINGCONDITIONS


347

15050 EDANG

EDANG Edge detection angleA corner is assumed to be present when the angle formed by two blocks issmaller than the specified angle.


[Unit] deg

15051 PCPWR

PCPWR Peak piercing power valueSet a peak power value for piercing to be performed at the top of a corner.


[Unit] WATT

15052 PCPFRQ

PCPFRQ Piercing pulse frequencySet a pulse frequency for piercing to be performed at the top of a corner.


[Unit] Hz

15053 PCPDTY

PCPDTY Piercing pulse duty ratioSet a pulse duty ratio for piercing to be performed at the top of a corner.


[Unit] %

15054 EPCTIM

EPCTIM Piercing timeSet a piercing time used for piercing to be performed at the top of a corner.


[Unit] msec

15055 EPCAGP

EPCAGP Piercing assist gas pressureSet an assist gas pressure for piercing to be performed at the top of acorner.

D.4PARAMETERS FOREDGE MACHININGCONDITIONS


348


[Unit] 0.01 MPa

15056 EPCAGS

EPCAGS Type of piercing assist gasSet a type of assist gas to be used for piercing.


15057 ERTLGH

ERTLGH Return distanceSet a return distance from the top of a corner to the next block.


[Unit] 0.001 mm

15058 ERTF

ERTF Return feedrateSet a return feedrate to be used for movement from the top of a corner tothe next block.


[Unit] 1 mm/min

15059 ERTPWR

ERTPWR Peak return power valueSet a peak return power value to be used for movement from the top of acorner to the next block.


[Unit] WATT

15060 ERTFRQ

ERTFRQ Return frequencySet a return frequency to be used for movement from the top of a corner tothe next block.


[Unit] Hz

15061 ERTDTY

ERTDTY Return duty ratioSet a return duty ratio to be applied to movement from the top of a cornerto the next block.


[Unit] %


349

15070 LPWRP

LPWRP0227

LPWRP selection of laser power for piercing (Setting data)


[Unit] WATT

[How to set] This parameter can be set in laser setting screen or processing program.

15071 LHZP

LHZP0228

LHZP Selection of pulse frequency for piercing (Setting data)


[Unit] Hz

[How to set] This parameter can be set in laser setting screen or in processing program.

15072 LDTYP

LDTYP0229

LDTYP Selection of pulse duty for piercing (Setting data)


[Unit] %

[How to set] This parameter can be set in laser setting screen or in processing program.

15073 PEASTM

PEASTM3998

PEASTM Piercing time (Setting data)This parameter sets a time to be used for piercing.


[Unit] msec

[How to set] This parameter can be set using G24 in a machining program.

D.5PARAMETERS FORPIERCINGCONDITIONS


350

15080 HPPWR

HPPWR High--speed piercing power


[Unit] Watt

15081 HPFRQ

HPFRQ Initial high--speed piercing frequency


[Unit] Hz

15082 STFRQ

STFRQ Incremental high--speed piercing frequency


[Unit] Hz

15083 HPDTY

HPDTY Initial high--speed piercing duty ratio


[Unit] %

15084 STDTY

STDTY Incremental high--speed piercing duty ratio


[Unit] %

15085 STPTM

STPTM High--speed piercing step time


[Unit] msec

D.6PARAMETERS FORHIGH--SPEEDPIERCINGCONDITIONS


351

15086 STPNM

STPNM Number of high--speed piercing steps


15087 HPTIM

HPTIM High--speed piercing end time


[Unit] msec


352

#715088

#6 #5 #4 #3 #2 #1 #0IPC

IPC For power control mode specification (models A and B):0 : The format for specifying S and F in the same block is used.1 : The format for specifying G63 or entering the external signal

(G224#1) is used.

#7LP815089

#6LP7

#5LP6

#4LP5

#3LP4

#2LPZ

#1LPY

#0LPX

LP* 0 : Does not use the *--axis for speed calculation with the power controlfunction.

1 : Uses the *--axis for speed calculation with the power control function.

When no axis is specified, the specification of the first axis (LPX) and thesecond axis (LPY) is assumed for operation.Usually, specify those axes that are used for interpolation. Do not specifyaxes such as a PMC axis and synchronous axis for simple synchronouscontrol.

15090 Minimum output power

[Unit] W


15091 Minimum pulse frequency

[Unit] Hz


15092 LDTYLW

LDTYLW0245

LDTYLW Duty lower limit (Setting data)When PRM No. 15000 [200]/bit 0 is valid, power control is performed bythis value.If the duty cycle is reduced according to the feedrate, the specification of avalue less than this value will cause this value to be clamped.


[Unit] %

[How to set] This parameter can be set using the laser setting screen.

D.7PARAMETERS FORPOWER CONTROL


353

15093 LDTY0

LDTY00244

LDTY0 Power control constantWhen power control has been enabled with bit 0 of PRM No. 15000 [200],power control is performed according to the value of LDTY0. LDTY0 isused to specify the duty ratio when the feedrate is 0, thus enablingmodification of the rate at which the duty ratio is varied according to thefeedrate.

Dm

Fm0

LDTY0

Feedrate (F)

Programmed valueDuty ratio (%)


[Unit] %

[Standard setting] 10

15094 PCTC

PCTC0263

PCTC Power control filter time constantWhen power control (LPWC) has been enabled with bit 0 of PRM No.15000 [200] and the power control filter has also been enabled, PCTC isused as the time constant used to vary the pulse duty ratio, based on theprimary delay, during power control.


[Units] msec


15095 Allowable variation in power control speed

This parameter specifies the amount by which the power control speed isallowed to vary.


354

#715096

#6 #5 #4 #3 #2PCD

#1PCF

#0PCP

PCP 0 : Does not exercise feedrate--based output control in newly specifiedpower control.

1 : Exercises feedrate--based output control in newly specified powercontrol.

PCF 0 : Does not exercise feedrate--based frequency control in newlyspecified power control.

1 : Exercises feedrate--based frequency control in newly specified powercontrol.

PCD 0 : Does not exercise feedrate--based duty cycle control in newlyspecified power control.

1 : Exercises feedrate--based duty cycle control in newly specified powercontrol.

15097 Parameter for output inclination calculation (output when feedrate F = 0)

[Unit] W


15098 Parameter for frequency inclination calculation (frequency when feedrate F = 0)

[Unit] Hz


15099 Parameter for duty cycle inclination calculation (duty cycle when feedrate F = 0)

[Unit] %



355

15100 LAGASL

LAGASL0214

LAGASL Selection of assist gas (Setting data)


[How to set] This parameter can be set either in laser setting screen or in materialprocessing program.

15101 LAFWSL

LAFWSL0225

LAFWSL Selection of flow pattern (Setting data)

[Setting range] 1, 2, 3

[How to select] This parameter an be set in either laser setting screen or processingprogram.

15102 LPRE1

LPRE10208

15103 LPRE2

LPRE20209

15104 LPRE3

LPRE30210

LPRE1, 2, 3 Pre--flow time 1, 2, 3 (Setting data)


[Unit] 10 msec

[How to set] This parameter can be set in laser setting screen.

15108 LAFT1

LAFT10211

15109 LAFT2

LAFT20212

15110 LAFT3

LAFT30213

LAFT1, 2, 3 After--flow time 1, 2, 3 (Setting data)


[Unit] 10 msec


D.8PARAMETERS FORASSIST GASPRESSURE ANDTIME SETTING


356

15114 LAGPR1

LAGPR10215

15115 LAGPR2

LAGPR20216

15116 LAGPR3

LAGPR30217

LAGPR1, 2, 3 Pre--flow pressure 1, 2, 3 (Setting data)


[Unit] 0.01 MPa


15120 LAGEX1

LAGEX10218

15121 LAGEX2

LAGEX20219

15122 LAGEX3

LAGEX30220

LAGEX1, 2, 3 Processing flow pressure 1, 2, 3 (Setting data)


[Unit] 0.01 MPa


15126 LAGAF1

LAGAF10221

15127 LAGAF2

LAGAF20222

15128 LAGAF3

LAGAF30223

LAGAF1, 2, 3 After flow pressure 1, 2, 3 (Setting data)


[Unit] 0.01 MPa



357

15132 AGPST

AGPST3990

AGPST Maximum assist gas pressureSet an assist gas pressure (MPa) at which 12.5 V is output.


[Unit] MPa


15135 AGTIM

AGTIM Assist gas pressure set timeSet a desired assist gas pressure set time.


[Unit] 10 msec

15136 AGPRS

AGPRS Assist gas pressureSet a desired assist gas pressure.


[Unit] 0.01 MPa

15137 AGTIP

AGTIP Assist gas pressure set time for piercingSet a desired assist gas pressure set time for piercing.


