G-TRAN SERIES SENSOR UNIT MODEL SC1 COLD-CATHODE ION …€¦ · Use in a CVD gas atmosphere If...

No. SK00-8431-EI-023-04

G-TRAN SERIES SENSOR UNIT MODEL SC1 COLD-CATHODE ION GAUGE INSTRUCTION MANUAL

This manual is for the SC1 cold-cathode ion gauges of the following serial numbers.

Serial No. 02300G and higher

Read this manual before operation and keep it at hand for immediate reference.

Components Division,

ULVAC , Inc. http://www.ulvac.co.jp/

http://www.ulvac.co.jp/

I

Prior to Operation Upon receipt of this gauge, make sure that it is the correct model you ordered and that it is not damaged in transit.

Read this instruction manual before installing, operating, inspecting, or maintaining the product and fully understand the safety precautions, specifications and operating procedures regarding the product.

The copyright of this instruction manual is held by ULVAC, Inc. You are prohibited from copying any portion of this instruction manual without the consent of ULVAC Inc. You are also prohibited from disclosing or transferring this instruction manual to third parties without the express written consent of ULVAC Inc.

The contents described in this instruction manual are subject to

change without prior notice because of changes in specifications or because of product improvements.

Safety Denotations

Safety symbols are used throughout this instruction manual to call the operator's attention to safety. The terminology used in safety symbols is classified below.

Indicate status of urgency of danger when failure to comply with DANGER results in serious personal injury or death

The work ignoring this warning will lead to serious damage to human life or factory facility (including this equipment) at a high probability.

Indicate status of danger when failure to comply with WARNING results in serious worker’s injury or death.

The work ignoring this warning will cause possibility leading to serious damage to human life or factory facility (including this equipment)

Indicate status of danger when failure to comply with WARNING results in minor injury or moderate damage. The work ignoring this warning will cause possibility leading to

minor damage to worker or breakage to equipment or necessary to adjust.

Direct hazard is not existed, describe the necessity to know from the viewpoint of worker’s safety or correct and safe operation of

equipment

✔ Note

II

Safety Precautions For safe use of this vacuum gauge, carefully read this manual and comply with the safety precautions given in this manual.

Repair Request repairs for this unit from the dealer where purchased, from

ULVAC Inc., or from the URL listed in this instruction manual.

Power off If this unit is accidentally damaged, immediately turn off the power

supply. There is a risk of fire and electric shock from use in this state.

Power off If this unit produces unusual heat, smoke, or a strange smell,

immediately turn off the power supply. There is a risk of fire from use in this state.

Turn off power. Turn off the power to the vacuum gauge before conducting

maintenance. The anode of the sensor head is energized with a voltage of 2.6 kV DC. You may receive electric shock if you touch it.

Protective grounding Always connect this unit electrically to a grounded vacuum chamber.

Use a conductive metal clamp on the NW flange. If this unit is not correctly connected, it will not only show the wrong pressure, there is a risk of damage to this unit and the equipment connected to this unit and a risk of fire. When this unit is insulated from the vacuum chamber, ground the case

section (D-sub connector shell section) with a class D (class 3) ground.

Don't disassemble. Do not disassemble the vacuum gauge.

Don't modify. Do not modify the vacuum gauge. If it is modified, its functions are

not warranted. Also fire or electric shock may result.

Operating environment Do not connect the sensor head to a test object in which pressure is in

excess of atmospheric pressure. If the pressure in the sensor head exceeds atmospheric pressure, the sensor head will be damaged or it will pop out from the connector, causing injury to the surrounding, including human body. If the pressure exceeds atmospheric pressure, provide an isolation valve so that the pressure in the sensor head does not exceed atmospheric pressure.

Use in a corrosive gas atmosphere If this unit is exposed to chemically active gases including corrosive

gases and halogen or halogenated gases, problems will occur such as pressure characteristics changing. When using this unit in these types of environments, install an isolation valve between this unit and the vacuum chamber and protect this unit as much as possible so it is not exposed to these gases.

III

Use in a CVD gas atmosphere If this unit is exposed to gases that deposit materials including CVD

(Chemical Vapor Deposition) material gases and rotary pump oil mist, problems will occur such as pressure characteristics changing. When using this unit in these types of environments, install an isolation valve between this unit and the vacuum chamber and protect this unit so it is not exposed to these gases.

Moisture and fouling If there is a large quantity of fouling in the gauge head from the

gradual vaporization of moisture or organic matter, pressure accuracy and response speed will be affected. Review installation locations and methods so that fouling does not occur.

Gas type dependency The pressure value and accuracy for this unit differ by the type of gas

measured. The accuracy for this unit is based on measuring nitrogen gas. Be careful when using gases other than nitrogen.

Check line voltage. Prior to turning ON the power, make sure that the vacuum gauge

operating voltage and the supply voltage are in agreement. Connection of incorrect power can damage the vacuum gauge and cause fire.

Shut off power If there is a possibility of the operator touching the anode terminal of

the sensor head during operation, shut off the power. The anode terminal of the sensor head is energized with a discharge voltage of 2.6 kV DC. If you touch it when this gauge is actuated, you will get electric shock.

Operating environment Do not use the gauge in a place where it may be splashed with water.

If wetted, it may fail or electric leak or fire can result.

Keep out foreign matter. If foreign matter like metal fragments or combustibles are admitted

into the vacuum gauge through the openings in the gauge, remove them. Also keep intact the connecting terminals at the top of the gauge. Otherwise, the vacuum gauge may be damaged.

Beware of magnetic field The magnetic flux density at the center of the sensor head is about 0.1

T. It will be attracted by or attract a metal part nearby with high magnetic force. Be careful in maintenance that a screwdriver or a metal part will be attracted with high magnetic force.

Check connection. See to it that the power cable does not come into contact with other

conducting parts.

Discarding When you discard a vacuum gauge, please process according to the

regulations of each local government. Especially the sensor head that used it in the atmosphere which may exert danger on a human body needs to process through a special processing contractor.

Operating conditions Use this vacuum gauge in the environment set forth by the

specifications.

Repacking for transfer If the vacuum gauge is to be shipped to other site, repack it in the same

way as on delivery. If the gauge is shipped bare, it may be damaged.

IV

Warning for Air transportation Packaging The sensor for this product contains strong magnetic material.

Therefore, please seal the interior of the packaging material with metal plate (more than 0.5mm thickness). The magnetic force from the item packaged by above method is less

than .418A/m(0.00525gauss) at 4.6m distance from any given point, or less than 0.159A/m(0.002gauss) at 2.1m distance from any given point, qualifying IATA packaging standard 902 or UN-2807.

Wear clean gloves. Handle the internal electrode with clean gloves. If the internal

electrode is stained with oil or contaminant, the pressure indication may be affected by outgas.

Impact to the anode pin and glass part. Such an impact may cause leak. Do not bend the anode pin nor give an

impact to the black glass portion.

Do not polish the glass portion of the anode. Polishing can cause leak. Polish the pin using care not to apply load on

the glass portion.

Insulation resistance of anode The pressure indication may be abnormal (higher than actual or no

change of indication) or components may fail if the insulation resistance of the anode is not higher than 10,000 MΩ.

Check center axis of anode After reassembly, make sure that the anode pin is at the center of the

magnetic pole 2. There is a possibility of contact with the magnetic pole or low pressure indication.

Scar and dust on O-ring and O-ring groove These can cause leak. Make sure that the O-rings and the O-ring

groove are free of scars and dust.

Dry parts After cleaning, dry up electrode parts. If they are not dry, components

may be damaged by poor insulation.

Do not touch the sensor head Do not touch the sensor head and anode during insulation resistance

check. If the anode and sensor head body are shorted, a high voltage of 2.6 V DC will be applied to the sensor head.

Do not conduct inspection in combustible gas atmosphere. When turning on the high voltage to this gauge under atmospheric

pressure, avoid a combustible gas atmosphere. If a higher voltage of about 2.6 kV DC is applied, sparks will be produced and may cause fire.

