Fully Integrated Arrays of Digital Fully Integrated Arrays of Digital...

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Dr. York Haemisch Philips Digital Photon Counting Philips Corporate Technologies © Philips Koninklijke Electronics B.V., 2011 Fully Integrated Arrays of Digital Fully Integrated Arrays of Digital SiPMs SiPMs- the Way towards Industrial Application the Way towards Industrial Application the Way towards Industrial Application the Way towards Industrial Application

Transcript of Fully Integrated Arrays of Digital Fully Integrated Arrays of Digital...

Page 1: Fully Integrated Arrays of Digital Fully Integrated Arrays of Digital …muon.npl.washington.edu/exp/NewG2/private/CaloDesign... · 2011. 11. 18. · Television/Monitor Light Detection

Dr. York HaemischPhilips Digital Photon CountingPhilips Corporate Technologies© Philips Koninklijke Electronics B.V., 2011

Fully Integrated Arrays of Digital Fully Integrated Arrays of Digital SiPMsSiPMs--the Way towards Industrial Applicationthe Way towards Industrial Applicationthe Way towards Industrial Applicationthe Way towards Industrial Application

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Philips Digital Photon Counting

Solid State, Digitization and Integration Always Wi n

Transistor Television Photography Telephony

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011 2

X-Ray imaging Next: Light Detection

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Philips Digital Photon Counting

Disruptive Technology: what does it change?

Television/Monitor Light Detection

• form factor (geometry, size, shape)• system design (external & internal)• power consumption• heat dissipation• depth of integration• safety, durability, stability

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011 3

• safety, durability, stability• performance/cost ratio• performance/weight ratio• distribution/ NEW markets• WAY of USE

• internet on TV• wall hanging• TV on mobilephones

• displays everywhere

• high performance ToF• PET/MR• intra-operative PET • organ specific PET• 3D imaging

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Philips Digital Photon Counting

Truly Disruptive Technology…… • is SCALABLE

• allows simpler designs

• consumes less power

• dissipates less heat

• allows higher depth of integration(reduces no. of components)

• is safe, robust, durable & stable

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011 4

• is safe, robust, durable & stable

• has better- performance/cost ratio

- performance/weight ratio

• allows wider distribution/use

• opens NEW markets/applications

• changes the way we USE technology

All factors need to be considered

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Philips Digital Photon Counting

(Not only) for fast scintillators a fast reacting light detector is desired

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011

Graphs courtesy of Spanoudaki & Levin, Stanford, in Sensors, 10, 2010

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Philips Digital Photon Counting

Motivation: A better detector for Positron - Emission -Tomography (PET) with Time-of-flight (TOF)

Non- ToF ToF (500 ps)

5 min.

3 min.

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011

S. Surti , J. Karp, et al., IEEE TMI, 2006, vol. 25, no5, pp. 529-538

2 min.

1 min.

Acq

uisi

tion

time

3min

1m

in

CRT >1ns 500 ps 250 ps 100 ps6

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Philips Digital Photon Counting

The optimal detector for Positron -Emission -Tomography (PET) provides TOF and DOI detection

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011

Graphics courtesy of Spanoudaki & Levin, Stanford,in: Phys. Med. Biol. (56) 2011

TOF – time-of-flight

DOI – depth ofinteraction

7

High sensitivity � long crystalsHigh spatial resolution � small cross section

High aspect ratio � needs DOI

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Philips Digital Photon Counting

PET with TOF and DOI implemented with PMT’s

Uses 4-layer scintillator���� expensive !

t1

t2

t

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011

Nakazawa et.al.,in: Nuclear ScienceSymposiumConference Record (NSS/MIC), 2010 IEEE

CRT = 442 ps FWHM

t3

t4

8

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Philips Digital Photon Counting

Scintillation light detectors

Type PMT APD anal. SiPM dSiPM

MR compliance No Yes Yes Yes

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011

ToF capability limited No Yes Yes

Operational stability medium low low high

Amplification High (106) Low (102-3) High (106) meaningless

Compactness bulky compact very compact very compact

Power/Readout HV, ASIC,analog

HV, ASIC, analog

LV, ASIC,analog

LV, simple,digital

Scalability yes difficult ???? yes

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Philips Digital Photon Counting