[Unit] 10 msec

15138 AGPRSP

AGPRSP Assist gas pressure for piercingSet a desired assist gas pressure for piercing.


[Unit] 0.01 MPa


358

15150 LTTIME

LTTIME0187

LTTIME Laser RUN ON timeA cumulative RUN ON time is automatically set.


[Unit] 0.1 hourStandard setting: Automatically set

15151 VPTIME

VPTIME Vacuum pump operation timeA cumulative vacuum pump operation time is automatically set.


[Unit] 0.1 hour

[Standard setting] Automatically set

15152 SHTTIM

SHTTIM Shutter alarm mask timeSet a time from when shutter operation is directed until shutter alarmmonitoring starts.


[Unit] msec

D.9PARAMETERS FORLASERMAINTENANCETIMING INDICATIONFUNCTIONS


359

15200 LPCMD1

LPCMD1 Power used for power compensation factor determination when half of thedischarge tubes are usedSet a power to find the power compensation factor when half of thedischarge tubes are used.


[Unit] WATT


15201 LPCMD2

LPCMD2 Power used for power compensation factor determination when alldischarge tubes are usedSet a power to find the power compensation factor when all dischargetubes are used.


[Unit] WATT


0230 LPCMD1

LPCMD1 Power command for power calibration in mode of 2 discharge tubes.This is power command for power calibration in mode of 2 discharge tubeDuty is 100%


[Unit] WATT


0231 LPCMD2

LPCMD2 Power command for power calibration in mode of 4 discharge tubes.This is power command for power calibration in mode of 4 dischargetubes.Duty is 100%.


[Unit] WATT

[Standard setting] Refer to the parameter data sheet delivered with the machine

D.10PARAMETERS FORTHE OSCILLATOR


360

0232 LPCMD3

LPCMD3 Power command for power calibration in mode of 8 discharge tubes.This is power command for power calibration in mode of 8 dischargetubes.Duty is 100%.


[Unit] WATT


15203 MRLMT

MRLMT0240

MRLMT Power calibration limitThis is upper limit of power calibration When the value set for exceedsthis value, alarm appears and warms the decrease of laser power.


[Unit] 1/1024


15204 CAL

CAL0241

CAL Power calibration coefficientThis is to calibrate command power for real power. This parameter isautomatically set in power calibration after RUN start.


[Standard setting] (automatic setting)

15205 PCLBTM

PCLBTM3991

PCLBTM Power compensation timeSet a power compensation time.


[Unit] sec


15206 LPWRTC

LPWRTC Time constant of the filter used for laser power variation suppressionIf a value less than 8 is specified, the filter does not function.


[Unit] msec


361

15207 PCLMT

PCLMT3986

PCLMT Maximum specifiable powerIf a specified laser power after power compensation and power feedbackprocessing exceeds the setting in this parameter, the laser power isclamped to the setting.


[Unit] WATT


15208 PFBGN

PFBGN0233

PFBGN Laser power feedback gainThis is the gain with which power feedback is done only in continuouswave mode (DUTY = 100%).


[Unit] 1/1024


15209 PFBCP

PFBCP0234

PFBCP Power feedback clampThis is the clamp to limit laser power in feedback control only incontinuous mode (DUTY = 100%).


[Unit] WATT


15210 LPWMAX

LPWMAX0238

LPWMAX Maximum command powerThis is power clamp when power command is greater than this value.Here power command includes power override.


[Unit] WATT


15211 LPIMIN

LPIMIN0239

LPMIN Minimum command powerThis is power clamp (including power override) when power command issmaller than this value.



362

[Unit] WATT


15212 PPCLMT

PPCLMT Maximum specifiable power when the duty ratio is not clampedIf PRM No. 15213 does not clamp the duty ratio to 50%, and a specifiedpower after power compensation and power feedback processing exceedsthe setting in this parameter, the power is clamped to the setting.

If the duty ratio is clamped by PRM No. 15213, the power is clamped tothe value specified with PRM No. 15207.


[Unit] WATT

15213 PPWMAX

PPWMAX Duty ratio clamp criterionWhen a specified power multiplied by an override value exceeds the valueset in this parameter, the duty ratio is clamped to 50% (fixed value), andthe peak value is clamped to the value set in PRM No. 15210.


[Unit] WATT

15215 PWCM

PWCM0259

PWCM Power input calibration coefficient

The laser power is monitored through the rear mirror. This parameterspecifies the calibration coefficient used to convert the monitored value tothe actual laser power, as output from the output mirror.

[Setting range] 102 (0.1 × 210) to 10240 (10 × 210)

[Units] 1/1024


NOTEIf 0 is specified, 1024 (1 × 210) is assumed.

15216 TCNST

TCNST0262

TCNST Power display filter time constantThis is the filter time constant with which fluctuation in power display issuppressed.


[Unit] msec



363

15220 LVICMD

LVICMD0247

LVICMD Maximum bias command at discharge startDischarge current command is given when discharge start signal (HVON)is commanded in discharge preparation completion (LRDY) state to startdischarge. This command is increased by ramp.Command to the value set by this parameter 6.sec after the start of HVON.


[Unit] mV

[Standard setting] Refer to attached parameter sheet because this must be proper to themachine.

15221 LVBEAM

LVBEAM0248

LVBEAM Voltage for conforming dischargeAll the discharge tubes must be in discharge after discharge start waitingtime (PRM 15222 [249]), which is after bias command of discharge startbecoming maximum (PRM 15220 [247]). This discharge state is checkedby monitoring tube voltage.When monitored voltage is lower than this value, the tube is confirmed itsdischarge.When the voltage is higher than this value, alarm No. 666 appears.


[Unit] V

[Standard setting] Refer to attached parameter sheet.

15222 LWTBMS

LWTBMS0249

LWTBMS Discharge waiting timeIn discharge start bias command is maintained as maximum during thistime.After this time tube voltage is compared with PRM No. 15221 [248] tocheck the state of discharge.


[Unit] 10 msec


D.11PARAMETERS FORDISCHARGE


364

15223 LVCMD

LVCMD0250

LVCMD Bias command in oscillator preparation completion stateAfter the start of discharge is confirmed, the bias voltage of dischargecurrent command is replaced by this parameter. This replacement isperformed during a rise in the gas pressure (time set with parameter No.15249: FS16--L, FS16i--L, or 20 sec: FS0--L).


[Unit] mV


15224 VD

VD Modulation voltageThis parameter specifies a voltage value by which the normal biascommand value is decreased with the base modulation function.


[Unit] mV

15225 TD

TD Modulation timeThis parameter specifies a time for which the bias command value isdecreased with the base modulation function.

[Setting range] 10 msec

[Unit] 100 mS


365

15240 LEXPS

LEXPS0235

LEXPS Negative pressure in exhaust completionThis is the ultimate vacuu when gas flow system is evacuated in laser

[Starting range] 0 to 32767

[Unit] ×13 Pa


15241 LPIPS

LPIPS0237

LPIPS Intra--tube pressure in discharge startThis is intra--tube gas pressure in discharge preparation completion(LRDY) state.


[Unit] ×13 Pa

[Standard setting] 300: C1500B, C2000B240: C3000C200: C2000C, C3000D, C4000A, C6000B

15242 LPPS

LPPS Tube pressure for oscillation (50 Hz)This parameter specifies the gas pressure inside the discharge tube in thelaser oscillation ready state (LSTR).

[Unit] ×13 Pa


15243 LPPS60

LPPS60 Tube pressure for oscillation (60 Hz)This parameter specifies the gas pressure inside the discharge tube in thelaser oscillation ready state (LSTR).

[Unit] ×13 Pa


D.12PARAMETERS FORGAS CONTROL (1)


366

0236 LPPS

LPPS Intra--tube pressure during oscillationThis is intra--tube gas pressure in laser preparation completion (LSTR)state.

[Unit] ×13 Pa


15244 LCCGN

LCCGN0264

LCCGN Gas pressure control gainThis is the gain to feedback control the intra--tube laser gas pressure.


[Unit] 1/1024


15245 LCCGNH

LCCGNH0207

LCCGNH Intratube pressure control gain 2Set pressure control gain in discharge start preparation completion(LRDY).When PRM No. 15000 [200]/bit1 is 1, this parameter is valid.


[Unit] 1/1024


15246 LCCGNI

LCCGNI0246

LCCGNI Pressure control integration gainThis is feedback integration gain for gas pressure control.


[Unit] 1/1024


15247 IPVST

IPVST4398

IPVST Integral element preset valueSet a value for presetting a gas pressure change value and integralelement.

[Setting range] --32767 to 32767



367

15248 GPNRAV

GPNRAV4399

GPNRAV Allowable gas pressure insufficiencyThe insufficient gas pressure alarm is issued when the gas pressure in thedischarge tube does not reach [(specified tube pressure for oscillation) --(this allowable value)].