Maintenance Aluminum electrolytic capacitor is used in the electric circuit of this

instrument. The life of the aluminum electrolytic capacitor becomes shorter with increase of the ambient temperature, To prevent devices from being damaged, it is recommended to conduct maintenance about once every 3 years.

V

Revision History DATE No. Description

Jun. 20, 2007 00 1st version Aug.19, 2008 01 ・ P.Ⅳ Added electrolytic capacitor life and Maintenance

・ Section 3 Key specifications: change Output 5mA→ 50mA ・ Section 3.4: Added Service Parts List ・ Section 4.3: Change I/O Connector 12-pin→NC ・ Section 5.2.3: Correction of Fig. 5-2 ・ Section 7: Correction of I/O signal explanations and diagrams ・ Section 9.1.1: Correction of Setpoint 5mA→50mA

Apr. 5, 2010 02 ・ P.Ⅳ Added a caution ・ Section 1.1: Change Overview ・ Section 13: Added Certificate of Contamination ・ Delete all page headers

Feb. 8, 2013 03 ・ Section 1.1: Change Overview ・ Section 3.1: Added explanation of scale factor 2 ・ Section 3.3: Added ISG1 to the Display ・ Section 7: Added a note on contact leak current ・ Section 9.2: Added a note ・ Section 10: Correction of cautions ・ Section 12: Change warranty ・ Section 13: Revision of pollution certificate ・ Section 15: Added Torr

Dec. 2, 2019 06 ・Added Picture of SC1 ・Added Revision History ・Section1.1. Delete Revised Overview of G-TRANS Series. ・Section 3.2, Do not attach instruction manuals from standard accessories. ・Section 3.3, Added option. ・Section 3.4, Correction of Service parts name. ・Fig15-4, Correction of Display Unit

VI

Contents

Page

Prior to Operation I Safety Denotations I Safety Precautions II Revision History Ⅴ Contents Ⅵ Attached Drawings Ⅷ

1. TERMINOLOGY ...........................エラー! ブックマークが定義されていません。 2. FEATURES OF SC1 Ion Gauge ............................................................................. 1 3. SPECIFICATIONS AND COMPONENTS ............................................................ 2

3.1. Key Specifications ........................................................................................................ 2 3.2. Standard Accessories................................................................................................... 3 3.3. Options ......................................................................................................................... 3 3.4. Service Parts ................................................................................................................ 3

4. NOMENCLATURE AND FUNCTIONS OF COMPONENTS ............................. 4 4.1. Assembly ...................................................................................................................... 4 4.2. Front Panel .................................................................................................................. 5 4.3. Input/Output Connector .............................................................................................. 6

5. INSTALLATION ..................................................................................................... 7 5.1. Preparations ................................................................................................................. 7 5.2. Installation ................................................................................................................... 7

5.2.1. Installing the sensor head to the sensor unit .................................................. 7 5.2.2. Installing the sensor unit .................................................................................. 7 5.2.3. Electrical connection .......................................................................................... 8

6. CAUTIONS IN HANDLING .................................................................................. 9 7. OUTPUT SIGNALS ..............................................................................................10

7.1. Control Operation .................................................................................................... 100 7.1.1. High Voltage ON/OFF [HV ON/OFF] .......................................................... 100

7.2. Output Signals ......................................................................................................... 100 7.2.1. Setpoint actuating signal [SET-1 ON/OFF][SET-2 ON/OFF] .................... 100 7.2.2. Discharge valid signal [Discharge OK/NG] ................................................. 100

8. SETTING OF SETPOINT ..................................................................................111 9. FUNCTIONS .......................................................................................................122

9.1. Setpoint [SET-1 ON/OFF] [SET-2 ON/OFF] ......................................................... 122 9.1.1. Setpoint........................................................................................................... 122 9.1.2. Setting of setpoint .......................................................................................... 122 9.1.3. Setpoints of measuring unit and display unit ............................................. 122

9.2. Measurement Value Output ................................................................................... 133 9.2.1. Measurement value voltage output form ..................................................... 133 9.2.2. Measurement value outputs in each condition ............................................ 144

10. MAINTENANCE .................................................................................................155 10.1. Preparation of Tools and Others ............................................................................ 155 10.2. Necessary Tools and Others ................................................................................... 155 10.3. Necessary Equipment ............................................................................................. 155 10.4. Removing the Sensor Unit and Sensor Head ........................................................ 166

10.4.1. Removing Screws ........................................................................................... 166 10.4.2. Removing the Sensor Head ........................................................................... 166

10.5. Disassembling the Sensor Head ............................................................................. 177

VII

10.5.1. Exploded View of Sensor Head ..................................................................... 177 10.5.2. Removing the Internal Electrode.................................................................. 188

10.6. Cleaning the Electrode in the Sensor Head........................................................... 211 10.6.1. Insulation Check of Anode ............................................................................ 211 10.6.2. Cleaning the Anode........................................................................................ 211 10.6.3. Cleaning Magnetic Poles 1 and 2.................................................................. 222 10.6.4. Cleaning the Spacer ....................................................................................... 233 10.6.5. Cleaning the main body................................................................................. 244 10.6.6. Cleaning the O-ring and O-ring Groove ....................................................... 244 10.6.7. Cleaning Parts ............................................................................................... 244

10.7. Reassembling the Sensor Head .............................................................................. 255 10.7.1. Reassembly ..................................................................................................... 255 10.7.2. Checking the Anode Position ........................................................................ 255

10.8. Insulation Check ...................................................................................................... 266 10.8.1. When a insulation resistance tester is available at hand ........................... 266 10.8.2. If a insulation resistance tester is not available at Hand........................... 266

10.9. Leak Test .................................................................................................................. 288 10.10. Installing the Sensor Unit and Sensor Head...................................................... 29 10.11. Maintenance .......................................................................................................... 29

11. TROUBLESHOOTING .......................................................................................300 12. WARRANTY ........................................................................................................322 13. Certificate of Contamination ..............................................................................333 14. China RoHS Declaration .....................................................................................344 15. APPENDIX ..........................................................................................................355

15.1. Pressure-Measurement Value Voltage Table (Pa) ................................................ 355 15.2. Pressure-Measurement Value Voltage Table (Torr) ............................................. 388 15.3. Related Drawings .................................................................................................... 411

15.3.1. Compatible Sensor Heads ............................................................................. 411

VIII

Attached Drawings Page

Fig. 4-1 Assembly ................................................................................................................ 4 Fig. 4-2 Front panel ............................................................................................................. 5 Fig. 4-3 Input/output connector pin assignment ............................................................... 6 Fig. 5-1 Installing SC1 ........................................................................................................ 7 Fig. 5-2 Equivalent circuit in the power supply ................................................................ 8 Fig. 7-1 Signal input internal circuit diagram .............................................................. 100 Fig. 7-2 Signal output internal circuit diagram ............................................................ 100 Fig. 9-1 Pressure-measurement value output graph (Pa) ............................................ 133 Fig. 9-2 Pressure-measurement value output graph (Torr) ......................................... 144 Fig. 10-1 Bottom view of sensor unit ............................................................................. 166 Fig. 10-2 Sensor head and sensor unit........................................................................... 166 Fig. 10-3 Exploded view of sensor head ......................................................................... 177 Fig. 10-4 Removing the cap screw .................................................................................. 188 Fig. 10-5 Removing the cap screw .................................................................................. 188 Fig. 10-6 Removing the anode .......................................................................................... 19 Fig. 10-7 Removing the O-ring ......................................................................................... 19 Fig. 10-8 Magnetic pole 1, spacer and magnetic pole 2 pushed out............................. 200 Fig. 10-9 Insulation check of anode................................................................................ 211 Fig. 10-10 Anode .............................................................................................................. 211 Fig. 10-11 Polishing the anode (example) ...................................................................... 222 Fig. 10-12 Magnetic poles ............................................................................................... 222 Fig. 10-13 Magnetic poles 1 and 2 before and after polishing ..................................... 222 Fig. 10-14 Spacer ............................................................................................................. 233 Fig. 10-15 Spacer before and after polishing (example) ............................................... 233 Fig. 10-16 Rounding the spacer ...................................................................................... 233 Fig. 10-17 Inside view ..................................................................................................... 244 Fig. 10-18 O-ring and O-ring groove .............................................................................. 244 Fig. 10-19 Anode position after reassembly .................................................................. 255 Fig. 10-20 Insulation check............................................................................................. 266 Fig. 10-21 Check with the sensor unit connected ......................................................... 277 Fig. 10-22 Check with the sensor unit connected (wiring example) ............................ 277 Fig. 10-23 Leak check position ....................................................................................... 288 Fig. 10-24 Installing the sensor unit and sensor head ................................................... 29 Fig. 10-25 Maintenance kit ............................................................................................... 29 Fig. 15-1 Compatible sensor heads ................................................................................ 411 Fig. 15-2 Dimensional drawing ...................................................................................... 422 Fig. 15-3 Connection reference drawing (1)................................................................... 433 Fig. 15-4 Connection reference diagram (2) .................................................................. 444