SiPM (SPAD): from analog to digital

Ext

. Vol

tage

Cur

rent

VBD

Meta-stable

Breakdown

Quen-

analog digital

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011

“Therefore, while the APD is a linear amplifier for the input optical signal with limited gain, the SPAD is a trigger dev ice sothe gain concept is meaningless .” (source: Wikipedia)

Cur

rent

Time

Meta-stable Quen-ching

03V

TRG

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Philips Digital Photon Counting

Digital Photon Counting: Concept

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011

“Therefore, while the APD is a linear amplifier for the input optical signal with limited gain, the SPAD is a trigger dev ice sothe gain concept is meaningless .” (source: Wikipedia)

• no. of photons• time stamp(s)

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Philips Digital Photon Counting

Digital Photon Counting: Realization

analog SiPM

TDC andphoton counter

Digital Cells

digital SiPM (dSiPM)

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011

www.hamamatsu.com

Summing all cell outputs leads to an analog output signal and limited performance

Digital output of• Number of photons• Time-stamp

Integrated readout electronics is the key element to superior detector performance

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Philips Digital Photon Counting

Analog vs. Digital SiPM: Layout

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011 13

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Philips Digital Photon Counting

PDPC dSiPM: Architecture and Pixel Diagram

Single pixel

Die (2x2 pixel)

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Die (2x2 pixel)

(smart) tile (8x8 pixel)

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Philips Digital Photon Counting

Highly integrated arrays of dSiPMsFPGA• Clock distribution• Data collection/concentration• TDC linearization• Saturation correction• Skew correction

Flash• FPGA firmware• Configuration

DLS-3200-22-44DLS-6400-22-44

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011

200 MHz ref. clockFPGA

Flash Memory

Detector array8 x 8 dSiPMs

Power & Bias

Serial configurationinterface

Serial Dataoutput (x2)

Temp. sensor

• Inhibit memory maps

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Philips Digital Photon Counting

DLS 3200-22• 3200 cells per pixel• 59 x 64 µm cell size• 78% fill-factor

DLS 6400-22• 6400 cells per pixel• 59 x 32 µm cell size• 54% fill-factor

PDPC dSiPM versions

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011

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Philips Digital Photon Counting

Measurement setup (1&2)

dSiPM array dSiPM array

Clock,Config,Data

Clock,Config,

Data

electronic triggerpsec-laser

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011

USB connection

DataData

PC

17

FPGA board

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Philips Digital Photon Counting

Intrinsic Timing Resolution

-100 -80 -60 -40 -20 0 20 40 60 80 1000

10000

20000

30000

40000

50000

60000

70000

Cou

nts

(arb

. u.)

(44 ± 1) ps FWHM

-100 -80 -60 -40 -20 0 20 40 60 80 1000

10000

20000

30000

40000

50000

60000

70000

80000

Cou

nts

(arb

. u.)

DLS-6400-22-44 DLS-3200-22-44

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 201118

Timestamp difference (ps)

44 ps FWHM

-120 -80 -40 0 40 80 1200

10000

20000

30000

Cou

nts

Timestamp difference (ps)

59 ps FWHM

Timestamp difference (ps)

55 ps FWHM

-200 -100 0 100 2000

20

40

60

80

100

120

140

160

Cou

nts

(k)

Timestamp difference (ps)

104 ps FWHM

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Philips Digital Photon Counting

Measurement setup (3)LYSO scintillator array

dSiPM array

22Na

dSiPM array

Clock,Config,Data

Clock,Config,

Data

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011

USB connection

DataData

PC

FPGA board

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Philips Digital Photon Counting

Scintillator readout – single die, short xtalTiming resolution

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011

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Philips Digital Photon Counting

Scintillator readout – full array (tile), long xtalTiming resolution

• LYSO array, 8 x 8 crystals, 4 mm x 4 mm pitch, 22 mm length• DLS-3200-22-44• Measurement taken at +10°C

Timing Resoution [ps] 0

Timing resolution per pixel Summed histogram over all pixels

70000

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011 21

Position x [mm])

Pos

ition

y [

mm

])

0 5 10 15 20 25 30

5

10

15

20

25

30 255

260

265

270

275

280

285

290

295

300

305

-600 -400 -200 0 200 400 6000

10000

20000

30000

40000

50000

60000

Cou

nts

Timestamp difference (ps)

286 ps FWHM

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Philips Digital Photon Counting

Scintillator readoutEnergy resolution

• LYSO array, 8 x 8 crystals, 4 mm x 4 mm pitch, 22 mm length• DLS-3200-22-44• Measurement taken at +10°C

Energy resolution per pixel Summed histogram over all 64 pixelsEnergy Resolution [%]

0 20

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011 22

Position y [mm])

0 5 10 15 20 25 30

5

10

15

20

25

309.8

10

10.2

10.4

10.6

10.8

11

11.2

0 200 400 600 8000

5

10

15

Cou

nts

[k]

Energy [keV]

10.4%

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Philips Digital Photon Counting

Digitization results in Significantly ReducedTemperature Sensitivity

0.33%/KWithout bias correction !