[Unit] ×13 Pa


15249 GPRST

GPRST Gas pressure increase timeThis parameter specifies a gas pressure increase time in sequence 27.


[Unit] sec


15255 VENWT

VENWT3994

VENWT RUN ON evacuation time

This parameter specifies the time between the three--way valve beingopened and the exhaust valve being opened, when the laser is turned on.


[Units] sec


15256 GEVWT

GEVWT3995

GEVWT RUN OFF evacuation time

When the oscillator is turned off, the gear box is evacuated prior to purge.This parameter specifies the time required for evacuation. The minimumtime is fixed to 600 seconds. Therefore, specify a value of at least 600.


[Units] sec



368

15257 VIBCNT

VIBCNT Number of abnormal vibrations detectedIf the number of abnormal vibrations detected exceeds the value specifiedin this parameter, an abnormal vibration alarm is issued.


[Unit] Number


15258 LGPTC

LGPTC Time constant of the filter used for laser gas pressure variationsuppression


[Unit] msec

If a value less than 16 is specified, the filter does not function.

15259 EXTM

EXTM Exhaust time when RUN is ONSet a desired evacuation time when RUN is ON.


[Unit] sec


15260 OPVTM

OPVTM3997

OPVTM Period when the exhaust value of the external pipe is openSet the time the exhaust valve of the external pipe is open. When a timebeyond 60 sec is specified, the time is clamped to 60 sec.


[Unit] sec



369

15265 PWRUP

PWRUP3982

PWRUP Maximum allowable power increaseIf the actual power exceeds the specified power by the value specified inthis parameter, a beam reflection error is reported.


[Unit] WATT

[Standard setting] Refer to the prameter data sheet delivered with the machine.

15266 ALPUPL

ALPUPL3983

ALPUPL Maximum allowable powerIf the actual power exceeds the value set in this parameter, a beamreflection error is reported.


[Unit] WATT

[Standard setting] Refer to the prameter data sheet delivered with the machine.

D.13PARAMETERS FORHIGHLY REFLECTIVEMATERIAL ALARMS


370

15270 NRMLTV

NRMLTV0199

NRMLTV Discharge tube voltage in normal operationIn this parameter, the voltage to be applied to the discharge tube in normalbase discharge is set. The value set in this parameter serves as thereference voltage used for discharge tube voltage monitoring in the LSTRstate. The discharge tube voltage is automatically measured before thestart of power compensation factor processing. If the difference betweenthe measured value and the previously set NRMLTV value is found to bewithin the discharge tube voltage decrease limit specified in PRM No.15272 [242], the measured value is automatically set in this parameter.


[Unit] VOLT

[Standard setting] Automatically set

15271 PWRDP

PWRDP0242

PWRDP Power decrease limitWhen real power is lower than command power by more than this value,alarm appears.


[Unit] WATT


15272 TVOFST

TVOFST0243

TVOFST Discharge tube voltage decrease limitWhen tube voltage in oscillator preparation completion (LSTR) state islower than the value of PRM No. 15270 [199] by more than this value,alarm appears.


[Unit] VOLT


D.14PARAMETERS FORLASERPOWER/VOLTAGEDROP


371

15276 GCHTM

GCHTM3992

GCHTM Laser gas replacement timeSet a time for laser gas replacement in laser start operation.


[Unit] sec



372

15280 LPCPW1

15281 LPCPW2

LPCPW1 Table interval when half of the discharge tubes are usedSet a power command setting interval.



LPCPW2 Table interval when all discharge tubes are usedSet a power command setting interval.



0266 LPCPW2

0267 LPCPW3

LPCPW2 Table interval when four discharge tubes are used

Set a power command setting interval.



LPCPW3 Table interval when eight discharge tubes are used

Set the power command setting interval.



15290 LPCP10

LPCP200277

15291 LPCP11

LPCP210278

15292 LPCP12

LPCP220279

15293 LPCP13

LPCP230280

15294 LPCP14

LPCP240281

D.15PARAMETERS FORPOWER TABLESETTING


373

15295 LPCP15

LPCP250282

15296 LPCP16

LPCP260283

15297 LPCP17

LPCP270284

15298 LPCP18

LPCP280285

LPCP20--28 Power command in mode of 4 discharge tubesPower command is increased by increment of PRM No. 15280[266] formode of 4 discharge tubes starting from 0.


[Unit] WATT


15300 LPCP20

LPCP300286

15301 LPCP21

LPCP310287

15302 LPCP22

LPCP320288

15303 LPCP23

LPCP330289

15304 LPCP24

LPCP340290

15305 LPCP25

LPCP350291

15306 LPCP26

LPCP360292

15307 LPCP27

LPCP370293

15308 LPCP28

LPCP380294

LPCP30--38 Power command in mode of 8 discharge tubesPower command is increased by increment of PRM No. 15281[267] formode of 8 discharge tubes starting from 0.


[Unit] WATT



374

15320 LPCD

LPCD2C Command power for power compensation coefficient calculation (validwhen EGE = 1)If the automatic aging function is enabled, a power compensationcoefficient is calculated after aging ends.


[Unit] W


15321 LFCD2C

LFCD2C Oscillation frequency command for power compensation coefficientcalculation (valid when EGE = 1)


[Unit] Hz


15322 LDCD2C

LDCD2C Pulse duty cycle command for power compensation coefficientcalculation (valid when EGE = 1)


[Unit] %


15323 PCLTMC

PCLTMC Command time for power compensation coefficient calculation (validwhen EGE = 1)


[Unit] sec


D.16AUTOMATIC AGINGFUNCTION


375

15324 LPSC

LPSC Intra--tube pressure setting at oscillation time for power compensationcoefficient calculation (50 Hz) (valid when EGE = 1)For an oscillator with an inverter mounted, the same value as parameterNo. 15325 is to be set.This parameter specifies a value when an oscillator with no invertermounted is used in an area where the power supply frequency is 50 Hz.


[Unit] ×13 Pa


15325 LPS60C

LPS60C Intra--tube pressure setting at oscillation time for power compensationcoefficient calculation (60 Hz) (valid when EGE = 1)This parameter specifies a value when an oscillator with an invertermounted or an oscillator with no inverter mounted is used in an area wherethe power supply frequency is 60 Hz.


[Unit] ×13 Pa


15326 LPCD2E

LPCD2E Power command when aging is performed with the automatic agingfunction (valid when EGE = 1)


[Unit] W


15327 LECD2E

LFCD2E Oscillation frequency command for aging (valid when EGE = 1)This parameter specifies a frequency to be used when aging is performedwith the automatic aging function.


[Unit] Hz



376

15328 LDCD2E

LDCD2E Pulse duty cycle command for aging (valid when EGE = 1)This parameter specifies a duty cycle to be used when aging is performedwith the automatic aging function.


[Unit] %


15329 PLCTME

PLCTME Power command time for aging (valid when EGE = 1)This parameter specifies a command time for each aging operationperformed with the automatic aging function.


[Unit] sec


15330 LPSE

LPSE Gas pressure setting (50 Hz) for aging (valid when EGE = 1)Intra--tube pressure setting at oscillation time for aging with the automaticaging functionFor an oscillator with an inverter mounted, the same value as parameterNo. 15331 is to be set.This parameter specifies a value when an oscillator with no invertermounted is used in an area where the power supply frequency is 50 Hz.


[Unit] ×13 Pa


15331 LPS60E

LPS60E Gas pressure setting (60 Hz) for aging (valid when EGE = 1)Intra--tube pressure setting at oscillation time for aging with the automaticaging functionThis parameter specifies a value when an oscillator with an invertermounted or an oscillator with no inverter mounted is used in an area wherethe power supply frequency is 60 Hz.


[Unit] ×13 Pa



377

15332 LFCMD2

LFCMD2 Oscillation frequency command value for power compensation


[Unit] Hz


15333 LDCMD2

LDCMD2 Pulse duty cycle command during power compensation and aging


[Unit] %


15334 NES

NES Number of aging operations (valid when EGE = 1)This parameter specifies the number of times the aging sequence isexecuted. The number of aging operations (0 or 2 to 7) is automaticallyset, depending on the halt time, when the automatic aging function isenabled.

[Setting range] 0, 2 to 7 (Automatically set by the CNC)

15335 LOFTIMY

LOFTIMY Aging time data 1 (valid when EGE = 1)When the automatic aging function is enabled, the year when theoscillator was stopped previously is recorded.

[Setting range] 1 to 65535 (Automatically set by the CNC)

15336 LOFTIMM

LOFTIMM Aging time data 2 (valid when EGE = 1)When the automatic aging function is enabled, the month when theoscillator was stopped previously is recorded.