1

1. TERMINOLOGY In this manual, the following terms have the same meanings.

Setpoint SETPOINT SET High voltage High Voltage H. V. Pressure protection (signal) PROTECT PRT Communication mode Remote mode RS-MODE CAL function CALCULATING FUNCTION CAL

2. FEATURES OF SC1 Ion Gauge

• This gauge is a inverted magnetron type vacuum gauge having a wider measurable pressure range than the conventional Penning vacuum gauge.

• The measurable pressure range is 1.0 × 10-5 Pa to 1 Pa, 7.5× 10-8 Torr to 7.5× 10-3 Torr. • The sensor head and the main unit are integrated in one unit. • Simple structure having only a measuring section. Best suited to applications that

require no indicators only if data and signals can be taken out. • Dedicated indicators (digital) are available as option. • The gauge has independent setpoints (two). • Small in size and does not take up much space for installation.

* Note the following differences depending on serial number.

Serial No. Analog output value when discharge is OFF

Discharge ON/OFF signal

Software version compatible with

4CH display 00001 and

higher 0 V None Ver. 2.14 and lower

00021 and higher

10 V None Ver. 2.14 and lower

00031 and higher

10 V Available Ver. 2.15 and higher

2

3. SPECIFICATIONS AND COMPONENTS 3.1. Key Specifications

Name Inverted magnetron type vacuum gauge Model SC1 Connectable sensor head One pc. Compatible sensor head C-21, C-23, C-24, C-25 Measurable pressure range 1.0 × 10-5 to 1 Pa, 7.5× 10-8 Torr to 7.5× 10-3 Torr Measurement accuracy (N2) (when shipped from factory)

Scale factor 2 *:Scale factor 2: -50% to +100%

Applied voltage Approx. 2.6 kVDC Operating temperature range 10 to 40°C Control input signal HV ON/OFF Data output 0 V to 10 VDC, non-linear Measurement data Setpoint actuating set value 1: data Setpoint actuating set value 2: data Control output signal Open collector output, negative logic

[24 VMAX, 50 mAMAX, saturation voltage is 1V]

Setpoint actuating signal -1 [ON/OFF] Setpoint actuating signal -2 [ON/OFF] Discharge confirm signal [OK/NG] LED display POWER SET-1 ERROR SET-2 Power supply 24 VDC ± 2 V, 150 mA (sensor unit alone) Input/output connector D-sub 15-pin (M2.6 screw) Weight of main unit 430 g (not including sensor head) Outside dimensions See Fig. 15-1 Dimensional Drawing.

3

3.2. Standard Accessories Connector D-sub 15 socket (M2.6 screw) 1 pc. Clamp hood 1 pc.

3.3. Options

Display unit Digital Model IM1R1 (24VDC power supply type)

Model IM2R1 (100VAC power supply type) Model ISG1 (24VDC power supply type)

Sensor head See 3.1 Key Specifications "Compatible Sensor Head". Display cable 2 m, 5 m, and 10 m

(between measuring unit and display unit) Test results certificate Calibration certificate Calibration certificate, JCSS Calibration certificate

3.4. Service Parts

Anode (SC1) Cathode (SC1) Magnetic pole-1, Magnetic pole-2, Spacer

4

4. NOMENCLATURE AND FUNCTIONS OF COMPONENTS 4.1. Assembly

Fig. 4-1 Assembly

No. Component (Inscription)

Function

① I/O connector I/O connector for power supply, data and signal (D-sub 15-pin) See section 4.3 for pin No.

② CCG sensor fixing plate

Metal plate that fixes the sensor head to the SC1.

③ C ring Ring that fixes the magnet. Do not remove it.

POWERPROTECT

HV

SET-1

SET-2

ULVAC

G-TRAN SC1

3

2

1

5

4.2. Front Panel

POWERPROTECT

HV

SET-1

SET-2

ULVAC

G-TRAN SC1

1

2

4

5

6

7

3

Fig. 4-2 Front panel

No. Component (Inscription)

Function

① POWER lamp (POWER)

Lights when power is supplied to the sensor unit.

② PROTECT lamp (PROTECT)

(Not used)

③ HV lamp (HV)

Lights when HV ON signal input.

④ SET-1 lamp (SET-1)

Lights when setpoint 1 is actuated.

⑤ SET-2 lamp (SET-2)

Lights when setpoint 2 is actuated.

⑥ SET-1 setting trimmer (SET-1)

Sets the value of setpoint 1 by adjusting the trimmer.

⑦ SET-2 setting trimmer (SET-2)

Sets the value of setpoint 2 by adjusting the trimmer.

6

4.3. Input/Output Connector

Fig. 4-3 Input/output connector pin assignment

Terminal No.* Box unit Direction of signal Connected to

1 Power supply +24 V Power 2 NC

Remote host display unit

3 Setpoint actuating signal 1 4 Discharge OK/NG 5 HV ON/OFF 6 NC 7 Setpoint 1 set value 8 Measurement value (nonlinear

output)

9 Power ground Power 10 OUT-COM (setpoint)

Remote host display unit

11 Setpoint actuating signal 2 12 NC 13 NC 14 Setpoint 2 set value 15 Analog GND

* Do not make wiring connection to “NC”. Malfunction or damage can result.

7

5. INSTALLATION

5.1. Preparations

(1) Unpack the unit and check quantities. (See section 3.2) (2) Check components to see if any components are damaged.

5.2. Installation 5.2.1. Installing the sensor head to the sensor unit

See section 10. 5.2.2. Installing the sensor unit

Install the sensor head to the gauge port of the vacuum system.

(1) Measuring position This gauge measures the

static pressure in the position where the sensor head is installed. If there is a gas flow, source of outgas or intense electrons or ions in the vacuum system, carefully select the measuring position so that measurement is least affected by them.

(2) Installing the sensor head • Install the sensor head in such a manner that the plane of the sensor mounting

port is parallel to gas flow. Ensure that gas does not enter the sensor head in the form of beam. (See Fig. 5-1.)

• O-rings to be used in installing the sensor head should be as free from outgas as possible. Use of rubber pipes or grease that release much outgas can be a cause of error.

Fig. 5-1 Installing SC1

Vertical direction

O-ring gland

O-ring

Cap

Gauge port

Gas flow direction

POWERPROTECT

HV

SET-1

SET-2

G-TRAN SC1

! WARNING Turn OFF power.

! CAUTION Beware of magnetic field.

! CAUTION Provide ventilation.

! CAUTION Keep out foreign matter.

! CAUTION Pay attention to operating environment.

! CAUTION Check connection.

8

5.2.3. Electrical connection Make electrical connection referring to the pin arrangement on section 4.3.

! WARNING Check line voltage.

! CAUTION Pay attention to operating conditions.