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011

• 24 ps full-width at half-maximum timing resolution of ps-laser• Photopeak changes 0.33% per degree C due to changing PDE(values of analog SiPM’s are ranging from 2-8%)

• Time changes 15.3 ps per degree C (TDC + trigger network drift)• PDE drift can be easily compensated by adapting the bias voltage• TDC offset can be periodically re-calibrated using the SYNC input

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Philips Digital Photon Counting

Optical Crosstalk

DLS-6400-22 DLS-3200-22

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011 2424

Pixel Logic, TDCand photon counter

• Approx. 8% optical crosstalk • Approx. 18% optical crosstalk

→ Has to be taken into account in saturation correction

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Philips Digital Photon Counting

Dark Count Rate DLS 3200 -22

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011 2525

Pixel Logic, TDCand photon counter

• Dark count rate at 20°C, 3.3V excess voltage

• Average dark count rate ~ 550cps per SPAD (150 kHz/mm2)

• Scales with SPAD sensitive area

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Philips Digital Photon Counting

Spectral Sensitivity DLS -6400-22-44

Effective PDE:

LYSO(Ce) 25.9%CsI(Na) 23.7%CsI(Tl) 20.5%NaI(Tl) 24.2%

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011

NaI(Tl) 24.2%BGO 24.2%LaBr3(Ce) 9.6%

• Peak PDE ~30% at 430 nm and 3.3 V excess voltage• Conservative diode design (54 % fill-factor )• No anti reflection coating used

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Philips Digital Photon Counting

PDPC dSiPM: Linearity only affected by Saturation ���� Correction Possible

( )NkNp −⋅−= 1ln

N: active cells (6400)k: triggered cellsp: # of photons

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011

p: # of photons

• Experiments taken at room temperature

• No temperature stabilization

• Correction not possible on analog SiPMs

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Philips Digital Photon Counting

PDPC dSiPM: Dark Count Mapping/TuningWorst cells are switched off

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011

• Dark counts per second at 20°C and 3.3V excess vol tage

• ~ 95% good diodes (dark count rate close to average)

• Typical dark count rate at 20°C and 3.3V excess vo ltage: ~150Hz / diode

• Dark count rate drops to ~1-2Hz per diode at -40°C

• Cells with high DC can be switched off individually ���� DC control

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Philips Digital Photon Counting

PDPC dSiPM: slow scan imaging mode

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Philips Digital Photon Counting

PDPC dSiPM: Small Crystal ReadoutLYSO array, 30 x 30 crystals, 1 mm x 1 mm pitch, 10 mm length

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011 30

Data analysis by P. Düppenbecker, Philips Research

Log scale

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Philips Digital Photon Counting

Highres Monolithic Crystal Readout

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011 31

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Philips Digital Photon Counting

Highres Monolithic Crystal Readout

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011 32

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Philips Digital Photon Counting

Highres Monolithic Crystal Readout

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Philips Digital Photon Counting

PDPC dSiPM: (PET) Detector Moduleadvanced integration

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011 34

• Modular design incl. 2 x 2 tiles

• Integrated cooling

• Module PCB for data concentration,processing & corrections

• List mode or raw data output

• full ring under construction

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Philips Digital Photon Counting

PDPC: Integrated sensors/detectors workflow• Sensor design (PDPC)

• Silicon processing (180 nm fab, 38 masks, > 500 ste ps)

• Die testing (PDPC)

• Tile manufacturing (packaging experts)

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011 3535

• Tile manufacturing (packaging experts)

• Tile testing (PDPC)

• Scintillator attachment (packaging experts)

• Module assembly (packaging experts)

• Final module testing (PDPC), overall system design

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Philips Digital Photon Counting