15337 LOFTIMD

LOFTIMD Aging time data 3 (valid when EGE = 1)When the automatic aging function is enabled, the day when the oscillatorwas stopped previously is recorded.



378

15338 LOFTIMH

LOFTIMH Aging time data 4 (valid when EGE = 1)When the automatic aging function is enabled, the hour when theoscillator was stopped previously is recorded.



379

15500 KE

KE0252

KE Detector gain factorThis parameter sets a gain factor for the displacement detector in Z--axistracing control.

[Setting range] 2048 (0.5 × 212) to 6144 (1.5 × 212)


NOTEThis parameter can be set on the tracer setting screen.

15502 EZR

EZR0253

EZR Detector zero--point compensationThis parameter sets a zero--point compensation value for displacementdetector zero--point compensation in Z--axis tracing control.

[Setting range] --32767 (--2048 ×24) to 32753 (2047 × 24)

[Unit] (0.001 × 2--4) mm

[Standard setting] Automatically set (0)

NOTEThis parameter can be set on the tracer setting screen.

15503 FILTT

FILTT0254

FILTT Time constant of the filterSet a time constant of the filter used to remove displacement disturbancecomponents in Z--axis tracing control.


[Unit] msec


D.17PARAMETERS FORTRACING(DETECTION)


380

15504 EMUL

EMUL0295

EMUL Displacement multiplication factorSet a displacement multiplication factor to match a greater value to bedetected in tracing control. (Usually, 1 is set.)

[Setting] 1 or 5


Set value Maximum displacement(mm)

Resolution(mm)

12345

� 2� 4� 6� 8

� 10

0.0010.0020.0030.0040.005


381

#715510

#6 #5TRA

#4 #3 #2 #1 #0

TRA 1 : Uses an absolute coordinate system to display the current position onthe tracer setting screen.

0 : Uses a relative coordinate system to display the current position onthe tracer setting screen.

D.18PARAMETERS FORTRACING (DISPLAY)


382

15510 INTGT

INTGT0255

INTGT Integral time constantSet an integral time constant for integral processing of deviations inZ--axis tracing control.


[Unit] msec


15511 ZRWTH

ZRWTH0256

ZRWTH Integral compensation zero widthSet a displacement for disabling integral processing in Z--axis control.Integral processing is not performed when:�Standardized displacement �� integral compensation zero width


[Unit] 0.001 mm


15512 ECLMP

ECLMP0297

ECLMP Integral clamp valueSet an integral clamp value for integral deviation processing in Z--axistracing control.


[Unit] 0.001 mm


D.19PARAMETERS FORTRACING (INTEGRALPROCESSING)


383

15520 ISOUT

ISOUT0257

ISOUT Phase compensation time constantSet a time constant for displacement phase compensation in Z--axistracing control.


[Unit] msec

[Standard setting] 0 (Values of less than 2 are invalid.)

15521 CMPG

CMPG0258

CMPG Phase compensation gainSet a gain for displacement phase compensation in Z--axis tracing control.


[Unit] 0.01 [1/sec]

[Standard setting] 0 (Values of less than 2 are invalid.)

D.20PARAMETERS FORTRACING (PHASECOMPENSATION)


384

15530 NMDEF

NMDEF0224

NMDEF Reference displacementSet a reference distance to be controlled from the quill top to a workpieceto be controlled in Z--axis tracing control.

[Setting range] PRM No. 15531 [260] to PRM No. 15532 [261]

[Unit] 0.001 mm

NOTEThis parameter can be set on the tracer setting screen or ina machining program.

15531 EMIN

EMIN0260

EMIN Minimum reference displacementSet the minimum specifiable reference displacement in Z--axis tracingcontrol.

[Setting range] 0 to � 32767

[Unit] 0.001 mm


15532 EMAX

EMAX0261

EMAX Maximum reference displacementSet the maximum specifiable reference displacement in Z--axis tracingcontrol.

[Setting range] 0 to � 32767

[Unit] 0.001 mm


15533 EOVR

EOVR0299

EOVR Excessive displacement detection valueAn excessive displacement alarm is issued when this value is exceeded bya standardized displacement in Z--axis tracing control.

D.21PARAMETERS FORTRACING(DISPLACEMENT)


385


[Unit] 0.001 mm


15537 EOVRS

EOVRS3987

EOVRS Detection displacement for issuing the tracing range exceeded alarmIn Z--axis tracing control, when the absolute value, �E, of a tracingdeviation (detection displacement (E) -- reference displacement (Eo))exceeds the value set in this parameter( ��E �� EOVRS), the tracing range exceeded alarm is issued because thesystem determines that the tracing range is exceeded.


[Unit] 0.001 mm


15538 EOVRTM

EOVRTM3988

EOVRTM Tracing range exceeded alarm detection mask timeWhen the reference displacement is changed, set a time for masking thetracing range exceeded alarm in a transient state. When the value set inthis parameter has elapsed, detection operation is resumed.


[Unit] msec


15539 EOVRD

EOVRD3989

EOVRD Detection compensation displacement for issuing the tracing rangeexceeded alarmThis displacement can be added to the specified value of EOVRS(detection displacement for issuing the tracing range exceeded alarm) fora detected displacement value in approaching (when detectiondisplacement (E) > reference displacement (Eo)) may be greater by thiscompensation displacement. As a result, the tracing range exceededalarm is issued when:�E � --EOVRS, (EOVRS+EOVRD) � �E


[Unit] 0.001 mm



386

15540 ZTCGM

ZTCGM0296

15541 WTCGM

WTCGM3984

15542 XTCGM

15543 YTCGM

ZTCGM Conversion factor for feedrate control voltage in Z--axis tracing control

WTCGM Conversion factor used to convert a voltage for feedrate specification inW--axis tracing control

XTCGM Conversion factor used to convert a voltage for feedrate specification inX--axis tracing control

YTCGM Conversion factor used to convert a voltage for feedrate specification inY--axis tracing control


Method of calculation:Use the following formula to find the conversion factor to set in thisparameter:

Conversion factor = G × P × 41000 × Le

× 2 × 10–3 × 4096

G : Tracing control loop gainLe : Amount of machine movement per motor revolution (mm/rev)P : Number of pulses detected by the pulse coder per motor revolution

(P/rev)

D.22PARAMETERS FORTRACING(FEEDRATECOMMAND)


387

15550 APRCH

APRCH0251

APRCH Approach completion detection rangeSet a range of displacements assumed to represent approach completionin Z--axis tracing control. Approach completion is assumed when thestate where displacements lie within a specified approach completiondetection range continues for the approach completion time interval(APINT) or longer.


[Unit] 0.001 mm


15551 APINT

APINT0298

APINT Approach completion time intervalWhen the state where displacements lie within the specified approachcompletion detection range continues for the time set in this parameter orlonger, approach completion is assumed in Z--axis tracing control.


[Unit] msec


15552 APRLEN

APRLEN3985

APRLEN Approach completion detection displacementSet an approach completion displacement in approach feed.


[Unit] 0.001 mm


15553 TRCFMAX

TRCFMAX Maximum allowable feedrate in approachingSet a maximum allowable feedrate in approaching.


[Unit] 1 mm/min


D.23PARAMETERS FORTRACING(APPROACH)


388

#7815700

#67

#56

#45

#34

#2Z

#1Y

#0X

X -- 8 Set axes required to calculate a move command for a mirror movementaxis.1 : Used for move command calculation0 : Not used for move command calculation

NOTESet the bits for nonexistent axes to 0.

#7815701

#67

#56

#45

#34

#2Z

#1Y

#0X

X -- 8 Selects a polarity for move command calculation for each axis whencalculating a move command for a mirror movement axis.1 : Selects the positive polarity for calculation.0 : Selects the negative polarity for calculation.

NOTESet the bits for nonexistent axes to 0.

#715702

#6 #5 #4 #3 #2 #1FMSW

#0TRAXC

TRAXC 1 : Includes tracing axis travel distance data in U--axis move commandcalculation in tracing control.

0 : Does not include tracing axis travel distance data in U--axis movecommand calculation in tracing control.

FMSW 1 : Enables constant optical path length control.0 : Disables constant optical path length control.

15703 MIRAXS

MIRAXS Axis selection for mirror movementSpecify mirror movement axes in this parameter. The X--axis, Y--axis,and Z--axis cannot be specified. If there is a simple synchronized axis, thefifth and later axes can be specified.


D.24PARAMETERS FORCONSTANT OPTICALPATH LENGTHCONTROL


389

15704 MIRCOM

MIRCOM Mirror block axis reference position compensationWhen correcting the mirror block axis position to obtain an optimumpropagation distance, set the distance from the origin in this parameter.

[Setting range] � 32767

[Unit] mm


15705 LRCRAT

LRCRAT Optical path length compensation factorThe travel distance along a mirror block axis is the total travel distancealong the axes set in PRM No. 15700 divided by the factor set in thisparameter.