Cautions: • Install the sensor head first and make electrical connection finally. • GND [10pin] and GND [15pin] are common. Use these for the setpoint actuating

signal GND, setpoint set value GND and burnout detection GND. • Power GND [9pin] and GND [10pin] [15pin] are common inside after being filtered through the filter. Use power +24V [1pin] and power GND [9pin] in power line connection. If

other GND is used, measurement may be affected by noise. (See Fig. 5-2.) • Fix the cable so that undue force is not exerted to the connections of the cable. • Securely tighten the connector fixing screws. • In supplying power to the sensor unit, do not mistake pin numbers.

Fig. 5-2 Equivalent circuit in the power supply

FUSE1

910

15GND

FG

FG

+24V-

Filter Circuit

Measurement・Control Circuit

Varistor

Filter

I/OD-Sub 15P

9

6. CAUTIONS IN HANDLING

Beware of magnetic field The magnetic flux density at the center of the sensor head is about

0.1 T. It will be attracted by or attract a metal part nearby with high magnetic force. Be careful in maintenance that a screwdriver or a metal part will be attracted with high magnetic force.

Use in a corrosive gas atmosphere If this unit is exposed to chemically active gases including corrosive

gases and halogen or halogenated gases, problems will occur such as pressure characteristics changing. When using this unit in these types of environments, install an isolation valve between this unit and the vacuum chamber and protect this unit as much as possible so it is not exposed to these gases.

Use in a CVD gas atmosphere If this unit is exposed to gases that deposit materials including CVD

(Chemical Vapor Deposition) material gases and rotary pump oil mist, problems will occur such as pressure characteristics changing. When using this unit in these types of environments, install an isolation valve between this unit and the vacuum chamber and protect this unit so it is not exposed to these gases.

Moisture and fouling If there is a large quantity of fouling in the gauge head from the

gradual vaporization of moisture or organic matter, pressure accuracy and response speed will be affected. Review installation locations and methods so that fouling does not occur.

Gas type dependency The pressure value and accuracy for this unit differ by the type of gas

measured. The accuracy for this unit is based on measuring nitrogen gas. Be careful when using gases other than nitrogen.

• Start measurement more than one minute after turning on power and the output is stabilized.

• Do not turn off the power to the sensor head during a sequence of measurements. • The characteristics of the sensor head may change if it is exposed to a chemically active

or highly adsorptive gas. In that event, fill the sensor head with nitrogen or inert gas or dry air with the sensor head energized with power and pump it for purging and repeat this step. It may be restored to the original condition. However, do not spray such gas to the opening of the sensor head for purging. If there is no prospect of the characteristic being restored, replace the sensor head with a new one.

• The magnetron type vacuum gauge is sensitive to all types of gas, but the sensitivity varies with the type of gas. The unit displays pressure by assuming that the gas is air.

• This gauge uses no consumable part like hot filament, but if a high voltage is applied for an extended time at a pressure exceeding the higher limit of measurable pressure, the sensor head interior may be contaminated.

• Be careful about pressure when starting measurement (start discharge by turning on HV).It is difficult to discharge in the 10-5Pa(10-7Torr) range. In case it was impossible to discharge , keep pressure more than 10-3Pa(10-5Torr) range and turn on HV.

• When pressure is more than measurable range, turn off HV and stop measurement.

10

7. OUTPUT SIGNALS 7.1. Control Operation

Contact leak current Be aware of contact leak current. If a current of 0.1 mA or higher

flows between the input signal pin and the GND terminal, that may be treated as signal input.

7.1.1. High Voltage ON/OFF [HV ON/OFF]

Turns ON/OFF the sensor head high voltage. (Lo input when HV is ON.)

Fig. 7-1 Signal input internal circuit diagram

7.2. Output Signals Signals are outputted from the connector at the top of the sensor unit in the open

collector format. Fig. 7-2 shows its internal circuit. 7.2.1. Setpoint actuating signal [SET-1 ON/OFF][SET-2 ON/OFF]

The internal transistor will be actuated if the measured value is lower than the set pressure. (Lo output when setpoint is ON.) See section 4.3 for the pin numbers.

(→ See section 8) 7.2.2. Discharge valid signal [Discharge OK/NG]

If the discharge current is flowing normally when the high voltage is turned ON, Discharge Valid will be OK and the internal transistor will operate (Lo output when Emission Valid is OK).

The Display unit (IM1R1/IM2R1) works while watching this signal. When the cable production, a constipated line is necessary. See section 4.3 for the pin numbers.

Output rating [24 VMAX, 50 mAMAX, saturation voltage is 1V]

Fig. 7-2 Signal output internal circuit diagram

（ON/OFF）2.4kΩ

5:HV ON/OFF

10:Out-Com15：A-GND

24V

LED(ON/OFF)

3 :SetPoint1 ON/OFF11：SetPoint2 ON/OFF4 ：Discharge OK/NG

10:Out-Com15：A-GND

11

8. SETTING OF SETPOINT To use the setpoint, make necessary settings according to the following procedure. (Both setpoints 1 and 2 have been factory set at near 1.0 × 10-2 Pa(7.5 × 10-5 Torr) (approx. 8.4 V).

ST-① Connect pin 1 [+24V power] and pin 9 [power GND] of the I/O connector of SC1 and connect a voltmeter between the setpoint set value and GND.

When setpoint 1 is set: Between 7-pin [setpoint l set value] and 10-pin or 15-pin [GND] When setpoint 2 is set: Between 14-pin [setpoint set value 2] and 10-pin or 15-pin [GND]

(In the case of setpoint 1)

ST-②

The set voltage is output between the setpoint set value and ground by turning the setpoint setting trimmer.

The output voltage is the same as on the measured pressure curve. Read the voltage value of a pressure point to be set from the conversion table (graph on Fig. 9-1, Fig. 9-2 or list on page 35) and turn the trimmer for adjustment so that the voltage is obtained. Turning the trimmer clockwise increases the set value. The trimmer is a three-turn trimmer. If it is turned above the higher or below the lower limit of rotation, it will click and be idle.

Voltmeter

VoltmeterSET-1setting trimmer

POWERPROTECT

HV

SET-1

SET-2

ULVAC

G-TRAN SC1

12

9. FUNCTIONS 9.1. Setpoint [SET-1 ON/OFF] [SET-2 ON/OFF] 9.1.1. Setpoint

Setpoint function outputs a signal indicating if the measured pressure is below a certain pressure value. The signal is outputted in the open collector form (Lo output when setpoint is ON). The rating of the is [24 VMAX, 50 mAMAX, saturation voltage is 1V].

9.1.2. Setting of setpoint

The setpoint value is set with a trimmer on the SP1 front panel. (See section 8) Values that can be set are 1.0 × 10-5 to 1 Pa(7.5× 10-8 Torr to 7.5× 10-3 Torr) as with the

measurement range.

9.1.3. Setpoints of measuring unit and display unit The setpoint of the display unit and that of the measuring unit (sensor unit, box unit)

are independent of each other. Therefore, both will be effective if setpoints are taken out separately from the display unit and measuring unit. However, only the value set by the display unit will be effective if the setpoint point of

the display unit and that of the measuring unit are connected and only the setpoint from the display unit are taken out.

13

9.2. Measurement Value Output

Below measurable greatly lower limit There is possibility that output voltage is less than 0V due to change

of environmental temperature when output voltage is around 0V. If output voltage value is minus, it shows output voltage is more than

10V (same condition as it does not discharge). 9.2.1. Measurement value voltage output form

All measurable pressure ranges are output by an analog voltage of 0 to 10 volts (non-linear). See section 15.1 and section 38 for the relationship between the pressure (Fig. 9-1, Fig. 9-2) and the measurement value output voltage. The measurement value voltage is output between the measured value of I/O connector

[8 pin] and GND [10 pin or 15 pin]. See section 4.3.

Fig. 9-1 Pressure-measurement value output graph (Pa)

14

Fig. 9-2 Pressure-measurement value output graph (Torr)

9.2.2. Measurement value outputs in each condition

Table 9-1 gives the measurement value outputs in several conditions that can occur during measurement.

