1. An Ultra-Thin Sensor for Measuring Contact StressLLNL-PRES-637035This work was performed under the auspices of theU.S. Department of Energy by Lawrence LivermoreNational Laboratory under contract DE-AC52-07NA27344.Lawrence Livermore National Security, LLCJack Kotovsky, Ph.D.

2. Automotive Brake Pads Gaskets Impact Studies In-situ Tire Monitoring Medical Cartilage Mechanics Podiatry Bedding/Prosthetics (Pressure Sores) Clinical Tumor Monitoring Industrial Composite Layups/Lamination Molding Presses Gaskets and Bolted Joints Roller Systems RoboticsAuthor-9/12/2014-2Lawrence Livermore National Laboratory LLNL-PRES-637035 3. Commercial Sensors Are InadequateFunctions Needed: Fuji Pressensor Film Tekscan Sensor LLNL MEMS SensorRepeated Measurements NoAuthor-9/12/2014-3Lawrence Livermore National Laboratory LLNL-PRES-637035Yes(~100 load cycles)YesDynamic Measurements NoYes(~100 load cycles, limitedbandwidth)Yes, bandwidth ~200kHzAccuracy 10%+/- 3% (immediatelyfollowing calibration)+/- 3%Hysteresis N.A. 4.5% 2%Minimum Thickness (limitsaccuracy in application)220 m (0.009) 200 m (0.008) 100 m (0.004) 4. The sensor measures contact stress (squeezing force) between twosurfaces The measurement is: Accurate Repeatable for long-term (embedded) use Static or dynamic (200 kHz+) This technology was developed to address a measurement gap Measures real-time interface loads accurately andreproducibly Measures dynamic interface loads Can be embedded in a product Withstands harsh environments (-40 C to 70 C, severevibration, persistent use)Lawrence Livermore National Laboratory LLNL-PRES-6370354MEMS SensorBond PadDiaphragmDopant Implant (Piezoresistors)Contact Windows MetallizationDiaphragm Etch Street Etch 5. This technology conquers a barrier in silicon fabrication andpackaging LLNL IP: thin MEMS design and paper-thin packaging The device is similar to successful pressure sensors but is paperthin A full Wheatstone bridge provides thermal compensation Sensor measures temperature and/or stress Piezoresistive single-crystal silicon (large signal) Silicon is perfectly elastic No calibration loss High bandwidth Load sensitivity tuned by diaphragm dimensioningLawrence Livermore National Laboratory LLNL-PRES-637035LLNL Sensor Demonstrates Excellent5Load Performance 6. 900 Independent silicon device islands on860 m centers220mLawrence Livermore National Laboratory LLNL-PRES-637035 6 7. Application Description Target Customers Current Practice#1 Real-time, Embedded, Nip Roller pinch control Roller-system manufacturers manual adjustment of pinch =Lawrence Livermore National Laboratory LLNL-PRES-637035production pauses#2 Robotic manipulator grip force control Robotics companies Total force measurement misseslocal interface pressure#3 Automotive tire molding: Real-time pressure adjustment Tire manufacturers Models and empirical data#4 Cartilage load sensing for orthopedic implants and procedures Orthopedic companies Laboratory sensors only#5 Embedded shoe sensor for wear detection and injurypreventionShoe companies No sensor for embedded shoemonitoring#6 Hospital bed monitoring for the prevention of bed sores Medical device companies No sensor for embedded product use#7 Gasket/seal stress sensing Industrial and Automotive No sensor for real-time interfaceload measurement#8 Bullet Proof vest/helmet design for the prevention of blastinjury or impact loading in sportsMilitary and civilian helmet andarmor manufacturersNo dynamic interface load sensorexists7 8. The technology is available for commercialization and is production ready The sensor is in production within the Department of Energy and continuesto find new internal applications and customers Sensor critical to LLNL programmatic needs >10 year investment No research is necessary to bring the single sensor to marketLawrence Livermore National Laboratory LLNL-PRES-6370358Wmpoweruser.com 9. Charity Follettfollett2@llnl.govLawrence Livermore National Laboratory LLNL-PRES-637035 9