[Unit] 1/64



390

15710 BMBCTM

BMBCTM4390

BMBCTM External piping exhaust time


[Unit] sec

[Standard setting] 10 (2/m pipe length)

15711 GMMWT

GMMWT4411

GMMWT Gas mixture wait time


[Unit] min


15712 GMVWT

GMVWT4412

GMVWT Gas mixer evacuation time


[Unit] min


15713 HEOUT

HEOUT4413

HEOUT Helium exhaust time


[Unit] msec


15714 NCOUT

NCOUT4414

NCOUT Nitrogen and CO2 exhaust time


[Unit] msec


D.25LASER GAS MIXERFUNCTION


391

15715 VCCKPR

VCCKPR Vacuum criteria gas pressure


[Unit] ×13 Pa


15716 TVTMR

TVTMR4391

TVTMR Evacuation wait time


[Unit] min



392

#715800

#6 #5 #4 #3 #2 #1 #0TPC

TPC 0 : Disables the turbo blower constant power drive control function.

1 : Enables the turbo blower constant power drive control function.

15801 LPPSM

LPPSM Maximum intra--tube pressure when the turbo blower constant powerdrive control function is enabledThis parameter specifies a maximum laser intra--tube pressure commandvalue. If a laser intra--tube pressure command value calculated from alaser power command value exceeds the setting of this parameter, theintra--tube pressure is clamped to the value set in this parameter.


[Unit] ×13 Pa

15802 LPWSM

LPWSM Laser power command value leading to a maximum intra--tube pressurewhen the turbo blower constant power drive control function is enabledThis parameter specifies a laser power command value when a laserintra--tube pressure command value is set in the parameter No. 15801.From this parameter and parameter No. 15801, the proportional constantof a laser intra--tube gas pressure command and laser power command isdetermined.

[Unit] W


15803 PCDCAL

PCDCAL Intra--tube pressure command compensation coefficient when the turboblower constant power drive control function is enabledThis parameter specifies a compensation coefficient by which a laserintra--tube pressure command value is multiplied. For the parametersetting 1024, a laser intra--tune pressure command value is multiplied bythe compensation coefficient 1.0.

[Unit] 1/1024


D.26PARAMETERS FORGAS CONTROL (2)


393

15804 TPW

TPW Maximum open time of the exhaust valve for intra--tube pressure controlat oscillation time

[Unit] msec


APPENDIX B--70125EN/03E. CONTROL SEQUENCES

IN LASER OSCILLATOR

394

E CONTROL SEQUENCES IN LASER OSCILLATOR

B--70125EN/03E. CONTROL SEQUENCES

IN LASER OSCILLATORAPPENDIX

395

SEQ 0

PURGELRDY =0PTLPLSTR

=0

=0=0

POWER ON

SEQ 10


=1

=0=0

POWER OFF

INITIAL

RUN ONSEQ 11

(WAIT = 1)

RUN OFF

SEQ 20


=0

=0=0

HV ON

SEQ 19(WAIT = 1)

READY OF DISCHARGING

SEQ 21(RFHV = 0)

SEQ 29(RFHV = 1)

HV OFF

SEQ 30


=0

=1=1

READY OFBEAM--ONOPERATION

As is shown in the flow chart, the laser oscillation sequences can bedivided into four steps.Throughout this description the following notations are used.

RUN: Oscillator start switchPURGE: Purge in tube completion signalLRDY: Discharge preparation completion signalPTLP: Warning light signalLSTR: Oscillation preparation completion signal

E.1OUTLINE OF LASEROSCILLATIONSEQUENCES


IN LASER OSCILLATOR

396

[SEQ 0] POWER OFF stateThis is the state prior to power on where all the signals are in off state.

[SEQ 10] INITIAL stateAfter power is turned on, laser comes into PURGE=1 state. This signalis on when atmospheric pressure sensor monitors that the intra--tubepressure equals atmospheric pressure. Usually when this signal is on,purge completion lamp on operational board is lit.

[SEQ 20] READY OF DISCHARGING stateWhen oscillator start switch is turned on, evacuation is carried on and thengas pressure control begins. When gas pressure reaches the set value, lasercomes into discharge preparation completion (LRDY) state and itbecomes possible to turn on HV.

[SEQ 30] READY OF BEAM--ON OPERATION stateWhen HV (high voltage command) is turned on, high voltage is appliedto discharge tube. Then with the command from CNC, base discharge isestablished. Further intra--tube pressure control is performed. When thisis completed normally, laser comes into oscillation preparationcompletion state.

Sequencenumber

Meaning

10 Initial state (purge completed state)

11 State waiting for the REV signal when RUN is turned on again

12 Purge operation being performed

13 State waiting for the rotation sensor to be turned on whenRUN is off

14 State waiting 75 seconds

16 Execution with RUN turned on

17 State waiting for exhaust completion and negative pressurearrival

18 State waiting for the AR signal to be turned on

20 LRDY state

23 State waiting for setting from gas pressure during laser oscilla-tion to discharge start time gas pressure

26 Execution with HV ON (state waiting for start of discharge)

27 State waiting for setting from a maximum base discharge val-ue to base discharge state

28 Power compensation being performed

30 LSTR state

49 Vacuum being drawn with RUN turned off (parameter No.15256)

50 State waiting 75 seconds with RUN turned on again



397

Intra--tube gas pressure control is performed in the following steps asshown in the figure.

PRM15256

SQ18 SQ20SQ26SQ27 SQ28 SQ30 SQ23 SQ20 SQ12

SQ16SQ17

SQ49SQ13

GAS PRESSURE

PRM1524215243[236]

PRM15241[237]

PRM15240[235]

RUNON

45� 70sec

HV ON LSTR HVOFF

LRDY RUNOFF

Pressure value � 20(=� 266 Pa)

PRM15205

PRM15249

START OFGAS CONTROL

LRDY [TIME]

: COMMAND

: REAL

Fig. E.2

E.2INTRA--TUBE GASPRESSURECONTROLSEQUENCES


IN LASER OSCILLATOR

398

[SQ 10]This is the state after power is turned on in which intra--tube gas pressureequals atmospheric pressure.

[SQ16, 17, 18]Setting the laser start switch (RUN) to ON starts evacuation, whichcontinues until the pressure designated by PRM No. 15240 [235](evacuation completion pressure) is reached. As soon as this pressure hasbeen detected, gas pressure control is applied. Then, the intra--tubepressure increases to that designated by PRM No. 15241 [237] (intra--tubepressure setting at the start of discharge) and is stabilized there. Forty fiveseconds after the start of pressure control, the intra--tube pressure ischecked to confirm whether it conforms to the value set with PRM No.15241 [237], an error of � 20 (=� 266 Pa) being allowed. If the errorexceeds the allowable range, an alarm is issued. Once this check has beencompleted the turbo blower starts, reaching the specified speed withinabout 70 seconds. Once the specified speed has been reached, LRDY isset to 1, at which point the laser enters the discharge start preparationcompletion state. If the frequency reached signal is not issued by theinverter within 120 seconds of the turbo blower being started, an alarmis issued.

[SQ 20]This is the state of discharge start preparation completion (LRDY=1) andHV(high voltage command) is read.

[SQ 26, 27, 28]This sequence begins when HV is turned on after discharge startpreparation completion (LRDY=1).Applying high voltage leads to base discharge in the tube. Gas pressurecontrol begins simultaneously and the pressure changes from the value ofPRM No. 237 to the one of PRM No. 236 (intra--tube pressure at basedischarge). The error tolerance is � 100 (=� 1330 Pa). When it is so, thecalculation of power calibration coefficient begins and if not so alarmappears.

[SQ 30]This is oscillation preparation completion state(LSTR=1) in which laseroscillation is ready.

[SQ 23]By turning off HV, intra--tube pressure shifts from the value of PRM No.236 to the value of PRM No. 237. Here discharge is extinguished andlaser leaves oscillation preparation completion state and enters dischargestart preparation completion state.



399

[SQ49, 13, 12]In the SQ20 state, setting the laser start switch (RUN key) to OFFterminates gas pressure control, after which the turbo blower is shutdown, taking about 70 seconds to stop. If evacuation after RUN OFF hasbeen enabled, evacuation is performed for 15 minutes. Then, laser gas issupplied until the intra--tube pressure reaches atmospheric pressure. Oncethe atmospheric pressure sensor detects that the intra--tube pressure hasreached atmospheric pressure, the laser enters the PURGE state and thepurge lamp on the operator panel lights. Upon the completion of purge,the power--off interlock of the CNC is released, allowing the power to beturned off.


IN LASER OSCILLATOR

400

The control of tube voltage is done simultaneously with that of gaspressure as shown in Fig. E.3 in the following sequences.