Table. 9-1 Measurement Value Output Voltages

Operating condition Measurement value output voltage In normal measurement Voltage corresponding to measured pressure

When discharge is not set up 10 V or more Below measurable lower limit Voltage corresponded to pressure (reference only)

Below measurable greatly lower limit※1 10 V or more ※1:There is possibility that output voltage is less than 0V due to change of environmental

temperature when output voltage is around 0V. If output voltage value is minus, it shows output voltage is more than 10V (same condition as it does not discharge).

15

10. MAINTENANCE 10.1. Preparation of Tools and Others

Prepare the following tools and equipment before conducting maintenance. 10.2. Necessary Tools and Others

Description Use and others Clean gloves Handling of internal electrode

Recommended: Powder-free rubber gloves Philips screwdriver for M3 screw

Attaching the sensor head to/detaching from the sensor unit

Degreased clean rod 180mm or more in length, 10mm or less in diameter

Removal of internal electrode Plastic or metal rod is recommended

Thin rod for removing O-ring Removal of O-ring Recommended: Thin plastic rod

Sandpaper #180 – #400 Polishing the electrode Use of metal file is strictly forbidden #180, #240 or #400 is recommended.

Wiper Cleaning the electrode Wiper for use in a low-level dust producing clean room is recommended.

Alcohol Cleaning the electrode 10.3. Necessary Equipment

Satisfactory performance of SC1 may not be attained if the following equipment is not available.

Description Use and others Insulation resistance tester Insulation check of anode

Insulation resistance tester of 2500 V/10,000 MΩ or more is recommended (10,000 M = 10G)

Helium leak detector Leak test after reassembly Recommended minimum detection: 10-11 Pam3/s or less

Ultrasonic cleaner Cleaning the internal electrode and others Recommended solvent: alcohol

16

10.4. Removing the Sensor Unit and Sensor Head

Turn off power. Turn off the power to the vacuum gauge before conducting

maintenance. The sensor head anode is energized with a power of about 2.6 kV D.C., which may cause electric shock.

Beware of magnetic field The sensor head has a flux density of about 0.1 T at the center of the

inner diameter. If brought close to a metal object, it will be attracted with strong force and may catch your finger or other.

10.4.1. Removing Screws

Remove the 3 M3 screws marked with arrows in Fig. 10-1 using a Philips screwdriver for M3 screws.

Fig. 10-1 Bottom view of sensor unit 10.4.2. Removing the Sensor Head

Remove the sensor head from the sensor unit slowly. Here, be careful not to bend the anode pin marked with arrow in Fig. 10-2.

Fig. 10-2 Sensor head and sensor unit

A

17

10.5. Disassembling the Sensor Head 10.5.1. Exploded View of Sensor Head

① Anode ② Cathode magnetic pole 1 ③ Cathoede spacer ④ Cathode magnetic pole 2 ⑤ Cap screw ⑥ O-ring

Disassembling the Sensor Head: ⑤ ⇒ ① ⇒ ② ⇒ ③ ⇒ ④ Reassembling the Sensor Head: ④ ⇒ ③ ⇒ ② ⇒ ① ⇒ ⑤

Fig. 10-3 Exploded view of sensor head

1

2

4

3

6

5

5

3

6

4

2

1

18

10.5.2. Removing the Internal Electrode

Wear clean gloves. Handle the internal electrode with clean gloves. If the internal

electrode is stained with oil or contaminant, the pressure indication may be affected by gas discharge.

10.5.2.1. Removing the cap screw

Before the cap screw is removed After the cap screw is removed

Turn to remove.

Fig. 10-4 Removing the cap screw

10.5.2.2. Removing the anode

Impact to anode pin and glass part This can be a cause of leak. Do not bend the anode pin or give an

impact to the black glass portion. Push the metal portion on the outer periphery of the anode gradually to make the anode aslant. Take this step from each of 4 directions.

Fig. 10-5 Removing the cap screw

Glass ①

②

④ ③

19

Fig. 10-6 Removing the anode

10.5.2.3. Removing the O-ring

Scar on the O-ring or O-ring groove Be careful not to scar the O-ring and O-ring groove when removing

the O-ring. The scar can cause leak. Note that the use of a metal screwdriver can scar the O-ring or O-ring groove. Use a thin plastic slotted screwdriver to remove the O-ring.

Fig. 10-7 Removing the O-ring

After removing the O-ring

Pull to remove

After removing the anode

20

10.5.2.4. Removing magnetic pole 1, spacer and magnetic pole 2 Insert a rod cleaned with degreased cotton from the port side of the sensor head to push out magnetic pole 1, spacer and magnetic pole 2.

Fig. 10-8 Magnetic pole 1, spacer and magnetic pole 2 pushed out

Push out

Magnetic pole and spacer pushed out

21

10.6. Cleaning the Electrode in the Sensor Head 10.6.1. Insulation Check of Anode

Insulation resistance of anode If the insulation resistance of the anode is not 10,000 MΩ or more,

the pressure indication is abnormal (the indication is higher than actual or does not change), or the instrument may fail.

Do not touch the sensor head. You may receive electric shock if you touch it. Do not touch the

anode during insulation check. Connect a insulation resistance tester to the anode pin and the peripoheral metal

portion as shown in Fig. 10-9 and conduct insulation check. If the insulation resistance is 10,000 MΩ or more, there is no problem, but if it is less than 10,000 MΩ, replace the anode with a new one.

If a insulation resistance tester is not available at hand, check insulation after reassembly. (Refer to 6.)

Fig. 10-9 Insulation check of anode

10.6.2. Cleaning the Anode

Do not polish the glass portion of the anode. It can be a cause of leak. Also use care not to give a load to the

bottom of the glass portion when polishing the pin. Check the A portion of the anode shown in Fig. 10-10 for surface condition. If its color is metallic, the anode is satisfactory. If the surface is discolored or stained, polish it with sandpaper. First, use coarse sandpaper ＃80 or #240 to polish it until the surface color becomes metallic and then finish it with finer sandpaper of #400.

Before polishing After polishing

Fig. 10-10 Anode

Insulation Tester

＋－

A portion (electrode pin)

Glass

22

Fig. 10-11 Polishing the anode (example)

10.6.3. Cleaning Magnetic Poles 1 and 2

Observe the surfaces (especially indicated with arrows in the figure below) of magnetic poles 1 and 2 shown in Fig. 10-12. The surfaces should be of metallic color. If they are discolored or stained, polish them with sandpaper. First, polish them with rough sandpaper #180 or #240 until the color becomes metallic and then finish with finer sandpaper of #400.

Fig. 10-12 Magnetic poles


Fig. 10-13 Magnetic poles 1 and 2 before and after polishing

①Magnetic pole 1 ②Magnetic pole 2

23

10.6.4. Cleaning the Spacer Observe the surfaces (especially inside electrode surface) of the spacer shown in Fig. 10-14. If the surface color is metallic, the spacer is satisfactory. If the surface is discolored or stained, polish the spacer after stretching it. First, polish it with rough sandpaper #180 or #240 until the color becomes metallic and then finish with finer sandpaper of #400. Wind the spacer around the side of magnetic pole 1 and shape it into a round shape. Here, be careful not to bend the spacer.

Fig. 10-14 Spacer


Fig. 10-15 Spacer before and after polishing (example)

Fig. 10-16 Rounding the spacer

(Inside)

Inside

24

10.6.5. Cleaning the main body Check the inner surface condition of the sensor shown in Fig. 10-17 (indicated with arrow in the photo). OK if it is of metallic color. If the surface is discolored or stained, polish it with sandpaper. First, polish it with rough sandpaper #180 or #240 until the color becomes metallic and then finish with finer sandpaper of #400.

Fig. 10-17 Inside view 10.6.6. Cleaning the O-ring and O-ring Groove

Scar and dust on O-ring Scar and dust can be a cause of leak. Make sure that the O-ring is

free of scar and dust. Observe the surface condition of the O-ring and O-ring groove shown in Fig. 10-18. If the O-ring is scarred or deformed, replace it with a new one. If the O-ring groove is scarred, replace the sensor head. If the O-ring or O-ring groove is contaminated with dust or dirt, wipe it with a cloth wetted with alcohol and then allow it to dry up. * O-ring: G30 (FPM)

Fig. 10-18 O-ring and O-ring groove 10.6.7. Cleaning Parts

Clean any part, if removed, by ultrasonic cleaning using alcohol for 10 minutes, regardless of whether it was polished or not, and allow it to dry up. If an ultrasonic cleaner is not available at hand, carefully wipe it with a wiper wetted with alcohol.

