Future of MEMS: a Mechanical Perspective - SEMI.ORG | Corigliano... · Future of MEMS: a Mechanical...
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Future of MEMS: a Mechanical Perspective Alberto Corigliano Department of Civil and Environmental Enginering Politecnico di Milano - Italy www.mems.polimi.it
Transcript of Future of MEMS: a Mechanical Perspective - SEMI.ORG | Corigliano... · Future of MEMS: a Mechanical...
Future of MEMS:a Mechanical PerspectiveAlberto Corigliano
Department of Civil and Environmental EngineringPolitecnico di Milano - Italy
www.mems.polimi.it
Alberto Corigliano – SEMI WS -Polimi September 2014
MEMS and mechanics
• Devices: accelerometers, gyroscopes, pressure sensors, Lorentz-force magnetometers, micro-energy harvesters, …
• Multi-physics coupling: chemo- electro- thermo- magneto-…mechanical,
• Fabrication processes: CTE mismatch, thermo-mechanicalstresses, anisotropy, heterogeneity, …
• Reliability: fracture, fatigue, stiction, moisture absorption, accidental drop, eigen-stresses,…
Mechanics is the branch of science concerned withthe behavior of physical bodies when subjectedto forces or displacements, and the subsequent effectsof the bodies on their environment. (from Wikipedia)
MEM
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Alberto Corigliano – SEMI WS -Polimi September 2014
MEMS and mechanics
Idea design fabrication product
Mechanics in MEMS:from the initial idea to the final product
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Alberto Corigliano – SEMI WS -Polimi September 2014
Future of MEMS ? • Fabrication and materials: additive manufacturing, 3D and ink-jet
printing, smart materials inside MEMS, meta-materials,…
• Modelling & simulation: full and reduced order simulation, real time computing, identification and diagnosis,…
• Complete mastering of “complex” phenomena: damping sources, adhesion-stiction, fracture, fatigue, multi-physics coupling, …
• New applications: biomedical, wearable devices, flexible electronics, extremely harsh environment, IOT, IOE, pervasive sensing, metamaterials…
More than silicon
More than simulation
More than MEMS
More than linear
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Alberto Corigliano – SEMI WS -Polimi September 2014
More Ms in MEMS!
- Modelling & simulation
- Multi-physics
- Multi-scale
- Mechanics
- Materials
- Manufacturing
- …
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Alberto Corigliano – SEMI WS -Polimi September 2014
Modelling & simulation: plane resonator
V. Kaajakari, T. Mattila, A. Oja, J. Kiihamäki, H. Seppä. IEEE Electr Device Letters. 2004
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Alberto Corigliano – SEMI WS -Polimi September 2014
Total time error w.r.t. stag. gain w.r.t. Stag. (%) n° POM
S (ttot=4·10-5) 24370 - - --
S-POD (tsnap=3·10-7) 7121 8,32·10-2 -70,8 35
SD-POD (tsnap=3·10-7) 5587 7,02·10-2 -77,1 35
S-POD (tsnap=2·10-7) 4705 8,33·10-2 -80,7 38
SD-POD (tsnap=2·10-7) 3793 8,32·10-2 -84,4 38
S-POD (tsnap=1.5·10-7) 3639 7,25·10-2 -85,1 34
SD-POD (tsnap=1.5·10-7) 2826 5,86·10-2 -88,4 34
SD-POD updated 2664 9,98 10-2 -89,1 31
Multi-physics modelling: plane resonatorElectro-mechanical coupled solution: comparison of different strategies
Reduction of 90% w.r.t. reference method! A. Corigliano, M. Dossi, S. Mariani. Computers & Structures, 2013
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Alberto Corigliano – SEMI WS -Polimi September 2014
Experimental dataHu-Tonder surfaceSpherical caps
DelRio F. W. et al. (2005) Nature Materials
Multi-scale modelling: spontaneous adhesion Dry conditions: van der Waals attraction
Results at varying surface roughness
Capillary attraction, plastic strain
Results at varying relative humidity
ExperimentsStdAp - loadingStdAp - unloadingM1 - loadingM1 - unloading
R. Ardito, A. Corigliano, A. Frangi. European J. of Mechanics, 39, 144-152 (2013)
R. Ardito, A. Corigliano, A. Frangi, F. Rizzini. European J. of Mechanics A/Solids, 47, 298-308 (2014).
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Alberto Corigliano – SEMI WS -Polimi September 2014