H.V.ON

SQ20

PRM15222(PRM249)

PRM15249(20sec)

PRM15205(PRM3991)

[TIME]

PRM15200, 15201(PRM231, 232)

PRM15220(PRM247)

GAS PRESSURE

PRM15242, 15243(PRM236)

PRM15241(PRM237)

SQ292 SQ293 SQ294

SQ27 SQ30

SQ291

6sec

SQ28SQ26

LSTR(No compensation)

LSTR(In compensation)

In outputcompensation

Eight step ofcompensationPRM15220, 15201 (PRM231, 232) × 1/2

Command voltageTube voltage

Command voltage

Tube voltage In nocompensation

PRM15221(PRM248)PRM15223(PRM250)

Gasvoltagecheck

Note :Parameter numbersfor FS0--L aredescribed after PRM.

Fig. E.3

E.3TUBE VOLTAGECONTROLSEQUENCES



401

[SQ 291]When HV is turned on, high voltage is applied to discharge tubes andvoltage control begins. Here command is increased in ramp mode up tothe value of PRM 15220 [247] (maximum bias command at dischargestart). The time required to reach PRM 15220 [247] from HV on isdetermined to be 6 sec by software. Although tube voltage increasestogether with command, it drops immediately after the start of discharge.

[SQ 292]This sequence retains laser in discharge start waiting time (PRM15222[249]). During this time maximum bias command(PRM15220 [247]) iskept. Here all the tubes must be in discharge. The state of discharge ischecked by comparing tube voltage with discharge start voltage (PRM15221 [248]).

[SQ 293]When discharge start is confirmed in SQ 292, power command changesto PRM 15223 [250] (bias command).Here base discharge is establishedfor a while and the comparison between tube voltage and PRM 15270[199] (tube voltage in normal discharge) is done using the followingdecision equation.

V(n--1) -- Vn < PRM15272 [243] (1)V(n--1) : PRM No. 199 (tube voltage in normal discharge)Vn : Monitored voltage of tube No.1 (monitored voltage of

the tube of the smallest number)PRM15272 [243] : Tube voltage decrease limit

The decision of normal state is given by the holding of the inequality of(1). When normal, monitored voltage of No. 1 tube is set for PRM15270[199]. If PRM15000 bit 4 [200 bit 4] is 0 then, laser enters oscillationpreparation completion (LSTR) state.


IN LASER OSCILLATOR

402

[SQ 294]When normal base discharge is confirmed and PRM15000 bit 4 [200 bit4] is 1 (power calibration is done), this sequence begins to obtain powercalibration coefficient. Power calibration is to calibrate so that real andcommand powers become equal. The equation used is as follows.

PRM15204 [241] = Pc/Pa×1024 (2)PRM15204 [241] : Power calibration coefficientPc : Command powerPa : Actual power

The calibration coefficient is calculated by outputting the value specifiedwith PRM 15200 (power used for power calibration when half of thedischarge tubes are used) or PRM 15201 (power used for powercalibration when all the discharge tubes are used) [PRM 230 for twodischarge tubes][PRM 231 for four discharge tubes][PRM 232 for eightdischarge tubes] then assigning that value to the above equation. Theactual power measured three minutes after the start of output is used asPa.The difference between the specified power and actual power is alsomonitored. The laser is judged as being normal provided the differenceis less than the value specified with PRM 15271 [242] (power decreaselimit).The power calibration coefficient is clamped to the value specified forPRM 15203 [240] (power calibration limit).Once the above procedure has terminated normally, the laser enters theLSTR state.



403

RUN = ONNO

YES

Power ON sequence

PURGEOFI = OFF

= ON

Alarm 1 monitortreatment start

PCROFI = ON

= OFF

PURGEWAIT = ON

= OFF

CLON = ON

Wait for 3 seconds

RPA = ONCAMCON = FULL OPENChiller monitor start

TIMER A = RESET

Wait for 3 seconds

1

PURGE=ON This signal becomes on when intra--tube pressure isconformed to be equal to atmospheric pressure afterPOW ON.

OF1=OFF This is power off interlock off state in which power offis valid.

RUN=ON Laser start switch on.PCL=OFF DC unit alarm indication and holding circuit is cleared.

(+24 V off).OF1=ON NC POW OFF is invalid.WAIT=ON LRDY waiting.CLON=ON Ciller start requested.RPA=ON Vane pump start.Chiller monitor The start of monitor if chiller unit is supplying

normal flow rate of cooling water to laser.

E.4OSCILLATIONSEQUENCES FLOWCHART


IN LASER OSCILLATOR

404

TIMER A RESET This timer begins counting after the start ofevacuation.

2

1

VEN = ONPCL = OFF

Wait for 5 seconds

GRDY = ON

GRDY = OFFCAMCON = FULL CLOSE

NO

YES

Intra--tube pressureTimer count

YES

Timer A > 600SECNO

VENRBA = ON

= OFF

GRDY = ON

ALM 4080 [680]

<PRM 15240[235]

VEN =ON Exhaust valve is opened.

PCL=ON Alarm indication of DC unit is valid.

GRDY=ON Laser gas supply valve is opened.The time required for intra--tube pressure to reachPRM15240 [235] after RUN ON is not definite. Itdepends on many factors including vane pump capacity,leakage characteristics of laser, etc. The pumpingcapacity further depends on the state of oilcontamination.After RUN ON (laser start switch on), evacuationproceeds to the vacuum of PRM 15240 [235].When the evacuation time exceeds 600 sec, alarmappears.



405

VEN=OFF Exhaust valve is closed.RBA=ON Start of Roots blower.

2

Wait for 45 seconds

Gas pressure controlstart

NO

YES

WAIT = OFFLRDY = ON

HV = ONNO

YESAlarm 2 monitortreatment start

LRDYPSS 1--8 = SET

= OFF

PSRDYRFHV = ON

= ON

PTLP = ON

3

200 VAC to DCpower supply unit

ALM4081 [681]

PRM15240 [235] → PRM15241 [237]

PRM15241 [237] +20 > Intra--tube pressure> PRM15241 [237] --20

After RUN ON intra--tube pressure reaches that of PRM15240 [235] andgas pressure control begins. Then pressure shifts from the value ofPRM15240 [235] to that of PRM15241 [237], which is the pressure fordischarge start. Gas pressure control begins and AC 200V is supplied toDC units. Forty five sec after the beginning of gas pressure control,intra--tube pressure must be equal to the value PRM15241 [237] withinthe error of 20. If not so, alarm 4081 [681] appears.

WAIT=OFF Waiting signal for LRDY is off.LRDY=ON Discharge preparation completion signal is on by which

HV ON becomes ready.


IN LASER OSCILLATOR

406

HV=ON When HV is turned on, laser can proceed to the nextsequence. HV ON can either be done in manual mode orautomatic mode using PMC.

LRDY=OFF When HV is turned on, LRDY becomes off.PSS1--8=SET This is to select power units and usually is sent to the

units selected by PRM15025 to 15028 [201 to 203]PSRDY=ON This is the signal to make DC unit ready, and is sent to

the units selected by PSS1--8.RFHV=ON DC voltage is supplied to RF unit from DC unit.

4

3

BIAS COMMAND

Tube

0

NO

YES

BIAS COMMAND

GAS PRESS CONTROL

NO

YES

PRM15220 [247]

PRM15220 [247] WAIT

voltage < PRM15221 [248]

ALM4066 [666] display

PRM15241 [237] → PRM1524215243 [236]

PRM15220 [247] → PRM15223 [250]

ALM4078[678]

PRM15242, 15243[236]--100< PRM15242, 15243[236]< PRM15242, 15243[236]+100

�

In order to begin discharge, power command is increased in ramp modeby BIAS COMMAND. This ramp input is clamped by the value of PRM15220 [247] (maximum bias command in discharge start). The timerequired to reach peak value is 6 sec. During this time discharge takesplace. Intra--tube voltage decreases, upon discharge start, and then takesa constant value. The BIAS COMMAND after reaching peak is retainedfor the time designated by PRM15222 [249] (discharge start waitingtime). Then the comparison is made between intra--tube voltages andPRM 15221 [248] (discharge start voltage). If the monitored voltage islower than PRM15221 [248], discharge is confirmed. When this normal



407

discharge is confirmed, BIAS COMMAND is changed automaticallyfrom PRM15220[247] to PRM15223 [250] (BIAS COMMAND). If allthe tubes are confirmed normal discharge, intra--tube pressure is changedfrom PRM15241 [237] to PRM15242, 15243 [236] (intra--tube pressurein base discharge).