25

10.7. Reassembling the Sensor Head

Use clean gloves Use clean gloves in handling the internal electrode. If it is stained

with oil or contaminated, the pressure indication may be affected by outgas.

Dry up parts Dry up electrode parts. If not, the instrument may be damaged by

poor insulation.

Check the center axis of anode Make sure that the anode pin is in the center of magnetic pole 2.

Otherwise, it may come into contact with the magnetic pole or the pressure indication may be low.

10.7.1. Reassembly

Reassemble the sensor head referring to the exploded view in Fig. 10-3. The reassembling procedure is reverse to the disassembling procedure.

10.7.2. Checking the Anode Position

Observe the anode from the port side of the sensor head and make sure that the anode pin is at the center of the magnetic pole 2, as shown in Fig. 10-19. If it is not at the center, reassemble the sensor head or make adjustment using a degreased clean bar so that the anode is at the center of the anode.

Fig. 10-19 Anode position after reassembly

The anode pin is to be in the center of the magnetic pole 2.

Look into the depth in the arrow direction.

26

10.8. Insulation Check 10.8.1. When a insulation resistance tester is available at hand

Do not touch the sensor head. You may receive electric shock if you touch the sensor head or

anode during insulation check. Connect a insulation resistance tester to the anode pin and sensor head body and make

insulation check. If the insulation resistance is 10,000 M (10G) Ω or more, there is no problem. If it is less than 10,000 M (10 G) Ω, reassemble the sensor head as described in 5.

Fig. 10-20 Insulation check

10.8.2. If a insulation resistance tester is not available at Hand

Do not touch the sensor head. Do not touch the sensor head during insulation check. If the anode

and sensor head are shorted, the sensor head is energized with a high voltage of 2.6 kV DC.

Do not check insulation in a combustible gas atmosphere. When turning on the high voltage to this instrument under

atmospheric pressure, do not make check in combustible gas atmosphere. If a high voltage of about 2.6 kV DC. is applied, spark will be emitted and may cause fire.

If a insulation resistance tester is not available at hand, ①check the anode and magnetic pole for contact and ②connect the sensor unit for check. ① To check the anode and magnetic pole for contact, make sure that the anode and

sensor head body are not in continuity using a insulation resistance tester like digital multi-meter.

② To check contact with the sensor unit connected, input a driving power of 24 V DC. and HV ON signal to SC1 and make sure that the output voltage is 10 V DC or more. If it is not higher than 9.6 V DC, it is likely that the insulation resistance of the anode has dropped. In this case, replace the anode with a new one. (Refer to Table 6.1 SC1 Pin Assignment).

Insulation

Tester

27

Output voltage

HV ON signal

Driving voltage

Fig. 10-21 Check with the sensor unit connected

V

24 V d.c.1

9

5

10 or 15

8

SC1

SHORT

Voltmeter

Fig. 10-22 Check with the sensor unit connected (wiring example)

Table. 10-1 SC1 Pin Assignment Pin No. Name Pin No. Name

1 24 V DC power supply 9 Power GND 2 Setpoint actuating signal 1 10 GND 3 Discharge check signal OK/NG 11 Setpoint actuating signal 2 4 HV ON/OFF 14 Setpoint 2 set value 7 Setpoint 1 set value 15 GND 8 Output voltage

28

10.9. Leak Test Spray helium from the leak check position shown in Fig. 10-23 and make sure that the leak rate is below the allowable level of 1 × 10-10 Pam3/s(7.5 × 10-13 Torrm3/s). If a helium leak detector is not available at hand, use the build-up method or other to make sure that there is no leak.

Fig. 10-23 Leak check position

Check leak here

29

10.10. Installing the Sensor Unit and Sensor Head To install the sensor head, reverse the procedure for removing the sensor unit and sensor head in Section 2. The sensor head and sensor unit are connected with the pin of the sensor head anode (indicated with arrow in Fig. 10-10). Install the sensor head slowly and make sure that its terminal has been inserted into the connector of the circuit board. The sensor head should turn without resistance if it is inserted correctly. If it is inserted correctly, the sensor head should fit into the depth of the SC1 circuit. Fix it with screws.

Fig. 10-24 Installing the sensor unit and sensor head 10.11. Maintenance

Depending on the usage, the electrode section may be worn out until cleaning up cannot cope with the problem. In that event, replace parts with new ones. Fig. 10-25 shows the maintenance kit. Here, one set of cathode is made up of magnetic pole 1, magnetic pole 2 and spacer.

Fig. 10-25 Maintenance kit

Anode Cathode

Magnetic pole 1 Spacer Magnetic pole 2

A

Caution the screw

30

11. TROUBLESHOOTING One of the causes of malfunctioning of the sensor unit is erroneous electrical wiring. If any trouble is suspected, check the following.

(1) Wiring between the sensor unit and remote host (2) Wiring between the sensor unit and display unit (when display unit is used) (3) Signal short/open

After checking these, take corrective actions referring to the table below. The arrow marks → in the “Corrective action” columns indicate the pages to refer to. Before taking these actions, turn off the power.

• Measurement does not start though power is supplied.

Possible cause Corrective action

Erroneous wiring or disconnection of power cable

Correct the wiring and check continuity by a circuit tester.

→ P. 7 Line voltage is below specified range. Check line voltage by a circuit tester. (Line

voltage : 24V ± 2V) Fuse blown out To be repaired and checked at ULVAC Failure of internal circuit To be repaired and checked at ULVAC

• Pressure has changed, but the pressure output remains constant.


Pressure is below measurable range. Normal Erroneous wiring or disconnection between sensor unit and remote host


→ P. 7 Line voltage is low. Check line voltage by a circuit tester. (Line

voltage: 24V ± 2V) • Voltage near 10 volts is outputted and does not change.


Insulation failure between anode and cathode because of conductive material deposited between anode and cathode in the sensor head. Insulation failure caused by contact of anode and cathode

Check insulation between the electrodes of the sensor head using a Megger. The Megger indication should be infinite or more. If they are not insulated, remove the sensor head and overhaul it. It may be necessary to replace the sensor head with a new one depending on the degree of deposition of conductive material.

Insulating material or other is deposited in the sensor head, making it difficult to set up discharge.

Overhaul the sensor head. It may be necessary to replace the sensor head with a new one depending on the degree of deposition.

Erroneous wiring or disconnection between sensor unit and remote host


Sensor head is not installed. Install a compatible sensor head.

31

• Pressure display does not indicate a constant value.

Possible cause Corrective action Pressure is actually changing. Normal Sensor head is not the specified one. Change with the specified one. Or calibrate the

current one. Sensor head is contaminated. Overhaul or replace the sensor head with a new

one. There is a leak in the sensor head or in the area where the sensor head is installed.

Leak in the sensor head → Replace the sensor head.

Increase in wire rod resistance due to poor contact of cable or corrosion of wire rod.

Other leak → Stop the leak. Check cable for continuity.

Cable is subject to electromagnetic induction (by external noise).

Change the cable installation location. Or use the unit by turning off equipment that can be a source of noise. Examine the method of laying cable. Take actions against noise separately.

• The output value largely differs from the expected value.


Sensitivity is very poor due to contamination of the sensor head.

Change the sensor head with another one and check symptom. If it is OK with the other sensor head, the sensor head is faulty.

The pressure differs greatly from the expected value.

Check pressure by another vacuum gauge.

* For troubles when the display unit is used, also refer to the instruction manual for the

display unit. Also check action using the sensor unit alone. If measurement can be made by the sensor unit alone, the cause of trouble is in other than the sensor unit.