Differential resonant micro-accelerometer
+1g
+1g
0g
0g-1g
-1g
resonator Aresonator B
A. Caspani, C. Comi, A. Corigliano, G. Langfelder, V. Zega, S. Zerbini. Eurosensors 2014.
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Alberto Corigliano – SEMI WS -Polimi September 2014
Non-linear response of the torsional resonator
A. Caspani, C. Comi, A. Corigliano, G. Langfelder, V. Zega, S. Zerbini. J. Micromech. and Microeng. 2014.
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Alberto Corigliano – SEMI WS -Polimi September 2014
A. Frangi, B. De Masi, F. Confalonieri, L. Baldasarre. Transducers and Eurosensors 2013.
Threshold shock sensor based on a bi-stablemechanism
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Alberto Corigliano – SEMI WS -Polimi September 2014
Threshold shock sensor based on a bi-stablemechanism
A. Frangi, B. De Masi, F. Confalonieri, L. Baldasarre. Transducers and Eurosensors 2013.
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Alberto Corigliano – SEMI WS -Polimi September 2014
Increase of the natural frequency
• Nonlinear Resonance
- Smaller device- High frequencies- Lower amplitudes- Wider Bandwidth- Reliability issues
• Hardening effect at high amplitudes due to stretching mode
Ultra wide bandwidth Energy Harvester
G. Gafforelli, R. Xu, A. Corigliano, S.G. Kim. J. of Physics, Conf. Series, 2013.
Optimal power generation
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Alberto Corigliano – SEMI WS -Polimi September 2014
• Mesoscale Prototype
• PZT patches with microfybers and interdigitated electrodes
• Lead central mass (16.5 grams)• 0.3 mm thick beam
• Open circuit analyses at various input acceleration levels
High Mechanical damping due to: Big devices, Glued PZT, Sliding clampingGood agreement between model and experimental data
Ultra wide bandwidth Energy Harvester
G. Gafforelli, R. Xu, A. Corigliano, S.G. Kim. Energy Harvesting and Systems. In press (2014).
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Alberto Corigliano – SEMI WS -Polimi September 2014
Meta-materials
Artificial materials engineered to have properties that may not befound in nature. …. (From Wikipedia)Design material properties at will
Electromagnetic, acoustic, mechanical … metamaterials
Negative refractive indexNegative electric and magnetic permettivityNegative Poisson ratioNegative compressibility …
Other strange properties
MEMS based meta-materials&
Meta-materials in MEMS
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Alberto Corigliano – SEMI WS -Polimi September 2014
Bi-material Cantilever Based Metamaterials
Hu Tao, A. C. Strikwerda, K. Fan, W. J. Padilla, X. Zhang, and R. D. Averitt.Phys. Rev. Lett. 103, 147401 – 2009
Reconfigurable anisotropic metamaterials at terahertz frequencies, artificial“atoms” reorient within unit cells in response to an external stimulus.Planar arrays of split ring resonators on bimaterial cantilevers designed to bendout of plane in response to a thermal stimulus.Tunability of the electric and magnetic response as the split ring resonatorsreorient within their unit cells.Adaptive meta-materials offer significant potential to realize novelelectromagnetic functionality ranging from thermal detection to reconfigurablecloaks or absorbers.
Au/ Silicon nitride cantilever array
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Alberto Corigliano – SEMI WS -Polimi September 2014
Orthotropic materials for negative or zero compressibility
Y. Min Xie, X. Yang, J. Shen, X. Yan, A. Ghaedizadeh, J. Rong, X. Huang, S. Zhou. I. J. Solids Structures, 2014
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Alberto Corigliano – SEMI WS -Polimi September 2014
Mohammad Vaezi & Hermann Seitz & Shoufeng Yang. Int J Adv Manuf Technol (2013) 67:1721–1754
3D micro additive manufacturing18
Alberto Corigliano – SEMI WS -Polimi September 2014
Gyroscope produced by Electrochemical FABrication (EFAB) process
Mohammad Vaezi & Hermann Seitz & Shoufeng Yang. Int J Adv Manuf Technol (2013) 67:1721–1754
3D microparts produced with Micro Laser Sintering (MLS) process
3D photonic crystal produced by 2 Photon Polymerization 2PP process
3D micro additive manufacturing19
Alberto Corigliano – SEMI WS -Polimi September 2014
Printing MEMS
Goal:enabling printing of 3D silicon micro- and nano- structuresdirectly from computer-generated 3D drawings
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Alberto Corigliano – SEMI WS -Polimi September 2014
Closing remarks
More Ms in MEMS!
Mechanical and other non-linearities: not only to avoid!
New Materials and Meta-materials
New Micro-fabrication technologies
New @ Polimi!
Polifab: micro and nano technology facility
MEMS&3D lab: laboratory for MEMS and 3D fabrication
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Alberto Corigliano – SEMI WS -Polimi September 2014
THANK YOU FOR YOUR ATTENTION!
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