4

LSTR = ON

YES

NO

Wait for 180 seconds

CHECK COMMAND POWER ON

YES

NO

COMMAND POWER OFF

Enables discharge

PRM1500 bit 4 [200 bit 4]

PRM15204 [241] = Pc/Pa¢1024

PRM15204 [241] >PRM15203 [240]

PRM15204 [241] > PRM15203 [240]

PRM 15000 bit 4 = 1In the setting of doing power calibration, the following sequencesproceed. In the setting of not doing power calibration, laser entersimmediately oscillation preparation completion (LSTR) state.

CHECK COMMAND POWER ONIn the setting of power calibration, power command designated byPRM15200 to 15201 [230 to 232] (calibrated power) is given. Usingmonitored power 3 min after the command, PRM15204 [241] isobtained as follows.PRM15204 [241] = Pc (power command)/Pa (real power) × 1024Example) Pc=2000W, Pa=1900W and PRM No. 241=2000/1900 ×1024 = 1077


IN LASER OSCILLATOR

408

The result is compared with PRM15203 [240] (power calibrationlimit). When PRM15204 [241] exceeds PRM15203 [240], the formeris clamped by the latter.

LSTR=ON Oscillation preparation completion signal is on.Here oscillation in both manual and programing mode becomespossible.

B--70125EN/03F. REFIXING AND REPLACING

GAS TUBEAPPENDIX

409

F REFIXING AND REPLACING GAS TUBE

Replacing both of polyethylene and copper tubes is the same. Take careonly for the combination between tube materials and ferrule materials.

Polyethylene tube : nylon ferrule (back, front)(A98L--0004--0348/2--N : 1/4″)(A98L--0004--0348/3--N : 3/8″)(A98L--0004--0348/4--N : 1/2″)

Copper tube : brass ferrule (back, front)(A98L--0004--0348/2--B : 1/4″)(A98L--0004--0348/3--B : 3/8″)(A98L--0004--0348/4--B : 1/2″)

Take care also not to introduce dust into laser because exposure to ambientair is inevitable.

APPENDIX B--70125EN/03F. REFIXING AND REPLACING

GAS TUBE

410

1 Loosen tube fixing nut.Make sure to hold the fitting base with wrench.

2 Remove tube.Removed tube is accompanied by ferrule as shown in Fig. F.1. Makesure that neither of tube nor ferrule is contaminated with dust. Whencontaminated, wipe them with clean and soft cloth.

Nut

TubeBack feffule

Front ferrule

Fig. F.1 Removing/remounting the gas tube

3 Fasten tube.i) Push tube so that the front ferrule fastened to tube contacts sealing

surface of the fitting.ii) Rotate nut with finger as tight as possible.iii)Holding the fitting base with wrench, rotate the nut with wrench by

1/4 rotation.

F.1REFIXING TUBE

B--70125EN/03F. REFIXING AND REPLACING

GAS TUBEAPPENDIX

411

1 Cut the tube perpendicular to its length, then mount new ferrules onthe tube.

Referring to Fig. F.1, mount fixing nut, back ferrule, and front ferruleonto tube.Here make sure not to introduce dust into tube and ferrule. If dustentered, wipe with soft and clean cloth.

NOTEOld fixing nut can be used. However, only new ferrules canbe used. Otherwise it leads to vacuum leakage.

2 Mount tube. In fixing nut, hold fitting base with wrench.3 Fasten tube.

i) Push tube so that the front ferrule contacts sealing surface of fitting.ii) Rotate nut with finger as tightly as possible.iii)Holding the fitting base with wrench, rotate nut with wrench by 1/4

rotation.

F.2REPLACING TUBE

APPENDIX B--70125EN/03G. REFIXING AND REPLACING

WATER TUBE

412

G REFIXING AND REPLACING WATER TUBE

For brass and stainless steel tubes, be careful to make proper selection offitting material and structure.Here make sure not to wet inside of apparatus in draining and removingtube.

B--70125EN/03G. REFIXING AND REPLACING

WATER TUBEAPPENDIX

413

1) Loosen tube fixing nut.Make sure to hold the fitting base with wrench.

2) Remove tube.a) In case of brass fitting:

Removed tube is accompanied as shown in Fig. G.1 by plasticsleeve.

Nut

Tube

Plastic sleeve

Fig. G.1 Removing/remounting the water tube

b) In case of stainless steel fitting:Removed tube is not accompanied by sleeve. Make sure not tocontaminate tube with dust. If contaminated, wipe with soft andclean cloth.

3) Re--mount the tube.a) In case of brass fitting

Push the tube into the fitting until the sleeve on the tube buttsfirmly against the sealing surface of the fitting.

b) In case of stainless steel fittingWhen the tube is filled with a sleeve, it is re--mounted in the sameway as when using a brass fitting. If the tube does not have asleeve, however, trim 3 mm from the end of the tube, then push itinto the fitting until it stops.Fixing the tube without first trimming the end may cause waterleakage. Also, be careful not to trim the tube excessively.

4) Rotate nut with finger as tight as possible.a) In case of brass fitting

Holding fitting base with wrench, rotate nut with wrench by 1 and1/2 rotation.

b) In case of stainless steel fittingHolding fitting base with wrench, rotate nut with wrench so thatnut contacts fitting.

G.1REFIXING TUBE TOBRASS FITTING

APPENDIX B--70125EN/03G. REFIXING AND REPLACING

WATER TUBE

414

1) (a) In case of brass fittingMount a new sleeve on the tube.

(b) In case of stainless steel fittingIf a sleeve is necessary, mount a new sleeve on the tube. If nosleeve is necessary, insert the tube as is.In mounting sleeve, refer to Fig. G.1 and follow the order shownin the figure.Here make sure not to introduce dust into sleeve and tube. Ifcontaminated, wipe with soft and clean cloth.

NOTEOld nut can be used but only new sleeve can be used.Otherwise there may occur water leakage.

2) Mount tube and fasten it.In fixing, hold fitting base with wrench. Follow the procedures of Sec.G.1 3), 4) in fixing.

G.2REPLACING TUBE

B--70125EN/03 H. GLOSSARYAPPENDIX

415

H GLOSSARY

Name Meaning

Access panel That protective component of a housing orenclosure which, when removed or shifted, cancause exposure to laser radiation

AEL Accessibleemission level

Maximum accessible emission level set up for eachclass of laser products

Alighment Optical axis adjustment

Aperture Iris, or stop

Beam Aggregate of unidirectional, diverging, or conversingrays

Beam diameter Distance between two symmetrical points in a crosssection of a beam where the power per unit area is86.5% of the maximum power per unit area

Beam divergence Angle through which a beam spreads

Burn pattern Laser beam mode pattern generated on a plate suchas an acrylic plate for confirmation purposes

Circular Polarization Polarization in which a plane of polarization rotatesabout the axis along which the light progresses anddoes not have directivity; an electric or magneticfield based on circular polarization has a constantintensity.

CO2 laser Laser that uses a carbon dioxide gas as a lasermedium

CW Continuous wave Continuously radiated laser output

Diode Laser Laser that uses a semiconductor as an exciting me-dium

Discharge excitation Realization of inverted population by means of dis-charge

Enhanced pulse Pulse peak output, greatly amplified relative to CWrated output

Excitation Transition of atoms or molecules to a higher energylevel by supplying them with external energy

Exposure time Duration through which laser radiation is emitted

Fast axial flow laser Laser in which gas flows rapidly in the same direc-tion as the laser beam

APPENDIX B--70125EN/03H. GLOSSARY

416

Name Meaning

Feedback Corrective action in which a quantity to be controlledis compared with a target value by feeding part of anoutput signal to the input through a specially createdclosed loop so that the quantity to be controlledmatches the target value

Laser Device for generating light by stimulated emission

Laser controlled area Area in which activities are controlled or monitoredfor protection from hazards resulting fromlaser radiation

Laser mirror Reflecting mirror used in a laser resonator

Laser safety officer Person having sufficient knowledge about evaluationand management of hazards of lasers and in chargeof safety management of lasers

Laser safety standard Standard to protect human bodies from hazards re-sulting from laser beams in view of use of lasers andabout laser products for sale

Linear polarization Polarization in which a plain of polarization is at aconstant angle with the axis along which the lightprogresses

Maintenance Action taken by a user to preserve normal operationof a product, such as adjustment or other measuresspecified in documents created by the manufacturerfor users

Mode State of a resonant system in which an electromag-netic field has a specific distribution

MPE : Maximumpermissible exposure

Maximum laser radiation level that can be radiatedonto human bodies without harmful influence tothem in an ordinary environment

Muximum output Maximum radiation power or maximum radiationenergy per pulse that a laser product outputs in alldirections where there is a hazard of exposure inview of operational capacity in every area at anypoint of time after the production of the laser product

Operation Laser product’s action covering all intendedfunctions, not including maintenance or service

Optical resonator Device in which stimulated emission of light is usedfor a laser and which consists of a pair of reflectingmirrors facing each other

Parameter Variable that is assigned a given value for a specificpurpose and indicates that purpose

Phase Amount representing a positional relationshipbetween two adjacent highest or lowest points on awave

Power density Energy per unit area

B--70125EN/03 H. GLOSSARYAPPENDIX

417

Name Meaning

Protective housing Laser product housing or its part designed to protecthumans from exposure to a laser beam exceedingan accessible emission level or strong collateralradiation

Pulse duration Time interval between the points at which an instan-taneous value on the leading and trailing edges ishalf the peak pulse amplitude

Pulse duty Ratio (%) of a duration in which a pulsating laseroutput is on, to its entire cycle

Pulse frequency Repetition frequency at which pulsating laser beamsare radiated from an oscillator

Pulse laser Laser that outputs energy in the form of a singlepulse or a pulse train

Pulse output Laser output radiated in the form of a pulse train

Radian Measurement unit of angle; 1 radian equals 360°/2�.