32

12. WARRANTY This product was shipped after rigid company inspection. However, in case any failure

occurs under ULVAC’s responsibility, such as defect in manufacturing and damage during transportation, Buyer shall inform ULVAC, Inc. or the local ULVAC representatives. ULVAC will repair or exchange it at free of charge.

Warrantable Items

1) This unit 2) Sensor head on delivery

Duration of guarantee

One (1) year after shipping date from ULVAC

Warrantee scope 1) Domestic business in Japan: Product, which has damage, caused by a failure on

delivery. 2) Direct export transaction: Product, which has damage, caused by a failure on

delivery. The warrantee scope shall confirm to the new INCOTERMS. 3) Products not satisfying meet the standard specifications although the product is used

under the normal service conditions such as temperature range and power etc.

Response procedure 1) Domestic business in Japan: ULVAC send a replacement or Buyer return the

defective items to ULVAC, Inc. or to the local ULVAC representatives for repair. If field service is required, Buyer shall ask ULVAC, Inc. or the local ULVAC representatives.

2) Direct export transaction: ULVAC send a replacement or Buyer return the defective items to ULVAC, Inc. or to the local ULVAC representatives for repair. Return charge shall be paid by Buyer.

Disclaimer

1) Failure occurred after expiration of warranty period 2) Failure caused by force majeure, such as fire, storm and flood damage, earthquake,

lightning strike, war etc 3) Failure occurred due to carelessness handling or faulty usage 4) Products remodeled, disassembled or repaired without ULVAC’s acceptance 5) Failure occurred under abnormal environment, such as intense electromagnetic field,

radiation, high-temperature, high-humidity, flammable gases, corrosive gases, dust etc.

6) Failure occurred by noise 7) Product deficiency or secondary damnification occurred to Buyer, from law suit to

ULVAC by third party for patent infringement. 8) Sensor head being used (expiration of life, measurement error, etc.) 9) Sensor head cable in use (cable burnout due to improper installation, poor contact,

etc.)

Others 1) In case, special agreement or memorandum for specifications is made individually,

the descriptions are prior to this article “13 Product Warranty”. 2) Buyer shall inform ULVAC when this product is exported out of Japan. In the

meantime, Buyer shall take necessary procedures according to Foreign Exchange and Foreign Trade Law.

3) As for the question and consultation, Buyer shall check the model and serial number and ask the local representative or ULVAC, Inc.

4) The content of this document is subject to change without notice in future.

33

13. Certificate of Contamination This is a certificate of decontamination for repair and inspection request of ULVAC Components. All material must be certified as decontaminated and this certificate must be submitted to your closest local ULVAC service center or sales office prior to shipment. Please consult with your closest local ULVAC service center or sales office if our components are used with toxic gases or contaminated with reactive products or substances produced by reaction. Product model: Model: Serial No.: Application: Remarks: Contaminant (Check an applicable box.) □ I guarantee that above returned item(s) is not contaminated with harmful substances. □ Above returned item(s) is contaminated with the following harmful substances.

Name of contaminant (molecular formula)

Characteristics

1 2 3 4 5

To: ULVAC, Inc Attn:

Date: / / (YYYY/MM/DD)

Your company Division Contact Phone Fax E-mail

Please pack returned item(s) carefully before shipment. Any accident occurred during transportation to us caused by contaminant is under your responsibility. It is also to be understood that ULVAC may decline to repair returned item(s) depending on the type of contaminant and degree of contamination, and return it to you.

To be filled in by ULVAC Request for MSDS: Yes/No

Received by

ULVAC job No.

34

14. China RoHS Declaration

This mark is applied to the electronic information product sold in the People's Republic of China. The figure at the center of the mark is the validity date of environmental protection. This product does not influence the environment, the human body and the property during the period reckoning the manufacturing date as long as the caution for safe use regarding the products are observed. *The environmental protection validity date is not the product warranty period.

Table 1. Making format for names and contents of hazardous substances or elements

Name of parts Hazardous substances or elements

Pb Hg Cd Cr6+ PBB PBDE Printed Circuit Board X O O O O O Chassis O O O O O O Connector O O O O O O DC-DC Converter O O O O O O Label O O O O O O Gauge Head O O O O O O

O: indicating that content of the hazardous substance or element in all homogeneous

materials of the part does not exceed the requirements for concentration limits specified by SJ/T11363-2006.

X: indicating that content of the hazardous substance or element in, at least one kind of, homogeneous materials of the part exceeds the requirements for concentration limits specified by SJ/T11363-2006. Producer may further explain the technical excuse to the items marked with “X” perspecific conditions here.

35

15. APPENDIX 15.1. Pressure-Measurement Value Voltage Table (Pa)

Pressure [Pa]

Measurement value output

[V]

Pressure [Pa]


[V]

Pressure [Pa]


[V] 1.00E-05 0.500 6.00E-05 2.795 2.00E-04 4.056 1.10E-05 0.629 6.10E-05 2.814 2.10E-04 4.107 1.20E-05 0.749 6.20E-05 2.831 2.20E-04 4.156 1.30E-05 0.859 6.30E-05 2.849 2.30E-04 4.202 1.40E-05 0.962 6.40E-05 2.866 2.40E-04 4.247 1.50E-05 1.058 6.50E-05 2.883 2.50E-04 4.290 1.60E-05 1.147 6.60E-05 2.900 2.60E-04 4.332 1.70E-05 1.230 6.70E-05 2.916 2.70E-04 4.372 1.80E-05 1.309 6.80E-05 2.932 2.80E-04 4.411 1.90E-05 1.382 6.90E-05 2.948 2.90E-04 4.448 2.00E-05 1.452 7.00E-05 2.963 3.00E-04 4.485 2.10E-05 1.518 7.10E-05 2.978 3.10E-04 4.520 2.20E-05 1.580 7.20E-05 2.994 3.20E-04 4.555 2.30E-05 1.639 7.30E-05 3.008 3.30E-04 4.588 2.40E-05 1.695 7.40E-05 3.023 3.40E-04 4.620 2.50E-05 1.748 7.50E-05 3.037 3.50E-04 4.652 2.60E-05 1.799 7.60E-05 3.051 3.60E-04 4.683 2.70E-05 1.847 7.70E-05 3.065 3.70E-04 4.713 2.80E-05 1.894 7.80E-05 3.079 3.80E-04 4.742 2.90E-05 1.939 7.90E-05 3.092 3.90E-04 4.771 3.00E-05 1.981 8.00E-05 3.106 4.00E-04 4.799 3.10E-05 2.022 8.10E-05 3.119 4.10E-04 4.826 3.20E-05 2.062 8.20E-05 3.132 4.20E-04 4.853 3.30E-05 2.100 8.30E-05 3.145 4.30E-04 4.879 3.40E-05 2.137 8.40E-05 3.157 4.40E-04 4.905 3.50E-05 2.172 8.50E-05 3.170 4.50E-04 4.930 3.60E-05 2.206 8.60E-05 3.182 4.60E-04 4.955 3.70E-05 2.239 8.70E-05 3.194 4.70E-04 4.979 3.80E-05 2.272 8.80E-05 3.206 4.80E-04 5.003 3.90E-05 2.303 8.90E-05 3.218 4.90E-04 5.026 4.00E-05 2.333 9.00E-05 3.230 5.00E-04 5.049 4.10E-05 2.362 9.10E-05 3.241 5.10E-04 5.071 4.20E-05 2.390 9.20E-05 3.253 5.20E-04 5.093 4.30E-05 2.418 9.30E-05 3.264 5.30E-04 5.115 4.40E-05 2.445 9.40E-05 3.275 5.40E-04 5.136 4.50E-05 2.471 9.50E-05 3.286 5.50E-04 5.157 4.60E-05 2.496 9.60E-05 3.297 5.60E-04 5.178 4.70E-05 2.521 9.70E-05 3.308 5.70E-04 5.198 4.80E-05 2.545 9.80E-05 3.319 5.80E-04 5.218 4.90E-05 2.569 9.90E-05 3.329 5.90E-04 5.238 5.00E-05 2.592 1.00E-04 3.340 6.00E-04 5.257 5.10E-05 2.614 1.10E-04 3.439 6.10E-04 5.276 5.20E-05 2.636 1.20E-04 3.528 6.20E-04 5.295 5.30E-05 2.657 1.30E-04 3.611 6.30E-04 5.313 5.40E-05 2.678 1.40E-04 3.687 6.40E-04 5.332 5.50E-05 2.699 1.50E-04 3.758 6.50E-04 5.350 5.60E-05 2.719 1.60E-04 3.825 6.60E-04 5.367 5.70E-05 2.739 1.70E-04 3.887 6.70E-04 5.385 5.80E-05 2.758 1.80E-04 3.946 6.80E-04 5.402 5.90E-05 2.777 1.90E-04 4.003 6.90E-04 5.419