Scintillation light detectors

Type PMT APD anal. SiPM dSiPM

MR compliance No Yes Yes Yes

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011

ToF capability limited No Yes Yes

Operational stability medium low low high

Amplification High (106) Low (102-3) High (106) meaningless

Compactness bulky compact very compact very compact

Power/Readout HV, ASIC,analog

HV, ASIC, analog

LV, ASIC,analog

LV, simple,digital

Scalability yes difficult ???? yes

36

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Philips Digital Photon Counting

A Digital Light Sensor will beuseful beyond PET

ClinicalPET

Pre-clinical

PET/MR

Analytical Instrumentation

High Energy Physics

DNA Sequencing

Microscopy

Microarrays

?

LoC

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011

?

?

PETimaging

clinicalPET&SPECT

ClinicalSPECTimaging

SpectralCT

Low doseCT

Night Vision / Surveillance / Security

AntineutrinoDetection

Particle Accelerators

Automotive Night Vision

LIDAR

Facility/Homeland

Security

Cherenkov Detectors

Intra-operativeprobes

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Philips Digital Photon Counting

Your entry to exploring the technology…

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011

PDPC-TEK (Technology Evaluation Kit)Launched Q2/11-available now!

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Philips Digital Photon Counting

PDPC dSiPM @ NSS-MIC

(Mo., 17:00) N4-3, Highly Integrated Arrays of Digital SiPMs with Simplified Readout InterfaceC. Degenhardt, B. Zwaans, O. Muelhens, R. de Gruyter, T. FrachPhilips Digital Photon Counting, Aachen, Germany

MIC15.S-83, First Performance Measurements of Monolithic Scintillators Coupled to Digital SiPM Arrays for TOF-PETG. J. van der Lei, H. T. van Dam, S. Seifert, D. R. SchaartRadiation detection and Medical Imaging, Delft University of Technology, Delft, Netherlands

MIC15.S-137, The Digital SiPM: Initial Evaluation of a New Photosensor for Time-of-Flight PET

(Mo., 16:30) N4-1, Mean and Variance of the Response of Digital SiPM-Based Scintillation Detectors: Model and MeasurementsH. T. van Dam, S. Seifert, G. J. van der Lei, D. R. SchaartDelft University of Technology, Delft, The Netherlands

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011

MIC15.S-137, The Digital SiPM: Initial Evaluation of a New Photosensor for Time-of-Flight PETD. R. Schaart, H. T. van Dam, G. J. van der Lei, S. SeifertRadiation Detection & Medical Imaging, Delft University of Technology, Delft, The Netherlands

NP5.S-154, Timing Methods for Monolithic Scintillator Detectors Based on Digital SiPM ArraysH. T. van Dam, S. Seifert, G. J. van der Lei, D. R. SchaartDelft University of Technology, Delft, The Netherlands

(Tue., 15:00) J1-3, Investigation of a Sub-Millimeter Resolution PET Detector with Depth of Interaction Encoding Using Digital SiPM Single Sided ReadoutP. M. Dueppenbecker1, S. Lodomez1, P. K. Marsden2, V. Schulz1,3

1Philips Research Europe, Aachen, DE, 2King's College London, London, UK, 3RWTH Aachen University, Aachen, DE

(Wed., 17:15) MIC5-4, A Method for Measuring the Sub-Pixel Light Distribution of Scintillation Detectors with Digital SiPMsP. M. Dueppenbecker1, R. Haagen1, S. Lodomez1, P. K. Marsden2, V. Schulz1,3

1Philips Research Europe, Aachen, DE, 2King's College London, London, UK , 3RWTH Aachen University, Aachen, DE

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Philips Digital Photon Counting

PDPC dSiPM @ NSS-MIC

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011

Thursday, October 27th, 7 p.m. @ Instituto Valencia no de Arte Moderno

C. Degenhardt (Philips): Advanced Integration in Digital Light Sensors: Arra ys and Modules

R. Schulze (Philips):The PDPC Technology Evaluation Kit (TEK): Your Entr ance toDigital Photon Counting

Dennis R. Schaart (TU Delft): Initial Experience with Digital SiPMs for Time-of-F light PET

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Philips Digital Photon Counting

YH IIEEE NSS-MIC 2011, Valencia ©Philips Digital Photon Counting, October 2011

www.philips.com/digitalphotoncounting© Philips Koninklijke Electronics B.V., 2011