Radiant energy Energy emitted, transmitted, or received (measuredin joules, or J)

Safety interlock Device combined with the protective housing of alaser product to stop its operation automaticallywhen part of the housing is removed

Sequence A succession of steps carried out in a prescribedorder

Stimulated emission Emission of light stimulated by incident light andhaving the same frequency, phase, and polarizationstate as the incident light

Target Jig used to radiate and position a laser beam

Threshold Physical quantity necessary to generate laserbeams

IndexB--70125EN/03

i--1

� A�Adjusting the beam center of the semiconductor laser beam

superimposed on the CO2 laser beam, 309

Adjusting the diameter of the semiconductor laser beam, 309

Adjusting the exhaust controller (adjusting the laser gasconsumption), 220

Adjusting the flow sensor of the C2000C, C3000D, C4000A,and C6000B, 224

Adjusting the inverter (A90L--0001--0382/C: model name:HVC--VAH2), 208

Adjusting the inverter (A90L--0001--0465: model name:JH300), 211

Adjusting the water flow sensor for C1500B, C2000B, andC3000C, 222

Alignment of the beam folding unit, 311

Alignment of the resonator (maximum power method), 296

Alignment of the semiconductor laser, 309

Alignment procedure at mirror cleaning time, 299

Alignment procedure during installation after transportation,298

Anti--freezing agent, 64

Applicable models, 3

Automatic aging function, 374

� B�Basic discharge adjustment, 197

� C�C1500B (with a trigger electrode), C2000C, C3000D, 200

C1500B (without a trigger electrode) (step 1), 197

C2000B (step 1), 197

C2000B, C3000C (step 2), 198

C3000C (step 1), 198

C4000A, 200

C6000B, 198

Checking before adjustment, and setting, 195

Checking the IF PCB signals, 122

Checking the jumper pins (FS16--L, 16i--L), 122

Chemical cleaner, 64

Cleaning and replacing the folding mirrors, 291

Cleaning and replacing the output mirror, 287

Cleaning and replacing the rear mirror, 289

Cleaning and replacing the zero--shift mirror and circularpolarization mirror, 294

Cleaning optical parts, 280

Completion of adjustment, 203

Component details, 32

Connection, 67

Connection of cooling water pipes, 67

Connections between the NC and oscillator, and power cableconnection, 66

Control sequences in laser oscillator, 394

Cooling water, 63

Cooling water piping, 154

� D�Daily inspection, 70

Data items displayed on the diagnosis screen, 123

Details of checking, 55

Details of maintenance, 72

Discharge aging, 225

Display of fluctuating laser output on CRT, 112

� E�Electrical cables, 67

Electrical connections, 66, 139

Electromagnetic contactor of vane pump trips thermally., 113

Error code list, 336

Error messages and countermeasures, 87

Excessive laser gas consumption, 114

Exhaust pipe filter, 75

Exhaust pump filter, 74

Exhaust pump oil, 73

External view, 317

� F�FANUC laser C series specifications, 332

Fine adjustment of VR11 and VR13, 202

� G�Gas pipe, 65

Gas piping, 68, 162

Glossary, 415

� H�High--frequency inverter, 208

High--frequency inverter alarm display, 114

� I�Indication of state by means of self diagnostic function, 123

Input unit, 171, 228

Installation, 43

Installation procedure, 44

INDEX B--70125EN/03

i--2

Inter--unit connections (C3000C only), 67

Internal structure, 23

Intra--tube gas pressure control sequences, 397

� L�Laser gas, 65

Laser gas mixer function, 390

Laser gas specification, 65

Laser optical system, 279

Laser oscillator status display (FS0--L), 132

Laser oscillator status display (FS16--L, 16i--L), 125

Laser output just after switch on is low., 111

Laser power supply alarm display, 109

Laser power supply unit, 195

� M�Main breaker trips., 113

Maintenance, 69

Maintenance parts, 77

Major faults, 109

Maximum output adjustment, 202

Measurement of voltage, 117

Measurement of voltage of DC power supply unit, 118

Method of obtaining a maximum power by adjusting allmirrors, 296

� N�Non--fuse breaker for cooling fans, electromagnetic valves; and

stabilized power sources is tripping., 112

� O�Observing voltage of power line, 117

Obtaining a maximum power, 300

Optical axis adjustment, 296

Optical paths in the oscillator, 20

Organization of the manual, 2

Oscillation sequences flow chart, 403

Oscillator connections, 63, 138

Outline of laser oscillation sequences, 395

� P�Packing for transportation, 53

Parameters, 338

Parameters for assist gas pressure and time setting, 355

Parameters for constant optical path length control, 388

Parameters for contouring conditions, 346

Parameters for discharge, 363

Parameters for discharge tube selection, 345

Parameters for edge machining conditions, 347

Parameters for enabling/disabling various functions, 339

Parameters for gas control (1), 365

Parameters for gas control (2), 392

Parameters for high--speed piercing conditions, 350

Parameters for highly reflective material alarms, 369

Parameters for laser maintenance timing indication functions,358

Parameters for laser power/voltage drop, 370

Parameters for piercing conditions, 349

Parameters for power control, 352

Parameters for power table setting, 372

Parameters for the oscillator, 359

Parameters for tracing (approach), 387

Parameters for tracing (detection), 379

Parameters for tracing (displacement), 384

Parameters for tracing (display), 381

Parameters for tracing (feedrate command), 386

Parameters for tracing (integral processing), 382

Parameters for tracing (phase compensation), 383

Periodic maintenance, 71

Phase relation, 117

Power supply cannot be switched off using CRT/MDI switch.,111

Power supply cannot be switched on using CRT/MDI switch.,111

Preparation prior to shipment, 53

Pressure controller, 191, 218

Pulse output test, 203

� R�Refixing and replacing gas tube, 409

Refixing and replacing water tube, 412

Refixing tube, 410

Refixing tube to brass fitting, 413

Related manuals, 4

Relay PCB B, 190

Removing cooling water, 54

Replacement procedures, 227

Replacing a discharge tube, 254

Replacing a fan--assisted radiator, 255

Replacing a fun unit, 255

Replacing intermediate PCB B, 245

Replacing the beam absorber, 260

Replacing the condensation sensor, 276

Replacing the exhaust control unit, 249

Replacing the exhaust pump, 246

INDEXB--70125EN/03

i--3

Replacing the flow sensor (C1500B, C2000B, C3000C), 274

Replacing the FS0--L interface PCB (A16B--1110--0223) on theoscillator side, 228

Replacing the FS16--L, FS16i--L interface PCBs on theoscillator side, 229

Replacing the high--frequency inverter, 264

Replacing the input unit control PCB, 228

Replacing the laser power supply, 231

Replacing the matching box, 241

Replacing the power sensor unit, 256

Replacing the pressure control unit, 248

Replacing the semiconductor laser, 276

Replacing the shutter mirror, 257

Replacing the shutter section, 257

Replacing the shutter switch, 257

Replacing the shutter unit, 257

Replacing the stabilized power supply, 228

Replacing the trigger electrode, 277

Replacing the turbo blower, 242

Replacing the turbo PCB, 245

Replacing the water distribution unit, 265

Replacing tube, 411, 414

Responding to alarm messages on the screen, 88

� S�Setting and adjustment, 194

Setting the atmospheric pressure sensor, 218

Setting the gas supply pressure sensor, 218

Setting the power input compensation coefficient, 221

Specification of the cooling water, 63

� T�To use the laser oscillator safety, 5

Troubleshooting, 86

Troubleshooting procedure, 87

Tube voltage control sequences, 400

Turbo blower oil, 72

Turbo PCB, 205

� U�Unit configuration, 170

� W�Warning labels, 11

Water flow sensor, 222

Water treating agent, 63

· No part of this manual may bereproduced in any form.

· All specifications and designsare subject to change withoutnotice.

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