36

Pressure [Pa]


[V]

Pressure [Pa]


[V]

Pressure [Pa]



37

Pressure [Pa]


[V]

Pressure [Pa]


[V]

Pressure [Pa]


[V] 4.00E-02 9.147 7.50E-01 9.573 4.10E-02 9.155 8.00E-01 9.581 4.20E-02 9.163 8.50E-01 9.588 4.30E-02 9.171 9.00E-01 9.594 4.40E-02 9.178 9.50E-01 9.600 4.50E-02 9.185 4.60E-02 9.192 4.70E-02 9.198 4.80E-02 9.204 When HV-OFF 10.000V or more 4.90E-02 9.210 5.00E-02 9.216 5.20E-02 9.227 5.40E-02 9.237 5.60E-02 9.246 5.80E-02 9.255 6.00E-02 9.263 6.20E-02 9.271 6.40E-02 9.278 6.60E-02 9.284 6.80E-02 9.290 7.00E-02 9.296 7.20E-02 9.302 7.40E-02 9.307 7.60E-02 9.312 7.80E-02 9.317 8.00E-02 9.321 8.50E-02 9.332 9.00E-02 9.341 9.50E-02 9.349 1.00E-01 9.356 1.10E-01 9.369 1.20E-01 9.379 1.30E-01 9.388 1.40E-01 9.396 1.50E-01 9.403 1.60E-01 9.410 1.70E-01 9.415 1.80E-01 9.421 1.90E-01 9.425 2.00E-01 9.430 2.50E-01 9.450 3.00E-01 9.468 3.50E-01 9.483 4.00E-01 9.498 4.50E-01 9.511 5.00E-01 9.523 5.50E-01 9.535 6.00E-01 9.546 6.50E-01 9.556 7.00E-01 9.565

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15.2. Pressure-Measurement Value Voltage Table (Torr)

Pressure [Torr]


[V]

Pressure [Torr]


[V]

Pressure [Torr]



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Pressure

[Torr] Measurement value output

[V]

Pressure [Torr]

Measurement value output [V] Pressure [Torr]



40

Pressure [Torr]


[V]

Pressure [Torr]


[V]

Pressure [Torr]


[V] 3.00E-04 9.147 5.63E-03 9.573 3.08E-04 9.155 6.00E-03 9.581 3.15E-04 9.163 6.38E-03 9.588 3.23E-04 9.171 6.75E-03 9.594 3.30E-04 9.178 7.13E-03 9.600 3.38E-04 9.185 3.45E-04 9.192 3.53E-04 9.198 3.60E-04 9.204 When HV-OFF 10.000V or more 3.68E-04 9.210 3.75E-04 9.216 3.90E-04 9.227 4.05E-04 9.237 4.20E-04 9.246 4.35E-04 9.255 4.50E-04 9.263 4.65E-04 9.271 4.80E-04 9.278 4.95E-04 9.284 5.10E-04 9.290 5.25E-04 9.296 5.40E-04 9.302 5.55E-04 9.307 5.70E-04 9.312 5.85E-04 9.317 6.00E-04 9.321 6.38E-04 9.332 6.75E-04 9.341 7.13E-04 9.349 7.50E-04 9.356 8.25E-04 9.369 9.00E-04 9.379 9.75E-04 9.388 1.05E-03 9.396 1.13E-03 9.403 1.20E-03 9.410 1.28E-03 9.415 1.35E-03 9.421 1.43E-03 9.425 1.50E-03 9.430 1.88E-03 9.450 2.25E-03 9.468 2.63E-03 9.483 3.00E-03 9.498 3.38E-03 9.511 3.75E-03 9.523 4.13E-03 9.535 4.50E-03 9.546 4.88E-03 9.556 5.25E-03 9.565

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15.3. Related Drawings

15.3.1. Compatible Sensor Heads

GAUGE PORT

Fig. 15-1 Compatible sensor heads

Sensor head model name Mounting port diameter

C-21 15, 18 mm dia. C-23 UFC034 C-24 NW16 C-25 NW25

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Fig. 15-2 Dimensional drawing

43

other

Terminal

block

24VDC power supply

Commercially available

power supply

AC power supply

Fig. 15-3 Connection reference drawing (1)

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Fig. 15-4 Connection reference diagram (2)

Main power DC 24V

Remote I/O Recorder Output

RS485

SC1

１CH Display

ISG1

1. TERMINOLOGY2. FEATURES OF SC1 Ion Gauge3. SPECIFICATIONS AND COMPONENTS3.1. Key Specifications3.2. Standard Accessories3.3. Options3.4. Service Parts

4. NOMENCLATURE AND FUNCTIONS OF COMPONENTS4.1. Assembly4.2. Front Panel4.3. Input/Output Connector

5. INSTALLATION 5.1. Preparations5.2. Installation5.2.1. Installing the sensor head to the sensor unit5.2.2. Installing the sensor unit5.2.3. Electrical connection

6. CAUTIONS IN HANDLING7. OUTPUT SIGNALS7.1. Control Operation7.1.1. High Voltage ON/OFF [HV ON/OFF]

7.2. Output Signals7.2.1. Setpoint actuating signal [SET-1 ON/OFF][SET-2 ON/OFF]7.2.2. Discharge valid signal [Discharge OK/NG]

8. SETTING OF SETPOINT9. FUNCTIONS9.1. Setpoint [SET-1 ON/OFF] [SET-2 ON/OFF]9.1.1. Setpoint9.1.2. Setting of setpoint9.1.3. Setpoints of measuring unit and display unit

9.2. Measurement Value Output9.2.1. Measurement value voltage output form9.2.2. Measurement value outputs in each condition

10. MAINTENANCE10.1. Preparation of Tools and Others10.2. Necessary Tools and Others10.3. Necessary Equipment10.4. Removing the Sensor Unit and Sensor Head10.4.1. Removing Screws10.4.2. Removing the Sensor Head

10.5. Disassembling the Sensor Head10.5.1. Exploded View of Sensor Head10.5.2. Removing the Internal Electrode

10.6. Cleaning the Electrode in the Sensor Head10.6.1. Insulation Check of Anode10.6.2. Cleaning the Anode10.6.3. Cleaning Magnetic Poles 1 and 210.6.4. Cleaning the SpacerCleaning the main body10.6.6. Cleaning the O-ring and O-ring Groove10.6.7. Cleaning Parts

10.7. Reassembling the Sensor Head10.7.1. Reassembly10.7.2. Checking the Anode Position

10.8. Insulation Check10.8.1. When a insulation resistance tester is available at hand10.8.2. If a insulation resistance tester is not available at Hand

10.9. Leak Test10.10. Installing the Sensor Unit and Sensor Head10.11. Maintenance

11. TROUBLESHOOTING12. WARRANTY13. Certificate of Contamination14. China RoHS Declaration15. APPENDIX15.1. Pressure-Measurement Value Voltage Table (Pa)15.2. Pressure-Measurement Value Voltage Table (Torr)15.3. Related Drawings15.3.1. Compatible Sensor Heads

G-TRAN SERIES SENSOR UNIT MODEL SC1 COLD-CATHODE ION …€¦ · Use in a CVD gas atmosphere If...

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Transcript of G-TRAN SERIES SENSOR UNIT MODEL SC1 COLD-CATHODE ION …€¦ · Use in a CVD gas atmosphere If...